Wafer processing unit and wafer processing equipment

Abstract

The embodiment of the invention provides an auxiliary driving device, a wafer processing unit and wafer processing equipment. Wherein the auxiliary driving device comprises a motor; the clutch wheel is connected to the output end of a rotating shaft of the motor, can move in the axial direction of the rotating shaft and is used for being connected with or separated from a driving wheel of a speed reducer in the wafer processing equipment; the driving wheel is also meshed with an output wheel of a driving motor of the speed reducer; and the power mechanism is connected with the clutch wheel and used for controlling the clutch wheel to be meshed with the driving wheel when the driving motor fails and controlling the clutch wheel to be separated from the driving wheel when the driving motor is normal. According to the wafer processing unit, when the driving motor cannot provide power for the speed reducer, the speed reducer can be driven by the motor so as to drive the polishing head assembly to perform station switching and posture adjustment, so that the convenience of maintenance or repair of the wafer processing unit is improved, the downtime is shortened, the production efficiency is improved, and the production loss caused by downtime is reduced.

Description

Technical Field

[0001] The embodiments of the present application relate to the field of semiconductor processing technology, and in particular, to an auxiliary drive device, a wafer processing unit, and a wafer processing equipment. Background Art

[0002] In the field of semiconductor processing, wafer processing equipment is mainly used to remove excess materials on the surface of wafers and other components through chemical mechanical polishing (CMP) technology, so that the wafer surface is highly flat to facilitate subsequent processes.

[0003] The current single-plate multi-head wafer processing equipment is equipped with two or more polishing heads, which can control some polishing heads to perform polishing at the polishing table, while allowing other polishing heads to work at other stations (such as the loading and unloading table), thereby increasing the WPH (Wafer Per Hour) of the wafer processing equipment.

[0004] However, at present, single-disk multi-head wafer processing equipment usually uses a motor with a large speed ratio reducer to drive the polishing heads to rotate in conjunction for station switching. This high speed ratio structure makes it difficult to switch stations or adjust postures when the motor cannot provide power, and it takes a long time to maintain and troubleshoot. Summary of the invention

[0005] In view of this, embodiments of the present application provide an auxiliary driving device, a wafer processing unit and a wafer processing equipment to at least partially solve the above problems.

[0006] According to a first aspect of an embodiment of the present application, an auxiliary drive device is provided for wafer processing equipment, the device comprising: a motor; a clutch wheel connected to the output end of the motor's rotating shaft and movable along the axial direction of the rotating shaft, for connecting or disconnecting with a drive wheel of a reducer in the wafer processing equipment; the drive wheel is also connected to an output wheel of a drive motor for driving the reducer; a power mechanism connected to the clutch wheel, for controlling the clutch wheel to be connected to the drive wheel when the drive motor fails, and controlling the clutch wheel to be separated from the drive wheel when the drive motor is normal.

[0007] Furthermore, the auxiliary drive device also includes: a control mechanism connected to the motor, used to start the motor when the drive motor fails, and stop the motor when the drive motor is normal; the control mechanism is also connected to the power mechanism, used to control the drive mechanism before starting the motor, so that the clutch wheel is connected and engaged with the drive wheel.

[0008] Furthermore, the auxiliary drive device further includes: an electromagnetic valve connected to the control mechanism and the motor, wherein the electromagnetic valve delays action after receiving a command from the control mechanism to start the motor, so as to start the motor after the clutch wheel and the drive wheel are connected.

[0009] Furthermore, in the auxiliary drive device, the control mechanism is also used to control the driving of the power mechanism after stopping the motor so as to separate the clutch wheel from the driving wheel.

[0010] Furthermore, the auxiliary drive device also includes: a transmission wheel, which is placed on the side of the clutch wheel away from the motor and coaxially arranged with the clutch wheel, the clutch wheel is connected to the drive wheel through the transmission wheel, and the clutch wheel moves along the axial direction of the rotating shaft to connect or disconnect with the transmission wheel.

[0011] Furthermore, in the above-mentioned auxiliary drive device, the power mechanism includes: a connecting component, connected to the clutch wheel, used to apply a connecting force to the clutch wheel so that the clutch wheel moves toward the direction of the transmission wheel to connect with the transmission wheel; a separating component, connected to the clutch wheel, used to drive the clutch wheel to separate from the transmission wheel when the connecting component stops applying the connecting force; a bearing component, fixedly connected to the rotating shaft of the motor and placed between the motor and the clutch wheel, and the connecting component and the separating component are mounted on the bearing component.

[0012] Furthermore, in the above auxiliary drive device, the connecting assembly includes: a cylinder, which is installed on the bearing component, and the piston output end of the cylinder is connected to the clutch wheel, which is used to push the clutch wheel to move and connect with the transmission wheel when gas is introduced.

[0013] Furthermore, in the above-mentioned auxiliary drive device, the connecting component includes: a coil, which is arranged inside one of the clutch wheel and the transmission wheel, and the other of the clutch wheel and the transmission wheel is a magnetic wheel; a power supply, which is installed on the bearing component, and the power supply is used to supply power to the coil so that the clutch wheel and the transmission wheel rotate synchronously through magnetic attraction.

[0014] Furthermore, in the above-mentioned auxiliary drive device, the separation component includes: an elastic member, which is placed between the load-bearing component and the clutch wheel, and one end of the elastic member is connected to the load-bearing component, and the other end is connected to the clutch wheel; the elastic member is in a stretched state when the connecting component applies a connecting force to the clutch wheel; the elastic member is used to separate the clutch wheel from the transmission wheel by relying on the rebound force when the connecting component stops applying a connecting force to the clutch wheel.

[0015] Furthermore, in the above-mentioned auxiliary drive device, the separation component includes: an elastic member, which is placed between the clutch wheel and the transmission wheel, and the elastic member is in a compressed state when the connecting component applies a connecting force to the clutch wheel; the elastic member is used to separate the clutch wheel from the transmission wheel by relying on the rebound force when the connecting component stops applying the connecting force to the clutch wheel.

