An ion beam ultra-precision shaping processing device and processing method thereof

Abstract

The invention discloses an ion beam ultra-precision shaping processing device and a processing method thereof, belonging to the technical field of ultra-precision processing. In order to solve the problem that dust will accumulate inside or at the edge of the nozzle, and the nozzle will be deformed due to collision, the ion beam will be blocked, and the shaping accuracy will be affected, an ion beam ultra-precision shaping processing device in the invention comprises a base and a mounting frame fixedly arranged on the base, a mounting plate is fixedly arranged on the mounting frame, a lifting assembly is fixedly arranged on the mounting plate, a rotating assembly is jointly arranged on the lifting assembly and an ion generator, a pair of detection assemblies and a pair of correction assemblies 1 are respectively fixedly arranged on the rotating assembly, and a correction assembly 2 is fixedly arranged on the detection assembly. The invention can correct the nozzle first when the nozzle is slightly bent or deformed, instead of directly replacing the nozzle. While maintaining high-precision processing, the utilization rate of the nozzle is also improved.

Description

Technical Field

[0001] The invention relates to the technical field of ultra-precision machining, and in particular to an ion beam ultra-precision shaping machining device and a machining method thereof. Background Art

[0002] The ion beam ultra-precision shaping processing device is a device that uses a high-energy ion beam to process and shape the workpiece. The specific principle is as follows: the ions generated by the ion source are accelerated to a high-energy state through an electric field or a magnetic field. The high-energy ions are ejected from the nozzle to the surface of the workpiece, which will knock out the atoms on the surface of the workpiece, causing the workpiece to partially melt or deform, thereby realizing the shaping and processing of the workpiece; using ion beams to shape and process workpieces has the advantages of high precision, good quality, fast speed and low cost. Therefore, it is often used for the processing and shaping of precision workpieces.

[0003] Chinese patent CN118357558B discloses a curved arm swinging five-axis ion beam ultra-precision shaping processing device, including a base, a workpiece clamping mechanism and an ion beam shaping mechanism; the workpiece clamping mechanism is used to clamp the workpiece; the ion beam shaping mechanism is used to install the ion source; the workpiece clamping mechanism and the ion beam shaping mechanism cooperate to realize the five-axis linkage of the ion source relative to the workpiece, so as to realize the normal processing of the shaped free-form surface of the workpiece by the ion source; the workpiece clamping mechanism at least includes a C-axis motion table for driving the workpiece to rotate with the vertical axis as the axis, and a B-axis motion table for driving the workpiece to rotate with the horizontal axis as the axis, which is arranged above the C-axis motion table through a connecting arm, and the connecting arm is a curved arm, and the B-axis motion table is installed on one side of the inner arc of the curved arm. This invention expands the processing range of ion beam shaping, avoids deformation of some moving axes due to excessive load affecting the processing accuracy, improves the dynamic performance of the device, and avoids excessive requirements on the travel of the moving axis.

[0004] Although the above-mentioned patent can improve the dynamic performance and processing accuracy of the device, there are still many factors that affect the ion beam ultra-precision shaping processing device. Among them, the nozzle of the ion beam ultra-precision shaping processing device will also have a great impact on the processing accuracy. First, after the equipment has been used for a long time, dust will accumulate inside or on the edge of the nozzle, and there will be obstruction during the ion beam injection process, which will affect the shaping accuracy. In addition, after the equipment has been running for a long time, there will be errors in the movement stroke or the nozzle will be bumped and deformed due to other reasons, which will also block the ion beam, thereby affecting the shaping accuracy.

[0005] In view of the above problems, an ion beam ultra-precision shaping processing device and a processing method thereof are proposed. Summary of the invention

[0006] The purpose of the present invention is to provide an ion beam ultra-precision shaping processing device and a processing method thereof. By adopting the present invention to work, the problems that dust will accumulate inside or on the edge of the nozzle after the equipment has been used for a long time, and obstruction will occur during the ion beam injection process, affecting the shaping accuracy, and the nozzle will be bumped and deformed due to errors in the movement stroke or other reasons after the equipment has been running for a long time, which will also obstruct the ion beam and affect the shaping accuracy.

[0007] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: an ion beam ultra-precision shaping processing device, comprising a base and a mounting frame fixedly arranged on the base, a multi-axis cantilever is also fixedly arranged on the base, a mounting plate is fixedly arranged on the mounting frame, a lifting assembly is fixedly arranged on the mounting plate, an ion generator is fixedly arranged on the lifting assembly, an output end of the ion generator is connected and fixedly connected to a nozzle, a rotating assembly is commonly arranged on the lifting assembly and the ion generator, a pair of detection assemblies and a pair of correction assemblies 1 are respectively fixedly arranged on the rotating assembly, a correction assembly 2 is fixedly arranged on the detection assembly, the detection assembly and the correction assembly 1 are staggered, and the two detection assemblies are symmetrically arranged, and the two correction assemblies 1 are symmetrically arranged;

[0008] A driven gear is rotatably sleeved on the circumferential outer wall at the lower end of the ion generator, and the detection component includes a mounting shell 1 fixedly mounted on the bottom surface of the driven gear and a slide rod 1 embedded and slidably mounted in the inner cavity of the mounting shell 1, wherein a load-bearing component 1 is fixedly mounted on the inner side wall of the lower end of one slide rod, and a load-bearing component 2 is fixedly mounted on the inner side wall of the lower end of the other slide rod, and the load-bearing component 2 includes an electric push rod 4 fixedly mounted on the inner side wall of the lower end of the slide rod, and a load-bearing platform 2 is fixedly mounted on the output end of the electric push rod 4;

[0009] The correction component 2 includes a protective shell fixedly installed on the bottom surface of the inner cavity of the load-bearing platform 2, a plurality of through grooves are opened on the side wall of the protective shell, a connecting rod is fixedly installed on the bottom wall of the inner cavity of the protective shell, a contact 3 is fixedly installed on the side wall of the lower end of the connecting rod, a top block is slidably installed in the inner cavity of the through groove, the top block and the connecting rod are elastically connected by a spring 4, an electric push rod 5 is fixedly installed on the bottom surface of the inner cavity of the protective shell, a top plate is slidably installed on the upper part of the electric push rod 5, a square plate is fixedly sleeved on the circumferential outer wall of the fixed section of the electric push rod 5, and a pair of electromagnets 3 are fixedly installed on the top surface of the square plate.

