Vacuum evaporation coating equipment

Abstract

The invention provides vacuum evaporation coating equipment, which comprises a vacuum chamber, a vacuum evaporation coating device, a vacuum evaporation coating device and a vacuum evaporation coating device, the conveying device comprises a plurality of rollers arranged in the vacuum chamber at intervals and a conveying belt arranged on the rollers, the rollers drive the conveying belt to move, and the conveying belt comprises an upper conveying section located above the rollers and a lower conveying section located below the rollers; the first heating device is arranged in the vacuum chamber, a gap n is formed between the first heating device and the lower conveying section, and the first heating device is used for evaporating the film layer deposited on the lower conveying section. By applying the vacuum evaporation coating equipment, the problems of long downtime and high maintenance cost of the vacuum evaporation coating equipment in the prior art can be effectively solved.

Description

Technical Field

[0001] The invention relates to the field of film coating devices, and in particular to a vacuum evaporation film coating device. Background Art

[0002] With the development of modern industry, vacuum equipment has been widely used in many fields, especially in coating technology. Coating technology is a process of depositing thin films on the surface of substrates, which is widely used in semiconductors, optics, new energy and other fields. In order to improve production efficiency and product quality, vacuum coating equipment needs to operate for a long time under efficient and stable conditions.

[0003] Among them, the transmission system is one of the key components that affects the operating efficiency and maintenance frequency of vacuum coating equipment. Traditional vacuum coating equipment usually uses ceramic rollers to transmit substrates. However, ceramic rollers are prone to wear and damage under long-term high temperature and high pressure conditions. In addition, during the production and coating process, the deposited coating material is plated on the roller shaft, and the circumference and flatness of the roller shaft are uneven, which affects the transmission accuracy and causes the equipment to be frequently shut down for maintenance and replacement, affecting production efficiency and cost control.

[0004] In order to overcome the shortcomings of ceramic rollers, more and more research and practice have begun to focus on metal mesh belt transmission systems. Metal mesh belt transmission systems have high strength, high wear resistance and good thermal conductivity, and can maintain stable performance and long service life under high temperature and high pressure conditions. In addition, the structure of the metal mesh belt transmission system is relatively simple, which can reduce the density of the supporting roller shaft, and the coated material will not accumulate on the roller shaft. The mesh belt is a mesh structure, and the coated material is not easy to accumulate and thicken, which can significantly reduce the downtime and maintenance cost of the equipment.

[0005] The basic structure of the metal mesh belt transmission system in the prior art is as follows:

[0006] Metal mesh belt: The mesh belt is made of stainless steel or other high-strength heat-resistant metal materials. Its mesh structure can be designed as needed to adapt to different types and sizes of substrates.

[0007] Driving device: includes a motor and a transmission mechanism, used to drive the metal mesh belt to operate.

[0008] Support device: used to support the metal mesh belt to ensure its smooth operation.

[0009] Tensioning device: used to adjust the tension of the mesh belt to prevent the mesh belt from loosening or deviating during operation.

[0010] Control device: used to control the transmission speed and operating status to ensure the stability and accuracy of the transmission process.

[0011] The working principle and effect of the metal mesh belt transmission system in the prior art are as follows:

[0012] The substrate is placed on the metal mesh belt, which is driven by the drive device to transport the substrate to the vacuum coating chamber. The mesh design of the metal mesh belt ensures that the substrate passes smoothly during the transmission process, while preventing the substrate from sliding and shifting. The entire transmission process is monitored and adjusted by the control device to ensure the stability of the transmission speed and operating status.

[0013] However, after the coating equipment has been in operation for a period of time, a certain thickness of coating material will still be attached to the mesh belt, causing the substrate to slip and shift. At this time, it is necessary to shut down for maintenance. Although the downtime and maintenance cost of the coating equipment with the above structure are improved compared to traditional vacuum coating equipment, the downtime and maintenance cost are still high. Summary of the invention

[0014] The main purpose of the present invention is to provide a vacuum evaporation coating device to solve the problems of long downtime and high maintenance cost of the vacuum evaporation coating device in the prior art.

[0015] In order to achieve the above-mentioned purpose, according to one aspect of the present invention, there is provided a vacuum evaporation coating equipment, comprising: a vacuum chamber; a conveying device, comprising a plurality of rollers arranged at intervals in the vacuum chamber and a conveyor belt arranged on the rollers, the rollers drive the conveyor belt to move, the conveyor belt comprising an upper conveying section located above the rollers and a lower conveying section located below the rollers; a first heating device, arranged in the vacuum chamber and having a gap n between it and the lower conveying section, for evaporating a film layer deposited on the lower conveying section.

[0016] In one embodiment, the first heating device extends in the axial direction of the roller.

[0017] In one embodiment, the first heating device is a heating rod, and the length of the heating rod is greater than or equal to the length of the conveyor belt in the axial direction of the roller.

[0018] In one embodiment, the first heating device is located below the lower conveying section; and / or the gap n is between 1 mm and 20 mm.

