A positioning-based aluminum alloy member forging apparatus and method for semiconductor devices

Abstract

The application belongs to the field of semiconductor equipment production, and particularly relates to a positioning-based aluminum alloy component forging and pressing equipment for semiconductor equipment and a method thereof, which comprises a bottom plate, a fixing seat and a second material guiding frame are welded and fixed on the bottom end face of the bottom plate, a supporting rod is welded and fixed on the top end face of the bottom plate, a fixing plate is welded and fixed on the supporting rod, a top plate is welded and fixed on the top end of the supporting rod, a pretreatment assembly is installed on the top plate, a self-positioning feeding assembly is installed on the fixing plate, a first hydraulic rod is fixed on the top plate, a top die plate is fixedly connected to the bottom end of the first hydraulic rod, a feeding groove is formed through the fixing plate, and a second hydraulic rod is fixed on the bottom plate. The aluminum alloy component blank can be automatically and stably positioned, fed and demolded in the actual working process of the existing aluminum alloy component forging and pressing equipment for semiconductor equipment.

Description

Technical Field

[0001] This invention relates to the field of semiconductor equipment manufacturing, specifically to a positioning-based forging equipment and method for aluminum alloy components used in semiconductor equipment. Background Technology

[0002] Aluminum alloy components for semiconductor equipment refer to various parts or components used in the semiconductor manufacturing process. These components need to meet specific process requirements and performance standards to ensure the production quality and performance stability of semiconductor devices. Since the application of aluminum alloys in semiconductor equipment usually requires high precision, good surface quality and specific mechanical properties, they need to be forged using forging equipment during the production process.

[0003] Existing aluminum alloy component forging equipment has several problems in actual operation. For example, a forging equipment for aluminum alloy workpieces with publication number CN112453296A, although it can conveniently spray out the demolding liquid by moving a foot pedal, still requires manual operation, resulting in low work efficiency and automation. Since aluminum alloy components in semiconductor equipment usually require high precision and geometric consistency, existing aluminum alloy component forging equipment cannot automatically and stably position and feed the aluminum alloy component blanks and automatically demold them. Therefore, operators need to manually place the aluminum alloy component blanks into the forging mold, but manual feeding is prone to deviation, which cannot ensure that the blanks are in the correct position. This can easily lead to errors in the forging process of aluminum alloy components or unqualified products, resulting in poor practicality. Therefore, there is a need to provide a positioning-based forging equipment and method for aluminum alloy components in semiconductor equipment to meet the needs of users. Summary of the Invention

[0004] In view of the problems existing in the existing positioning-based forging equipment and methods for aluminum alloy components for semiconductor devices, the present invention is proposed.

[0005] To solve the above-mentioned technical problems, according to one aspect of the present invention, the present invention provides the following technical solution: a positioning-based forging equipment for aluminum alloy components of semiconductor devices, comprising a base plate, a fixing seat and a second guide frame welded and fixed on the bottom end surface of the base plate, a support rod welded and fixed on the top end surface of the base plate, a fixing plate welded and fixed on the support rod, a top plate welded and fixed on the top end of the support rod, a pre-processing assembly mounted on the top plate, a self-positioning feeding assembly mounted on the fixing plate, a first hydraulic rod mounted and fixed on the top plate, an upper template fixedly connected to the bottom end of the first hydraulic rod, a feed groove penetrating through the fixing plate, a second hydraulic rod mounted and fixed on the base plate, and a second hydraulic rod fixedly connected to the end of the second hydraulic rod. A lower template is attached, and a feeding trough is formed through the base plate. A liquid storage tank is welded and fixed to the side end face of the fixed plate. An inlet pipe is connected to the top of the liquid storage tank, and a sealing ring is fixedly connected to the bottom side end of the liquid storage tank. A third spring is welded and fixed to the inner side end face of the liquid storage tank. A rubber piston is fixedly connected to the other end of the third spring. A push rod is fixedly connected to the rubber piston and is slidably connected inside the sealing ring. A first conveying pipe is fixedly connected to the inner bottom end face of the liquid storage tank. A second conveying pipe is connected to the end of the first conveying pipe. The top of the second conveying pipe is fixedly connected to the fixed plate, and a third conveying pipe is connected to the end of the second conveying pipe. An atomizing nozzle is installed at the bottom of the third conveying pipe.

[0006] In a preferred embodiment of the present invention, the pretreatment component includes a first servo motor, which is mounted and fixed on the inner top surface of the top plate. A rotating rod is welded and fixed to the output shaft of the first servo motor. A toggle lever is welded and fixed to one end of the rotating rod, and a first limiting plate is welded and fixed to the other end of the rotating rod. A heat insulation frame is welded and fixed to the top plate. A rotating shaft is rotatably connected inside the heat insulation frame. A rotating frame is welded and fixed to the end of the rotating shaft. A limiting frame and a second limiting plate are welded and fixed to the inner side surface of the rotating frame. The side surfaces of the first and second limiting plates are both arc-shaped. Four limiting frames and four second limiting plates are provided. The four limiting frames and four second limiting plates are evenly distributed within the rotating frame and are alternately distributed. The horizontal center line of the rotating shaft, the horizontal center line of the rotating frame, and the horizontal center line of the heat insulation frame are located on the same horizontal line.

[0007] In a preferred embodiment of the present invention, a first through groove is provided through the top side of the insulation frame, a first guide frame is welded and fixed to the top side surface of the insulation frame, a second through groove is provided through the bottom of the insulation frame, a turntable is rotatably connected inside the insulation frame, the turntable is welded and fixed to a rotating shaft, a central transfer groove is provided through the turntable, an electric heating tube is installed and fixed inside the turntable, the first guide frame is inclined, the inner wall of the insulation frame is in contact with the outer wall of the turntable, the rotating shaft is fixed at the center of the turntable, four central transfer grooves are provided, the four central transfer grooves are distributed at equal angles on the turntable, and the electric heating tubes are distributed at equal angles inside the turntable.