[0010] Furthermore, the lifting assembly includes an electric telescopic column vertically fixedly mounted on the mounting plate and a movable frame fixedly mounted on the output end of the electric telescopic column, a pair of limit members are fixedly mounted on the outer wall of the movable frame, and an ion generator is fixedly mounted through the two limit members.

[0011] Furthermore, the rotating component includes a motor fixedly mounted on the bottom surface of the limiter, the output end of the motor is fixedly connected to a driving gear, the driving gear is meshed with the driven gear, and the detection component and the correction component are both fixedly mounted on the bottom surface of the driven gear.

[0012] Furthermore, an electromagnet 1 is fixedly mounted on the top wall of the inner cavity of the mounting shell 1, a permanent magnet 1 is fixedly mounted on the top surface of the slide bar 1, the electromagnet 1 and the permanent magnet 1 are aligned, and the top wall of the inner cavity of the mounting shell 1 and the top surface of the slide bar 1 are elastically connected by a spring 1, a position sensor is fixedly mounted on the bottom surface of the mounting shell 1, detection heads are fixedly mounted on the inner side walls of the lower half of the two slide bars, a correction component 2 is fixedly mounted in the inner cavity of the load-bearing component 2, the load-bearing component 1 and the load-bearing component 1 are symmetrically arranged, and the load-bearing component 1 and the load-bearing component 1 can be interlocked with each other.

[0013] Furthermore, the detection head includes an electric push rod 1 fixedly mounted on the inner side wall of the lower half of the slide rod, a slideway is provided inside the extended section of the electric push rod 1, a thimble is slidably mounted in the inner cavity of the slideway, the side wall of the thimble is elastically connected to the side wall of the inner cavity of the slideway by a spring 2, a contact 1 is fixedly mounted on one end of the thimble close to the slideway, a contact 2 is fixedly mounted on the side wall of the inner cavity of the slideway, and the contact 1 and the contact 2 are aligned;

[0014] The correction component 1 includes a mounting shell 2 fixedly mounted on the bottom surface of the driven gear and a slide rod 2 embedded and slidably mounted in the inner cavity of the mounting shell 2, an electromagnet 2 is fixedly mounted on the top wall of the inner cavity of the mounting shell 2, a permanent magnet 2 is fixedly mounted on the top surface of the slide rod 2, the electromagnet 2 and the permanent magnet 2 are aligned, the top wall of the inner cavity of the mounting shell 2 and the top surface of the slide rod 2 are elastically connected by a spring 3, an electric push rod 2 is fixedly mounted on the inner side wall of the lower end of the slide rod 2, and a meniscus is fixedly mounted on the output end of the electric push rod 2.

[0015] Furthermore, the load-bearing component 1 includes an electric push rod 3 fixedly installed on the inner wall of the lower end of the sliding rod, and the output end of the electric push rod 3 is fixedly installed with a load-bearing platform 1, and a pair of plug-in rods are fixedly installed on the side wall of the load-bearing platform 1 facing the load-bearing component 2.

[0016] Furthermore, a pair of insertion holes are provided on the side wall of the load-bearing platform 2 facing the load-bearing platform 1, and the insertion rods are aligned with the insertion holes.

[0017] Furthermore, the electric push rod 5 comprises an electric push rod body, and a slide groove is provided inside the extended section of the electric push rod body;

[0018] The top plate includes a sliding column embedded and slidably installed in the inner cavity of the slide groove, the sliding column and the side wall of the inner cavity of the slide groove are elastically connected by a spring five, a plate body is fixedly installed on the upper end of the sliding column, a contact four is fixedly installed on the top surface of the plate body, and the contact three and the contact four are aligned, and a pair of permanent magnets three (930) are fixedly installed on the bottom surface of the plate body, and the permanent magnets three (930) and the electromagnets three (920) are aligned.

[0019] The present invention also proposes another technical solution: a processing method applied to an ion beam ultra-precision shaping processing device, comprising the following steps:

[0020] S1: During the interval of replacing the workpiece, the motor is started, and the motor drives the detection component to rotate as a whole through the driving gear and the driven gear. During the rotation process, the detection component detects the overall bending degree of the nozzle through the detection head;

[0021] S2: Determine whether the overall bending degree of the nozzle is qualified. If it is qualified, continue to replace the workpiece for shaping. If it is unqualified, stop replacing the workpiece and start the correction component 1 to correct the bending degree of the nozzle.

[0022] S3: After the correction work of the correction component 1 is completed, the overall bending degree of the nozzle is detected by the detection component. If it is qualified, the workpiece is replaced for shaping. If it is unqualified, the nozzle is replaced and then the workpiece is replaced, and the workpiece can be shaped.

[0023] S4: After the inspection work of the inspection component is completed, the correction component 2 is started to operate. If the edge of the ion beam outlet at the lower end of the nozzle does not deform inward, the motor is started, and the motor drives the inspection component and the correction component 2 to rotate through the driving gear and the driven gear to clean the dust inside the nozzle. If the edge of the ion beam outlet at the lower end of the nozzle deforms inward, the correction component 2 is used to reshape the deformed part;

[0024] S5: After the correction work of correction component 2 is completed, the correction effect is judged by whether contact 3 and contact 4 can contact normally. If contact 3 and contact 4 can contact normally, the nozzle correction effect is good and the nozzle can continue to be used. If contact 3 and contact 4 still cannot contact normally after correction, it means that the nozzle correction effect is poor and the nozzle should be replaced in time.

