Optical path system and optical measurement equipment

Abstract

The invention relates to protection of an optical path system, and provides an optical path system and optical measurement equipment. The light path system comprises a light source module and / or a light detection module; the light beam processing device is used for processing the passing light beams; the installation base body is provided with an installation cavity, the at least one light beam processing device is arranged in the installation cavity, and the light source module and / or the light detection module are / is arranged outside the installation base body; the mounting base body is provided with a light incident port and a light emergent port, the light incident port is used for enabling a light beam to be processed to enter the mounting cavity, and the light emergent port is used for enabling the light beam processed by the light beam processing device to be emitted out of the mounting cavity; the air supply device comprises an air supply connector; the gas supply connector is connected to the mounting base body and used for supplying protective gas into the mounting cavity. The invention mainly solves the technical problem that the optical path of a wide-spectrum light source is easy to generate ozone to cause oxidative damage.

Description

Technical Field

[0001] The invention relates to protection of an optical path system. Background Art

[0002] In optical measurement equipment, the performance of the light source is crucial to the measurement equipment. At present, wide-spectrum light sources have gradually become the first choice for semiconductor optical measurement equipment due to their advantages: wide spectral range, ultra-high brightness / brilliance, ultra-long life, ultra-high stability, etc. For example, semiconductor film thickness measurement equipment ellipsometers are increasingly using wide-spectrum light sources as their light source devices.

[0003] Although the wide-spectrum light source has the above advantages, it also has disadvantages: when the wide-spectrum light source is used as the light source of the measuring device, the ultraviolet light in the ultraviolet band of the wide-spectrum light source will cause the oxygen in the measuring optical path to undergo photolysis reaction and produce ozone, and ozone has strong oxidizing properties, which may cause oxidation damage to the coatings and structural parts of some beam processing devices (such as lenses) in the measuring optical path. These oxidation damages will affect the performance of the measuring optical path, such as damage to the lens coating will lead to a decrease in the intensity of transmitted light or reflected light, and the volatiles produced by the oxidation of the original black anodized surface treatment layer of the structural parts by ozone will pollute the optical path, etc. Summary of the invention

[0004] The invention mainly solves the technical problem that the light path containing ultraviolet rays in the light source is prone to generate ozone and cause oxidation damage.

[0005] In a first aspect, the present invention provides an optical path system.

[0006] An optical path system, comprising:

[0007] Light source module and / or light detection module;

[0008] A light beam processing device, the light beam processing device is used to process the light beam passing through;

[0009] A mounting base, wherein the mounting base has a mounting cavity, at least one of the light beam processing devices is arranged in the mounting cavity, and the light source module and / or the light detection module is arranged outside the mounting base; the mounting base has a light input port and a light output port, the light input port is for the light beam to be processed to enter the mounting cavity, and the light output port is for the light beam processed by the light beam processing device to be emitted from the mounting cavity;

[0010] and a gas supply device, the gas supply device comprising a gas supply connector; the gas supply connector is connected to the installation base and is used to supply protective gas into the installation cavity.

[0011] In a technical solution, the mounting base includes a base and a protective cover, the light beam processing device is arranged on the base, the protective cover has an inner cavity, and the protective cover is buckled on the base and encloses the mounting cavity with the base.

[0012] In a technical solution, the base is provided with a first fastening surface, the protective cover is provided with a second fastening surface, at least one of the first fastening surface and the second fastening surface is provided with a sealing groove, and a sealing member is provided in the sealing groove; the sealing groove on the first fastening surface and / or the second fastening surface has a notch for embedding a sealing ring, and the notch is a shrinking structure.

[0013] In a technical solution, the cross-section of the sealing groove is dovetail-shaped, and the sealing element is an O-ring.

[0014] In a technical solution, a groove is provided on the side wall of the protective cover, and the end of the groove facing away from the base passes through the protective cover, and the end of the groove close to the base is a blind end. The blind end forms a step on the protective cover, and a through hole is provided on the step. The through hole is for the rod of the screw to pass through so as to press and fix the protective cover to the base, and the groove is used to avoid the head of the screw.

