Water-jet-guided laser cutting machine

Abstract

The invention discloses a water guide laser cutting machine which comprises a machine table, a machine head device and a workpiece carrying table device, the machine head device and the workpiece carrying table device are installed on the machine table, the machine head device comprises a machine head provided with a laser micro-jet module, the machine table comprises a machine table body and a machine table door frame, the machine table door frame is located above the machine table body, and the machine head device is assembled on the top of the machine table door frame. The machine table body bears the workpiece carrying table device, the machine head device is provided with an A-axis translation mechanism to drive a machine head to vertically move along the A axis, and the workpiece carrying table device is provided with an X-axis translation mechanism, a Y-axis translation mechanism, a B-axis swing mechanism and a C-axis rotating mechanism to drive the whole workpiece carrying table device to horizontally move along the X axis and the Y axis. A workpiece loading head installed on the workpiece carrying table device is driven to swing around a B axis and rotate around a C axis, the middle cross section of a workpiece on the workpiece loading head can be adjusted to be flush with the swing axis of the B axis, and the blank workpiece is bonded to the workpiece loading head on a workpiece frame in the workpiece carrying table device during machining. And the position of the workpiece loading head is adjusted to enable the middle cross section of the workpiece to be flush with the B-axis swing axis. The workpiece cutting quality can be guaranteed easily.

Description

[0001] The present invention claims the priority of the Chinese patent application with application number “2023-08-17”, application number “202311050995.8” and name “A water-guided laser cutting machine”, and all the contents of the Chinese patent application are incorporated herein by reference. Technical Field

[0002] The invention relates to the application of water-conducting laser technology, and in particular to a water-conducting laser cutting machine. Background Art

[0003] Water-guided laser is similar to the propagation of laser in optical fiber. A stable water column is used as the medium for laser transmission, and air is used as a low-refractive index cladding. The laser is totally reflected on the surface of water and transmitted to the workpiece surface through the water beam.

[0004] The theory of water-conducting laser has been studied for a long time, but only Swiss company SYNOVA has achieved industrialization. The processing process of its laser microjet (water-conducting laser) technology is as follows: the water jet impacts the processing surface; then the laser pulse is emitted and passes through the water jet, and the material begins to absorb heat; the absorbed laser energy generates a plasma layer to separate water and material; the laser pulse is completed, the plasma phenomenon ends, and the water jet cools the material; the water jet completely takes away the heat through convection. Compared with conventional laser processing, water-conducting laser has obvious advantages: micro-water jets conduct, protect, and maintain stable cylindrical lasers like optical fibers; avoid the processing taper caused by the laser divergence angle, and realize parallel laser beam processing; 99% of the time in each pulse cycle cools the material to be processed; the laser pulse is protected by the water jet and is free from any influence of environmental factors and processing debris on the incoming laser pulse; compared with traditional laser processing technology, it has higher processing efficiency.

[0005] The current laser micro-jet system uses the traditional double-swing head five-axis head device processing platform, in which the head module of the laser micro-jet is configured on the head device. In addition to the rapid relative movement of the X, Y, and Z axes relative to the workpiece coordinate system, the head device also has the rotation of the C-axis (parallel to the Z axis) swing arm, the swing of the B-axis (parallel to the Y axis) swing head, and the normal (A axis, parallel to the Z axis) follow-up of the head device. For the laser micro-jet head device, the position of the head device needs to be constantly moved during processing. When the head device moves, especially when it swings or rotates, the water jet position and shape of the head module will also change (except for the single A-axis follow-up of the head device, the path of the micro-water column beam will be a curve). At this time, the micro-water column beam may appear as a discontinuous series of water droplets, which makes the laser beam coupled in the micro-water column beam unstable, which ultimately affects the processing quality of the workpiece. Summary of the invention

[0006] In view of this, an object of the present invention is to provide a water-guided laser cutting machine to ensure the cutting quality of workpieces.

[0007] In order to solve the above technical problems, the present invention provides a water-guided laser cutting machine, comprising a machine platform and a head device and a workpiece carrier device installed on the machine platform, the head device comprising a head equipped with a laser micro-jet module, the machine platform comprising a machine bed and a machine gantry, the machine gantry is located above the machine bed, the head device is assembled on the top of the machine gantry, the machine bed carries the workpiece carrier device, wherein the head device is equipped with an A-axis translation mechanism to drive the head to move vertically along the A-axis, the workpiece carrier device is equipped with an X-axis translation mechanism, a Y-axis translation mechanism, a B-axis swing mechanism and a C-axis rotation mechanism to drive the entire workpiece carrier device to move horizontally along the X-axis and the Y-axis, and drive the workpiece loading head installed on the workpiece carrier device to swing around the B-axis and rotate around the C-axis, wherein the middle cross section of the workpiece on the workpiece loading head can be adjusted to be flush with the B-axis swing axis, during processing, the blank workpiece is bonded to the workpiece loading head on the workpiece frame in the workpiece carrier device, and the position of the workpiece loading head is adjusted to make the middle cross section of the workpiece flush with the B-axis swing axis.

[0008] Compared with the prior art, the present invention changes the five-axis head in the existing water-guided laser cutting machine into a one-axis head + four-axis workpiece carrier combination structure, in which the water-guided laser head only moves in the vertical direction to avoid the micro-water column beam path presenting a curve, making it easier to maintain the micro-water column beam stable, thereby facilitating the guarantee of workpiece cutting quality. BRIEF DESCRIPTION OF THE DRAWINGS

[0009] Figure 1 The schematic diagram of the water-guided laser cutting machine of the present invention is as follows: Figure 1 ;

[0010] Figure 2 The schematic diagram of the water-guided laser cutting machine of the present invention is as follows: Figure 2 ;

[0011] Figure 3 The schematic diagram of the water-guided laser cutting machine of the present invention is as follows: Figure 3 ;

[0012] Figure 4 The schematic diagram of the water-guided laser cutting machine of the present invention is as follows: Figure 4 ;

[0013] Figure 5 Schematic diagram of removing dust from the water-guided laser cutting machine of the present invention Figure 1 ;

[0014] Figure 6 Schematic diagram of removing dust from the water-guided laser cutting machine of the present invention Figure 2 ;

[0015] Figure 7 Schematic diagram of removing dust from the water-guided laser cutting machine of the present invention Figure 3 ;

[0016] Figure 8 Schematic diagram of removing dust from the water-guided laser cutting machine of the present invention Figure 4 ;

[0017] Fig. 9 The schematic diagram of the machine platform in the water-guided laser cutting machine of the present invention is shown in FIG. Figure 1 ;

[0018] Fig.10 The schematic diagram of the machine platform in the water-guided laser cutting machine of the present invention is shown in FIG. Figure 2 ;

[0019] Fig.11 Schematic diagram of the machine adjustment device in the water-guided laser cutting machine of the present invention Figure 1 ;

[0020] Fig.12 Schematic diagram of the machine adjustment device in the water-guided laser cutting machine of the present invention Figure 2 ;

[0021] Fig.13 It is a schematic diagram of the machine adjustment device in the water-guided laser cutting machine of the present invention without the upper module;

[0022] Fig.14 Schematic diagram of the head device and workpiece carrier device in the water-guided laser cutting machine of the present invention Figure 1 ;

[0023] Fig.15 Schematic diagram of the head device and workpiece carrier device in the water-guided laser cutting machine of the present invention Figure 2 ;

[0024] Fig.16 Schematic diagram of the head device and workpiece carrier device in the water-guided laser cutting machine of the present invention Figure 3 ;

[0025] Fig.17 Schematic diagram of the head device and workpiece carrier device in the water-guided laser cutting machine of the present invention Figure 4 ;

[0026] Fig.18 Schematic diagram of the head device of the water-guided laser cutting machine of the present invention Figure 1 ;

[0027] Fig.19 Schematic diagram of the head device of the water-guided laser cutting machine of the present invention Figure 2 ;

[0028] Fig. 20 Schematic diagram of the decomposition of the head device in the water-guided laser cutting machine of the present invention Figure 1 ;

[0029] Fig.21Schematic diagram of the decomposition of the head device in the water-guided laser cutting machine of the present invention Figure 2 ;

[0030] Fig. 22 Schematic diagram of the A-axis translation mechanism in the water-guided laser cutting machine of the present invention Figure 1 ;

[0031] Fig.23 Schematic diagram of the A-axis translation mechanism in the water-guided laser cutting machine of the present invention Figure 2 ;

[0032] Fig.24 Schematic diagram of removing the head connecting plate from the A-axis translation mechanism in the water-guided laser cutting machine of the present invention Figure 1 ;

[0033] Fig.25 Schematic diagram of removing the head connecting plate from the A-axis translation mechanism in the water-guided laser cutting machine of the present invention Figure 2 ;

[0034] Fig.26 The explosion of the head device in the water-guided laser cutting machine of the present invention Figure 1 ;

[0035] Fig. 27 The explosion of the head device in the water-guided laser cutting machine of the present invention Figure 2 ;

[0036] Fig.28 Schematic diagram of the workpiece carrier device in the water-guided laser cutting machine of the present invention Figure 1 ;

[0037] Fig.29 Schematic diagram of the workpiece carrier device in the water-guided laser cutting machine of the present invention Figure 2 ;

[0038] Fig.30 Schematic diagram of removing the drag chain and accessories from the workpiece carrier device in the water-guided laser cutting machine of the present invention Figure 1 ;

[0039] Fig.31 Schematic diagram of removing the drag chain and accessories from the workpiece carrier device in the water-guided laser cutting machine of the present invention Figure 2 ;

[0040] Fig.32 Schematic diagram of the workpiece rack in the workpiece carrier device of the water-guided laser cutting machine of the present invention Figure 1 ;

[0041] Fig.33 Schematic diagram of the workpiece rack in the workpiece carrier device of the water-guided laser cutting machine of the present invention Figure 2 ;

[0042] Fig.34Schematic diagram of the workpiece rack in the workpiece carrier device of the water-guided laser cutting machine of the present invention Figure 3 ;

[0043] Fig.35 Schematic diagram of removing the C-axis rotating mechanism from the workpiece stand in the workpiece carrier device of the water-guided laser cutting machine of the present invention Figure 1 ;

[0044] Fig.36 Schematic diagram of removing the C-axis rotating mechanism from the workpiece stand in the workpiece carrier device of the water-guided laser cutting machine of the present invention Figure 2 ;

[0045] Fig.37 This is an exploded view of the workpiece stand in the workpiece carrier device of the water-guided laser cutting machine of the present invention without the C-axis rotating mechanism;

[0046] Fig.38 The invention discloses a workpiece frame explosion prevention device for a water-guided laser cutting machine. Figure 1 ;

[0047] Fig.39 The invention discloses a workpiece frame explosion prevention device for a water-guided laser cutting machine. Figure 2 ;

[0048] Fig.40 Schematic diagram of the workpiece frame slide in the workpiece carrier device of the water-guided laser cutting machine of the present invention Figure 1 ;

[0049] Fig.41 Schematic diagram of the workpiece frame slide in the workpiece carrier device of the water-guided laser cutting machine of the present invention Figure 2 ;

[0050] Fig.42 The figure is a flow chart of the water-guided laser cutting method of the present invention. DETAILED DESCRIPTION

[0051] The present invention relates to specific embodiments:

[0052] The water-guided laser cutting machine comprises a machine platform, on which a machine head device and a workpiece carrier device are installed, the machine head device comprises a machine head equipped with a laser micro-jet module, the machine platform comprises a machine bed and a machine gantry, the machine gantry is located above the machine bed, the machine head device is assembled on the top of the machine gantry, the machine bed carries the workpiece carrier device, wherein the head of the machine head device can move vertically along the A axis, the whole workpiece carrier device can move horizontally along the X axis and the Y axis and can reach the bottom of the machine head device, and the workpiece loading head installed on the workpiece carrier device can swing around the B axis and rotate around the C axis.

[0053] Among them, the head of the head device is equipped with an A-axis translation mechanism; the head includes a head base plate and a head module, and the head module is fixedly connected to the head base plate; the A-axis translation mechanism includes an A-axis motor, an A-axis coupling, an A-axis coupling box, an A-axis drive rod, an A-axis drive rod support, an A-axis drive rod connecting block, an A-axis slide rail, an A-axis slider and a head connecting plate, wherein the A-axis motor is a stepper motor, the A-axis coupling is a diaphragm coupling, the A-axis drive rod support, the A-axis coupling box and the A-axis slide rail are fixedly assembled on the A-axis base plate, both ends of the A-axis drive rod are supported on the A-axis drive rod support, the A-axis coupling is installed in the A-axis coupling box, the A-axis drive rod is connected to the A-axis motor through the A-axis coupling, the A-axis drive rod connecting block is fixedly assembled on the A-axis drive rod, the A-axis slider can be slidably assembled on the A-axis slide rail, the head connecting plate is fixedly connected to the A-axis drive rod connecting block and the A-axis slider, and the head base plate is fixedly connected to the head connecting plate.

