Disassembling and assembling tool and disassembling and assembling method

Abstract

The invention provides a dismounting tool and a dismounting method, and relates to the technical field of semiconductor equipment. The disassembling and assembling tool comprises a driving mechanism used for providing driving force; the vacuum connector is used for being connected with an external vacuum negative pressure device; the vacuum air pipe is connected with the vacuum joint; the vacuum chuck is connected to one end, deviating from the vacuum connector, of the vacuum air pipe and used for adsorbing the lamp tube; the positioning plate is provided with a positioning hole, and the vacuum suction cup is arranged in the positioning hole in a penetrating mode; the positioning plate is connected with the driving mechanism; the positioning piece is at least partially connected with the vacuum suction cup and is matched with the positioning plate; under the driving force provided by the driving mechanism, the positioning plate can drive the lamp tube to move in the axial direction of the lamp tube through the vacuum suction cup.

Description

Technical Field

[0001] The present disclosure relates to the technical field of semiconductor equipment, and in particular to a disassembly tool and a disassembly method for disassembling a lamp tube. Background Art

[0002] In semiconductor technology, a rapid thermal processing chamber is used to heat a wafer to a high temperature (about 1000 degrees Celsius) in a short time (a few seconds or less). In a rapid thermal processing chamber, a lamp for heating is usually provided. How to disassemble and assemble the lamp is one of the current research directions. Summary of the invention

[0003] The present invention provides a disassembly and assembly tool and a disassembly and assembly method.

[0004] According to one aspect of the present disclosure, a disassembly tool for disassembling a lamp tube is provided, comprising:

[0005] A driving mechanism for providing a driving force;

[0006] Vacuum connector, used to connect to an external vacuum negative pressure device;

[0007] A vacuum air pipe connected to the vacuum joint;

[0008] A vacuum suction cup connected to the end of the vacuum air pipe away from the vacuum joint and used for adsorbing the lamp tube;

[0009] A positioning plate is provided with a positioning hole, and the vacuum suction cup is inserted into the positioning hole; and the positioning plate is connected to the driving mechanism;

[0010] The positioning member is at least partially connected to the vacuum suction cup and cooperates with the positioning plate; wherein, under the driving force provided by the driving mechanism, the positioning plate can drive the lamp tube to move along the axial direction of the lamp tube through the vacuum suction cup.

[0011] In some embodiments, the positioning plate is provided with a plurality of positioning holes; wherein the distance between two adjacent positioning holes matches the distance between two adjacent lamp tubes in the reaction chamber.

[0012] In some embodiments, the disassembly and assembly tool further includes: a multi-way connector, the multi-way connector having an inlet and at least two outlets, the inlet is connected to the vacuum connector, and at least two of the outlets are respectively connected to the vacuum air pipes.

[0013] In some embodiments, the positioning member includes a first positioning sleeve, which is mounted on the outer side of the vacuum suction cup, and is used to be placed on the upper surface of the positioning plate away from the lamp tube when disassembling the lamp tube.

[0014] In some embodiments, a first threaded section is disposed on an outer side of the vacuum suction cup; and the first positioning sleeve includes a first positioning nut matched with the first threaded section.

[0015] In some embodiments, the positioning member also includes a second positioning sleeve, which is arranged on the outside of the vacuum suction cup, and the second positioning sleeve is located on the lower side of the positioning plate. The first positioning sleeve and the second positioning sleeve can clamp the positioning plate so that the positioning plate drives the vacuum suction cup to move along the axial direction of the lamp tube.

[0016] In some embodiments, the driving mechanism includes: a driving motor and a ball screw, wherein the output end of the driving motor is connected to the ball screw, and the axial direction of the ball screw is parallel to the axial direction of the lamp tube; the ball screw is connected to a transmission plate, and the transmission plate is connected to the positioning plate.

[0017] In some embodiments, the hole wall of the central hole of the vacuum suction cup includes a guiding surface; along the direction toward the lamp tube, the guiding surface is inclined in a direction away from the central axis of the vacuum suction cup to guide the vacuum suction cup to cooperate with the lamp tube.

[0018] In some embodiments, the disassembly and assembly tool also includes: a vacuum valve, which is connected between the vacuum suction cup and the vacuum air pipe, and the vacuum valve is used to pass a preset pressure gas into the vacuum suction cup when the lamp tube moves to the target position, so that the vacuum suction cup is separated from the lamp tube.

