Performance detection device of high-power semiconductor laser

Abstract

The invention discloses a performance detection device for a high-power semiconductor laser, and relates to the technical field of laser detection. Comprising a base, a first supporting plate and a third supporting plate are arranged on the base, a transposition mechanism is arranged on the first supporting plate and comprises a rotating frame rotationally installed on the first supporting plate, and installation mechanisms are arranged on the rotating frame in an array mode and used for positioning and installing semiconductor lasers; a communicating mechanism is arranged at the top of the support plate I and is used for electrifying the semiconductor laser; a detection mechanism is arranged on the third supporting plate and comprises an integrating sphere and a CCD camera which are rotationally installed on the third supporting plate. A fluorescent screen is arranged on the third supporting plate and located above the CCD camera. A maintenance mechanism is arranged at one end of the base and is used for maintaining the integrating sphere and the CCD camera; the performance detection of the semiconductor laser can be efficiently completed, the detection of the semiconductor laser can be realized in batches, the operation is simple, the functions are rich, and the labor intensity is reduced.

Description

Technical Field

[0001] The invention relates to the technical field of laser detection, and in particular to a performance detection device for a high-power semiconductor laser. Background Art

[0002] A laser is a device that can generate and amplify light, which is usually monochromatic, focused, and highly coherent. Lasers are widely used in scientific research, medical treatment, communications, manufacturing, and other fields. There are many types of lasers, among which high-power semiconductor lasers are semiconductor devices that can generate high-power laser beams. It is usually achieved by converting electrical energy into light energy and is an important component of modern laser technology. High-power semiconductor lasers usually use semiconductor materials with high photon emission efficiency, such as gallium arsenide, gallium indium phosphide, gallium nitride, etc. It has the characteristics of efficient energy conversion, compactness, and reliability. In general, high-power semiconductor lasers play an important role in modern science and technology and industry, and their high efficiency, compactness, and versatility make them have broad application prospects in many fields. With the advancement of technology and the continuous evolution of application needs, the performance and application fields of high-power semiconductor lasers will continue to expand and deepen; performance detection of semiconductor lasers is a crucial content in production operations. Commonly used detection systems include integrating spheres and spot test systems, and there are many detection parameters. The integrating sphere is externally connected to a power meter and a spectrometer to test optical power, spectrum, central wavelength and spectrum width; the spot test system collects spot, tests the divergence angle of the light beam, calculates the uniformity of the spot and other related image processing; and the current detection operation is generally to detect the semiconductor laser separately, the process is cumbersome, and the laser needs to be positioned and installed, and then the power is turned on, the beam position is adjusted, etc., which is inefficient; based on this, the present invention proposes a performance detection device for semiconductor lasers, which can efficiently complete the performance detection of semiconductor lasers, can realize the detection of semiconductor lasers in batches, is simple to operate, has rich functions, and reduces labor intensity. Summary of the invention

[0003] In view of the above technical problems, the present invention can efficiently complete the performance detection of semiconductor lasers, can realize the detection of semiconductor lasers in batches, has simple operation, rich functions, and reduces labor intensity.

[0004] The scheme used in the present invention is: a performance detection device for a high-power semiconductor laser, including a base, a support plate 1 and a support plate 3 are arranged on the base, a transfer mechanism is arranged on the support plate 1, the transfer mechanism includes a rotating frame rotatably mounted on the support plate 1, a mounting mechanism is arranged in an array on the rotating frame, the mounting mechanism includes a mounting seat slidably mounted on the rotating frame, and a connecting mounting seat is arranged on the mounting seat for positioning and mounting the semiconductor laser; a heat sink is arranged in the center area of ​​the rotating frame, and the heat sink is connected to the connecting mounting seat through a transmission pipe to transmit airflow for heat dissipation; a heat sink is arranged on the top of the support plate 1. A connecting mechanism is provided for connecting the semiconductor laser to electricity; a detection mechanism is provided on the support plate three, and the detection mechanism includes an integrating sphere and a CCD camera rotatably mounted on the support plate three; a fluorescent screen is provided on the support plate three and above the CCD camera; a maintenance mechanism is provided at one end of the base for performing maintenance on the integrating sphere and the CCD camera; the maintenance mechanism includes a lifting slide seat lifted and lowered at one end of the base, a slide seat two is slidably mounted on the lifting slide, an adsorption plate is provided on the slide seat two, and the adsorption plate surrounds the integrating sphere and the lens of the CCD camera to adsorb and remove impurities.