[0016] Furthermore, in the above-mentioned auxiliary drive device, one end of the elastic member abuts against the clutch wheel, and the other end abuts against the transmission wheel; or, one end of the elastic member is connected to one of the clutch wheel and the transmission wheel, and the other end abuts against the other one.

[0017] Furthermore, in the auxiliary drive device, the elastic member is one or more, and when there are two or more elastic members, they are evenly distributed around the axis of the clutch wheel.

[0018] Furthermore, in the above-mentioned auxiliary drive device, the transmission wheel is a transmission gear, and the driving wheel is a driving gear; the circumferential outer edge of the transmission gear is provided with meshing teeth for meshing with the driving gear; the end surface of the transmission wheel facing the clutch wheel is provided with a first connecting member, and the end surface of the clutch wheel facing the transmission wheel is provided with a second connecting member, and the first connecting member can be connected or separated from the second connecting member; the clutch wheel and the transmission wheel are connected or separated through the first connecting member and the second connecting member.

[0019] Furthermore, in the above auxiliary drive device, the first connecting member is a first convex tooth protruding from the end surface of the transmission gear, and the second connecting member is a second convex tooth protruding from the end surface of the clutch wheel, and the first convex tooth can be engaged with or disengaged from the second convex tooth.

[0020] Furthermore, in the above-mentioned auxiliary drive device, one of the first connecting member and the second connecting member is a plug-in member, and the other of the first connecting member and the second connecting member is a plug-in slot. When the clutch wheel moves along the axial direction, the plug-in member can be plugged into or separated from the plug-in slot.

[0021] Furthermore, in the above auxiliary driving device, the plug-in slot is in an arc shape centered on the axis of the clutch wheel or the transmission wheel.

[0022] Furthermore, in the above auxiliary driving device, the number of the first connecting member is at least one or more; correspondingly, the number of the second connecting member is at least one or more.

[0023] Furthermore, the auxiliary drive device further includes: a telescopic component, through which the clutch wheel is connected to the output end of the motor shaft, and the telescopic component is used to drive the clutch wheel to move along the axial direction of the motor.

[0024] Furthermore, in the above auxiliary drive device, the telescopic assembly includes: a sleeve; a telescopic rod, which is telescopically sleeved in the sleeve; one of the sleeve and the telescopic rod is connected to the output end of the motor shaft, and the other one is connected to the clutch wheel.

[0025] Furthermore, in the above auxiliary drive device, the motor is a pneumatic motor.

[0026] According to the second aspect of an embodiment of the present application, a wafer processing unit is provided, which includes a drive motor, a reducer connected to the drive motor, a swivel support mechanism connected to the reducer, at least two polishing head assemblies connected to the swivel support mechanism, and any one of the above-mentioned auxiliary drive devices.

[0027] Furthermore, the above-mentioned wafer processing unit also includes: a driven wheel, which is installed on the output shaft of the driving motor, and the transmission wheel in the auxiliary driving device is connected to the driven wheel, and the driven wheel is used to drive the output wheel and then drive the driving wheel of the reducer to rotate.

[0028] Furthermore, in the above-mentioned wafer processing unit, the polishing head components are evenly distributed with the rotating shaft of the rotary support mechanism as the center.

[0029] According to a third aspect of an embodiment of the present application, a wafer processing device is provided, which includes a main body, a polishing plate mounted on the main body, a loading table, a trimmer and a liquid supply arm, and any one of the above-mentioned wafer processing units.

[0030] Since the auxiliary driving device has the above-mentioned effects, the wafer processing unit and wafer processing equipment having the auxiliary driving device have corresponding technical effects.

[0031] It should be understood that the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] The above and other objects, features and advantages of the present application will become more apparent by describing in more detail exemplary embodiments of the present application in conjunction with the accompanying drawings, wherein the same reference numerals generally represent the same components in the exemplary embodiments of the present application.

[0033] Figure 1 A schematic diagram of the structure of a wafer processing device shown in an embodiment of the present application;

[0034] Figure 2 A schematic diagram of the structure of an auxiliary drive device shown in an embodiment of the present application;

[0035] Figure 3 for Figure 2 A schematic diagram of the structure of the power mechanism in the auxiliary drive device shown;

[0036] Figure 4 for Figure 2 A schematic diagram of the structure of the air circuit system of the pneumatic motor in the auxiliary drive device shown;

[0037] Figure 5 A schematic diagram of the structure of a wafer processing unit shown in an embodiment of the present application;

[0038] Figure 6 Another structural schematic diagram of a wafer processing unit shown in an embodiment of the present application;

[0039] Figure 7 This is another structural schematic diagram of a wafer processing unit according to an embodiment of the present application;

[0040] In the figure:

[0041] Wafer processing equipment 100; wafer processing unit 110; driving motor 111; output wheel 111A; driven wheel 111B; output shaft 111C; reducer 112; driving wheel 112A; slewing support mechanism 113; polishing head assembly 114; carrier head 115; liquid supply arm 120; dresser 130; polishing plate 140; loading platform 150; polishing pad 160;

[0042] Auxiliary drive device 200; motor 210; rotating shaft 210A; air source 211; pressure reducing device 212; pressure sensor 213; first solenoid valve 214; forward rotation button 2141; reverse rotation button 2142; stop button 2143; forward speed regulating device 215; reverse speed regulating device 216; second solenoid valve 217; clutch wheel 220; second connecting member 221; transmission wheel 230; first connecting member 231; bearing component 240; cylinder 250; air inlet 251; piston 252; cylinder body 253; elastic member 260. DETAILED DESCRIPTION

[0043] The preferred embodiments of the present application will be described in more detail below with reference to the accompanying drawings. Although the preferred embodiments of the present application are shown in the accompanying drawings, it should be understood that the present application can be implemented in various forms and should not be limited by the embodiments described herein. On the contrary, these embodiments are provided to make the present application more thorough and complete, and to fully convey the scope of the present application to those skilled in the art.

