Diagonal holder for OLED (Organic Light Emitting Diode) metal mask
By installing diagonal clamps on the four-angle edge part of the tensile welding device and using a lifting module to synchronously drive, the instability problem of large-area substrate masks during clamping and stretching is solved, and high precision is achieved degree flatness alignment and stability.
Patent Information
- Application Number
- CN202410952145.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Priority Date
- 2023-07-31
- Filing Date
- 2024-07-16
- Publication Date
- 2025-02-14
AI Technical Summary
The prior art has instability in the clamping and stretching of large-area substrate masks, which makes it difficult to maintain the flatness of the mask, prone to sagging and warping, and is difficult to compatible with pattern units of various specifications.
Install diagonal clamps on the four-angle edge part of the tensile welding machine, and stretch the four-angle edge corners of the substrate mask along the diagonal direction to ensure a wider clamping area, achieve double stretching, and pass through the steel block The lifting module synchronously drives the mask sheet to load.
High precision flatness alignment of large-area substrate masks is achieved, reducing sagging and warping, ensuring stability with the mask frame, and suitable for pattern units of various specifications.
Smart Images
Figure CN119433431A_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to a diagonal clamp for an OLED metal mask, characterized in that the diagonal clamp is installed at the four corners of a stretching welder having a side clamp for four-sided stretching of a long side portion and a short side portion, so as to stretch the substrate along the diagonal direction. The four corners of the mask can not only precisely adjust (improve precision) the flatness alignment of the large-area substrate mask (eighth generation), but also minimize the sagging of the substrate mask, minimize the warping between the mask frame and stabilize the performance, and flexibly and variably adapt the matching tensile force to pattern units of various specifications.
[0002] The diagonal clamp of the present invention is characterized in that the clamping area is designed to be wider on the plane than the side clamp, thereby ensuring a larger side stretching force on the large-area substrate mask. Taking the corner vertices of the substrate mask sheet as a reference, multiple symmetrical diagonal clamps are independently provided on both sides (optional embodiment), thereby enabling fine-tuned double stretching, which can ensure high-precision (selective fine-tuning) stretching performance compared with before.
[0003] In addition, the present invention is characterized in that an angular direction clamp as a whole (a clamp kit combined along the x, y, and θ directions) is combined in a unit (component) form on a steel block, and the steel block realizes mask sheet loading while synchronously driving the upper and lower modules through lifting, thereby enabling the alignment process of the large-area substrate mask to proceed smoothly.
[0004] At the same time, as an additional embodiment of the present invention, it is characterized in that the width direction spacing of the diagonal clamps can be adjusted, thereby being able to flexibly change the position and set the points of the stretching line while the substrate mask sheet is in the transverse and longitudinal segmented welding (multi-segmented degree) state, thereby being able to greatly improve operability, manufacturability, productivity and economy. Background Art
[0005] Recently, the size of glass substrates related to OLED products (display panels, mobile phones, tablets, etc.) has been increasing. In order to manufacture these products, the importance of metal masks in the process has become increasingly high.
[0006] In the case of a surge in demand for large-area substrate masks (8th generation), in order to produce such masks, 6th generation mask sheets are usually stretched and welded in multiple stages.
[0007] At this time, the multi-stage stretch-welded substrate mask is set on the substrate stretcher to be joined to the mask frame. At this time, the large-area substrate mask sheet needs to be subjected to appropriate stretching force so that it can be welded to the mask frame after correctly matching the pattern position while preventing sagging, and then welded to the mask frame in a flat and stretched state.
[0008] On the one hand, as a conventional clamping device related to a mask sheet, Korean Patent Office Registration No. 10-1134361 proposes a “clamping unit for a mask welding device”.
[0009] This conventional clamping device is arranged along the long side or the short side of the mask and has a movable head for clamping the mask together with a fixed head.
[0010] A damping spring is provided between the load sensor mounted on the clamping member and the driving member, thereby preventing the driving member from suddenly applying a tensile force to the mask at the initial stage of the operation.
[0011] However, if the clamping of the mask by the conventional clamping device is unstable, the stretching of the mask is also unstable, and the flatness of the mask cannot be maintained. Depending on the situation, the mask cannot maintain its flatness and may crack due to the difference in stretching force between the clamping devices.
