Probe

Abstract

The invention provides a probe which is high in contact reliability. The probe includes: an elastic portion; a first connection portion connected to a first end portion, which is one of the two ends of the elastic portion in the first direction; and a second connection part connected to a second end part, which is the other end part. The elastic portion has: a first portion extending from the first end portion in a second direction intersecting the first direction; a second portion extending from the second end toward the same side as the first portion in the second direction; and a curved portion having a curved shape that connects an end portion of the first portion that is farther from the first end portion in both ends in the second direction and an end portion of the second portion that is farther from the second end portion in both ends in the second direction. A length in the first direction between an end portion of the first connection portion connected to the first end portion and an end portion of the second connection portion connected to the second end portion is longer than a curved inner diameter of the elastic portion.

Description

Technical Field

[0001] The present disclosure relates to probes. Background Art

[0002] Patent Document 1 describes a probe used for conducting inspection, characteristic measurement, etc. of an electronic module.

[0003] Prior art literature

[0004] Patent Literature

[0005] Patent Document 1: Japanese Patent Application Publication No. 2022-135106

[0006] Generally, a probe including the probe of Patent Document 1 has an elastic portion. However, if the stroke of the probe due to the expansion and contraction of the elastic portion is short, poor contact may occur during inspection. Summary of the invention

[0007] An object of the present disclosure is to provide a probe with high contact reliability.

[0008] A probe according to one embodiment of the present disclosure has:

[0009] elastic part;

[0010] a first connection portion connected to a first end portion that is one of both ends of the elastic portion in the first direction; and

[0011] a second connecting portion connected to a second end portion of the elastic portion that is the other of the two ends in the first direction;

[0012] The elastic portion comprises:

[0013] a first portion extending from the first end portion along a second direction intersecting the first direction;

[0014] a second portion extending from the second end portion along the second direction toward the same side as the first portion; and

[0015] a curved portion that connects one of the two ends of the first portion in the second direction, the end that is farther from the first end, and one of the two ends of the second portion in the second direction, the end that is farther from the second end.

[0016] A length along the first direction between an end portion of the first connection portion connected to the first end portion and an end portion of the second connection portion connected to the second end portion is longer than an inner diameter of a bend of the elastic portion.

[0017] According to the present disclosure, it is possible to provide a probe needle having high contact reliability. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a perspective view showing an inspection socket according to one embodiment of the present disclosure.

[0019] Figure 2 yes Figure 1 Exploded perspective view of the inspection socket.

[0020] Figure 3 is a stereogram of the probe.

[0021] Figure 4 This is a plan view of the probe and the object being contacted.

[0022] Figure 5 It is along Figure 4 Cross-sectional view along line AA.

[0023] Figure 6 It is along Figure 4 Cross-sectional view of line BB.

[0024] Figure 7 Yes means Figure 5 A cross-sectional view of a first variation of the probe.

[0025] Figure 8 Yes means Figure 6 A cross-sectional view of a first variation of the probe.

[0026] Fig. 9 Yes means Figure 5 A cross-sectional view of a second variation of the probe.

[0027] Fig.10 Yes means Figure 6 A cross-sectional view of a second variation of the probe.

[0028] Description of symbols

[0029] 1. Check the socket

[0030] 2, 3, 4, 5, 6 shell

[0031] 11 first connection part

[0032] 11A terminal

[0033] 12 Second connection part

[0034] 12A terminal

[0035] 12C Notch

[0036] 13 Elastic part

[0037] 131 Part 1

[0038] 132 Part 2

[0039] 133 bending part

[0040] 134 Longboard Department

[0041] 13A First end

[0042] 13B Second end

[0043] 71 First Probe

[0044] 72 Second Probe

[0045] 73 The Third Probe

[0046] 74 The Fourth Probe

[0047] 111 First Contact

[0048] 111A inclined surface

[0049] 111B protrusion

[0050] 121, 122 second contact DETAILED DESCRIPTION

[0051] Below, an example of the present disclosure is described with reference to the accompanying drawings. The following description is essentially for illustration only and is not intended to limit the present disclosure, the application of the present disclosure, or the use of the present disclosure. The accompanying drawings are schematic, and the ratios of the various dimensions may not be consistent with the ratios of the actual dimensions. In addition, in the following description, terms indicating specific directions or positions are used as needed (for example, including the terms "up", "down", "right", "left", "front", and "back"). However, the use of terms indicating specific directions or positions is to facilitate the understanding of the present disclosure with reference to the accompanying drawings, and the technical scope of the present disclosure is not limited according to the meaning of these terms.

[0052] like Figure 1 and Figure 2 As shown, the inspection socket 1 according to one embodiment of the present disclosure includes housings 2 , 3 , 4 , 5 , 6 , and a plurality of plate-shaped probes 7 accommodated in the housings 2 , 3 , 4 , 5 , 6 .

[0053] like Figure 2 As shown, the housing 2 has through holes 2A and 2B that penetrate the housing 2 in the up-down direction (for example, the Z direction shown in each figure). The up-down direction and the Z direction are examples of the first direction. In this embodiment, in the up-down direction, the side where the housing 2 is located is the upper side, and the side where the housing 6 is located is the lower side.

[0054] The housing 3 has a base 31 and a protrusion 32 protruding upward from the base 31. Here, "protruding upward" means "protruding from the housing 6 toward the housing 2 along the first direction". The protrusion 32 has a recess 3A recessed downward. Here, "recessed downward" means "recessed from the housing 2 toward the housing 6 along the first direction". The protrusion 32 has a plurality of through holes 3B penetrating the protrusion 32 in the up-down direction on the bottom surface constituting the recess 3A. The plurality of through holes 3B respectively correspond to each of the plurality of probes 7.

[0055] The housing 4 has through holes 4A and 4B that penetrate the housing 4 in the up-down direction.

[0056] The housing 5 holds the plurality of probes 7 as shown in FIG. Figure 2 Arrangement shown.

[0057] The housing 6 has a pin 61 protruding upward and a recess 6A recessed downward from the upper surface (in other words, the surface of the outer surface of the housing 6 facing the housing 4). The housing 6 has a plurality of through holes 6B penetrating the housing 6 in the vertical direction on the bottom surface constituting the recess 6A. The plurality of through holes 6B correspond to each of the plurality of probes 7.

