A drying apparatus and drying method for a matrix-integrated target

Abstract

The application provides a drying device and drying method for matrix integrated target material, the drying device comprises a cavity for placing the matrix integrated target material, a heating part arranged on the inner wall side of the cavity, a stirring part arranged in the cavity, and a holding rack arranged in the cavity; the heating part comprises at least two sub-heating parts, and the holding rack is arranged between two adjacent sub-heating parts; the stirring part comprises a stirring shaft and at least two layers of stirring blades, and the holding rack is arranged between two adjacent layers of stirring blades; the holding rack comprises two columns of sub-holding racks, and a gap is arranged between the two columns of sub-holding racks, the stirring shaft is arranged in the gap, and the stirring shaft can rotate. The application can improve the drying turnover rate of the matrix integrated target material, improve the qualified rate of the target material after drying, and has a wide application prospect.

Description

Technical Field

[0001] This invention relates to the field of target drying technology, and in particular to a drying apparatus and method for an integrated matrix target. Background Technology

[0002] LCD display technology has been widely applied in various fields. After cleaning, LCD planar targets need to be dried, including the weld seams, BP steps, BP through holes, and BP countersinks, to remove the cleaning fluid. The commonly used high-pressure air and hot air drying methods in China suffer from uneven drying and high risks associated with hand-held operation. These outdated target drying methods and limited drying turnover inevitably lead to a significant reduction in the target production qualification rate.

[0003] CN113294978A discloses a method for drying a target material, specifically including the following steps: (1) rotating the target material around its center; (2) introducing a drying gas with a humidity of ≤30% to dry the target material; wherein, the drying gas in step (2) is in a circulating state, and is dehumidified before each circulation. However, this method is more suitable for circular targets and is not applicable to matrix-integrated targets, and the energy consumption for rotating the target material is high, resulting in high economic costs.

[0004] CN118423956A discloses a drying method for a split-type LCD target material. The drying method includes sequentially rotating, drying, and dehumidifying the target material to be dried to obtain a dried target material. The rotation speed is 10–18 r / min. A drying gas with a certain humidity is introduced during the drying process. While this method is applicable to split-type targets, it is not suitable for matrix-integrated targets and is costly.

[0005] Therefore, there is currently no drying method or device for matrix integrated targets. There is an urgent need to develop a drying device and method for matrix integrated targets to improve the drying efficiency and the drying qualification rate of matrix integrated targets. Summary of the Invention

[0006] To address the aforementioned technical problems, this invention provides a drying device and method for matrix-integrated target materials, which can improve the drying efficiency and drying qualification rate of matrix-integrated target materials, and has broad application prospects.

[0007] To achieve this objective, the present invention adopts the following technical solution:

[0008] In a first aspect, the present invention provides a drying apparatus for an integrated matrix target material, the drying apparatus comprising a cavity for placing the integrated matrix target material, a heating section disposed on the inner wall of the cavity, a stirring section disposed within the cavity, and a holding rack disposed within the cavity; wherein, the heating section comprises at least two sub-heating elements, and a holding rack is disposed between adjacent sub-heating elements; the stirring section comprises a stirring shaft and at least two layers of stirring blades, and the holding rack is disposed between adjacent layers of stirring blades; the holding rack comprises two rows of sub-holding racks, with a gap between the two rows of sub-holding racks, the gap being used to accommodate the stirring shaft so that the stirring shaft can rotate.

[0009] It is worth noting that this invention targets a matrix-integrated target material, which differs from commonly used targets. This matrix-integrated target material has weld seams, BP steps, BP through holes, and BP countersunk holes. These steps, through holes, and countersunk holes are prone to retaining cleaning fluid residue, making them difficult to remove completely during the drying process. This invention, by setting up spaced-apart stirring blades and a holding rack, can significantly improve the uniformity of temperature distribution within the drying device, avoiding excessively high local temperatures on the target material during drying. Simultaneously, the stirring action of the stirring blades improves the removal effect of cleaning agent from the corners of the target material.

