Electric field sensor assembly and electric field type detection method

Abstract

The invention provides an electric field sensor assembly and an electric field type detection method, and the electric field sensor assembly comprises an electric field sensor and a data processing part, the dynamic induction electrode comprises a first signal generation assembly for generating a direct current signal, a first signal output assembly for outputting the direct current signal, and a first charge induction assembly for inducing charges; the static induction electrode at least comprises a second charge induction assembly for inducing charges and a second signal output assembly for outputting alternating current signals; the data processing part receives the direct current signal and the alternating current signal, obtains a direct current voltage value and an alternating current voltage value respectively, and determines the type of the current electric field according to the comparison result of the direct current voltage value and the alternating current voltage value. The direct current signal and the alternating current signal can be obtained at the same time, good detection of a direct current electric field and an alternating current electric field is achieved, the sensitivity of electric field detection is improved, and the detection frequency band of the electric field sensor is widened.

Description

Technical Field

[0001] The invention relates to an electric field sensor, in particular to an electric field sensor component and an electric field type detection method. Background Art

[0002] As a key component for measuring electric field strength, electric field sensors are widely used in many fields such as aerospace, smart grid, electrostatic protection, lightning warning, scientific research, etc.

[0003] In recent years, with the development of MEMS and micro-nano processing technology, MEMS electric field sensors based on the charge induction principle have become a hot topic of research and application due to their small size, low cost, easy integration, and batch manufacturing. Existing MEMS electric field sensors work based on resonance or vibration, mostly driven by electrostatics or piezoelectrics. Through periodic vibration structures, they modulate the induced charge on the sensing electrode placed in the measured electric field environment, thereby generating an induced current proportional to the electric field size to detect the measured electric field.

[0004] However, existing MEMS electric field sensors can usually only sense one type of electrical signal, resulting in a narrow detection frequency band of the MEMS electric field sensor, thereby reducing the sensitivity to electric field detection. Summary of the invention

[0005] In view of the shortcomings existing in the above problems, the present invention provides an electric field sensor component and electric field type detection method which can simultaneously obtain DC current signals and AC current signals, achieve good detection of DC electric fields and AC electric fields, improve the sensitivity of electric field detection, and broaden the detection frequency band of the electric field sensor.

[0006] To achieve the above object, in a first aspect, the present invention provides an electric field sensor assembly, comprising an electric field sensor and at least one data processing part connected thereto, wherein:

[0007] The electric field sensor comprises at least one dynamic sensing electrode and at least one static sensing electrode, wherein:

[0008] The dynamic sensing electrode comprises a first signal generating component for generating at least one direct current signal according to an excitation signal, a first signal output component for outputting the direct current signal, and a first charge sensing component for sensing charges in a current electric field, wherein the first signal generating component and the first signal output component are both parts to which the first charge sensing component is attached;

[0009] The static sensing electrode at least comprises a second charge sensing component for sensing charges in the current electric field, and a second signal output component for outputting an AC current signal according to the sensed charges, wherein the second signal output component is attached to a part of the second charge sensing component;

[0010] The data processing part receives the DC current signal and the AC current signal, and obtains a DC voltage value and an AC voltage value respectively, and determines the current electric field type according to a comparison result of the DC voltage value and the AC voltage value.

[0011] In one embodiment, the electric field sensor also includes a substrate, the substrate includes a recessed area, and a solid part surrounding the outside of the recessed area, wherein the first part of the first charge sensing component and the first part of the second charge sensing component are both attached to the solid part, the second part of the first charge sensing component and the second part of the second charge sensing component are both located on the recessed area, and the first signal generating component, the first signal output component, and the second signal output component are all located above the solid part.

[0012] In one embodiment, the first charge induction component and the second charge induction component both include a base portion and a metal electrode, a first region of the base portion is attached to the solid portion, a second region of the base portion is located on the recessed region, and the metal electrode is attached to the second region;

[0013] The first signal generating component includes a piezoelectric upper electrode a, a piezoelectric upper electrode b, a piezoelectric layer a, a piezoelectric lower electrode a and a piezoelectric lower electrode b, wherein the piezoelectric lower electrode a and the piezoelectric lower electrode b are arranged side by side and are both attached to a portion of the first region and a portion of the second region, the piezoelectric upper electrode a and the piezoelectric upper electrode b are arranged side by side, the piezoelectric upper electrode a is attached to at least a portion of the piezoelectric lower electrode a, the piezoelectric upper electrode b is attached to at least a portion of the piezoelectric lower electrode b, and the piezoelectric layer a is sandwiched between the piezoelectric upper electrode a, the piezoelectric upper electrode b, the piezoelectric lower electrode a and the piezoelectric lower electrode b.

[0014] In one embodiment, the static sensing electrode further comprises a second signal generating component, the second signal generating component receives the displacement of the second charge sensing component when sensing the charge in the current electric field, and transfers the displacement into the AC current signal, wherein:

[0015] The second signal generating component is attached to a portion of the second charge inducing component.

[0016] In one embodiment, the second signal generating component includes at least one piezoelectric upper electrode c, a piezoelectric layer b and at least one piezoelectric lower electrode c, the piezoelectric lower electrode c is attached to a portion of the first region and a portion of the second region, the piezoelectric upper electrode c is attached to at least a portion of the piezoelectric lower electrode c, and the piezoelectric layer a is sandwiched between the piezoelectric upper electrode c and the piezoelectric lower electrode c.

[0017] In one embodiment, a shielding electrode is further included between the dynamic induction electrode and the static induction electrode, wherein both ends of the shielding electrode are attached to the entity portion and are arranged above the recessed area.

[0018] In one of the embodiments, the DC current signal includes a DC current signal in the current electric field obtained according to a set sensing time point, or each DC current signal in the current electric field obtained according to a set sensing time period;

[0019] The alternating current signal includes an alternating current signal in the current electric field obtained according to a set sensing time point, or each alternating current signal in the current electric field obtained according to a set sensing time period.