[0008] In a preferred embodiment of the present invention, the self-positioning feeding assembly includes a first mounting plate and a second mounting plate. Both the first and second mounting plates are welded and fixed to the top surface of a fixed plate. A reciprocating screw is rotatably connected to the first mounting plate. The reciprocating screws are symmetrically distributed on both sides of the top of the fixed plate. One side of the reciprocating screw is connected to the output end of a second servo motor. The second servo motor is welded and fixed to the first mounting plate. A transmission belt is connected to the end of the reciprocating screw. A sliding plate is threaded onto the reciprocating screw. A first guide groove is formed through the sliding plate. A first guide rod is slidably connected within the first guide groove. A second guide rod is welded and fixed to the end of the first guide rod. A second guide groove is formed through the second mounting plate. The second guide rod is slidably connected within the second guide groove. The bottom surface of the sliding plate is in contact with the top surface of the fixed plate. The first guide groove is V-shaped. The bottom height of the first guide groove is the same as the bottom height of the second guide groove, and the top height of the first guide groove is the same as the top height of the second guide groove.

[0009] In a preferred embodiment of the present invention, a connecting plate is welded and fixed to the end of the second guide rod. A first sliding groove and a third through groove are formed through the connecting plate. The first sliding groove and the third through groove are connected. A first spring is welded and fixed to the inner side surface of the first sliding groove. A sliding rod is welded and fixed to the other end of the first spring. The sliding rod is slidably connected to the first sliding groove. A bracket is welded and fixed to the top of the sliding rod. A roller is rotatably connected to the top of the bracket. A connecting plate is welded and fixed to the bottom end of the sliding rod. A second sliding groove is formed through the connecting plate. A second spring is welded and fixed to the inner side surface of the second sliding groove. A first clamping plate is welded and fixed to the other end of the second spring. The first clamping plate is slidably connected to the second sliding groove. The third through groove is formed in the middle of the connecting plate. The first sliding grooves are symmetrically distributed on both sides of the connecting plate. The first sliding grooves correspond one-to-one with the sliding rods. The sliding rods are fixed to the bottom middle of the bracket. The second sliding grooves are symmetrically distributed on both sides of the connecting plate. The second sliding grooves correspond one-to-one with the first clamping plates through the second springs.

[0010] In a preferred embodiment of the present invention, a transmission rod is slidably connected through the connecting plate. One end of the transmission rod is fixedly connected to a traction rope, which is slidably connected to a guide wheel. The guide wheel is mounted on the connecting plate. The end of the traction rope is fixedly connected to a first clamping plate. The other end of the transmission rod is welded and fixedly connected to a second clamping plate. A third sliding groove is formed through the second clamping plate. The first clamping plate is slidably connected to the third sliding groove. A threaded rod is threadedly connected to the top of the second mounting plate. An adjusting plate is rotatably connected to the end of the threaded rod. A telescopic sleeve is hinged to the bottom of the adjusting plate. The bottom end of the telescopic sleeve is hinged to the top side surface of the second mounting plate. The transmission rod is connected to the center of the connecting plate. The first clamping plate corresponds one-to-one with the guide wheel via the traction rope. The threaded rod is connected to the middle part of the adjusting plate. The telescopic sleeves are symmetrically distributed on both sides of the bottom of the adjusting plate.

[0011] In a preferred embodiment of the present invention, the second hydraulic rods are symmetrically distributed on both sides of the base plate, and the second hydraulic rods correspond one-to-one with the lower template. The bottom end face of the lower template is in contact with the top end face of the base plate.

[0012] In a preferred embodiment of the present invention, the liquid storage tanks are symmetrically distributed on both sides of the fixed plate, the length and width of the rubber piston are equal to the length and width of the internal space of the first delivery pipe, respectively, and the push rod is fixed at the middle part of the side end of the rubber piston.

[0013] In a preferred embodiment of the present invention, the second conveying pipe is connected to the middle part of the side end of the third conveying pipe, the atomizing nozzles are equidistantly distributed at the bottom of the third conveying pipe, and the bottom end face of the atomizing nozzle is flush with the bottom end face of the fixing plate.

[0014] A positioning-based forging method for aluminum alloy components for semiconductor devices includes the following steps:

[0015] S1: Using a pre-processing component to separate and automatically heat the aluminum alloy component blanks for semiconductor equipment;

[0016] S2: The aluminum alloy component blank after heat treatment is automatically transported to the middle part of the lower template through the self-positioning feeding component to complete the automated positioning and feeding work;

[0017] S3: The upper template is driven to move downward by the first hydraulic rod, and the lower template is used to complete the forging process of the aluminum alloy component blank;

[0018] S4: The lower mold plate is opened by the second hydraulic rod, and the automatic demolding and unloading work is completed in conjunction with the material unloading groove and the second guide frame.

[0019] S5: During the lower mold opening process, the push rod can push the rubber piston, and the first and second conveying pipes can be used to transport the lubricant in the storage tank to the third conveying pipe. With the help of the atomizing nozzle, the lower mold can be automatically sprayed to complete the automatic lubrication process.

[0020] Compared with the prior art, the beneficial effects of the present invention are:

[0021] 1. The present invention includes a pre-processing component. Driven by a first servo motor, the rotating rod, along with a toggle lever and a first limiting plate, and in conjunction with a limiting frame and a second limiting plate on the rotating frame, enables the turntable on the rotating shaft to rotate automatically and stably at intervals of 90° each time. This allows for automatic and stable intermittent feeding of aluminum alloy component blanks for semiconductor equipment. During the feeding process, an electric heating tube provides stable heating to the aluminum alloy component blanks, thereby improving their plasticity and making them easier to form the desired shape, thus enhancing the working efficiency of the forging equipment.

[0022] 2. This invention includes a self-positioning feeding assembly. Under the rotation of the reciprocating screw, it drives the threaded sliding plate to perform stable reciprocating motion. Combined with the first guide groove, it pushes the second guide rod on the first guide rod to move stably along the trajectory of the second guide groove, thereby driving the connecting plate to move synchronously. During the movement of the connecting plate, the adjusting plate drives the first and second clamping plates to automatically and stably clamp and position the aluminum alloy component blank in all directions. This pushes the aluminum alloy component blank to the middle part inside the lower template, completing the automated positioning and feeding process. This ensures that the aluminum alloy blank maintains the required position and shape during forging, guaranteeing the stability and consistency of each processing step. This is particularly important for high-precision and complex-shaped semiconductor equipment components, avoiding processing errors or product defects due to positional changes, and increasing the ease of use and stability of the forging equipment. Furthermore, rotating the threaded rod adjusts the position of the adjusting plate, thereby adjusting the clamping range of the first and second clamping plates. This allows for convenient and stable clamping and positioning of aluminum alloy component blanks of different sizes, improving the practicality and applicability of the forging equipment.