[0019] According to another aspect of the present disclosure, a disassembly and assembly method based on any of the above-mentioned disassembly and assembly tools is provided, comprising:

[0020] Sleeve the vacuum suction cup on the end of the lamp tube;

[0021] Introducing vacuum negative pressure gas into the vacuum air pipe so that the vacuum negative pressure gas enters the vacuum suction cup to fix the lamp tube to the vacuum suction cup;

[0022] The control driving mechanism drives the lamp tube to move through the positioning plate and the vacuum suction cup until the lamp tube moves to the target position; wherein, when installing the lamp tube, the target position includes a first position where the lamp tube cooperates with the corresponding socket in the lamp holder; when disassembling the lamp tube, the target position includes a second position where the lamp tube is separated from the lamp holder.

[0023] The disclosed embodiment can save manpower and time, and can also avoid damage to the lamp tube or socket during the disassembly and assembly process.

[0024] It should be understood that the content described in this section is not intended to identify the key or important features of the embodiments of the present disclosure, nor is it intended to limit the scope of the present disclosure. Other features of the present disclosure will become easily understood through the following description. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] The accompanying drawings are used to better understand the present solution and do not constitute a limitation of the present disclosure.

[0026] Figure 1 is a schematic diagram of an application scenario of a disassembly and assembly tool according to an embodiment of the present disclosure;

[0027] Figure 2 is a schematic diagram of a vacuum suction cup and a lamp tube in a non-adsorbed state according to an embodiment of the present disclosure;

[0028] Figure 3 is a schematic diagram of a vacuum suction cup and a lamp tube in an adsorption state according to an embodiment of the present disclosure;

[0029] Figure 4 is a schematic structural diagram of a vacuum suction cup according to an embodiment of the present disclosure;

[0030] Figure 5 It is a flowchart of the disassembly and assembly method according to an embodiment of the present disclosure.

[0031] Explanation of the accompanying drawings: 100-disassembly and assembly tool; 110-driving mechanism; 111-driving motor; 112-ball screw; 113-transmission plate; 120-vacuum joint; 130-vacuum air pipe; 140-vacuum suction cup; 141-suction cup body; 142-installation joint; 150-positioning plate; 151-positioning hole; 160-positioning piece; 161-first positioning sleeve; 170-multi-way joint; 180-vacuum valve; 210-lamp tube; 220-lamp holder. DETAILED DESCRIPTION

[0032] The following is a description of exemplary embodiments of the present disclosure in conjunction with the accompanying drawings, including various details of the embodiments of the present disclosure to facilitate understanding, which should be considered as merely exemplary. Therefore, it should be recognized by those of ordinary skill in the art that various changes and modifications may be made to the embodiments described herein without departing from the scope and spirit of the present disclosure. Similarly, for the sake of clarity and conciseness, descriptions of well-known functions and structures are omitted in the following description.

[0033] In the related art, when a lamp fails, a hose is usually used to remove the lamp for inspection or replacement. Specifically, the staff puts the hose on the end of the lamp and uses the friction between the hose and the lamp to make the lamp move with the hose until the lamp is taken out. However, when the staff manually operates the hose to insert the end of the lamp into the hose, it is easy to cause the force applied to the lamp to deviate from the axial direction of the lamp due to factors such as easy shaking, which not only easily damages the lamp or the socket, but also takes time and effort, resulting in low efficiency.

[0034] In order to overcome at least one of the above problems, the present embodiment provides a disassembly and assembly tool, which provides a driving force for driving the lamp tube to move through a driving mechanism. The driving force can be transmitted to the lamp tube through a positioning plate, a positioning piece and a vacuum suction cup, to ensure that the lamp tube moves axially. In this way, there is no need to manually adjust the direction of force repeatedly during the disassembly and assembly process, which not only saves manpower and time, but also avoids damage to the lamp tube or the socket during the disassembly and assembly process; and through the cooperation of the vacuum suction cup and the lamp tube, the connection reliability between the disassembly and assembly tool and the lamp tube can be ensured, reducing the difficulty of reliably connecting the disassembly and assembly tool to the lamp tube, which can further save manpower and time and improve operating efficiency.

[0035] The structure and implementation process of the disassembly and assembly tool of this embodiment are described below with examples in conjunction with the accompanying drawings.

[0036] Figure 1 It is a schematic diagram of an application scenario of a disassembly and assembly tool according to an embodiment of the present disclosure.

