Transportation device for integrated circuit production

Abstract

The invention relates to the technical field of transportation devices, and particularly discloses a transportation device for integrated circuit production, which comprises a positioning conveying assembly, one side of the inner side of the positioning conveying assembly is movably clamped with an air exhaust assembly, the other side of the inner side of the positioning conveying assembly is fixedly connected with an air exhaust assembly, and the air exhaust assembly comprises an air exhaust groove. A positioning strip is fixedly connected to one side of the air exhaust groove, a filter screen is arranged on the inner side of the air exhaust groove, and a first reducing square pipe is fixedly connected to the bottom of the filter screen; in the operation process of the air exhaust assembly and the air exhaust assembly, in the use process, part scraps, dust and the like located at the top of a transmission belt can be sucked into an air exhaust groove due to airflow generated by air pump work and blown towards the inner side of the transmission belt, and then rotation is generated under positioning of a second positioning semicircular ring and a rotary positioning block; and then the air exhaust assembly can be integrally exhausted, and then the filter screen can be cleaned.

Description

Technical Field

[0001] The present invention relates to the technical field of transport devices, and more specifically to a transport device for integrated circuit production. Background Art

[0002] An integrated circuit is a miniature electronic device or component that integrates the transistors, diodes, resistors, capacitors, inductors and other components required for the circuit and interconnects them with wiring on a small piece or several small pieces of semiconductor wafers or dielectric substrates through a specific process, and then encapsulates them in a tube shell to form a miniature structure with the required circuit function; In the integrated circuit production process, the conveying link is one of the key links to ensure the smooth progress of the entire production process. In the entire integrated circuit production process, the main equipment in the conveying link is: conveyor belt, which is used to transport wafers, integrated circuits or other materials between production lines.

[0003] The existing integrated circuit production transport device has some shortcomings during use, as follows: In the existing integrated circuit conveying process, if it is used for the conveying of integrated circuits or the conveying of integrated circuit core parts during use, the integrated circuits or integrated circuit core parts located on the conveyor belt will produce a small relative displacement with the conveyor belt during the operation of the conveyor belt. During the start-up of the transmission belt, the integrated circuits or integrated circuit core parts will produce a small relative displacement with the conveyor belt under the action of inertia, which will cause friction to the integrated circuits or integrated circuit core parts. Therefore, during the transportation process, certain scratches will be produced on the surface of the integrated circuits or integrated circuit core parts, which is not convenient for ensuring the integrity of the integrated circuits or integrated circuit core parts. After conveying to the designated position, the integrated circuits or integrated circuit core parts located on the outside of the transmission belt need to be pushed to the designated position by a scraping device or a pushing device. However, during the pushing process, the integrated circuits or integrated circuit core parts will slide on the transmission belt, which will scratch some of the integrated circuits or integrated circuit core parts, making it difficult to ensure the integrity of the integrated circuits or integrated circuit core parts, and it is not convenient to ensure the integrity of the appearance of the integrated circuits or integrated circuit core parts. Summary of the invention

[0004] In order to overcome the above-mentioned defects of the prior art, the present invention provides a transport device for integrated circuit production to solve the problems existing in the above-mentioned background technology.

[0005] The present invention provides the following technical solution: a transportation device for integrated circuit production, comprising a positioning and conveying component, one side of the inner side of the positioning and conveying component is movably connected with an exhaust component, the other side of the inner side of the positioning and conveying component is fixedly connected with an exhaust component, the exhaust component comprises an exhaust groove, one side of the exhaust groove is fixedly connected with a positioning bar, the inner side of the exhaust groove is provided with a filter screen, the bottom of the filter screen is fixedly connected with a first reducing square tube, and the bottom of the first reducing square tube is fixedly connected with a gas guide component.

[0006] Furthermore, the positioning and conveying assembly includes a first servo motor, a sealing back plate is fixedly connected to the front of the first servo motor, a U-shaped positioning block is fixedly connected to the front of the sealing back plate, the output shaft of the first servo motor is transmission-connected to the transmission block, a support leg is fixedly connected to the bottom of the U-shaped positioning block, a guide positioning block is fixedly connected to the other side of the U-shaped positioning block, a transmission belt is movably sleeved on the outer side of the transmission block, and convex guide grooves are provided on the front and back sides of the inner side of the transmission belt.

