Scribing table and scribing device

Abstract

The scribing table (6) is provided with: grooves (62a-62c) formed on a placement surface (61) on which the frame unit (20) is placed; and suction holes (63a to 63c) which are connected to the grooves (62a to 62c). The grooves (62a-62c) are formed in a region corresponding to a gap (G1) between the inner periphery of the opening (21a) of the frame ring (21) and the outer periphery of the workpiece (23), and each of the grooves (62a-62c) has a shape in which a portion of the ring shape is interrupted in plan view. A degassing region (64) in which the grooves (62a-62c) are interrupted is disposed on the side opposite the suction holes (63a-63c) with respect to the center of the ring shape.

Description

Technical Field

[0001] The present invention relates to a scribing table for holding a workpiece during scribing and a scribing device having the scribing table. Background Art

[0002] In the past, there is known a scribing device for forming scribing lines on a workpiece such as a wafer. The workpiece is fixed to a frame ring by a cutting tape. Specifically, a tape is attached to the lower surface of the frame ring in a manner that covers the opening of the frame ring from the lower side. The workpiece is attached to the tape exposed from the opening, so that the workpiece is held on the frame ring. In this way, a frame unit including the frame ring, the tape, and the workpiece is formed.

[0003] When forming the scribing line, the frame unit is placed on a workbench of the scribing device. On the workbench, a plurality of suction holes are formed in the area where the frame unit is placed. By applying negative pressure to these suction holes, the lower surface of the frame unit is adsorbed. Thus, the frame unit is held on the workbench.

[0004] In this structure, the loading surface of the workbench on which the workpiece overlaps is also formed with suction holes when viewed from above. Thus, the workpiece can be held on the workbench via the belt. However, in this structure, when the scoring wheel crosses the upper surface of the workpiece overlapping the suction holes, a load is applied to the scoring wheel from the suction holes. This load causes a reduction in the scoring accuracy of the workpiece. This problem becomes particularly significant when the thickness of the workpiece is small.

[0005] In contrast, the following patent document 1 describes a structure in which a frame unit can be held on a workbench without providing suction holes in the area where the workpieces overlap on the workbench. In this structure, an annular frame having a plurality of suction holes on the inner circumference is provided on the upper surface of the workbench. The inner diameter of the frame is set to be less than the inner diameter of the frame ring. By applying negative pressure to these suction holes, the area of ​​the belt near the inner diameter of the frame ring, that is, the area of ​​the belt where the workpieces do not overlap, is sucked. Thus, the frame unit is held by the frame on the workbench.

[0006] Prior art literature

[0007] Patent Literature

[0008] Patent Document 1: Japanese Patent Application Publication No. 2020-136357 Summary of the invention

[0009] Problems to be solved by the invention

[0010] In the structure of the above-mentioned Patent Document 1, suction holes are formed on the inner peripheral surface of the frame. Therefore, when the belt is sucked using the suction holes in the state where the frame ring is placed on the upper surface of the frame, the belt can only be pulled down to the height of the suction holes. Therefore, it is difficult for the area of the belt on which the workpiece is overlapped to be in a state of closely adhering to the upper surface of the workbench. Therefore, there is a risk that the load applied to the workpiece during the scribing operation becomes unstable. In addition, in this structure, it is easy for air to be mixed in (Japanese: 空気噛み) between the area of the belt on which the workpiece is overlapped and the upper surface of the workbench. Therefore, it is difficult to perform the scribing operation on the workpiece with good accuracy due to the effect of this air mixing.

[0011] In view of this problem, an object of the present invention is to provide a scribing workbench that can appropriately hold a workpiece even if no suction holes are provided in the area where the workpiece is overlapped, and a scribing apparatus including the scribing workbench.

[0012] Solution for Solving the Problem

[0013] A first aspect of the present invention relates to a scribing workbench that holds a frame unit in which a workpiece is fixed to an opening by a belt that covers the opening of the frame ring from below. The scribing workbench according to this aspect includes: a groove formed on a placement surface on which the frame unit is placed; and suction holes connected to the groove. Here, the groove has a shape in which a part of an annular shape is interrupted when viewed from above, the groove is formed in a region corresponding to a gap between the inner periphery of the opening and the outer periphery of the workpiece, and a degassing region where the groove is interrupted is arranged on a side opposite to the suction holes with respect to the center of the annular shape.

[0014] According to the scribing workbench of this aspect, in the state where the frame unit is placed on the placement surface, when air is sucked from the groove via the suction holes, the belt is attracted to the groove and the frame unit is adsorbed and fixed to the scribing workbench. At this time, the belt is pulled into the groove by the suction of the air passing through the suction holes, so the belt is adsorbed to the groove while being under tension in the pulling direction. Under the action of this tension, the belt closely adheres to the placement surface. In addition, the belt is sequentially adsorbed to the groove along the groove from the joining position of the suction holes, so the close adhesion of the belt caused by the tension develops from the suction hole side toward the degassing region. Therefore, when the frame unit is placed on the placement surface, even if air is mixed in between the belt in the area where the workpiece is fixed and the placement surface, this air is expelled toward the degassing region and separated from the degassing region as the close adhesion of the belt to the placement surface develops.

