Light source and light source control method

Abstract

The invention discloses a light source and a light source control method, and belongs to the technical field of light sources. The light source comprises a laser, a temperature control module, a xenon lamp, a white light power monitoring module and a control module; the temperature control module is mounted on the laser and is used for controlling the working temperature of the laser; the xenon lamp is used for receiving the laser output by the laser and outputting white light; the white light power monitoring module is used for obtaining a white light power signal output by the xenon lamp; and the control module is electrically connected with the laser and the white light power monitoring module, and is used for adjusting the laser power signal based on the laser power signal output by the laser and the white light power signal. The temperature control module is arranged on the laser, and the output of the laser is adjusted by the control module according to the real-time white light power signal, so that the power fluctuation of white light output is reduced as much as possible, and the stability of the light source is improved.

Description

Technical Field

[0001] The present application belongs to the technical field of light sources, and in particular, relates to a light source and a method for controlling the light source. Background Art

[0002] Laser Driven Light Source (LDLS) is an ultra-bright wide-spectrum light source that uses a high-energy focused laser beam to drive xenon plasma. It is gradually being widely used in various industries due to its high brightness and wide spectral distribution. However, since LDLS uses plasma to absorb laser energy and maintain it in a thermodynamic equilibrium state to maintain high-brightness white light, it is difficult to keep the laser beam at the center of the plasma, which in turn affects the stability of the white light output power. Summary of the invention

[0003] The present application aims to solve at least one of the technical problems existing in the prior art. To this end, the present application proposes a light source and a method for controlling the light source to reduce the power fluctuation of the white light output as much as possible and improve the stability of the light source.

[0004] In a first aspect, the present application provides a light source, comprising:

[0005] Lasers;

[0006] A temperature control module, installed on the laser, for controlling the operating temperature of the laser;

[0007] A xenon lamp, used for receiving the laser light output by the laser device and outputting white light;

[0008] A white light power monitoring module, used to obtain the white light power signal output by the xenon lamp;

[0009] The control module is electrically connected to the laser and the white light power monitoring module respectively, and is used to adjust the laser power signal based on the laser power signal output by the laser and the white light power signal.

[0010] According to the light source of the present application, on the one hand, the operating temperature of the laser can be controlled and maintained within an appropriate range at all times through the temperature control module to ensure the stability of the laser output power and the service life of the laser; on the other hand, the control module, the laser and the white light power monitoring module are electrically connected, so that the white light power signal and the laser power signal can be received in real time to dynamically adjust the output power of the laser, thereby improving the stability and consistency of the white light output and improving the performance of the light source.

[0011] According to one embodiment of the present application, the laser comprises:

[0012] A laser power adjustment module, electrically connected to the control module;

[0013] The laser driving module is electrically connected to the laser power regulating module.

[0014] According to one embodiment of the present application, the laser driving module includes:

[0015] A laser driving current regulating module, electrically connected to the laser power regulating module;

[0016] A laser current detection module, electrically connected to the laser drive current adjustment module, for adjusting the drive current direction;

[0017] The laser LD is electrically connected to the laser driving current regulating module and the laser current detecting module respectively, and the laser LD is used to output the laser according to the driving current.

[0018] According to one embodiment of the present application, the temperature control module includes:

[0019] A laser temperature monitoring module is electrically connected to the laser LD and is used to obtain a temperature signal of the laser LD.

[0020] TEC cooling element, used for cooling the laser LD;

[0021] The TEC drive control module is electrically connected to the laser temperature monitoring module and the laser temperature monitoring module respectively, and is used to adjust the temperature of the laser LD based on the temperature signal of the laser LD.

[0022] According to one embodiment of the present application, it also includes:

[0023] The heat exchange component is arranged on a side of the TEC cooling component away from the laser and is used for performing heat exchange with the TEC cooling component.

[0024] According to one embodiment of the present application, it also includes:

[0025] A lens assembly, disposed between the laser and the xenon lamp, for irradiating the received laser light into the center between the cathode and the anode of the xenon lamp;

[0026] The reflector is arranged outside the xenon lamp and away from the light emitting portion of the xenon lamp.