[0012] In addition, in the conventional clamping device, when an excessive tensile load acts on the damping spring as a tensile member due to an error in the driving member, there is a problem that the load sensor may be damaged due to the limited suppression of the tensile load.
[0013] This will eventually cause errors not only in the welding operation of the mask frame as a mask in the subsequent process, but also in the pattern of the film deposited on the substrate during the vapor deposition operation, thereby causing the problem of defective products.
[0014] In addition, since each clamping device does not contact the mask surface smoothly, a deviation in clamping force occurs between each clamping device, and the mask partially sags when the mask is clamped.
[0015] In other words, this problem not only causes errors in the subsequent process of welding (mask sheet + mask frame), but also causes errors in the pattern of the organic film deposited on the substrate during the vapor deposition operation, resulting in defective products.
[0016] In addition, when the mask thickness changes, the existing clamping device needs to use a clamping device with a movable head and a fixed head corresponding to the mask thickness, which may cause a problem of being difficult to be compatible with the mask thickness.
[0017] On the other hand, the front part of the clamping module for stretching introduced in the above-mentioned prior patent (prior art) contacts the I-shaped right-angled surfaces at the top and bottom respectively, so that when closing or opening by a hinge on one side, the corner part on one side (inner side) of the touched surface is touched first, thereby causing damage to the end of the splitting mask sheet.
[0018] In addition, in the existing clamp, while causing deformation of the desired clamping position (based on the lower end of the open vise, the upper end vise touches while descending, starting from the inner corner portion generated by the angle to the end of the sheet, causing further tension and other distortion), excessive clamping force is only generated on one side of the end of the mask sheet, resulting in a defect of reduced overall bite, that is, low clamping force.
[0019] In addition, the conventional clamp has its hinge point located on the upper side of the vise, so the height of the vise needs to be designed to be too high, which hinders the design reflection space for the optical equipment or the accompanying transfer equipment installed above the clamp.
[0020] In addition, when the existing clamp is clamped by the rear hinge, if excessive force is applied to the front hinge, the hinge axis will exceed 90° and the front end of the front vise will open, causing the clamp to be released.
[0021] Prior art literature
[0022] Patent Literature
[0023] (Patent Document 0001) 1. Korean Registered Patent Gazette No. 10-1322663 (registered on October 22, 2014) Summary of the invention
[0024] The purpose of the present invention is to solve the above-mentioned problems. The technical essence is to install diagonal clamps on the four corners of the stretching welder, so that the four corners of the substrate mask are stretched along the diagonal direction. It can precisely adjust (improve precision) the flatness alignment of the large-area substrate mask (8th generation).
[0025] Therefore, an object of the present invention is to provide a diagonal clamp that can minimize the sagging of a substrate mask, minimize the warping between the mask frame and stabilize the performance, and flexibly and variably adapt the matching tensile force to pattern units of various specifications.
[0026] The object of the present invention is to provide a diagonal clamp whose clamping area is designed to be wider in plane than that of the side clamp, thereby ensuring a larger side tensile force on a large-area substrate mask.
[0027] In addition, an object of the present invention is to provide a diagonal clamp, which takes the corner vertices of the substrate mask sheet as a reference and independently has multiple symmetrical diagonal clamps on both sides (optional embodiment), so as to implement fine-tunable double stretching, which can ensure high-precision (selective fine-tuning) stretching performance compared with before.
[0028] At the same time, as an additional embodiment of the present invention, its purpose is to provide a diagonal clamp that can adjust the width-direction spacing of the diagonal clamp, thereby being able to flexibly change the position and set the points of the stretching line while the substrate mask sheet is in the transverse and longitudinal segmented welding (multi-segmented) state, thereby greatly improving operability, manufacturability, productivity and economy.
[0029] In addition, the purpose of the present invention is to provide a diagonal clamp, which combines the four-corner angular direction clamps of the stretch welder as a whole (a clamp kit combined along the x, y, and θ directions) in the form of a unit (component) on a steel block. The steel block realizes mask sheet loading while synchronously driving the upper and lower modules through lifting, thereby enabling the alignment process of the large-area substrate mask to proceed smoothly.
[0030] To achieve this purpose, the present invention is formed by arranging diagonal clampers 100 at four corners in addition to the side clampers 30 for stretching the long and short sides of the welder, thereby stretching the four corners of the substrate mask in the diagonal direction.