[0044] The terms used in this application are for the purpose of describing specific embodiments only and are not intended to limit this application. The singular forms of "a", "said" and "the" used in this application and the appended claims are also intended to include plural forms unless the context clearly indicates other meanings. It should also be understood that the term "and / or" used herein refers to and includes any or all possible combinations of one or more associated listed items.

[0045] It should be understood that although the terms "first", "second", "third", etc. may be used in the present application to describe various components, these components should not be limited to these terms. These terms are only used to distinguish components of the same type from each other. For example, without departing from the scope of the present application, the first component may also be referred to as the second component, and similarly, the second component may also be referred to as the first component. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of the present application, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0046] In the description of the present application, it should be understood that the terms "length", "width", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0047] Unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0048] In the related art, single-disk multi-head wafer processing equipment, specifically single-disk multi-head chemical mechanical polishing equipment, controls the polishing head to switch between two or more workstations (for example, the polishing station at the polishing table and the loading and unloading station at the loading and unloading table). Generally, a motor is used with a large speed ratio reducer to drive the polishing head components to rotate in conjunction for workstation switching. However, when the motor cannot provide power (for example, the motor fails or the power is off), this large speed ratio structure makes it difficult to switch workstations or adjust postures, which seriously affects the normal operation of the wafer processing equipment.

[0049] In response to the above problems, an embodiment of the present application provides an auxiliary drive device, which can assist in driving the reducer after the motor fails or the power is off, thereby driving the polishing head assembly to switch workstations and adjust postures.

[0050] The technical solution of the embodiments of the present application is described in detail below with reference to the accompanying drawings.

[0051] See also Figure 1 , Figure 1 The structure diagram of a wafer processing device 100 applicable to the auxiliary drive device in the embodiment of the present application is shown. The wafer processing device 100 can be specifically a wafer chemical mechanical polishing device. As shown in the figure, the wafer processing device 100 includes a wafer processing unit 110, a liquid supply arm 120, a trimmer 130, a polishing plate 140 and a loading platform 150. Among them, the wafer processing unit 110 includes a drive motor, a reducer, a slewing support mechanism 113 and two polishing head assemblies 114. The lower side of the polishing head assembly 114 (relative to the lower side of the polishing head assembly 114) is provided with a plurality of polishing head assemblies 114, and the lower side of the polishing head assembly 114 ... Figure 1 The polishing head assembly 114 is provided with a carrier head 115, and a polishing pad 160 is provided on the polishing plate 140. Both polishing head assemblies 114 are connected to the rotary support mechanism 113, and the drive motor is connected to the rotary support mechanism 113 through a reducer. The drive motor 111 (see Figure 5 ) drives the rotary support mechanism 113 to rotate, thereby switching the two polishing head assemblies 114 between the polishing plate 140 and the loading platform 150.

[0052] The dresser 130 can be located on the left side of the polishing plate 140 (relative to the left side of the polishing plate 140). Figure 1 The dresser 130 is swung at a fixed point (as shown in the state) to dress the surface of the polishing pad 160, and the dressing disk configured by the dresser 130 rotates itself and applies a downward load; the liquid supply arm 120 is arranged above the polishing pad 160 to spread the polishing liquid on the surface of the polishing pad 160 according to the process requirements.

[0053] During the polishing operation, the carrier head 115 brings the surface to be polished of the wafer or other components into contact with the surface of the polishing pad 160, and the carrier head 115 performs a rotational motion and reciprocates along the radial direction of the polishing disk 140; at the same time, the polishing disk 140 rotates, and the liquid supply arm 120 sprays the polishing liquid onto the surface of the polishing pad 160. Under the chemical action of the polishing liquid, the relative movement of the carrier head 115 and the polishing disk 140 causes the wafer and the abrasive particles in the polishing liquid to move relative to each other, so as to remove the material on the surface of the wafer.

[0054] In this example, when the two polishing head assemblies 114 need to switch positions, the drive motor 111 transmits power to the reducer, thereby increasing the driving torque and completing the position switching of the two polishing head assemblies 114. In addition, when one of the polishing head assemblies 114 is in normal polishing operation, the drive motor 111 and the reducer 112 can also provide a sufficiently large torque to overcome the dynamic polishing resistance and maintain the stable state of the polishing head assembly 114.

[0055] It should be noted that Figure 1 In the example shown, two polishing head assemblies 114 are provided. It can be understood that, in a specific implementation, there may be more than two polishing head assemblies 114, which is not limited here.

[0056] See also Figure 2 and Figure 3 According to one embodiment of the present application, the auxiliary driving device 200 includes a motor 210, a clutch wheel 220 and a power mechanism.

[0057] The clutch wheel 220 is connected to the output end of the rotating shaft 210A of the motor 210 and can move along the axial direction of the rotating shaft 210A. The clutch wheel 220 is used to directly or indirectly connect or disconnect with the driving wheel 112A of the reducer 112 in the wafer processing equipment 100. Figures 5 to 7 .

[0058] In a specific implementation, the rotating shaft of the clutch wheel 220 may be arranged in parallel with the rotating shaft of the reducer 112. For example, they may be arranged in parallel.

[0059] When the clutch wheel 220 moves in a direction away from the motor 210 , the clutch wheel 220 may be connected to the driving wheel 112A. When the clutch wheel 220 moves in a direction close to the motor 210 , the clutch wheel 220 may be separated from the driving wheel 112A.

[0060] The driving wheel 112A may also be connected to the output wheel 111A of the driving motor 111 of the reducer 112 . When the driving motor 111 is operating normally, the driving motor 111 drives the reducer 112 to operate.

