Carrying device for correction disc of silicon carbide precise double-sided grinding machine

Abstract

The invention relates to the technical field of grinding machines. A silicon carbide precise double-face grinding machine correction disc carrying device comprises a carrying vehicle and further comprises a hoisting mechanism used for hoisting a correction disc, the hoisting mechanism comprises two lifting supporting plates used for being embedded into the correction disc, the two lifting supporting plates are arranged in a central symmetry mode, and locking screws are installed on the lifting supporting plates; the hoisting mechanism further comprises a main supporting plate, and the main supporting plate is connected with the two lifting supporting plates through locking screws. A lifting ring is fixed above the main supporting plate; the carrying vehicle comprises a hand-operated high-pushing vehicle, and a lifting rod capable of stretching out and drawing back in the first linear direction is installed on the hand-operated high-pushing vehicle. The carrying vehicle further comprises a traction assembly used for hoisting the hoisting mechanism, the traction assembly is installed on the hoisting rod and comprises a steel wire rope, a guide wheel and a self-locking hand-cranking winch, one end of the steel wire rope is installed on the self-locking hand-cranking winch, and the other end of the steel wire rope passes through the guide wheel and then is connected with a hook used for being connected with a hoisting ring. The device can assist in assembling and disassembling the correction disc.

Description

Technical Field

[0001] The invention relates to the technical field of grinding machines, and in particular to a correction disc conveying device. Background Art

[0002] The Mohs hardness of single-crystal silicon carbide is as high as 9.5, second only to diamond, and the compression strength of silicon carbide single crystal is much higher than its bending strength. The material as a whole exhibits great hardness and brittleness. These factors make silicon carbide wafer processing extremely difficult.

[0003] The working principle of the silicon carbide precision double-sided grinder is to use the upper and lower grinding discs to rotate around the center and use the grinding fluid to perform double-sided grinding on the surface of the silicon carbide wafer. When grinding the silicon carbide wafer, the upper platen is lowered by the cylinder to contact the silicon carbide wafer. By applying pressure to the surface of the wafer, the surface of the wafer is ground and removed under the action of the grinding fluid. During the use of the upper and lower plates, deformation will occur, resulting in uneven surfaces of the upper and lower plates, and then the fit between the upper and lower plates of the equipment and the wafer is not good, which will have a great impact on the quality of the silicon carbide wafer, resulting in uneven grinding of the upper and lower surfaces of the wafer, inconsistent removal of materials, etc., resulting in low product qualification rate, and the generation of fragments and debris. At this time, it is necessary to operate the equipment with the correction disc assembled to level the upper and lower plates, and finally achieve the effect of correcting the fit and parallelism of the two working surfaces.

[0004] When loading and unloading the correction disk onto the fixed plate, the gears need to be aligned to avoid collisions. This requires certain operating precision and difficulty. Currently, it is completely assembled manually by operators. Because the correction disk itself is heavy and the equipment platform has a certain height, the manual operation process is cumbersome, with high labor costs and low efficiency. There is also a risk of damaging the equipment.

[0005] Therefore, a mechanical device is needed to assist in the loading and unloading of the correction disk. The correction disk is fixed by tooling, and the operator can complete the loading and unloading alone, saving labor costs, while improving safety during operation and avoiding damage to the equipment. Summary of the invention

[0006] In view of the problems existing in the prior art, the present invention provides a correction disk transport device for a silicon carbide precision double-sided grinder, which solves at least one of the above-mentioned technical problems.

[0007] The technical solution of the present invention is: a silicon carbide precision double-sided grinding machine correction disk transport device, including a transport vehicle, characterized in that it also includes a lifting mechanism for lifting the correction disk, the lifting mechanism includes two lifting support plates for embedding the correction disk, the two lifting support plates are centrally symmetrically arranged, and locking screws are installed on the lifting support plates;

[0008] The hoisting mechanism also includes a main support plate, on which two centrally symmetrical and arc-shaped guide grooves are provided, and the guide grooves are used to rotatably engage the locking screws, and the main support plate is connected to the two lifting support plates through the locking screws;

[0009] The main support plate is fixed with internal and external hanging rings and an annular cylinder, and the annular cylinder is provided with a gripping structure;

[0010] The transport vehicle comprises a hand-operated push-up vehicle, on which is mounted a lifting rod that can be extended and retracted along a first linear direction, and on which is mounted a linear motion mechanism for driving the lifting rod to move along a second linear direction perpendicular to the first linear direction and in a vertical direction;

[0011] The transport vehicle also includes a pulling assembly for lifting the lifting mechanism, which is installed on the lifting rod. The pulling assembly includes a wire rope, a guide wheel and a self-locking hand winch. The guide wheel and the self-locking hand winch are respectively installed on both sides of the lifting rod in the length direction. One end of the wire rope is installed on the self-locking hand winch, and the other end of the wire rope is connected to a hook used to connect the lifting ring after passing through the guide wheel.