[0058] The lower portion of the housing 5 holding the probe 7 is accommodated in the recess 6A of the housing 6. The lower portion of the housing 5 is a portion of the housing 5 close to the housing 6 in the first direction. Figure 3 ) is exposed to the outside of the inspection socket 1 through the through hole 6B.

[0059] The case 2, the case 3, and the case 4 are assembled on the upper side of the case 6 which accommodates the case 5. The case 2, the case 3, and the case 4 are assembled to the case 6 in the order of the case 4, the case 3, and the case 2 from the bottom.

[0060] The pin 61 of the case 6 passes through the through hole 4B of the case 4 and the through hole 2B of the case 2. Thus, the case 2 and the case 4 are positioned relative to the case 6.

[0061] The protrusion 32 of the housing 3 passes through the through hole 2A of the housing 2 from below. As a result, the protrusion 32 is exposed to the outside of the inspection socket 1, and the housing 3 is positioned relative to the housing 2.

[0062] The first connecting portion 11 of each probe 7 (see Figure 5 and Figure 6 ) penetrates the through hole 4A of the housing 4 from below. The first contacts 111, 751, 761 of each probe 7 (see Figure 3 ) is exposed to the outside of the inspection socket 1 through the through hole 3B of the shell 3.

[0063] The inspection socket 1 is connected to an inspection device (not shown) and contacts an object 8 (see Figure 4 , Figure 5 and Figure 6 ) is connected to the inspection socket 1. In the connected state, the conduction between the contact object 8 and the inspection device is inspected.

[0064] The inspection socket 1 is placed on a substrate provided in the inspection device. Thus, the second contacts 121, 122, 752, 762 (see FIG. 1 ) of the probes 7 exposed to the outside of the inspection socket 1 through the through holes 6B are Figure 3 ) is electrically connected to a conductive pad formed on a substrate.

[0065] Figure 4 , Figure 5 and Figure 6 The contact object 8 shown is embedded in the recess 3A of the housing 3. Figure 5 and Figure 6 As shown, the contact object 8 has a plurality of terminals 81. When the contact object 8 is inserted into the recess 3A of the housing 3, each terminal 81 and the first contacts 111, 751, 761 of each probe 7 exposed to the outside of the inspection socket 1 through the through hole 3B (see Figure 3 )Electrical connection.

[0066] like Figure 3 and Figure 4 As shown, the probe 7 includes a first probe 71, a second probe 72, a third probe 73, a fourth probe 74, a fifth probe 75, and a sixth probe 76. At least one of the first probe 71, the second probe 72, the third probe 73, the fourth probe 74, the fifth probe 75, and the sixth probe 76 is provided. In this embodiment, the probe 7 has 13 first probes 71, 13 second probes 72, 13 third probes 73, 13 fourth probes 74, 2 fifth probes 75, and 2 sixth probes 76.

[0067] In this embodiment, the first probe 71, the second probe 72, the third probe 73, and the fourth probe 74 are signal terminals, and the fifth probe 75 and the sixth probe 76 are power terminals or ground terminals. However, the types of the probes are not limited thereto.

[0068] The first probes 71, the second probes 72, the third probes 73, the fourth probes 74, the fifth probes 75, and the sixth probes 76 are arranged at intervals. That is, the first probes 71, the second probes 72, the third probes 73, the fourth probes 74, the fifth probes 75, and the sixth probes 76 are electrically insulated from each other.

[0069] The first probe 71, the third probe 73, and the fifth probe 75 are arranged at intervals along the front-to-back direction (for example, the Y direction shown in each figure) intersecting (orthogonal in the present embodiment) the up-down direction of the inspection socket 1. The front-to-back direction and the Y direction are the plate thickness directions of the probe 7, which are examples of the third direction. The first probe 71 and the third probe 73 are alternately arranged in the front-to-back direction.

[0070] The two fifth probes 75 sandwich the 13 first probes 71 and the 13 third probes 73 in the front-rear direction. That is, the two fifth probes 75 are arranged at the frontmost and rearmost of the first probes 71, the third probes 73, and the fifth probes 75.

[0071] The second probe pins 72, the fourth probe pins 74, and the sixth probe pins 76 are arranged at intervals along the front-rear direction of the inspection socket 1. The second probe pins 72 and the fourth probe pins 74 are alternately arranged in the front-rear direction.

[0072] The two sixth probes 76 sandwich the 13 second probes 72 and the 13 fourth probes 74 in the front-rear direction. That is, the two sixth probes 76 are arranged at the frontmost and rearmost of the second probes 72, the fourth probes 74, and the sixth probes 76.

[0073] like Figure 5 As shown, each first probe 71 and each second probe 72 are arranged opposite to each other at intervals in a left-right direction (for example, the X direction shown in each figure) that intersects both the up-down direction and the front-back direction (in this embodiment, is orthogonal to both the up-down direction and the front-back direction). The left-right direction and the X direction are examples of the second direction.

[0074] like Figure 6 As shown, each third probe 73 and each fourth probe 74 are disposed opposite to each other at a distance in the left-right direction.

[0075] In the present embodiment, the first probe 71 and the fourth probe 74 have the same structure (in other words, the same size and the same shape). The fourth probe 74 is obtained by arranging the first probe 71 in the left-right direction in reverse.

[0076] In the present embodiment, the second probe 72 and the third probe 73 have the same structure (in other words, the same size and the same shape). The third probe 73 is obtained by arranging the second probe 72 in the left-right direction in reverse.

[0077] As described above, in this embodiment, the inspection socket 1 includes two types of probes 7 instead of four types of probes 7 having different structures. One of the two types of probes 7 is the probe 71 and the probe 74 , and the other of the two types of probes 7 is the probe 72 and the probe 73 .

[0078] like Figure 3As shown, each fifth probe 75 and each sixth probe 76 are disposed opposite to each other with a gap therebetween in the left-right direction.

[0079] In the present embodiment, the fifth probe 75 and the sixth probe 76 have the same structure (in other words, the same size and the same shape). In the present embodiment, the fifth probe 75 and the sixth probe 76 are arranged oppositely in the left-right direction. The fifth probe 75 and the sixth probe 76 are arranged line-symmetrically with respect to an imaginary line L1 extending in the up-down direction between the fifth probe 75 and the sixth probe 76.

