A hole-plugging device, a hole-plugging method, and a wafer processing equipment.

Abstract

This disclosure provides a via-plugging device, a via-plugging method, and a wafer processing equipment. The via-plugging device includes: an image acquisition unit for acquiring image information of a local area on a workpiece containing a via; a control unit for obtaining the coordinate position information of the via based on the image information; and an execution unit including an execution end, which has a via mounting component and several distance sensors. The control unit is further used to control the execution unit to move to a first target position or a second target position based on the coordinate position information of the via. When the execution unit is at the first target position, it performs the operation of inserting the via into the via. When it is at the second target position, it measures the distance using the distance sensors. The control unit is also used to determine whether the via-plugging operation is qualified based on the distance measured by the distance sensors. The via-plugging device, method, and wafer processing equipment disclosed herein can improve the accuracy of via-plugging operation judgment.

Description

Technical Field

[0001] This invention relates to the field of semiconductor processing technology, and in particular to a hole-plugging device, a hole-plugging method, and wafer processing equipment. Background Technology

[0002] In the wafer fabrication industry, wafer cassettes (also known as wafer boxes or wafer holders) are used to securely store and transport wafers. Via plugging refers to sealing or blocking certain holes in the wafer cassette to distinguish different carriers or wafers during transport or storage.

[0003] In existing technologies, automated via plugging is generally used in wafer fabrication. Automated via plugging primarily employs image recognition to identify the plugging status, with a robotic arm performing the plugging operation. However, when identifying the plugging status through camera images, only the horizontal deviation of the plugged area can be detected; the vertical deviation cannot be identified, leading to incomplete detection. This can result in defective products flowing to the next process or the customer, causing rework and other problems. Summary of the Invention

[0004] To address at least one of the technical problems in the prior art, this disclosure provides a hole-plugging device, a hole-plugging method, and a wafer processing equipment.

[0005] The technical solutions provided in this disclosure are as follows:

[0006] In a first aspect, embodiments of this disclosure provide a plugging device, comprising:

[0007] The image acquisition unit is used to acquire image information of a local area with a plugged hole on the workpiece.

[0008] The control unit is used to obtain the coordinate position information of the plug hole based on the image information; and

[0009] An execution unit includes an execution end, which is provided with a plug mounting component for gripping a plug; the execution end is also provided with a detection unit, which includes a plurality of distance sensors, which are used to measure the distance from the distance sensor itself to the workpiece along a first direction;

[0010] The control unit is further configured to control the execution unit to move to a first target position or a second target position based on the coordinate position information of the plug; and the execution unit is configured to perform the operation of plugging the plug into the plug when it is at the first target position; and to perform the operation of measuring the distance through the distance measuring sensor when it is at the second target position; the control unit is further configured to determine whether the plugging operation at the plugging position is qualified based on the distance measured by the plurality of distance measuring sensors.

[0011] For example, the execution end is provided with a base, the detection unit and the plug mounting component are spaced apart on the base along a second direction, and the base is configured to be telescopic along the first direction, wherein the second direction is perpendicular to the first direction.

[0012] For example, the ranging sensor includes an optical sensor.

[0013] For example, the detection unit further includes a rangefinder mounting component, which is configured as a circle or ring to match the shape and size of the plug, and a plurality of the rangefinder sensors are evenly distributed along the circumference of the rangefinder mounting component.

[0014] For example, the rangefinder mounting component is detachably mounted on the base; and / or, the rangefinder mounting component is configured to have an adjustable diameter.

[0015] For example, the control unit is further configured to determine whether the plugging operation at the plugging location is qualified based on the distance measured by the plurality of the ranging sensors, specifically including:

[0016] When the difference between the distances measured by the plurality of distance measuring sensors is less than or equal to a first threshold, and the distances measured by the distance measuring sensors are all greater than or equal to a second threshold, it is determined that the hole at the hole-blocking location is not blocked or the hole-blocking operation is unqualified.

[0017] When the difference between the distances measured by the plurality of distance measuring sensors is less than or equal to the first threshold, and the distances measured by the distance measuring sensors are all less than the second threshold, the hole-blocking operation at the hole-blocking location is deemed qualified.

[0018] When the difference between the distances measured by the plurality of the ranging sensors is greater than the first threshold, and the distances measured by the ranging sensors are all less than the second threshold, the hole-blocking operation at the hole-blocking location is determined to be unqualified.