[0015] In a technical solution, the screw includes an inner screw located on a side of the seal close to the installation cavity, and also includes an outer screw located on a side of the seal away from the installation cavity.

[0016] In one technical solution, it also includes a sealing tube; one end of the sealing tube is connected to the light source module, and the other end is connected to the light incident port of the protective cover, and / or one end of the sealing tube is connected to the light detection module, and the other end is connected to the light incident port of the protective cover; the sealing tube is connected to the installation cavity, and a light beam channel is provided in the sealing tube; the sealing tube is flexible, so that the light source module and / or the light detection module can be adjusted relative to the protective cover.

[0017] In one technical solution, a light path reflector is provided on the protective cover, the optical axis of the light source module and / or the light detection module has an angle with the optical axis of the light beam processing device, and the light path reflector is used to reflect light between the light beam processing device and the light source module and / or the light detection module.

[0018] In a technical solution, the end of the sealing tube is detachably connected to the light source module or the light detection module via a magnetic attraction structure.

[0019] In a technical solution, the protective cover includes at least two cover bodies, each cover body is connected in sequence, and a sealing structure is provided at the connection point between two adjacent cover bodies.

[0020] In a technical solution, the light beam processing device includes a focusing module, the light exit port and / or the light entrance port is provided with the focusing module, and the focusing module is sealed and connected to the mounting base.

[0021] In a technical solution, a cable hole is provided on the installation base, and a cable sealing member is provided at the cable hole for the cable to pass through and to cooperate with the cable in sealing.

[0022] In a technical solution, it also includes a flow balancing element, which is arranged on the mounting base and corresponds to the gas outlet of the gas supply connector, and is used to disperse the gas discharged from the gas supply connector.

[0023] In one technical solution, the flow equalizing element is a flow equalizing plate, which is snapped onto the inner wall of the installation cavity and forms an air chamber with the inner wall of the installation cavity, and the air outlet of the air supply connector is connected to the air chamber.

[0024] In a second aspect, the present invention provides an optical measurement device.

[0025] An optical measurement device, comprising:

[0026] An optical path system, wherein the optical path system is the optical path system described in any of the above technical solutions;

[0027] And a detection device, wherein the detection device is used to detect the object to be detected.

[0028] Beneficial effects of the present invention:

[0029] According to the above-mentioned optical path system, by setting a mounting cavity on the mounting base and supplying protective gas into the mounting cavity through a gas supply device, the light beam processing device can be isolated in the mounting cavity and placed in a protective gas atmosphere, thereby reducing or avoiding the contact between the light beam processing device and oxygen, thereby improving or avoiding the ozone generated by the wide-spectrum light source from damaging the optical element coating or structural parts on the light beam processing device, which is beneficial to ensuring the stability of the optical path system. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1 A schematic structural diagram of an embodiment of the optical path system of the present invention;

[0031] Figure 2 for Figure 1 A structural exploded view of a light beam processing device corresponding to a light source module;

[0032] Figure 3 for Figure 1 A cross-sectional view of a light beam processing device corresponding to the light source module;

[0033] Figure 4for Figure 3 A partial enlarged view of point A in the middle.

[0034] List of feature names corresponding to the reference numerals in the figure:

[0035] 100, incident arm;

[0036] 110. Light source module;

[0037] 120, first mounting base; 121, base; 122, protective cover; 123, mounting cavity; 124, sealing groove; 125, sealing member; 126, first cover body; 127, second cover body; 128, stopper; 129, groove;

[0038] 130. A first light beam processing device;

[0039] 140. first sealing tube; 141. adsorption flange; 142. adapter flange; 143. magnet;

[0040] 150, first air supply device; 151, air supply connector; 152, flow equalizing element; 153, branch air pipe; 154, main connector; 155, air chamber;

[0041] 160. a first optical path reflector;

[0042] 170. First focusing lens module; 171. O-shaped sealing ring;

[0043] 180. Cable seals;

[0044] 200, reflector arm;

[0045] 210. Light detection module;

[0046] 220, second mounting base;

[0047] 240, a second sealing tube;

[0048] 250, second air supply device;

[0049] 260, second optical path reflector;

[0050] 270, second focusing mirror module;

