Semiconductor test sorting mechanism

Abstract

The invention relates to the field of sorting devices for sorting articles, in particular to a semiconductor test sorting mechanism which comprises a base plate, a tray assembly and a first driving assembly. The material disc assembly comprises a multi-grid material disc and a first horizontal telescopic piece used for driving the multi-grid material disc to move front and back. A transfer assembly and a first multi-directional driving assembly are arranged beside the tray assembly; the crawler belt assembly comprises a belt, and a plurality of insulating material boxes are arranged on the belt in the length direction of the belt in parallel at equal intervals. A detection assembly is arranged beside the track assembly; a sorting assembly and a second multi-direction driving assembly are arranged beside the tail end of the crawler belt assembly. An existing sorting mechanism has the problems that chips are prone to being scratched in the feeding process, and the detection efficiency is low. According to the semiconductor testing and sorting mechanism, chips are not prone to being scratched in the feeding process, and the detection efficiency is high.

Description

Technical Field

[0001] The present invention relates to the field of sorting devices for sorting articles, and in particular to a semiconductor testing and sorting mechanism. Background Art

[0002] Chip (also called integrated circuit, IC for short) is a general term for semiconductor component products, which are indispensable components in electronic devices and systems. Chip manufacturing technology is relatively complex, mainly including material growth, wafer manufacturing, circuit design, manufacturing equipment, measurement tools, chip packaging and chip testing.

[0003] When testing chips, a sorting mechanism is used. It is a device that completes the testing and sorting of circuit chips by conversion and pick-and-place, so it is also called a semiconductor testing and sorting mechanism. Its work flow mainly includes loading-testing-sorting. Existing sorting mechanisms usually first transport the chip to the test position through a vibrating loading device such as a vibrating plate, and then suspend loading and wait for the test module to detect the chip. After the test is completed, the sorting module classifies the chip according to the test results and places it in a designated position to wait for it to be moved to the next production process. Then the vibrating loading device transports the new chip to the test position and repeats the above process. In this process, the chip is easily scratched due to scratches during loading, and after each test is completed, the test module needs to wait for the next chip to arrive at the test position. It is impossible to directly detect the next chip to achieve continuous detection, so the detection efficiency is low.

[0004] Therefore, the existing sorting mechanism has the problem that the chips are easily scratched during loading and the detection efficiency is low. Summary of the invention

[0005] The technical problem to be solved by the present invention is to overcome the disadvantages of the above-mentioned prior art and provide a semiconductor testing and sorting mechanism in which the chips are not easily scratched during loading and the detection efficiency is high.

[0006] In order to solve the above technical problems, the present invention provides a semiconductor testing and sorting mechanism comprising a substrate, on the top of which a tray assembly for placing a plurality of chips and a first driving assembly for driving the tray assembly to move left and right are arranged; the tray assembly comprises a multi-grid tray, and the multi-grid tray comprises a plurality of first grids for placing chips arranged in a matrix; a transfer assembly capable of transferring chips on the tray assembly to a crawler assembly capable of conveying chips from right to left and a first multi-directional driving assembly for driving the transfer assembly to move forward and backward or up and down are arranged next to the tray assembly; the crawler assembly comprises a belt, and a first multi-directional driving assembly is arranged along the length of the belt. A plurality of insulating material boxes are arranged parallel to each other and at equal intervals in the degree direction, and the insulating material boxes include at least three second grids for placing chips which are arranged in a straight line from front to back; a detection component which can be raised and lowered and is used to detect the chips on the track assembly is arranged next to the track assembly; the detection component includes probe cards for detecting the chips in the second grids, and the number and positions of the probe cards match the number and positions of at least three second grids; a sorting component for classifying and placing the detected chips on the track assembly on the sorting placement piece and a second multi-directional driving component for driving the sorting component to move forward and backward or up and down are arranged next to the end of the track assembly.

[0007] As a further improvement of the present invention: the material tray assembly includes a first horizontal telescopic member for driving the multi-grid material tray to move forward and backward and a limiting tray support for placing the multi-grid material tray, a tray support bracket for the limiting tray support to slide forward and backward is arranged under the limiting tray support, and the first horizontal telescopic member is fixedly mounted on the tray support bracket.