[0080] The structure of each probe 7 is described below. In the present embodiment, each first probe 71, each second probe 72, each third probe 73, each fourth probe 74, each fifth probe 75 and each sixth probe 76 are substantially the same structure. Therefore, the structure of the first probe 71 is described below, and the description of the structure of other probes is omitted in principle. In addition, in each figure, the same reference numerals are marked on the common points of the structure. However, the structure of other probes different from the first probe 71 is described. In the following description, the "left" and "right" in the left-right direction have the following meanings. That is, in the first probe 71 and the third probe 73, in the left-right direction, the side of the curved portion 133 is the "left", and the side opposite to the curved portion 133 is the "right". On the other hand, in the second probe 72 and the fourth probe 74, in the left-right direction, the side opposite to the curved portion 133 is the "left", and the side of the curved portion 133 is the "right".

[0081] like Figure 5 As shown, the first probe 71 includes a first connection portion 11, a second connection portion 12, and an elastic portion 13. The first connection portion 11 is connected to the first end portion 13A, which is one of the two ends in the vertical direction of the elastic portion 13 (in this embodiment, the upper end portion of the elastic portion 13). In other words, the lower end portion of the first connection portion 11 (in this embodiment, the end portion close to the elastic portion 13 in the vertical direction) is connected to the upper end portion of the elastic portion 13. The second connection portion 12 is connected to the other end portion of the two ends in the vertical direction of the elastic portion 13 (in this embodiment, the lower end portion of the elastic portion 13), which is the second end portion 13B. In other words, the upper end portion of the second connection portion 12 (in this embodiment, the end portion close to the elastic portion 13 in the vertical direction) is connected to the lower end portion of the elastic portion 13.

[0082] The first connection portion 11 includes a first contact 111, which is provided at the upper end portion of the first connection portion 11 (in the present embodiment, the end portion on the side farther from the second connection portion 12 in the vertical direction). The second connection portion 12 includes a second contact 121, which is provided at the lower end portion of the second connection portion 12 (in the present embodiment, the end portion on the side farther from the first connection portion 11 in the vertical direction). That is, the first probe 71 includes the first contact 111 provided at one end portion in the vertical direction (in the present embodiment, the upper end portion) and the second contact 121 provided at the other end portion in the vertical direction (in the present embodiment, the lower end portion).

[0083] The elastic portion 13 has a first portion 131 , a second portion 132 , and a bent portion 133 .

[0084] The first portion 131 extends from the first end portion 13A in the left-right direction. The second portion 132 extends from the second end portion 13B in the left-right direction. The second portion 132 extends to the same side as the first portion 131 in the left-right direction. Figure 5 In the illustrated example, the first portion 131 extends leftward from the first end portion 13A, and the second portion 132 extends leftward from the second end portion 13B.

[0085] The bent portion 133 is a curved shape. The bent portion 133 connects the ends of the first portion 131 in the left-right direction, the ends farther from the first end portion 13A (for example Figure 5 The left end in the middle) and the end (the end farthest from the second end 13B) of the two ends in the left-right direction of the second portion 132 Figure 5 The left end is in the middle) connected.

[0086] The first end portion 13A and the second end portion 13B, which are both ends of the elastic portion 13, are connected to the first connection portion 11 and the second connection portion 12 from the same side (the left side in this embodiment) in the left-right direction. That is, the elastic portion 13 is located on the same side (the left side in this embodiment) with respect to one side surface (the left side in this embodiment) in the left-right direction of the first connection portion 11.

[0087] The length L2 along the vertical direction between the end 11A of the first connection part 11 connected to the first end 13A and the end 12A of the second connection part 12 connected to the second end 13B is longer than the inner diameter R1 of the bend of the elastic part 13. In the present embodiment, the end 11A is the lower end of the first connection part 11, and the end 12A is the upper end of the second connection part 12. In addition, in the present embodiment, the inner diameter R1 of the bend of the elastic part 13 is the inner diameter R1 of the bend 133.

[0088] The elastic portion 13 includes a plurality of long plate portions 134 (three long plate portions 134A, 134B, and 134C in this embodiment). Each of the long plate portions 134A, 134B, and 134C extends over the first portion 131 , the second portion 132 , and the bent portion 133 .

[0089] Each of the long plate portions 134A, 134B, and 134C extends along the length direction of the elastic portion 13. The length direction of the elastic portion 13 is a direction in which the elastic portion 13 extends from the first portion 131 to the second portion 132 via the curved portion 133. That is, the length direction of the elastic portion 13 is the left-right direction in the first portion 131 and the second portion 132, and is a direction along the curved shape in the curved portion 133.

[0090] The long plate portions 134A, 134B, and 134C are arranged at intervals in the width direction of the elastic portion 13. The width direction of the elastic portion 13 is a direction orthogonal to both the front-rear direction (the plate thickness direction of the probe 7 in this embodiment) and the length direction of the elastic portion 13.

[0091] The plurality of long plate portions 134 are longer in the width direction as they are closer to the outside of the curved shape of the curved portion 133. In the present embodiment, the long plate portion 134A is longer in the width direction than the long plate portion 134B, and the long plate portion 134B is longer in the width direction than the long plate portion 134C.

[0092] The second portion 132 extends in the following manner: Figure 5 That is, the second portion 132 extends in such a manner that it approaches the first end portion 13A in the vertical direction as it approaches the second end portion 13B in the horizontal direction. That is, the surface constituting the radial inner edge and the surface constituting the outer edge of the second portion 132 are inclined surfaces inclined relative to the horizontal direction.

[0093] The upper edge 12B of the second connecting portion 12 extends as follows: Figure 5 In the paper of FIG. 1 , the edge 12B of the second connection portion 12, which is close to the first connection portion 11 in the vertical direction (the upper side in this embodiment), extends in such a manner that it moves away from the first connection portion 11 in the vertical direction as it moves away from the elastic portion 13 in the horizontal direction. In other words, the edge 12B is an inclined surface inclined relative to the horizontal direction. In addition, the edge 12B may also extend in the horizontal direction. In addition, as Figure 3 As shown, the edge portions 12B of the fifth and sixth feelers 75 and 76 extend in the left-right direction.

[0094] like Figure 5As shown, the first contact 111 is in a protrusion shape and protrudes upward (in this embodiment, in a direction away from the second connection part 12 in the first direction) from the upper end of the first connection part 11. The first contact 111 includes an inclined surface 111A and a protrusion 111B.