[0007] Furthermore, the gas guide assembly includes a gas guide tube, one side of the gas guide tube is fixedly connected to a second servo motor, the output shaft of the second servo motor is transmission-connected to a rotating shaft, the outer side of the rotating shaft is fixedly connected to a fan blade, the other side of the outer side of the gas guide tube is fixedly connected to a first positioning ring, and the front and back sides of the gas guide tube are fixedly connected to a first L-shaped square tube.

[0008] Furthermore, the exhaust assembly includes an exhaust groove, the front and back sides of the top of the exhaust groove are fixedly connected with a convex sliding block, one side of the bottom of the exhaust groove is fixedly connected with a limiting plate, the bottom of the inner side of the exhaust groove is fixedly connected with a second reducing square tube, the bottom of the second reducing square tube is fixedly connected with a second L-shaped square tube, the inner side of the second L-shaped square tube is fixedly connected with an exhaust pipe, one side of the exhaust pipe is fixedly connected with an air pump, and one side of the air pump is fixedly connected with a sealing positioning assembly.

[0009] Furthermore, the sealing positioning assembly includes an exhaust pipe, a second positioning ring is fixedly connected to one side of the outer side of the exhaust pipe, a first positioning semicircular ring is fixedly sleeved on the outer side of the second positioning ring, a first tightening positioning plate is fixedly connected to the top of the first positioning semicircular ring, a rotating positioning block is movably clamped on the bottom of the first positioning semicircular ring, a second positioning semicircular ring is fixedly connected to the bottom of the rotating positioning block, a second tightening positioning block is fixedly connected to the outer side of the second positioning semicircular ring, a second tightening positioning block is fixedly connected to the outer side of the second positioning semicircular ring, a positioning square plate is fixedly connected to the outer side of the second positioning semicircular ring, and a positioning bolt is movably connected to the inner side of the positioning square plate.

[0010] Furthermore, the cross-sectional dimensions of the positioning strip are matched with the cross-sectional dimensions of the square guide groove within a tolerance, the top of the limit plate and the bottom of the exhaust groove are on the same plane, the fan blades are grouped in groups of three, and two of the front and back sides of the first L-shaped square tube are grouped together, the number of groups of fan blades is the same as the number of groups of the first L-shaped square tubes, the fan blades are located at the center position between the two first L-shaped square tubes, the top of the first reducing square tube and the bottom of the filter mesh are matched with each other, square holes are provided on the front and back sides of the gas guide tube, the size of the square hole of the gas guide tube is matched with the size of the first L-shaped square tube within a tolerance and is welded.

[0011] Furthermore, the diameter of the exhaust pipe and the diameter of the gas guide pipe match each other, the back side of the exhaust groove is fixedly connected to the front side of the sealing back plate, the cross-sectional dimensions of the convex guide groove and the cross-sectional dimensions of the convex slider match each other in tolerance, the width of the top of the exhaust groove is the same as the width of the transmission belt, and the width of the exhaust groove is the same as the width of the exhaust groove.

[0012] Furthermore, the outer diameter of the second positioning ring is the same as the outer diameter of the first positioning ring, the diameter of the exhaust pipe is the same as the diameter of the gas guide pipe, the inner diameter of the first positioning semicircular ring and the outer diameter of the second positioning ring have a tolerance match, the diameter of the openings on both sides of the first positioning semicircular ring and the outer diameter of the exhaust pipe have a tolerance match, and the inner diameter of the second positioning semicircular ring and the diameter of the openings on both sides are the same as the inner diameter of the first positioning semicircular ring and the diameter of the openings on both sides.

[0013] Furthermore, the top of the second tightening positioning block and the top of the second positioning semicircular ring are on the same plane, the front of the first tightening positioning plate and the front of the first positioning semicircular ring are on the same plane, the front of the second tightening positioning block and the back of the positioning square plate are parallel to each other, and the front of the second tightening positioning block and the first tightening positioning plate are both provided with threaded holes, and the inner threads of the first tightening positioning plate and the second tightening positioning block cooperate with the outer threads of the positioning bolt.