[0008] Preferably, the first driving assembly includes an inverted U-shaped frame fixedly mounted on the top of the base plate; fixed plates are vertically mounted on the left and right sides of the bottom of the disc support bracket, at least two horizontal slide bars are vertically mounted between the two fixed plates, a horizontal limit block for the at least two horizontal slide bars to slide left and right is fixedly mounted on the top of the inverted U-shaped frame, and a through hole is provided on the horizontal limit block for the two horizontal slide bars to pass through; a horizontal rack is vertically mounted between the two fixed plates, a gear meshing with the horizontal rack is provided above the horizontal limit block, and a first vertical motor for driving the gear to rotate is fixedly mounted below the top of the inverted U-shaped frame.

[0009] As a further improvement of the present invention: the crawler assembly includes two horizontal rollers, the belt is wound around the two horizontal rollers, and one of the horizontal rollers is driven by the first horizontal motor.

[0010] As a further improvement of the present invention: the transfer assembly includes a first suction cup that matches the number and position of at least three second grids and a suction cup bracket that can be raised and lowered and can move forward and backward for mounting the first suction cup.

[0011] Preferably, the first multi-directional driving component includes a vertical frame installed on the top of the base plate, a square frame is fixedly installed on the left side of the vertical frame, a large slider that can slide back and forth is slidably installed in the square frame, a second horizontal telescopic member for driving the large slider to slide back and forth is installed on the top of the square frame, a small slider that can slide up and down is slidably installed in the large slider, a C-shaped sliding hole for the small slider to slide back and forth is opened on the vertical frame, and the front side of the small slider is connected to the rear side of the suction cup bracket through two horizontal connecting rods; a pair of parallel horizontal plates are installed on the right side of the vertical frame, two vertical sliding rods are vertically installed between the pair of horizontal plates, blocks that can slide up and down are slidably installed on the two vertical sliding rods, and two horizontal connecting rods penetrate the blocks.

[0012] As a further improvement of the present invention: the classification and placement piece includes at least two small track assemblies arranged in parallel from left to right, the small track assembly includes a front small horizontal roller, a rear small horizontal roller and a small belt wound around the front small horizontal roller and the rear small horizontal roller; the classification and placement piece also includes a second horizontal motor for driving the front small horizontal roller in the two small track assemblies.

[0013] As a further improvement of the present invention: the sorting component includes a suction cup member and a suction cup platform, the number of the suction cup members is consistent with the number of at least three second grids; the suction cup member includes a second suction cup that can move left and right and a ball screw member for driving the second suction cup to move left and right; the bottom of the suction cup platform is provided with a straight slide groove that is consistent with the number of suction cup members; the ball screw member includes a horizontal screw rotatably installed in the straight slide groove, one end of the horizontal screw is fixedly installed with a first bevel gear, a second vertical motor is installed on the suction cup platform, and a second bevel gear meshing with the first bevel gear is fixedly installed on the output shaft of the second vertical motor; the second suction cup is installed on a small connecting frame, a screw nut matching the horizontal screw is installed on the horizontal screw, and the screw nut is fixedly connected to the small connecting frame.

[0014] The beneficial effects of the present invention are as follows: the semiconductor testing and sorting mechanism provided by the present invention prevents chips from being scratched during loading and has high detection efficiency.

[0015] The mechanism is provided with a material tray assembly, a first driving assembly for driving the material tray assembly to move left and right, a transfer assembly capable of extending and lowering forward and backward, and a track assembly. A plurality of insulating material boxes are provided on the belt of the track assembly. When in use, the chip on the material tray assembly can be placed in the insulating material box using the transfer assembly within the detection time when the detection assembly detects the chip. When the track assembly starts to rotate again, the insulating material box with the new chip will reach the detection position of the detection assembly. The detection assembly does not need to be idle waiting for loading. In this way, the detection time is reasonably utilized, and continuous detection of the detection assembly is realized, thereby making the detection efficiency higher.

