Antiskid member

Abstract

The non-slip member has, on at least a part of the surface of a base material made of an inorganic material, a protrusion region in which a plurality of protrusions are vertically provided, the protrusion region having a first direction and a second direction intersecting the first direction. The plurality of protrusions are periodically arranged in at least one of the first direction and the second direction, the average pitch of the plurality of protrusions in the first direction and / or the second direction is within the range of 20 nm or more and 1000 nm or less, and the static friction coefficient on the surface is 0.20 or more.

Description

Technical Field

[0001] The invention relates to an anti-slip component.

[0002] This application claims priority based on patent application No. 2022-104569 filed in Japan on June 29, 2022 and patent application No. 2022-104578 filed in Japan on June 29, 2022, and the contents of which are incorporated herein by reference. Background Art

[0003] In a gripping member for gripping an object or a conveying member for conveying an object, as disclosed in Patent Documents 1 and 2, for example, an anti-slip member is disposed on a portion in contact with the object in order to stably fix the object.

[0004] Furthermore, when handling an object, as disclosed in Patent Document 3, for example, an anti-slip member is also used to temporarily fix the object to prevent positional displacement.

[0005] Here, since the anti-slip member is required to have sufficient frictional force with the object, it is generally made of an organic material such as rubber which is a viscoelastic body.

[0006] Patent Document 1: Japanese Patent Application Publication No. 2018-094704

[0007] Patent Document 2: WO2009 / 005027

[0008] Patent Document 3: Japanese Patent Application Publication No. 2009-168860

[0009] However, organic materials such as rubber have a problem of not being able to be used stably in a high temperature environment due to insufficient heat resistance, and also have a problem of not being able to be used in a clean environment due to the possibility of contamination caused by the organic materials.

[0010] Therefore, anti-slip members made of organic materials cannot be used in semiconductor manufacturing process applications, aerospace applications, and robot applications, for example.

[0011] Here, industrial materials constituting various components are roughly divided into organic materials such as resins and rubbers, and inorganic materials such as ceramics and metals.

[0012] As mentioned above, organic materials have excellent flexibility but poor heat resistance. In contrast, inorganic materials have excellent heat resistance but poor flexibility. Thus, depending on the selected material, industrial materials may have problems with properties that cannot be achieved at the same time.

[0013] Therefore, when the anti-slip member is made of an inorganic material, it has excellent heat resistance and less contamination problems, but may not be able to obtain sufficient frictional force and may not be able to sufficiently fix the object. Summary of the invention

[0014] The present invention has been made in view of the above circumstances, and an object thereof is to provide an anti-slip member that can be stably used even in a high temperature environment and a clean environment and can sufficiently fix an object.

[0015] The present inventors have conducted intensive studies to solve this problem and have found that by forming fine irregularities on the surface of a substrate made of an inorganic material such as ceramic or metal, sufficient friction can be imparted to the surface and the substrate can be used as an anti-slip member.

[0016] The present invention is completed based on the above-mentioned insights. The anti-slip component of mode 1 of the present invention is characterized in that a protrusion area with multiple protrusions upright is provided on at least a portion of the surface of a substrate composed of an inorganic material, and the protrusion area has a first direction and a second direction intersecting the first direction, and the multiple protrusions are periodically arranged in at least one direction of the first direction and the second direction. The average spacing of the multiple protrusions in the first direction and / or the second direction is set in the range of more than 20nm and less than 1000nm, and the static friction coefficient on the surface is set to be greater than 0.20.

[0017] According to the anti-slip component of the first embodiment of the present invention, since it is made of an inorganic material such as ceramic or metal, it has excellent heat resistance and can fully suppress the problem of contamination. In addition, since there is a protrusion area with a plurality of protrusions erected on at least a portion of the surface of the substrate, the protrusion area has a first direction and a second direction intersecting the first direction, the plurality of protrusions are periodically arranged in at least one direction of the first direction and the second direction, and the average spacing of the plurality of protrusions in the first direction and / or the second direction is set within a range of 20 nm or more and 1000 nm or less, the object can be fully fixed by the friction force of the surface.

[0018] Therefore, it can be used stably even in a high temperature environment and a clean environment, and can sufficiently fix the object.

[0019] Mode 2 of the present invention is characterized in that, in the anti-slip component of mode 1, the plurality of protrusions form a stripe structure consisting of a plurality of ridges extending along the first direction or the second direction, and an average spacing of the ridges is set within a range of greater than 20 nm and less than 1000 nm.

[0020] According to the anti-slip component of mode 2 of the present invention, a striped structure consisting of a plurality of protrusions extending along the first direction or the second direction is formed on at least a portion of the surface of the substrate, the average spacing of the protrusions is set in the range of greater than 20nm and less than 1000nm, and the static friction coefficient on the surface is set to greater than 0.20, so that the object can be fully fixed by the friction force of the surface.

[0021] Therefore, it can be used stably even in a high temperature environment and a clean environment, and can sufficiently fix the object.

[0022] A third aspect of the present invention is the anti-slip member of the first aspect, wherein the striated structure occupies an area ratio of 30% or more on the surface.

[0023] According to the anti-slip member of the third aspect of the present invention, since the area ratio of the striped structure on the surface is set to 30% or more, the striped structure provides a more sufficient friction force to the surface, and the object can be fixed more reliably.

[0024] A fourth aspect of the present invention is the anti-slip member of the first aspect or the second aspect, wherein an average pitch of the protrusions is 500 nm or less.

[0025] According to the anti-slip member of the fourth aspect of the present invention, since the average pitch of the protrusions is set to 500 nm or less and a finer structure is provided, a more sufficient friction force can be applied to the surface and an object can be fixed more reliably.

[0026] A fifth aspect of the present invention is the anti-slip member according to any one of the second to fourth aspects, wherein an average height of the protrusions is set within a range of 20 nm to 1000 nm.

[0027] According to the anti-slip member of the fifth aspect of the present invention, since the average height of the protrusions is set within the range of 20 nm to 1000 nm, a more sufficient frictional force can be applied to the surface, and an object can be fixed more reliably.

[0028] A sixth aspect of the present invention is the anti-slip member according to any one of the second to fifth aspects, wherein a cross section of the protrusion portion perpendicular to the extending direction is triangular in shape.

[0029] According to the anti-slip member of aspect 6 of the present invention, since the cross section of the protrusion orthogonal to the extending direction is triangular, the tip of the protrusion is easily deformed along the outer shape of the object, and the object can be fixed more reliably.

[0030] Mode 7 of the present invention is characterized in that, in the anti-slip component of mode 1, the multiple protrusions are composed of protrusions periodically arranged in the first direction and the second direction, respectively, and the average spacing of the protrusions in the first direction and the average spacing in the second direction are set in the range of more than 20nm and less than 1000nm.