[0027] According to an embodiment of the present application, the lens assembly includes two lenses arranged at intervals along the transmission direction of the laser, and the convex surfaces of the two lenses are arranged opposite to each other.

[0028] According to one embodiment of the present application, it also includes:

[0029] The light absorbing member is arranged on a side of the xenon lamp away from the laser and is used for absorbing the laser emitted after passing through the xenon lamp.

[0030] According to one embodiment of the present application, it also includes:

[0031] A xenon lamp high-voltage excitation module is electrically connected to the control module and the xenon lamp, respectively, and is used to output high voltage to excite the xenon lamp according to a control signal received from the control module.

[0032] In a second aspect, the present application provides a control method for the light source as described above, the control method for the light source comprising:

[0033] Control the temperature control module based on the laser's operating temperature and target temperature;

[0034] Obtain the current laser power signal and white light power signal;

[0035] Based on the current laser power signal and the white light power signal, the laser power adjustment module of the laser is controlled.

[0036] According to the light source control method of the present application, a temperature control module is controlled based on the working temperature of the laser, and a laser power adjustment module is controlled in real time according to the current laser power signal and white light power signal, so as to minimize the power fluctuation of the white light output and improve the stability of the light source.

[0037] Additional aspects and advantages of the present application will be given in part in the description below, and in part will become apparent from the description below, or will be learned through the practice of the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0038] The above and / or additional aspects and advantages of the present application will become apparent and easily understood from the description of the embodiments in conjunction with the following drawings, in which:

[0039] Figure 1 This is one of the structural schematic diagrams of the light source provided in the embodiment of the present application;

[0040] Figure 2 This is the second structural schematic diagram of the light source provided in the embodiment of the present application;

[0041] Figure 3 This is the third structural schematic diagram of the light source provided in the embodiment of the present application;

[0042] Figure 4 This is the fourth structural schematic diagram of the light source provided in the embodiment of the present application;

[0043] Figure 5 It is a flow chart of a method for controlling a light source provided in an embodiment of the present application.

[0044] Reference numerals:

[0045] 100. laser; 110. laser power adjustment module;

[0046] 120. Laser driving module;

[0047] 121. Laser driving current regulating module; 122. Laser current detecting module; 123. Laser LD;

[0048] 200, temperature control module;

[0049] 210, laser temperature monitoring module; 220, TEC cooling element; 230, TEC drive control module;

[0050] 300, xenon lamp; 400, white light power monitoring module; 500, control module; 600, laser power monitoring module; 700, heat exchanger;

[0051] 810, lens assembly; 820, reflector; 830, light absorbing element; 840, xenon lamp high voltage excitation module. DETAILED DESCRIPTION

[0052] The embodiments of the present application are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present application, and cannot be understood as limiting the present application.

[0053] Reference below Figure 1-Figure 5 The light source provided in the embodiment of the present application is described, and the light source includes a laser 100 , a temperature control module 200 , a xenon lamp 300 , a white light power monitoring module 400 and a control module 500 .

[0054] The laser 100 is used to output laser light. The xenon lamp 300 is used to receive the laser light output by the laser 100 and output white light. The type of the laser 100 includes but is not limited to a pump laser 100 .

[0055] It can be understood that after the xenon lamp 300 is excited to generate plasma, the plasma absorbs the laser light and outputs the desired white light with a wide spectrum characteristic.

[0056] The temperature control module 200 is installed on the laser 100 and is used to control the operating temperature of the laser 100. The white light power monitoring module 400 is used to obtain the white light power signal output by the xenon lamp 300. The control module 500 is electrically connected to the laser 100 and the white light power monitoring module 400 respectively, and is used to adjust the laser power signal based on the laser power signal and the white light power signal output by the laser 100.

