Turnover mechanism, machining device and machining method

Abstract

The invention provides a turnover mechanism, a machining device and a machining method.The turnover mechanism comprises a mounting frame, a first turnover assembly and a second turnover assembly, the first turnover assembly and the second turnover assembly are mounted on the mounting frame, the first turnover assembly comprises a turnover power part, a first transmission part and a first connecting part, and the second turnover assembly comprises a second transmission part and a second connecting part; the first connecting part and the second connecting part are arranged in a spaced mode and used for enabling a product to be connected between the first connecting part and the second connecting part, the overturning power piece is connected with the first transmission part, the first transmission part is connected with the first connecting part, the first transmission part is connected with the second transmission part, and the second transmission part is connected with the second connecting part. And the overturning power piece drives the first connecting part and the second connecting part to rotate synchronously. The turnover mechanism can drive the product to rotate, so that the current target machining surface of the product reaches the preset machining position, and the machining efficiency and the product yield can be improved.

Description

Technical Field

[0001] The present application relates to the field of semiconductor processing technology, and in particular to a flipping mechanism, a processing device and a processing method. Background Art

[0002] When processing semiconductors, it is necessary to fix the semiconductor device to the processing device. If the current target processing surface of the fixed semiconductor is not in the appropriate processing position, it is necessary to re-flip the semiconductor, that is, remove the semiconductor from the processing device, readjust the angle, and then place it on the processing device, resulting in low semiconductor processing efficiency and low yield. In view of this, how to improve the processing efficiency and yield of semiconductors is a technical problem that needs to be solved by technical personnel in this field. Summary of the invention

[0003] In order to solve the above technical problems, the present application provides a flipping mechanism, which includes a mounting frame and a first flipping assembly and a second flipping assembly installed on the mounting frame, the first flipping assembly includes a flipping power piece, a first transmission part and a first connecting part, the second flipping assembly includes a second transmission part and a second connecting part, the first connecting part and the second connecting part are arranged at intervals to connect the product between the first connecting part and the second connecting part, the flipping power piece is connected to the first transmission part, the first transmission part is connected to the first connecting part, the first transmission part is connected to the second transmission part, and the second transmission part is connected to the second connecting part, so that the flipping power piece drives the first connecting part and the second connecting part to rotate synchronously.

[0004] In one embodiment of the flipping mechanism, the flipping power component is a rotating motor, the first transmission part includes a first pulley assembly, a second pulley assembly and a first transmission shaft, the second transmission part includes a third pulley assembly, the rotating motor is connected to the first transmission shaft through the first pulley assembly, the first transmission shaft is connected to the first connection part through the second pulley assembly, and the first transmission shaft is also connected to the second connection part through the third pulley assembly.

[0005] In one implementation manner of the flip mechanism, a first support and a second support are provided on both sides of the mounting frame, the first flip assembly is mounted on the first support, and the second flip assembly is mounted on the second support.

[0006] In one embodiment of the flipping mechanism, the second transmission part includes a third transmission shaft, the first transmission shaft is rotatably inserted in the first support, the third transmission shaft is rotatably inserted in the second support, the third transmission shaft serves as the input shaft of the third pulley assembly, and one end of the third transmission shaft is coaxially connected to one end of the first transmission shaft via a coupling located between the first support and the second support.

[0007] In one embodiment of the flipping mechanism, the first connecting portion is installed on a side of the upper part of the first support close to the second support, the first pulley assembly is installed on a side of the lower part of the first support close to the second support, the second pulley assembly is installed on a side of the first support away from the second support, the second connecting portion is installed on a side of the upper part of the second support close to the first support, and the third pulley assembly is installed on a side of the second support away from the first support.

[0008] In one embodiment of the flipping mechanism, the mounting frame includes a base plate, which is fixed to the bottom ends of the first support and the second support, and at least one of the first support and the second support can slide relative to the base plate to adjust the distance between the first support and the second support.

[0009] In one embodiment of the flipping mechanism, the first connecting part and the second connecting part both include a clamping power member and two mutually cooperating clamping plates, and the clamping power member drives the two mutually cooperating clamping plates to move closer to each other to clamp the product or move away from each other to release the product.

[0010] In one embodiment of the flipping mechanism, a plurality of elastic centering units are connected between the two clamping plates of the first connecting part and between the two clamping plates of the second connecting part, and the elastic centering units of the first connecting part and the elastic centering units of the second connecting part cooperate to center the product between the first connecting part and the second connecting part, and the elastic centering units of the first connecting part are arranged in sequence along a first direction, and the elastic centering units of the second connecting part are arranged along a second direction, and the first direction and the second direction are parallel to each other and perpendicular to the spacing arrangement direction of the first connecting part and the second connecting part.

[0011] In one embodiment of the flipping mechanism, the two clamping plates of the first connecting part and the two clamping plates of the second connecting part both have a clamping surface for contacting the product, and each of the elastic centering units of the first connecting part is located on the side of its clamping surface away from the second connecting part, and each of the elastic centering units of the second connecting part is located on the side of its clamping surface away from the first connecting part.

[0012] In one embodiment of the flipping mechanism, grooves are provided between the two clamping plates of the first connecting part and between the two clamping plates of the second connecting part, the groove of the first connecting part is located on the side of its clamping surface away from the second connecting part, and the groove of the second connecting part is located on the side of its clamping surface away from the first connecting part, and the groove is used to accommodate the elastic centering unit connected to the clamping plate where the groove is located, and is also used to accommodate the elastic centering unit connected to the clamping plate that cooperates with the clamping plate where the groove is located.