[0031] According to the anti-slip component of mode 7 of the present invention, since the multiple protrusions arranged on at least a portion of the surface of the substrate are composed of a plurality of protrusions periodically arranged in the first direction and the second direction, respectively, the average spacing of the protrusions in the first direction and the average spacing in the second direction are set in the range of more than 20nm and less than 1000nm, and the static friction coefficient on the surface is set to more than 0.20, the object can be fully fixed by the friction force of the surface.

[0032] Therefore, it can be used stably even in a high temperature environment and a clean environment, and can sufficiently fix the object.

[0033] An eighth aspect of the present invention is the anti-slip member of the seventh aspect, wherein the area occupied by the protrusions on the surface is 30% or more.

[0034] According to the anti-slip member of aspect 8 of the present invention, since the area ratio of the protrusions on the surface is set to 30% or more, the protrusions provide a more sufficient friction force on the surface, and the object can be fixed more reliably.

[0035] A ninth aspect of the present invention is characterized in that, in the eighth aspect or the anti-slip member of the eighth aspect, an average pitch of the protrusions in the first direction and an average pitch in the second direction are set to 500 nm or less.

[0036] According to the anti-slip component of mode 9 of the present invention, since the average spacing of the protrusions in the first direction and the average spacing in the second direction are respectively set to less than 500nm, thereby setting a finer structure, it is possible to impart more sufficient friction to the surface and to more reliably fix the object.

[0037] A tenth aspect of the present invention is the anti-slip member of any one of aspects 7 to 9, wherein an average height of the protrusions is set within a range of 20 nm to 1000 nm.

[0038] According to the anti-slip member of aspect 10 of the present invention, since the average height of the protrusions is set in the range of 20 nm to 1000 nm, a more sufficient frictional force can be applied to the surface, and an object can be fixed more reliably.

[0039] Aspect 11 of the present invention is the anti-slip member according to any one of aspects 7 to 10, wherein the protrusion has a pointed end portion with a sharp tip.

[0040] According to the anti-slip member of aspect 11 of the present invention, since the protrusion has a sharp tip, the tip (tip) of the protrusion is easily deformed along the outer shape of the object, and the object can be fixed more reliably.

[0041] A twelfth aspect of the present invention is the anti-slip member of the eleventh aspect, wherein the tip portion has inclined surfaces inclined in opposite directions to each other via a top portion.

[0042] According to the anti-slip member of aspect 12 of the present invention, since the tip portion has inclined surfaces inclined in opposite directions via the top, the contact area between the surface and the object is ensured, and the object can be fixed more reliably.

[0043] A thirteenth aspect of the present invention is the anti-slip member of the eleventh aspect, wherein the tip portion has a quadrangular pyramid shape.

[0044] According to the anti-slip member of aspect 13 of the present invention, since the tip portion has a quadrangular pyramid shape, the contact area between the surface and the object is ensured, and the object can be fixed more reliably.

[0045] Mode 14 of the present invention is characterized in that, in the anti-slip component of any one of modes 1 to 13, the surface of the substrate is composed of at least one of aluminum, aluminum alloy, nickel, nickel alloy, copper, copper alloy, titanium, titanium alloy, tungsten, tungsten alloy, magnesium, magnesium alloy, quartz, glass, silicon, aluminum oxide, and titanium oxide.

[0046] According to the anti-slip component of method 14 of the present invention, since the surface of the substrate is composed of at least one of aluminum, aluminum alloy, nickel, nickel alloy, copper, copper alloy, titanium, titanium alloy, tungsten, tungsten alloy, magnesium, magnesium alloy, quartz, glass, silicon, aluminum oxide, and titanium oxide, it has particularly excellent heat resistance and can be used stably even in high temperature and clean environments.

[0047] According to the present invention, it is possible to provide an anti-slip member that can be used stably even in a high-temperature environment and a clean environment and can sufficiently fix an object. BRIEF DESCRIPTION OF THE DRAWINGS

[0048] Figure 1 It is a plan view of the anti-slip member according to the first embodiment of the present invention.

[0049] Figure 2 It is a perspective view of the protrusion region (striped structure) in the anti-slip member according to the first embodiment of the present invention.

[0050] Figure 3 yes Figure 2 AA section illustration in .

[0051] Figure 4 This is an explanatory diagram showing a method for calculating the static friction coefficient.

[0052] Figure 5 It is a flowchart showing the method for manufacturing the anti-slip member according to the first embodiment of the present invention.

[0053] Figure 6 It is a plan view of an anti-slip member according to a second embodiment of the present invention.

[0054] Figure 7 yes Figure 6 A perspective view of the raised area (raised body) of the anti-slip element is shown.

[0055] Figure 8 yes Figure 7 Illustration of the AA section (ZY plane) in .

[0056] Fig. 9 yes Figure 7 Illustration of the BB section (ZX plane) in FIG.

[0057] Fig.10 yes Figure 6 A three-dimensional view of the protrusion in the anti-slip component shown.

[0058] Fig.11 It is a flowchart showing a method for manufacturing an anti-slip member according to a second embodiment of the present invention.

[0059] Fig.12 It is a plan view showing a modified example of the anti-slip member according to the second embodiment of the present invention.

[0060] Fig.13 yes Fig.12 A three-dimensional view of the protrusion in the anti-slip component shown.

[0061] Fig.14 yes Fig.13 Illustration of the AA section (ZX plane) in .

[0062] Fig.15 yes Fig.12 A three-dimensional view of the protrusion in the anti-slip component shown.

[0063] Fig.16A 1 is an explanatory diagram showing a method of measuring the static friction coefficient in the embodiment. Specifically, it is a plan perspective view showing that three anti-slip members 10 (110 or 210) are arranged at intervals of 120° in the circumferential direction of the silicon wafer S and placed on a fixing plate Q.

[0064] Fig. 16B yes Fig.16A Side view of.

[0065] Fig. 16C 1 is a side view for explaining how the fixing plate Q is tilted and the angle θ at which the silicon wafer S slides down is measured in the embodiment. DETAILED DESCRIPTION

[0066] Hereinafter, an anti-slip member as one embodiment of the present invention will be described with reference to the attached drawings.

[0067] The anti-slip member of this embodiment is used to temporarily fix objects in gripping devices, conveying devices, manufacturing devices, etc. used in high temperature environments or clean environments such as the aerospace field, semiconductor manufacturing process field, and medical field.