[0095] The inclined surface 111A is located on one side of the first contact 111 in the horizontal direction. The inclined surface 111A is inclined so as to move away from the center line C as it moves away from the elastic portion 13 in the vertical direction. The center line C is a line that passes through the horizontal center of the first connector 11 and extends in the vertical direction.

[0096] The protrusion 111B protrudes upward (in the first direction away from the second connection portion 12 in the present embodiment). The protrusion 111B is opposed to the inclined surface 111A with a gap in the left-right direction. The protruding end (in the present embodiment, the upper end) of the protrusion 111B is located below the upper end of the inclined surface 111A and above the lower end of the inclined surface 111A. That is, in the first direction, the protruding end of the protrusion 111B is located between the end of the inclined surface 111A on the side far from the elastic portion 13 and the end of the inclined surface 111A on the side close to the elastic portion 13.

[0097] The terminal 81 of the contact object 8 can contact the inclined surface 111A and the protrusion 111B. When the contact object 8 is embedded in the recess 3A of the housing 3, the terminal 81 has a U-shaped portion when viewed from the side along the front-back direction. That is, the terminal 81 has a downwardly protruding bent portion 81A at the end. The inclined surface 111A contacts the bent portion 81A of the terminal 81 from one side in the left-right direction.

[0098] In the present embodiment, the first contact 111 has only one inclined surface that can come into contact with the contact object 8. That is, in the present embodiment, in the first contact 111, the inclined surface that can come into contact with the contact object 8 is only the inclined surface 111A.

[0099] The second contact 121 is in a protrusion shape and protrudes downward (in the present embodiment, in a direction away from the first connection portion 11 in the first direction) from the lower end of the second connection portion 12. The second contact 121 has a notch 121C. The notch 121C is cut out from the lower surface of the second contact 121 upward (in the present embodiment, on the first connection portion 11 side in the first direction).

[0100] The second connection portion 12 has a notch 12C. The notch 12C is provided between the second contact point 121 and the second portion 132 of the elastic portion 13. The notch 12C is cut out from the left-right end of the second connection portion 12 along the left-right direction.

[0101] The first probe 71 , the second probe 72 , the third probe 73 , and the fourth probe 74 are different in arrangement direction, structure, etc., which are described in detail below.

[0102] like Figure 5 As shown, the first probe 71 and the second probe 72 are disposed opposite to each other in the left-right direction with the elastic portion 13 facing outward in the left-right direction. Figure 6 As shown in FIG. 1 , the third contact element 73 and the fourth contact element 74 are disposed to face each other in the left-right direction such that the elastic portion 13 faces outward in the left-right direction.

[0103] like Figure 5 and Figure 6 As shown, the inclined surfaces 111A of the first probe 71 and the fourth probe 74 are located on the side of the curved portion 133 of the elastic portion 13 of the first contact 111 in the left-right direction. The inclined surfaces 111A of the first probe 71 and the fourth probe 74 face the side opposite to the curved portion 133 of the elastic portion 13 in the left-right direction. The protrusions 111B of the first probe 71 and the fourth probe 74 are located on the side opposite to the curved portion 133 of the elastic portion 13 in the left-right direction relative to the inclined surfaces 111A.

[0104] The inclined surface 111A of the first probe 71 is Figure 5 The projection 111B of the first probe 71 is located on the left side of the first contact 111 on the paper surface of FIG. 1 , and extends downward as it goes to the right, and faces the upper right side. Figure 5 The inclined surface 111A of the fourth probe 74 is located to the right of the inclined surface 111A of the first probe 71. Figure 6 The protrusion 111B of the fourth probe 74 is located at the right part of the first contact 111 on the paper surface of FIG. 1 , and extends downward as it goes to the left, and faces the upper left. Figure 6 On the paper surface of FIG. 8 , the fourth probe 74 is located to the left of the inclined surface 111A.

[0105] like Figure 5 and Figure 6 As shown, the inclined surfaces 111A of the second probe 72 and the third probe 73 are located on the side of the first contact 111 opposite to the elastic portion 13 in the left-right direction. The inclined surfaces 111A of the second probe 72 and the third probe 73 face the curved portion 133 side of the elastic portion 13 in the left-right direction. The protrusions 111B of the second probe 72 and the third probe 73 are located on the elastic portion 13 side relative to the inclined surfaces 111A in the left-right direction.

[0106] The inclined surface 111A of the second probe 72 is Figure 5 The protrusion 111B of the second probe 72 is located at the left of the first contact 111 on the paper surface of FIG. 1 , and extends downward as it goes to the right, and faces the upper right. Figure 5The third probe 73 is located on the right side of the inclined surface 111A of the second probe 72. Figure 6 The projection 111B of the third probe 73 is located at the right part of the first contact 111 on the paper surface of FIG. 1 , and extends downward as it goes to the left, and faces the upper left. Figure 6 On the paper surface of FIG. 7 , the third probe 73 is located to the left of the inclined surface 111A.

[0107] As mentioned above, Figure 5 As shown, the inclined surface 111A of the first contact 111 of the first probe 71 and the inclined surface 111A of the first contact 111 of the second probe 72 face the same side in the left-right direction (right in this embodiment). Figure 6 As shown, the inclined surface 111A of the first contact 111 of the third probe 73 and the inclined surface 111A of the first contact 111 of the fourth probe 74 face the same side (left side in the present embodiment) in the left-right direction.

[0108] In addition, if Figure 5 and Figure 6 As shown, the first contact 111 of the first probe 71 has an inclined surface 111A (see Figure 5 ) and the inclined surface 111A (see Figure 6 ) faces the opposite side in the left-right direction. The inclined surface 111A (see Figure 5 ) and the inclined surface 111A (see Figure 6 ) face opposite sides in the left-right direction.

[0109] In addition, when viewed in the front-to-back direction, the inclined surface 111A of the first contact 111 of the first probe 71 and the inclined surface 111A of the first contact 111 of the third probe 73 face each other in the left-right direction. When viewed in the front-to-back direction, the inclined surface 111A of the first contact 111 of the second probe 72 and the inclined surface 111A of the first contact 111 of the fourth probe 74 face each other in the left-right direction.

