In-situ sample holder of transmission electron microscope

Abstract

The invention provides an in-situ sample rod of a transmission electron microscope, relates to the technical field of transmission electron microscopes, and combines two functions of environment simulation and accommodation of a to-be-tested sample so as to facilitate micro-scale observation of the to-be-tested sample under different environment conditions. The transmission electron microscope in-situ sample rod comprises a laser emission module; one end of the first optical fiber is used for being connected with the output end of the laser emitting module, and the first optical fiber is used for conducting light emitted by the laser emitting module; the objective table is used for being connected with the other end of the first optical fiber, the objective table comprises a first area and a second area, the first area is located between the first optical fiber and the second area, a plurality of light propagation channels extending in the first direction are arranged in the first area, and the second area is used for containing a sample to be detected; one end of the light propagation channel is connected with the first optical fiber, the light propagation channel is used for conducting light transmitted by the first optical fiber to the second area, and the first direction is the extension direction of the objective table.

Description

Technical Field

[0001] The embodiments of the present application relate to the technical field of transmission electron microscopy, and in particular to an in-situ sample rod for a transmission electron microscope. Background Art

[0002] With the continuous development of micro-nano technology, the fields of photoelectrocatalysis, photodetectors, optical sensors, etc. are gradually extending to the nanoscale and even the atomic scale. As a microscope that uses electron beam as a light source, the transmission electron microscope is widely used in the characterization of structures at the atomic scale. When using a transmission electron microscope to characterize the internal microstructure of a sample, the sample rod is often inserted into the transmission electron microscope, and the sample rod is driven to rotate by the goniometer inside the transmission electron microscope to observe the sample from multiple angles.

[0003] However, the existing in-situ sample rods of transmission electron microscopes can usually only be used to observe microscale structures under a single environmental condition, which has certain limitations for material research. It is difficult to achieve dynamic and real-time microscopic changes of samples in other environments by simulating environmental conditions, thus affecting the observation effect of the transmission electron microscope. Summary of the invention

[0004] An in-situ sample holder for a transmission electron microscope provided in an embodiment of the present application can combine the two functions of environmental simulation and accommodating a sample to be tested, so as to facilitate microscale observation of the sample to be tested under different environmental conditions, thereby improving the observation effect of the transmission electron microscope.

[0005] In a first aspect of an embodiment of the present application, there is provided an in-situ sample holder for a transmission electron microscope, comprising:

[0006] Laser emission module;

[0007] A first optical fiber, one end of which is used to connect to the output end of the laser emitting module, and the first optical fiber is used to transmit the light emitted by the laser emitting module;

[0008] A stage, wherein the stage is used to be connected to the other end of the first optical fiber, wherein the stage includes a first area and a second area, the first area is located between the first optical fiber and the second area, a plurality of light propagation channels extending along a first direction are arranged in the first area, the second area is used to accommodate a sample to be tested, one end of the light propagation channel is connected to the first optical fiber, the light propagation channel is used to conduct the light transmitted by the first optical fiber to the second area, and the first direction is the extension direction of the stage.

[0009] In some embodiments, a sample slot is disposed in the second area, and the sample slot is used to accommodate the sample to be tested.

[0010] In some embodiments, the other end of the light propagation channel surrounds the circumference of the sample slot; and / or,

[0011] The other end of the light propagation channel is connected to the sample slot.

[0012] In some embodiments, the light propagation channel includes a fiber guide channel and a second optical fiber;

[0013] The optical fiber guide channel is used to accommodate the second optical fiber, and the first optical fiber is connected to the second optical fiber.

[0014] In some embodiments, the fiber guide channel includes at least one of a fiber guide groove and a fiber guide through hole.

[0015] In some embodiments, the light propagation channel includes a through hole and a high-reflective material layer, the through hole at least passes through the first region, and the high-reflective material layer is located on an inner wall of the through hole.

[0016] In some embodiments, the transmission electron microscope in-situ sample holder further comprises:

[0017] An anti-reflection structure, wherein the anti-reflection structure is located at an end of the light propagation channel away from the first area.