[0010] The drying device provided by this invention has the following main features:

[0011] A. Firstly, the heating element of this invention is not an integral design, but is spaced apart from the holding rack. This allows for a certain distance between the heating element and the matrix-integrated target material on the holding rack, thus avoiding the situation where the local temperature is too high and affects the performance of the target material.

[0012] B. The present invention is provided with stirring blades on both the upper and lower sides of each holding rack. Through the disturbance effect of the stirring blades, on the one hand, the non-uniform heat emitted by the original heating part can be quickly dispersed, and on the other hand, the airflow on the surface of the target material can be disturbed, thereby improving the removal effect of cleaning agent in the weld seam, BP step, BP through hole or BP countersink.

[0013] Preferably, the heating element includes an infrared radiation heating element.

[0014] The heating element of this invention uses an infrared radiation heating element, which provides more uniform heating compared to using a resistance wire, avoids the bending of the target material during the heating process, and results in a higher yield of the target material after drying.

[0015] Preferably, the sub-heating elements are located on both sides of the cavity.

[0016] The present invention preferably has sub-heating elements provided on both sides of the cavity, and the two sides are heated by infrared radiation from opposite sides, which results in better heating effect.

[0017] Preferably, there is a gap between the sub-heating element and the holding rack, the gap being 2 to 5 mm, for example, 2 mm, 2.4 mm, 2.7 mm, 3 mm, 3.4 mm, 3.7 mm, 4 mm, 4.4 mm, 4.7 mm or 5 mm.

[0018] The present invention preferably sets the size of the gap distance within the above-mentioned range, which has a better heating effect and can avoid the target material from bending.

[0019] Preferably, the stirring blade is an arc-shaped stirring blade, and the arc orientation of adjacent two layers of stirring blades is opposite.

[0020] It is worth noting that the opposite arc orientation of the stirring blades is crucial for the target drying of this invention. By using the arc-shaped stirring blades arranged in opposite directions, not only can the airflow be rotated and moved laterally during the stirring process, but the airflow can also be turned up and down. This up and down turning structure can avoid the situation where the temperature at the inlet and outlet of the hot gas is too high while the temperature at the outlet is too low, thereby ensuring that the drying effect of a single batch of target materials is the same. It has the advantages of drying multiple target materials at a time and having a high turnover rate.

[0021] Preferably, the ratio of the length of a single arc-shaped stirring blade to the width of the cavity is 0.4 to 0.45:1, for example, it can be 0.4:1, 0.41:1, 0.42:1, 0.43:1, 0.44:1 or 0.45:1, etc.

[0022] The present invention preferably limits the ratio of the length of the arc-shaped stirring blade to the width of the cavity to the above-mentioned range, which can significantly improve the stirring effect.

[0023] Preferably, the arc-shaped stirring blade includes an outer arc-shaped edge and an inner arc-shaped edge, wherein the inner arc-shaped edge is the concave side.

[0024] Preferably, the ratio of the arc length of the inner arc side to that of the outer arc side is 0.6 to 0.8:1, for example, it can be 0.6:1, 0.63:1, 0.65:1, 0.67:1, 0.69:1, 0.72:1, 0.74:1, 0.76:1, 0.78:1 or 0.8:1, etc.

[0025] This invention limits the degree of concavity of the arc-shaped stirring blade by limiting this ratio. Through various studies, it has been found that the airflow has a better drying effect within the above-mentioned limiting range.

[0026] Preferably, the central angle corresponding to the inner arc edge is 45 to 60°, for example, it can be 45°, 47°, 49°, 50°, 52°, 54°, 55°, 57°, 59° or 60°, etc.

[0027] Preferably, the drying device further includes a hot gas inlet disposed at the upper part of the cavity and a hot gas outlet disposed at the lower part of the cavity.