[0020] In one embodiment, the frequency of the electric field detected by the dynamic sensing electrode is less than 50% of the self-resonant frequency of the electric field sensor;

[0021] The frequency of the electric field detected by the static induction electrode is greater than 50% of the self-resonance frequency of the electric field sensor;

[0022] The alternating current signal detected by the static induction electrode is an alternating current signal greater than, equal to or less than 50% of the self-resonant frequency of the electric field sensor.

[0023] In one embodiment, the data processing part at least includes an excitation module, a first calculation module, a second calculation module and a third calculation module, wherein:

[0024] The excitation module is connected to the first signal generating component, inputs the excitation signal thereto to drive the first signal generating component to vibrate, and receives the generated vibration signal;

[0025] The first calculation module is connected to the first signal output component, receives the input DC current signal, and converts the DC current signal into a DC voltage value;

[0026] The second calculation module is connected to the second signal output component, receives the input AC current signal, and converts the AC current signal into an AC voltage value;

[0027] The third calculation module compares the DC voltage value with the AC voltage value, and determines the current electric field type according to the comparison result.

[0028] In one embodiment, the data processing part includes a first data processing component, a second data processing component and a third data processing component, and the first data processing component and the second data processing component are both connected to the third data processing component, wherein:

[0029] The first data processing component includes an excitation module and a first calculation module, wherein:

[0030] The excitation module is connected to the first signal generating component, inputs the excitation signal thereto to drive the first signal generating component to vibrate, and receives the generated vibration signal;

[0031] The first calculation module is connected to the first signal output component, receives the input DC current signal, and converts the DC current signal into a DC voltage value;

[0032] The second data processing component comprises a second computing module, wherein:

[0033] The second calculation module receives the AC current signal input by the static induction electrode and obtains an AC voltage value;

[0034] The third data processing component includes a third computing module, wherein:

[0035] The third calculation module receives the DC voltage value and the AC voltage value, and determines the current electric field type according to a comparison result of the DC voltage value and the AC voltage value.

[0036] In a second aspect, the present invention further provides an electric field type detection method, which is applied to the above-mentioned electric field sensor assembly and comprises the following steps:

[0037] The dynamic induction electrode and the static induction electrode respectively obtain at least one direct current signal and at least one alternating current signal of the current electric field;

[0038] Obtain a DC voltage value and an AC voltage value according to the DC current signal and the AC current signal respectively;

[0039] The DC voltage value is compared with the AC voltage value, and the current electric field type is determined based on the comparison result.

[0040] Compared with the prior art, the present invention has one of the following advantages:

[0041] Through the dynamic induction electrode and the static induction electrode, the DC current signal and the AC current signal can be obtained at the same time. Compared with the existing MEMS electric field sensor that can only obtain one current signal, it can achieve good detection of the DC electric field and the AC electric field, improve the sensitivity of the electric field detection, and broaden the detection frequency band of the electric field sensor;

[0042] When the dynamic induction electrode and the static induction electrode have the same structure, the two can be replaced as needed;

[0043] By comparing the DC current value with the AC current value, the electric field can be detected and the type of the current electric field can be accurately determined. BRIEF DESCRIPTION OF THE DRAWINGS

[0044] Figure 1 It is a schematic structural diagram of a first embodiment of a broadband electric field sensor assembly in the present invention;

[0045] Figure 2 for Figure 1 A structural diagram of a first embodiment of a medium electric field sensor;

[0046] Figure 3 for Figure 2 A cross-sectional view of

[0047] Figure 4 for Figure 1 The structural diagram of the excitation module;

[0048] Figure 5 for Figure 1 A schematic diagram of the structure of the first computing module;

[0049] Figure 6 for Figure 1 A schematic diagram of the structure of the second computing module;

[0050] Figure 7 It is a structural diagram of a second embodiment of the electric field sensor of the present invention;

[0051] Figure 8 is a structural diagram of a third embodiment of the electric field sensor in the present invention;

[0052] Fig. 9 is a structural diagram of a fourth embodiment of an electric field sensor in the present invention;

[0053] Fig.10 is a structural diagram of a fifth embodiment of the electric field sensor of the present invention;

[0054] Fig.11 is a structural diagram of a sixth embodiment of an electric field sensor in the present invention;

[0055] Fig.12It is a schematic structural diagram of a second embodiment of a broadband electric field sensor assembly in the present invention;

[0056] Fig.13 It is a flow chart of the electric field type detection method in the present invention.

[0057] The main reference numerals are as follows:

[0058] 1-electric field sensor; 2-substrate; 200-insulating layer a; 201-substrate layer; 202-recessed area; 3-dynamic sensing electrode; 300-piezoelectric upper electrode a; 301-piezoelectric layer a; 302-piezoelectric lower electrode a; 303-lead electrode a; 304-insulating layer b; 305-piezoelectric upper electrode b; 306-piezoelectric lower electrode b; 4-static sensing electrode; 400-piezoelectric upper electrode c; 401-piezoelectric lower electrode c; 402-lead electrode Pole b; 403-piezoelectric upper electrode d; 404-piezoelectric lower electrode d; 5-base layer; 6-first region; 7-second part a; 8-second part b; 9-metal electrode; 10-shielding electrode; 11-data processing part; 1101-excitation module; 1102-first calculation module; 1103-second calculation module; 1104-third calculation module; 12-first data processing part; 13-second data processing part; 14-third data processing part. DETAILED DESCRIPTION

[0059] In order to make the purpose, technical solution and advantages of the present invention clearer, the technical solution of the present invention will be clearly and completely described below in conjunction with specific embodiments and corresponding drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0060] In the description of the present invention, it is necessary to understand that the terms "upper", "lower", "top surface", "bottom surface", "inside", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation of the present invention. It should be noted that when a component is considered to be "connected" to another component, it may be directly connected to the other component or there may be a centrally arranged component at the same time. In addition, the terms "first" and "second" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance.