[0068] (First Embodiment)

[0069] The anti-slip member 10 of the first embodiment has a substrate 11 made of an inorganic material such as ceramic or metal, and has a protrusion region 20 having a plurality of protrusions erected on at least a portion of the surface of the substrate 11. The protrusion region 20 has a first direction and a second direction intersecting the first direction. Figure 1 As shown, the plurality of protrusions form a plurality of ridges 21 extending in either the first direction or the second direction, and a stripe structure composed of the ridges 21 is formed in the protrusion region 20 .

[0070] In addition, although the shape or size of the substrate 11 is not particularly limited, in the first embodiment, Figure 1 As shown, the substrate 11 is formed in a plate shape, and the thickness thereof is set within a range of, for example, 10 μm or more and 10 cm or less.

[0071] Here, examples of the inorganic material constituting the substrate 11 include metals, ceramics, silicon, and glass. The inorganic material constituting the substrate 11 preferably has a melting point of 100° C. or higher and a decomposition temperature of 100° C. or higher, preferably has a melting point of 300° C. or higher and a decomposition temperature of 300° C. or higher, and preferably has a melting point of 500° C. or higher and a decomposition temperature of 500° C. or higher.

[0072] The metal constituting the substrate 11 may be a metal monomer or an alloy. The alloy includes an alloy composed of multiple metal elements and an alloy composed of a metal element and a non-metal element. Examples of metal monomers include aluminum, nickel, iron, copper, titanium, tungsten, and magnesium. Examples of alloys include aluminum alloys, NiP, stainless steel, and copper alloys.

[0073] Oxides, nitrides, and carbides can be used as ceramics constituting the substrate 11. Examples of ceramics include aluminum oxide (alumina), titanium oxide, and quartz.

[0074] The inorganic material constituting the substrate 11 is preferably a metal, and more preferably includes any one of copper, a copper alloy, aluminum, an aluminum alloy, and a NiP alloy.

[0075] like Figure 2 and Figure 3 As shown, the stripe structure formed on the surface of the substrate 11 is composed of a plurality of protrusions 21 extending in one direction.

[0076] That is, for example, a plurality of protrusions 21 extending in the first direction are arranged in a second direction intersecting the first direction, and a stripe structure is formed in which the plurality of protrusions 21 are arranged in parallel.

[0077] Here, the average pitch P between the parallel ridges 21 and the ridges 21 is set in the range of 20 nm or more and 1000 nm or less. The average pitch P of the ridges 21 is the average value of the distances between the tops 21a and the tops 21a of the adjacent ridges 21 and the ridges 21. The average pitch P of the ridges 21 can be measured based on a cross-sectional SEM photograph of the stripe structure taken with a SEM (scanning electron microscope).

[0078] In addition, the average pitch P of the protrusions 21 is preferably 1000 nm or less, preferably 500 nm or less, and the average pitch P of the protrusions 21 is preferably 20 nm or more, preferably 50 nm or more.

[0079] Here, the average pitch P of the protrusions 21 is a value obtained by measuring the distances between the tops 21a and the tops 21a of adjacent protrusions 21 at 10 locations in a planar photograph of the stripe structure taken using an SEM (scanning electron microscope), and calculating the average value.

[0080] In the first embodiment, the average height H of the protrusions 21 is preferably within a range of 20 nm to 1000 nm. The average height H of the protrusions 21 can be measured from a SEM photograph of a cross section of the stripe structure taken with a SEM (scanning electron microscope).

[0081] In addition, the average height H of the protrusions 21 is preferably 800 nm or less, preferably 500 nm or less, and the average height H of the protrusions 21 is preferably 20 nm or more, preferably 50 nm or more.

[0082] Here, the average height H of the protrusions 21 is a value obtained by measuring the heights from the top 21 a of the protrusions 21 at 10 locations in a cross-sectional photograph of the stripe structure taken by SEM (scanning electron microscope) and calculating the average value.

[0083] And, in the first embodiment, if Figure 3 As shown in FIG. 2 , it is preferred that the cross section of the protrusion 21 perpendicular to the extending direction has a triangular shape.

[0084] Here, the cross-sectional shape of the protrusion 21 is more preferably an isosceles triangle. Figure 3 The α) is preferably 60 degrees or more, and preferably in the range of 60 degrees or more and 80 degrees or less.

[0085] The bottom angle of the protrusion 21 ( Figure 3 The α) is determined by taking a cross-sectional photograph of the stripe structure using a SEM (scanning electron microscope).

[0086] Furthermore, in the first embodiment, the ratio of the average height H to the average pitch P of the protrusions 21 (average height H / average pitch P) is preferably in the range of 0.8 to 2.0, and more preferably in the range of 1.0 to 1.5.

[0087] When the average height H / average pitch P is greater than 0.8, the ridges 21 are easily deformed along the outer shape of the object, and the object can be fixed more reliably. On the other hand, when the average height H / average pitch P is less than 2.0, the restoring force of the shape of the ridges 21 becomes high, and it can be used repeatedly.

[0088] Furthermore, in the anti-slip member 10 according to the first embodiment, the area ratio (occupancy area ratio) of the striped structure (protrusion region 20 ) on the surface of the substrate 11 that contacts the object is preferably 30% or more.

[0089] exist Figure 1 In the illustrated anti-slip member 10 , the striped structure is formed on approximately 70% of the surface of the substrate 11 .

[0090] The area ratio of the stripe structure on the surface of the substrate 11 is preferably 50% or more, preferably 70% or more, and the area ratio of the stripe structure on the surface of the substrate 11 is preferably 100% or less.

[0091] Here, the "area ratio occupied by the stripe structure" refers to the value obtained by dividing the area of ​​the following range among multiple protrusions 21 extending in a specified direction by the area of ​​the substrate surface, wherein the range is a range in which the spacing from the protrusion 21 to the protrusion 21 is in the range of -10% to +10% from the average spacing and there are more than three such protrusions 21 repeated continuously.

[0092] Furthermore, in the anti-slip member 10 as the first embodiment, the static friction coefficient μ on the surface of the base material 11 on which the stripe structure is formed is set to 0.20 or more.

[0093] The static friction coefficient μ on the surface of the substrate 11 is preferably 0.30 or more, and more preferably 0.40 or more. Although the upper limit of the static friction coefficient μ is not particularly limited, the static friction coefficient μ is actually 10 or less.

[0094] Here, the static friction coefficient μ on the surface of the substrate 11 can be expressed by Figure 4 The following is calculated by equation (1) to equation (4): Figure 4 Style.