[0016] In addition, loading materials through the cooperation of the robotic arm, the multi-grid material tray and the first suction cup can reduce the possibility of scratches and scrapes on the chips, especially in the multi-grid material tray, where each chip occupies a first small grid and does not contact each other, which also reduces the probability of scratches. Therefore, the chips are not easily scratched during loading. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic diagram of the overall structure of the present invention; Figure 2 It is a schematic diagram of the overall structure of the present invention from another angle; Figure 3 A top view of the present invention; Figure 4 It is a schematic diagram of the overall structure of the multi-grid material tray in the present invention; Figure 5 It is a perspective schematic diagram of the overall structure of the first horizontal telescopic member and the limiting disc support in the present invention; Figure 6 It is a schematic diagram of the overall structure of the disc support bracket in the present invention; Figure 7 It is a schematic diagram of the overall structure of the inverted U-shaped frame, the horizontal limit block and the base plate in the present invention; Figure 8 It is a schematic diagram of the overall structure of the material tray assembly and part of the first drive assembly in the present invention; Fig. 9 It is a schematic diagram of the overall structure of the material tray assembly and part of the first drive assembly in the present invention from another angle; Fig.10 It is a schematic diagram of the overall structure of the crawler assembly and the detection assembly in the present invention; Fig.11 It is a schematic diagram of the overall structure of the transfer component and the multi-directional drive component in the present invention; Fig.12 It is a schematic diagram of the overall structure of the transfer assembly and the multi-directional drive assembly without the stand in the present invention; Fig.13 It is a schematic diagram of the overall structure of the transfer assembly and the multi-directional drive assembly of the present invention from another angle with the stand hidden; Fig.14 It is a perspective schematic diagram of the overall structure of the classification placement piece in the present invention; Fig.15 It is a schematic diagram of the overall structure of the sorting component and the multi-directional driving component in the present invention; Fig.16 It is a schematic diagram of the overall structure of the sorting assembly and the multi-directional driving assembly without the stand in the present invention; Fig.17 It is a schematic diagram of the overall structure of the sorting component in the present invention; The names of the components corresponding to the marks in the above drawings are: 101, substrate; 102, support seat; 2. Material tray assembly; 201. Multi-grid material tray; 202. First horizontal telescopic member; 203. Position-limiting tray support; 204. Tray support bracket; 3. First driving assembly; 301. Inverted U-shaped frame; 302. Horizontal slide bar; 303. Horizontal limit block; 304. Horizontal rack; 305. Gear; 306. First vertical motor; 4. Track assembly; 401. Belt; 402. Insulation material box; 403. First horizontal motor; 5. Transfer assembly; 501. First suction cup; 502. Suction cup bracket; 6. First multi-directional drive assembly; 601. Vertical frame; 602. Square frame; 603. Large slider; 604. Second horizontal telescopic member; 605. Small slider; 606. C-shaped sliding hole; 607. Horizontal connecting rod; 608. Vertical sliding rod; 609. Block; 6010. L-shaped rod; 7. Detection component; 701. Probe card; 702. Vertical telescopic member; 8. Classification and placement of parts; 801. Small crawler assembly; 802. Second horizontal motor; 9. Sorting assembly; 901. Suction cup platform; 902. Second suction cup; 903. Horizontal lead screw; 904. Second vertical motor; 905. Small connecting frame. DETAILED DESCRIPTION

[0018] The specific implementation modes of the present invention are further described in detail below in conjunction with the accompanying drawings.

[0019] The directional words such as "up", "down", "left", "right", "front", "back", "top", "bottom" and so on described in the present invention are all represented by Figure 3 The direction defined by the cross-shaped orientation mark in the figure is used as the reference. All orientation words in the present invention are described based on this definition, and the orientation they represent does not change with the angle of the figure. Vertical means perpendicular to the ground, and a vertical motor means that the output shaft of the motor is perpendicular to the ground. Horizontal means parallel to the ground, and a horizontal motor means that the output shaft of the motor is parallel to the ground. A horizontal telescopic part means that the telescopic end of the telescopic part is parallel to the ground.