[0051] 300. Object under test. DETAILED DESCRIPTION

[0052] The present invention is further described in detail below by specific embodiments in conjunction with the accompanying drawings. Wherein similar elements in different embodiments adopt associated similar element numbers. In the following embodiments, many detailed descriptions are for making the present application better understood. However, those skilled in the art can easily recognize that some features can be omitted in different situations, or can be replaced by other elements, materials, methods. In some cases, some operations related to the present application are not shown or described in the specification, this is to avoid the core part of the present application being overwhelmed by too much description, and for those skilled in the art, it is not necessary to describe these related operations in detail, and they can fully understand the related operations according to the description in the specification and the general technical knowledge in the art.

[0053] In addition, the features, operations or characteristics described in the specification can be combined in any appropriate manner to form various implementations. At the same time, the steps or actions in the method description can also be interchanged or adjusted in a manner that is obvious to those skilled in the art. Therefore, the various sequences in the specification and the drawings are only for the purpose of clearly describing a certain embodiment and are not meant to be a required sequence, unless otherwise specified that a certain sequence must be followed.

[0054] The serial numbers of the components in this document, such as "first", "second", etc., are only used to distinguish the objects described and do not have any order or technical meaning. The "connection" and "coupling" mentioned in this application, unless otherwise specified, include direct and indirect connections (couplings).

[0055] An embodiment of an optical path system in the present invention:

[0056] In an embodiment of the present invention, the optical path system includes a light source module 110 and / or a light detection module 210, a light beam processing device and an air supply device. The light source module 110 is used to provide the illumination required by the optical path system, and the light detection module 210 is used to detect the light reflected by the object to be measured 300 to achieve the purpose of detection; the light beam processing device is used to process the light beam passing through, and includes a mounting base, and the mounting base has a mounting cavity 123 (please refer to Figure 3 ), the mounting cavity 123 is used to form a local gas environment, at least one light beam processing device is arranged in the mounting cavity 123, and the light source module 110 and / or the light detection module 210 are arranged outside the mounting base; the mounting base has a light input port and a light output port, the light input port is for the light beam to be processed to enter the mounting cavity 123, and the light output port is for the light beam processed by the light beam processing device to be emitted from the mounting cavity 123; in order to form a protective gas atmosphere in the local gas environment around the light beam processing device to protect the light beam processing device, the gas supply device includes a gas supply connector 151, the gas supply connector 151 is connected to the mounting base, and is used to supply protective gas into the mounting cavity 123.

[0057] In a specific embodiment, please refer to Figure 1 and Figure 2 The optical path system includes both a light source module 110 and a light detection module 210. The light source module 110 and the light detection module 210 are respectively provided with respective mounting bases and light beam processing devices. Specifically, the light source module 110 corresponds to the first mounting base 120, the first light beam processing device 130, the first sealing tube 140 and the first air supply device 150, forming an incident arm 100; the light detection module 210 corresponds to the second mounting base 220, the second light beam processing device (blocked in the figure), the second sealing tube 240 and the second air supply device 250, forming a reflection arm 200. The incident arm 100 and the reflection arm 200 are arranged on two opposite sides of the object to be measured 300 in a substantially symmetrical manner. The light source module 110 and the light detection module 210 are respectively fixed on the first mounting base 120 and the second mounting base 220.

[0058] The present invention will be further described below by taking a portion of the optical path system corresponding to the light source module 110 (ie, the incident arm 100 ) as an example.

[0059] In one embodiment, the light source module 110 is a broad spectrum light source, including a deep ultraviolet band, however, it should be understood that in some other embodiments, other types of light sources including ultraviolet light can also be set as the optical path system of the present invention. In addition, the object to be measured 300 can be any matching object such as a wafer, a chip, a mask or a glass screen.