[0061] The power mechanism is connected to the clutch wheel 220. When the drive motor 111 fails and cannot provide power to the reducer 112, the clutch wheel 220 is controlled to be connected to the drive wheel 112A. At this time, the motor 210 drives the reducer 112 to operate, thereby driving the polishing head assembly 114 to switch work positions and adjust the posture; when the drive motor 111 is normal, the drive motor 111 drives the reducer 112 to operate. At this time, the clutch wheel 220 is controlled to be separated from the drive wheel 112A, thereby avoiding interference with the operation of the drive motor 111.

[0062] In this embodiment, the failure of the drive motor 111 includes various situations such as drive motor failure, power failure, process maintenance, etc. that cannot provide power to the reducer 112. For example, the drive motor 111 is powered off to maintain one of the dual polishing heads.

[0063] In this embodiment, when the drive motor 111 cannot provide power for the reducer 112, the reducer 112 can be driven by the motor 210 to drive the polishing head assembly 114 to switch positions and adjust the posture. Since the wafer processing unit with dual polishing heads needs to perform polishing head maintenance repeatedly, or for some processes with serious wear and tear, consumables need to be replaced more frequently, by providing the auxiliary drive device of the present application, the convenience of troubleshooting, maintenance or repair of the wafer processing unit can be effectively improved, downtime can be shortened, and the normal operation time of the system can be increased, thereby improving production efficiency and reducing production losses caused by downtime.

[0064] In some embodiments, the control mechanism further includes: a control mechanism (not shown in the figure), which is connected to both the motor 210 and the power mechanism. The control mechanism is used to start the motor 210 when the drive motor 111 fails, and stop the motor 210 when the drive motor 111 is normal; the control mechanism is also used to control the drive power mechanism before starting the motor 210, so that the clutch wheel 220 is connected to the drive wheel 112A.

[0065] In specific implementation, the control mechanism may be a controller, such as a single chip microcomputer, a programmable logic controller, etc.

[0066] Since the motor 210 is in a high-speed rotation state after obtaining power, it is not conducive to the connection between the clutch wheel 220 and the drive wheel 112A. Therefore, this embodiment performs a delay process to control the clutch wheel 220 and the drive wheel 112A to be connected first, and then control the starter motor 210 after the connection to ensure the stability of the system operation during the power-on switching process.

[0067] Furthermore, in some embodiments, it further comprises: a solenoid valve. The solenoid valve is connected to the control mechanism and the motor 210, and the solenoid valve delays action after receiving a command from the control mechanism to start the motor 210, so as to start the motor after the clutch wheel 220 and the driving wheel 112A are connected.

[0068] A delay circuit is provided in the solenoid valve to delay processing of the received command to start the motor.

[0069] In some embodiments, the control mechanism is further configured to control the driving power mechanism after stopping the motor 210 so as to disengage the clutch wheel 220 from the driving wheel 112A.

[0070] In this embodiment, the motor 210 is controlled to stop first, and then the clutch wheel 220 and the driving wheel 112A are controlled to separate after the stop, so as to ensure the stability of the system operation during the stop switching process.

[0071] In specific implementation, the delay time when starting and stopping can be determined according to actual conditions and is not limited here.

[0072] In some embodiments, the clutch wheel 220 is connected to the output end of the shaft of the motor 210 through the telescopic assembly, and the telescopic assembly is used to drive the clutch wheel 220 to perform telescopic movement along the axial direction of the shaft of the motor 210.

[0073] In a specific implementation, the telescopic assembly includes: a sleeve and a telescopic rod, the telescopic rod is telescopically sleeved in the sleeve, the sleeve is connected to the output end of the rotating shaft 210A of the motor 210, and the telescopic rod is connected to the clutch wheel 220.

[0074] The telescopic rod may include a sliding rod portion slidably disposed in a sleeve, and a connecting rod portion disposed outside the sleeve, wherein the diameter of the sliding rod portion is larger than the diameter of the connecting rod portion, and the diameter of the hole at the end of the sleeve for the telescopic rod to pass through is smaller than the diameter of the sliding rod portion to limit the telescopic rod.

[0075] In another specific implementation, the telescopic assembly includes: a sleeve and a telescopic rod, the telescopic rod is telescopically sleeved in the sleeve, the telescopic rod is connected to the output end of the rotating shaft 210A of the motor 210, and the sleeve is connected to the clutch wheel 220. A limiting portion for limiting the sleeve is formed on the side of the telescopic rod.

[0076] Of course, the telescopic component can also be a combination of a slider and a slide rail, the slider is connected to the rotating shaft 210A of the motor 210, and the slide rail is connected to the clutch wheel 220. This embodiment does not limit the specific implementation form of the telescopic component.

[0077] Continue to see Figure 2 , Figure 3 and Figure 5 In some embodiments, the transmission wheel 230 is further included. The transmission wheel 230 is disposed on a side of the clutch wheel 220 away from the motor 210 and is coaxially arranged with the clutch wheel 220. The clutch wheel 220 is indirectly connected to the driving wheel 112A through the transmission wheel 230.

[0078] In a specific implementation, the transmission wheel 230 may be directly or indirectly connected to the driving wheel 112A, and the clutch wheel 220 moves along the axial direction of the rotating shaft of the motor 210 to be connected to or separated from the transmission wheel 230 .

[0079] In one example, the clutch wheel 220 , the driving wheel 112A, the output wheel 111A, and the transmission wheel 230 may all be gears.

[0080] In the embodiment of the present application, a transmission wheel 230 is arranged between the clutch wheel 220 and the driving wheel 112A, so that the system operation is more stable, and the structure and size design of the clutch wheel 220 are independent of the driving wheel 112A and have greater design flexibility, and can provide a more flexible layout space for the layout of other mechanisms, such as the driving motor 111.

[0081] In some embodiments, see Figure 2 and Figure 3 The power mechanism includes: a connecting assembly, a separating assembly and a bearing member 240. The connecting assembly is connected to the clutch wheel 220 and is used to apply a connecting force to the clutch wheel 220 so that the clutch wheel 220 moves toward the direction close to the transmission wheel 230 to connect with the transmission wheel 230. The separating assembly is connected to the clutch wheel 220 and is used to drive the clutch wheel 220 to move away from the transmission wheel 230 to separate from the transmission wheel 230 when the connecting assembly stops applying the connecting force.