[0012] Further preferably, four petal-shaped notches that are connected to each other are opened in the center of the correction plate, and two petal-shaped notches that are opposite to each other among the four petal-shaped notches are connected to the slot for inserting the lifting support plate;

[0013] The locking screw is installed on the lifting support plate adjacent to the central side of the correction plate.

[0014] Further preferably, the outer contour of the main support plate is provided with two arc-shaped guide surfaces;

[0015] The inner wall of the correction plate is provided with a sliding contact portion which is circumferentially slidably connected with the arc-shaped guide surface;

[0016] The sliding contact portion is located at the connection of adjacent petal-shaped notches.

[0017] Further preferably, the main support plate includes two extension portions extending radially outward from the annular cylinder, and the guide grooves are formed on the extension portions.

[0018] Further preferably, one end of the guide groove is open and communicated with the outer wall of the main support plate, and the other end of the guide groove is closed;

[0019] The distance between the guide groove and the center of the main support plate increases along the length direction from the open end to the closed end.

[0020] Further preferably, the linear motion mechanism includes a slider that can slide along the second linear direction and a lifting frame that can be extended and retracted along the longitudinal direction;

[0021] The lifting rod is installed on the slider, the slider is installed on the lifting frame, the slider is slidably connected to the lifting frame with the second straight line direction as the sliding direction, the lifting frame is longitudinally slidably connected to the frame, and the bottom of the frame is equipped with walking wheels.

[0022] Further preferably, a hand wheel for driving the slider to slide is installed on the lifting frame, and the hand wheel is transmission-connected to the slider through a screw-slider mechanism;

[0023] The lifting rod includes a fixed part and a sliding part, the sliding part is slidably connected to the fixed part, a telescopic hand wheel for driving the sliding part to telescope and slide is installed on the fixed part, the telescopic hand wheel is connected to the gear transmission, and a rack meshing with the gear is installed on the sliding part.

[0024] The telescopic hand wheel, the self-locking hand winch and the hand wheel are located on the same side of the transport vehicle.

[0025] Convenient for manual operation.

[0026] Further preferably, a buffer rubber pad is installed on the transport vehicle.

[0027] Further preferably, a step ladder is installed between the transport vehicle and the double-sided grinder, and the buffer rubber pad is located between the step ladder and the transport vehicle.

[0028] Further preferably, the use steps are as follows:

[0029] Step 1: Initially, the correction plate is located on the lower fixed plate. Before lifting, install the lifting mechanism on the correction plate: insert the two lifting support plates into the slots of the correction plate respectively, align the ends with locking screws with the center of the correction plate, rotate the main support plate and the lifting support plate to connect, and finally tighten the locking screws;

[0030] Step 2: Determine the location of the push truck;

[0031] Adjust the height of the lifting rod and raise it to the position of the gap between the upper and lower fixed plates. Do not allow the lifting rod to collide with the equipment. Push the transport vehicle until the buffer rubber is against the step of the ladder.

[0032] Step 3, manually adjust the extension of the lifting rod, first extend the lifting rod, adjust the position of the lifting rod in the second straight line direction and the extension length, so that the hook is aligned with the lifting ring on the lifting tooling;

[0033] Step 4: Make sure the hook and the ring are well fixed, slowly crank the hand winch, and lift the correction plate steadily to ensure that the correction plate does not swing or bump when it is lifted.

[0034] Step 5. After the correction plate is lifted at least 50mm, slowly push the transporter to the material rack to ensure that the correction plate does not swing or bump. Align the correction plate with the surface of the material rack and slowly lower it. Finally, dismantle the lifting mechanism.

[0035] Compared with the prior art, the present invention has the following beneficial effects:

[0036] 1) The loading and unloading of the correction plate is assisted by a handling device instead of completely manual operation, which saves labor and increases efficiency.

[0037] 2) Manual loading and unloading mainly relies on pushing up and down. The correction plate may bump against the plate surface, posing a risk of collision to personnel. The use of a correction plate handling device can effectively reduce the risk.

[0038] 3) The correction tray has a heavy weight and is frequently loaded and unloaded, so manual operators are prone to fatigue, which increases the risk of collision. The correction tray handling device can effectively reduce operator fatigue.

[0039] 4) Manual loading and unloading of the correction tray requires the cooperation of at least two people, while the correction tray handling device only requires one person to complete the loading and unloading of the correction tray, saving labor costs.