[0013] In one embodiment of the flipping mechanism, the elastic centering unit includes at least a rotating member, a guide member and an elastic member, the surface of the rotating member is used for rolling contact with one side edge of the product, the guide member guides the rotating member to move relative to the clamping plate toward or away from the product, and when the rotating member moves away from the product, it presses against the elastic member to increase the compression of the elastic member.

[0014] In one embodiment of the flipping mechanism, the rotating member is a bearing, and the bearing is rotatably connected to a slider. The outer peripheral surface of the bearing is used for rolling contact with one side edge of the product. The guide member is a guide rod, and the slider is slidably mounted on the outer periphery of the guide rod. The slider slides along the guide rod to drive the bearing to slide toward or away from the product.

[0015] In one embodiment of the flipping mechanism, a product inlet is formed between one end of the two clamps of the first connecting part and a product outlet is formed between the other ends, and a product inlet is formed between one end of the two clamps of the second connecting part and a product outlet is formed between the other ends, so that the product enters the gap between the two mating clamps from the product inlet and leaves the gap between the two mating clamps from the product outlet.

[0016] An embodiment of the flipping mechanism, the flipping mechanism also includes a product guide member and a product outlet member, the product guide member and the product outlet member are installed on the mounting frame, the product guide member is used to guide the product from the product inlet in parallel into the gap between the two mutually fitting splints, and the product outlet member is used to guide the product from the product outlet in parallel to leave the gap between the two mutually fitting splints.

[0017] The present application also provides a processing device, which includes the flipping mechanism described in any one of the above items, and the flipping mechanism can flip the target processing surface of the product to a preset processing position so that the processing device can process the target processing surface.

[0018] An embodiment of the processing device, the processing device also includes a lighting mechanism, the lighting mechanism is located below the flipping mechanism, the lighting mechanism includes a light source, a light source bracket and a lifting power member, the light source is connected to the light source bracket, the light source bracket cooperates with the mounting frame guide of the flipping mechanism, and the lifting power member can drive the light source bracket to rise and fall relative to the mounting frame to drive the light source to approach or move away from the product connected to the flipping mechanism.

[0019] The present application also provides a processing method, which is implemented based on the above-mentioned processing device with a code scanning mechanism, and includes the following steps: a flipping mechanism is connected to the product to be processed, and identifies the surface of the product that is currently located at a preset processing position. If the surface of the product that is currently located at the preset processing position is not the current target processing surface, the flipping power part of the flipping mechanism is started to flip the product until the current target processing surface is located at the preset processing position. Before flipping, the lifting power part of the lighting mechanism is started to drive the light source to descend to a position that does not interfere with the flipping of the product. After the current target processing surface of the product is flipped to the preset processing position, the lifting power part of the lighting mechanism is started to drive the light source to rise to a position close to the product.

[0020] When processing products, the products are connected using the flipping mechanism provided in the present application. If the current target processing surface of the connected product is not in the preset processing position, the flipping power part can be started to drive the product to rotate until the current target processing surface of the product reaches the preset processing position. There is no need to remove the product from the flipping mechanism and readjust the angle before placing it on the flipping mechanism (i.e., there is no need to pour the material), which saves pouring time and avoids product damage during the pouring process, thereby improving processing efficiency and product yield. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 A three-dimensional diagram of an embodiment of the flipping mechanism provided by the present application;

[0022] Figure 2 for Figure 1 A three-dimensional view of the structure on the middle right;

[0023] Figure 3 for Figure 2 Another perspective of the picture;

[0024] Figure 4 for Figure 1 A three-dimensional view of the structure on the left side of the center;

[0025] Figure 5 for Figure 4 Another perspective of the picture;

[0026] Figure 6 for Figure 1 A three-dimensional diagram of the first connecting portion;

[0027] Figure 7 for Figure 6 Another perspective of the picture;

[0028] Figure 8 for Figure 6 A three-dimensional diagram of a splint and an elastic centering unit connected to the splint;

[0029] Fig. 9 is a stereogram of a single elastically centered unit;

[0030] Fig.10 A three-dimensional diagram of an embodiment of a processing device provided in the present application;

[0031] Fig.11 A three-dimensional diagram of the bottom plate of the flip mechanism and the lighting mechanism;

[0032] Fig.12 for Fig.10 The main view of

[0033] Fig.13 for Fig.10 A top view of

[0034] Fig.14 for Fig.10 Right view of;

[0035] Fig.15 for Fig.10 Left view of .

[0036] The following are the descriptions of the reference numerals:

[0037] 01Product;

[0038] 100 flip mechanism;

[0039] 101 first support, 101a first support part, 101b third support part, 102 second support, 102a second support part, 102b fourth support part, 103 bottom plate, 103a long hole, 104 turning power part, 105 first pulley assembly, 106 second pulley assembly, 107 third pulley assembly, 108 first transmission shaft, 109 second transmission shaft, 110 third transmission shaft, 111 fourth transmission shaft, 112 coupling, 113 clamping power part, 113a coupling hole, E clamping plate, 114 clamping plate body, 1 14a clamping surface, 114b groove, 115 clamping plate cover, 116 connecting block, 117 limiting assembly, 117a limiting block, 117b limiting screw, 118 elastic centering unit, 118a bearing, 118b slider, 118c guide rod, 118d elastic member, 118e screw, 119 first guide rail, 120 second guide rail, 121 third guide rail, 122 fourth guide rail, 123 first cover, 124 second cover, A first connecting portion, B second connecting portion, C first flip assembly, D second flip assembly;

[0040] 200 lighting institutions;

[0041] 201 light source, 202 light source bracket, 202a upper support plate, 202b guide column, 202c lower support plate, 203 lifting power member;

[0042] 300 code scanning agencies;

[0043] 301 barcode scanner, 302 barcode scanner bracket, 302a horizontal axis, 302b transfer arm, 302c horizontal support arm, 302d vertical support arm. DETAILED DESCRIPTION

[0044] The present application provides a turning mechanism, a processing device and a processing method. In order to enable those skilled in the art to better understand the technical solution of the present application, the present application is further described in detail below in conjunction with the accompanying drawings and specific implementation methods.

