A cutting fluid cooling and recycling device for silicon wafer cutting machines

Abstract

The present invention relates to the field of CNC machine tools, and discloses a cutting fluid cooling and circulating device for a silicon wafer cutting machine, comprising a tank body, a tank cover arranged on the tank body, and a material storage shell, wherein a first motor is fixedly arranged above the tank cover, an output end of the first motor passes through the tank cover and is fixedly connected to a rotating plate, the rotating plate is rotatably connected to the bottom of the tank cover, a connecting vertical rod is fixedly arranged below the rotating plate, four groups of stirring rod assemblies are arranged on the outside of the connecting vertical rod, and a fishing assembly is respectively arranged on one side of each group of stirring rod assemblies, the distance between two adjacent stirring rods is increased by cooperating with the stirring rod assembly through a telescopic electric cylinder, and the arrangement of the rotating rod and the rotating frame increases the contact area between the stirring rod and the cutting fluid compared with an ordinary stirring rod, thereby improving the efficiency of stirring cooling.

Description

Technical Field

[0001] The invention relates to the technical field of numerically controlled machine tools, in particular to a cutting fluid cooling and circulating device for a silicon wafer cutting machine. Background Art

[0002] Cutting fluid is an industrial liquid used during metal cutting, chipping, and grinding processes to cool and lubricate tools and workpieces. The lubricating effect of cutting fluid during the cutting process can reduce friction between the rake face and the chips, and between the flank face and the machined surface, forming a partial lubricating film. This reduces cutting forces, friction, and power consumption, lowers surface temperature and tool wear at the friction point between the tool and the workpiece, and improves the cutting performance of the workpiece material. During the grinding process, after the grinding fluid is added, it penetrates the grinding wheel abrasive grains, the workpiece, and the abrasive grains, forming a lubricating film between the grinding chips. This reduces friction between the interfaces, prevents wear on the abrasive cutting edges, and prevents chips from adhering to the cutting edges. This reduces grinding forces and frictional heat, improving the durability of the grinding wheel and the surface quality of the workpiece.

[0003] After cutting silicon wafers, there will be silicon particles and powder in the cutting fluid, and the cutting fluid needs to be cooled before it can be used again. Then, there are impurities in the cutting fluid, which will block the cutting fluid nozzle and affect the silicon wafer cutting efficiency. In the process of cooling the cutting fluid, this application adds a structure to filter the impurities in the cutting fluid, while improving the cooling efficiency of the cutting fluid. Summary of the Invention

[0004] The object of the present invention is to provide a cutting fluid cooling and recycling device for a silicon wafer cutting machine to solve the problems raised in the above background technology.

[0005] In order to solve the above technical problems, the technical solution of the present invention is as follows: a cutting fluid cooling and recycling device for a silicon wafer cutting machine, comprising a tank body and a tank cover arranged on the tank body for stirring a chemical reactant and a cutting fluid, and a storage shell for controlling the discharge of the chemical reactant, a first motor is fixedly arranged above the tank cover, an output end of the first motor passes through the tank cover and is fixedly connected to a rotating plate, the rotating plate is rotatably connected to the bottom of the tank cover, a connecting vertical rod is fixedly arranged below the rotating plate, four groups of stirring rod assemblies for mixing and stirring the chemical reactant and the cutting fluid are arranged on the outer side of the connecting vertical rod, and a fishing assembly for catching larger impurities in the cutting fluid is respectively provided on one side of each group of stirring rod assemblies;

[0006] A telescopic electric cylinder for driving the stirring rod assembly to unfold is fixedly provided above the connecting vertical rod. Four vertical slots corresponding to the positions of the four groups of stirring rod assemblies are provided on the connecting vertical rod, and limited sliding slots are respectively provided inside the four vertical slots.