[0025] Compared with the prior art, the present invention has the following beneficial effects:

[0026] By setting up the rotating component, the detection component and the correction component one, not only can the nozzle be detected during the interval of replacing the workpiece to determine whether the nozzle is bent, but also when the nozzle is slightly bent, the nozzle can be corrected first instead of directly replacing the nozzle. While maintaining high-precision processing, the utilization rate of the nozzle is also improved; when the edge of the ion beam outlet at the lower end of the nozzle does not deform inward, the nozzle can be used normally, and the detection component is driven to rotate by the rotating component. During the rotation of the detection component, the top block on the correction component two is simultaneously driven to rotate to scrape off the dust on the inner wall of the nozzle, so as to prevent dust from accumulating inside or on the edge of the nozzle, which will cause obstruction during the ion beam injection process and affect the shaping accuracy; when the edge of the ion beam outlet at the lower end of the nozzle is deformed inward, the deformation is corrected by setting up the correction component two instead of directly replacing the nozzle. Similarly, while maintaining high-precision processing, the utilization rate of the nozzle is also improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0028] Figure 2 for Figure 1 A magnified image of point A;

[0029] Figure 3 for Figure 2 The enlarged view of point B;

[0030] Figure 4 It is a schematic diagram of the installation position of the ion generator of the present invention;

[0031] Figure 5 for Figure 4 Enlarged view of point C;

[0032] Figure 6 is a cross-sectional schematic diagram of the detection assembly of the present invention;

[0033] Figure 7 for Figure 6 The enlarged view of point D;

[0034] Figure 8 for Figure 6 The enlarged view of point E;

[0035] Fig. 9 for Figure 6 The enlarged view of point F;

[0036] Fig.10 is a cross-sectional schematic diagram of a correction component 1 of the present invention;

[0037] Fig.11 for Fig.10 The enlarged view of G;

[0038] Fig.12 is a cross-sectional schematic diagram of the correction component 2 of the present invention;

[0039] Fig.13 for Fig.12 Enlarged view of H;

[0040] Fig.14 Schematic diagram of the disassembly of the correction component 2 of the present invention Figure 1 ;

[0041] Fig.15 Schematic diagram of the disassembly of the correction component 2 of the present invention Figure 2 .

[0042] In the figure: 1, base; 2, mounting frame; 3, mounting plate; 4, lifting assembly; 41, electric telescopic column; 42, moving frame; 43, limiter; 5, ion generator; 6, nozzle; 7, rotating assembly; 71, motor; 72, driving gear; 73, driven gear; 8, detection assembly; 81, mounting shell 1; 82, slide bar 1; 83, detection head; 831, electric push rod 1; 832, slideway; 833, ejector pin; 834, spring 2; 835, contact 1; 836, contact 2; 84, load-bearing assembly 1; 841, electric push rod 3; 842, load-bearing platform 1; 843, plug rod; 85, position sensor; 86, electromagnet 1; 87, permanent magnet 1; 88, spring 1; 89, load-bearing Component two; 891, electric push rod four; 892, load-bearing platform two; 893, socket; 9, correction component two; 91, protective shell; 92, through slot; 93, connecting rod; 94, contact three; 95, top block; 96, spring four; 97, electric push rod five; 971, electric push rod body; 972, slide slot; 973, spring five; 98, top plate; 981, plate body; 982, slide column; 99, square plate; 920, electromagnet three; 930, permanent magnet three; 940, contact four; 10, correction component one; 101, mounting shell two; 102, slide rod two; 103, electric push rod two; 104, meniscus; 105, electromagnet two; 106, permanent magnet two; 107, spring three; 20, multi-axis cantilever. DETAILED DESCRIPTION

[0043] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0044] In order to solve the technical problem that after the equipment has been running for a long time, the nozzle 6 is deformed due to errors in the movement stroke or other reasons, which blocks the ion beam and affects the shaping accuracy, such as Figure 1 - Fig.15 As shown, the following preferred technical solutions are provided:

[0045] An ion beam ultra-precision shaping processing device includes a base 1 and a mounting frame 2 fixedly arranged on the base 1. The arrangement of the base 1 and the mounting frame 2 can support and fix a large number of parts. A multi-axis cantilever 20 is also fixedly arranged on the base 1. A fixture is fixedly installed at the far end of the multi-axis cantilever 20. Before the workpiece is shaped, the workpiece is first mounted on the fixture, and then the multi-axis cantilever 20 adjusts the workpiece to a suitable angle before the shaping process is performed. A mounting plate 3 is fixedly arranged on the mounting frame 2, a lifting component 4 is fixedly arranged on the mounting plate 3, an ion generator 5 is fixedly arranged on the lifting component 4, the mounting plate 3 has a fixing effect on the lifting component 4, and the lifting component 4 is used to adjust the height of the ion generator 5. Adjust to the optimal processing distance to maintain good processing accuracy and processing quality. The output end of the ion generator 5 is connected and fixedly connected to the nozzle 6. The high-energy ion beam in the ion generator 5 will be sprayed onto the surface of the workpiece through the nozzle 6, knocking out the atoms on the surface of the workpiece, causing the workpiece to be partially melted or deformed, thereby realizing the shaping and processing of the workpiece. The lifting component 4 and the ion generator 5 are jointly provided with a rotating component 7, and a pair of detection components 8 and a pair of correction components 10 are fixedly provided on the rotating component 7, respectively. A correction component 2 9 is fixedly provided on the detection component 8, and the detection component 8 and the correction component 10 are staggered, and the two detection components 8 are symmetrically arranged, and the two correction components 10 are symmetrically arranged.