[0028] This invention enhances the drying effect by introducing gas into the cavity through the setting of a hot gas inlet and a hot gas outlet, and by providing a heat source externally.

[0029] The hot gas inlet and the hot gas outlet are located on both sides of the cavity.

[0030] Preferably, the stirring unit further includes a motor connected to the stirring shaft.

[0031] Preferably, the drying device further includes a connecting portion disposed on the side of the container rack near the center of the cavity, the connecting portion including a first rod portion fixedly connected to the container rack and a second annular portion for passing through the stirring shaft; the first rod portions connected to the two rows of sub-container racks are fixedly connected by the second annular portion.

[0032] The present invention fixes the holding rack and realizes the rotation of the rotating shaft by means of the second ring part and the first rod part.

[0033] Preferably, the first rod is set at an angle of 120° to 150° with the holding rack, for example, it can be 120°, 124°, 127°, 130°, 134°, 137°, 140°, 144°, 147° or 150°. This angle setting has stronger stability.

[0034] Secondly, the present invention provides a drying method for an integrated matrix target material, wherein the drying method is performed using the drying apparatus for the integrated matrix target material described in the first aspect.

[0035] Preferably, the drying method includes:

[0036] The matrix-integrated target material is placed on the rack, and the heating and stirring sections are turned on, while hot gas is introduced for drying.

[0037] Preferably, the stirring speed of the stirring unit is 100-200 r / min, for example, it can be 100 r / min, 112 r / min, 123 r / min, 134 r / min, 145 r / min, 156 r / min, 167 r / min, 178 r / min, 189 r / min or 200 r / min.

[0038] Preferably, the hot gas includes any one or a combination of at least two of helium, argon, or nitrogen, wherein typical but non-limiting combinations are a combination of helium and argon, a combination of nitrogen and argon, or a combination of helium and nitrogen.

[0039] Preferably, the temperature of the hot gas is 100-120°C, for example, it can be 100°C, 103°C, 105°C, 107°C, 109°C, 112°C, 114°C, 116°C, 118°C or 120°C.

[0040] The present invention preferably achieves better drying effect when the stirring speed and the temperature of the hot gas are within the above-mentioned range.

[0041] Preferably, the drying time is 30 to 45 minutes, for example, it can be 30 minutes, 32 minutes, 34 minutes, 35 minutes, 37 minutes, 39 minutes, 40 minutes, 42 minutes, 44 minutes or 45 minutes.

[0042] Compared with the prior art, the present invention has at least the following beneficial effects:

[0043] The drying device for integrated matrix targets provided by this invention can shorten the drying time of integrated matrix targets, and the drying uniformity of multiple integrated matrix targets in a single batch is high, reducing the occurrence of defective products, and has broad application prospects. Attached Figure Description

[0044] Figure 1 This is a schematic diagram of the drying device for the matrix integrated target material provided in Embodiments 1 to 3 of the present invention.

[0045] In the diagram: 1. Motor; 2. Stirring shaft; 3. Stirring blades; 4. Heating section; 5. Hot gas inlet; 6. Hot gas outlet; 7. Container rack; 100. Matrix integrated target material. Detailed Implementation

[0046] To facilitate understanding of the present invention, the following embodiments are provided. Those skilled in the art should understand that these embodiments are merely illustrative and should not be construed as limiting the scope of the invention.

[0047] It should be understood that in the description of this invention, the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. These terms are used only for the convenience of describing the invention and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the invention. Furthermore, the terms "first," "second," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined with "first," "second," etc., may explicitly or implicitly include one or more of that feature. In the description of this invention, unless otherwise stated, "a plurality of" means two or more.

[0048] It should be noted that, in the description of this invention, unless otherwise explicitly specified and limited, the terms "set," "connected," and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0049] Those skilled in the art should understand that the present invention necessarily includes the necessary pipelines, conventional valves and general pump equipment for achieving complete process, but the above content is not the main inventive point of the present invention. Those skilled in the art can add layouts based on process flow and equipment structure selection, and the present invention does not make any special requirements or specific limitations in this regard.