[0031] The clamping area of the diagonal clamp 100 on the plane is the same as that of the side clamp 30, or is expanded by 1.1 to 2 times the width of the side clamp 30.
[0032] At this time, the diagonal clamps 100 are symmetrically arranged on both sides with the corner vertices of the mask sheet as a reference, so as to perform independent double stretching, and the stretching sequence is stretched earlier than the side clamps.
[0033] The diagonal clamper 100 includes: a main base 110, a frame 111 constituting four frames, an internal stretching engine 112, a driving shaft of the stretching engine 112 is combined with a screw 113, so that the transfer bracket 121 of the slider moves forward and backward through a lengthwise stroke, and a rail 114 is formed on the upper side of the frame 111. When the transfer bracket 121 moves forward and backward through the stretching engine 112, the platform 122 of the slider moves forward and backward at the same time through the transfer area 123; the slider 120, the transfer bracket 121 and the transfer area 123 are combined with the lower part of the platform 122 installed on the rail 114, and respectively correspond to the screw 113 and the rail 114, while moving forward and backward in the lengthwise direction to stretch the mask; and a clamping part 130, a clamper base 131 is installed and combined with the upper part of the platform 122 of the slider 120 On the side, the driving shaft 134 of the clamper engine 132 is combined with a pressure plate 136 that passes through the shell block 135 and branches downward. As the driving shaft 134 rotates, it moves axially forward and backward in a ball screw manner. A moving block 137 and a nut block 138 are built into the shell block 135. A coil spring 139 is built between the internal spaces of the moving block 137 and the nut block 138, so as to maintain the pressure elasticity (the force pushing toward the hinge block side) based on the axis 139-1. The lower side of the moving block 137 is combined with a sub-bracket 139-2, and one side end of the sub-bracket 139-2 is combined with a linkage link 139-4 that rotates based on the driving hinge 139-3. The linkage link 139-4 forms a sub-hinge 139-5 at the end of the branch, which is connected to the linkage hinge hole 139-7 of the hinge block 139-6.
[0034] At this time, a load cell assembly 133 capable of measuring the tensile strength while working in conjunction with the tensile motor 112 is attached to the rear end of the clamper base 131 .
[0035] The load sensor assembly 133 is provided with a tension block 133-3 at the front end of a fixing fixture 133-2 on which the load sensor 133-1 is installed. The measuring part of the load sensor 133-1 is screwed and fastened. The rear end of the fixing fixture 133-2 is supported and fixed with a first elastic body 133-4, a fixing nut 133-5 and a first shaft 133-6 at the first guide block 133-7. There is a load end bearing housing 133-3 between the load sensor 133-1 and the fixing nut 133-5. 33-8, and is connected to the hinge pin 122-1 at the rear end of the table 122. The front of the tension block 133-3 passes through the second guide block 133-9, and the branched second axis 133-91 is supported and fixed by the second elastic body 133-92 and the fixed plate 133-93. When the second guide block 133-9 and the rear end connecting plate 131-3 of the clamp base 131 are combined and the mask sheet 10 is stretched, the load sensor 133-1 can measure the tensile strength and digitize it at the same time.
[0036] At this time, the upper side of the front lower arm 131-1 of the clamp base 131 is combined with the corner block 140 through the front hinge 141, so as to implement the engagement and release of the mask sheet 10. When the hinge block 139-6 rotates with the main hinge axis 139-8 as the reference, the outer arm free end 139-9 of the hinge block 139-6 slides along the inclined inclined piece 142 (angular displacement) of the corner block 140 in a sliding manner, and at the same time, the front inclined block 150 side of the corner block 140 is spaced apart or squeezed and engaged from the placement protrusion 131-2 of the lower arm 131-1 through the front hinge 141, and clamping is implemented at the same time.
[0037] In addition, in the tilting block 150, a hinge area 152 is formed on the upper side of the pressing plate 151, so that the bottom surface of the tilting block can always remain in a vertical state while ensuring the leading surface contact state with the end of the mask sheet 10, thereby increasing the pressure clamping force (preventing sheet damage).
[0038] The lower arm 131-1 and the corner block 140 are respectively formed with inner grooves 180 on the opposite sides, and a spring 181 is built in between the inner grooves. At the same time, the tilting block 150 and the placement protrusion 131-2 of the lower arm 131-1 are always in an open state (pre-initial clamping state).