[0019] In one embodiment, the vacuum evaporation coating equipment also includes: a second heating device, wherein the second heating device includes a plurality of first heating elements that are fixedly arranged, and at least one side of at least one roller has a first heating element, or the second heating device includes a second heating element and a first driving device for driving the second heating element to move, and the second heating element has a plurality of heating positions corresponding to the plurality of rollers.

[0020] In one embodiment, the conveyor belt is a mesh belt, or the conveyor belt includes a plurality of sub-belts arranged at intervals along the axial direction of the roller, and the sub-belts are in a belt shape or a line shape.

[0021] In one embodiment, when the conveyor belt includes multiple sub-belts, the roller includes a roller shaft body and a plurality of supporting protrusions arranged at intervals along the axial direction of the roller shaft body, a first annular groove is provided on the side wall of the supporting protrusion, the sub-belt is installed in the first annular groove, and the depth of the first annular groove is less than the thickness of the sub-belt.

[0022] In one embodiment, the vacuum evaporation coating equipment also includes: a guide shaft, the extension direction of the guide shaft is the same as the extension direction of the roller, and the guide shaft can be pivotally arranged in the vacuum chamber, and a plurality of second annular grooves are arranged on the guide shaft in its axial direction corresponding to the plurality of first annular grooves one by one, and the depth of the second annular grooves is greater than the thickness of the sub-belt, so as to limit the transmission lower section of the sub-belt in the axial direction of the guide shaft.

[0023] In one embodiment, the distance between the groove bottom of the second annular groove of the guide shaft and the axis of the guide shaft is L1, and the distance between the groove bottom of the first annular groove of the roller and the axis of the roller is L2, and L1=L2.

[0024] In one embodiment, the first heating device is located on one side of the guide shaft to evaporate the film layer deposited on the guide shaft.

[0025] In one embodiment, the vacuum evaporation coating equipment also includes: a second driving device, which is connected to the roller drive; and / or, a third driving device, which is connected to the guide shaft drive; and / or, an evaporation device, which is arranged on the vacuum chamber to coat the workpiece on the conveying device.

[0026] According to another aspect of the present invention, a vacuum evaporation coating system is provided, comprising: a plurality of vacuum evaporation coating devices, wherein the vacuum evaporation coating devices are the above-mentioned vacuum evaporation coating devices.

[0027] In one embodiment, the vacuum evaporation coating system further includes: a control device, and the first heating device and the conveying device are both electrically connected to the control device.

[0028] By applying the technical solution of the present invention, when the vacuum evaporation coating equipment is working, multiple rollers rotate to drive the conveyor belt thereon to move, and the conveyor belt then drives the workpiece thereon to move to the coating position for coating. After the coating is completed, the conveyor belt then sends the workpiece thereon out to achieve the purpose of evaporating and coating the workpiece. More importantly, in the first embodiment, the vacuum evaporation coating equipment also includes a first heating device for evaporating the film layer deposited on the lower section of the conveyor. During the operation of the equipment, the first heating device can simultaneously heat the lower section of the conveyor, so that the film layer deposited on the lower section of the conveyor evaporates, thereby reducing the thickness of the film layer attached to the lower section of the conveyor. As the rollers continue to roll, the lower section of the conveyor, where the film layer deposition thickness has been reduced, will gradually become the upper section of the conveyor to transport the next workpiece. The above structure can ensure that each workpiece entering the vacuum chamber is transported by a conveyor belt with a smaller film layer deposition thickness, which reduces the probability of sliding and displacement of the workpiece on the one hand, and on the other hand, makes the vacuum evaporation coating equipment work normally for a longer time, reduces downtime, and reduces maintenance costs.

[0029] In addition to the above-described purposes, features and advantages, the present invention has other purposes, features and advantages. The present invention will be further described in detail with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] The accompanying drawings constituting a part of the present invention are used to provide a further understanding of the present invention. The exemplary embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation of the present invention. In the accompanying drawings:

[0031] Figure 1 A schematic top view of a first embodiment of a vacuum evaporation coating device according to the present invention is shown;

[0032] Figure 2 Shows Figure 1 A schematic diagram of a main view of a vacuum evaporation coating device;

[0033] Figure 3 Shows Figure 2 A schematic diagram of a portion of the structure of a vacuum evaporation coating device;

[0034] Figure 4 Shows Figure 3 A schematic side view of a roller of a vacuum evaporation coating device;

[0035] Figure 5 Shows Figure 4 A schematic diagram of the enlarged structure of the roller at A;

[0036] Figure 6 Shows Figure 3 A schematic side view of a guide shaft of a vacuum evaporation coating device;

[0037] Figure 7 Shows Figure 6 An enlarged structural diagram of the roller at B;

[0038] Figure 8 Shows Figure 3 A schematic side view of a partial structure of a vacuum evaporation coating device;

[0039] Fig. 9 Shows Figure 8 A schematic diagram of the structure of the tensioning shaft and the limiter of the vacuum evaporation coating equipment;

[0040] Fig.10 It shows a schematic top view of a third embodiment of the vacuum evaporation coating device according to the present invention;

[0041] Fig.11 Shows Fig.10 A schematic diagram of the structure of a roller of a vacuum evaporation coating device;

[0042] Fig.12 A schematic side view showing a partial structure of a fourth embodiment of a vacuum evaporation coating device according to the present invention; and

[0043] Fig.13 Shows Fig.12 Schematic diagram of the structure of the transmission parts of the vacuum evaporation coating equipment.

