Particle measurement device

Abstract

The invention discloses a particle measuring device. A particle measurement device according to the present invention comprises: a mounting unit for fixing a flow cell; and a resonance unit disposed behind the mounting unit and forming a resonance space open at the front and rear, wherein the resonance unit includes: a housing disposed behind the mounting unit to form the resonance space; and the resonance space adjusting module is positioned in the shell and is used for adjusting the shape and / or the size of the resonance space.

Description

Technical Field

[0001] The present invention relates to a particle measuring device, and more particularly, to a particle measuring device for efficiently measuring a liquid sample containing nanoparticles. Background Art

[0002] Various organic and inorganic chemicals used in the manufacturing process of products requiring high precision such as displays and semiconductors require chemicals with higher purity than currently available to avoid reducing manufacturing yields, and advanced analytical techniques are being developed and newly applied to confirm the quality of high-purity chemicals. Among them, particle analysis is becoming increasingly important, and even particles as small as 10nm may affect the yield reduction and high integration of semiconductor manufacturing processes. Therefore, in addition to the need to develop stable analytical methods for quality control, it is also necessary to ensure the scalability of the technology so that even the causes of defects that may occur during the manufacturing process can be analyzed.

[0003] A substance that is uniformly dispersed in a liquid in a molecular or ionic state is generally called a solution. A state in which particles larger than normal molecules or ions and having a diameter of about 1nm to 1,000nm are dispersed in a solution without agglomerating or precipitating is called a colloidal state, and particles in a colloidal state are called colloids.

[0004] Research on microcolloids present in solutions has focused on obtaining information on the physicochemical properties of substances to be analyzed or improving the detection capabilities of separation analyzers. Until recently, the analysis of colloidal particles had a size limit of 100 nm, and technology development was required because high sample concentrations were required to accurately analyze colloidal particles of 100 nm or less.

[0005] As a method for measuring colloidal nanoparticles, a light scattering analysis method that uses light scattering intensity to check particle size is generally used. However, when measuring fine nanoparticles less than 100nm in size, even if scattered light is generated, the probability of detecting fine nanoparticles at low concentrations is rapidly reduced, making it difficult to obtain reliable results. In addition, there is a restriction that the particle concentration must be several ppm (parts per million) or higher. As the particle size increases, the scattered light intensity increases. On the other hand, since the area that can scatter light decreases as the particle size decreases, the intensity of the scattered light is weaker, making it difficult to measure. Therefore, since a relatively large amount of particles must be able to contribute to scattering, the sensitivity is greatly reduced at a concentration lower than ppm.

[0006] When laser induced breakdown is generated by irradiating a laser beam onto nanoparticles, it may generate a shock wave. When nanoparticles are measured by measuring the acoustic signal of the shock wave, noise in addition to the acoustic signal is easily measured at the same time, so the acoustic signal needs to be amplified.

[0007] (Patent Document 1) KR10-2010-0040457A Summary of the invention

[0008] [Technical issues]

[0009] An object of the present disclosure is to address the above-mentioned and other problems.

[0010] Another object of the present disclosure is to provide a particle measuring device for efficiently measuring nanoparticles.

[0011] Another object of the present disclosure is to provide a particle measuring device that effectively fixes a flow cell in which a liquid sample containing nanoparticles flows.

[0012] Another object of the present disclosure is to provide a particle measuring device that effectively suppresses torsional force.

[0013] Another object of the present disclosure is to provide a particle measuring device that effectively measures acoustic waves generated by nanoparticles.

[0014] Another object of the present disclosure is to provide a particle measuring device that amplifies a specific frequency band in a generated sound wave.

[0015] Another object of the present disclosure is to provide a particle measuring device including a resonance plate that resonates in a specific frequency band.

[0016] Another object of the present disclosure is to provide a particle measuring device forming a resonance space in which an acoustic wave resonates.

[0017] Another object of the present disclosure is to provide a particle measuring device that adjusts at least one of the shape and size of a resonance space.

[0018] [Technical solution]

[0019] In order to achieve the above and other purposes and needs, in one aspect of the present disclosure, a particle measuring device is provided, which includes: a mounting unit for fixing a flow pool; and a resonance unit arranged behind the mounting unit, the resonance unit forming a resonance space open to the front and rear, wherein the resonance unit includes a shell arranged behind the mounting unit and forming the resonance space; and a resonance space adjustment module located in the shell and adjusting at least one of the shape and size of the resonance space.

[0020] [Beneficial Effects]

[0021] The effects of the particle measuring device according to the present disclosure are as follows:

[0022] According to at least one aspect of the present disclosure, the present disclosure may provide a particle measuring device for efficiently measuring nanoparticles.

[0023] According to at least one aspect of the present disclosure, the present disclosure may provide a particle measuring device that effectively fixes a flow cell, in which a liquid sample containing nanoparticles flows.

[0024] According to at least one aspect of the present disclosure, the present disclosure may provide a particle measuring device that effectively suppresses torsional force.

[0025] According to at least one aspect of the present disclosure, the present disclosure may provide a particle measuring device that effectively measures acoustic waves generated by nanoparticles.

[0026] According to at least one aspect of the present disclosure, the present disclosure may provide a particle measuring device that amplifies a specific frequency band in a generated sound wave.

[0027] According to at least one aspect of the present disclosure, the present disclosure may provide a particle measuring device including a resonance plate that resonates in a specific frequency band.

[0028] According to at least one aspect of the present disclosure, the present disclosure may provide a particle measuring device forming a resonance space in which an acoustic wave resonates.

[0029] According to at least one aspect of the present disclosure, the present disclosure may provide a particle measuring device that adjusts at least one of a shape and a size of a resonance space.

[0030] According to the detailed description given below, other scopes of applicability of the present disclosure will become apparent. However, it should be understood that the detailed description and specific examples (such as the embodiments of the present disclosure) are given by way of example only, because various changes and modifications within the spirit and scope of the present disclosure will become apparent to those skilled in the art through the detailed description. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] Figures 1 to 3 A particle measuring device according to one embodiment of the present disclosure is shown when viewed from various directions.

[0032] Figure 4 is an exploded perspective view of a particle measuring device according to one embodiment of the present disclosure.

[0033] Figure 5 A flow cell according to one embodiment of the present disclosure is shown.

[0034] Figure 6 Shown is a cross section taken along C1-C2 Figure 5 Cross section of a flow cell.

[0035] Figure 7 and Figure 8The fixing module and the resonance unit according to one embodiment of the present disclosure are shown when viewed from different angles.

[0036] Fig. 9 yes Figure 1 A perspective view of a first fixing module.

[0037] Fig.10 Shown is a section taken along B1-B2 Fig. 9 Cross section of the fixing module.

[0038] Fig.11 and Fig.12 A bridge module according to one embodiment of the present disclosure is shown when viewed from different directions.

[0039] Fig.13 The particle measuring device according to one embodiment of the present disclosure is shown when viewed from above.

[0040] Fig.14 It is shown that the sliding bar according to one embodiment of the present disclosure is installed in the first side case and the second side case.

[0041] Fig.15 A resonance unit having a sliding slit formed in an upper housing is shown.

[0042] Fig.16 Shown is a cross section along D1-D2 Fig.15 cross section.

[0043] Fig.17 shows the sliding rod connected to the Fig.15 Sliding opening shown.

[0044] Fig.18 Shown is a section taken along E1-E2 Fig.17 cross section.

[0045] Fig.19 shows the Fig.18 Slide lever shown.

[0046] Fig. 20 Shown is a section taken along A1-A2 Figure 7 A cross section of the resonant unit and mounting unit is shown.

[0047] Fig.21 Taken along A1-A2 Figure 7 The cross-sections of the resonance unit and the mounting unit are shown to illustrate that the resonance space adjustment plate is moved by the plate mover.

[0048] Fig. 22 Taken along A1-A2 Figure 7The cross-sections of the resonance unit and the mounting unit are shown to illustrate a curved resonance space-adjusting panel according to one embodiment of the present disclosure.

