Wire feeding additive devices and substrate processing equipment

Abstract

The embodiment of the present invention discloses a wire feeding additive device and a substrate processing equipment, comprising: a static shoulder, the static shoulder is formed with a plurality of stirring chambers, each stirring chamber is provided with an additive port and a wire feeding hole; a plurality of stirring heads, the plurality of stirring heads are installed in the plurality of stirring chambers in a one-to-one correspondence, and the stirring heads are rotatable relative to the static shoulder, and the stirring heads are suitable for cutting the wire input into the wire feeding hole into wire segments during the rotation process, and pushing the wire segments toward the additive port. The wire feeding additive device of the embodiment of the present invention can improve the structural integration of the wire feeding additive device by providing a plurality of stirring chambers in the static shoulder and a plurality of stirring heads corresponding to the plurality of stirring chambers. The wire feeding additive device has a simple structure and low setting cost. The wire can be moved simultaneously by the plurality of stirring chambers and the plurality of stirring heads to improve the deposition efficiency of the wire, and the deposition width of the wire can be increased, thereby ensuring production efficiency, better use effect, and a wider range of application.

Description

Technical Field

[0001] The present invention relates to the technical field of substrate processing equipment manufacturing, and in particular to a wire feeding additive device and substrate processing equipment having the wire feeding additive device. Background Art

[0002] Friction stir additive manufacturing (FSAM) is a solid-phase additive manufacturing method used for additive manufacturing of non-ferrous metals such as aluminum and magnesium. This method utilizes frictional heat generation and stirring to promote connection, stacking materials layer by layer to achieve additive manufacturing. Wire feeding is a method of feeding FAM materials. The stirrer cuts the wire to form segments, which are then driven downward by the stirrer to the end face of the stirrer to soften and deposit on the substrate, achieving additive manufacturing.

[0003] However, the deposition efficiency of existing wire-feeding additive devices is low. The deposition width can be appropriately increased by changing the welding tool shoulder diameter and wire feeding diameter, but the deposition width is subject to limitations such as wire feeding rate and frictional heat generation, and there is room for improvement. Summary of the Invention

[0004] The present invention aims to solve at least one of the technical problems existing in the prior art. To this end, the present invention provides a wire feeding additive device with a simple structure, low installation cost, improved structural integration, and increased deposition efficiency and deposition width to ensure production efficiency.

[0005] According to an embodiment of the present invention, the wire feeding additive device includes: a static shoulder, which is formed with a plurality of stirring chambers, each of which is provided with an additive port and a wire feeding hole; a plurality of stirring heads, which are installed in a one-to-one correspondence in the plurality of stirring chambers, and the stirring heads are rotatable relative to the static shoulder, and the stirring heads are suitable for cutting the wire input into the wire feeding hole into wire segments during the rotation process, and pushing the wire segments toward the additive port.

[0006] According to the wire feeding additive device of the embodiment of the present invention, a plurality of stirring chambers are provided in the static shaft shoulder, and a plurality of stirring heads corresponding to the plurality of stirring chambers are provided, thereby improving the structural integration of the wire feeding additive device. The wire feeding additive device has a simple structure and a low setting cost. The wire can be moved simultaneously through the plurality of stirring chambers and the plurality of stirring heads to improve the deposition efficiency of the wire, and the deposition width of the wire can be increased, thereby ensuring production efficiency, better use effect, and a wider range of applications.

[0007] According to some embodiments of the wire feeding additive device of the present invention, the stirring chamber is configured to extend along a first direction, the additive port is provided at one end of the stirring chamber in the first direction, and the wire feeding hole is provided on a peripheral wall of the stirring chamber.

[0008] According to some embodiments of the wire feeding additive device of the present invention, the plurality of stirring chambers are distributed around the central area of ​​the static shoulder.

[0009] According to some embodiments of the wire feeding additive device of the present invention, a connecting cavity is formed in the central area of ​​the static shoulder, the multiple stirring cavities are connected at the connecting cavity, and two adjacent stirring heads are linked and cooperated at the connecting cavity.

[0010] According to some embodiments of the wire feeding additive device of the present invention, the plurality of stirring chambers are spaced apart and distributed, and two adjacent stirring heads are coordinated with each other outside the stirring chamber.