[0019] For example, the execution unit includes a robotic arm.

[0020] Secondly, this disclosure also provides a hole-plugging method, which is applied to the hole-plugging device described above; the hole-plugging method includes the following steps:

[0021] Acquire image information of a local area with a plugged hole on the workpiece;

[0022] Based on the image information, the coordinate position information of the plug hole is obtained;

[0023] Based on the coordinate position information of the plug, the execution unit is controlled to move to the first target position;

[0024] The execution unit moves to the first target position, grabs the plug, and performs the operation of plugging the plug into the plugging hole;

[0025] Based on the coordinate position information of the plug, the execution unit is controlled to move to the second target position;

[0026] The execution unit moves to the second target position and performs the operation of measuring distance through the ranging sensor;

[0027] Based on the distance measured by the aforementioned range sensors, it is determined whether the plugging operation at the plugging location is qualified.

[0028] For example, determining whether the plugging operation at the plugging location is qualified based on the distance measured by the plurality of the ranging sensors specifically includes:

[0029] When the difference between the distances measured by the plurality of distance measuring sensors is less than or equal to a first threshold, and the distances measured by the distance measuring sensors are all greater than or equal to a second threshold, it is determined that the hole at the hole-blocking location is not blocked or the hole-blocking operation is unqualified.

[0030] When the difference between the distances measured by the plurality of distance measuring sensors is less than or equal to the first threshold, and the distances measured by the distance measuring sensors are all less than the second threshold, the hole-blocking operation at the hole-blocking location is deemed qualified.

[0031] When the difference between the distances measured by the plurality of the ranging sensors is greater than the first threshold, and the distances measured by the ranging sensors are all less than the second threshold, the hole-blocking operation at the hole-blocking location is determined to be unqualified.

[0032] Thirdly, embodiments of this disclosure also provide a wafer processing apparatus, including a memory and a processor, wherein the memory stores a computer program, and the processor executes the computer program to implement the steps of the method described above.

[0033] The beneficial effects of the embodiments disclosed herein are as follows:

[0034] In the hole-plugging device, hole-plugging method, and wafer processing equipment provided in this disclosure, an image acquisition unit acquires image information of a local area with a hole on the workpiece. A control unit identifies the image information to obtain the coordinate position information of the hole. Based on the coordinate position information of the hole, the execution unit can be controlled to move to a first target position, so that the plug mounting component in the execution unit grabs the plug and inserts the plug into the hole. Then, the execution unit can move to a second target position, so that a plurality of distance measuring sensors in the execution unit measure the distance to the workpiece along a first direction. Based on the distance measured by the plurality of distance measuring sensors, the control unit determines whether the hole-plugging operation at the hole-plugging position is qualified.

[0035] Thus, by simultaneously installing a plug mounting component and a distance sensor on the execution unit, the location and condition of the plug can be identified based on the image acquisition unit, while the distance sensor is used to further determine the plugging condition, making the plugging status judgment more accurate. Furthermore, by completing the plugging operation and plugging detection operation through the same execution unit, the plug can be detected and adjusted immediately after the plugging operation is completed, preventing abnormal products from flowing to the next process or customer. Attached Figure Description

[0036] Figure 1 This diagram illustrates the image acquisition unit performing image acquisition in the hole-blocking device provided in this embodiment of the present disclosure.

[0037] Figure 2 This diagram illustrates the structure of the execution unit in the plugging device provided in this embodiment.

[0038] Figure 3 This is a front view of the detection unit in the plugging device provided in the embodiments of this disclosure;

[0039] Figure 4 This is a top view of the detection unit in the plugging device provided in the embodiments of this disclosure;

[0040] Figure 5 This is a perspective view of the detection unit in the plugging device provided in the embodiments of this disclosure;

[0041] Figure 6 This is one of the schematic diagrams illustrating the detection principle of the detection unit in the plugging device provided in this embodiment of the present disclosure;

[0042] Figure 7 This is the second schematic diagram illustrating the detection principle of the detection unit in the plugging device provided in this embodiment. Detailed Implementation

[0043] To make the objectives, technical solutions, and advantages of the embodiments of this disclosure clearer, the technical solutions of the embodiments of this disclosure will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this disclosure. All other embodiments obtained by those skilled in the art based on the described embodiments of this disclosure without creative effort are within the scope of protection of this disclosure.