[0023] 3. The present invention is provided with a lower template and a feeding groove. The upper template is driven to move downward by the first hydraulic rod. Together with the lower template, the forging of aluminum alloy component blanks can be stably completed. Then, the corresponding lower templates are driven to move to the side by the second hydraulic rods on both sides to complete the mold opening. At this time, the forged aluminum alloy component can be automatically demolded and fed through the feeding groove and the second guide frame, which can effectively improve production efficiency and ensure the quality and consistency of the components.

[0024] 4. This invention includes a liquid storage tank and an atomizing nozzle. During the mold opening process, the lower mold plate moves to the side and a push rod can push a rubber piston. The first and second delivery pipes can transport the lubricant in the liquid storage tank to the third delivery pipe. In conjunction with the atomizing nozzle, the lubricant can be automatically sprayed onto the lower mold plate to complete the automatic lubrication process. This reduces the friction between the aluminum alloy component blank and the mold, promoting a smooth forging process. This is especially important for semiconductor equipment components with complex shapes or high precision requirements. Furthermore, the lubricated mold can effectively reduce the friction between the aluminum alloy and the mold surface, thereby reducing the need for demolding force and further improving the stability of subsequent demolding operations. Attached Figure Description

[0025] To more clearly illustrate the technical solutions of the embodiments of the present invention, the present invention will be described in detail below with reference to the accompanying drawings and detailed embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort. Wherein:

[0026] Figure 1 This is a schematic diagram of the overall three-dimensional structure of the present invention;

[0027] Figure 2 This is a schematic diagram of the connection structure between the reciprocating lead screw and the transmission belt of the present invention;

[0028] Figure 3 This is a schematic diagram of the connection structure between the second and third conveying pipes of the present invention;

[0029] Figure 4 This is a schematic diagram of the overall main structure of the present invention;

[0030] Figure 5 This is a schematic diagram of the main cross-sectional structure of the insulation frame of the present invention;

[0031] Figure 6 This is a side view of the rotating frame structure of the present invention;

[0032] Figure 7 This is a schematic diagram of the main structure of the second guide groove of the present invention;

[0033] Figure 8 This is a schematic diagram of the main cross-sectional structure of the connecting plate of the present invention;

[0034] Figure 9 This is a schematic diagram of the main structure of the adjustment plate of the present invention;

[0035] Figure 10 This is a schematic diagram of the main structure of the second clamping plate of the present invention;

[0036] Figure 11 This is a top view of the connecting plate structure of the present invention;

[0037] Figure 12 This is the present invention. Figure 11 Enlarged structural diagram at point B;

[0038] Figure 13 This is a schematic diagram of the overall side section structure of the present invention;

[0039] Figure 14 This is the present invention. Figure 13 Enlarged structural diagram at point A in the middle;

[0040] Figure 15 This is a schematic diagram of the main cross-sectional structure of the liquid storage tank of the present invention.

[0041] In the diagram: 1. Base plate; 2. Fixing seat; 3. Support rod; 4. Fixing plate; 5. Top plate; 6. Pre-treatment assembly; 601. First servo motor; 602. Rotating rod; 603. Actuating rod; 604. First limiting plate; 605. Insulation frame; 606. Rotating shaft; 607. Rotating frame; 608. Limiting frame; 609. Second limiting plate; 610. First through slot; 611. First guide frame; 612. ... 613. Two-way slot; 614. Turntable; 615. Transfer slot; 616. Electric heating element; 7. Self-positioning feeding assembly; 701. First mounting plate; 702. Reciprocating lead screw; 703. Transmission belt; 704. Second servo motor; 705. Sliding plate; 706. First guide slot; 707. First guide rod; 708. Second guide rod; 709. Connecting plate; 710. First sliding slot; 711. Third through slot; 71 2. First spring; 713. Sliding rod; 714. Bracket; 715. Roller; 716. Connecting plate; 717. Second sliding groove; 718. Second spring; 719. First clamping plate; 720. Transmission rod; 721. Traction rope; 722. Guide wheel; 723. Second clamping plate; 724. Third sliding groove; 725. Second mounting plate; 726. Second guide groove; 727. Threaded rod; 728. Adjustment rod. Section plate; 729, telescopic sleeve rod; 8, first hydraulic rod; 9, upper template; 10, feed chute; 11, second hydraulic rod; 12, lower template; 13, discharge chute; 14, second guide frame; 15, liquid storage tank; 16, liquid inlet pipe; 17, sealing ring; 18, third spring; 19, rubber piston; 20, push rod; 21, first conveying pipe; 22, second conveying pipe; 23, third conveying pipe; 24, atomizing nozzle. Detailed Implementation

[0042] To make the above-mentioned objects, features and advantages of the present invention more apparent and understandable, the specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings.

[0043] Many specific details are set forth in the following description in order to provide a full understanding of the invention. However, the invention may also be practiced in other ways different from those described herein, and those skilled in the art can make similar extensions without departing from the spirit of the invention. Therefore, the invention is not limited to the specific embodiments disclosed below.

[0044] Secondly, the present invention is described in detail with reference to the schematic diagrams. When detailing the embodiments of the present invention, for ease of explanation, the cross-sectional views illustrating the device structure may be partially enlarged, not according to the usual scale. Furthermore, the schematic diagrams are merely examples and should not limit the scope of protection of the present invention. In addition, actual fabrication should include three-dimensional spatial dimensions of length, width, and depth.

[0045] Example

[0046] To make the objectives, technical solutions, and advantages of the present invention clearer, the embodiments of the present invention will be described in further detail below with reference to the accompanying drawings.