[0005] Furthermore, the indexing mechanism includes an indexing motor arranged on support plate one, the indexing motor is used to drive the rotating frame, the rotating frame includes mounting plate one, connecting guide pillars and mounting plate two, mounting plate two is fixedly connected to mounting plate one through connecting guide pillars; and a transverse screw rod is rotatably installed between mounting plate one and mounting plate two, the transverse screw rod is used to drive the mounting mechanism; a connecting gear is arranged at one end of the transverse screw rod facing mounting plate two, and a control motor is arranged on mounting plate two, a gear ring is arranged on the output shaft of the control motor, and the gear ring is meshed with the connecting gear.

[0006] Furthermore, the mounting seat on the mounting mechanism and the transverse screw rod form a spiral pair, the connecting mounting seat is a hollow structure, and an air outlet is provided on the top of the connecting mounting seat for heat dissipation.

[0007] Furthermore, an electromagnetic sliding clamp is provided on the top of the connection mounting seat for clamping the semiconductor laser, a limiting portion is provided on the top of the connection mounting seat for limiting the semiconductor laser, and a nozzle is provided at one end of the top of the connection mounting seat for mounting the optical fiber output end on the semiconductor laser. A connection portion is provided on the semiconductor laser, and the connection portion is docked with the connection mechanism for electrical connection.

[0008] Furthermore, the connecting mechanism includes a support plate 2 arranged on the top of the support plate 1, a power supply system is arranged on the support plate 2, and a motor 1 and a screw rod 1 are arranged on the support plate 2, and the motor 1 is used to drive the screw rod 1; a slide seat 1 is slidably installed on the support plate 2, and the slide seat 1 and the screw rod 1 form a spiral pair; an electric cylinder 1 is arranged on the slide seat 1, an electric cylinder 2 is arranged on the telescopic rod of the electric cylinder 1, and a connecting part is arranged on the telescopic rod of the electric cylinder 2, and the connecting part is electrically connected to the power supply system.

[0009] Furthermore, the detection mechanism includes angle motor one and angle motor two arranged on both sides of support plate three, a mounting seat one is arranged on the output shaft of angle motor one, and a CCD camera is arranged on mounting seat one; a mounting seat two is arranged on the output shaft of angle motor two, and an integrating sphere is arranged on mounting seat two; and the fluorescent screen is used to reflect the light beam.

[0010] Furthermore, the maintenance mechanism includes a second motor and a second screw rod arranged on one end of the base, and the second motor is used to drive the second screw rod; the lifting slide and the second screw rod form a spiral pair; a third motor and a third screw rod are arranged on the lifting slide, and the third motor is used to drive the third screw rod; the second slide and the third screw rod form a spiral pair; a first positioning electric cylinder is arranged on the second slide, and a second positioning electric cylinder is arranged on the telescopic rod of the first positioning electric cylinder, the adsorption plate is rotatably installed on the telescopic rod of the second positioning electric cylinder, and a driving motor is arranged on the telescopic rod of the second positioning electric cylinder, and a driving gear is arranged on the output shaft of the driving motor, and the driving gear is meshed with the bottom of the adsorption plate.

[0011] Furthermore, an adsorption box is provided on the adsorption disk, and an adsorption tube head is provided on the adsorption box. The adsorption tube head is located on the circumference of the adsorption disk and is used for adsorbing and removing impurities.