[0110] The first probe 71 and the fourth probe 74 have the second contact 121 and the notch 121C. The second probe 72 and the third probe 73 have the second contact 122 instead of the second contact 121. The second contact 122 does not have the notch 121C. The second contact 122 is different from the second contact 121 in that it does not have the notch 121C.

[0111] In the first probe 71 and the fourth probe 74, the second contact 121 is located at a position deviated from the first contact 111 when viewed in the up-down direction. In the first probe 71 and the fourth probe 74, the second contact 121 is located at a position deviated from the inclined surface 111A when viewed in the up-down direction. In the first probe 71 and the fourth probe 74, the portion of the second connection portion 12 including the second contact 121 overlaps with the elastic portion 13 when viewed in the up-down direction. That is, in the first probe 71 and the fourth probe 74, at least a portion of the portion of the second connection portion 12 including the second contact 121 is located at the same position as at least a portion of the elastic portion 13 in the left-right direction. In addition, in the first probe 71 and the fourth probe 74, the elastic portion 13 and the second contact 121 are located on the same side relative to the first connection portion 11 in the left-right direction.

[0112] In the second probe 72 and the third probe 73, the second contact 122 and the first contact 111 are located at a position where at least a portion of them overlap each other when viewed in the up-down direction. That is, in the second probe 72 and the third probe 73, at least a portion of the second contact 122 is located at the same position as at least a portion of the first contact 111 in the left-right direction. In addition, in the second probe 72 and the third probe 73, the first contact 111 and the second contact 122 are located on the same side in the left-right direction relative to the elastic portion 13. In the second probe 72 and the third probe 73, the second contact 122 and the inclined surface 111A are located at a position where at least a portion of them overlap each other when viewed in the up-down direction. That is, in the second probe 72 and the third probe 73, at least a portion of the second contact 122 is located at the same position as at least a portion of the inclined surface 111A in the left-right direction. In addition, in the second probe 72 and the third probe 73, the inclined surface 111A and the second contact 122 are located on the same side in the left-right direction relative to the elastic portion 13.

[0113] like Figure 5 As shown in FIG. 1 , in the first probe 71 and the second probe 72 , the inclined surface 111A is provided at the left portion of the first contact 111 . Figure 6 As shown, in the third probe pin 73 and the fourth probe pin 74 , the inclined surface 111A is provided at the right portion of the first contact 111 . Figure 5 and Figure 6 (and the following Figure 7 to Figure 10 ) is an example of one side in the left-right direction. Figure 5 and Figure 6 (and the following Figure 7 to Figure 10 ) is an example of the other side in the left-right direction.

[0114] like Figure 5 and Figure 6As shown, the second contact 121 of the first probe 71 is located to the left of the second contact 122 of the third probe 73. That is, the second contact 121 of the first probe 71 does not overlap with the second contact 122 of the third probe 73 when viewed in the front-to-back direction. That is, in the left-to-right direction, the second contact 121 of the first probe 71 is located at a position different from the second contact 122 of the third probe 73. In addition, it is also possible that the second contact 121 of the first probe 71 overlaps only a portion of the second contact 122 of the third probe 73 when viewed in the front-to-back direction. That is, it is also possible that the second contact 121 of the first probe 71 and the second contact 122 of the third probe 73 are partially located at the same position in the left-to-right direction.

[0115] The second contact 122 of the second probe 72 is located to the left of the second contact 121 of the fourth probe 74. That is, the second contact 122 of the second probe 72 does not overlap with the second contact 121 of the fourth probe 74 when viewed in the front-to-back direction. That is, the second contact 122 of the second probe 72 is located at a position different from the second contact 121 of the fourth probe 74 in the left-to-right direction. In addition, the second contact 122 of the second probe 72 may overlap only a portion of the second contact 121 of the fourth probe 74 when viewed in the front-to-back direction. That is, the second contact 122 of the second probe 72 may be partially located at the same position as the second contact 121 of the fourth probe 74 in the left-to-right direction.

[0116] As described above, in the first probe 71 and the second probe 72, the inclined surface 111A is provided at the left portion of the first contact 111. In addition, the second contact 121 of the first probe 71 is located on the left relative to the second contact 122 of the third probe 73, and the second contact 122 of the second probe 72 is located on the left relative to the second contact 121 of the fourth probe 74. That is, the inclined surface 111A of the first contact 111 of the first probe 71 is arranged on the left side of the first contact 111 of the first probe 71 in the left-right direction, that is, on the side where the second contact 121 of the first probe 71 is arranged relative to the second contact 122 of the third probe 73. In addition, the inclined surface 111A of the first contact 111 of the second probe 72 is arranged on the left side of the first contact 111 of the second probe 72 in the left-right direction, that is, on the side where the second contact 122 of the second probe 72 is arranged relative to the second contact 121 of the fourth probe 74.

[0117] As described above, in the third probe 73 and the fourth probe 74, the inclined surface 111A is provided at the right portion of the first contact 111. Furthermore, the second contact 122 of the third probe 73 is located on the right side relative to the second contact 121 of the first probe 71, and the second contact 121 of the fourth probe 74 is located on the right side relative to the second contact 122 of the second probe 72. That is, the inclined surface 111A of the first contact 111 of the third probe 73 is arranged on the right side of the first contact 111 of the third probe 73 in the left-right direction, that is, on the side where the second contact 122 of the third probe 73 is arranged relative to the second contact 121 of the first probe 71. In addition, the inclined surface 111A of the first contact 111 of the fourth probe 74 is arranged on the right side of the first contact 111 of the fourth probe 74 in the left-right direction, that is, on the side where the second contact 121 of the fourth probe 74 is arranged relative to the second contact 122 of the second probe 72.

[0118] The first probe 71 , the second probe 72 , the third probe 73 , and the fourth probe 74 can exert the following effects.

[0119] In the first probe 71, the second probe 72, the third probe 73, and the fourth probe 74, the length L2 between the end 11A and the end 12A along the vertical direction is longer than the inner diameter R1 of the bend of the elastic portion 13. The edge 12B of the second connecting portion 12 on the side of the first connecting portion 11 in the vertical direction extends in such a manner that it is away from the first connecting portion 11 in the vertical direction as it is away from the elastic portion 13 in the left-right direction. Therefore, in the first probe 71, the second probe 72, the third probe 73, and the fourth probe 74, the stroke of the elastic portion 13 in the vertical direction can be increased. As a result, the contact reliability of the probe 7 can be improved.