[0044] Unless otherwise defined, the technical or scientific terms used in this disclosure shall have the ordinary meaning understood by one of ordinary skill in the art to which this disclosure pertains. The terms “first,” “second,” and similar terms used in this disclosure do not indicate any order, quantity, or importance, but are merely used to distinguish different components. Similarly, the terms “an,” “a,” or “the,” and similar terms do not indicate a quantity limitation, but rather indicate the presence of at least one. The terms “including,” “comprising,” or “containing,” and similar terms mean that the element or object preceding the word encompasses the elements or objects listed following the word and their equivalents, without excluding other elements or objects. The terms “connected,” “linked,” or similar terms are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect. The terms “upper,” “lower,” “left,” and “right,” etc., are used only to indicate relative positional relationships, and these relative positional relationships may change accordingly when the absolute position of the described objects changes.

[0045] The features such as "parallel," "perpendicular," and "identical" used in the embodiments of this disclosure include features in the strict sense of "parallel," "perpendicular," and "identical," as well as cases where "approximately parallel," "approximately perpendicular," and "approximately identical" include certain tolerances. Taking into account the measurement and the tolerances associated with the measurement of a specific quantity (e.g., limitations of the measurement system), they represent the acceptable deviation range for a specific value as determined by a person skilled in the art. For example, "approximately" can mean within one or more standard deviations, or within 3% or 5% of said value.

[0046] Furthermore, throughout this document, unless otherwise defined, the terms “substantially,” “essentially,” “approximately,” and “about” are used to describe and explain small variations. When used with an event or situation, these terms can cover situations where the event or situation occurs precisely or approximately. For example, when used with a numerical value, these terms can include a range of variation of the numerical value less than or equal to 10%, such as less than or equal to ±5%, less than or equal to ±4%, less than or equal to ±3%, less than or equal to ±2%, less than or equal to ±1%, less than or equal to ±0.5%, less than or equal to ±0.1%, or less than or equal to ±0.05%. The term “substantially coplanar” can refer to two surfaces arranged along the same plane within a micrometer range, for example, within 40 μm, 30 μm, 20 μm, 10 μm, or 1 μm.

[0047] like Figures 1 to 5 As shown, this disclosure provides a hole-plugging device, including:

[0048] The image acquisition unit 100 is used to acquire image information of a local area with a plug hole 20 on the workpiece 10.

[0049] The control unit (not shown in the figure) is used to obtain the coordinate position information of the plug hole 20 based on the image information; and

[0050] An execution unit 300 includes an execution end 310, which is provided with a plug mounting component 320 for gripping a plug 30; the execution end 310 is also provided with a detection unit 330, which includes a plurality of distance sensors 331, which are used to measure the distance from the distance sensor 331 itself to the workpiece 10 along a first direction Y;

[0051] The control unit is also used to control the execution unit 300 to move to a first target position or a second target position based on the coordinate position information of the plug 20;

[0052] The execution unit 300 is used to: when in the first target position, perform the operation of plugging the plug 30 into the plug hole 20; when in the second target position, perform the operation of measuring distance through the ranging sensor 331;

[0053] The control unit is also used to determine whether the plugging operation at the location of the plugging hole 20 is qualified based on the distance measured by the plurality of the ranging sensors 331.

[0054] In the hole-plugging device provided in this embodiment, the image acquisition unit 100 acquires image information of a local area with a hole 20 on the workpiece 10. The control unit identifies the image information to obtain the coordinate position information of the hole 20. Based on the coordinate position information of the hole 20, the execution unit 300 can be controlled to move to a first target position, so that the plug mounting component 320 in the execution unit 300 grabs the plug 30 and plugs the plug 30 into the hole 20. Then, the execution unit 300 can move to a second target position, and a plurality of distance measuring sensors 331 in the execution unit 300 measure the distance to the workpiece 10 along the first direction Y. Based on the distance measured by the plurality of distance measuring sensors 331, the control unit determines whether the hole-plugging operation at the position of the hole 20 is qualified.