[0046] The detection component 8 is used to detect whether the nozzle 6 as a whole is bent or deformed, and the correction component 10 is used to correct the bent and deformed nozzle 6. After a long period of use, the nozzle 6 is deformed due to errors in the movement stroke or other reasons, causing the edge of the ion beam outlet at the lower end of the nozzle 6 to deform inward, which will block the ion beam and affect the shaping accuracy. The correction component 2 9 is used to correct the inward deformed part. If it can be used normally after correction, the nozzle 6 will not be replaced. If it still cannot be used normally after correction, the nozzle 6 will be replaced. Through such a setting, when the nozzle 6 is slightly deformed due to collision or other factors, the nozzle 6 can be corrected first instead of directly replacing the nozzle 6, which can improve the utilization rate of the nozzle 6 and make the best use of it.

[0047] The lifting assembly 4 includes an electric telescopic column 41 vertically fixed on the mounting plate 3 and a movable frame 42 fixedly installed at the output end of the electric telescopic column 41. A pair of limit members 43 are fixedly installed on the outer wall of the movable frame 42. An ion generator 5 is fixedly installed on the two limit members 43. The two limit members 43 are used to fix the ion generator 5 to prevent the ion generator 5 from moving during operation and affecting the detection accuracy. The electric telescopic column 41 can drive the ion generator 5 to move in the vertical direction through the movable frame 42 and the limit members 43, and adjust the height of the ion generator 5 to the optimal processing distance to maintain good processing accuracy and processing quality.

[0048] The rotating assembly 7 includes a motor 71 fixedly mounted on the bottom surface of the limit member 43, the output end of the motor 71 is fixedly connected to a driving gear 72, a driven gear 73 is rotatably sleeved on the circumferential outer wall of the lower end of the ion generator 5, the driving gear 72 and the driven gear 73 are meshed and connected, the detection assembly 8 and the correction assembly 10 are both fixedly mounted on the bottom surface of the driven gear 73, when the detection assembly 8 is used to detect the nozzle 6, the motor 71 is started, and the motor 71 drives the detection assembly 8 to perform rotation detection on the nozzle 6 through the driving gear 72 and the driven gear 73, so as to improve the detection accuracy, when the edge of the ion beam outlet at the lower end of the nozzle 6 is deformed inward, the motor 71 is started, and the motor 71 drives the correction assembly 10 to rotate and correct the deformed part through the driving gear 72 and the driven gear 73, which is conducive to correcting the deformed part more evenly.

[0049] The detection component 8 includes a mounting shell 81 fixedly mounted on the bottom surface of the driven gear 73 and a slide bar 82 embedded and slidably mounted in the inner cavity of the mounting shell 81. An electromagnet 86 is fixedly mounted on the top wall of the inner cavity of the mounting shell 81, and a permanent magnet 87 is fixedly mounted on the top surface of the slide bar 82. The electromagnet 86 and the permanent magnet 87 are aligned. When the electromagnet 86 is energized, the polarities of the electromagnet 86 and the permanent magnet 87 are opposite, so that the slide bar 82 slides downward in the inner cavity of the mounting shell 81, and the top wall of the inner cavity of the mounting shell 81 and the top surface of the slide bar 82 are elastically connected by a spring 88. After the electromagnet 86 is powered off, the repulsive force between the electromagnet 86 and the permanent magnet 87 disappears. Under the elastic force of the spring 88, the slide bar 82 can be reset. A position sensor 85 is fixedly mounted on the bottom surface of the mounting shell 81 for judging whether the slide bar is in the right position or not. The movement stroke of rod 1 82 is to ensure that it runs in place. The inner walls of the lower halves of the two sliding rods 82 are fixedly installed with detection heads 83, which are used to detect whether the nozzle 6 as a whole is bent or deformed. A load-bearing component 1 84 is fixedly installed on the inner wall of the lower end of one of the sliding rods 82, and a load-bearing component 2 89 is fixedly installed on the inner wall of the lower end of the other sliding rod 82. A correction component 29 is fixedly installed in the inner cavity of the load-bearing component 2 89. The load-bearing component 1 84 and the load-bearing component 1 84 are symmetrically arranged, and the load-bearing component 1 84 and the load-bearing component 1 84 can be interlocked with each other. When the edge of the ion beam outlet at the lower end of the nozzle 6 is deformed inward, when the correction component 29 is used to correct the deformation, the correction component 29 will generate a downward reaction force, and the load-bearing component 1 84 and the load-bearing component 1 84 are used to bear the reaction force, thereby ensuring that the correction work can be carried out normally.

[0050] The detection head 83 includes an electric push rod 831 fixedly mounted on the inner wall of the lower half of the slide rod 82, a slideway 832 is provided inside the extended section of the electric push rod 831, a ejector pin 833 is slidably mounted in the inner cavity of the slideway 832, the side wall of the ejector pin 833 and the side wall of the inner cavity of the slideway 832 are elastically connected by a spring 834, a contact 835 is fixedly mounted on one end of the ejector pin 833 close to the slideway 832, a contact 836 is fixedly mounted on the side wall of the inner cavity of the slideway 832, and the contact 835 and the contact 836 are aligned.

