Ultra-precise three-stage heat exchange temperature control system special for integrated circuit
By adopting a three-stage heat exchange temperature control system in the temperature control system and using the ladder temperature control technology of factory water, heating wire and precision heating wire, the temperature control system in the existing technology has high energy consumption and low accuracy. The problem is that high-precision temperature control and energy consumption saving effects are achieved.
Patent Information
- Application Number
- CN202411559981.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-11-04
- Publication Date
- 2025-02-18
AI Technical Summary
In the prior art, the energy consumption of temperature control systems is too large and the temperature control accuracy is not high, especially in advanced processes of 7 nanometers and below, it is difficult to meet the high-precision temperature control requirements of ±0.01℃.
Adopt a special ultra-precision three-stage heat exchange temperature control system for integrated circuits, which includes a PCW system, a microprocessing module and a three-stage heat exchange circulation fluid system. It works in a coordinated manner through the first-stage, second-stage and three-stage temperature control systems, and utilizes factory affairs. Water, heating wire and precision heating wire are used to control the temperature step by step.
While meeting lower energy consumption, the accuracy of temperature control is greatly improved, and the temperature control accuracy of ±0.01℃ is achieved, which improves the product yield and extends the service life of the temperature control system.
Smart Images
Figure CN119472848A_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to the field of semiconductor processing technology, and in particular to an ultra-precision three-stage heat exchange temperature control system dedicated to integrated circuits. Background Art
[0002] In semiconductor precision processing, there is a need for precise temperature control of the coolant. Temperature control is a key process factor, especially in advanced processes of 7 nanometers and below, where there is a demand for large refrigeration capacity and high-precision temperature control with a temperature control accuracy of ±0.01°C. A slight change in temperature will have a serious impact on product quality.
[0003] The Peltier cooling sheet solution in the prior art can accurately control the temperature within the range of ±0.01°C, but has the following disadvantages based on its cooling method: 1. Since it is directly electric cooling, there is no medium for heat conduction in the middle, resulting in the required power consumption of 2 to 3 times that of traditional compressor cooling under the same cooling capacity; 2. Due to the performance limitation of the Peltier body, the cooling range is small, and the cooling capacity that can be provided is generally less than 1kw, and the quality of domestic Peltier is uneven, and it is extremely difficult to repair after damage;
[0004] For another precision temperature control heat exchange system based on factory water cooling, its control target is Figure 1 The temperature at T1 is PID-regulated by adjusting the service water flow, circulating liquid flow, and heating percentage of the HT1 heating wire. Due to the large temperature fluctuation of the circulating liquid entering the temperature control system from the client, the effect of the first-level temperature control can reach the requirements of ±0.1 to ±0.05°C, which still cannot meet the high-precision temperature control requirement of ±0.01°C. Summary of the invention
[0005] In view of the shortcomings of the prior art, the present invention provides an ultra-precision three-stage heat exchange temperature control system dedicated to integrated circuits, which solves the technical problems of excessive energy consumption and low temperature control accuracy of the temperature control system in the prior art, and achieves the purpose of greatly improving the temperature control accuracy while meeting the requirements of lower energy consumption.
[0006] In order to solve the above technical problems, the present invention provides the following technical solutions: an ultra-precision three-stage heat exchange temperature control system dedicated to integrated circuits, including a PCW system for primary heat exchange of circulating fluid, and a microprocessor module for temperature control of the circulating fluid. The system is also provided with a circulating fluid system for high-precision temperature control of the circulating fluid through three-stage heat exchange.
[0007] Preferably, the circulating fluid system includes a primary temperature control system, a secondary temperature control system and a tertiary temperature control system. The three-stage temperature control system consists of a second high-temperature protection switch, a precision heating wire and a third temperature sensor. The circulating fluid flows to the precision heating wire and the third temperature sensor through the second high-temperature protection switch. The third temperature sensor transmits the collected temperature of the circulating fluid to the microprocessor module. The microprocessor module adjusts the output power of the precision heating wire according to the temperature of the circulating fluid, and performs three-stage temperature control on the circulating fluid. The second high-temperature protection switch is used to prevent the precision heating wire from dry burning without flow, and to prevent the circulating fluid system from being damaged by excessively high or low temperature.