[0050] Example 1

[0051] This embodiment provides a drying device for an integrated matrix target material, see [link to documentation]. Figure 1 The drying device includes a cavity for placing the matrix integrated target 100, a heating part 4 disposed on the inner wall of the cavity, a stirring part disposed inside the cavity, and a holding rack 7 disposed inside the cavity.

[0052] The heating part 4 includes at least two sub-heating elements, and a holding rack 7 is provided between two adjacent sub-heating elements.

[0053] The stirring section includes a stirring shaft 2 and at least two layers of stirring blades 3, and the holding rack 7 is disposed between two adjacent layers of stirring blades 3.

[0054] The holding rack 7 includes two rows of sub-holding racks 7, with a gap between the two rows of sub-holding racks 7. The gap is used to set the stirring shaft 2 so that the stirring shaft 2 can rotate.

[0055] The heating part 4 includes an infrared radiation heating element; the sub-heating elements are located on both sides of the cavity.

[0056] There is a gap distance of 3.5 mm between the sub-heating element and the holding rack 7.

[0057] The stirring blade 3 is an arc-shaped stirring blade 3, and the arc orientation of adjacent stirring blades 3 is opposite; the length ratio of a single arc-shaped stirring blade 3 to the width of the cavity is 0.42:1; the arc-shaped stirring blade 3 includes an outer arc-shaped edge and an inner arc-shaped edge, and the inner arc-shaped edge is the concave edge; the arc length ratio of the inner arc-shaped edge to the outer arc-shaped edge is 0.7:1; the central angle corresponding to the inner arc-shaped edge is 55°.

[0058] The drying device further includes a hot gas inlet 5 disposed at the upper part of the cavity and a hot gas outlet 6 disposed at the lower part of the cavity; the hot gas inlet 5 and the hot gas outlet 6 are disposed on both sides of the cavity.

[0059] The stirring unit also includes a motor 1 connected to the stirring shaft 2.

[0060] The drying device further includes a connecting portion disposed on the side of the container rack 7 near the center of the cavity. The connecting portion includes a first rod portion fixedly connected to the container rack 7 and a second annular portion for passing through the stirring shaft 2; the first rod portions connected to the two rows of sub-container racks 7 are fixedly connected by the second annular portions. The first rod portion is disposed at a 135° angle to the container rack 7.

[0061] Example 2

[0062] This embodiment provides a drying device for an integrated matrix target material, see [link to documentation]. Figure 1 The drying device includes a cavity for placing the matrix integrated target 100, a heating part 4 disposed on the inner wall of the cavity, a stirring part disposed inside the cavity, and a holding rack 7 disposed inside the cavity.

[0063] The heating part 4 includes at least two sub-heating elements, and a holding rack 7 is provided between two adjacent sub-heating elements.

[0064] The stirring section includes a stirring shaft 2 and at least two layers of stirring blades 3, and the holding rack 7 is disposed between two adjacent layers of stirring blades 3.

[0065] The holding rack 7 includes two rows of sub-holding racks 7, with a gap between the two rows of sub-holding racks 7. The gap is used to set the stirring shaft 2 so that the stirring shaft 2 can rotate.

[0066] The heating part 4 includes an infrared radiation heating element; the sub-heating elements are located on both sides of the cavity.

[0067] There is a gap distance of 5mm between the sub-heating element and the holding rack 7.

[0068] The stirring blade 3 is an arc-shaped stirring blade 3, and the arc orientation of adjacent stirring blades 3 is opposite; the length ratio of a single arc-shaped stirring blade 3 to the width of the cavity is 0.45:1; the arc-shaped stirring blade 3 includes an outer arc-shaped edge and an inner arc-shaped edge, and the inner arc-shaped edge is the concave edge; the arc length ratio of the inner arc-shaped edge to the outer arc-shaped edge is 0.6:1; the central angle corresponding to the inner arc-shaped edge is 60°.