[0051] The correction component 10 includes a mounting shell 101 fixedly mounted on the bottom surface of the driven gear 73 and a slide rod 102 embedded and slidably mounted in the inner cavity of the mounting shell 101. An electromagnet 105 is fixedly mounted on the top wall of the inner cavity of the mounting shell 101, and a permanent magnet 106 is fixedly mounted on the top surface of the slide rod 102. The electromagnet 105 and the permanent magnet 106 are aligned with each other. The top wall of the inner cavity of the mounting shell 101 and the top surface of the slide rod 102 are elastically connected by a spring 3 107. An electric push rod 103 is fixedly mounted on the inner side wall of the lower end of the slide rod 102, and a meniscus 104 is fixedly mounted on the output end of the electric push rod 103.

[0052] Specifically, after the equipment has been used for a long time, the nozzle 6 is deformed due to errors in the movement stroke or other reasons, so that the nozzle 6 is bent as a whole, which will affect the running trajectory of the ion beam and further affect the accuracy of the shaping process. In order to avoid this problem, after a shaping process is completed, the electric push rod 831 is started to drive the ejector pin 833 to move toward the direction close to the nozzle 6 until the ejector pin 833 contacts the outer wall of the nozzle 6, and the electric push rod 831 stops extending. At this time, the motor 71 is started, and the motor 71 drives the detection component 8 to rotate as a whole through the driving gear 72 and the driven gear 73. During the rotation of the detection component 8, the electromagnet 86 is energized, so that the polarity between the electromagnet 86 and the permanent magnet 87 is opposite, thereby making The slide bar 82 slides downward in the inner cavity of the mounting shell 81. The downward sliding action of the slide bar 82 is combined with the rotation action, so that the slide bar 82 drives the ejector pin 833 on the detection head 83 to slide downward in a spiral form, and performs a full-scale detection of the overall curvature of the nozzle 6. If the detection is normal, the motor 71 is turned off to stop the detection component 8 from rotating, and the electric push rod 831 is started to drive the ejector pin 833 to reset, and the electromagnet 86 is powered off. The repulsive force between the electromagnet 86 and the permanent magnet 87 disappears. Under the elastic force of the spring 88, the slide bar 82 can reset upward. After the reset action is completed, the next shaping process is performed. The entire detection process takes a short time and can be completed within the interval time of replacing the workpiece, which will not affect the processing efficiency.

[0053] If during the detection process, contact 1 835 contacts contact 2 836, it is determined that the overall curvature of the nozzle 6 has reached a level that affects the processing accuracy. At this time, the motor 71 is turned off to stop the correction component 10 from rotating, and the repulsive force between the electromagnet 2 105 and the permanent magnet 2 106 is used to push the slide bar 2 102, the electric push rod 2 103 and the meniscus 104 downward until the meniscus 104 is aligned with the height of the nozzle 6. At this time, the electric push rods 2 103 on both sides are started, and the menisci 104 on both sides will move synchronously in the direction close to the nozzle 6. Since the shape of the two menisci 104 after closing is consistent with the shape of the nozzle 6, the thrust of the electric push rod 2 103 is Under the action, two menisci 104 are used to shape the nozzle 6. After shaping the same position for a period of time, the electric push rod 2 103 drives the meniscus 104 to leave the nozzle 6, and then the motor 71 is started. The motor 71 drives the correction component 10 to rotate as a whole to an appropriate angle through the active gear 72 and the driven gear 73 and then stops. The electric push rod 2 103 is started again to push the meniscus 104 to shape the nozzle 6. This reciprocating process is beneficial to uniformly correct the bending part of the nozzle 6. After multiple corrections are completed, the corrected nozzle 6 is tested by the detection component 8. If the detection technical results are qualified, the nozzle 6 continues to be used. If the detection fails, the nozzle 6 is replaced.

[0054] Through the above-mentioned arrangement, not only can the nozzle 6 be inspected during the interval of replacing the workpiece to determine whether the nozzle 6 is bent, but also the nozzle 6 can be corrected first when the nozzle 6 is slightly bent, instead of directly replacing the nozzle 6. While maintaining high-precision processing, the utilization rate of the nozzle 6 is also improved.

[0055] In order to solve the technical problem that dust will accumulate inside or on the edge of the nozzle 6, and the edge of the ion beam outlet at the lower end of the nozzle 6 will deform inward due to collision, so that the ion beam will be blocked during injection, such as Figure 3 - Fig.15 As shown, the following preferred technical solutions are provided:

[0056] The load-bearing component 84 includes an electric push rod 3 841 fixedly mounted on the inner side wall of the lower end of the slide rod 82, a load-bearing platform 1 842 is fixedly mounted on the output end of the electric push rod 3 841, and a pair of plug rods 843 are fixedly mounted on the side wall of the load-bearing platform 842 facing the load-bearing component 2 89.

[0057] The load-bearing component 2 89 includes an electric push rod 4 891 fixedly mounted on the inner wall of the lower end of the slide rod 1 82, and a load-bearing platform 2 892 is fixedly mounted on the output end of the electric push rod 4 891. A pair of sockets 893 are provided on the side wall of the load-bearing platform 2 892 facing the load-bearing platform 1 842, and the plug rod 843 is aligned with the socket 893.

[0058] The correction component 29 includes a protective shell 91 fixedly mounted on the bottom surface of the inner cavity of the load-bearing platform 2 892, a plurality of through grooves 92 are opened on the side wall of the protective shell 91, a connecting rod 93 is fixedly mounted on the bottom wall of the inner cavity of the protective shell 91, a contact 3 94 is fixedly mounted on the side wall of the lower end of the connecting rod 93, a top block 95 is slidably mounted in the inner cavity of the through groove 92, the top block 95 and the connecting rod 93 are elastically connected by a spring 4 96, an electric push rod 5 97 is fixedly mounted on the bottom surface of the inner cavity of the protective shell 91, a top plate 98 is slidably mounted on the upper surface of the electric push rod 5 97, a square plate 99 is fixedly sleeved on the circumferential outer wall of the fixed section of the electric push rod 5 97, and a pair of electromagnets 3 920 are fixedly mounted on the top surface of the square plate 99.