[0049] Fig.23 A housing according to one embodiment of the present disclosure is shown.

[0050] Fig.24 Shown is a cross section along D1-D2 Fig.23 A cross section of the housing is shown.

[0051] Fig.25 Shows Fig.24 The resonance space conditioning plate shown moves. DETAILED DESCRIPTION

[0052] Reference will now be made in detail to embodiments of the present disclosure, examples of which are shown in the accompanying drawings. Where possible, the same reference numerals will be used in all drawings to refer to the same or similar components. Typically, suffixes such as "module" and "unit" may be used to refer to elements or components. Such suffixes are used herein only to facilitate the description of the present disclosure, and the suffixes themselves are not intended to give any special meaning or function. It should be noted that if it is determined that the detailed description of known technologies may obscure the embodiments of the present disclosure, the detailed description of known technologies will be omitted. The accompanying drawings are used to help easily understand the various technical features, and it should be understood that the embodiments presented herein are not limited by the accompanying drawings. Therefore, in addition to those specifically set forth in the accompanying drawings, the present disclosure should be interpreted as also extending to any changes, equivalents and substitutions.

[0053] Terms including ordinal numbers such as first, second, etc. may be used to describe various components, but the components are not limited by these terms. These terms are used only for the purpose of distinguishing one component from other components.

[0054] When any component is described as being "connected" or "coupled" to another component, this should be understood to mean that other components may exist between them, although any component may be directly connected or coupled to another component. Conversely, when any component is described as being "directly connected" or "directly coupled" to another component, this should be understood to mean that there is no component between them.

[0055] A singular expression may include a plural expression as long as it has no apparently different meaning in the context.

[0056] In the present disclosure, the terms "including" and "having" should be understood as intending to indicate the presence of the illustrated features, numbers, steps, operations, components, parts or a combination thereof, and do not exclude the presence or possibility of adding one or more different features, numbers, steps, operations, components, parts or a combination thereof.

[0057] In the drawings, the size of the components may be exaggerated or reduced for convenience of explanation. For example, the size and thickness of each component shown in the drawings are arbitrarily shown for convenience of explanation, and therefore, unless otherwise specified, the present disclosure is not limited thereto.

[0058] If any embodiment can be implemented differently, a specific process order can be performed differently from the described order. For example, two processes described in succession can be performed substantially simultaneously, or in the reverse order of the described order.

[0059] In the following embodiments, when layers, regions, components, etc. are connected, the following embodiments include the case where the layers, regions, and components are directly connected, and the case where the layers, regions, and components are indirectly connected with other layers, regions, and components between them. For example, when layers, regions, components, etc. are electrically connected, the present disclosure includes the case where the layers, regions, and components are directly electrically connected, and the case where the layers, regions, and components are indirectly electrically connected with other layers, regions, and components between them.

[0060] Figures 1 to 3 FIG. 1 shows a particle measuring device 10 according to one embodiment of the present disclosure when viewed from multiple directions. For example, Figure 1 The front, right side, and top of the particle measuring device 10 can be viewed in FIG. Figure 2 The front, left, and bottom of the particle measuring device 10 are observed. Figure 3 The right side, top side, and back side of the particle measuring device 10 can be observed. Figure 4 1 is an exploded perspective view of a particle measuring device 10 according to an embodiment of the present disclosure.

[0061] In the present disclosure, a Cartesian coordinate system may be used to indicate the direction of the particle measuring device 10 .

[0062] For example, the negative Y-axis direction may indicate the forward direction of the particle measuring device 10. For example, the positive Y-axis direction may indicate the backward direction of the particle measuring device 10.

[0063] For example, the negative X-axis direction may indicate the left direction of the particle measuring device 10. For example, the positive X-axis direction may indicate the right direction of the particle measuring device 10.

[0064] For example, the negative Z-axis direction may indicate a downward direction of the particle measuring device 10. For example, the positive Z-axis direction may indicate an upward direction of the particle measuring device 10.

[0065] Reference Figures 1 to 4 , the particle measuring device 10 may include a flow cell 1000. The flow cell 1000 may be formed in a shape extending in one direction. For example, the flow cell 1000 may be formed in a shape extending from the bottom to the top.

[0066] The flow cell 1000 may be a channel through which a liquid flows. For example, the liquid may flow from the lower end to the upper end of the flow cell 1000. The liquid flowing in the flow cell 1000 may contain nanoparticles. The nanoparticles contained in the liquid flowing in the flow cell 1000 may be an object that the particle measuring device 10 intends to measure.

[0067] At least a portion of the flow cell 1000 may emit light or electromagnetic waves. For example, at least a portion of the light or electromagnetic waves incident on the front side of the flow cell 1000 may pass through the flow cell 1000 and travel from the back side of the flow cell 1000 to the rear of the flow cell 1000.

[0068] The particle measuring device 10 may include a mounting unit 2000. The mounting unit 2000 may be coupled to the flow cell 1000. For example, the flow cell 1000 may be fixed to the mounting unit 2000.

[0069] The mounting unit 2000 may include a fixing module 2100. The fixing module 2100 may be coupled to the flow cell 1000 or may fix the flow cell 1000. For example, the fixing module 2100 may be located at the left and right sides of the flow cell 1000.

[0070] A plurality of fixing modules 2100 may be provided. For example, the fixing module 2100 may include a first fixing module 2100a and a second fixing module 2100b. For example, the fixing module 2100 may indicate at least one of the first fixing module 2100a and the second fixing module 2100b.

[0071] The first fixing module 2100a may face the left side of the flow cell 1000. The second fixing module 2100b may face the right side of the flow cell 1000. The flow cell 1000 may be disposed between the first fixing module 2100a and the second fixing module 2100b.

[0072] The mounting unit 2000 may include a bridge module 2500. The bridge module 2500 may be coupled to the first fixing module 2100a and the second fixing module 2100b. The bridge module 2500 may connect the first fixing module 2100a to the second fixing module 2100b.

[0073] A plurality of bridge modules 2500 may be provided. For example, the bridge module 2500 may include an upper bridge module 2501 and a lower bridge module 2502. For example, the bridge module 2500 may indicate at least one of the upper bridge module 2501 and the lower bridge module 2502.

[0074] The upper bridging module 2501 may be coupled to the upper end of the fixing module 2100. For example, the upper bridging module 2501 may be coupled to the upper end of the first fixing module 2100a and the upper end of the second fixing module 2100b.

[0075] The lower bridging module 2502 may be coupled to the lower end of the fixing module 2100. For example, the lower bridging module 2502 may be coupled to the lower end of the first fixing module 2100a and the lower end of the second fixing module 2100b.

[0076] The bridge module 2500 may suppress the torsion of the fixing module 2100. The bridge module 2500 may prevent a gap from being generated between the first fixing module 2100a and the second fixing module 2100b. The bridge module 2500 may provide a coupling force between the fixing module 2100 and the flow cell 1000.

[0077] The bridge module 2500 may be connected to the flow cell 1000. For example, the bridge module 2500 may be in communication with the flow cell 1000. The bridge module 2500 may include a flow cell extension tube 2535. The flow cell extension tube 2535 may be a channel through which the liquid flowing in the flow cell 1000 flows. Figures 1 to 3 , only a portion of the flow cell extension tube 2535 is shown.

[0078] The particle measuring device 10 may include a resonance unit 3000. The resonance unit 3000 may form a space inside. The inner space of the resonance unit 3000 may be referred to as a "resonance space".

[0079] The resonance unit 3000 may include a first side housing 3100. The first side housing 3100 may be disposed behind the first fixing module 2100a. The first side housing 3100 may be connected or coupled to the first fixing module 2100a. For example, the first side housing 3100 may be formed in a shape extending backward from the first fixing module 2100a.