[0061] Embodiment 1

[0062] like Figures 1 to 6As shown, this embodiment provides an electric field sensor assembly, including an electric field sensor 1, and a data processing part 11 connected thereto. The electric field sensor 1 includes a substrate 2, a dynamic induction electrode 3, a static induction electrode 4 and a shielding electrode 10, wherein the dynamic induction electrode 3 and the static induction electrode 4 are respectively fixed on the left and right sides of the substrate 2, and the shielding electrode 10 is located between the dynamic induction electrode 3 and the static induction electrode 4 to separate the dynamic induction electrode 3 from the static induction electrode 4. Part of the dynamic induction electrode 3 is attached to the entity part, and the other part is located on the recessed area 202, which is used to obtain a DC current signal of the current electric field according to the excitation signal. Part of the static induction electrode 4 is attached to the entity part, and the other part is located on the recessed area 202, which is used to sense the charge in the current electric field and output an AC current signal according to the induced charge. The shielding electrode 10 faces the top of the electric field sensor 1 to shield interference signals.

[0063] Specifically, the substrate 2 includes a solid part and a recessed area 202. The recessed area 202 is formed by a local area of ​​the top end surface of the substrate 2 being recessed toward the position of the bottom end surface thereof, and the solid part surrounds the outside of the recessed area 202 to form a frame-like structure.

[0064] Preferably, the shape of the substrate 2, the shape of the recessed area 202 and the shape of the solid part are all square structures.

[0065] Furthermore, the entity part is composed of a stacked insulating layer a200 and a substrate layer 201. The insulating layer a200 is used to isolate signals, and the material of the insulating layer a200 is not limited to silicon dioxide, silicon nitride, and a composite material made of silicon dioxide and silicon nitride. The substrate layer 201 can be made of dielectric materials such as silicon-based materials, glass, ceramics or organic materials, metals and metal alloy materials.

[0066] Specifically, the dynamic sensing electrode 3 includes a piezoelectric electrode assembly a (i.e., a first signal generating assembly) for generating a DC current signal according to an excitation signal, an extraction electrode a (i.e., a first signal output assembly) for outputting the DC current signal, and a sensing electrode assembly a (i.e., a first charge sensing assembly) for sensing the charge in the current electric field. The piezoelectric electrode assembly a and the extraction electrode a are both parts of the attached sensing electrode assembly a, and the sensing electrode assembly a is connected to the piezoelectric electrode assembly a and the extraction electrode a respectively, and the piezoelectric electrode assembly a is connected to the extraction electrode a. Among them, a part of the sensing electrode assembly a is attached to the entity part, and the other part is located above the recessed area 202, and the piezoelectric electrode assembly a is attached to a part of the sensing electrode assembly a.

[0067] Furthermore, the direct current signal is obtained by converting the vibration generated by the piezoelectric electrode assembly a according to the excitation signal, and the direct current signal is connected to the first calculation module 1102 in the data processing part 11 via the lead-out electrode a303 and the transmission line.

[0068] Specifically, the static induction electrode 4 includes an induction electrode component b (i.e., a second charge induction component) for inducing charges in the current electric field, and an extraction electrode b402 (i.e., a second signal output component) for outputting an AC current signal according to the induced charges, and the induction electrode component b is connected to the extraction electrode b402. Part of the induction electrode component b is attached to the solid part, and the other part is located on the recessed area 202, and the extraction electrode b402 is attached to a part of the induction electrode component b.

[0069] Furthermore, the alternating current signal is obtained by the sensing electrode assembly b according to the charge conversion induced in the current electric field, and the alternating current signal is connected to the second calculation module 1103 in the data processing part 11 through the extraction electrode b402 via the transmission line.

[0070] Specifically, the shielding electrode 10 is located between the dynamic induction electrode 3 and the static induction electrode 4 and is spaced apart from the dynamic induction electrode 3 and the static induction electrode 4 , respectively. Both ends of the shielding electrode 10 are attached to the solid part and are arranged above the recessed area 202 .

[0071] By setting a shielding electrode facing the top of the electric field sensor between the dynamic sensing electrode and the static sensing electrode to shield the interference signal, the defect of being unable to accurately detect due to the interference between the electric field frequency and the sensing electrode frequency can be solved when sensing the AC current signal.

[0072] In this embodiment, further, the sensing electrode assembly a and the sensing electrode assembly b both include a base portion 5 and a metal electrode 9, the first region 6 of the base portion 5 is attached to the top end surface of the insulating layer a200, the second region of the base portion 5 is located above the recessed region 202, and the metal electrode 9 is attached to a portion of the second region.

[0073] Further, the piezoelectric electrode assembly a is connected to the extraction electrode a303 through the first region 6. The piezoelectric electrode assembly a includes a piezoelectric upper electrode a300, a piezoelectric upper electrode b305, a piezoelectric layer a301, a piezoelectric lower electrode a302 and a piezoelectric lower electrode b306, wherein the piezoelectric lower electrode a302 and the piezoelectric lower electrode b306 are arranged side by side, and are both attached to a portion of the first region 6 and a portion of the second region, the piezoelectric upper electrode a300 and the piezoelectric upper electrode b305 are arranged side by side, the piezoelectric upper electrode a300 is attached to at least a portion of the piezoelectric lower electrode a302, the piezoelectric upper electrode b305 is attached to at least a portion of the piezoelectric lower electrode b306, and the piezoelectric layer a301 is sandwiched between the piezoelectric upper electrode a300, the piezoelectric upper electrode b305, the piezoelectric lower electrode a302 and the piezoelectric lower electrode b306.

[0074] In the above embodiment, further, the second region includes a second portion a7 and a second portion b8, wherein the second portion b8 is farther away from the first region 6 than the second portion a7, and the metal electrode 9 is attached to the second portion b8.

[0075] In this embodiment, further, the piezoelectric upper electrode a300 and the piezoelectric lower electrode a302 constitute the input end of the excitation signal, and are connected to the excitation module 1101 in the data processing part 11 through a transmission line, and the piezoelectric upper electrode b305 and the piezoelectric lower electrode b306 constitute the output end of the vibration signal, and are connected to the excitation module 1101 in the data processing part 11 through a transmission line.

[0076] The lead-out electrode a303 is connected to the first calculation module 1102 in the data processing part 11 through a transmission line, and the lead-out electrode b402 is connected to the second calculation module 1103 in the data processing part 11 through a transmission line.