[0008] Preferably, the primary temperature control system consists of a drain manual valve, a second filter, a flow meter, a second bypass manual valve, a heat exchanger, and a first temperature sensor. The circulating fluid flows to the heat exchanger through the second filter and the flow meter, and the plant cooling water in the PCW system is used for initial heat exchange in the heat exchanger. The collected temperature of the circulating fluid is transmitted to the microprocessor module through the first temperature sensor, and the microprocessor module performs primary temperature control on the circulating fluid according to the temperature of the circulating fluid.
[0009] Preferably, the secondary temperature control system includes a first high-temperature protection switch, a heating wire barrel, a heating wire and a second temperature sensor. The circulating fluid flows through the first high-temperature protection switch, the heating wire barrel and the heating wire through the first temperature sensor, and flows to the second temperature sensor. The collected temperature of the circulating fluid is transmitted to the microprocessor module through the second temperature sensor. The microprocessor module adjusts the output power of the heating wire according to the temperature of the circulating fluid. The first high-temperature protection switch is used to prevent the heating wire from dry burning without flow, and to prevent the circulating fluid temperature from being too high or too low, causing damage to the circulation system.
[0010] Preferably, the PCW system consists of a first filter, a proportional valve and a first Bypass manual valve. The plant cooling water in the PCW system flows to the heat exchanger position through the first filter and the proportional valve. The microprocessor module controls the flow rate of the plant cooling water by adjusting the proportional valve and adjusts the temperature of the circulating fluid at the same time.
[0011] Preferably, the circulating fluid system also includes a water replenishment system and a circulation system. The water replenishment system consists of a liquid replenishment tank, a sight glass, a low liquid level float and an extremely low liquid level float. The sight glass is used to observe the remaining amount of circulating fluid, and the liquid replenishment tank is used to replenish the circulating fluid.
[0012] Preferably, the circulation system consists of a water pump and a pressure sensor, wherein the water pump is used to provide flow power for the circulating fluid, and the pressure sensor is used to measure the pressure of the circulating fluid.
[0013] Preferably, the flow meter is used to detect the flow rate of the circulating fluid and stop the operation of the circulating fluid system when the flow rate is lower than a preset value of the flow rate.
[0014] Preferably, the low liquid level float and the extremely low liquid level float are respectively set with time limits. When the time when the low liquid level float is triggered exceeds the time limit, the microprocessor module will issue an early warning. When the time when the extremely low liquid level float is triggered exceeds the time limit, the microprocessor module will stop the temperature control system.
[0015] Preferably, the model of the microprocessor module is HC15P013A0-SOP8.
[0016] By means of the above technical solution, the present invention provides an ultra-precise three-stage heat exchange temperature control system for integrated circuits, which has at least the following beneficial effects:
[0017] 1. When the temperature rises, the proportional valve of the present invention will be closed according to the set value opening, and the heating wire and the precision heating wire will be used for heating at the same time, which shortens the time for heating to the target temperature value, thereby saving energy consumption. When the temperature is controlled, the proportional valve will be opened between 0 and the set value opening according to the PID parameters, assisting the heating wire in heating and temperature control, reducing the heating percentage of the heating wire. When the heating heat is small, the heating wire does not need to work, further saving energy consumption.
[0018] 2. The present invention can rely on the microprocessor module for unified control, so that the proportional valve can further control the plant water flow after PID adjustment of its opening, thereby increasing the operating stability of the PCW system, avoiding the situation of unstable flow during operation, affecting the temperature control effect of the temperature control system, improving the working efficiency of the temperature control system, and extending its service life.
