Implementation method of evaporation source of PECVD coating machine

Abstract

The invention discloses a method for realizing an evaporation source of a PECVD (Plasma Enhanced Chemical Vapor Deposition) coating machine. The method comprises the following steps: putting an evaporation source using medicament into a medicament tank according to preset process parameters; establishing a pipeline through which the medicament flows out of the medicament tank by utilizing vacuum negative pressure; and controlling the dropping amount of the outflowing medicament entering the evaporation mechanism according to the time and dosage of the coating process. The device has the advantages that medicament and heating are separated, the medicament is prevented from going bad and losing efficacy after being heated for a long time, the dosage can be accurately controlled, the medicament is convenient to clean and replace, the medicament tank can be designed into a quick-insertion type interface, and a plurality of medicament tanks can be alternately used. The device is simple in structure, low in cost, simple and accurate in metering, uniform in coating and high in quality, and effectively prevents corrosion of chemicals and damage of crystals to the flowmeter and the flow pump from affecting precision.

Description

Technical Field

[0001] The invention relates to the technical field of vacuum equipment, and in particular to a method for realizing an evaporation source of a PECVD coating machine. Background Art

[0002] The evaporation source is a method in which the PECVD (plasma chemical vapor deposition) coating machine vaporizes the solvent into atoms, molecules or ions under vacuum conditions using various physical methods, and directly deposits it on the surface of the substrate (workpiece) to form a solid film. Its performance can affect the process time, film thickness and uniformity, and is an important part of PECVD equipment.

[0003] In the prior art, flow meters and flow pumps are mostly used to control the dosage of reagents. Although the accuracy is very high, the disadvantages are high cost and the corrosion and crystallization of the reagents can damage the flow meters and flow pumps, thus affecting the accuracy, resulting in inaccurate measurement, uneven film thickness, and high maintenance costs. Summary of the invention

[0004] The present invention proposes a method for realizing an evaporation source of a PECVD coating machine, which solves the technical problems existing in the above-mentioned prior art.

[0005] According to one aspect of the present invention, a method for realizing an evaporation source of a PECVD coating machine is provided, characterized in that it comprises:

[0006] Put the evaporation source reagent into the reagent tank according to the preset process parameters;

[0007] Using vacuum negative pressure to establish a pipeline for the medicine to flow out of the medicine tank;

[0008] The amount of the outflowing reagent that drops into the evaporation mechanism is controlled according to the coating process time and dosage.

[0009] Furthermore, the use of vacuum negative pressure to establish a pipeline for the medicine to flow out of the medicine tank includes:

[0010] The outlet of the medicine tank is connected to the vacuum chamber using a thin tube with a first solenoid valve and a second solenoid valve spaced a certain distance apart;

[0011] Turning on the vacuum pump to evacuate the vacuum chamber;

[0012] The opening time of the first solenoid valve or the second solenoid valve is alternately controlled to allow the medicine to flow out of the medicine tank.

[0013] Furthermore, the method of controlling the flow rate of the outflowing agent into the evaporation mechanism according to the coating process time and dosage includes:

[0014] Set the calibration dosage of the coating process;

[0015] The amount of drops of the agent entering the evaporation mechanism is calculated according to the calibrated dosage.

[0016] Furthermore, the first solenoid valve and the second solenoid valve are Takasago solenoid valves.

[0017] Furthermore, it also includes installing a quick-insert interface on the medicine tank to alternately use multiple medicine tanks.

[0018] Furthermore, it also includes designing multiple pipelines and using different medicine tanks at the same time.

[0019] It can be seen from the technical solution provided by the present invention that, by adopting the present invention, the medicine and heating are separated, so as to prevent the medicine from being heated for a long time and deteriorating and becoming ineffective, and the dosage can be accurately controlled, and the cleaning and replacement of the medicine are convenient. The medicine tank can be designed as a quick-plug interface, and multiple medicine tanks can be used alternately. The cost is low, and the corrosiveness and crystallization of the medicine can effectively avoid damage to the flow meter and flow pump, thereby affecting the accuracy. The measurement is simple and accurate, and the coating is uniform and of high quality.