[0045] like Figure 1 As shown, the flip mechanism 100 provided in the present application includes a mounting frame and a first flip assembly C and a second flip assembly D mounted on the mounting frame. In one embodiment, a first support 101 and a second support 102 are respectively provided on opposite sides of the mounting frame, the first flip assembly C is mounted on the first support 101, and the second flip assembly D is mounted on the second support 102.

[0046] The first flip assembly C includes a flip power member 104 , a first transmission part and a first connection part A, and the second flip assembly D includes a second transmission part and a second connection part B.

[0047] The flipping power member 104 is connected to the first transmission part, and the first transmission part is connected to the first connection part A. After the flipping power member 104 is started, the flipping power is transmitted to the first connection part A through the first transmission part to drive the first connection part A to rotate.

[0048] The first transmission part is connected to the second transmission part, and the second transmission part is connected to the second connection part B. After the flipping power part 104 is started, the flipping power is transmitted to the second transmission part through the first transmission part, and then transmitted to the second connection part B through the second transmission part to drive the second connection part B to rotate.

[0049] The first connection part A and the second connection part B are arranged at intervals so that the product can be connected between the first connection part A and the second connection part B. When the first connection part A and the second connection part B rotate under the driving action of the flip driving member, the connected product is driven to rotate together. After the flip driving member is turned off, the position of the first connection part A, the position of the second connection part B and the position of the product are fixed and no longer rotate.

[0050] When processing products, the products are connected with the above-mentioned flipping mechanism 100. If the current target processing surface of the connected product is not in the preset processing position, the flipping power part 104 can be started to drive the product to rotate until the current target processing surface of the product reaches the preset processing position. There is no need to remove the product from the flipping mechanism 100 and readjust the angle before placing it on the flipping mechanism 100 (i.e., there is no need to unload the product). This saves unloading time and avoids product damage caused by the unloading process, thereby improving processing efficiency and product yield.

[0051] In the illustrated embodiment, the turning power member 104 is a rotating motor. Figure 2 and Figure 3 As shown, the first transmission part includes a first pulley assembly 105, a second pulley assembly 106, a first transmission shaft 108 and a second transmission shaft 109. Figure 4 and Figure 5 As shown, the second transmission part includes a third pulley assembly 107 , a third transmission shaft 110 and a fourth transmission shaft 111 .

[0052] The first pulley assembly 105 , the second pulley assembly 106 and the third pulley assembly 107 each include at least an input wheel, an output wheel and a transmission belt wound around the input wheel and the output wheel, and a tensioning wheel may be optionally provided.

[0053] like Figure 2 and Figure 3 As shown, the rotating motor is connected to the first transmission shaft 108 through the first pulley assembly 105, and the first transmission shaft 108 is connected to the first connecting portion through the second pulley assembly 106. Specifically, in the illustrated embodiment, the rotating output shaft of the rotating motor is coaxially connected to the input wheel of the first pulley assembly 105, and the output wheel of the first pulley assembly 105 is coaxially connected to the first transmission shaft 108, and the first transmission shaft 108 serves as the output shaft of the first pulley assembly 105. The first transmission shaft 108 is rotatably inserted in the first support 101. The output wheel of the second pulley assembly 106 is connected to the first connecting portion A through the second transmission shaft 109. The second transmission shaft 109 is rotatably inserted in the first support 101. After the rotating motor is started, power is transmitted from the rotating output shaft of the rotating motor to the input wheel of the first pulley assembly 105, and then to the output wheel of the first pulley assembly 105, and then to the input wheel of the second pulley assembly 106 through the first transmission shaft 108, and then to the output wheel of the second pulley assembly 106, and then to the first connecting part A through the second transmission shaft 109, driving the first connecting part A to rotate.

[0054] like Figure 4 and Figure 5As shown, the first transmission shaft 108 is transmission-connected with the second connection part B through the third pulley assembly 107. Specifically in the illustrated embodiment: the input wheel of the third pulley assembly 107 is coaxially connected with the third transmission shaft 110. The third transmission shaft 110 is rotatably inserted in the second support 102. One end of the third transmission shaft 110 is coaxially connected with one end of the first transmission shaft 108 through a coupling 112, and the coupling 112 is located between the first support 101 and the second support 102. The output wheel of the third pulley assembly 107 is connected with the second connection part B through a fourth transmission shaft 111. The fourth transmission shaft 111 of the second connection part B is rotatably inserted in the second support 102. After the rotating motor is started, power is transmitted from the rotating output shaft of the rotating motor to the input wheel of the first pulley assembly 105, then to the output wheel of the first pulley assembly 105, then to the first transmission shaft 108, then to the third transmission shaft 110, then to the input wheel of the third pulley assembly 107, then to the output wheel of the third pulley assembly 107, and then to the second connection part B through the fourth transmission shaft 111, driving the second connection part B to rotate.

[0055] As an alternative, the first transmission shaft 108 and the third transmission shaft 110 may also be the same shaft, one end of which is inserted into the first support 101 , and the other end of which is inserted into the second support 102 .