[0080] The resonance unit 3000 may include a second side housing 3200. The second side housing 3200 may be disposed behind the second fixing module 2100b. The second side housing 3200 may be connected or coupled to the second fixing module 2100b. For example, the second side housing 3200 may be formed in a shape extending backward from the second fixing module 2100b.

[0081] The first side case 3100 and the second side case 3200 may face each other. The first side case 3100 and the second side case 3200 may be spaced apart from each other. For example, the first side case 3100 and the second side case 3200 may be spaced apart from each other horizontally.

[0082] The first side case 3100 and the second side case 3200 may face the resonance space. The side cases 3100 and 3200 may indicate at least one of the first side case 3100 and the second side case 3200 .

[0083] The resonance unit 3000 may include a rear housing 3400. The rear housing 3400 may include a rear housing plate 3410. The rear housing plate 3410 may form a back side of the resonance unit 3000. The rear housing plate 3410 may be formed in a plate shape. The rear housing plate 3410 may face the resonance space.

[0084] The rear housing 3400 may include a rear housing opening 3420. The rear housing opening 3420 may be formed in the rear housing plate 3410. The rear housing opening 3420 may be formed to penetrate the rear housing plate 3410 in the front-rear direction. The rear housing opening 3420 may communicate with the resonance space.

[0085] The resonance unit 3000 may include a resonance module 3700. The resonance module 3700 may include a resonance plate 3710. The resonance plate 3710 may contact the side cases 3100 and 3200. The resonance plate 3710 may form an outer surface of the resonance unit 3000. For example, the resonance plate 3710 may form at least a portion of an upper surface of the resonance unit 3000. For example, the resonance plate 3710 may form at least a portion of a lower surface of the resonance unit 3000.

[0086] For another example, the resonance module 3700 may be formed on the side cases 3100 and 3200. For another example, the resonance module 3700 may be formed on the rear case 3400.

[0087] For another example, the resonance module 3700 may be located in the resonance space. For example, the resonance module 3700 may be disposed between the first side case 3100 and the second side case 3200. For example, the resonance module 3700 may be disposed in front of the rear case plate 3410.

[0088] The operating principle of the particle measuring device 10 may be described. The laser beam may be incident on the front surface of the flow cell 1000. The laser beam may be incident on the flow cell 1000 in a pulse method. At least a portion of the laser beam incident on the front surface of the flow cell 1000 may reach the inside of the flow cell 1000. At least a portion of the laser beam reaching the inside of the flow cell 1000 may pass through the rear housing opening 3420 and travel to the rear of the resonance unit 3000.

[0089] The laser beam reaching the inside of the flow cell 1000 can apply energy to the liquid (or liquid sample) flowing in the flow cell 1000. For example, particles contained in the liquid sample can receive energy from the laser beam. The size of the particles contained in the liquid sample can be at the nanometer level. In this case, the particles contained in the liquid sample can be referred to as "nanoparticles".

[0090] When the nanoparticles contained in the liquid sample receive energy from the laser beam, a shock wave may be generated. For example, when the liquid sample receives energy from the laser beam, plasma may be generated in a space where the liquid sample reacts to the laser beam.

[0091] For example, when plasma or shock waves are generated within the flow cell 1000 , acoustic waves may be generated and may travel to the rear of the flow cell 1000 .

[0092] The properties of the sound waves may depend on the state of the nanoparticles. The state of the nanoparticles may be a state related to at least one of the number density of the nanoparticles, the size distribution of the nanoparticles, or the shape of the nanoparticles. Therefore, information about the nanoparticles may be obtained by measuring and analyzing the sound waves.

[0093] In order to effectively measure the sound wave, the amplitude of the sound wave may need to be increased. The resonance unit 3000 may resonate the sound wave.

[0094] For example, the resonance plate 3710 of the resonance unit 3000 may resonate the sound wave. For example, the resonance plate 3710 may resonate a portion of the sound wave corresponding to the natural frequency of the resonance plate 3710. Therefore, by matching the natural frequency of the resonance plate 3710 with the frequency band of the sound wave to be measured, the sound wave may be effectively measured.

[0095] The natural frequency of the resonant plate 3710 may be determined based on at least one of the material, elasticity, length, thickness, or width of the resonant plate 3710. For example, the natural frequency of the resonant plate 3710 may be adjusted by adjusting the length of the resonant plate 3710.

[0096] The length of the resonant plate 3710 may be based on the front-to-back direction. For example, the length of the resonant plate 3710 may indicate the distance from the fixed end to the free end of the resonant plate 3710. In other words, the natural frequency of the resonant plate 3710 may be adjusted by adjusting the distance from the fixed end to the free end of the resonant plate 3710.

[0097] For another example, the resonance space of the resonance unit 3000 may resonate the sound wave. For example, the frequency of the resonant part of the sound wave may be controlled by adjusting at least one of the shape and size of the resonance space of the resonance unit 3000.

[0098] Figure 5A flow cell 1000 according to one embodiment of the present disclosure is shown. Figure 6 Shown is a cross section taken along C1-C2 Figure 5 Cross section of a flow cell.

[0099] Reference Figure 5 and Figure 6 , the flow cell 1000 may be formed in a shape extending in one direction. For example, the flow cell 1000 may extend from the upper end and pass to the lower end. For example, the flow cell upper end 1010 may form the upper end of the flow cell 1000. For example, the flow cell lower end 1020 may form the lower end of the flow cell 1000.

[0100] The flow cell 1000 may have a hollow portion formed inside. For example, the flow cell hollow portion 1050 may be a hollow portion formed inside the flow cell 1000. The flow cell hollow portion 1050 may be connected to the flow cell upper end 1010 and the flow cell lower end 1020. For example, the flow cell hollow portion 1050 may be open at the flow cell upper end 1010. For example, the flow cell hollow portion 1050 may be open at the flow cell lower end 1020.

[0101] The flow cell hollow portion 1050 may be a channel through which a liquid sample flows. For example, the liquid sample may be introduced into the flow cell hollow portion 1050 from the flow cell lower end 1020, flow upward, and be discharged from the flow cell upper end 1010 to the outside of the flow cell 1000.

[0102] The flow cell 1000 may form an outer surface. For example, the cell outer surface 1100 may indicate the outer surface of the flow cell 1000. The cell outer surface 1100 may include a first cell coupling surface 1110. The first cell coupling surface 1110 may face the first fixing module 2100a and be in close contact with the first fixing module 2100a (see Figure 1 The pool outer surface 1100 may include a second pool coupling surface 1120. The second pool coupling surface 1120 may face the second fixing module 2100b and be in close contact with the second fixing module 2100b (see Figure 1 ). The pool coupling surfaces 1110 and 1120 may indicate at least one of the first pool coupling surface 1110 and the second pool coupling surface 1120 .

[0103] The cell outer surface 1100 may include a cell incident surface 1130. The cell incident surface 1130 may form the front side of the flow cell 1000. The cell incident surface 1130 may be a surface on which the laser beam is incident. The cell outer surface 1100 may include a cell transmission surface 1140. The cell transmission surface 1140 may form the back side of the flow cell 1000. The cell transmission surface 1140 may be a surface through which the laser beam passes and travels to the outside.

[0104] The cell inner surface 1200 may form the flow cell hollow portion 1050. The cell inner surface 1200 may include a first cell inner surface 1210 and a second cell inner surface 1220. The first cell inner surface 1210 may correspond to the first cell coupling surface 1110. The second cell inner surface 1220 may correspond to the second cell coupling surface 1120. The cell inner surface 1200 may include a third cell inner surface 1230 and a fourth cell inner surface 1240. The third cell inner surface 1230 may correspond to the cell incident surface 1130. The fourth cell inner surface 1240 may correspond to the cell transmission surface 1140.

[0105] Figure 7 and Figure 8 The fixing module and the resonance unit according to one embodiment of the present disclosure are shown when viewed from different angles.

