A coaxial alignment device and coaxial alignment method

Abstract

This invention discloses a coaxial alignment device and method, comprising a bearing, an adjusting frame, a display plate to be coaxially aligned, a microscopic system, and a platform. The outer ring of the bearing is connected to the platform, and the inner ring of the bearing is connected to the adjusting frame, with the adjusting frame positioned above the bearing. A center mark is provided at the center of the display plate, which is connected to the center of the adjusting frame. The microscopic system is mounted above the adjusting frame and is used to observe the movement trajectory of the center mark on the display plate within the adjusting frame. This invention's coaxial alignment device and method can achieve high precision in coaxial alignment while significantly reducing the workload of calibration personnel, lowering the complexity and cost of the overall mechanical structure, reducing its susceptibility to external influences, and improving stability.

Description

Technical Field

[0001] This invention relates to the field of optical axis alignment technology, specifically a coaxial alignment device and a coaxial alignment method. Background Technology

[0002] Coaxial alignment refers to the process of aligning the central axes of two or more components to perfect coincidence in optical, mechanical, or other technical systems. This process is crucial for ensuring system performance. Coaxial alignment provides high-precision alignment solutions for various applications such as photolithography in semiconductor manufacturing, laser communication, precision mechanical assembly, and optical systems. A complete coaxial alignment system typically relies on a sophisticated measurement and control system, which includes optical sensors, position encoders, servo motors, and computer-controlled mechanical stages to achieve and maintain the alignment. To achieve the required accuracy, these systems often require complex designs and precise calibration procedures. Therefore, high-precision coaxial alignment systems are often expensive and complex, and even during prolonged operation, slight displacements in the mechanical structure can affect the alignment. Summary of the Invention

[0003] The technical problem to be solved by the present invention is to provide a coaxial alignment device and a coaxial alignment method to address the shortcomings of the prior art. The coaxial alignment device and the coaxial alignment method can meet the high precision of coaxial alignment, while greatly reducing the workload of the adjustment personnel, reducing the complexity and cost of the overall mechanical structure, reducing its susceptibility to external influences, and improving stability.

[0004] To achieve the above-mentioned technical objectives, the technical solution adopted by the present invention is as follows:

[0005] A coaxial alignment device includes a bearing, an adjustment frame, a display plate to be coaxially aligned, a microscope system, and a platform;

[0006] The outer ring of the bearing is connected to the platform, the inner ring of the bearing is connected to the adjusting frame, and the adjusting frame is located above the bearing.

[0007] The display panel has a center mark at its center and is connected to the center of the adjustment frame;

[0008] The microscope system is mounted above the adjustment frame and is used to observe the movement trajectory of the central marker on the display panel inside the adjustment frame.

[0009] As a further improvement of the present invention, there are multiple adjustable frames and multiple display panels to be coaxially aligned, with a display panel connected to the center of each adjustable frame, and the multiple adjustable frames are connected sequentially from bottom to top.

[0010] As a further improvement of the present invention, there are two adjustable frames, referred to as adjustable frame one and adjustable frame two; there are two display plates, referred to as display plate one and display plate two; display plate one is fixedly connected to the center of plate base one, and plate base one is threadedly connected to the center hole of adjustable frame one; display plate two is fixedly connected to the center of plate base two, and plate base two is threadedly connected to the center hole of adjustable frame two; the inner ring of the bearing is connected to the connecting plate, the connecting plate is connected to adjustable frame one through connecting plate one, and adjustable frame two is connected to connecting plate one through connecting plate two; adjustable frame one is located above the bearing, and adjustable frame two is located above adjustable frame one.

[0011] As a further improved technical solution of the present invention, both the first display panel and the second display panel are bright field 90° crosshair differentiation plates, and both the first plate base and the second plate base are differentiation plate bases.

[0012] The center of the differentiation plate holder has a through hole, and the bottom has an annular groove for placing the bright field 90° crosshair differentiation plate. The center of the annular groove is the center of the through hole. The bright field 90° crosshair differentiation plate is fixedly connected to the annular groove with silicone.

[0013] As a further improved technical solution of the present invention, the second connecting plate is connected to the Z-axis guide rail platform, and the second adjusting frame is connected to the slider in the Z-axis guide rail platform.

[0014] As a further improved technical solution of the present invention, the platform adopts an XYZ three-axis cross guide rail type manual displacement platform, the bottom of the platform is connected to the air-floating platform through a base plate, the adjusting frame adopts a four-dimensional adjusting frame, the microscopy system adopts a continuous variable magnification microscopy system, and the bearing adopts a cross roller bearing.

[0015] As a further improved technical solution of the present invention, the outer ring of the bearing is connected to the platform by a bearing fixing plate and bolts, the inner ring of the bearing is threaded to the connecting plate, the bottom of the first connecting plate is bolted to the connecting plate, the top of the first connecting plate is bolted to the first adjusting frame, the bottom of the second connecting plate is bolted to the Z-axis guide rail platform, and the second adjusting frame is bolted to the slider in the Z-axis guide rail platform.

[0016] To achieve the above-mentioned technical objectives, another technical solution adopted by the present invention is as follows:

[0017] A coaxial alignment method includes the following steps:

[0018] Step 1: Fix the display plate with the center mark one into the center hole of the adjustment frame one, and fix the display plate with the center mark two into the center hole of the adjustment frame two.

[0019] Step 2: Construct the microscope system above;

[0020] Step 3: Build a platform below the microscope system, connect the outer ring of the bearing to the platform, connect the inner ring of the bearing to the adjustment frame one, and position the adjustment frame one above the bearing.

[0021] Step 4: Open the camera software in the microscope system, adjust the distance between the microscope system and the display plate to find the best imaging position of the display plate in the camera software, adjust the x and y axis directions on the lens holder, and then move the center mark of the display plate to the center of the camera's target surface.

[0022] Step 5: Rotate the inner ring of the bearing and observe the movement trajectory of the center mark of display panel one through camera software. The center mark of display panel one rotates in a regular circle, and the center of the circle is recorded as the fixed point.