[0059] The electric push rod 5 97 includes an electric push rod body 971, and a slide groove 972 is opened inside the extended section of the electric push rod body 971.

[0060] The top plate 98 includes a sliding column 982 which is embedded and slidably installed in the inner cavity of the slide groove 972. The sliding column 982 is elastically connected to the side wall of the inner cavity of the slide groove 972 through a spring five 973. A plate body 981 is fixedly installed on the upper end of the sliding column 982. A contact four 940 is fixedly installed on the top surface of the plate body 981. The contact three 94 is aligned with the contact four 940. A pair of permanent magnet three 930 is fixedly installed on the bottom surface of the plate body 981. The permanent magnet three 930 is aligned with the electromagnet three 920.

[0061] Specifically, after a long period of use, the nozzle 6 is deformed due to errors in the movement stroke or other reasons, causing the edge of the ion beam outlet at the lower end of the nozzle 6 to deform inward, which will block the ion beam and affect the shaping accuracy. In order to avoid this situation, after a shaping operation is completed, the motor 71 is started, and the motor 71 drives the detection component 8 to rotate as a whole through the driving gear 72 and the driven gear 73. During the rotation, the detection component 8 detects the overall bending degree of the nozzle 6 through the detection head 83. When the detection component 8 is completed, the repulsive force between the electromagnet 86 and the permanent magnet 87 causes the slide bar 82 to rotate. Slide downward to the maximum distance. At this time, start the electric push rod four 891 and the electric push rod three 841 at the same time, so that the load-bearing platform one 842 and the load-bearing platform two 892 are close to each other until the insertion rod 843 is inserted into the inner cavity of the socket 893, so that the load-bearing platform one 842 and the load-bearing platform two 892 are interlocked as a whole. At this time, the electromagnet one 86 is powered off, and the repulsive force between the electromagnet one 86 and the permanent magnet one 87 disappears. Under the elastic force of the spring one 88, the two sliding rods one 82 can be reset upward, and can synchronously drive the load-bearing component one 84, the load-bearing component two 89 and the correction component two 9 to move upward. Since the diameter of the correction component two 9 is smaller than the inner diameter of the nozzle 6, the correction component two 9 will be inserted into the inside of the nozzle 6.

[0062] Case 1: When the correction component 2 9 is successfully inserted into the interior of the nozzle 6, the electromagnet 3 920 is energized, and a repulsive force is generated between the electromagnet 3 920 and the permanent magnet 3 930, so that the top plate 98 as a whole slides upward in the inner cavity. During the sliding process of the top plate 98, the plate body 981 will push the top block 95 outward. When the outer walls of several top blocks 95 are in contact with the inner wall of the nozzle 6, the contact point 3 94 is in contact with the contact point 4 940, indicating that the movement of the plate body 981 is not hindered, and further indicating that the lower end of the nozzle 6 There is no inward deformation at the edge of the ion beam outlet, and the nozzle 6 can be used normally. At this time, the motor 71 is started, and the motor 71 drives the detection component 8 to rotate through the driving gear 72 and the driven gear 73. During the rotation of the detection component 8, the correction component 2 9 will be driven to rotate synchronously. During the rotation of the correction component 2 9, the dust accumulated on the inner wall of the nozzle 6 will be scraped off through the top block 95 to prevent dust from accumulating inside or on the edge of the nozzle 6, which will cause obstruction during the ion beam injection process and affect the shaping accuracy.

[0063] Case 2: When the correction component 2 9 is successfully inserted into the interior of the nozzle 6, the electromagnet 3 920 is energized in the same way, and a repulsive force is generated between the electromagnet 3 920 and the permanent magnet 3 930, so that the top plate 98 slides upward in the inner cavity as a whole. During the sliding process of the top plate 98, the plate body 981 will push the top block 95 to the outside. When one of the top blocks 95 is stuck, the plate body 981 cannot move upward, which will affect the movement of the plate body 981, and the contact point 3 94 and the contact point 4 940 cannot contact each other. It can be judged that the edge of the ion beam outlet at the lower end of the nozzle 6 is deformed inwardly. At this time, the electromagnet 3 920 is powered off, and then under the elastic force of the spring 5 973, the top plate 98 returns to its original position, and then the electric push rod 5 97 is started to drive the top plate 98 to move upward, and the top block 95 applies a greater force, and uses the top block 95 to extrude the deformed part. After a period of extrusion, the electric push rod five 97 drives the top plate 98 to reset, and the top block 95 moves toward the inside of the protective shell 91 under the elastic force of the spring four 96, and then starts the motor 71. The motor 71 drives the detection component 8 to rotate through the active gear 72 and the driven gear 73. During the rotation of the detection component 8, the correction component 2 9 will be driven to rotate synchronously. When the correction component 2 9 rotates to a suitable angle, the motor 71 stops rotating. At this time, the electric push rod five 97 is started again to drive the top plate 98 to move upward, and a greater force is applied to the top block 95. The top block 95 is used to extrude the inner wall of the nozzle 6. This reciprocating process can realize rotational shaping, which can evenly shape the deformed part, which is conducive to restoring the nozzle 6 to a good state.

[0064] Through the above arrangement, the inward deformed portion of the edge of the ion beam outlet at the lower end of the nozzle 6 can be corrected during the interval of replacing the workpiece, rather than directly replacing the nozzle 6. While maintaining high-precision processing, the utilization rate of the nozzle 6 is also improved.

[0065] After the correction work of the inwardly deformed part at the edge of the ion beam outlet at the lower end of the nozzle 6 is completed, the correction effect is judged by whether the contact three 94 and the contact four 940 can contact normally. If the contact three 94 and the contact four 940 can contact normally, the correction effect of the nozzle 6 is good and can continue to be used. If the contact three 94 and the contact four 940 still cannot contact normally after correction, it means that the correction effect of the nozzle 6 is poor and it should be replaced in time.