[0047] like Figure 1-15 As shown, a positioning-based forging equipment for aluminum alloy components in semiconductor devices includes a base plate 1. A fixing seat 2 and a second guide frame 14 are welded and fixed to the bottom end surface of the base plate 1. A support rod 3 is welded and fixed to the top end surface of the base plate 1. A fixing plate 4 is welded and fixed to the support rod 3. A top plate 5 is welded and fixed to the top end of the support rod 3. A pretreatment component 6 is installed on the top plate 5. A self-positioning feeding component 7 is installed on the fixing plate 4. A first hydraulic rod 8 is installed and fixed to the top plate 5. An upper template is fixedly connected to the bottom end of the first hydraulic rod 8. 9. A feed chute 10 is provided through the fixed plate 4. A second hydraulic rod 11 is installed and fixed on the base plate 1. A lower template 12 is fixedly connected to the end of the second hydraulic rod 11. A discharge chute 13 is provided through the base plate 1. A liquid storage tank 15 is welded and fixed to the side end face of the fixed plate 4. A liquid inlet pipe 16 is connected to the top of the liquid storage tank 15. A sealing ring 17 is fixedly connected to the bottom side end of the liquid storage tank 15. A third spring 18 is welded and fixed to the inner side end face of the liquid storage tank 15. A rubber valve is fixedly connected to the other end of the third spring 18. A push rod 20 is fixedly connected to the rubber piston 19. The push rod 20 is slidably connected inside the sealing ring 17. A first conveying pipe 21 is fixedly connected to the bottom surface inside the liquid storage tank 15. A second conveying pipe 22 is connected to the end of the first conveying pipe 21. The top of the second conveying pipe 22 is fixedly connected to the fixed plate 4. A third conveying pipe 23 is connected to the end of the second conveying pipe 22. An atomizing nozzle 24 is installed at the bottom of the third conveying pipe 23. The pretreatment component 6 can automatically and stably perform intermittent separation feeding of aluminum alloy component blanks for semiconductor equipment. During the feeding process, the aluminum alloy component blanks can be stably heated, thereby improving the plasticity of the aluminum alloy component blanks and making them easier to form the required shape. In addition, with the self-positioning feeding component 7, the aluminum alloy component blanks can be automatically and stably clamped and positioned in all directions, completing the automated positioning feeding work, ensuring that the aluminum alloy blanks maintain the required position and shape during the forging process, and ensuring the stability and consistency of each processing.

[0048] In this embodiment, the preprocessing component 6 includes a first servo motor 601, which is mounted and fixed on the inner top surface of the top plate 5. A rotating rod 602 is welded and fixed to the output shaft of the first servo motor 601. A toggle rod 603 is welded and fixed to one end of the rotating rod 602, and a first limiting plate 604 is welded and fixed to the other end of the rotating rod 602. A heat insulation frame 605 is welded and fixed to the top plate 5. A rotating shaft 606 is rotatably connected inside the heat insulation frame 605. A rotating frame 607 is welded and fixed to the end of the rotating shaft 606. A limiting frame 608 and a second limiting plate 604 are welded and fixed to the inner side surface of the rotating frame 607. 9. The side end faces of the first limiting plate 604 and the second limiting plate 609 are both arc-shaped. Four limiting frames 608 and four second limiting plates 609 are provided. The four limiting frames 608 and four second limiting plates 609 are evenly distributed within the rotating frame 607, alternating between them. The horizontal center line of the rotating shaft 606, the horizontal center line of the rotating frame 607, and the horizontal center line of the insulation frame 605 are on the same horizontal line. A first through groove 610 is provided through the top side end of the insulation frame 605. A first guide frame 61 is welded and fixed to the top side end face of the insulation frame 605. 1. A second through slot 612 is provided through the bottom of the insulation frame 605. A turntable 613 is rotatably connected inside the insulation frame 605. The turntable 613 is welded and fixed to the rotating shaft 606. A central transfer slot 614 is provided through the turntable 613. An electric heating tube 615 is installed and fixed inside the turntable 613. The first guide frame 611 is inclined. The inner wall of the insulation frame 605 is in contact with the outer wall of the turntable 613. The rotating shaft 606 is fixed at the center of the turntable 613. Four central transfer slots 614 are provided, and the four central transfer slots 614 are distributed at equal angles on the turntable 613. The electric heating tubes 615 are distributed at equal angles inside the turntable 613. Driven by the motor 601, the actuating rod 603 on the rotating rod 602 and the first limiting plate 604, together with the limiting frame 608 and the second limiting plate 609 on the rotating frame 607, can drive the turntable 613 on the rotating shaft 606 to perform automatic and stable intermittent rotation, with each rotation being 90°. This enables automatic and stable intermittent feeding of aluminum alloy component blanks for semiconductor equipment. During the feeding process, the electric heating tube 615 can provide stable heating treatment to the aluminum alloy component blanks, thereby improving the plasticity of the aluminum alloy component blanks and making them easier to form the required shape.

[0049] In this embodiment, the self-positioning feeding assembly 7 includes a first mounting plate 701 and a second mounting plate 725. Both the first mounting plate 701 and the second mounting plate 725 are welded and fixed to the top surface of the fixed plate 4. A reciprocating screw 702 is rotatably connected to the first mounting plate 701. The reciprocating screws 702 are symmetrically distributed on both sides of the top of the fixed plate 4. One side of the reciprocating screw 702 is connected to the output end of the second servo motor 704. The second servo motor 704 is welded and fixed to the first mounting plate 701. A transmission belt 703 is connected to the end of the reciprocating screw 702. A sliding plate 705 is threaded onto the reciprocating screw 702. A first guide groove 706 is formed through the sliding plate 705. A first guide slidably connected within the first guide groove 706 is limited. A guide rod 707 is attached to the end of a first guide rod 707, and a second guide rod 708 is welded and fixed to the end of the first guide rod 707. A second guide groove 726 is formed through the second mounting plate 725. The second guide rod 708 is slidably connected within the second guide groove 726. The bottom end face of the sliding plate 705 is in contact with the top end face of the fixed plate 4. The first guide groove 706 is V-shaped, and the bottom end height of the first guide groove 706 is the same as the bottom end height of the second guide groove 726. The top end height of the first guide groove 706 is the same as the top end height of the second guide groove 726. A connecting plate 709 is welded and fixed to the end of the second guide rod 708. A first sliding groove 710 and a third through groove 711 are formed through the connecting plate 709. The first sliding groove 710 and the third through groove 711 are connected through the connecting plate 709. A first spring 712 is welded and fixed to the inner side surface of the first sliding groove 710. A sliding rod 713 is welded and fixed to the other end of the first spring 712. The sliding rod 713 is slidably connected within the first sliding groove 710. A bracket 714 is welded and fixed to the top of the sliding rod 713. A roller 715 is rotatably connected to the top of the bracket 714. A connecting plate 716 is welded and fixed to the bottom end of the sliding rod 713. A second sliding groove 717 is formed through the connecting plate 716. A second spring 718 is welded and fixed to the inner side surface of the second sliding groove 717. A first clamping plate 719 is welded and fixed to the other end of the second spring 718. The first clamping plate 719 is slidably connected within the second sliding groove 717. A third through groove 711 is opened. Located in the middle of the connecting plate 709, the first sliding groove 710 is symmetrically distributed on both sides of the connecting plate 709. The first sliding groove 710 corresponds one-to-one with the sliding rod 713. The sliding rod 713 is fixed in the middle of the bottom of the bracket 714. The second sliding groove 717 is symmetrically distributed on both sides of the connecting plate 716. The second sliding groove 717 corresponds one-to-one with the first clamping plate 719 through the second spring 718. Under the rotation of the reciprocating screw 702, it can drive the threaded sliding plate 705 to perform stable reciprocating motion. Combined with the first guide groove 706, it can push the second guide rod 708 on the first guide rod 707 to move stably along the trajectory of the second guide groove 726, thereby driving the connecting plate 709 to move synchronously.Furthermore, during the movement of the connecting plate 709, the adjusting plate 728 drives the first clamping plate 719 and the second clamping plate 723 to automatically and stably clamp and position the aluminum alloy component blank in all directions. This allows the aluminum alloy component blank to automatically move to the middle part inside the lower template 12, completing the automated positioning and feeding process. This ensures that the aluminum alloy blank maintains the required position and shape during forging, guaranteeing the stability and consistency of each processing step. This is particularly important for high-precision and complex-shaped semiconductor equipment components, preventing processing errors or product defects caused by positional changes.