[0039] At this time, the moving block 137 and the nut block 138 are formed as circular short plates, are built into the circular space portion of the housing block 135, and are smoothly guided to slide based on the longitudinal stroke.
[0040] Preferably, the free end 139 - 9 of the outer arm of the hinge block 139 - 6 is formed in a hemispherical shape, so that it is easy to slide when it corresponds to the inclined inclined member 142 of the corner block 140 .
[0041] As described above, the present invention has diagonal clamps installed on the four corners of the stretching welder having side clamps for stretching the long sides and short sides on four sides, so as to stretch the four corners of the substrate mask along the diagonal direction. This not only can accurately adjust (improve precision) the flatness alignment of the large-area substrate mask, but also has the effect of minimizing the sagging of the substrate mask.
[0042] Such an invention has the effects of minimizing the warpage between the mask frame and stabilizing the performance, and flexibly adapting the matching tensile force to pattern units of various specifications.
[0043] The clamping area of the diagonal clamp of the present invention is designed to be wider in plane than that of the side clamp, thereby ensuring a greater side tensile force effect on a large-area substrate mask.
[0044] In addition, the present invention takes the corner vertices of the substrate mask sheet as a reference, and has multiple symmetrical diagonal clamps on both sides (optional embodiment), so that fine-tunable double stretching can be performed. Compared with before, it has the effect of ensuring high-precision (selective fine-tuning) stretching performance.
[0045] In addition, the present invention combines the angular direction clamp as a whole (a clamp kit combined along the x, y, and θ directions) in a unit (component) form on a steel block, and the steel block is synchronously driven by the upper and lower lifting modules to realize the mask sheet loading at the same time, thereby having the effect of smoothly carrying out the alignment process of large-area substrate masks.
[0046] At the same time, as an additional embodiment of the present invention, the width direction spacing of the diagonal clamps can be adjusted, and they are formed so that their positions can be flexibly changed in the transverse and longitudinal segmented welding (multi-segmented) states of the substrate mask sheet, and at the same time, the points of the stretching lines are set, thereby having the effect of greatly improving operability, manufacturability, productivity and economy. BRIEF DESCRIPTION OF THE DRAWINGS
[0047] Figure 1 An example perspective view showing a diagonal clamp for an OLED metal mask;
[0048] Figure 2-5 An exemplary diagram showing various embodiments of a diagonal clamp according to the present invention;
[0049] Figure 6-7 An exemplary diagram showing that a diagonal clamp according to the present invention is disposed on a stretch welder;
[0050] Figure 8-12 A side view and a use example view of a diagonal clamp according to the present invention;
[0051] Figure 13-15 This is an example diagram showing that the diagonal clamp according to the present invention is arranged on a steel block so that the four corners are lifted and lowered simultaneously in a synchronized state.
[0052] Description of Reference Numerals
[0053] 10: Mask sheet 20: Stretch welder
[0054] 30: Side clamp
[0055] 100: Diagonal clamp 110: Main base
[0056] 111: Frame 112: Stretching Engine
[0057] 113: screw 114: rail
[0058] 120: Slider 121: Transfer bracket
[0059] 122: Table 122-1: Hinge pin
[0060] 123: Transfer Area
[0061] 130: Clamping part 131: Clamping device base
[0062] 131-1: Lower arm 131-2: Placement protrusion
[0063] 131-3: Rear connection plate
[0064] 132: Gripper engine 133: Load sensor assembly
[0065] 133-1: Load sensor 133-2: Fixing fixture
[0066] 133-3: tension block 133-4: first elastic body
[0067] 133-5: Fixing nut 133-6: First axis
[0068] 133-7: First guide block 133-8: Load end bearing housing
[0069] 133-9: Second guide block 133-91: Second axis
[0070] 133-92: Second elastic body 133-93: Fixed plate
[0071] 134: driving shaft 135: housing block
[0072] 136: Pressure plate 137: Moving block
[0073] 138: Nut block 139: Coil spring
[0074] 139-1: Axis 139-2: Auxiliary bracket
[0075] 139-3: Driving hinge 139-4: Linkage link
[0076] 139-5: Secondary hinge 139-6: Hinge block
[0077] 139-7: Linkage hinge hole 139-8: Main hinge axis
[0078] 139-9: Free end of outer arm
[0079] 140: Corner block 141: Front hinge
[0080] 142: Inclined surface tilting piece 150: Tilt block
[0081] 151: Pressing plate 152: Hinge area
[0082] 200: Steel block 210: Lifting module DETAILED DESCRIPTION
[0083] Hereinafter, the present invention will be described in more detail with reference to the accompanying drawings.
