High-power electron beam coating equipment

Abstract

The invention belongs to the technical field of electron beam evaporation plating devices, and particularly relates to high-power electron beam coating equipment, the furnace wall of an evaporation furnace body of the device is of a double-layer structure, and reinforcing ribs are arranged between the furnace wall and a water jacket cover plate, so that a shell of the evaporation furnace body can be flat and attractive, and the reinforcing ribs meet the strength requirement of a cavity and also meet the requirement of the water jacket cover plate. And meanwhile, the first cooling cavity can be divided into a plurality of flow channels, and a guiding effect is achieved on cooling water circulation. The water-cooled jacket of the water-cooled crucible system is arranged to be of the hollow cooling cavity structure with the communicated interiors, the multiple crucibles share one water-cooled jacket, and the problems that due to the fact that two crucibles are cooled separately in the prior art, manufacturing and installation are complex, and maintenance is inconvenient are solved. The connection between the crucible and the water-cooled jacket is changed into lower end bolt connection, so that the upper surface of the crucible is flat, and electron beam scanning is safer.

Description

Technical Field

[0001] The invention belongs to the technical field of electron beam evaporation coating devices, and in particular relates to high-power electron beam coating equipment. Background Art

[0002] Electron beam evaporation is to put the evaporation material into a water-cooled copper crucible and directly use electron beam heating to vaporize and evaporate the evaporation material and condense it on the substrate surface to form a film. It is an important heating method and development direction in vacuum evaporation coating technology. With the diversification of coating materials, the requirements for coating surfaces are getting higher and higher. High-power electron beam evaporation coating has more advantages. It overcomes many shortcomings of general resistance heating evaporation and is particularly suitable for making high-melting-point thin film materials and high-purity thin film materials.

[0003] However, the existing electron beam coating device has the following disadvantages: 1. The reinforcing ribs of the evaporator are set to protrude from the water jacket cover, so that the chamber shell is not flat due to the protruding reinforcing ribs, but is divided into several blocks of different sizes, which is not beautiful and wastes materials; moreover, due to the protruding reinforcing ribs, the outer water jacket is divided into several parts of different sizes, which increases the welding workload and has problems such as large welding deformation and high risk of weld leakage; 2. The cooling systems of the two crucibles in the evaporator are relatively independent, which is complicated to install and inconvenient to maintain and maintain; 3. The crucible and the crucible water jacket are connected with upper bolts, and there are bolt protrusions on the upper surface of the crucible, which poses a safety hazard during electron beam scanning. Summary of the invention

[0004] In view of the problems existing in the prior art, the present invention provides, and the present invention specifically includes the following contents:

[0005] A high-power electron beam coating device, comprising a mounting substrate, an evaporation furnace system, a water-cooled crucible system, an electron gun system, a feeding system, a vacuum pumping system, a control system, a power supply system, and an electric control system;

[0006] The evaporation furnace system comprises an evaporation furnace body and a movable furnace door system.

[0007] The evaporation furnace body is a furnace body with an opening on one side and arranged on the mounting base, and an electron gun system interface, a workpiece feeding interface, and a vacuum interface are arranged on the evaporation furnace body; the furnace wall of the evaporation furnace body is a double-layer structure, including a first inner wall, a first outer wall, and a plurality of first reinforcing ribs arranged between the first inner wall and the first outer wall, a first cooling cavity is formed between the first inner wall and the first outer wall, and the plurality of first reinforcing ribs separate the first cooling cavity into a plurality of cooling channels interconnected with each other, and at least one first cooling water inlet and at least one first cooling water outlet are arranged on the first outer wall;

[0008] The movable furnace door system comprises a furnace door body, a slide rail, and a drive motor wheel group, wherein the slide rail is arranged on the mounting base and located at the opening side of the evaporation furnace body, one end of the slide rail is located below the opening side of the evaporation furnace body, and the other end extends in a direction away from the evaporation furnace body; the furnace door body is arranged to cover the opening side of the evaporation furnace body, and is vertically arranged on the slide rail and is slidably connected with the slide rail through the drive motor wheel group; a crucible rack is arranged on one side of the furnace door body facing the opening side of the evaporation furnace body;

[0009] The water-cooled crucible system is arranged on the crucible stand;

[0010] The electron gun system is connected to the electron gun system interface of the evaporation furnace body, and the electron gun system is connected to the electric control system;

[0011] The feeding system is connected to the workpiece feeding interface of the evaporation furnace body;

[0012] The vacuum pumping system is connected to the vacuum interface of the evaporation furnace body;

[0013] The control system is respectively connected with the power supply system, the drive motor wheel set, the electron gun system, the feeding system, and the vacuum system;

[0014] The power supply system is respectively connected with the control system, the driving motor wheel set, the feeding system and the vacuum system.