[0095] F0=μN (1)

[0096] mgsinθ=μmgcosθ (2)

[0097] μ=mgsinθ / mgcosθ (3)

[0098] μ=sinθ / cosθ=tanθ (4)

[0099] In formulas (1) to (4), m is the mass of the object, g is the acceleration due to gravity, F0 is the maximum static friction force, and N is the vertical stress. Specifically, when the angle at which sliding starts is set to θ, the static friction coefficient is expressed as μ=tanθ. In addition, in the first embodiment, in any of the methods of the direction orthogonal to the extension direction of the protrusion 21 and the direction parallel to the extension direction of the protrusion 21, the static friction coefficient μ is set to be greater than 0.20.

[0100] Next, an example of a method for manufacturing the anti-slip member 10 according to the first embodiment will be described. Figure 5 As shown in the flowchart of FIG. 1 , the anti-slip member 10 as the first embodiment includes a grinding step S01 and a cutting step S02 .

[0101] In the grinding step S01, the surface of the substrate 11 composed of an inorganic material is ground. The grinding of the substrate 11 can be performed, for example, by grinding with a grinder, grinding with waterproof paper, or polishing. The surface of the substrate 11 after grinding is preferably 0.02 μm or less in terms of surface roughness Ra. Here, the surface roughness Ra refers to the arithmetic mean roughness (Ra) shown in JIS B0601.

[0102] In the cutting step S02, the surface of the substrate 11 ground in the grinding step S01 is cut to form the protrusions 21. The cutting method is not particularly limited, and various methods can be selected.

[0103] As a cutting method, for example, the following methods can be used: a method of forming a groove by moving the tool in a direction perpendicular to the tool surface while periodically moving the tool up and down (NP method: nanoindentation method), and a method of forming a groove by moving the tool linearly instead of moving it up and down (conventional method).

[0104] In the NP method, as a processing device, a processing device having a tool and an ultrasonic vibration device for ultrasonically vibrating the tool can be used. The shape of the blade of the tool is not particularly limited, and can be set to a triangle or a quadrilateral, for example. In the NP method, for example, the surface of the substrate 11 is pressed obliquely while the tool is ultrasonically vibrated, and then the tool is moved in a direction orthogonal to the blade surface while periodically moving up and down. As a result, a ridge portion 21 extending in a direction orthogonal to the moving direction of the tool is formed on the surface of the substrate 11.

[0105] In the conventional method, as a processing device, a processing device having a tool and an ultrasonic vibration device for ultrasonically vibrating the tool can be used. The shape of the blade of the tool is set to be triangular. In the conventional method, for example, while the tool is ultrasonically vibrated, it is vertically pressed into the surface of the substrate 11, and then, while the tool is fixed so as not to move up and down, the tool is moved in a direction orthogonal to the blade surface. Thus, a ridge portion 21 extending parallel to the moving direction of the tool is formed on the surface of the substrate 11.

[0106] The anti-slip member 10 of the first embodiment is manufactured through the above-mentioned steps.

[0107] According to the anti-slip member 10 of the first embodiment configured as described above, since it is made of an inorganic material such as ceramics or metal, it has excellent heat resistance and can sufficiently suppress the problem of contamination.

[0108] Furthermore, since a stripe structure consisting of a plurality of protrusions 21 extending in either the first direction or the second direction is formed on at least a portion of the surface of the substrate 11, the average spacing P of the protrusions 21 is set within a range of greater than 20 nm and less than 1000 nm, and the static friction coefficient μ on the surface of the substrate 11 is set to greater than 0.20, the object can be fully fixed.

[0109] Therefore, it can be used stably even in a high temperature environment and a clean environment, and can sufficiently fix the object.

[0110] Here, in the first embodiment, when the area ratio of the striped structure on the surface of the substrate 11 is 30% or more, the striped structure can provide more sufficient friction force to the surface of the substrate 11 in contact with the object, and the object can be fixed more reliably.

[0111] In the first embodiment, when the average pitch P of the protrusions 21 is set to 500 nm or less, a more sufficient friction force can be applied to the surface of the substrate 11 in contact with the object, and the object can be fixed more reliably.

[0112] In the first embodiment, when the average height H of the protrusions 21 is within the range of 20 nm to 1000 nm, a more sufficient friction force can be applied to the surface of the substrate 11 in contact with the object, and the object can be fixed more reliably.

[0113] In the first embodiment, when the cross section of the protrusion 21 perpendicular to the extending direction is triangular, the tip of the protrusion 21 is easily deformed along the outer shape of the object, and the object can be fixed more reliably.

[0114] As mentioned above, although the anti-slip member which is an embodiment of the present invention has been described, the present invention is not limited thereto, and can be appropriately modified within the scope of the technical concept of the present invention.

[0115] For example, in the above-mentioned embodiment, the stripe structure is formed by cutting. However, the present invention is not limited thereto, and the stripe structure may be formed by other methods.

[0116] Furthermore, in the first embodiment, the cross-sectional shape of the protrusion portion is described as an example in which the cross-sectional shape is a triangle, but the present invention is not limited thereto, and the protrusion portion may be in another cross-sectional shape such as a trapezoidal shape.

[0117] (Second Embodiment)

[0118] The anti-slip member 110 of the second embodiment has a base material 111 made of an inorganic material such as ceramic or metal, and has a protrusion region 120 in which a plurality of protrusions are erected on at least a portion of the surface of the base material 111. Figure 6 As shown, the plurality of protrusions are composed of a plurality of protrusions 121 periodically arranged in a first direction and in a second direction intersecting the first direction.

[0119] In addition, although the shape or size of the substrate 111 is not particularly limited, in the second embodiment, Figure 6 As shown, the substrate 111 is formed in a plate shape, and the thickness thereof is set within a range of, for example, 10 μm to 10 cm.

[0120] Here, examples of the inorganic material constituting the substrate 111 include metals, ceramics, silicon, and glass similar to those in the first embodiment.

[0121] like Figures 6 to 9 As shown, the protrusion region 120 formed on the surface of the substrate 111 is composed of a plurality of protrusions 120 disposed in a first direction (in Figures 7 to 9 The X direction in the figure) and a second direction crossing the first direction (in the figure Figures 7 to 9 In the second embodiment, the first direction (X direction) and the second direction (Y direction) are orthogonal to each other.

[0122] The average pitch P1 of the protrusions 121 in the first direction (X direction) and the average pitch P2 of the protrusions 121 in the second direction (Y direction) are respectively set in the range of 20 nm or more and 1000 nm or less. In addition, the average pitch P1 of the protrusions 121 in the first direction (X direction) and the average pitch P2 of the protrusions 121 in the second direction (Y direction) are the average values ​​of the distances between the tops 125 and the tops 125 of the adjacent protrusions 121.

[0123] In addition, as described later, in the second embodiment, since the top 125 of the protrusion 121 is configured to extend along the second direction (Y direction), the average pitch P2 in the second direction (Y direction) is the distance between the centers of the tops 125 of adjacent protrusions 121 .