[0020] like Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 , Figure 7 , Figure 8 , Fig. 9 As shown, a semiconductor testing and sorting mechanism provided by the present invention includes a substrate 101, and a support seat 102 for supporting the substrate 101 is fixedly installed at the bottom of the substrate 101; A tray assembly 2 for placing a plurality of chips and a first driving assembly 3 for driving the tray assembly 2 to move left and right are arranged on the top of the substrate 101; the tray assembly 2 and the first driving assembly 3 are both located at the front side of the top of the substrate 101; The tray assembly 2 includes a multi-grid tray 201 and a first horizontal telescopic member 202 for driving the multi-grid tray 201 to move forward and backward. The multi-grid tray 201 includes a plurality of first grids for placing chips arranged in a matrix of six rows and ten columns. The number of first grids in each column is a multiple of the number of second grids of the insulating material box 402. One chip can be placed in each first grid. The tray assembly 2 includes a limiting tray support 203 for placing the multi-grid tray 201. The limiting tray support 203 includes a The horizontal plate includes an L-shaped limit rod for limiting the position of the limit tray 203 on the front, rear, left and right sides of the horizontal plate. A tray bracket 204 is provided below the limit tray 203 for the limit tray 203 to slide forward and backward. Two parallel tray sliders are provided at the bottom of the horizontal plate. The top of the tray bracket 204 is provided with tray rails that match the number, position and shape of the tray rails. The first horizontal telescopic member 202 is fixedly mounted on the tray bracket 204. A limit frame is provided on the top of the tray bracket 204 for limiting the movement of the multi-grid material tray 201 in the up and down directions. The right side of the limit frame is hinged to the right side of the tray bracket 204 and can be rotated to open and close. The first driving assembly 3 includes an inverted U-shaped frame 301 fixedly mounted on the top of the base plate 101; fixed plates are vertically mounted on the left and right sides of the bottom of the disc support bracket 204, at least two horizontal slide bars 302 are vertically mounted between the two fixed plates, a horizontal limit block 303 for at least two horizontal slide bars 302 to slide left and right is fixedly mounted on the top of the inverted U-shaped frame 301, the front and rear sides of the horizontal limit block 303 are fixedly connected to the bottom of the base plate 101 through vertical plates, and a through hole is provided on the horizontal limit block 303 for the two horizontal slide bars 302 to pass through; a horizontal rack 304 is vertically mounted between the two fixed plates, a gear 305 meshing with the horizontal rack 304 is arranged above the horizontal limit block 303, and a first vertical motor 306 for driving the gear 305 to rotate is fixedly mounted below the top of the inverted U-shaped frame 301. The horizontal limit block 303 also has the function of limiting the travel of the disc support bracket 204. When the fixed plate on the right side contacts the right side of the horizontal limit block 303, the disc support bracket 204 is at the leftmost position it can reach. When the fixed plate on the left side contacts the left side of the horizontal limit block 303, the disc support bracket 204 is at the rightmost position it can reach.

[0021] like Figure 1 , Figure 2 , Figure 3 , Fig.10 , Fig.11 Fig.12, Fig.13 As shown, a transfer assembly 5 capable of transferring chips on the tray assembly 2 to a crawler assembly 4 capable of conveying chips from right to left and a first multi-directional drive assembly 6 for driving the transfer assembly 5 to move forward and backward or up and down are arranged next to the tray assembly 2; The crawler assembly 4 includes a belt 401, on which a plurality of insulating material boxes 402 are arranged parallel to and equidistantly along the length direction of the belt 401, the insulating material boxes 402 are made of insulating material, and the insulating material boxes 402 include at least three second grids for placing chips arranged in a straight line from front to back, three in the figure, and one chip can be placed in each second grid; the crawler assembly 4 also includes two horizontal rollers, the belt 401 is wound around the two horizontal rollers, and one of the horizontal rollers is driven by a first horizontal motor 403; The transfer assembly 5 is located next to the starting end of the track assembly 4; the transfer assembly 5 includes a first suction cup 501 that matches the number and position of at least three second grids, and a suction cup bracket 502 for mounting the first suction cup 501, which can be raised and lowered and can move forward and backward. The air outlet of the first suction cup 501 is connected to the suction port of the vacuum equipment through a pipeline, and the vacuum equipment is a vacuum pump or a central vacuum system. Starting the vacuum equipment can evacuate the connected pipeline and the inside of the first suction cup 501. As the air is extracted, a negative pressure is formed inside the first suction cup 501. When a certain vacuum degree is reached, the bottom of the first suction cup 501 is in close contact with the surface of the chip, and the atmospheric pressure difference is used to generate sufficient adsorption force to fix the chip; The first multi-directional driving component 6 includes a stand 601 installed on the top of the base plate 101, a square frame 602 is fixedly installed on the left side of the stand 601, a large slider 603 that can slide back and forth is slidably installed in the square frame 602, a second horizontal telescopic member 604 for driving the large slider 603 to slide back and forth is installed on the top of the square frame 602, a small slider 605 that can slide up and down is slidably installed in the large slider 603, a C-shaped sliding hole 606 for the small slider 605 to slide back and forth is opened on the stand 601, and the front side of the small slider 605 is connected to the rear side of the suction cup bracket 502 through two horizontal connecting rods 607; a pair of parallel horizontal plates are installed on the right side of the stand 601, two vertical sliding rods 608 are vertically installed between the pair of horizontal plates, blocks 609 that can slide up and down are slidably installed on the two vertical sliding rods 608, and two horizontal connecting rods 607 pass through the blocks 609. The top of the telescopic end of the second horizontal telescopic member 604 is fixedly connected to the front side of the large sliding block 603 via an L-shaped rod 6010 .