[0106] Reference Figure 7 and Figure 8 , the resonance unit 3000 may include a front beam 3300. The front beam 3300 may form a front portion of the resonance unit 3000. The front beam 3300 may connect the first side case 3100 to the second side case 3200. The front beam 3300 may be coupled to each of the first side case 3100 and the second side case 3200. The front beam 3300 may be located behind the fixing module 2100.

[0107] A plurality of front beams 3300 may be provided. For example, the front beam 3300 may include an upper front beam 3310. The upper front beam 3310 may be coupled or connected to the upper ends of the side cases 3100 and 3200. For example, the lower front beam 3320 may be coupled or connected to the lower ends of the side cases 3100 and 3200.

[0108] The upper front cross beam 3310, the lower front cross beam 3320, the first fixing module 2100a and the second fixing module 2100b may form an opening. The opening formed by the upper front cross beam 3310, the lower front cross beam 3320, the first fixing module 2100a and the second fixing module 2100b may be closed by the flow cell 1000 (see Figure 1 ).

[0109] The first side case 3100 may be formed in a shape extending rearward from the first fixing module 2100a. For example, the first side case 3100 and the first fixing module 2100a may be integrally formed.

[0110] The second side case 3200 may be formed in a shape extending rearward from the second fixing module 2100b. For example, the second side case 3200 and the second fixing module 2100b may be integrally formed.

[0111] One end of the resonant plate 3710 may be coupled to the front beam 3300. For example, the front end of the resonant plate 3710 may be coupled to the upper front beam 3310. For another example, the front end of the resonant plate 3710 may be coupled to the lower front beam 3320.

[0112] At least one of the front and rear ends of the resonant plate 3710 may be coupled or fixed to the housings 3100, 3200, 3300, and 3400. The housings 3100, 3200, 3300, and 3400 may indicate at least one of the first side housing 3100, the second side housing 3200, the front beam 3300, or the rear housing 3400.

[0113] For example, the front end of the resonant plate 3710 may be coupled and fixed to the upper front beam 3300, and the rear end of the resonant plate 3710 may be separated from the housings 3100, 3200, 3300, and 3400. In this case, the front end of the resonant plate 3710 may be a fixed end, and the rear end may be a free end.

[0114] For example, the front end of the resonant plate 3710 may be coupled and fixed to the upper front beam 3300, and the rear end of the resonant plate 3710 may be coupled and fixed to the upper end of the rear case 3400. In this case, both the front and rear ends of the resonant plate 3710 may be fixed ends.

[0115] The combination and arrangement of the fixed end and the free end of the resonant plate 3710 may affect the natural frequency of the resonant plate 3710. The combination and arrangement of the fixed end and the free end of the resonant plate 3710 may be adjusted based on the frequency band of the sound wave to be measured.

[0116] The housings 3100, 3200, 3300, 3400 and 3500 may include a first side housing 3100, a second side housing 3200, a front cross beam 3300, a rear housing 3400, an upper housing 3500 (see Fig.15 ) or at least one of the lower housing (not shown).

[0117] The housings 3100, 3200, 3300, 3400, and 3500 may form a resonance space. The housings 3100, 3200, 3300, 3400, and 3500 may face the resonance space. The housings 3100, 3200, 3300, 3400, and 3500 and the resonance module 3700 may form a resonance space. The resonance module 3700 may be coupled to the housings 3100, 3200, 3300, 3400, and 3500.

[0118] Fig. 9 yes Figure 1 A three-dimensional view of the first fixing module 2100a. Fig.10 Shown is a section taken along B1-B2 Fig. 9 Cross section of the fixing module.

[0119] Reference Fig. 9 and Fig.10 , the first fixing module 2100a can be observed. The second fixing module 2100b (see Figure 1 ) may be similar to the structure of the first fixing module 2100a. For example, the first fixing module 2100a and the second fixing module 2100b (see Figure 1 ) The extension directions of the fixing body upper protrusion 2150 and the fixing body lower protrusion 2160 may be different from each other.

[0120] The fixing module 2100 may include a fixing body 2110. The fixing body 2110 may form the overall shape of the fixing module 2100. The fixing body 2110 may extend downward from an upper end and pass to a lower end.

[0121] The fixing body 2110 may be formed in the shape of a square column. For example, the fixing body 2110 may be formed in the shape of an outer surface. For example, the outer surface of the fixing body 2110 may be divided into four.

[0122] For example, the fixed body 2110 may include a fixed body coupling surface 2111. The fixed body coupling surface 2111 may form a portion of the outer surface of the fixed body 2110. The fixed body coupling surface 2111 may face and couple to the cell coupling surfaces 1110 and 1120 (see Figure 6 The shape of the fixed body coupling surface 2111 may correspond to the shape of the cell coupling surfaces 1110 and 1120 (see Figure 6 ).

[0123] For example, the fixing body coupling surface 2111 of the first fixing module 2100a may face and be coupled to the first cell coupling surface 1110 (see Figure 6 For example, the second fixing module 2100b (see Figure 1 ) can face and couple to the second cell coupling surface 1120 (see Figure 6 ).

[0124] The fixing body 2110 may include a fixing body front face 2112. The fixing body front face 2112 may form a front face of the fixing body 2110. The fixing body 2110 may include a fixing body back face 2113.

[0125] The fixed body back surface 2113 may form the back surface of the fixed body 2110. The fixed body back surface 2113 may be coupled to the side housings 3100 and 3200 (see Figure 7 and Figure 8 ).

[0126] For example, when the first fixing module 2100a is integrally formed with the first side housing 3100 (see Figure 7), the fixed body back side 2113 of the first fixed module 2100a may not be formed.

[0127] For example, when the second fixing module 2100b (see Figure 1 ) is formed integrally with the second side housing 3200 (see Figure 8 ), the second fixing module 2100b may not be formed (see Figure 1 ) on the back side of the fixed body.

[0128] The fixing body 2110 may include a fixing body side surface 2114. The fixing body side surface 2114 may be located opposite to the fixing body coupling surface 2111.

[0129] The fixing module 2100 may include a fixing body upper protrusion 2150. The fixing body upper protrusion 2150 may protrude upward from the upper end of the fixing body 2100. The fixing body upper protrusion 2150 may form a stepped portion with the upper end of the fixing body 2100.

[0130] Reference Figure 7 and Fig. 9 , the protrusion 2150 on the fixing body may be formed in a shape extending in one direction. For example, the protrusion 2150 on the fixing body of the first fixing module 2100a may be formed in a shape extending horizontally. For example, the protrusion 2150 on the fixing body of the first fixing module 2100a may be formed in a shape extending in the front-rear direction.

[0131] For example, the protrusion 2150 on the fixing body of the second fixing module 2100b may be formed in a horizontally extending shape. For example, the protrusion 2150 on the fixing body of the second fixing module 2100b may be formed in a shape extending in the left-right direction. In other words, the direction in which the protrusion 2150 on the fixing body of the first fixing module 2100a extends may cross or intersect with the direction in which the protrusion 2150 on the fixing body of the second fixing module 2100b extends.

[0132] The fixing module 2100 may include a fixing body lower protrusion 2160. The fixing body lower protrusion 2160 may protrude downward from the lower end of the fixing body 2100. The fixing body lower protrusion 2160 may form a stepped portion with the lower end of the fixing body 2100.

[0133] The fixing body protrusions 2150 and 2160 may indicate at least one of the fixing body upper protrusion 2150 and the fixing body lower protrusion 2160 .

[0134] Reference Figure 7 and Fig. 9, the fixing body lower protrusion 2160 may be formed into a horizontally extending shape. The direction in which the fixing body lower protrusion 2160 extends horizontally may intersect or intersect with the direction in which the fixing body upper protrusion 2150 extends. For example, the fixing body lower protrusion 2160 of the first fixing module 2100a may be formed into a shape extending in the left-right direction.

