Multi-range multi-resolution thin film pressure sensor

Abstract

The invention discloses a multi-range multi-resolution thin film pressure sensor, and relates to the technical field of pressure sensors, the thin film pressure sensor comprises a double-side electrode plate, the top surface and the bottom surface of the double-side electrode plate are respectively provided with a plurality of first side pressure sensor electrodes and a plurality of second side pressure sensor electrodes in a matrix manner, the first side pressure sensor electrodes and the second side pressure sensor electrodes are consistent in number and are in one-to-one correspondence; arranging a first side circuit connection golden finger and a second side circuit connection golden finger on one side of the double-side electrode plate; each first side pressure sensor electrode is electrically connected with the first side circuit connection golden finger; each second side pressure sensor electrode is electrically connected with the second side circuit connection golden finger; the pressure monitoring ranges of the first side pressure sensor electrode and the second side pressure sensor electrode are different. The sensors with different measuring ranges and different measuring resolutions are combined, the measuring ranges and the measuring precision are considered, and various measuring requirements are met.

Description

Technical Field

[0001] The present application relates to the technical field of pressure sensors, and in particular to a multi-range and multi-resolution thin film pressure sensor. Background Art

[0002] At present, the existing thin film pressure sensors have high resolution, but the measuring range is necessarily narrow. On the contrary, when the measuring range is large, the resolution is necessarily low. When the measuring range is large, the resolution is not high enough, resulting in inaccurate pressure measurement in different intervals.

[0003] Therefore, in order to meet various pressure monitoring needs, a multi-range and multi-resolution thin film pressure sensor is now provided. Summary of the invention

[0004] In view of the defects existing in the prior art, the purpose of this application is to provide a multi-range and multi-resolution thin film pressure sensor, which combines sensors with different measurement ranges and different measurement resolutions, takes into account both the measurement range and the measurement accuracy, so as to meet various measurement needs.

[0005] In order to achieve the above objectives, the technical solution adopted by this application is:

[0006] The present application provides a multi-range and multi-resolution thin film pressure sensor, the thin film pressure sensor comprising:

[0007] A double-sided electrode plate, wherein a plurality of first-side pressure sensor electrodes and a plurality of second-side pressure sensor electrodes are arranged in a matrix on the top surface and the bottom surface of the double-sided electrode plate, respectively, and the number of the first-side pressure sensor electrodes and the second-side pressure sensor electrodes is consistent and corresponds one to one;

[0008] Setting a first side circuit connection gold finger and a second side circuit connection gold finger on one side of the double-sided electrode plate;

[0009] Each of the first-side pressure sensor electrodes is electrically connected to the first-side circuit connection gold finger;

[0010] Each of the second-side pressure sensor electrodes is electrically connected to the second-side circuit connection gold finger;

[0011] The pressure monitoring ranges of the first-side pressure sensor electrode and the second-side pressure sensor electrode are different.

[0012] On the basis of the above technical solution, a plurality of electrode reinforcement sheets are arranged in the matrix of the double-sided electrode plates;

[0013] The number of the electrode reinforcement sheet, the first side pressure sensor electrodes, and the second side pressure sensor electrodes is consistent and corresponds one to one.

[0014] On the basis of the above technical solution, the top surface of the double-sided electrode plate is provided with a first side fixing adhesive layer, a first side pressure film layer and a first side protective conductive layer in sequence from bottom to top.

[0015] On the basis of the above technical solution, the first-side fixed adhesive layer is a ring-shaped structure, which is used to adhere and connect the first-side pressure film layer to the top surface of the double-sided electrode plate.

[0016] On the basis of the above technical solution, the bottom surface of the double-sided electrode plate is provided with a second side fixing adhesive layer, a second side pressure film layer and a second side protective conductive layer in sequence from top to bottom.

[0017] On the basis of the above technical solution, the second-side fixed adhesive layer is a ring-shaped structure, which is used to adhere and connect the second-side pressure film layer to the bottom surface of the double-sided electrode plate.

[0018] On the basis of the above technical solution, the first side circuit connection gold finger and the second side circuit connection gold finger are stacked up and down with an interval.

[0019] On the basis of the above technical solution, both the first side circuit connection gold finger and the second side circuit connection gold finger are FPC.

[0020] Based on the above technical solution, the pressure monitoring resolution of the first side pressure sensor electrode and the second side pressure sensor electrode.