[0015] Therefore, according to the scribing workbench of this scheme, even if the suction hole is not provided in the area where the workpiece is fixed, the area of ​​the belt overlapping the workpiece can be made to be in close contact with the loading surface, and the workpiece can be properly held. In addition, even if air is mixed between the area of ​​the belt overlapping the workpiece and the loading surface, the air can be discharged from the degassing area by the adsorption action of the belt. Therefore, the scribing action of the workpiece can be performed with high precision and stability.

[0016] In the scribing table of this aspect, it is preferable that the groove is formed at a position close to the outer periphery of the workpiece.

[0017] According to this structure, the side of the workpiece is adsorbed on the scribing table, so the workpiece can be firmly fixed without displacement. Therefore, it is possible to suppress positional displacement of the workpiece during the scribing operation, and the scribing operation on the workpiece can be performed stably.

[0018] The scribing table of this aspect may be configured such that a plurality of the grooves are formed in the region corresponding to the gap.

[0019] According to this structure, the belt can be more firmly adsorbed than when there is only one groove. Therefore, the workpiece can be more firmly fixed. In addition, compared with the case where there is only one groove, the tension applied to the belt during adsorption can be increased, and the belt can be more tightly attached to the loading surface. Therefore, the air generated by air mixing can be more reliably separated.

[0020] In this configuration, the ends of the plurality of suction holes respectively connected to the plurality of grooves on the opposite side to the plurality of grooves may be connected to a common hole.

[0021] According to this structure, by sucking air from the common hole, air can be sucked from the plurality of grooves through the plurality of suction holes at the same time. Therefore, the structure for sucking air can be simplified.

[0022] In the scribing table of the present embodiment, the groove may be in a shape in which a part of a circle is interrupted when viewed from above.

[0023] According to this configuration, when the workpiece is circular in a plan view, the grooves can be smoothly arranged along the outer circumference of the workpiece.

[0024] In the scribing workbench of the present embodiment, the workpiece is, for example, a wafer.

[0025] In this case, even if the suction hole is not arranged in the area where the wafer is fixed, the wafer can be fixed to the mounting surface, and the air can be sucked through the suction hole to prevent the air from mixing between the area where the wafer is fixed and the mounting surface. Therefore, the scribing operation on the wafer can be performed with high precision and stability.

[0026] A second aspect of the present invention relates to a scribing device. The scribing device of this aspect comprises: the scribing table of the first aspect; and a scribing head for scribing the workpiece.

[0027] According to the scribing device of this aspect, as described above, even if suction holes are not provided in the region where the workpieces overlap, the workpieces can be appropriately held on the mounting surface, so that the workpieces can be scribed with high accuracy and stability.

[0028] Effects of the Invention

[0029] As described above, according to the present invention, it is possible to provide a scribing table capable of appropriately holding a workpiece even if suction holes are not provided in a region where the workpiece overlaps, and a scribing device including the scribing table.

[0030] The effects and significance of the present invention will become more apparent from the following description of the embodiments. However, the embodiments described below are merely examples of implementing the present invention, and the present invention is not limited to the contents described in the following embodiments. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] Figure 1 It is a side view schematically showing the structure of the scribing device according to the embodiment.

[0032] Figure 2 (a) and (b) are a plan view and an AA cross-sectional view respectively showing the structure of the frame unit according to the embodiment.

[0033] Figure 3 (a) to (c) are respectively a plan view, a BB cross-sectional view, and a CC cross-sectional view of the scribing table according to the embodiment.

[0034] Figure 4 (a) and (b) are a plan view and a cross-sectional view, respectively, showing a state where a frame unit is placed on the placement surface of the scribing table according to the embodiment.

[0035] Figure 5 (a) to (c) are a plan view, a BB cross-sectional view, and a CC cross-sectional view, respectively, schematically showing the behavior of the belt when negative pressure is applied to the three adsorption holes according to the embodiment.

[0036] Figure 6 (a) and (b) are plan views schematically showing the behavior of the belt when negative pressure is applied to the three adsorption holes according to the embodiment.

[0037] Figure 7 It is a block diagram showing the structure of the scribing device of the embodiment.

[0038] Figure 8 It is a flowchart showing the scribing process of the workpiece according to the embodiment.

[0039] Fig. 9 (a) is a plan view showing the structure of a scribing table according to a modified example. Fig. 9 (b) and (c) are cross-sectional views showing the structure of a scribing stage according to another modified example.

[0040] Fig.10 (a) and (b) are top views showing the structure of a scribing table according to still another modification.

[0041] However, the drawings are for illustration only and do not limit the scope of the present invention. DETAILED DESCRIPTION

[0042] Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. For convenience, mutually orthogonal X-axis, Y-axis and Z-axis are annotated in each figure. The positive direction of the Z-axis and the negative direction of the Z-axis are respectively the vertical upward direction and the vertical downward direction, and the positive direction of the X-axis is the direction in which the marking head is moved during the marking operation.