[0060] The mounting base adopts a split structure, specifically including a base 121 and a protective cover 122. The light beam processing device is arranged on the base 121. The protective cover 122 has an inner cavity. The protective cover 122 is snapped on the base 121 and forms a mounting cavity 123 with the base 121. The split structure can facilitate the processing of the mounting base and the installation of the light beam processing device. In one embodiment, the light beam processing device protrudes from the top surface of the base 121, and the inner cavity shape of the protective cover 122 is adapted to the base 121, with a compact structure and easy installation. Please refer to Figure 3 In one embodiment, the top surface of the base 121 for fixing the light beam processing device is an inclined surface, which can adapt to the light beam path between the light source module 110 and the object to be measured 300, and meet the spatial layout requirements of the optical measurement equipment. Of course, in other embodiments, the light beam processing device can also be arranged horizontally or vertically. In addition, in other embodiments, the mounting base can also be a single component, for example, a cavity is set on a block-shaped base as a mounting cavity, and the light beam processing device is placed in the cavity.

[0061] The above-mentioned light beam processing device can adopt an existing device, and the specific structure can be configured according to the requirements of the light path. For example, Figure 2 In one embodiment shown, the beam processing device is used to perform spot shaping and apply polarization.

[0062] In order to ensure that the installation cavity 123 surrounded by the base 121 and the protective cover 122 has a certain degree of sealing and forms a stable local gas environment, in one embodiment, the base 121 is provided with a first buckling surface, the protective cover 122 is provided with a second buckling surface, at least one of the first buckling surface and the second buckling surface is provided with a sealing groove 124, and a sealing member 125 is provided in the sealing groove 124; the sealing groove 124 on the first buckling surface and / or the second buckling surface has a notch for the sealing ring to be embedded, and the notch is a shrinking structure. Through the sealing groove 124 and the sealing member 125 on the buckling surface, the base 121 and the protective cover 122 can easily form a seal.

[0063] The notch of the sealing groove 124 adopts a shrinking structure to facilitate the positioning of the sealing member 125 and facilitate disassembly and maintenance, especially for Figure 2 The shape of the sealing groove 124 shown is irregular. In a specific embodiment, the cross section of the sealing groove 124 is dovetail-shaped, which is easy to process, and the sealing member 125 is an O-ring, which has good versatility and is conducive to reducing costs. In some other embodiments, the sealing groove 124 can also adopt other forms, such as a structure with a rectangular, arc-shaped or right-angled trapezoidal cross section.

[0064] It should be noted that the present invention does not limit the degree of sealing between objects in a sealed relationship. It can be completely sealed or have a set sealing property, can form a protective gas atmosphere and match the gas supply speed of the gas supply device. However, if the sealing property of the installation cavity 123 is too poor and the protective gas leaks a lot, although it can still limit the oxygen concentration in the installation cavity 123 and play a protective role, it may cause a large airflow disturbance, which is not conducive to the accurate detection of the optical measurement equipment, and also requires the consumption of more protective gas, and it is also necessary to accurately calculate the gas flow rate and the leakage flow rate. Therefore, in most cases, it can be appropriately sealed but there is no need to pursue an excessively high degree of sealing.

[0065] Considering the convenience of manufacturing and disassembly, in one embodiment, the protective cover 122 includes at least two cover bodies, each of which is connected in sequence, and a sealing structure is provided at the connection between two adjacent cover bodies. Figure 1 and Figure 2The protective cover 122 adopts a split structure, and the protective cover 122 includes a first cover body 126 and a second cover body 127, and the first cover body 126 and the second cover body 127 are arranged in sequence along the optical path. The adjacent ends of the first cover body 126 and the second cover body 127 are provided with a stopper 128, and the first cover body 126 and the second cover body 127 can be overlapped through the stopper 128, so as to realize the mutual positioning of the first cover body 126 and the second cover body 127 and ensure a certain sealing. Of course, in some other embodiments, the protective cover 122 can also be an integrated structure composed of a single part.

