Freeze valve in target material generator

Abstract

A freeze valve (100) includes a valve body (128) defining an axial opening (135) extending in an axial direction and a wire (140) within the axial opening of the valve body. The wire includes a plurality of strands defining a plurality of continuous fluid passages through the axial opening of the valve body.

Description

[0001] CROSS-REFERENCE TO RELATED APPLICATIONS

[0002] This application claims priority to U.S. application 63 / 356,610, filed on June 29, 2022, which is incorporated herein by reference in its entirety. Technical Field

[0003] The disclosed subject matter relates to a cryovial for a target material generator. Background Art

[0004] Extreme ultraviolet (EUV) light, such as electromagnetic radiation having a wavelength of 100 nanometers (nm) or less (sometimes also referred to as soft x-rays), and including light having a wavelength of, for example, 20 nm or less, between 5 nm and 20 nm, or between 13 nm and 14 nm, can be used in a photolithography process to create extremely small features in or on a substrate (e.g., a silicon wafer) by initiating polymerization in a resist layer. Methods for generating EUV light include, but are not limited to, changing the physical state of a source material to a plasma state. The source material includes a compound or element, such as xenon, lithium, or tin, whose emission lines are in the EUV range. In one such method, which is generally referred to as laser produced plasma ("LPP"), the desired plasma is generated by irradiating the source material (e.g., in the form of droplets, streams, or clusters of the source material) with an amplified light beam (which may be referred to as a drive laser). For this process, the plasma is typically generated in a sealed container (e.g., a vacuum chamber) and monitored using various types of metrology equipment. A source material (such as xenon, lithium or tin) that emits in the EUV range when in a plasma state is often referred to as a target material because it is aimed and irradiated by the driving laser. Droplets, streams or clusters of the target material are generated by a target material generator within which the target material is delivered. Summary of the invention

[0005] In some general aspects, a cryovalve includes: a valve body defining an axial opening extending in an axial direction; and a wire located in the axial opening of the valve body. The wire includes a plurality of strands defining a plurality of continuous fluid passages through the axial opening of the valve body.

[0006] Implementations may include one or more of the following features. For example, the valve body may have a cylindrical shape. The wire may be configured to prevent a material in solid form from being extruded from the axial opening at a pressure greater than 10,000 PSI, 20,000 PSI, 30,000 PSI, 100,000 PSI, 200,000 PSI, 300,000 PSI, 400,000 PSI, 500,000 PSI, 600,000 PSI, 700,000 PSI, or 725,000 PSI. The strands of the plurality of strands may be arranged helically within the axial opening, and the continuous fluid passage may be a spiral passage through the axial opening.

[0007] Each strand may have a diameter in the range of 0.2 millimeters (mm) to 0.3 mm, and the diameter of the wire may be in the range of 4 mm-6 mm. The area between the strands may have a diameter in the range of 0.785 mm. 2 -7.069mm 2 The cross-sectional area between.

[0008] The axial opening of the valve body can be defined by a constant diameter along the length of the wire. The axial opening of the valve body can include a stepped feature, and the wire can be located between a fixed stop at a first end of the wire and a stepped feature at a second end of the wire. The fixed stop can be or can include a solid disk having a central axial opening, the diameter of the central opening is smaller than the outer diameter of the wire, and the outer diameter of the solid disk is larger than the outer diameter of the wire. The central axial opening of the fixed stop can be fluidically coupled to a gas source. The fixed stop can also include a fixed stop body extending from the solid disk into the axial opening of the valve body. The fixed stop body includes a central opening that is fluidly connected to the central opening of the solid disk and is also fluidly connected to the axial opening of the valve body. The cryovalve can also include a first fluid port and a second fluid port, the first fluid port being defined at the fixed stop. The axial opening can include a main axial opening and a smaller diameter axial opening. The main axial opening is located between the fixed stop and the stepped feature, and the smaller diameter axial opening is located between the stepped feature and the second fluid port. The diameter of the main axial opening is larger than the diameter of the smaller diameter axial opening.

[0009] The valve body may be made of molybdenum or a refractory metal, and the plurality of wire strands may be made of tungsten or a refractory metal.

[0010] The cryovial may further include a temperature controller in thermal communication with the valve body. The temperature controller may be configured to adjust the temperature of the target material within the axial opening within a temperature range including a freezing point and a thawing point of the target material within the axial opening, thereby regulating the flow of the target material through or within the axial opening.

[0011] Each gap between the wire and the inner surface of the valve body may have an area taken along a direction perpendicular to the axial direction that is less than or equal to the area formed between the strands of the wire. The axial opening may include a smaller diameter axial opening adjacent to the main axial opening, the wire may be placed or disposed in the main axial opening, and when the temperature of the target material is maintained below the freezing point of the target material, a solid target material may be formed in the smaller diameter axial opening.

[0012] The wire may include a first wire and a second wire arranged in series within the axial opening of the valve body, each of the first wire and the second wire including a plurality of strands defining a plurality of continuous fluid passages through the axial opening of the valve body. The strands of the first wire may be arranged helically within the axial opening, thereby defining a first spiral passage through the axial opening, and the strands of the second wire may be arranged helically within the axial opening, thereby defining a second spiral passage through the axial opening.

[0013] The strands of the plurality of strands may be arranged linearly within the axial opening, and the continuous fluid passage may be a linear passage through the axial opening.

[0014] The axial opening of the valve body may include a first step feature and a second step feature, wherein the wire is located between the first step feature and the second step feature.

[0015] In other general aspects, a target generator includes: an outlet nozzle in fluid communication with at least one target material reservoir; and at least one cryovial in fluid communication with a fluid passage defined between the outlet nozzle and the at least one target material reservoir. The cryovial includes: a valve body defining an axial opening extending along an axial direction; and a wire located within the axial opening of the valve body. The wire includes a plurality of strands, the plurality of strands defining a plurality of continuous fluid passages through the axial opening of the valve body.

[0016] Implementations may include one or more of the following features. For example, the valve body may have a cylindrical shape. The cryovalve may include a fluid port that is fluidly coupled to a gas source during a cleaning operation. The cryovalve may include a second fluid port that is always in fluid communication with a fluid passage defined between the outlet nozzle and the at least one target material reservoir. The cryovalve may include a first fluid port and a second fluid port that are interposed within a fluid passage defined between the outlet nozzle and the at least one target material reservoir.

[0017] The target generator may also include a target material located within a fluid passage defined between the outlet nozzle and at least one target material reservoir. The cryovial may include a temperature controller configured to maintain the target material within the smaller diameter axial opening of the axial opening at a temperature below the freezing temperature of the target material during operation of the outlet nozzle, thereby maintaining the target material in a solid form, such that the solid target material within the smaller diameter axial opening is a stop mechanism configured to reduce or prevent material from flowing through a main axial opening of the axial opening. The main axial opening is adjacent to the smaller diameter axial opening. The target material may include tin, and the valve body of the cryovial may be made of molybdenum or a refractory metal, and the wire strands may be made of tungsten or a refractory metal.

[0018] In other general aspects, a method of controlling a fluid includes: freezing a target material within a smaller diameter axial opening of a valve body of a cryovalve, thereby preventing the frozen target material from being axially extruded through a plurality of regions formed by strands of a wire material located within a main axial opening of the valve body when an axial pressure in the range of 10,000 PSI to 765,000 PSI is applied to the frozen target material; thawing the target material within the smaller diameter axial opening of the valve body of the cryovalve; and, once thawed, enabling fluid to flow through one or more of the regions of the main axial opening of the valve body of the cryovalve and the smaller diameter axial opening. The main axial opening has a diameter greater than the smaller diameter axial opening.