[0015] Furthermore, the furnace door body includes a second inner wall, a second outer wall and a plurality of second reinforcing ribs arranged between the second inner wall and the second outer wall, a second cooling cavity is formed between the second inner wall and the second outer wall, the plurality of second reinforcing ribs divide the second cooling cavity into a plurality of interconnected cooling channels, and at least one second cooling water inlet and at least one second cooling water outlet are arranged on the second outer wall.

[0016] Furthermore, the water-cooled crucible system includes a water-cooling jacket and at least one crucible, the interior of the water-cooling jacket is a connected hollow cooling cavity structure, the water-cooling jacket is provided with a third cooling water inlet and a third cooling water outlet; the water-cooling jacket is provided with at least one crucible receiving hole that passes through from top to bottom, the bottom of the crucible is provided in the crucible receiving hole; the center of the crucible is provided with a first feeding port that passes through. When feeding, the strip-shaped material passes through from the bottom of the crucible receiving hole, and then enters the crucible upward from the first feeding port.

[0017] Furthermore, the water-cooled crucible system also includes a plurality of connecting bolts; a mounting ring is fixedly provided on the outer periphery of the opening on the crucible accommodating hole, and a first mounting hole is provided on the mounting ring; the edge of the crucible is arranged above the mounting ring, and a second mounting hole is provided on the lower surface of the crucible edge at a position corresponding to the first mounting hole, and the second mounting hole is a non-through hole; one end of the connecting bolt passes through the first mounting hole from bottom to top and is arranged in the second mounting hole.

[0018] Furthermore, a second feed port is provided at a position at the bottom of the evaporation furnace body corresponding to the first feed port in the center of the crucible; the evaporation furnace system also includes a crucible feeding system, the crucible feeding system includes a power device, a transmission system, a lifting device, and evaporation material, and the lifting device is connected to the power device through the transmission system; the evaporation material is arranged at the upper end of the lifting device, and the upper end of the evaporation material passes through the second feed port and the first feed port in sequence and is arranged in the crucible.

[0019] Furthermore, the power device is a servo motor, which is connected to the power supply system and the control system; the transmission system includes a commutator, and the lifting device includes a spiral lifting rod and a limit device, one end of the commutator is connected to the servo motor and the other end is connected to the spiral lifting rod, and the limit device is arranged at the bottom end of the spiral lifting rod.

[0020] Furthermore, the feeding system includes a feeding bin and a feeding device arranged in the feeding bin, wherein the feeding bin is connected to the workpiece feeding interface of the evaporation furnace body through a high vacuum gate valve; the feeding device includes a frame, a feeding servo motor, a feeding screw nut, a feeding rack, a clamping reduction motor, a clamping transmission commutator, a clamping screw nut group, and two rotating chucks,

[0021] The frame is arranged in the feed bin, the frame comprises a first end and a second end, the second end of the frame is arranged toward the workpiece feeding interface; both ends of the frame are provided with rotation holes;

[0022] The two ends of the screw of the feed screw nut are respectively arranged in the rotation holes at the two ends of the frame and are rotatably connected to the frame;

[0023] The feed rack is arranged on the nut of the feed screw nut;

[0024] The clamping reduction motor is arranged on the feed rack, and the output end of the clamping reduction motor is parallel to the lead screw of the feed lead screw nut;

[0025] The clamping screw nut assembly includes a clamping screw and two clamping nuts respectively sleeved on both ends of the clamping screw, the clamping screw is arranged perpendicular to the output end of the clamping reduction motor, and the center of the clamping screw is connected to the output end of the clamping reduction motor through the clamping transmission commutator;

[0026] The two rotating chucks are arranged opposite to each other toward the second end of the frame and are respectively connected to two clamping nuts, and a plurality of clamping teeth are arranged on opposite sides of the two rotating chucks;

[0027] The clamping reduction motor and the clamping transmission commutator are connected to the control system and the power supply system respectively.