[0023] Step 6: Continue to rotate the inner ring of the bearing, while adjusting the x and y axes on the first frame so that the center mark of the first display panel moves closer to the fixed point.

[0024] Step 7: Use the inner ring of the bearing to rotate display panel 1 360°, and uniformly capture ten images of display panel 1 within 360°.

[0025] Step 8: Extract features from the ten images captured by the camera software, calculate the coordinates of the center marker of display panel one, obtain the motion trajectory deduction of the center marker of display panel one, and calculate the radius of the motion trajectory of the center marker moving around the fixed point.

[0026] Step 9: Repeat steps 6-8 until the radius of the center marker motion trajectory of display panel one is less than the preset value, then proceed to step 10;

[0027] Step 10: Connect the second connecting plate to the first connecting plate, connect the second connecting plate to the second adjusting frame, and position the second adjusting frame above the first adjusting frame, ensuring that the second adjusting frame and the first adjusting frame are set parallel to each other;

[0028] Step 11: Adjust the distance between the microscope system and the second display plate to find the best imaging position of the second display plate in the camera software. Adjust the x and y axis directions on the second adjustment frame and move the center mark of the second display plate to the center of the camera's target surface.

[0029] Step 12: Rotate the inner ring of the bearing and observe the movement trajectory of the center mark on display board two through camera software. The center mark on display board two rotates in a regular circle, and the center of the circle is recorded as the fixed point.

[0030] Step 13: Continue to rotate the inner ring of the bearing, while adjusting the x and y axes on the second frame so that the center mark of the second display panel moves closer to the fixed point.

[0031] Step 14: Use the inner ring of the bearing to rotate the display panel 2 360°, and uniformly capture ten images of the display panel 2 within the 360° range;

[0032] Step 15: Extract features from the ten images captured by the camera software, calculate the coordinates of the center marker of display panel two, obtain the motion trajectory deduction of the center marker of display panel two, and calculate the radius of the motion trajectory of the center marker moving around the fixed point.

[0033] Step 16: Repeat steps 13-15 until the radius of the center marker motion trajectory of display panel two is less than the preset value, thus completing the coaxial alignment of display panel one and display panel two.

[0034] As a further improved technical solution of the present invention, both the first and second display plates are bright field 90° crosshair dividing plates, both the first and second adjustment frames are four-dimensional adjustment frames, and the microscope system is a continuous zoom microscope system.

[0035] Step 1 specifically involves:

[0036] A bright field 90° crosshair divider is connected to the center of a divider holder, which is connected to the center hole of the adjustment frame.

[0037] Connect another bright field 90° crosshair divider plate to the center of another divider plate holder, which is connected to the center hole of the adjustment frame two;

[0038] Step 3 specifically involves:

[0039] A manual displacement platform with XYZ three-axis cross rails is built below the continuous zoom microscope system. The outer ring of the bearing is connected to the manual displacement platform with XYZ three-axis cross rails through the bearing fixing plate. The inner ring of the bearing is connected to the connecting plate. The connecting plate is connected to the adjusting lens frame one through the connecting plate one. The adjusting lens frame one is located above the bearing.

[0040] Step 4 specifically involves:

[0041] Open the camera software in the continuous zoom microscope system, adjust the distance between the continuous zoom microscope system and the bright field 90° crosshair divider plate in the first adjustment frame to find the best imaging position of the bright field 90° crosshair divider plate in the camera software, adjust the x and y axis directions on the first adjustment frame, and then move the center of the crosshair mark of the bright field 90° crosshair divider plate to the center of the camera's target surface.

[0042] Step 5 specifically involves:

[0043] Rotate the inner ring of the bearing and observe the movement trajectory of the crosshair on the 90° bright field crosshair dividing plate of the adjustment frame through camera software. The center of the crosshair rotates in a regular circle, and the center of the circle is recorded as the fixed point.

[0044] Rotate the inner ring of the bearing and adjust the x and y axes on the first frame of the eyeglasses so that the center of the cross mark on the bright field 90° crosshair dividing plate moves closer to the fixed point.

[0045] Using the magnification function of the continuous zoom microscope system, the distance between the continuous zoom microscope system and the bright field 90° crosshair divider plate in the first adjustment frame is adjusted again to find the best imaging position of the bright field 90° crosshair divider plate in the camera software. At this time, the image in the camera target surface becomes larger. Repeatedly rotate the inner ring of the bearing and adjust the x and y axis directions on the first adjustment frame so that the center of the crosshair mark of the bright field 90° crosshair divider plate moves closer to the fixed point.

[0046] Step 6 specifically involves:

[0047] Continue rotating the inner ring of the bearing, while adjusting the x and y axes on the first frame, so that the center of the cross mark on the bright field 90° crosshair dividing plate moves closer to the fixed point.

[0048] Step 7 specifically involves:

[0049] Using the inner ring of the bearing, rotate the bright field 90° crosshair divider plate in the first adjustment frame 360°, and uniformly capture ten images of the bright field 90° crosshair divider plate within 360°.

[0050] Step 8 specifically involves:

[0051] Feature extraction is performed on ten images captured by camera software. The coordinates of the center of the cross mark of the bright field 90° crosshair divider in the image are calculated. The motion trajectory of the center of the cross mark of the bright field 90° crosshair divider is deduced, and the radius of the motion trajectory of the center point moving around the fixed point is calculated.

[0052] Step 9 specifically involves:

[0053] Repeat steps 6-8 until the radius of the center motion trajectory of the cross mark of the bright field 90° cross in the image is less than the preset value, then proceed to step 10.

[0054] Step 11 specifically involves:

[0055] Adjust the distance between the continuous zoom microscope system and the bright field 90° crosshair divider in the second adjustment frame to find the optimal imaging position of the bright field 90° crosshair divider in the camera software. Adjust the x and y axis directions on the second adjustment frame to move the center of the crosshair mark of the bright field 90° crosshair divider to the center of the camera's target surface.