[0019] 3. The present invention adopts a three-stage temperature control method, so that the circulating fluid can be coordinated with the plant water, heating wire and precision heating wire to control the temperature. First, the plant cooling water is used for the first-level temperature control, then the heating wire is used for the second-level temperature control, and finally the precision heating wire is used for the third-level temperature control. The cascade temperature control method can increase the temperature control accuracy to ±0.01℃, which not only greatly improves the temperature accuracy, but also improves the product yield. BRIEF DESCRIPTION OF THE DRAWINGS
[0020] The drawings described herein are used to provide a further understanding of the present application and constitute a part of the present application. The illustrative embodiments of the present application and their descriptions are used to explain the present application and do not constitute an improper limitation on the present application. In the drawings:
[0021] Figure 1 This is a schematic diagram of the existing plant water cooling temperature control system;
[0022] Figure 2This is a schematic diagram of an ultra-precision three-stage heat exchange temperature control system dedicated to integrated circuits of the present invention.
[0023] In the figure: 1. PCW system; 2. Circulating liquid system; 21. Primary temperature control system; 211. Drain manual valve; 212. Second filter; 213. Flow meter; 214. Second Bypass manual valve; 215. Heat exchanger; 216. First temperature sensor; 22. Secondary temperature control system; 221. First high temperature protection switch; 222. Heating wire barrel; 223. Heating wire; 224. Second temperature sensor; 225. Circulating system; 2251. Water pump; 2252. Pressure sensor; 23. Third stage temperature control system; 231. Second high temperature protection switch; 232. Precision heating wire; 233. Third temperature sensor; 24. Water replenishment system; 241. Liquid replenishment tank; 242. Sight glass; 243. Low liquid level float; 244. Extremely low liquid level float. DETAILED DESCRIPTION
[0024] In order to make the above-mentioned purposes, features and advantages of the present invention more obvious and easy to understand, the present invention is further described in detail below with reference to the accompanying drawings and specific implementation methods, so that the implementation process of how the present application uses technical means to solve technical problems and achieve technical effects can be fully understood and implemented accordingly.
[0025] Due to the technical problems of excessive energy consumption and low temperature control accuracy in the existing temperature control system, please refer to Figure 2The present embodiment provides an ultra-precise three-stage heat exchange temperature control system for integrated circuits, which can greatly improve the accuracy of temperature control while meeting the requirements of low energy consumption. The three-stage heat exchange temperature control system includes a PCW system 1 for primary heat exchange of circulating fluid, and a microprocessor module for temperature control of circulating fluid. The system is also provided with a circulating fluid system 2 for high-precision temperature control of circulating fluid by means of three-stage heat exchange. The circulating fluid system 2 includes a primary temperature control system 21, a secondary temperature control system 22 and a tertiary temperature control system 23. The primary temperature control system 21 is composed of a drain hand valve 211, a second filter 212, a flow The secondary temperature control system 22 comprises a first high temperature protection switch 221, a heating wire barrel 222, a heating wire 223 and a second temperature sensor 224. The circulating fluid passes through the second filter 212 and the flow meter 213 and flows to the heat exchanger 215. The plant cooling water in the PCW system 1 is used for the primary heat exchange in the heat exchanger 215. The collected temperature of the circulating fluid is transmitted to the microprocessor module through the first temperature sensor 216. The microprocessor module performs primary temperature control on the circulating fluid according to the temperature of the circulating fluid. The secondary temperature control system 22 comprises a first high temperature protection switch 221, a heating wire barrel 222, a heating wire 223 and a second temperature sensor 224. The circulating fluid passes through the heat exchanger 215. The circulating fluid flows through the first temperature sensor 216, the first high temperature protection switch 221, the heating wire barrel 222 and the heating wire 223, and flows to the second temperature sensor 224. The collected temperature of the circulating fluid is transmitted to the microprocessing module through the second temperature sensor 224. The microprocessing module adjusts the output power of the heating wire 223 according to the temperature of the circulating fluid. The first high temperature protection switch 221 is used to prevent the heating wire 223 from burning dry without flow, and to prevent the circulating fluid temperature from being too high or too low to cause damage to the circulation system. The three-stage temperature control system 23 is composed of the second high temperature protection switch 231, the precision heating wire 232 and the third temperature sensor 233. The circulating fluid flows to the precision heating wire 232 and the third temperature sensor 233 through the second high-temperature protection switch 231. The third temperature sensor 233 transmits the collected temperature of the circulating fluid to the microprocessor module. The microprocessor module adjusts the output power of the precision heating wire 232 according to the temperature of the circulating fluid, and performs three-level temperature control on the circulating fluid. The second high-temperature protection switch 231 is used to prevent the precision heating wire 232 from dry burning without flow, and to prevent the circulating fluid system 2 from being damaged by excessively high or low temperature. The flowmeter 213 is used to detect the flow of the circulating fluid, and stop the operation of the circulating fluid system 2 when the flow is lower than the preset value of the flow.