[0082] The bearing member 240 is fixedly connected to the rotating shaft of the motor 210 and is placed between the motor 210 and the clutch wheel 220. The connecting assembly and the separating assembly are installed on the bearing member 240. The bearing member 240 can rotate synchronously with the rotating shaft 210A of the motor 210, thereby driving the connecting assembly and the separating assembly to rotate synchronously with the rotating shaft of the motor 210.

[0083] In a specific implementation, the bearing component 240 is a circular plate, which is fixedly connected to the rotating shaft 210A of the motor 210 by welding, riveting, etc.

[0084] Further, in some embodiments, see Figure 3 The connecting assembly includes: a cylinder 250 . The cylinder 250 is mounted on the bearing component 240 , and is used to push the clutch wheel 220 to move toward the driving wheel 230 when gas is introduced through the air inlet 251 , so as to connect with the driving wheel 230 .

[0085] For specific implementation, see Figure 4 The piston 252 of the cylinder 250 is connected to the bearing member 240, and the cylinder body 253 of the cylinder 250 is connected to the clutch wheel 220. Of course, the piston 252 can also be connected to the clutch wheel 220, and the cylinder body 253 can be connected to the bearing member 240.

[0086] It can be understood that a cylinder gas source should also be provided in this embodiment, and the cylinder gas source is connected to the bearing component 240 to provide gas for the cylinder 250 .

[0087] In this embodiment, the cylinder 250 pushes the clutch wheel 220 to connect with the transmission wheel 230 when the gas is introduced, and the separation mechanism applies a force to separate the clutch wheel 220 from the transmission wheel 230 when the gas is exhausted.

[0088] In this embodiment, the connection is achieved through the cylinder 250, which has a simple structure, is easy to implement, and operates smoothly.

[0089] Furthermore, in some other embodiments, the connection assembly includes: a coil and a power supply. The coil is arranged inside the clutch wheel 220, the transmission wheel 230 is a magnetic wheel, and the power supply is installed on the bearing component 240. When the power supply supplies power to the coil, the clutch wheel 220 drives the transmission wheel 230 to rotate synchronously through the magnetic attraction force; when the coil is powered off, the clutch wheel 220 is separated from the transmission wheel 230.

[0090] In this embodiment, the clutch wheel 220 and the transmission wheel 230 are in non-contact connection. During the non-contact connection with the transmission wheel 230 , the clutch wheel 220 can move axially toward the transmission wheel 230 to adjust the distance between the clutch wheel 220 and the transmission wheel 230 .

[0091] Furthermore, in some other embodiments, the connection assembly includes: a coil and a power supply. The coil is arranged inside the transmission wheel 230, the clutch wheel 220 is a magnetic wheel, and the power supply is installed on the bearing component 240. When the power supply supplies power to the coil, the clutch wheel 220 drives the transmission wheel 230 to rotate synchronously through the magnetic attraction force; when the coil is powered off, the clutch wheel 220 is separated from the transmission wheel 230.

[0092] Furthermore, in some embodiments, when the distance between the clutch wheel 220 and the transmission wheel 230 is set appropriately, the telescopic assembly may be omitted, so that the structure of the embodiment of the present application is more simplified.

[0093] In some embodiments, see Figure 2 and Figure 3 The separation assembly includes an elastic member 260 . The elastic member 260 is disposed between the bearing member 240 and the clutch wheel 220 , and one end of the elastic member 260 is connected to the bearing member 240 , and the other end is connected to the clutch wheel 220 .

[0094] When the connecting assembly applies a connecting force to the clutch wheel 220 to connect the clutch wheel 220 with the transmission wheel 230, the elastic member 260 is in a stretched state; when the connecting assembly stops applying a connecting force to the clutch wheel 220, the elastic member 260 relies on the rebound force to separate the clutch wheel 220 from the transmission wheel 230 and return to the original state.

[0095] In specific implementation, the elastic member may be a spring or the like.

[0096] In other embodiments, see Figure 7 The separation component includes an elastic member 260. The elastic member 260 is placed between the clutch wheel 220 and the transmission wheel 230, and the elastic member 260 is in a compressed state when the clutch wheel 220 and the transmission wheel 230 are connected; when the connection component stops applying the connection force to the clutch wheel 220, the elastic member 260 separates the clutch wheel 220 from the transmission wheel 230 by means of the rebound force.

[0097] In one specific implementation, one end of the elastic member 260 abuts against the clutch wheel 220, and the other end abuts against the transmission wheel 230. In another specific implementation, one end of the elastic member 260 is connected to the clutch wheel 220, and the other end abuts against the transmission wheel 230. In yet another specific implementation, one end of the elastic member 260 is connected to the transmission wheel 230, and the other end abuts against the clutch wheel 220.

[0098] Furthermore, in some embodiments, there can be one elastic member 260, or two or more elastic members. When there are two or more elastic members, the elastic members 260 are evenly distributed along the circumference with the axis of the clutch wheel 220 as the center, so that when the rebound force is applied, the clutch wheel 220 is evenly stressed and runs more smoothly.

[0099] In some embodiments, the transmission wheel 230 is a transmission gear, and the driving wheel 112A is a driving gear. The circumferential outer edge of the transmission wheel 230 is provided with meshing teeth for meshing with the driving wheel 112A, the transmission wheel 230 is provided with a first connecting member 231 on the end surface facing the clutch wheel 220, and the clutch wheel 220 is provided with a second connecting member 221 on the end surface facing the transmission wheel 230, the first connecting member 231 can be connected or separated with the second connecting member 221, and the clutch wheel 220 and the transmission wheel 230 are connected or separated through the first connecting member 231 and the second connecting member 221.