[0077] In this embodiment, further, the shielding electrode 10 is composed of a substrate layer, or a substrate layer and a metal electrode covering the substrate layer.

[0078] When the sensing electrode assembly a reciprocates up and down under the influence of the current electric field, the sensing electrode assembly a and the shielding electrode 10 are not in the same plane, and differential induction is formed between the two, thereby outputting a differential signal. When the sensing electrode assembly a is stationary, the top end surface of the sensing electrode assembly a and the top end surface of the shielding electrode 10 are in the same plane.

[0079] Exemplarily, when the base layer is made of a highly conductive silicon-based material, the shielding signal effect can be achieved through the base layer. When the base layer is made of a non-highly conductive silicon-based material, the shielding signal effect can be achieved through the metal electrode 9 covering it.

[0080] In addition, optionally, the piezoelectric electrode assembly a further includes an insulating layer b304, which is sandwiched between the piezoelectric lower electrode a302 and the base layer 5, and between the piezoelectric lower electrode b306 and the base layer 5, for isolating signals. The material of the insulating layer b304 is not limited to silicon dioxide, silicon nitride, and a composite material made of silicon dioxide and silicon nitride.

[0081] Optionally, the metal electrode 9 can be made of metals such as Ti, Pt, Al, Ag, Cr, Cu, Au, Mo, or alloy materials. The base layer 5 can be made of dielectric materials such as silicon-based materials, glass, ceramics, metals or organic materials, metals and metal alloy materials. The piezoelectric layer can be made of lead zirconate titanate, aluminum nitride, zinc oxide, lead titanate, barium titanate, and modified lead titanate. The shape of the base layer 5 can be a straight beam, a folded beam, a U-shaped beam, a serpentine beam, a crab beam, etc.

[0082] In this embodiment, when the base layer 5 is made of a highly conductive silicon-based material, signal transmission between the metal electrode 9 and the lead-out electrode a303, the piezoelectric electrode assembly a and the lead-out electrode a303, and the metal electrode 9 and the lead-out electrode b402 can be achieved without setting up a transmission line.

[0083] In another embodiment, when the base layer 5 is made of a non-highly conductive material, a transmission line is embedded in the base layer 5, the piezoelectric electrode is connected to the lead-out electrode through the transmission line, and the metal electrode 9 is connected to the lead-out electrode through the transmission line, thereby realizing signal transmission between the metal electrode 9 and the lead-out electrode a303, the piezoelectric electrode assembly a and the lead-out electrode a303, and the metal electrode 9 and the lead-out electrode b402.

[0084] In addition, in the electric field sensor 1 provided in the present embodiment, the metal electrode 9 is the core component of the electric field sensor 1, and is responsible for at least receiving and sensing the charge signal in the current electric field. The base portion 5 has a certain elasticity. After the metal electrode 9 is attached to the top surface of the base portion 5, when the current electric field changes drastically, the metal electrode 9 can not only sense the charge in the current electric field, but also move back and forth in the upper and lower directions between the upper position of the recessed area 202 and the inside of the recessed area 202 under the influence of the current electric field. Among them, when the metal electrode 9 is located at the upper position of the recessed area 202, the number of charges induced on the surface of the metal electrode 9 is greater than the number of charges induced on the surface of the metal electrode 9 when the metal electrode 9 is located inside the recessed area 202. At the same time, when the metal electrode 9 is located at the upper position of the recessed area 202, the electric field value obtained is also greater than the electric field value obtained when the metal electrode 9 is located inside the recessed area 202.

[0085] Specifically, the data processing part 11 receives the DC current signal and the AC current signal, and obtains the DC voltage value and the AC voltage value respectively, and determines the current electric field type according to the comparison result of the DC voltage value and the AC voltage value.

[0086] Furthermore, the data processing part 11 is connected to the extraction electrode a303 and the extraction electrode b402 through transmission lines, and the data processing part 11 is also connected to the input end of the excitation signal composed of the piezoelectric upper electrode a300 and the piezoelectric lower electrode a302, and the output end of the vibration signal composed of the piezoelectric upper electrode b305 and the piezoelectric lower electrode b306 through transmission lines. The data processing part 11 includes an excitation module 1101, a first calculation module 1102, a second calculation module 1103 and a third calculation module 1104, wherein:

[0087] The excitation module 1101 inputs an excitation signal to the piezoelectric electrode assembly a to drive the piezoelectric electrode assembly a to vibrate;

[0088] The first calculation module 1102 receives the DC current signal input from the lead-out electrode a303 and obtains a DC voltage value;

[0089] The second calculation module 1103 receives the AC current signal input from the extraction electrode b402 and obtains the AC voltage value;

[0090] The third calculation module 1104 compares the DC voltage value with the AC voltage value, and determines the current electric field type according to the comparison result.

[0091] Furthermore, the excitation module 1101 is used to input an excitation signal to the piezoelectric electrode assembly a and receive a vibration signal generated by the piezoelectric electrode assembly a.

[0092] Furthermore, the excitation module 1101 includes an excitation signal generating unit, a phase shift filter, a signal amplifier and a vibration signal receiver. The excitation signal generating unit inputs an excitation signal to the piezoelectric electrode assembly a, the piezoelectric electrode assembly a generates vibration according to the excitation signal and outputs a vibration signal, the vibration signal receiver receives the vibration signal output by the piezoelectric electrode assembly a, and the phase shift filter and the signal amplifier process the vibration signal accordingly to determine whether the piezoelectric electrode assembly a generates the maximum vibration.

[0093] Exemplarily, the excitation signal generating unit is connected to the piezoelectric upper electrode a300 through a transmission line, and the vibration signal receiver is connected to the piezoelectric lower electrode a302 through a transmission line.

[0094] Furthermore, the first calculation module 1102 includes an I / V conversion unit, an amplification unit, a phase shift filter and a coherent demodulator, wherein:

[0095] The I / V conversion unit converts the DC current signal into a DC voltage signal;

[0096] The amplification unit removes interference signals from the DC voltage signal and amplifies the DC voltage signal;

[0097] The phase shift filter receives the vibration signal amplified by the piezoelectric electrode assembly a, filters the vibration signal, and converts the vibration signal into a specified waveform;

[0098] The coherent demodulator demodulates the received vibration signal of the specified waveform and the amplified DC voltage signal to obtain a DC voltage value.