[0037] Please refer to Figure 1 The disassembly and assembly tool 100 provided in this embodiment is used to disassemble and assemble the lamp tube 210 in the reaction chamber. Exemplarily, the reaction chamber is provided with a lamp holder 220, and the lamp holder 220 is roughly cylindrical; the lamp holder 220 has a plurality of mounting holes, and a socket is provided at the lower part of each mounting hole, and a lamp tube 210 is respectively provided in each mounting hole, and the lamp tube 210 cooperates with the corresponding socket. When disassembling the lamp tube 210, it is necessary to take the lamp tube 210 out of the lamp holder 220. When installing the lamp tube 210, it is necessary to insert the lamp tube 210 into the lamp holder 220, and make the lamp tube 210 cooperate with the corresponding socket. For the convenience of description, this embodiment will be explained by taking this as an example.

[0038] It can be understood that: this embodiment can also be applied to other scenarios of assembly and disassembly of components for plugging, and the implementation process is similar to that of this embodiment.

[0039] For ease of description, this embodiment will be described by taking the axial direction of the lamp tube 210 as the up and down direction (vertical direction) and the gravity direction as the downward direction as an example.

[0040] Figure 2 is a schematic diagram of a vacuum suction cup and a lamp tube in a non-adsorbed state according to an embodiment of the present disclosure; Figure 3 It is a schematic diagram of the vacuum suction cup and the lamp tube in an adsorption state according to an embodiment of the present disclosure.

[0041] Please refer to Figure 2 and Figure 3 , and continue to refer to Figure 1 The disassembly and assembly tool 100 provided in this embodiment includes: a driving mechanism 110, a vacuum joint 120, a vacuum air pipe 130, a vacuum suction cup 140, a positioning plate 150 and a positioning member 160.

[0042] The driving mechanism 110 is used to provide a driving force to indirectly drive the lamp tube 210 to move along the axial direction of the lamp tube 210 .

[0043] The driving mechanism 110 drives the lamp tube 210 to move downward along the axial direction of the lamp tube 210 until the lamp tube 210 matches with the socket, thereby installing the lamp tube 210. The driving mechanism 110 drives the lamp tube 210 to move upward along the axial direction of the lamp tube 210 until the lamp tube 210 separates from the lamp holder 220, thereby disassembling the lamp tube 210.

[0044] Exemplarily, the driving mechanism 110 includes a driving motor 111 and a transmission assembly, wherein the driving motor 111 outputs a rotational motion, and the transmission assembly is used to convert the rotational motion into a linear motion and transmit it to the lamp tube 210. The transmission assembly may include a gear and a rack, or a screw and a nut. In other examples, the driving mechanism 110 may include a driving member such as a linear motor and a cylinder that can output a linear motion.

[0045] The vacuum connector 120 is used to connect to an external vacuum negative pressure device. Exemplarily, the vacuum connector 120 has a first connection end and a second connection end, and the first connection end is sealed and connected to the vacuum negative pressure device. Wherein, in the state of adsorbing the lamp tube 210, the vacuum pressure provided by the vacuum negative pressure device is about -60kPa (kilopascals). Optionally, in order to improve the flexibility of the setting position of the disassembly and assembly tool 100, the vacuum negative pressure device has a vacuum negative pressure hose, and the vacuum negative pressure hose is sealed and connected to the first connection end.

[0046] In some examples, the second connection end of the vacuum joint 120 is used to connect to the multi-way joint 170; the inlet of the multi-way joint 170 connected to the second connection end is universal; the other end of the multi-way joint 170 can be provided with at least two outlets, each outlet is sealed and connected to the vacuum air pipe 130. Among them, there can be two, three, four or more outlets, and the specific number of outlets can be set according to actual needs. In this way, the disassembly tool 100 of this embodiment can disassemble and assemble multiple lamp tubes 210, thereby improving the disassembly and assembly efficiency.

[0047] In other examples, the second connection end of the vacuum connector 120 may also be directly connected to the vacuum air pipe 130 ; or, the vacuum connector 120 may also be directly connected to the vacuum suction cup 140 .

[0048] The vacuum air pipe 130 can be a hose, and the length of the vacuum air pipe 130 can be set according to actual needs. In this example, by setting the vacuum air pipe 130, the requirements for the placement position of the disassembly tool 100 can be reduced, so that the placement position of the disassembly tool 100 is more flexible, and the vacuum suction cup 140 connected thereto can be applied to the lamp tube 210 at different positions.