[0050] In this embodiment, a transmission rod 720 is slidably connected through the connecting plate 716. One end of the transmission rod 720 is fixedly connected to a traction rope 721, which is slidably connected to a guide wheel 722. The guide wheel 722 is mounted on the connecting plate 716. The end of the traction rope 721 is fixedly connected to a first clamping plate 719. The other end of the transmission rod 720 is welded and fixedly connected to a second clamping plate 723. A third sliding groove 724 is formed through the second clamping plate 723. The first clamping plate 719 is slidably connected within the third sliding groove 724. A threaded rod 727 is threadedly connected to the top of the second mounting plate 725. An adjusting plate 728 is rotatably connected to the end of the threaded rod 727. The bottom of the adjusting plate 728 is hinged with a telescopic sleeve 729. The bottom end of the telescopic sleeve 729 is hinged to the top side surface of the second mounting plate 725. The transmission rod 720 is connected to the center of the connecting plate 716. The first clamping plate 719 is connected to the guide wheel 722 one by one through the traction rope 721. The threaded rod 727 is connected to the middle part of the adjusting plate 728. The telescopic sleeve 729 is symmetrically distributed on both sides of the bottom of the adjusting plate 728. By rotating the threaded rod 727, the position of the adjusting plate 728 can be adjusted, thereby adjusting the clamping range of the first clamping plate 719 and the second clamping plate 723. This enables convenient and stable clamping and positioning of aluminum alloy component blanks of different sizes.

[0051] In this embodiment, the second hydraulic rods 11 are symmetrically distributed on both sides of the base plate 1. The second hydraulic rods 11 correspond one-to-one with the lower template 12. The bottom end face of the lower template 12 is in contact with the top end face of the base plate 1. The upper template 9 is driven to move downward by the first hydraulic rod 8. With the cooperation of the lower template 12, the forging of the aluminum alloy component blank can be stably completed. Then, the corresponding lower templates 12 are driven to move to the side by the second hydraulic rods 11 on both sides to complete the mold opening. At this time, the forged aluminum alloy component can be automatically demolded and unloaded through the unloading groove 13 and the second guide frame 14, which can effectively improve production efficiency and ensure the quality and consistency of the component.

[0052] In this embodiment, the liquid storage tanks 15 are symmetrically distributed on both sides of the fixed plate 4. A solenoid valve is installed on the liquid inlet pipe 16. The length and width of the rubber piston 19 are equal to the length and width of the internal space of the first conveying pipe 21, respectively. The push rod 20 is fixed at the middle part of the side end of the rubber piston 19. The second conveying pipe 22 is connected to the middle part of the side end of the third conveying pipe 23. The atomizing nozzles 24 are evenly distributed at the bottom of the third conveying pipe 23. The bottom end face of the atomizing nozzle 24 is flush with the bottom end face of the fixed plate 4. The lower mold plate 12 moves to the side. During the mold opening process, the push rod 20 can push the rubber piston 19. The first conveying pipe 21 and the second conveying pipe 22 can transport the lubricating liquid in the liquid storage tank 15 to the third conveying pipe 23. With the help of the atomizing nozzles 24, the lower mold plate 12 can be automatically sprayed to complete the automatic lubrication treatment.

[0053] It should be noted that this invention relates to a positioning-based forging equipment and method for aluminum alloy components used in semiconductor devices. First, the operator places the aluminum alloy component blank to be forged on the first guide frame 611. Under the inclined guidance of the first guide frame 611, the aluminum alloy component blank, under its own gravity, is automatically conveyed through the first through-slot 610 on the insulation frame 605 to the transfer slot 614 at the top of the turntable 613. Then, driven by the first servo motor 601, the output shaft drives the rotating rod 602 to rotate stably, thereby driving the actuating rods 603 at both ends and the first limiting plate 604 to perform synchronous circular motion. Under the circular motion of the actuating rods 603, the limiting frame 608 is actuated, causing the rotating frame 607 to rotate intermittently, rotating 90° each time. When the actuating rod 603 moves away from the limiting frame 608, the rotating frame 607 stops rotating. At this time, the rotating rod 602 can drive the first limiting plate 604 to fit with the second limiting plate 609 inside the rotating frame 607, thereby limiting the rotating frame 607 and preventing it from shaking when it stops rotating. This ensures the stability of the intermittent rotation of the rotating frame 607. By using the intermittent rotation of the rotating frame 607, the rotating shaft 606 can drive the turntable 613 to rotate conveniently and stably within the insulation frame 605. Each rotation is 90°. By using the 90° intermittent rotation of the turntable 613, the top middle transfer groove 614 can be moved to the bottom. At this time, the aluminum alloy component blank in the middle transfer groove 614 can be automatically fed through the second through groove 612. As the aluminum alloy component blank moves within the insulation frame 605 with the turntable 613, the electric heating tube 615 can stably heat the aluminum alloy component blank during the feeding process, thereby improving the plasticity of the aluminum alloy component blank and making it easier to form the required shape.