[0019] Implementations may include one or more of the following features. For example, once thawed, the fluid may be enabled to flow through an area between the strands of the wire extending laterally within a range of 2.0 mm to 0.5 mm at a conductivity of 0.03 L / s to 0.001 L / s. The target material may be frozen by maintaining the target material at a temperature below the freezing point of the target material for a sufficient period of time to solidify the target material. By enabling a purge gas to flow from a gas source into the main axial opening and through the main axial opening, the fluid may be enabled to flow through one or more of the regions of the main axial opening of the valve body of the freezing valve and the smaller diameter axial opening. The method may also include, while enabling the purge gas to flow, applying pressure to the purge gas to push the liquid target material present inside and outside the main axial opening and the smaller diameter axial opening back into the target material reservoir. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1A is a side cross-sectional view of a cryovalve including a valve body defining an axial opening and a wire material including a wire strand within the axial opening;

[0021] Figure 1B Provided along line 1B-1B (which lies in the XY plane) Figure 1AAn axial cross-sectional view of a cryovalve of FIG. 1 showing details of the strands and the fluid passages within the axial openings defined by the strands;

[0022] Figure 1C Yes, you can Figure 1A and Figure 1B A perspective view of another implementation of a wire implemented in a cryovial of , showing details of the wire strands and a fluid passage within an axial opening defined by the wire strands;

[0023] Figure 2A yes Figure 1A A side cross-sectional view of a portion of a freezing valve when the freezing valve is in a closed state;

[0024] Figure 2B yes Figure 1A A side cross-sectional view of the portion of the freezing valve when the freezing valve is in an open state;

[0025] Figure 3 It is shown Figure 1A and Figure 1B A schematic diagram of a cryo valve located in a target material nozzle assembly;

[0026] Figure 4A is a close-up perspective view of an implementation of a wire comprising parallel strands that can be used Figure 1A and Figure 1B within an axial opening of a valve body of a freezing valve;

[0027] Figure 4B is a close-up perspective view of an implementation of a wire including a helical strand that can be used for Figure 1A and Figure 1B In the axial opening of the valve body of the middle freezing valve;

[0028] Figure 5A can be used for Figure 1A and Figure 1B A top view of an implementation of a fixed stop in a freezing valve;

[0029] Figure 5B yes Figure 5A A side perspective view of a fixed stop member;

[0030] Figure 5C yes Figure 1A and Figure 1B A side cross-sectional view of an implementation of a cryovalve comprising Figure 5A and Figure 5B A fixed stop member;

[0031] Figure 5D is designed to Figure 1A and Figure 1B A side cross-sectional view of a similar cryovalve having Figure 5A and Figure 5B A fixed stopper and two wires connected in series in the axial opening;

[0032] Figure 6 is shown for use Figure 1A-Figure 5C A flowchart of a process for controlling a fluid using any one of the freezing valves;

[0033] Figure 7A-7F It shows that Figure 6 The process is located in the target material nozzle assembly Figure 1A and Figure 1B Schematic diagram of a freezing valve;

[0034] Fig. 8A yes Figure 1A and Figure 1B A side cross-sectional view of a dual-wetting implementation of a cryovial wherein target material fluid may flow through two fluid ports of the cryovial;

[0035] Figure 8B It shows Fig. 8A A schematic diagram of a dual wet cryovalve implemented in a target material nozzle assembly; and

[0036] Fig. 9 FIG. 2 is a diagram showing a target generator integrated into a target generator for supplying a target to an EUV light source. Figure 3 A schematic block diagram of an implementation of a target material nozzle assembly. DETAILED DESCRIPTION

[0037] See also Figure 1A and Figure 1B , the cryovalve 100 includes a valve body 128, the valve body 128 defining an axial opening 135 (or a main axial opening 135), the axial opening 135 extending generally in an axial direction parallel to the Z axis. The cryovalve 100 includes a wire 140 within the axial opening 135. The wire 140 is fixed within the axial opening 135 so that it contacts the inner surface 122 of the valve body 128. The wire 140 includes a plurality of strands 141 ( Figure 1B). A plurality of continuous fluid passages are defined in regions 160 between adjacent strands 141 and in gaps 161 between the strands 141 and the inner surface 122 of the valve body 128. The wire 140 (and each strand 141) and the continuous fluid passages (defined by the regions 160 and the gaps 161) extend along the axial opening 135 and specifically along the axial direction (which is parallel to the Z axis). The axial opening 135 is inserted within the valve body 128 and extends between the fixed stop 105 and a stepped feature 132 formed in the valve body 128 (specifically at the inner surface 122). The fixed stop 105 defines a central axial opening 110 that enables fluid communication between the axial opening 135 and the first fluid port 103A. The stepped feature 132 is where the axial opening 135 is in fluid communication with the smaller diameter axial opening 150. An axial opening 135 formed in the valve body 128 is in fluid communication with the first fluid port 103A and the second fluid port 103B.

[0038] The cryovial 100 can be configured to perform two different functions. The first function occurs when the cryovial 100 is in a closed state, wherein the cryovial 100 holds or maintains the (solid) target material, thereby reducing or preventing any solid material from flowing through the cryovial 100. When the target material within the smaller diameter axial opening 150 of the cryovial 100 is sufficiently cooled over a period of time, the cryovial 100 can perform the first function, thereby causing any target material within the smaller diameter axial opening 150 to become solid. When the target material is in solid form, the solid target material acts as a plug that reduces or prevents fluid from flowing through the cryovial 100. The second function occurs when the cryovial 100 is in an open state, wherein the cryovial 100 enables or allows fluid flow. In order for the fluid to flow through the cryovial 100 unimpeded, the target material within the smaller diameter axial opening 150 and any target material entering the axial opening 135 must be sufficiently heated to cause the smaller diameter axial opening 150 and any target material within the axial opening 135 to become fluid. The fluid that can flow through the freezing valve 100 can be a gas, a liquid, or a combination of a gas and a liquid.

[0039] See also Figure 2A, the cryovial 100 is closed and is performing a first function, wherein the target material is a solid target material 201S. When closed, the cryovial 100 needs to be able to reduce or prevent the solid target material 201S from being squeezed out of the smaller diameter axial opening 150 and flowing out of the cryovial 100 under an expected operating pressure P applied along the Z direction (e.g., along the -Z direction). Generally speaking, in existing cryovials, the pressure P applied along the -Z direction can usually reach a maximum threshold value Pmax of 10,000 pounds per square inch (PSI) before the solid target material begins to squeeze out of the cryovial along the -Z direction. The "ramming pressure" (as shown in equation (1) below) is defined as the pressure at which the solid target material within the smaller diameter axial opening of the cryovial is squeezed out of the cryovial. On the other hand, the cryovial 100 is designed so that when closed (during the execution of the first function), the solid target material 201S within the smaller diameter axial opening 150 is prevented from being squeezed into the axial opening 135 along the -Z direction and flowing out of the cryovial 100 even when the punching pressure reaches the maximum value Pmax 725,000 PSI. Increasing the punching pressure PP of the cryovial 100 by reducing the diameter or range of the opening (along the plane perpendicular to the Z axis) 100 , the solid target material 201S in the smaller diameter axial opening 150 can be squeezed out through the opening (along the -Z direction). This is because the punching pressure PP of the cryo valve 100 100 The smaller diameter opening 150 is inversely proportional to the square of the diameter or extent of the opening 135 axially positioned along the -Z direction. Also, since the strand 141 is located within the axial opening 135, when the axial pressure P is applied along the -Z direction, the solid target material 201S within the smaller diameter axial opening 150 is pushed toward a much smaller opening (specifically and primarily the region 160, and secondarily and less likely the gap 161) along the axial direction (-Z direction).