[0012] Compared with the prior art, the present invention has the following beneficial effects: (1) by positioning and installing semiconductor lasers in batches, the semiconductor lasers are inspected in sequence by means of transposition, and the power-on operation is realized in the inspection position, which can further improve the inspection efficiency compared with the steps of individual installation and inspection. (2) the present invention surrounds the integrating sphere and the lens of the CCD camera by means of an adsorption plate, and works through an adsorption box to adsorb and remove impurities and dust on the integrating sphere and the lens of the CCD camera, thereby facilitating subsequent inspection operations. (3) during operation, the present invention can work through a heat dissipation box to introduce airflow into the connecting mounting seat, and the airflow is released from the top of the connecting mounting seat to dissipate heat from the semiconductor laser. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 It is a schematic diagram of the overall structure of the present invention.

[0014] Figure 2 It is a schematic diagram of the overall structure of the present invention from another angle.

[0015] Figure 3 It is a schematic diagram of the structure of the connecting mechanism of the present invention.

[0016] Figure 4 This is a schematic diagram of the installation structure of the maintenance mechanism of the present invention.

[0017] Figure 5 This is a schematic diagram of the installation structure of the lifting slide of the present invention.

[0018] Figure 6This is a schematic diagram of the installation structure of the adsorption disk of the present invention.

[0019] Figure 7 It is a schematic diagram of the structure of the detection mechanism of the present invention.

[0020] Figure 8 It is a schematic diagram of the installation structure of the indexing mechanism of the present invention.

[0021] Fig. 9 It is a schematic diagram of the local structure of the indexing mechanism of the present invention.

[0022] Fig.10 It is a schematic diagram of the installation mechanism structure of the present invention.

[0023] Fig.11 It is a schematic diagram of the local structure of the installation mechanism of the present invention.

[0024] Figure numerals: 1-base; 2-support plate 1; 3-rotation motor; 4-support plate 2; 5-power supply system; 6-support plate 3; 7-angle motor 1; 8-angle motor 2; 9-motor 1; 10-screw rod 1; 11-slide 1; 12-electric cylinder 1; 13-electric cylinder 2; 14-connection part; 15-motor 2; 16-screw rod 2; 17-motor 3; 18-screw rod 3; 19-lifting slide; 20-slide 2; 21-position electric cylinder 1; 22-position electric cylinder 2; 23-adsorption plate; 24 -adsorption box; 25-driving motor; 26-driving gear; 27-fluorescent screen; 28-mounting seat 1; 29-CCD camera; 30-mounting seat 2; 31-integrating sphere; 32-mounting plate 1; 33-connecting guide column; 34-transverse screw rod; 35-mounting plate 2; 36-connecting gear; 37-gear ring; 38-control motor; 39-heat sink; 40-mounting seat; 41-semiconductor laser; 42-connecting mounting seat; 43-electromagnetic sliding clamp; 44-limiting part; 45-nozzle. DETAILED DESCRIPTION