[0057] It should be noted that the laser power signal output by the laser 100 can be obtained through the laser power monitoring module 600. The laser power monitoring module 600 can be integrated into the laser 100 or can be arranged outside the laser 100. This embodiment does not impose specific restrictions on this. The white light power monitoring module 400 includes but is not limited to an optical power detector; the laser power monitoring module 600 includes but is not limited to an optical power detector. Exemplarily, the white light power monitoring module 400 is located outside the xenon lamp 300 and is arranged close to the light output portion of the xenon lamp 300.

[0058] In this embodiment, Figure 4 As shown, the laser power monitoring module 600 and the white light power monitoring module 400 are both communicatively connected via a high-speed AD acquisition unit and a control module 500 .

[0059] It can be understood that, on the one hand, the operating temperature of the laser 100 can be controlled and maintained within an appropriate range at all times through the temperature control module 200 to ensure the stability of the output power of the laser 100 and the service life of the laser 100; on the other hand, the control module 500, the laser 100 and the white light power monitoring module 400 are electrically connected, so that the white light power signal and the laser power signal can be received in real time, so as to dynamically adjust the output power of the laser 100, thereby improving the stability and consistency of the white light output and improving the performance of the light source.

[0060] According to the light source provided in the embodiment of the present application, by setting the temperature control module 200 in the laser 100 and using the control module 500 to adjust the output of the laser 100 according to the real-time white light power signal, the power fluctuation of the white light output is reduced as much as possible and the stability of the light source is improved.

[0061] In some embodiments, Figure 4 As shown, the laser 100 includes a laser power regulating module 110 and a laser driving module 120 . The laser power regulating module 110 is electrically connected to the control module 500 ; and the laser driving module 120 is electrically connected to the laser power regulating module 110 .

[0062] It is understandable that the laser power adjustment module 110 is used to receive control instructions from the control module 500 to adjust the laser power output by the laser 100. The laser driving module 120 is used to provide the required electrical energy to enable the laser 100 to generate laser light, and is electrically connected to the laser power adjustment module 110 to ensure that the laser driving module 120 can adjust the electrical energy required for lasers with different power outputs according to the laser power adjustment module 110, so as to achieve the stability and consistency of white light output, and facilitate the accuracy of subsequent semiconductor detection, etc.

[0063] In some embodiments, Figure 4As shown, the laser driving module 120 includes a laser driving current regulating module 121, a laser current detection module 122 and a laser LD123. The laser driving current regulating module 121 is electrically connected to the laser power regulating module 110; the laser current detection module 122 is electrically connected to the laser driving current regulating module 121 for adjusting the driving current direction; the laser LD123 is electrically connected to the laser driving current regulating module 121 and the laser current detection module 122 respectively, and the laser LD123 is used to output laser according to the driving current.

[0064] It can be understood that the laser current detection module 122, the laser driving current regulation module 121 and the laser LD123 are electrically connected in sequence end to end, that is, the laser power regulation module 110 adjusts the voltage according to the control signal received from the control module 500 and transmits it to the voltage-controlled regulation end of the laser driving current regulation module 121, so that the laser driving current regulation module 121 adjusts the size of the driving current according to the voltage of the voltage-controlled regulation end, thereby achieving the change of the laser power output by the laser LD123.

[0065] In some embodiments, Figure 1 , Figure 2 and Figure 4 As shown, the temperature control module 200 includes a laser temperature monitoring module 210, a TEC cooling element 220 and a TEC drive control module 230. The laser temperature monitoring module 210 is electrically connected to the laser LD123 to obtain the temperature signal of the laser LD123; the TEC cooling element 220 is used to dissipate heat from the laser LD123; the TEC drive control module 230 is electrically connected to the laser temperature monitoring module 210 and the laser temperature monitoring module 210 respectively to adjust the temperature of the laser LD123 based on the temperature signal of the laser LD123. Exemplarily, the laser temperature monitoring module 210 uses a pulse width modulation temperature sensor.