[0056] The above structure realizes the synchronous rotation of the first connecting part A and the second connecting part B with only one motor, and the structure is simple, reliable and low in cost.

[0057] In actual implementation, the turning power member 104 can provide a rotational driving force, such as a rotary cylinder. The first transmission part and the second transmission part can transmit the rotational driving force to the first connection part A and the second connection part B, such as a sprocket assembly or a gear assembly.

[0058] In the illustrated embodiment, the first connection part A is installed on the upper side of the first support 101 close to the second support 102, the first pulley assembly 105 is installed on the lower side of the first support 101 close to the second support 102, and the second pulley assembly 106 is installed on the side of the first support 101 away from the second support 102. The second connection part B is installed on the upper side of the second support 102 close to the first support 101, and the third pulley assembly 107 is installed on the side of the second support 102 away from the first support 101. With this design, the first pulley assembly 105, the second pulley assembly 106 and the third pulley assembly 107 will not interfere with the rotation of the first connection part A, the second connection part B and the product, and the overall layout is compact, so that the overall volume of the flip mechanism 100 is small.

[0059] In the illustrated embodiment, the first flip assembly C and the second flip assembly D are further provided with a first cover 123 and a second cover 124, respectively. The first cover 123 is connected to a side of the first support 101 away from the second support 102, and covers the second pulley assembly 106. The second cover 124 is connected to a side of the second support 102 away from the first support 101, and covers the third pulley assembly 107.

[0060] The mounting frame can also be selectively provided with a bottom plate 103. The bottom plate 103 is fixed to the bottom ends of the first support 101 and the second support 102, so that the first support 101 and the second support 102 are connected together through the bottom plate 103, so that the entire flip mechanism 100 becomes a whole, thereby facilitating installation and transportation. In addition, at least one of the first support 101 and the second support 102 can be selectively slid relative to the bottom plate 103 to adjust the distance between the first support 101 and the second support 102, more specifically, to adjust the distance between the first connection part A and the second connection part B, so that the first connection part A and the second connection part B can cooperate to connect products of different sizes. Specifically, when connecting a smaller product, the distance between the first connection part A and the second connection part B is reduced, and when connecting a larger product, the distance between the first connection part A and the second connection part B is increased.

[0061] In the illustrated embodiment, the first support 101 and the second support 102 can both slide relative to the base plate 103, so that when adjusting the distance between the first support 101 and the second support 102, the first support 101 and the second support 102 can be synchronously approached or synchronously moved away, so that the distance between the first support 101, the second support 102 and the center of the base plate 103 can always be kept consistent.

[0062] In the illustrated embodiment, a long hole 103a is provided on the base plate 103, and the first support 101 and the second support 102 are connected to the base plate 103 by means of a threaded fastener passing through the long hole 103a. After loosening the threaded fastener, the first support 101 and the second support 102 can slide along the length direction of the long hole 103a. After tightening the threaded fastener, the first support 101 and the second support 102 are fixed relative to the base plate 103.

[0063] In actual implementation, the structure for fixing and relatively sliding the first support 101, the second support 102 and the base plate 103 is not limited to the above-mentioned long holes 103a and threaded fasteners. For example, a slide rail and a slider may also be provided on the base plate 103, the first support 101 and the second support 102 are fixed to the slider, and a plurality of spring connecting pins are sequentially arranged at intervals along the length direction of the slide rail. When the slider slides to the position corresponding to the spring connecting pin along the length direction of the slide rail, it is fixed under the stopping action of the corresponding spring connecting pin.

[0064] In the illustrated embodiment, Figure 6 and Figure 7 As shown, the first connection part A and the second connection part B each include a clamping power member 113 and two clamping plates E that cooperate with each other. The clamping plate E is connected to the clamping power member 113 through a connecting block 116. The clamping power member 113 drives the two clamping plates E that cooperate with each other to move closer to each other to clamp the product or move away from each other to loosen the product. When connecting the product, one side of the product is located between the two clamping plates E of the first connection part A and is clamped by the two clamping plates E of the first connection part A, and the other side of the product is located between the two clamping plates E of the second connection part B and is clamped by the two clamping plates E of the second connection part B.

[0065] In actual implementation, the first connection part A and the second connection part B are not limited to the above-mentioned clamping structure, as long as they can ensure that the connected product does not fall off during rotation. For example, the first connection part A and the second connection part B can also be a suction cup structure. The clamping power member 113 can be a cylinder, a hydraulic cylinder, a motor, etc.

[0066] In the illustrated embodiment, the first connection portion A and the second connection portion B further include a limiting assembly 117, which includes a limiting block 117a and a limiting screw 117b, wherein the limiting screw 117b is connected to the limiting block 117a. When the two mutually matched clamping plates E are separated from each other to a limit, the two clamping plates E abut against the limiting screw 117b, that is, the limiting screw 117b limits the limit separation of the two mutually matched clamping plates E. By adjusting the screwing depth of the limiting screw 117b relative to the limiting block 117a, the limit separation of the two mutually matched clamping plates E can be adjusted.

[0067] In the illustrated embodiment, Figure 8 As shown, a plurality of elastic centering units 118 are connected between the two clamping plates E of the first connection part A and between the two clamping plates E of the second connection part B. The elastic centering units 118 of the first connection part A are arranged in sequence along the first direction, and the elastic centering units 118 of the second connection part B are also arranged in sequence along the first direction. Figure 1 As shown, the first direction is perpendicular to the spacing arrangement direction of the first connection parts A and the second connection parts B.