[0069] The drying device further includes a hot gas inlet 5 disposed at the upper part of the cavity and a hot gas outlet 6 disposed at the lower part of the cavity; the hot gas inlet 5 and the hot gas outlet 6 are disposed on both sides of the cavity.

[0070] The stirring unit also includes a motor 1 connected to the stirring shaft 2.

[0071] The drying device further includes a connecting portion disposed on the side of the container rack 7 near the center of the cavity. The connecting portion includes a first rod portion fixedly connected to the container rack 7 and a second annular portion for passing through the stirring shaft 2; the first rod portions connected to the two rows of sub-container racks 7 are fixedly connected by the second annular portions. The first rod portion is disposed at a 150° angle to the container rack 7.

[0072] Example 3

[0073] This embodiment provides a drying device for an integrated matrix target material, see [link to documentation]. Figure 1 The drying device includes a cavity for placing the matrix integrated target 100, a heating part 4 disposed on the inner wall of the cavity, a stirring part disposed inside the cavity, and a holding rack 7 disposed inside the cavity.

[0074] The heating part 4 includes at least two sub-heating elements, and a holding rack 7 is provided between two adjacent sub-heating elements.

[0075] The stirring section includes a stirring shaft 2 and at least two layers of stirring blades 3, and the holding rack 7 is disposed between two adjacent layers of stirring blades 3.

[0076] The holding rack 7 includes two rows of sub-holding racks 7, with a gap between the two rows of sub-holding racks 7. The gap is used to set the stirring shaft 2 so that the stirring shaft 2 can rotate.

[0077] The heating part 4 includes an infrared radiation heating element; the sub-heating elements are located on both sides of the cavity.

[0078] There is a gap distance of 2mm between the sub-heating element and the holding rack 7.

[0079] The stirring blade 3 is an arc-shaped stirring blade 3, and the arc orientation of adjacent stirring blades 3 is opposite; the length ratio of a single arc-shaped stirring blade 3 to the width of the cavity is 0.4:1; the arc-shaped stirring blade 3 includes an outer arc-shaped edge and an inner arc-shaped edge, and the inner arc-shaped edge is the concave edge; the arc length ratio of the inner arc-shaped edge to the outer arc-shaped edge is 0.8:1; the central angle corresponding to the inner arc-shaped edge is 45°.

[0080] The drying device further includes a hot gas inlet 5 disposed at the upper part of the cavity and a hot gas outlet 6 disposed at the lower part of the cavity; the hot gas inlet 5 and the hot gas outlet 6 are disposed on both sides of the cavity.

[0081] The stirring unit also includes a motor 1 connected to the stirring shaft 2.

[0082] The drying device further includes a connecting portion disposed on the side of the container rack 7 near the center of the cavity. The connecting portion includes a first rod portion fixedly connected to the container rack 7 and a second annular portion for passing through the stirring shaft 2; the first rod portions connected to the two rows of sub-container racks 7 are fixedly connected by the second annular portions. The first rod portion is disposed at a 120° angle to the container rack 7.

[0083] Example 4

[0084] This embodiment provides a drying device for a matrix-integrated target material. Except for the ratio of the arc length of the inner arc side to the arc length of the outer arc side being 0.5:1, the drying device is the same as that in Embodiment 1, and will not be described again here.

[0085] Example 5

[0086] This embodiment provides a drying device for a matrix-integrated target material. Except for the ratio of the arc length of the inner arc side to the arc length of the outer arc side being 0.9:1, the drying device is the same as that in Embodiment 1, and will not be described again here.

[0087] Example 6

[0088] This embodiment provides a drying device for an integrated matrix target material. Except for the gap between the sub-heating element and the holding rack, which is 10mm, the drying device is the same as that in Embodiment 1, and will not be described again here.