[0040] Figure 1B A section 1B- 1B taken through the valve body 128 and intersecting the axial opening 135 is shown. Figure 1B The smaller diameter axial opening 150 located outside the step feature 132 can also be seen in FIG. Under the axial pressure P along the -Z direction, the solid target material 201S in the smaller diameter axial opening 150 is pushed toward the diameter D of the strand 141 falling in the opening 150. 150 In addition, under the action of axial pressure P along the -Z direction, when the punching pressure PP 100When the solid target material 201S in the smaller diameter opening 150 is exceeded, it is also pushed into the region 160. The punching pressure is usually calculated based on the assumption that the openings that hold the solid target material 201S and the openings that will extrude the solid target material 201S are both cylindrical. However, here, the openings (regions 160) are not cylindrical, but are closer to a polygonal shape, such as a triangle. However, it is clear that the range or diameter D of each region 160 is 160 The diameter D of the axial opening 135 is 135 Much smaller. In addition, because the smaller diameter axial opening 150 is axially concentric with the wire 140, the solid target material 201S within the smaller diameter axial opening 150 is generally not in direct fluid communication with the gap 161, which is blocked by the step feature 132. Any solid target material 201S that is somehow pushed into the gap 161 will travel along a path that is not parallel to the Z direction and will therefore be subject to greater friction. For these reasons, in response to the pressure P applied along the -Z direction, a greater force is applied to the solid target material 201S along the +Z direction. This greater amount of friction is due to the fact that the multiple strands 141 within the axial opening 135 form a much smaller opening (via region 160) through which the solid target material 201S within the smaller diameter axial opening 150 can be squeezed out. Therefore, the punching pressure PP that forces the solid target material 201S to flow through the axial opening 135 where the wire 140 is located along the -Z direction 100 Much greater than the punching pressure PP that forces the solid target material 201S to flow through the axial opening 135 without the wire 140 O For example, the punching pressure PP 100 Can be stamping pressure PP O , three times, four times, ten times, twenty times, thirty times, forty times, fifty times, sixty times, seventy times or greater than seventy-one times. 100 At least 10,000 PSI, at least 20,000 PSI, at least 30,000 PSI, at least 100,000 PSI, at least 200,000 PSI, at least 300,000 PSI, at least 400,000 PSI, at least 500,000 PSI, at least 600,000 PSI, at least 700,000 PSI or about 725,000 PSI.

[0041] Next, we will discuss the stamping pressure PP 100 The calculations assume that the opening is cylindrical, therefore, these calculations are for the actual punching pressure PP of the cryo valve 100. 100 A rough estimate of .

[0042] As discussed above, the ram pressure PP of the cryo valve 100100 The ram pressure PP extruded through a single region 160 can be calculated according to the ram pressure extrusion equation (1) 160 To approximate:

[0043]

[0044] In equation (1), variable D0 is the diameter D of the smaller diameter axial opening 150. 150 The inside is extruded into a specific area 160 (such as Figure 1B The area range is shown in D f The range D of the specific area 160 160 (like Figure 1B L is a smaller diameter axial opening 150 (as shown in Figure 1A The length L along the Z axis is shown in 150 a and b are constants, which are connected by the smaller diameter axial opening 150 to the axial opening 135 of the step feature 132 of the region of the angle A 150-1 and A 150-2 (like Figure 1A and K is the strength coefficient, n is the elasticity of the valve body 128. From equation (1), it can be seen that the punching pressure PP 160 depends on the number of strands 141 in the wire 140, because the number of strands 141 affects the smaller diameter D 160 The size of D f Based on the punching pressure PP for a single area 160 160 The total punching pressure PP of the freezing valve 100 is determined by the value of 100 Calculation.

[0045] For example, refer to Figure 1C , the punching pressure PP of the wire 140C in the axial opening 135 of the valve body 128C can be calculated 160 , a total of 337 strands 141C are included in the axial opening 135 of the valve body 128C. The wire 140C also includes a plurality of continuous fluid passages that define regions 160C between adjacent strands 141C, and gaps 161C between the strands 141C and the inner surface 122C of the valve body 128C. For simplicity, the following calculations assume that the strands 141C are straight and therefore extend axially only along the Z direction. If the overall diameter of the wire 140C is 5 millimeters (mm) (and the diameter D of the axial opening 135 is 135 5 mm or slightly larger), and the wire 140C includes 337 strands 141C, then the diameter D of each region 160C is f (D 160 ) is about 0.056mm, and the diameter D0 is about 0.185mm. If the length L150 is 34 mm, and a = 0.8, b = 1.5, K = 69 bar, n = 0.05, then the punching pressure PP 160 is about 300,000 PSI. As mentioned, the above calculations assume that the strands 141C and the regions 160C are linear. However, the wire 140C can be designed to have helical strands 141C, and therefore the regions 160C are also helical. Due to this design, any extruded solid target material 201S will experience greater friction because it will be extruded in a direction that includes a component perpendicular to the +Z direction, and the actual punch pressure PP 160 Will be higher.

[0046] See also Figure 2B , the cryovial 100 is open and is performing a second function, wherein any target material within the cryovial 100 is a liquid. When open, the cryovial 100 needs to be able to conduct a fluid 202F within the axial opening 135 of the cryovial 100 at an acceptable rate. The fluid 202F can be or can include the target material in the form of a fluid or a liquid. The fluid 202F can also or alternatively include a fluid material, such as a purge gas 204G, or a combination of a gas and a liquid. The rate at which the fluid 202F is conducted through the axial opening 135 of the cryovial 100 is referred to as the "conductivity" of the cryovial 100. The conductivity needs to be equal to or higher than the acceptable rate at which the cryovial 100 effectively conducts the fluid 202F through the axial opening 135. The cryovial 100 is designed so that the conductivity of the fluid 202F passing through the cryovial 100 during the performance of the second function is not affected by the flow of fluid 202F through the axial opening 135 that enables the cryovial 100 to perform the first function ( Figure 2A ) design, where the punching pressure PP 100 The freezing valve 100 is designed to improve the conductivity of the fluid flow 202F through the freezing valve 100 when performing the second function compared to previous freezing valve designs. In particular, the conductivity of the fluid 202F flowing through the freezing valve 100 is proportional (e.g., linearly) to the number of areas 160 and gaps 161 defined within the axial opening 135, and such areas 160 and gaps 161 exist due to the fact that the wire 140 is retained within the axial opening 135 and the wire 140 includes a plurality of strands 141. The conductivity of the fluid 202F flowing through the valve body 128 depends on the total cross-sectional area of ​​the continuous passage between the first fluid port 103A and the second fluid port 103B.

[0047] See also Figure 1CAs discussed above, the wire 140C includes a total of 337 strands 141C. The wire 140C also includes a plurality of continuous fluid passages that define regions 160C between adjacent strands 141C, and gaps 161C between the strands 141C and the inner surface 122C of the valve body 128C. As discussed above, the conductivity of the fluid 202F through the freezing valve 100 in which the wire 140C is located is proportional to the number of regions 160C and gaps 161C defined by the wire 140C and their relationship within the valve body 128C, and is also proportional to the total cross-sectional area of ​​the continuous passage between the first fluid port 103A and the second fluid port 103B ( Figure 1A ). Thus, a rough estimate of the conductance through the cryovalve 100 including the wire 140C can be calculated as follows. It should be noted that the wire strand 141C has a helical shape, and therefore the region 160C and the gap 161C are helical in shape. For simplicity, the following calculations assume that the wire strand 141C is straight and therefore extends axially only in the Z direction. If the total diameter of the wire 140C is 5 millimeters (mm) (and the diameter D of the axial opening 135 is 135 5 mm or slightly larger), and the wire 140C includes 337 strands 141C, then the diameter D of each region 160 is 160 The diameter D of each gap 161 is about 0.056 mm. 161 The diameter of the cryovalve 100 is about 0.34 mm, and there are approximately 265 regions 160 and 61 gaps 160. In this example, the conductance through the cryovalve 100 can be about 0.0326 liters per second (L / s). A cryovalve of equivalent size without the wire 140C disposed in the valve body 128C can have a conductance of about 0.0001 L / s under similar operating conditions.