[0028] Furthermore, the electronic control system includes a current detection device, a voltage detection device, at least one voltage regulator, a pulse generator, an IGBT module, and a high-voltage transformer connected in series with each other. The voltage regulator, pulse generator, IGBT module, and high-voltage transformer are connected in series with each other to form an output circuit. The input end of the voltage regulator is connected to the power supply system, and the output end of the high-voltage transformer is connected to the electron gun system; the current detection device and the voltage detection device are respectively connected in parallel with the output circuit, and the current detection device and the voltage detection device are respectively connected to the control system for detecting the output current and output voltage of the electronic control system.

[0029] Beneficial effects of the present invention:

[0030] (1) The present invention aims to improve the problem of unreasonable design of the reinforcing ribs of the evaporation furnace body of the high-power electron beam coating equipment in the prior art. The furnace wall of the evaporation furnace body of the device of the present invention is a double-layer structure, including a first inner wall, a first outer wall and a plurality of first reinforcing rib plates arranged between the first inner wall and the first outer wall. A first cooling cavity is formed between the first inner wall and the first outer wall. The plurality of first reinforcing rib plates divide the first cooling cavity into a plurality of cooling channels that are interconnected. The first outer wall is provided with at least one first cooling water inlet and at least one first cooling water outlet. The present invention arranges the reinforcing ribs between the furnace wall (i.e., the first inner wall) and the water jacket cover plate (i.e., the first outer wall). During installation, the reinforcing ribs are first welded firmly to the furnace wall, and the outer water jacket cover plate is plugged with welding holes at corresponding positions, and then connected to the reinforcing ribs by plugging the welding holes. The structure of the present invention can make the outer shell of the evaporation furnace body smooth and beautiful. The arrangement of the reinforcing ribs not only meets the strength requirements of the chamber, but also divides the first cooling cavity into a plurality of channels, which plays a guiding role in the circulation of cooling water. Similarly, the present invention also designs the movable furnace door body into a sandwich structure similar to the furnace body, so that the furnace door has a smooth and beautiful appearance, and the reinforcing ribs not only meet the strength requirements of the furnace door, but also take into account the cooling water circulation guiding function of the furnace door.

[0031] (2) The present invention aims to solve the problem that the cooling systems of the two crucibles in the evaporation furnace in the prior art are relatively independent, complicated to install, and inconvenient to maintain and service. The water-cooling jacket of the water-cooled crucible system is set as an internally connected hollow cooling cavity structure, and at least one crucible accommodating hole is set on the water-cooling jacket, and the crucible is set in the crucible accommodating hole. Multiple crucibles share one water-cooling jacket, and the cooling water becomes one in and one out, thereby solving the problems of complex manufacturing and installation, inconvenient maintenance and service caused by the original cooling of the two crucibles separately. In addition, the present invention changes the connection between the crucible and the water-cooling jacket from the original upper end bolt connection to the lower end bolt connection, so that the upper surface of the crucible is flat and has no openings, and the electron beam scanning of materials is safer. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] Figure 1 It is a schematic diagram of the overall structure of the device of the present invention;

[0033] Figure 2 It is a structural schematic diagram of the evaporation furnace body in the device of the present invention;

[0034] Figure 3 It is a schematic cross-sectional structure diagram of the evaporation furnace body in the device of the present invention;

[0035] Figure 4 It is a structural schematic diagram of the evaporation furnace body and the movable furnace door system in the device of the present invention;

[0036] Figure 5 It is a schematic structural diagram of a water-cooled crucible system in the device of the present invention;

[0037] Figure 6 A schematic diagram of the position and structure of the crucible feeding system in the device of the present invention;

[0038] Figure 7 It is a structural schematic diagram of the electric control system in the device of the present invention;

[0039] Figure 8 It is a schematic structural diagram of the feeding device in the device described in the present invention. DETAILED DESCRIPTION

[0040] The present invention is described in detail below in conjunction with the accompanying drawings and specific embodiments. The embodiments shown below do not limit the invention content described in the claims. In addition, the entire contents of the structures represented by the following embodiments are not limited to those necessary as solutions to the invention described in the claims.