[0054] Among them, the workpiece carrier device includes a workpiece rack and a workpiece rack slide, the workpiece rack includes a workpiece rack support and a workpiece swing frame, the workpiece rack support is fixedly mounted on the workpiece rack slide, and the workpiece swing frame is rotatably mounted on the workpiece rack support, wherein: the workpiece rack is configured with a B-axis swing mechanism and a C-axis rotation mechanism, so that the workpiece swing frame can swing around the B-axis under the drive of the B-axis swing mechanism, and the workpiece loading head mounted on the workpiece swing frame can rotate around the C-axis under the drive of the C-axis rotation mechanism; the workpiece rack slide is configured with an X-axis translation mechanism and a Y-axis translation mechanism, so that under the drive of the X-axis translation mechanism and the Y-axis translation mechanism, the workpiece rack can move horizontally along the X-axis and Y-axis on the machine table together with the workpiece rack slide.

[0055] Among them, the workpiece rack support and the workpiece swing frame are L-shaped respectively, the bottom wall of the workpiece rack support is fixed to the workpiece rack slide, and the side wall of the workpiece swing frame can be rotatably installed on the side wall of the workpiece rack support so as to swing under the drive of the B-axis swing mechanism; the workpiece loading head can be rotatably installed on the top wall of the workpiece swing frame so as to rotate under the drive of the C-axis rotation mechanism, wherein the middle cross-section of the workpiece on the workpiece loading head is flush with the B-axis swing axis.

[0056] Among them, the B-axis swing mechanism includes a B-axis motor and a B-axis reducer, wherein the B-axis motor is a stepper motor, the B-axis reducer is a turntable reducer, the B-axis reducer is installed in a through hole opened on the side wall of the workpiece rack support, the housing of the B-axis motor is fixed to the housing of the B-axis reducer, the power shaft of the B-axis motor is connected to the turntable shaft of the B-axis reducer, and the turntable of the B-axis reducer is fixedly connected to the side wall of the workpiece swing rack.

[0057] Among them, the C-axis rotation mechanism includes a C-axis active mechanism and a C-axis driven mechanism. The C-axis active mechanism is installed at the active mechanism installation position on the top wall of the workpiece swing frame, and the C-axis driven mechanism is installed at the driven mechanism installation position on the top wall of the B-axis workpiece swing frame. The C-axis active mechanism and the C-axis driven mechanism are driven by a transmission belt to drive the workpiece loading head and the loaded workpiece to rotate around the C-axis, and the transmission belt is a synchronous belt.

[0058] Among them, the C-axis active mechanism includes a C-axis motor, a C-axis coupling plate, a C-axis reducer, a driving shaft and a C-axis base plate, wherein the C-axis motor is a stepper motor, the C-axis reducer is a harmonic reducer, the housing of the C-axis motor, the C-axis coupling plate, the housing of the C-axis reducer and the C-axis base plate are connected as a whole, and are fixedly assembled on the top wall of the workpiece swing frame through the C-axis base plate, and the C-axis motor, the C-axis reducer and the driving shaft are axially coupled in sequence, wherein the wave generator of the C-axis reducer is connected to the power shaft of the C-axis motor, the rigid wheel of the C-axis reducer is fixed to the housing of the C-axis reducer, the flexible wheel of the C-axis reducer is installed on the output shaft of the C-axis reducer, the chassis of the driving shaft is fixed to the flexible wheel of the C-axis reducer, and a driving pulley is arranged at the top of the driving shaft to wind the synchronous belt.

[0059] Among them, the C-axis driven mechanism includes a driven shaft, a driven seat plate 1, a driven bearing 1, a driven seat plate 2, a driven bearing 2, an adjusting nut and a workpiece loading head. The driven shaft is rotatably assembled on the top wall of the workpiece swing frame by an upper support composed of a driven seat plate 1 and a driven bearing 1, and a lower support composed of a driven seat plate 2 and a driven bearing 2. A driven pulley is arranged at the top end of the driving shaft to wind the synchronous belt; the workpiece loading head is installed at the bottom end of the driving shaft, and the workpiece loading head can be a clamp type installation structure; the adjusting nut is a nut with an outer opening, which is mounted on the driven shaft and is located between the lower support and the workpiece loading head.

[0060] Among them, the X-axis translation mechanism includes an X-axis slide plate, an X-axis slide rail, an X-axis linear motor stator, an X-axis linear motor mover, an X-axis motor stator seat plate and an X-axis saddle. The X-axis slide rail is installed on the top surface of the X-axis slide rail mounting portion of the machine bed along the longitudinal direction of the machine bed. The X-axis motor stator seat plate is installed on the top surface of the X-axis motor stator mounting portion of the machine bed along the longitudinal direction of the machine bed. X-axis saddles are assembled on both sides of the X-axis slide plate. The X-axis slide plate is slidably installed on the X-axis slide rail through the X-axis saddle. The X-axis linear motor stator is fixedly installed on the top surface of the X-axis motor stator seat plate, and the X-axis linear motor mover is installed on the bottom surface of the X-axis slide plate.

[0061] Among them, the Y-axis translation mechanism includes a Y-axis slide, a Y-axis slide rail, a Y-axis linear motor stator, a Y-axis linear motor mover, an X-axis slide rail, a workpiece rack assembly plate and a Y-axis saddle. The Y-axis slide rail is assembled on the top surface of the X-axis slide rail along the horizontal direction of the X-axis slide rail, and the Y-axis saddle is assembled on both sides of the Y-axis slide rail. The Y-axis slide rail is slidably mounted on the Y-axis slide rail through the Y-axis saddle. The Y-axis linear motor stator is fixedly mounted on the top surface of the X-axis slide rail, and the Y-axis linear motor mover is mounted on the bottom surface of the Y-axis slide rail. The workpiece rack assembly plate is fixedly mounted on the top surface of the Y-axis slide rail to support the workpiece rack support.

[0062] The water-guided laser cutting processing device comprises a machine platform and a head device and a workpiece carrier device installed on the machine platform, wherein the head device comprises a head equipped with a laser micro-jet module, the machine platform comprises a machine bed and a machine gantry, the machine gantry is located above the machine bed, the head device is assembled on the top of the machine gantry, the machine bed carries the workpiece carrier device, wherein the head device is equipped with an A-axis translation mechanism to drive the head to move vertically along the A-axis, the workpiece carrier device is equipped with an X-axis translation mechanism, a Y-axis translation mechanism, a B-axis swing mechanism and a C-axis rotation mechanism to drive the workpiece carrier device as a whole to move horizontally along the X-axis and the Y-axis, and to drive the workpiece loading head installed on the workpiece carrier device to swing around the B-axis and rotate around the C-axis, wherein the middle cross section of the workpiece on the workpiece loading head can be adjusted to be flush with the B-axis swing axis.

[0063] Among them, the head includes a head base plate and a head module, the head module is fixedly assembled on the head base plate to be driven by the A-axis translation mechanism, the A-axis translation mechanism includes an A-axis motor, an A-axis coupling, an A-axis coupling box, an A-axis drive rod, an A-axis drive rod support, an A-axis drive rod connecting block, an A-axis slide rail, an A-axis slider and a head connecting plate, the A-axis motor is a stepper motor, the A-axis coupling is a diaphragm coupling, the A-axis drive rod support, the A-axis coupling box and the A-axis slide rail are fixedly assembled on the A-axis base plate, both ends of the A-axis drive rod are supported on the A-axis drive rod support, the A-axis coupling is installed in the A-axis coupling box, the A-axis drive rod is connected to the A-axis motor through the A-axis coupling, the A-axis drive rod connecting block is fixedly assembled on the A-axis drive rod, the A-axis slider can be slidably assembled on the A-axis slide rail, the head connecting plate is fixedly connected to the A-axis drive rod connecting block and the A-axis slider, and the head base plate is fixedly connected to the head connecting plate.

[0064] Among them, the workpiece carrier device includes a workpiece rack and a workpiece rack slide, the workpiece rack includes an L-shaped workpiece rack support and an L-shaped workpiece swing frame, the bottom wall of the workpiece rack support is fixed to the workpiece rack slide, the side walls of the workpiece swing frame are rotatably installed on the side walls of the workpiece rack support, the workpiece loading head is rotatably installed on the top wall of the workpiece swing frame, the workpiece swing frame can swing around the B-axis when driven by the B-axis swing mechanism, the workpiece loading head can rotate around the C-axis when driven by the C-axis rotation mechanism, and the workpiece rack slide can drive the workpiece rack to move horizontally along the X-axis and Y-axis on the machine platform when driven by the X-axis translation mechanism and the Y-axis translation mechanism.

[0065] Among them, the B-axis swing mechanism includes a B-axis motor and a B-axis reducer, wherein the B-axis motor is a stepper motor, the B-axis reducer is a turntable reducer, the B-axis reducer is installed in a through hole opened on the side wall of the workpiece rack support, the housing of the B-axis motor is fixed to the housing of the B-axis reducer, the power shaft of the B-axis motor is connected to the turntable shaft of the B-axis reducer, and the turntable of the B-axis reducer is fixedly connected to the side wall of the workpiece swing rack.

[0066] The C-axis rotating mechanism comprises a C-axis driving mechanism and a C-axis driven mechanism installed on the top wall of the workpiece swing frame, and the two ends of the synchronous belt are wound around the C-axis driving mechanism and the C-axis driven mechanism for transmission; the C-axis driving mechanism comprises a C-axis motor, a C-axis coupling plate, a C-axis reducer, a driving shaft and a C-axis seat plate, wherein the C-axis motor is a stepping motor, and the C-axis reducer is a harmonic reducer. The housing of the C-axis motor, the C-axis coupling plate, the housing of the C-axis reducer and the C-axis seat plate are connected as a whole and fixedly assembled on the top wall of the workpiece swing frame through the C-axis seat plate, and the C-axis motor, the C-axis reducer and the driving shaft are sequentially axially coupled, wherein the wave generator of the C-axis reducer is connected to the C-axis The C-axis driven mechanism comprises a driven shaft, a driven seat plate 1, a driven bearing 1, a driven seat plate 2, a driven bearing 2, an adjusting nut and a workpiece loading head. The driven shaft is rotatably mounted on the top wall of the workpiece swing frame by an upper support composed of a driven seat plate 1 and a driven bearing 1 and a lower support composed of a driven seat plate 2 and a driven bearing 2. The workpiece loading head is mounted on the bottom end of the driven driving shaft. The adjusting nut is sleeved on the driven shaft and is located between the lower support and the workpiece loading head.

[0067] Among them, the X-axis translation mechanism includes an X-axis slide plate, an X-axis slide rail, an X-axis linear motor stator, an X-axis linear motor mover, an X-axis motor stator seat plate and an X-axis saddle. The X-axis slide rail is installed on the top surface of the X-axis slide rail mounting portion of the machine bed along the longitudinal direction of the machine bed. The X-axis motor stator seat plate is installed on the top surface of the X-axis motor stator mounting portion of the machine bed along the longitudinal direction of the machine bed. X-axis saddles are assembled on both sides of the X-axis slide plate. The X-axis slide plate is slidably installed on the X-axis slide rail through the X-axis saddle. The X-axis linear motor stator is fixedly installed on the top surface of the X-axis motor stator seat plate, and the X-axis linear motor mover is installed on the bottom surface of the X-axis slide plate.

[0068] Among them, the Y-axis translation mechanism includes a Y-axis slide, a Y-axis slide rail, a Y-axis linear motor stator, a Y-axis linear motor mover, an X-axis slide rail, a workpiece rack assembly plate and a Y-axis saddle. The Y-axis slide rail is assembled on the top surface of the X-axis slide rail along the horizontal direction of the X-axis slide rail, and the Y-axis saddle is assembled on both sides of the Y-axis slide rail. The Y-axis slide rail is slidably mounted on the Y-axis slide rail through the Y-axis saddle. The Y-axis linear motor stator is fixedly mounted on the top surface of the X-axis slide rail, and the Y-axis linear motor mover is mounted on the bottom surface of the Y-axis slide rail. The workpiece rack assembly plate is fixedly mounted on the top surface of the Y-axis slide rail to support the workpiece rack support.

[0069] Among them, a plurality of machine adjustment devices are arranged at the bottom of the machine bed, and the machine adjustment devices include a wedge-shaped upper module, a middle module and a lower module; a notch is arranged in the middle of the middle module, and pin holes are arranged in the upper module and the lower module corresponding to the opening position of the notch, and the upper module, the middle module and the lower module are longitudinally positioned by installing a pin with a hole in the pin hole of the upper module and the lower module and passing the bolt through the screw hole of the pin and the screw hole of the connecting part of the middle module; the sides of the upper module and the lower module are respectively provided with long strip lock grooves arranged in an "eight" shape, and the lock buckle is fixed to the side of the middle module by a lock buckle screw. When the middle module is installed between the upper module and the lower module, the locking claws on both sides of the lock buckle are placed in the corresponding lock grooves to lock the upper module, the middle module and the lower module laterally.