[0018] In some embodiments, the transmission electron microscope in-situ sample holder further comprises:

[0019] A shaft connected to the stage, wherein the shaft is used to accommodate the first optical fiber;

[0020] A temperature measuring module is located in the rod body, one end of the temperature measuring module is used to connect with the sample to be tested, and the temperature measuring module is used to detect the temperature of the sample to be tested.

[0021] In some embodiments, the transmission electron microscope in-situ sample holder further comprises:

[0022] a temperature regulating module, wherein the temperature regulating module and the light propagation channel are located on the same side of the stage, the temperature regulating module is located in the second area, the temperature regulating module is used to be arranged around the sample to be tested, and the temperature regulating module is used to regulate the ambient temperature of the environment in which the sample to be tested is located; and / or,

[0023] An electric field regulating module, wherein the electric field regulating module is used to apply an electric field to the sample to be tested.

[0024] In some embodiments, the stage includes at least four of the light propagation channels.

[0025] The embodiment of the present application provides an in-situ sample holder for a transmission electron microscope, wherein a laser light is emitted by a laser emission module, and the laser light emitted by the laser emission module is transmitted to a light propagation channel on a stage through a first optical fiber, and the laser light is further transmitted to a second area through the light propagation channel on the stage, thereby providing a light field for the sample to be tested contained in the second area. Therefore, by adjusting at least one of the intensity of the laser light emitted by the laser emission module, the shape of the light propagation channel, and the arrangement of the light propagation channel, the light field environment around the sample to be tested on the stage can be changed, thereby realizing micro-scale observation of the sample to be tested under different light field environments, improving the observation effect of the transmission electron microscope, and enhancing the comprehensiveness of the observation results. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] In order to more clearly illustrate the technical solutions in the embodiments of the present application or related technologies, the drawings required for use in the embodiments of the present application or related technical descriptions will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without paying creative work.

[0027] FIG1 is a schematic structural diagram of an in-situ sample holder for a transmission electron microscope provided in an embodiment of the present application;

[0028] FIG2 is a schematic structural diagram of a stage for an in-situ sample holder of a transmission electron microscope provided in an embodiment of the present application;

[0029] FIG3 is a schematic structural diagram of another stage of an in-situ sample holder for a transmission electron microscope provided in an embodiment of the present application;

[0030] FIG. 4 is a schematic structural diagram of another stage for an in-situ sample rod of a transmission electron microscope provided in an embodiment of the present application.

[0031] Description of reference numerals:

[0032] 100, laser emission module; 200, first optical fiber; 300, stage; 310, first area; 320, second area; 301, light propagation channel; 3011, second optical fiber; 3012, high reflective material layer; 302, sample slot; 400, optical fiber interface; 500, rod body; 600, temperature adjustment module. DETAILED DESCRIPTION

[0033] In order to facilitate understanding of the present application, the present application will be described more fully below with reference to the relevant drawings. Embodiments of the present application are provided in the drawings. However, the present application can be implemented in many different forms and is not limited to the embodiments described herein. On the contrary, the purpose of providing these embodiments is to make the disclosure of the present application more thorough and comprehensive.

[0034] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art to which this application belongs. The terms used herein in the specification of this application are only for the purpose of describing specific embodiments and are not intended to limit this application.

[0035] When used herein, the singular forms "a", "an" and " / the" may also include the plural forms, unless the context clearly indicates otherwise. It should also be understood that the terms "include / comprise" or "have" and the like specify the presence of stated features, wholes, steps, operations, components, parts or combinations thereof, but do not exclude the possibility of the presence or addition of one or more other features, wholes, steps, operations, components, parts or combinations thereof. At the same time, in this specification, the term "and / or" includes any and all combinations of the relevant listed items.

[0036] With the continuous development of micro-nano technology, the fields of photoelectrocatalysis, photodetectors, optical sensors, etc. are gradually extending to the nanoscale and even the atomic scale. As a microscope that uses electron beam as a light source, the transmission electron microscope is widely used in the characterization of structures at the atomic scale. When using a transmission electron microscope to characterize the internal microstructure of a sample, the sample rod is often inserted into the transmission electron microscope, and the sample rod is driven to rotate by the goniometer inside the transmission electron microscope to observe the sample from multiple angles.

