Broadband electric field sensor assembly and electric field detection method

Abstract

The invention provides a broadband electric field sensor assembly and an electric field detection method.The electric field sensor assembly comprises a substrate, dynamic induction electrodes, static induction electrodes and shielding electrodes, the substrate comprises an entity area and a concave area, and the dynamic induction electrodes and the static induction electrodes are arranged at intervals; the shielding electrode is located between the dynamic induction electrode and the static induction electrode, one part of the dynamic induction electrode and one part of the static induction electrode are attached to the entity area, the other part of the dynamic induction electrode and the other part of the static induction electrode are located on the sunken area, and direct current signals and alternating current signals of a current electric field are obtained respectively; the shielding electrode faces the top of the electric field sensor and is used for shielding interference signals; the data processing part is used for obtaining the direct-current voltage value and the alternating-current voltage value and determining the current electric field type according to the comparison result of the two values. According to the invention, interference signals can be shielded, and the defect that accurate detection cannot be carried out due to interference between the electric field frequency and the induction electrode frequency when an alternating current signal is induced is overcome.

Description

Technical Field

[0001] The invention relates to an electric field sensor, in particular to a broadband electric field sensor component and an electric field detection method. Background Art

[0002] As a key component for measuring electric field strength, electric field sensors are widely used in many fields such as aerospace, smart grid, electrostatic protection, lightning warning, scientific research, etc.

[0003] In recent years, with the development of MEMS and micro-nano processing technology, MEMS electric field sensors based on the charge induction principle have become a hot topic of research and application due to their small size, low cost, easy integration, and batch manufacturing. Existing MEMS electric field sensors work based on resonance or vibration, mostly driven by electrostatics or piezoelectrics. Through periodic vibration structures, they modulate the induced charge on the sensing electrode placed in the measured electric field environment, thereby generating an induced current proportional to the electric field size to detect the measured electric field.

[0004] However, existing MEMS electric field sensor chips all detect electric field strength through resonance. MEMS detection chips need to be used in resonance. When detecting AC electric fields, the frequency of the electric field and the frequency of the chip will interfere with each other, resulting in the inability to detect AC current signals. Summary of the invention

[0005] In view of the shortcomings existing in the above problems, the present invention provides a wide-band electric field sensor component and electric field detection method which can shield interference signals and solve the defect that cannot be accurately detected due to interference between the electric field frequency and the sensing electrode frequency when sensing AC current signals.

[0006] To achieve the above object, in a first aspect, the present invention provides a broadband electric field sensor assembly, comprising an electric field sensor and at least one data processing part connected thereto, wherein:

[0007] The electric field sensor comprises a substrate, at least one dynamic induction electrode, at least one static induction electrode and at least one shielding electrode, wherein the substrate comprises a solid area and a recessed area, the dynamic induction electrode and the static induction electrode are arranged at intervals, and the shielding electrode is located between the dynamic induction electrode and the static induction electrode, wherein a part of the dynamic induction electrode is attached to the solid area, and another part is located on the recessed area, for obtaining at least one direct current signal of the current electric field; a part of the static induction electrode is attached to the solid area, and another part is located on the recessed area, for obtaining at least one alternating current signal of the current electric field; the shielding electrode faces the top of the electric field sensor, for shielding interference signals;

[0008] The data processing part receives at least one of the DC current signals and at least one of the AC current signals, and obtains at least one DC voltage value and at least one AC voltage value respectively, and determines the current electric field type according to the comparison result of the DC voltage value and the AC voltage value.

[0009] In one embodiment, the shielding electrode is spaced apart from the dynamic sensing electrode and the static sensing electrode, respectively, wherein both ends of the shielding electrode are attached to the solid area and are arranged above the recessed area.

[0010] In one embodiment, the dynamic sensing electrode includes a sensing electrode component a and a piezoelectric electrode component a, a portion of the sensing electrode component a is attached to the solid area, and another portion is located on the recessed area, and the piezoelectric electrode component a is attached to a portion of the sensing electrode component a;

[0011] The static sensing electrode includes a sensing electrode component b and a piezoelectric electrode component b, a portion of the sensing electrode component b is attached to the solid area, and another portion is located on the recessed area, and the piezoelectric electrode component b is attached to a portion of the sensing electrode component b.

[0012] In one embodiment, the sensing electrode assembly a and the sensing electrode assembly b both include a base portion and a metal electrode, a first portion of the base portion is attached to the solid area, a second portion of the base portion is located on the recessed area, and the metal electrode is attached to a partial area of ​​the second portion;

[0013] The piezoelectric electrode assembly a includes a piezoelectric electrode a attached to a partial area of ​​the first portion and a partial area of ​​the second portion, and an extraction electrode a attached to a partial area of ​​the first portion, wherein the piezoelectric electrode a is connected to the extraction electrode a through the first portion, and the extraction electrode a is connected to the metal electrode through the base portion;

[0014] The piezoelectric electrode assembly b includes at least an extraction electrode b attached to a partial area of ​​the first portion.

[0015] In one embodiment, the second portion includes a second portion a and a second portion b, wherein the second portion b is farther away from the first portion than the second portion a, and the metal electrode is attached to the second portion b;

[0016] The piezoelectric electrode a includes a piezoelectric upper electrode a, a piezoelectric layer a and a piezoelectric lower electrode a, wherein the piezoelectric lower electrode a is attached to a partial area of ​​the first part and a partial area of ​​the second part a, the piezoelectric upper electrode a is attached to at least a portion of the piezoelectric lower electrode a, and the piezoelectric layer a is sandwiched between the piezoelectric upper electrode a and the piezoelectric lower electrode a.