[0070] Among them, the water-guided laser cutting processing device described above is used for cutting processing, which includes the following steps: bonding the blank workpiece to the workpiece loading head on the workpiece rack in the workpiece carrier device, and adjusting the position of the workpiece loading head to make the middle cross section of the workpiece flush with the B-axis swing axis; starting the X-axis translation mechanism and the Y-axis translation mechanism, moving the workpiece rack slide until the workpiece is located below the head device; starting the A-axis translation mechanism, adjusting the head to a suitable processing height; starting the C-axis rotation mechanism to rotate the workpiece around the C-axis, and at the same time starting the head module of the head laser microjet until the upper circumferential surface of the workpiece is cut; starting the B-axis The swing mechanism flips the workpiece loading head and the workpiece on the workpiece holder 180 degrees around the B axis; the C-axis rotation mechanism is started to rotate the workpiece around the C axis, and the head module of the laser microjet of the head is turned on until the lower circumferential surface of the workpiece is cut; the B-axis swing mechanism is started to flip the workpiece loading head and the workpiece on the workpiece holder 90 degrees around the B axis; the Y-axis translation mechanism is started to translate the workpiece along the Y axis by a distance of a preset thin film thickness; the X-axis translation mechanism is started to translate the workpiece along the X axis, and the head module of the laser microjet of the head is turned on until a slice is cut; the last two steps are repeated until all the workpieces are cut into slices.

[0071] Among them, the blank is silicon carbide material, which is used to cut into wafers.

[0072] The water-guided laser cutting equipment comprises a machine platform and a head device and a workpiece carrier device installed on the machine platform. The head device comprises a head equipped with a laser micro-jet module. The head device is equipped with an A-axis translation mechanism to drive the head to move vertically along the A-axis. The workpiece carrier device is equipped with an X-axis translation mechanism, a Y-axis translation mechanism, a B-axis swing mechanism and a C-axis rotation mechanism to drive the entire workpiece carrier device to move horizontally along the X-axis and the Y-axis, and to drive the workpiece loading head installed on the workpiece carrier device to swing around the B-axis and rotate around the C-axis.

[0073] Among them, the A-axis translation mechanism includes an A-axis motor, an A-axis coupling, an A-axis coupling box, an A-axis drive rod, an A-axis drive rod support, an A-axis drive rod connecting block, an A-axis slide rail, an A-axis slider and a head connecting plate, wherein the A-axis motor is a stepper motor, the A-axis coupling is a diaphragm coupling, the A-axis drive rod support, the A-axis coupling box and the A-axis slide rail are fixedly assembled on the A-axis seat plate, both ends of the A-axis drive rod are supported on the A-axis drive rod support, the A-axis coupling is installed in the A-axis coupling box, the A-axis drive rod is connected to the A-axis motor through the A-axis coupling, the A-axis drive rod connecting block is fixedly assembled on the A-axis drive rod, the A-axis slider can be slidably assembled on the A-axis slide rail, the head connecting plate is fixedly connected to the A-axis drive rod connecting block and the A-axis slider, and the head seat plate is fixedly connected to the head connecting plate.

[0074] Among them, the workpiece carrier device includes a workpiece frame and a workpiece frame slide, the workpiece frame includes a workpiece frame support and a workpiece swing frame, the workpiece frame support is fixedly mounted on the workpiece frame slide, the workpiece swing frame can be rotatably mounted on the workpiece frame support, the workpiece loading head is mounted on the workpiece swing frame, the workpiece swing frame can swing around the B axis under the drive of the B axis swing mechanism, and the workpiece loading head can rotate around the C axis under the drive of the C axis rotation mechanism, wherein the middle cross section of the workpiece on the workpiece loading head is flush with the B axis swing axis.

[0075] Among them, the B-axis swing mechanism includes a B-axis motor and a B-axis reducer, wherein the B-axis motor is a stepper motor, the B-axis reducer is a turntable reducer, the B-axis reducer is installed in a through hole opened on the side wall of the workpiece rack support, the housing of the B-axis motor is fixed to the housing of the B-axis reducer, the power shaft of the B-axis motor is connected to the turntable shaft of the B-axis reducer, and the turntable of the B-axis reducer is fixedly connected to the side wall of the workpiece swing rack.

[0076] Among them, the C-axis rotation mechanism includes a C-axis active mechanism and a C-axis driven mechanism. The C-axis active mechanism is installed at the active mechanism installation position on the top wall of the workpiece swing frame, and the C-axis driven mechanism is installed at the driven mechanism installation position on the top wall of the B-axis workpiece swing frame. The C-axis active mechanism and the C-axis driven mechanism are driven by a synchronous belt to drive the workpiece loading head and the loaded workpiece to rotate around the C-axis.

[0077] Among them, the C-axis active mechanism includes a C-axis motor, a C-axis coupling plate, a C-axis reducer, a driving shaft and a C-axis base plate, wherein the C-axis motor is a stepper motor, the C-axis reducer is a harmonic reducer, the housing of the C-axis motor, the C-axis coupling plate, the housing of the C-axis reducer and the C-axis base plate are connected as a whole, and are fixedly assembled on the top wall of the workpiece swing frame through the C-axis base plate, and the C-axis motor, the C-axis reducer and the driving shaft are axially coupled in sequence, wherein the wave generator of the C-axis reducer is connected to the power shaft of the C-axis motor, the rigid wheel of the C-axis reducer is fixed to the housing of the C-axis reducer, the flexible wheel of the C-axis reducer is installed on the output shaft of the C-axis reducer, the chassis of the driving shaft is fixed to the flexible wheel of the C-axis reducer, and a driving pulley is arranged at the top of the driving shaft to wind the synchronous belt.

[0078] Among them, the C-axis driven mechanism includes a driven shaft, a driven seat plate 1, a driven bearing 1, a driven seat plate 2, a driven bearing 2, an adjusting nut and a workpiece loading head. The driven shaft is rotatably assembled on the top wall of the workpiece swing frame by an upper support composed of a driven seat plate 1 and a driven bearing 1, and a lower support composed of a driven seat plate 2 and a driven bearing 2. A driven pulley is arranged at the top end of the driving shaft to wind the synchronous belt; the workpiece loading head is installed at the bottom end of the driving shaft, and the workpiece loading head can be a clamp type installation structure; the adjusting nut is a nut with an outer opening, which is mounted on the driven shaft and is located between the lower support and the workpiece loading head.

[0079] Among them, the X-axis translation mechanism includes an X-axis slide plate, an X-axis slide rail, an X-axis linear motor stator, an X-axis linear motor mover, an X-axis motor stator seat plate and an X-axis saddle. The X-axis slide rail is installed on the top surface of the X-axis slide rail mounting portion of the machine bed along the longitudinal direction of the machine bed. The X-axis motor stator seat plate is installed on the top surface of the X-axis motor stator mounting portion of the machine bed along the longitudinal direction of the machine bed. X-axis saddles are assembled on both sides of the X-axis slide plate. The X-axis slide plate is slidably installed on the X-axis slide rail through the X-axis saddle. The X-axis linear motor stator is fixedly installed on the top surface of the X-axis motor stator seat plate, and the X-axis linear motor mover is installed on the bottom surface of the X-axis slide plate.

[0080] Among them, the Y-axis translation mechanism includes a Y-axis slide, a Y-axis slide rail, a Y-axis linear motor stator, a Y-axis linear motor mover, an X-axis slide rail, a workpiece rack assembly plate and a Y-axis saddle. The Y-axis slide rail is assembled on the top surface of the X-axis slide rail along the horizontal direction of the X-axis slide rail, and the Y-axis saddle is assembled on both sides of the Y-axis slide rail. The Y-axis slide rail is slidably mounted on the Y-axis slide rail through the Y-axis saddle. The Y-axis linear motor stator is fixedly mounted on the top surface of the X-axis slide rail, and the Y-axis linear motor mover is mounted on the bottom surface of the Y-axis slide rail. The workpiece rack assembly plate is fixedly mounted on the top surface of the Y-axis slide rail to support the workpiece rack support.

[0081] Among them, a number of machine adjustment devices are arranged at the bottom of the machine bed, and the machine adjustment devices include wedge-shaped upper module, middle module and lower module, which are combined into a square integral mechanism and locked with the machine bed.

[0082] The water-guided laser cutting processing platform includes a machine platform and a head device and a workpiece carrier device installed on the machine platform. The head device includes a head equipped with a laser micro-jet module. The head device is located above the workpiece carrier device, wherein the head of the head device can move vertically along the A axis, the workpiece carrier device as a whole can move horizontally along the X axis and the Y axis, and the workpiece loading head installed on the workpiece carrier device and the workpiece loaded thereon can swing around the B axis and rotate around the C axis.

[0083] The machine comprises a machine gantry and a machine bed which are integrally cast with minerals. The machine gantry is located above the machine bed, the machine head device is mounted on the machine gantry, and the workpiece carrier device is mounted on the machine bed.

[0084] Among them, a number of machine adjustment devices are arranged at the bottom of the machine bed, and the machine adjustment devices include wedge-shaped upper module, middle module and lower module, which are combined into a square integral mechanism and locked with the machine bed.

[0085] Among them, a notch is set in the middle part of the middle module, and pin holes are set in the upper module and the lower module corresponding to the opening position of the notch. The upper module, the middle module and the lower module are longitudinally positioned by installing holed pins in the pin holes of the upper module and the lower module and passing the bolts through the screw holes of the pins and the screw holes of the connecting part of the middle module; the sides of the upper module and the lower module are respectively provided with long strip lock grooves arranged in an "eight" shape, and the lock is fixed to the side of the middle module by a lock screw. When the middle module is installed between the upper module and the lower module, the locking claws on both sides of the lock are placed in the corresponding lock grooves to lock the upper module, the middle module and the lower module laterally.

[0086] Among them, the head of the head device is equipped with an A-axis translation mechanism so that it can move vertically along the A-axis. The A-axis translation mechanism includes an A-axis motor, an A-axis coupling, an A-axis coupling box, an A-axis drive rod, an A-axis drive rod support, an A-axis drive rod connecting block, an A-axis slide rail, an A-axis slider and a head connecting plate, wherein the A-axis motor is a stepper motor, the A-axis coupling is a diaphragm coupling, the A-axis drive rod support, the A-axis coupling box and the A-axis slide rail are fixedly assembled on the A-axis seat plate, both ends of the A-axis drive rod are supported on the A-axis drive rod support, the A-axis coupling is installed in the A-axis coupling box, the A-axis drive rod is connected to the A-axis motor through the A-axis coupling, the A-axis drive rod connecting block is fixedly assembled on the A-axis drive rod, the A-axis slider can be slidably assembled on the A-axis slide rail, the head connecting plate is fixedly connected to the A-axis drive rod connecting block and the A-axis slider, and the head seat plate is fixedly connected to the head connecting plate.

[0087] Among them, the workpiece carrier device includes a workpiece rack and a workpiece rack slide, the workpiece rack includes a workpiece rack support and a workpiece swing frame, the workpiece rack support is fixedly mounted on the workpiece rack slide, the workpiece swing frame can be rotatably mounted on the workpiece rack support, and the workpiece loading head is mounted on the workpiece swing frame to load the workpiece, wherein the workpiece swing frame is equipped with a B-axis swing mechanism and a C-axis rotation mechanism so that the workpiece swing frame can swing around the B-axis, and the workpiece loading head can rotate around the C-axis; the workpiece rack slide is equipped with an X-axis translation mechanism and a Y-axis translation mechanism so that the workpiece rack can move horizontally along the X-axis and Y-axis on the machine together with the workpiece rack slide.

[0088] Among them, the B-axis swing mechanism includes a B-axis motor and a B-axis reducer, wherein the B-axis motor is a stepper motor, the B-axis reducer is a turntable reducer, the B-axis reducer is installed in a through hole opened on the side wall of the workpiece rack support, the housing of the B-axis motor is fixed to the housing of the B-axis reducer, the power shaft of the B-axis motor is connected to the turntable shaft of the B-axis reducer, the turntable of the B-axis reducer is fixedly connected to the side wall of the workpiece swing rack, wherein the middle cross section of the workpiece on the workpiece loading head is flush with the B-axis swing axis.

[0089] The C-axis rotating mechanism comprises a C-axis driving mechanism and a C-axis driven mechanism installed on the top wall of the workpiece swing frame, and the two ends of the synchronous belt are wound around the C-axis driving mechanism and the C-axis driven mechanism for transmission; the C-axis driving mechanism comprises a C-axis motor, a C-axis coupling plate, a C-axis reducer, a driving shaft and a C-axis seat plate, wherein the C-axis motor is a stepping motor, and the C-axis reducer is a harmonic reducer. The housing of the C-axis motor, the C-axis coupling plate, the housing of the C-axis reducer and the C-axis seat plate are connected as a whole and fixedly assembled on the top wall of the workpiece swing frame through the C-axis seat plate, and the C-axis motor, the C-axis reducer and the driving shaft are sequentially axially coupled, wherein the wave generator of the C-axis reducer is connected to the C-axis The C-axis driven mechanism comprises a driven shaft, a driven seat plate 1, a driven bearing 1, a driven seat plate 2, a driven bearing 2, an adjusting nut and a workpiece loading head. The driven shaft is rotatably mounted on the top wall of the workpiece swing frame by an upper support composed of a driven seat plate 1 and a driven bearing 1 and a lower support composed of a driven seat plate 2 and a driven bearing 2. The workpiece loading head is mounted on the bottom end of the driven driving shaft. The adjusting nut is sleeved on the driven shaft and is located between the lower support and the workpiece loading head.