[0089] Example 7

[0090] This embodiment provides a drying device for an integrated matrix target material. Except for the gap between the sub-heating element and the holding rack, which is 1 mm, the drying device is the same as that in Embodiment 1, and will not be described again here.

[0091] Example 8

[0092] This embodiment provides a drying device for an integrated matrix target material. Except for the heating part being a resistance wire, the drying device is the same as that in Embodiment 1, and will not be described again here.

[0093] Example 9

[0094] This embodiment provides a drying device for a matrix-integrated target material. Except for the central angle corresponding to the inner arc edge being 80°, the drying device is the same as that in Embodiment 1, and will not be described again here.

[0095] Example 10

[0096] This embodiment provides a drying device for an integrated matrix target material. Except for the central angle corresponding to the inner arc edge being 30°, the drying device is the same as that in Embodiment 1, and will not be described again here.

[0097] Example 11

[0098] This embodiment provides a drying device for an integrated matrix target material. Except for the absence of a hot gas outlet and a hot gas inlet, the drying device is the same as that in Embodiment 1, and will not be described again here.

[0099] Example 12

[0100] This embodiment provides a drying device for a matrix-integrated target material. Except for the fact that the arc orientation between two adjacent stirring blades is the same, the drying device is the same as that in Embodiment 1, and will not be described again here.

[0101] Comparative Example 1

[0102] This comparative example provides a drying device for an integrated matrix target material. Except for the absence of a stirring section, the drying device is the same as that in Example 1, and will not be described again here.

[0103] Comparative Example 2

[0104] This comparative example provides a drying device for an integrated matrix target material. Except for the fact that the lower part of the last holding rack is not equipped with stirring blades and a sub-heating element, the drying device is the same as that in Example 1, and will not be described again here.

[0105] Application Example 1

[0106] This application example provides a drying method for an integrated matrix target material. The drying method for the integrated matrix target material uses the drying apparatus for the integrated matrix target material provided in Example 1, and specifically includes:

[0107] The matrix-integrated target material is placed on a rack, and the heating and stirring sections are turned on. The stirring speed is 150 r / min, and hot gas (helium) at a temperature of 110℃ is introduced at the same time to dry for 32 minutes to obtain the dried matrix-integrated target material.

[0108] Application Example 2

[0109] This application example provides a drying method for an integrated matrix target material. The drying method for the integrated matrix target material uses the drying apparatus for the integrated matrix target material provided in Example 2, and specifically includes:

[0110] The matrix-integrated target material is placed on a rack, and the heating and stirring sections are turned on. The stirring speed is 1100 r / min, and hot gas (nitrogen) at a temperature of 120℃ is introduced at the same time to dry for 30 minutes to obtain the dried matrix-integrated target material.

[0111] Application Example 3

[0112] This application example provides a drying method for an integrated matrix target material. The drying method for the integrated matrix target material uses the drying apparatus for the integrated matrix target material provided in Example 3, and specifically includes:

[0113] The matrix-integrated target material is placed on a rack, and the heating and stirring sections are turned on. The stirring speed is 1200 r / min, and hot gas (argon) at 100℃ is introduced at the same time to dry for 45 min, thus obtaining the dried matrix-integrated target material.

[0114] Application Examples 4-12 and Comparative Examples 1-2

[0115] Application Examples 4-12 and Comparative Examples 1-2 provide a drying method for an integrated matrix target. The drying method for the integrated matrix target is identical to that of Application Example 1, except that it uses the drying apparatus for the integrated matrix target in Examples 4-12 and Comparative Examples 1-2, respectively, and will not be repeated here. If the relevant components are unavailable, no related operations are performed.

[0116] For ease of statistical analysis, the aforementioned drying devices all employ four layers of racks, allowing for the processing of eight matrix-type targets at a time. However, this invention can also be applied to other numbers of racks while achieving the same drying effect.