[0068] The two clamping plates E of the first connection part A and the two clamping plates E of the second connection part B both have a clamping surface 114a for contacting the product. Each elastic centering unit 118 of the first connection part A is located on the side of the clamping surface 114a of the clamping plate E of the first connection part A away from the second connection part B, and each elastic centering unit 118 of the second connection part B is located on the side of the clamping surface 114a of the clamping plate E of the second connection part B away from the first connection part A.

[0069] When both sides of the product are respectively located between the two clamps E of the first connection part A and between the two clamps E of the second connection part B, the two side edges of the product are respectively in contact with the elastic centering unit 118 of the first connection part A and the elastic centering unit 118 of the second connection part B. The elastic centering unit 118 of the first connection part A and the elastic centering unit 118 of the second connection part B cooperate to center the product between the first connection part A and the second connection part B.

[0070] Specifically, Fig. 9 As shown, the elastic centering unit 118 at least includes a rotating member (118a in the figure), a guide member (118c in the figure) and an elastic member 118d. The surface of the rotating member is used to roll with the edge of one side of the product. When the product enters and exits the gap between the two clamping plates E, the rotating member can play a conveying role and will not scratch the product. The guide member guides the rotating member to move toward or away from the product relative to the clamping plate E. When the rotating member moves in the direction away from the product, it presses against the elastic member 118d, so that the compression amount of the elastic member 118d increases.

[0071] In the illustrated embodiment, the rotating member of the elastic centering unit 118 is a bearing 118a, which is rotatably connected to a slider 118b (connected by a screw 118e in the figure), and the outer peripheral surface of the bearing 118a is used to contact one side edge of the product. The guide member is a guide rod 118c, and the slider 118b is slidably sleeved on the outer periphery of the guide rod 118c. The slider 118b slides along the guide rod 118c to drive the bearing 118a to slide in a direction close to or away from the product. The elastic member 118d is arranged between the side of the slider 118b away from the product and the clamping plate E.

[0072] In actual implementation, the rotating member of the elastic centering unit 118 is not limited to the bearing 118a, and the guiding member is not limited to the guide rod 118c. For example, the rotating member can also be a ball, and the guiding member can also be a ball slide pre-opened on the clamping plate E.

[0073] If the product is biased toward the first connection part A, it will push the bearing 118a of the elastic centering unit 118 of the first connection part A to slide away from the product, so that the slider 118b compresses the elastic member 118d, causing the bearing 118a of the elastic centering unit 118 of the first connection part A to slide toward the product under the elastic force of the elastic member 118d, thereby pushing the product to move toward the second connection part B, thereby achieving product centering.

[0074] Similarly, if the product is biased toward the second connection part B, it will push the bearing 118a of the elastic centering unit 118 of the second connection part B to slide away from the product, so that the slider 118b compresses the elastic member 118d, causing the bearing 118a of the elastic centering unit 118 of the second connection part B to slide toward the product under the elastic force of the elastic member 118d, thereby pushing the product to move toward the first connection part A, thereby achieving product centering.

[0075] In the illustrated embodiment, Figure 6 As shown, the two mutually cooperating clamping plates E are each connected with six elastic centering units 118 ( Figure 6 In the figure, twelve guide rods 118c of the elastic centering units 118 can be seen, and the elastic centering units 118 connected to one and the elastic centering units 118 connected to the other are staggered in the first direction. In actual implementation, only one of the two mutually matched clamping plates E may be connected to the elastic centering unit 118. Figure 7 As shown, the clamping power member 113 is provided with a connecting hole 113a for connecting the transmission shaft.

[0076] In the illustrated embodiment, Figure 8 As shown, two mutually matched clamping plates E are provided with a groove 114b, and the groove 114b is located on the side of the clamping surface 114a away from the product. The groove 114b is used to accommodate the elastic centering unit 118, which can accommodate not only the elastic centering unit 118 connected to the clamping plate E where the groove 114b is located, but also the elastic centering unit 118 connected to another clamping plate E that matches the clamping plate E where the groove 114b is located, that is, when the two mutually matched clamping plates E clamp the product, the elastic centering unit 118 connected to one can enter the groove 114b of the other.

[0077] In the illustrated embodiment, Figure 8 As shown, the clamp E is configured to include a clamp body 114 and a clamp cover 115 assembled with the clamp body 114. The groove 114b and the clamping surface 114a are both provided on the clamp body 114. The groove 114b forms an opening on the side away from the clamping surface 114a, and the clamp cover 115 closes the opening. One end of the guide rod 118c is inserted into the clamp body 114, and the other end is inserted into the clamp cover 115, so that it is convenient to assemble the elastic centering unit 118 with the clamp E. During assembly, the elastic centering unit 118 can be assembled with the clamp body 114 first, and then the clamp cover 115 can be assembled. Specifically, the connection mode of the clamp cover 115 and the clamp body 114 is preferably a detachable connection mode to facilitate the replacement of the elastic centering unit 118, for example, it can be connected by a snap connection or a threaded fastener.

[0078] In the illustrated embodiment, Figure 2As shown, a product inlet (indicated by I in the figure) is formed between one end of the two clamping plates E of the first connecting part A, and a product outlet (indicated by X in the figure) is formed between the other ends. Figure 4 As shown, a product inlet (indicated by I in the figure) is formed between one end of the two clamping plates E of the second connection part B, and a product outlet (indicated by X in the figure) is formed between the other ends. The product enters the gap between the two mutually matched clamping plates E from the product inlet, and this process is called product feeding. The product leaves the gap between the two mutually matched clamping plates E from the product outlet, and this process is called product discharging. With this design, product feeding and product discharging can be carried out simultaneously, which is more conducive to improving product connection efficiency.