[0014] Technical effects and advantages of the present invention: 1. In the process of using the present invention, the first servo motor drives the transmission block to rotate and then drives the transmission belt to transmit, so as to achieve the purpose of conveying the integrated circuit or the core parts of the integrated circuit, and then the air pump works through the gas guide tube, the first L-shaped square tube and the air extraction groove to extract the air inside, and then because the transmission belt covers the top of the air extraction groove, the gas will extract the air through the air holes on the outside of the transmission belt. If there is an integrated circuit or the core parts of the integrated circuit located on the top of the transmission belt at the top of the air extraction groove, the flow of gas generates a downward suction force so that the integrated circuit or the core parts of the integrated circuit are adsorbed on the outside of the transmission belt, thereby avoiding the integrated circuit or the core parts of the integrated circuit located on the top of the transmission belt from being relatively displaced with the transmission belt due to its own inertia during the conveying process, resulting in scratches, thereby ensuring the integrity of the appearance of the integrated circuit or the core parts of the integrated circuit.

[0015] 2. In the present invention, when the integrated circuit or the integrated circuit core part located on the outer side of the transmission belt moves to the top of the exhaust groove under the drive of the transmission belt, the air pump extracts the air from the exhaust groove and blows it into the exhaust groove through the exhaust pipe, the second L-shaped square tube and the second reducing square tube, so that the air is discharged from the inner side of the transmission belt through the air holes of the transmission belt to the outer side of the transmission belt, and then the convex slider and the convex guide groove are fixed to prevent the transmission belt from being blown by the gas, so that the transmission belt and the exhaust groove are not fitted, and the sealing between the transmission belt and the exhaust groove is ensured so that the gas can only be discharged through the air holes on the outer side of the transmission belt, so that the integrated circuit or the integrated circuit core part located on the top of the exhaust groove is blown up by the gas. At this time, the integrated circuit or the integrated circuit core part pushed by the pushing device is suspended on the top of the transmission belt, so that the friction between the integrated circuit or the integrated circuit core part and the transmission belt is effectively avoided when the pushing or scraping device is running, and the appearance of the integrated circuit or the integrated circuit core part is guaranteed to be complete, and the integrity of the product is guaranteed.

[0016] 3. In the operation process of the air extraction component and the exhaust component of the present invention, the airflow generated by the air pump blowing toward the inner side of the transmission belt during use will suck the parts debris and dust on the top of the transmission belt into the air extraction groove, and the parts debris and dust on the top of the transmission belt will be effectively removed under the filtration of the filter screen, and then the positioning bolt is rotated to make the positioning bolt leave the first fastening positioning plate and then the first positioning semicircular ring and the second positioning semicircular ring are separated, and then the second positioning semicircular ring rotates under the positioning of the rotating positioning block, and then the air extraction component can be pulled out as a whole, and then the filter screen can be cleaned.

[0017] 4. During the use of the present invention, the second servo motor drives the rotating shaft to rotate and then drives the fan blades to rotate, generating an airflow moving toward the sealing positioning assembly, and then the sealing positioning assembly can cooperate to effectively enhance the suction force inside the air extraction groove and the blowing airflow inside the exhaust groove, thereby ensuring the fixing and blowing of the integrated circuit or the core parts of the integrated circuit. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic diagram of the overall structure of the present invention.

[0019] Figure 2 It is a schematic diagram of the structure of the positioning and conveying assembly of the present invention.

[0020] Figure 3 It is a schematic diagram of the cross-sectional structure of the positioning and conveying component of the present invention.

[0021] Figure 4 It is a schematic diagram of the structure of the air extraction component of the present invention.

[0022] Figure 5 It is a schematic diagram of the cross-sectional structure of the air extraction component of the present invention.

[0023] Figure 6 It is a schematic diagram of the cross-sectional structure of the gas guide assembly of the present invention.

[0024] Figure 7 It is a schematic diagram of the exhaust assembly structure of the present invention.

[0025] Figure 8 It is a schematic diagram of the structure of the sealing positioning assembly of the present invention.