[0066] In order to better explain the above embodiment, another embodiment is proposed, a processing method of an ion beam ultra-precision shaping processing device, comprising the following steps:

[0067] Step 1: During the interval of replacing the workpiece, the motor 71 is started, and the motor 71 drives the detection assembly 8 to rotate as a whole through the driving gear 72 and the driven gear 73. During the rotation process, the detection assembly 8 detects the overall bending degree of the nozzle 6 through the detection head 83;

[0068] Step 2: Determine whether the overall bending degree of the nozzle 6 is qualified. If it is qualified, continue to replace the workpiece for shaping. If it is unqualified, suspend the workpiece replacement and start the correction component 10 to correct the bending degree of the nozzle 6.

[0069] Step 3: After the correction work of the correction component 10 is completed, the overall bending degree of the nozzle 6 is detected by the detection component 8. If it is qualified, the workpiece is replaced for shaping. If it is unqualified, the nozzle 6 is replaced and then the workpiece is replaced, and the workpiece can be shaped;

[0070] Step 4: After the detection work of the detection component 8 is completed, the correction component 2 9 is started to operate. If the edge of the ion beam outlet at the lower end of the nozzle 6 does not deform inward, the motor 71 is started. The motor 71 drives the detection component 8 and the correction component 2 9 to rotate through the driving gear 72 and the driven gear 73 to clean the dust accumulated on the inside of the nozzle 6. If the edge of the ion beam outlet at the lower end of the nozzle 6 deforms inward, the correction component 2 9 is used to reshape the deformed part;

[0071] Step 5: After the correction work of the correction component 2 9 is completed, the correction effect is judged by whether the contact 3 94 and the contact 4 940 can contact normally. If the contact 3 94 and the contact 4 940 can contact normally, the correction effect of the nozzle 6 is good and the nozzle 6 can continue to be used. If the contact 3 94 and the contact 4 940 still cannot contact normally after correction, it means that the correction effect of the nozzle 6 is poor and the nozzle 6 should be replaced in time.

[0072] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.

[0073] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. An ion beam ultra-precision shaping processing device, comprising a base (1) and a mounting frame (2) fixedly mounted on the base (1), a multi-axis cantilever (20) also fixedly mounted on the base (1), a mounting plate (3) fixedly mounted on the mounting frame (2), a lifting assembly (4) fixedly mounted on the mounting plate (3), an ion generator (5) fixedly mounted on the lifting assembly (4), an output end of the ion generator (5) being connected and fixedly connected to a nozzle (6), characterized in that: The lifting assembly (4) and the ion generator (5) are jointly provided with a rotating assembly (7), a pair of detection assemblies (8) and a pair of correction assemblies (10) are respectively fixedly provided on the rotating assembly (7), a correction assembly (9) is fixedly provided on the detection assembly (8), the detection assembly (8) and the correction assembly (1) are arranged in an alternating manner, and the two detection assemblies (8) are arranged in symmetrical positions, and the two correction assemblies (10) are arranged in symmetrical positions; A driven gear (73) is rotatably sleeved on the circumferential outer wall at the lower end of the ion generator (5), and the detection component (8) includes a mounting shell (81) fixedly mounted on the bottom surface of the driven gear (73) and a slide rod (82) embedded and slidably mounted in the inner cavity of the mounting shell (81), wherein a load-bearing component (84) is fixedly mounted on the inner side wall of the lower end of one slide rod (82), and a load-bearing component (89) is fixedly mounted on the inner side wall of the lower end of the other slide rod (82), and the load-bearing component (89) includes an electric push rod (891) fixedly mounted on the inner side wall of the lower end of the slide rod (82), and a load-bearing platform (892) is fixedly mounted on the output end of the electric push rod (891); The correction component 2 (9) comprises a protective shell (91) fixedly mounted on the bottom surface of the inner cavity of the load-bearing platform 2 (892), a plurality of through slots (92) are provided on the side wall of the protective shell (91), a connecting rod (93) is fixedly mounted on the bottom wall of the inner cavity of the protective shell (91), a contact 3 (94) is fixedly mounted on the side wall of the lower end of the connecting rod (93), a top block (95) is slidably mounted in the inner cavity of the through slot (92), the top block (95) and the connecting rod (93) are elastically connected via a spring 4 (96), an electric push rod 5 (97) is fixedly mounted on the bottom surface of the inner cavity of the protective shell (91), a top plate (98) is slidably mounted on the upper surface of the electric push rod 5 (97), a square plate (99) is fixedly sleeved on the circumferential outer wall of the fixed section of the electric push rod 5 (97), and a pair of electromagnets 3 (920) are fixedly mounted on the top surface of the square plate (99).

2. The ion beam ultra-precision shaping processing device according to claim 1, characterized in that: The lifting assembly (4) comprises an electric telescopic column (41) fixedly mounted vertically on the mounting plate (3) and a movable frame (42) fixedly mounted at the output end of the electric telescopic column (41); a pair of stoppers (43) are fixedly mounted on the outer side wall of the movable frame (42); and an ion generator (5) is fixedly mounted through the two stoppers (43).

3. The ion beam ultra-precision shaping processing device according to claim 2, characterized in that: The rotating assembly (7) comprises a motor (71) fixedly mounted on the bottom surface of the stopper (43); an output end of the motor (71) is fixedly connected to a driving gear (72); the driving gear (72) is meshingly connected to a driven gear (73); and the detection assembly (8) and the correction assembly 1 (10) are both fixedly mounted on the bottom surface of the driven gear (73).