[0011] According to some embodiments of the present invention, the wire feeding additive device further includes: a driving member, wherein the driving member is used to drive the stirring head to rotate.

[0012] According to some embodiments of the wire feeding additive device of the present invention, one of the plurality of stirring heads is in power connection with the driving member;

[0013] A transmission member is fixedly sleeved on the outside of each stirring head, and the transmission members of the multiple stirring heads are linked.

[0014] According to some embodiments of the wire feeding additive device of the present invention, each of the stirring heads is connected to a corresponding driving member, and the driving member is suitable for independently driving the corresponding stirring head to rotate.

[0015] According to some embodiments of the wire feeding additive device of the present invention, a spiral pushing groove is formed on the outer peripheral wall of the stirring head, and the groove wall of the spiral pushing groove is suitable for cutting the wire, and the groove wall of the spiral pushing groove is suitable for pushing the wire segment toward the additive port.

[0016] The invention also provides a substrate processing device.

[0017] According to an embodiment of the present invention, the substrate processing equipment includes a processing table and a wire feeding additive device as described in any one of the above items, wherein the processing table is used to place the substrate, and the wire feeding additive device is movable relative to the processing table along a second direction and is suitable for conveying the wire segment toward the substrate; in the projection along the second direction, at least a portion of the two adjacent stirring heads overlaps and at least another portion is staggered.

[0018] The substrate processing equipment and the above-mentioned wire feeding additive device have the same advantages as the prior art, which will not be described in detail here.

[0019] Additional aspects and advantages of the present invention will be set forth in part in the description which follows and, in part, will be obvious from the description which follows, or may be learned by practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] The above and / or additional aspects and advantages of the present invention will become apparent and readily understood from the following description of the embodiments with reference to the accompanying drawings, in which:

[0021] Figure 1 Schematic diagram of the structure of the wire feeding additive device according to an embodiment of the present invention Figure 1 ;

[0022] Figure 2 Schematic diagram of the structure of the wire feeding additive device according to an embodiment of the present invention Figure 2 ;

[0023] Figure 3 is a cross-sectional view of a wire feeding additive device according to an embodiment of the present invention Figure 1 ;

[0024] Figure 4 is a cross-sectional view of a wire feeding additive device according to an embodiment of the present invention Figure 2 ;

[0025] Figure 5 Schematic diagram of the structure of the wire feeding additive device according to an embodiment of the present invention Figure 3 ;

[0026] Figure 6 Schematic diagram of the structure of the wire feeding additive device according to an embodiment of the present invention Figure 4 ;

[0027] Figure 7 According to an embodiment of the present invention Figure 6 Cross-sectional view at AA;

[0028] Figure 8 Schematic diagram of the structure of the wire feeding additive device according to an embodiment of the present invention Figure 5 ;

[0029] Figure 9 Schematic diagram of the structure of the wire feeding additive device according to an embodiment of the present invention Figure 6 ;

[0030] Figure 10 According to an embodiment of the present invention Figure 9 Cross-sectional view at BB.

[0031] Reference numerals:

[0032] Wire feeding additive device 100, wire material 101,

[0033] Static shoulder 1, stirring chamber 11, material addition port 12, wire feeding hole 13, connecting chamber 14,

[0034] Stirring head 2, spiral pushing groove 21, transmission gear 3. DETAILED DESCRIPTION

[0035] The following describes embodiments of the present invention in detail. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended only to explain the present invention and are not to be construed as limiting the present invention.

[0036] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, features defined as "first" or "second" may explicitly or implicitly include one or more of such features. In the description of the present invention, unless otherwise specified, "multiple" means two or more.

[0037] In the description of the present invention, it should be noted that, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood in a broad sense. For example, they may refer to fixed, detachable, or integral connections; mechanical or electrical connections; direct or indirect connections through an intermediate medium; and internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on the specific circumstances.

[0038] Reference below Figures 1-10 The wire feeding additive device 100 according to an embodiment of the present invention is described as having a simple structure and low installation cost, which can improve structural integration, and can also increase deposition efficiency and deposition width, thereby ensuring production efficiency.

[0039] like Figures 1-10 As shown, a wire feeding additive device 100 according to one embodiment of the present invention includes: a static shoulder 1 and a plurality of stirring heads 2.