[0084] First, if Figure 1-15 As shown, the present invention is formed by arranging diagonal clamps 100 at the four corners in addition to the side clamps 30 for stretching the long and short sides of the welder, so as to stretch the four corners of the substrate mask in the diagonal direction.
[0085] The diagonal clamper 100 is formed so that the clamping area on the plane is the same as that of the side clamper 30 or is expanded by 1.1 to 2 times the width of the side clamper 30 .
[0086] At this time, the diagonal clampers 100 are symmetrically arranged on both sides with the corner vertices of the substrate mask sheet as a reference, so that independent double stretching can be performed, and the stretching sequence can be stretched before the side clampers.
[0087] To explain this more specifically, the diagonal clamper 100 of the present invention is formed by coupling a corner block 140 to the upper side of the front lower arm 131 - 1 of the clamper base 131 via a front hinge 141 , so as to implement engagement and release of the mask sheet 10 .
[0088] That is, in the diagonal clamp 100, when the hinge block 139-6 rotates with the main hinge shaft 139-8 as a reference, the outer arm free end 139-9 of the hinge block 139-6 slides along the inclined surface inclined member 142 (angular displacement) of the corner block 140.
[0089] The front inclined block 150 side of the corner block 140 is formed to be spaced or pressed and engaged from the seating protrusion 131 - 2 of the lower arm 131 - 1 through the front hinge 141 , while being clamped.
[0090] At this time, the diagonal clamper 100 mainly includes a main base 110 , a slider 120 and a clamping portion 130 .
[0091] The main base 110 includes a stretching engine 112 inside a frame 111 constituting four sides.
[0092] The drive shaft of the stretching motor 112 is coupled to a screw 113, so that the transfer bracket 121 of the slider moves forward and backward through a lengthwise stroke.
[0093] At this time, a rail 114 is formed on the upper side of the frame 111. When the transfer bracket 121 moves forward and backward through the stretching engine 112, the platform 122 of the slider moves forward and backward at the same time through the transfer area 123.
[0094] Then, in the slider 120, the transfer bracket 121 and the transfer area 123 are combined at the lower part of the platform 122 installed on the rail 114, and respectively correspond to the screw rod 113 and the rail 114, and move forward and backward in the length direction at the same time, and the mask sheet is stretched.
[0095] In the clamping part 130 , a clamper base 131 is installed and combined with an upper side of the platform 122 of the slider 120 .
[0096] The driving shaft 134 of the clamper motor 132 is connected to a pressure plate 136 that passes through the housing block 135 and branches downward, and moves forward and backward axially in a ball screw manner as the driving shaft 134 rotates.
[0097] At this time, the housing block 135 has the movable block 137 and the nut block 138 built therein.
[0098] A coil spring 139 is built between the internal spaces of the moving block 137 and the nut block 138 so that the pressurizing elasticity (force pushing toward the hinge block) can be maintained with the axis 139 - 1 as a reference.
[0099] Thus, a sub-bracket 139 - 2 is coupled to the lower side of the moving block 137 , and a linkage link 139 - 4 that rotates based on the driving hinge 139 - 3 is coupled to one end of the sub-bracket 139 - 2 .
[0100] At this time, the linkage link 139-4 is formed with a secondary hinge 139-5 at the end of the branch, so as to be connected to the linkage hinge hole 139-7 of the hinge block 139-6.
[0101] In addition, in the tilting block 150, a hinge area 152 is formed on the upper side of the pressing plate 151, so that the bottom surface of the tilting block can always be kept in a vertical state, while ensuring the leading surface contact state with the end of the mask sheet 10, thereby improving the pressurized clamping force (preventing sheet damage).
[0102] At this time, the lower arm 131-1 and the corner block 140 are respectively formed with inner grooves 180 on the opposite sides, and a spring 181 is built in between the inner grooves. At the same time, the placement protrusion 131-2 of the tilting block 150 and the lower arm 131-1 is always in an open state (pre-initial clamping state).