[0048] When the freezing valve 100 is in the open state (e.g. Figure 2B ), allowing fluid 202F to flow through valve body 128. Fluid 202F is compatible with valve body 128 and may be or include gas 204G, such as from gas system 312 (eg, Figure 3 141). The cleaning gas or forming gas can be a gas that does not react with the target material and the materials of the features assembled into or within the valve body 128 (such as the fixed stop 105 and the axial opening 135 that holds the wire 140 including the plurality of strands 141). The cleaning gas or forming gas can include, for example, inert gases such as argon and hydrogen. The fluid 202F can also include the target material in liquid form retained within the cryovial 100. The fluid 202F can be supplied from the external gas system 312 ( Figure 3) is conducted through the first fluid port 103A, the central axial opening 110 of the fixed stop 105, through the axial opening 135 in the valve body 128, and through the second fluid port 103B.

[0049] Therefore, the punching pressure PP 100 The improvement in conductivity and the maintenance (and improvement) of the cryovalve 100 are a result of securing the wire 140 including a plurality of strands 141 within the axial opening 135, as discussed in more detail below.

[0050] See again Figure 1A and Figure 1B The valve body 128 extends in an axial direction parallel to the Z axis. The axial opening 135 is generally formed by a length L of the wire 140. 140 The constant diameter (D 135 ). The valve body 128 may be cylindrical in shape and thus define a cylindrical outer surface 125. The valve body 128 is made of a material of continuous shape and has sufficient rigidity to withstand the pressure applied to the cryovial 100 (such as the pressure when the pressure P is applied to the solid target material 201S or the supply gas 204G). The diameter of the cylindrical outer surface 125 may vary as it extends parallel to the Z axis. For example, the valve body 128 may have a larger diameter (such as a larger diameter) at the location where the fixed stop 105 is assembled. Figure 1A ), and may have a smaller diameter (as shown in FIG. 1 ) at locations where the valve body 128 includes a smaller diameter axial opening 150. Figure 1A ).

[0051] The valve body 128 and the strands 141 of the wire 140 are each made of a material that is compatible and non-reactive with materials that the valve body 128 and the strands 141 contact, including materials such as the target material (solid or fluid form) and the gas 204G. For example, if the cryovial 100 is used in a device configured to provide a direct current to an EUV light source (such as Fig. 9 In the target material nozzle assembly 334 that supplies the target material (as shown in FIG. 1 ), the target material may include tin or a tin alloy. In this example, the valve body 128 may be made of a refractory metal such as molybdenum, tungsten, niobium, rhenium, or an alloy of these metals. In addition, the wire strand 141 may also be made of a refractory metal such as tungsten.

[0052] like Figure 1AAs shown in , the valve body 128 includes an inner surface 122 defining an axial opening 135, and the wire 140 is inserted (or located) between the fixed stop 105 and the step feature 132. The fixed stop 105 is located at the first end 108 of the valve body 128. The fixed stop 105 can have a cylindrical disk shape that is complementary to the shape of the first end 108 of the valve body 128. The fixed stop 105 is made of a solid rigid material that can withstand the pressure applied from the solid target material 201S or the fluid 202F. The solid disk form of the fixed stop 105 defines a central axial opening 110, which fluidically couples the first fluid port 103A to the axial opening 135 when the opening 110 is positioned. The central axial opening 110 of the fixed stop 105 has a diameter D that is smaller than the axial opening 135. 135 Diameter D 110 , thereby preventing the wire 140 from moving along the -Z direction. The stepped feature 132 in the valve body 128 is adjacent to the smaller diameter axial opening 150 that is in fluid communication with the axial opening 135, and therefore the smaller diameter axial opening 150 extends parallel to the Z axis. The stepped feature 132 forms an intersection between the smaller diameter axial opening 150 and the axial opening 135, and the axial opening 135 has a diameter larger than the smaller diameter axial opening 150. The stepped feature 132 and the fluidly connected smaller diameter axial opening 150 are formed so that a fluid 202F (such as a target material or a cleaning gas) can flow between the axial opening 135 and the smaller diameter axial opening 150. The diameter D of the smaller diameter axial opening 150 150 is configured to be smaller than the diameter D of the axial opening 135 135 Thus, the wire 140 having the plurality of strands 141 is retained within the valve body 128, is confined within the valve body 128, and is statically held within the valve body 128, between the fixed stop 105 and the stepped feature 132. Furthermore, the wire 140 having the plurality of strands 141, when inserted between the fixed stop 105 and the stepped feature 132 within the axial opening 135 of the valve body 128, maintains a fixed position when the cryovalve 100 is configured to operate in a closed or open state (e.g., Figure 2A and Figure 2B ).

[0053] Figure 3 An implementation 300 of the cryovial 100 is shown being used in a target material nozzle assembly 330. The target material nozzle assembly 330 includes a nozzle 334 in fluid communication with a reservoir 338. The reservoir 338 is configured to hold a liquid target material 331. A fluid flow path 337 is formed between the reservoir 338 and the nozzle 334 to supply the liquid target material 331 stored in the reservoir 338 to the nozzle 334. Although Figure 3337, but the fluid flow path 337 may include other components, such as additional valves (such as Fig. 8A ) and a reservoir to allow additional control of the liquid target material 337. The nozzle 334 can be made of a capillary 336 that extends generally in the longitudinal direction and defines an opening 335. The opening 335 is at the end of the capillary 336. The capillary 336 can be made of, for example, fused quartz, borosilicate, aluminosilicate, or glass in the form of quartz. The liquid target material 331 flows through the capillary 336 and is ejected through the opening 335. When the pressure applied at the reservoir 338 is greater than a certain pressure (such as the Laplace pressure), the liquid target material 331 flows out of the opening 335 in the form of a target stream (as shown below Figure 7C ).

[0054] exist Figure 3 300 is a cleaning or service cryo valve that is in fluid communication with a fluid flow path 337 between a nozzle 335 and a reservoir 338. The cryo valve 300 is an implementation of the cryo valve 100 and includes a first fluid port 303A and a second fluid port 303B and a valve body 328 located between the first fluid port 303A and the second fluid port 303B. The first fluid port 303A includes a fixed stop 305 having a central axial opening 310 that is fluidly coupled to a gas system 312, while the second fluid port 303B is in fluid communication with the fluid flow path 337.

[0055] The cryovial 300 also includes a temperature control device 313 configured to control the temperature at which the cryovial 300 can perform the function of opening and closing the cryovial 300. For example, the temperature control device 313 can be a cartridge heater in thermal communication with the valve body 328 of the cryovial 300. If the temperature control device 313 maintains the temperature of the valve body 328 significantly below the melting point of the liquid target material 331, any liquid target material 331 within the smaller diameter axial opening 350 of the cryovial 300 solidifies (changes from a liquid to a solid state), and the solid target material 350 within the smaller axial opening acts as a plug, thereby reducing or preventing the flow of fluid (such as the liquid target material 331 or gas from the gas system 313) through the cryovial 300. If the temperature control device 311 maintains the temperature of the valve body 328 above the melting point of the liquid target material 331, any solid target material within the smaller diameter axial opening 350 melts to form the liquid target material 331. Furthermore, liquid target material 331 and gas from gas system 331 will thus flow freely through cryovial 300 .

[0056] As previously discussed, the cryo valve 100 ( Figure 1A and Figure 1B) includes a valve body 128 having a wire 140, the wire 140 defining a plurality of strands 141. The wires 140 including the strands 141 can each be formed to collectively produce different axial geometries (e.g. Figure 4A and Figure 4B ), these axial geometries extend parallel to the Z-axis within the axial opening 135 of the cryovalve 100. The common axial geometry formed by the strands 141 located within the valve body 128 can change the form and cross-sectional area of ​​the continuous fluid passage defined by adjacent strands 141 and the areas 160 and gaps 161 between the strands 141 and the inner surface 122 of the axial opening 135. In addition, because the conductivity of the fluid through the valve body 128 depends on the total cross-sectional area of ​​the continuous passage (such as the areas 160 and the gaps 161), the common axial geometry created by the strands 141 can change the conductivity of the fluid flow, thereby changing the ram pressure.