[0100] In some embodiments, the first connecting member 231 is a first protruding tooth protruding from the end surface of the transmission wheel 230, and the second connecting member 221 is a second protruding tooth protruding from the end surface of the clutch wheel 220. When the clutch wheel 220 moves axially, the first protruding tooth engages or disengages with the second protruding tooth.

[0101] In some embodiments, the first connecting member 231 is a plug-in slot, and the second connecting member 221 is a plug-in member (eg, a plug-in rod). When the clutch wheel 220 moves along the axial direction, the plug-in member can be plugged into the plug-in slot.

[0102] It can be understood that in other embodiments, the first connecting member 231 is a plug-in member (eg, a plug-in rod), and the second connecting member 221 is a plug-in slot.

[0103] Further, the plug-in slot is an arc-shaped slot. Specifically, the plug-in slot is an arc-shaped slot centered on the axis of the clutch wheel 220 or the transmission wheel 230.

[0104] The following takes the arc groove being provided on the transmission wheel 230 as an example to explain the plugging process as follows.

[0105] When the clutch wheel 220 moves toward the transmission wheel 230, and the connector is inserted into the arc groove, the motor 210 drives the clutch wheel 220 to rotate, and then drives the connector to slide in the arc groove. When the connector contacts the side wall of the arc groove, the transmission wheel 230 is driven to rotate synchronously. In addition, when the clutch wheel 220 moves toward the transmission wheel 230, the connector may not be inserted into the arc groove. At this time, the motor 210 drives the clutch wheel 220 and the connector to rotate. When the connector rotates to the arc groove position, it will slide into the arc groove and continue to slide relative to the arc groove until it contacts the side wall of the arc groove, driving the transmission wheel 230 to rotate synchronously.

[0106] It can be seen that the arc-shaped groove provided in the embodiment of the present application can make it easier to connect and position the first connecting member 231 and the second connecting member 221.

[0107] Further, the number of the first connecting member 231 is one or more; correspondingly, the number of the second connecting member 221 is at least one or more. When both the first connecting member 231 and the second connecting member 221 are two or more, the first connecting member 231 and the second connecting member 221 are evenly distributed along the circumferential direction with the rotating shaft of the clutch wheel 220 or the transmission wheel 230 as the center, so that the connection structure of the clutch wheel 220 and the transmission wheel 230 is more reliable, and the synchronous rotation of the two is more stable.

[0108] In some embodiments, the motor 210 is an electric motor. When the drive motor 111 fails and cannot drive the wafer processing equipment 100 to operate, the electric motor can replace the drive motor 111 to provide power for the system, drive the polishing head assembly 114 to switch positions and adjust postures, and ensure the normal progress of the polishing process.

[0109] In other embodiments, the motor 210 is a pneumatic motor. When the circuit system fails and cannot provide electricity, the pneumatic motor driven by the air circuit system provides power for the reducer 112 to ensure the normal operation of the wafer processing equipment.

[0110] Specifically, see Figure 4 , Figure 4A schematic diagram of the connection structure of the air circuit system of a pneumatic motor is shown. As shown in the figure, the system includes: an air source 211, a pressure reducing device 212, a pressure sensor 213, a first solenoid valve 214, a forward speed regulating device 215, a reverse speed regulating device 216 and a second solenoid valve 217. The air source 211 is connected to the first solenoid valve 214, and the pressure reducing device 212 and the pressure sensor 213 are arranged on the connecting pipeline between the air source 211 and the first solenoid valve 214.

[0111] The motor 210 is a pneumatic motor, and is provided with an air inlet A, an air inlet B, and an air outlet C. When air is taken in from the air inlet A, the motor 210 rotates forward, and when air is taken in from the air inlet B, the motor 210 rotates reversely. The air inlet A and the air inlet B are respectively connected to the upper chamber and the lower chamber of the first solenoid valve 214, and a forward speed regulating device 215 is provided on the connecting pipeline between the air inlet A and the upper chamber, and a reverse speed regulating device 216 is provided on the connecting pipeline between the air inlet B and the lower chamber.

[0112] The first solenoid valve 214 is provided with a forward rotation button 2141, a reverse rotation button 2142 and a stop button 2143. When the forward rotation button 2141 is pressed, the air source 211 is connected to the upper chamber of the first solenoid valve 214; when the reverse rotation button 2142 is pressed, the air source 211 is connected to the lower chamber of the first solenoid valve 214; when the stop button 2143 is pressed, the first solenoid valve 214 is disconnected from the air source 211 and does not work.

[0113] When the clutch wheel 220 is controlled by the cylinder 250 to perform telescopic motion, the cylinder 250 can share the air source 211 with the motor 210. Specifically, the air source 211 is connected to the cylinder 250 driving the clutch wheel 220 through the second solenoid valve 217, and the forward rotation button 2141 and the reverse rotation button 2142 are connected to the second solenoid valve 217. The decompression device 212 and the pressure sensor 213 are also arranged on the connecting pipeline between the air source 211 and the second solenoid valve 217. After the air source 211 is decompressed by the decompression device 212, it is connected to the second solenoid valve 217 for controlling the cylinder 250 to perform telescopic motion.

[0114] The working process of the system is described as follows.

[0115] After the air source 211 is decompressed by the decompression device 212, it is connected to the first solenoid valve 214 for controlling the motor 210 to realize forward and reverse rotation. The pressure sensor 213 detects the system pressure and alarms when it exceeds the range. Under normal circumstances, the first solenoid valve 214 and the second solenoid valve 217 are not energized, the motor 210 has no power source, and does not output torque. The clutch wheel 220 is in a retracted state, and the clutch wheel 220 and the transmission wheel 230 are in a disengaged state. When the drive motor 111 cannot provide power, when the polishing head assembly 114 needs to rotate forward, by pressing the forward rotation button 2141, the first solenoid valve 214 and the second solenoid valve 217 are energized, the upper chamber of the first solenoid valve 214 is connected, and the air source 211 is supplied to the air inlet A of the motor 210 to provide forward rotation power. The forward speed regulating device 215 is a function of forward rotation speed regulation. Similarly, when the polishing head assembly 114 needs to rotate in the reverse direction, the reverse rotation button of the reverse speed regulating device 216 is pressed, so that the first solenoid valve 214 and the second solenoid valve 217 are energized, and the air source 211 is supplied to the motor 210 to provide reverse rotation power. The reverse speed regulating device 216 has the function of reverse rotation speed regulation. The motor 210 is an open structure, and the air is taken in from the air inlet A and discharged from the air outlet C, which can make it rotate in the forward direction. The air is taken in from the air inlet B and discharged from the air outlet C, which can make it rotate in the reverse direction.