[0037] However, the existing in-situ sample rods of transmission electron microscopes can usually only be used to observe microscale structures under a single environmental condition, which has certain limitations for material research. It is difficult to achieve dynamic and real-time microscopic changes of samples in other environments by simulating environmental conditions, thus affecting the observation effect of the transmission electron microscope.

[0038] It should be noted that, in the observation process of the existing transmission electron microscope, in order to simulate the light field changes in the space around the sample to be tested, an external light-filling device, such as LED lamp beads, is usually used to simulate the light field. However, the light flux of the external light-filling device is limited, and it is difficult for the external light-filling device to form a uniform light field. Therefore, the simulation effect of the light field simulation in the space around the sample to be tested by the external light-filling device is poor. Although the use of optical fiber for light field simulation can provide a large light flux, it is easy to cause the optical fiber to be arranged in a disorderly manner and scratch the sample to be tested.

[0039] Therefore, based on the demand for transmission electron microscope observation effects, proposing a transmission electron microscope in-situ sample rod that can provide a uniform, stable and controllable simulated light field is an issue that needs to be urgently addressed.

[0040] As shown in FIG1 , FIG1 is a schematic structural diagram of an in-situ sample holder for a transmission electron microscope provided in an embodiment of the present application. In a first aspect of an embodiment of the present application, an in-situ sample holder for a transmission electron microscope is provided, comprising: a laser emission module 100, a first optical fiber 200 and a stage 300. One end of the first optical fiber 200 is used to connect to the output end of the laser emission module 100, and the first optical fiber 200 is used to transmit the light emitted by the laser emission module 100; the stage 300 is used to connect to the other end of the first optical fiber 200, wherein the stage 300 includes a first area 310 and a second area 320, the first area 310 is located between the first optical fiber 200 and the second area 320, a plurality of light propagation channels 301 extending along a first direction are arranged in the first area 310, the second area 320 is used to accommodate a sample to be tested, one end of the light propagation channel 301 is connected to the first optical fiber 200, and the light propagation channel 301 is used to transmit the light transmitted by the first optical fiber 200 to the second area 320, and the first direction is the extension direction of the stage 300.

[0041] Exemplarily, the laser emitting module 100 may include multiple ones, and the first optical fiber 200 may include multiple ones. Different laser emitting modules 100 are used to connect different first optical fibers 200, and the laser intensities emitted by different laser emitting modules 100 may be different. Different first optical fibers 200 connected to different light propagation channels 301 may be connected to laser emitting modules 100 with different laser intensities, so as to adjust the light field brightness at different positions in the space around the sample to be measured to be different, thereby further enhancing the light field environment simulation capability of the in-situ sample holder of the transmission electron microscope and improving the observation effect of the transmission electron microscope.

[0042] Exemplarily, the laser emitting module 100 may include a laser generator. The stage 300 may be a removable MEMS (Micro-Electro-Mechanical System) stage, wherein the material of the stage 300 may include light-transmitting materials such as quartz glass, borosilicate glass, and sapphire, may include metal materials such as gold, platinum, nickel, and titanium, and may also include insulating materials such as silicon dioxide and silicon nitride.

[0043] Exemplarily, at least two light propagation channels 301 may be located in different layers, that is, at least two light propagation channels 301 are arranged along the thickness direction of the stage 300. The arrangement density of the light propagation channels 301 in different light propagation channel layers may be different, and the brightness of the light propagated by the light propagation channels 301 in different light propagation channel layers may be different. By distributing the light propagation channels 301 in different layers, light field simulation in a three-dimensional space can be achieved, thereby further enhancing the light field environment simulation capability of the in-situ sample rod of the transmission electron microscope and improving the observation effect of the transmission electron microscope.

[0044] Exemplarily, in the first direction, the length dimension of the light propagation channel 301 is equal to the length dimension of the first area 310 of the stage 300 , or the length dimension of the light propagation channel 301 is greater than the length dimension of the first area 310 of the stage 300 .

[0045] Exemplarily, the number of the first optical fibers 200 may be equal to the number of the light propagation channels 301 .