[0040] The static shoulder 1 is formed with multiple stirring chambers 11, each stirring chamber 11 is provided with an additive port 12 and a wire feeding hole 13, and multiple stirring heads 2 are installed in the multiple stirring chambers 11 in a one-to-one correspondence, and the stirring heads 2 are rotatable relative to the static shoulder 1. The stirring heads 2 are suitable for cutting the wire 101 input into the wire feeding hole 13 into wire segments during the rotation process, and pushing the wire segments toward the additive port 12.

[0041] Among them, stir friction additive manufacturing is a solid-phase additive manufacturing method that can be used to manufacture non-ferrous metals such as aluminum and magnesium. This method is to stack the materials layer by layer to achieve additive manufacturing by the principle of frictional heat generation and stirring to promote connection. Wire feeding is one of the feeding methods of stir friction additive manufacturing. The wire 101 is cut by the stirring head 2, and the cut wire 101 can be driven by the stirring head 2 to be transported downward to the end face of the stirring head 2, so that the wire segment can contact the substrate, and as the stirring head 2 rotates, frictional heat is generated between the wire segment and the substrate to soften the wire segment and accumulate on the substrate, thereby achieving additive manufacturing, and has a wide range of applications.

[0042] Specifically, the wire feeding additive device 100 is provided with a static shoulder 1, which is a stationary shoulder. The static shoulder 1 is provided outside the wire feeding additive device 100. The static shoulder 1 can be installed with the components required for the wire feeding additive device 100, and when the wire feeding additive device 100 is running, the static shoulder 1 is stationary relative to the other components. The static shoulder 1 can be set as a rotating body or a rectangular body, etc. In this embodiment, the static shoulder 1 is set as a rotating body, and a plurality of stirring chambers 11 are formed in the static shoulder 1, that is, stirring chambers 11. The mixing chamber 11 can be set to two, three or four, etc. The stirring chamber 11 can be set to a cylindrical stirring chamber. The stirring chamber 11 is extended along the axial direction of the static shaft shoulder 1, and both ends of the stirring chamber 11 can pass through the static shaft shoulder 1. An additive port 12 is formed at one end of the stirring chamber 11, and the additive port 12 can be open toward the substrate. The stirring chamber 11 is also provided with a wire feeding hole 13, and the wire feeding hole 13 is connected to the stirring chamber 11. The user can feed the wire 101 into the stirring chamber 11 through the wire feeding hole 13.

[0043] Furthermore, the wire feeding additive device 100 is also provided with a plurality of stirring heads 2, that is, the stirring heads 2 can be set to two, three or four, etc., and the plurality of stirring heads 2 and the plurality of stirring chambers 11 are set in a one-to-one correspondence, that is, each stirring chamber 11 is correspondingly provided with a stirring head 2, and the stirring head 2 is installed in the corresponding stirring chamber 11 and can rotate relative to the stirring chamber 11. When the stirring head 2 rotates, the wire 101 can be cut, so that the wire 101 fed into the stirring chamber 11 can be cut into wire segments, and as the stirring The rotation of the mixing head 2 can push the wire segment toward the additive port 12. The wire segment pushed to the additive port 12 can fall onto the surface of the substrate to be added. At this time, the wire segment can contact the substrate, and as the mixing head 2 rotates, friction between the wire segment and the substrate generates heat to plastically soften the wire segment, thereby allowing the wire segment to be deposited onto the surface of the substrate to complete the addition of the substrate. By adjusting the rotation speed of the mixing head 2, etc., the size of the wire segment can be reduced to granular, thereby accelerating the softening speed of the wire segment and improving the additive efficiency.

[0044] In addition, the multiple stirring heads 2 in the multiple stirring chambers 11 can operate simultaneously or partially, thereby improving the flexibility of use. The multiple stirring chambers 11 and the multiple stirring heads 2 are arranged in a static shaft shoulder 1, which can improve the integration of the wire feeding additive device 100, simplify its structure, and reduce the setting cost. The multiple stirring chambers 11 can be arranged in a variety of ways, that is, the multiple stirring chambers 11 can be arranged in a straight line, and the multiple stirring chambers 11 can also be arranged along the circumference of the static shaft shoulder 1, thereby improving the setting flexibility. Compared with the wire feeding additive device 100 with a single stirring chamber 11 and a single stirring head 2, when the multiple stirring chambers 11 are arranged and the multiple stirring heads 2 are operated at the same time, the width of the wire 101 deposited can be increased, thereby improving the deposition efficiency, thereby improving production efficiency and improving the use effect.