[0026] Before starting the temperature control system in the present invention, it is necessary to set preset values for the following components in advance, including the first temperature sensor 216, the second temperature sensor 224, the third temperature sensor 233, the flow meter 213, the proportional valve 12, the pressure sensor 2252, the low liquid level float 243 and the extremely low liquid level float 244. After opening the drain manual valve 211, the circulating liquid is filtered through the second filter 212, and the real-time flow of the circulating liquid is detected by the flow meter 213. If the flow meter 213 detects that the flow of the circulating liquid is less than the preset value, the circulating liquid system will be temporarily closed. In the heat exchanger 215, the plant cooling water will take away the heat of the circulating liquid, thereby completing the first-level temperature control. At this time, the target point of temperature control is the first temperature sensor 216, and the target temperature of the first temperature sensor 216 is: the customer's required temperature SV-1°C. At this time, the microprocessor module controls the plant water flow and the proportional valve 12 to control the temperature at the first temperature sensor 216 to: the customer's required temperature SV-1°C±0.5°C.
[0027] After the circulating fluid passes through the first high-temperature protection switch 221, it is heated by the heating wire 223 in the heating wire barrel 222. After heating, the temperature is collected by the second temperature sensor 224. The microprocessor module controls the heating temperature of the heating wire 223 according to the collected temperature. At this time, the target point of temperature control is the second temperature sensor 224. The target temperature of the second temperature sensor 224 is: the customer's required temperature SV-0.5℃. At this time, the microprocessor module analyzes and matches the output power of the heating wire 223 in the temperature control system to control the temperature at the second temperature sensor 224 to: the customer's required temperature SV-0.5℃±0.3℃, and then flows through the water pump 2251 and the pressure sensor 2252 to the three-stage temperature control system 23.
[0028] The temperature of the circulating fluid is collected by the third temperature sensor 233 at the three-level temperature control system 23, and the precision heating wire 232 is controlled by the microprocessor module. The temperature of the circulating fluid is controlled by adjusting the output power. At this time, the target point of temperature control is the third temperature sensor 233, and the target temperature of the third temperature sensor 233 is: the temperature SV required by the customer. At this time, the microprocessor module analyzes and matches the output power of the precision heating wire 232 in the temperature control system to control the temperature at the third temperature sensor 233 to: the temperature SV required by the customer ± 0.01 ° C. Finally, the circulating fluid with stable temperature control is supplied to the client device. The three target temperature setting points of the three-level temperature control are: After a large amount of experimental data, the three most stable and efficient target control temperature points are: The target temperature of the first temperature sensor 216 is SV-1℃±0.5℃, the target temperature of the second temperature sensor 224 is SV-0.5℃±0.3℃, and the target temperature of the third temperature sensor 233 is SV±0.01℃. The heating wire needs to be customized as a precision heating wire, and the heating power needs to be between 500 and 600W. Through the three-stage temperature control method, the circulating fluid can be coordinated with the plant water, heating wire and precision heating wire for temperature control. First, the first-level temperature control is performed using the plant cooling water, and then the second-level temperature control is performed using the heating wire. Finally, the third-level temperature control is performed using the precision heating wire. The cascade temperature control method can increase the temperature control accuracy to ±0.01℃, which not only greatly improves the temperature accuracy, but also improves the product yield.