[0026] The accompanying drawings are marked as follows: 1. Positioning and conveying assembly; 101. First servo motor; 102. U-shaped positioning block; 103. Transmission block; 104. Support leg; 105. Guide positioning block; 106. Sealing back plate; 107. Transmission belt; 108. Convex guide groove; 109. Square guide groove; 2. Air extraction assembly; 201. Air extraction groove; 202. Positioning strip; 203. Filter; 204. First reducing square tube; 205. Gas guide assembly; 2051. Gas guide tube; 2052. Second servo motor; 2053. Rotating shaft; 2054. Fan blade; 2055. First Positioning ring; 2056, first L-shaped square tube; 3, exhaust assembly; 301, exhaust groove; 302, convex slider; 303, limit plate; 304, second reducing square tube; 305, second L-shaped square tube; 306, exhaust pipe; 307, air pump; 308, sealing positioning assembly; 3081, exhaust pipe; 3082, second positioning ring; 3083, first positioning semicircular ring; 3084, first fastening positioning plate; 3085, rotating positioning block; 3086, second positioning semicircular ring; 3087, second fastening positioning block; 3088, positioning square plate; 3089, positioning bolt. DETAILED DESCRIPTION

[0027] The technical solution of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the present invention. In addition, the forms of the various structures recorded in the following embodiments are merely illustrative, and the integrated circuit production transportation device involved in the present invention is not limited to the various structures recorded in the following embodiments. All other embodiments obtained by ordinary technicians in this field without making creative work belong to the scope of protection of the present invention.

[0028] Reference Figures 1 to 8 The present invention provides a transport device for integrated circuit production, including a positioning and conveying component 1, one side of the inner side of the positioning and conveying component 1 is movably connected with a vacuum component 2, the other side of the inner side of the positioning and conveying component 1 is fixedly connected with an exhaust component 3, the vacuum component 2 includes a vacuum groove 201, one side of the vacuum groove 201 is fixedly connected with a positioning bar 202, the inner side of the vacuum groove 201 is provided with a filter screen 203, the bottom of the filter screen 203 is fixedly connected with a first reducing square tube 204, and the bottom of the first reducing square tube 204 is fixedly connected with a gas guide component 205.

[0029] In a preferred embodiment, the positioning and conveying assembly 1 includes a first servo motor 101, a sealing back plate 106 is fixedly connected to the front of the first servo motor 101, a U-shaped positioning block 102 is fixedly connected to the front of the sealing back plate 106, the output shaft of the first servo motor 101 is transmission-connected to a transmission block 103, a support leg 104 is fixedly connected to the bottom of the U-shaped positioning block 102, a guide positioning block 105 is fixedly connected to the other side of the U-shaped positioning block 102, a transmission belt 107 is movably sleeved on the outer side of the transmission block 103, and convex guide grooves 108 are provided on the front and back sides of the inner side of the transmission belt 107.

[0030] In a preferred embodiment, the gas guide component 205 includes a gas guide tube 2051, one side of the gas guide tube 2051 is fixedly connected to a second servo motor 2052, the output shaft of the second servo motor 2052 is transmission-connected to a rotating shaft 2053, the outer side of the rotating shaft 2053 is fixedly connected to a fan blade 2054, the other side of the outer side of the gas guide tube 2051 is fixedly connected to a first positioning ring 2055, and the front and back sides of the gas guide tube 2051 are fixedly connected to a first L-shaped square tube 2056; during use, the second servo motor 2052 drives the rotating shaft 2053 to rotate and then drives the fan blade 2054 to rotate, generating an airflow moving toward the sealing positioning component 308, and then the sealing positioning component 308 can cooperate with the sealing positioning component 308 to effectively enhance the suction force on the inner side of the vacuum groove 201 and the blowing airflow on the inner side of the exhaust groove 301, thereby ensuring the fixing and blowing of the integrated circuit or the core parts of the integrated circuit; during use, the first servo motor 2052 drives the rotating shaft 2053 to rotate and then drives the fan blade 2054 to rotate, generating an airflow moving toward the sealing positioning component 308, and then the sealing positioning component 308 can effectively enhance the suction force on the inner side of the vacuum groove 201 and the blowing airflow on the inner side of the exhaust groove 301, thereby ensuring the fixing and blowing of the integrated circuit or the core parts of the integrated circuit; during use, the first servo The servo motor 101 drives the transmission block 103 to rotate and then drives the transmission belt 107 to transmit, thereby achieving the purpose of conveying the integrated circuit or the core parts of the integrated circuit, and then the air pump 307 works through the gas guide tube 2051, the first L-shaped square tube 2056 and 2057 to extract the air inside the exhaust groove 201, and then because the transmission belt 107 covers the top of the exhaust groove 201, the gas will extract the air through the air holes on the outside of the transmission belt 107. If there is an integrated circuit or an integrated circuit core part located on the top of the transmission belt 107 at the top of the exhaust groove 201 at this time, the flow of gas generates a downward suction force so that the integrated circuit or the core parts of the integrated circuit are adsorbed on the outside of the transmission belt 107, avoiding the integrated circuit or the core parts of the integrated circuit located on the top of the transmission belt 107 from being relatively displaced with the transmission belt 107 due to its own inertia during the transportation process, resulting in scratches, thereby ensuring the integrity of the appearance of the integrated circuit or the core parts of the integrated circuit.