[0044] The above drawings include the following reference numerals:

[0045] 10. Vacuum chamber; 20. Conveying device; 21. Roller group; 211. Roller; 2111. Roller body; 2112. Support convex ring; 2113. First annular groove; 22. Conveying belt; 221. Sub-belt; 30. First heating device; 40. Second heating device; 50. Guide shaft; 51. Guide shaft body; 52. Guide ring; 521. Second annular groove; 5211. Narrowing section; 5212. Limiting section; 522. Mounting member; 60. Second driving device; 70. Third driving device; 80. Evaporating device; 90. Tensioning shaft; 91. Sliding block; 100. Fourth driving device; 101. Output shaft; 102. Universal joint; 103. First gear; 104. Second gear; 110. Limiting member; 111. Limiting groove; 112. Vertical plate; 120. Rotating seal. DETAILED DESCRIPTION

[0046] It should be noted that, in the absence of conflict, the embodiments of the present invention and the features in the embodiments can be combined with each other. The present invention will be described in detail below with reference to the accompanying drawings and in combination with the embodiments.

[0047] In order to enable those skilled in the art to better understand the scheme of the present invention, the technical scheme in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the present invention.

[0048] It should be noted that the terms "first", "second", etc. in the specification and claims of the present invention and the above-mentioned drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. It should be understood that the terms used in this way can be interchanged where appropriate, so as to describe the embodiments of the present invention described herein. In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusions, for example, a process, method, system, product or device that includes a series of steps or units is not necessarily limited to those steps or units that are clearly listed, but may include other steps or units that are not clearly listed or inherent to these processes, methods, products or devices.

[0049] It should be noted that the terms used herein are only for describing specific embodiments and are not intended to limit the exemplary embodiments according to the present application. As used herein, unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. In addition, it should be understood that when the terms "comprise" and / or "include" are used in this specification, it indicates the presence of features, steps, operations, devices, components and / or combinations thereof.

[0050] like Figures 1 to 3 As shown, the vacuum evaporation coating equipment of the first embodiment includes: a vacuum chamber 10, a conveying device 20 and a first heating device 30. The conveying device 20 includes a plurality of rollers 211 arranged at intervals in the vacuum chamber 10 and a conveyor belt 22 arranged on the rollers 211. The rollers 211 drive the conveyor belt 22 to move. The conveyor belt 22 includes an upper conveying section located above the rollers 211 and a lower conveying section located below the rollers 211. The first heating device 30 is arranged in the vacuum chamber 10 and has a gap n between it and the lower conveying section, so as to evaporate the film layer deposited on the lower conveying section.

[0051] Using the technical solution of the first embodiment, when the vacuum evaporation coating equipment is working, the multiple rollers 211 rotate to drive the conveyor belt 22 thereon to move, and the conveyor belt 22 then drives the workpiece thereon to move to the coating position for coating. After the coating is completed, the conveyor belt 22 then sends the workpiece thereon out to achieve the purpose of evaporating and coating the workpiece. More importantly, in the first embodiment, the vacuum evaporation coating equipment also includes a first heating device 30 for evaporating the film layer deposited on the lower section of the conveyor. During the operation of the equipment, the first heating device 30 can simultaneously heat the lower section of the conveyor (the heating temperature is greater than the evaporation temperature of the coating material), so that the film layer deposited on the lower section of the conveyor evaporates, thereby reducing the thickness of the film layer attached to the lower section of the conveyor. As the rollers 211 continue to roll, the lower section of the conveyor, where the thickness of the film layer deposition has been reduced, will gradually become the upper section of the conveyor to transport the next workpiece. The above structure can ensure that each workpiece entering the vacuum chamber 10 is conveyed by the conveyor belt 22 with a smaller film deposition thickness. On the one hand, it reduces the probability of sliding and shifting of the workpiece. On the other hand, it makes the vacuum evaporation coating equipment work normally for a longer time, reduces downtime, and reduces maintenance costs.

[0052] like Figure 2 and Figure 3 As shown, in the first embodiment, the first heating device 30 extends along the axial direction of the roller 211. The above structure enables the first heating device 30 to heat the conveyor belt 22 more evenly, thereby ensuring that the film deposition thickness at each location of the conveyor belt 22 is roughly the same, reducing the probability of slippage and displacement of the workpiece.

[0053] like Figure 3 As shown, in the first embodiment, the first heating device 30 is a heating rod. Since the conveyor belt 22 is driven by a plurality of rollers 211 to move in a circular motion, the first heating device 30 only needs to be set in the shape of an axially extending rod to heat various locations of the lower conveying section of the conveyor belt 22. The above structure is simple and low in cost. In addition, the length of the heating rod is greater than or equal to the length of the conveyor belt 22 in the axial direction of the roller 211, so that the first heating device 30 can heat various locations of the conveyor belt 22 more evenly, thereby ensuring that the film deposition thickness at various locations of the conveyor belt 22 is roughly the same, reducing the probability of slippage and displacement of the workpiece.