[0055] Thus, by simultaneously assembling the plug mounting component 320 and the ranging sensor 331 on the execution unit 300, the position and condition of the plug 30 can be identified based on the image acquisition unit 100, while the ranging sensor 331 is used to further determine the condition of the plug hole 20, making the determination of the plug hole 20 status more accurate. Furthermore, since the plugging operation and plugging detection operation are completed through the same execution unit 300, the plug 30 can be detected and adjusted immediately after the plugging operation is completed, preventing abnormal products from flowing to the next process or customer.

[0056] It should be noted that the hole-plugging device provided in this embodiment can be applied to hole-plugging operations on the hole-plugging 20 on the wafer cassette used to store wafers, but it is not limited thereto. That is to say, the workpiece 10 may include, but is not limited to, the wafer cassette.

[0057] Furthermore, in the above scheme, the local area with the plug hole 20 on the workpiece 10 can refer to the entire area of ​​the side surface of the workpiece 10 with the plug hole 20, or it can refer to a local area of ​​the side surface of the workpiece 10 with the plug hole 20.

[0058] Furthermore, as an exemplary embodiment, the image acquisition unit 100 can be any suitable device such as a camera.

[0059] As an exemplary embodiment, such as Figure 2 As shown, the execution unit 300 may include, but is not limited to, a robotic arm, and the execution end 310 is the execution end 310 of the robotic arm.

[0060] The execution end 310 may be provided with a base 311, the detection unit 330 and the plug mounting component 320 are spaced apart on the base 311 along the second direction X, and the base 311 is configured to be telescopic along the first direction Y, wherein the second direction X is perpendicular to the first direction Y.

[0061] By adopting the above solution, the end effector 310 of the robotic arm is improved by incorporating a retractable base 311. The plug mounting component 320 and the detection unit 330 are simultaneously mounted on this base 311, allowing the robotic arm to perform plugging and plugging detection operations using its three-dimensional motion. It is understood that the specific structure of the end effector 310 is not limited to this.

[0062] Furthermore, as an exemplary embodiment, the ranging sensor 331 may include, but is not limited to, an optical sensor. The ranging principle of an optical sensor is mainly based on the propagation and reflection characteristics of light. Common optical ranging techniques include laser ranging, infrared ranging, and optical coherence tomography (OCT).

[0063] The main ranging principles of optical sensors are as follows:

[0064] 1) Time-of-Flight (ToF) Method: This method involves emitting a beam of light (usually laser or infrared light) and then measuring the time it takes for the light to travel from the emission point to its reflection from the object being measured. Based on the speed of light and time, the distance to the object can be calculated. The formula is: Distance = Speed ​​of light × Time / 2.

[0065] 2) Phase difference method: This method calculates distance by measuring the phase difference between the emitted light wave and the received reflected light wave. The emitted light wave is usually modulated, and the received light wave will have a phase difference due to the different propagation times. By analyzing the phase difference, distance information can be obtained.

[0066] 3) Triangulation: This method utilizes geometric principles. By measuring the angles from two known points to the target object and the known baseline length, trigonometric functions are used to calculate the distance to the target object. This method is commonly used in laser rangefinders and certain types of optical sensors.

[0067] 4) Structured light method: This technique obtains distance and shape information of an object by projecting light of a known pattern onto the object's surface and analyzing the deformed pattern. This method is widely used in 3D scanning and object recognition.

[0068] 5) Laser Interferometry: This method utilizes the interference phenomenon of lasers to obtain highly accurate distance information by precisely measuring changes in interference fringes. It is suitable for applications requiring high-precision measurements.

[0069] In some embodiments of this disclosure, the optical sensor can be a sensor that measures distance based on any of the above-described ranging principles, including but not limited to laser rangefinders, infrared rangefinders, etc.

[0070] Furthermore, it should be noted that the ranging sensor 331 is not limited to an optical sensor, but can also be any other suitable ranging sensor 331, such as an ultrasonic rangefinder.

[0071] Furthermore, as an exemplary embodiment, such as Figures 3 to 5 As shown, the detection unit 330 also includes a rangefinder mounting component 332, which is configured as a circle or ring that matches the shape and size of the plug hole 20, and a plurality of the rangefinder sensors 331 are evenly distributed along the circumference of the rangefinder mounting component 332.