[0046] Referring to FIG. 1 , the first optical fiber 200 is connected to one end of the optical propagation channel 301 through the optical fiber interface 400. The optical fiber interface 400 may be an LC type optical fiber interface, thereby reducing the space required for the optical fiber interface 400, and further reducing the space required for the stage 300 to connect with the first optical fiber 200, so as to meet the requirement of reducing the volume of the in-situ sample rod of the transmission electron microscope. The optical fiber interface 400 may be obtained by etching on the stage 300 through a wet etching process.

[0047] For example, the brightness of the light field around the sample to be tested can be adjusted by adjusting the intensity of the laser light emitted by the laser emission module 100. The brightness of the light field around the sample to be tested can be adjusted by adjusting the length of the light propagation channel 301 and changing the distance between the end of the light propagation channel 301 and the sample to be tested. The brightness of the light field around the sample to be tested can be adjusted by adjusting the number of light propagation channels 301. The light field around the sample to be tested can be adjusted by adjusting the arrangement of the light propagation channels 301 and changing the brightness distribution at different positions in the light field around the sample to be tested.

[0048] The embodiment of the present application provides an in-situ sample holder for a transmission electron microscope, in which a laser light is emitted by a laser emission module 100, and the laser light emitted by the laser emission module 100 is transmitted to a light propagation channel 301 on a stage 300 through a first optical fiber 200, and the laser light is further transmitted to a second region 320 through the light propagation channel 301 on the stage 300, so as to provide a light field for the sample to be tested contained in the second region 320. Therefore, by adjusting at least one of the intensity of the laser light emitted by the laser emission module 100, the shape of the light propagation channel 301, and the arrangement of the light propagation channel 301, the light field environment around the sample to be tested on the stage 300 can be changed, so that micro-scale observation of the sample to be tested can be achieved under different light field environments, and the observation effect of the transmission electron microscope can be improved, and the comprehensiveness of the observation results can be enhanced.

[0049] As shown in FIG. 1 , in some feasible implementations, a sample slot 302 is disposed in the second area 320 , and the sample slot 302 is used to accommodate a sample to be tested.

[0050] For example, the sample groove 302 may be obtained by etching the second region 320 through a photolithography process.

[0051] Exemplarily, the sample slot 302 may be a trapezoidal slot, and the bottom of the trapezoidal slot is used to accommodate the sample to be tested. The bottom of the sample slot 302 may be provided with at least one of a silicon dioxide film layer, a silicon nitride film layer, and a carbon film layer, and the total thickness of the film layer at the bottom of the sample slot 302 ranges from 5 nm to 100 nm, for example, 5 nm, 10 nm, 20 nm, 50 nm, 100 nm.

[0052] Exemplarily, the bottom of the sample tank 302 is further provided with micropores, wherein the size of the micropores ranges from 2 μm to 20 μm, for example, 2 μm, 5 μm, 10 μm, 15 μm, 20 μm. The micropores can be used to leak liquid samples when the sample to be tested is a liquid sample.

[0053] The in-situ sample rod for a transmission electron microscope provided in the embodiment of the present application can limit the position of the sample to be measured by setting a sample slot 302, thereby improving the stability of the sample to be measured during the observation process and further improving the observation effect of the transmission electron microscope.

[0054] As shown in FIG. 1 , in some feasible implementations, the other end of the light propagation channel 301 surrounds the circumference of the sample slot 302 .

[0055] The embodiment of the present application provides an in-situ sample rod for a transmission electron microscope. By surrounding the other end of the light propagation channel 301 on the circumference of the sample slot 302, the light transmitted by the light propagation channel 301 can be converged around the sample to be tested, so as to form a stable and controllable light field environment, thereby further enhancing the light field environment simulation capability of the in-situ sample rod for the transmission electron microscope, realizing micro-scale observation of the sample to be tested under different light field environments, improving the observation effect of the transmission electron microscope, and enhancing the comprehensiveness of the observation results.

[0056] As shown in FIG. 1 , in some feasible implementations, the other end of the light propagation channel 301 is connected to the sample slot 302 .