[0040] 5) Manual operation requires that each device be equipped with corresponding personnel, while the use of a correction tray handling device can assist one device to correspond to multiple devices, saving labor costs and increasing loading and unloading efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0041] Figure 1 This is a structural schematic diagram of a transport vehicle according to a specific embodiment 1 of the present invention;

[0042] Figure 2 It is a structural schematic diagram of a specific embodiment 1 of the present invention when the hoisting mechanism and the correction plate are assembled;

[0043] Figure 3 It is an exploded view of the lifting mechanism and the correction plate of the specific embodiment 1 of the present invention;

[0044] Figure 4 It is a structural schematic diagram of a correction disk according to a specific embodiment 1 of the present invention;

[0045] Figure 5 It is a structural schematic diagram of a lifting support plate according to a specific embodiment 1 of the present invention;

[0046] Figure 6 This is a schematic structural diagram of a main support plate according to a specific embodiment 1 of the present invention;

[0047] Figure 7It is a schematic diagram of the local structure of the specific embodiment 1 of the present invention when in use.

[0048] In the figure, 1 is a lifting support plate, 2 is a main support plate, 3 is a correction plate, 4 is a lifting rod, 5 is a guide wheel, 6 is a self-locking hand winch, 11 is a locking screw, and 21 is a guide groove. DETAILED DESCRIPTION

[0049] See also Figures 1 to 7 , Specific embodiment 1, a silicon carbide precision double-sided grinding machine correction disk transport device, including a transport vehicle, and also including a lifting mechanism for lifting the correction disk 3, the lifting mechanism includes two lifting support plates 1 for embedding the correction disk 3, the two lifting support plates 1 are centrally symmetrically arranged, and locking screws 11 are installed on the lifting support plates 1; the lifting mechanism also includes a main support plate 2, and the main support plate 2 is provided with two centrally symmetrical and arc-shaped guide grooves 21, the guide grooves 21 are used for rotating and clamping the locking screws 11, and the main support plate 2 is connected to the two lifting support plates 1 by the locking screws 11; the upper part of the main support plate 2 is fixed with internal and external lifting rings and an annular cylinder, and the annular cylinder is provided with a grip Structure; The transport vehicle includes a hand-cranked push-up vehicle, on which is mounted a lifting rod 4 that can be extended and retracted along a first linear direction, and a linear motion mechanism for driving the lifting rod 4 to move along a second linear direction perpendicular to the first linear direction and in a vertical direction; The transport vehicle also includes a pulling assembly for lifting the hoisting mechanism, which is mounted on the lifting rod 4, and includes a steel wire rope, a guide wheel 5, and a self-locking hand winch 6, the guide wheel 5 and the self-locking hand winch 6 are respectively mounted on both sides of the length direction of the lifting rod 4, one end of the steel wire rope is mounted on the self-locking hand winch 6, and the other end of the steel wire rope is connected to a hook for connecting a lifting ring after passing through the guide wheel 5. The first linear direction and the second linear direction are perpendicular to the vertical direction.

[0050] Four petal-shaped notches that are interconnected are provided in the center of the correction disk 3 , and two of the four petal-shaped notches that are opposite to each other are connected to the slot for inserting the lifting support plate 1 ; a locking screw is installed on the lifting support plate 1 adjacent to the center side of the correction disk 3 .

[0051] The outer contour of the main support plate 2 is provided with two arc-shaped guide surfaces; the inner wall of the correction plate 3 is provided with a sliding contact portion that is circumferentially slidably connected to the arc-shaped guide surface; the sliding contact portion is located at the connection between adjacent petal-shaped notches.

[0052] The main support plate 2 includes two extensions extending radially outward from the annular cylinder, and a guide groove 21 is provided on the extension. One end of the guide groove 21 is open and communicates with the outer wall of the main support plate 2, and the other end of the guide groove 21 is closed. The distance between the guide groove 21 and the center of the main support plate 2 increases from the open end to the closed end along the length direction. The extension is located in the petal-shaped notch. The closed ends of the guide grooves on the two extensions are located on the left and right sides of the main support plate.

[0053] It also includes a gasket and an auxiliary limiting pin. The locking screw is threadedly connected to the lifting support plate. The gasket is provided with a hook portion for clamping into the main support plate and the head of the locking screw. The hook portion is provided with a slot for clamping into the screw portion of the locking screw. The gasket is provided with a through hole, and the extension portion is provided with a threaded hole for threading the auxiliary limiting pin. The auxiliary limiting pin passes through the through hole and the threaded hole on the extension portion to abut against the lifting support plate.