[0066] It can be understood that the TEC (Thermoelectric Cooler) cooling element is closely connected to the laser 100 and is arranged close to the laser LD123 to effectively absorb the heat generated by the laser. The TEC drive control module 230 dynamically adjusts the working state of the TEC cooling element 220 according to the temperature signal provided by the laser temperature monitoring module 210, thereby maintaining the laser 100 within a suitable operating temperature range, achieving a constant temperature of the laser 100 as much as possible, and ensuring the stability of the laser output power.

[0067] In some embodiments, Figure 2As shown, the light source further includes a heat exchanger 700, which is disposed on a side of the TEC cooling element 220 away from the laser 100 and is used for heat exchange with the TEC cooling element 220. The heat exchanger 700 includes but is not limited to a fan or a liquid cooling plate.

[0068] It can be understood that after the TEC cooling element 220 absorbs the heat generated by the laser 100, the heat exchange element 700 performs heat exchange with the TEC cooling element 220 to absorb the heat transferred by it, and then dissipates the heat into the surrounding environment, which helps to maintain a stable operating temperature of the laser 100, thereby ensuring the stability and reliability of the light source system.

[0069] In some embodiments, Figures 1 to 3 As shown, the light source also includes a lens assembly 810 and a reflector 820. The lens assembly 810 is arranged between the laser 100 and the xenon lamp 300, and is used to emit the received laser into the center between the cathode of the xenon lamp 300 and the anode of the xenon lamp 300; the reflector 820 is arranged outside the xenon lamp 300 and away from the light emitting part of the xenon lamp 300.

[0070] It is understood that the lens assembly 810 is used to shape the laser to ensure that the laser output by the laser 100 can be accurately focused and directed to the center between the cathode of the xenon lamp 300 and the anode of the xenon lamp 300, so that the focus of the laser and the center of the plasma coincide as much as possible, ensuring that the energy of the laser is absorbed by the plasma as efficiently as possible, thereby outputting stable white light. The reflector 820 is arranged outside the xenon lamp 300 and away from the light output part of the xenon lamp 300, so that part of the white light generated by the xenon lamp 300 is reflected and then directed to the light output part again, which helps to improve the lighting efficiency and output power of the light source.

[0071] In some embodiments, Figure 1 and Figure 2 As shown, the lens assembly 810 includes two lenses spaced apart along the transmission direction of the laser, and the convex surfaces of the two lenses are arranged opposite to each other. It should be noted that the distance between the two lenses can be designed according to actual needs, and this embodiment does not impose any specific restrictions on this.

[0072] It can be understood that the relative arrangement of the convex surfaces of the two lenses helps to focus the laser into a small light spot so as to control the light spot and the center of the plasma to coincide as much as possible, which is very important for improving the uniformity of white light output.

[0073] In some embodiments, the reflector 820 includes one of a concave reflector, an ellipsoidal reflector, and a parabolic reflector, so that the white light output by the xenon lamp 300 has different divergence angles, which is used in conjunction with the subsequent fiber coupling design. It should be noted that the specific type of the reflector 820 can be designed according to the actual required light output parameters (such as light output aperture, etc.), and this embodiment does not impose specific restrictions on this.

[0074] In some embodiments, the reflective surface of the reflector 820 is coated with an anti-reflection film to improve the reflection efficiency of white light and provide brightness and uniformity of the light source.

[0075] It should be noted that the anti-reflection film, also known as a high-reflection film, is a film used to improve the reflectivity of optical components. It uses the principle of constructive interference generated when light is reflected on the upper and lower surfaces of the film to enhance the reflected light.

[0076] In some embodiments, Figures 1 to 3 As shown, the light source further includes a light absorbing member 830 , which is disposed on a side of the xenon lamp 300 away from the laser 100 , and is used to absorb the laser light emitted after passing through the xenon lamp 300 .

[0077] It can be understood that the light absorbing element 830 and the laser 100 are respectively arranged on both sides of the xenon lamp 300 to effectively absorb the part of the laser that is not absorbed by the xenon lamp 300, thereby reducing the impact of the heat of the laser on the plasma, improving the stability of the white light power output by the xenon lamp 300, and reducing the potential damage or interference of excess laser to other components of the light source, thereby improving the brightness and stability of the light source, and the reliability of the monitoring accuracy of the white light power monitoring module 400.