[0049] Please refer to Figures 1 to 4 The vacuum suction cup 140 is sealed and connected to the end of the vacuum air pipe 130 away from the vacuum joint 120, and is used to absorb the lamp tube 210. The vacuum suction cup 140 may include a mounting joint 142 and a suction cup body 141; the vacuum hose may be sealed and connected to the mounting joint 142, and the mounting joint 142 may be sealed and connected to the suction cup body 141, and the suction cup body 141 may be made of silicone. In order to improve the scalability of the disassembly and assembly tool 100, one end of the mounting joint 142 connected to the vacuum hose may be universal, and the other end of the mounting joint 142 may be adapted to a suction cup body 141 of a corresponding type; wherein, the mounting joints 142 corresponding to different types of suction cup bodies 141 may be different.

[0050] For example, Figure 2 or Figure 3 As shown, the suction cup body 141 may include a bellows. Figure 4 As shown, the suction cup body 141 may include a conical suction cup; wherein the conical suction cup includes a connecting section and a conical section, the connecting section is connected to the top of the conical section, and the inner diameter of the conical section may gradually increase in the downward direction. The outer diameter of the lower end of the mounting joint 142 that cooperates with the bellows may be larger than the outer diameter of the lower end of the mounting joint 142 that cooperates with the connecting section of the conical suction cup. The upper end of the bellows may be sleeved on the lower end of the corresponding mounting joint 142. The upper end of the conical suction cup may be sleeved on the lower end of the mounting joint 142, or the lower end of the mounting joint 142 may be inserted into the upper part of the conical suction cup. Among them, the differences in the mounting joints 142 that cooperate with different types of suction cup bodies 141 are not limited to this, and may be specifically set according to actual needs.

[0051] The positioning plate 150 is provided with a positioning hole 151, and the vacuum suction cup 140 is inserted into the positioning hole 151; and the positioning plate 150 is connected to the driving mechanism 110. The positioning member 160 cooperates with the positioning plate 150 to position the vacuum suction cup 140 and the positioning plate 150, so that the positioning plate 150 can drive the vacuum suction cup 140 to move along the axial direction of the lamp tube 210. In this way, under the driving force provided by the driving mechanism 110 and under the cooperation of the positioning member 160 and the positioning plate 150, the positioning plate 150 can drive the lamp tube 210 to move along the axial direction of the lamp tube 210 through the vacuum suction cup 140.

[0052] In some examples, the positioning member 160 can be sleeved on the outside of the vacuum suction cup 140, for example, sleeved on the upper part of the suction cup body 141, or sleeved on the outside of the mounting joint 142; the positioning member 160 can be screwed or interference fit with the positioning hole 151.

[0053] In other examples, the positioning member 160 includes two components, which can be respectively sleeved on the outside of the vacuum suction cup 140, at least one component is detachably connected to the vacuum suction cup 140, and the two components are respectively located on the upper and lower sides of the positioning plate 150, so that the two components can clamp the positioning plate 150 to ensure that the positioning plate 150 can drive the vacuum suction cup 140 to reciprocate vertically. In other examples, the component of the positioning member 160 located above the positioning plate 150 can also be connected to one end of the vacuum air pipe 130 facing the vacuum suction cup 140.

[0054] Optionally, at least one of the two components, the component located below the positioning plate 150, is detachably connected to the vacuum suction cup 140. In this way, it is convenient to choose whether to install the component located below the positioning plate 150 on the vacuum suction cup 140 according to the applicable scenario. For example, if the disassembly tool is used in a disassembly scenario and is used to drive the lamp tube 210 to separate from the socket, the positioning member 160 is set above the positioning plate 150, so that the driving mechanism 110 can drive the lamp tube 210 to move upward through the positioning plate 150 until the lamp tube 210 is separated from the socket. Among them, the positioning member 160 located below the positioning plate 150 can be installed or not.

[0055] The specific structure of the positioning member 160 is not limited to this, and this embodiment is only used as an example, as long as the corresponding function can be achieved. In other embodiments, the positioning member 160 can be a block structure that can be detachably connected to the mounting joint 142, and the block structure can be located at the upper and lower sides of the positioning plate 150, so that the positioning plate 150 can drive the vacuum suction cup 140 to move along the axial direction of the lamp tube 210.