[0135] For example, the fixing body lower protrusion 2160 of the second fixing module 2100b may be formed in a shape extending in the front-rear direction. In other words, the extending direction of the fixing body lower protrusion 2160 of the first fixing module 2100a may cross or intersect with the extending direction of the fixing body lower protrusion 2160 of the second fixing module 2100b.

[0136] The fixed body upper protrusion 2150 may include an upper protrusion coupling hole 2155. The fixed body upper protrusion 2150 may be coupled to the upper bridge module 2501 (see Figure 1 ).

[0137] The fixed body lower protrusion 2160 may include a lower protrusion coupling hole (not shown). The fixed body lower protrusion 2160 may be coupled to the lower bridge module 2502 (see Figure 1 ). The protrusion coupling hole 2155 may indicate at least one of an upper protrusion coupling hole 2155 and a lower protrusion coupling hole (not shown).

[0138] Fig.11 and Fig.12 The bridge module 2500 according to one embodiment of the present disclosure is shown when viewed from different directions.

[0139] Reference Fig.11 and Fig.12 , the upper bridge module 2501 can be observed. The lower bridge module 2502 (see Figure 1 ) can be similar to the structure of the upper bridge module 2501. For example, the upper bridge module 2501 and the lower bridge module 2502 (see Figure 1 ) may be different from each other in the extending directions of the first bridge groove 2515 and the second bridge groove 2525 .

[0140] The bridge module 2500 may include a bridge body 2505. The bridge body 2505 may form the overall shape of the bridge module 2500. The bridge body 2505 may form a bridge body coupling surface 2506. The bridge body coupling surface 2506 may face the fixing module 2100 (see Figure 1 The bridge body 2505 may include a bridge body opposite surface 2507. The bridge body opposite surface 2507 may be positioned opposite to the bridge body coupling surface 2506.

[0141] The bridge module 2500 may include a first bridge portion 2510. The first bridge portion 2510 may be a portion of the bridge body 2505. The first bridge portion 2510 may be coupled to the first fixing module 2100a (see Figure 1 ).

[0142] The first bridge portion 2510 may include a first bridge groove 2515. The first bridge groove 2515 may be coupled to the first fixing module 2100a (see Figure 1 ) of the fixing body protrusions 2150 and 2160 (see Fig. 9 ). The first bridging groove 2515 may be recessed into the bridging body coupling surface 2506 .

[0143] The first bridge portion 2510 may include a first bridge fastening hole 2513. The first bridge fastening hole 2513 may be recessed in the bridge body opposite surface 2507. The first bridge fastening hole 2513 may be connected to the first bridge groove 2515. The first bridge fastening hole 2513 may be connected to the first fixing module 2100a (see Figure 1 ) of the protruding coupling hole 2155 (see Fig. 9 ) connected.

[0144] The screw inserted into the first bridge fastening hole 2513 can be inserted into and fixed to the fixing body protrusions 2150 and 2160 located in the first bridge groove 2515 (see Fig. 9 ) of the protruding coupling hole 2155 (see Fig. 9 Through this process, the first fixing module 2100a (see Fig. 9 ) and the bridge module 2500 can be coupled to each other.

[0145] The bridging module 2500 may include a second bridging portion 2520. The second bridging portion 2520 may be another portion of the bridging body 2505. The second bridging portion 2520 may be coupled to the second fixing module 2100b (see Figure 1 ).

[0146] The second bridge portion 2520 may include a second bridge groove 2525. The second bridge groove 2525 may be coupled to the second fixing module 2100b (see Figure 1 ) of the fixing body protrusions 2150 and 2160 (see Fig. 9 ). The second bridging groove 2525 may be recessed into the bridging body coupling surface 2506 .

[0147] The second bridge portion 2520 may include a second bridge fastening hole 2523. The second bridge fastening hole 2523 may be recessed in the bridge body opposite surface 2507. The second bridge fastening hole 2523 may be communicated with the second bridge groove 2525. The second bridge fastening hole 2523 may be connected to the second fixing module 2100b (see Figure 1) of the protruding coupling hole 2155 (see Fig. 9 ) connected.

[0148] The screw inserted into the second bridge fastening hole 2523 can be inserted into and fixed to the fixing body protrusions 2150 and 2160 located in the second bridge groove 2525 (see Fig. 9 ) of the protruding coupling hole 2155 (see Fig. 9 Through this process, the second fixing module 2100b (see Fig. 9 ) and the bridge module 2500 may be coupled to each other. The bridge fastening holes 2513 and 2523 may indicate at least one of the first bridge fastening hole 2513 and the second bridge fastening hole 2523.

[0149] The bridge module 2500 may include a third bridge portion 2530. The third bridge portion 2530 may be another portion of the bridge body 2505. The third bridge portion 2530 may be located between the first bridge portion 2510 and the second bridge portion 2520.

[0150] The third bridge 2530 can be coupled to the flow cell 1000 (see Figure 1 ). The third bridge portion 2530 may include a third bridge hollow portion 2531. The third bridge hollow portion 2531 may be formed in the third bridge portion 2530. The third bridge hollow portion 2531 may extend from the bridge body coupling surface 2506 and be connected to the bridge body opposite surface 2507. The third bridge hollow portion 2531 may be connected to the flow cell hollow portion 1050 (see Figure 5 ) connected.

[0151] The third bridge portion 2530 may include a third bridge mounting opening 2533. The third bridge mounting opening 2533 may be formed in the bridge body coupling surface 2506. The third bridge mounting opening 2533 may be coupled to the flow cell 1000 (see Figure 1 ). The third bridge mounting opening 2533 may be connected to the third bridge hollow portion 2531. The third bridge mounting opening 2533 may be located between the first bridge groove 2515 and the second bridge groove 2525.

[0152] The third bridge portion 2530 may include a third bridge external opening 2534. The third bridge external opening 2534 may be formed in the bridge body opposite surface 2507. The third bridge external opening 2534 may be connected to a flow cell extension tube 2535 (see Figure 1 The third bridging outer opening 2534 may be located between the first bridging fastening hole 2513 and the second bridging fastening hole 2523. The third bridging outer opening 2534 may be connected to the third bridging hollow portion 2531.

[0153] Reference Figures 9 to 12In the first fixing module 2100a and the second fixing module 2100b, the directions in which the fixing body upper protrusions 2150 extend may be different. Alternatively, in the first fixing module 2100a and the second fixing module 2100b, the directions in which the fixing body lower protrusions 2160 extend may be different.

[0154] Therefore, the following effects can be obtained. Since the bolt rotates when the bolt is inserted into and coupled to the bridge fastening holes 2513 and 2523 and the protrusion coupling hole 2155, the flow cell 1000 (see Figure 1 ) may be subjected to torsional force. Due to the above arrangement of the fixing body protrusions 2150 and 2160, the flow cell 1000 (see Figure 1 ) is subjected to torsional force.

[0155] Fig.13 The particle measuring device according to one embodiment of the present disclosure is shown when viewed from above.

[0156] Reference Fig.13 The resonant plate 3710 may be disposed between the upper end of the first side housing 3100 and the upper end of the second side housing 3200. The resonant plate 3710 may be fastened to the upper front cross beam 3310 (see Figure 7 ). For example, the front end of the resonant plate 3710 may be fastened to the upper front crossbeam 3310 (see Figure 7 ). For example, the front end of the resonant plate 3710 may be coupled to the upper front cross beam 3310 via the resonant plate fixing member 3720 (see Figure 7 ). The front end of the resonance plate 3710 may be a fixed end. The resonance plate fixing portion 3720 may be a bolt or a screw.

[0157] The resonant plate 3710 may be disposed between the first side case 3100 and the second side case 3200. The resonant plate 3710 may be separated from the first side case 3100 and the second side case 3200. The resonant plate 3710 may be separated from the rear case 3400. That is, the rear end of the resonant plate 3710 may be a free end.

[0158] The first side case 3100 may include a first side fastening hole 3110. The first side fastening hole 3110 may be formed at an upper end of the first side case 3100. A plurality of first side fastening holes 3110 may be provided. The plurality of first side fastening holes 3110 may be arranged to be spaced apart from each other in the front-rear direction.