[0017] In one embodiment, the piezoelectric electrode assembly b also includes a piezoelectric electrode b attached to a partial area of ​​the first part and a partial area of ​​the second part, wherein the piezoelectric electrode b includes a piezoelectric upper electrode b, a piezoelectric layer b and a piezoelectric lower electrode b, wherein the piezoelectric lower electrode b is attached to a partial area of ​​the first part and a partial area of ​​the second part b, the piezoelectric upper electrode b is attached to at least a portion of the piezoelectric lower electrode b, and the piezoelectric layer b is sandwiched between the piezoelectric upper electrode b and the piezoelectric lower electrode b.

[0018] In one embodiment, the DC current signal is obtained by converting the vibration generated by the piezoelectric electrode assembly a according to the excitation signal;

[0019] The AC current signal is obtained by converting the charges induced by the sensing electrode assembly b in the current electric field, or the AC current signal is obtained by converting the displacement generated by the reciprocating motion of the piezoelectric electrode assembly b when the piezoelectric electrode assembly b receives the charges induced by the sensing electrode assembly b in the current electric field.

[0020] In one of the embodiments, the DC current signal includes a DC current signal in the current electric field obtained according to a set sensing time point, or each DC current signal in the current electric field obtained according to a set sensing time period;

[0021] The alternating current signal includes an alternating current signal in the current electric field obtained according to a set sensing time point, or each alternating current signal in the current electric field obtained according to a set sensing time period.

[0022] In one embodiment, the frequency of the electric field detected by the dynamic sensing electrode is less than 50% of the self-resonance frequency of the broadband electric field sensor;

[0023] The frequency of the electric field detected by the static induction electrode is greater than 50% of the self-resonance frequency of the broadband electric field sensor;

[0024] The alternating current signal detected by the static induction electrode is an alternating current signal greater than, equal to or less than 50% of the self-resonant frequency of the electric field sensor.

[0025] In one embodiment, the data processing part at least includes an excitation module, a first calculation module, a second calculation module and a third calculation module, wherein:

[0026] The excitation module inputs the excitation signal to the dynamic induction electrode to drive the piezoelectric electrode assembly a to vibrate, and receives the generated vibration signal;

[0027] The first calculation module receives the DC current signal input by the dynamic induction electrode and obtains a DC voltage value;

[0028] The second calculation module receives the AC current signal input by the static induction electrode and obtains an AC voltage value;

[0029] The third calculation module compares the DC voltage value with the AC voltage value, and determines the current electric field type according to the comparison result.

[0030] In a second aspect, the present invention further provides an electric field detection method, which is applied to the above-mentioned broadband electric field sensor assembly, comprising the following steps:

[0031] The dynamic induction electrode and the static induction electrode respectively obtain at least one direct current signal and at least one alternating current signal of the current electric field;

[0032] Obtain a DC voltage value and an AC voltage value according to the DC current signal and the AC current signal respectively;

[0033] The DC voltage value is compared with the AC voltage value, and the current electric field type is determined based on the comparison result.

[0034] Compared with the prior art, the present invention has one of the following advantages:

[0035] By providing a shielding electrode facing the top of the electric field sensor between the dynamic sensing electrode and the static sensing electrode to shield interference signals, the defect of being unable to accurately detect due to interference between the electric field frequency and the sensing electrode frequency can be solved when sensing AC current signals;

[0036] When the sensing electrode assembly a reciprocates up and down under the influence of the current electric field, the shielding electrode is in a stationary state, the sensing electrode assembly a and the shielding electrode are not in the same plane, and differential induction is formed between the two, thereby outputting a differential signal;

[0037] Through the dynamic induction electrodes and the static induction electrodes, DC current signals and AC current signals can be obtained at the same time. Compared with the existing MEMS electric field sensors that can only obtain one current signal, it can achieve good detection of DC electric fields and AC electric fields, improve the sensitivity of electric field detection, and broaden the detection frequency band of the electric field sensor. BRIEF DESCRIPTION OF THE DRAWINGS

[0038] Figure 1 It is a schematic structural diagram of a first embodiment of a broadband electric field sensor assembly in the present invention;

[0039] Figure 2 for Figure 1 A structural diagram of a first embodiment of a medium electric field sensor;

[0040] Figure 3 for Figure 2 A cross-sectional view of

[0041] Figure 4 for Figure 1 The structural diagram of the excitation module;

[0042] Figure 5 for Figure 1 A schematic diagram of the structure of the first computing module;

[0043] Figure 6 for Figure 1 A schematic diagram of the structure of the second computing module;

[0044] Figure 7 It is a structural diagram of a second embodiment of the electric field sensor of the present invention;

[0045] Figure 8 is a structural diagram of a third embodiment of the electric field sensor in the present invention;

[0046] Fig. 9 It is a schematic structural diagram of a second embodiment of a broadband electric field sensor assembly in the present invention;

[0047] Fig.10 Flow chart of the electric field detection method in the present invention.