[0054] like Figure 3 As shown, in the first embodiment, the first heating device 30 is located below the lower conveying section. The above structure is simple and easy to arrange.

[0055] In the first embodiment, the gap n is between 1 mm and 20 mm. The above structure prevents the conveyor belt 22 from contacting the first heating device 30, thereby ensuring the service life of the conveyor belt 22; on the other hand, the conveyor belt 22 can receive enough heat, thereby fully evaporating the coating material thereon, thereby reducing the deposition thickness of the film layer.

[0056] like Figure 1 As shown, in the first embodiment, the conveyor belt 22 includes a plurality of sub-belts 221 arranged at intervals along the axial direction of the roller 211, and the sub-belts 221 are in a belt shape. The above structure can reduce the density of the roller 211, reduce the accumulation of the coating material on the roller 211, and the width of the sub-belts 221 is small, and the coating material is not easy to accumulate and thicken, which can significantly reduce the downtime and maintenance cost of the equipment. Preferably, in this embodiment, the sub-belts 221 are stainless steel belts (belt type). Of course, in other embodiments not shown in the figure, the sub-belts 221 can also be steel wires (wire type).

[0057] like Figures 1 to 5 As shown, in the first embodiment, when the conveyor belt 22 includes a plurality of sub-belts 221, the roller 211 includes a roller body 2111 and a plurality of support protrusions 2112 arranged at intervals along the axial direction of the roller body 2111, and a first annular groove 2113 is provided on the side wall of the support protrusion 2112, and the sub-belt 221 is installed in the first annular groove 2113, and the depth of the first annular groove 2113 is less than the thickness of the sub-belt 221. Specifically, the conveyor belt 22 composed of a plurality of sub-belts 221 has a simple structure, which can reduce the density of the roller 211 and reduce the accumulation of the coated material on the roller 211. There is a certain distance between the sub-belts 221, and the coated material is not easy to accumulate and thicken, which can significantly reduce the downtime and maintenance cost of the equipment. More importantly, the first annular groove 2113 can maintain the straightness of the sub-belt 221 and prevent the sub-belt 221 from deflecting during the transmission process.

[0058] The roller 211 is further described in detail below:

[0059] In this embodiment, a plurality of pivotable rollers 211 are arranged at intervals along a first direction V1, the plurality of rollers 211 are parallel to each other, and the rollers 211 extend along a second direction V2 perpendicular to the first direction V1. The rollers 211 include a roller body 2111 and a plurality of support protrusions 2112 arranged at intervals along the axial direction of the roller body 2111. A first annular groove 2113 is provided on the side wall of the support protrusion 2112. The first annular grooves 2113 on all rollers 211 at the same position in the second direction V2 form a linear installation area Z, and there are a plurality of linear installation areas Z. The sub-belts 221 are arranged one by one in correspondence with the plurality of linear installation areas, the sub-belts 221 are limited in the first annular grooves 2113 in the corresponding linear installation area, and the surface of the sub-belts 221 protrudes from the surface of the support protrusions 2112, and the roller group 21 (a plurality of rollers 211 form the roller group 21) drives the sub-belts 221 to move.

[0060] By applying the technical solution of embodiment 1, each sub-belt 221 in the linear installation area Z has multiple support points supported by multiple rollers 211, and each support point is limited in the first annular groove 2113 in the second direction V2. Therefore, the straightness of each sub-belt 221 during transportation can be ensured, and the deviation of the transmission plane formed by all sub-belts 221 can be avoided, thereby ensuring the transmission speed and operation stability.

[0061] Preferably, in this embodiment, the sub-belt 221 is made of metal material. The metal conveyor belt has high strength, high wear resistance and good thermal conductivity, and can maintain stable performance and a long service life under high temperature and high pressure conditions.

[0062] Further preferably, the sub-belt 221 is an alloy steel belt made of a high-temperature alloy steel material, specifically, a high-temperature alloy steel belt such as Inconel 718 or Haynes 230 or GH4145 is used as a transmission support, which can withstand a high temperature of up to 700 degrees Celsius.

[0063] Preferably, in this embodiment, the roller 211 is made of high temperature resistant ceramic or SiC material, and the surface of the roller is provided with a first annular groove 2113 that cooperates with the sub-belt 221 to ensure the fixed position of the sub-belt 221 during the transmission process.

[0064] Preferably, the first annular groove 2113 is a U-shaped slot, and the straightness of the sub-belt 221 is maintained through the slot transmission mechanism to prevent the sub-belt 221 from being offset during the transmission process.

[0065] It should be noted that the sub-belts 221 form an annular conveyor belt, and each sub-belt 221 maintains a consistent circumference after being closed, thereby ensuring synchronization of transmission and consistency of tension.

[0066] In this embodiment, the groove depth of the first annular groove 2113 is between 0.2 mm and 0.8 mm. If the groove depth of the first annular groove 2113 is too shallow, the limiting effect on the sub-belt 221 is poor; if the groove depth of the first annular groove 2113 is too deep, when the coating material with a lower height is deposited on the roller 211, its height may exceed the height of the upper surface of the sub-belt 221, causing the workpiece to be separated from the sub-belt 221, and finally resulting in a shorter time interval between two shutdowns of the conveying system for maintenance.