[0159] The second side housing 3200 may include a second side fastening hole 3210. The second side fastening hole 3210 may be formed at an upper end of the second side housing 3200. A plurality of second side fastening holes 3210 may be provided. The plurality of second side fastening holes 3210 may be arranged to be spaced apart from each other in the front-rear direction. The side fastening holes 3110 and 3210 may indicate at least one of the first side fastening hole 3110 and the second side fastening hole 3210.

[0160] Fig.14 It is shown that the sliding bar according to one embodiment of the present disclosure is installed in the first side case and the second side case.

[0161] Reference Fig.14 , the sliding module 3800 may include a sliding rod 3810. The sliding rod 3810 may be located on one surface of the resonant plate 3710. For example, at least a portion of the sliding rod 3810 may be located on an upper surface of the resonant plate 3710.

[0162] The sliding rod 3810 may include a sliding rod body 3811. The sliding rod body 3811 may form the overall shape of the sliding rod 3810. The sliding rod body 3811 may form a shape extending from one end and passing to the other end.

[0163] The sliding rod body 3811 may divide the surface of the resonance plate 3710 in the front-rear direction. That is, the sliding rod body 3811 may cross the resonance plate 3710 in the lateral direction.

[0164] The sliding rod hole 3812 may be formed at both ends of the sliding rod body 3811. The sliding rod hole 3812 located at one end of the sliding rod body 3811 may correspond to the first side fastening hole 3110. The sliding rod hole 3812 located at the other end of the sliding rod body 3811 may correspond to the second side fastening hole 3210.

[0165] When bolts are sequentially inserted into and fastened to the sliding rod hole 3812 and the side fastening holes 3110 and 3210 , the sliding rod body 3811 may connect the first side case 3100 to the second side case 3200 .

[0166] When the bolts are sequentially inserted and fastened to the sliding rod hole 3812 and the side fastening holes 3110 and 3210, the sliding rod body 3811 may contact the surface of the resonant plate 3710. The resonant plate 3710 may not vibrate at the position where the resonant plate 3710 contacts the sliding rod body 3811. That is, the resonant plate 3710 may form a fixed end at the position where the resonant plate 3710 contacts the sliding rod body 3811. Therefore, the natural frequency of the resonant plate 3710 may be adjusted by adjusting the setting position of the sliding rod body 3811.

[0167] Fig.15A resonance unit having a sliding slit formed in an upper housing is shown. Fig.16 Shown is a cross section along D1-D2 Fig.15 cross section.

[0168] Reference Fig.15 and Fig.16 , the resonance unit 3000 may include an upper case 3500. The upper case 3500 may include an upper case plate 3510. The upper case plate 3510 may form at least a portion of the upper surface of the resonance unit 3000. The upper case plate 3510 may be connected to the side cases 3100 and 3200 and the rear case 3400.

[0169] The upper case 3500 may include a receiving opening (not shown). The receiving opening (not shown) may be formed on the upper case plate 3510. The receiving opening (not shown) may receive the resonance plate 3710.

[0170] The upper housing 3500 may include a sliding opening 3520. The sliding opening 3520 may include a first sliding opening 3521 and a second sliding opening 3522. The sliding opening 3520 may indicate at least one of the first sliding opening 3521 and the second sliding opening 3522.

[0171] The first sliding opening 3521 may be adjacent to the first side case 3100 . The second sliding opening 3522 may be adjacent to the second side case 3200 .

[0172] The first sliding opening 3521 may be provided between the first side case 3100 and the second sliding opening 3522. The first sliding opening 3521 may be formed between the first side case 3100 and the resonance plate 3710.

[0173] The second sliding opening 3522 may be provided between the first sliding opening 3521 and the second side case 3200 . The second sliding opening 3522 may be formed between the second side case 3200 and the resonant plate 3710 .

[0174] The sliding opening 3520 may be formed in an elongated shape in one direction. Alternatively, the sliding opening 3520 may have an extended shape in one direction. For example, the sliding opening 3520 may be formed in a shape extending in the front-rear direction.

[0175] Fig.17 shows the sliding rod connected to the Fig.15 Sliding opening shown. Fig.18 Shown is a section taken along E1-E2 Fig.17 cross section.

[0176] Reference Fig.17 and Fig.18, a plurality of sliding bars 3810 may be provided. For example, the sliding bar 3810 may include a first sliding bar 3810a and a second sliding bar 3810b. The sliding bar 3810 may indicate at least one of the first sliding bar 3810a and the second sliding bar 3810b.

[0177] The first sliding rod 3810a may be located on one surface of the resonant plate 3710. The second sliding rod 3810b may be located on the other surface of the resonant plate 3710. The resonant plate 3710 may be located between the first sliding rod 3810a and the second sliding rod 3810b.

[0178] Holes may be formed at both ends of the sliding rod 3810. The holes formed at both ends of the sliding rod 3810 may communicate with the sliding opening 3520. The hole formed at one end of the sliding rod 3810 may be referred to as a "first fixing hole". The hole formed at the other end of the sliding rod 3810 may be referred to as a "second fixing hole".

[0179] A thread may be formed on the outer surface of each of the holes formed at both ends of the sliding rod 3810. The thread formed on the outer surface of each of the holes formed at both ends of the sliding rod 3810 may be referred to as a "sliding rod thread".

[0180] The sliding module 3800 may include a fixing portion 3820. The fixing portion 3820 may be received in the sliding opening 3520. The fixing portion 3820 may move along the sliding opening 3520 in the sliding opening 3520.

[0181] The fixing portion 3820 coupled to the first fixing hole of the sliding rod 3810 may be referred to as a “first fixing portion”. The fixing portion 3820 coupled to the second fixing hole of the sliding rod 3810 may be referred to as a “second fixing portion”. The first fixing portion may be received in the first sliding opening 3521 and coupled to the first sliding opening 3521. The second fixing portion may be received in the second sliding opening 3522 and coupled to the second sliding opening 3522.

[0182] The fixing portion 3820 may include a bolt or a screw. A thread may be formed on the outer surface of the fixing portion 3820. The thread formed on the outer surface of the fixing portion 3820 may be referred to as a “fixing portion thread.” The sliding rod thread may be coupled to the fixing portion thread.

[0183] Reference Fig.17 and Fig.18 , the sliding opening 3520 except for the portion covered by the sliding rod 3810 may be exposed to the outside. The sliding module 3800 may include a shielding member (not shown) that shields the sliding opening 3520 exposed to the outside.

[0184] Fig.19 shows the Fig.18Slide lever as shown. Fig.19 For ease of explanation, only the sliding module may be displayed.

[0185] Reference Fig.18 and Fig.19 Before the sliding rod 3810 is in close contact with the resonance plate 3710, the sliding rod 3810 may form a curved shape toward the resonance plate 3710. For example, the first sliding rod 3810a and the second sliding rod 3810b may form a curved shape toward the resonance plate 3710.

[0186] The sliding rod 3810 may have elasticity. When the fixing portion 3820 rotates, the sliding rod thread and the fixing portion thread may engage with each other, thereby allowing the end of the sliding rod 3810 to move. For example, when the fixing portion 3820 rotates, the end of the sliding rod 3810 may move toward the upper housing plate 3510 (see Fig.17 ).

[0187] When the end of the first sliding rod 3810a and the end of the second sliding rod 3810b move toward the upper housing plate 3510 (see Fig.17 ), the sliding rod 3810 can become flatter. Since the sliding rod 3810 has elasticity, the sliding rod 3810 can provide elastic force to the resonance plate 3710.

[0188] That is, the resonant plate 3710 may be in contact with and coupled to the sliding rod 3810 by the elastic force of the sliding rod 3810. Therefore, the resonant plate 3710 may form a fixed end at a position where the resonant plate 3710 contacts the sliding rod 3810. When the fixing portion 3820 moves along the sliding opening 3520 in the sliding opening 3520, the natural frequency of the resonant plate 3710 may be adjusted.