[0045] According to the wire feeding additive device 100 of the embodiment of the present invention, a plurality of stirring chambers 11 are provided in the static shaft shoulder 1, and a plurality of stirring heads 2 corresponding one to one to the plurality of stirring chambers 11 are provided, thereby improving the structural integration of the wire feeding additive device 100. The wire feeding additive device 100 has a simple structure and low setting cost. The wire 101 can be moved simultaneously by the plurality of stirring chambers 11 and the plurality of stirring heads 2 to improve the deposition efficiency of the wire 101, and the deposition width of the wire 101 can be increased, thereby ensuring production efficiency, better use effect, and a wider range of applications.

[0046] In some embodiments, the stirring chamber 11 is configured to extend along a first direction, the additive port 12 is disposed at one end of the stirring chamber 11 in the first direction, and the wire feeding hole 13 is disposed on a peripheral wall of the stirring chamber 11 .

[0047] Specifically, if Figure 3-Figure 4 As shown, a plurality of stirring chambers 11 are provided in the static shoulder 1, and a plurality of stirring heads 2 are provided in the plurality of stirring chambers 11 in a one-to-one correspondence to improve the deposition efficiency of the wire 101 and improve the use effect, and the stirring chamber 11 can be set to extend along a first direction, and the first direction is set perpendicular to the substrate, so that the wire segment can contact the substrate after being pushed out of the additive port 12 by the stirring head 2, thereby ensuring the deposition reliability. In this embodiment, the first direction is set to the vertical direction, that is, the stirring chamber 11 extends along the vertical direction, and in actual setting, the first direction can also be set to extend along a direction having an angle with the vertical direction, which can improve the setting flexibility.

[0048] Furthermore, the additive port 12 is arranged at one end of the stirring chamber 11 in the first direction. When the first direction is the vertical direction, the additive port 12 can be arranged at the upper end of the stirring chamber 11 or at the lower end of the stirring chamber 11. In this embodiment, the additive port 12 is arranged at the lower end of the stirring chamber 11. After the stirring head 2 cuts the wire 101, the wire segment can move toward the additive port 12 under the push of the stirring head 2. The additive port 12 is set at the lower end of the stirring chamber 11, that is, the stirring head 2 can push the wire segment to move downward, and the wire segment can be subjected to driving force and gravity in the vertical direction, thereby increasing the moving speed of the wire segment and reducing the energy consumption and use cost of the stirring head 2.

[0049] The wire feeding hole 13 is arranged on the peripheral wall of the stirring chamber 11, and the wire feeding hole 13 can be extended radially along the static shaft shoulder 1. The inlet of the wire feeding hole 13 is located on the outer peripheral wall of the static shaft shoulder 1, and the outlet of the wire feeding hole 13 is located on the inner peripheral wall of the stirring chamber 11, so that the user can feed the wire from the outside of the static shaft shoulder 1 to the stirring chamber 11, which is convenient for operation. At the same time, the outlet of the wire feeding hole 13 is located below the inlet in the horizontal direction, that is, the wire feeding hole 13 is tilted downward from the outside to the inside, so that the wire 101 can slide toward the stirring chamber 11 under the action of gravity in the wire feeding hole 13, thereby ensuring the reliability of wire feeding, reducing the energy consumption of wire feeding, and ensuring the use effect.

[0050] At the same time, each stirring chamber 11 can be provided with multiple wire feeding holes 13, and the multiple wire feeding holes 13 can be distributed at intervals along the axial direction of the static shaft shoulder 1, so that the user can feed wire into the stirring chamber 11 through multiple wire feeding holes 13 at the same time, thereby improving the wire feeding efficiency and thus improving production efficiency.

[0051] In some embodiments, a plurality of stirring chambers 11 are distributed around the central area of ​​the static shoulder 1 .