[0007] The agitator assembly comprises a connecting plate slidably connected in the vertical slot, and the output end of the telescopic electric cylinder is fixedly connected to the four connecting plates. The sliding plate is slidably connected to the plurality of sliding plates in the limiting slide, and the connecting plate is located directly above the sliding plate, and the connecting plate is fixedly connected to one side of the sliding plate with a stirring rod. The stirring rod has a through cavity, and a rotating block is provided between each two adjacent stirring rods. One side of the rotating block is rotatably connected to two rotating rods, and the other ends of the two rotating rods are rotatably connected to the through cavities on the upper and lower stirring rods. The lower end of the top rotating block is fixedly connected to the vertical plate, and the vertical plate is slidably connected to the plurality of rotating blocks below. The upper end of the top rotating block is rotatably connected to a rotating long rod, and the other end of the rotating long rod is rotatably connected to the bottom of the rotating plate.

[0008] Preferably, the lower end of the tank cover is fixedly connected to four vertical rods, and multiple groups of sliding components are arranged between the four vertical rods. The sliding components include a sliding ring slidably arranged between the four vertical rods, and four protrusions corresponding to the vertical rods are fixedly arranged on the outside of the sliding ring. The protrusions slide in the vertical rods, and an annular groove is opened inside the sliding ring.

[0009] Preferably, a convex plate is fixedly connected to one side of the stirring rod, and the convex plate is slidably connected in the annular groove.

[0010] Preferably, the fishing assembly includes a rotating frame rotatably connected to one side of the stirring rod, one end of the rotating frames on the two adjacent stirring rods are connected by a hinge, a magnet block is fixedly provided on the opposite side of the two rotating frames, and a fishing net for capturing impurities is fixedly provided on the rotating frame.

[0011] Preferably, a water inlet shell is fixedly connected to the upper side of the tank body, a water inlet pipe for injecting cutting fluid is fixedly connected to the lower side of the water inlet shell, a slag discharge pipe for removing impurities in the water inlet shell is fixedly connected to the lower side of the water inlet shell, a trapezoidal block is fixedly connected to the lower part of the water inlet shell, a water inlet parallel to the top of the trapezoidal block is opened on the outside of the tank body, the inside of the water inlet shell is connected with the inside of the tank body, and a drain pipe for discharging cutting fluid is fixedly connected to the lower side of the outside of the tank body.

[0012] Preferably, four limiting vertical slots are provided on the tank body, and the positions of the limiting vertical slots correspond to the positions of the vertical rods.

[0013] Preferably, the material storage shell is fixedly connected to the upper end of the tank cover, and a material pre-storage bin is provided at the lower part of the interior of the material storage shell near the edge.

[0014] Preferably, a second motor is fixedly provided at the lower center position inside the storage shell, a rotating plate is fixedly connected to the upper end of the second motor, a drop hole corresponding to the unloading pre-storage bin is opened on the rotating plate, and a cover plate for sealing the internal space of the storage shell is provided above the storage shell.

[0015] Preferably, a feed hole corresponding to the pre-storage bin for unloading materials is provided on the tank cover, and a through hole corresponding to the feed hole is provided on the rotating plate.

[0016] Compared with the prior art, the technical solution of the present invention has the following advantages:

[0017] (1) The telescopic electric cylinder cooperates with the stirring rod assembly to increase the distance between two adjacent stirring rods. The setting of the rotating rod and the rotating frame increases the contact area between the stirring rod and the cutting fluid compared with the ordinary stirring rod, thereby improving the efficiency of stirring cooling;

[0018] (2) When the distance between the stirring rods increases, the two rotating frames are driven to open. During the stirring process, the rotating frames drive the catching net to catch the impurities in the cutting fluid, thereby reducing the impurities in the cutting fluid. After catching, the telescopic electric cylinder drives the stirring rod to reset, and the stirring rod drives the two rotating frames together, sandwiching the impurities between the catching nets, and taking some of the impurities out of the cutting fluid, thereby reducing the reaction time between the chemical reactants and the impurities.