4. The ion beam ultra-precision shaping processing device according to claim 3, characterized in that: An electromagnet (86) is fixedly mounted on the top wall of the inner cavity of the mounting shell (81), and a permanent magnet (87) is fixedly mounted on the top surface of the slide bar (82). The electromagnet (86) and the permanent magnet (87) are aligned, and the top wall of the inner cavity of the mounting shell (81) and the top surface of the slide bar (82) are elastically connected via a spring (88). A position sensor (85) is fixedly mounted on the bottom surface of the mounting shell (81), and detection heads (83) are fixedly mounted on the inner side walls of the lower parts of the two slide bars (82). A correction component (9) is fixedly mounted in the inner cavity of the load-bearing component (89). The load-bearing components (84) and the load-bearing components (84) are symmetrically arranged, and the load-bearing components (84) and the load-bearing components (84) can be interlocked with each other.

5. The ion beam ultra-precision shaping processing device according to claim 4, characterized in that: The detection head (83) includes an electric push rod (831) fixedly mounted on the inner side wall of the lower half of the slide rod (82); a slideway (832) is provided inside the extended section of the electric push rod (831); a push pin (833) is slidably mounted in the inner cavity of the slideway (832); the side wall of the push pin (833) and the side wall of the inner cavity of the slideway (832) are elastically connected via a spring (834); a contact point (835) is fixedly mounted on one end of the push pin (833) close to the slideway (832); a contact point (836) is fixedly mounted on the side wall of the inner cavity of the slideway (832); and the contact points (835) and (836) are aligned with each other; The correction component 1 (10) comprises a mounting shell 2 (101) fixedly mounted on the bottom surface of the driven gear (73) and a slide rod 2 (102) embedded and slidably mounted in the inner cavity of the mounting shell 2 (101); an electromagnet 2 (105) is fixedly mounted on the top wall of the inner cavity of the mounting shell 2 (101); a permanent magnet 2 (106) is fixedly mounted on the top surface of the slide rod 2 (102); the electromagnet 2 (105) and the permanent magnet 2 (106) are aligned; the top wall of the inner cavity of the mounting shell 2 (101) and the top surface of the slide rod 2 (102) are elastically connected via a spring 3 (107); an electric push rod 2 (103) is fixedly mounted on the inner side wall of the lower end of the slide rod 2 (102); and a meniscus (104) is fixedly mounted on the output end of the electric push rod 2 (103).

6. The ion beam ultra-precision shaping processing device according to claim 5, characterized in that: The load-bearing component 1 (84) includes an electric push rod 3 (841) fixedly mounted on the inner side wall of the lower end of the slide rod 1 (82), and a load-bearing platform 1 (842) is fixedly mounted on the output end of the electric push rod 3 (841), and a pair of plug rods (843) are fixedly mounted on the side wall of the load-bearing platform 1 (842) facing the load-bearing component 2 (89).

7. The ion beam ultra-precision shaping processing device according to claim 6, characterized in that: A pair of insertion holes (893) are provided on the side wall of the second load-bearing platform (892) facing the first load-bearing platform (842), and the insertion rods (843) are aligned with the insertion holes (893).

8. The ion beam ultra-precision shaping processing device according to claim 7, characterized in that: The electric push rod five (97) comprises an electric push rod body (971), and a slide groove (972) is provided inside the extended section of the electric push rod body (971); The top plate (98) comprises a slide post (982) embedded and slidably mounted in the inner cavity of the slide groove (972); the slide post (982) and the side wall of the inner cavity of the slide groove (972) are elastically connected via a spring five (973); a plate body (981) is fixedly mounted on the upper end of the slide post (982); a contact point four (940) is fixedly mounted on the top surface of the plate body (981); the contact point three (94) and the contact point four (940) are aligned; and a pair of permanent magnets three (930) are fixedly mounted on the bottom surface of the plate body (981); the permanent magnets three (930) and the electromagnets three (920) are aligned.

9. A processing method for an ion beam ultra-precision shaping processing device according to claim 8, characterized in that: The steps include: S1: During the interval between workpiece replacement, the motor (71) is started, and the motor (71) drives the detection component (8) to rotate as a whole through the driving gear (72) and the driven gear (73). During the rotation process, the detection component (8) detects the overall bending degree of the nozzle (6) through the detection head (83); S2: determining whether the overall bending degree of the nozzle (6) is qualified; if qualified, continuing to replace the workpiece for shaping processing; if unqualified, suspending the workpiece replacement and starting the correction component 1 (10) to correct the bending degree of the nozzle (6); S3: After the correction work of the correction component 1 (10) is completed, the overall bending degree of the nozzle (6) is detected by the detection component (8). If it is qualified, the workpiece is replaced for shaping. If it is unqualified, the nozzle (6) is replaced and then the workpiece is replaced, and the workpiece can be shaped. S4: After the detection work of the detection component (8) is completed, the correction component 2 (9) is started to operate. If the edge of the ion beam outlet at the lower end of the nozzle (6) does not deform inwardly, the motor (71) is started. The motor (71) drives the detection component (8) and the correction component 2 (9) to rotate through the driving gear (72) and the driven gear (73) to clean the dust accumulated on the inside of the nozzle (6). If the edge of the ion beam outlet at the lower end of the nozzle (6) deforms inwardly, the correction component 2 (9) is used to reshape the deformed part; S5: After the correction work of the correction component 2 (9) is completed, the correction effect is judged by whether the contact 3 (94) and the contact 4 (940) can contact normally. If the contact 3 (94) and the contact 4 (940) can contact normally, the correction effect of the nozzle (6) is good and the nozzle (6) can continue to be used. If the contact 3 (94) and the contact 4 (940) still cannot contact normally after the correction, it means that the correction effect of the nozzle (6) is poor and the nozzle (6) should be replaced in time.

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