[0031] In a preferred embodiment, the exhaust component 3 includes an exhaust groove 301, the front and back sides of the top of the exhaust groove 301 are fixedly connected with a convex slider 302, one side of the bottom of the exhaust groove 301 is fixedly connected with a limiting plate 303, the bottom of the inner side of the exhaust groove 301 is fixedly connected with a second reducing square tube 304, the bottom of the second reducing square tube 304 is fixedly connected with a second L-shaped square tube 305, the inner side of the second L-shaped square tube 305 is fixedly connected with an exhaust pipe 306, one side of the exhaust pipe 306 is fixedly connected with an air pump 307, and one side of the air pump 307 is fixedly connected with a sealing positioning component 308; when the integrated circuit or the core parts of the integrated circuit located on the outside of the transmission belt 107 moves to the top of the exhaust groove 301 driven by the transmission belt 107, the air extracted from the exhaust groove 201 by the air pump 307 will be blown into the exhaust groove through the exhaust pipe 306, the second L-shaped square tube 305 and the second reducing square tube 304. In 301, air is discharged from the inner side of the transmission belt 107 through the air holes of the transmission belt 107 to the outer side of the transmission belt 107, and then the convex slider 302 and the convex guide groove 108 are fixed to prevent the transmission belt 107 from being blown by the gas, resulting in the transmission belt 107 and the exhaust groove 301 not fitting together. The sealing between the transmission belt 107 and the exhaust groove 301 is ensured so that the gas can only be discharged through the air holes on the outer side of the transmission belt 107, so that the integrated circuit or the core parts of the integrated circuit located on the top of the exhaust groove 301 will be blown up by the gas. At this time, the integrated circuit or the core parts of the integrated circuit pushed by the pushing device are suspended on the top of the transmission belt 107, thereby effectively avoiding the friction between the integrated circuit or the core parts of the integrated circuit and the transmission belt 107 when the pushing or scraping device is running, thereby ensuring the integrity of the appearance of the integrated circuit or the core parts of the integrated circuit and the integrity of the product.

[0032] In a preferred embodiment, the sealing positioning assembly 308 includes an exhaust pipe 3081, a second positioning ring 3082 is fixedly connected to one side of the outer side of the exhaust pipe 3081, a first positioning semicircular ring 3083 is fixedly sleeved on the outer side of the second positioning ring 3082, a first fastening positioning plate 3084 is fixedly connected to the top of the first positioning semicircular ring 3083, a rotation positioning block 3085 is movably clamped on the bottom of the first positioning semicircular ring 3083, a second positioning semicircular ring 3086 is fixedly connected to the bottom of the rotation positioning block 3085, a second fastening positioning block 3087 is fixedly connected to the outer side of the second positioning semicircular ring 3086, a positioning square plate 3088 is fixedly connected to the outer side of the second positioning semicircular ring 3086, and a positioning bolt 3084 is movably connected to the inner side of the positioning square plate 3088. 089; During the operation of the vacuum component 2 and the exhaust component 3, the airflow generated by the operation of the air pump 307 and blowing toward the inner side of the transmission belt 107 during use will suck the parts debris and dust located on the top of the transmission belt 107 into the vacuum groove 201, and the parts debris and dust on the top of the transmission belt 107 will be effectively removed under the filtration of the filter 203, and then the positioning bolt 3089 is rotated to make the positioning bolt 3089 leave the first fastening positioning plate 3084 and then the first positioning semicircular ring 3083 and the second positioning semicircular ring 3086 are separated, and then the second positioning semicircular ring 3086 rotates under the positioning of the rotating positioning block 3085, and then the vacuum component 2 can be pulled out as a whole, and then the filter 203 can be cleaned.