[0099] Optionally, the phase shift filter can convert the vibration signal into a square wave signal, a half wave signal or a full wave signal according to the setting.

[0100] Furthermore, the second calculation module 1103 includes an I / V conversion unit, an amplification unit, a filter and an amplitude extraction unit. The AC current signal is obtained by the sensing electrode assembly b according to the charge conversion induced in the current electric field, and is input into the second calculation module 1103 through the extraction electrode b402 and the transmission line, wherein:

[0101] The I / V conversion unit converts the AC current signal into an AC voltage signal;

[0102] The amplifying unit removes interference signals from the AC voltage signal and amplifies the AC voltage signal;

[0103] The filter filters the AC voltage signal and converts the AC voltage signal into a specified waveform;

[0104] The amplitude extraction unit obtains an AC voltage value according to the AC voltage signal.

[0105] Optionally, the phase shift filter can convert the AC voltage signal into a square wave signal, a half wave signal or a full wave signal according to settings.

[0106] Furthermore, the third calculation module 1104 compares the DC voltage value with the AC voltage value, and determines the current electric field type according to the comparison result.

[0107] In addition, in this embodiment, the frequency of the electric field detected by the dynamic induction electrode is less than 50% of the self-resonance frequency of the electric field sensor.

[0108] Exemplarily, assuming that the resonant frequency of the electric field sensor is f1, the frequency of the electric field detected by the dynamic induction electrode is f≤0.5×f1.

[0109] The frequency of the electric field detected by the static sensing electrode is greater than 50% of the self-resonance frequency of the electric field sensor.

[0110] Exemplarily, assuming that the resonant frequency of the electric field sensor is f1, the frequency of the electric field detected by the static induction electrode is f≥0.5×f1.

[0111] The alternating current signal detected by the static sensing electrode is an alternating current signal greater than 50% of the self-resonant frequency of the electric field sensor.

[0112] Exemplarily, assuming that the resonant frequency of the broadband electric field sensor is f1, the AC current signal f detected by the static induction electrode is: f≥0.5×f1.

[0113] The alternating current signal detected by the static induction electrode is an alternating current signal equal to 50% of the self-resonant frequency of the electric field sensor.

[0114] Exemplarily, the resonance frequency of the broadband electric field sensor is set to f1, and the AC current signal f detected by the static induction electrode is: f=0.5×f1.

[0115] The alternating current signal detected by the static induction electrode is an alternating current signal less than 50% of the self-resonant frequency of the electric field sensor.

[0116] Exemplarily, the resonance frequency of the broadband electric field sensor is set to f1, and the AC current signal f detected by the static induction electrode is: f≤0.5×f1.

[0117] Embodiment 2

[0118] like Figure 7 As shown, this embodiment provides an electric field sensor assembly, including an electric field sensor 1 and a data processing part connected thereto. The electric field sensor 1 includes a substrate 2, a dynamic sensing electrode 3, a static sensing electrode 4 and a shielding electrode 10. The difference between the electric field sensor 1 in this embodiment and the electric field sensor 1 in the first embodiment is that:

[0119] The static sensing electrode 4 also includes a piezoelectric electrode component b (i.e., a second signal generating component), which receives the displacement of the sensing electrode component b (i.e., the second charge sensing component) when sensing the charge in the current electric field, and transfers the displacement into an AC current signal. The piezoelectric electrode component b (i.e., the second signal generating component) is connected to the lead-out electrode b402.

[0120] Further, the piezoelectric electrode assembly b includes a piezoelectric upper electrode c400, a piezoelectric layer b and a piezoelectric lower electrode c401, the piezoelectric lower electrode c401 is attached to a partial area of ​​the first part and a partial area of ​​the second part a, the piezoelectric upper electrode c400 is attached to a part of the piezoelectric lower electrode c401, and the piezoelectric layer b is sandwiched between the piezoelectric upper electrode c400 and the piezoelectric lower electrode c401. The piezoelectric upper electrode c400 and the piezoelectric lower electrode c401 constitute a signal output terminal, and the output terminal is connected to the lead-out electrode b402, so that the AC current signal obtained by the static induction electrode 4 is input into the second calculation module of the data processing part through the output terminal, the lead-out electrode b402 and the transmission line, so as to convert the AC current signal into a corresponding AC voltage value through the second calculation module.

[0121] Furthermore, the alternating current signal is obtained by converting the displacement generated by the reciprocating motion of the piezoelectric electrode assembly b when the piezoelectric electrode assembly b receives the induced charge in the current electric field.

[0122] Embodiment 3

[0123] like Figure 8 As shown, this embodiment provides an electric field sensor assembly, including an electric field sensor 1 and a data processing part connected thereto. The electric field sensor 1 includes a substrate 2, a dynamic sensing electrode 3, a static sensing electrode 4 and a shielding electrode 10. The difference between the electric field sensor 1 in this embodiment and the electric field sensor 1 in the first embodiment is that:

[0124] The static sensing electrode 4 also includes a piezoelectric electrode component b (i.e., a second signal generating component), which receives the displacement of the sensing electrode component b (i.e., the second charge sensing component) when sensing the charge in the current electric field, and transfers the displacement into an AC current signal. The piezoelectric electrode component b (i.e., the second signal generating component) is connected to the lead-out electrode b402.

[0125] Further, the piezoelectric electrode assembly b includes a piezoelectric upper electrode c400, a piezoelectric layer b, a piezoelectric lower electrode c401, a piezoelectric upper electrode d403 and a piezoelectric lower electrode d404, wherein the piezoelectric lower electrode c401 and the piezoelectric lower electrode d404 are arranged side by side and are both attached to part of the first area and part of the second area, the piezoelectric upper electrode c400 and the piezoelectric upper electrode d403 are arranged side by side, the piezoelectric upper electrode c400 is attached to a part of the piezoelectric lower electrode c401, the piezoelectric upper electrode d403 is attached to a part of the piezoelectric lower electrode d404, and the piezoelectric layer b is sandwiched between the piezoelectric upper electrode c400, the piezoelectric upper electrode d403, the piezoelectric lower electrode c401 and the piezoelectric lower electrode d404.