[0056] Step 12 specifically involves:

[0057] Rotate the inner ring of the bearing and observe the movement trajectory of the crosshair on the 90° bright field crosshair dividing plate in the second frame of the adjustable lens through camera software. The center of the crosshair rotates in a regular circle, and the center of this circle is recorded as the fixed point.

[0058] Rotate the inner ring of the bearing and adjust the x and y axes on the second frame so that the center of the cross mark on the bright field 90° crosshair dividing plate moves closer to the fixed point.

[0059] Using the magnification function of the continuous zoom microscope system, the distance between the continuous zoom microscope system and the bright field 90° crosshair divider plate in the second adjustment frame is adjusted again to find the best imaging position of the bright field 90° crosshair divider plate in the camera software. At this time, the image in the camera target surface becomes larger. Repeatedly rotate the inner ring of the bearing and adjust the x and y axis directions on the second adjustment frame so that the center of the crosshair mark of the bright field 90° crosshair divider plate moves closer to the fixed point.

[0060] Step 13 specifically involves:

[0061] Continue rotating the inner ring of the bearing, while adjusting the x and y axes on the second frame, so that the center of the cross mark on the bright field 90° crosshair dividing plate moves closer to the fixed point.

[0062] Step 14 specifically involves:

[0063] Using the inner ring of the bearing, rotate the bright field 90° crosshair divider plate in the second frame of the lens by 360°, and uniformly capture ten images of the bright field 90° crosshair divider plate within 360°.

[0064] Step 15 specifically involves:

[0065] Feature extraction is performed on ten images captured by camera software. The coordinates of the center of the cross mark of the bright field 90° crosshair divider in the image are calculated. The motion trajectory of the center of the cross mark of the bright field 90° crosshair divider is deduced, and the radius of the motion trajectory of the center point moving around the fixed point is calculated.

[0066] Step 16 specifically involves:

[0067] Repeat steps 13-15 until the radius of the center movement trajectory of the crosshair of the bright field 90° crosshair divider in the image is less than the preset value, thus completing the coaxial alignment of the two bright field 90° crosshair dividers.

[0068] The beneficial effects of this invention are as follows:

[0069] To solve the above problems, this invention proposes a coaxial alignment device for observing bearing rotation using a microscopic system. The core of this technology lies in using a camera with small pixels to capture the bearing center, while simultaneously adjusting it with a microcomputer for precise adjustment.

[0070] When using this bearing coaxial alignment device, the bright-field 90° crosshair dividing plate fixed at the center of the four-dimensional precision frame can be observed through a microscopic system. The position of the "fixed point" can be gradually deduced and moved closer by manually rotating the XY-axis adjusting screws on the four-dimensional frame until the center of the plane containing the crosshair coincides with the center of the bearing. The entire device is based on the bearing center, exhibiting excellent consistency and stability. The height can also be adjusted according to the actual usage scenario.

[0071] This device arrangement is not only simple, clearly indicating whether the upper and lower planes coincide with the center of the bearing, but also solves the problem of finding a reference point for coaxial alignment. It allows for direct use of a confirmed reference point for adjustment, making the entire calibration process simple and easy to operate. The synchronization during coaxial adjustment is good, providing immediate feedback and allowing for direct observation of the distance between the bearing's rotation center and the center of the crosshair, facilitating adjustment to the required precision. This device can reduce alignment time to one-third of the original time while improving alignment accuracy to the sub-micron level, significantly enhancing the overall integrity and reliability of the optical system.

[0072] Because this device uses bearings for alignment, the entire device is always referenced to the center of the bearing, avoiding the difficulty of finding a reference point in previous alignment systems. In this device, the accuracy of the bearing is the accuracy of the alignment. A dial indicator can be used beforehand, with the probe placed on the outer or inner ring of the bearing. The bearing is mounted on a rotating platform, and the changes in the probe reading are observed by rotating the bearing, reflecting the accuracy of the radial runout. This method allows for selection based on actual usage requirements, providing greater flexibility.

[0073] The display panel in this device is not limited to a bright-field 90° crosshair dividing panel; it can be any object that can be displayed and is to be coaxially aligned, and the center of the object has been marked. This coaxial alignment device and method can significantly reduce the workload of calibration personnel, reduce the complexity and cost of the overall mechanical structure, reduce its susceptibility to external influences, and improve stability while achieving high precision in coaxial alignment. Attached Figure Description

[0074] Figure 1 This is a schematic diagram of the differentiation plate base structure.

[0075] Figure 2 This is a schematic diagram of the structure in which the crosshair reticle is installed in the groove at the bottom of the reticle holder.

[0076] Figure 3 This is a diagram showing the fixed installation of an XYZ three-axis cross-type guide rail manual displacement platform.

[0077] Figure 4 This is a schematic diagram of the bearing and connecting plate installation.

[0078] Figure 5 This is a schematic diagram of the installation of the lower adjustable eyeglass frame.

[0079] Figures 6-8 This is a schematic diagram showing the complete installation of the entire device.

[0080] Figure 9 This is a schematic diagram illustrating the alignment principle of the device.

[0081] Figure 10 This is a diagram showing the cross-shaped plate observed by a CCD camera in a microscope system.

[0082] Figure 11 The camera captures a 360° crosshair reticle image to simulate its motion trajectory.

[0083] Figure 12 This is a schematic diagram illustrating the alignment accuracy of the device. Detailed Implementation

[0084] The specific embodiments of the present invention will be further described below with reference to the accompanying drawings:

[0085] A coaxial alignment device includes a bearing 7, multiple adjustable frames, multiple display plates to be coaxially aligned, a microscopic system 14, and a platform. Each adjustable frame has a display plate connected to its center, and the multiple adjustable frames are connected sequentially from bottom to top. Each display plate has a center mark at its center and is connected to the center of the adjustable frame.