[0057] The embodiment of the present application provides an in-situ sample rod for a transmission electron microscope. By connecting the other end of the light propagation channel 301 with the sample slot 302, the distance between the end of the light propagation channel 301 and the sample to be measured can be shortened, light loss can be reduced, and the ability of the in-situ sample rod for the transmission electron microscope to control the light field environment around the sample to be measured can be improved. Therefore, micro-scale observation of the sample to be measured can be achieved in different light field environments, the accuracy of light field condition simulation can be improved, the observation effect of the transmission electron microscope can be further improved, and the comprehensiveness of the observation results can be enhanced.

[0058] Fig. 2 is a schematic structural diagram of a stage of an in-situ sample holder of a transmission electron microscope provided in an embodiment of the present application. As shown in Fig. 2, in some feasible embodiments, the light propagation channel 301 includes an optical fiber guide channel and a second optical fiber 3011; wherein the optical fiber guide channel is used to accommodate the second optical fiber 3011, and the first optical fiber 200 is connected to the second optical fiber 3011.

[0059] An in-situ sample rod for a transmission electron microscope provided in an embodiment of the present application has a light propagation channel 301 including an optical fiber guide channel and a second optical fiber 3011. The second optical fiber 3011 can be limited by the optical fiber guide channel to fix the second optical fiber 3011 to prevent the second optical fiber 3011 from scratching the sample to be measured. The light transmitted by the first optical fiber 200 can also be transmitted by the second optical fiber 3011 to form a light field around the sample to be measured, so that micro-scale observation of the sample to be measured can be achieved under different light field environments, which can further improve the observation effect of the transmission electron microscope and enhance the comprehensiveness of the observation results.

[0060] In some feasible embodiments, the optical fiber guide channel includes at least one of an optical fiber guide groove and an optical fiber guide through hole.

[0061] For example, the optical fiber guide groove and the optical fiber guide through hole may be etched on the stage 300 by a laser induced etching process.

[0062] The embodiment of the present application provides an in-situ sample holder for a transmission electron microscope. By setting a groove-shaped or through-hole-shaped optical fiber guide channel, the second optical fiber 3011 can be limited to fix the second optical fiber 3011 to prevent the second optical fiber 3011 from scattering and scratching the sample to be measured. At the same time, the light transmission effect of the second optical fiber 3011 can be further guaranteed, thereby further improving the simulation capability of the in-situ sample holder for the transmission electron microscope of the light field around the sample to be measured, so as to realize micro-scale observation of the sample to be measured under different light field environments, further improving the observation effect of the transmission electron microscope, and enhancing the comprehensiveness of the observation results.

[0063] Fig. 3 is a schematic structural diagram of another stage of an in-situ sample holder of a transmission electron microscope provided in an embodiment of the present application. As shown in Fig. 3, in some feasible embodiments, the light propagation channel 301 includes a through hole and a high reflective material layer 3012, the through hole at least passes through the first region 310, and the high reflective material layer 3012 is located on the inner wall of the through hole.

[0064] For example, in the process of preparing the light propagation channel 301, a through hole may be first etched in the first area 310 of the stage 300, and then a high-reflective material layer 3012 may be deposited on the inner wall of the through hole by a thin film growth process such as a chemical vapor deposition process or a physical vapor deposition process. The material of the high-reflective material layer 3012 may include nickel, titanium, gold, etc.

[0065] An in-situ sample rod for a transmission electron microscope provided in an embodiment of the present application can form an optical channel in the first area 310 of the stage 300 by setting a high-reflective material layer 3012 on the inner wall of the through hole, and reflect the light transmitted by the first optical fiber 200 on the inner wall of the through hole through the high-reflective material layer 3012, so that the light can be transmitted to the second area 320, thereby further improving the simulation capability of the in-situ sample rod for the transmission electron microscope on the light field around the sample to be measured, so as to realize micro-scale observation of the sample to be measured in different light field environments, further improving the observation effect of the transmission electron microscope, and enhancing the comprehensiveness of the observation results.

[0066] In some feasible implementations, the transmission electron microscope in-situ sample holder further includes: an anti-reflection structure, where the anti-reflection structure is located at one end of the light propagation channel 301 away from the first region 310 .