[0078] In some embodiments, Figure 1 and Figure 4 As shown, the light source also includes a xenon lamp high voltage excitation module 840 , which is electrically connected to the control module 500 and the xenon lamp 300 , respectively, and is used to output high voltage to excite the xenon lamp 300 according to the control signal received from the control module 500 .

[0079] It is understandable that the xenon lamp high voltage excitation module 840 is electrically connected to the cathode and anode of the xenon lamp 300, that is, before the laser 100 outputs laser light, the control module 500 first uses the xenon lamp high voltage excitation module 840 to discharge the gas inside the xenon lamp 300 by means of electrical excitation to generate white light. Then, the laser 100 outputs laser light and the high voltage excitation module stops outputting high voltage to the xenon lamp 300, so as to maintain the output of white light using only laser light.

[0080] The embodiment of the present application also provides a control method applied to the above-mentioned light source.

[0081] like Figure 5As shown, the method for controlling a light source includes steps 910 , 920 and 930 .

[0082] Step 910: Control the temperature control module 200 based on the operating temperature of the laser and the target temperature.

[0083] It can be understood that the laser temperature monitoring module 210 monitors the operating temperature of the laser 100 and the preset target temperature obtained by the TEC drive control module 230 in real time. The TEC drive control module 230 compares the real-time operating temperature with the target temperature, thereby controlling and adjusting the working state of the TEC refrigeration component 220 by driving current to increase or decrease the cooling amount of the laser 100, so that the temperature of the laser 100 is always close to the target temperature, and the laser 100 outputs laser in a constant temperature environment as much as possible, ensuring that the laser wavelength output by the laser 100 does not drift and jitter, thereby improving the stability of the white light output by the light source.

[0084] Step 920: Acquire the current laser power signal and white light power signal.

[0085] It is understandable that the laser power monitoring module 600 obtains the laser power signal in real time and sends it to the control module 500 , and the white light power monitoring module 400 obtains the white light power signal in real time and sends it to the control module 500 .

[0086] Step 930 : Control the laser power adjustment module 110 of the laser 100 based on the current laser power signal and the white light power signal.

[0087] It can be understood that the control module 500 analyzes the current laser power signal and the current white light power signal in real time, and obtains the analysis result using a high-precision PID algorithm, and then sends a control instruction to the laser power adjustment module 110 to adjust the laser power output by the laser 100. The adjusted laser power signal is monitored again by the laser power monitoring module 600, and is fed back to the control module 500 together with the adjusted white light power signal obtained by the white light power monitoring module 400, forming a closed-loop and dynamic two-level high-frequency feedback, reducing the fluctuation of white light output and improving the stability of light source use.

[0088] According to the light source control method provided in the embodiment of the present application, the temperature control module 200 is controlled based on the working temperature of the laser, and the laser power adjustment module 110 of the laser 100 is controlled in real time according to the current laser power signal and the white light power signal, so as to reduce the power fluctuation of the white light output as much as possible and improve the stability of the light source.

[0089] The terms "first", "second", etc. in the specification and claims of the present application are used to distinguish similar objects, and are not used to describe a specific order or sequence. It should be understood that the data used in this way can be interchangeable under appropriate circumstances, so that the embodiments of the present application can be implemented in an order other than those illustrated or described here, and the objects distinguished by "first", "second", etc. are generally of one type, and the number of objects is not limited. For example, the first object can be one or more. In addition, "and / or" in the specification and claims represents at least one of the connected objects, and the character " / " generally indicates that the objects associated with each other are in an "or" relationship.

[0090] In the description of the present application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0091] In the description of this application, "first feature" or "second feature" may include one or more of the features.

[0092] In the description of the present application, “plurality” means two or more.