[0072] Using the above scheme, the rangefinder mounting component 332 is constructed as a circle or ring, and a plurality of rangefinder sensors 331 are evenly distributed along the circumference of the rangefinder mounting component 332. When the execution unit 300 is in the second target position, it is set that when the hole-blocking operation is appropriate, the distance data measured by each rangefinder sensor 331 is equal to the preset distance value. If the distance data measured by some rangefinder sensors 331 deviates significantly from the preset distance value, the hole-blocking operation can be determined to have failed.

[0073] As an exemplary embodiment, the rangefinder mounting component 332 is detachably mounted on the base 311. Thus, when the hole-plugging device provided in this embodiment is applied to hole-plugging operations of different sizes, the rangefinder mounting component 332 can be replaced with one of the appropriate size according to the size of the hole 20 to be plugged.

[0074] As another exemplary embodiment, the rangefinder mounting component 332 can also be configured with an adjustable diameter to accommodate plugs 20 of different sizes. For example:

[0075] In some embodiments, the rangefinder mounting component 332 may be configured as a ring, which may include multiple arc segments connected end to end, and adjacent arc segments are movably connected in a nested manner. When it is necessary to adjust the diameter of the rangefinder mounting component 332, the diameter of the rangefinder mounting component 332 can be adjusted by adjusting the degree of insertion and removal between adjacent arc segments.

[0076] In other embodiments, the rangefinder mounting component 332 may also be configured as a ring, which may include a plurality of arc segments, adjacent arc segments being independent of each other, and each arc segment being capable of radial reciprocating motion. When it is necessary to adjust the diameter of the rangefinder mounting component 332, the diameter of the ring formed by the radial movement of the arc segments can be radially extended or enlarged to adapt to the size of the plug hole 20.

[0077] In addition, in some embodiments, the rangefinder mounting component 332 may be detachably mounted on the base 311, and its diameter may be adjustable.

[0078] It is understood that the above is merely an example, and the method by which the diameter of the rangefinder mounting component 332 is adjustable is not limited to this.

[0079] Furthermore, as an exemplary embodiment, the control unit is also used to determine whether the plugging operation at the plugging hole 20 position is qualified based on the distance measured by the plurality of distance measuring sensors 331, specifically including:

[0080] When the difference between the distances measured by the plurality of distance measuring sensors 331 is less than or equal to the first threshold, and the distances measured by the distance measuring sensors 331 are all greater than or equal to the second threshold, it is determined that the hole 20 at the location of the plug 20 is not plugged or the plugging operation is unqualified.

[0081] When the difference between the distances measured by the plurality of distance measuring sensors 331 is less than or equal to the first threshold, and the distances measured by the distance measuring sensors 331 are all less than the second threshold, the hole plugging operation at the hole plugging position 20 is deemed qualified.

[0082] When the difference between the distances measured by the plurality of distance measuring sensors 331 is greater than the first threshold, and the distances measured by the distance measuring sensors 331 are all less than the second threshold, the hole-blocking operation at the hole-blocking position 20 is determined to be unqualified.

[0083] Please see Figure 5 and Figure 6 As shown, taking three ranging sensors 331 as an example, assuming that when the execution unit 300 is at the second target position, the distance values ​​measured by the three ranging sensors 331 are d1, d2 and d3 respectively.

[0084] like Figure 6As shown, the first threshold can be the allowable difference range of d1, d2, and d3 under the condition that the plugging operation is qualified. For example, the first threshold can be 0. However, it is not limited to this. For example, the first threshold can also include a variation range of 0 less than or equal to 10%, such as less than or equal to ±5%, less than or equal to ±4%, less than or equal to ±3%, less than or equal to ±2%, less than or equal to ±1%, less than or equal to ±0.5%, less than or equal to ±0.1%, or less than or equal to ±0.05%.

[0085] The second threshold is the maximum distance value measured by the three ranging sensors 331 when the execution unit 300 is in the second target position and the hole plugging operation is qualified. That is, the second threshold is the preset maximum allowable distance value d0.