[0067] An in-situ sample rod for a transmission electron microscope provided in an embodiment of the present application can reduce the light reflection ability of the end face of the light propagation channel 301, reduce the light loss of the light propagation channel 301, and increase the light output of the light propagation channel 301 by setting an anti-reflection structure at the end of the light propagation channel 301 away from the first area 310, and can further improve the simulation ability of the in-situ sample rod for the transmission electron microscope on the light field around the sample to be measured, thereby saving observation costs.

[0068] In some feasible embodiments, the transmission electron microscope in-situ sample rod also includes: a rod body 500, the rod body 500 is connected to the stage 300, wherein the rod body 500 is used to accommodate the first optical fiber 200; a temperature measurement module, the temperature measurement module is located in the rod body 500, one end of the temperature measurement module is used to connect to the sample to be measured, and the temperature measurement module is used to detect the temperature of the sample to be measured.

[0069] Exemplarily, the shaft 500 and the stage 300 may be connected by a buckle. The shaft 500 may also be used to accommodate metal wiring. Among them, the metal wiring used to control the temperature measurement module may be arranged in the shaft 500.

[0070] Exemplarily, the temperature measurement module may be used to determine the temperature of the sample to be measured according to the resistance of the sample to be measured.

[0071] An in-situ sample rod for a transmission electron microscope provided in an embodiment of the present application is connected to a stage 300 via a rod shaft 500. The sample to be tested can be moved by controlling the rod shaft 500, and can also be used to limit the first optical fiber 200. The temperature of the sample to be tested can be detected through a temperature measurement module, thereby further improving the observation effect of the transmission electron microscope and increasing the comprehensiveness of the observation results.

[0072] Fig. 4 is a schematic structural diagram of another stage of a transmission electron microscope in-situ sample holder provided in an embodiment of the present application. As shown in Fig. 4, in some feasible embodiments, the transmission electron microscope in-situ sample holder further includes: a temperature adjustment module 600, the temperature adjustment module 600 and the light propagation channel 301 are located on the same side of the stage 300, the temperature adjustment module 600 is located in the second area 320, the temperature adjustment module 600 is used to be set around the sample to be tested, and the temperature adjustment module 600 is used to adjust the ambient temperature of the environment in which the sample to be tested is located.

[0073] Exemplarily, the temperature adjustment module 600 may include a heating electrode, which may be disposed around the sample slot 302 to change the temperature of the micro-region in the sample slot 302. The heating electrode may have a heating temperature range of 0°C to 1200°C, and a temperature stability of the heating electrode is less than or equal to ±0.1°C.

[0074] Exemplarily, metal wiring for controlling the temperature regulating module 600 may be disposed within the shaft 500 .

[0075] The embodiment of the present application provides an in-situ sample rod for a transmission electron microscope, which provides a thermal field for the sample to be tested through a temperature adjustment module 600, and can further improve the ability of the in-situ sample rod for the transmission electron microscope to simulate the environmental conditions surrounding the sample to be tested, thereby realizing micro-scale observation of the sample to be tested under different light field environments, and realizing dynamic real-time observation of the sample to be tested under different light fields and different thermal fields, which can improve the observation effect of the transmission electron microscope and enhance the comprehensiveness of the observation results.

[0076] In some feasible implementations, the transmission electron microscope in-situ sample holder further comprises:

[0077] The electric field regulating module is used to apply an electric field to the sample to be tested.

[0078] Exemplarily, metal traces for controlling the electric field regulation module may be disposed within the shaft 500 .

[0079] An in-situ sample rod for a transmission electron microscope provided in an embodiment of the present application provides an electric field for a sample to be tested through an electric field adjustment module, which can further improve the ability of the in-situ sample rod for the transmission electron microscope to simulate the environmental conditions surrounding the sample to be tested, thereby enabling microscale observation of the sample to be tested under different light field environments, and dynamic real-time observation of the sample to be tested under different light fields and different electric fields, which can improve the observation effect of the transmission electron microscope and enhance the comprehensiveness of the observation results.

[0080] In some feasible embodiments, the stage 300 includes at least four light propagation channels 301 .