[0048] The main reference numerals are as follows:

[0049] 1-electric field sensor; 2-substrate; 200-insulating layer a; 201-substrate layer; 202-recessed area; 3-dynamic induction electrode; 300-piezoelectric upper electrode a; 301-piezoelectric layer a; 302-piezoelectric lower electrode a; 303-lead-out electrode a; 304-insulating layer b; 4-static induction electrode; 400-piezoelectric upper electrode b; 401-piezoelectric lower electrode b; 402-lead-out electrode b; 5-base layer; 6-first part; 7-second part a; 8-second part b; 9-metal electrode; 10-shielding electrode; 11-data processing part; 1101-excitation module; 1102-first calculation module; 1103-second calculation module; 1104-third calculation module; 12-first data processing part; 13-second data processing part; 14-third data processing part. DETAILED DESCRIPTION

[0050] In order to make the purpose, technical solution and advantages of the present invention clearer, the technical solution of the present invention will be clearly and completely described below in conjunction with specific embodiments and corresponding drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0051] In the description of the present invention, it is necessary to understand that the terms "upper", "lower", "top surface", "bottom surface", "inside", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation of the present invention. It should be noted that when a component is considered to be "connected" to another component, it may be directly connected to the other component or there may be a centrally arranged component at the same time. In addition, the terms "first" and "second" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance.

[0052] Embodiment 1

[0053] like Figures 1 to 6 As shown, this embodiment provides a wide-band electric field sensor assembly, including an electric field sensor 1, and a data processing part 11 connected thereto. The electric field sensor 1 includes a substrate 2, a dynamic induction electrode 3, a static induction electrode 4 and a shielding electrode 10, wherein the dynamic induction electrode 3 and the static induction electrode 4 are respectively fixed on the left and right sides of the substrate 2, and the shielding electrode 10 is located between the dynamic induction electrode 3 and the static induction electrode 4 to separate the dynamic induction electrode 3 from the static induction electrode 4. Part of the dynamic induction electrode 3 is attached to the physical area, and the other part is located on the recessed area 202, for obtaining at least one direct current signal of the current electric field. Part of the static induction electrode 4 is attached to the physical area, and the other part is located on the recessed area 202, for obtaining at least one alternating current signal of the current electric field. The shielding electrode 10 faces the top of the electric field sensor 1 to shield interference signals.

[0054] Specifically, the substrate 2 includes a solid area and a recessed area 202. The recessed area 202 is formed by a local area of ​​the top end surface of the substrate 2 being recessed toward the bottom end surface thereof, and the solid area surrounds the outside of the recessed area 202 to form a frame-like structure.

[0055] Preferably, the shape of the substrate 2 , the shape of the recessed area 202 , and the shape of the solid area are all square structures.

[0056] Furthermore, the entity region is composed of a superimposed insulating layer a200 and a substrate layer 201. The insulating layer a200 is used to isolate signals, and the material of the insulating layer a200 is not limited to silicon dioxide, silicon nitride, and a composite material made of silicon dioxide and silicon nitride. The substrate layer 201 can be made of dielectric materials such as silicon-based materials, glass, ceramics or organic materials, metals and metal alloy materials.

[0057] Specifically, the dynamic sensing electrode 3 includes a sensing electrode assembly a and a piezoelectric electrode assembly a, a portion of the sensing electrode assembly a is attached to the solid area, and the other portion is located above the recessed area 202, and a portion of the piezoelectric electrode assembly a is attached to the sensing electrode assembly a. The direct current signal is obtained by converting the vibration generated by the piezoelectric electrode assembly a according to the excitation signal.

[0058] Specifically, the static induction electrode 4 includes an induction electrode assembly b and a piezoelectric electrode assembly b, a portion of the induction electrode assembly b is attached to the solid area, and the other portion is located on the recessed area 202, and a portion of the piezoelectric electrode assembly b is attached to the induction electrode assembly b. The alternating current signal is obtained by the induction electrode assembly b according to the charge conversion induced in the current electric field.

[0059] Specifically, the shielding electrode 10 is located between the dynamic induction electrode 3 and the static induction electrode 4 and is spaced apart from the dynamic induction electrode 3 and the static induction electrode 4 , respectively. Both ends of the shielding electrode 10 are attached to the solid area and are arranged above the recessed area 202 .

[0060] In this embodiment, further, the sensing electrode assembly a and the sensing electrode assembly b both include a base portion 5 and a metal electrode 9, a first portion 6 of the base portion 5 is attached to the top end surface of the insulating layer a200, a second portion of the base portion 5 is located above the recessed area 202, and the metal electrode 9 is attached to a partial area of ​​the second portion.

[0061] Furthermore, the piezoelectric electrode assembly a includes a piezoelectric electrode a attached to a partial area of ​​the first part 6 and a partial area of ​​the second part, and a lead-out electrode a303 attached to a partial area of ​​the first part 6, wherein the piezoelectric electrode a is connected to the lead-out electrode a303 through the first part 6, and the lead-out electrode a303 is connected to the metal electrode 9 through the base layer 5.

[0062] The piezoelectric electrode assembly b includes an extraction electrode b attached to a partial region of the first portion 6 .

[0063] In the above embodiment, further, the second part includes a second part a7 and a second part b8, wherein the second part b8 is farther away from the first part 6 relative to the second part a7, and the metal electrode 9 is attached to the second part b8.

[0064] In this embodiment, further, the piezoelectric electrode a includes two piezoelectric upper electrodes a300, a piezoelectric layer a301 and two piezoelectric lower electrodes a302, the piezoelectric lower electrode a302 is attached to a partial area of ​​the first part 6 and a partial area of ​​the second part a7, the piezoelectric upper electrode a300 is attached to at least a portion of the piezoelectric lower electrode a302, and the piezoelectric layer a301 is sandwiched between the piezoelectric upper electrode a300 and the piezoelectric lower electrode a302. Among them, one piezoelectric upper electrode a300 and one piezoelectric lower electrode a302 constitute the input end of the excitation signal, and are connected to the data processing part 11 through a transmission line, and another piezoelectric upper electrode a300 and another piezoelectric lower electrode a302 constitute the output end of the vibration signal, and are connected to the data processing part 11 through a transmission line.