[0043] Figure 1 1 is a side view schematically showing the structure of the scribing device 1 .

[0044] like Figure 1 As shown, the scribing device 1 includes a movable table 2 that can move in the Y-axis direction. The movable table 2 is screwed with a ball screw 3 extending in the Y-axis direction. In addition, the movable table 2 is supported by a pair of guide rails 4 extending in the Y-axis direction so as to be movable in the Y-axis direction. The ball screw 3 rotates under the driving action of a motor (not shown), so that the movable table 2 moves in the Y-axis direction along the pair of guide rails 4.

[0045] The moving stage 2 is provided with a scribing stage 6 via a rotating mechanism 5. The rotating mechanism 5 includes a motor and rotates the scribing stage 6 about a rotation axis parallel to the Z axis. An adsorption structure for adsorbing the frame unit 20 is provided on the upper surface (mounting surface 61) of the scribing stage 6. The structure of the frame unit 20 and the adsorption structure will be described later. Figure 2 (a), (b) and Figure 3 (a) to (c) are described below.

[0046] Furthermore, the engraving device 1 includes a pair of pillars 7a, 7b and a conveying mechanism 8 supported by the pillars 7a, 7b. The conveying mechanism 8 conveys the lifting mechanism 9 in the X-axis direction. The conveying mechanism 8 includes: a ball screw and a guide rail extending in the X-axis direction; a motor driving the ball screw; and a support plate. The support plate is screwed with the ball screw and is guided in the X-axis direction by the guide rail. The lifting mechanism 9 is assembled on the support plate. When the motor of the conveying mechanism 8 is driven, the lifting mechanism 9 is conveyed in the X-axis direction together with the support plate. The conveying mechanism 8 is configured to be able to convey the support plate and the lifting mechanism 9 in a straight line in the X-axis direction approximately without shaking and accurately.

[0047] The lifting mechanism 9 lifts and lowers the scoring head 10 and the camera 11 in the Z-axis direction. The lifting mechanism 9 includes: a ball screw and a guide rail extending in the Z-axis direction; a motor driving the ball screw; and a support plate 9a. The support plate 9a is screwed with the ball screw and guided in the Z-axis direction by the guide rail. The scoring head 10 and the camera 11 are mounted on the front surface of the support plate 9a. When the motor of the lifting mechanism 9 is driven, the scoring head 10 and the camera 11 are lifted and lowered in the Z-axis direction together with the support plate 9a.

[0048] A holder unit 110 holding a cutter wheel 111 is mounted at the lower end of the scoring head 10. The camera 11 is disposed on the support plate 9a in a manner such that the shooting direction faces downward. The camera 11 shoots the frame unit 20 held on the mounting surface 61 of the scoring table 6 while being positioned at a predetermined shooting position by the transfer mechanism 8 and the lifting mechanism 9. The image captured by the camera 11 is used for position adjustment (alignment) of the frame unit 20 in the rotation direction around a rotation axis parallel to the Z-axis direction and in the Y-axis direction.

[0049] Figure 2 (a) is a plan view showing the structure of the frame unit 20 . Figure 2 (b) is Figure 2 (a) is a cross-sectional view of the frame unit 20 at the AA position. Figure 2 In (a) of FIG. 1 , the frame ring 21 and the workpiece 23 are hatched.

[0050] like Figure 2 As shown in (a) and (b) of FIG. 1 , the frame unit 20 includes a frame ring 21, a belt 22, and a workpiece 23. The frame ring 21 is a plate-shaped member of a constant thickness made of a metal material. The frame ring 21 has a ring shape with a circular opening 21a in the center when viewed from above.

[0051] The tape 22 is attached to the lower surface of the frame ring 21 and covers the opening 21 a of the frame ring 21 from below. The tape 22 is made of, for example, a resin material. The workpiece 23 is attached to the upper surface of the tape 22 exposed from the opening 21 a of the frame ring 21 .

[0052] The workpiece 23 is, for example, a wafer. The workpiece 23 may also be other components such as a glass substrate. The workpiece 23 has a disk-like shape having a diameter smaller than the opening 21a when viewed from above. The workpiece 23 is attached to the upper surface of the belt 22 in a manner that is approximately concentric with the opening 21a. Thus, the workpiece 23 is fixed to the opening 21a of the frame ring 21 by the belt 22. In this state, an annular gap G1 is generated between the inner periphery of the opening 21a and the outer periphery of the workpiece 23. The radial width of the gap G1 is approximately constant over the entire circumference.

[0053] Figure 3 (a) is a top view showing the structure of the scribing table 6 . Figure 3 (b) is Figure 3 (a) a cross-sectional view of the scribing table 6 at the BB position, Figure 3 (c) is Figure 3 (a) is a cross-sectional view of the scribing table 6 at the CC position.