[0066] In order to make full use of the space inside the protective cover 122, in one embodiment, please refer to Figure 1 and Figure 2 A groove 129 is provided on the side wall of the protective cover 122. The end of the groove 129 facing away from the base 121 passes through the protective cover 122. The end of the groove 129 close to the base 121 is a blind end. The blind end forms a step on the protective cover 122. A through hole is provided on the step. The through hole is for the rod of the screw to pass through so as to press and fix the protective cover 122 to the base 121. The groove 129 is used to avoid the head of the screw. Figure 2 In the embodiment, the cross section of the groove 129 is an arc shape, and the groove 129 forms a local arc-shaped protrusion on the inner wall of the protective cover 122, and the portion of the protective cover 122 other than the groove 129 can form a larger space. In other embodiments, the groove 129 can also be other shapes, such as an ellipse or a rectangle. Figure 1 In the illustrated embodiment, the side surface of the protective cover 122 on which the groove 129 is provided is flush with the corresponding side surface of the base 121 , and the overall structure is compact and beautiful, which can effectively improve space utilization.

[0067] In one embodiment, the screws for fixing the protective cover 122 include an inner screw located on a side of the seal 125 close to the mounting cavity 123, and an outer screw located on a side of the seal 125 away from the mounting cavity 123. Figure 2 The base 121 is provided with an inner screw mounting hole located on the side of the seal 125 close to the mounting cavity 123, and also includes an outer screw mounting hole located on the side of the seal 125 away from the mounting cavity 123. The above-mentioned layout form can set the fixing points more flexibly, which is convenient for structural design. Although the inner screw may cause the air tightness of the protective cover 122 to decrease, it will not have a significant impact on the protective gas atmosphere of the protective cover 122, and gas leakage at the inner screw can be avoided by adding a sealing ring between the screw head and the protective cover. Of course, in other embodiments, the protective cover 122 can also be fixed to the substrate by other means, such as providing an outward folded edge as a connecting flange at the opening of the protective cover 122 on the side facing the substrate, and fixing it by flange connection.

[0068] In one embodiment, in order to meet the detection requirements, the light beam processing device includes a focusing module, and the light exit port and / or the light entrance port is provided with the focusing module, and the focusing module is sealed and connected to the mounting base.

[0069] Specifically, Figure 1 The optical path parts corresponding to the light source module 110 and the light detection module 210 both include focusing modules. The focusing module corresponding to the light source module 110 is a first focusing mirror module 170, and the focusing module corresponding to the light detection module 210 is a second focusing mirror module 270. The first focusing mirror module 170 and the second focusing mirror module 270 are respectively fixed on the mounting base on the corresponding side. In order to achieve the sealing between the focusing module and the mounting base, in one embodiment, please refer to Figure 2 and Figure 3 The base 121 and the protective cover 122 that are matched together have matching end faces. A sealing ring groove is provided on the end face of the first focusing lens module 170 close to the mounting base. An O-ring 171 is installed in the sealing ring groove, and a seal can be formed with the matching end face through the O-ring 171. Of course, in some other embodiments, the focusing module and the mounting base can also be sealed and connected in other ways, such as providing a sealing gasket between the adjacent end faces of the focusing module and the mounting base, applying sealant at the connection between the focusing module and the mounting base, or achieving sealing through a threaded structure.

[0070] It should be noted that, in other embodiments, a lens may also be provided at the light exit port and / or the light entrance port, and the lens is used to close the light exit port and / or the light entrance port while allowing light to pass through.

[0071] Please refer to Figure 1 and Figure 2 In one embodiment, the gas supply device includes a gas supply connector 151, a branch gas pipe 153 and a main connector 154. The gas supply connector 151 is provided in multiple locations, distributed at different positions of the protective cover 122 to make the airflow more uniform. In one embodiment, the gas supply connector 151 is provided in three locations, respectively located at the two ends of the first cover body 126 and on the second cover body 127. Each gas supply connector 151 is connected to its own branch gas pipe 153, and each branch gas pipe 153 is connected to the main connector 154, which is connected to the protective gas supply equipment (such as nitrogen gas supply equipment) through the main connector 154. In other embodiments, the number of gas supply connectors 151 in the gas supply device can also be increased or decreased, and the gas supply connector 151 can also be directly connected to the protective gas supply equipment through a pipeline.