[0052] Specifically, the stirring chamber 11 is provided in a plurality, and the plurality of stirring chambers 11 can be provided with a stirring head 2 respectively, so that the stirring heads 2 in the plurality of stirring chambers 11 can cut and push the wire 101 at the same time, or can selectively cut and push the wire 101 in the plurality of stirring chambers 11 at different times, thereby improving the flexibility of use, and Figure 5-Figure 8 As shown, multiple stirring chambers 11 can be distributed around the central area of ​​the static shoulder 1, that is, the additive openings 12 of the multiple stirring chambers 11 can be concentrated in the central area of ​​the static shoulder 1, and the wire segment can be moved from the additive opening 12 to the surface of the substrate by the pushing of the stirring head 2, so that the wire segment can be in contact with the substrate, and as the stirring head 2 rotates, friction between the wire segment and the substrate generates heat, so that the wire segment plastically softens and is deposited on the surface of the substrate. Concentrating the additive openings 12 in the central area of ​​the static shoulder 1 can make the deposition positions of the wire segments adjacent, thereby ensuring the continuity of the wire segment deposition and improving the deposition effect.

[0053] In actual settings, multiple stirring chambers 11 can be arranged around the circumference of the static shaft shoulder 1, or multiple stirring chambers 11 can be arranged in a straight line along a direction with an angle to the moving position of the static shaft shoulder 1, or they can be staggered in multiple rows and columns, etc. The setting is highly flexible and can be arranged according to actual usage requirements.

[0054] In some embodiments, a connecting cavity 14 is formed in the central area of ​​the static shoulder 1 , the multiple stirring cavities 11 are connected at the connecting cavity 14 , and two adjacent stirring heads 2 are linked and matched at the connecting cavity 14 .

[0055] Specifically, a plurality of stirring chambers 11 are formed in the static shoulder 1, and the plurality of stirring chambers 11 can be respectively provided with a wire feeding hole 13. The user can feed the wire 101 into the stirring chamber 11 through the wire feeding hole 13, and the wire 101 in each stirring chamber 11 can be set to the same material or different materials. The wire feeding speed of each stirring chamber 11 can be set to the same or different. The plurality of stirring chambers 11 are distributed around the central area of ​​the static shoulder 1, and as shown in FIG. Figures 8-10 As shown, a connecting cavity 14 is formed in the central area of ​​the static shoulder 1, that is, multiple stirring chambers 11 can be connected at the connecting cavity 14, and two adjacent stirring heads 2 are linked and cooperated at the connecting cavity 14, so that the wire 101 can be mixed at the connecting cavity 14 through the stirring head 2 after entering the stirring cavity 11.

[0056] When the materials delivered by multiple wire feeding holes 13 are the same, multiple stirring chambers 11 can deposit the same material on the substrate at the same time to improve the deposition efficiency and deposition area, and improve production efficiency. When the materials delivered by multiple wire feeding holes 13 are different, the wire 101 in each stirring chamber 11 can be cut into wire segments by the stirring head 2 and then transported to the connecting chamber 14 by the stirring head 2 for mixing, and then a composite material of different materials fully mixed can be deposited on the surface of the substrate. The ratio of the mixed materials can be controlled by controlling the wire feeding speed, thereby improving production flexibility and meeting different production needs. In actual settings, multiple stirring chambers 11 are connected at the connecting chamber 14, so that the setting shape of the stirring chamber 11 is not limited to cylindrical, thereby improving the flexibility of the shape setting of the stirring chamber 11 and meeting different usage needs.

[0057] In some embodiments, the plurality of stirring chambers 11 are spaced apart and distributed, and two adjacent stirring heads 2 are coordinated with each other outside the stirring chamber 11 .

[0058] Specifically, a plurality of stirring chambers 11 are formed in the static shoulder 1, and the plurality of stirring chambers 11 can be respectively provided with a wire feeding hole 13. The user can feed the wire 101 into the stirring chamber 11 through the wire feeding hole 13, and the wire 101 in each stirring chamber 11 can be set to the same material or different materials. The wire feeding speed of each stirring chamber 11 can be set to the same or different. The plurality of stirring chambers 11 are distributed around the central area of ​​the static shoulder 1, and as shown in FIG. Figure 5-Figure 7 As shown, a plurality of stirring chambers 11 are spaced apart and distributed, and two adjacent stirring heads 2 are linked and cooperated outside the stirring chamber 11 , that is, when each stirring head 2 rotates, its corresponding stirring chamber 11 can deposit onto the substrate.