[0189] Reference Figures 17 to 19 The sliding rod 3810 may be provided separately. For example, the sliding rod 3810 may be disposed on the upper surface of the resonant plate 3710. For another example, the sliding rod 3810 may be disposed on the lower surface of the resonant plate 3710.

[0190] Before the sliding bar 3810 is in close contact with the resonant plate 3710, the sliding bar 3810 may form a bent shape toward the resonant plate 3710. For example, the sliding bar 3810 may form a convex shape toward the resonant plate 3710.

[0191] For another example, the resonant plate 3710 may be spaced apart from the housings 3100, 3200, 3300, 3400, and 3500. For example, the resonant plate 3710 may be located in the resonant space. In this case, a "connection member" may be formed that connects one end of the resonant plate 3710 to the housings 3100, 3200, 3300, 3400, and 3500. The end of the resonant plate 3710 may be fixed to the connection member to form a fixed end.

[0192] Fig. 20 Shown is a section taken along A1-A2 Figure 7 A cross section of the resonant unit and mounting unit is shown. Fig. 20 , for ease of explanation, a cross section of the flow cell 1000 may be shown together.

[0193] Reference Fig. 20 , the resonance unit 3000 may form a resonance space inside. The resonance unit 3000 may include a lower housing (not shown). The resonance space may be formed by the side housings 3100 and 3200, the lower housing (not shown), the bridge module 2500 (see Figure 1 ), the rear housing 3400 and the upper portion are formed. Here, the upper portion may include a resonant plate 3710 (see Figure 1 ) and upper housing 3500 (see Fig.17 ) at least one of ).

[0194] The resonance unit 3000 may include a resonance space adjusting module 3900. The resonance space adjusting module 3900 may include a resonance space adjusting plate 3910. The resonance space adjusting plate 3910 may be located between the first side case 3100 and the second side case 3200.

[0195] The resonance space adjustment plate 3910 may be disposed adjacent to the side housings 3100 and 3200. The resonance space adjustment plate 3910 may be located on or coupled to the inner surfaces of the housings 3100, 3200, 3300, 3400, and 3500. For example, the resonance space adjustment plate 3910 may be movably coupled to the inner surfaces of the housings 3100, 3200, 3300, 3400, and 3500.

[0196] A plurality of resonance space adjusting plates 3910 may be provided. The resonance space adjusting plate 3910 may include a first resonance space adjusting plate 3911 and a second resonance space adjusting plate 3912. The resonance space adjusting plate 3910 may indicate at least one of the first resonance space adjusting plate 3911 and the second resonance space adjusting plate 3912.

[0197] The first resonance space adjustment plate 3911 and the second resonance space adjustment plate 3912 may be spaced apart from each other. For example, the first resonance space adjustment plate 3911 and the second resonance space adjustment plate 3912 may face each other. The first resonance space adjustment plate 3911 and the second resonance space adjustment plate 3912 may move away from each other or approach each other.

[0198] The first resonance space adjusting plate 3911 may be adjacent to the first side case 3100. The first resonance space adjusting plate 3911 may be located between the first side case 3100 and the second resonance space adjusting plate 3912.

[0199] The second resonance space adjusting plate 3912 may be adjacent to the second side case 3200. The second resonance space adjusting plate 3912 may be located between the second side case 3200 and the first resonance space adjusting plate 3911.

[0200] The resonance space adjusting plate 3910 may face the resonance space. In other words, the shape and / or size of the resonance space may be changed by the resonance space adjusting plate 3910.

[0201] Reference Figures 1 to 20 Although not shown, the resonant plate 3710 may be coupled to the side cases 3100 and 3200. For example, the side cases 3100 and 3200 may include a receiving opening as an opening. The resonant plate 3710 may be positioned in the receiving opening of the side cases 3100 and 3200. One end of the resonant plate 3710 may be coupled and fixed to the side cases 3100 and 3200.

[0202] Fig.21 Taken along A1-A2 Figure 7 The cross-section of the resonant unit and the mounting unit shown shows that the resonant space adjustment plate 3910 is moved by the plate mover 3920. Fig.21 , for ease of explanation, a cross section of the flow cell 1000 may be shown together.

[0203] Reference Fig. 20 and Fig.21 , the resonance space adjusting module 3900 may include a plate mover 3920. The plate mover 3920 may be coupled or fixed to the housings 3100, 3200, 3300, 3400, and 3500. The plate mover 3920 may be connected or coupled to the resonance space adjusting plate 3910, and may move the resonance space adjusting plate 3910.

[0204] The plate mover 3920 may include a connection shaft 3921. The connection shaft 3921 may be connected to the resonance space adjusting plate 3910 and the side cases 3100 and 3200, and the resonance space adjusting plate 3910 may move along the connection shaft 3921.

[0205] When the resonance space adjustment plate 3910 moves, the shape and / or size of the resonance space may change. For example, the first resonance space adjustment plate 3911 and the second resonance space adjustment plate 3912 may move closer to or farther from each other. Fig. 20 Compared to the resonant space shown, Fig.21 The resonance space shown may be smaller in size and narrower in width.

[0206] If the shape and / or size of the resonance space is changed, the resonance frequency of the resonance space may be changed. Therefore, the resonance frequency of the resonance space may be adjusted by adjusting the position of the resonance space adjustment plate 3910.

[0207] Fig. 22 Taken along A1-A2 Figure 7 The cross-section of the resonance unit and the mounting unit shown shows that the resonance space adjustment plate 3910 is bent according to one embodiment of the present disclosure. Fig. 22 , for ease of explanation, a cross section of the flow cell 1000 may be shown together.

[0208] Reference Fig. 20 and Fig. 22 , the first resonance space adjusting plate 3911 may be bent toward the second resonance space adjusting plate 3912. For example, the second resonance space adjusting plate 3912 may be bent toward the first resonance space adjusting plate 3911.

[0209] The first resonance space adjustment plate 3911 may be divided into two sections. For example, the first resonance space adjustment plate 3911 may include a first front resonance space adjustment plate 3911f and a first rear resonance space adjustment plate 3911r. The first front resonance space adjustment plate 3911f and the first rear resonance space adjustment plate 3911r may be connected to each other.

[0210] The second resonance space adjustment plate 3912 may be divided into two sections. For example, the second resonance space adjustment plate 3912 may include a second front resonance space adjustment plate 3912f and a second rear resonance space adjustment plate 3912r. The second front resonance space adjustment plate 3912f and the second rear resonance space adjustment plate 3912r may be connected to each other.

[0211] For example, the first front resonance space adjustment plate 3911f and the second front resonance space adjustment plate 3912f may face each other, as shown in FIG. Fig. 20 shown.

[0212] When the first resonance space adjusting plate 3911 is bent toward the second resonance space adjusting plate 3912 or the second resonance space adjusting plate 3912 is bent toward the first resonance space adjusting plate 3911, the first front resonance space adjusting plate 3911f and the second front resonance space adjusting plate 3912f may face each other at a certain angle.

[0213] For example, the first rear resonance space adjustment plate 3911r and the second rear resonance space adjustment plate 3912r may face each other, as shown in FIG. Fig. 20 shown.

[0214] The front resonance space adjusting panels 3911f and 3912f may include or indicate at least one of the first front resonance space adjusting panel 3911f and the second front resonance space adjusting panel 3912f.

[0215] The rear resonance space adjusting panels 3911r and 3912r may include or indicate at least one of the first rear resonance space adjusting panel 3911r and the second rear resonance space adjusting panel 3912r.

[0216] The resonance space adjusting plate 3910 may be bent at the boundary between the front resonance space adjusting plates 3911f and 3912f and the rear resonance space adjusting plates 3911r and 3912r. For example, the resonance space adjusting plate 3910 may be convex toward the resonance space.