[0065] In this embodiment, further, the shielding electrode 10 is composed of a substrate layer, or a substrate layer and a metal electrode covering the substrate layer.

[0066] When the sensing electrode assembly a reciprocates up and down under the influence of the current electric field, the sensing electrode assembly a and the shielding electrode 10 are not in the same plane, and differential induction is formed between the two, thereby outputting a differential signal. When the sensing electrode assembly a is stationary, the top end surface of the sensing electrode assembly a and the top end surface of the shielding electrode 10 are in the same plane.

[0067] For example, when the base layer is made of a highly conductive silicon-based material, the shielding effect of the signal can be achieved through the base layer. When the base layer is made of a non-highly conductive silicon-based material, the shielding effect of the signal can be achieved through the metal electrode covering it.

[0068] In addition, optionally, the piezoelectric electrode a further includes an insulating layer b304, which is sandwiched between the piezoelectric lower electrode a302 and the base layer 5 for isolating signals. The material of the insulating layer b304 is not limited to silicon dioxide, silicon nitride, and a composite material made of silicon dioxide and silicon nitride.

[0069] Optionally, the metal electrode can be made of metals such as Ti, Pt, Al, Ag, Cr, Cu, Au, Mo, or alloy materials. The base layer 5 can be made of dielectric materials such as silicon-based materials, glass, ceramics, metals or organic materials, metals and metal alloy materials. The piezoelectric layer can be made of lead zirconate titanate, aluminum nitride, zinc oxide, lead titanate, barium titanate, and modified lead titanate. The shape of the base layer 5 can be a straight beam, a folded beam, a U-shaped beam, a serpentine beam, a crab beam, etc.

[0070] In this embodiment, when the base layer 5 is made of a highly conductive silicon-based material, signal transmission between the metal electrode 9 and the lead-out electrode, and between the piezoelectric electrode and the lead-out electrode can be achieved without providing a transmission line.

[0071] In another embodiment, when the base layer 5 is made of a non-highly conductive material, a transmission line is embedded in the base layer 5, the piezoelectric electrode is connected to the lead-out electrode through the transmission line, and the metal electrode 9 is connected to the lead-out electrode through the transmission line, thereby realizing signal transmission between the metal electrode 9 and the lead-out electrode, and between the piezoelectric electrode and the lead-out electrode.

[0072] In addition, in the broadband electric field sensor 1 provided in the present embodiment, the metal electrode 9 is the core component of the electric field sensor 1, and is responsible for at least receiving and sensing the charge signal in the current electric field. The base portion 5 has a certain elasticity. After the metal electrode 9 is attached to the top surface of the base portion 5, when the current electric field changes drastically, the metal electrode 9 can not only sense the charge in the current electric field, but also move back and forth in the upper and lower directions between the upper position of the recessed area 202 and the inside of the recessed area 202 under the influence of the current electric field. Among them, when the metal electrode 9 is located at the upper position of the recessed area 202, the number of charges induced on the surface of the metal electrode 9 is greater than the number of charges induced on the surface of the metal electrode 9 when the metal electrode 9 is located inside the recessed area 202. At the same time, when the metal electrode 9 is located at the upper position of the recessed area 202, the electric field value obtained is also greater than the electric field value obtained when the metal electrode 9 is located inside the recessed area 202.

[0073] In addition, when the current electric field changes dramatically, causing the base portion 5 to reciprocate in the up and down directions, a displacement will be generated. This displacement can be input into the piezoelectric electrode through the base portion 5 made of a highly conductive material or a transmission line placed in the base portion 5.

[0074] In addition, in this embodiment, the frequency of the electric field detected by the dynamic induction electrode is less than 50% of the self-resonance frequency of the broadband electric field sensor.

[0075] Exemplarily, assuming that the resonance frequency of the broadband electric field sensor is f1, the electric field frequency f detected by the dynamic induction electrode is: f≤0.5×f1.

[0076] The frequency of the electric field detected by the static sensing electrode is greater than 50% of the self-resonance frequency of the broadband electric field sensor.

[0077] Exemplarily, assuming that the resonance frequency of the broadband electric field sensor is f1, the electric field frequency f detected by the static induction electrode is: f≥0.5×f1.

[0078] The alternating current signal detected by the static sensing electrode is an alternating current signal greater than 50% of the self-resonant frequency of the electric field sensor.

[0079] Exemplarily, assuming that the resonant frequency of the broadband electric field sensor is f1, the AC current signal f detected by the static induction electrode is: f≥0.5×f1.

[0080] The alternating current signal detected by the static induction electrode is an alternating current signal equal to 50% of the self-resonant frequency of the electric field sensor.

[0081] Exemplarily, the resonance frequency of the broadband electric field sensor is set to f1, and the AC current signal f detected by the static induction electrode is: f=0.5×f1.

[0082] The alternating current signal detected by the static induction electrode is an alternating current signal less than 50% of the self-resonant frequency of the electric field sensor.

[0083] Exemplarily, the resonance frequency of the broadband electric field sensor is set to f1, and the AC current signal f detected by the static induction electrode is: f≤0.5×f1.

[0084] Specifically, the data processing part 11 receives the DC current signal and the AC current signal, and obtains the DC voltage value and the AC voltage value respectively, and determines the current electric field type according to the comparison result of the DC voltage value and the AC voltage value.