[0059] When the materials delivered by multiple wire feeding holes 13 are the same, multiple stirring chambers 11 can deposit the same material onto the substrate at the same time to improve deposition efficiency and deposition area, thereby improving production efficiency. When the materials delivered by multiple wire feeding holes 13 are different, the wire 101 in each stirring chamber 11 can be cut into wire segments by the stirring head 2 and then deposited onto the substrate through the stirring head 2, thereby preparing a composite structure in which different welds are made of different materials, thereby improving production flexibility and meeting different production needs.

[0060] In actual settings, the end face of each stirring head 2 close to one end of the substrate can be set to a different height, and the height of the static shoulder 1 where each stirring chamber 11 is located can also be set to a different height. The end face of the stirring head 2 is set to a different height, so that the distance between the end face of the stirring head 2 and the substrate is different, and thus the deposition thickness corresponding to each stirring chamber 11 is also different, so as to perform additive manufacturing on a non-planar substrate or perform non-planar deposition on the substrate to meet different usage requirements.

[0061] In some embodiments, the wire feeding additive device 100 further includes: a driving member, which is used to drive the stirring head 2 to rotate.

[0062] Specifically, the wire feeding additive device 100 is also provided with a driving member, which can be set as a driving motor, etc., and the driving member can drive the stirring head 2 to rotate, that is, the driving member can be connected to the stirring head 2 by power. When the driving member is running, the stirring head 2 can be driven to rotate relative to the stirring chamber 11 to cut the wire 101 in the stirring chamber 11, and push the wire segment, so that the wire segment and the substrate are stirred and rubbed, thereby causing the wire segment to plastically soften.

[0063] Furthermore, the stirring chamber 11 is set to be multiple, and the multiple stirring heads 2 are arranged in a one-to-one correspondence in the multiple stirring chambers 11. The driving member can drive the stirring head 2 to rotate relative to the stirring chamber 11. The driving member can be set to be multiple, and the multiple driving members are respectively arranged in a one-to-one correspondence with the multiple stirring heads 2, so that one driving member can drive a stirring head 2 alone, and then the rotation speed of each stirring head 2 can be controlled separately; or the multiple stirring heads 2 can also be simultaneously connected to a driving member by power, so that the multiple stirring heads 2 can rotate at the same time, thereby improving the linkage, and reducing the setting cost to meet different needs.

[0064] In some embodiments, one of the multiple stirring heads 2 is dynamically connected to a driving member, and a transmission member is fixedly sleeved on the outside of each stirring head 2, and the transmission members of the multiple stirring heads 2 are linked.

[0065] Specifically, the wire feeding additive device 100 is provided with a driving member, which can drive the stirring head 2 to rotate relative to the stirring chamber 11, and the stirring head 2 is provided in plurality, one of the plurality of stirring heads 2 can be connected to the driving member by power, and as Figure 1-Figure 5 as well as Figure 7-10 As shown, a transmission member is fixedly provided on the outside of each stirring head 2, the stirring chamber 11 is extended along the axial direction of the static shaft shoulder 1, both ends of the stirring chamber 11 pass through the static shaft shoulder 1, the additive port 12 is provided at one end of the stirring chamber 11, the end of the stirring head 2 away from the additive port 12 can extend out of the stirring chamber 11, and the transmission member can be provided at the end of the stirring head 2 extending out of the stirring chamber 11.

[0066] Furthermore, the transmission member can be set as a transmission gear 3, and the transmission gear 3 is provided with a driving gear and a driven gear. The driving gear is provided with at least one, and the driven gear is meshed and connected with the driving gear. The stirring head 2 where the driving gear is located can be connected to the driving member, so that when the driving member drives the stirring head 2 where the driving gear is located, the driving gear can rotate accordingly, and the driving gear and the driven gear are meshed, and then the remaining driven gears can be driven to rotate through the driving gear, so as to drive the stirring head 2 where the driven gear is located to rotate, which can reduce the setting of the driving member and reduce the setting cost.

[0067] And the rotation speed between the driving gear and the driven gear can be adjusted by adjusting the gear ratio of the driving gear and the driven gear, so that multiple stirring heads 2 can cut and soften the wire 101 at different rotation speeds, so that the stirring head 2 can adapt to wires 101 of different materials. In actual settings, the driving gear can be set to multiple, and the multiple gears can be respectively engaged with driven gears, and each stirring head 2 where the driving gear is located can be connected to a driving member to improve the setting flexibility. In actual settings, the transmission gear 3 can also be replaced with a structure with a transmission function such as a transmission belt to improve the setting flexibility.