[0054] The second guide groove 726 has two inflection points. One inflection point of the second guide groove 726 is aligned with the vertical center line of the insulation frame 605, while the other inflection point of the second guide groove 726 is aligned with the vertical center line of the lower template 12. Therefore, when the second guide rod 708 is at the rightmost side of the second guide groove 726, the connecting plate 709 on the second guide rod 708 is located directly below the insulation frame 605. Thus, when the aluminum alloy component blank is automatically fed through the second through groove 612, it can pass through the connecting plate 709 and stably fall onto the fixed plate 4 through the third through groove 711.

[0055] Subsequently, driven by the second servo motor 704, one side of the reciprocating screw 702 can rotate. At this time, the reciprocating screw 702 on one side can drive the other side of the reciprocating screw 702 to rotate synchronously through the transmission belt 703. Under the synchronous rotation of the two reciprocating screws 702, the corresponding threaded sliding plate 705 can be driven to reciprocate synchronously. At this time, the sliding plate 705 first moves to the left. Under the action of the movement of the sliding plate 705, the inclined surface on the left side of the first guide groove 706 can push the first guide rod 707 and the second guide rod 708 to move upward along the second guide groove 726 on the second mounting plate 725. Then, under the continued movement of the sliding plate 705... The first guide rod 707 and the second guide rod 708 can continue to move along the trajectory of the second guide groove 726 on the second mounting plate 725. At this time, the first guide rod 707 and the second guide rod 708 can move stably to the left until the first guide rod 707 and the second guide rod 708 move to the leftmost position. At this time, the sliding plate 705 continues to move, and the first guide rod 707 and the second guide rod 708 will not continue to move to the left. Therefore, under the combined action of the inclined surface on the right side of the first guide groove 706 and the second guide groove 726, the first guide rod 707 and the second guide rod 708 can move smoothly downward along the trajectory of the second guide groove 726.

[0056] Under the action of the first guide rod 707 and the second guide rod 708, the connecting plate 709 can be driven to move synchronously. The rightmost connecting plate 709 first moves upward, then moves to the left, and finally moves downward. Similarly, under the continuous rotation of the reciprocating screw 702, the threaded sliding plate 705 can be driven to move from left to right to reset. At this time, under the combined limiting action of the first guide groove 706 and the second guide groove 726, the leftmost connecting plate 709 can be driven to move upward first, then move to the right, and finally move downward through the first guide rod 707 and the second guide rod 708 to complete the reset.

[0057] When the rightmost connecting plate 709 moves upward first, it drives the bracket 714 on the sliding rod 713 to move upward synchronously. Under the action of the bracket 714, the roller 715 first contacts the telescopic sleeve 729. Guided by the telescopic sleeve 729, the roller 715 pushes the side sliding rod 713 towards the center until the connecting plate 709 reaches its top. Similarly, the roller 715 and sliding rod 713 on the other side also move towards the center. At this point, the bracket 714 moves to the adjusting plate 728 and becomes flush with it. The adjusting plate 728 then blocks and limits the bracket 714. When the sliding rods 713 on both sides move towards the center, they drive the connecting plate 716 to move synchronously. Under the action of the connecting plate 716, the transmission rod... 720 pushes the second clamping plates 723 on both sides to contact the front and back of the aluminum alloy component blank. Then the connecting plates 716 on both sides continue to move towards the middle. Since the second clamping plates 723 on both sides have already contacted the front and back of the aluminum alloy component blank, the second clamping plates 723 and the transmission rod 720 will not continue to move. So the connecting plate 716 moves towards the second clamping plates 723. At this time, under the guidance of the guide wheel 722, the second clamping plates 723 can pull the first clamping plates 719 on both sides to move towards the middle at the same time through the traction rope 721 on the transmission rod 720, until the first clamping plates 719 on both sides contact the left and right sides of the aluminum alloy component blank. At this time, under the joint action of the second clamping plates 723 on both sides and each first clamping plate 719, the aluminum alloy component blank can be automatically and stably clamped, fixed and positioned in all directions.

[0058] To ensure that when the connecting plate 709 moves upward to its highest point and is flush with the adjusting plate 728, the second clamping plates 723 on both sides and each of the first clamping plates 719 can automatically and stably clamp, fix, and position the aluminum alloy component blank in all directions, the operator can place the aluminum alloy component blank sample in the third through slot 711 in advance. Then, the operator can rotate the threaded rod 727. During the threaded rotation of the threaded rod 727, combined with the limiting effect of the telescopic sleeve rods 729 hinged on both sides, the operator can push the adjusting plate 728 to move stably. Under the translation action of the adjusting plate 728, the telescopic sleeve rods 729 can be used to conveniently adjust the guide translation distance of the sliding rod 713 and the connecting plate 716, ensuring that the connected plate 716 after movement can drive the second clamping plates 723 on both sides and each of the first clamping plates 719 to automatically and stably clamp, fix, and position the aluminum alloy component blank in all directions.

[0059] After the second clamping plates 723 on both sides and each of the first clamping plates 719 clamp, fix and position the aluminum alloy component blank in all directions, the connecting plate 709 moves from right to left, thereby driving the aluminum alloy component blank to move synchronously until the aluminum alloy component blank moves directly above the lower template 12. Then, the connecting plate 709, which has moved to the leftmost position, moves downward along the trajectory of the second guide groove 726. During the downward movement of the connecting plate 709, it can drive the bracket 714 to move and disengage from the adjusting plate 728 and the telescopic sleeve 729. At this time, the first spring 712 Under the elastic action of the sliding rod 713, the bracket 714 and the connecting plate 716 can be driven to move and reset, and then the second clamping plate 723 can be driven to move and reset through the transmission rod 720. At the same time, under the elastic action of the second spring 718, the first clamping plate 719 can be driven to move and reset. At this time, the second clamping plates 723 on both sides and each first clamping plate 719 can automatically move and reset, and then move and detach from the aluminum alloy component blank. At this time, the aluminum alloy component blank can automatically and stably fall into the middle part of the lower template 12 through the feeding groove 10.

[0060] Similarly, after the feeding operation is completed, under the continued rotation of the reciprocating screw 702, the connecting plate 709 moves from left to right to reset. Then, under the continued intermittent rotation of the turntable 613, the aluminum alloy component blank in the next transfer slot 614 can pass through the third through slot 711 on the connecting plate 709 and fall onto the fixed plate 4 for subsequent feeding operations.