[0093] In the description of the present application, a first feature being “on” or “under” a second feature may include that the first and second features are directly in contact with each other, or may include that the first and second features are not in direct contact with each other but are in contact with each other via another feature therebetween.

[0094] In the description of the present application, “above”, “over” and “above” a first feature to a second feature includes the first feature being directly above and obliquely above the second feature, or simply means that the first feature is horizontally higher than the second feature.

[0095] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "illustrative embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials, or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present application. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described may be combined in any one or more embodiments or examples in a suitable manner.

[0096] Although the embodiments of the present application have been shown and described, those skilled in the art will appreciate that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present application, and that the scope of the present application is defined by the claims and their equivalents.

Claims

1. A light source, characterized in that: include: Laser (100); A temperature control module (200), installed on the laser (100), and used to control the operating temperature of the laser (100); A xenon lamp (300) for receiving the laser light output by the laser (100) and outputting white light; A white light power monitoring module (400), used for obtaining a white light power signal output by the xenon lamp (300); The control module (500) is electrically connected to the laser (100) and the white light power monitoring module (400) respectively, and is used to adjust the laser power signal based on the laser power signal output by the laser (100) and the white light power signal.

2. The light source according to claim 1, characterized in that The laser (100) comprises: A laser power adjustment module (110) electrically connected to the control module (500); The laser driving module (120) is electrically connected to the laser power regulating module (110).

3. The light source according to claim 2, characterized in that The laser driving module (120) comprises: A laser driving current regulating module (121) electrically connected to the laser power regulating module (110); A laser current detection module (122), electrically connected to the laser drive current adjustment module (121), and used for adjusting the drive current direction; The laser LD (123) is electrically connected to the laser driving current regulating module (121) and the laser current detecting module (122) respectively, and the laser LD (123) is used to output the laser according to the driving current.

4. The light source according to claim 3, characterized in that The temperature control module (200) comprises: A laser temperature monitoring module (210) is electrically connected to the laser LD (123) and is used to obtain a temperature signal of the laser LD (123). A TEC cooling element (220) for dissipating heat from the laser LD (123); The TEC drive control module (230) is electrically connected to the laser temperature monitoring module (210) and the laser temperature monitoring module (210) respectively, and is used to adjust the temperature of the laser LD (123) based on the temperature signal of the laser LD (123).

5. The light source according to claim 4, characterized in that Also includes: The heat exchange element (700) is arranged on a side of the TEC cooling element (220) away from the laser (100) and is used for performing heat exchange with the TEC cooling element (220).

6. The light source according to any one of claims 1 to 5, characterized in that: Also includes: a lens assembly (810) disposed between the laser (100) and the xenon lamp (300) and used for irradiating the received laser light into the center between the cathode of the xenon lamp (300) and the anode of the xenon lamp (300); The reflector (820) is arranged outside the xenon lamp (300) and away from the light emitting portion of the xenon lamp (300).

7. The light source according to claim 6, characterized in that The lens assembly (810) comprises two lenses arranged at intervals along the transmission direction of the laser, and the convex surfaces of the two lenses are arranged opposite to each other.

8. The light source according to any one of claims 1 to 5, characterized in that: Also includes: The light absorbing member (830) is arranged on a side of the xenon lamp (300) away from the laser (100) and is used to absorb the laser light emitted after passing through the xenon lamp (300).

9. The light source according to any one of claims 1 to 5, characterized in that: Also includes: A xenon lamp high-voltage excitation module (840), the xenon lamp high-voltage excitation module (840) being electrically connected to the control module (500) and the xenon lamp (300) respectively, and being used for outputting high voltage to excite the xenon lamp (300) according to a control signal received from the control module (500).

10. A control method for a light source as claimed in any one of claims 1 to 9, characterized in that: include: Controlling a temperature control module (200) based on the operating temperature of the laser and the target temperature; Obtain the current laser power signal and white light power signal; Based on the current laser power signal and the white light power signal, a laser power adjustment module (110) of the laser (100) is controlled.

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