[0068] In some embodiments, each stirring head 2 is connected to a corresponding driving member, and the driving member is suitable for independently driving the corresponding stirring head 2 to rotate.

[0069] Specifically, the wire feeding additive device 100 is provided with a driving member, which can be connected to the stirring head 2 by power to drive the stirring head 2 to rotate relative to the stirring chamber 11, so that the stirring head 2 can cut the wire 101 and push the wire segment to the additive port 12. The stirring head 2 is provided in plurality, and each stirring head 2 can be provided with a corresponding driving member, that is, each stirring head 2 can be rotated individually, and then the number of stirring heads 2 in operation can be controlled by controlling the opening or closing of each driving member, and then the deposition width of the wire 101 can be controlled, and driving members with different parameters can be set to make the rotation speed of each stirring head 2 different, so that when each stirring chamber 11 is an independent chamber, the wire 101 can be set to different materials, and the stirring head 2 can be set to the rotation speed corresponding to the wire 101 of the material to ensure the reliability of the deposition of the wire 101 by each stirring chamber 11.

[0070] In actual settings, one driving member can be set corresponding to multiple stirring heads 2, that is, multiple driving members can be set; or one driving member can be used to drive multiple stirring heads 2 through a transmission structure to reduce the number of driving members set, save setting costs, and improve setting flexibility.

[0071] In some embodiments, a spiral pushing groove 21 is formed on the outer peripheral wall of the stirring head 2 . The groove wall of the spiral pushing groove 21 is suitable for cutting the wire 101 and pushing the wire segment toward the additive port 12 .

[0072] Specifically, the stirring chamber 11 is provided with multiple, and a rotatable stirring head 2 is provided in each stirring chamber 11. The outer peripheral wall of the stirring head 2 is provided with a spiral pushing groove 21. The spiral pushing groove 21 is constructed as a spiral groove body. The spiral pushing groove 21 can be opened toward the inner peripheral wall of the stirring chamber 11, and when the stirring head 2 rotates relative to the stirring chamber 11, the wire feeding hole 13 can convey the wire 101 into the stirring chamber 11. At this time, the groove wall of the spiral pushing groove 21 can cut the wire 101, so that the wire 101 is cut into wire segments or granular wires. As the stirring head 2 rotates, the wire segment can move into the spiral pushing groove 21, and as the stirring head 2 rotates, the spiral pushing groove 21 can generate axial displacement, and then the wire segment can be pushed toward the additive port 12, so that the wire segment can be conveyed between the substrate and the end face of the stirring head 2, and then can be deposited on the surface of the substrate. The structure is simple and can ensure operational reliability.

[0073] The invention also provides a substrate processing device.

[0074] According to an embodiment of the present invention, the substrate processing equipment includes a processing table and any one of the above-mentioned wire feeding additive devices 100, the processing table is used to place the substrate, the wire feeding additive device 100 is movable relative to the processing table along the second direction and is suitable for conveying wire segments toward the substrate, and in the projection along the second direction, at least a portion of the two adjacent stirring heads 2 overlaps and at least another portion is staggered.

[0075] Specifically, the substrate processing equipment is provided with a processing table, which is set to a plane and can be used to place the substrate, that is, the plate to be deposited, etc. The wire feeding additive device 100 is set close to the substrate, and the additive port 12 of the wire feeding additive device 100 is open toward the part of the substrate to be added. The wire feeding additive device 100 can move relative to the processing table along the second direction, that is, the static shoulder 1 and other structures can move along the second direction. There is an angle between the second direction and the first direction, and the second direction and the first direction can be set to be perpendicular, that is, when the first direction is set to the vertical direction, the second direction can be set to the horizontal direction.

[0076] Furthermore, when the wire feeding additive device 100 moves relative to the processing table, the wire feeding additive device 100 can also transport wire segments to the surface of the substrate, so that a deposited weld bead along the second direction can be formed on the surface of the substrate. The stirring chamber 11 is set to multiple, that is, the wire feeding additive device 100 can simultaneously form multiple deposited weld beads along the second direction on the surface of the substrate, thereby increasing the width of the deposited weld bead and improving the additive efficiency.