[0086] Specifically, there are two adjustable frames, designated Adjustable Frame 1 (10) and Adjustable Frame 2 (12), which are four-dimensional adjustable frames. There are also two display panels, designated Display Panel 1 and Display Panel 2; both Display Panel 1 and Display Panel 2 are as follows... Figure 2The diagram shows a bright-field 90° crosshair divider 1. One bright-field 90° crosshair divider 1 is fixedly connected to the center of a divider base 2, which is threaded into the center hole of an adjusting frame 10. Another bright-field 90° crosshair divider 1 is fixedly connected to the center of another divider base 2, which is threaded into the center hole of an adjusting frame 2 12. The outer ring of a bearing 7 is connected to the platform, and the inner ring of a bearing 7 is connected to a connecting plate 8. The connecting plate 8 is connected to the adjusting frame 10 via a connecting plate 11, and the adjusting frame 2 12 is connected to the connecting plate 11 via a connecting plate 21. The adjusting frame 10 is located above the bearing 7, and the adjusting frame 2 12 is located above the adjusting frame 10. The adjusting frames 10 and 2 12 are arranged in parallel, making camera observation more convenient and clearer.

[0087] The microscopic system 14 is mounted above the first adjustment frame 10 and the second adjustment frame 12, and is used to observe the movement trajectory of the crosshair center of the bright field 90° crosshair dividing plate 1 within the first adjustment frame 10 and the second adjustment frame 12.

[0088] Specifically, display panel one and display panel two are not limited to bright field 90° crosshair dividing panel 1, but can be any object that can be displayed, and the center of the object has been marked.

[0089] like Figure 1-2 As shown, the center of the differentiation plate base 2 has a through hole, and the bottom has an annular groove for placing the bright field 90° crosshair differentiation plate 1. The center of the annular groove is the center of the through hole. The bright field 90° crosshair differentiation plate 1 is fixedly connected to the annular groove with silicone.

[0090] Specifically, such as Figure 6-8 As shown, the connecting plate 2 11 is connected to the Z-axis guide rail platform 13, and the adjusting frame 2 12 is connected to the slider in the Z-axis guide rail platform 13. The Z-axis guide rail platform 13 is used to drive the adjusting frame 2 12 to move up and down, thereby adjusting the distance between the adjusting frame 10 and the adjusting frame 2 12 as needed.

[0091] Specifically, such as Figure 3-5 As shown, the platform connected to the outer ring of bearing 7 adopts XYZ three-axis cross guide rail type manual displacement platform 5. The bottom of XYZ three-axis cross guide rail type manual displacement platform 5 is connected to air float platform 3 through base plate 4. Adjustment frame one 10 and adjustment frame two 12 adopt four-dimensional adjustment frame. The microscopic system 14 adopts continuous variable magnification microscopic system. The bearing 7 adopts cross roller bearing.

[0092] Specifically, the outer ring of the bearing 7 is connected to the XYZ three-axis cross-guide rail type manual displacement platform 5 via a bearing fixing plate 6 and bolts. The inner ring of the bearing 7 is threadedly connected to the connecting plate 8. The bottom of the connecting plate 1 9 is bolted to the connecting plate 8, the top of the connecting plate 1 9 is bolted to the adjusting frame 1 10, the bottom of the connecting plate 2 11 is bolted to the Z-axis guide rail platform 13, and the adjusting frame 2 12 is bolted to the slider in the Z-axis guide rail platform 13. The Z-axis guide rail platform 13 can adjust the height of the adjusting frame 2 12.

[0093] The alignment process of the above coaxial alignment device is as follows:

[0094] First, fix the two bright field 90° cross-shaped dividing plates 11 to the center of the dividing plate base with silicone. Then, use a warm light to irradiate and cure for 3 hours, ensuring that they do not fall off or curl up during this period.

[0095] Secondly, it can be built as follows Figure 9 The continuously zoom microscope system 14 shown above uses an LED light source 16 and a 2 / 3” CMOS CCD camera 15 with a resolution of 2448 x 2048 and a pixel size of 3.45 x 3.45 micrometers. The pixel calculation process is as follows: the pixel size of the long side and the short side are calculated separately.

[0096]

[0097] During installation, the tilt needs to be adjusted to ensure that the light can shine vertically onto the object below through the objective lens, thereby achieving a better imaging effect.

[0098] Then build as follows Figure 3-8 The object being observed shown below must be installed and used on the air-floating platform 3 to reduce the influence of external factors. After tightening the tooling base plate 4 on the air-floating platform 3, fix a cross-guide rail type X and Y axis direction and a cross-guide rail type manual displacement platform Z axis direction above it, i.e., XYZ three-axis cross-guide rail type manual displacement platform 5. Place and fix the bearing fixing plate 6, and place and fix a high-precision cross roller bearing on the bearing fixing plate 6. The connecting plate 8 is threadedly connected to the inner ring of the bearing 7. After fixing two connecting plates 9 on the connecting plate 8, connect the adjusting frame 10. Tighten a reticle holder with a crosshair to the center of the adjusting frame 10. At this time, turn on the CCD camera 15, light up the LED light source 16, adjust the height of the microscope system 14, find the best imaging position, and manually adjust the x and y axis directions on the adjusting frame 10 to move the center of the crosshair to the center of the camera's target surface, as shown. Figure 10 This is to prevent the rotating bearing 7 from moving off the target surface due to excessive displacement of the fixed point.

[0099] At this point, continuously rotate the connecting disk 8 to find the motion trajectory. It can be observed that the center of the crosshair rotates in a regular circle about the "fixed point" (center of bearing 7). Then, continue adjusting the x and y axes of the adjusting frame 10. The center of the crosshair continuously moves closer to the fixed point. Repeat rotating the connecting disk 8 and adjusting the adjusting frame 10 until the change is no longer visually noticeable. At this point, use the magnification of the zoom microscope system 14 and adjust its height again to find the optimal imaging surface. The image within the camera target surface becomes larger. Repeat rotating the connecting disk 8 and adjusting the adjusting frame 10 to bring the center of the crosshair closer to the center of bearing 7 again. During use, the camera's own magnification function can also be used to observe pixel-level motion based on pre-calculated camera pixel size. Then, using a high-precision cross roller bearing, rotate one full circle, uniformly rotate 360°, capture ten photos, extract features, and calculate the center pixel position of the crosshair. This yields a motion trajectory deduction (e.g., Figure 11 As shown, calculate the radius of the trajectory around the fixed point (i.e., the deviation from the center of bearing 7). This allows for accuracy verification and calculation of the coordinate position of the fixed point. Then, repeatedly rotate the connecting disk 8 and adjust the adjusting frame 10 to bring the center of the crosshair closer to the center of bearing 7. Next, rotate the bearing 360° uniformly to capture ten photos, extract features, and calculate the current pixel position of the crosshair center and the radius of the trajectory around the fixed point. Repeat this process until the radius is less than the preset value, completing the adjustment and improving accuracy.