[0126] Among them, the piezoelectric upper electrode d403 and the piezoelectric lower electrode d404 constitute the input end of the excitation signal, and are connected to the excitation module in the data processing part 11 through the transmission line. The piezoelectric upper electrode c400 and the piezoelectric lower electrode c401 constitute the signal output end, and the output end is connected to the extraction electrode b402, so that the AC current signal obtained by the static induction electrode 4 is input into the second calculation module of the data processing part through the extraction electrode b402 and the transmission line, so as to convert the AC current signal into a corresponding AC voltage value through the second calculation module.

[0127] Furthermore, the alternating current signal is obtained by converting the displacement generated by the reciprocating motion of the piezoelectric electrode assembly b when the piezoelectric electrode assembly b receives the induced charge in the current electric field.

[0128] In this embodiment, since the dynamic induction electrode and the static induction electrode have the same structure, they can be replaced as needed.

[0129] Exemplarily, when sensing a direct current signal, the sensing electrode component a in the dynamic sensing electrode 2 does not generate vibration, and the direct current signal is obtained by converting the vibration generated by the piezoelectric electrode component a according to the excitation signal. At this time, if the sensing electrode component b in the static sensing electrode 3 is damaged, the dynamic sensing electrode 2 and the static sensing electrode 3 can be replaced without affecting the use of the electric field sensor.

[0130] Embodiment 4

[0131] like Fig. 9 As shown, this embodiment provides an electric field sensor assembly, including an electric field sensor 1 and a data processing part connected thereto. The electric field sensor 1 includes a substrate 2, a dynamic sensing electrode 3 and a static sensing electrode 4. The difference between the electric field sensor 1 in this embodiment and the electric field sensor 1 in the first embodiment is that:

[0132] The electric field sensor 1 in this embodiment does not include the shielding electrode in the electric field sensor 1 in the first embodiment, and other structures and principles are the same as those of the electric field sensor 1 in the first embodiment.

[0133] Embodiment 5

[0134] like Fig.10 As shown, this embodiment provides an electric field sensor assembly, including an electric field sensor and a data processing part connected thereto. The electric field sensor 1 includes a substrate 2, a dynamic sensing electrode 3 and a static sensing electrode 4. The difference between the electric field sensor 1 in this embodiment and the electric field sensor 1 in the second embodiment is:

[0135] The electric field sensor 1 in this embodiment does not include the shielding electrode in the electric field sensor 1 in the second embodiment, and other structures and principles are the same as those of the electric field sensor 1 in the second embodiment.

[0136] Embodiment 6

[0137] like Fig.11 As shown, this embodiment provides an electric field sensor assembly, including an electric field sensor and a data processing part connected thereto. The electric field sensor 1 includes a substrate 2, a dynamic sensing electrode 3 and a static sensing electrode 4. The difference between the electric field sensor 1 in this embodiment and the electric field sensor 1 in the third embodiment is:

[0138] The electric field sensor 1 in this embodiment does not include the shielding electrode in the electric field sensor 1 in the second embodiment, and other structures and principles are the same as those of the electric field sensor 1 in the third embodiment.

[0139] Embodiment 7

[0140] like Fig.12 As shown, this embodiment provides an electric field sensor assembly, comprising the electric field sensor 1 of any one of the above-mentioned embodiments 1 to 6, a first data processing part 12 and a second data processing part 13 connected to the electric field sensor 1, and a third data processing part 14 connected to the first data processing part 12 and the second data processing part 13, respectively, wherein:

[0141] The first data processing part 12 is connected to the input end composed of the piezoelectric upper electrode a and the piezoelectric lower electrode a in the dynamic induction electrode 3 through a transmission line, and is used to input an excitation signal to the piezoelectric electrode assembly a. The first data processing part 12 is connected to the output end composed of the piezoelectric upper electrode b and the piezoelectric lower electrode b in the dynamic induction electrode 3 through a transmission line, and is used to receive the vibration signal output by the piezoelectric electrode assembly a. The first data processing part 12 is connected to the lead-out electrode a in the dynamic induction electrode 3 through a transmission line, and is used to receive the DC current signal output by the dynamic induction electrode 3 and obtain the DC voltage value. The second data processing part 13 is connected to the lead-out electrode b in the static induction electrode 4 through a transmission line, and receives the AC current signal output by the static induction electrode 4 and obtains the AC voltage value. The third data processing part 14 is connected to the first data processing part 12 and the second data processing part 13 through a transmission line, and is used to compare the DC voltage value with the AC voltage value, and determine the current electric field type according to the comparison result.

[0142] Specifically, the first data processing part 12 includes an excitation module and a first calculation module, wherein the excitation module inputs an excitation signal to the piezoelectric electrode assembly a to drive the piezoelectric electrode assembly a to vibrate, and receives a vibration signal output by the piezoelectric electrode assembly a. The first calculation module receives a DC current signal input by the dynamic induction electrode 3 and obtains a DC voltage value.

[0143] The structures and principles of the excitation module and the first calculation module in this embodiment are the same as those of the excitation module and the first calculation module in the first embodiment.

[0144] Specifically, the second data processing part 13 includes a second calculation module, wherein the second calculation module receives the AC current signal input by the static induction electrode 4 and obtains an AC voltage value.

[0145] The structure and principle of the second calculation module in this embodiment are the same as those of the second calculation module in the first embodiment.

[0146] Specifically, the third data processing part 14 includes a third calculation module, wherein the third calculation module compares the DC voltage value with the AC voltage value and determines the current electric field type according to the comparison result.

[0147] The structure and principle of the third calculation module in this embodiment are the same as those of the third calculation module in the first embodiment.

[0148] In the above embodiment, the first data processing part 12, the second data processing part 13 and the third data processing part 14 may also be solidified on the same circuit board.