[0117] Test method: The temperature of nine test points (top, middle, bottom, left, middle, and right) inside the entire cavity during the drying process is monitored in real time. The maximum temperature difference among the nine test points at the same time point is recorded as the temperature range value to assess the uniformity of the drying process. The flatness of the dried matrix-integrated target material is also tested. The worst flatness in a single batch is used to evaluate whether deflection occurred during the drying process. Furthermore, the presence of liquid phase residue is observed at the BP steps, welds, BP countersunk holes, and BP through holes. If any residue is found, the number of matrix-integrated target materials with liquid phase residue in a single batch is divided by the total number to determine the drying failure rate (only used to judge the effectiveness of liquid phase drying).

[0118] The test results of the above application examples and application comparison examples are shown in Table 1.

[0119] Table 1

[0120]

[0121]

[0122] As can be seen from Table 1:

[0123] (1) As can be seen from the comprehensive application examples 1 to 3, the drying device for matrix integrated target material provided by the present invention has the advantages of short drying time and the ability to dry multiple matrix integrated target materials at one time. Moreover, during drying, the temperature difference is within 1℃, the flatness of the matrix integrated target material after drying is within 0.3μm, the drying failure rate is 0, and the application prospects are broad.

[0124] (2) Combining Application Examples 1 and Application Examples 4-5, it can be seen that in Application Example 1, the ratio of the arc length of the inner arc side to the arc length of the outer arc side is 0.7:1. Compared with Application Examples 4-5, which use 0.5:1 and 0.9:1 respectively, the temperature range in Application Example 1 is only 0.8℃, the flatness is only 0.2μm, and the drying failure rate is 0. In contrast, the temperature range in Application Examples 4-5 is as high as 2.3℃ and 3.5℃ respectively, and the flatness in Application Example 5 is as high as 2.0μm. Moreover, samples with cleaning agent residue appeared in Application Examples 4-5. This shows that the ratio of the arc length of the inner arc side to the arc length of the outer arc side determines the width ratio of the widest and narrowest parts of the entire arc-shaped stirring blade, which has a key influence on the disturbance of airflow. By using a reasonable range of ratios, the present invention can further improve the uniformity of drying and the success rate of drying.

[0125] (3) Combining Application Examples 1 and 6-7, it can be seen that the gap distance in Application Example 1 is 3.5 mm. Compared with the 10 mm and 1 mm used in Application Examples 6-7, the temperature difference in Application Example 1 is only 0.8℃, the flatness is only 0.2 μm, and the drying failure rate is 0. In contrast, the temperature difference in Application Example 7 is as high as 12.5℃, and the failure rate in Application Example 6 is as high as 25%. This shows that the distance between the heating element and the target material will facilitate the full diffusion of heat and avoid local high temperature. By using a reasonable gap distance, the present invention can further improve the uniformity of drying and the success rate of drying.

[0126] (4) Combining Application Example 1 and Application Example 8, it can be seen that the infrared radiation heating element used in Application Example 1 has a temperature range of only 0.8℃ and a flatness of only 0.2μm, with a drying failure rate of 0, compared to the resistance wire used in Application Example 8. In contrast, the temperature range of Application Example 1 is as high as 15.4℃ and the flatness is as high as 12.3μm. This shows that using an infrared radiation heating element is more conducive to improving the uniformity of drying and avoiding bending of the target material.

[0127] (5) As can be seen from the combined application examples 1 and 9-10, the present invention can further improve the uniformity of drying and the success rate of drying by preferably using a suitable range of central angles;

[0128] (6) Combining Application Example 1 and Application Example 11, it can be seen that not setting up a hot gas outlet and a hot gas inlet will reduce the vertical flow of the gas phase and reduce the heat source of the hot gas, thus significantly reducing the drying success rate.

[0129] (7) Combining Application Example 1 and Application Example 12, it can be seen that the arc direction between the two adjacent stirring blades is the same, which results in no up-and-down tumbling effect of airflow. Since the hot gas enters from the top and flows out from the bottom, the drying success rate of the matrix integrated target material in the lower two layers is low, and the internal temperature difference is large.