[0054] like Figure 3 As shown in (a), the scribing table 6 has a substantially square shape when viewed from above. The scribing table 6 is made of a metal material such as SUS. Three grooves 62a to 62c are formed on the mounting surface 61 of the scribing table 6. The grooves 62a to 62c have a shape in which a portion of a loop is interrupted when viewed from above. Here, the grooves 62a to 62c have a shape in which a portion of a circle is interrupted when viewed from above.

[0055] The grooves 62a to 62c have different diameters and are arranged concentrically with each other. The spacing between adjacent grooves is substantially constant. The three grooves 62a to 62c are formed at and Figure 2 The area corresponding to the gap G1 between the inner periphery of the opening 21a and the outer periphery of the workpiece 23 shown in (a) and (b). Figure 3 As shown in (b) of FIG. 1 , the grooves 62a to 62c have a rectangular cross-sectional shape. The depth and radial width of the grooves 62a to 62c are constant over the entire circumference. In addition, the depth and radial width of the grooves 62a to 62c are the same as each other.

[0056] like Figure 3 (a) and Figure 3 As shown in (c), three suction holes 63a to 63c connected to the grooves 62a to 62c are formed on the scribing table 6. The three suction holes 63a to 63c are formed on the most positive side of the grooves 62a to 62c on the Y axis in a linear arrangement along the Y axis direction. Figure 3 As shown in (c), the ends of the three suction holes 63a to 63c on the opposite side to the three grooves 62a to 62c are connected to a common hole 65. The hole 65 is connected to a pressure applying unit for sucking air.

[0057] like Figure 3 As shown in (a) of FIG. 1 , the grooves 62 a to 62 c are interrupted at positions on the opposite side of the suction holes 63 a to 63 c with respect to the center of the annular shape of the grooves 62 a to 62 c . The degassing area 64 is formed by this interruption.

[0058] Furthermore, four circular recesses 66 are formed at positions symmetrical with respect to the center on the mounting surface 61. In a plan view, two recesses 66 are arranged at a pair of diagonal positions of the mounting surface 61, and the other two recesses 66 are arranged at another pair of diagonal positions of the mounting surface 61. These recesses 66 function as alignment marks for confirming the position of the frame unit 20 relative to the mounting surface 61.

[0059] Figure 4 (a) is a plan view showing a state where the frame unit 20 is placed on the placement surface 61 of the scribing table 6 . Figure 4 (b) is to Figure 4 A cross-sectional view of the scribing table 6 and the frame unit 20 in the state (a) when cut by a plane parallel to the XZ plane at the middle position in the Y-axis direction. Figure 4 (a) shows a state where the back side of the belt 22 is seen through at the gap G1.

[0060] like Figure 4 As shown in (a), the frame unit 20 is placed on the mounting surface 61 in such a manner that the frame ring 21 covers the four recesses 66 approximately evenly. In this state, the three grooves 62a to 62c are positioned in an area corresponding to the gap G1 between the inner periphery of the opening 21a of the frame ring 21 and the outer periphery of the workpiece 23. At this time, the innermost groove 62a is positioned close to the outer periphery of the workpiece 23. For example, when the diameter of the workpiece 23 is 100 mm, the width of the gap G1 in the radial direction is about 25 mm, and the radial spacing between the outer periphery of the workpiece 23 and the innermost groove 62a is about 5 mm. The innermost groove 62a is arranged along the outer periphery of the workpiece 23.

[0061] In the step of forming the scribing line on the workpiece 23, before the scribing operation, an operation of sucking and fixing the frame unit 20 on the mounting surface 61 of the scribing table 6 is performed. That is, the air in the grooves 62a to 62c is sucked through the suction holes 63a to 63c, and the frame unit 20 is sucked and fixed on the mounting surface 61. This operation is performed by applying pressure to the frame unit 20 from the pressure applying portion. Figure 3 (c) is performed by applying negative pressure to the hole 65.

[0062] Figure 5 (a) is a plan view schematically showing the behavior of the belt 22 when negative pressure is applied to the three suction holes 63 a to 63 c. Figure 5 (b) and (c) are cross-sectional views schematically showing the state of the belt 22 relative to the grooves 62a to 62c when negative pressure is applied to the three suction holes 63a to 63c. Figure 5 (b) and (c) are Figure 5 (a) is a cross-sectional view at the BB position and the CC position.

[0063] For convenience, Figure 5 In (b) and (c), the workpiece 23 is not shown. Figure 5 (a) of FIG. 1 shows a state where the back side of the workpiece 23 is seen through. Figure 5 In (a), the range of the belt 22 that is in close contact with the placement surface 61 due to the application of negative pressure is indicated by dotted hatching.

[0064] like Figure 5 As shown in (c), when negative pressure is applied to the suction holes 63a to 63c through the hole 65, the air in the grooves 62a to 62c connected to the suction holes 63a to 63c is sucked, and the belt 22 is pulled in and adsorbed in the grooves 62a to 62c. In this way, the belt 22 is pulled into the grooves 62a to 62c, so that the belt 22 inside and outside the grooves 62a to 62c generates a tension T1 in the horizontal direction toward the grooves 62a to 62c, and under the action of the tension T1, the belt 22 inside the grooves 62a to 62c is closely attached to the mounting surface 61.