[0079] In the illustrated embodiment, the turnover mechanism 100 further includes a product guide and a product outlet. The product guide and the product outlet are mounted on a mounting frame. The product guide is used to guide the product from the product inlet to enter the gap between the two mutually matched clamping plates E in parallel, and the product outlet is used to guide the product to leave the gap between the two mutually matched clamping plates E in parallel, so as to avoid the product being scratched by the two mutually matched clamping plates E when the product is in and out.

[0080] In the illustrated embodiment, Figure 2-Figure 5 As shown, the product guide member includes a first guide rail 119 and a second guide rail 120, and the product outlet member includes a third guide rail 121 and a fourth guide rail 122. The first support 101 is provided with a first supporting portion 101a and a third supporting portion 101b on both sides, and the first supporting portion 101a and the third supporting portion 101b respectively support and fix the first guide rail 119 and the third guide rail 121. The second support 102 is provided with a second supporting portion 102a and a fourth supporting portion 102b on both sides, and the second supporting portion 102a and the fourth supporting portion 102b respectively support and fix the second guide rail 120 and the fourth guide rail 122.

[0081] like Fig.10 As shown, the processing device provided by the present application includes the above-mentioned flipping mechanism 100, which can flip the current target processing surface of the product to the preset processing position. When processing the product, the product is connected with the above-mentioned flipping mechanism 100. If the current target processing surface of the connected product is not in the preset processing position, the flipping power part can be started to drive the product to rotate until the current target processing surface of the product reaches the preset processing position, and then the product is processed without removing the product from the flipping mechanism 100 and re-adjusting the angle before placing it on the flipping mechanism 100 (i.e., there is no need to unload the material), which saves unloading time and avoids product damage caused by the unloading process, thereby improving processing efficiency and product yield.

[0082] For example, if the product is a semiconductor wafer, the processing device may be a splitter. When the wafer needs to be split on the front side, the front side of the wafer is rotated to an upward position, and when the wafer needs to be split on the back side, the back side of the wafer is rotated to an upward position. It should be noted that the flip mechanism 100 and the processing device provided in the present application are not limited to semiconductor processing.

[0083] In the illustrated embodiment, the processing device further includes an illumination mechanism 200. The illumination mechanism 200 is located below the flip mechanism 100, and includes a light source 201, a light source bracket 202, and a lifting power member 203. The light source 201 is connected to the light source bracket 202. The light source bracket 202 cooperates with the guide of the mounting frame of the flip mechanism 100, and the lifting power member 203 is used to drive the light source bracket 202 to rise and fall relative to the mounting frame, so as to drive the light source 201 to approach or move away from the product connected to the flip mechanism 100. In this design, the flip mechanism 100 and the illumination mechanism 200 are arranged in an up-and-down manner, so that the processing device occupies a small area, and before the flip mechanism 100 flips the product, the lifting power member 203 can be started to drive the light source 201 to descend to a position that does not interfere with the flipping of the product. After the target processing surface of the product is flipped to the preset processing position, the lifting power member 203 is started again to drive the light source 201 to rise to a position close to the product.

[0084] In the illustrated embodiment, Fig.11 As shown, the light source bracket 202 includes an upper support plate 202a, a guide post 202b and a lower support plate 202c. The guide post 202b is connected between the upper support plate 202a and the lower support plate 202c. The guide post 202b is inserted into the guide hole on the mounting frame of the flip mechanism 100. More specifically, when the mounting frame is provided with a bottom plate 103, the guide hole can be set on the bottom plate 103. The light source 201 is connected to the upper support plate 202a. The lifting power member 203 is a cylinder, including a cylinder body and a cylinder rod. The cylinder rod is connected to the mounting frame. More specifically, when the mounting frame is provided with a bottom plate 103, it can be connected to the bottom plate 103 of the mounting frame, and the cylinder body is connected to the lower support plate 202c. After the lifting power member 203 is started, the cylinder body rises and falls relative to the cylinder rod, driving the lower support plate 202c to rise and fall, and then driving the entire light source bracket 202 and the light source 201 to rise and fall together.

[0085] In actual implementation, the structure of the light source bracket 202 is not limited to the illustrated embodiment, as long as it can connect the light source 201 and the lifting power member 203 and can cooperate with the guide of the mounting frame. The lifting power member 203 is not limited to a cylinder, and can also be a hydraulic cylinder or a motor. The positions of the cylinder body and the cylinder rod of the cylinder can be reversed, for example, the cylinder body is connected to the bottom plate 103 of the mounting frame, and the cylinder rod is connected to the lower support plate 202c.

[0086] In the illustrated embodiment, Fig.10As shown, the processing device also includes a scanning mechanism 300, which includes a scanner 301 and a scanner bracket 302. The scanner 301 is connected to the scanner bracket 302, and the scanner bracket 302 is connected to the mounting frame of the flipping mechanism 100. The scanner 301 is used to scan and identify the identification code on the surface of the product to identify the surface of the product currently located at the preset processing position.

[0087] In some embodiments, the code scanning mechanism 300 includes a plurality of code scanners 301, each of which is located at a different position of the first connection portion A and the second connection portion B. When the flipping mechanism 100 flips the product to different positions, the same identification code on the surface of the product can be scanned and identified by different code scanners 301, so as to identify the surface of the product currently located at the preset processing position according to the position of the code scanner 301 that currently scans and identifies the identification code. Alternatively, the code scanning mechanism 300 may also have only one code scanner 301, and the code scanner 301 is used to scan and identify different identification codes on different surfaces of the product to identify the surface of the product currently located at the preset processing position.