[0085] Furthermore, the data processing part 11 is connected to the extraction electrode a303 and the extraction electrode b respectively through transmission lines, and the data processing part 11 is also connected to the piezoelectric upper electrode a300 and the piezoelectric lower electrode a302 in the dynamic sensing electrode 3 respectively through transmission lines. The data processing part 11 includes an excitation module 1101, a first calculation module 1102, a second calculation module 1103 and a third calculation module 1104, wherein:

[0086] The excitation module 1101 inputs an excitation signal to the piezoelectric electrode assembly a to drive the piezoelectric electrode a in the piezoelectric electrode assembly a to vibrate;

[0087] The first calculation module 1102 receives the DC current signal input from the dynamic induction electrode 3 via the lead-out electrode a303 and obtains a DC voltage value;

[0088] The second calculation module 1103 receives the AC current signal input from the static induction electrode 4 via the lead-out electrode b, and obtains an AC voltage value;

[0089] The third calculation module 1104 compares the DC voltage value with the AC voltage value, and determines the current electric field type according to the comparison result.

[0090] Furthermore, the excitation module 1101 is used to input an excitation signal to the piezoelectric electrode assembly a and receive a vibration signal generated by the piezoelectric electrode a in the piezoelectric electrode assembly a.

[0091] Furthermore, the excitation module 1101 includes an excitation signal generating unit, a phase shift filter, a signal amplifier and a vibration signal receiver. The excitation signal generating unit inputs an excitation signal to the piezoelectric electrode assembly a, the piezoelectric electrode a generates vibration according to the excitation signal and outputs a vibration signal, the vibration signal receiver receives the vibration signal output by the piezoelectric electrode a, and the phase shift filter and the signal amplifier process the vibration signal accordingly to determine whether the piezoelectric electrode a generates the maximum vibration.

[0092] Exemplarily, the excitation signal generating unit is connected to the piezoelectric upper electrode a300 through a transmission line, and the vibration signal receiver is connected to the piezoelectric lower electrode a302 through a transmission line.

[0093] Furthermore, the first calculation module 1102 includes an I / V conversion unit, an amplification unit, a phase shift filter and a coherent demodulator, wherein:

[0094] The I / V conversion unit converts the DC current signal into a DC voltage signal;

[0095] The amplification unit removes interference signals from the DC voltage signal and amplifies the DC voltage signal;

[0096] The phase shift filter receives the vibration signal amplified by the piezoelectric electrode a, filters the vibration signal, and converts the vibration signal into a specified waveform;

[0097] The coherent demodulator demodulates the received vibration signal of the specified waveform and the amplified DC voltage signal to obtain a DC voltage value.

[0098] Optionally, the phase shift filter can convert the vibration signal into a square wave signal, a half wave signal or a full wave signal according to the setting.

[0099] Furthermore, the second calculation module 1103 includes an I / V conversion unit, an amplification unit, a filter and an amplitude extraction unit. The AC current signal is obtained by the sensing electrode assembly b according to the charge conversion induced in the current electric field, and is input into the second calculation module 1103 through the extraction electrode b and the transmission line, wherein:

[0100] The I / V conversion unit converts the AC current signal into an AC voltage signal;

[0101] The amplifying unit removes interference signals from the AC voltage signal and amplifies the AC voltage signal;

[0102] The filter filters the AC voltage signal and converts the AC voltage signal into a specified waveform;

[0103] The amplitude extraction unit obtains an AC voltage value according to the AC voltage signal.

[0104] Optionally, the phase shift filter can convert the AC voltage signal into a square wave signal, a half wave signal or a full wave signal according to settings.

[0105] Furthermore, the third calculation module 1104 compares the DC voltage value with the AC voltage value, and determines the current electric field type according to the comparison result.

[0106] Embodiment 2

[0107] like Figure 7 As shown, this embodiment provides a broadband electric field sensor assembly, including an electric field sensor and a data processing part connected thereto. The electric field sensor 1 includes a substrate 2, a dynamic sensing electrode 3, a static sensing electrode 4 and a shielding electrode 10. The difference between the electric field sensor 1 in this embodiment and the electric field sensor 1 in the first embodiment is that:

[0108] In the static induction electrode 4, the piezoelectric electrode b further includes a piezoelectric upper electrode b400, a piezoelectric layer b and a piezoelectric lower electrode b401, the piezoelectric lower electrode b401 is attached to a partial area of ​​the first part and a partial area of ​​the second part a, the piezoelectric upper electrode b400 is attached to at least a part of the piezoelectric lower electrode b401, and the piezoelectric layer b is sandwiched between the piezoelectric upper electrode b400 and the piezoelectric lower electrode b401. Among them, a piezoelectric upper electrode b400 and a piezoelectric lower electrode b401 constitute a signal output terminal, and the output terminal is connected to the extraction electrode b402, so that the AC current signal obtained by the static induction electrode 4 is input into the second calculation module of the data processing part through the extraction electrode b402 and the transmission line, so as to convert the AC current signal into a corresponding AC voltage value through the second calculation module.

[0109] Furthermore, the alternating current signal is obtained by converting the displacement generated by the reciprocating motion of the piezoelectric electrode assembly b when the piezoelectric electrode assembly b receives the induced charge in the current electric field.

[0110] Embodiment 3

[0111] like Figure 8 As shown, this embodiment provides a broadband electric field sensor assembly, including an electric field sensor 1 and a data processing part connected thereto. The electric field sensor 1 includes a substrate 2, a dynamic sensing electrode 3, a static sensing electrode 4 and a shielding electrode 10. The difference between the electric field sensor 1 in this embodiment and the electric field sensor 1 in the first embodiment is that:

[0112] In the static induction electrode 4, the piezoelectric electrode b further includes two piezoelectric upper electrodes b400, a piezoelectric layer b and two piezoelectric lower electrodes b401, the piezoelectric lower electrode b401 is attached to a partial area of ​​the first part and a partial area of ​​the second part a, the piezoelectric upper electrode b400 is attached to at least a part of the piezoelectric lower electrode b401, and the piezoelectric layer b is sandwiched between the piezoelectric upper electrode b400 and the piezoelectric lower electrode b401. Among them, a piezoelectric upper electrode b400 and a piezoelectric lower electrode b401 constitute a signal output terminal, and the output terminal is connected to the extraction electrode b402, so that the AC current signal obtained by the static induction electrode 4 is input into the second calculation module of the data processing part through the extraction electrode b402 and the transmission line, so as to convert the AC current signal into a corresponding AC voltage value through the second calculation module.