[0100] After adjusting the lower side, install the connecting plate 2 11. Install the other calibration plate holder with a crosshair onto the adjusting frame 2 12. Position the adjusting frame 2 12 parallel to the lower adjusting frame 1 10. Raise the position of the zoom microscope system 14 to find the optimal imaging plane, i.e., clearly see the calibration plate with the crosshair. At this point, begin the same calibration process as the lower side, rotating and adjusting. Then magnify and observe the adjustment, capture images for calculation and verification. Adjust the alignment accuracy until the radius of the center movement trajectory of the crosshair is minimized, i.e., the radius is less than the preset value, reaching the limit accuracy of the device (e.g., ...). Figure 12 The accuracy of aligning the centers of the top and bottom crosshairs is the coaxial alignment accuracy, and the device can achieve sub-micron accuracy at this point.

[0101] Further improvements to the coaxial alignment accuracy of this device are possible. Replacing the working surfaces of the two four-dimensional adjustment frames with a small air-bearing platform 3 would improve stability and simplify the adjustment process. Bearings 7 with lower radial runout can also be selected. Replacing the camera with a higher resolution, smaller pixel camera would improve the accuracy of pixel-level adjustments, thereby increasing step accuracy, improving the tooling manufacturing process, and enhancing component fit, all of which would further improve stability and accuracy. For sub-micron level alignment, this device already meets the requirements. Furthermore, as a relatively low-cost instrument, it is an ideal choice for coaxial alignment.

[0102] The microscope system 14 in this embodiment adopts a continuous zoom cylindrical video microscope system, including an LED light source 16, lenses, a beam splitter, objective lenses, a tube lens, and a CCD camera 15. The system utilizes coaxial illumination, resulting in a more uniform field of view. The continuous zoom lens adopts a parallel optical path design, and the system employs an infinity-corrected optical system. An additional CCD camera 15 can be used to further magnify the image without affecting the optical performance. This device uses a continuous zoom body with a magnification range of 0.75X to 5.25X. The infinitely variable magnification can be achieved solely through the internal zoom lens group. During use, various magnification objective lenses can be combined according to different working distances. The light emitted by the LED light source 16 is refracted by the lens and reflector, reflected by the beam splitter, and then converged. It is then emitted as parallel light through the objective lens, reflected back to the crosshair mark position at the lower observation point, and then converged again through the objective lens, beam splitter, and tube lens onto the CCD camera 15 for observation via camera software.

[0103] Traditional coaxial alignment calibration techniques often face the problem of limited adjustment space within the adjustment range. They often rely on technical and experience-based judgment, which is not only time-consuming and labor-intensive, but also prone to human error. They are difficult for non-professionals to master, lack an immediate feedback mechanism, and make it difficult to determine whether the optimal alignment state has been reached. They are limiting, and different devices may require different types of adjustment devices, which limits versatility and accuracy.

[0104] This embodiment proposes a coaxial alignment device for observing the rotation of bearing 7 using a microscopic system 14. The core of this technology lies in using a camera with a small pixel size to capture the center of bearing 7, while simultaneously adjusting the microcomputer for precise adjustment.

[0105] When using the coaxial alignment device with bearing 7, the bright field 90° crosshair dividing plate 1 fixed at the center of the four-dimensional precision frame can be observed through the microscopic system 14. The position of the "fixed point" can be gradually deduced and moved closer by continuously rotating the XY axis adjusting screws on the four-dimensional precision frame until the center of the plane where the crosshair is located coincides with the center of bearing 7. The entire device is based on the center of bearing 7, which is highly consistent and stable. The height can also be adjusted according to the actual usage scenario.

[0106] This device arrangement is not only simple, clearly indicating whether the upper and lower planes coincide with the center of bearing 7, but it also solves the problem of finding a reference point for coaxial alignment. It allows for direct use of a confirmed reference point for adjustment, making the entire calibration process simple and easy to operate. The synchronization during coaxial calibration is good, providing immediate feedback and allowing for direct observation of the distance between the rotation center of bearing 7 and the center of the crosshair, facilitating calibration to the required precision. This device can reduce alignment time to one-third of the original time while improving alignment accuracy to the sub-micron level, significantly enhancing the overall integrity and reliability of the optical system.

[0107] Because this device uses bearing 7 for alignment, the entire device is always referenced to the center of bearing 7, avoiding the difficulty of finding a reference in previous alignment systems. In this device, the accuracy of bearing 7 is the alignment accuracy. A dial indicator can be used beforehand, with the probe placed on the outer or inner ring of bearing 7. Bearing 7 is mounted on a rotating platform, and the changes in the probe reading are observed by rotating bearing 7, reflecting the radial runout accuracy. This method allows for selection based on actual usage requirements, providing greater flexibility.

[0108] This invention's device can achieve high precision in coaxial alignment while significantly reducing the workload of calibration personnel, lowering the complexity and cost of the overall mechanical structure, reducing its susceptibility to external influences, and improving stability. The crossed roller bearing is a crucial component in this device. Its internal structure features rollers arranged at 90° angles to each other (hence the name "crossed roller bearing"). Spacers or separators are installed between the rollers to prevent tilting or friction, effectively preventing an increase in rotational torque and providing excellent rotational accuracy—precisely the working plane required by this device. The bearing's rotation is caused by the relative motion of its inner and outer rings. The center of rotation is the geometrically fixed point of the bearing. When observed using a microscopic system, the center of the field of view is precisely aligned with the bearing's center of rotation. At this point, other markings or features appear relatively stationary and fixed at the center of the microscopic system's field of view. This invention's device utilizes this characteristic to achieve its desired effect.