[0022] like Figure 1 , Figure 2 , Figure 3 , Fig.10As shown, a detection component 7 capable of being raised and lowered for detecting the chip on the track component 4 is arranged next to the track component 4; the detection component 7 includes a probe card 701 for detecting the chip in the second grid, and the number and position of the probe card 701 match the number and position of at least three second grids; the detection component 7 includes a vertical telescopic member 702 for driving the probe card 701 to rise and fall. There are multiple probes on the probe card 701, and the layout of the multiple probes matches the layout of the pins of the chip, which is two columns and four rows in the figure. The probes are in contact with the pins of the chip. When an electrical signal is applied to detect the DC parameters of the chip, the probes will transmit the voltage or current signal of the external test equipment to the corresponding pins of the chip, and receive the signal fed back by the chip at the same time, so as to judge whether the chip meets the requirements. DC parameters include on-resistance, breakdown voltage, etc., and external test equipment includes power supply, multimeter, etc.

[0023] like Figure 1 , Figure 2 , Figure 3 , Fig.14 , Fig.15 , Fig.16 , Fig.17 As shown, a sorting assembly 9 for classifying and placing the chips detected on the track assembly 4 on the classification placement member 8 and a second multi-directional driving assembly for driving the sorting assembly 9 to move forward and backward or up and down are arranged at the end of the track assembly 4; The classification placement member 8 includes at least two small track assemblies 801 arranged in parallel from left to right, and the small track assembly 801 includes a front small horizontal roller shaft, a rear small horizontal roller shaft, and a small belt wound around the front small horizontal roller shaft and the rear small horizontal roller shaft; the classification placement member 8 also includes a second horizontal motor 802 for driving the front small horizontal roller shaft in the two small track assemblies 801; The sorting component 9 includes a suction cup member and a suction cup platform 901, and the number of the suction cup members is consistent with the number of at least three second grids; the suction cup member includes a second suction cup 902 that can move left and right and a ball screw member for driving the second suction cup 902 to move left and right; the bottom of the suction cup platform 901 is provided with a straight slide groove that is consistent with the number of suction cup members; the ball screw member includes a horizontal screw 903 rotatably installed in the straight slide groove, one end of the horizontal screw 903 is fixedly installed with a first bevel gear, a second vertical motor 904 is installed on the suction cup platform 901, and a second bevel gear meshing with the first bevel gear is fixedly installed on the output shaft of the second vertical motor 904; the second suction cup 902 is installed on a small connecting frame 905, and a screw nut matching the horizontal screw 903 is installed on the horizontal screw 903, and the screw nut is fixedly connected to the small connecting frame 905. The first suction cup 501 can slide up and down on the suction cup bracket 502, and the second suction cup 902 can slide up and down on the small connecting frame 905. The installation methods of the two are the same. Taking the second suction cup 902 as an example, the bottom of the small connecting frame 905 is provided with a hole for the connecting part of the second suction cup 902 to pass through. The bottom of the small connecting frame 905 is connected to the top of the suction cup body of the second suction cup 902 by a spring. The spring can play a certain buffering role to avoid crushing the chip. The structure of the second multi-directional driving member is consistent with that of the first multi-directional driving member. The horizontal connecting rod 607 of the second multi-directional driving member is fixedly connected to the rear side of the suction cup platform 901.