[0057] exist Figure 4A and Figure 4B , an example axial geometry formed by a wire (including multiple strands) that may be positioned within an axial opening 135 of a valve body 128 of a cryovalve 100 is shown.

[0058] exist Figure 4A In the embodiment of, the wire 440-1 including multiple strands 441-1 is shown. Specifically, the wire 440-1 includes 19 strands 441-1. Each strand 441-1 maintains a linear form along the Z axis, and the strands 444-1 extend closely together and contact each other in parallel, thereby generating a larger radial shape forming the wire 440-1. The wire 440-1 includes a linear extension gap 461-1 defined by radially extending parallel strands 441-1. When located in the axial opening 135, the strands 441-1 also define a linear extension region 461-1 between the strands 441-1 and the inner surface 122 in the valve body 128 of the freezing valve 100.

[0059] See also Figure 4B Implementation, wire 440-2 comprises multiple strands 441-2. Each strand 441-2 extends together in the same direction or angle along the Z axis in a spiral form, thereby producing a spiral wire 440-2. Wire 440-2 comprises a gap 461-2, and the gap 461-2 is formed by the passage produced by the spiral strands 441-2 extending closely in the same direction. The passage of gap 462-2 is also spiral. In addition, wire 440-2, when being implemented in a valve body 128 such as the inner surface 122 including the freezing valve 100, also defines an extension area 461-2 between strands 441-2 and the inner surface 122, thereby further allowing fluid flow.

[0060] See also Figure 5Aand Figure 5B , shows an implementation 505 of the fixed stop 105. The fixed stop 505 includes a disk 506 and a fixed stop body 507 extending axially from the disk 506. Figure 1A ), the fixed stop 505 has a central axial opening 510 having a diameter D 510 , the opening extends through the disk 506 and the fixed stop body 507. In addition, the fixed stop body 507 has an outer diameter that is smaller than the outer diameter of the disk 506. The fixed stop body 507 extends axially from the disk 506 by a length L 507 .

[0061] See also Figure 5C , implementation 500 of the cryovalve 100 includes a fixed stop 505. In this implementation, the fixed stop body 507 extends within a portion of the valve body 528. The cryovalve 500 (similar to Figure 1A The valve body 528 of the cryo valve 100 shown in FIG. 5 includes an axial opening 535. The cryo valve 500 also includes a wire 540 within the axial opening 535, and the wire 540 is located between the end 518 of the fixed stop body 507 and the step feature 532 formed in the valve body 528. The wire 540 extends along the Z direction by a length L 540 Outside the step feature 523 along the Z direction, the smaller diameter axial opening 550 is fluidly connected to the second fluid port 503B, and the smaller diameter axial opening 550 is also fluidly connected to the axial opening 535. In addition, the axial opening 535 is fluidly connected to the central axial opening 510 of the fixed stop 505, and the central axial opening 510 of the fixed stop 505 is in fluid communication with the first fluid port 503A. The fixed stop 505 extends a total length L in the Z direction within the axial opening 535 of the valve body 528. 507 The diameter D of the central axial opening of the fixed stopper 505 is 510 smaller than the diameter D of the axial opening 535 of the valve body 528 535 In this way, the wire 540 is held in place between the fixed stop 505 and the step feature 532. In addition, the length L of the fixed stop body 507 is 507 can be any suitable length and may depend on the length L of wire 540 540 For example, if the total length of the axial opening 535 (length L 507 and L 540 The sum of the lengths L of the fixed stopper body 507 is 34 mm. 507 is 10 mm, then the length L of the wire 540 is 540 As another example, if the total length of the axial opening 535 (length L 507 and L540 The total length of the wire is 60 mm. 540 is 30 mm, then the length L of the fixed stopper body 507 is 507 It needs to be 30mm.

[0062] See also Figure 5D In an additional implementation, the cryovalve 500 of the axial opening 535 may include a wire composed of two or more wires, such as a first wire 540-1 and a second wire 540-2. When two or more wires (such as a first wire 540-1 and a second wire 540-2) are arranged in series within the axial opening 535, the combined length or total length of the wires extends parallel to the Z axis and can be arranged in the same manner as a single wire 540 within the axial opening 535 ( Figure 5C ). For example, if the length L of the axial opening 535 is 535 is 34 mm, and the length L of the fixed stopper body 507 is 507 14 mm into the axial opening 535, the first and second wires 540-1 and 540-2 can be arranged in series with a length L 540 -1 and L 540 -2 each extends 10mm, and the combined length is 20mm. In addition, if the axial opening 535 includes two wires, such as the first wire 540-1 and the second wire 540-2 arranged in series, there is a discontinuity (or break) at the intersection of the first wire 540-1 and the second wire 540-2. This break generated by the first wire 540-1 and the second wire 540-2 interrupts the fluid passage in the axial opening 535. The interruption in the fluid passage is manifested as a grain boundary that interrupts the dislocation movement, thereby increasing the punching pressure P applied along the Z direction of the freezing valve 500.

[0063] See also Figure 6 , procedure 670 is performed by the cryovial 700 (which may be cryovial 100, 300, or 500) used in the target material nozzle assembly 730. Figure 7A-7FThe steps of procedure 670 are illustrated with respect to the cryovial 700 in the target material nozzle assembly 740. To illustrate the operation of the cryovial 700, the features shown, such as the wire 740 including the strands 741, are exaggerated and not drawn to scale. In addition, for simplicity, only three separate strands 741 are shown, and the regions 760 between the strands 741 are shown and the gaps 761 are depicted as being located between the strands 741 and the inner surface 722 of the valve body 728. However, as noted above, additional strands 741 may be formed (forming more regions 760 and gaps 761), and the strands 741 may contact each other, depending on the cross-sectional view through the valve body 728. As discussed above, the number of regions 760 and gaps 761 within the axial opening 735 of the valve body 728 affects the conductivity through the cryovial 700. Additionally, when procedure 670 involves a target material in solid form, in Figure 7A-7F When the procedure 670 involves a target material in the form of a fluid (such as a liquid), in Figure 7A-7F It is designated as liquid target material 701L in Figure 7A-7F In FIG. 7 , the purge or forming gas is designated as gas 704G.

[0064] Process 670 begins by cooling the target material present in the smaller diameter axial opening 750 of the valve body 728 (671). Fig. 7A As shown in , at the start of step 671, the target material present in the smaller diameter axial opening 750 may include a liquid target material 701L. At the start of step 671, the liquid target material 701L has entered the smaller diameter axial opening 750 through the second fluid port 703B, which is in fluid communication with the fluid path channel 737 between the reservoir 738 and the nozzle 734. In addition, at this time, the gas system 712 can apply a pressure Pp along the +Z direction (of the valve 700) to reduce or prevent the liquid target material 701L within the smaller diameter axial opening 750 from flowing (or leaking) through the axial opening 735, the first fluid port 703A, and the central axial opening 710 through the fixed stop 705. At the start of step 671, the nozzle 734 is frozen, which means that the nozzle 734 is maintained at a temperature below the freezing point of the target material, thereby freezing the target material, and therefore only solid target material 701S is present in the nozzle 734, and the nozzle 734 is effectively closed. Therefore, the liquid target material 701L does not flow toward the nozzle 734 .

[0065] In some implementations, or to accelerate the cooling process, the liquid target material 701L can be actively cooled (671) by the temperature control device 713. In other implementations where the melting point of the liquid target material 701S is higher than the ambient temperature, for example, if the target material includes tin, which has a melting point of approximately 232° C., the liquid target material 701L can be passively cooled (671) by removing the heat source applied to the valve body 728 (such as by disconnecting the temperature control device 713).