[0056] When the disassembly tool 100 of this embodiment is used to disassemble the lamp tube 210, the positioning member 160 can be screwed or interference fit with the positioning hole 151, or the positioning member 160 can be located at the upper and lower sides of the positioning plate 150 to clamp the positioning plate 150; the disassembly tool 100 is placed in a suitable position, and the vacuum connector 120 of the disassembly tool 100 is connected to an external vacuum negative pressure device; the disassembly tool 100 is powered so that the control unit can control the working state of the driving mechanism 110, etc. Among them, the control unit can be integrated in the disassembly tool, or it can be independent of the disassembly tool 100 and communicated with the disassembly tool 100.

[0057] The process of removing the lamp tube 210 can be as follows: control the driving mechanism 110 to drive the positioning plate 150 to move in a direction toward the lamp tube 210, such as Figure 2 As shown, until the vacuum suction cup 140 cooperates with the lamp tube 210, at this time, the vacuum suction cup 140 and the lamp tube 210 are in a non-adsorbed state; vacuum negative pressure gas is introduced into the vacuum air pipe 130 so that the vacuum negative pressure gas enters the vacuum suction cup 140, as shown in FIG. Figure 3 As shown, the lamp tube 210 and the vacuum suction cup 140 are fixed and held by suction; the driving mechanism 110 is controlled to drive the positioning plate 150 to move in a direction away from the lamp tube 210 until the lamp tube 210 and the corresponding socket are separated. When the vacuum suction cup 140 and the lamp tube 210 are in the suction state, the vacuum suction force of the vacuum suction cup 140 and the lamp tube 210 can firmly press the suction cup and the lamp tube 210 head and the force between the two is greater than the friction between the pin of the lamp tube 210 and the socket.

[0058] The process of installing the lamp tube 210 can be as follows: provide the lamp tube 210, and make the vacuum suction cup 140 cooperate with the lamp tube 210; introduce vacuum negative pressure gas into the vacuum air pipe 130 so that the vacuum negative pressure gas enters the vacuum suction cup 140, and adsorbs and fixes the lamp tube 210 and the vacuum suction cup 140; control the driving mechanism 110 to drive the positioning plate 150 to move in the direction toward the corresponding socket until the pin of the lamp tube 210 cooperates with the socket.

[0059] During the disassembly and assembly process, the movement stroke of the lamp tube 210 along its axial direction is greater than the extended axial length of the lamp tube 210 .

[0060] The disassembly and assembly tool 100 provided in this embodiment is used to provide driving force by setting a driving mechanism 110; a vacuum joint 120 is used to connect to an external vacuum negative pressure device; a vacuum air pipe 130 is connected to the vacuum joint 120; a vacuum suction cup 140 is connected to the end of the vacuum air pipe 130 away from the vacuum joint 120, and is used to adsorb the lamp tube 210; a positioning plate 150 is provided with a positioning hole 151, and the vacuum suction cup 140 is inserted into the positioning hole 151; and the positioning plate 150 is connected to the driving mechanism 110; a positioning member 160 is connected to the vacuum suction cup 140 and cooperates with the positioning plate 150; wherein, under the driving force provided by the driving mechanism 110, the positioning plate 150 can drive the lamp tube 210 to move along the axial direction of the lamp tube 210 through the vacuum suction cup 140. In this way, the driving force provided by the driving mechanism 110 can be transmitted to the lamp tube 210 through the positioning plate 150, the positioning member 160 and the vacuum suction cup 140, ensuring that the lamp tube 210 moves axially. This not only saves manpower and time and improves operating efficiency, but also avoids damage to the lamp tube 210 or the socket during disassembly and assembly.

[0061] like Figure 1 As shown, in some embodiments, the positioning plate 150 is provided with a plurality of positioning holes 151. Exemplarily, the positioning plate 150 is roughly circular, and the plurality of positioning holes 151 can be distributed in a dot matrix, so that the positioning plate 150 can be applicable to lamp tubes 210 in more positions. Among them, the spacing between two adjacent positioning holes 151 is adapted to the spacing between two adjacent lamp tubes 210 in the reaction chamber, which is conducive to the disassembly and assembly tool 100 to disassemble and assemble multiple lamp tubes 210 at the same time. Optionally, among the plurality of positioning holes 151, the distribution of at least some of the positioning holes 151 corresponds to the distribution of the lamp tubes 210.

[0062] In other embodiments, the positioning plate 150 may also have a positioning hole 151. There may be multiple positioning plates 150, and the multiple positioning plates 150 may be connected to the driving mechanism 110, so that the driving mechanism 110 can drive the multiple positioning plates 150 to move axially; wherein the positioning plate 150 may be rotatably connected to the driving mechanism 110, so that the angle of the positioning plate 150 can be adjusted according to actual needs.