[0116] The motor 210 alone cannot provide effective rotational torque. The clutch wheel 220 and the transmission wheel 230 must be connected to output torque. Therefore, the second solenoid valve 217 is energized to connect the air source 211 to the air inlet D. The air inlet D is connected to the air inlet 251 of the cylinder 250, so that the clutch wheel 220 is connected to the transmission wheel 230, thereby exerting a power assist effect.

[0117] Furthermore, in some embodiments, since the motor 210 is in a high-speed rotating state after obtaining power, it is not conducive to the meshing between the clutch wheel 220 and the transmission wheel 230. Therefore, the clutch wheel 220 and the transmission wheel 230 are connected or separated when the motor 210 is in a stopped state. Therefore, the second solenoid valve 217 needs to be delayed so that the first solenoid valve 214 is energized first, the clutch wheel 220 and the transmission wheel 230 are connected first, and then the motor 210 is rotated to ensure the stability of the system, which is also critical for the system.

[0118] When it is necessary to stop, the stop button 2143 is pressed, the first solenoid valve 214 and the second solenoid valve 217 are powered off, and the gas source 211 is cut off.

[0119] The present application also provides a wafer processing unit. Figures 5 to 7According to an embodiment of the present application, a wafer processing unit includes a drive motor 111, a reducer 112 connected to the drive motor 111, a swivel support mechanism 113 connected to the reducer 112, at least two polishing head assemblies 114 connected to the swivel support mechanism 113, and any one of the above auxiliary drive devices 200.

[0120] In one implementation, the polishing head assemblies 114 are evenly distributed around the rotation axis of the rotary support mechanism 113 .

[0121] The specific implementation process of the auxiliary driving device can refer to the above description, and this embodiment will not be repeated here.

[0122] Since the auxiliary supporting device has the above-mentioned effects, the wafer processing unit having the auxiliary driving device also has corresponding technical effects.

[0123] Continue to see Figures 5 to 7 In some embodiments, it also includes: a driven wheel 111B, which is installed on the output shaft 111C of the driving motor 111. The transmission wheel 230 in the auxiliary driving device 200 is connected to the driven wheel 111B, and the output wheel 111A is driven by the driven wheel 111B to drive the driving wheel 112A of the reducer 112 to rotate.

[0124] During specific implementation, the driven wheel 111B may be a gear.

[0125] In this embodiment, the driven wheel 111B and the output wheel 111A are both mounted on the output shaft 111C of the driving motor 111, and the output shaft 111C drives the output wheel 111A and the driven wheel 111B to rotate together. When the driving motor 111 drives the reducer 112, the output wheel 111A drives the reducer 112 to rotate; when the reducer 112 is driven by the motor 210, the clutch wheel 220 drives the driven wheel 111B to rotate through the transmission wheel 230, and then drives the output wheel 111A to rotate. Since the output wheel 111A is connected to the driving wheel 112A, the reducer 112 can be driven to operate through the driving wheel 112A.

[0126] It can be seen that the embodiment of the present application avoids direct connection between the output wheel 111A and the transmission wheel 230 during the driving process by adding a driven wheel 111B, thereby improving the operating stability of the system.

[0127] The present application also provides a wafer processing device, see Figure 1 The device includes a main body, a polishing plate 140 mounted on the main body, a loading platform 150, a trimmer 130 and a liquid supply arm 120, and any one of the above-mentioned wafer processing units 110.

[0128] Among them, the specific implementation process of the wafer processing unit can refer to the above description, and this embodiment will not be repeated here.

[0129] Since the wafer processing unit has the above-mentioned effects, the wafer processing equipment having the wafer processing unit also has corresponding technical effects.

[0130] Obviously, those skilled in the art can make various changes and modifications to the present application without departing from the spirit and scope of the present application. Thus, if these modifications and variations of the present application fall within the scope of the claims of the present application and their equivalents, the present application is also intended to include these modifications and variations.

Claims

1. An auxiliary drive device for wafer processing equipment, characterized in that: include: motor; A clutch wheel connected to the output end of the rotating shaft of the motor and movable along the axial direction of the rotating shaft, used to connect or disconnect with the driving wheel of the reducer in the wafer processing equipment; the driving wheel is also connected to the output wheel of the driving motor used to drive the reducer; A power mechanism is connected to the clutch wheel and is used to control the clutch wheel to be connected to the drive wheel when the drive motor fails, and to control the clutch wheel to be separated from the drive wheel when the drive motor is normal.

2. The auxiliary drive device according to claim 1, characterized in that: Also includes: a control mechanism connected to the motor, for starting the motor when the drive motor fails, and stopping the motor when the drive motor is normal; The control mechanism is also connected to the power mechanism and is used to control and drive the power mechanism before starting the motor so that the clutch wheel is connected to the drive wheel.

3. The auxiliary drive device according to claim 2, characterized in that: Also includes: The solenoid valve is connected to the control mechanism and the motor. The solenoid valve is used to delay action after receiving a command from the control mechanism to start the motor, so as to start the motor after the clutch wheel and the drive wheel are connected.

4. The auxiliary drive device according to claim 2, characterized in that: The control mechanism is also used to control the driving of the power mechanism after stopping the motor so as to separate the clutch wheel from the driving wheel.