[0066] Once the liquid target material 701L within the smaller diameter axial opening 750 of the cryovial 700 is completely frozen (672), the cryovial 700 can be operated in a closed state, such as Figure 7B In the closed state, the cryovial 700 holds or maintains the solid target material 701S. Specifically, due to the design of the cryovial 700, even if a pressure P ( Figure 7B ), the solid target material 701S is also prevented from axially extruding from the valve body 728, such that the pressure P is as high as 725,000 PSI (673). In particular, if the pressure P is maintained below the punch pressure of 725,000 PSI, the flow of the solid target material 701S is significantly reduced or prevented from axially moving along the -Z direction of the cryovalve 700 ( Figure 7B ) and reaches the first fluid port 703A through the axial opening 735, where the solid target material 701S acts as a plug within the smaller diameter axial opening 750.

[0067] At this point in procedure 670 and with reference to Figure 7C , with the freeze valve 700 closed, the target material nozzle assembly 730 can be operated in a supply mode, where the nozzle 734 is thawed (so that the solid target material 701S in the nozzle 734 is thawed), and the liquid target material 701L stored in the reservoir 738 can be supplied to the nozzle 734 at a pressure P. When the pressure P increases to a value greater than a predetermined minimum nozzle pressure, due to the geometry of the nozzle 734, the liquid target material 701L exits through the nozzle 734 as a stream 780 of a target 782. For example, the predetermined minimum nozzle pressure can be about 100 PSI.

[0068] When the nozzle 734 needs to be serviced or replaced, an instruction for cleaning is received (674). At this point, the gas system 712, the cryovial 700, and the nozzle 734 work together to clean any liquid target material 701L in the fluid flow path 737 between the nozzle 734 and the reservoir 738. To do this, the nozzle 734 is frozen (in the manner discussed above), and then the cryovial 700 needs to be opened from a closed position (e.g., Figure 7BThe temperature control device 713 begins to actively heat the solid target material 701S in the cryo valve 700 (675). Fig.7D This active heating is shown at a time when some of the solid target material 701S has melted into the liquid target material 701L. During this time, the pressure P applied to the liquid target material 701L is reduced, and the liquid target material 701L is no longer actively supplied to the nozzle 734 because the target material (now solid target material 701S) within the nozzle 734 is frozen. As a result, the nozzle 734 stops producing the stream 780 of the target 782. When the nozzle 734 stops producing the stream 780 of the target 782, some of the liquid target material 701L may remain in the fluid flow path 737 between the nozzle 734 and the reservoir 738.

[0069] Once all of the solid target material 701S is thawed (676), fluid is allowed to flow from the first fluid port 703A to the second port 703B through the axial opening 735 of the valve body 728. As purge is being performed, the gas system 712 flows through the first port 703A of the cryo valve 700 in the +Z direction ( Fig. 7E ) supplies cleaning or forming gas 704G (at pressure Pp). At the beginning, as Fig. 7E As shown in FIG. 1 , gas 704G fluidly coupled through fixed stop 705 enters first fluid port 703A and central axial opening 710 in fixed stop 705, then enters axial opening 735, which includes a plurality of continuous fluid passages (defined by regions 760 and gaps 761) between adjacent strands 741 and inner surface 722 of axial opening 735, then enters smaller diameter axial opening 750 and flows through second fluid port 703B. Gas 704G pushes liquid target material 701L out of cryovial 700, while also pushing out fluid flow path 737. Gas 704G is pushed through cryovial 700 at a conductivity rate, and the conductivity increases with the number of regions 760 and gaps 761 defined between adjacent strands 741 and inner surface 722 of axial opening 735 in valve body 728. Eventually, all of the liquid target material 701L within the cryovalve 700 and in the fluid flow path 737 is pushed back into the reservoir 738 by the gas 704G. Furthermore, this moment can occur more quickly when the conductance of the gas 704G through the cryovalve 700 is higher.

[0070] Figure 7F The status of the cryovalve 700 and target material nozzle assembly 730 is shown when the cleaning is complete (678). After the cleaning is complete (678), the nozzle 734 can be repaired or removed.

[0071] The process 670 may also include an additional step of determining whether the repair or replacement of the nozzle 734 is complete and an instruction to operate the nozzle 734 under normal operating conditions is received. At this time, the liquid target material 701L can be resupplied from the reservoir 738 to the fluid flow path 737 and the valve body 728 of the cryovial 700, as shown in FIG. Fig. 7A as shown in .

[0072] See also Fig. 8A and Figure 8B , shows an implementation 800 of the cryovalve 100, which can be implemented similarly to the cryovials (100, 300, 500, and 700) discussed above and operate at least partially similarly to the cryovials (100, 300, 500, and 700) discussed above. The cryovalve 800 can be considered a dual-wetted target material valve because liquid target material can flow through the first fluid port 803A and the second fluid port 803B at certain times during operation. In this manner, the cryovalve 800 can be placed within the fluid flow path 337 through which the target material flows between the reservoir 338 and the nozzle 334, as shown in FIG. Figure 8B as shown in .

[0073] The cryovalve 800 includes a valve body 828 extending parallel to the Z axis. The valve body 828 defines an axial opening 835 including a wire 840. The design of the wire 840 is similar to the wires 140, 340, 540, 750 described above. In particular, the wire 840 includes a plurality of strands 841, which form a plurality of continuous fluid passages, which are defined by the regions 860 between adjacent strands 841 and the gaps 861 between the strands 841 and the inner surface 822 of the valve body 828. The wire 840 is retained in the axial opening 835 between the first smaller diameter axial opening 850-1 and the second smaller diameter axial opening 850-2 by the first step feature 832-1 and the second step feature 832-2, respectively. The first smaller diameter axial opening 850-1 is in fluid communication with the first fluid port 803A, and the second smaller diameter axial opening 850-2 is in fluid communication with the second fluid port 803B. Thus, a continuous fluid passage exists in the valve body 828 between the first fluid port 803A and the second fluid port 803B via the first smaller axial opening 850 - 1 , the axial opening 835 , and the second smaller axial opening 850 - 2 .

[0074] The cryovial 800 can perform the function of controlling the flow of the target material fluid by closing and opening operations in the same manner as the cryovials discussed above (such as 100, 300, 500 and 700). The cryovial 800 in the closed state can maintain the sufficiently cooled target material in a solid state within the first and second smaller diameter axial openings 850-1 and 850-2, and the target material is moved along (the length of the cryovial 800, Fig. 8A ) in a solid state under pressure up to 725,000 PSI in the +Z direction or -Z direction without being squeezed into and through the axial opening 835. The cryovalve 800 can also function in an open state, thereby allowing (by an external temperature control device, such as Figure 7A-7E 713) thawed target material such that the target material is in a liquid state and moves in two directions (the +Z direction and the -Z direction of the cryovial 800, Fig. 8A ) flows through the freezing valve 800.

[0075] like Figure 8B , a cryovalve 800 with an external temperature control, such as external temperature control 313, enables the target material to change state, such as from a solid to a liquid, and enables further control of the flow of the target material through the fluid flow path 337. In a more complex target material nozzle assembly 330 including additional components and additional fluid flow paths and reservoirs, more than one cryovalve 800 may be implemented at different locations to control the flow of target material within the assembly.

[0076] See also Fig. 9 , the target material nozzle assembly 730 (or 330) can be integrated into a target generator 990, which includes a fluid flow path and additional reservoirs, as well as other fluid regulating devices or valves (such as Fig. 8A and Figure 8B Target generator 990 may also include a starter system configured to receive a solid substance including a target material. An example of such a target 990 is shown in WO2020 / 187617, which is incorporated herein by reference in its entirety.

[0077] The target generator 990 supplies the liquid target material 701L to the external system 992 in the form of a stream 780 of targets 782. If the system 992 is an EUV light source, each target 782 is delivered to a plasma formation location 993 in a vacuum chamber 994. The plasma formation location 993 may receive at least one light beam 995 (which may be a pulsed light beam) generated by a light source 995 and delivered to the vacuum chamber 994 through an optical path 996. The interaction between the pulses of the light beam 995 and the target material in the targets 782 within the plasma formation location 993 produces a plasma that emits EUV light 997, which is collected 998 and supplied to a lithography exposure device 999. In this example, the liquid target material 701L may be any material that emits EUV light 998 when in a plasma state, such as water, tin, lithium, and / or xenon.