[0063] like Figure 1 As shown, in some embodiments, the positioning member 160 includes a first positioning sleeve 161, which is sleeved on the outer side of the vacuum suction cup 140, and the first positioning sleeve 161 is used to be placed on the upper surface of the positioning plate 150 away from the lamp tube 210 when the lamp tube 210 is disassembled.

[0064] In some examples, in order to improve flexibility during use, the first positioning sleeve 161 is detachably connected to the vacuum suction cup 140. For example, the outer side of the vacuum suction cup 140 is provided with a first threaded section; the first positioning sleeve 161 includes a first positioning nut that cooperates with the first threaded section. In other examples, the first positioning sleeve 161 can be a clamp. When disassembling the lamp tube 210, the first positioning is installed on the vacuum suction cup 140, and the first positioning sleeve 161 is placed on the upper surface of the positioning plate 150.

[0065] In other embodiments, the first positioning sleeve 161 may also be integrally provided with the vacuum suction cup 140. Alternatively, the first positioning sleeve 161 may be a hollow cylinder, which is fixed to the vacuum suction cup 140 by interference fit or welding.

[0066] In some embodiments, the positioning member 160 also includes a second positioning sleeve (not shown in the figure), which is arranged on the outside of the vacuum suction cup 140, and the second positioning sleeve is located on the lower side of the positioning plate 150. The first positioning sleeve 161 and the second positioning sleeve can clamp the positioning plate 150, so that the positioning plate 150 drives the vacuum suction cup 140 to move axially along the lamp tube 210.

[0067] In some examples, in order to improve flexibility during use, the second positioning sleeve is detachably connected to the vacuum suction cup 140. For example, the outer side of the vacuum suction cup 140 is provided with a second threaded section; the second positioning sleeve includes a second positioning nut that cooperates with the second threaded section. In other examples, the second positioning sleeve can be a clamp. When disassembling the lamp tube 210, the second positioning sleeve is installed on the vacuum suction cup 140, and the second positioning sleeve is located on the lower side of the positioning plate 150, and the positioning plate 150 can be placed on the second positioning sleeve.

[0068] In other embodiments, the second positioning sleeve may also be integrally provided with the vacuum suction cup 140. Alternatively, the second positioning sleeve may be a hollow cylinder, which is interference fit or welded to the vacuum suction cup 140.

[0069] It can be understood that at least one of the first positioning sleeve 161 and the second positioning sleeve is detachably connected to the vacuum suction cup 140 to facilitate the selective matching of the vacuum suction cup 140 with the positioning hole 151 at the corresponding position, that is, to facilitate the matching of the vacuum suction cup 140 with different positioning holes 151 on the positioning plate 150 in different scenarios.

[0070] In other embodiments, in order to improve the convenience of operation, the end of the vacuum air pipe 130 facing the vacuum suction cup 140 may also be connected with a quick-connection connector, and the quick-connection connector is detachably connected to the installation connector 142 in the vacuum suction cup 140. The first positioning sleeve 161 may be matched with the quick-connection connector, and the second positioning sleeve may be matched with the installation connector 142.

[0071] like Figure 1 As shown, in some embodiments, the driving mechanism 110 includes: a driving motor 111 and a ball screw 112, the output end of the driving motor 111 is connected to the screw in the ball screw 112, the axial direction of the ball screw 112 is parallel to the axial direction of the lamp tube 210, the transmission nut in the ball screw 112 is connected to a transmission plate 113, and the transmission plate 113 is connected to the positioning plate 150.

[0072] In some examples, the output shaft of the driving motor 111 may be connected to the screw via a coupling, or the screw and the output shaft of the driving motor 111 may be integrally provided.

[0073] In other examples, an output gear is provided at the output end of the driving motor 111, the output gear meshes with the transmission gear, the transmission gear is fixedly connected to the screw, and the driving motor 111 drives the screw to move through the output gear and the transmission gear. In this example, the transmission assembly includes: an output gear, a transmission gear, a ball screw 112, a transmission plate 113, etc.

[0074] The transmission nut is connected to a transmission plate 113 extending toward the positioning plate 150. The size and shape of the transmission plate 113 can be set according to actual needs. For example, the transmission plate 113 can be in a flat plate shape. Or the transmission plate 113 can be in a bent shape. The lead screw drives the transmission nut matched therewith to move along the axial direction of the lamp tube 210. The transmission nut drives the positioning plate 150 to move synchronously through the transmission plate 113, thereby driving the lamp tube 210 to move.