[0025] Example: Figures 1 to 11As shown, a support plate 2 and a support plate 3 6 are provided on the base 1, and a transfer mechanism is provided on the support plate 2. The transfer mechanism includes a turntable rotatably mounted on the support plate 2, and the mounting mechanism is arranged in an array on the turntable. It should be noted that when implementing the present invention, it is not limited to the number of arrays shown in the drawings; the mounting mechanism includes a mounting seat 40 slidably mounted on the turntable, and a connecting mounting seat 42 is provided on the mounting seat 40 for positioning and mounting a semiconductor laser 41; a heat sink 39 is provided in the central area of ​​the turntable, and the heat sink 39 is connected to the connecting mounting seat 42 through a transmission pipe to transmit airflow for heat dissipation; the transfer mechanism includes a transfer motor 3 provided on the support plate 2, and the transfer motor 3 is used to drive the turntable. It should be noted that the turntable drive is not limited to motor drive; the turntable includes a mounting plate 1 32, a connecting guide column 33 and a mounting plate 2 35, the output shaft of the transfer motor 3 is connected to the mounting plate 1 32, and the heat sink 39 is provided on the mounting plate 1 32; the mounting plate The second mounting plate 35 is fixedly connected to the mounting plate one 32 through a connecting guide column 33; and a transverse screw rod 34 is rotatably installed between the mounting plate one 32 and the mounting plate two 35, and the transverse screw rod 34 is used to drive the mounting mechanism; a connecting gear 36 is arranged at one end of the transverse screw rod 34 facing the mounting plate two 35, and a control motor 38 is arranged on the mounting plate two 35, and a gear ring 37 is arranged on the output shaft of the control motor 38, and the gear ring 37 is meshed with the connecting gear 36; the mounting seat 40 on the mounting mechanism and the transverse screw rod 34 form a spiral pair, the connecting mounting seat 42 is a hollow structure, and an air outlet is arranged at the top of the connecting mounting seat 42 for heat dissipation; an electromagnetic sliding clamp 43 is arranged on the top of the connecting mounting seat 42 for clamping the semiconductor laser 41, a limiting portion 44 is arranged on the top of the connecting mounting seat 42 for limiting the semiconductor laser 41, and a nozzle 45 is arranged at one end of the top of the connecting mounting seat 42 for mounting the optical fiber output end on the semiconductor laser 41. The semiconductor laser 41 is provided with a contact portion.

[0026] A connecting mechanism is provided at the top of the support plate 2 for connecting electricity to the semiconductor laser 41. The connecting part is connected to the connecting mechanism for connecting electricity. It should be noted that when connecting electricity to the semiconductor laser 41, it is not limited to the continuous mode, but also includes pulse and other modes; the connecting mechanism includes a support plate 4 provided on the top of the support plate 2, a power supply system 5 is provided on the support plate 4, and a motor 9 and a screw rod 10 are provided on the support plate 4, and the motor 9 is used to drive the screw rod 10; a slide 11 is slidably installed on the support plate 4, and the slide 11 and the screw rod 10 form a spiral pair; an electric cylinder 12 is provided on the slide 11, an electric cylinder 2 13 is provided on the telescopic rod of the electric cylinder 12, and a connecting part 14 is provided on the telescopic rod of the electric cylinder 2 13, and the connecting part 14 is electrically connected to the power supply system 5.

[0027] A detection mechanism is arranged on the support plate 3 6, and the detection mechanism includes an integrating sphere 31 and a CCD camera 29 rotatably mounted on the support plate 3 6; a fluorescent screen 27 is arranged on the support plate 3 6 and above the CCD camera 29; the detection mechanism includes an angle motor 1 7 and an angle motor 2 8 arranged on both sides of the support plate 3 6, a mounting seat 1 28 is arranged on the output shaft of the angle motor 1 7, and the CCD camera 29 is arranged on the mounting seat 1 28; a mounting seat 2 30 is arranged on the output shaft of the angle motor 2 8, and an integrating sphere 31 is arranged on the mounting seat 2 30; the fluorescent screen 27 is used to reflect the light beam; specifically, the integrating sphere 31 is externally connected to a power meter and a spectrometer to test the optical power, spectrum, central wavelength and spectrum width, and the integrating sphere 31 includes a light window, a power meter port (including a photosensitive element), and a spectrometer port; the CCD camera 29 is used for collecting light spots, testing the divergence angle of the light beam, calculating the uniformity of the light spot, and other related image processing. The light beam cannot directly hit the CCD camera 29 because the energy is too high and the camera cannot withstand it. Therefore, the fluorescent screen 27 is used to reflect the light beam. After the CCD camera 29 captures the light spot, the diameter of the light spot can be known, and the divergence angle of the light beam can be calculated by the distance software; it should be noted that the parameters that the detection agency can test are not limited to measuring power with an integrating sphere and measuring spectrum with a CCD camera, but can also include measuring power with a thermistor power meter, and measuring all laser-related parameters such as the spectrum or energy distribution of the laser.