[0090] Among them, the X-axis translation mechanism includes an X-axis slide plate, an X-axis slide rail, an X-axis linear motor stator, an X-axis linear motor mover, an X-axis motor stator seat plate and an X-axis saddle. The X-axis slide rail is installed on the top surface of the X-axis slide rail mounting portion of the machine bed along the longitudinal direction of the machine bed. The X-axis motor stator seat plate is installed on the top surface of the X-axis motor stator mounting portion of the machine bed along the longitudinal direction of the machine bed. X-axis saddles are assembled on both sides of the X-axis slide plate. The X-axis slide plate is slidably installed on the X-axis slide rail through the X-axis saddle. The X-axis linear motor stator is fixedly installed on the top surface of the X-axis motor stator seat plate, and the X-axis linear motor mover is installed on the bottom surface of the X-axis slide plate.

[0091] Among them, the Y-axis translation mechanism includes a Y-axis slide, a Y-axis slide rail, a Y-axis linear motor stator, a Y-axis linear motor mover, an X-axis slide rail, a workpiece rack assembly plate and a Y-axis saddle. The Y-axis slide rail is assembled on the top surface of the X-axis slide rail along the horizontal direction of the X-axis slide rail, and the Y-axis saddle is assembled on both sides of the Y-axis slide rail. The Y-axis slide rail is slidably mounted on the Y-axis slide rail through the Y-axis saddle. The Y-axis linear motor stator is fixedly mounted on the top surface of the X-axis slide rail, and the Y-axis linear motor mover is mounted on the bottom surface of the Y-axis slide rail. The workpiece rack assembly plate is fixedly mounted on the top surface of the Y-axis slide rail to support the workpiece rack support.

[0092] The head and workpiece stage system of a water-guided laser cutting machine comprises a head device and a workpiece stage device, wherein the head device is provided with a head of a laser micro-jet module, and the head device and the workpiece stage device are respectively installed on the machine platform of the water-guided laser cutting machine, wherein the head device is located above the workpiece stage device, and the head device is provided with an A-axis translation mechanism to drive the head to move vertically along the A-axis, and the workpiece stage device is provided with an X-axis translation mechanism, a Y-axis translation mechanism, a B-axis swing mechanism and a C-axis rotation mechanism to drive the workpiece stage device as a whole to move horizontally along the X-axis and the Y-axis and to drive the workpiece loading head installed on the workpiece stage device to swing around the B-axis and rotate around the C-axis, and the A-axis translation mechanism, the X-axis translation mechanism, the Y-axis translation mechanism, the B-axis swing mechanism and the C-axis rotation mechanism are respectively provided with position detection and / or travel limit mechanisms.

[0093] Among them, the machine head device is installed on the machine gantry, the workpiece carrier device is installed on the machine bed, the machine gantry and the machine bed are cast as a whole with minerals, and the machine gantry is located above the machine bed.

[0094] The workpiece carrier device is provided with a foldable dust seal, and the two ends of the dust seal are respectively connected to the workpiece frame slide of the workpiece carrier device and the dust seal baffle of the machine bed.

[0095] Among them, the A-axis translation mechanism includes an A-axis motor, an A-axis coupling, an A-axis coupling box, an A-axis drive rod, an A-axis drive rod support, an A-axis drive rod connecting block, an A-axis slide rail, an A-axis slider and a head connecting plate, wherein the A-axis motor is a stepper motor, the A-axis coupling is a diaphragm coupling, the A-axis drive rod support, the A-axis coupling box and the A-axis slide rail are fixedly assembled on the A-axis seat plate, both ends of the A-axis drive rod are supported on the A-axis drive rod support, the A-axis coupling is installed in the A-axis coupling box, the A-axis drive rod is connected to the A-axis motor through the A-axis coupling, the A-axis drive rod connecting block is fixedly assembled on the A-axis drive rod, the A-axis slider can be slidably assembled on the A-axis slide rail, the head connecting plate is fixedly connected to the A-axis drive rod connecting block and the A-axis slider, and the head seat plate is fixedly connected to the head connecting plate.

[0096] Among them, the workpiece carrier device includes a workpiece rack and a workpiece rack slide, the workpiece rack includes an L-shaped workpiece rack support and an L-shaped workpiece swing frame, the bottom wall of the workpiece rack support is fixed to the workpiece rack slide, the side walls of the workpiece swing frame are rotatably installed on the side walls of the workpiece rack support, the workpiece loading head is rotatably installed on the top wall of the workpiece swing frame, the workpiece swing frame can swing around the B-axis when driven by the B-axis swing mechanism, the workpiece loading head can rotate around the C-axis when driven by the C-axis rotation mechanism, and the workpiece rack slide can drive the workpiece rack to move horizontally along the X-axis and Y-axis on the machine platform when driven by the X-axis translation mechanism and the Y-axis translation mechanism.

[0097] Among them, the B-axis swing mechanism includes a B-axis motor and a B-axis reducer, wherein the B-axis motor is a stepper motor, the B-axis reducer is a turntable reducer, the B-axis reducer is installed in a through hole opened on the side wall of the workpiece rack support, the housing of the B-axis motor is fixed to the housing of the B-axis reducer, the power shaft of the B-axis motor is connected to the turntable shaft of the B-axis reducer, the turntable of the B-axis reducer is fixedly connected to the side wall of the workpiece swing rack, wherein the middle cross-section of the workpiece on the workpiece loading head can be adjusted to be flush with the B-axis swing axis.

[0098] Among them, the C-axis rotation mechanism includes a C-axis active mechanism and a C-axis driven mechanism installed on the top wall of the workpiece swing frame. The C-axis active mechanism and the C-axis driven mechanism are driven by a transmission belt to drive the workpiece loading head and the loaded workpiece to rotate around the C-axis, and the transmission belt is a synchronous belt.

[0099] The C-axis active mechanism includes a C-axis motor, a C-axis coupling plate, a C-axis reducer, a driving shaft and a C-axis base plate, wherein the C-axis motor is a stepper motor, the C-axis reducer is a harmonic reducer, the housing of the C-axis motor, the C-axis coupling plate, the housing of the C-axis reducer and the C-axis base plate are connected as a whole, and are fixedly assembled on the top wall of the workpiece swing frame through the C-axis base plate, and the C-axis motor, the C-axis reducer and the driving shaft are sequentially axially coupled, wherein the wave generator of the C-axis reducer is connected to the power shaft of the C-axis motor, the rigid wheel of the C-axis reducer is fixed to the housing of the C-axis reducer, and the C The flexible wheel of the C-axis reducer is installed on the output shaft of the C-axis reducer, and the chassis of the driving shaft is fixed to the flexible wheel of the C-axis reducer; the C-axis driven mechanism includes a driven shaft, a driven seat plate 1, a driven bearing 1, a driven seat plate 2, a driven bearing 2, an adjusting nut and a workpiece loading head. The driven shaft is rotatably assembled on the top wall of the workpiece swing frame by an upper support composed of a driven seat plate 1 and a driven bearing 1 and a lower support composed of a driven seat plate 2 and a driven bearing 2. The workpiece loading head is installed at the bottom end of the driven driving shaft, and the adjusting nut is sleeved on the driven shaft and located between the lower support and the workpiece loading head.

[0100] Among them, the X-axis translation mechanism includes an X-axis slide plate, an X-axis slide rail, an X-axis linear motor stator, an X-axis linear motor mover, an X-axis motor stator seat plate and an X-axis saddle. The X-axis slide rail is installed on the top surface of the X-axis slide rail mounting portion of the machine bed along the longitudinal direction of the machine bed. The X-axis motor stator seat plate is installed on the top surface of the X-axis motor stator mounting portion of the machine bed along the longitudinal direction of the machine bed. X-axis saddles are assembled on both sides of the X-axis slide plate. The X-axis slide plate is slidably installed on the X-axis slide rail through the X-axis saddle. The X-axis linear motor stator is fixedly installed on the top surface of the X-axis motor stator seat plate, and the X-axis linear motor mover is installed on the bottom surface of the X-axis slide plate.

[0101] Among them, the Y-axis translation mechanism includes a Y-axis slide, a Y-axis slide rail, a Y-axis linear motor stator, a Y-axis linear motor mover, an X-axis slide rail, a workpiece rack assembly plate and a Y-axis saddle. The Y-axis slide rail is assembled on the top surface of the X-axis slide rail along the horizontal direction of the X-axis slide rail, and the Y-axis saddle is assembled on both sides of the Y-axis slide rail. The Y-axis slide rail is slidably mounted on the Y-axis slide rail through the Y-axis saddle. The Y-axis linear motor stator is fixedly mounted on the top surface of the X-axis slide rail, and the Y-axis linear motor mover is mounted on the bottom surface of the Y-axis slide rail. The workpiece rack assembly plate is fixedly mounted on the top surface of the Y-axis slide rail to support the workpiece rack support.

[0102] The head device of the water-guided laser cutting machine is installed on the machine gantry of the water-guided laser cutting machine and is located above the workpiece carrier on the machine bed. The head device includes a head and an A-axis translation mechanism. The head is equipped with a laser micro-jet module. The A-axis translation mechanism drives the head to move vertically along the A-axis on the machine gantry.

[0103] The machine head comprises a machine head base plate and a machine head module, and the machine head module is fixedly connected to the machine head base plate.

[0104] Among them, the head device is assembled on the head mounting part arranged on the front side of the top crossbeam of the machine platform gantry.

[0105] Among them, the A-axis translation mechanism is installed on the A-axis base plate, and the A-axis base plate is fixedly assembled to the head mounting part arranged on the front side of the top crossbeam of the machine platform gantry.

[0106] Among them, the A-axis translation mechanism includes an A-axis motor, an A-axis coupling, an A-axis coupling box, an A-axis drive rod, an A-axis drive rod support, an A-axis drive rod connecting block and a head connecting plate, wherein the A-axis motor is a stepper motor, the A-axis coupling is a diaphragm coupling, the A-axis drive rod support, the A-axis coupling box and the A-axis seat plate are assembled on the A-axis seat plate, both ends of the A-axis drive rod are supported on the A-axis drive rod support, the A-axis coupling is installed in the A-axis coupling box, the A-axis drive rod is connected to the A-axis motor through the A-axis coupling, the A-axis drive rod connecting block is fixedly assembled on the A-axis drive rod, the head connecting plate is fixedly connected to the A-axis drive rod connecting block, and the head seat plate is fixedly connected to the head connecting plate.

[0107] Among them, the A-axis translation mechanism includes an A-axis slide rail and an A-axis slider. The A-axis slider is slidably assembled on the A-axis slide rail, and the head connecting plate is fixedly connected to the A-axis slider.

[0108] The A-axis slider includes an assembled slider saddle and a slider pad, the slider saddle is sleeved on the A-axis slide rail, and the slider pad is connected to the head connecting plate.

[0109] Among them, the upper and lower positions of the A-axis base plate are equipped with a head detection fixed block and a head connection plate, respectively, so that when the head moves vertically along the A-axis together with the head connection plate, the height position of the head can be detected.

[0110] Among them, the head travel switches are installed at the upper and lower positions of the A-axis base plate to limit the travel of the head when the head moves vertically along the A-axis together with the head connecting plate.

[0111] Among them, a plurality of machine adjustment positions are arranged at the bottom of the machine bed to configure the machine adjustment device accordingly, so as to adjust the machine bed to a corresponding height and keep it in a horizontal state.

[0112] The workpiece carrier device of the water-guided laser cutting machine is installed on the bed of the water-guided laser cutting machine and is located below the head device on the machine gantry. The head device includes a head and an A-axis translation mechanism. The workpiece carrier device is equipped with an X-axis translation mechanism, a Y-axis translation mechanism, a B-axis swing mechanism and a C-axis rotation mechanism to drive the entire workpiece carrier device to move horizontally along the X-axis and Y-axis and drive the workpiece loading head installed on the workpiece carrier device to swing around the B-axis and rotate around the C-axis.

[0113] Among them, the workpiece carrier device includes a workpiece rack and a workpiece rack slide, the workpiece rack includes an L-shaped workpiece rack support and an L-shaped workpiece swing frame, the bottom wall of the workpiece rack support is fixed to the workpiece rack slide, the side walls of the workpiece swing frame are rotatably installed on the side walls of the workpiece rack support, the workpiece loading head is rotatably installed on the top wall of the workpiece swing frame, the workpiece swing frame can swing around the B-axis when driven by the B-axis swing mechanism, the workpiece loading head can rotate around the C-axis when driven by the C-axis rotation mechanism, and the workpiece rack slide can drive the workpiece rack to move horizontally along the X-axis and Y-axis on the machine platform when driven by the X-axis translation mechanism and the Y-axis translation mechanism.

[0114] Among them, the B-axis swing mechanism includes a B-axis motor and a B-axis reducer, wherein the B-axis motor is a stepper motor, the B-axis reducer is a turntable reducer, the B-axis reducer is installed in a through hole opened on the side wall of the workpiece rack support, the housing of the B-axis motor is fixed to the housing of the B-axis reducer, the power shaft of the B-axis motor is connected to the turntable shaft of the B-axis reducer, and the turntable of the B-axis reducer is fixedly connected to the side wall of the workpiece swing rack.

[0115] The middle cross section of the workpiece on the workpiece loading head is flush with the B-axis swing axis, so that the front and back working surfaces of the workpiece are located at the same horizontal position when the workpiece swing frame flips 180 degrees.