[0124] Here, the average pitch P1 in the first direction and the average pitch P2 in the second direction can be measured based on, for example, a SEM photograph of a cross section of the protrusion region 120 taken using a SSEM (scanning electron microscope).

[0125] Here, the average pitch P1 of the protrusions 121 is a value obtained by measuring the distances between the tops 125 and the tops 125 of the adjacent protrusions 121 in the first direction (X direction) at 10 locations in the planar photograph of the protrusion region 120 taken with a SEM (scanning electron microscope), and calculating the average value thereof. The average pitch P2 of the protrusions 121 is a value obtained by measuring the distances between the tops 125 and the centers of the tops 125 of the adjacent protrusions 121 in the second direction (Y direction) at 10 locations in the planar photograph of the protrusion region 120 taken with a SEM (scanning electron microscope), and calculating the average value thereof.

[0126] The average pitch P1 of the protrusions 121 in the first direction (X direction) and the average pitch P2 in the second direction (Y direction) are preferably 1000 nm or less, preferably 500 nm or less. Furthermore, the average pitch P1 of the protrusions 121 in the first direction (X direction) and the average pitch P2 in the second direction (Y direction) are preferably 20 nm or more, preferably 50 nm or more.

[0127] In a second embodiment, if Fig.10 As shown, the protrusion 121 has a tip portion 122 with a sharp tip and a main body portion 123 connecting the tip portion 122 and the substrate 111. The tip portion 122 has: a top portion 125 extending in the second direction D (Y direction) at the center of the tip portion 122 in the first direction (X direction); an inclined surface 126a and an inclined surface 126b inclined in opposite directions in the first direction via the top portion 125; and an inclined surface 126c and an inclined surface 126d inclined in opposite directions in the second direction via the top portion 125. In addition, the main body portion 123 is in the shape of a quadrangular column.

[0128] Regarding the tip portion 122, as Figures 8 to 10 As shown in FIG. 1 , the cross section (YZ plane) perpendicular to the first direction (X direction) is a trapezoidal shape, and the cross section (XZ plane) perpendicular to the second direction (Y direction) is set to a triangular shape. The triangular shape of the tip portion 122 is preferably an isosceles triangle. The base angle ( Fig. 9 The α) is preferably greater than 60 degrees.

[0129] The base angle ( Fig. 9 α) is measured by taking a cross-sectional photograph of the tip portion 122 using a SEM (scanning electron microscope).

[0130] Here, if Fig.10 As shown, it is preferable that the length L1 of the protrusion 121 (the bottom surface 128 of the tip portion 122 and the main body 123 ) in the first direction (X direction) be set within a range of 20 nm to 1500 nm.

[0131] Furthermore, it is preferable that the length L2 of the protrusion 121 (the bottom surface 128 of the tip portion 122 and the main body portion 123 ) in the second direction (Y direction) be set within a range of 20 nm to 1500 nm.

[0132] Furthermore, it is preferable that the length L3 in the Y direction of the top portion 125 of the tip portion 122 be set within a range of 10 nm to 1000 nm.

[0133] Here, the length L1 of the protrusion 121 in the first direction (X direction), the length L2 in the second direction (Y direction), and the Y-direction length L3 of the top 125 of the tip 122 are values ​​obtained by measuring cross-sectional photographs (ZY plane and ZX plane) of the protrusion 121 taken using a SEM (scanning electron microscope).

[0134] In the second embodiment, the average height H of the protrusions 121 is preferably within a range of 20 nm to 1000 nm. The average height H of the protrusions 121 can be measured from a cross-sectional SEM photograph of the protrusion region 120 taken with a SEM (scanning electron microscope).

[0135] The average height H of the protrusions 121 is preferably 1500 nm or less, preferably 500 nm or less, and the average height H of the protrusions 121 is preferably 20 nm or more, preferably 100 nm or more.

[0136] Furthermore, in the second embodiment, as shown in 105, the protrusion 121 has a main body 123 and a tip 122, the average height H1 of the tip 122 is preferably set in the range of greater than 20nm and less than 1500nm, and the average height H2 of the main body 123 is preferably set in the range of greater than 0nm and less than 1400nm.

[0137] Here, the average height H of the protrusion 121, the average height H1 of the tip 122, and the average height H2 of the main body 123 are the following values: the heights from the top 125 of the protrusion 121 are measured at 10 locations in the cross-sectional photograph (ZY plane) of the protrusion 121 taken by SEM (scanning electron microscope), and the average value is obtained.

[0138] Here, in the protrusion 121, the ratios H / L1 and H / L2 of the length L1 of the bottom surface 128 of the tip portion 122 and the main body 123 in the first direction (X direction), the length L2 of the bottom surface 128 of the tip portion 122 and the main body 123 in the second direction (Y direction), and the height H of the protrusion 121 are preferably in the range of greater than 0.7 and less than 10, more preferably greater than 0.85, and particularly preferably greater than 1.00.

[0139] The ratio L3 / L2 of the length L2 of the bottom surface 128 and the main body 123 of the tip portion 122 in the second direction (Y direction) to the length L3 of the top portion 125 of the tip portion 122 in the Y direction is preferably in the range of 0.4 to 0.9.

[0140] Furthermore, in the anti-slip member 110 according to the second embodiment, the area ratio (occupancy area ratio) of the protrusions 121 (protrusion regions 120 ) on the surface of the base material 111 that contacts the object is preferably 30% or more.

[0141] exist Figure 6 In the illustrated anti-slip member 110 , the protrusions 121 are formed on approximately 70% of the surface of the base material 111 .

[0142] The area ratio of the protrusions 121 on the surface of the substrate 111 is preferably 33% or more, preferably 50% or more, and the area ratio of the protrusions 121 on the surface of the substrate 111 is preferably 100% or less.

[0143] Furthermore, in the anti-slip member 110 as the second embodiment, the static friction coefficient μ on the surface of the base material 111 on which the protrusions 121 are formed is set to be 0.20 or more.

[0144] The static friction coefficient μ on the surface of the substrate 111 is preferably 0.30 or more, and more preferably 0.40 or more. Although the upper limit of the static friction coefficient μ is not particularly limited, the static friction coefficient μ is actually 10 or less.

[0145] Here, regarding the static friction coefficient μ on the surface of the substrate 111, similarly to the first embodiment, refer to Figure 4 , can be calculated using equations (1) to (4).

[0146] Next, an example of a method for manufacturing the anti-slip member 110 according to the second embodiment will be described. Fig.11 As shown in the flowchart of FIG. 1 , the anti-slip member 110 as the second embodiment includes a grinding step S11 , a cutting step S12 , and an etching step S13 .