[0019] (3) When stirring and cooling the cutting fluid, the distance between two adjacent stirring rods is controlled by controlling the extension and contraction of the telescopic electric cylinder to achieve stirring and cooling. By adjusting the height and density of the stirring rod, the stirring effect on the cutting fluid is improved and the cooling time of the cutting fluid is accelerated. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0021] Figure 2 This is a schematic diagram of the tank structure of the present invention;

[0022] Figure 3 This is a schematic diagram of the planar structure of the water inlet shell of the present invention;

[0023] Figure 4 This is a schematic diagram of the tank cover structure of the present invention;

[0024] Figure 5 This is a schematic diagram of the rotating plate structure of the present invention;

[0025] Figure 6 This is a schematic diagram of the connecting vertical rod structure of the present invention;

[0026] Figure 7 This is a schematic structural diagram of the sliding assembly of the present invention;

[0027] Figure 8 This is a schematic structural diagram of the stirring rod assembly and the fishing assembly of the present invention;

[0028] Figure 9 This is a schematic diagram of the pre-deployed structure of the stirring rod assembly and the fishing assembly of the present invention;

[0029] Figure 10 This is a schematic structural diagram of the stirring rod assembly of the present invention;

[0030] Figure 11 This is a schematic structural diagram of the fishing assembly of the present invention;

[0031] Figure 12 It is a schematic diagram of the storage shell structure of the present invention.

[0032] In the figure: 1, tank body; 11, water inlet shell; 111, water inlet pipe; 112, slag discharge pipe; 113, trapezoidal block; 114, water inlet; 115, limit vertical slot; 12, liquid discharge pipe; 2, tank cover; 21, first motor; 22, feed hole; 23, vertical rod; 24, rotating plate; 241, through hole; 25, connecting vertical rod; 251, telescopic cylinder; 252, vertical slot; 253, limit slide; 26, sliding assembly; 261, sliding ring; 262, protrusion; 2 63. Annular groove; 27. Stirring rod assembly; 271. Stirring rod; 272. Through cavity; 273. Rotating rod; 274. Rotating block; 275. Convex plate; 276. Rotating long rod; 277. Vertical plate; 278. Connecting plate; 279. Sliding plate; 28. Fishing assembly; 281. Rotating frame; 282. Magnet block; 283. Fishing net; 3. Storage shell; 31. Second motor; 32. Unloading pre-storage bin; 33. Rotating plate; 34. Dropping hole; 35. Cover plate. DETAILED DESCRIPTION

[0033] To make the purpose, technical solutions and advantages of the embodiments of the present disclosure more clear, the technical solutions of the embodiments of the present disclosure will be clearly and completely described below in conjunction with the drawings of the embodiments of the present disclosure. Obviously, the described embodiments are part of the embodiments of the present disclosure, not all of the embodiments. Based on the described embodiments of the present disclosure, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present disclosure.

[0034] Unless otherwise defined, the technical or scientific terms used in this disclosure shall have the usual meanings understood by persons of ordinary skill in the field to which this disclosure belongs. The words “including” or “comprising” and the like used in this disclosure mean that the elements or objects preceding the word include the elements or objects listed after the word and their equivalents, without excluding other elements or objects. The words “connected” or “connected” and the like are not limited to physical or mechanical connections, but may also include electrical connections, whether direct or indirect. “Up”, “down”, “left”, “right” and the like are only used to indicate relative positional relationships. When the absolute position of the object being described changes, the relative positional relationship may also change accordingly.