[0054] The top of the annular cylinder is connected by supporting rods arranged side by side. The support plate is used for hand-gripping. Alternatively, a gripping hole is provided on the opposite side of the side wall of the annular cylinder. The gripping hole is used for hand-gripping. The gripping structure is a supporting rod or a gripping hole.

[0055] The outer contour of the lifting support plate 1 includes a main arc portion, a first horizontal portion, a first auxiliary arc portion, a second horizontal portion, a second auxiliary arc portion, and a third horizontal portion connected in sequence. The main arc portion, the first auxiliary arc portion, and the second auxiliary arc portion have the same center and the same outer diameter. The first horizontal portion is parallel to the third horizontal portion and is perpendicular to the second horizontal portion. The locking screw is located on the side of the main arc portion adjacent to the center of the main arc portion. The opposite side of the slot is slidably connected to the first horizontal portion and the second horizontal portion.

[0056] The linear motion mechanism includes a slider that can slide along the second linear direction and a lifting frame that can be extended and retracted along the longitudinal direction; the lifting rod 4 is installed on the slider, the slider is installed on the lifting frame, the slider is slidably connected to the lifting frame with the second linear direction as the sliding direction, the lifting frame is longitudinally slidably connected to the frame, and a walking wheel is installed at the bottom of the frame.

[0057] The lifting frame is equipped with a hand wheel for driving the slider to slide, and the hand wheel is connected to the slider through a screw slider mechanism; the lifting rod 4 includes a fixed part and a sliding part, the sliding part is slidably connected to the fixed part, and a telescopic hand wheel for driving the sliding part to slide telescopically is installed on the fixed part, the telescopic hand wheel is connected to the gear transmission, and a rack meshing with the gear is installed on the sliding part. The telescopic hand wheel, the self-locking hand winch 6 and the hand wheel are located on the same side of the transport vehicle. It is convenient for manual operation.

[0058] A buffer rubber pad is installed on the transport vehicle. A step ladder is installed between the transport vehicle and the double-sided grinder, and the buffer rubber pad is located between the step ladder and the transport vehicle.

[0059] The steps for use are as follows:

[0060] Step 1: Initially, the correction plate 3 is located on the lower fixed plate. Before lifting, install the lifting mechanism on the correction plate 3: insert the two lifting support plates 1 into the slots of the correction plate 3 respectively, align the ends with locking screws with the center of the correction plate 3, rotate and clamp the main support plate 2 and the lifting support plate 1, and finally tighten the locking screws 11;

[0061] Step 2: Determine the location of the push truck;

[0062] Adjust the height of the lifting rod 4 and raise it to the position of the gap between the upper and lower fixed plates. Do not allow the lifting rod 4 to collide with the equipment. Push the transport vehicle until the buffer rubber is against the step of the foot ladder.

[0063] Step 3, manually adjust the extension of the lifting rod 4, first extend the lifting rod 4, adjust the position of the lifting rod 4 in the second straight line direction and the extension length, so that the hook is aligned with the lifting ring on the lifting tool;

[0064] Step 4: Ensure that the hook and the lifting ring are well fixed, slowly shake the hand-cranked winch, and steadily lift the correction plate 3 to ensure that the correction plate 3 does not swing or bump when being lifted.

[0065] Step 5: After the correction plate 3 is lifted at least 50 mm, slowly push the transport vehicle to the material rack to ensure that the correction plate 3 does not swing or bump, align the correction plate 3 with the surface of the material rack and then slowly lower it, and finally dismantle the lifting mechanism.

[0066] The above are only preferred embodiments of the present invention. It should be pointed out that, for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principles of the present invention. These improvements and modifications should also be regarded as the scope of protection of the present invention.

Claims

1. A device for transporting a correction disc of a silicon carbide precision double-sided grinding machine, comprising a transport vehicle, characterized in that: It also includes a hoisting mechanism for hoisting the correction plate, the hoisting mechanism includes two lifting support plates for embedding the correction plate, the two lifting support plates are centrally symmetrically arranged, and locking screws are installed on the lifting support plates; The hoisting mechanism also includes a main support plate, on which two centrally symmetrical and arc-shaped guide grooves are provided, and the guide grooves are used to rotatably engage the locking screws, and the main support plate is connected to the two lifting support plates through the locking screws; The main support plate is fixed with internal and external hanging rings and an annular cylinder, and the annular cylinder is provided with a gripping structure; The transport vehicle comprises a hand-operated push-up vehicle, on which is mounted a lifting rod that can be extended and retracted along a first linear direction, and on which is mounted a linear motion mechanism for driving the lifting rod to move along a second linear direction perpendicular to the first linear direction and in a vertical direction; The transport vehicle also includes a pulling assembly for lifting the lifting mechanism, which is installed on the lifting rod. The pulling assembly includes a wire rope, a guide wheel and a self-locking hand winch. The guide wheel and the self-locking hand winch are respectively installed on both sides of the lifting rod in the length direction. One end of the wire rope is installed on the self-locking hand winch, and the other end of the wire rope is connected to a hook used to connect the lifting ring after passing through the guide wheel.