[0075] In other embodiments, an output gear is disposed at the output end of the driving motor 111 , the output gear meshes with a transmission rack, the transmission rack extends along the axial direction of the lamp tube 210 , and the transmission rack is connected to the positioning plate 150 through the transmission plate 113 .

[0076] In some embodiments, the hole wall of the central hole of the suction cup body 141 in the vacuum suction cup 140 includes a guide surface, and the guide surface is used to guide the vacuum suction cup 140 to cooperate with the lamp tube 210. Exemplarily, along the direction toward the lamp tube 210, the guide surface is inclined in a direction away from the central axis of the vacuum suction cup 140. The guide surface can be an inclined plane, or the guide surface is an arc-shaped surface.

[0077] like Figure 1 and Figure 2As shown, in some embodiments, the disassembly and assembly tool 100 further includes: a vacuum valve 180, the vacuum valve 180 is connected between the vacuum suction cup 140 and the vacuum air pipe 130, and the vacuum valve 180 is used to pass a preset pressure gas into the vacuum suction cup 140 when the lamp tube 210 moves to the target position, so that the vacuum suction cup 140 is separated from the lamp tube 210. The specific pressure of the preset pressure gas can be set according to actual needs; when installing the lamp tube 210, the target position includes a first position where the lamp tube 210 is matched with the corresponding socket; when disassembling the lamp tube 210, the target position includes a second position where the lamp tube 210 is separated from the lamp holder 220.

[0078] Exemplarily, the vacuum valve 180 has a valve body and a valve core, the valve body having a first air inlet end, a second air inlet end and an air outlet end, the first air inlet end is used to supply vacuum negative pressure gas to enter, the air outlet end is used to supply the gas entering the valve body to enter the vacuum suction cup 140, and the second air inlet end is used to supply preset pressure gas to enter; the valve core can selectively block one of the first air inlet end and the second air inlet end.

[0079] During operation, when the vacuum suction cup 140 and the lamp tube 210 need to be fixed, the valve core blocks the second air inlet end, so that the vacuum negative pressure enters the vacuum valve 180 through the first air inlet end and flows into the vacuum suction cup 140, thereby keeping the vacuum suction cup 140 and the lamp tube 210 in an adsorbed state. When the lamp tube 210 is plugged into the socket, or when the lamp tube 210 is separated from the socket, the valve blocks the first air inlet end, and the preset pressure gas enters the vacuum suction cup 140 through the second air inlet end, so that the vacuum suction cup 140 can be separated from the lamp tube 210.

[0080] The present disclosure also provides a disassembly and assembly method, which is implemented based on the disassembly and assembly tool 100 of any of the above embodiments. The same points as the above embodiments are not repeated in this embodiment.

[0081] Figure 5 It is a flowchart of the disassembly and assembly method according to an embodiment of the present disclosure.

[0082] Please refer to Figure 5 The disassembly and assembly method provided in this embodiment includes:

[0083] S501, sleeve the vacuum suction cup on the end of the lamp tube;

[0084] S502, introducing vacuum negative pressure gas into the vacuum air pipe, so that the vacuum negative pressure gas enters the vacuum suction cup, and fixes the lamp tube to the vacuum suction cup;

[0085] S503, control the driving mechanism to drive the lamp tube to move through the positioning plate and the vacuum suction cup until the lamp tube moves to the target position; when installing the lamp tube, the target position includes a first position where the lamp tube cooperates with the corresponding socket; when removing the lamp tube, the target position includes a second position where the lamp tube is separated from the lamp holder.

[0086] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present disclosure. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner.

[0087] In the description of the present disclosure, it is necessary to understand that the terms "up", "down", "left", "right", "top", "bottom", "inside", "outside", "axial", "longitudinal", "lateral", "vertical", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the accompanying drawings, and are only for the convenience of describing the present disclosure and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present disclosure.

[0088] In addition, the terms "first", "second", etc. used in the embodiments of the present disclosure are only used for descriptive purposes and should not be understood as indicating or implying relative importance, or implicitly indicating the number of technical features indicated in the embodiments. Therefore, the features defined by the terms "first", "second", etc. in the embodiments of the present disclosure may explicitly or implicitly indicate that at least one of the features is included in the embodiment. In the description of the present disclosure, the word "multiple" means at least two or two or more, such as two, three, four, etc., unless otherwise clearly and specifically defined in the embodiments.