[0061] When the aluminum alloy component blank falls into the lower template 12 and the connecting plate 709 moves and resets, the upper template 9 can be driven downward by the first hydraulic rod 8. In conjunction with the lower template 12, the forging process of the aluminum alloy component blank can be stably completed. After the aluminum alloy component blank is forged, the corresponding lower template 12 can be driven to move to the side simultaneously by driving the second hydraulic rods 11 on both sides to complete the mold opening. At this time, the forged aluminum alloy component can automatically fall onto the second guide frame 14 through the unloading groove 13. Under the inclined guiding action of the second guide frame 14, the automatic demolding and unloading work can be completed. Then, the second hydraulic rod 11 can be driven again to move the corresponding lower template 12 to the center simultaneously to reset, ensuring the stability of subsequent forging work.

[0062] Simultaneously, the lower mold plates 12 on both sides move to the sides. During the mold opening process, the lower mold plates 12 can squeeze and push the push rod 20. At this time, under the action of the push rod 20, the rubber piston 19 can be pushed into the first conveying pipe 21. Subsequently, as the rubber piston 19 continues to move, the lubricant in the first conveying pipe 21 can be pushed into the second conveying pipe 22. Then, the lubricant in the second conveying pipe 22 can be stably delivered to each atomizing nozzle 24 through the third conveying pipe 23. With the cooperation of the atomizing nozzles 24, the lower mold plates 12 can be automatically sprayed to complete the automatic lubrication treatment, thereby reducing the friction between the aluminum alloy component blank and the mold. The friction promotes a smooth forging process, which is especially important for semiconductor equipment components with complex shapes or high precision requirements. The lubricated mold can effectively reduce the friction between the aluminum alloy and the mold surface, thereby reducing the need for demolding force and further improving the stability of subsequent demolding work. When the lower mold plates 12 on both sides move to the middle and reset, they can move away from the push rod 20. At this time, under the elastic action of the third spring 18, the rubber piston 19 can be driven to move and reset and disengage from the first delivery pipe 21. At this time, the lubricating liquid in the storage tank 15 can automatically enter the first delivery pipe 21, waiting for subsequent delivery work.

[0063] Although the present invention has been described above with reference to embodiments, various modifications can be made and components can be replaced with equivalents without departing from the scope of the invention. In particular, as long as there is no structural conflict, the features in the disclosed embodiments can be combined with each other in any manner. The lack of an exhaustive description of these combinations in this specification is merely for the sake of brevity and resource conservation. Therefore, the present invention is not limited to the specific embodiments disclosed herein, but includes all technical solutions falling within the scope of the claims.

Claims

1. A positioning-based forging equipment for aluminum alloy components in semiconductor devices, comprising a base plate (1), characterized in that: A fixed seat (2) and a second guide frame (14) are welded and fixed on the bottom end face of the base plate (1). A support rod (3) is welded and fixed on the top end face of the base plate (1). A fixed plate (4) is welded and fixed on the support rod (3). A top plate (5) is welded and fixed on the top end of the support rod (3). A pretreatment component (6) is installed on the top plate (5). A self-positioning feeding component (7) is installed on the fixed plate (4). A first hydraulic rod (8) is installed and fixed on the top plate (5). An upper template (9) is fixedly connected to the bottom end of the first hydraulic rod (8). A feed groove (10) is opened through the fixed plate (4). A second hydraulic rod (11) is installed and fixed on the base plate (1). The end of the second hydraulic rod (11) A lower template (12) is fixedly connected to the bottom plate (1). A feeding trough (13) is opened through the bottom plate (1). A liquid storage tank (15) is welded and fixed to the side end face of the fixed plate (4). An inlet pipe (16) is connected to the top of the liquid storage tank (15). A sealing ring (17) is fixedly connected to the bottom side end of the liquid storage tank (15). A third spring (18) is welded and fixed to the inner side end face of the liquid storage tank (15). A rubber piston (19) is fixedly connected to the other end of the third spring (18). A push rod (20) is fixedly connected to the rubber piston (19). The push rod (20) is slidably connected through the sealing ring (17). A first conveying pipe (21) is fixedly connected to the inner bottom end face of the liquid storage tank (15). The end of the first conveying pipe (21) is connected to the second conveying pipe (22), the top of the second conveying pipe (22) is fixedly connected to the fixed plate (4), the end of the second conveying pipe (22) is connected to the third conveying pipe (23), and the bottom of the third conveying pipe (23) is equipped with an atomizing nozzle (24). The self-positioning feeding assembly (7) includes a first mounting plate (701) and a second mounting plate (725). The first mounting plate (701) and the second mounting plate (725) are both welded and fixed to the top surface of the fixed plate (4). A reciprocating screw (702) is rotatably connected to the first mounting plate (701). The reciprocating screw (702) is symmetrically distributed on both sides of the top of the fixed plate (4). The reciprocating screw (702) on one side is... The first mounting plate (701) is connected to the output end of the second servo motor (704), which is welded and fixed on the first mounting plate (701). The end of the reciprocating screw (702) is connected to a transmission belt (703). A sliding plate (705) is threaded onto the reciprocating screw (702). A first guide groove (706) is provided through the sliding plate (705). A first guide rod (707) is slidably connected in the first guide groove (706). A second guide rod (708) is welded and fixed to the end of the first guide rod (707). A second guide groove (726) is provided through the second mounting plate (725). A connecting plate (709) is welded and fixed to the end of the second guide rod (708).The connecting plate (709) has a first sliding groove (710) and a third through groove (711) through it. The first sliding groove (710) and the third through groove (711) are connected. A first spring (712) is welded and fixed to the inner side surface of the first sliding groove (710). A sliding rod (713) is welded and fixed to the other end of the first spring (712). The sliding rod (713) is limited and slidably connected in the first sliding groove (710). A bracket (714) is welded and fixed to the top of the sliding rod (713). A roller (715) is rotatably connected to the top of the bracket (714). A connecting plate (716) is welded and fixed to the bottom end of the sliding rod (713). A second sliding groove (717) is through it. A second spring (718) is welded and fixed to the inner side surface of the second sliding groove (717). A first spring (715) is welded and fixed to the other end of the second spring (718). A clamping plate (719) is provided. A transmission rod (720) is slidably connected through the connecting plate (716). One end of the transmission rod (720) is fixedly connected to a traction rope (721). The traction rope (721) is slidably connected to a guide wheel (722), which is mounted on the connecting plate (716). The end of the traction rope (721) is fixedly connected to the first clamping plate (719). The other end of the transmission rod (720) is welded and fixed to a second clamping plate (723). A third sliding groove (724) is provided through the second clamping plate (723). The first clamping plate (719) is slidably connected to the third sliding groove (724). A threaded rod (727) is threadedly connected to the top of the second mounting plate (725). An adjusting plate (728) is rotatably connected to the end of the threaded rod (727). A telescopic sleeve rod (729) is hinged to the bottom of the adjusting plate (728).