[0029] Since the circulating fluid will be gradually consumed during the circulation process, if it is not observed for a long time or there is no relevant personnel to manage it, the circulating fluid with too high temperature may easily cause system failure. Please refer to Figure 2 The circulating liquid system 2 also includes a water replenishment system 24 and a circulation system 225. The water replenishment system 24 consists of a replenishment water tank 241, a sight glass 242, a low liquid level float 243 and an extremely low liquid level float 244. The sight glass 242 is used to observe the remaining amount of circulating liquid, and the replenishment water tank 241 is used to replenish the circulating liquid. The circulation system 225 consists of a water pump 2251 and a pressure sensor 2252. The water pump 2251 is used to provide flow power for the circulating liquid, and the pressure sensor 2252 is used to measure the pressure of the circulating liquid. The low liquid level float 243 and the extremely low liquid level float 244 are respectively set with limit times. When the low liquid level float 243 is triggered for more than the limit time, the microprocessor module will issue an early warning. When the extremely low liquid level float 244 is triggered for more than the limit time, the microprocessor module will stop the temperature control system.
[0030] In the present invention, during the circulation of the circulating liquid, the circulating liquid is stored in the replenishing water tank 241 and replenished in time when the circulating liquid is lacking. The sight glass 242 can facilitate the staff to directly observe the circulating liquid. The low liquid level float 243 and the extremely low liquid level float 244 give early warning and automatic stop for the remaining amount of the circulating liquid. When the circulating liquid is too little and triggers the low liquid level float 243 for more than a certain time, such as more than the preset time of 2 minutes, it means that the circulating liquid is less, and a warning can be set in advance to remind the user to add circulating liquid. When the extremely low liquid level float 244 is triggered for more than the preset time, such as more than 15 seconds, it means that the remaining amount of circulating liquid is very little. In order to prevent the extremely small amount of circulating liquid from causing equipment failure, the temperature control system will automatically stop running. The water replenishing system 24 and the circulation system 225 can not only provide circulation power for the circulating liquid, but also prevent the circulating liquid from being consumed and the temperature control system from being damaged by excessively high temperature, thereby reducing the failure damage rate of the temperature control system.
[0031] Since the temperature control system in the existing technology consumes a lot of energy during the temperature control process, please refer to Figure 2 The PCW system 1 is composed of a first filter 11, a proportional valve 12 and a first bypass manual valve 13. The plant cooling water in the PCW system 1 flows to the heat exchanger 215 through the first filter 11 and the proportional valve 12. The microprocessor module controls the flow of the plant cooling water by adjusting the proportional valve 12 and adjusts the temperature of the circulating fluid at the same time. The model of the microprocessor module is HC15P013A0-SOP8.
[0032] The proportional valve 12 in the present invention can control the flow of the temperature control system, the first bypass hand valve 13 can balance the service water pressure on both sides, and the microprocessor module uses HC15P013A0-SOP8, because it has a built-in PIC core compatible with the RISC instruction set, which ensures high execution efficiency. In addition, HC15P013A0 also provides 1K bytes of ROM and 48 bytes of RAM to meet basic program storage and data processing requirements, and has multiple practical functions, including 2 8-bit timers / counters for realizing delay, pulse width measurement, frequency measurement and other functions. When the temperature rises, the proportional valve will be closed according to the set value opening. The hot wire and the precision heating wire are heated at the same time, which shortens the time for heating to the target temperature value, thereby saving energy. When controlling the temperature, the proportional valve will open between 0 and the set value according to the PID parameters to assist the heating wire in heating and temperature control, reducing the heating percentage of the heating wire. When the heating heat is small, the heating wire does not need to work, further saving energy. Relying on the unified control of the microprocessor module, the proportional valve can further control the plant water flow after PID adjustment of its opening, increasing the operating stability of the PCW system, avoiding unstable flow during operation, affecting the temperature control effect of the temperature control system, improving the working efficiency of the temperature control system, and extending its service life.
[0033] The above implementation methods have been described in detail. Specific examples are used herein to illustrate the principles and implementation methods of the present invention. The description of the above embodiments is only used to help understand the method of the present invention and its core idea. At the same time, for those skilled in the art, according to the idea of the present invention, there will be changes in the specific implementation methods and application scope. In summary, the content of this specification should not be understood as a limitation on the present invention.