2. A silicon carbide precision double-sided grinding machine correction disk transport device according to claim 1, characterized in that: The center of the correction plate is provided with four petal-shaped notches which are connected to each other, and two petal-shaped notches which are opposite to each other among the four petal-shaped notches are connected to the slots for inserting the lifting support plate; The locking screw is installed on the lifting support plate adjacent to the central side of the correction disk.

3. The device for transporting a correction disk of a silicon carbide precision double-sided grinding machine according to claim 2, characterized in that: The outer contour of the main support plate is provided with two arc-shaped guide surfaces; The inner wall of the correction plate is provided with a sliding contact portion which is circumferentially slidably connected with the arc-shaped guide surface; The sliding contact portion is located at the connection of adjacent petal-shaped notches.

4. The device for transporting a correction disk of a silicon carbide precision double-sided grinding machine according to claim 1, characterized in that: The main support plate includes two extension parts extending radially outward from the annular cylinder, and the guide grooves are formed on the extension parts.

5. The device for transporting a correction disk of a silicon carbide precision double-sided grinding machine according to claim 1, characterized in that: One end of the guide groove is open and communicates with the outer wall of the main support plate, and the other end of the guide groove is closed; The distance between the guide groove and the center of the main support plate increases along the length direction from the open end to the closed end.

6. The device for transporting a correction disk of a silicon carbide precision double-sided grinding machine according to claim 1, characterized in that: The linear motion mechanism includes a slider that can slide along the second linear direction and a lifting frame that can be extended and retracted along the longitudinal direction; The lifting rod is installed on the slider, the slider is installed on the lifting frame, the slider is slidably connected to the lifting frame with the second straight line direction as the sliding direction, the lifting frame is longitudinally slidably connected to the frame, and the bottom of the frame is equipped with walking wheels.

7. The device for transporting the correction disk of a silicon carbide precision double-sided grinding machine according to claim 6, characterized in that: The lifting frame is provided with a hand wheel for driving the slider to slide, and the hand wheel is connected to the slider through a screw slider mechanism; The lifting rod includes a fixed part and a sliding part, the sliding part is slidably connected to the fixed part, a telescopic hand wheel for driving the sliding part to telescope and slide is installed on the fixed part, the telescopic hand wheel is connected to the gear transmission, and a rack meshing with the gear is installed on the sliding part. The telescopic hand wheel, the self-locking hand winch and the hand wheel are located on the same side of the transport vehicle.

8. The device for transporting a correction disk of a silicon carbide precision double-sided grinding machine according to claim 7, characterized in that: A buffer rubber pad is installed on the transport vehicle.

9. The device for transporting a correction disk of a silicon carbide precision double-sided grinding machine according to claim 8, characterized in that: A foot ladder step is installed between the transport vehicle and the double-sided grinder, and the buffer rubber pad is located between the foot ladder step and the transport vehicle.

10. The device for transporting the correction disk of a silicon carbide precision double-sided grinding machine according to claim 9, characterized in that: The steps for use are as follows: Step 1: Initially, the correction plate is located on the lower fixed plate. Before lifting, install the lifting mechanism on the correction plate: insert the two lifting support plates into the slots of the correction plate respectively, rotate the main support plate and the lifting support plate to connect, and finally tighten the locking screws; Step 2: Determine the location of the push truck; Adjust the height of the lifting rod and raise it to the position of the gap between the upper and lower fixed plates. Do not allow the lifting rod to collide with the equipment. Push the transport vehicle until the buffer rubber is against the step of the ladder. Step 3, manually adjust the extension of the lifting rod, first extend the lifting rod, adjust the position of the lifting rod in the second straight line direction and the extension length, so that the hook is aligned with the lifting ring on the lifting tooling; Step 4: Make sure the hook and the lifting ring are well fixed, slowly crank the hand-cranked winch, and steadily lift the correction plate to ensure that the correction plate does not swing or bump when it is lifted. Step 5. After the correction plate is lifted at least 50mm, slowly push the transporter to the material rack to ensure that the correction plate does not swing or bump. Align the correction plate with the surface of the material rack and slowly lower it. Finally, dismantle the lifting mechanism.

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