[0113] Furthermore, the alternating current signal is obtained by converting the displacement generated by the reciprocating motion of the piezoelectric electrode assembly b when the piezoelectric electrode assembly b receives the induced charge in the current electric field.

[0114] In this embodiment, since the dynamic induction electrode 3 and the static induction electrode 4 have the same structure, they can be replaced as needed. When the static induction electrode 4 is replaced by the dynamic induction electrode 3, a piezoelectric upper electrode b400 and a piezoelectric lower electrode b401 constitute the input end of the excitation signal, and are connected to the data processing part through a transmission line to receive the excitation signal input by the data processing part, and another piezoelectric upper electrode b400 and another piezoelectric lower electrode b401 constitute the output end of the vibration signal, and are connected to the data processing part through a transmission line to input the vibration signal to the data processing part. At the same time, the vibration generated by the piezoelectric electrode b driven by the excitation signal is also converted into a DC current signal, and is input into the data processing part through the lead-out electrode a and the transmission line.

[0115] In addition, in the above-mentioned embodiments 1 to 3, the DC current signal output by the electric field sensor 1 is the current real-time DC current signal obtained by the dynamic induction electrode 3 , and the AC current signal output is the current real-time AC current signal obtained by the static induction electrode 4 .

[0116] After setting the sensing time period and each sensing time point, the electric field sensor 1 in the first to third embodiments can output a direct current signal and an alternating current signal corresponding to each sensing time point within the sensing time period.

[0117] Embodiment 4

[0118] like Fig. 9As shown, this embodiment provides a broadband electric field sensor assembly, comprising the electric field sensor 1 of any one of the above-mentioned embodiments 1 to 3, a first data processing part 12 and a second data processing part 13 connected to the electric field sensor 1, and a third data processing part 14 connected to the first data processing part 12 and the second data processing part 13, respectively, wherein:

[0119] The first data processing part 12 is connected to the input end of the excitation signal composed of a piezoelectric upper electrode a and a piezoelectric lower electrode a in the dynamic induction electrode 3 through a transmission line, and is used to input the excitation signal to the piezoelectric electrode a. The first data processing part 12 is connected to the lead-out electrode a in the dynamic induction electrode 3 through a transmission line, and is used to receive the DC current signal output by the dynamic induction electrode 3 and obtain the DC voltage value. The second data processing part 13 is connected to the lead-out electrode b in the static induction electrode 4 through a transmission line, and receives the AC current signal output by the static induction electrode 4 and obtains the AC voltage value. The third data processing part 14 is connected to the first data processing part 12 and the second data processing part 13 through a transmission line, and is used to compare the DC voltage value with the AC voltage value, and determine the current electric field type according to the comparison result.

[0120] Specifically, the first data processing part 12 includes an excitation module and a first calculation module, wherein the excitation module inputs an excitation signal to the piezoelectric electrode a to drive the piezoelectric electrode a to vibrate, and the first calculation module receives a DC current signal input by the dynamic induction electrode 3 and obtains a DC voltage value.

[0121] The structures and principles of the excitation module and the first calculation module in this embodiment are the same as those of the excitation module and the first calculation module in the first embodiment.

[0122] Specifically, the second data processing part 13 includes a second calculation module, wherein the second calculation module receives the AC current signal input by the static induction electrode 4 and obtains an AC voltage value.

[0123] The structure and principle of the second calculation module in this embodiment are the same as those of the second calculation module in the first embodiment.

[0124] Specifically, the third data processing part 14 includes a third calculation module, wherein the third calculation module compares the DC voltage value with the AC voltage value and determines the current electric field type according to the comparison result.

[0125] The structure and principle of the third calculation module in this embodiment are the same as those of the third calculation module in the first embodiment.

[0126] In the above embodiment, the first data processing part 12, the second data processing part 13 and the third data processing part 14 may also be solidified on the same circuit board.

[0127] For example, in Embodiments 1 to 4, when the third calculation module determines that the DC voltage value is greater than the AC voltage value, the electric field type at the current sensing time point is a DC electric field. When the third calculation module determines that the DC voltage value is less than the AC voltage value, the electric field type at the current sensing time point is an AC electric field.

[0128] In another embodiment, after the first calculation module and the second calculation module respectively input multiple DC voltage values ​​and AC voltage values ​​at the same sensing time point to the third calculation module, the third calculation module determines the electric field type at each sensing time point according to the comparison results of the DC voltage values ​​and AC voltage values ​​at the same sensing time point.

[0129] If the electric field type corresponding to the multiple sensing time points is a direct current electric field, determining that the current electric field in the sensing time period is a direct current electric field;

[0130] If the electric field type corresponding to the multiple sensing time points is an alternating current electric field, determining that the current electric field in the sensing time period is an alternating current electric field;

[0131] If the electric field types corresponding to the multiple sensing time points are AC electric fields or DC electric fields, it is determined that the current electric field in the sensing time period is a changing electric field in which the AC electric field and the DC electric field switch between each other.