[0078] Other implementations are within the scope of the following claims. The cryovial (100, 300, 500, 700, or 800) may be characterized by other geometries or forms, and may be made of materials other than those described. For example, the valve body 128 of the cryovial 100 may be formed into a shape other than a cylinder, such that a cross-section of the valve body taken in the XY plane is not circular, but rather a polygon, such as a hexagon. The valve body 128 and wire 140 may be made of materials other than refractory metals (as discussed above), such as stainless steel, polymers (such as plastics and resins), or even wood. In addition to manufacturing costs and methods, the geometry and materials of the cryovial 100 also depend on operating parameters (such as pressure and temperature) and the environment in which the cryovial 100 is used.

[0079] The embodiments may be further described using the following terms:

[0080] 1. A freezing valve, comprising:

[0081] a valve body defining an axial opening extending in an axial direction; and

[0082] A wire is positioned within the axial opening of the valve body, the wire comprising a plurality of strands defining a plurality of continuous fluid passages through the axial opening of the valve body.

[0083] 2. The freezing valve according to clause 1, wherein the valve body has a cylindrical shape.

[0084] 3. A cryovial according to claim 1, wherein the wire is configured to prevent the solid form of material from being extruded from the axial opening at a pressure greater than: 10,000PSI, 20,000PSI, 30,000PSI, 100,000PSI, 200,000PSI, 300,000PSI, 400,000PSI, 500,000PSI, 600,000PSI, 700,000PSI or 725,000PSI.

[0085] 4. The cryovial of clause 1, wherein the strands of the plurality of strands are arranged helically within the axial opening, and the continuous fluid passage is a helical passage through the axial opening.

[0086] 5. The cryovial of clause 1, wherein each strand has a diameter in the range of 0.2 millimeters (mm) to 0.3 mm, and the diameter of the wire is in the range of 4 mm to 6 mm.

[0087] 6. The cryovial according to clause 5, wherein the area between the plurality of strands has a thickness of 0.785 mm. 2 Up to 7.069mm 2 The cross-sectional area between.

[0088] 7. The cryovial of clause 1, wherein the axial opening of the valve body is defined by a constant diameter along the length of the wire.

[0089] 8. The cryovial of clause 7, wherein the axial opening of the valve body includes a stepped feature, and wherein the wire is located between a fixed stop at a first end of the wire and the stepped feature at a second end of the wire.

[0090] 9. The cryovial of clause 8, wherein the fixed stop comprises a solid disk having a central axial opening, the central opening having a diameter smaller than an outer diameter of the wire, and the outer diameter of the solid disk being larger than the outer diameter of the wire.

[0091] 10. The cryovial of clause 9, wherein the central axial opening of the fixed stop is fluidly coupled to a gas source.

[0092] 11. A freezing valve according to claim 9, wherein the fixed stop also includes a fixed stop body extending from the solid disk into the axial opening of the valve body, the fixed stop body including a central opening that is fluidly connected to the central opening of the solid disk and also fluidly connected to the axial opening of the valve body.

[0093] 12. The freezing valve according to claim 8 further includes a first fluid port and a second fluid port, the first fluid port being defined at a fixed stop, wherein the axial opening includes a main axial opening between the fixed stop and the step feature and a smaller diameter axial opening between the step feature and the second fluid port, the diameter of the main axial opening being greater than the diameter of the smaller diameter axial opening.

[0094] 13. The cryovial of clause 1, wherein the valve body is made of molybdenum or a refractory metal and the plurality of wire strands are made of tungsten or a refractory metal.

[0095] 14. The cryovial according to clause 1 further includes a temperature controller thermally connected to the valve body, wherein the temperature controller is configured to adjust the temperature of the target material within a temperature range including a freezing point and a thawing point of the target material within the axial opening, thereby adjusting the flow of the target material through the axial opening or within the axial opening.

[0096] 15. The freezing valve according to clause 1, wherein each gap between the wire and the inner surface of the valve body has an area taken along a direction perpendicular to the axial direction that is less than or equal to an area formed between strands of the wire.

[0097] 16. A freezing valve according to claim 1, wherein the axial opening includes a smaller diameter axial opening adjacent to the main axial opening, the wire is disposed in the main axial opening, and when the temperature of the target material is maintained below the freezing point of the target material, a solid target material is formed in the smaller diameter axial opening.

[0098] 17. A freezing valve according to clause 1, wherein the wire includes a first wire and a second wire arranged in series within the axial opening of the valve body, each of the first wire and the second wire including a plurality of strands that define a plurality of continuous fluid passages through the axial opening of the valve body.

[0099] 18. A cryovial according to claim 17, wherein the strands of the first wire are arranged helically within the axial opening to define a first spiral passage through the axial opening, and the strands of the second wire are arranged helically within the axial opening to define a second spiral passage through the axial opening.

[0100] 19. The cryovial of clause 1, wherein the strands of the plurality of strands are arranged linearly within the axial opening, and the continuous fluid passage is a linear passage through the axial opening.

[0101] 20. The cryovial of clause 1, wherein the axial opening of the valve body comprises a first step feature and a second step feature, and wherein the wire is located between the first step feature and the second step feature.

[0102] 21. A target generator, comprising:

[0103] an outlet nozzle in fluid communication with at least one target material reservoir; and at least one cryovalve in fluid communication with a fluid passage defined between the outlet nozzle and the at least one target material reservoir, the cryovial comprising:

[0104] a valve body defining an axial opening extending in an axial direction; and

[0105] A wire is positioned within the axial opening of the valve body, the wire comprising a plurality of strands defining a plurality of continuous fluid passages through the axial opening of the valve body.

[0106] 22. The target generator of clause 21, wherein the valve body has a cylindrical shape.

[0107] 23. The target generator of clause 21, wherein the cryovalve comprises a fluid port that is fluidly coupled to a gas source during a purge operation.

[0108] 24. The target generator of clause 23, wherein the cryovalve comprises a second fluid port in fluid communication with a fluid passage defined between the outlet nozzle and the at least one target material reservoir.

[0109] 25. The target generator of clause 21, wherein the cryovalve comprises a first fluid port and a second fluid port interposed between the outlet nozzle and the at least one target material reservoir.

[0110] 26. The target generator of clause 21, further comprising a target material located within a fluid passage defined between the outlet nozzle and the at least one target material reservoir.

[0111] 27. A target generator according to claim 26, wherein the freezing valve includes a temperature controller configured to maintain the target material within the smaller diameter axial opening of the axial opening at a temperature below the freezing temperature of the target material during operation of the outlet nozzle, thereby maintaining the target material in a solid form, so that the solid target material within the smaller diameter axial opening is a stop mechanism, which is configured to reduce or prevent material from flowing through a main axial opening of the axial opening, which is adjacent to the smaller diameter axial opening.

[0112] 28. The target generator of clause 26, wherein the target material comprises tin and the valve body of the cryovalve is made of molybdenum or a refractory metal and the wire strands are made of tungsten or a refractory metal.

[0113] 29. A method of controlling a fluid, comprising:

[0114] freezing a target material within a smaller diameter axial opening of a valve body of a cryovial, thereby preventing the frozen target material from being axially extruded through a plurality of regions formed by strands of wire material located within a main axial opening of the valve body, the main axial opening having a diameter greater than the smaller diameter axial opening, when an axial pressure in the range of 10,000 PSI to 765,000 PSI is applied to the frozen target material;

[0115] thawing a target material within a smaller diameter axial opening of a valve body of a cryovial; and

[0116] Once thawed, fluid is allowed to flow through one or more of the regions of the main axial opening and the smaller diameter axial opening of the valve body of the freeze valve.

[0117] 30. A method according to clause 29, wherein once thawed, fluid is allowed to flow through regions between strands of the wire extending laterally in the range of 2.0 mm to 0.5 mm at a conductivity of 0.03 L / s to 0.001 L / s.