[0021] Compared with the prior art, the advantages of this application are:

[0022] This application combines sensors with different measurement ranges and different measurement resolutions, taking into account both the measurement range and the measurement accuracy, thereby meeting various measurement needs. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0024] Figure 1 A schematic diagram of the structure of a multi-range and multi-resolution thin film pressure sensor according to an embodiment of the present application;

[0025] Figure 2 This is a schematic structural diagram of double-sided electrode plates in a multi-range and multi-resolution thin-film pressure sensor according to an embodiment of the present application;

[0026] Figure 3It is a schematic structural diagram of a first-side pressure sensor electrode, a second-side pressure sensor electrode, and an electrode reinforcement sheet in a multi-range and multi-resolution thin-film pressure sensor according to an embodiment of the present application;

[0027] In the figure:

[0028] 1. Double-sided electrode plates; 10. First-side pressure sensor electrode; 11. Second-side pressure sensor electrode; 12. First-side circuit connection gold finger; 13. Second-side circuit connection gold finger; 14. Electrode reinforcement sheet; 2. First-side fixed adhesive layer; 3. First-side pressure film layer; 4. First-side protective conductive layer; 5. Second-side fixed adhesive layer; 6. Second-side pressure film layer; 7. Second-side protective conductive layer. DETAILED DESCRIPTION

[0029] In order to make the purpose, technical solution and advantages of the embodiments of the present application clearer, the technical solution in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of this application.

[0030] The embodiments of the present application are further described in detail below in conjunction with the accompanying drawings.

[0031] The embodiment of the present application provides a multi-range and multi-resolution thin film pressure sensor, which combines sensors with different measurement ranges and different measurement resolutions, taking into account both the measurement range and the measurement accuracy, thereby meeting various measurement requirements.

[0032] In order to achieve the above technical effects, the overall idea of ​​this application is as follows:

[0033] A multi-range and multi-resolution thin film pressure sensor, the thin film pressure sensor comprising:

[0034] A double-sided electrode plate 1, wherein a plurality of first-side pressure sensor electrodes 10 and a plurality of second-side pressure sensor electrodes 11 are arranged in a matrix on the top surface and the bottom surface of the double-sided electrode plate 1, and the number of the first-side pressure sensor electrodes 10 and the second-side pressure sensor electrodes 11 is consistent and corresponds one to one;

[0035] A first side circuit connection gold finger 12 and a second side circuit connection gold finger 13 are provided on one side of the double-sided electrode plate 1;

[0036] Each of the first-side pressure sensor electrodes 10 is electrically connected to the first-side circuit connection gold finger 12;

[0037] Each of the second-side pressure sensor electrodes 11 is electrically connected to the second-side circuit connection gold finger 13;

[0038] The pressure monitoring ranges of the first-side pressure sensor electrode 10 and the second-side pressure sensor electrode 11 are different.

[0039] The embodiments of the present application are further described in detail below in conjunction with the accompanying drawings.

[0040] See also Figures 1 to 3 As shown, an embodiment of the present application provides a multi-range and multi-resolution thin film pressure sensor, the thin film pressure sensor comprising:

[0041] A double-sided electrode plate 1, wherein a plurality of first-side pressure sensor electrodes 10 and a plurality of second-side pressure sensor electrodes 11 are arranged in a matrix on the top surface and the bottom surface of the double-sided electrode plate 1, and the number of the first-side pressure sensor electrodes 10 and the second-side pressure sensor electrodes 11 is consistent and corresponds one to one;

[0042] A first side circuit connection gold finger 12 and a second side circuit connection gold finger 13 are provided on one side of the double-sided electrode plate 1;

[0043] Each of the first-side pressure sensor electrodes 10 is electrically connected to the first-side circuit connection gold finger 12;

[0044] Each of the second-side pressure sensor electrodes 11 is electrically connected to the second-side circuit connection gold finger 13;

[0045] The pressure monitoring ranges of the first-side pressure sensor electrode 10 and the second-side pressure sensor electrode 11 are different.

[0046] It should be noted that a plurality of first side pressure sensor electrodes 10 and a plurality of second side pressure sensor electrodes 11 are respectively arranged in a matrix on the top surface and the bottom surface of the double-sided electrode plate 1, which may be specifically as follows:

[0047] A plurality of first side pressure sensor electrodes 10 are arranged in a matrix on the top surface of the double-sided electrode plate 1, and a plurality of second side pressure sensor electrodes 11 are arranged in a matrix on the bottom surface of the double-sided electrode plate 1;

[0048] Alternatively, a plurality of first side pressure sensor electrodes 10 are arranged in a matrix on the bottom surface of the double-sided electrode plate 1 , and a plurality of second side pressure sensor electrodes 11 are arranged in a matrix on the top surface of the double-sided electrode plate 1 .