[0088] In the illustrated embodiment, Fig.12 As shown, the code scanning mechanism 300 is provided with a code scanner 301 above and below the product 01 connected to the first connection part A and the second connection part B. For example, if the product is a semiconductor wafer, when the upper code scanner 301 scans the identification code on the front of the semiconductor wafer, it means that the front of the semiconductor wafer is facing upward, and when the lower code scanner 301 scans the identification code on the front of the semiconductor wafer, it means that the front of the semiconductor wafer is facing downward.

[0089] In the illustrated embodiment, Figure 12-Figure 15 As shown, the scanner bracket 302 corresponding to the scanner 301 above includes a horizontal arm 302c, which spans over the first support 101 and the second support 102, and a vertical arm 302d is provided at each end of the horizontal arm 302c, and the bottom ends of the two vertical arms 302d are respectively connected to the top of the first support 101 and the top of the second support 102. The scanner 301 above is connected to the middle of the horizontal arm 302c. The scanner bracket 302 corresponding to the scanner 301 below includes a horizontal axis 302a, which spans between the first support 101 and the second support 102, and a transfer arm 302b is provided at each end of the horizontal axis 302a, and the two transfer arms 302b are respectively connected to the third support portion 101b of the first support 101 and the fourth support portion 102b of the second support 102, and the scanner 301 below is connected to the middle of the horizontal axis 302a. This type of scanner bracket will not interfere with the rotation of the product.

[0090] In actual implementation, the form of the barcode scanner bracket 302 is not limited to the illustrated embodiment, as long as it can be connected to the mounting bracket of the flip mechanism 100 and the barcode scanner 301 and does not interfere with the rotation of the product.

[0091] The processing method provided in the present application is implemented based on the above-mentioned processing device with a code scanning mechanism, and includes the following steps: the flipping mechanism 100 is connected to the product to be processed, and the surface of the product currently located at the preset processing position is identified (the scanning mechanism 300 can be used to scan to identify the surface of the product currently located at the preset processing position). If the surface of the product currently located at the preset processing position is not the current target processing surface, the flipping power part 104 of the flipping mechanism 100 is started to flip the product until the current target processing surface is located at the preset processing position. Before flipping, the lifting power part 203 of the lighting mechanism 200 is started to drive the light source 201 to descend to a position that does not interfere with the flipping of the product. After the current target processing surface of the product is flipped to the preset processing position, the lifting power part 203 of the lighting mechanism 200 is started to drive the light source 201 to rise to a position close to the product.

[0092] The above specific examples are used to illustrate the principles and implementation methods of the present application. The description of the above embodiments is only used to help understand the method and core ideas of the present application. It should be pointed out that for ordinary technicians in this technical field, without departing from the principles of the present application, several improvements and modifications can be made to the present application, and these improvements and modifications also fall within the scope of protection of the present application.

Claims

1. A turning mechanism, characterized in that: The flipping mechanism (100) comprises a mounting frame and a first flipping assembly (C) and a second flipping assembly (D) mounted on the mounting frame, wherein the first flipping assembly (C) comprises a flipping power member (104), a first transmission part and a first connecting part (A), and the second flipping assembly (D) comprises a second transmission part and a second connecting part (B), wherein the first connecting part (A) and the second connecting part (B) are arranged at intervals so as to connect a product between the first connecting part (A) and the second connecting part (B), wherein the flipping power member (104) is connected to the first transmission part, wherein the first transmission part is connected to the first connecting part (A), wherein the first transmission part is connected to the second transmission part, and wherein the second transmission part is connected to the second connecting part (B), so that the flipping power member (104) drives the first connecting part (A) and the second connecting part (B) to rotate synchronously.

2. The turning mechanism according to claim 1, characterized in that: The tilting power member (104) is a rotating motor, the first transmission part comprises a first pulley assembly (105), a second pulley assembly (106) and a first transmission shaft (108), the second transmission part comprises a third pulley assembly (107), the rotating motor is connected to the first transmission shaft (108) through the first pulley assembly (105), the first transmission shaft (108) is connected to the first connection part (A) through the second pulley assembly (106), and the first transmission shaft (108) is also connected to the second connection part (B) through the third pulley assembly (107).

3. The turning mechanism according to claim 2, characterized in that: A first support (101) and a second support (102) are provided on both sides of the mounting frame; the first flip assembly (C) is mounted on the first support (101) and the second flip assembly (D) is mounted on the second support (102).

4. The turning mechanism according to claim 3, characterized in that: The second transmission part comprises a third transmission shaft (110); the first transmission shaft (108) is rotatably inserted into the first support (101); the third transmission shaft (110) is rotatably inserted into the second support (102); the third transmission shaft (110) serves as an input shaft of the third pulley assembly (107); one end of the third transmission shaft (110) is coaxially connected to one end of the first transmission shaft (108) via a coupling (112) located between the first support (101) and the second support (102).

5. The turning mechanism according to claim 3, characterized in that: The first connecting portion (A) is mounted on a side of the upper part of the first support (101) close to the second support (102), the first pulley assembly (105) is mounted on a side of the lower part of the first support (101) close to the second support (102), the second pulley assembly (106) is mounted on a side of the first support (101) away from the second support (102), the second connecting portion (B) is mounted on a side of the upper part of the second support (102) close to the first support (101), and the third pulley assembly (107) is mounted on a side of the second support (102) away from the first support (101).

6. The turning mechanism (100) according to claim 3, characterized in that: The mounting frame comprises a bottom plate (103), wherein the bottom plate (103) is fixed to the bottom ends of the first support (101) and the second support (102), and at least one of the first support (101) and the second support (102) is capable of sliding relative to the bottom plate (103) to adjust the distance between the first support (101) and the second support (102).