[0217] When the first resonance space adjusting plate 3911 is bent toward the second resonance space adjusting plate 3912 or the second resonance space adjusting plate 3912 is bent toward the first resonance space adjusting plate 3911, the first rear resonance space adjusting plate 3911r and the second rear resonance space adjusting plate 3912r may face each other at a certain angle.

[0218] When the first resonance space adjustment plate 3911 is bent toward the second resonance space adjustment plate 3912 or the second resonance space adjustment plate 3912 is bent toward the first resonance space adjustment plate 3911, the width between the first resonance space adjustment plate 3911 and the second resonance space adjustment plate 3912 can be reduced and increased while the width is from the flow cell 1000 to the rear housing opening 3420. Therefore, the amplification effect of the sound wave can be increased.

[0219] The resonance space may be divided into two when the first resonance space adjusting plate 3911 is bent toward the second resonance space adjusting plate 3912 or the second resonance space adjusting plate 3912 is bent toward the first resonance space adjusting plate 3911. For example, the resonance space may be divided into the first resonance space and the second resonance space.

[0220] The first resonance space may be a portion of the resonance space located between the first front resonance space adjusting plate 3911f and the second front resonance space adjusting plate 3912f.

[0221] The second resonance space may be a portion of the resonance space located between the first rear resonance space adjusting plate 3911r and the second rear resonance space adjusting plate 3912r.

[0222] Fig.23A housing according to one embodiment of the present disclosure is shown.

[0223] Reference Fig.23 The housings 3100, 3200, 3300, 3400, 3500, and 3600 may include an upper housing 3500 and a lower housing 3600. The upper housing 3500 may connect an upper end of the first side housing 3100 to an upper end of the second side housing 3200. The upper housing 3500 may form an upper surface of the resonance unit 3000.

[0224] The lower case 3600 may connect the lower end of the first side case 3100 to the lower end of the second side case 3200. The lower case 3600 below the upper case 3500 may face the upper case 3500. The lower case 3600 may form a lower side of the resonance unit 3000.

[0225] Fig.24 Shown is a cross section along D1-D2 Fig.23 A cross section of the housing is shown. Fig.25 Shows Fig.24 The resonance space conditioning plate shown moves.

[0226] Reference Fig.24 The resonance space adjusting plate 3910 may be located on the inner surface of the housings 3100, 3200, 3300, 3400, 3500, and 3600. For example, the resonance space adjusting plate 3910 may contact the inner surface of the first side housing 3100.

[0227] The resonance space adjustment plate 3910 may be formed with two ends. For example, the resonance space adjustment plate 3910 may include a first end 3910j and a second end 3910k. The resonance space adjustment plate 3910 may be formed in a shape extending from the first end 3910j and passing to the second end 3910k.

[0228] Reference Fig.25 , the resonance space adjustment plate 3910 may move on the inner surface of the housings 3100 , 3200 , 3300 , 3400 , 3500 and 3600 .

[0229] For example, the first end 3910j of the resonance space adjusting plate 3910 may movably contact the inner surface of the first side case 3100. The first side case 3100 contacting the first end 3910j of the resonance space adjusting plate 3910 may be referred to as a 'first case'.

[0230] For example, the second end 3910k of the resonance space adjustment plate 3910 may be movably contacted with the inner surface of the lower housing 3600. The lower housing 3600 contacting the second end 3910k of the resonance space adjustment plate 3910 may be referred to as a “second housing”. The first housing and the second housing may be connected to each other to form an angle.

[0231] In other words, the resonance space adjustment plate 3910 can change its posture relative to the housings 3100, 3200, 3300, 3400, 3500, and 3600 while in contact with the inner surfaces of the housings 3100, 3200, 3300, 3400, 3500, and 3600. When the resonance space adjustment plate 3910 changes its posture relative to the housings 3100, 3200, 3300, 3400, 3500, and 3600 while in contact with the inner surfaces of the housings 3100, 3200, 3300, 3400, 3500, and 3600, at least one of the shape and size of the resonance space can be changed. Therefore, the resonance frequency of the resonance unit 3000 can be changed.

[0232] For another example, the resonance space adjustment plate 3910 may be flexible. For example, the first end 3910j of the resonance space adjustment plate 3910 may be fixed to the first side housing 3100, and the second end 3910k of the resonance space adjustment plate 3910 may be movably contacted with the inner surface of the lower housing 3600. Therefore, at least one of the shape and size of the resonance space may be changed, and the resonance frequency of the resonance unit 3000 may be changed.

[0233] Some embodiments or other embodiments of the present disclosure described above are not mutually exclusive or different from each other. The configurations or functions of some embodiments or other embodiments of the present disclosure described above may be used together or in combination with each other.

[0234] It is obvious to those skilled in the art that the present disclosure may be embodied in other specific forms without departing from the spirit and essential features of the present disclosure. Therefore, the above detailed description should not be interpreted as limiting in all aspects and should be considered illustrative. The scope of the present disclosure should be determined by a reasonable interpretation of the attached claims, and all modifications within the equivalent scope of the present disclosure are included within the scope of the present disclosure.

Claims

1. A particle measuring device, comprising: A mounting unit for fixing the flow cell; as well as a resonance unit disposed behind the mounting unit, the resonance unit forming a resonance space open forward and backward, The resonance unit comprises: a housing disposed behind the mounting unit and forming the resonance space; as well as A resonance space adjustment module is located in the housing and adjusts at least one of a shape and a size of the resonance space.

2. The particle measuring device according to claim 1, wherein: The resonance space adjustment module includes a resonance space adjustment plate movably coupled to an inner surface of the housing.

3. The particle measuring device according to claim 2, wherein: When the resonance space adjustment plate moves, at least one of a shape and a size of the resonance space is adjusted.

4. The particle measuring device according to claim 2, wherein: The resonance space adjustment module includes a plate mover fixed to the housing and coupled to the resonance space adjustment plate to move the resonance space adjustment plate.

5. The particle measuring device according to claim 4, wherein: The plate mover includes a connecting shaft fixed to the housing, and Wherein, the plate mover is movably coupled to the connecting shaft.

6. The particle measuring device according to claim 2, wherein: The resonance space adjusting plate includes a first resonance space adjusting plate and a second resonance space adjusting plate facing each other.

7. The particle measuring device according to claim 6, wherein: The first resonance space adjusting plate and the second resonance space adjusting plate may be moved so that they are closer to each other or farther away from each other.

8. The particle measuring device according to claim 2, wherein: At least a portion of the resonance space adjustment plate is movable toward the resonance space.

9. The particle measuring device according to claim 2, wherein: The resonance space adjusting plate can be bent convexly toward the resonance space.

10. The particle measuring device according to claim 9, wherein The resonance space adjustment plate includes a front resonance space adjustment plate and a rear resonance space adjustment plate connected to each other.

11. The particle measuring device according to claim 10, wherein The resonance space adjusting panel may be bent at a boundary between the front resonance space adjusting panel and the rear resonance space adjusting panel.

12. The particle measuring device according to claim 2, wherein: The resonance space adjustment plate is movable along the inner surface of the shell.

13. The particle measuring device according to claim 12, wherein: The housing includes a first housing and a second housing connected to each other to form an angle, One end of the resonance space adjustment plate is movably in contact with the inner surface of the first shell, and The other end of the resonance space adjustment plate is movably in contact with the inner surface of the second shell.

14. The particle measuring device according to claim 12, wherein When the resonance space adjusting plate moves along the inner surface of the housing, the posture of the resonance space adjusting plate changes relative to the housing.

15. The particle measuring device according to claim 12, wherein: The housing includes a first housing and a second housing connected to each other to form an angle, One end of the resonance space adjustment plate is fixed to the inner surface of the first shell, and The other end of the resonance space adjustment plate is movably in contact with the inner surface of the second shell.

16. The particle measuring device according to claim 15, wherein The resonance space adjusting panel is flexible.

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