[0065] Here, the suction of the belt 22 to the grooves 62a to 62c occurs sequentially from the portion close to the suction holes 63a to 63c to the portion away from the suction holes 63a to 63c in the entire circumference of the grooves 62a to 62c. Figure 5 As shown in (b), in Figure 5 At the BB position of (a), the belt 22 has not yet been attracted to the grooves 62a to 62c. Figure 5 In the range of the dotted hatching in (a), the belt 22 is in close contact with the mounting surface 61 .

[0066] Thereafter, the area of ​​close contact between the belt 22 and the mounting surface 61 develops along the grooves 62a to 62c toward the negative side of the Y axis as the belt 22 is sucked into the grooves 62a to 62c, and expands toward the negative direction of the Y axis.

[0067] Figure 6 (a) and (b) are plan views schematically showing the behavior of the belt 22 when the suction of the belt 22 to the grooves 62a to 62c further advances.

[0068] When the absorption of the belt 22 relative to the grooves 62a to 62c further develops, as shown in FIG. Figure 6As shown in (a) of FIG. 1 , the close contact range further expands toward the negative side of the Y axis, and the close contact range gradually approaches the degassing area 64. Then, when the adsorption of the belt 22 develops to the negative end of the grooves 62a to 62c on the Y axis, as shown in FIG. Figure 6 As shown in (b), the belt 22 is attracted to the grooves 62a to 62c over the entire circumference of the gap G1 between the inner circumference of the opening 21a and the outer circumference of the workpiece 23, and the belt 22 is in close contact with the mounting surface 61 over the entire area of ​​the opening 21a.

[0069] Here, when air is mixed between the lower surface of the belt 22 and the mounting surface 61 when the frame unit 20 is mounted, Figure 5 (a) and Figure 6 As shown in (a) and (b) of FIG. 1 , the close contact range expands toward the degassing area 64, so the air mixed with the air is gradually driven away to the degassing area 64 as the close contact range progresses. Then, when the adsorption action ends, as shown in FIG. Figure 6 As shown in (b), the air AR generated by the air mixing escapes from the degassing area 64 to the outside, and the belt 22 in the area overlapping the workpiece 23 is in uniform close contact with the mounting surface 61 in the entire area without air mixing.

[0070] Figure 7 is a block diagram showing the structure of the scribing device 1.

[0071] The scribing device 1 includes a control unit 101 , a stage driving unit 102 , a head transport unit 103 , a head lifting unit 104 , a head driving unit 105 , and a pressure applying unit 106 .

[0072] The control unit 101 includes a CPU and other processing circuits, ROM, RAM, hard disk and other memories, and controls each part according to the program stored in the memory. Figure 1 The ball screw 3 and the rotating mechanism 5 are shown. The table driving unit 102 moves the scribing table 6 in the Y-axis direction or rotates the scribing table 6 around a rotation axis parallel to the Z-axis according to the control from the control unit 101.

[0073] The head transfer unit 103 includes Figure 1 The transfer mechanism 8 shown in the figure transfers the scribing head 10 and the camera 11 in the X-axis direction according to the control from the control unit 101. The head lifting unit 104 has Figure 1 The lifting mechanism 9 shown in the figure moves the scribing head 10 and the camera 11 up and down in the Z-axis direction according to the control from the control unit 101.

[0074] The head driving unit 105 includes a driving mechanism for driving the holder unit 110 in the vertical direction in the scribing head 10. The head driving unit 105 drives the driving mechanism according to the control from the control unit 101, and presses the cutter wheel 111 against the surface of the workpiece 23 with a predetermined load. The pressure applying unit 106 includes a compressed air source and is connected to the pressure source via the pressure source. Figure 3 The hole 65 of (c) is opened to apply negative pressure to the suction holes 63a to 63c.

[0075] Figure 8 1 is a flowchart showing a scribing process for the workpiece 23 .

[0076] After the frame unit 20 is placed on the placement surface 61 of the scribing table 6, the control unit 101 performs a process of adsorbing the frame unit 20 onto the placement surface 61 (S101). In step S101, the control unit 101 controls the pressure applying unit 106 to apply negative pressure to the suction holes 63a to 63c. Figure 5 (a)~ Figure 6 As described in (b) of FIG. 1 , the belt 22 of the frame unit 20 is attracted to the grooves 62 a to 62 c of the mounting surface 61 , and the frame unit 20 is fixed to the mounting surface 61 by suction.

[0077] Next, the control unit 101 controls the table driving unit 102 to adjust the position of the scribing table 6 in such a way that the initial scribing line (the scribing target line) defined on the surface of the workpiece 23 matches the moving trajectory of the cutter wheel 111 in the X-axis direction when viewed from above (S102). Thereafter, the control unit 101 controls the head conveying unit 103, the head lifting unit 104, and the head driving unit 105 to perform a scribing operation along the scribing line (S103).