[0077] And in the projection along the second direction, at least a portion of the two adjacent stirring heads 2 overlaps and at least another portion is staggered, that is, in the projection along the second direction, the two adjacent stirring heads 2 can be set to partially overlap and partially staggered, so that in the multiple stirring chambers 11, the deposited welds formed on the substrate surface by the two adjacent stirring chambers 11 at least partially overlap and at least another portion is staggered, that is, the two adjacent deposited welds can be partially overlapped and partially staggered, thereby eliminating the problem of poor edge bonding force of the deposited weld corresponding to the previous stirring chamber 11. While increasing the width of the deposited weld formed by a single stirring chamber 11, the bonding strength between adjacent deposited welds or deposited welds and the substrate can also be guaranteed, thereby ensuring the deposition effect and reliability.

[0078] According to the substrate processing equipment of an embodiment of the present invention, a plurality of stirring chambers 11 are provided in the static shaft shoulder 1, and a plurality of stirring heads 2 corresponding one to one to the plurality of stirring chambers 11 are provided, thereby improving the structural integration of the wire feeding additive device 100. The wire feeding additive device 100 has a simple structure and a low setting cost. The wire 101 can be moved simultaneously through the plurality of stirring chambers 11 and the plurality of stirring heads 2 to improve the deposition efficiency of the wire 101, and the deposition width of the wire 101 can be increased, thereby ensuring production efficiency, better use effect, and a wider range of applications.

[0079] Throughout this specification, reference to terms such as "one embodiment," "some embodiments," "illustrative embodiments," "examples," "specific examples," or "some examples" means that a specific feature, structure, material, or characteristic described in conjunction with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, illustrative uses of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

[0080] While embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions, and variations may be made to the embodiments without departing from the principles and spirit of the invention, and that the scope of the invention is defined by the claims and their equivalents.

Claims

1. A wire feeding additive device, characterized in that: include: A static shoulder, wherein the static shoulder is formed with a plurality of stirring chambers, each of which is provided with a material addition port and a wire feeding hole; a plurality of stirring heads, each of the plurality of stirring heads being mounted in a one-to-one correspondence within the plurality of stirring chambers, and the stirring heads being rotatable relative to the static shoulder, the stirring heads being adapted to cut the wire material input from the wire feed hole into wire segments during rotation, and to push the wire segments toward the additive port, the plurality of stirring chambers being distributed around a central area of ​​the static shoulder; In which, a connecting cavity is formed in the central area of ​​the static shaft shoulder, multiple stirring chambers are connected at the connecting cavity, and two adjacent stirring heads are linked together at the connecting cavity, or multiple stirring chambers are distributed at intervals, and two adjacent stirring heads are linked together outside the stirring cavity.

2. The wire feeding additive device according to claim 1, characterized in that: The stirring chamber is configured to extend in a vertical direction, the material adding port is provided at one end of the stirring chamber in the vertical direction, and the wire feeding hole is provided on a peripheral wall of the stirring chamber.

3. The wire feeding additive device according to claim 1, characterized in that: Also includes: A driving member is used to drive the stirring head to rotate.

4. The wire feeding additive device according to claim 3, characterized in that: One of the plurality of stirring heads is in power connection with the driving member; A transmission member is fixedly sleeved on the outside of each stirring head, and the transmission members of the multiple stirring heads are linked.

5. The wire feeding additive device according to claim 3, characterized in that: Each of the stirring heads is connected to a corresponding driving member, and the driving member is suitable for independently driving the corresponding stirring head to rotate.

6. The wire feeding additive device according to claim 1, characterized in that: A spiral pushing groove is formed on the outer peripheral wall of the stirring head. The groove wall of the spiral pushing groove is suitable for cutting the wire material, and the groove wall of the spiral pushing groove is suitable for pushing the wire material segment toward the additive port.

7. A substrate processing device, characterized in that: The invention comprises a processing table and a wire feeding additive device according to any one of claims 1 to 6, wherein the processing table is used to place a substrate, and the wire feeding additive device is movable relative to the processing table in a horizontal direction and is suitable for conveying the wire segment toward the substrate; In the projection along the horizontal direction, at least a portion of two adjacent stirring heads overlaps and at least another portion is staggered.

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