[0067] In this embodiment, the width of the first annular groove 2113 is between 3 mm and 50 mm. That is, the width of the sub-belt 221 is short, and the coating material is not easy to accumulate and thicken, which can significantly reduce the downtime and maintenance cost of the equipment. Preferably, the width of the sub-belt 221 is 10 mm.

[0068] In this embodiment, the distance between two adjacent rollers 211 is between 300 mm and 1200 mm. The above structure, on the one hand, prevents the coating material from being easily accumulated and thickened, which can significantly reduce the downtime and maintenance cost of the equipment; on the other hand, it can ensure the support force for the sub-belts 221, ensuring that the transmission surfaces of each sub-belt 221 are in the same plane.

[0069] like Figure 4 and Figure 5 As shown, in this embodiment, the height h of the supporting protruding ring 2112 is between 3 and 20 mm. The above structure makes it difficult for the coating material to accumulate and thicken, which can significantly reduce the downtime and maintenance cost of the equipment; on the other hand, it is easy to process and produce, and the production cost is low.

[0070] like Figure 4 As shown, in this embodiment, the distance d between two adjacent supporting protrusions 2112 is between 100 mm and 300 mm. As a result, the sub-belts 221 are distributed at a moderate spacing, so that on the one hand, the coating material is not easy to accumulate and thicken, which can significantly reduce the downtime and maintenance cost of the equipment; on the other hand, it can ensure the support force for various parts of the workpiece.

[0071] In this embodiment, the supporting protruding ring 2112 and the roller body 2111 are an integral structure. The above structure is simple and reduces the assembly steps. Of course, in other embodiments not shown in the figure, the supporting protruding ring 2112 and the roller body 2111 can also be a separate structure.

[0072] like Figure 3 , Figure 6 and Figure 7As shown, in the first embodiment, the vacuum evaporation coating device further includes: a guide shaft 50. The extension direction of the guide shaft 50 is the same as the extension direction of the roller 211, and is pivotably arranged in the vacuum chamber 10. The guide shaft 50 is provided with a plurality of second annular grooves 521 corresponding to the plurality of first annular grooves 2113 in the axial direction thereof, and the depth of the second annular grooves 521 is greater than the thickness of the sub-belt 221, so as to limit the transmission lower section of the sub-belt 221 in the axial direction of the guide shaft 50. The above structure can further limit the sub-belt 221, and further prevent the sub-belt 221 from moving along the axial direction of the guide shaft 50.

[0073] After long-term research, the inventors found that the conveyor belt 22 of this embodiment may wear out after long-term use. The reason for this phenomenon is that friction may occur at the position where the sub-belt 221 contacts the guide shaft 50 and the roller 211. The reason for this friction is that the linear speeds at the position where the sub-belt 221 contacts the guide shaft 50 and the roller 211 are inconsistent, resulting in relative sliding between the sub-belt 221 and the guide shaft 50 or the conveyor belt 22 and the roller 211, causing the guide shaft 50 or the roller 211 to wear the sub-belt 221. In order to solve the above problems, as Figure 4 and Figure 6 As shown, in the first embodiment, the distance between the bottom of the second annular groove 521 of the guide shaft 50 and the axis of the guide shaft 50 is L1, and the distance between the bottom of the first annular groove 2113 of the roller 211 and the axis of the roller 211 is L2, and L1 = L2. Specifically, V = ω × r, where V is the linear velocity, ω is the angular velocity, and r is the radius. For the linear velocity at the position where the guide shaft 50 contacts the sub-belt 221, V 导 =ω 导 × L1, for the linear velocity at the position where the roller 211 contacts the sub-belt 221, V 辊 =ω 辊 ×L2, since L1=L2, then we only need to control ω 导 and ω 辊 The speeds of the sub-belt 221, the guide shaft 50 and the roller 211 at the positions where they contact each other can be made consistent, thereby avoiding speed differences among the sub-belt 221, the roller 211 and the guide shaft 50, thereby reducing friction and ensuring the service life of the sub-belt 221.

[0074] like Figure 6 and Figure 7 As shown, in this embodiment, the guide shaft 50 includes a guide shaft body 51 and a guide ring 52 sleeved on the guide shaft body 51, and the second annular groove 521 is provided on the side of the guide ring 52. That is, the guide shaft 50 is a split structure, and the above structure enables the groove depth of the second annular groove 521 to be deeper, thereby ensuring the limiting effect.

[0075] like Figure 7 As shown, in this embodiment, the second annular groove 521 has a narrowing section 5211 and a limiting section 5212 in the direction from its opening to the groove bottom, the width of the opening is greater than the width of the conveyor belt 22, and the conveyor belt 22 is clamped in the limiting section 5212. The above structure enables the conveyor belt 22 to slide smoothly from the narrowing section 5211 into the limiting section 5212 during installation, thereby reducing the difficulty of installation.