[0103] The moving block 137 and the nut block 138 are formed as short circular plates, and are built into the circular space of the housing block 135 , and are smoothly guided to slide based on the longitudinal stroke.
[0104] Preferably, the free end 139 - 9 of the outer arm of the hinge block 139 - 6 is formed in a hemispherical shape, and is easy to slide when corresponding to the inclined surface inclined member 142 of the corner block 140 .
[0105] Furthermore, a load cell assembly 133 is mounted on the rear end of the clamper base 131 so as to work in conjunction with the tension motor 112 and to measure the tension strength.
[0106] At this time, in the load sensor assembly 133, a tension block 133-3 is formed at the front end of the fixing clamp 133-2 on which the load sensor 133-1 is installed, a threaded fastening is formed on one side of the measuring part of the load sensor 133-1, and the first elastomer 133-4, the fixing nut 133-5 and the first shaft 133-6 are supported and fixed to the first guide block 133-7 at the rear end of the fixing clamp 133-2.
[0107] A load-end bearing housing 133-8 is provided between the load sensor 133-1 and the fixing nut 133-5 and is connected to the hinge pin 122-1 at the rear end of the platform 122.
[0108] At this time, the front of the tension block 133 - 3 passes through the second guide block 133 - 9 , and the branched second shaft 133 - 91 is supported and fixed by the second elastic body 133 - 92 and the fixing plate 133 - 93 .
[0109] When the second guide block 133 - 9 is coupled to the rear end connection plate 131 - 3 of the clamper base 131 , the load sensor 133 - 1 can measure the tensile strength and convert it into data when the mask sheet 10 is stretched.
[0110] The following will describe the operational relationship of the present invention based on the above-mentioned structure.
[0111] First, in the initial pre-clamping state, the pressure plate 136 (the state of approaching the clamper engine side) is moved backward by the driving shaft 134 close to the clamper engine 132 side, and the free end of the outer arm of the hinge block moves toward the low angle side of the inclined surface tilting member, and the inclined block side of the angle block 140 with the front hinge 141 as the reference opens from the placement protrusion of the lower arm 131-1.
[0112] At this time, the lower arm 131-1 and the corner block 140 are respectively formed with inner grooves 180 on the opposite sides, and a spring 181 is built in between the inner grooves. At the same time, the placement protrusion 131-2 of the tilting block 150 and the lower arm 131-1 is always in an open state (pre-initial clamping state).
[0113] At this time, when the clamping operation is performed, the clamper motor is driven and the drive shaft is rotated, and the pressure plate moves toward the corner block side (moves to the left in the figure) by the ball screw method.
[0114] Thereafter, a guide plate penetrating the housing block is formed on the upper side of the pressure plate so as to push the moving block and the nut block.
[0115] At this time, an axis 139-1 is formed in a direction perpendicular to the guide plate, and the axis 139-1 places the coil spring 139 on the outer peripheral surface and leads it into the center of its axis. One end of the axis 139-1 is coupled to the guide plate, and the other end is coupled to the nut block 138 located at the outermost side (the leftmost side in the drawing) among the nut blocks 138, while the coil spring 139 always applies an elastic force pushing toward the corner block.
[0116] That is, when the pressure plate uses the axis as a reference to make the coil spring push the moving block 137 and the nut block 138, the auxiliary bracket coupled to the lower end of the moving block simultaneously moves toward the angle block side, and at the same time rotates the linkage link 139-4 based on the driving hinge 139-3.
[0117] Thereafter, while the linkage link 139-4 pushes out the linkage hinge hole 139-7 combined with the secondary hinge 139-5, the hinge block 139-6 moves the free end of the outer arm of the hinge block along the inclined surface of the inclined surface inclined member to a high angle based on the main hinge axis.
[0118] At this time, in order to always keep the placement protrusion and the tilting block apart, the expanded spring is accommodated in the respective inner grooves on the upper and lower sides while expanding and contracting.
[0119] As a result, the free end of the outer arm of the hinge block of the ramp tilting member can ensure a stable clamping force even in a state not exceeding 90° from the vertical reference, and the moving block and the nut block moving in the cylindrical housing block ensure smooth operability.