[0132] In addition, in the first to fourth embodiments, when the current electric field changes dramatically, the metal electrodes in the dynamic induction electrode 3 and the static induction electrode 4 sense the charges in the current electric field to generate charge signals. The charge signals are input into the data processing part, or the first data processing part 12 and the second data processing part 13 through the extraction electrodes, so as to obtain the corresponding electric field value.

[0133] Embodiment 5

[0134] like Fig.10 As shown, this embodiment provides an electric field detection method, which is applied to the broadband electric field sensor assembly described in the first embodiment and the fourth embodiment, and includes the following steps:

[0135] S101, setting the induction time of the current electric field.

[0136] Optionally, according to actual needs, the induction time of the current electric field is set as an induction time period, and corresponding induction time points are set in the set induction time period, so as to obtain a direct current signal and an alternating current signal corresponding to each induction time point in the induction time period.

[0137] Optionally, the induction time of the current electric field is set to the current induction time point according to actual needs, so as to obtain a direct current signal and an alternating current signal corresponding to the current induction time point.

[0138] S102 , driving the piezoelectric electrode a in the piezoelectric electrode assembly a to vibrate.

[0139] Specifically, an excitation signal can be input into the piezoelectric electrode assembly a through the excitation module in the data processing part in Examples 1 to 3 to drive the piezoelectric electrode a to vibrate and receive the vibration signal; or an excitation signal can be input into the piezoelectric electrode assembly a through the excitation module in the first data processing part in Example 4 to drive the piezoelectric electrode a to vibrate and receive the vibration signal.

[0140] S103, obtaining a direct current signal and an alternating current signal of the current electric field.

[0141] Specifically, the direct current signal is obtained by converting the vibration generated by the piezoelectric electrode a in the piezoelectric electrode assembly a according to the excitation signal. The alternating current signal is obtained by converting the charge induced by the sensing electrode assembly b in the current electric field, or the alternating current signal is obtained by converting the displacement generated by the reciprocating motion when the piezoelectric electrode assembly b receives the charge induced by the sensing electrode assembly b in the current electric field.

[0142] Optionally, the DC current signal includes a DC current signal in the current electric field obtained according to a set sensing time point, or each DC current signal in the current electric field obtained according to a set sensing time period. The AC current signal includes an AC current signal in the current electric field obtained according to a set sensing time point, or each AC current signal in the current electric field obtained according to a set sensing time period.

[0143] S104, obtaining a DC voltage value and an AC voltage value according to the DC current signal and the AC current signal respectively.

[0144] Specifically, the first calculation module and the second calculation module in Examples 1 to 3 respectively receive the DC current signal and the AC current signal, and obtain the DC voltage value and the AC voltage value; or the first calculation module in the first data processing part in Example 4 receives the DC current signal and obtains the DC voltage value, and the second calculation module in the second data processing part receives the AC current signal and obtains the AC voltage value.

[0145] Optionally, the DC voltage value includes a DC current value in the current electric field obtained according to a set induction time point, or each DC current value in the current electric field obtained according to a set induction time period. The AC voltage value includes an AC voltage value in the current electric field obtained according to a set induction time point, or each AC voltage value in the current electric field obtained according to a set induction time period.

[0146] S105. Determine the current electric field type according to the comparison result between the DC voltage value and the AC voltage value.

[0147] Specifically, the DC voltage value and the AC voltage value are compared by the third calculation module in Embodiments 1 to 5, and the current electric field type is determined according to the comparison result.

[0148] For example, in Embodiments 1 to 5, when the third calculation module determines that the DC voltage value is greater than the AC voltage value, the electric field type at the current sensing time point is a DC electric field. When the third calculation module determines that the DC voltage value is less than the AC voltage value, the electric field type at the current sensing time point is an AC electric field.

[0149] For example, in Embodiments 1 to 5, after the first calculation module and the second calculation module respectively input multiple DC voltage values ​​and AC voltage values ​​at the same sensing time point to the third calculation module, the third calculation module determines the electric field type at each sensing time point according to the comparison results of the DC voltage values ​​and AC voltage values ​​at the same sensing time point. Wherein:

[0150] If the electric field type corresponding to the multiple sensing time points is a direct current electric field, determining that the current electric field in the sensing time period is a direct current electric field;

[0151] If the electric field type corresponding to the multiple sensing time points is an alternating current electric field, determining that the current electric field in the sensing time period is an alternating current electric field;

[0152] If the electric field types corresponding to the multiple sensing time points are AC electric fields or DC electric fields, it is determined that the current electric field in the sensing time period is a changing electric field in which the AC electric field and the DC electric field switch between each other.

[0153] The above description is only a preferred embodiment of the present invention, which is only illustrative and not restrictive of the present invention. Those skilled in the art understand that many changes, modifications, and even equivalences may be made to the present invention within the spirit and scope defined by the claims of the present invention, but all of them will fall within the scope of protection of the present invention.

Claims

1. A broadband electric field sensor assembly, characterized in that: The invention comprises an electric field sensor and at least one data processing part connected thereto, wherein: The electric field sensor comprises a substrate, at least one dynamic induction electrode, at least one static induction electrode and at least one shielding electrode, wherein the substrate comprises a solid area and a recessed area, the dynamic induction electrode and the static induction electrode are arranged at intervals, and the shielding electrode is located between the dynamic induction electrode and the static induction electrode, wherein a part of the dynamic induction electrode is attached to the solid area, and another part is located on the recessed area, for obtaining at least one direct current signal of the current electric field; a part of the static induction electrode is attached to the solid area, and another part is located on the recessed area, for obtaining at least one alternating current signal of the current electric field; the shielding electrode faces the top of the electric field sensor, for shielding interference signals; The data processing part receives at least one of the DC current signals and at least one of the AC current signals, and obtains at least one DC voltage value and at least one AC voltage value respectively, and determines the current electric field type according to the comparison result of the DC voltage value and the AC voltage value.