[0116] The C-axis rotating mechanism comprises a C-axis driving mechanism and a C-axis driven mechanism installed on the top wall of the workpiece swing frame, and two ends of the synchronous belt are wound around the C-axis driving mechanism and the C-axis driven mechanism for transmission.

[0117] The C-axis active mechanism includes a C-axis motor, a C-axis coupling plate, a C-axis reducer, a driving shaft and a C-axis base plate, wherein the C-axis motor is a stepper motor, the C-axis reducer is a harmonic reducer, the housing of the C-axis motor, the C-axis coupling plate, the housing of the C-axis reducer and the C-axis base plate are connected as a whole, and are fixedly assembled on the top wall of the workpiece swing frame through the C-axis base plate, and the C-axis motor, the C-axis reducer and the driving shaft are sequentially connected, wherein the wave generator of the C-axis reducer is connected to the power shaft of the C-axis motor, the rigid wheel of the C-axis reducer is fixed to the housing of the C-axis reducer, the flexible wheel of the C-axis reducer is installed on the output shaft of the C-axis reducer, and the chassis of the driving shaft is fixed to the flexible wheel of the C-axis reducer.

[0118] Among them, the C-axis driven mechanism includes a driven shaft, a driven seat plate 1, a driven bearing 1, a driven seat plate 2, a driven bearing 2, an adjusting nut and a workpiece loading head. The driven shaft is rotatably assembled on the top wall of the workpiece swing frame by an upper support composed of a driven seat plate 1 and a driven bearing 1, and a lower support composed of a driven seat plate 2 and a driven bearing 2. The workpiece loading head is installed at the bottom end of the driven shaft, and the adjusting nut is mounted on the driven shaft and is located between the lower support and the workpiece loading head.

[0119] Among them, the X-axis translation mechanism includes an X-axis slide plate, an X-axis slide rail, an X-axis linear motor stator, an X-axis linear motor mover, an X-axis motor stator seat plate and an X-axis saddle. The X-axis slide rail is installed on the top surface of the X-axis slide rail mounting portion of the machine bed along the longitudinal direction of the machine bed. The X-axis motor stator seat plate is installed on the top surface of the X-axis motor stator mounting portion of the machine bed along the longitudinal direction of the machine bed. X-axis saddles are assembled on both sides of the X-axis slide plate. The X-axis slide plate is slidably installed on the X-axis slide rail through the X-axis saddle. The X-axis linear motor stator is fixedly installed on the top surface of the X-axis motor stator seat plate, and the X-axis linear motor mover is installed on the bottom surface of the X-axis slide plate.

[0120] Among them, the Y-axis translation mechanism includes a Y-axis slide, a Y-axis slide rail, a Y-axis linear motor stator, a Y-axis linear motor mover, an X-axis slide rail, a workpiece rack assembly plate and a Y-axis saddle. The Y-axis slide rail is assembled on the top surface of the X-axis slide rail along the horizontal direction of the X-axis slide rail, and the Y-axis saddle is assembled on both sides of the Y-axis slide rail. The Y-axis slide rail is slidably mounted on the Y-axis slide rail through the Y-axis saddle. The Y-axis linear motor stator is fixedly mounted on the top surface of the X-axis slide rail, and the Y-axis linear motor mover is mounted on the bottom surface of the Y-axis slide rail. The workpiece rack assembly plate is fixedly mounted on the top surface of the Y-axis slide rail to support the workpiece rack support.

[0121] Among them, the X-axis translation mechanism, the Y-axis translation mechanism, the B-axis swing mechanism and the C-axis rotation mechanism are respectively equipped with position detection and / or travel limit mechanisms.

[0122] The workpiece frame of the water-guided laser cutting machine is supported by a workpiece frame slide on a workpiece carrier device so as to move horizontally along the X-axis and the Y-axis. The workpiece frame is provided with a B-axis swing mechanism and a C-axis rotation mechanism so that the workpiece swing frame can swing around the B-axis under the drive of the B-axis swing mechanism, and the workpiece loading head mounted on the workpiece swing frame can rotate around the C-axis under the drive of the C-axis rotation mechanism.

[0123] The middle cross section of the workpiece on the workpiece loading head is flush with the swing axis of the B-axis.

[0124] The workpiece rack comprises a workpiece rack support and a workpiece swing rack. The workpiece rack support is fixedly mounted on the workpiece rack slide, and the workpiece swing rack is rotatably mounted on the workpiece rack support.

[0125] Among them, the workpiece rack support and the workpiece swing rack are L-shaped respectively, the bottom wall of the workpiece rack support is fixed to the workpiece rack slide, the side wall of the workpiece swing rack is rotatably installed on the side wall of the workpiece rack support, and the workpiece loading head is rotatably installed on the top wall of the workpiece swing rack.

[0126] Among them, the B-axis swing mechanism includes a B-axis motor and a B-axis reducer, wherein the B-axis motor is a stepper motor, the B-axis reducer is a turntable reducer, the B-axis reducer is installed in a through hole opened on the side wall of the workpiece rack support, the housing of the B-axis motor is fixed to the housing of the B-axis reducer, the power shaft of the B-axis motor is connected to the turntable shaft of the B-axis reducer, and the turntable of the B-axis reducer is fixedly connected to the side wall of the workpiece swing rack.

[0127] Among them, the C-axis rotation mechanism includes a C-axis active mechanism and a C-axis driven mechanism. The C-axis active mechanism is installed at the active mechanism installation position on the top wall of the workpiece swing frame, and the C-axis driven mechanism is installed at the driven mechanism installation position on the top wall of the B-axis workpiece swing frame. The C-axis active mechanism and the C-axis driven mechanism are driven by a transmission belt to drive the workpiece loading head and the loaded workpiece to rotate around the C-axis, and the transmission belt is a synchronous belt.

[0128] Among them, the C-axis active mechanism includes a C-axis motor, a C-axis coupling plate, a C-axis reducer, a driving shaft and a C-axis base plate, wherein the C-axis motor is a stepper motor, the C-axis reducer is a harmonic reducer, the housing of the C-axis motor, the C-axis coupling plate, the housing of the C-axis reducer and the C-axis base plate are connected as a whole, and are fixedly assembled on the top wall of the workpiece swing frame through the C-axis base plate, and the C-axis motor, the C-axis reducer and the driving shaft are axially coupled in sequence, wherein the wave generator of the C-axis reducer is connected to the power shaft of the C-axis motor, the rigid wheel of the C-axis reducer is fixed to the housing of the C-axis reducer, the flexible wheel of the C-axis reducer is installed on the output shaft of the C-axis reducer, the chassis of the driving shaft is fixed to the flexible wheel of the C-axis reducer, and a driving pulley is arranged at the top of the driving shaft to wind the synchronous belt.

[0129] Among them, the C-axis driven mechanism includes a driven shaft, a driven seat plate 1, a driven bearing 1, a driven seat plate 2, a driven bearing 2, an adjusting nut and a workpiece loading head. The driven shaft is rotatably assembled on the top wall of the workpiece swing frame by an upper support composed of a driven seat plate 1 and a driven bearing 1, and a lower support composed of a driven seat plate 2 and a driven bearing 2. A driven pulley is arranged at the top end of the driving shaft to wind the synchronous belt; the workpiece loading head is installed at the bottom end of the driving shaft, and the workpiece loading head can be a clamp type installation structure; the adjusting nut is a nut with an outer opening, which is mounted on the driven shaft and is located between the lower support and the workpiece loading head.

[0130] Wherein, a sensor is installed on the side wall of the workpiece rack support, and a detection block is arranged on the side wall of the workpiece swing rack so as to detect the swing angle of the workpiece swing rack.

[0131] Wherein, a sensor is installed on the top wall of the workpiece swing frame, which approaches and aligns with the edge of the workpiece to detect the rotation angle of the workpiece.

[0132] The workpiece rack slide of the water-guided laser cutting machine is installed on the machine bed of the water-guided laser cutting machine and is located below the head device on the machine gantry. The workpiece rack slide is used to carry the workpiece rack, and the workpiece carrier device is equipped with an X-axis translation mechanism and a Y-axis translation mechanism to drive the entire workpiece carrier device to move horizontally along the X-axis and Y-axis and reach the bottom.

[0133] Among them, the X-axis translation mechanism is carried on the machine bed, the Y-axis translation mechanism is carried on the X-axis translation mechanism, and the X-axis translation mechanism and the Y-axis translation mechanism are respectively configured with electrical drag chains.

[0134] Among them, the X-axis translation mechanism includes an X-axis slide plate, an X-axis slide rail, an X-axis linear motor stator, an X-axis linear motor mover, an X-axis motor stator seat plate and an X-axis saddle. The X-axis slide rail is installed on the top surface of the X-axis slide rail mounting portion of the machine bed along the longitudinal direction of the machine bed. The X-axis motor stator seat plate is installed on the top surface of the X-axis motor stator mounting portion of the machine bed along the longitudinal direction of the machine bed. X-axis saddles are assembled on both sides of the X-axis slide plate. The X-axis slide plate is slidably installed on the X-axis slide rail through the X-axis saddle. The X-axis linear motor stator is fixedly installed on the top surface of the X-axis motor stator seat plate, and the X-axis linear motor mover is installed on the bottom surface of the X-axis slide plate.

[0135] Among them, an X-axis travel limiter is installed on the top surface of the X-axis motor stator base plate to limit the stroke of the X-axis slide.

[0136] Among them, the Y-axis translation mechanism includes a Y-axis slide, a Y-axis slide rail, a Y-axis linear motor stator, a Y-axis linear motor mover, an X-axis slide rail and a Y-axis saddle. The Y-axis slide rail is assembled on the top surface of the X-axis slide rail along the horizontal direction of the X-axis slide rail. The Y-axis saddle is assembled on both sides of the Y-axis slide rail. The Y-axis slide rail is slidably mounted on the Y-axis slide rail through the Y-axis saddle. The Y-axis linear motor stator is fixedly mounted on the top surface of the X-axis slide rail, and the Y-axis linear motor mover is mounted on the bottom surface of the Y-axis slide rail.

[0137] The Y-axis translation mechanism is provided with a workpiece rack assembly plate, and the workpiece rack assembly plate is fixedly assembled on the top surface of the Y-axis slide plate to carry the workpiece rack support.

[0138] Wherein, a Y-axis travel limiter is installed on the top surface of the X-axis slide to limit the travel of the Y-axis slide.

[0139] Among them, a workpiece rack slide mounting part is arranged on the top of the machine bed, which is provided with an X-axis slide rail mounting part and an X-axis motor stator mounting part with a plurality of reserved assembly holes. The X-axis slide rail mounting part and the X-axis motor stator mounting part extend to the door opening under the machine gantry.

[0140] Among them, the workpiece rack slide mounting part is equipped with a folding dust seal, which is also connected to the dust seal baffle of the machine bed.

[0141] Wherein, the dust baffle is installed at the end of the X-axis slide rail of the workpiece rack slide.

[0142] The water-conducting laser cutting machine platform is used to install the head device and the workpiece carrier device of the water-conducting laser cutting machine. The head device includes a head equipped with a laser micro-jet module. The machine platform includes a machine bed and a machine gantry. The machine gantry is located above the machine bed. A head mounting portion is arranged on the top of the machine gantry so that the head of the head device can move vertically along the A axis. A workpiece rack slide mounting portion is arranged on the top of the machine bed so that the workpiece rack slide and the workpiece swing frame in the workpiece carrier device can move horizontally along the X-axis and the Y-axis as a whole and can reach the bottom of the head device, and sufficient space is reserved to ensure that the workpiece loading head in the workpiece carrier device swings around the B axis and rotates around the C axis.

[0143] The machine bed and the machine gantry are integrally cast with minerals, and a plurality of assembly holes are preset on the machine bed and the machine gantry respectively.

[0144] The columns on both sides of the machine gantry are integrally cast with the machine bed, wherein the columns on both sides of the machine gantry and the top crossbeam form a door opening for the workpiece carrier device to enter and exit.

[0145] Among them, a head mounting portion is arranged on the front side of the top crossbeam of the machine gantry to assemble the head device.

[0146] Among them, a raised portion is set on the front side of the top crossbeam of the machine platform gantry as a head mounting portion, and a plurality of assembly strips are set on the side of the raised portion. Assembly holes are reserved on the assembly strips so that the A-axis seat plate of the head device can be fixedly assembled on the side of the head mounting portion.

[0147] Among them, the workpiece rack slide mounting part is provided with an X-axis slide rail mounting part and an X-axis motor stator mounting part with a plurality of reserved assembly holes, wherein the X-axis slide rail mounting part and the X-axis motor stator mounting part extend to the door opening below the machine platform gantry.

[0148] The workpiece rack slide mounting portion is provided with a folding dust seal, wherein the dust seal is simultaneously connected to a dust seal baffle of the machine bed, and the dust seal baffle is mounted on the end of the X-axis slide rail of the workpiece rack slide.

[0149] Among them, a plurality of machine adjustment positions are arranged at the bottom of the machine bed to install the machine adjustment device, so as to adjust the machine bed to a corresponding height and keep it in a horizontal state.

[0150] Among them, the machine adjustment device includes an upper module, a middle module and a lower module which are wedge-shaped respectively. The upper module, the middle module and the lower module cooperate together to form a square overall structure and can be locked with the machine bed by screws.