[0035] like Figure 1 、 Figures 4 to 10 As shown, the present invention provides a cutting fluid cooling and recycling device for a silicon wafer cutting machine, comprising a tank body 1 and a tank cover 2 provided on the tank body 1 for stirring a chemical reactant and a cutting fluid, and a storage shell 3 for controlling the discharge of the chemical reactant. A first motor 21 is fixedly provided above the tank cover 2. The output end of the first motor 21 passes through the tank cover 2 and is fixedly connected to a rotating plate 24. The rotating plate 24 is rotatably connected to the bottom of the tank cover 2. A connecting vertical rod 25 is fixedly provided below the rotating plate 24. Four groups of stirring rod assemblies 27 for mixing and stirring the chemical reactant and the cutting fluid are provided on the outside of the connecting vertical rod 25. A fishing assembly 28 for fishing larger impurities in the cutting fluid is provided on one side of each group of stirring rod assemblies 27.

[0036] A telescopic electric cylinder 251 is fixedly provided on the upper part of the connecting vertical rod 25 for driving the stirring rod assembly 27 to expand. Four vertical slots 252 corresponding to the positions of the four groups of stirring rod assemblies 27 are opened on the connecting vertical rod 25, and a limiting sliding groove 253 is respectively provided inside the four vertical slots 252;

[0037] The stirring rod assembly 27 includes a connecting plate 278 slidably connected in the vertical slot 252, the output end of the telescopic electric cylinder 251 is fixedly connected to the four connecting plates 278, a plurality of sliding plates 279 are slidably connected in the limiting slide groove 253, and the connecting plate 278 is located just above the sliding plate 279, and one side of the connecting plate 278 and the sliding plate 279 is fixedly connected to the stirring rod 271 respectively, and the stirring rod 271 has a through cavity 272. A rotating block 274 is provided between each two adjacent stirring rods 271, and one side of the rotating block 274 is rotatably connected to two rotating rods 273, and the other ends of the two rotating rods 273 are rotatably connected to the through cavities 272 on the upper and lower stirring rods 271 respectively. The lower end of the top rotating block 274 is fixedly connected to the vertical plate 277, and the vertical plate 277 is slidably connected to the multiple rotating blocks 274 below. The upper end of the top rotating block 274 is rotatably connected to the rotating long rod 276, and the other end of the rotating long rod 276 is rotatably connected to the bottom of the rotating plate 24.

[0038] In this embodiment, when the cutting fluid is cooling and circulating, it is necessary to clean and remove the cutting impurities in the cutting fluid to prevent the impurities from clogging the cutting fluid nozzle and affecting the cutting fluid circulation. During the cooling process, the cutting fluid is injected into the tank body 1, and the output end of the telescopic electric cylinder 251 drives the connecting plate 278 to move downward, and the connecting plate 278 drives the stirring rod 271 to move downward. The stirring rod 271 drives the rotating block 274 to move by rotating the long rod 276, and the rotating block 274 drives the rotating rod 273, so that the two rotating rods 273 move the two adjacent The stirring rod 271 is stretched out, so that the distance between the two stirring rods 271 increases, and the uppermost rotating block 274 drives the lower rotating block 274 to move through the vertical plate 277, so that the direct distance between the two adjacent stirring rods 271 increases. At this time, when the first motor 21 drives the stirring rod assembly 27 to rotate, not only the stirring rod 271 stirs the cutting fluid, but also the rotating rod 273 and the vertical plate 277 are added to stir the cutting fluid, thereby improving the stirring effect, accelerating the cooling of the cutting fluid, and accelerating the mixing of the cutting fluid and the chemical reactant.

[0039] like Figures 1 to 3 、 Figure 11 and Figure 12 As shown, four vertical rods 23 are fixedly connected to the lower end of the tank cover 2, and multiple groups of sliding components 26 are arranged between the four vertical rods 23. The sliding component 26 includes a sliding ring 261 that is slidably arranged between the four vertical rods 23. Four protrusions 262 corresponding to the vertical rods 23 are fixedly arranged on the outside of the sliding ring 261. The protrusions 262 slide in the vertical rods 23, and an annular groove 263 is opened inside the sliding ring 261.

[0040] A convex plate 275 is fixedly connected to one side of the stirring rod 271 , and the convex plate 275 is slidably connected in the annular groove 263 .