[0020] The above description is only an overview of the technology of the present invention. In order to more clearly understand the technical means of the present invention, it can be implemented according to the contents of the specification. In order to make the above and other purposes, features and advantages of the present invention more obvious and easy to understand, the specific implementation methods of the present invention are listed below. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Various other advantages and benefits will become apparent to those of ordinary skill in the art by reading the detailed description of the preferred embodiments below. The accompanying drawings are only for the purpose of illustrating the preferred embodiments and are not to be considered as limiting the present invention. Moreover, the same reference symbols are used throughout the accompanying drawings to represent the same components. In the accompanying drawings:

[0022] Figure 1 It is a schematic diagram of an embodiment of the method for realizing the evaporation source of the PECVD coating machine of the present invention.

[0023] Reference numerals

[0024] 11-medicine tank 12-vacuum chamber 13-evaporation plate 14-heating tube

[0025] 15-Quick connector 16-PTFE solenoid valve A 17-PTFE solenoid valve B

[0026] 18-Pagoda silencer 19-Manual valve DETAILED DESCRIPTION

[0027] The exemplary embodiments of the present invention will be described in more detail below with reference to the accompanying drawings. Although the exemplary embodiments of the present invention are shown in the accompanying drawings, it should be understood that the present invention can be implemented in various forms and should not be limited by the embodiments set forth herein. On the contrary, these embodiments are provided in order to enable a more thorough understanding of the present invention and to enable the scope of the present invention to be fully communicated to those skilled in the art.

[0028] The following is a detailed description of a method for realizing an evaporation source of a PECVD coating machine provided by the present invention. The contents not described in detail in the embodiments of the present invention belong to the prior art known to professional and technical personnel in the field. If no specific conditions are specified in the embodiments of the present invention, the conventional conditions in the field or the conditions recommended by the manufacturer shall be followed.

[0029] See also Figure 1 A method for realizing an evaporation source of a PECVD coating machine of the present invention comprises:

[0030] Step S101, placing the evaporation source reagent into a reagent tank according to preset process parameters;

[0031] Step S102, using vacuum negative pressure to establish a pipeline for the medicine to flow out of the medicine tank;

[0032] Step S103, controlling the amount of the outflowing reagent that enters the evaporation mechanism according to the coating process time and dosage.

[0033] As a specific embodiment, the method of using vacuum negative pressure to establish a pipeline for the medicine to flow out of the medicine tank includes:

[0034] The outlet of the medicine tank is connected to the vacuum chamber using a thin tube with a first solenoid valve and a second solenoid valve spaced a certain distance apart;

[0035] Turning on the vacuum pump to evacuate the vacuum chamber;

[0036] The opening time of the first solenoid valve or the second solenoid valve is alternately controlled to allow the medicine to flow out of the medicine tank.

[0037] As a specific embodiment, the flow rate of the outflowing agent entering the evaporation mechanism is controlled according to the coating process time and dosage, including:

[0038] Set the calibration dosage of the coating process;

[0039] The amount of drops of the agent entering the evaporation mechanism is calculated according to the calibrated dosage.

[0040] As a specific embodiment, the first solenoid valve and the second solenoid valve are Takasago solenoid valves.

[0041] As a specific embodiment, it also includes installing a quick-plug interface on the medicine tank to alternately use multiple medicine tanks.

[0042] As a specific embodiment, it also includes designing multiple pipelines and using different medicine tanks at the same time.

[0043] Please refer to Figure 1 The present invention utilizes the vacuum negative pressure principle. When the tube cavity is in a vacuum state, the solenoid valve A is opened, and the tube between the solenoid valves A and B will be in a vacuum state. If there is medicine in the tube, it will be sucked into the cavity and flow to the evaporation plate for evaporation.