[0041] Reference Figure 1-6A high-power electron beam coating device includes a mounting base, an evaporation furnace system, a water-cooled crucible system 3, an electron gun system 5, a feeding system 4, a vacuum system 8, a control system, a power supply system 7, and an electric control system 6; the evaporation furnace system includes an evaporation furnace body 1 and a movable furnace door system 2, the evaporation furnace body 1 is a furnace body with an opening on one side and arranged on the mounting base, and the evaporation furnace body 1 is provided with an electron gun system interface 9, a workpiece feeding interface 10, and a vacuum interface 11; the furnace wall of the evaporation furnace body 1 is a double-layer structure, including a first inner wall, a first outer wall 12, and a plurality of first reinforcing ribs 13 arranged between the first inner wall and the first outer wall 12, a first cooling cavity is formed between the first inner wall and the first outer wall 12, and the plurality of first reinforcing ribs 13 separate the first cooling cavity into a plurality of interconnected cooling channels, and the first outer wall 12 is provided with at least one first cooling water inlet and at least one first cooling water outlet. The evaporation furnace body 1 is also provided with an explosion-proof valve interface 14 as needed. The movable furnace door system 2 includes a furnace door body 17, a slide rail 18, and a drive motor wheel group 19. The slide rail 18 is arranged on the mounting base and located at the opening side of the evaporation furnace body 1. One end of the slide rail 18 is located below the opening side of the evaporation furnace body 1, and the other end extends in a direction away from the evaporation furnace body 1; the furnace door body 17 is arranged to cover the opening side of the evaporation furnace body 1, and is vertically arranged on the slide rail 18 and is slidably connected to the slide rail 18 through the drive motor wheel group 19; a crucible rack 20 is arranged on the side of the furnace door body 17 facing the opening side of the evaporation furnace body 1; the drive motor wheel group 19 is connected to the furnace door body 17 is connected; the water-cooled crucible system 3 is arranged on the crucible stand 20; the electron gun system 5 is connected to the electron gun system interface 9 of the evaporation furnace body 1, and the electron gun system 5 is connected to the electronic control system 6; the feeding system 4 is connected to the workpiece feeding interface 10 of the evaporation furnace body 1; the vacuum system 8 is connected to the vacuum interface 11 of the evaporation furnace body 1; the control system is respectively connected to the power supply system 7, the drive motor wheel group 19, the electron gun system 5, the feeding system 4, and the vacuum system 8; the power supply system 7 is respectively connected to the control system, the drive motor wheel group 19, the feeding system 4, and the vacuum system 8.

[0042] In one embodiment of the present invention, the furnace door body 17 includes a second inner wall, a second outer wall and a plurality of second reinforcing ribs arranged between the second inner wall and the second outer wall, a second cooling cavity is formed between the second inner wall and the second outer wall, the plurality of second reinforcing ribs divide the second cooling cavity into a plurality of interconnected cooling channels, and at least one second cooling water inlet and at least one second cooling water outlet are arranged on the second outer wall.

[0043] Reference Figure 6In one embodiment of the present invention, the water-cooled crucible system 3 includes a water-cooling jacket 21 and at least one crucible 22. The interior of the water-cooling jacket 21 is a connected hollow cooling cavity structure. The water-cooling jacket 21 is provided with a third cooling water inlet 23 and a third cooling water outlet 24; the water-cooling jacket 21 is provided with at least one crucible accommodating hole, and the crucible 22 is arranged in the crucible accommodating hole; the center of the crucible 22 is provided with a first feed port that penetrates through.

[0044] In one embodiment of the present invention, the water-cooled crucible system 3 further includes a plurality of connecting bolts 25; a mounting ring is fixedly provided on the outer periphery of the opening on the crucible accommodating hole, and a first mounting hole is provided on the mounting ring; the edge of the crucible is provided above the mounting ring, and a second mounting hole is provided on the lower surface of the crucible edge at a position corresponding to the first mounting hole, and the second mounting hole is a non-through hole; one end of the connecting bolt 25 passes through the first mounting hole from bottom to top and is provided in the second mounting hole.