[0033] In a preferred embodiment, the cross-sectional dimensions of the positioning strip 202 are matched with the cross-sectional dimensions of the square guide groove 109 within a tolerance, the top of the limit plate 303 and the bottom of the exhaust groove 201 are on the same plane, the fan blades 2054 are grouped in three, and the two on the front and back sides of the first L-shaped square tube 2056 are grouped in one group, the number of groups of fan blades 2054 is the same as the number of groups of the first L-shaped square tubes 2056, the position of the fan blades 2054 is located at the center position between the two first L-shaped square tubes 2056, the top of the first reducing square tube 204 and the bottom of the filter screen 203 cooperate with each other, square holes are provided on the front and back sides of the gas guide tube 2051, the size of the square hole of the gas guide tube 2051 is matched with the size of the first L-shaped square tube 2056 within a tolerance and are welded.

[0034] In a preferred embodiment, the diameter of the exhaust pipe 306 matches the diameter of the gas guide tube 2051, the back of the exhaust groove 301 is fixedly connected to the front of the sealing back plate 106, the cross-sectional dimensions of the convex guide groove 108 and the cross-sectional dimensions of the convex slider 302 are matched with each other in tolerance, the width of the top of the exhaust groove 301 is the same as the width of the transmission belt 107, and the width of the exhaust groove 301 is the same as the width of the vacuum groove 201.

[0035] In a preferred embodiment, the outer diameter of the second positioning ring 3082 is the same as the outer diameter of the first positioning ring 2055, the diameter of the exhaust pipe 3081 is the same as the diameter of the gas guide pipe 2051, the inner diameter of the first positioning semicircular ring 3083 and the outer diameter of the second positioning ring 3082 have a tolerance match, the diameter of the openings on both sides of the first positioning semicircular ring 3083 and the outer diameter of the exhaust pipe 3081 have a tolerance match, and the inner diameter of the second positioning semicircular ring 3086 and the diameter of the openings on both sides are the same as the inner diameter of the first positioning semicircular ring 3083 and the diameter of the openings on both sides.

[0036] In a preferred embodiment, the top of the second tightening positioning block 3087 and the top of the second positioning semicircular ring 3086 are on the same plane, the front of the first tightening positioning plate 3084 and the front of the first positioning semicircular ring 3083 are on the same plane, the front of the second tightening positioning block 3087 and the back of the positioning square plate 3088 are parallel to each other, and the front of the second tightening positioning block 3087 and the first tightening positioning plate 3084 are both provided with threaded holes, and the inner threads of the first tightening positioning plate 3084 and the second tightening positioning block 3087 cooperate with the outer threads of the positioning bolt 3089.

[0037] The working principle of the present invention is as follows: during use, the first servo motor 101 drives the transmission block 103 to rotate and then drives the transmission belt 107 to transmit, thereby achieving the purpose of conveying the integrated circuit or the core parts of the integrated circuit, and then the air pump 307 works to extract the air inside the air extraction groove 201 through the gas guide tube 2051, the first L-shaped square tube 2056 and 2057, and then because the transmission belt 107 covers the top of the air extraction groove 201, the gas will be drawn through the air holes on the outside of the transmission belt 107. If there is an integrated circuit or an integrated circuit core part located on the top of the transmission belt 107 at the top of the air extraction groove 201, the downward suction force generated by the flow of gas causes the integrated circuit or the integrated circuit core part to be adsorbed on the outside of the transmission belt 107, thereby avoiding the integrated circuit or the integrated circuit core part located on the top of the transmission belt 107 from being relatively displaced with the transmission belt 107 due to its own inertia during the conveying process, resulting in scratches, thereby ensuring the integrity of the appearance of the integrated circuit or the integrated circuit core part; When the integrated circuit or the core parts of the integrated circuit located on the outside of the transmission belt 107 moves to the top of the exhaust groove 301 driven by the transmission belt 107, the air pump 307 extracts the air from the exhaust groove 201 and blows it into the exhaust groove 301 through the exhaust pipe 306, the second L-shaped square tube 305 and the second reducing square tube 304, so that the air is discharged from the inside of the transmission belt 107 through the air holes of the transmission belt 107 to the outside of the transmission belt 107, and then the convex slider 302 and the convex guide groove 108 are fixed to prevent the transmission belt 107 from being blown by the gas, so that the transmission belt 107 and the exhaust groove 301 are not attached. The sealing between the transmission belt 107 and the exhaust groove 301 is ensured, so that the gas can only be discharged through the air holes on the outside of the transmission belt 107, so that the integrated circuit or the core parts of the integrated circuit located on the top of the exhaust groove 301 will be blown up by the gas. At this time, the integrated circuit or the core parts of the integrated circuit pushed by the pushing device are suspended on the top of the transmission belt 107, so it is effectively avoided that the integrated circuit or the core parts of the integrated circuit and the transmission belt 107 generate friction when the pushing or scraping device is running, ensuring the integrity of the appearance of the integrated circuit or the core parts of the integrated circuit, and ensuring the integrity of the product; During the operation of the air extraction component 2 and the exhaust component 3, the airflow generated by the operation of the air pump 307 and blowing toward the inner side of the transmission belt 107 during use will suck the parts debris and dust located on the top of the transmission belt 107 into the air extraction groove 201, and the parts debris and dust on the top of the transmission belt 107 will be effectively removed under the filtration of the filter 203, and then the positioning bolt 3089 is rotated to make the positioning bolt 3089 leave the first fastening positioning plate 3084, and then the first positioning semicircular ring 3083 and the second positioning semicircular ring 3086 are separated, and then the second positioning semicircular ring 3086 rotates under the positioning of the rotating positioning block 3085, and then the air extraction component 2 can be pulled out as a whole, and then the filter 203 can be cleaned; During use, the second servo motor 2052 drives the rotating shaft 2053 to rotate and then drives the fan blades 2054 to rotate, generating an airflow moving toward the sealing positioning assembly 308, which can then cooperate with the sealing positioning assembly 308 to effectively enhance the suction force on the inside of the vacuum groove 201 and the blowing airflow on the inside of the exhaust groove 301, thereby ensuring the fixation and blowing of the integrated circuit or the core parts of the integrated circuit.