2. The forging equipment for aluminum alloy components for semiconductor devices based on positioning, as described in claim 1, is characterized in that: The pretreatment component (6) includes a first servo motor (601), which is mounted and fixed on the inner top surface of the top plate (5). A rotating rod (602) is welded and fixed to the output shaft of the first servo motor (601). A toggle rod (603) is welded and fixed to one end of the rotating rod (602), and a first limiting plate (604) is welded and fixed to the other end of the rotating rod (602). A heat insulation frame (605) is welded and fixed to the top plate (5). A rotating shaft (606) is rotatably connected inside the heat insulation frame (605). A rotating frame (607) is welded and fixed to the end of the rotating shaft (606). A limiting frame (608) and a second limiting plate (609) are welded and fixed on the inner side surface of the rotating frame (607). The side surface of the first limiting plate (604) and the side surface of the second limiting plate (609) are both arc-shaped. There are four limiting frames (608) and four second limiting plates (609). The four limiting frames (608) and four second limiting plates (609) are evenly distributed in the rotating frame (607). The four limiting frames (608) and four second limiting plates (609) are distributed alternately. The horizontal center line of the rotating shaft (606), the horizontal center line of the rotating frame (607) and the horizontal center line of the insulation frame (605) are located on the same horizontal line.

3. The forging equipment for aluminum alloy components for semiconductor devices based on positioning according to claim 2, characterized in that: The top side of the insulation frame (605) is provided with a first through groove (610), and a first guide frame (611) is welded and fixed on the top side surface of the insulation frame (605). The bottom of the insulation frame (605) is provided with a second through groove (612). A turntable (613) is rotatably connected inside the insulation frame (605). The turntable (613) is welded and fixed on the rotating shaft (606). A transfer groove (614) is provided on the turntable (613). An electric heating tube (615) is installed and fixed inside the turntable (613). The first guide frame (611) is inclined. The inner wall of the insulation frame (605) is in contact with the outer wall of the turntable (613). The rotating shaft (606) is fixed at the center of the turntable (613). There are four transfer slots (614). The four transfer slots (614) are distributed at equal angles on the turntable (613). The electric heating tubes (615) are distributed at equal angles inside the turntable (613).

4. The forging equipment for aluminum alloy components for semiconductor devices based on positioning according to claim 1, characterized in that: The second guide rod (708) is slidably connected in the second guide groove (726). The bottom surface of the sliding plate (705) is in contact with the top surface of the fixed plate (4). The first guide groove (706) is "V" shaped. The bottom height of the first guide groove (706) is the same as the bottom height of the second guide groove (726). The top height of the first guide groove (706) is the same as the top height of the second guide groove (726).

5. The forging equipment for aluminum alloy components for semiconductor devices based on positioning according to claim 1, characterized in that: The first clamping plate (719) is slidably connected in the second sliding groove (717). The third through groove (711) is opened in the middle part of the connecting plate (709). The first sliding groove (710) is symmetrically distributed on both sides of the connecting plate (709). The first sliding groove (710) corresponds one-to-one with the sliding rod (713). The sliding rod (713) is fixed in the middle part of the bottom of the bracket (714). The second sliding groove (717) is symmetrically distributed on both sides of the connecting plate (716). The second sliding groove (717) corresponds one-to-one with the first clamping plate (719) through the second spring (718).

6. The forging equipment for aluminum alloy components for semiconductor devices based on positioning according to claim 1, characterized in that: The bottom end of the telescopic sleeve (729) is hinged to the top side end face of the second mounting plate (725). The transmission rod (720) is connected to the center of the connecting plate (716). The first clamping plate (719) is connected to the guide wheel (722) one by one through the traction rope (721). The threaded rod (727) is connected to the middle part of the adjusting plate (728). The telescopic sleeve (729) is symmetrically distributed on both sides of the bottom of the adjusting plate (728).

7. The forging equipment for aluminum alloy components for semiconductor devices based on positioning according to claim 1, characterized in that: The second hydraulic rod (11) is symmetrically distributed on both sides of the base plate (1). The second hydraulic rod (11) corresponds one-to-one with the lower template (12). The bottom end face of the lower template (12) is in contact with the top end face of the base plate (1).

8. The forging equipment for aluminum alloy components for semiconductor devices based on positioning according to claim 1, characterized in that: The liquid storage tank (15) is symmetrically distributed on both sides of the fixed plate (4). The length and width of the rubber piston (19) are equal to the length and width of the internal space of the first delivery pipe (21), respectively. The push rod (20) is fixed at the middle part of the side end of the rubber piston (19).

9. The forging equipment for aluminum alloy components for semiconductor devices based on positioning according to claim 1, characterized in that: The second delivery pipe (22) is connected to the middle part of the side end of the third delivery pipe (23). The atomizing nozzles (24) are evenly distributed at the bottom of the third delivery pipe (23), and the bottom end face of the atomizing nozzles (24) is flush with the bottom end face of the fixing plate (4).

10. A positioning-based forging method for aluminum alloy components for semiconductor devices, employing the positioning-based forging equipment for aluminum alloy components for semiconductor devices as described in claim 1, characterized in that, Includes the following steps: S1: The pretreatment component (6) is used to separate and feed the aluminum alloy component blanks for semiconductor equipment and perform automatic heating treatment; S2: The aluminum alloy component blank after heat treatment is automatically transported to the middle part inside the lower template (12) through the self-positioning feeding component (7) to complete the automated positioning feeding work; S3: Drive the upper template (9) downward by the first hydraulic rod (8) to cooperate with the lower template (12) to complete the forging process of the aluminum alloy component blank; S4: The lower template (12) is driven to open the mold by the second hydraulic rod (11), and the automatic demolding and unloading work is completed in conjunction with the unloading groove (13) and the second guide frame (14); S5: During the mold opening process of the lower template (12), the rubber piston (19) can be pushed by the push rod (20). The lubricant in the storage tank (15) can be transported to the third conveying pipe (23) through the first conveying pipe (21) and the second conveying pipe (22). With the help of the atomizing nozzle (24), the lower template (12) can be automatically sprayed to complete the automatic lubrication process.

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