[0130] (8) It can be seen from the combined application of Example 1 and Comparative Examples 1 and 2 that the stirring part and the fact that stirring blades are provided on both the upper and lower sides of each container rack are crucial for improving temperature uniformity and drying success rate.

[0131] The present invention has been illustrated with the above embodiments to illustrate its detailed features, but the present invention is not limited to the above detailed features, that is, it does not mean that the present invention must rely on the above detailed features to be implemented. Those skilled in the art should understand that any improvements to the present invention, equivalent substitutions for the selected technical features, additions of auxiliary technical features, and selection of specific methods, etc., all fall within the protection scope and disclosure scope of the present invention.

Claims

1. A drying device for a matrix-integrated target material, characterized in that, The drying device includes a cavity for placing an integrated matrix target, a heating section disposed on the inner wall of the cavity, a stirring section disposed inside the cavity, and a holding rack disposed inside the cavity. The heating section includes at least two sub-heating elements, and a holding rack is provided between two adjacent sub-heating elements; The stirring section includes a stirring shaft and at least two layers of stirring blades, and the holding rack is disposed between two adjacent layers of stirring blades; The holding rack includes two rows of sub-holding racks with a gap between them. The gap is used to set the stirring shaft so that the stirring shaft can rotate. The heating element includes an infrared radiation heating element; The sub-heating elements are located on both sides of the cavity; There is a gap between the sub-heating element and the holding rack, and the gap is 2~5mm; The stirring blades are arc-shaped, with the arcs of adjacent layers of stirring blades facing opposite directions.

2. The drying apparatus according to claim 1, characterized in that, The ratio of the length of a single arc-shaped stirring blade to the width of the cavity is 0.4 to 0.45:

1.

3. The drying apparatus according to claim 1, characterized in that, The arc-shaped stirring blade includes an outer arc-shaped edge and an inner arc-shaped edge, wherein the inner arc-shaped edge is the concave side.

4. The drying apparatus according to claim 3, characterized in that, The ratio of the arc length of the inner arc side to that of the outer arc side is 0.6 to 0.8:

1.

5. The drying apparatus according to claim 3, characterized in that, The central angle corresponding to the inner arc-shaped side is 45~60°.

6. The drying apparatus according to any one of claims 1 to 5, characterized in that, The drying device further includes a hot gas inlet disposed at the upper part of the cavity and a hot gas outlet disposed at the lower part of the cavity; The hot gas inlet and the hot gas outlet are located on both sides of the cavity.

7. The drying apparatus according to any one of claims 1 to 5, characterized in that, The stirring unit also includes a motor connected to the stirring shaft.

8. The drying apparatus according to any one of claims 1 to 5, characterized in that, The drying device further includes a connecting part disposed on the side of the container rack near the center of the cavity. The connecting part includes a first rod portion fixedly connected to the container rack and a second annular portion for passing through the stirring shaft; the first rod portions connected to the two rows of sub-container racks are fixedly connected by the second annular portion.

9. The drying apparatus according to claim 8, characterized in that, The first rod is set at an angle of 120° to the holding rack.

10. A drying method for a matrix-integrated target material, characterized in that, The drying method is carried out using the drying apparatus for the matrix integrated target material as described in any one of claims 1 to 9.

11. The drying method according to claim 10, characterized in that, The drying method includes: The matrix-integrated target material is placed on the rack, and the heating and stirring sections are turned on, while hot gas is introduced for drying.

12. The drying method according to claim 11, characterized in that, The stirring speed of the stirring section is 100~200 r / min.

13. The drying method according to claim 11, characterized in that, The hot gas includes any one or a combination of at least two of helium, argon, or nitrogen.

14. The drying method according to claim 11, characterized in that, The temperature of the hot gas is 100~120℃.

15. The drying method according to claim 11, characterized in that, The drying time is 30-45 minutes.

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