[0024] The mechanism also includes a main controller and a display screen. The main controller is connected to the first horizontal telescopic member 202, the first vertical motor 306, the first horizontal motor 403, the second horizontal telescopic member 604, the vertical telescopic member 702, the second horizontal motor 802, the second vertical motor 904 and the display screen. The display screen is arranged on the top of the substrate 101.

[0025] The working principle of the present invention is as follows: initially, the tray support 204 is at its far left, a robotic arm is used to neatly place the chips into the multi-grid tray 201, a limit frame is rotated to open, the multi-grid tray 201 loaded with chips is placed into the limit tray support 203, and the limit frame is rotated to close.

[0026] The telescopic end of the second horizontal telescopic member 604 is extended, and the large slider 603 is driven to slide forward in the square frame 602 through the L-shaped rod 6010. When the large slider 603 slides forward, the small slider 605 will first slide upward in the large slider 603 and the C-shaped slide hole 606. At this time, the block 609 slides upward on the vertical slide bar 608, and then the small slider 605 will stay at a fixed height, and slide forward with the large slider 603. The horizontal connecting rod 607 slides forward in the block 609, thereby driving the suction cup bracket 502 to slide forward. After the three first suction cups 501 of the transfer component 5 are aligned with the three chips on the rear side of the first column of the multi-grid material tray 201, the small slider 605 will slide downward in the large slider 603 and the C-shaped slide hole 606 as the large slider 603 slides forward, and the block 609 slides downward on the vertical slide bar 608, driving the suction cup bracket 502 to slide downward, so that the first suction cup 501 contacts the chip, The suction cup 501 is evacuated to make it absorb the chip, and then the telescopic end of the second horizontal telescopic member 604 is shortened, and the large slider 603 slides backward in the square frame 602, and the small slider 605 first slides upward in the large slider 603 and the C-shaped slide hole 606. At this time, the block 609 slides upward on the vertical slide bar 608, and then the small slider 605 stays at a fixed height, and slides backward with the large slider 603, and the horizontal connecting rod 607 slides backward in the block 609 from When the suction cup bracket 502 is driven to slide backward and the three first suction cups 501 of the transfer component 5 are aligned with the insulating material box 402 on the belt 401, the small slider 605 will slide downward in the large slider 603 and the C-shaped slide hole 606 as the large slider 603 slides backward, and the block 609 slides downward on the vertical slide bar 608, driving the suction cup bracket 502 to slide downward, the chip contacts the insulating material box 402, and the first suction cup 501 deflates and no longer adsorbs the chip.

[0027] The first horizontal motor 403 is started, driving the horizontal roller to rotate, thereby driving the belt 401 to rotate, driving the insulating material box 402 with the chip placed to move to the left, and when the insulating material box 402 with the chip placed reaches the detection position, the insulating material box 402 is controlled to stay at this position, and the telescopic end of the vertical telescopic member 702 is extended, driving the probe card 701 to descend, and each probe contacts its corresponding pin to detect the chip, and the result of the chip detection will be displayed on the display screen. While the belt 401 is rotating, the first vertical motor 306 is started, driving the gear 305 to rotate, so that the rack drives the tray bracket 204 to slide to the right on the horizontal slide bar 302 until the three chips on the rear side of the second column are in a position that can be grabbed by the transfer component 5, and the tray bracket 204 is controlled to stay in position. While the belt 401 is paused, the transfer component and the multi-directional drive component will repeat the above steps to grab the three chips on the rear side of the second column and place them in the empty insulating material box 402. After the test is completed, the telescopic end of the vertical telescopic member 702 begins to shorten, driving the probe card 701 to rise and leave the chip. During this process, the first horizontal motor 403 starts to drive the belt 401 to continue to transfer to the left, and when the next insulating material box 402 arrives at the test position, it stops and repeats the above process for testing. In this way, every time the machine is stopped for testing, the transfer component will take the opportunity to load the material, so that when the insulating material box 402 arrives at the test position, there is a chip placed in it, and the testing component 7 does not need to be empty, and continuous testing can be achieved.