[0120] The second portion 132 extends so as to approach the first end portion 13A in the vertical direction as it approaches the second end portion 13B in the horizontal direction. Therefore, in each probe 7, the portion occupied by the elastic portion 13 can be reduced.

[0121] The elastic portion 13 includes a plurality of long plate portions 134. The plurality of long plate portions 134 are longer in the width direction as they are closer to the outside of the curved shape of the curved portion 133. Therefore, the elastic portion 13 can be easily bent.

[0122] The first contact 111 has an inclined surface 111A that can contact the contact object 8. For example, when the tip of the terminal 81 of the contact object 8 has a bent portion 81A, the inclined surface 111A contacts the bent portion 81A of the terminal 81 from one side in the left-right direction. When gold plating is applied to only one side of the bent portion 81A of the terminal 81 and tin plating is applied to the other side, the inclined surface 111A can contact the gold-plated portion.

[0123] The first contact 111 includes the protrusion 111B in addition to the inclined surface 111A, so that the first contact 111 can be brought into contact with the contact object 8 at multiple points.

[0124] The first probe pins 71 and the fourth probe pins 74 can exert the following effects.

[0125] When viewed in the up-down direction, the second contact 121 of the first probe 71 and the fourth probe 74 is located at a position deviated from the inclined surface 111A. Therefore, in a structure in which the first probe 71 and the third probe 73 are arranged in the front-to-back direction, the positions of the second contact 121 of the first probe 71 and the second contact 122 of the third probe 73 in the left-to-right direction can be set to different positions. Similarly, in a structure in which the fourth probe 74 and the second probe 72 are arranged in the front-to-back direction, the positions of the second contact 121 of the fourth probe 74 and the second contact 122 of the second probe 72 in the left-to-right direction can be set to different positions.

[0126] The second connection portions 12 of the first probe pins 71 and the fourth probe pins 74 have notches 12C, so that the second contacts 121 can be bent in the vertical direction.

[0127] The second probe 72 and the third probe 73 can exert the following effects.

[0128] When viewed in the up-down direction, at least a portion of the second contact 122 of the second probe 72 and the third probe 73 overlaps with at least a portion of the inclined surface 111A. Therefore, in a structure in which the second probe 72 and the fourth probe 74 are arranged in the front-to-back direction, the positions of the second contact 122 of the second probe 72 and the second contact 121 of the fourth probe 74 in the left-to-right direction can be set to different positions. Similarly, in a structure in which the third probe 73 and the first probe 71 are arranged in the front-to-back direction, the positions of the second contact 122 of the third probe 73 and the second contact 121 of the first probe 71 in the left-to-right direction can be set to different positions.

[0129] The inspection socket 1 can exert the following effects.

[0130] The second contact 121 of the first probe 71 is located to the left relative to the second contact 122 of the third probe 73, and the second contact 122 of the second probe 72 is located to the left relative to the second contact 121 of the fourth probe 74. By adopting such a structure, when the first probe 71 and the third probe 73 are arranged alternately in the front-to-back direction, the distance between the two second contacts adjacent in the front-to-back direction can be increased. The following is a detailed description. Assuming that the positions of the second contact 121 of the first probe 71 and the second contact 122 of the third probe 73 in the left-to-right direction are the same, the second contacts 121 and 122 of the first probe 71 and the third probe 73 arranged alternately in the front-to-back direction are adjacent to each other in the front-to-back direction. On the other hand, when the second contact 121 of the first probe 71 is located to the left relative to the second contact 122 of the third probe 73, the second contacts 121 and 122 of the first probe 71 and the third probe 73 arranged alternately in the front-to-back direction are not adjacent to each other in the front-to-back direction. In this case, the second contacts 121 and 121 of the two first probes 71 are adjacent to each other in the front-to-back direction. That is, the third probe 73 is not located between the two first probes 71, and accordingly, the distance between the two adjacent second contacts becomes larger. Similarly, when the second probes 72 and the fourth probes 74 are alternately arranged in the front-to-back direction, the distance between the two adjacent second contacts in the front-to-back direction can also be increased. As a result, the contact reliability of the inspection socket 1 can be improved.

[0131] When the interval between the probes is narrow, the interval between the pads on the substrate on which the inspection socket is mounted also becomes narrow, and it may be difficult to form each pad. In the inspection socket 1 of this embodiment, as described above, the interval between two second contacts adjacent in the front-to-back direction can be increased. As a result, the interval between the pads on the substrate can be increased, and therefore, each pad can be easily formed.

[0132] When viewed in the up-down direction, in the first probe 71 and the fourth probe 74, the first contact 111 is located at a position deviated from the second contact 121. When viewed in the up-down direction, in the second probe 72 and the third probe 73, the first contact 111 and the second contact 122 are located at a position overlapping each other. Thus, when the first probe 71 and the third probe 73 are alternately arranged in the front-to-back direction, the positions of the second contact 121 of the first probe 71 and the second contact 122 of the third probe 73 in the left-right direction can be set to different positions. In addition, when the second probe 72 and the fourth probe 74 are alternately arranged in the front-to-back direction, the positions of the second contact 122 of the second probe 72 and the second contact 121 of the fourth probe 74 in the left-to-right direction can be set to different positions.

[0133] The third probe pins 73 have the same structure as the second probe pins 72 and are arranged in the left-right direction opposite to the second probe pins 72. The fourth probe pins 74 have the same structure as the first probe pins 71 and are arranged in the left-right direction opposite to the first probe pins 71. Thus, the types of probe pins provided in the inspection socket 1 can be reduced.

[0134] The inclined surfaces 111A of the first probe 71 and the second probe 72 arranged opposite to each other in the left-right direction face the same side in the left-right direction. The inclined surfaces 111A of the third probe 73 and the fourth probe 74 arranged opposite to each other in the left-right direction face the same side in the left-right direction. Thus, the inclined surfaces 111A of the two probes arranged opposite to each other in the left-right direction can contact the contact object 8 from the same side in the left-right direction.

[0135] The inclined surfaces 111A of the first probe 71 and the third probe 73 arranged in the front-to-back direction face opposite sides in the left-to-right direction. The inclined surfaces 111A of the second probe 72 and the fourth probe 74 arranged in the front-to-back direction face opposite sides in the left-to-right direction. Thus, the inclined surfaces 111A of the two probes arranged in the front-to-back direction can contact the contact object 8 from opposite sides in the left-to-right direction.