[0078] In step S103, the control unit 101 first controls the head transfer unit 103 to position the cutter wheel 111 directly above the leading position of the scribing line, and then controls the head lifting unit 104 to lower the scribing head 10 until the cutter wheel 111 contacts the surface of the workpiece 23. Furthermore, the control unit 101 controls the head driving unit 105 to press the cutter wheel 111 against the workpiece 23 with a specified load. Then, the control unit 101 controls the head transfer unit 103 to move the scribing head 10 in the positive direction of the X-axis until the cutter wheel 111 reaches the end position of the scribing line. Thus, the scribing action on the scribing line is performed. Thereafter, the control unit 101 controls the head lifting unit 104 to separate the cutter wheel 111 from the surface of the workpiece 23.

[0079] Thus, when the scribing operation for the first scribing line is completed, the control unit 101 determines whether the scribing operation for all the scribing lines defined on the surface of the workpiece 23 has been completed (S104). If the determination in step S104 is negative, the control unit 101 returns the process to step S102, controls the table drive unit 102, and positions the cutter wheel 111 directly above the next scribing line. Thereafter, the control unit 101 performs the scribing operation for the next scribing line through the same process as described above (S103).

[0080] The control unit 101 repeatedly executes the processing of steps S102 and S103 until the scribing operation for all scribing lines is completed (S104: No). In the case where the plurality of scribing lines are defined as a vertical and horizontal grid, the control unit 101 rotates the scribing table 6 90 degrees in response to the completion of the scribing operation for the plurality of horizontal scribing lines, and executes the scribing operation for the plurality of vertical scribing lines.

[0081] In this way, when the scribing operation for all the scribing lines defined on the surface of the workpiece 23 is completed (S104: Yes), the control unit 101 controls the pressure applying unit 106 to stop applying the negative pressure to the suction holes 63a to 63c, and releases the suction of the frame unit 20 relative to the mounting surface 61 (S105). Thus, the control unit 101 ends the scribing process for the frame unit 20.

[0082] <Effects of implementation>

[0083] According to this embodiment, the following effects are achieved.

[0084] As reference Figure 5 (a)~ Figure 6 As described in (b), when the frame unit 20 is placed on the placement surface 61, when air is sucked from the grooves 62a to 62c through the suction holes 63a to 63c, the belt 22 is sucked into the grooves 62a to 62c, and the frame unit 20 is adsorbed and fixed to the scribing table 6. At this time, the belt 22 is pulled into the grooves 62a to 62c by the suction of air through the suction holes 63a to 63c, and is adsorbed into the grooves 62a to 62c while being subjected to a tension T1 in the pulling direction. Under the action of this tension T1, the belt 22 is closely attached to the placement surface 61. In addition, the belt 22 is adsorbed into the grooves 62a to 62c in sequence from the joining positions of the suction holes 63a to 63c along the grooves 62a to 62c, and is thus fixed to the scribing table 6. Figure 5 (a) and Figure 6As shown in (a) and (b) of FIG. 1 , the close contact of the belt 22 caused by the tension T1 develops from the suction holes 63a to 63c to the degassing area 64. Therefore, even if air is mixed between the belt 22 and the mounting surface 61 in the area where the workpiece 23 is fixed, the air AR is driven toward the degassing area 64 and detached from the degassing area 64 as the close contact of the belt 22 with respect to the mounting surface 61 progresses.

[0085] Therefore, according to the scribing table 6 of the present embodiment, even if the suction hole is not provided in the area where the workpiece 23 is fixed, the area of ​​the belt 22 overlapping the workpiece 23 can be made to be in close contact with the mounting surface 61, and the workpiece 23 can be properly held. In addition, even if air is mixed between the area of ​​the belt 22 overlapping the workpiece 23 and the mounting surface 61, the air can be discharged from the degassing area 64 by the adsorption action of the belt 22. Therefore, the scribing action on the workpiece 23 can be performed with high precision and stability.

[0086] like Figure 4 As shown in (a) and (b) of FIG. 6 , the groove 62a is formed at a position close to the outer periphery of the workpiece 23. As a result, the side of the workpiece 23 is adsorbed on the scribing table 6, so that the workpiece 23 can be firmly fixed without displacement. Therefore, it is possible to suppress the positional displacement of the workpiece 23 during the scribing operation, and the scribing operation on the workpiece 23 can be stably performed.

[0087] like Figure 4 As shown in (a) and (b) of FIG. 1 , the scribing table 6 is formed with a plurality of (three) grooves 62a to 62c in the region corresponding to the gap G1. As a result, the belt 22 can be more firmly adsorbed than when there is only one groove. Therefore, the workpiece 23 can be more firmly fixed. In addition, compared with the case where there is only one groove, the tension T1 applied to the belt 22 during adsorption can be increased, and the belt 22 can be more tightly attached to the mounting surface 61. Therefore, the air generated by air mixing can be more reliably separated, and the scribing operation can be performed more stably.