[0086] like Figure 7 As shown, when the data difference between d1, d2, and d3 is within the first threshold but exceeds the preset maximum allowable distance value d0, it can be determined that hole 20 is not plugged or the plugging operation has failed. At this time, the device can issue an alarm to indicate that the plugging operation has failed. Figure 6 As shown, when the data differences of d1, d2, and d3 are within the first threshold and do not exceed the preset maximum allowable distance value d0, the plugging operation can be judged as qualified; Figure 7 As shown, when the data of d1, d2, and d3 do not exceed the preset maximum allowable distance value d0, but the difference exceeds the first threshold, the hole plugging operation can be determined to have failed. At this time, the device can issue an alarm to indicate that the hole plugging operation has failed.

[0087] In summary, the hole-plugging device provided in this embodiment of the present disclosure, by adding a ranging sensor 331 for detecting the state of the hole-plugging 20 to the execution unit 300, can use the same execution unit 300 to perform hole-plugging 20 detection after the hole-plugging operation is completed, thereby improving the accuracy of the hole-plugging operation and reducing rework and production waste.

[0088] Furthermore, this disclosure also provides a method for plugging a hole 20, which is applied to the hole-plugging device in this disclosure embodiment; the method for plugging a hole 20 includes the following steps:

[0089] Step S01: Acquire image information of a local area with plugging holes 20 on the workpiece 10;

[0090] Step S02: Based on the image information, obtain the coordinate position information of the plug hole 20;

[0091] Step S03: Based on the coordinate position information of the plug 20, control the execution unit 300 to move to the first target position;

[0092] Step S04: The execution unit 300 moves to the first target position, grabs the plug 30, and performs the operation of plugging the plug 30 into the plug hole 20;

[0093] Step S05: Based on the coordinate position information of the plug 20, control the execution unit 300 to move to the second target position;

[0094] Step S06: The execution unit 300 moves to the second target position and performs the operation of measuring the distance through the ranging sensor 331;

[0095] Step S07: Based on the distance measured by the range sensors 331, determine whether the plugging operation at the plugging hole 20 position is qualified.

[0096] For example, step S07 above specifically includes:

[0097] Step S071: When the difference between the distances measured by a plurality of the ranging sensors 331 is less than or equal to the first threshold, and the distances measured by the ranging sensors 331 are all greater than or equal to the second threshold, it is determined that the hole 20 at the location of the plugging hole 20 is not plugged or the plugging operation is unqualified.

[0098] Step S072: When the difference between the distances measured by the plurality of distance measuring sensors 331 is less than or equal to the first threshold, and the distances measured by the distance measuring sensors 331 are all less than the second threshold, the hole-blocking operation at the hole-blocking position 20 is deemed qualified.

[0099] Step S073: When the difference between the distances measured by a plurality of the ranging sensors 331 is greater than the first threshold, and the distances measured by the ranging sensors 331 are all less than the second threshold, it is determined that the hole-blocking operation at the hole-blocking position 20 is unqualified.

[0100] Since the principle of the hole-plugging method 20 provided in this disclosure is similar to that of the hole-plugging device described above, the embodiments of the hole-plugging method 20 provided in this disclosure can refer to the embodiments of the hole-plugging device described above, and will not be repeated here.

[0101] Furthermore, this disclosure also provides a wafer fabrication apparatus, including a memory and a processor, wherein the memory stores a computer program, and the processor executes the computer program to implement the steps of the method described above.

[0102] Other essential components of the wafer processing equipment are those which should be understood by those skilled in the art, and will not be described in detail here, nor should they be construed as limiting this disclosure.

[0103] Since the principle by which this wafer processing equipment solves the problem is similar to that of the aforementioned via plugging device, the embodiments of the wafer processing equipment provided in this disclosure can refer to the embodiments of the aforementioned via plugging device provided in this disclosure, and will not be repeated here.

[0104] The following points need to be explained:

[0105] (1) The accompanying drawings of the embodiments of this disclosure only involve the structures involved in the embodiments of this disclosure. Other structures can be referred to the general design.

[0106] (2) For clarity, the thickness of layers or regions is enlarged or reduced in the drawings used to describe embodiments of the present disclosure, i.e., these drawings are not drawn to actual scale. It will be understood that when an element such as a layer, film, region or substrate is referred to as being “above” or “below” another element, the element may be “directly” located “above” or “below” the other element or there may be intermediate elements.

[0107] (3) Where there is no conflict, the embodiments of this disclosure and the features in the embodiments can be combined with each other to obtain new embodiments.

[0108] The above are merely specific embodiments of this disclosure, but the scope of protection of this disclosure is not limited thereto. The scope of protection of this disclosure shall be determined by the scope of the claims.