[0072] For the optical path system, the airflow will affect the transmission of light, and further affect the stability of the pipeline system. In order to avoid this problem, in one embodiment, the optical path system also includes a flow equalizing element 152, and the flow equalizing element 152 is arranged on the inner wall of the installation cavity 123 and corresponds to the air outlet of the gas supply connector 151, and the flow equalizing element 152 is used to disperse the gas discharged from the gas supply connector 151. In a specific embodiment, the flow equalizing element 152 is a flow equalizing plate, which is snapped onto the inner wall of the installation cavity 123 and forms an air chamber 155 with the inner wall of the installation cavity 123, and the air outlet of the gas supply connector 151 is connected to the air chamber 155. The flow equalizing plate can filter and equalize the passing gas to prevent the disturbance of the incoming airflow from affecting the measured optical path parameters. Optionally, the flow equalizing plate adopts a stainless steel porous sintered structure. Please refer to Figure 4 An annular protrusion is provided on the inner wall of the protective cover 122, and the flow equalizing plate is buckled on the annular protrusion and fixed to the annular protrusion by screws. There is a gap between the flow equalizing plate buckle and the inner wall of the protective cover 122 and an air chamber 155 is enclosed. The air pipe joint corresponds to the air chamber 155 one by one.

[0073] Since the beam processing device requires connecting cables, please refer to Figure 2 In one embodiment, a cable hole is provided on the mounting base, and a cable seal 180 is provided at the cable hole for the cable to pass through and to seal with the cable. The cable hole and the cable seal 180 can meet the cable threading requirements when the beam processing device is installed in the mounting cavity 123, and can ensure the sealing of the mounting cavity 123. For details, please refer to Figure 2 The cable seal 180 is made of elastic material, such as silicone or rubber, and has a ring groove on its outer surface, which can be embedded in the cable hole to improve the sealing performance; at the same time, the cable seal 180 is provided with an opening, and the opening can allow the cable to pass through. Of course, the higher the matching degree between the size of the opening and the cable diameter, the better the sealing performance of the installation cavity 123.

[0074] According to the positional relationship between the light source module 110 and the mounting base, in order to guide the light emitted by the light source module 110 into the light beam processing device, in one embodiment, the optical path system further includes an optical path reflector, which is fixed on the protective cover 122. The optical axis of the light source module 110 and the optical axis of the light beam processing device have an angle, and the optical path reflector is used to reflect light between the light beam processing device and the light source module 110. Please refer to Figure 2The optical path reflector includes a first optical path reflector 160 corresponding to the incident arm 100 and a second optical path reflector 260 corresponding to the reflective arm 200. The optical path reflector is fixed on a mirror seat, a flange is provided at the bottom of the mirror seat, and the base 121 is fixed thereto through the flange. A lateral opening is provided at a position corresponding to the optical path reflector on the protective cover 122, and the optical path reflector is buckled at the lateral opening and sealed with the edge of the lateral opening through a sealing ring. In other embodiments, the optical path reflector can also be directly fixed on the protective cover to form a whole with the protective cover.

[0075] The optical path system of the optical measurement equipment often needs to adjust the posture of the optical elements on the optical path to ensure that the light is smoothly directed to the target position. In order to enable the light source module 110 to be able to adjust its position relative to the mounting base so that the ultraviolet light emitted by the light source module 110 can still be in the protective gas environment, such as Figure 1 and Figure 2 In the illustrated embodiment, the optical path system further includes a sealing tube, one end of which is connected to the light source module 110, and the other end is connected to the light incident port of the protective cover 122 (for the light detection module 210, one end of the sealing tube is connected to the light detection module 210, and the other end is connected to the light incident port of the protective cover 122); the sealing tube is in communication with the mounting cavity 123, and a light beam channel is provided in the sealing tube; the sealing tube is flexible, so that the light source module 110 can adjust its position relative to the protective cover 122. The sealing tube includes a first sealing tube 140 corresponding to the light source module 110 and a second sealing tube 240 connected to the light detection module 210. In one embodiment, the sealing tube is a metal bellows, which can achieve telescopic, end misalignment and / or deflection. Of course, in other embodiments, the sealing tube can also be made of plastic, rubber, or silicone material, and can achieve telescopic, end misalignment and / or deflection by relying on its own material flexibility.