[0088] like Figure 3 As shown in (c), the ends of the plurality of (three) suction holes 63a to 63c respectively connected to the plurality of (three) grooves 62a to 62c on the opposite side to the plurality of grooves 62a to 62c are connected to the common hole 65. Thus, by sucking air from the common hole 65, air can be sucked from the plurality of grooves 62a to 62c through the plurality of suction holes 63a to 63c at the same time. Therefore, the structure for sucking air can be simplified.

[0089] like Figure 3 As shown in (a) of FIG. 1 , the grooves 62a to 62c have a shape in which a part of a circle is interrupted in a plan view. Figure 4As shown in FIG. 2( a ), when the workpiece 23 is circular in a plan view, the grooves 62 a to 62 c can be smoothly arranged along the outer circumference of the workpiece 23 .

[0090] As reference Figure 2 As described in (a) and (b) of FIG. 1 , the workpiece 23 is, for example, a wafer. In this case, even if the suction holes are not arranged in the region where the wafer is fixed, the wafer can be fixed to the mounting surface 61, and the air can be sucked through the suction holes 63a to 63c to prevent the air from mixing between the region where the wafer is fixed on the belt 22 and the mounting surface 61. Therefore, the scribing operation on the wafer can be performed with high accuracy and stability.

[0091] <Modification>

[0092] In the above embodiment, three grooves 62a to 62c are formed on the mounting surface 61, but the number of grooves formed on the mounting surface 61 is not limited thereto. Fig. 9 As shown in (a) of FIG. 8 , one groove 62 may be formed on the mounting surface 61 , or a plurality of grooves other than three may be formed on the mounting surface 61 .

[0093] exist Fig. 9 In the structure of (a), the groove 62 is also arranged in the area corresponding to the gap G1 of the frame unit 20. In addition, it is preferable that the groove 62 is formed at a position as close to the outer periphery of the workpiece 23 as possible when the frame unit 20 is placed at a predetermined position on the mounting surface 61. In this structure, only one suction hole 63 connected to the groove 62 can be formed. In addition, in this structure, a degassing area 64 in which the groove 62 is interrupted is also arranged on the side opposite to the suction hole 63 with respect to the center of the ring shape along the groove 62. The cross-sectional shape, depth and radial width of the groove 62 can be arbitrarily set as long as the belt 22 can be appropriately close to the mounting surface 61.

[0094] Even when the mounting surface 61 is formed with a plurality of grooves other than three, these grooves are arranged in the region corresponding to the gap G1 of the frame unit 20. In this case, it is also preferable that the innermost groove is formed at a position as close to the outer periphery of the workpiece 23 as possible when the frame unit 20 is mounted at a predetermined position on the mounting surface 61. Figure 2 Similarly to the structure of (a), the suction holes are arranged in the respective grooves, and the degassing area formed by interrupting the grooves is arranged on the opposite side of the suction holes with respect to the center of the annular shape along the grooves.

[0095] In addition, in the above embodiment, if Figure 3As in (b) of FIG. 1 , the cross-sectional shape of the grooves 62a to 62c is a rectangle, but the cross-sectional shape of the grooves 62a to 62c may be other shapes than a rectangle. For example, Fig. 9 As shown in (b), the cross-sectional shape of the grooves 62a to 62c is a rectangular shape with rounded corners. Alternatively, the cross-sectional shape of the grooves 62a to 62c may be a semicircle, a semi-ellipse, a triangle, a trapezoid, or the like.

[0096] Furthermore, the pitch between the grooves may not be constant, and the depth, radial width, and shape of the grooves may differ between the grooves.

[0097] In addition, in the above embodiment, if Figure 3 As in (c), the plurality of suction holes 63a to 63c are connected to the common hole 65, but it is also possible to Fig. 9 In this case, negative pressure may not necessarily be applied to the suction holes 63a to 63c at the same time, and negative pressure may be applied to each suction hole in sequence, for example, from the outer suction hole 63c toward the inner suction hole 63a.

[0098] In addition, you can also Fig.10 As shown in (a), the width W1 of the degassing region 64 is Figure 3 The width of the degassing area 64 is set to a width that allows the belt 22 in the area where the workpiece 23 overlaps to be closely attached to the mounting surface 61 by suction of air from the grooves 62a to 62c, and allows the air mixed between the belt 22 and the mounting surface 61 in this area to be separated from the degassing area 64. In addition, the width W1 of the degassing area 64 may be set slightly wider, and other suction holes and suction grooves may be formed within the range of the degassing area 64 of the width W1.

[0099] In addition, the degassing area 64 does not necessarily have to be located at a position symmetrical to the suction holes 63a to 63c with respect to the center of the ring. Fig.10 As shown in (b), it is slightly offset from the position symmetrical to the suction holes 63a to 63c relative to the center of the ring. The position of the degassing area 64 is set to a position where the belt 22 in the area where the workpiece 23 overlaps can be closely attached to the mounting surface 61 by suction of air from the grooves 62a to 62c, and the air mixed between the belt 22 and the mounting surface 61 in this area can be separated from the degassing area 64.