[0028] After the detection component 7 completes the detection, it will send the detection result to the main controller. The second multi-directional drive component will repeat the above steps to make the suction cup platform 901 move upward first, then move forward, and finally move downward, so that the second suction cup 902 contacts the detected chip, and the second suction cup 902 is evacuated to make it absorb the detected chip. Under the control of the main controller, if the chip is a defective product, the second vertical motor 904 will rotate, driving the horizontal screw 903 to rotate, so that the screw nut slides to the left on the horizontal screw 903, driving The small connecting frame 905 slides to the left, so that the second suction cup 902 and the small crawler assembly 801 on the leftmost side of the classification placement member 8 are located on the same straight line. In this way, the second multi-directional drive assembly repeats the above steps so that the suction cup platform 901 first moves upward, then moves forward, and finally moves downward. The chip will contact the surface of the small belt of the small crawler assembly 801 on the leftmost side, and the second suction cup 902 is deflated to release the unqualified chip. After placement, the second horizontal motor 802 is started and the chip is transmitted backward to the position required for the next process. The small crawler assembly 801 on the leftmost side is used to place and transport unqualified chips. Qualified chips can be placed on the small crawler assembly 801 on the rightmost side or on the small crawler assembly 801 in the middle.

[0029] After the three chips on the rear side of each column of the multi-grid tray 201 have been transferred by the transfer assembly 5, the tray support 204 has reached the rightmost position it can reach, and the telescopic end of the first horizontal telescopic member 202 is shortened, driving the limited tray 203 to move backward, so that the transfer assembly 5 can transfer the three chips on the front side of each column, and then the first vertical motor 306 is reversed, so that the tray support 204 moves to the left. After all the chips in the multi-grid tray 201 are taken out, a new multi-grid tray 201 filled with chips can be replaced during the inspection time.

[0030] It should be noted that the present invention is not limited to the specific structures shown in the drawings in the above-mentioned embodiments, and various changes can be made thereto within the knowledge scope of ordinary technicians in this field.

Claims

1. A semiconductor testing and sorting mechanism, characterized in that: It comprises a substrate (101), on the top of which a tray assembly (2) for placing a plurality of chips and a first driving assembly (3) for driving the tray assembly (2) to move left and right are arranged; The material tray assembly (2) comprises a multi-grid material tray (201), wherein the multi-grid material tray (201) comprises a plurality of first grids arranged in a matrix shape and used for placing chips; A transfer assembly (5) capable of transferring chips on the material tray assembly (2) to a crawler assembly (4) capable of conveying the chips from right to left and a first multi-directional drive assembly (6) for driving the transfer assembly (5) to move forward and backward or up and down are arranged next to the material tray assembly (2); The crawler assembly (4) comprises a belt (401), a plurality of insulating material boxes (402) are arranged on the belt (401) in parallel and at equal intervals along the length direction of the belt (401), and the insulating material box (402) comprises at least three second grids for placing chips arranged in a straight line from front to back; A detection component (7) capable of being raised and lowered and used to detect the chip on the track component (4) is arranged next to the track component (4); the detection component (7) comprises a probe card (701) for detecting the chip in the second grid, and the number and position of the probe cards (701) match the number and position of at least three of the second grids; A sorting assembly (9) for placing the chips that have been detected on the track assembly (4) on a sorting placement piece (8) and a second multi-directional driving assembly for driving the sorting assembly (9) to move forward and backward or up and down are arranged next to the end of the track assembly (4).

2. A semiconductor testing and sorting mechanism according to claim 1, characterized in that: The material tray assembly (2) comprises a first horizontal telescopic member (202) for driving the multi-grid material tray (201) to move forward and backward, and a limiting tray support (203) for placing the multi-grid material tray (201); a tray support bracket (204) for allowing the limiting tray support (203) to slide forward and backward is provided below the limiting tray support (203); and the first horizontal telescopic member (202) is fixedly mounted on the tray support bracket (204).