[0109] This embodiment also provides a coaxial alignment method, wherein the first and second display plates with center markers adopt a bright-field 90° crosshair dividing plate 1, the center of the crosshair being the center marker; the first and second adjustment frames 10 and 12 adopt a four-dimensional adjustment frame; the microscope system 14 adopts a continuous zoom microscope system; and the bearing 7 adopts a high-precision crossed roller bearing. The above method includes the following steps:

[0110] Step 1: Connect one bright field 90° crosshair divider 1 to the center of one divider base 2, which is connected to the center hole of the adjusting frame 10; connect another bright field 90° crosshair divider 1 to the center of another divider base 2, which is connected to the center hole of the adjusting frame 12.

[0111] Step 2: Construct the continuous zoom microscope system above;

[0112] Step 3: Build an XYZ three-axis cross-guide rail manual displacement platform 5 below the continuous zoom microscope system. Connect the outer ring of the bearing 7 to the XYZ three-axis cross-guide rail manual displacement platform 5 through the bearing fixing plate 6. Connect the inner ring of the bearing 7 to the connecting plate 8. Connect the connecting plate 8 to the adjusting frame 10 through the connecting plate 9. The adjusting frame 10 is located above the bearing 7.

[0113] Step 4: Open the camera software in the continuous zoom microscope system, adjust the distance between the continuous zoom microscope system and the bright field 90° crosshair divider plate 1 in the adjustment frame 10 to find the best imaging position of the bright field 90° crosshair divider plate 1 in the camera software, adjust the x and y axis directions on the adjustment frame 10, and then move the center of the crosshair mark of the bright field 90° crosshair divider plate 1 to the center of the target surface of the camera.

[0114] Step 5: Rotate the inner ring of bearing 7 and observe the movement trajectory of the crosshair of the bright field 90° crosshair divider plate 1 in the adjustment frame 10 through the camera software. The center of the crosshair rotates in a regular circle, and the center of this circle is recorded as the fixed point. Rotate the inner ring of bearing 7 and adjust the x and y axes on the adjustment frame 10 so that the center of the crosshair of the bright field 90° crosshair divider plate 1 moves closer to the fixed point. Use the magnification function of the continuous zoom microscope system to readjust the distance between the continuous zoom microscope system and the bright field 90° crosshair divider plate 1 in the adjustment frame 10 to find the best imaging position of the bright field 90° crosshair divider plate 1 in the camera software. At this time, the image in the camera target surface becomes larger. Repeat rotating the inner ring of bearing 7 and adjusting the x and y axes on the adjustment frame 10 so that the center of the crosshair of the bright field 90° crosshair divider plate 1 moves closer to the fixed point.

[0115] Step 6: Continue to rotate the inner ring of bearing 7, and at the same time adjust the x and y axis directions on the frame 10 so that the center of the cross mark on the bright field 90° cross line dividing plate 1 moves closer to the fixed point.

[0116] Step 7: Using the inner ring of bearing 7, rotate the bright field 90° crosshair divider plate 1 in the adjustment frame 10 by 360°, and uniformly capture ten images of the bright field 90° crosshair divider plate 1 within 360°.

[0117] Step 8: Extract features from ten images captured by the camera software, calculate the coordinates of the center of the crosshair of the 90° crosshair dividing plate 1 in the image, obtain the motion trajectory deduction of the center of the crosshair of the 90° crosshair dividing plate 1 in the image, and calculate the radius of the motion trajectory of the center point moving around the fixed point.

[0118] Step 9: Repeat steps 6-8 until the radius of the center motion trajectory of the crosshair of the bright field 90° crosshair dividing plate 1 in the image is less than the preset value, then proceed to step 10.

[0119] Step 10: Connect the second connecting plate 11 to the first connecting plate 9, and connect the second connecting plate 11 to the second adjusting frame 12. The second adjusting frame 12 is located above the first adjusting frame 10, and ensures that the second adjusting frame 12 and the first adjusting frame 10 are set parallel to each other.

[0120] Step 11: Adjust the distance between the continuous zoom microscope system and the bright field 90° crosshair divider plate 1 in the second adjustment frame 12 to find the best imaging position of the bright field 90° crosshair divider plate 1 in the camera software. Adjust the x and y axis directions on the second adjustment frame 12, and then move the center of the crosshair mark of the bright field 90° crosshair divider plate 1 to the center of the target surface of the camera.

[0121] Step 12: Rotate the inner ring of bearing 7 and observe the movement trajectory of the crosshair of the bright field 90° crosshair divider plate 1 in the adjustment frame 2 12 through the camera software. The center of the crosshair rotates in a regular circle, and the center of this circle is recorded as the fixed point. Rotate the inner ring of bearing 7 and adjust the x and y axes on the adjustment frame 2 12 so that the center of the crosshair of the bright field 90° crosshair divider plate 1 moves closer to the fixed point. Use the magnification function of the continuous zoom microscope system to readjust the distance between the continuous zoom microscope system and the bright field 90° crosshair divider plate 1 in the adjustment frame 2 12 to find the best imaging position of the bright field 90° crosshair divider plate 1 in the camera software. At this time, the image in the camera target surface becomes larger. Repeat rotating the inner ring of bearing 7 and adjusting the x and y axes on the adjustment frame 2 12 so that the center of the crosshair of the bright field 90° crosshair divider plate 1 moves closer to the fixed point.

[0122] Step 13: Continue to rotate the inner ring of bearing 7, and at the same time adjust the x and y axis directions on the second frame 12 so that the center of the cross mark on the bright field 90° cross line dividing plate 1 moves closer to the fixed point.

[0123] Step 14: Using the inner ring of bearing 7, rotate the bright field 90° crosshair divider plate 1 in the second frame 12 by 360°, and uniformly capture ten images of the bright field 90° crosshair divider plate 1 within 360°.