[0149] For example, in Embodiments 1 to 4, when the third calculation module determines that the DC voltage value is greater than the AC voltage value, the electric field type at the current sensing time point is a DC electric field. When the third calculation module determines that the DC voltage value is less than the AC voltage value, the electric field type at the current sensing time point is an AC electric field.

[0150] In another embodiment, after the first calculation module and the second calculation module respectively input multiple DC voltage values ​​and AC voltage values ​​at the same sensing time point to the third calculation module, the third calculation module determines the electric field type at each sensing time point according to the comparison results of the DC voltage values ​​and AC voltage values ​​at the same sensing time point.

[0151] If the electric field type corresponding to the multiple sensing time points is a direct current electric field, determining that the current electric field in the sensing time period is a direct current electric field;

[0152] If the electric field type corresponding to the multiple sensing time points is an alternating current electric field, determining that the current electric field in the sensing time period is an alternating current electric field;

[0153] If the electric field types corresponding to the multiple sensing time points are AC electric fields or DC electric fields, it is determined that the current electric field in the sensing time period is a changing electric field in which the AC electric field and the DC electric field switch between each other.

[0154] In addition, in the first to fourth embodiments, when the current electric field changes dramatically, the metal electrodes in the dynamic induction electrode 3 and the static induction electrode 4 sense the charges in the current electric field to generate charge signals. The charge signals are input into the data processing part, or the first data processing part 12 and the second data processing part 13 through the extraction electrodes, so as to obtain the corresponding electric field value.

[0155] Embodiment 8

[0156] like Fig.13 As shown, this embodiment provides an electric field type detection method, which is applied to the electric field sensor assembly described in the first embodiment and the fourth embodiment, and includes the following steps:

[0157] S101, setting the induction time of the current electric field.

[0158] Optionally, according to actual needs, the induction time of the current electric field is set as an induction time period, and corresponding induction time points are set in the set induction time period, so as to obtain a direct current signal and an alternating current signal corresponding to each induction time point in the induction time period.

[0159] Optionally, the induction time of the current electric field is set to the current induction time point according to actual needs, so as to obtain a direct current signal and an alternating current signal corresponding to the current induction time point.

[0160] S102, driving the piezoelectric electrode assembly a in the piezoelectric electrode assembly a to vibrate.

[0161] Specifically, an excitation signal can be input into the piezoelectric electrode assembly a through the excitation module in the data processing part in Examples 1 to 6 to drive the piezoelectric electrode assembly a to vibrate and receive the vibration signal; or an excitation signal can be input into the piezoelectric electrode assembly a through the excitation module in the first data processing part in Example 7 to drive the piezoelectric electrode assembly a to vibrate and receive the vibration signal.

[0162] S103, obtaining a direct current signal and an alternating current signal of the current electric field.

[0163] Specifically, the direct current signal is obtained by converting the vibration generated by the piezoelectric electrode assembly a according to the excitation signal. The alternating current signal is obtained by converting the charge induced by the sensing electrode assembly b in the current electric field, or the alternating current signal is obtained by converting the displacement generated by the reciprocating motion when the piezoelectric electrode assembly b receives the charge induced by the sensing electrode assembly b in the current electric field.

[0164] Optionally, the DC current signal includes a DC current signal in the current electric field obtained according to a set sensing time point, or each DC current signal in the current electric field obtained according to a set sensing time period. The AC current signal includes an AC current signal in the current electric field obtained according to a set sensing time point, or each AC current signal in the current electric field obtained according to a set sensing time period.

[0165] S104, obtaining a DC voltage value and an AC voltage value according to the DC current signal and the AC current signal respectively.

[0166] Specifically, the first calculation module and the second calculation module in Examples 1 to 6 respectively receive the DC current signal and the AC current signal, and obtain the DC voltage value and the AC voltage value; or the first calculation module in the first data processing part in Example 7 receives the DC current signal and obtains the DC voltage value, and the second calculation module in the second data processing part receives the AC current signal and obtains the AC voltage value.

[0167] Optionally, the DC voltage value includes a DC current value in the current electric field obtained according to a set induction time point, or each DC current value in the current electric field obtained according to a set induction time period. The AC voltage value includes an AC voltage value in the current electric field obtained according to a set induction time point, or each AC voltage value in the current electric field obtained according to a set induction time period.

[0168] S105. Determine the current electric field type according to the comparison result between the DC voltage value and the AC voltage value.

[0169] Specifically, the DC voltage value and the AC voltage value are compared by the third calculation module in Embodiments 1 to 7, and the current electric field type is determined according to the comparison result.

[0170] For example, in Embodiments 1 to 7, when the third calculation module determines that the DC voltage value is greater than the AC voltage value, the electric field type at the current sensing time point is a DC electric field. When the third calculation module determines that the DC voltage value is less than the AC voltage value, the electric field type at the current sensing time point is an AC electric field.

[0171] For example, in Embodiments 1 to 7, after the first calculation module and the second calculation module respectively input multiple DC voltage values ​​and AC voltage values ​​at the same sensing time point to the third calculation module, the third calculation module determines the electric field type at each sensing time point according to the comparison results of the DC voltage values ​​and AC voltage values ​​at the same sensing time point. Wherein:

[0172] If the electric field type corresponding to the multiple sensing time points is a direct current electric field, determining that the current electric field in the sensing time period is a direct current electric field;

[0173] If the electric field type corresponding to the multiple sensing time points is an alternating current electric field, determining that the current electric field in the sensing time period is an alternating current electric field;

[0174] If the electric field types corresponding to the multiple sensing time points are AC electric fields or DC electric fields, it is determined that the current electric field in the sensing time period is a changing electric field in which the AC electric field and the DC electric field switch between each other.

[0175] The above description is only a preferred embodiment of the present invention, which is only illustrative and not restrictive of the present invention. Those skilled in the art understand that many changes, modifications, and even equivalences may be made to the present invention within the spirit and scope defined by the claims of the present invention, but all of them will fall within the scope of protection of the present invention.