[0151] Among them, a notch is set in the middle part of the middle module, and pin holes are set in the upper module and the lower module corresponding to the opening position of the notch. The upper module, the middle module and the lower module are longitudinally positioned by installing holed pins in the pin holes of the upper module and the lower module and passing the bolts through the screw holes of the pins and the screw holes of the connecting part of the middle module; the sides of the upper module and the lower module are respectively provided with long strip lock grooves arranged in an "eight" shape, and the lock is fixed to the side of the middle module by a lock screw. When the middle module is installed between the upper module and the lower module, the locking claws on both sides of the lock are placed in the corresponding lock grooves to lock the upper module, the middle module and the lower module laterally.

[0152] The following is a detailed description in conjunction with the appended body and specific embodiments.

[0153] See also Figure 1-Figure 8 , showing the overall structure of the water-conducting laser cutting machine of the present invention. The water-conducting laser cutting machine includes a machine platform 100, a head device 200 and a workpiece carrier device 300, wherein the head device 200 and the workpiece carrier device 300 are installed on the machine platform 100, wherein the head in the head device 200 is equipped with a head module of laser micro-jet (specifically, the LMJIP module of SYNOVA, not specifically shown in the figure). During processing, the water jet impacts the processing surface; then the laser pulse is emitted and passes through the water jet, and the material begins to absorb heat; the absorbed laser energy generates a plasma layer to separate water and material; the laser pulse is completed, the plasma phenomenon ends, and the water jet cools the material; the water jet completely takes away the heat through convection; thereby achieving high-precision cutting processing of the workpiece.

[0154] In the present invention, both the head device 200 and the workpiece carrier device 300 can move on the machine table 100, wherein: the head of the head device 200 can move with one degree of freedom, that is, vertically move along the A axis; the workpiece carrier device 300 can move with four degrees of freedom, that is, the entire workpiece carrier device 300 can move horizontally along the X axis and the Y axis, and the workpiece loaded on the workpiece carrier device 300 can swing around the B axis and rotate around the C axis. Here, the XYZ axis of the workpiece table coordinate system is used as the reference (the longitudinal direction of the machine table is the X axis, the transverse direction is the Y axis, and the normal of the plane where the X axis and the Y axis are located is the Z axis), the A axis is parallel to the Z axis, the C axis rotates parallel to the Z axis, and the B axis is parallel to the Y axis. During processing, after adjusting the height of the head device 200, the workpiece carrier device 300 is horizontally moved below the head device 200, and then the workpiece is swung or rotated, and the head 200 can perform a cutting operation on the workpiece.

[0155] In the water-guided laser cutting machine, the head of the head device 200 of the water-guided laser moves vertically along the A axis, and the workpiece stage device 300 can move horizontally along the X axis and the Y axis. The workpiece loading platform in the workpiece stage device and the workpiece loaded thereon can swing around the B axis and rotate around the C axis. In this way, the five-axis head in the traditional processing platform is changed to a one-axis head + four-axis workpiece stage combination structure, in which the water-guided laser head only moves in the vertical direction, avoiding the micro-water column beam path from presenting a curve, facilitating the maintenance of the micro-water column beam stability, and thus facilitating the guarantee of workpiece cutting quality.

[0156] Please also see Figure 9-10 The machine includes a machine bed 102 and a machine gantry 101, and the machine gantry 101 is located above the machine bed 102. The machine bed 102 and the machine gantry 101 are integrally cast with minerals, and a plurality of assembly holes are preset on them to assemble corresponding mechanisms, modules or components. This machine has the advantages of high precision, shock absorption, thermal stability and corrosion resistance.

[0157] like Figure 1-Figure 10 As shown, the machine gantry 101 is a door frame structure, and the columns on both sides of the machine gantry 101 are integrally cast with the machine bed 102, and a door hole 110 is formed for the workpiece carrier device 300 to enter and exit. A head mounting portion 105 is provided on the front of the top crossbeam of the machine gantry 101 to assemble the head device 200. Specifically, the head mounting portion 105 is a raised portion, and a plurality of assembly strips are provided on the side of the raised portion, and assembly holes are reserved on the raised portion to connect the A-axis seat plate of the head device 200, so that the head device 200 can be assembled on the side 106 of the head mounting portion by fasteners such as screws.

[0158] The machine bed 102 is a horizontal platform structure, which is used to carry the workpiece carrier device 300 for translation, wherein the workpiece carrier device 300 can be translated to the bottom of the machine head device 200. Specifically, a workpiece rack slide mounting portion is arranged on the top of the machine bed 102, which includes an X-axis slide rail mounting portion 107 and an X-axis motor stator mounting portion 108 provided with a plurality of reserved assembly holes, and the X-axis slide rail mounting portion 107 and the X-axis motor stator mounting portion 108 extend to the door opening 110 below the machine door frame 101. After the slide rail mounting portion 107 is assembled with the X-axis slide rail and the X-axis motor stator mounting portion 108 is assembled with the X-axis linear motor stator, the workpiece rack slide can be slid longitudinally along the X-axis in cooperation with the X-axis linear motor mover on the workpiece rack slide. When the workpiece carrier device 300 is assembled in place, the workpiece carrier device 300 is driven by the X-axis linear motor to slide longitudinally along the X-axis on the machine bed 102, and the workpiece carrier device 300 is driven by the Y-axis linear motor to slide transversely along the Y-axis on the machine bed 102, so that the workpiece moves to the processing position below the head device 200. Here, the workpiece carrier slide of the workpiece carrier device 300 is equipped with a folding dust seal 104 to maintain cleanliness. The dust seal 104 is also connected to the dust seal baffle 1041 of the machine bed 102. Specifically, the dust seal baffle 1041 is installed at the end of the X-axis slide rail of the workpiece carrier slide, which is convenient to assemble.

[0159] In the present invention, a plurality of machine adjustment positions 109 are provided at the bottom of the machine bed 102, and the machine adjustment devices 103 are respectively configured therefor, so as to conveniently and reliably adjust the machine bed 102 to a corresponding height and keep it in a horizontal state.

[0160] See also Figure 11-13 , showing the structure of the machine adjustment device 103 of the water-guided laser cutting machine of the present invention. The machine adjustment device 103 comprises an upper module 1031, a middle module 1033 and a lower module 1032, which are wedge-shaped respectively, wherein: the cross section of the middle module 1033 is an isosceles trapezoid; the upper module 1031 and the lower module 1032 are symmetrical, and their cross sections are approximately right-angled trapezoids; when the upper module 1031, the middle module 1033 and the lower module 1032 are matched together, a square overall structure is formed.

[0161] Specifically, a notch 10332 is provided in the middle of the middle module; corresponding to the opening position of the notch 10332, the upper module is provided with a pin hole 10313 and a screw hole 10312, and the lower module 1032 is also provided with a pin hole (not marked in the figure) and a screw hole (not marked in the figure). During assembly, a plug 1037 with a hole is inserted into the pin holes of the upper module 1031 and the lower module 1032, and then a bolt 1036 is inserted through the screw hole of the plug 1037 and the screw hole of the connecting portion 10331 of the middle module 1033 and tightened, thereby realizing the longitudinal positioning of the upper module 1031, the middle module 1033 and the lower module 1032. In particular, a long strip lock groove 10311 is provided on the side of the upper module 1031, and a long strip lock groove 10321 is also provided on the side of the lower module 1032. The pair of lock grooves are arranged in an "eight" shape. The lock buckle 1034 is fixed to the side of the middle module 1033 by a lock buckle screw 1035. When the middle module 1033 is installed between the upper module 1031 and the lower module 1032, the locking claws on both sides of the lock buckle 1034 are respectively placed in the lock groove 10311 and the lock groove 10321, thereby the upper module 1031, the middle module 1033 and the lower module 1032 can be locked laterally. Here, the machine adjustment device 103 is arranged at each machine adjustment position 109 of the machine bed 102. By passing the screw through the screw hole of the machine adjustment part 109 and the screw holes of the upper module 1031 and the lower module 1032, the machine adjustment device 103 can be conveniently locked with the machine bed 102.

[0162] See also Figure 14-17 , showing the structure of the head device and the workpiece carrier device of the water-guided laser cutting machine of the present invention. The head device includes a head 201 and an A-axis translation mechanism 202, which is mounted on a head mounting portion 105 arranged on the front of the top crossbeam of the machine frame 101, and can move vertically along the A-axis. The workpiece carrier device 300 includes a workpiece rack and a workpiece rack slide, wherein: the workpiece rack is composed of a workpiece rack support 305 and a workpiece swing frame 302, etc., and the workpiece rack support 305 is fixed to the workpiece rack slide; the workpiece swing frame 302 is mounted on the workpiece rack support 305, and can swing around the B-axis under the drive of the B-axis swing mechanism 304; the workpiece 301 is rotatably mounted on the workpiece swing frame 302, and can rotate around the C-axis under the drive of the C-axis rotation mechanism 303; the workpiece rack slide is provided with an X-axis translation mechanism 307 and a Y-axis translation mechanism 306, and under their drive, the workpiece rack slides horizontally along the X-axis or the Y-axis together with the workpiece rack slide. When the workpiece holder is located below the machine head 201, the workpiece 301 can be swung or rotated for cutting. In this way, the five-axis machine head in the traditional processing platform is changed to a combination structure of a one-axis machine head + a four-axis workpiece carrier. Since the water-guided laser machine head 201 can only move in the vertical direction, it is easy to keep the micro-water column beam stable, which is beneficial to ensure the cutting quality of the workpiece. The machine head device 200 and the workpiece carrier device 300 are further described in detail below.

[0163] See also Figure 18-Figure 27 , showing the structure of the head device of the water-guided laser cutting machine of the present invention. The head device 200 includes a head 201 and an A-axis translation mechanism 202. The A-axis translation mechanism 202 is mounted on an A-axis seat plate 203. The A-axis seat plate 203 can be fixed to the head mounting portion provided on the front of the top crossbeam of the machine frame 101 by screws to move vertically along the A-axis; the head 201 only schematically shows a head module 2011, which is mounted on a head seat plate 2012. The head seat plate 2012 is fixed to a head connecting plate 2027. Under the drive of the A-axis translation mechanism 202, the head module 2011 can move vertically along the A-axis, thereby adjusting the height position of the head module 2011. In particular, since the head module 2011 can only move vertically, it is convenient to maintain the stability of the micro-water column beam, which is conducive to the stable transmission of the laser beam coupled in the micro-water column beam, thereby ensuring the high-precision cutting operation.

[0164] The A-axis translation mechanism 202 in the present invention can adopt a variety of structural forms. The following is a compact, efficient, reliable and economical mechanism, which is specifically described as follows.

[0165] like Figure 18-Figure 27As shown, the A-axis translation mechanism 202 is composed of an A-axis motor 2021, an A-axis coupling 2022, an A-axis coupling box 2023, an A-axis driving rod 2024, an A-axis driving rod support 2025, an A-axis driving rod connecting block 2026, a head connecting plate 2027, an A-axis slide rail 2028, an A-axis slider 2029, a head travel switch 20210, a head detection fixed block 20211, and a head detection movable block 20212. Here, the A-axis motor 2021 is a stepping motor, which is convenient for accurately controlling the rotation of the motor; the A-axis coupling 2022 is a diaphragm coupling, which can compensate for the relative displacement of the two connected axes through the elastic deformation of the diaphragm. The A-axis translation mechanism 202 is assembled as follows: the A-axis drive rod support 2025, the A-axis slide rail 2028 and the A-axis coupling box 2023 are fixedly assembled on the A-axis base plate 203, both ends of the A-axis drive rod 2024 are supported on the A-axis drive rod support 2025, the A-axis coupling 2022 is mounted on the A-axis coupling box 2023, the A-axis drive rod 2024 is connected to the A-axis motor 2021 through the A-axis coupling 2022, the A-axis drive rod connecting block 2026 is fixedly mounted on the A-axis drive rod 2024, the head connecting plate 2027 is fixedly connected to the A-axis drive rod connecting block 2026 on the A-axis drive rod 202, the head base plate 2012 is fixedly connected to the head connecting plate 2027, and the head module 2011 is fixedly assembled on the head base plate 2012. When the A-axis motor 2021 rotates forward or reversely, the A-axis coupling 2022 generates relative displacement through the deformation of the diaphragm, thereby driving the A-axis driving rod 2024 and the A-axis driving rod connecting block 2026 above to move up and down together, and then the head connecting plate 2027, the head seat plate 2012 and the head module 2011 to move up and down together. Therefore, the head module 2011 moves up and down together with the A-axis driving rod 2024, that is, the head 201 can be moved vertically along the A-axis.

[0166] In order to maintain the stable movement of the machine head 201, two parallel A-axis rails 2028 are arranged on the A-axis seat plate 203, and the two A-axis rails 2028 are respectively provided with a plurality of A-axis sliders 2029, and the A-axis sliders 2029 are slidably mounted on the A-axis rails 2028, and the machine head connecting plate 2027 is fixedly connected with the A-axis drive rod connecting block 2026 and the A-axis sliders 2029 at the same time, so as to ensure the stable sliding of the machine head 201. Here, the A-axis slider 2029 can be assembled from a split slider saddle 20291 and a slider pad 20292, wherein the slider saddle 20291 is sleeved on the A-axis rail 2028, and the slider pad 20292 is connected to the machine head connecting plate 2027, and the two are simply tightened by screws, and this structure is quite convenient to assemble.