[0147] In the grinding step S11, the surface of the substrate 111 made of an inorganic material is ground. The grinding of the substrate 111 can be performed by, for example, grinding with a grinder, grinding with waterproof paper, or polishing. The surface of the substrate 111 after grinding preferably has a surface roughness Ra of 0.02 μm or less.

[0148] In the cutting step S12, the surface of the base material 111 ground in the grinding step S11 is cut to form the protrusions 121. The cutting method is not particularly limited, and various methods can be selected.

[0149] As a cutting method, for example, the following methods can be used: a method of forming a groove by moving the tool in a direction perpendicular to the tool surface while periodically moving the tool up and down (NP method: nanoindentation method), and a method of forming a groove by moving the tool linearly instead of moving it up and down (conventional method).

[0150] In the NP method, as a processing device, a processing device having a tool and an ultrasonic vibration device for ultrasonically vibrating the tool can be used. The shape of the blade surface of the tool is not particularly limited, and can be, for example, a triangle or a quadrilateral. In the NP method, for example, the tool is pressed obliquely into the surface of the substrate 111 while ultrasonically vibrating the tool, and then, the tool is moved in a direction (first direction) orthogonal to the blade surface while periodically moving the tool up and down. Similarly, the tool is moved in a direction (second direction) orthogonal to the blade surface while periodically moving the tool up and down. Thus, a tip portion 122 is formed on the surface of the substrate 111.

[0151] In the conventional method, as a processing device, a processing device having a tool and an ultrasonic vibration device for ultrasonically vibrating the tool can be used. The shape of the blade of the tool is set to be triangular. In the conventional method, for example, while the tool is ultrasonically vibrated, it is vertically pressed into the surface of the substrate 111, and then, while fixing the tool so that it does not move up and down, the tool is moved in a direction (first direction) orthogonal to the blade surface. Similarly, while fixing the tool so that it does not move up and down, the tool is moved in a direction (second direction) orthogonal to the blade surface. In this way, a tip portion 122 is formed on the surface of the substrate 111.

[0152] In addition, in the cutting step S12 , the NP method and the conventional method may be used in combination to form the tip portion 122 on the surface of the substrate 111 .

[0153] In the etching step S03, the peripheral edge portion of the tip portion 122 formed in the cutting step S12 is etched to form the main body portion 123. In addition, when the main body portion 123 is not formed, the etching step S13 can be omitted.

[0154] As the etching treatment method, various methods used as etching treatment methods for inorganic materials can be used.

[0155] For example, when the material of the substrate 111 is aluminum, an electrolytic etching method can be used as an etching treatment method. Etching based on the electrolytic etching method can be performed as follows. First, a polycarbonate film is heated at 150° C. and then attached to the tip portion 122, thereby providing a protective layer on the tip portion 122. Next, the substrate 111 is immersed in, for example, a mononormal HCl aqueous solution (manufactured by KANTO CHEMICAL CO., INC.) for electrolytic etching (immersion 100 nm / min). After the etching is completed, it is washed with pure water, and the polycarbonate film is dissolved and removed using dichloromethane.

[0156] When the material of the substrate 111 is a material other than aluminum, the ferric chloride method (salt iron method) can be used as an etching method. When the ferric chloride method is used, a PVA film (POVAL, manufactured by KURARAY CO., LTD., 10 μm thick) is attached to the tip portion 122 to provide a protective layer on the tip portion 122. Next, the substrate 11 is immersed in a ferric chloride solution (manufactured by TOAGOSEI CO., LTD.) with a concentration of 40° Be' for etching. After the etching is completed, the substrate 11 is washed with pure water to dissolve and remove the PVA film.

[0157] The anti-slip member 110 according to the second embodiment is manufactured through the above-mentioned steps.

[0158] According to the anti-slip member 110 of the second embodiment configured as described above, since it is made of an inorganic material such as ceramics or metal, it has excellent heat resistance and can sufficiently suppress the problem of contamination.

[0159] Furthermore, a protrusion region 120 having a plurality of protrusions erected is provided on at least a portion of the surface of the substrate 111. Since the plurality of protrusions are composed of a plurality of protrusions 121 periodically arranged in a first direction and in a second direction intersecting the first direction, the average pitch P1 of the protrusions 121 in the first direction and the average pitch P2 in the second direction are set within a range of 20 nm to 1000 nm, and the static friction coefficient μ on the surface is set to be 0.20 or more, the object can be sufficiently fixed by the friction force of the surface.

[0160] Therefore, it can be used stably even in a high temperature environment and a clean environment, and can sufficiently fix the object.

[0161] Here, in the second embodiment, when the area ratio of the protrusion 121 (protrusion area 120) on the surface of the substrate 111 is greater than 30%, the protrusion 121 can provide a more sufficient friction force to the surface of the substrate 111 in contact with the object, so that the object can be fixed more reliably.

[0162] In the second embodiment, when the average pitch P1 of the protrusions 121 in the first direction and the average pitch P2 in the second direction are set to be less than 500 nm, fine concave and convex are formed on the surface, which can give more sufficient friction to the surface of the base material 11 in contact with the object, and can more reliably fix the object.

[0163] In the second embodiment, when the average height of the protrusions 121 is within the range of 20 nm to 1000 nm, a more sufficient friction force can be applied to the surface of the substrate 111 in contact with the object, and the object can be fixed more reliably.

[0164] In the second embodiment, when the protrusion 121 has the tip portion 122 with a sharp tip, the tip of the protrusion 121 (tip portion 122) can be easily deformed along the outer shape of the object, and the object can be fixed more reliably.

[0165] In the second embodiment, when the tip portion 122 has trapezoidal inclined surfaces 126a and 126b of the same shape and isosceles triangle inclined surfaces 126c and 126d of the same shape which are inclined in opposite directions via the top 125, the contact area between the surface of the anti-slip component 110 and the object is ensured, and the object can be fixed more reliably.

[0166] As mentioned above, although the anti-slip member which is an embodiment of the present invention has been described, the present invention is not limited thereto, and can be appropriately modified within the scope of the technical concept of the present invention.

[0167] For example, a modified example of the second embodiment is shown in Figure 12 to Figure 15 In. Figures 12 to 15 The anti-slip member 210 shown may be configured as follows: a protrusion region 220 having a plurality of protrusions 221 erected thereon is formed on the surface of a base material 211 , and the protrusions 221 have tip portions 222 in a quadrangular pyramid shape.