[0076] like Figure 6 and Figure 7 As shown, in this embodiment, the guide shaft body 51 is made of ceramic material, the guide ring 52 is made of stainless steel material, and the guide ring 52 is fixedly arranged on the guide shaft body 51 through the mounting member 522. Specifically, in this embodiment, the second annular groove 521 is made of high temperature resistant stainless steel material and is inserted into the guide shaft body 51 made of ceramic material, and is fixed on the guide shaft body 51 after the position is accurately adjusted, so as to limit the lateral displacement of the conveyor belt 22 and prevent the conveyor belt 22 from running off. It should be noted that in this embodiment, the mounting member 522 is a mounting screw.

[0077] like Figure 2 and Figure 3 As shown, in the first embodiment, the first heating device 30 is located on one side of the guide shaft 50, and is used to evaporate the film layer deposited on the guide shaft 50. In the above structure, the first heating device 30 is close to the guide shaft 50 in addition to the conveyor belt 22, so that the first heating device 30 can evaporate the film layer on the conveyor belt 22 and the film layer on the guide shaft 50, so that the vacuum evaporation coating equipment can work normally for a longer time, reduce downtime, and reduce maintenance costs.

[0078] After long-term research, the inventors also found that when the metal mesh belt transmission system in the prior art is used in the vacuum coating equipment, the mesh belt will loosen and deviate because the vacuum coating chamber is in a high temperature environment during vacuum coating. Once the temperature rises, the mesh belt will expand. Once the mesh belt expands, it will loosen and deviate. In order to solve the above technical problems, Figure 3 , Figure 8 and Fig. 9 As shown, in this embodiment, the vacuum evaporation coating device further includes: a tensioning shaft 90. The tensioning shaft 90 extends along the second direction V2, and the tensioning shaft 90 applies tensioning force to all the conveyor belts 22.

[0079] Specifically, in the first embodiment, the tensioning shaft 90 is movably disposed on the vacuum chamber 10 along the vertical direction, and the tensioning shaft 90 is pressed on the upper surface of the lower conveying section under the action of gravity.

[0080] The technical solution of the first embodiment is applied. When vacuum coating is not performed, the conveyor belt 22 is in a tensioned state because the tension shaft 90 is pressed on the upper surface of the lower conveyor section under the action of gravity. When vacuum coating is performed, the temperature of the conveyor belt 22 in the vacuum chamber 10 rises, the conveyor belt 22 expands, and the support force of the tension shaft 90 on the conveyor belt 22 becomes smaller. The support force is smaller than the gravity of the tension shaft 90. Therefore, the tension shaft 90 will move downward under the action of the combined force until the support force is the same as the gravity. This allows the conveyor belt 22 to remain tensioned even if the length is extended. When the temperature in the vacuum chamber 10 decreases and the conveyor belt 22 shrinks, the support force of the tension shaft 90 on the conveyor belt 22 increases. Since the tension shaft 90 has the freedom to move up and down, the tension shaft 90 can move upward until the force on the tension shaft 90 is balanced, thereby avoiding excessive tension of the conveyor belt 22 and ensuring the service life of the conveyor belt 22. In summary, by applying the technical solution of the first embodiment, the vacuum evaporation coating device can automatically adjust the tension of the conveyor belt 22 to ensure the transmission speed, operation stability and service life of the entire vacuum evaporation coating device. In addition, the tension of the conveyor belt 22 is self-adjusting, and no electronic components are required, so the production cost is low.

[0081] like Figure 8 As shown, in the first embodiment, the vacuum evaporation coating device further includes a fourth driving device 100, which includes an output shaft 101 penetrating the cavity wall of the vacuum chamber 10 and a transmission member connected to the output shaft 101 and one end of the tensioning shaft 90, and the output shaft 101 drives the tensioning shaft 90 to rotate. The above structure can make the rotation speed of the tensioning shaft 90 the same as the rotation speed of the roller 211, thereby minimizing the friction between the tensioning shaft 90 and the conveyor belt 22, thereby ensuring the life of the conveyor belt 22.

[0082] like Figure 8 As shown, in the first embodiment, the vacuum evaporation coating device further includes: a rotating seal 120, which is arranged on the wall of the vacuum chamber 10 to dynamically seal the output shaft 101. The rotating seal 120 can ensure the vacuum degree in the vacuum chamber 10, thereby ensuring the coating quality.

[0083] like Figure 8 As shown, in the first embodiment, the transmission member is a universal shaft 102. The above structure ensures that even if the axis of the output shaft 101 and the axis of the tensioning shaft 90 are not in the same straight line, the driving force of the output shaft 101 can be directly transmitted to the tensioning shaft 90, so that the tensioning shaft 90 rotates at a predetermined speed. The above structure is simple and easy to implement.

[0084] like Figure 8As shown, in the first embodiment, the fourth driving device 100 is two located on both sides of the tensioning shaft 90. The above structure makes the tensioning force adjustment of the conveyor belt 22 more stable and reliable.

[0085] like Figure 8 and Fig. 9 As shown, in the embodiment 11, the vacuum evaporation coating device further includes: a stopper 110, on which a vertically extending stopper groove 111 is provided, and a portion of the tensioning shaft 90 extends into the stopper groove 111. The above structure is simple and has high assembly efficiency.

[0086] like Fig. 9 As shown, in the first embodiment, the limiting member 110 includes two vertical plates 112 arranged at intervals along the conveying direction of the conveying device 20, and the gap between the two vertical plates 112 forms a limiting groove 111. The above structure is simple and low in cost.