[0100] In addition, the suction holes 63a to 63c do not necessarily need to be arranged in a row in the radial direction, but may be arranged in a slightly meandering manner in the circumferential direction. The suction holes 63a to 63c are arranged so that the belt 22 in the area where the workpiece 23 overlaps can be closely attached to the mounting surface 61 by sucking air from the grooves 62a to 62c through these suction holes 63a to 63c, and the air mixed between the belt 22 and the mounting surface 61 in this area can be separated from the degassing area 64. This is also the case when the engraving table 6 is provided with a plurality of grooves other than three and a group of suction holes.

[0101] In addition, in the above-mentioned embodiment, the shape of the groove when viewed from above is a shape in which a part of the circle is interrupted, but the shape of the groove when viewed from above is not limited to this. For example, when the outline of the workpiece 23 when viewed from above is an ellipse, the shape of the groove may be a shape in which a part of the ellipse is interrupted. The annular shape of the groove when viewed from above may be a shape in which the belt 22 in the area where the workpiece 23 overlaps can be closely attached to the mounting surface 61 by suction of air from the grooves 62a to 62c, and the air mixed between the belt 22 and the mounting surface 61 in this area can be separated from the degassing area 64.

[0102] In addition, Figure 5 In the structures (a) to (c) of FIG. 1 , the magnitude of the negative pressure applied to the hole 65 need not necessarily be constant, and for example, the magnitude of the negative pressure applied to the hole 65 may be controlled so as to vary over time. For example, the magnitude of the negative pressure applied to the hole 65 may be controlled so as to vary over time from the start of adsorption to the time when the belt 22 becomes Figure 6 During the state (b), the magnitude of the negative pressure applied to the hole 65 gradually increases with the passage of time, and the magnitude of the negative pressure at the end of this period is maintained during the subsequent adsorption operation.

[0103] In addition, the structure of the scribing device 1 is not limited to Figure 1 The structure shown in the figure, the structure of the frame unit 20 is not limited to Figure 2 The structures shown in (a) and (b) are as follows. Figure 1 In the structure, during the scribing operation, the scribing head 10 is moved along the X-axis direction, but it is also possible that during the scribing operation, the scribing table 6 is moved along the X-axis direction without moving the scribing head 10. Figure 2 In (b), it is described that the thickness of the frame ring 21 is substantially the same as the thickness of the workpiece 23 , but the thickness of the frame ring 21 and the thickness of the workpiece 23 may be different.

[0104] It should be noted that the present invention does not necessarily require that the region of the mounting surface 61 where the workpiece 23 overlaps is completely free of adsorption grooves and suction holes. For example, adsorption grooves and suction holes may be arranged in the region of the mounting surface 61 where the outer peripheral portion of the workpiece 23 corresponding to the edge material after the workpiece 23 is cut along the scoring track overlaps.

[0105] In addition, the embodiments of the present invention can be modified in various ways as appropriate within the scope of the technical concept shown in the patent claims.

[0106] Description of Reference Numerals

[0107] 1 Scratching device

[0108] 6 Scratching table

[0109] 10 Scratching head

[0110] 20 frame units

[0111] 21 Frame Ring

[0112] 21a Opening

[0113] 22 belt

[0114] 23 Workpiece

[0115] 61 Loading surface

[0116] Slots 62, 62a, 62b, 62c

[0117] 63, 63a, 63b, 63c suction holes

[0118] 64 Degassing area

[0119] 65 holes

[0120] G1 clearance.

Claims

1. A scribing table, which holds a frame unit to which a workpiece is fixed at an opening of a frame ring by a belt covering the opening from the bottom side, The scribing workbench is characterized in that it has: a groove formed in a mounting surface on which the frame unit is mounted; and a suction hole connected to the groove, The groove has a shape in which a portion of the ring is interrupted when viewed from above. The groove is formed in a region corresponding to a gap between an inner periphery of the opening and an outer periphery of the workpiece. The groove has a degassing region formed by interrupting the groove on the opposite side of the suction hole with respect to the center of the ring shape.

2. The scribing table according to claim 1, characterized in that: The groove is formed at a position close to the outer periphery of the workpiece.

3. The scribing workbench according to claim 1, characterized in that: A plurality of grooves are formed in the region corresponding to the gap, The suction hole is formed for each of the grooves.

4. The scribing table according to claim 3, characterized in that: Ends of the plurality of suction holes respectively connected to the plurality of grooves on the side opposite to the plurality of grooves are connected to a common hole.

5. The scribing table according to claim 1, characterized in that: The groove has a shape in which a part of a circle is interrupted in a plan view.

6. The scribing table according to claim 1, characterized in that: The workpiece is a wafer.

7. A scribing device, characterized in that: The scribing device comprises: The scoring table according to any one of claims 1 to 6; and A scoring head is used for scoring the workpiece.

Images