[0041] The fishing assembly 28 includes a rotating frame 281 which is rotatably connected to one side of the stirring rod 271, and one end of the rotating frame 281 on the two adjacent stirring rods 271 is connected by a hinge. A magnet block 282 is fixedly provided on the opposite side of the two rotating frames 281. The magnet block 282 is used to assist the two rotating frames 281 to fit together. A fishing net 283 for catching impurities is fixedly provided on the rotating frame 281.

[0042] A water inlet shell 11 is fixedly connected to the upper side of the tank body 1, a water inlet pipe 111 for injecting cutting fluid is fixedly connected to the lower side of the water inlet shell 11, a slag discharge pipe 112 for removing impurities in the water inlet shell 11 is fixedly connected to the lower side of the water inlet shell 11, a trapezoidal block 113 is fixedly connected to the lower inside of the water inlet shell 11, a water inlet 114 parallel to the top of the trapezoidal block 113 is opened on the outside of the tank body 1, so that the inside of the water inlet shell 11 is connected to the inside of the tank body 1, a drain pipe 12 for discharging cutting fluid is fixedly connected to the lower side of the tank body 1, and a filter is provided at the liquid inlet of the drain pipe 12.

[0043] Four limiting vertical slots 115 are provided on the tank body 1 , and the positions of the limiting vertical slots 115 correspond to the positions of the vertical rods 23 .

[0044] The material storage shell 3 is fixedly connected to the upper end of the tank cover 2. The material storage shell 3 is used to store chemical reactants. A material pre-storage bin 32 is provided at the lower part of the material storage shell 3 near the edge.

[0045] A second motor 31 is fixedly provided at the lower center position inside the storage shell 3, and a rotating plate 33 is fixedly connected to the upper end of the second motor 31. A drop hole 34 corresponding to the unloading pre-storage bin 32 is opened on the rotating plate 33, and a cover plate 35 for sealing the internal space of the storage shell 3 is provided above the storage shell 3.

[0046] The tank cover 2 is provided with a feeding hole 22 corresponding to the blanking pre-storage bin 32 , and the rotating plate 24 is provided with a through hole 241 corresponding to the feeding hole 22 .

[0047] In this embodiment, after the cutting fluid is injected into the water inlet shell 11 through the water inlet pipe 111, since the water inlet 114 is at a high position, the larger impurities in the cutting fluid sink below the trapezoidal block 113 and cannot flow over the trapezoidal block 113 as the cutting fluid rises and enters the tank body 1 through the water inlet 114. When it is necessary to clean the impurities in the water inlet shell 11, the valve on the slag discharge pipe 112 is opened, and water is injected into the water inlet shell 11 through the water inlet pipe 111. The water drives the impurities in the water inlet shell 11 to flow out from the slag discharge pipe 112, and the impurities in the cutting fluid are simply filtered before cooling and filtering.

[0048] When the cutting fluid enters the tank body 1, the second motor 31 drives the rotating plate 33 to rotate. When the drop hole 34 passes above the blanking pre-storage bin 32, the chemical reactant on the rotating plate 33 falls into the blanking pre-storage bin 32. When the drop hole 34 moves away from the blanking pre-storage bin 32, the second motor 31 stops working. When the cutting fluid is injected, the first motor 21 drives the connecting vertical rod 25 to rotate through the rotating plate 24. When the rotating plate 24 rotates, the through hole 241 passes below the blanking pre-storage bin 32, and the cutting fluid in the blanking pre-storage bin 32 falls into the tank body 1.