2. The broadband electric field sensor assembly according to claim 1, characterized in that: The shielding electrode is spaced apart from the dynamic induction electrode and the static induction electrode respectively, wherein both ends of the shielding electrode are attached to the solid area and are arranged above the recessed area.

3. The broadband electric field sensor assembly according to claim 2, characterized in that: The dynamic sensing electrode comprises a sensing electrode component a and a piezoelectric electrode component a, a portion of the sensing electrode component a is attached to the solid area, and another portion is located on the recessed area, and the piezoelectric electrode component a is attached to a portion of the sensing electrode component a; The static sensing electrode includes a sensing electrode component b and a piezoelectric electrode component b, a portion of the sensing electrode component b is attached to the solid area, and another portion is located on the recessed area, and the piezoelectric electrode component b is attached to a portion of the sensing electrode component b.

4. The broadband electric field sensor assembly according to claim 3, characterized in that: The sensing electrode assembly a and the sensing electrode assembly b both include a base portion and a metal electrode, a first portion of the base portion is attached to the solid area, a second portion of the base portion is located on the recessed area, and the metal electrode is attached to a partial area of ​​the second portion; The piezoelectric electrode assembly a includes a piezoelectric electrode a attached to a partial area of ​​the first portion and a partial area of ​​the second portion, and an extraction electrode a attached to a partial area of ​​the first portion, wherein the piezoelectric electrode a is connected to the extraction electrode a through the first portion, and the extraction electrode a is connected to the metal electrode through the base portion; The piezoelectric electrode assembly b includes at least an extraction electrode b attached to a partial area of ​​the first portion.

5. The broadband electric field sensor assembly according to claim 4, characterized in that: The second part includes a second part a and a second part b, wherein the second part b is farther away from the first part than the second part a, and the metal electrode is attached to the second part b; The piezoelectric electrode a includes a piezoelectric upper electrode a, a piezoelectric layer a and a piezoelectric lower electrode a, wherein the piezoelectric lower electrode a is attached to a partial area of ​​the first part and a partial area of ​​the second part a, the piezoelectric upper electrode a is attached to at least a portion of the piezoelectric lower electrode a, and the piezoelectric layer a is sandwiched between the piezoelectric upper electrode a and the piezoelectric lower electrode a.

6. The broadband electric field sensor assembly according to claim 5, characterized in that: The piezoelectric electrode assembly b also includes a piezoelectric electrode b attached to a partial area of ​​the first part and a partial area of ​​the second part, wherein the piezoelectric electrode b includes a piezoelectric upper electrode b, a piezoelectric layer b and a piezoelectric lower electrode b, wherein the piezoelectric lower electrode b is attached to a partial area of ​​the first part and a partial area of ​​the second part b, the piezoelectric upper electrode b is attached to at least a portion of the piezoelectric lower electrode b, and the piezoelectric layer b is sandwiched between the piezoelectric upper electrode b and the piezoelectric lower electrode b.

7. The broadband electric field sensor assembly according to any one of claims 1 to 6, characterized in that: The DC current signal is obtained by converting the vibration generated by the piezoelectric electrode assembly a according to the excitation signal; The AC current signal is obtained by converting the charges induced by the sensing electrode assembly b in the current electric field, or the AC current signal is obtained by converting the displacement generated by the reciprocating motion of the piezoelectric electrode assembly b when the piezoelectric electrode assembly b receives the charges induced by the sensing electrode assembly b in the current electric field.

8. The broadband electric field sensor assembly according to claim 7, characterized in that: The DC current signal includes a DC current signal in the current electric field obtained according to a set sensing time point, or each DC current signal in the current electric field obtained according to a set sensing time period; The alternating current signal includes an alternating current signal in the current electric field obtained according to a set sensing time point, or each alternating current signal in the current electric field obtained according to a set sensing time period.

9. The broadband electric field sensor assembly according to claim 1, characterized in that: The frequency of the electric field detected by the dynamic sensing electrode is less than 50% of the self-resonance frequency of the broadband electric field sensor; The frequency of the electric field detected by the static induction electrode is greater than 50% of the self-resonance frequency of the broadband electric field sensor; The alternating current signal detected by the static induction electrode is an alternating current signal greater than, equal to or less than 50% of the self-resonant frequency of the electric field sensor.

10. The broadband electric field sensor assembly according to claim 1, characterized in that: The data processing part at least includes an excitation module, a first calculation module, a second calculation module and a third calculation module, wherein: The excitation module inputs the excitation signal to the dynamic induction electrode to drive the piezoelectric electrode assembly a to vibrate, and receives the generated vibration signal; The first calculation module receives the DC current signal input by the dynamic induction electrode and obtains a DC voltage value; The second calculation module receives the AC current signal input by the static induction electrode and obtains an AC voltage value; The third calculation module compares the DC voltage value with the AC voltage value, and determines the current electric field type according to the comparison result.

11. An electric field detection method, applied to the broadband electric field sensor assembly according to any one of claims 1 to 10, characterized in that: The following steps are involved: The dynamic induction electrode and the static induction electrode respectively obtain at least one direct current signal and at least one alternating current signal of the current electric field; Obtain a DC voltage value and an AC voltage value according to the DC current signal and the AC current signal respectively; The DC voltage value is compared with the AC voltage value, and the current electric field type is determined based on the comparison result.

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