[0167] The present invention needs to detect the position of the machine head and limit its stroke, so a machine head stroke switch 20210 and a machine head detection fixed block 20211 are installed at the upper and lower positions of the A-axis seat plate 203, and a machine head detection movable block 20212 is installed on the machine head connecting plate 2027. When the machine head 201 moves vertically up and down along the A-axis together with the random head connecting plate 2027, the height position of the machine head can be detected; at the same time, the machine head stroke switch 20210 set on the A-axis seat plate 203 can limit the stroke of the machine head 201.

[0168] See also Figure 28-Figure 41 , shows the structure of the workpiece stage device of the water-guided laser cutting machine of the present invention. The workpiece stage device 300 is composed of two major structures: a workpiece frame and a workpiece frame slide.

[0169] like Figure 28-Figure 31 As shown, the workpiece rack is composed of a workpiece rack support 305 and a workpiece swing rack 302, etc. The workpiece rack support 305 is fixed to the workpiece rack slide, and the workpiece swing rack 302 is rotatably mounted on the workpiece rack support 305; the workpiece rack is equipped with a B-axis swing mechanism 304 and a C-axis rotation mechanism 303: the workpiece swing rack 302 can swing around the B-axis under the drive of the B-axis swing mechanism 304; the workpiece 301 is rotatably mounted on the workpiece swing rack 302, and can rotate around the C-axis under the drive of the C-axis rotation mechanism 303, wherein the middle cross section of the workpiece 301 on the workpiece loading head 3037 is flush with the B-axis swing axis. Therefore, when the workpiece swing rack 302 flips 180 degrees, the front and back working surfaces of the workpiece are located at the same horizontal position.

[0170] like Figure 28-Figure 31 As shown, the workpiece frame slide is provided with an X-axis translation mechanism 307 and a Y-axis translation mechanism 306, wherein the Y-axis translation mechanism 306 is composed of a Y-axis slide plate 3061, a Y-axis slide rail 3062, a Y-axis drag chain 3060 and other electrical equipment, and the X-axis translation mechanism 307 is composed of a X-axis slide plate 3071, an X-axis slide rail 3072, an X-axis drag chain 3070 and other electrical equipment, and under the drive of the X-axis translation mechanism 307 and the Y-axis translation mechanism 306, the workpiece frame can slide horizontally along the X-axis and Y-axis on the machine table together with the workpiece frame slide. When the workpiece frame is located below the machine head 201, the machine head 201 is moved vertically to a certain height, and then the workpiece 301 is swung or rotated, and the workpiece 301 can be cut.

[0171] like Figure 32-Figure 39As shown, the workpiece rack includes a workpiece rack support 305, a workpiece swing frame 302, a B-axis swing mechanism 304 and a C-axis rotation mechanism 303, and the workpiece rack support 305 and the workpiece swing frame 302 are respectively L-shaped; the bottom wall 3051 of the workpiece rack support 305 is fixed to the workpiece rack slide; the side wall 3022 of the workpiece swing frame 302 is rotatably mounted on the side wall 3052 of the workpiece rack support 305, and swings under the drive of the B-axis swing mechanism 304; the workpiece loading head 3037 is rotatably mounted on the top wall 3021 of the workpiece swing frame 302, and the workpiece loading head 3037 can load the workpiece 301 by gluing or other methods, and the workpiece loading head 3037 and the workpiece 301 loaded by it can be rotated under the drive of the C-axis rotation mechanism 303. Here, for workpieces 301 of different specifications, the present invention schematically distinguishes them as 301A (large workpiece) and 301B (small workpiece), which does not represent the real structure of the workpiece.

[0172] The B-axis swinging machine 304 is a mechanism directly driven by a motor, and includes a B-axis motor 3041 and a B-axis reducer 3042. The B-axis motor 3041 is a stepping motor, and the B-axis reducer 3042 is a turntable reducer. The B-axis swinging machine 304 is assembled as follows: a through hole 3054 is provided on the side wall 3052 of the workpiece frame support 305, and the B-axis reducer 3041 is installed in the through hole 3054 in a through manner. The housing of the B-axis motor 3041 and the housing of the B-axis reducer 3041 are fixed with bolts, the power shaft of the B-axis motor 3041 is connected with the turntable shaft of the B-axis reducer 3041, and the turntable of the B-axis reducer 3041 and the side wall 3022 of the workpiece swinging frame 302 are fixed with bolts. In this way, when the B-axis motor 3041 rotates forward or reversely, the workpiece swinging frame 302 can be driven to swing around the B-axis. Here, a sensor 3053 is installed on the side wall 3052 of the workpiece rack support 305, and a detection block 3027 is set on the side wall 3022 of the workpiece swing rack 302, so that the swing angle of the workpiece swing rack 302 can be easily detected.

[0173] The C-axis rotation mechanism 303 is a motor drive + belt transmission mechanism, which includes a C-axis active mechanism and a C-axis driven mechanism. The C-axis active mechanism is installed at the active mechanism installation position 3023 of the top wall 3021 of the workpiece swing frame 302, and the C-axis driven mechanism is installed at the driven mechanism installation position 3026 of the top wall 3021 of the B-axis workpiece swing frame 302. The C-axis active mechanism and the C-axis driven mechanism are transmitted through a transmission belt to drive the workpiece loading head 3037 and the workpiece to rotate around the C-axis. Here, the transmission belt is preferably a synchronous belt 3038, which has no relative sliding between it and the pulley, and can ensure a strict transmission ratio.

[0174] In the present invention, the C-axis active mechanism is composed of a C-axis motor 30313, a C-axis coupling disk 30312, a C-axis reducer 30310, a driving shaft 30311 and a C-axis base plate 3039, wherein: the C-axis motor 30313 is a stepper motor, which serves as the power source of the C-axis rotation mechanism 303; the C-axis reducer 30310 is a harmonic reducer, and its wave generator is equipped with a flexible bearing to make the flexible gear produce controllable elastic deformation, and mesh with the rigid gear to transmit motion and power through the gear transmission. The specific assembly method of the C-axis active mechanism is: the housing of the C-axis motor 30313, the C-axis coupling plate 30312, the housing of the C-axis reducer 30310, and the C-axis base plate 3039 are connected together with bolts, and fixedly assembled to the top wall 3021 of the workpiece swing frame 302 through the C-axis base plate 3039; the C-axis motor 30313, the C-axis reducer 30310 and the active shaft 30311 are axially coupled in sequence, and the specific assembly method can be: the wave generator of the C-axis reducer 30310 is connected to the power shaft of the C-axis motor 30313, the rigid wheel of the C-axis reducer 30310 is fixed to the housing of the C-axis reducer 30310, the flexible wheel of the C-axis reducer 30310 is installed on the output shaft of the C-axis reducer 30310, the chassis of the active shaft 30311 is fixed to the flexible wheel of the C-axis reducer 30310, and a driving pulley can be set at the top of the active shaft 30311 to wind the synchronous belt 3038.

[0175] In the present invention, the C-axis driven mechanism is composed of a driven shaft 3031, a driven seat plate 1 3033, a driven bearing 1 3032, a driven seat plate 2 3036, a driven bearing 2 3034, an adjusting nut 3035 and a workpiece loading head 3037. The driven shaft 3031 is rotatably mounted on the top wall of the workpiece swing frame 302 by an upper support composed of the driven seat plate 1 3033 and the driven bearing 1 3032 and a lower support composed of the driven seat plate 2 3036 and the driven bearing 2 3034. 3021 above and below; a driven pulley can be set from the top of the driving shaft 30311 to wind the synchronous belt 3038; the workpiece loading head 3037 is installed from the bottom of the driving shaft 30311, and the workpiece loading head 3037 is preferably a clamp-type mounting structure, which is convenient for installation, disassembly and position adjustment; the adjusting nut 3035 is an outwardly open nut, which is mounted on the driven shaft and is located between the lower support and the workpiece loading head 3037, and can be used to conveniently adjust the position of the loading head 3037.

[0176] In the above-mentioned C-axis rotating mechanism 303, the C-axis motor 30313 is connected to the driving shaft 30311 through the C-axis reducer 30310; the bottom end of the driven shaft 3031 of the C-axis driven mechanism is fixedly installed with a workpiece loading head 3037, and the workpiece loading head 3037 can load the workpiece 301 by gluing or other methods; the synchronous belt 3038 is respectively wound around the driving shaft 30311 (optionally equipped with a driving wheel, not shown in the figure) and the driven shaft 3031 (optionally equipped with a driven wheel, not shown in the figure), and is used to transmit power between the driving shaft 30311 and the driven shaft 3031. When the C-axis motor 30313 rotates, the driving shaft is driven to rotate through the C-axis reducer 30310, and then the driven shaft 3031 is driven to rotate through the synchronous belt 3038, thereby driving the workpiece loading head 3037 on the driven shaft 3031 to rotate, and finally driving the workpiece 301 to rotate around the C-axis. In particular, a sensor 3024 is installed on the B-axis workpiece swing frame 302 to detect the rotation angle of the workpiece 301. During installation, the fixed sensor 3024 can be fixed to the top wall 3021 of the B-axis workpiece swing frame 302 using a nut 3025, and specifically can be close to and aligned with the edge of the workpiece 301.

[0177] The present invention optimizes the installation positions of the B-axis swing mechanism and the C-axis rotation mechanism, one of which is: preferably, the middle cross section of the workpiece 301 is aligned with the axis of the B-axis motor 3041 and the B-axis reducer 3042, that is, the middle cross section of the workpiece 301 on the workpiece loading head 3037 is aligned with the B-axis swing axis, so that when the B-axis swing machine 304 drives the workpiece swing frame 302 and the workpiece 301 thereon to swing, the middle cross section of the workpiece 301 is always located on the B-axis swing axis. Specifically, the above-mentioned adjustment nut 3035 can be used to adjust the installation position of the workpiece loading head 3037 to meet the assembly requirements.

[0178] like Figure 40-41 As shown, the workpiece frame slide includes an X-axis translation mechanism 307 and a Y-axis translation mechanism 306, wherein the X-axis translation mechanism 307 is carried on the machine bed 102 for longitudinal movement, and the Y-axis translation mechanism 306 is carried on the X-axis translation mechanism 307 for lateral movement. The X-axis translation mechanism 307 and the Y-axis translation mechanism 306 are both driven by linear motors, and have faster dynamic response, which is further described as follows.

[0179] The X-axis translation mechanism 307 is composed of an X-axis slide plate 3071, an X-axis slide rail 3072, an X-axis linear motor stator 3073, an X-axis linear motor mover 3074, an X-axis motor stator seat plate 3075, an X-axis slide saddle 3076, an X-axis travel limiter 3077, etc. The specific assembly method is as follows: two X-axis slide rails 3072 are installed on the X-axis slide rail installation part 107 of the machine bed 102 along the longitudinal direction of the machine bed 102, and the X-axis motor stator The seat plate 3075 is mounted on the X-axis motor stator mounting portion 108 of the machine bed 102 along the longitudinal direction of the machine bed 102, and the X-axis slide saddles 3076 are mounted on both sides of the X-axis slide plate 3071. The X-axis slide plate 3071 is slidably mounted on the X-axis slide rail 3072 through the X-axis slide saddles 3076. The X-axis linear motor stator 3073 is fixedly mounted on the top surface of the X-axis motor stator seat plate, and the X-axis linear motor mover 3074 is mounted on the bottom surface of the X-axis slide plate 3071. In this way, the X-axis linear motor can drive the axis slide plate 3071 to slide along the X-axis slide rail 3072. Here, the top surface of the X-axis motor stator seat plate 3075 is also equipped with an X-axis travel limiter 3077 to limit the travel of the X-axis slide plate 3071.

[0180] The Y-axis translation mechanism 306 is composed of a Y-axis slide 3061, a Y-axis slide rail 3062, a Y-axis linear motor stator 3063, a Y-axis linear motor mover 3064, an X-axis slide 3071, a workpiece rack assembly plate 3065, a Y-axis saddle 3066, a Y-axis travel limiter 3067, etc. The specific assembly method is: two Y-axis slide rails 3062 are assembled on the top of the X-axis slide 3071 along the horizontal direction of the X-axis slide 3071, and the Y-axis saddles 3066 are assembled on both sides of the Y-axis slide 3061. The Y-axis slide rail 3066 is slidably installed on the Y-axis slide rail 3062, the Y-axis linear motor stator 3063 is fixedly installed on the top surface of the X-axis slide 3071, and the Y-axis linear motor mover 3064 is installed on the bottom surface of the Y-axis slide 3061. A workpiece rack seat plate 3065 is set on the top of the Y-axis slide 3061 to install the workpiece rack support 305. In this way, the Y-axis linear motor can drive the Y-axis slide plate 3061 to slide along the Y-axis slide rail 3062. Here, the top surface of the X-axis slide plate 3071 is also equipped with an axis travel limiter 3067 to limit the travel of the Y-axis slide plate 3061.

[0181] In this embodiment, the Y-axis translation mechanism 306 is carried on the X-axis translation mechanism 307; obviously, the X-axis translation mechanism 307 can also be carried on the Y-axis translation mechanism 306, that is, the Y-axis translation mechanism 306 and the X-axis translation mechanism 307 are reversed. Here, the latter is an equivalent structure to the former, so it will not be repeated.