[0038] Finally, a few points should be explained: First, in the description of this application, it should be noted that, unless otherwise specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, which may refer to mechanical connection or electrical connection, or internal communication between two components, or direct connection. "upper", "lower", "left", "right", etc. are only used to indicate relative positional relationships. When the absolute position of the object being described changes, the relative positional relationship may change; Secondly: In the drawings of the embodiments disclosed in the present invention, only the structures related to the embodiments disclosed in the present invention are involved, and other structures can refer to the general design. In the absence of conflict, the same embodiment and different embodiments of the present invention can be combined with each other; Finally: The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A transport device for integrated circuit production, characterized in that: The invention comprises a positioning and conveying component (1), wherein one side of the inner side of the positioning and conveying component (1) is movably connected to an exhaust component (2), and the other side of the inner side of the positioning and conveying component (1) is fixedly connected to an exhaust component (3), wherein the exhaust component (2) comprises an exhaust groove (201), one side of the exhaust groove (201) is fixedly connected to a positioning bar (202), a filter screen (203) is arranged on the inner side of the exhaust groove (201), a first reducing square tube (204) is fixedly connected to the bottom of the filter screen (203), and a gas guide component (205) is fixedly connected to the bottom of the first reducing square tube (204).

2. The integrated circuit production transport device according to claim 1, characterized in that: The positioning and conveying assembly (1) comprises a first servo motor (101), the front side of the first servo motor (101) is fixedly connected to a sealing back plate (106), the front side of the sealing back plate (106) is fixedly connected to a U-shaped positioning block (102), the output shaft of the first servo motor (101) is transmission-connected to a transmission block (103), the bottom of the U-shaped positioning block (102) is fixedly connected to a supporting leg (104), the other side of the U-shaped positioning block (102) is fixedly connected to a guide positioning block (105), the outer side of the transmission block (103) is movably sleeved with a transmission belt (107), and the front and back sides of the inner side of the transmission belt (107) are both provided with convex guide grooves (108).

3. The integrated circuit production transport device according to claim 2, characterized in that: The gas guide assembly (205) comprises a gas guide tube (2051), one side of the gas guide tube (2051) is fixedly connected to a second servo motor (2052), the output shaft of the second servo motor (2052) is drivingly connected to a rotating shaft (2053), the outer side of the rotating shaft (2053) is fixedly connected to a fan blade (2054), the other side of the outer side of the gas guide tube (2051) is fixedly connected to a first positioning ring (2055), and the front and back sides of the gas guide tube (2051) are fixedly connected to a first L-shaped square tube (2056).