[0044] The working principle of the present invention is: when the process is started, the solenoid valve A is opened for 0.1S (the time is adjustable) and then closed, and the reagent in the pipe between A and B will be sucked onto the evaporation plate. When the solenoid valve A is closed and the solenoid valve B is opened for 0.1S (the time is adjustable) and then closed, the reagent in the reagent tank will be sucked into the pipe between A and B, and the cycle will continue.

[0045] As a specific embodiment, a high-sand electromagnetic valve is used, which can withstand the corrosion of chemical agents, has high safety, and has low failure rate and cost.

[0046] As a specific embodiment, the diameter of the tube on the pipeline should be small, preferably less than 3 mm, so that the amount of medicine flowing in is small and the impact on the vacuum value of the cavity is small.

[0047] As a specific example, the dosage is calibrated and the dosage is controlled by using PLC arithmetic instructions. For example, 0.1S is calibrated to 0.1ML, the process time is 60min, and the dosage is 10L (10L / 0.1ML=100ML, 600S / 100ML=6), which means dripping once every 6S.

[0048] By adopting the present invention, the medicine and heating are separated to prevent the medicine from being deteriorated and ineffective due to long-term heating. In addition, the dosage can be accurately controlled, and the cleaning and replacement of the medicine are convenient. The medicine tank can be designed as a quick-plug interface, so that multiple medicine tanks can be used alternately.

[0049] Design a multi-channel medicine tank to achieve mixed use of multiple medicines.

[0050] As a specific embodiment, the method of the present invention also includes:

[0051] Turn on the main control switch of the equipment and start the vacuum pump to evacuate the chamber to 5×10-4Pa;

[0052] Introduce inert gas (Ar gas), turn on the ion source, and clean the entire chamber and sample surface;

[0053] Match the frequency and voltage of the ion source to produce a stable plasma;

[0054] Turn on the substrate heating system to allow the substrate to reach the reaction temperature;

[0055] When the substrate reaches the reaction temperature, the evaporation source and the cracker are heated to a certain temperature respectively;

[0056] Under the control of the differential system, high-purity hydrogen is introduced into the gas inlet, and the evaporated source material is transported into the plasma glow area to start the film growth;

[0057] After a certain growth period, all heating and ion sources are turned off to terminate the film growth;

[0058] After the substrate temperature reaches room temperature, the ventilation is terminated, and the entire sample preparation process is completed.

[0059] One end of the medicine tank body of the present invention is a manual valve, and the other end of the medicine tank body opposite to the manual valve is provided with a quick connector.

[0060] As a specific embodiment, the present invention provides a one-way valve in the vacuum cavity, and the one-way valve is located inside the hollow body outside the cavity connected to the cavity. The interior of the cavity is connected to the interior of the hollow body outside the cavity through the one-way valve for gas exchange. A piston is provided inside the hollow body outside the cavity. The piston is in sealing contact with the inner wall of the hollow body outside the cavity. The gas inside the cavity is discharged by the movement of the piston inside the hollow body outside the cavity, thereby achieving the purpose of vacuum negative pressure.

[0061] As a specific embodiment, the method of using vacuum negative pressure to establish a pipeline for the medicine to flow out of the medicine tank includes:

[0062] The outlet of the medicine tank is connected to the vacuum chamber using a thin tube with a first solenoid valve and a second solenoid valve spaced a certain distance apart;

[0063] Turning on the vacuum pump to evacuate the vacuum chamber;

[0064] The opening time of the first solenoid valve or the second solenoid valve is alternately controlled to allow the medicine to flow out of the medicine tank.

[0065] As a specific embodiment, the flow rate of the outflowing agent entering the evaporation mechanism is controlled according to the coating process time and dosage, including:

[0066] Set the calibration dosage of the coating process;

[0067] The amount of drops of the agent entering the evaporation mechanism is calculated according to the calibrated dosage.