[0182] In this way, the workpiece carrier device can be quickly moved horizontally through the X-axis translation mechanism 307 and the Y-axis translation mechanism 306 of the workpiece rack slide. When the workpiece rack is located below the head 201, the head 201 is moved to a certain height, and then the workpiece 301 is swung or rotated, so that the workpiece 301 can be cut with high precision.

[0183] The above-mentioned water-guided laser cutting machine has good processing quality and high processing efficiency. It is very suitable for processing silicon carbide wafers and has good application prospects.

[0184] See also Fig.42 , showing the process of the water-guided laser cutting processing method of the present invention, which is described in detail as follows.

[0185] (1) bonding the blank workpiece to the workpiece loading head on the workpiece holder in the workpiece carrier device, and adjusting the position of the workpiece loading head to make the middle cross section of the workpiece flush with the swing axis of the B-axis;

[0186] (2) Start the X-axis translation mechanism and the Y-axis translation mechanism, and move the workpiece rack slide until the workpiece is located under the machine head device.

[0187] (3) Start the A-axis translation mechanism and adjust the machine head to a suitable processing height;

[0188] (4) Starting the C-axis rotation mechanism to rotate the workpiece around the C-axis, and at the same time, starting the head module of the laser microjet until the upper circumferential surface of the workpiece is cut;

[0189] (5) Start the B-axis swing mechanism to flip the workpiece loading head and the workpiece on the workpiece rack 180 degrees around the B-axis;

[0190] (6) Starting the C-axis rotation mechanism to rotate the workpiece around the C-axis, and at the same time, starting the head module of the laser microjet until the lower circumferential surface of the workpiece is cut;

[0191] (7) Start the B-axis swing mechanism to flip the workpiece loading head and the workpiece on the workpiece rack 90 degrees around the B-axis;

[0192] (8) starting the Y-axis translation mechanism to translate the workpiece along the Y-axis by a distance equal to the preset sheet thickness;

[0193] (9) Starting the X-axis translation mechanism to translate the workpiece along the X-axis, and at the same time starting the head module of the laser microjet until the wafer is cut out;

[0194] Repeat steps (8) and (9) until all the workpieces are cut into thin slices.

[0195] The above-mentioned blank is silicon carbide (SiC) material, which is specifically used to cut out wafers. The use of this waterway laser cutting processing device and processing method to process wafers is very efficient and the product quality is guaranteed. Obviously, the waterway laser cutting processing device and processing method can also be extended to the processing of other materials, which will not be repeated.

[0196] The above laser cutting machines can be adapted to Synova Laser Micro Jet, and its technical description is as follows.

[0197] Laser type: diode-pumped solid-state Nd, YAG laser; pulse width μs / ns, wavelength 1064nm, 532nm, or 355nm, average laser power range 10-200W.

[0198] Water jet system: low pressure pure deionized filtered water, ultra-fine water jet water consumption is only 1 liter / hour at 300 bar pressure, the force caused is negligible (<0.1N).

[0199] Nozzle: The nozzle size range is 30-150μm, and the nozzle material is sapphire or diamond.

[0200] Auxiliary systems: high pressure water pump and water treatment system.

[0201] Application: High-efficiency micro-machining of high-value materials and precision dimensions: microelectronics / aerospace, Si, Ge, SiC, GaAs, InP, GaP, CdTe, SiGe, etc; metals, Al, Fe, Au, Ag, Cu, CuBe, Mg, W, WC, CuW, Mb, Ni, Ti, Co, Cr; ceramic materials / carbide, AIN, AIO, SiN, AITiC, LTCC, ZrO, CBN, PCD; diamond and other gemstones; composite materials, carbon fiber reinforced composite materials, CMC (ceramic matrix polymer composites).

[0202] The above are only preferred embodiments of the present invention. It should be noted that the above preferred embodiments should not be regarded as limiting the present invention, and the protection scope of the present invention should be based on the scope defined by the claims. For ordinary technicians in this technical field, several improvements and modifications can be made without departing from the spirit and scope of the present invention, and these improvements and modifications should also be regarded as the protection scope of the present invention.

Claims

1. A water-guided laser cutting machine, characterized in that: The invention comprises a machine platform, a machine head device and a workpiece carrier device installed on the machine platform, the machine head device comprises a machine head equipped with a laser micro-jet module, the machine platform comprises a machine bed and a machine gantry, the machine gantry is located above the machine bed, the machine head device is assembled on the top of the machine gantry, the machine bed carries the workpiece carrier device, wherein the machine head device is equipped with an A-axis translation mechanism to drive the machine head to move vertically along the A-axis, the workpiece carrier device is equipped with an X-axis translation mechanism, a Y-axis translation mechanism, a B-axis swing mechanism and a C-axis rotation mechanism to drive the workpiece carrier device as a whole to move horizontally along the X-axis and the Y-axis, and to drive the workpiece loading head installed on the workpiece carrier device to swing around the B-axis and rotate around the C-axis, wherein the middle cross section of the workpiece on the workpiece loading head can be adjusted to be flush with the B-axis swing axis, during processing, the blank workpiece is bonded to the workpiece loading head on the workpiece frame in the workpiece carrier device, and the position of the workpiece loading head is adjusted to make the middle cross section of the workpiece flush with the B-axis swing axis.

2. The water-guided laser cutting machine according to claim 1, characterized in that: The machine head includes a machine head base plate and a machine head module. The machine head module is fixedly assembled on the machine head base plate to be driven by the A-axis translation mechanism. The A-axis translation mechanism includes an A-axis motor, an A-axis coupling, an A-axis coupling box, an A-axis drive rod, an A-axis drive rod support, an A-axis drive rod connecting block, an A-axis slide rail, an A-axis slider and a machine head connecting plate. The A-axis motor is a stepper motor, and the A-axis coupling is a diaphragm coupling. The A-axis drive rod support, the A-axis coupling box and the A-axis slide rail are fixedly assembled on the A-axis base plate. Both ends of the A-axis drive rod are supported on the A-axis drive rod support. The A-axis coupling is installed in the A-axis coupling box. The A-axis drive rod is connected to the A-axis motor through the A-axis coupling. The A-axis drive rod connecting block is fixedly assembled on the A-axis drive rod. The A-axis slider can be slidably assembled on the A-axis slide rail. The machine head connecting plate is fixedly connected to the A-axis drive rod connecting block and the A-axis slider, and the machine head base plate is fixedly connected to the machine head connecting plate.

3. The water-guided laser cutting machine according to claim 1, characterized in that: The workpiece carrier device includes a workpiece rack and a workpiece rack slide. The workpiece rack includes an L-shaped workpiece rack support and an L-shaped workpiece swing frame. The bottom wall of the workpiece rack support is fixed to the workpiece rack slide. The side walls of the workpiece swing frame are rotatably installed on the side walls of the workpiece rack support. The workpiece loading head is rotatably installed on the top wall of the workpiece swing frame. The workpiece swing frame can swing around the B-axis when driven by the B-axis swing mechanism. The workpiece loading head can rotate around the C-axis when driven by the C-axis rotation mechanism. The workpiece rack slide can drive the workpiece rack to move horizontally along the X-axis and Y-axis on the machine platform when driven by the X-axis translation mechanism and the Y-axis translation mechanism.

4. The water-conducting laser cutting machine according to claim 3, characterized in that: The B-axis swing mechanism includes a B-axis motor and a B-axis reducer, wherein the B-axis motor is a stepper motor, the B-axis reducer is a turntable reducer, the B-axis reducer is installed in a through hole opened on the side wall of the workpiece rack support, the housing of the B-axis motor is fixed to the housing of the B-axis reducer, the power shaft of the B-axis motor is connected to the turntable shaft of the B-axis reducer, and the turntable of the B-axis reducer is fixedly connected to the side wall of the workpiece swing rack.

5. The water-conducting laser cutting machine according to claim 3, characterized in that: The C-axis rotating mechanism includes a C-axis active mechanism and a C-axis driven mechanism installed on the top wall of the workpiece swing frame, and the two ends of the synchronous belt are wound around the C-axis active mechanism and the C-axis driven mechanism for transmission; the C-axis active mechanism includes a C-axis motor, a C-axis coupling plate, a C-axis reducer, a driving shaft and a C-axis base plate, wherein the C-axis motor is a stepping motor, and the C-axis reducer is a harmonic reducer. The housing of the C-axis motor, the C-axis coupling plate, the housing of the C-axis reducer and the C-axis base plate are connected as a whole and fixedly assembled on the top wall of the workpiece swing frame through the C-axis base plate, and the C-axis motor, the C-axis reducer and the driving shaft are sequentially axially coupled, wherein the wave generator of the C-axis reducer is connected to the C-axis motor The C-axis driven mechanism comprises a driven shaft, a driven seat plate 1, a driven bearing 1, a driven seat plate 2, a driven bearing 2, an adjusting nut and a workpiece loading head. The driven shaft is rotatably assembled on the top wall of the workpiece swing frame by an upper support composed of a driven seat plate 1 and a driven bearing 1 and a lower support composed of a driven seat plate 2 and a driven bearing 2. The workpiece loading head is installed at the bottom end of the driven driving shaft. The adjusting nut is sleeved on the driven shaft and is located between the lower support and the workpiece loading head.

6. The water-conducting laser cutting machine according to claim 3, characterized in that: The X-axis translation mechanism includes an X-axis slide plate, an X-axis slide rail, an X-axis linear motor stator, an X-axis linear motor mover, an X-axis motor stator seat plate and an X-axis saddle. The X-axis slide rail is installed on the top surface of the X-axis slide rail mounting portion of the machine bed along the longitudinal direction of the machine bed. The X-axis motor stator seat plate is installed on the top surface of the X-axis motor stator mounting portion of the machine bed along the longitudinal direction of the machine bed. X-axis saddles are assembled on both sides of the X-axis slide plate. The X-axis slide plate is slidably installed on the X-axis slide rail through the X-axis saddle. The X-axis linear motor stator is fixedly installed on the top surface of the X-axis motor stator seat plate, and the X-axis linear motor mover is installed on the bottom surface of the X-axis slide plate.

7. The water-conducting laser cutting machine according to claim 3, characterized in that: The Y-axis translation mechanism includes a Y-axis slide, a Y-axis slide rail, a Y-axis linear motor stator, a Y-axis linear motor mover, an X-axis slide rail, a workpiece rack assembly plate and a Y-axis saddle. The Y-axis slide rail is assembled on the top surface of the X-axis slide rail along the transverse direction of the X-axis slide rail, the Y-axis saddle is assembled on both sides of the Y-axis slide rail, the Y-axis slide rail is slidably mounted on the Y-axis slide rail through the Y-axis saddle, the Y-axis linear motor stator is fixedly mounted on the top surface of the X-axis slide rail, the Y-axis linear motor mover is mounted on the bottom surface of the Y-axis slide rail, and the workpiece rack assembly plate is fixedly mounted on the top surface of the Y-axis slide rail to carry the workpiece rack support.

8. The water-guided laser cutting machine head and workpiece stage system according to claim 1, characterized in that: The head device is installed on the machine gantry, and the workpiece carrier device is installed on the machine bed. The machine gantry and the machine bed are cast as one piece of mineral, and the machine gantry is located above the machine bed, wherein the machine bed and the machine gantry are respectively preset with a number of assembly holes; the columns on both sides of the machine gantry are cast as one piece with the machine bed, wherein the columns on both sides of the machine gantry and the top crossbeam form a door opening for the workpiece carrier device to enter and exit; a head mounting portion is arranged on the front of the top crossbeam of the machine gantry to assemble the head device; a raised portion is arranged on the front of the top crossbeam of the machine gantry as the head mounting portion, and a number of assembly strips are arranged on the side of the raised portion, and assembly holes are reserved on the assembly strip so as to fix and assemble the A-axis seat plate of the head device to the side of the head mounting portion; the workpiece carrier slide mounting portion is provided with an X-axis slide rail mounting portion and an X-axis motor stator mounting portion with a number of reserved assembly holes, wherein the X-axis slide rail mounting portion and the X-axis motor stator mounting portion extend to the door opening below the machine gantry.

9. The water-conducting laser cutting machine according to claim 1, characterized in that: A plurality of machine adjustment devices are arranged at the bottom of the machine bed, and the machine adjustment devices include a wedge-shaped upper module, a middle module and a lower module; a notch is arranged in the middle of the middle module, and pin holes are arranged in the upper module and the lower module corresponding to the opening position of the notch, and the upper module, the middle module and the lower module are longitudinally positioned by installing pins with holes in the pin holes of the upper module and the lower module and passing bolts through the screw holes of the pins and the screw holes of the connecting part of the middle module; the sides of the upper module and the lower module are respectively provided with long strip lock grooves arranged in an "eight" shape, and the lock buckle is fixed to the side of the middle module by a lock buckle screw, and when the middle module is installed between the upper module and the lower module, the locking claws on both sides of the lock buckle are placed in the corresponding lock grooves to lock the upper module, the middle module and the lower module laterally.

10. The water-conducting laser cutting machine according to any one of claims 1 to 9, characterized in that: Adapted to Sinova's laser microfluidics module.

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