[0028] A maintenance mechanism is provided at one end of the base 1 for maintaining the integrating sphere 31 and the CCD camera 29; the maintenance mechanism comprises a lifting slide 19 which is lifted and lowered at one end of the base 1, a slide 20 is slidably mounted on the lifting slide 19, an adsorption disk 23 is provided on the slide 20, and the adsorption disk 23 surrounds the lens of the integrating sphere 31 and the CCD camera 29 to adsorb and remove impurities; the maintenance mechanism comprises a motor 2 15 and a screw 2 16 which are provided at one end of the base 1, the motor 2 15 is used to drive the screw 2 16; the lifting slide 19 and the screw 2 16 form a spiral pair; a motor 3 17 and a screw 3 17 are provided on the lifting slide 19 8. Motor three 17 is used to drive screw rod three 18; slide seat two 20 and screw rod three 18 form a spiral pair; a position electric cylinder one 21 is arranged on the slide seat two 20, and a position electric cylinder two 22 is arranged on the telescopic rod of the position electric cylinder one 21; an adsorption disk 23 is rotatably mounted on the telescopic rod of the position electric cylinder two 22, and a driving motor 25 is arranged on the telescopic rod of the position electric cylinder two 22, and a driving gear 26 is arranged on the output shaft of the driving motor 25, and the driving gear 26 is meshed with the bottom of the adsorption disk 23; an adsorption box 24 is arranged on the adsorption box 24, and an adsorption pipe head is arranged on the adsorption box 24, and the adsorption pipe head is located on the circumference of the adsorption disk 23 and is used for adsorbing and removing impurities.

[0029] When the present invention is implemented: semiconductor lasers 41 are pre-installed in batches on the connecting mounting seat 42, the optical fiber output end on the semiconductor laser 41 is installed on the nozzle 45, the side surfaces of the semiconductor laser 41 are limited by the limiting part 44, and the semiconductor laser 41 is fixed by the electromagnetic sliding clamp 43; the rotating frame is driven by the indexing motor 3, that is, the mounting plate 1 32 and the mounting plate 2 35 are rotated, and the orientation of each semiconductor laser 41 can be converted to perform sequential detection; that is, the semiconductor laser 41 is converted to the top area of ​​the rotating frame, the position of the electric cylinder 2 13 is controlled by the electric cylinder 1 12, and the electric cylinder 2 13 controls the position of the connecting part 14, so that the connecting part 14 is docked with the connecting part on the semiconductor laser 41 to complete the power connection, so that the semiconductor laser 41 works, that is, the optical fiber output end on the semiconductor laser 41 emits a light beam; further, during operation, the heat dissipation box 39 can be operated to pass airflow into the connecting mounting seat 42, and the airflow is released from the top of the connecting mounting seat 42 to dissipate heat for the semiconductor laser 41.

[0030] In this embodiment, when the semiconductor laser 41 is detected, the detection is performed through the integrating sphere 31 and the CCD camera 29. The integrating sphere 31 is externally connected to a power meter and a spectrometer to test the optical power, spectrum, central wavelength and spectrum width. The integrating sphere 31 includes a light-transmitting window, a power meter port (including a photosensitive element), and a spectrometer port; the CCD camera 29 is used for collecting light spots, testing the beam divergence angle, calculating the uniformity of the light spots and other related image processing. The light beam cannot directly hit the CCD camera 29 because the energy is too high and the camera cannot withstand it. Therefore, the fluorescent screen 27 is used for beam reflection. After the CCD camera 29 captures the light spot, the diameter of the light spot can be known, and the divergence angle of the light beam is calculated according to the distance software; specifically, when different parameters are detected, the motor 38 is controlled to work, the gear ring 37 rotates, the connecting gear 36 and the transverse screw 34 rotate, and then the mounting seat 40 moves to adjust the transverse position, that is, change the beam emission path, so that the light beam hits the integrating sphere 31 or the CCD camera 29.