[0118] 31. A method according to clause 29, wherein enabling fluid to flow through one or more regions of the main axial opening of the valve body of the cryovalve and the smaller diameter axial openings includes: enabling a purge gas to flow from a gas source into the main axial opening and through the main axial opening.

[0119] 32. The method of clause 31, further comprising: while enabling the purge gas to flow, applying pressure to the purge gas to push liquid target material present inside and outside the major axial opening and the smaller diameter axial opening back into the target material reservoir.

[0120] The implementations described above and other implementations are within the scope of the following claims.

Claims

1. A freezing valve, comprising: a valve body defining an axial opening extending along an axial direction; as well as A wire is positioned within the axial opening of the valve body, the wire comprising a plurality of strands defining a plurality of continuous fluid passages through the axial opening of the valve body.

2. The freezing valve of claim 1, wherein the valve body has a cylindrical shape.

3. The cryovial of claim 1 , wherein the wire is configured to prevent material in solid form from being extruded from the axial opening at pressures greater than 10,000 PSI, 20,000 PSI, 30,000 PSI, 100,000 PSI, 200,000 PSI, 300,000 PSI, 400,000 PSI, 500,000 PSI, 600,000 PSI, 700,000 PSI, or 725,000 PSI.

4. The cryovial of claim 1, wherein the strands of the plurality of strands are arranged helically within the axial opening, and the continuous fluid passage is a helical passage through the axial opening.

5. The cryovial of claim 1, wherein each strand has a diameter in the range of 0.2 millimeters (mm) to 0.3 mm, and the diameter of the wire is in the range of 4 mm to 6 mm.

6. The cryovalve of claim 5, wherein the area between the plurality of strands has a thickness of 0.785 mm. 2 Up to 7.069mm 2 The cross-sectional area between.

7. The cryovial of claim 1 wherein the axial opening of the valve body is defined by a constant diameter along the length of the wire.

8. The cryovial of claim 7, wherein the axial opening of the valve body includes a stepped feature, and wherein the wire is located between a fixed stop at a first end of the wire and the stepped feature at a second end of the wire.

9. A freezing valve according to claim 8, wherein the fixed stop member includes a solid disk, the solid disk having a central axial opening, the diameter of the central opening is smaller than the outer diameter of the wire, and the outer diameter of the solid disk is larger than the outer diameter of the wire.

10. The cryovial of claim 9, wherein the central axial opening of the fixed stop is fluidly coupled to a gas source.

11. A freezing valve according to claim 9, wherein the fixed stop also includes a fixed stop body, which extends from the solid disk into the axial opening of the valve body, and the fixed stop body includes a central opening that is fluidly connected to the central opening of the solid disk and also fluidly connected to the axial opening of the valve body.

12. The freezing valve according to claim 8 further includes a first fluid port and a second fluid port, the first fluid port being defined at the fixed stop, wherein the axial opening includes a main axial opening and a smaller diameter axial opening, the main axial opening being located between the fixed stop and the step feature, the smaller diameter axial opening being located between the step feature and the second fluid port, the diameter of the main axial opening being greater than the diameter of the smaller diameter axial opening.

13. The cryovial of claim 1, wherein the valve body is made of molybdenum or a refractory metal and the plurality of wire strands are made of tungsten or a refractory metal.

14. The freezing valve according to claim 1 further includes a temperature controller, which is thermally connected to the valve body, and the temperature controller is configured to adjust the temperature of the target material within a temperature range including a freezing point and a thawing point of the target material located within the axial opening, thereby regulating the flow of the target material through the axial opening or within the axial opening.

15. The freezing valve of claim 1, wherein each gap between the wire and the inner surface of the valve body has an area taken along a direction perpendicular to the axial direction that is smaller than or equal to an area formed between the strands of the wire.

16. A freezing valve according to claim 1, wherein the axial opening includes a smaller diameter axial opening adjacent to the main axial opening, the wire is arranged in the main axial opening, and when the temperature of the target material is maintained below the freezing point of the target material, the solid target material is formed in the smaller diameter axial opening.

17. A freezing valve according to claim 1, wherein the wire includes a first wire and a second wire, the first wire and the second wire are arranged in series within the axial opening of the valve body, each of the first wire and the second wire includes a plurality of wire strands, and the plurality of wire strands define a plurality of continuous fluid passages through the axial opening of the valve body.

18. A freezing valve according to claim 17, wherein the strands of the first wire are arranged helically within the axial opening to define a first spiral passage through the axial opening, and the strands of the second wire are arranged helically within the axial opening to define a second spiral passage through the axial opening.

19. The cryovial of claim 1, wherein the strands of the plurality of strands are arranged linearly within the axial opening, and the continuous fluid passage is a linear passage through the axial opening.

20. The cryovial of claim 1, wherein the axial opening of the valve body comprises a first step feature and a second step feature, and wherein the wire is located between the first step feature and the second step feature.

21. A target generator, comprising: an outlet nozzle and at least one cryovalve in fluid communication with at least one target material reservoir, the at least one cryovalve in fluid communication with a fluid passage defined between the outlet nozzle and the at least one target material reservoir, the cryovalve comprising: a valve body defining an axial opening extending in an axial direction; and A wire is positioned within the axial opening of the valve body, the wire comprising a plurality of strands defining a plurality of continuous fluid passages through the axial opening of the valve body.

22. The target generator of claim 21, wherein the valve body has a cylindrical shape.

23. The target generator of claim 21, wherein the cryovial comprises a fluid port that is fluidly coupled to a gas source during a purge operation.

24. The target generator of claim 23, wherein the cryovalve includes a second fluid port in fluid communication with the fluid passage defined between the outlet nozzle and the at least one target material reservoir.

25. The target generator of claim 21, wherein the cryovalve comprises a first fluid port and a second fluid port, the first fluid port and the second fluid port being interposed between the outlet nozzle and the at least one target material reservoir.

26. The target generator of claim 21, further comprising a target material located within the fluid passage defined between the outlet nozzle and the at least one target material reservoir.

27. The target generator of claim 26, wherein the cryovalve comprises a temperature controller configured to maintain the target material within a smaller diameter axial opening of the axial opening at a temperature below a freezing temperature of the target material during operation of the outlet nozzle, thereby maintaining the target material in a solid form, such that the solid target material within the smaller diameter axial opening is a stop mechanism configured to reduce or prevent material flow through a main axial opening of the axial opening, the main axial opening being adjacent to the smaller diameter axial opening.

28. The target generator of claim 26, wherein the target material comprises tin, and the valve body of the cryovalve is made of molybdenum or a refractory metal, and the wire strands are made of tungsten or a refractory metal.

29. A method of controlling a fluid, comprising: freezing a target material within a smaller diameter axial opening of a valve body of a cryovial, thereby preventing the frozen target material from being axially extruded through a plurality of regions formed by strands of wire material located within a main axial opening of the valve body, the main axial opening having a diameter greater than the smaller diameter axial opening, when an axial pressure in the range of 10,000 PSI to 765,000 PSI is applied to the frozen target material; thawing the target material within the smaller diameter axial opening of the valve body of the cryovalve; as well as Once thawed, fluid is enabled to flow through one or more of the regions of the smaller diameter axial opening and the major axial opening of the valve body of the freeze valve.

30. The method of claim 29, wherein once thawed, the fluid is allowed to flow through the region between the strands of the wire extending laterally in the range of 2.0 mm to 0.5 mm at a conductivity of 0.03 L / s to 0.001 L / s.

31. The method of claim 29, wherein the one or more areas that enable the fluid to flow through the smaller diameter axial opening and the major axial opening of the valve body of the cryovalve include: A cleaning gas is enabled to flow from a gas source into and through the main axial opening.

32. The method of claim 31 further comprising, while enabling the purge gas to flow, applying pressure to the purge gas to push liquid target material present in and outside the major axial opening and the smaller diameter axial opening and back to a target material reservoir.

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