[0076] In some cases, the protective cover 122 needs to be disassembled to maintain and adjust the internal beam processing device. Since the protective cover 122 is connected to the sealing tube, in order to facilitate the disassembly of the protective cover 122, in one embodiment, the two ends of the first sealing tube 140 are detachably fixed to the light source module 110 and the protective cover through a magnetic attraction structure. In a specific embodiment, both ends of the first sealing tube 140 are provided with an adsorption flange 141, and the adsorption flange 141 is made of a material that can be adsorbed by the magnet 143; correspondingly, the light source module 110 and the protective cover are respectively provided with a transfer flange 142, the transfer flange 142 is fixed to the light source module 110 and the protective cover, and the transfer flange 142 is circumferentially distributed with magnets 143, and the magnets 143 are embedded in the transfer flange 142. During assembly, the adsorption flanges 141 at both ends of the sealing tube are close to the transfer flanges 142 at the corresponding ends, and the connection between the sealing tube and the light source module 110 and the protective cover can be achieved by relying on the adsorption effect of the magnet 143. When it is necessary to remove the protective cover 122, the protective cover 122 can be separated from the sealing tube by slightly applying force to overcome the magnetic attraction, or the sealing tube can be separated from the light source module 110 but kept connected to the protective cover 122, or the sealing tube can be separated from the protective cover 122 and the light source module 110 at the same time, and then the protective cover 122 can be easily removed. In other embodiments, a magnet can also be provided on the end surface of the sealing tube, and an attraction portion for the magnet to be adsorbed can be provided on the light source module 110; of course, magnets can also be provided on both the sealing tube and the light source module 110.

[0077] In some other embodiments, the sealing tube may also be connected to the light source module 110 and the protective cover in other ways, for example, by flange connection through bolts, or by providing threaded joints at both ends of the sealing tube for direct connection through a threaded structure.

[0078] For the reflective arm 200 corresponding to the light detection module 210, the light detection module 210 is a spectrum acquisition device, and the light beam processing device is used for polarization analysis. The light detection module 210 is arranged in the protective cover 122, and the side of the protective cover 122 close to the incident arm 100 is connected to the second focusing module 270, and the side of the protective cover 122 away from the incident arm 100 is connected to the second sealing tube 240 and the second light path reflector 260, and the second sealing tube 240 is connected to the light detection module 210. The layout structure of each component on the reflective arm 200 is consistent with that of the incident arm 100, and will not be repeated here.

[0079] During operation, the wide-spectrum light source in the measurement system emits wide-spectrum light, which is reflected by the first optical path reflector 160, and the optical path is parallel to the incident arm 100 of the measurement optical path, and is incident on the beam processing device inside the protective cover 122 through the measurement optical path for light spot shaping and polarization application, and then the beam is focused on the object to be measured 300 through the first focusing mirror module. The object to be measured 300 then reflects the beam into the second focusing module 270, and is polarized by the beam processing device inside the reflective arm 200, and then reflected into the light detection module 210 through the second optical path reflector 260. In this way, the incident arm 100 of the measuring light path forms a relatively closed local environment under the protection of the protective cover 122, and high-purity protective nitrogen is introduced to reduce the oxygen content in the local environment, prevent the gas in the local environment from undergoing photolysis reaction to produce ozone, and further prevent the coatings of various lenses and structural parts in the measuring light path from being oxidized and damaged by ozone, thereby ensuring the performance of the measuring light path and preventing problems such as damage to the lens coating resulting in a decrease in the intensity of transmitted or reflected light, and the original black anodized surface treatment layer of the structural parts being oxidized by ozone to produce volatile substances that pollute the light path.

[0080] Embodiments of the optical measuring device of the present invention:

[0081] The optical measuring device comprises: an optical path system, which is the optical path system of any of the above embodiments and will not be described again; and a detection device, which is used to detect the object to be detected. The detection device can adopt the structure in the prior art and has no direct connection with the protection point of the present invention, and will not be described in detail here.

[0082] The above specific examples are used to illustrate the present invention, which is only used to help understand the present invention and is not intended to limit the present invention. For those skilled in the art, according to the concept of the present invention, some simple deductions, modifications or substitutions can be made.