[0031] The lenses of the integrating sphere 31 and the CCD camera 29 can be subsequently dust-removed and maintained, that is, the CCD camera 29 is driven to rotate and transpose by the angle motor 1 7, and the integrating sphere 31 is driven to rotate and transpose by the angle motor 2 8, that is, the lens directions of the integrating sphere 31 and the CCD camera 29 are adjusted so that the lenses face downward; the motor 2 15 is operated, the screw rod 2 16 is rotated, and the lifting slide 19 is slid to be close to the integrating sphere 31 and the CCD camera 29; further, the motor 3 17 is operated, the screw rod 3 18 is rotated, and the slide 2 20 is slid, thereby adjusting the position of the adsorption plate 23, and the position of the adsorption plate 23 is controlled by the position electric cylinder 1 21. The position electric cylinder 22 controls the extension height of the adsorption plate 23, so that the adsorption plate 23 surrounds the integrating sphere 31 and the lens of the CCD camera 29, and the driving motor 25 works to drive the adsorption plate 23 to rotate, and the adsorption box 24 works to adsorb and remove impurities and dust on the integrating sphere 31 and the lens of the CCD camera 29, which is beneficial to the subsequent detection operation. In this embodiment, the semiconductor lasers 41 are positioned and installed in batches, and the semiconductor lasers 41 are detected in turn by transposition, and the power-on operation is realized in the detection position. Compared with the steps of separate installation and detection, this embodiment can further improve the detection efficiency.

[0032] The above description is only a preferred embodiment of the present invention, and does not limit the patent scope of the present invention. Therefore, all equivalent technical changes made using the contents of the present invention description and drawings are included in the protection scope of the present invention.

Claims

1. A performance detection device for a high-power semiconductor laser, comprising a base (1), on which a first support plate (2) and a third support plate (6) are arranged, characterized in that: A transfer mechanism is provided on the support plate one (2), the transfer mechanism comprising a rotating frame rotatably mounted on the support plate one (2), a mounting mechanism arranged in an array on the rotating frame, the mounting mechanism comprising a mounting seat (40) slidably mounted on the rotating frame, a connecting mounting seat (42) being provided on the mounting seat (40) for positioning and mounting the semiconductor laser (41); a heat sink (39) is provided in the central area of ​​the rotating frame, the heat sink (39) being connected to the connecting mounting seat (42) via a transmission tube to transmit airflow for heat dissipation; a connecting mechanism is provided on the top of the support plate one (2) for connecting electricity to the semiconductor laser (41); a detection mechanism is provided on the support plate three (6) for detecting The mechanism comprises an integrating sphere (31) and a CCD camera (29) rotatably mounted on a support plate three (6); a fluorescent screen (27) is arranged on the support plate three (6) and above the CCD camera (29); a maintenance mechanism is arranged at one end of the base (1) for performing maintenance on the integrating sphere (31) and the CCD camera (29); the maintenance mechanism comprises a lifting slide (19) lifted and arranged at one end of the base (1); a slide two (20) is slidably mounted on the lifting slide (19); an adsorption plate (23) is arranged on the slide two (20); the adsorption plate (23) surrounds the lens of the integrating sphere (31) and the CCD camera (29) to adsorb and remove impurities.

2. The performance detection device for a high-power semiconductor laser according to claim 1, characterized in that: The indexing mechanism comprises an indexing motor (3) arranged on the first support plate (2), the indexing motor (3) being used to drive the rotating frame, the rotating frame comprising the first mounting plate (32), a connecting guide column (33) and the second mounting plate (35), the second mounting plate (35) being fixedly connected to the first mounting plate (32) via the connecting guide column (33); and a transverse screw rod (34) being rotatably mounted between the first mounting plate (32) and the second mounting plate (35), the transverse screw rod (34) being used to drive the mounting mechanism; a connecting gear (36) being arranged at one end of the transverse screw rod (34) facing the second mounting plate (35), and a control motor (38) being arranged on the second mounting plate (35), a gear ring (37) being arranged on the output shaft of the control motor (38), the gear ring (37) being meshed with the connecting gear (36).