[0136] When viewed in the front-to-back direction, the inclined surfaces 111A of the first probe 71 and the third probe 73 arranged in the front-to-back direction face each other in the left-to-right direction. When viewed in the front-to-back direction, the inclined surfaces 111A of the second probe 72 and the fourth probe 74 arranged in the front-to-back direction face each other in the left-to-right direction. Thus, the inclined surface 111A of each probe can be brought into contact with the contact object 8 from the outside in the left-to-right direction.

[0137] The first contact 111 of each of the first probe 71, the second probe 72, the third probe 73, and the fourth probe 74 has only one inclined surface 111A that can contact the contact object 8. Assuming that the first contact 111 has two inclined surfaces that can contact the contact object 8, by pressing the contact object 8 against one inclined surface, the possibility of the contact object 8 being separated from the other inclined surface increases. However, according to this structure, the possibility that the inclined surface 111A does not contact the desired position in the contact object 8 can be reduced.

[0138] The inspection socket 1 may also be configured as follows.

[0139] In the above-mentioned embodiment, the structure in which the inspection socket 1 includes two types of probes 7 is described. One of the two types of probes 7 is the first probe 71 and the fourth probe 74 having the same structure. The other of the two types of probes 7 is the second probe 72 and the third probe 73 having the same structure. However, the types of probes 7 included in the inspection socket 1 are not limited to two.

[0140] Figure 7 and Figure 8 The inspection socket 1 is shown to have a structure with four types of probes 7. Figure 7 and Figure 8 In, with Figure 5 and Figure 6 The same reference numerals are used for the parts of the probes shown in the figure, and the description thereof will be omitted. Figure 7 and Figure 8 In the structure shown, the first probe 71, the second probe 72, the third probe 73, and the fourth probe 74 have second contacts of different structures. That is, the first probe 71 has a second contact 123, the second probe 72 has a second contact 124, the third probe 73 has a second contact 125, and the fourth probe 74 has a second contact 126. The second contacts 123, 124, 125, and 126 have different numbers of notches. The second contact 123 has three notches, the second contact 124 has two notches, the second contact 125 has no notch, and the second contact 126 has one notch.

[0141] In the above-described embodiment, the first contact 111 has a configuration having only one inclined surface 111A capable of contacting the contact object 8. However, the first contact 111 may have a plurality of inclined surfaces.

[0142] The first contact 111 has a structure with two inclined surfaces (inclined surface 111A and second inclined surface 111C). Fig. 9 as well as Fig.10 As shown. Fig. 9 as well as Fig.10 In, with Figure 5 as well as Figure 6 The same reference numerals are used for the parts of the probes shown in the figure, and the description thereof is omitted. Fig. 9 as well as Fig.10 In the structure shown, the first contact 111 of each probe 7 has a second inclined surface 111C in addition to the inclined surface 111A. The second inclined surface 111C is opposite to the inclined surface 111A in the left-right direction. The second inclined surface 111C is inclined in the opposite direction to the inclined surface 111A opposite to the left-right direction. For example, when the inclined surface 111A is inclined in a manner facing the upper right, the second inclined surface 111C is inclined in a manner facing the upper left. The second inclined surface 111C, like the inclined surface 111A, can contact the terminal 81 of the contact object 8. The inclined surface 111A contacts the bent portion of the terminal 81 from one side in the left-right direction. On the other hand, the second inclined surface 111C contacts the bent portion of the terminal 81 from the other side in the left-right direction.

[0143] The shape and structure of the housing 2, 3, 4, 5, 6 can be arbitrarily changed according to the design of the inspection socket 1. For example, the shape of the housing 2, 3, 4, 5, 6 is not limited to a roughly quadrangular prism shape, but can be a roughly cylindrical shape, or a roughly polygonal shape other than a roughly quadrangular prism shape. The housing is not limited to being composed of five parts, but can be composed of one part, or can be composed of a plurality of parts other than five.

[0144] The number of probes 7 included in the inspection socket 1 can be arbitrarily changed according to the design of the inspection socket 1 and the like.

[0145] For example, in Figure 3 as well as Figure 4 In the structure shown, the probe 7 includes 13 first probes 71, 13 second probes 72, 13 third probes 73, 13 fourth probes 74, 2 fifth probes 75, and 2 sixth probes 76. Here, a pair of probes 71 and 72 facing each other in the left-right direction and a pair of probes 73 and 74 facing each other in the left-right direction are arranged in the front-back direction as one probe set. In this case, Figure 3 and Figure 4 In the structure shown, 13 probe groups are arranged in the front-to-back direction. With such an arrangement, when viewed in the up-down direction, the left-to-right positions of adjacent second contacts 121 and 122 are different. The number of probe groups arranged in the front-to-back direction may be other than 13.

[0146] In the above, various embodiments of the present disclosure have been described in detail with reference to the drawings, and finally various modes of the present disclosure will be described. In addition, in the following description, reference symbols are also added as an example.

[0147] The probe 7 according to the first aspect of the present disclosure has:

[0148] Elastic part 13;

[0149] a first connection portion 11 connected to a first end portion 13A which is one of the ends of the elastic portion 13 in the first direction; and

[0150] The second connecting portion 12 is connected to the second end portion 13B which is the other end portion of the elastic portion 13 in the first direction.

[0151] The elastic portion 13 comprises:

[0152] A first portion 131 extending from the first end along a second direction intersecting the first direction;

[0153] A second portion 132 extending from the second end portion along the second direction toward the same side as the first portion; and

[0154] a curved portion 133 that connects one of the two ends of the first portion in the second direction, the end that is farther from the first end, and one of the two ends of the second portion in the second direction, the end that is farther from the second end.

[0155] A length L2 along the first direction between an end portion of the first connection portion connected to the first end portion and an end portion of the second connection portion connected to the second end portion is longer than an inner diameter R1 of the bend of the elastic portion 13 .

[0156] The probe 7 according to the second aspect of the present disclosure is the probe 7 according to the first aspect,

[0157] The second portion 132 extends in such a manner as to approach the first end 13A in the first direction as approaching the second end 13B in the second direction.