[0049] In the embodiments of the present application, sensors with different measurement ranges and different measurement resolutions are combined to take both the measurement range and the measurement accuracy into consideration, thereby meeting various measurement requirements.

[0050] Furthermore, a plurality of electrode reinforcement sheets 14 are arranged in a matrix in the double-sided electrode plate 1;

[0051] The number of the electrode reinforcement sheets 14 , the first side pressure sensor electrodes 10 , and the second side pressure sensor electrodes 11 are consistent and correspond one to one.

[0052] Furthermore, the top surface of the double-sided electrode plate 1 is provided with a first-side fixing adhesive layer 2 , a first-side pressure film layer 3 and a first-side protective conductive layer 4 in sequence from bottom to top.

[0053] Furthermore, the first-side fixed adhesive layer 2 is a ring-shaped structure, which is used to adhere and connect the first-side pressure film layer 3 to the top surface of the double-sided electrode plate 1 .

[0054] Furthermore, the bottom surface of the double-sided electrode plate 1 is provided with a second-side fixing adhesive layer 5 , a second-side pressure film layer 6 and a second-side protective conductive layer 7 in sequence from top to bottom.

[0055] Furthermore, the second-side fixing adhesive layer 5 is a ring-shaped structure, which is used to adhere and connect the second-side pressure film layer 6 to the bottom surface of the double-sided electrode plate 1 .

[0056] Furthermore, the first-side circuit connection gold fingers 12 and the second-side circuit connection gold fingers 13 are stacked up and down with an interval.

[0057] Furthermore, the first side circuit connection gold finger 12 and the second side circuit connection gold finger 13 are both FPC;

[0058] FPC, Flexible Printed Circuit, flexible circuit board.

[0059] Furthermore, the pressure monitoring resolution of the first side pressure sensor electrode 10 and the second side pressure sensor electrode 11 is improved.

[0060] It should be noted that in the technical solution of the embodiment of the present application, the pressure film needs to be distributed on both sides of the electrode, receiving the positive force and the reverse force respectively, and the positive force and the reverse left and right force are equal;

[0061] The first side pressure sensor electrode 10 and the second side pressure sensor electrode 11 must be concentric and have equal areas to ensure that they are subjected to the same pressure, thereby ensuring that the pressures received are equal;

[0062] An electrode reinforcement sheet 14 is added to the middle layer between the first side pressure sensor electrode 10 and the second side pressure sensor electrode 11, and the first side pressure sensor electrode 10, the second side pressure sensor electrode 11 and the electrode reinforcement sheet 14 are concentric. At the same time, the area of ​​the electrode reinforcement sheet 14 is larger than the area of ​​the first side pressure sensor electrode 10 and the second side pressure sensor electrode 11. The main benefit is to ensure that the first side pressure sensor electrode 10 and the second side pressure sensor electrode 11 have a support point during the force process and will not be deformed or twisted.

[0063] The pressure values ​​of the first side pressure sensor electrode 10 and the second side pressure sensor electrode 11 are transmitted to a preset collector through two groups of FPCL lines.

[0064] It should be noted that, for existing thin film pressure sensors, high resolution means narrow measuring range, and vice versa, when the measuring range is large, the resolution is low. When the measuring range is large, the resolution is not high enough, resulting in inaccurate pressure measurement in different intervals.

[0065] Assuming that the measuring range of a pressure sensor is AB and its resolution coefficient is C, the unit pressure of the pressure sensor in terms of resolution is F=(BA) / C.

[0066] For example, the pressure sensor has a range of 0-2 MPa and a resolution of 4096, so the unit pressure on the resolution is 2*10 6 / 4096=488.28Pa (the smallest recognizable number is 488.28Pa);

[0067] The measuring range of 0-0.5mpa is based on 4096 resolution, and the unit pressure of the resolution is 0.5mpa*10 6 / 4096=122Pa (the smallest recognizable number is 122Pa), which obviously gives a more accurate reading.

[0068] Based on the technical solution of the embodiment of the present application, two or more different sensors are packaged together, and when the pressure value is within a certain range, the best resolution is displayed.