3. The performance detection device for a high-power semiconductor laser according to claim 2, characterized in that: The mounting seat (40) on the mounting mechanism and the transverse screw rod (34) form a spiral pair, the connecting mounting seat (42) is a hollow structure, and an air outlet is provided on the top of the connecting mounting seat (42) for heat dissipation.

4. The performance detection device for a high-power semiconductor laser according to claim 3, characterized in that: An electromagnetic sliding clamp (43) is provided on the top of the connecting mounting seat (42) for clamping the semiconductor laser (41); a limiting portion (44) is provided on the top of the connecting mounting seat (42) for limiting the semiconductor laser (41); a nozzle (45) is provided at one end of the top of the connecting mounting seat (42) for mounting the optical fiber output end on the semiconductor laser (41); and a connecting portion is provided on the semiconductor laser (41), and the connecting portion is connected to the connecting mechanism for electrical connection.

5. The performance detection device for a high-power semiconductor laser according to claim 4, characterized in that: The connecting mechanism comprises a support plate 2 (4) arranged on the top of the support plate 1 (2), a power supply system (5) being arranged on the support plate 2 (4), and a motor 1 (9) and a screw rod 1 (10) being arranged on the support plate 2 (4), the motor 1 (9) being used to drive the screw rod 1 (10); a slide seat 1 (11) being slidably mounted on the support plate 2 (4), the slide seat 1 (11) and the screw rod 1 (10) forming a spiral pair; an electric cylinder 1 (12) being arranged on the slide seat 1 (11), an electric cylinder 2 (13) being arranged on the telescopic rod of the electric cylinder 1 (12), a connecting part (14) being arranged on the telescopic rod of the electric cylinder 2 (13), the connecting part (14) being electrically connected to the power supply system (5).

6. The performance detection device for a high-power semiconductor laser according to claim 1, characterized in that: The detection mechanism comprises an angle motor 1 (7) and an angle motor 2 (8) arranged on both sides of the support plate 3 (6); a mounting seat 1 (28) is arranged on the output shaft of the angle motor 1 (7); a CCD camera (29) is arranged on the mounting seat 1 (28); a mounting seat 2 (30) is arranged on the output shaft of the angle motor 2 (8); an integrating sphere (31) is arranged on the mounting seat 2 (30); and a fluorescent screen (27) is used to reflect the light beam.

7. The performance detection device for a high-power semiconductor laser according to claim 1, characterized in that: The maintenance mechanism comprises a second motor (15) and a second screw rod (16) arranged on one end of the base (1), the second motor (15) being used to drive the second screw rod (16); a lifting slide (19) and the second screw rod (16) forming a spiral pair; a third motor (17) and a third screw rod (18) are arranged on the lifting slide (19), the third motor (17) being used to drive the third screw rod (18); the second slide (20) and the third screw rod (18) forming a spiral pair; a first position electric cylinder (21) is arranged on the slide (20), a second position electric cylinder (22) is arranged on the telescopic rod of the first position electric cylinder (21), a suction plate (23) is rotatably mounted on the telescopic rod of the second position electric cylinder (22), and a driving motor (25) is arranged on the telescopic rod of the second position electric cylinder (22), a driving gear (26) is arranged on the output shaft of the driving motor (25), and the driving gear (26) is meshed with the bottom of the suction plate (23).

8. The performance detection device for a high-power semiconductor laser according to claim 7, characterized in that: An adsorption box (24) is provided on the adsorption disk (23), and an adsorption pipe head is provided on the adsorption box (24). The adsorption pipe head is located on the circumference of the adsorption disk (23) and is used to adsorb and remove impurities.

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