3. A semiconductor testing and sorting mechanism according to claim 2, characterized in that: The first driving assembly (3) comprises an inverted U-shaped frame (301) fixedly mounted on the top of the base plate (101); A fixing plate is vertically mounted on the left and right sides of the bottom of the disc support bracket (204), at least two horizontal slide bars (302) are vertically mounted between the two fixing plates, a horizontal limit block (303) for at least two horizontal slide bars (302) to slide left and right is fixedly mounted on the top of the inverted U-shaped frame (301), and a through hole is formed on the horizontal limit block (303) for the two horizontal slide bars (302) to pass through; A horizontal rack (304) is vertically installed between the two fixed plates, a gear (305) meshing with the horizontal rack (304) is arranged above the horizontal limit block (303), and a first vertical motor (306) for driving the gear (305) to rotate is fixedly installed below the top of the inverted U-shaped frame (301).

4. A semiconductor testing and sorting mechanism according to any one of claims 1 to 3, characterized in that: The crawler assembly (4) comprises two horizontal rollers, the belt (401) is wound around the two horizontal rollers, and one of the horizontal rollers is driven by a first horizontal motor (403).

5. A semiconductor testing and sorting mechanism according to any one of claims 1 to 3, characterized in that: The transfer assembly (5) comprises a first suction cup (501) that matches the number and position of at least three of the second grids, and a suction cup bracket (502) for mounting the first suction cup (501) that can be raised and lowered and can move forward and backward.

6. A semiconductor testing and sorting mechanism according to claim 5, characterized in that: The first multi-directional driving component (6) comprises a stand (601) mounted on the top of the base plate (101), a square frame (602) is fixedly mounted on the left side of the stand (601), a large slider (603) capable of sliding forward and backward is slidably mounted in the square frame (602), a second horizontal telescopic member (604) for driving the large slider (603) to slide forward and backward is mounted on the top of the square frame (602), a small slider (605) capable of sliding up and down is slidably mounted in the large slider (603), a C-shaped sliding hole (606) for the small slider (605) to slide forward and backward is provided on the stand (601), and the front side of the small slider (605) is connected to the rear side of the suction cup bracket (502) via two horizontal connecting rods (607); A pair of mutually parallel horizontal plates are installed on the right side of the vertical frame (601), two vertical sliding rods (608) are vertically installed between the pair of horizontal plates, and blocks (609) that can slide up and down are slidably installed on the two vertical sliding rods (608), and the two horizontal connecting rods (607) pass through the blocks (609).

7. A semiconductor testing and sorting mechanism according to any one of claims 1 to 3, characterized in that: The classification placement member (8) comprises at least two small track assemblies (801) arranged in parallel from left to right, wherein the small track assembly (801) comprises a front small horizontal roller, a rear small horizontal roller, and a small belt wound around the front small horizontal roller and the rear small horizontal roller; The classification placement member (8) further comprises a second horizontal motor (802) for driving the front small horizontal roller shafts in the two small crawler assemblies (801).

8. A semiconductor testing and sorting mechanism according to any one of claims 1 to 3, characterized in that: The sorting component (9) comprises a suction cup member and a suction cup platform (901), and the number of the suction cup members is consistent with the number of at least three of the second grids; The suction cup component comprises a second suction cup (902) capable of moving left and right, and a ball screw component used for driving the second suction cup (902) to move left and right; The bottom of the suction cup platform (901) is provided with straight sliding grooves whose number is the same as the number of the suction cup members; The ball screw component comprises a horizontal screw (903) rotatably mounted in the straight slide groove, a first bevel gear being fixedly mounted on one end of the horizontal screw (903), a second vertical motor (904) being mounted on the suction cup platform (901), and a second bevel gear meshing with the first bevel gear being fixedly mounted on the output shaft of the second vertical motor (904); The second suction cup (902) is mounted on a small connecting frame (905), a screw nut matching the horizontal screw (903) is mounted on the horizontal screw (903), and the screw nut is fixedly connected to the small connecting frame (905).

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