[0069] Assume that sensor 1 and sensor 2 are used, sensor 1 has a low range and high resolution, and sensor 2 has a high range and low resolution.

[0070] After the sensor 1 and the sensor 2 are combined, a new sensor is formed, which is called a combined sensor. When the combined sensor is subjected to force, both sensors will collect pressure and transmit the data to a preset data storage module. The preset data processing module identifies the range of the measurement range and outputs the appropriate range and resolution to a preset display terminal.

[0071] The manufacturing principle of the combined sensor is mainly to assemble sensor one and sensor two together, and the specific method is to glue them together. The process methods include but are not limited to double-sided tape, various types of glue, hot pressing, etc.

[0072] In the description of the present application, it should be noted that the terms "upper", "lower", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present application. Unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be an indirect connection through an intermediate medium, or it can be a connection between the two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present application can be understood according to the specific circumstances.

[0073] It should be noted that, in this application, relational terms such as "first" and "second" are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, the elements defined by the sentence "comprise a ..." do not exclude the presence of other identical elements in the process, method, article or device including the elements.

[0074] The above description is only a specific implementation of the present application, so that those skilled in the art can understand or implement the present application. Various modifications to these embodiments will be apparent to those skilled in the art, and the general principles defined herein can be implemented in other embodiments without departing from the spirit or scope of the present application. Therefore, the present application will not be limited to the embodiments shown herein, but will conform to the widest range consistent with the principles and novel features applied for herein.

Claims

1. A multi-range and multi-resolution thin film pressure sensor, characterized in that: The thin film pressure sensor comprises: A double-sided electrode plate (1), wherein a plurality of first-side pressure sensor electrodes (10) and a plurality of second-side pressure sensor electrodes (11) are arranged in a matrix on the top surface and the bottom surface of the double-sided electrode plate (1), and the number of the first-side pressure sensor electrodes (10) and the number of the second-side pressure sensor electrodes (11) are the same and correspond one to one; A first side circuit connection gold finger (12) and a second side circuit connection gold finger (13) are provided on one side of the double-sided electrode plate (1); Each of the first-side pressure sensor electrodes (10) is electrically connected to the first-side circuit connection gold finger (12); Each of the second-side pressure sensor electrodes (11) is electrically connected to the second-side circuit connection gold finger (13); The pressure monitoring ranges of the first-side pressure sensor electrode (10) and the second-side pressure sensor electrode (11) are different.

2. The multi-range and multi-resolution thin film pressure sensor according to claim 1, characterized in that: A plurality of electrode reinforcement sheets (14) are arranged in a matrix within the double-sided electrode plate (1); The number of the electrode reinforcement sheet (14), the first side pressure sensor electrode (10) and the second side pressure sensor electrode (11) is consistent and corresponds one to one.

3. The multi-range and multi-resolution thin film pressure sensor according to claim 1, characterized in that: The top surface of the double-sided electrode plate (1) is provided with a first-side fixing adhesive layer (2), a first-side pressure film layer (3) and a first-side protective conductive layer (4) in sequence from bottom to top.

4. The multi-range and multi-resolution thin film pressure sensor according to claim 3, characterized in that: The first-side fixed adhesive layer (2) is a ring-shaped structure, and is used to bond and connect the first-side pressure film layer (3) to the top surface of the double-sided electrode plate (1).

5. The multi-range and multi-resolution thin film pressure sensor according to claim 1, characterized in that: The bottom surface of the double-sided electrode plate (1) is provided with a second side fixing adhesive layer (5), a second side pressure film layer (6) and a second side protective conductive layer (7) in sequence from top to bottom.

6. The multi-range and multi-resolution thin film pressure sensor according to claim 5, characterized in that: The second-side fixed adhesive layer (5) is a ring-shaped structure, and is used to bond and connect the second-side pressure film layer (6) to the bottom surface of the double-sided electrode plate (1).

7. The multi-range and multi-resolution thin film pressure sensor according to claim 1, characterized in that: The first side circuit connection gold finger (12) and the second side circuit connection gold finger (13) are stacked up and down with an interval.

8. The multi-range and multi-resolution thin film pressure sensor according to claim 1, characterized in that: The first side circuit connection gold finger (12) and the second side circuit connection gold finger (13) are both FPCs.

9. The multi-range and multi-resolution thin film pressure sensor according to claim 1, characterized in that: The pressure monitoring resolution of the first side pressure sensor electrode (10) and the second side pressure sensor electrode (11).

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