Claims

1. An electric field sensor assembly, characterized in that: The invention comprises an electric field sensor and at least one data processing part connected thereto, wherein: The electric field sensor comprises at least one dynamic sensing electrode and at least one static sensing electrode, wherein: The dynamic sensing electrode comprises a first signal generating component for generating at least one direct current signal according to an excitation signal, a first signal output component for outputting the direct current signal, and a first charge sensing component for sensing charges in a current electric field, wherein the first signal generating component and the first signal output component are both parts to which the first charge sensing component is attached; The static sensing electrode at least comprises a second charge sensing component for sensing charges in the current electric field, and a second signal output component for outputting an AC current signal according to the sensed charges, wherein the second signal output component is attached to a part of the second charge sensing component; The data processing part receives the DC current signal and the AC current signal, and obtains a DC voltage value and an AC voltage value respectively, and determines the current electric field type according to a comparison result of the DC voltage value and the AC voltage value.

2. The electric field sensor assembly according to claim 1, characterized in that: The electric field sensor also includes a substrate, which includes a recessed area and a solid part surrounding the outside of the recessed area, wherein the first part of the first charge sensing component and the first part of the second charge sensing component are both attached to the solid part, the second part of the first charge sensing component and the second part of the second charge sensing component are both located on the recessed area, and the first signal generating component, the first signal output component, and the second signal output component are all located above the solid part.

3. The electric field sensor assembly according to claim 2, characterized in that: The first charge induction component and the second charge induction component both include a base portion and a metal electrode, a first region of the base portion is attached to the solid portion, a second region of the base portion is located on the recessed region, and the metal electrode is attached to the second region; The first signal generating component includes a piezoelectric upper electrode a, a piezoelectric upper electrode b, a piezoelectric layer a, a piezoelectric lower electrode a and a piezoelectric lower electrode b, wherein the piezoelectric lower electrode a and the piezoelectric lower electrode b are arranged side by side and are both attached to a portion of the first region and a portion of the second region, the piezoelectric upper electrode a and the piezoelectric upper electrode b are arranged side by side, the piezoelectric upper electrode a is attached to at least a portion of the piezoelectric lower electrode a, the piezoelectric upper electrode b is attached to at least a portion of the piezoelectric lower electrode b, and the piezoelectric layer a is sandwiched between the piezoelectric upper electrode a, the piezoelectric upper electrode b, the piezoelectric lower electrode a and the piezoelectric lower electrode b.

4. The electric field sensor assembly according to claim 1, characterized in that: The static sensing electrode further includes a second signal generating component, which receives the displacement of the second charge sensing component when sensing the charge in the current electric field, and transfers the displacement into the AC current signal, wherein: The second signal generating component is attached to a portion of the second charge inducing component.

5. The electric field sensor assembly according to claim 4, characterized in that: The second signal generating component includes at least one piezoelectric upper electrode c, a piezoelectric layer b and at least one piezoelectric lower electrode c. The piezoelectric lower electrode c is attached to a portion of the first region and a portion of the second region. The piezoelectric upper electrode c is attached to at least a portion of the piezoelectric lower electrode c. The piezoelectric layer a is sandwiched between the piezoelectric upper electrode c and the piezoelectric lower electrode c.

6. The electric field sensor assembly according to any one of claims 1 to 5, characterized in that: It also includes a shielding electrode disposed between the dynamic induction electrode and the static induction electrode, wherein both ends of the shielding electrode are attached to the entity portion and are arranged above the recessed area.

7. The electric field sensor assembly according to claim 6, characterized in that: The DC current signal includes a DC current signal in the current electric field obtained according to a set sensing time point, or each DC current signal in the current electric field obtained according to a set sensing time period; The alternating current signal includes an alternating current signal in the current electric field obtained according to a set sensing time point, or each alternating current signal in the current electric field obtained according to a set sensing time period.

8. The electric field sensor assembly according to claim 1, characterized in that: The frequency of the electric field detected by the dynamic sensing electrode is less than 50% of the self-resonance frequency of the electric field sensor; The frequency of the electric field detected by the static induction electrode is greater than 50% of the self-resonance frequency of the electric field sensor; The alternating current signal detected by the static induction electrode is an alternating current signal greater than, equal to or less than 50% of the self-resonant frequency of the electric field sensor.

9. The electric field sensor assembly according to claim 1, characterized in that: The data processing part at least includes an excitation module, a first calculation module, a second calculation module and a third calculation module, wherein: The excitation module is connected to the first signal generating component, inputs the excitation signal thereto to drive the first signal generating component to vibrate, and receives the generated vibration signal; The first calculation module is connected to the first signal output component, receives the input DC current signal, and converts the DC current signal into a DC voltage value; The second calculation module is connected to the second signal output component, receives the input AC current signal, and converts the AC current signal into an AC voltage value; The third calculation module compares the DC voltage value with the AC voltage value, and determines the current electric field type according to the comparison result.

10. The electric field sensor assembly according to claim 1, characterized in that: The data processing part includes a first data processing component, a second data processing component and a third data processing component, wherein the first data processing component and the second data processing component are both connected to the third data processing component, wherein: The first data processing component includes an excitation module and a first calculation module, wherein: The excitation module is connected to the first signal generating component, inputs the excitation signal thereto to drive the first signal generating component to vibrate, and receives the generated vibration signal; The first calculation module is connected to the first signal output component, receives the input DC current signal, and converts the DC current signal into a DC voltage value; The second data processing component comprises a second computing module, wherein: The second calculation module receives the AC current signal input by the static induction electrode and obtains an AC voltage value; The third data processing component includes a third computing module, wherein: The third calculation module receives the DC voltage value and the AC voltage value, and determines the current electric field type according to a comparison result of the DC voltage value and the AC voltage value.

11. An electric field type detection method, applied to the electric field sensor assembly according to any one of claims 1 to 10, characterized in that: The following steps are involved: The dynamic induction electrode and the static induction electrode respectively obtain at least one direct current signal and at least one alternating current signal of the current electric field; Obtain a DC voltage value and an AC voltage value according to the DC current signal and the AC current signal respectively; The DC voltage value is compared with the AC voltage value, and the current electric field type is determined based on the comparison result.

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