[0158] The probe 7 of the third aspect of the present disclosure is the probe 7 of the first aspect or the second aspect,

[0159] An edge portion 12B of the second connection portion 12 on the first connection portion 11 side in the first direction extends along the second direction, or extends away from the first connection portion 11 in the first direction as it moves away from the elastic portion 13 in the second direction.

[0160] The probe 7 according to the fourth aspect of the present disclosure is the probe 7 according to any one of the first aspect to the third aspect,

[0161] The elastic portion 13 includes a plurality of long plate portions 134, each of which extends along a longitudinal direction of the elastic portion 13 and is arranged with gaps therebetween along a width direction of the elastic portion 13 orthogonal to the longitudinal direction.

[0162] The plurality of long plate portions 134 are longer in the width direction as they are closer to the outside of the curved shape of the curved portion 133 .

[0163] The probe 7 according to the fifth aspect of the present disclosure is the probe 7 according to any one of the first to fourth aspects,

[0164] The first connection portion 11 includes a first contact 111, and the first contact 111 is provided at an end of the first connection portion 11 on a side far from the second connection portion 12 in the first direction.

[0165] The first contact 111 has an inclined surface 111A capable of coming into contact with the contact object 8 .

[0166] The probe 7 according to the sixth aspect of the present disclosure is the probe 7 according to the fifth aspect,

[0167] The first contact 111 further includes a protrusion 111B that protrudes in the first direction and faces the inclined surface 111A with a gap in the second direction.

[0168] The probe 7 according to the seventh aspect of the present disclosure is the probe 7 according to the fifth aspect or the sixth aspect,

[0169] The second connection portion 12 includes a second contact 122, and the second contact 122 is provided at an end of the second connection portion 12 on a side farther from the first connection portion 11 in the first direction.

[0170] When viewed along the first direction, at least a portion of the second contact 122 overlaps with at least a portion of the inclined surface 111A.

[0171] The probe 7 according to an eighth aspect of the present disclosure is the probe 7 according to the seventh aspect,

[0172] The inclined surface 111A faces the bent portion 133 side of the elastic portion 13 in the second direction.

[0173] The probe 7 according to a ninth aspect of the present disclosure is the probe 7 according to the fifth aspect or the sixth aspect,

[0174] The second connection portion 12 includes a second contact 121, and the second contact 121 is provided at an end of the second connection portion 12 on a side far from the elastic portion 13 in the first direction.

[0175] When viewed along the first direction, the second contact 121 is located at a position deviated from the inclined surface 111A.

[0176] The probe 7 according to the tenth aspect of the present disclosure is the probe 7 according to the ninth aspect,

[0177] The inclined surface 111A faces the side opposite to the bent portion 133 of the elastic portion 13 in the second direction.

[0178] The probe 7 according to the eleventh aspect of the present disclosure is the probe 7 according to the ninth aspect or the tenth aspect,

[0179] When viewed along the first direction, a portion of the second connecting portion 12 including the second contact 121 overlaps with the elastic portion 13.

[0180] The second connection portion 12 has a notch 12C cut out in the second direction between the second contact point 121 and the elastic portion 13 .

[0181] Although the present disclosure is fully described in relation to the preferred embodiments with reference to the accompanying drawings, various changes and modifications will be apparent to those skilled in the art, and it should be understood that such changes and modifications are included within the scope of the present disclosure as long as they do not depart from the scope of the appended claims.

[0182] Industrial Applicability

[0183] The inspection socket of the present disclosure can be applied to an inspection device used for inspecting electronic modules such as optical modules, for example.

Claims

1. A probe, comprising: elastic part; a first connection portion connected to a first end portion that is one of the ends of the elastic portion in the first direction; as well as a second connecting portion connected to a second end portion of the elastic portion that is the other of the two ends in the first direction; The elastic portion comprises: a first portion extending from the first end portion along a second direction intersecting the first direction; a second portion extending from the second end portion along the second direction toward the same side as the first portion; as well as a curved portion that connects one of the two ends of the first portion in the second direction, the end that is farther from the first end, and one of the two ends of the second portion in the second direction, the end that is farther from the second end. A length along the first direction between an end portion of the first connection portion connected to the first end portion and an end portion of the second connection portion connected to the second end portion is longer than an inner diameter of a bend of the elastic portion.

2. The probe according to claim 1, wherein The second portion extends in such a manner as to approach the first end in the first direction as approaching the second end in the second direction.

3. The probe according to claim 1 or 2, wherein: An edge portion of the second connection portion on the first connection portion side in the first direction extends along the second direction, or extends so as to be away from the first connection portion in the first direction as it is away from the elastic portion in the second direction.

4. The probe according to claim 1 or 2, wherein: The elastic part includes a plurality of long plate parts, each of which extends along a longitudinal direction in which the elastic part extends, and is arranged with gaps therebetween along a width direction of the elastic part orthogonal to the longitudinal direction. The plurality of long plate portions are longer in the width direction as they are closer to the outside of the curved shape of the curved portion.

5. The probe according to claim 1 or 2, wherein: The first connection portion includes a first contact point, and the first contact point is provided at an end of the first connection portion on a side farther from the second connection portion in the first direction. The first contact has an inclined surface capable of coming into contact with a contact object.

6. The probe according to claim 5, wherein The first contact further includes a protrusion that protrudes in the first direction and faces the inclined surface with a gap in the second direction.

7. The probe according to claim 5, wherein: The second connection portion includes a second contact point, the second contact point being provided at an end portion of the second connection portion on a side farther from the first connection portion in the first direction. When viewed along the first direction, at least a portion of the second contact overlaps with at least a portion of the inclined surface.

8. The probe according to claim 7, wherein: The inclined surface faces the bent portion side of the elastic portion in the second direction.

9. The probe according to claim 5, wherein: The second connection portion includes a second contact point, and the second contact point is provided at an end portion of the second connection portion on a side farther from the elastic portion in the first direction. The second contact point is located at a position deviated from the inclined surface when viewed along the first direction.

10. The probe according to claim 9, wherein The inclined surface of the first contact faces a side opposite to the bent portion of the elastic portion in the second direction.

11. The probe according to claim 9, wherein When viewed along the first direction, a portion of the second connecting portion including the second contact overlaps with the elastic portion. The second connection portion has a notch cut out in the second direction between the second contact point and the elastic portion.

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