[0045] In one embodiment of the present invention, a second feed port 15 is provided at a position at the bottom of the evaporation furnace body 1 corresponding to the first feed port in the center of the crucible; the evaporation furnace system also includes a crucible feeding system, the crucible feeding system includes a power device 26, a transmission system 27, a lifting device 28, and evaporation material, the lifting device 28 is connected to the power device 26 through the transmission system 27; the evaporation material is arranged at the upper end of the lifting device 28, and the upper end of the evaporation material passes through the second feed port 15 and the first feed port in sequence and is arranged in the crucible 22.

[0046] In one embodiment of the present invention, the power device 26 is a servo motor, which is connected to the power supply system 7 and the control system; the transmission system 27 includes a commutator, and the lifting device includes a spiral lifting rod and a limit device, one end of the commutator is connected to the servo motor, and the other end is connected to the spiral lifting rod, and the limit device is arranged at the bottom end of the spiral lifting rod. The function of the commutator is to convert the rotation of the servo motor into the vertical lifting movement of the spiral lifting rod.

[0047] In one embodiment of the present invention, the feeding system 4 includes a feeding bin and a feeding device arranged in the feeding bin, and the feeding bin is connected to the workpiece feeding interface 10 of the evaporation furnace body 1 through a high vacuum gate valve; Figure 8 The feeding device includes a frame 29, a feeding servo motor 31, a feeding screw nut, a feeding frame, a clamping reduction motor 32, a clamping transmission commutator 35, a clamping screw nut group, and two rotating chucks 36.

[0048] The frame 29 is disposed in the feed bin 4, and the frame 29 includes a first end and a second end, and the second end of the frame 29 is disposed toward the workpiece feeding interface; both ends of the frame 29 are provided with rotation holes;

[0049] The two ends of the screw 30 of the feed screw nut are respectively arranged in the rotation holes at the two ends of the frame 29 and are rotatably connected to the frame 29;

[0050] The feed rack is arranged on the nut of the feed screw nut;

[0051] The clamping reduction motor 32 is arranged on the feed rack, and the output end of the clamping reduction motor 32 is parallel to the lead screw 30 of the feed lead screw nut;

[0052] The clamping screw nut assembly includes a clamping screw 33 and two clamping nuts 34 respectively sleeved on both ends of the clamping screw. The clamping screw 33 is arranged perpendicular to the output end of the clamping reduction motor 32. The center of the clamping screw 33 is connected to the output end of the clamping reduction motor 32 through the clamping transmission commutator 35.

[0053] The two rotating chucks 36 are disposed opposite to each other toward the second end of the frame 29 and are respectively connected to the two clamping nuts 34 , and a plurality of clamping teeth 37 are disposed on opposite sides of the two rotating chucks 36 ;

[0054] The clamping reduction motor 32 and the clamping transmission commutator 35 are connected to the control system and the power supply system respectively.

[0055] Reference Figure 7 In one embodiment of the present invention, the electronic control system 6 includes a current detection device, a voltage detection device, at least one voltage regulator, a pulse generator, an IGBT module, and a high-voltage transformer connected in series with each other. The voltage regulator, the pulse generator, the IGBT module, and the high-voltage transformer are connected in series with each other to form an output circuit. The input end of the voltage regulator is connected to the power supply system 7, and the output end of the high-voltage transformer is connected to the electron gun system 5; the current detection device and the voltage detection device are respectively connected in parallel with the output circuit, and the current detection device and the voltage detection device are respectively connected to the control system to detect the output current and output voltage of the electronic control system 6.