4. The integrated circuit production transport device according to claim 3, characterized in that: The exhaust assembly (3) comprises an exhaust groove (301), the front and back sides of the top of the exhaust groove (301) are fixedly connected to a convex sliding block (302), one side of the bottom of the exhaust groove (301) is fixedly connected to a limiting plate (303), the bottom of the inner side of the exhaust groove (301) is fixedly connected to a second square tube (304) of different diameters, the bottom of the second square tube (304) of different diameters is fixedly connected to a second L-shaped square tube (305), the inner side of the second L-shaped square tube (305) is fixedly connected to an exhaust pipe (306), one side of the exhaust pipe (306) is fixedly connected to an air pump (307), and one side of the air pump (307) is fixedly connected to a sealing positioning assembly (308).

5. The integrated circuit production transport device according to claim 3, characterized in that: The sealing positioning assembly (308) comprises an exhaust pipe (3081), a second positioning ring (3082) is fixedly connected to one side of the outer side of the exhaust pipe (3081), a first positioning semicircular ring (3083) is fixedly sleeved on the outer side of the second positioning ring (3082), a first tightening positioning plate (3084) is fixedly connected to the top of the first positioning semicircular ring (3083), a rotating positioning block (3085) is movably clamped on the bottom of the first positioning semicircular ring (3083), a second positioning semicircular ring (3086) is fixedly connected to the bottom of the rotating positioning block (3085), a second tightening positioning block (3087) is fixedly connected to the outer side of the second positioning semicircular ring (3086), a positioning square plate (3088) is fixedly connected to the outer side of the second positioning semicircular ring (3086), and a positioning bolt (3089) is movably connected to the inner side of the positioning square plate (3088).

6. The integrated circuit production transport device according to claim 3, characterized in that: The cross-sectional dimensions of the positioning strip (202) and the cross-sectional dimensions of the square guide groove (109) are matched with each other in tolerance; the top of the limit plate (303) and the bottom of the air extraction groove (201) are on the same plane; the fan blades (2054) are grouped in three, and two of the front and back sides of the first L-shaped square tube (2056) are grouped in one group; the number of groups of the fan blades (2054) is the same as the number of groups of the first L-shaped square tube (2056); the fan blades (2054) are located at the center between the two first L-shaped square tubes (2056); the top of the first reducing square tube (204) and the bottom of the filter screen (203) are matched with each other; square holes are provided on the front and back sides of the gas guide tube (2051); the size of the square hole of the gas guide tube (2051) and the size of the first L-shaped square tube (2056) are matched with each other in tolerance and are welded.

7. The integrated circuit production transport device according to claim 4, characterized in that: The diameter of the exhaust pipe (306) matches the diameter of the gas guide pipe (2051), the back side of the exhaust groove (301) is fixedly connected to the front side of the sealing back plate (106), the cross-sectional dimensions of the convex guide groove (108) match the cross-sectional dimensions of the convex slider (302) with a tolerance, the width of the top of the exhaust groove (301) is the same as the width of the transmission belt (107), and the width of the exhaust groove (301) is the same as the width of the exhaust groove (201).

8. The integrated circuit production transport device according to claim 5, characterized in that: The outer diameter of the second positioning ring (3082) is the same as the outer diameter of the first positioning ring (2055), the diameter of the exhaust pipe (3081) is the same as the diameter of the gas guide pipe (2051), the inner diameter of the first positioning semicircular ring (3083) and the outer diameter of the second positioning ring (3082) have a tolerance match, the diameter of the openings on both sides of the first positioning semicircular ring (3083) and the outer diameter of the exhaust pipe (3081) have a tolerance match, and the inner diameter and the diameter of the openings on both sides of the second positioning semicircular ring (3086) are the same as the inner diameter and the diameter of the openings on both sides of the first positioning semicircular ring (3083).

9. The integrated circuit production transport device according to claim 5, characterized in that: The top of the second fastening positioning block (3087) and the top of the second positioning semicircular ring (3086) are on the same plane, the front of the first fastening positioning plate (3084) and the front of the first positioning semicircular ring (3083) are on the same plane, the front of the second fastening positioning block (3087) and the back of the positioning square plate (3088) are parallel to each other, the front of the second fastening positioning block (3087) and the first fastening positioning plate (3084) are both provided with threaded holes, and the inner threads of the first fastening positioning plate (3084) and the second fastening positioning block (3087) cooperate with the outer threads of the positioning bolt (3089).

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