[0124] Step 15: Extract features from ten images captured by the camera software, calculate the coordinates of the center of the crosshair of the 90° crosshair dividing plate 1 in the image, obtain the motion trajectory deduction of the center of the crosshair of the 90° crosshair dividing plate 1 in the image, and calculate the radius of the motion trajectory of the center point moving around the fixed point.

[0125] Step 16: Repeat steps 13-15 until the radius of the center movement trajectory of the crosshair of the bright field 90° crosshair dividing plate 1 in the image is less than the preset value. This completes the coaxial alignment of the two bright field 90° crosshair dividing plates 1. After alignment, remove the structure below the bearing 7. Since the remaining structures are all connected to the inner ring of the bearing 7, the structure is more stable, and the mechanical structure will not experience minor displacement during long-term operation.

[0126] The scope of protection of this invention includes, but is not limited to, the above embodiments. The scope of protection of this invention is defined by the claims. Any substitutions, modifications, or improvements to this technology that are easily conceived by those skilled in the art fall within the scope of protection of this invention.

Claims

1. A coaxial alignment device, characterized in that, Includes bearings, adjustment frame, display plate to be coaxially aligned, microscope system and platform; The outer ring of the bearing is connected to the platform, the inner ring of the bearing is connected to the adjusting frame, and the adjusting frame is located above the bearing. The display panel has a center mark at its center and is connected to the center of the adjustment frame; The microscopic system is mounted above the adjustment frame and is used to observe the movement trajectory of the central marker on the display panel inside the adjustment frame. There are two adjustable frames, namely Adjustable Frame 1 and Adjustable Frame 2, which are four-dimensional adjustable frames. There are also two display panels, namely Display Panel 1 and Display Panel 2. Both Display Panel 1 and Display Panel 2 are brightfield 90° crosshair differentiation panels. The two brightfield 90° crosshair differentiation panels are fixedly connected to the center of two differentiation panel seats, which are threaded into the center holes of Adjustable Frame 1 and Adjustable Frame 2, respectively. The outer ring of the bearing is connected to the platform, and the inner ring of the bearing is connected to the connecting plate. The connecting plate is connected to Adjustable Frame 1 through Connecting Plate 1, and Adjustable Frame 2 is connected to Connecting Plate 1 through Connecting Plate 2. Adjustable Frame 1 is located above the bearing, and Adjustable Frame 2 is located above Adjustable Frame 1. Adjustable Frame 1 and Adjustable Frame 2 are arranged in parallel.

2. The coaxial alignment device according to claim 1, characterized in that, The center of the differentiation plate holder has a through hole, and the bottom has an annular groove for placing the bright field 90° crosshair differentiation plate. The center of the annular groove is the center of the through hole. The bright field 90° crosshair differentiation plate is fixedly connected to the annular groove with silicone.

3. The coaxial alignment device according to claim 1, characterized in that, The second connecting plate is connected to the Z-axis guide rail platform, and the second adjusting frame is connected to the slider in the Z-axis guide rail platform.

4. The coaxial alignment device according to claim 1, characterized in that, The platform adopts an XYZ three-axis cross-guide rail type manual displacement platform. The bottom of the platform is connected to the air-floating platform through a base plate. The microscopy system adopts a continuous variable magnification microscopy system. The bearing adopts a cross roller bearing.

5. The coaxial alignment device according to claim 1, characterized in that, The outer ring of the bearing is connected to the platform via a bearing fixing plate and bolts. The inner ring of the bearing is threaded to the connecting disc. The bottom of the first connecting plate is bolted to the connecting disc. The top of the first connecting plate is bolted to the first adjusting frame. The bottom of the second connecting plate is bolted to the Z-axis guide rail platform. The second adjusting frame is bolted to the slider in the Z-axis guide rail platform.

6. A coaxial alignment method, characterized in that, Includes the following steps: Step 1: Fix the display plate with the center mark one into the center hole of the adjustment frame one, and fix the display plate with the center mark two into the center hole of the adjustment frame two. Step 2: Construct the microscope system above; Step 3: Build a platform below the microscope system, connect the outer ring of the bearing to the platform, connect the inner ring of the bearing to the adjustment frame one, and position the adjustment frame one above the bearing. Step 4: Open the camera software in the microscope system, adjust the distance between the microscope system and the display plate to find the best imaging position of the display plate in the camera software, adjust the x and y axis directions on the lens holder, and then move the center mark of the display plate to the center of the camera's target surface. Step 5: Rotate the inner ring of the bearing and observe the movement trajectory of the center mark of display panel one through camera software. The center mark of display panel one rotates in a regular circle, and the center of the circle is recorded as the fixed point. Step 6: Continue to rotate the inner ring of the bearing, while adjusting the x and y axes on the first frame so that the center mark of the first display panel moves closer to the fixed point. Step 7: Use the inner ring of the bearing to rotate display panel 1 360°, and uniformly capture ten images of display panel 1 within 360°. Step 8: Extract features from the ten images captured by the camera software, calculate the coordinates of the center marker of display panel one, obtain the motion trajectory deduction of the center marker of display panel one, and calculate the radius of the motion trajectory of the center marker moving around the fixed point. Step 9: Repeat steps 6-8 until the radius of the center marker motion trajectory of display panel one is less than the preset value, then proceed to step 10; Step 10: Connect the second connecting plate to the first connecting plate, connect the second connecting plate to the second adjusting frame, and position the second adjusting frame above the first adjusting frame, ensuring that the second adjusting frame and the first adjusting frame are set parallel to each other; Step 11: Adjust the distance between the microscope system and the second display plate to find the best imaging position of the second display plate in the camera software. Adjust the x and y axis directions on the second adjustment frame and move the center mark of the second display plate to the center of the camera's target surface. Step 12: Rotate the inner ring of the bearing and observe the movement trajectory of the center mark on display board two through camera software. The center mark on display board two rotates in a regular circle, and the center of the circle is recorded as the fixed point. Step 13: Continue to rotate the inner ring of the bearing, while adjusting the x and y axes on the second frame so that the center mark of the second display panel moves closer to the fixed point. Step 14: Use the inner ring of the bearing to rotate the display panel 2 360°, and uniformly capture ten images of the display panel 2 within the 360° range; Step 15: Extract features from the ten images captured by the camera software, calculate the coordinates of the center marker of display panel two, obtain the motion trajectory deduction of the center marker of display panel two, and calculate the radius of the motion trajectory of the center marker moving around the fixed point. Step 16: Repeat steps 13-15 until the radius of the center marker motion trajectory of display panel two is less than the preset value, thus completing the coaxial alignment of display panel one and display panel two.