[0056] The present invention improves the problem of unreasonable design of reinforcing ribs of the evaporation furnace body 1 of the high-power electron beam coating equipment in the prior art. The furnace wall of the evaporation furnace body 1 of the device described in the present invention is a double-layer structure, including a first inner wall, a first outer wall 12 and a plurality of first reinforcing rib plates 13 arranged between the first inner wall and the first outer wall 12. A first cooling cavity is formed between the first inner wall and the first outer wall 12. The plurality of first reinforcing rib plates 13 divide the first cooling cavity into a plurality of cooling channels interconnected with each other. The first outer wall 12 is provided with at least one first cooling water inlet and at least one first cooling water outlet. The present invention sets the reinforcing ribs between the furnace wall (i.e., the first inner wall) and the water jacket cover plate (i.e., the first outer wall 12). During installation, the reinforcing ribs are first welded firmly to the furnace wall, and the outer water jacket cover plate is plugged with welding holes at the corresponding positions, and then connected to the reinforcing ribs by welding the plugged welding holes. The structure described in the present invention can make the outer shell of the evaporation furnace body 1 smooth and beautiful. The setting of the reinforcing ribs not only meets the strength requirements of the chamber, but also can separate the first cooling chamber into multiple flow channels, which plays a guiding role in the cooling water circulation. Similarly, the present invention also designs the movable furnace door body 17 into a sandwich structure similar to the furnace body, so that the furnace door has a smooth and beautiful appearance. The reinforcing ribs not only meet the strength requirements of the furnace door, but also take into account the guiding role of the furnace door cooling water circulation. The present invention aims at the problem that the cooling systems of the two crucibles in the evaporation furnace in the prior art are relatively independent, complicated to install, and inconvenient to maintain and service. The water-cooling jacket 21 of the water-cooled crucible system 3 is set as an internally connected hollow cooling cavity structure, and at least one crucible accommodating hole is set on the water-cooling jacket 21, and the crucible is set in the crucible accommodating hole. Multiple crucibles share one water-cooling jacket 21, and the cooling water becomes one in and one out, thereby solving the problems of complex manufacturing and installation, inconvenient maintenance, etc. caused by the original cooling of the two crucibles separately. Moreover, the present invention changes the connection between the crucible and the water-cooling jacket 21 from the original upper end bolt connection to the lower end bolt connection, so that the upper surface of the crucible is flat and has no openings, and the electron beam scanning of materials is safer.

[0057] In the description of the present application, it should be noted that the terms "upper", "lower", "vertical", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present application. In addition, the terms "first", "second", etc., are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0058] Unless otherwise clearly specified and limited, the terms "disposed" and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, or it can be the internal communication of two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0059] The above description of the disclosed embodiments enables one skilled in the art to implement or use the present invention. Various modifications to these embodiments will be apparent to one skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to the embodiments shown herein, but rather to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A high-power electron beam coating device, characterized in that: It includes the installation base, evaporation furnace system, water-cooled crucible system, electron gun system, feeding system, vacuum system, control system, power supply system, and electronic control system; The evaporation furnace system comprises an evaporation furnace body and a movable furnace door system. The evaporation furnace body is a furnace body with one side opening and arranged on the mounting base, and an electron gun system interface, a workpiece feeding interface, and a vacuum interface are arranged on the evaporation furnace body; the furnace wall of the evaporation furnace body is a double-layer structure, including a first inner wall, a first outer wall, and a plurality of first reinforcing ribs arranged between the first inner wall and the first outer wall, a first cooling cavity is formed between the first inner wall and the first outer wall, and the plurality of first reinforcing ribs separate the first cooling cavity into a plurality of cooling channels interconnected with each other, and at least one first cooling water inlet and at least one first cooling water outlet are arranged on the first outer wall; The movable furnace door system comprises a furnace door body, a slide rail, and a drive motor wheel group, wherein the slide rail is arranged on the mounting base and located at the opening side of the evaporation furnace body, one end of the slide rail is located below the opening side of the evaporation furnace body, and the other end extends in a direction away from the evaporation furnace body; the furnace door body is arranged to cover the opening side of the evaporation furnace body, and is vertically arranged on the slide rail and is slidably connected to the slide rail through the drive motor wheel group; a crucible rack is arranged on one side of the furnace door body facing the opening side of the evaporation furnace body; The water-cooled crucible system is arranged on the crucible stand; The electron gun system is connected to the electron gun system interface of the evaporation furnace body, and the electron gun system is also connected to the electric control system; The feeding system is connected to the workpiece feeding interface of the evaporation furnace body; The vacuum pumping system is connected to the vacuum interface of the evaporation furnace body; The control system is respectively connected with the power supply system, the drive motor wheel set, the electron gun system, the feeding system, and the vacuum system; The power supply system is also connected to the driving motor wheel set, the feeding system and the vacuum system respectively.

2. A high-power electron beam coating device according to claim 1, characterized in that: The furnace door body includes a second inner wall, a second outer wall and a plurality of second reinforcing ribs arranged between the second inner wall and the second outer wall, a second cooling cavity is formed between the second inner wall and the second outer wall, the plurality of second reinforcing ribs divide the second cooling cavity into a plurality of cooling channels interconnected with each other, and at least one second cooling water inlet and at least one second cooling water outlet are arranged on the second outer wall.