Claims

1. An optical path system, characterized in that: include: Light source module and / or light detection module; A light beam processing device, the light beam processing device is used to process the light beam passing through; A mounting base, wherein the mounting base has a mounting cavity, at least one of the light beam processing devices is arranged in the mounting cavity, and the light source module and / or the light detection module is arranged outside the mounting base; the mounting base has a light input port and a light output port, the light input port is for the light beam to be processed to enter the mounting cavity, and the light output port is for the light beam processed by the light beam processing device to be emitted from the mounting cavity; and a gas supply device, the gas supply device comprising a gas supply connector; the gas supply connector is connected to the installation base and is used to supply protective gas into the installation cavity.

2. The optical path system according to claim 1, characterized in that: The installation base comprises a base and a protective cover, the light beam processing device is arranged on the base, the protective cover has an inner cavity, and the protective cover is buckled on the base and forms the installation cavity with the base.

3. The optical path system according to claim 2, characterized in that: The base is provided with a first fastening surface, the protective cover is provided with a second fastening surface, at least one of the first fastening surface and the second fastening surface is provided with a sealing groove, and a sealing member is provided in the sealing groove; the sealing groove on the first fastening surface and / or the second fastening surface has a notch for embedding a sealing ring, and the notch is a shrinking structure.

4. The optical path system according to claim 3, characterized in that: The cross section of the sealing groove is dovetail-shaped, and the sealing element is an O-ring.

5. The optical path system according to claim 3, characterized in that: A groove is provided on the side wall of the protective cover, and the end of the groove facing away from the base passes through the protective cover, and the end of the groove close to the base is a blind end. The blind end forms a step on the protective cover, and a through hole is provided on the step. The through hole is for the rod of the screw to pass through so as to press and fix the protective cover to the base, and the groove is used to avoid the head of the screw.

6. The optical path system according to claim 5, characterized in that: The screws include an inner screw located at a side of the sealing member close to the installation cavity, and an outer screw located at a side of the sealing member away from the installation cavity.

7. The optical path system according to claim 2, characterized in that: It also includes a sealing tube; one end of the sealing tube is connected to the light source module, and the other end is connected to the light incident port of the protective cover, and / or one end of the sealing tube is connected to the light detection module, and the other end is connected to the light incident port of the protective cover; the sealing tube is connected to the installation cavity, and a light beam channel is provided in the sealing tube; the sealing tube is flexible, so that the light source module and / or the light detection module can be adjusted relative to the protective cover.

8. The optical path system according to claim 7, characterized in that: The protective cover is provided with a light path reflector, the optical axis of the light source module and / or light detection module has an angle with the optical axis of the light beam processing device, and the light path reflector is used to reflect light between the light beam processing device and the light source module and / or light detection module.

9. The optical path system according to claim 7, characterized in that: The end of the sealing tube is detachably connected to the light source module or the light detection module through a magnetic attraction structure.

10. The optical path system according to claim 2, characterized in that: The protective cover comprises at least two cover bodies, each of which is butted against each other in sequence, and a sealing structure is provided at the butt joint of two adjacent cover bodies.

11. The optical path system according to any one of claims 1 to 10, characterized in that: The light beam processing device comprises a focusing module. The light exit port and / or the light entrance port is provided with the focusing module. The focusing module is sealed and connected to the mounting base.

12. The optical path system according to any one of claims 1 to 10, characterized in that: The installation base is provided with a cable hole, and the cable hole is provided with a cable sealing member for allowing the cable to pass through and for sealingly cooperating with the cable.

13. The optical path system according to any one of claims 1 to 10, characterized in that: It also includes a flow balancing element, which is arranged on the mounting base and corresponds to the gas outlet of the gas supply connector, and is used to disperse the gas discharged from the gas supply connector.

14. The optical path system according to claim 13, characterized in that: The flow balancing element is a flow balancing plate, which is buckled onto the inner wall of the installation cavity and forms an air chamber with the inner wall of the installation cavity, and the air outlet of the air supply connector is connected to the air chamber.

15. An optical measuring device, characterized in that: include: An optical path system, wherein the optical path system is the optical path system according to any one of claims 1 to 14; And a detection device, wherein the detection device is used to detect the object to be detected.

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