Claims

1. A plugging device, characterized in that, include: The image acquisition unit is used to acquire image information of a local area with a plugged hole on the workpiece. The control unit is used to obtain the coordinate position information of the plug based on the image information; and An execution unit includes an execution end, which is provided with a plug mounting component for gripping a plug; the execution end is also provided with a detection unit, which includes a plurality of distance sensors, which are used to measure the distance from the distance sensor itself to the workpiece along a first direction; The control unit is further configured to control the execution unit to move to a first target position or a second target position based on the coordinate position information of the plug; and the execution unit is configured to perform the operation of plugging the plug into the plug when it is at the first target position; and to perform the operation of measuring the distance through the distance measuring sensor when it is at the second target position; the control unit is further configured to determine whether the plugging operation at the plug position is qualified based on the distance measured by the plurality of distance measuring sensors; The execution end is provided with a base, the detection unit and the plug mounting component are spaced apart on the base along a second direction, and the base is configured to be telescopic along the first direction, wherein the second direction is perpendicular to the first direction; the detection unit further includes a rangefinder mounting component, the rangefinder mounting component is configured to be circular or annular to match the shape and size of the plug hole, and a plurality of the rangefinder sensors are evenly distributed along the circumference of the rangefinder mounting component; The rangefinder mounting component is detachably mounted on the base; and / or the rangefinder mounting component is configured to have an adjustable diameter.

2. The plugging device according to claim 1, characterized in that, The ranging sensor includes an optical sensor.

3. The plugging device according to claim 1, characterized in that, The control unit is also used to determine whether the plugging operation at the plugging location is qualified based on the distance measured by the plurality of the ranging sensors, specifically including: When the difference between the distances measured by the plurality of distance measuring sensors is less than or equal to a first threshold, and the distances measured by the distance measuring sensors are all greater than or equal to a second threshold, it is determined that the hole at the hole-blocking location is not blocked or the hole-blocking operation is unqualified. When the difference between the distances measured by the plurality of distance measuring sensors is less than or equal to the first threshold, and the distances measured by the distance measuring sensors are all less than the second threshold, the hole-blocking operation at the hole-blocking location is deemed qualified. When the difference between the distances measured by the plurality of the ranging sensors is greater than the first threshold, and the distances measured by the ranging sensors are all less than the second threshold, the hole-blocking operation at the hole-blocking location is determined to be unqualified.

4. The plugging device according to claim 1, characterized in that, The execution unit includes a robotic arm.

5. A method for plugging holes, characterized in that, Applied to the plugging device as described in any one of claims 1 to 4; the plugging method includes the following steps: Acquire image information of a local area with a plugged hole on the workpiece; Based on the image information, the coordinate position information of the plug hole is obtained; Based on the coordinate position information of the plug, the execution unit is controlled to move to the first target position; The execution unit moves to the first target position, grabs the plug, and performs the operation of plugging the plug into the plugging hole; Based on the coordinate position information of the plug, the execution unit is controlled to move to the second target position; The execution unit moves to the second target position and performs the operation of measuring distance through the ranging sensor; Based on the distance measured by the plurality of distance measuring sensors, it is determined whether the plugging operation at the plugging location is qualified; wherein, the determination of whether the plugging operation at the plugging location is qualified based on the distance measured by the plurality of distance measuring sensors specifically includes: When the difference between the distances measured by the plurality of distance measuring sensors is less than or equal to a first threshold, and the distances measured by the distance measuring sensors are all greater than or equal to a second threshold, it is determined that the hole at the hole-blocking location is not blocked or the hole-blocking operation is unqualified. When the difference between the distances measured by the plurality of distance measuring sensors is less than or equal to the first threshold, and the distances measured by the distance measuring sensors are all less than the second threshold, the hole-blocking operation at the hole-blocking location is deemed qualified. When the difference between the distances measured by the plurality of the ranging sensors is greater than the first threshold, and the distances measured by the ranging sensors are all less than the second threshold, the hole-blocking operation at the hole-blocking location is determined to be unqualified.

6. A wafer processing apparatus, comprising a memory and a processor, wherein the memory stores a computer program, characterized in that, When the processor executes the computer program, it implements the steps of the method of claim 5.

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