7. The turning mechanism according to any one of claims 1 to 6, characterized in that: The first connecting part (A) and the second connecting part (B) both comprise a clamping power member (113) and two mutually cooperating clamping plates (E), wherein the clamping power member (113) drives the two mutually cooperating clamping plates (E) to move closer to each other to clamp the product or move away from each other to release the product.

8. The turning mechanism according to claim 7, characterized in that: A plurality of elastic centering units (118) are connected between the two clamping plates (E) of the first connection part (A) and between the two clamping plates (E) of the second connection part (B). The elastic centering units (118) of the first connection part (A) and the elastic centering units (118) of the second connection part (B) cooperate to center the product between the first connection part (A) and the second connection part (B). The elastic centering units (118) of the first connection part (A) are arranged in sequence along a first direction, and the elastic centering units (118) of the second connection part (B) are arranged along a second direction. The first direction and the second direction are parallel to each other and are perpendicular to the spacing arrangement direction of the first connection part (A) and the second connection part (B).

9. The turning mechanism according to claim 8, characterized in that: The two clamping plates (E) of the first connecting part (A) and the two clamping plates (E) of the second connecting part (B) both have a clamping surface (114a) for contacting the product, and each elastic centering unit (118) of the first connecting part (A) is located on the side of its clamping surface (114a) away from the second connecting part (B), and each elastic centering unit (118) of the second connecting part (B) is located on the side of its clamping surface (114a) away from the first connecting part (A).

10. The turning mechanism according to claim 9, characterized in that: A groove (114b) is provided between the two clamping plates (E) of the first connecting part (A) and between the two clamping plates (E) of the second connecting part (B). The groove (114b) of the first connecting part (A) is located on the side of its clamping surface (114a) away from the second connecting part (B), and the groove (114b) of the second connecting part (B) is located on the side of its clamping surface (114a) away from the first connecting part (A). The groove (114b) is used to accommodate the elastic centering unit (118) connected to the clamping plate (E) where the groove (114b) is located, and is also used to accommodate the elastic centering unit (118) connected to the clamping plate (E) that cooperates with the clamping plate (E) where the groove (114b) is located.

11. The turning mechanism according to claim 9, characterized in that: The elastic centering unit (118) comprises at least a rotating member, a guide member and an elastic member (118d); the surface of the rotating member is used for rolling contact with one side edge of the product; the guide member guides the rotating member to move relative to the clamping plate (E) in a direction close to the product or away from the product; when the rotating member moves in a direction away from the product, it presses against the elastic member (118d), thereby increasing the compression amount of the elastic member (118d).

12. The turning mechanism according to claim 11, characterized in that: The rotating member is a bearing (118a), and the bearing (118a) is rotatably connected to a slider (118b). The outer peripheral surface of the bearing (118a) is used for rolling contact with a side edge of a product. The guide member is a guide rod (118c), and the slider (118b) is slidably sleeved on the outer periphery of the guide rod (118c). The slider (118b) slides along the guide rod (118c) to drive the bearing (118a) to slide in a direction close to or away from the product.

13. The turning mechanism according to claim 7, characterized in that: A product inlet is formed between one end of the two clamps (E) of the first connecting part (A), and a product outlet is formed between the other ends; a product inlet is formed between one end of the two clamps (E) of the second connecting part (B), and a product outlet is formed between the other ends, so that the product enters the gap between the two mutually matching clamps (E) from the product inlet and leaves the gap between the two mutually matching clamps (E) from the product outlet.

14. The turning mechanism according to claim 13, characterized in that: The turnover mechanism (100) further comprises a product guide member and a product outlet member, wherein the product guide member and the product outlet member are mounted on the mounting frame, the product guide member being used to guide the product from the product inlet to enter in parallel into the gap between the two mutually fitting clamps (E), and the product outlet member being used to guide the product from the product outlet to leave in parallel the gap between the two mutually fitting clamps (E).

15. A processing device, characterized in that: The processing device comprises the flipping mechanism (100) according to any one of claims 1 to 14, and the flipping mechanism (100) is capable of flipping a target processing surface of a product to a preset processing position, so that the processing device processes the target processing surface.

16. The processing device according to claim 15, characterized in that: The processing device further comprises an illumination mechanism (200), wherein the illumination mechanism (200) is located below the flipping mechanism (100), and the illumination mechanism (200) comprises a light source (201), a light source bracket (202), and a lifting power member (203), wherein the light source (201) is connected to the light source bracket (202), and the light source bracket (202) cooperates with the guide of the mounting frame of the flipping mechanism (100), and the lifting power member can drive the light source bracket (202) to rise and fall relative to the mounting frame, so as to drive the light source (201) to approach or move away from a product connected to the flipping mechanism (100).

17. A processing method, implemented based on the processing device according to claim 15 or 16, characterized in that: The following steps are involved: The flipping mechanism (100) is connected to the product to be processed and identifies the surface of the product currently located at a preset processing position. If the surface of the product currently located at the preset processing position is not the current target processing surface, the flipping power member (104) of the flipping mechanism (100) is started to flip the product until the current target processing surface is located at the preset processing position. Before flipping, the lifting power member (203) of the lighting mechanism (200) is started to drive the light source (201) to descend to a position that does not interfere with the flipping of the product. After the current target processing surface of the product is flipped to the preset processing position, the lifting power member (203) of the lighting mechanism (200) is started to drive the light source (201) to rise to a position close to the product.

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