7. The coaxial alignment method according to claim 6, characterized in that, Both the first and second display plates are bright field 90° crosshair dividing plates, both the first and second adjustment frames are four-dimensional adjustment frames, and the microscope system is a continuous zoom microscope system. Step 1 specifically involves: A bright field 90° crosshair divider is connected to the center of a divider holder, which is connected to the center hole of the adjustment frame. Connect another bright-field 90° crosshair divider plate to the center of another divider plate holder, which is connected to the center hole of the adjustment frame two; step 3 specifically involves: A manual displacement platform with XYZ three-axis cross rails is built below the continuous zoom microscope system. The outer ring of the bearing is connected to the manual displacement platform with XYZ three-axis cross rails through the bearing fixing plate. The inner ring of the bearing is connected to the connecting plate. The connecting plate is connected to the adjusting lens frame one through the connecting plate one. The adjusting lens frame one is located above the bearing. Step 4 specifically involves: Open the camera software in the continuous zoom microscope system, adjust the distance between the continuous zoom microscope system and the bright field 90° crosshair divider plate in the first adjustment frame to find the best imaging position of the bright field 90° crosshair divider plate in the camera software, adjust the x and y axis directions on the first adjustment frame, and then move the center of the crosshair mark of the bright field 90° crosshair divider plate to the center of the camera's target surface. Step 5 specifically involves: Rotate the inner ring of the bearing and observe the movement trajectory of the crosshair on the 90° bright field crosshair dividing plate of the adjustment frame through camera software. The center of the crosshair rotates in a regular circle, and the center of the circle is recorded as the fixed point. Rotate the inner ring of the bearing and adjust the x and y axis directions on the first frame so that the center of the cross mark of the bright field 90° cross line dividing plate moves closer to the fixed point. Using the magnification function of the continuous zoom microscope system, the distance between the continuous zoom microscope system and the bright field 90° crosshair divider plate in the first adjustment frame is adjusted again to find the best imaging position of the bright field 90° crosshair divider plate in the camera software. At this time, the image in the camera target surface becomes larger. Repeatedly rotate the inner ring of the bearing and adjust the x and y axis directions on the first adjustment frame so that the center of the crosshair mark of the bright field 90° crosshair divider plate moves closer to the fixed point. Step 6 specifically involves: Continue rotating the inner ring of the bearing, while adjusting the x and y axes on the first frame, so that the center of the cross mark on the bright field 90° crosshair dividing plate moves closer to the fixed point. Step 7 specifically involves: Using the inner ring of the bearing, rotate the bright field 90° crosshair divider plate in the first frame of the lens by 360°, and uniformly capture ten images of the bright field 90° crosshair divider plate within 360°. Step 8 specifically involves: Feature extraction is performed on ten images captured by camera software. The coordinates of the center of the cross mark of the bright field 90° crosshair divider in the image are calculated. The motion trajectory of the center of the cross mark of the bright field 90° crosshair divider is deduced, and the radius of the motion trajectory of the center point moving around the fixed point is calculated. Step 9 specifically involves: Repeat steps 6-8 until the radius of the center motion trajectory of the cross mark of the bright field 90° cross in the image is less than the preset value, then proceed to step 10. Step 11 specifically involves: Adjust the distance between the continuous zoom microscope system and the bright field 90° crosshair divider in the second adjustment frame to find the optimal imaging position of the bright field 90° crosshair divider in the camera software. Adjust the x and y axis directions on the second adjustment frame to move the center of the crosshair mark of the bright field 90° crosshair divider to the center of the camera's target surface. Step 12 specifically involves: Rotate the inner ring of the bearing and observe the movement trajectory of the crosshair on the 90° bright field crosshair dividing plate in the second frame of the adjustable lens through camera software. The center of the crosshair rotates in a regular circle, and the center of this circle is recorded as the fixed point. Rotate the inner ring of the bearing and adjust the x and y axes on the second frame so that the center of the cross mark on the bright field 90° crosshair dividing plate moves closer to the fixed point. Using the magnification function of the continuous zoom microscope system, the distance between the continuous zoom microscope system and the bright field 90° crosshair divider plate in the second adjustment frame is adjusted again to find the best imaging position of the bright field 90° crosshair divider plate in the camera software. At this time, the image in the camera target surface becomes larger. Repeatedly rotate the inner ring of the bearing and adjust the x and y axis directions on the second adjustment frame so that the center of the crosshair mark of the bright field 90° crosshair divider plate moves closer to the fixed point. Step 13 specifically involves: Continue rotating the inner ring of the bearing, while adjusting the x and y axes on the second frame, so that the center of the cross mark on the bright field 90° crosshair dividing plate moves closer to the fixed point. Step 14 specifically involves: Using the inner ring of the bearing, rotate the bright field 90° crosshair divider plate in the second frame of the lens by 360°, and uniformly capture ten images of the bright field 90° crosshair divider plate within 360°. Step 15 specifically involves: Feature extraction is performed on ten images captured by camera software. The coordinates of the center of the cross mark of the bright field 90° crosshair divider in the image are calculated. The motion trajectory of the center of the cross mark of the bright field 90° crosshair divider is deduced, and the radius of the motion trajectory of the center point moving around the fixed point is calculated. Step 16 specifically involves: Repeat steps 13-15 until the radius of the center movement trajectory of the crosshair of the bright field 90° crosshair divider in the image is less than the preset value, thus completing the coaxial alignment of the two bright field 90° crosshair dividers.

Images