5. The auxiliary drive device according to claim 1, characterized in that: Also includes: The transmission wheel is placed on a side of the clutch wheel away from the motor and is coaxially arranged with the clutch wheel. The clutch wheel is connected to the driving wheel through the transmission wheel. The clutch wheel moves along the axial direction of the rotating shaft to connect with or disconnect from the transmission wheel.

6. The auxiliary drive device according to claim 5, characterized in that: The power mechanism comprises: A connecting assembly connected to the clutch wheel and used to apply a connecting force to the clutch wheel so that the clutch wheel moves toward the transmission wheel to connect with the transmission wheel; A separation component, connected to the clutch wheel, and used to drive the clutch wheel to separate from the transmission wheel when the connection component stops applying the connection force; The bearing component is fixedly connected to the rotating shaft of the motor and is placed between the motor and the clutch wheel. The connecting component and the separating component are installed on the bearing component.

7. The auxiliary drive device according to claim 6, characterized in that: The connection component comprises: A cylinder is mounted on the bearing component, and a piston output end of the cylinder is connected to the clutch wheel, and is used to push the clutch wheel to move and connect with the transmission wheel when gas is introduced.

8. The auxiliary drive device according to claim 6, characterized in that: The connection component comprises: A coil is disposed inside one of the clutch wheel and the transmission wheel, and the other of the clutch wheel and the transmission wheel is a magnetic wheel; A power source is installed on the bearing component, and the power source is used to supply power to the coil so that the clutch wheel and the transmission wheel rotate synchronously through magnetic attraction.

9. The auxiliary drive device according to claim 6, characterized in that: The separation component comprises: an elastic member, the elastic member being disposed between the bearing member and the clutch wheel, and having one end connected to the bearing member and the other end connected to the clutch wheel; the elastic member being in a stretched state when the connecting assembly applies a connecting force to the clutch wheel; The elastic member is used for separating the clutch wheel from the transmission wheel by means of a rebound force when the connection assembly stops applying a connection force to the clutch wheel.

10. The auxiliary drive device according to claim 6, characterized in that: The separation component comprises: an elastic member, the elastic member being disposed between the clutch wheel and the transmission wheel, and the elastic member being in a compressed state when the connecting assembly applies a connecting force to the clutch wheel; The elastic member is used for separating the clutch wheel from the transmission wheel by means of a rebound force when the connection assembly stops applying a connection force to the clutch wheel.

11. The auxiliary drive device according to claim 10, characterized in that: One end of the elastic member abuts against the clutch wheel, and the other end abuts against the transmission wheel; or, One end of the elastic member is connected to one of the clutch wheel and the transmission wheel, and the other end is in contact with the other one of them.

12. The auxiliary drive device according to any one of claims 9 to 11, characterized in that: The elastic member is one or more than one elastic member. When the elastic member is two or more than two elastic members, the elastic members are evenly distributed around the axis of the clutch wheel.

13. The auxiliary drive device according to any one of claims 5 to 11, characterized in that: The transmission wheel is a transmission gear, and the driving wheel is a driving gear; The circumferential outer edge of the transmission gear is provided with meshing teeth for meshing with the driving gear; The end surface of the transmission wheel facing the clutch wheel is provided with a first connecting member, and the end surface of the clutch wheel facing the transmission wheel is provided with a second connecting member, and the first connecting member can be connected to or separated from the second connecting member; The clutch wheel and the transmission wheel are connected or separated by the first connecting member and the second connecting member.

14. The auxiliary drive device according to claim 13, characterized in that: The first connecting member is a first protruding tooth protruding from the end surface of the transmission gear, and the second connecting member is a second protruding tooth protruding from the end surface of the clutch wheel. The first protruding tooth can be engaged with or disengaged from the second protruding tooth.

15. The auxiliary drive device according to claim 13, characterized in that: One of the first connecting member and the second connecting member is a plug-in member, and the other of the first connecting member and the second connecting member is a plug-in slot. When the clutch wheel moves along the axial direction, the plug-in member can be plugged into or separated from the plug-in slot.

16. The auxiliary drive device according to claim 15, characterized in that: The plug-in slot is in an arc shape with the axis of the clutch wheel or the transmission wheel as the center.

17. The auxiliary drive device according to claim 15, characterized in that: The first connecting member is one or more; accordingly, The number of the second connecting member is one or more.

18. The auxiliary drive device according to any one of claims 1 to 11, characterized in that: Also includes: A telescopic assembly, wherein the clutch wheel is connected to the output end of the motor shaft through the telescopic assembly, and the telescopic assembly is used to drive the clutch wheel to move along the axial direction of the motor.

19. The auxiliary drive device according to claim 18, characterized in that: The telescopic assembly comprises: Sleeve; A telescopic rod, telescopically sleeved in the sleeve; One of the sleeve and the telescopic rod is connected to the output end of the motor shaft, and the other one is connected to the clutch wheel.

20. The auxiliary drive device according to any one of claims 1 to 11, characterized in that: The motor is a pneumatic motor.

21. A wafer processing unit, characterized in that: It comprises a driving motor, a reducer connected to the driving motor, a slewing support mechanism connected to the reducer, at least two polishing head assemblies connected to the slewing support mechanism, and an auxiliary driving device as claimed in any one of claims 1 to 20.

22. The wafer processing unit according to claim 21, characterized in that: Also includes: The driven wheel is mounted on the output shaft of the driving motor. The transmission wheel in the auxiliary driving device is connected to the driven wheel. The driven wheel is used to drive the output wheel and then drive the driving wheel of the reducer to rotate.

23. The wafer processing unit according to claim 21, characterized in that: The polishing head components are evenly distributed around the rotating shaft of the rotary support mechanism.

24. A wafer processing equipment, characterized in that: It comprises a main body, a polishing disc mounted on the main body, a loading platform, a dresser and a liquid supply arm, and a wafer processing unit as described in any one of claims 21 to 23.

Images