[0120] In particular, the tilting block forms a hinge area 152 on the upper side of the pressing plate 151, so that the bottom surface of the tilting block can always remain in a vertical state while ensuring the leading surface contact state with the end of the mask sheet 10, thereby increasing the pressure clamping force (preventing damage to the sheet).
[0121] After that, when the clamping is completed, the stretching motor 112 is driven, and at the same time, the transfer bracket 121 coupled to the screw 113 moves backward through the length direction stroke. That is, the mask sheet is pulled and moved backward (the slider moves to the right in the figure).
[0122] That is, a rail 114 is formed on the upper side of the frame 111 , and when the transfer bracket 121 is moved backward by the stretching motor 112 , the platform 122 of the slider is moved backward while being linked by the transfer area 123 .
[0123] In other words, the slider 120 is formed as follows: in a state where the clamping is completed according to the structure of the tilting block, etc., the transfer bracket 121 and the transfer area 123 installed on the rail 114 make the screw 113 and the rail 114 retreat in the length direction (the slider moves to the right in the figure), and at the same time, the mask sheet is stretched.
[0124] At this time, a load cell assembly 133 capable of measuring the tensile strength while working in conjunction with the tensile motor 112 is mounted on the rear end of the clamper base 131 .
[0125] That is, in the load sensor assembly 133, a tension block 133-3 is formed at the front end of the fixing clamp 133-2 on which the load sensor 133-1 is installed, one side of the measuring part of the load sensor 133-1 is threadedly fastened, and at the rear end of the fixing clamp 133-2, the first elastic body 133-4, the fixing nut 133-5 and the first shaft 133-6 are supported and fixed to the first guide block 133-7.
[0126] A load-end bearing housing 133-8 is provided between the load sensor 133-1 and the fixing nut 133-5, thereby being connected to the hinge pin 122-1 at the rear end of the platform 122.
[0127] At this time, the second shaft 133 - 91 that passes through the second guide block 133 - 9 and branches out in front of the tension block 133 - 3 is supported and fixed by the second elastic body 133 - 92 and the fixing plate 133 - 93 .
[0128] When the second guide block 133 - 9 is coupled to the rear end connection plate 131 - 3 of the clamper base 131 and the mask sheet 10 is stretched, the load sensor 133 - 1 can measure the tensile strength and convert it into data.
[0129] In addition, in the present invention, the four-corner angular direction clamps of the stretching welder are combined as a unit (component) on a steel block 200 (as a clamp kit combined along the x, y, and θ directions, including some side clamps), and the steel block 200 is synchronously driven by the upper and lower lifting modules 210 to load / unload the mask sheet (substrate mask) at the same time.
[0130] That is, the steel block 200 and the lifting and lowering module 210 are set on the large-area UVW stage 220 based on the large-area UVW stage 220 .
[0131] A driving motor 211 is formed on one side of the lifting module 210. When the motor shaft rotates, the x and y rotating transfer shafts 212 rotate in conjunction with the motor shaft.
[0132] At this time, the lengthwise end portion of the x, y rotating transfer axis 212 (the four corner portions of the stretching welder) is combined with a sliding plate 215 arranged above the base (a sliding rail 214 is formed at the lower part of the sliding plate or on the upper part of the base), so that the x, y rotating transfer axis 212 can move forward and backward as the axis rotates.
[0133] That is, both ends of the sliding plate 215 in the left and right width directions are provided with z-axis rods 213, and the z-axis rods 213 are connected in an X-shape through hinges and links. When the sliding plate moves forward and backward along the sliding rail, the z-axis rods 213 connected in an X-shape hinge and link move up and down, which makes the steel blocks 200 respectively provided at the four corners of the stretching welder work together and move up and down.
[0134] This is to enable the alignment process of masks for large-area substrates to proceed smoothly.
[0135] The present invention is not limited to the above-mentioned specific preferred embodiments, and anyone having ordinary knowledge in the technical field to which the invention belongs can implement various modifications without departing from the spirit of the present invention as claimed in the claims, and these modifications are also within the scope of the claims.
Claims
1. A diagonal clamp for an OLED metal mask, characterized in that: In addition to the side clamps (30) used to stretch the long and short sides of the welder, diagonal clamps (100) are arranged at the four corners, thereby stretching the four corners of the substrate mask in the diagonal direction.