[0168] Here, the average pitch P1 of the protrusions 221 in the first direction and the average pitch P2 of the protrusions 221 in the second direction are set in the range of 20 nm to 1000 nm. The average pitch P1 and the average pitch P2 are the distances between the vertices 225 of the protrusions 221 .

[0169] Furthermore, the inclined surfaces 226a, 226b, 226c, and 226d constituting the tip portion 222 are preferably identical isosceles triangles. The bottom surface 228 is preferably a square. The bottom angle ( Fig.14 The α) is preferably greater than 60 degrees.

[0170] Furthermore, in the second embodiment, the protrusion 221 is described as having the tip portion 222 and the main body portion 223 , but the present invention is not limited thereto and the protrusion 221 may not have the main body portion 223 .

[0171] Furthermore, in the second embodiment, the protrusion 221 is formed by cutting and etching steps, but the present invention is not limited thereto, and the protrusion 221 may be formed by other methods.

[0172] Example

[0173] Hereinafter, the results of confirmation experiments conducted to confirm the effects of the present invention will be described.

[0174] (Example according to the first embodiment)

[0175] First, a substrate (length: 10 mm, width: 10 mm, plate thickness: 1 mm) composed of an inorganic material shown in Table 1 was prepared.

[0176] The surface of the prepared substrate is polished to produce a smooth surface having a surface roughness Ra of 0.02 μm or less.

[0177] Next, the surface of the polished substrate is cut using the NP method to form a stripe structure composed of a plurality of protrusions extending in one direction.

[0178] Here, the average pitch P of the protrusions constituting the stripe structure, the average height H, P / H, and the area ratio of the stripe structure on the surface were set to the values ​​shown in Table 1.

[0179] Regarding the average pitch P of the ridges constituting the stripe structure, a planar photograph of the stripe structure was taken with a SEM (scanning electron microscope), and the distances between the tops of adjacent ridges were measured at 10 locations, and the average value thereof is shown in Table 1. Regarding the average height H of the ridges constituting the stripe structure, a cross-sectional photograph of the stripe structure was taken with a SEM (scanning electron microscope), and the heights from the tops of the ridges were measured at 10 locations, and the average value thereof is shown in Table 1.

[0180] Regarding the area ratio occupied by the stripe structure, a plan photograph of a substrate having a stripe structure is taken using an SEM (scanning electron microscope), and the area of ​​a range in which the distance (spacing) between the tops of adjacent ridges is within the range of -10% to +10% of the average spacing P and there are three or more such ridges 21 repeated continuously is calculated, and the distance is divided by the area of ​​the substrate surface to obtain the area ratio occupied by the stripe structure.

[0181] In addition, as a processing device, a processing device including a tool and an ultrasonic vibrating device for ultrasonically elliptical vibrating the tool is used. The tool is pressed in obliquely while ultrasonically vibrating the tool, and then the tool is moved in a cycle in which the blade moves in the up-down direction while the tool is ultrasonically elliptical vibrating and moving in a direction orthogonal to the tool surface, thereby forming a ridge portion extending in a direction orthogonal to the moving direction of the tool on the surface of the substrate, thereby manufacturing an anti-slip component having a stripe structure on the surface.

[0182] The static friction coefficient of the surface of the obtained anti-slip member having the striated structure formed thereon was measured.

[0183] A 300 mm circular plate-shaped silicon wafer S is prepared. In addition, the surface roughness Ra of the silicon wafer S is set to 0.14 nm. Figures 16A to 16C As shown, three anti-slip members 10 are arranged at intervals of 120° in the circumferential direction at a radial position of 140 mm from the center of the silicon wafer S, and are placed on a fixing plate Q.

[0184] The anti-slip member 10 was arranged so that the surface on which the stripe structure was formed faced the silicon wafer S. Furthermore, a silicon wafer having a mass of 128 g was used, and the load in the stacking direction was set to 43 g / cm 2 .

[0185] Then, the fixing plate Q is tilted, the angle θ at which the silicon wafer S slides down is measured, and the static friction coefficient μ is calculated using equations (1) to (4).

[0186] In Table 1, the case where the radial direction of the silicon wafer S is parallel to the extending direction of the protrusions of the stripe structure is defined as “parallel”, and the case where the radial direction of the silicon wafer S is orthogonal to the extending direction of the protrusions of the stripe structure is defined as “orthogonal”.

[0187] [Table 1]

[0188]

[0189] In Comparative Example 1, the average pitch P of the protrusions of the stripe structure was set to 1500 nm, and the static friction coefficients were 0.14 (parallel) and 0.15 (orthogonal), and the friction force of the surface was insufficient.

[0190] In Comparative Example 2, the average pitch P of the protrusions of the stripe structure was set to 10 nm, and the static friction coefficients were 0.17 (parallel) and 0.17 (orthogonal), and the friction force of the surface was insufficient.

[0191] In contrast, in Examples 1 to 10 of the present invention, the average spacing P of the protrusions of the stripe structure is set within the range of greater than 20 nm and less than 1000 nm, and the static friction coefficient is confirmed to be greater than 0.28 (parallel) and greater than 0.27 (orthogonal), and the surface friction force is sufficiently high to fully fix the object.

[0192] Furthermore, in Examples 8 and 9 of the present invention, although the substrate is made of quartz, a stripe structure with an average pitch P of protrusions of greater than 20 nm and less than 1000 nm can be formed on the surface, the area ratio occupied by the stripe structure is ensured to be greater than 30%, and the static friction coefficient is greater than 0.99 (parallel) and greater than 0.76 (orthogonal).

[0193] From the above, it was confirmed that according to Examples 1 to 10 of the present invention, it is possible to provide an anti-slip member that can be stably used even in a high temperature environment and a clean environment and can sufficiently fix an object.

[0194] (Example according to the second embodiment)

[0195] First, a substrate (length: 10 mm, width: 10 mm, plate thickness: 1 mm) composed of an inorganic material shown in Table 2 was prepared.

[0196] The surface of the prepared substrate is polished to produce a smooth surface having a surface roughness Ra of 0.02 μm or less.

[0197] Next, the surface of the polished substrate is cut by the NP method to form a plurality of protrusions, thereby forming a Figure 6 to Figure 10 The projection region of the second embodiment is shown.

[0198] Here, the average spacing P1 of the protrusions constituting the protrusion area in the first direction, the average height H of the protrusions, the height H1 of the tip, the ratio H / P1 of the average spacing P1 of the protrusions in the first direction to the average height H of the protrusions, the ratio H / P2 of the average spacing P2 of the protrusions in the second direction to the average height H of the protrusions, the first direction length L1 of the bottom of the protrusion, the second direction length L2 of the bottom of the protrusion, the second direction length L3 of the top, the ratio L3 / L2 of the second direction length L2 of the bottom of the protrusion to the second direction length L3 of the top, and the area ratio (occupied area ratio) occupied by the protrusions on the surface are set to the values ​​shown in Table 2.