[0089] In the present disclosure, unless otherwise clearly specified or limited in the embodiments, the terms "installed", "connected", "connected" and "fixed" etc. appearing in the embodiments should be understood in a broad sense. For example, the connection can be a fixed connection, a detachable connection, or an integrated connection. It can be understood that it can also be a mechanical connection, an electrical connection, etc.; of course, it can also be a direct connection, or an indirect connection through an intermediate medium, or it can be the internal connection of two elements, or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present disclosure can be understood according to the specific implementation situation.

[0090] In the present disclosure, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being "above", "above" or "above" a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being "below", "below" or "below" a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0091] Although the embodiments of the present disclosure have been shown and described above, it is to be understood that the above embodiments are exemplary and are not to be construed as limitations of the present disclosure. A person skilled in the art may change, modify, replace and vary the above embodiments within the scope of the present disclosure.

Claims

1. A disassembly tool for disassembling a lamp tube, comprising: A driving mechanism for providing a driving force; Vacuum connector, used to connect to an external vacuum negative pressure device; A vacuum air pipe connected to the vacuum joint; A vacuum suction cup connected to the end of the vacuum air pipe away from the vacuum joint and used for adsorbing the lamp tube; A positioning plate is provided with a positioning hole, and the vacuum suction cup is inserted into the positioning hole; and the positioning plate is connected to the driving mechanism; The positioning member is at least partially connected to the vacuum suction cup and cooperates with the positioning plate; wherein, under the driving force provided by the driving mechanism, the positioning plate can drive the lamp tube to move along the axial direction of the lamp tube through the vacuum suction cup.

2. The disassembly and assembly tool according to claim 1, wherein: The positioning plate is provided with a plurality of positioning holes; wherein the distance between two adjacent positioning holes matches the distance between two adjacent lamp tubes in the reaction chamber.

3. The disassembly and assembly tool according to claim 1, further comprising: A multi-way connector, wherein the multi-way connector has an inlet and at least two outlets, wherein the inlet is connected to the vacuum connector, and at least two of the outlets are respectively connected to the vacuum air pipes.

4. The disassembly and assembly tool according to claim 1, wherein: The positioning member comprises a first positioning sleeve, which is sleeved on the outer side of the vacuum suction cup and is used to be placed on the upper surface of the positioning plate away from the lamp tube when the lamp tube is disassembled.

5. The disassembly and assembly tool according to claim 4, wherein: The outer side surface of the vacuum suction cup is provided with a first threaded section; the first positioning sleeve includes a first positioning nut matched with the first threaded section.

6. The disassembly and assembly tool according to claim 4, wherein: The positioning member also includes a second positioning sleeve, which is arranged on the outside of the vacuum suction cup and the lower side of the positioning plate. The first positioning sleeve and the second positioning sleeve can clamp the positioning plate so that the positioning plate drives the vacuum suction cup to move axially along the lamp tube.

7. The disassembly tool according to claim 1, wherein: The driving mechanism comprises: a driving motor and a ball screw, wherein the output end of the driving motor is connected to the ball screw, and the axial direction of the ball screw is parallel to the axial direction of the lamp tube; The ball screw is connected with a transmission plate, and the transmission plate is connected with the positioning plate.

8. The disassembly tool according to claim 1, wherein: The hole wall of the central hole of the vacuum suction cup comprises a guiding surface; in the direction toward the lamp tube, the guiding surface is inclined in the direction away from the central axis of the vacuum suction cup to guide the vacuum suction cup to cooperate with the lamp tube.

9. The disassembly and assembly tool according to claim 1, further comprising: A vacuum valve is connected between the vacuum suction cup and the vacuum air pipe. The vacuum valve is used to pass a preset pressure gas into the vacuum suction cup when the lamp tube moves to a target position, so that the vacuum suction cup is separated from the lamp tube.

10. A disassembly and assembly method based on the disassembly and assembly tool according to any one of claims 1 to 9, comprising: Sleeve the vacuum suction cup on the end of the lamp tube; Introducing vacuum negative pressure gas into the vacuum air pipe so that the vacuum negative pressure gas enters the vacuum suction cup to fix the lamp tube to the vacuum suction cup; The control driving mechanism drives the lamp tube to move through the positioning plate and the vacuum suction cup until the lamp tube moves to the target position; wherein, when installing the lamp tube, the target position includes a first position where the lamp tube cooperates with the corresponding socket in the lamp holder; when disassembling the lamp tube, the target position includes a second position where the lamp tube is separated from the lamp holder.

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