2. The diagonal clamp for OLED metal mask according to claim 1, characterized in that: The clamping area of the diagonal clamp (100) on the plane is the same as that of the side clamp (30), or is expanded by 1.1 to 2 times the width of the side clamp (30).
3. The diagonal clamp for OLED metal mask according to claim 1, characterized in that: The diagonal clamps (100) are based on the corner vertices of the mask sheet (10), and a plurality of symmetrical clamps are arranged on both sides to perform independent double stretching, and the stretching sequence is earlier than that of the side clamps (30).
4. The diagonal clamp for OLED metal mask according to claim 1, characterized in that: The diagonal clamp (100) comprises: The main base (110) is provided with a stretching engine (112) inside a frame (111) which forms four frames. The driving shaft of the stretching engine (112) is combined with a screw (113) to enable the transfer bracket (121) of the slider to move forward and backward through a lengthwise stroke. A rail (114) is formed on the upper side of the frame (111). When the transfer bracket (121) moves forward and backward through the stretching engine (112), the platform (122) of the slider moves forward and backward simultaneously through the transfer area (123). The slider (120), the transfer bracket (121) and the transfer area (123) are combined at the lower part of the platform (122) installed on the rail (114), and respectively correspond to the screw rod (113) and the rail (114), and move forward and backward in the length direction to stretch the mask sheet; and The clamping part (130) includes a clamping base (131) mounted on one side of the upper part of the platform (122) of the slider (120). The driving shaft (134) of the clamping engine (132) is combined with a pressure plate (136) that penetrates the housing block (135) and branches downward. As the driving shaft (134) rotates, the clamping engine (132) moves forward and backward in an axial direction in a ball screw manner. The housing block (135) includes a moving block (137) and a nut block (138). The moving block (137) and the nut block (138) are ) internal space, so as to maintain the pressurized elasticity with the shaft (139-1) as the reference, the lower side of the moving block (137) is combined with a sub-bracket (139-2), and one end of the sub-bracket (139-2) is combined with a linkage link (139-4) that rotates with the driving hinge (139-3) as the reference, and the linkage link (139-4) is formed with a sub-hinge (139-5) at the end of the branch, which is connected to the linkage hinge hole (139-7) of the hinge block (139-6).
5. The diagonal clamp for OLED metal mask according to claim 4, characterized in that: A load sensor assembly (133) is installed at the rear end of the clamp base (131) and is linked to the tension motor (112) and can measure the tension strength.
6. The diagonal clamp for OLED metal mask according to claim 5, characterized in that: The upper side of the front lower arm (131-1) of the clamp base (131) is connected to a corner block (140) through a front hinge (141), so as to implement the engagement and release of the mask sheet (10). When the hinge block (139-6) rotates with the main hinge shaft (139-8) as a reference, the outer arm free end (139-9) of the hinge block (139-6) slides along the inclined inclined piece (142) of the corner block (140) in a sliding manner, and at the same time, the front inclined block (150) side of the corner block (140) is spaced or squeezed and engaged from the placement protrusion (131-2) of the lower arm (131-1) through the front hinge (141), and clamping is implemented at the same time.
7. The diagonal clamp for an OLED metal mask according to claim 6, characterized in that: In the tilting block (150), a hinge area (152) is formed on the upper side of the pressing plate (151), which can keep the bottom surface of the tilting block in a vertical state while ensuring the leading surface contact state with the end of the mask sheet (10), thereby improving the pressurized clamping force.
8. The diagonal clamp for OLED metal mask according to claim 7, characterized in that: The lower arm (131-1) and the corner block (140) are respectively formed with inner grooves (180) on the sides opposite to each other, and a spring (181) is built in between the inner grooves. At the same time, the tilting block (150) and the placement protrusion (131-2) of the lower arm (131-1) are always in an open state.
9. The diagonal clamp for an OLED metal mask according to claim 8, characterized in that: The moving block (137) and the nut block (138) are formed as circular short plates, are built into the circular space portion of the housing block (135), and are smoothly guided to slide based on the longitudinal stroke.
10. The diagonal clamp for an OLED metal mask according to claim 9, characterized in that: The diagonal clamp for the OLED metal mask is combined with the four-corner angular direction clamp of the stretching welder in a unit form on a steel block (200), and the steel block is synchronously driven at all four sides by lifting the upper and lower modules (210) to achieve mask sheet loading.