[0049] When the output end of the telescopic electric cylinder 251 is retracted downward, the stirring rod 271 is directly enlarged. At the same time, the stirring rod 271 drives the sliding ring 261 to slide in the vertical rod 23 by driving the convex plate 275. When the first motor 21 drives the connecting vertical rod 25 to rotate, the telescopic electric cylinder 251 drives the stirring rod assembly 27 to rotate. The stirring rod 271 and the through cavity 272 rotate in the sliding ring 261. The distance between the stirring rods 271 increases, driving the rotating frames 281 on the two adjacent stirring rods 271 to separate, so that the fishing net 283 on the rotating frame 281 changes from a horizontal state to a vertical state. When the connecting vertical rod 25 drives the stirring rod assembly 27 to rotate, the rotating frame 281 also stirs the cutting fluid, accelerates the mixing efficiency of the chemical reactant and the cutting fluid, and improves the cooling rate of the cutting fluid. The rotating frame 281 drives The catching net 283 rotates in the cutting fluid, so that the catching net 283 catches the impurities in the cutting fluid. When the cutting fluid cools down, the output end of the telescopic electric cylinder 251 drives the stirring rod 271 to slowly reset, so that the two adjacent stirring rods 271 are attached together. At this time, the stirring rod 271 drives the rotating frame 281 to close, and the impurities are clamped between the two catching nets 283. The catching assembly 28 and the stirring rod assembly 27 are both recovered to the top of the tank body 1, so that the impurities caught by the catching net 283 are separated from the cutting fluid, thereby reducing the impurities in the cutting fluid and improving the mixing efficiency of the chemical reactant and the cutting fluid. After the reaction is completed, the impurities in the cutting fluid condense into larger clumps. The drain pipe 12 is opened to discharge the cutting fluid. Because the liquid inlet of the drain pipe 12 is provided with a filter screen, the condensed clumps of impurities cannot be discharged with the cutting fluid.

[0050] When stirring and cooling the cutting fluid, the distance between two adjacent stirring rods 271 is controlled by controlling the extension and contraction of the telescopic electric cylinder 251 to achieve stirring and cooling, adjust the height and density of the stirring rods 271, improve the stirring effect, and speed up the cooling time.

[0051] The above embodiments are merely exemplary embodiments of the present invention and are not intended to limit the scope of the present invention. The scope of protection of the present invention is defined by the claims. Those skilled in the art may make various modifications or equivalent substitutions to the present invention within the spirit and scope of protection of the present invention, and such modifications or equivalent substitutions shall also be deemed to fall within the scope of protection of the present invention.

Claims

1. A device for cooling and recycling cutting fluid for a silicon wafer cutting machine, comprising a tank body (1), a tank cover (2) disposed on the tank body (1) for stirring a mixture of a chemical reactant and the cutting fluid, and a storage shell (3) for controlling the discharge of the chemical reactant, characterized in that: A first motor (21) is fixedly provided above the tank cover (2), an output end of the first motor (21) passes through the tank cover (2) and is fixedly connected to a rotating plate (24), the rotating plate (24) is rotatably connected to the bottom of the tank cover (2), a connecting vertical rod (25) is fixedly provided below the rotating plate (24), four groups of stirring rod assemblies (27) for mixing and stirring chemical reactants and cutting fluid are provided on the outside of the connecting vertical rod (25), and a catching assembly (28) for catching impurities in the cutting fluid is provided on one side of each group of stirring rod assemblies (27); A telescopic electric cylinder (251) for driving the stirring rod assembly (27) to unfold is fixedly provided above the connecting vertical rod (25), and four vertical slots (252) corresponding to the positions of the four groups of stirring rod assemblies (27) are provided on the connecting vertical rod (25), and a limiting sliding slot (253) is provided inside each of the four vertical slots (252); The stirring rod assembly (27) includes a connecting plate (278) slidably connected in the vertical groove (252), the output end of the telescopic electric cylinder (251) is fixedly connected to the four connecting plates (278), a plurality of sliding plates (279) are slidably connected in the limiting sliding groove (253), and the connecting plate (278) is located directly above the sliding plate (279), and the connecting plate (278) and the sliding plate (279) are respectively fixedly connected to a stirring rod (271) on one side, the stirring rod (271) is provided with a through cavity (272), and a rotating shaft is provided between each two adjacent stirring rods (271). A movable block (274), one side of the rotating block (274) is rotatably connected to two rotating rods (273), the other ends of the two rotating rods (273) are rotatably connected to the through cavities (272) on the upper and lower stirring rods (271), the lower end of the uppermost rotating block (274) is fixedly connected to a vertical plate (277), and the vertical plate (277) is slidably connected to the multiple rotating blocks (274) below, the upper end of the uppermost rotating block (274) is rotatably connected to a rotating long rod (276), and the other end of the rotating long rod (276) is rotatably connected to the bottom of the rotating plate (24); The lower end of the tank cover (2) is fixedly connected to four vertical rods (23), and a plurality of sliding components (26) are arranged between the four vertical rods (23). The sliding components (26) include a sliding ring (261) slidably arranged between the four vertical rods (23), a protrusion (262) is fixedly arranged on the outside of the sliding ring (261), and an annular groove (263) is opened inside the sliding ring (261); The fishing assembly (28) comprises a rotating frame (281) rotatably connected to one side of the stirring rod (271), and one end of the rotating frame (281) on two adjacent stirring rods (271) is connected by a hinge.