3. A high-power electron beam coating device according to claim 1, characterized in that: The water-cooled crucible system comprises a water-cooling jacket and at least one crucible. The interior of the water-cooling jacket is a connected hollow cooling cavity structure. The water-cooling jacket is provided with a third cooling water inlet and a third cooling water outlet. The water-cooling jacket is provided with at least one crucible accommodating hole extending vertically therethrough, and the crucible is arranged in the crucible accommodating hole. A first feed port is provided through the center of the crucible.

4. A high-power electron beam coating device according to claim 3, characterized in that: The water-cooled crucible system also includes a plurality of connecting bolts; a mounting ring is fixedly provided on the outer periphery of the opening on the crucible accommodating hole, and a first mounting hole is provided on the mounting ring; the edge of the crucible is arranged above the mounting ring, and a second mounting hole is provided on the lower surface of the crucible edge at a position corresponding to the first mounting hole, and the second mounting hole is a non-through hole; one end of the connecting bolt passes through the first mounting hole from bottom to top and is arranged in the second mounting hole.

5. The high-power electron beam coating device according to claim 1, characterized in that: A second feed port is arranged at a position at the bottom of the evaporation furnace body corresponding to the first feed port in the center of the crucible; the evaporation furnace system also includes a crucible feeding system, the crucible feeding system includes a power device, a transmission system, a lifting device, and evaporation material, and the lifting device is connected to the power device through the transmission system; the evaporation material is arranged at the upper end of the lifting device, and the upper end of the evaporation material passes through the second feed port and the first feed port in sequence and is arranged in the crucible.

6. A high-power electron beam coating device according to claim 5, characterized in that: The power device is a servo motor, which is connected to the power supply system and the control system; the transmission system includes a commutator, and the lifting device includes a spiral lifting rod and a limit device, one end of the commutator is connected to the servo motor and the other end is connected to the spiral lifting rod, and the limit device is arranged at the bottom end of the spiral lifting rod.

7. The high-power electron beam coating device according to claim 1, characterized in that: The feeding system includes a feeding bin and a feeding device arranged in the feeding bin, wherein the feeding bin is connected to the workpiece feeding interface of the evaporation furnace body through a high vacuum gate valve; the feeding device includes a frame, a feeding servo motor, a feeding screw nut, a feeding rack, a clamping reduction motor, a clamping transmission commutator, a clamping screw nut group, and two rotating chucks. The frame is arranged in the feed bin, the frame comprises a first end and a second end, the second end of the frame is arranged toward the workpiece feeding interface; both ends of the frame are provided with rotation holes; The two ends of the screw of the feed screw nut are respectively arranged in the rotation holes at the two ends of the frame and are rotatably connected to the frame; The feed rack is arranged on the nut of the feed screw nut; The clamping reduction motor is arranged on the feed rack, and the output end of the clamping reduction motor is parallel to the lead screw of the feed lead screw nut; The clamping screw nut assembly includes a clamping screw and two clamping nuts respectively sleeved on both ends of the clamping screw, the clamping screw is arranged perpendicular to the output end of the clamping reduction motor, and the center of the clamping screw is connected to the output end of the clamping reduction motor through the clamping transmission commutator; The two rotating chucks are arranged opposite to each other toward the second end of the frame and are respectively connected to two clamping nuts, and a plurality of clamping teeth are arranged on opposite sides of the two rotating chucks; The clamping reduction motor and the clamping transmission commutator are connected to the control system and the power supply system respectively.

8. A high-power electron beam coating device according to any one of claims 1 to 7, characterized in that: The electric control system includes a current detection device, a voltage detection device, at least one voltage regulator, a pulse generator, an IGBT module, and a high-voltage transformer connected in series. The voltage regulator, the pulse generator, the IGBT module, and the high-voltage transformer are connected in series to form an output circuit. The input end of the voltage regulator is connected to the power supply system, and the output end of the high-voltage transformer is connected to the electron gun system; the current detection device and the voltage detection device are respectively connected in parallel with the output circuit, and the current detection device and the voltage detection device are respectively connected to the control system for detecting the output current and output voltage of the electric control system.

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