[0199] Regarding the average spacing P1, a plan photograph of the protrusion area was taken using an SEM (scanning electron microscope), and the distance between the tops of adjacent protrusions in the first direction (X direction) was measured at 10 locations, and the average value is shown in Table 2. Regarding the average spacing P2, the distance between the tops of adjacent protrusions in the second direction (Y direction) was measured at 10 locations, and the average value is shown in Table 2.

[0200] Regarding the average height H of the protrusion and the height H1 of the tip, a cross-sectional photograph (ZY plane) of the protrusion was taken using a SEM (scanning electron microscope), and the height from the top of the protrusion was measured at 10 locations. The average value is shown in Table 2.

[0201] Regarding the length L1 of the bottom surface of the protrusion in the first direction (X direction), the length L2 of the bottom surface of the protrusion in the second direction (Y direction), and the length L3 of the top of the protrusion in the second direction (Y direction), photographs of the cross-section (ZY plane and ZX plane) of the protrusion were taken using SEM (scanning electron microscope), and measurements were performed at 10 locations respectively, and the average values ​​are shown in Table 2.

[0202] The area ratio of the protrusions is obtained by taking a planar photograph of a substrate having protrusions using a SEM (scanning electron microscope), finding the area of ​​the range in which the protrusions satisfying the structure of the present invention are observed, and dividing the area by the surface area of ​​the substrate.

[0203] In addition, as a processing device, a processing device having a tool and an ultrasonic vibration device for making the tool ultrasonically elliptical vibrate is used. The tool is pressed in obliquely while making the tool ultrasonically vibrate, and then the tool is moved in a cycle in which the blade moves in the up-down direction while making the tool ultrasonically elliptical vibrate and moving in a direction orthogonal to the tool surface. By performing this operation in two orthogonal directions, a plurality of protrusions are formed on the surface of the substrate, thereby manufacturing an anti-slip component having a protrusion area (protrusion area) on the surface.

[0204] The static friction coefficient of the surface of the region where the protrusions were formed in the obtained anti-slip member was measured.

[0205] A 300 mm circular silicon wafer S is prepared. Figures 16A to 16C As shown, three anti-slip members 10 are arranged at intervals of 120° in the circumferential direction at a radial position of 140 mm from the center of the silicon wafer S, and are placed on a fixing plate Q.

[0206] The anti-slip member 10 was arranged so that the surface of the protrusion region was oriented toward the silicon wafer S. A silicon wafer having a mass of 128 g was used, and the load in the stacking direction was set to 43 g / cm 2 .

[0207] Then, the fixing plate Q is tilted, the angle θ at which the silicon wafer S slides down is measured, and the static friction coefficient μ is calculated using equations (1) to (4).

[0208] [Table 2]

[0209]

[0210] In Comparative Example 11, the average pitch P1 of the protrusions in the first direction and the average pitch P2 of the protrusions in the second direction were each set to 10 nm, and the static friction coefficient was 0.16, and the friction force of the surface was insufficient.

[0211] In contrast, in Examples 11 to 18 of the present invention, the average spacing P1 of the protrusions in the first direction and the average spacing P2 of the protrusions in the second direction are respectively set in the range of greater than 20 nm and less than 1000 nm, and it is confirmed that the static friction coefficient is greater than 0.21, and the surface friction force is sufficiently high to fully fix the object.

[0212] From the above, it was confirmed that according to Examples 11 to 18 of the present invention, it is possible to provide an anti-slip member that can be stably used even in a high temperature environment and a clean environment and can sufficiently fix an object.

[0213] Explanation of symbols

[0214] 10, 110, 210 anti-slip parts

[0215] 11, 111, 211 base material

[0216] 20, 120, 220 protrusion area (protrusion area)

[0217] 21 protrusion

[0218] 121, 221 protrusions

[0219] 122, 222 tip

[0220] 123, 223 main body

Claims

1. An anti-slip component, characterized in that: A protrusion region having a plurality of protrusions erected on at least a portion of a surface of a substrate made of an inorganic material, The protrusion region has a first direction and a second direction intersecting the first direction, The plurality of protrusions are periodically arranged in at least one of the first direction and the second direction, The average pitch of the plurality of protrusions in the first direction and / or the second direction is set within a range of 20 nm to 1000 nm. The static friction coefficient on the surface is set to 0.20 or more.

2. The anti-slip component according to claim 1, characterized in that: The plurality of protrusions form a stripe structure composed of a plurality of ridges extending in the first direction or the second direction, and an average pitch of the ridges is set within a range of 20 nm to 1000 nm.

3. The anti-slip component according to claim 2, characterized in that: The striped structure occupies 30% or more of the surface area of ​​the substrate.

4. The anti-slip component according to claim 2 or 3, characterized in that: The average pitch of the protrusions is set to 500 nm or less.

5. The anti-slip component according to claim 2 or 3, characterized in that: The average height of the protrusions is set within a range of 20 nm to 1000 nm.

6. The anti-slip component according to claim 2 or 3, characterized in that: The protrusion has a triangular cross-section perpendicular to the extending direction.

7. The anti-slip component according to claim 1, characterized in that: The plurality of protrusions are composed of a plurality of protrusions periodically arranged in the first direction and the second direction, respectively. An average pitch of the protrusions in the first direction and an average pitch of the protrusions in the second direction are set within a range of 20 nm to 1000 nm.

8. The anti-slip component according to claim 7, characterized in that: The projections occupy 30% or more of the surface area of ​​the substrate.

9. The anti-slip component according to claim 7 or 8, characterized in that: An average pitch of the protrusions in the first direction and an average pitch of the protrusions in the second direction are set to be 500 nm or less.

10. The anti-slip component according to claim 7 or 8, characterized in that: The average height of the protrusions is set in the range of 20 nm to 1000 nm.

11. The anti-slip component according to claim 7 or 8, characterized in that: The protrusion has a pointed tip portion with a sharp front end.

12. The anti-slip component according to claim 11, characterized in that: The tip portion has inclined surfaces inclined in opposite directions to each other via a top portion.

13. The anti-slip component according to claim 11, characterized in that: The tip portion is in a quadrangular pyramid shape.

14. The anti-slip component according to claim 1, characterized in that: The surface of the substrate is composed of at least one of aluminum, aluminum alloy, nickel, nickel alloy, copper, copper alloy, titanium, titanium alloy, tungsten, tungsten alloy, magnesium, magnesium alloy, quartz, glass, silicon, aluminum oxide, and titanium oxide.

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