[0087] like Figure 1 As shown, in the first embodiment, the vacuum evaporation coating device further includes: a second driving device 60, and the second driving device 60 is drivingly connected to the roller 211. The above structure is simple and realizes the automation of the transmission system.

[0088] like Figure 6 As shown, in the first embodiment, the vacuum evaporation coating device further includes: a third driving device 70, and the third driving device 70 is drivingly connected to the guide shaft 50. The above structure is simple and realizes the automation of the transmission system.

[0089] like Figure 2 As shown, in the first embodiment, the vacuum evaporation coating equipment further includes: an evaporation device 80 for evaporating a film on a workpiece, and the evaporation device 80 is disposed on the vacuum chamber 10 .

[0090] like Figure 3 As shown, in the first embodiment, the vacuum evaporation coating equipment further includes a second heating device 40. Specifically, the second heating device 40 includes a plurality of first heating elements that are fixedly arranged, and at least one side of at least one roller 211 has a first heating element. In the above structure, the plurality of first heating elements are close to the roller 211 in addition to being close to the conveyor belt 22, so that the second heating device 40 can evaporate the film layer on the conveyor belt 22 and the film layer on the roller 211, so that the vacuum evaporation coating equipment can work normally for a longer time, reduce downtime, and reduce maintenance costs.

[0091] The difference between the vacuum evaporation coating device of the second embodiment and the vacuum evaporation coating device of the first embodiment lies in the specific structure of the second heating device 40. Specifically, in the second embodiment, the second heating device 40 includes a second heating element and a first driving device for driving the second heating element to move, and the second heating element has a plurality of heating positions corresponding to the plurality of rollers 211. In the above structure, by moving one second heating element, the film layers deposited on the plurality of rollers 211 can all be evaporated, thereby reducing the number of second heating elements.

[0092] The difference between the vacuum evaporation coating device of the third embodiment and the vacuum evaporation coating device of the first embodiment is only the structure of the conveyor belt 22. Specifically, Fig.10 and Fig.11 As shown, in the third embodiment, the conveyor belt 22 is a mesh belt. The above structure can reduce the density of the roller 211, reduce the accumulation of the coating material on the roller 211, and the conveyor belt 22 has multiple meshes, so the coating material is not easy to accumulate and thicken, which can significantly reduce the downtime and maintenance cost of the equipment.

[0093] The difference between the vacuum evaporation coating device of the fourth embodiment and the vacuum evaporation coating device of the first embodiment is only the structure of the transmission part. Fig.12 and Fig.13 As shown, in the fourth embodiment, the transmission member includes a first gear 103 and a second gear 104 meshing with each other, the output shaft 101 is arranged on the first gear 103, and the end of the tensioning shaft 90 is arranged on the second gear 104. Specifically, the output shaft 101 rotates to drive the first gear 103 to rotate, the first gear 103 drives the second gear 104 to rotate, and the second gear 104 drives the tensioning shaft 90 to rotate. The above structure ensures that even if the axis of the output shaft 101 and the axis of the tensioning shaft 90 are not in the same straight line, the driving force of the output shaft 101 can be directly transmitted to the tensioning shaft 90, so that the tensioning shaft 90 rotates at a predetermined speed. It should be noted that during the expansion or contraction of the conveyor belt 22, the tensioning shaft 90 will move up and down with a small floating. Since the movement and floating of the tensioning shaft 90 are small, although the distance between the axes of the first gear 103 and the second gear 104 will change, it does not affect the meshing of the two, and the transmission can still proceed normally.

[0094] like Fig.12 and Fig.13 As shown, in the fourth embodiment, the tensioning shaft 90 includes a shaft body and sliders 91 pivotably disposed at both ends of the shaft body, and the sliders 91 extend into the limiting grooves 111 .

[0095] Specifically, Fig.12 and Fig.13As shown, in the fourth embodiment, the vacuum evaporation coating equipment further includes: a limiting member, which is a vertical plate, and the limiting groove 111, the first gear 103 and the second gear 104 are all arranged on the vertical plate.

[0096] The present application also provides a vacuum evaporation coating system. According to an embodiment of the vacuum evaporation coating system of the present application, the vacuum evaporation coating system includes a plurality of vacuum evaporation coating devices, wherein the vacuum evaporation coating device is the above-mentioned vacuum evaporation coating device. Since the above-mentioned vacuum evaporation coating device has the advantages of reducing downtime and reducing maintenance costs, the vacuum evaporation coating system having the same also has the above-mentioned advantages.

[0097] In this embodiment, the vacuum evaporation coating system further comprises: a control device. The first heating device 30 and the conveying device 20 are both electrically connected to the control device. The above structure enables the vacuum evaporation coating system to be automated.