[0081] The embodiment of the present application provides an in-situ sample rod for a transmission electron microscope. By setting the stage 300 to include at least four light propagation channels 301, it is possible to avoid the situation where the number of light propagation channels 301 is too small and it is difficult to form a uniform light field. This can improve the ability of the in-situ sample rod for the transmission electron microscope to simulate the environmental conditions surrounding the sample to be measured, improve the observation effect of the transmission electron microscope, and enhance the comprehensiveness of the observation results.

[0082] In the description of this specification, the description with reference to the terms "some embodiments", "other embodiments", "ideal embodiments", etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic descriptions of the above terms do not necessarily refer to the same embodiment or example.

[0083] The technical features of the above-mentioned embodiments can be combined arbitrarily. In order to make the description concise, not all possible combinations of the technical features of the above-mentioned embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0084] The above-described embodiments only express several implementation methods of the present application, and the descriptions thereof are relatively specific and detailed, but they cannot be construed as limiting the scope of the patent application. It should be pointed out that, for a person of ordinary skill in the art, several variations and improvements can be made without departing from the concept of the present application, and these all belong to the protection scope of the present application. Therefore, the protection scope of the patent application shall be subject to the attached claims.

Claims

1. An in-situ sample holder for a transmission electron microscope, characterized in that: include: Laser emission module; A first optical fiber, one end of which is used to connect to the output end of the laser emitting module, and the first optical fiber is used to transmit the light emitted by the laser emitting module; A stage, wherein the stage is used to be connected to the other end of the first optical fiber, wherein the stage includes a first area and a second area, the first area is located between the first optical fiber and the second area, a plurality of light propagation channels extending along a first direction are arranged in the first area, the second area is used to accommodate a sample to be tested, one end of the light propagation channel is connected to the first optical fiber, the light propagation channel is used to conduct the light transmitted by the first optical fiber to the second area, and the first direction is the extension direction of the stage.

2. The transmission electron microscope in-situ sample holder according to claim 1, characterized in that: A sample slot is disposed in the second area, and the sample slot is used to accommodate the sample to be tested.

3. The transmission electron microscope in-situ sample holder according to claim 2, characterized in that: The other end of the light propagation channel surrounds the circumference of the sample slot; and / or, The other end of the light propagation channel is connected to the sample slot.

4. The transmission electron microscope in-situ sample holder according to claim 1, characterized in that: The light propagation channel includes an optical fiber guide channel and a second optical fiber; The optical fiber guide channel is used to accommodate the second optical fiber, and the first optical fiber is connected to the second optical fiber.

5. The transmission electron microscope in-situ sample holder according to claim 4, characterized in that: The optical fiber guide channel includes at least one of an optical fiber guide groove and an optical fiber guide through hole.

6. The transmission electron microscope in-situ sample holder according to claim 1, characterized in that: The light propagation channel includes a through hole and a high-reflection material layer. The through hole at least penetrates the first region, and the high-reflection material layer is located on the inner wall of the through hole.

7. The transmission electron microscope in-situ sample holder according to claim 1, characterized in that: Also includes: An anti-reflection structure, wherein the anti-reflection structure is located at an end of the light propagation channel away from the first area.

8. The transmission electron microscope in-situ sample holder according to claim 1, characterized in that: Also includes: A shaft connected to the stage, wherein the shaft is used to accommodate the first optical fiber; A temperature measuring module is located in the rod body, one end of the temperature measuring module is used to connect with the sample to be tested, and the temperature measuring module is used to detect the temperature of the sample to be tested.

9. The transmission electron microscope in-situ sample holder according to claim 1, characterized in that: Also includes: a temperature regulating module, wherein the temperature regulating module and the light propagation channel are located on the same side of the stage, the temperature regulating module is located in the second area, the temperature regulating module is used to be arranged around the sample to be tested, and the temperature regulating module is used to regulate the ambient temperature of the environment in which the sample to be tested is located; and / or, An electric field regulating module, wherein the electric field regulating module is used to apply an electric field to the sample to be tested.

10. The transmission electron microscope in-situ sample holder according to claim 1, characterized in that: The stage includes at least four of the light propagation channels.

Images