[0068] As a specific embodiment, the first solenoid valve and the second solenoid valve are Takasago solenoid valves.

[0069] As a specific embodiment, it also includes installing a quick-plug interface on the medicine tank to alternately use multiple medicine tanks.

[0070] As a specific embodiment, it also includes designing multiple pipelines and using different medicine tanks at the same time.

[0071] Please refer to Figure 1 The present invention utilizes the vacuum negative pressure principle. When the tube cavity is in a vacuum state, the solenoid valve A is opened, and the tube between the solenoid valves A and B will be in a vacuum state. If there is medicine in the tube, it will be sucked into the cavity and flow to the evaporation plate for evaporation.

[0072] The working principle of the present invention is: when the process is started, the solenoid valve A is opened for 0.1S (the time is adjustable) and then closed, and the reagent in the pipe between A and B will be sucked onto the evaporation plate. When the solenoid valve A is closed and the solenoid valve B is opened for 0.1S (the time is adjustable) and then closed, the reagent in the reagent tank will be sucked into the pipe between A and B, and the cycle will continue.

[0073] As a specific embodiment, a high-sand electromagnetic valve is used, which can withstand the corrosion of chemical agents, has high safety, and has low failure rate and cost.

[0074] As a specific embodiment, the diameter of the tube on the pipeline should be small, preferably less than 3 mm, so that the amount of medicine flowing in is small and the impact on the vacuum value of the cavity is small.

[0075] As a specific example, the dosage is calibrated and the dosage is controlled by using PLC arithmetic instructions. For example, 0.1S is calibrated to 0.1ML, the process time is 60min, and the dosage is 10L (10L / 0.1ML=100ML, 600S / 100ML=6), which means dripping once every 6S.

[0076] It should be clear that the present invention is not limited to the specific configuration and processing described above and shown in the figures. For the sake of simplicity, a detailed description of the known method is omitted here. In the above embodiments, several specific steps are described and shown as examples. However, the method process of the present invention is not limited to the specific steps described and shown, and those skilled in the art can make various changes, modifications and additions, or change the order between the steps after understanding the spirit of the present invention.

Claims

1. A method for realizing an evaporation source of a PECVD coating machine, characterized in that: include: Put the evaporation source reagent into the reagent tank according to the preset process parameters; Using vacuum negative pressure to establish a pipeline for the medicine to flow out of the medicine tank; The amount of the outflowing reagent that drops into the evaporation mechanism is controlled according to the coating process time and dosage.

2. The method for realizing the evaporation source of the PECVD coating machine according to claim 1, characterized in that: The method of using vacuum negative pressure to establish a pipeline for the medicine to flow out of the medicine tank includes: The outlet of the medicine tank is connected to the vacuum chamber using a thin tube with a first solenoid valve and a second solenoid valve spaced a certain distance apart; Turning on the vacuum pump to evacuate the vacuum chamber; The opening time of the first solenoid valve or the second solenoid valve is alternately controlled to allow the medicine to flow out of the medicine tank.

3. The method for realizing the evaporation source of the PECVD coating machine according to claim 1, characterized in that: The method of controlling the flow rate of the outflowing agent into the evaporation mechanism according to the coating process time and dosage includes: Set the calibration dosage of the coating process; The amount of drops of the agent entering the evaporation mechanism is calculated according to the calibrated dosage.

4. The method for realizing the evaporation source of the PECVD coating machine according to claim 1, characterized in that: The first solenoid valve and the second solenoid valve are Takasago solenoid valves.

5. The method for realizing the evaporation source of the PECVD coating machine according to claim 1, characterized in that: It also includes installing a quick-insert interface on the medicine tank to alternately use multiple medicine tanks.

6. The method for realizing the evaporation source of the PECVD coating machine according to claim 1, characterized in that: It also includes designing multiple pipelines and using different pharmaceutical tanks at the same time.

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