Claims
1. An ultra-precision three-stage heat exchange temperature control system for integrated circuits, comprising a PCW system (1) for primary heat exchange of a circulating fluid, and a microprocessor module for temperature control of the circulating fluid, characterized in that: The system is also provided with a circulating fluid system (2) for high-precision temperature control of the circulating fluid by means of three-stage heat exchange; The circulating fluid system (2) comprises a primary temperature control system (21), a secondary temperature control system (22) and a tertiary temperature control system (23); the tertiary temperature control system (23) comprises a second high temperature protection switch (231), a precision heating wire (232) and a third temperature sensor (233); the circulating fluid flows through the second high temperature protection switch (231) to the positions of the precision heating wire (232) and the third temperature sensor (233); the third temperature sensor (233) transmits the collected temperature of the circulating fluid to a microprocessor module; the microprocessor module adjusts the output power of the precision heating wire (232) according to the temperature of the circulating fluid and performs three-stage temperature control on the circulating fluid; the second high temperature protection switch (231) is used to prevent the precision heating wire (232) from dry burning without flow, and to prevent the circulating fluid temperature from being too high or too low, thereby causing damage to the circulating fluid system (2).
2. The temperature control system according to claim 1, characterized in that: The primary temperature control system (21) is composed of a drain manual valve (211), a second filter (212), a flow meter (213), a second bypass manual valve (214), a heat exchanger (215), and a first temperature sensor (216). The circulating fluid flows to the heat exchanger (215) through the second filter (212) and the flow meter (213). The primary heat exchange is performed in the heat exchanger (215) using the plant cooling water in the PCW system (1). The collected temperature of the circulating fluid is transmitted to the micro-processing module through the first temperature sensor (216). The micro-processing module performs primary temperature control on the circulating fluid according to the temperature of the circulating fluid.
3. The temperature control system according to claim 1, characterized in that: The secondary temperature control system (22) comprises a first high temperature protection switch (221), a heating wire barrel (222), a heating wire (223) and a second temperature sensor (224); the circulating fluid flows through the first high temperature protection switch (221), the heating wire barrel (222) and the heating wire (223) via the first temperature sensor (216), and flows to the second temperature sensor (224); the collected temperature of the circulating fluid is transmitted to the microprocessor module via the second temperature sensor (224); the microprocessor module adjusts the output power of the heating wire (223) according to the temperature of the circulating fluid; the first high temperature protection switch (221) is used to prevent the heating wire (223) from dry burning without flow, and to prevent the circulating fluid temperature from being too high or too low, causing damage to the circulation system.
4. The temperature control system according to claim 1, characterized in that: The PCW system (1) is composed of a first filter (11), a proportional valve (12) and a first bypass manual valve (13). The plant cooling water in the PCW system (1) flows to the heat exchanger (215) through the first filter (11) and the proportional valve (12). The microprocessor module controls the flow of the plant cooling water by adjusting the proportional valve (12) and adjusts the temperature of the circulating fluid at the same time.
5. The temperature control system according to claim 1, characterized in that: The circulating liquid system (2) further comprises a water replenishment system (24), the water replenishment system (24) comprising a liquid replenishment water tank (241), a liquid sight glass (242), a low liquid level float (243) and an extremely low liquid level float (244), the liquid sight glass (242) being used to observe the remaining amount of the circulating liquid, and the liquid replenishment water tank (241) being used to replenish the circulating liquid.
6. The temperature control system according to claim 3, characterized in that: The secondary temperature control system (22) further comprises a circulation system (225), wherein the circulation system (225) is composed of a water pump (2251) and a pressure sensor (2252), wherein the water pump (2251) is used to provide flow power for the circulating fluid, and the pressure sensor (2252) is used to measure the pressure of the circulating fluid.
7. The temperature control system according to claim 2, characterized in that: The flow meter (213) is used to detect the flow rate of the circulating fluid and to stop the operation of the circulating fluid system (2) when the flow rate is lower than a preset flow rate value.
8. The temperature control system according to claim 5, characterized in that: The low liquid level float (243) and the extremely low liquid level float (244) are each set with a time limit. When the time when the low liquid level float (243) is triggered exceeds the time limit, the microprocessor module will issue an early warning. When the time when the extremely low liquid level float (244) is triggered exceeds the time limit, the microprocessor module will stop the temperature control system.
9. The temperature control system according to claim 1, characterized in that: The model of the microprocessor module is HC15P013A0-SOP8.