2. The device for cooling and recycling cutting fluid for a silicon wafer cutting machine according to claim 1, characterized in that: A convex plate (275) is fixedly connected to one side of the stirring rod (271).

3. The device for cooling and recycling cutting fluid for a silicon wafer cutting machine according to claim 2, characterized in that: A magnet block (282) is fixedly provided on one side opposite to the two rotating frames (281), and a fishing net (283) for catching impurities is fixedly provided on the rotating frame (281).

4. The device for cooling and recycling cutting fluid for a silicon wafer cutting machine according to claim 3, characterized in that: A water inlet shell (11) is fixedly connected to the upper side of one side of the tank body (1), a water inlet pipe (111) for injecting cutting fluid is fixedly connected to the lower side of the water inlet shell (11), a slag discharge pipe (112) for removing impurities in the water inlet shell (11) is fixedly connected to the lower side of the water inlet shell (11), a trapezoidal block (113) is fixedly connected to the lower side of the water inlet shell (11), a water inlet (114) parallel to the top of the trapezoidal block (113) is opened on the outer side of the tank body (1), the interior of the water inlet shell (11) is communicated with the interior of the tank body (1), and a discharge pipe (12) for discharging cutting fluid is fixedly connected to the lower side of the outer side of the tank body (1).

5. The device for cooling and recycling cutting fluid for a silicon wafer cutting machine according to claim 4, characterized in that: Four limiting vertical slots (115) are provided on the tank body (1), and the positions of the limiting vertical slots (115) correspond to the positions of the vertical rods (23).

6. The device for cooling and recycling cutting fluid for a silicon wafer cutting machine according to claim 1, characterized in that: The material storage shell (3) is fixedly connected to the upper end of the tank cover (2), and a material pre-storage bin (32) is provided at the lower part of the interior of the material storage shell (3) near the edge.

7. The device for cooling and recycling cutting fluid for a silicon wafer cutting machine according to claim 6, characterized in that: A second motor (31) is fixedly provided at the center position of the lower interior of the material storage shell (3); a rotating plate (33) is fixedly connected to the upper end of the second motor (31); a material drop hole (34) corresponding to the material pre-storage bin (32) is provided on the rotating plate (33); and a cover plate (35) for sealing the internal space of the material storage shell (3) is provided above the material storage shell (3).

8. The device for cooling and recycling cutting fluid for a silicon wafer cutting machine according to claim 7, characterized in that: The tank cover (2) is provided with a feed hole (22) corresponding to the blanking pre-storage bin (32), and the rotating plate (24) is provided with a through hole (241) corresponding to the feed hole (22).

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