[0098] Unless otherwise specifically stated, the relative arrangement of the parts and steps described in these embodiments, numerical expressions and numerical values ​​do not limit the scope of the present invention. At the same time, it should be understood that, for ease of description, the sizes of the various parts shown in the accompanying drawings are not drawn according to the actual proportional relationship. The technology, method and equipment known to ordinary technicians in the relevant field may not be discussed in detail, but in appropriate cases, the technology, method and equipment should be regarded as a part of the authorization specification. In all examples shown and discussed here, any specific value should be interpreted as being merely exemplary, rather than as a limitation. Therefore, other examples of exemplary embodiments may have different values. It should be noted that similar reference numerals and letters represent similar items in the following drawings, so once a certain item is defined in an accompanying drawing, it does not need to be further discussed in subsequent drawings.

[0099] For ease of description, spatially relative terms such as "above", "above", "on the upper surface of", "above", etc. may be used here to describe the spatial positional relationship between a device or feature and other devices or features as shown in the figure. It should be understood that spatially relative terms are intended to include different orientations of the device in use or operation in addition to the orientation described in the figure. For example, if the device in the accompanying drawings is inverted, the device described as "above other devices or structures" or "above other devices or structures" will be positioned as "below other devices or structures" or "below other devices or structures". Thus, the exemplary term "above" can include both "above" and "below". The device can also be positioned in other different ways (rotated 90 degrees or in other orientations), and the spatially relative descriptions used here are interpreted accordingly.

[0100] In the description of the present invention, it is necessary to understand that the directions or positional relationships indicated by directional words such as "front, back, up, down, left, right", "lateral, vertical, perpendicular, horizontal" and "top, bottom" are usually based on the directions or positional relationships shown in the drawings. They are only for the convenience of describing the present invention and simplifying the description. Unless otherwise specified, these directional words do not indicate or imply that the devices or elements referred to must have a specific direction or be constructed and operated in a specific direction. Therefore, they cannot be understood as limiting the scope of protection of the present invention. The directional words "inside and outside" refer to the inside and outside relative to the contours of each component itself.

[0101] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A vacuum evaporation coating device, characterized in that: include: A vacuum chamber (10); A conveying device (20), comprising a plurality of rollers (211) arranged at intervals in the vacuum chamber (10) and a conveying belt (22) arranged on the rollers (211), wherein the rollers (211) drive the conveying belt (22) to move, and the conveying belt (22) comprises an upper conveying section located above the rollers (211) and a lower conveying section located below the rollers (211); A first heating device (30) is arranged in the vacuum chamber (10) and has a gap n between it and the lower conveying section, and is used to evaporate the film layer deposited on the lower conveying section.

2. The vacuum evaporation coating equipment according to claim 1, characterized in that: The first heating device (30) extends along the axial direction of the roller (211).

3. The vacuum evaporation coating equipment according to claim 2, characterized in that: The first heating device (30) is a heating rod, the length of which is greater than or equal to the length of the conveyor belt (22) in the axial direction of the roller (211).

4. The vacuum evaporation coating equipment according to claim 1, characterized in that: The first heating device (30) is located below the lower conveying section; and / or the gap n is between 1 mm and 20 mm.

5. The vacuum evaporation coating equipment according to claim 1, characterized in that: The vacuum evaporation coating equipment also includes: A second heating device (40), wherein the second heating device (40) comprises a plurality of first heating elements which are fixedly arranged, and at least one side of at least one of the rollers (211) has the first heating element, or the second heating device (40) comprises a second heating element and a first driving device for driving the second heating element to move, and the second heating element has a plurality of heating positions corresponding to the plurality of rollers (211).

6. The vacuum evaporation coating equipment according to claim 1, characterized in that: The conveyor belt (22) is a mesh belt, or the conveyor belt (22) comprises a plurality of sub-belts (221) arranged at intervals along the axial direction of the roller (211), and the sub-belts (221) are in the form of belts or lines.

7. The vacuum evaporation coating equipment according to claim 6, characterized in that: When the conveyor belt (22) includes a plurality of sub-belts (221), the roller (211) includes a roller body (2111) and a plurality of support protrusions (2112) arranged at intervals along the axial direction of the roller body (2111), a first annular groove (2113) is provided on the side wall of the support protrusion (2112), the sub-belt (221) is installed in the first annular groove (2113), and the depth of the first annular groove (2113) is less than the thickness of the sub-belt (221).

8. The vacuum evaporation coating equipment according to claim 7, characterized in that: The vacuum evaporation coating equipment also includes: A guide shaft (50), wherein the extension direction of the guide shaft (50) is the same as the extension direction of the roller (211), and the guide shaft (50) is pivotally arranged in the vacuum chamber (10), and a plurality of second annular grooves (521) corresponding one-to-one to the plurality of first annular grooves (2113) are arranged on the guide shaft (50) in its axial direction, and the depth of the second annular grooves (521) is greater than the thickness of the sub-belt (221) so as to limit the transmission lower section of the sub-belt (221) in the axial direction of the guide shaft (50).

9. The vacuum evaporation coating equipment according to claim 8, characterized in that: The distance between the bottom of the second annular groove (521) of the guide shaft (50) and the axis of the guide shaft (50) is L1, and the distance between the bottom of the first annular groove (2113) of the roller (211) and the axis of the roller (211) is L2, and L1=L2.

10. The vacuum evaporation coating equipment according to claim 8, characterized in that: The first heating device (30) is located on one side of the guide shaft (50) and is used to evaporate the film layer deposited on the guide shaft (50).

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