Energy-adjustable laser pulse surface treatment device

Abstract

The invention discloses an energy-adjustable laser pulse surface treatment device which comprises a box body, a rack, an optical bottom plate, a mechanical arm, a laser generating system, an energy adjusting system, a movement system and a water supply system. The mechanical arm is used for moving the position of laser output by the laser generation system, the movement system is used for driving a base material to move, and the water supply system is used for providing ultrapure water for the surface of the base material. The invention relates to the technical field of metal surface treatment, in particular to an energy-adjustable laser pulse surface treatment device. The technical problem to be solved by the invention is to provide the energy-adjustable laser pulse surface treatment device, which can improve the accuracy of laser energy regulation and control, improve the stability of laser pulse output and further improve the fatigue performance of metal materials.

Description

Technical Field

[0001] The invention relates to the technical field of metal surface treatment, in particular to an energy-adjustable laser pulse surface treatment device. Background Art

[0002] Fatigue of metal materials generally refers to the development of micro defects into micro cracks on a macro scale under cyclic loads. The cracks continue to develop, eventually leading to equipment structure failure or even overall failure. Fatigue failure of metal materials is the cumulative result of long-term damage. It lacks significant plastic deformation and is a sudden brittle failure during the destruction process. The accidents caused are very harmful and can easily cause major economic losses and casualties. Laser pulse surface treatment technology is a surface treatment technology that changes the properties of workpieces based on traditional technologies such as mechanical shot peening and sand blasting. It mainly uses high-power density nanosecond lasers to generate plasma, which bombards the surface of metal materials with explosions, generating residual compressive stress and microstructural changes such as lattice distortion, high-density dislocations, and surface nano-crystallization, thereby inhibiting the growth of cracks and improving fatigue performance.

[0003] In the process of laser pulse surface treatment, if the laser energy is too small, it is difficult to generate residual compressive stress on the metal surface, that is, it is difficult to improve fatigue performance. If the laser energy is too large, it is easy to cause thermal effects, causing the metal material surface to melt and produce tensile stress, which in turn reduces the fatigue performance of the material. In order to reduce the influence of thermal effects on metal materials, a sacrificial coating needs to be applied to the surface of the material.

[0004] For different metal materials, the laser energy needs to be adjusted according to actual requirements. At present, the laser energy is usually adjusted by adjusting the charging voltage of the pulse laser power supply, thereby changing the pulse output of the laser and implanting residual stress on the material surface.

[0005] With respect to the above technical solution, this adjustment method is likely to cause unstable laser pulse output, making the metal material susceptible to thermal effects and reducing the fatigue improvement effect. Summary of the invention

[0006] The technical problem to be solved by the present invention is to provide an energy-adjustable laser pulse surface treatment device, which can adjust the laser energy according to actual needs, improve the accuracy of laser energy regulation, improve the stability of laser pulse output, and thus improve the fatigue performance of metal materials.

[0007] The present invention adopts the following technical solutions to achieve the invention objectives: An energy-adjustable laser pulse surface treatment device comprises a box, a frame, an optical base plate, a mechanical arm, a laser generating system, an energy regulating system, and a motion system, wherein the laser generating system is arranged on the box, the energy regulating system is arranged on the laser generating system, the optical base plate is arranged on the frame, the mechanical arm and the motion system are both arranged on the optical base plate, and the motion system is used to drive the substrate to move; The laser generating system comprises a power supply, a light source module, a fiber coupler, an optical fiber, and a laser output end. The power supply is arranged on a housing and is electrically connected to the light source module. The light source module is arranged on the housing and is used to emit nanosecond laser. The fiber coupler is arranged on the housing and is used to integrate the nanosecond laser and transmit it to the optical fiber. The laser output end is arranged on a mechanical arm. The optical fiber is used to transmit the laser to the laser output end along a predetermined trajectory. The energy regulating system comprises a cylinder, a first polarizer, a second polarizer, a half-wave plate, and a motor. The input end of the cylinder is connected to the output end of the light source module, and the output end of the cylinder is connected to the input end of the fiber coupler. The first polarizer, the motor, and the second polarizer are sequentially arranged in the cylinder along the direction from the input end to the output end of the cylinder. The half-wave plate is connected to the output end of the motor. The cylinder, the first polarizer, the second polarizer, and the half-wave plate are coaxially arranged.

[0008] As a further limitation of the present technical solution, the energy regulation system also includes a sacrificial well, which is arranged on the inner circumference of the cylinder and surrounds the outside of the first polarizer and the second polarizer, and a light-absorbing coating is arranged on the inner circumference of the sacrificial well.

[0009] As a further limitation of the technical solution, the inner circumference of the sacrificial well is serrated.

[0010] As a further limitation of the present technical solution, the energy regulation system also includes a correction mechanism, which includes a controller, a first laser sensor, and a second laser sensor. Two through holes are provided on the cylinder and the sacrificial well. The first laser sensor and the second laser sensor are respectively arranged at the through holes on the outer peripheral surface of the cylinder. The controller is arranged on the box body, and the controller is electrically connected to the first laser sensor, the second laser sensor, the motor, and the light source module.

[0011] As a further limitation of the present technical solution, the energy regulation system also includes an output isolator, which is arranged on the cylinder and connected to the inside of the cylinder. The output isolator is located between the second polarizer and the optical fiber coupler and is used to block reflected laser.

[0012] As a further limitation of the present technical solution, it also includes a water supply system, which includes an ultrapure water machine and a nozzle. The ultrapure water machine is arranged on a frame, and the nozzle is arranged at one end of the robotic arm close to the laser output end. The output end of the ultrapure water machine is connected to the input end of the nozzle.

[0013] As a further limitation of the present technical solution, a drainage hole is provided on the optical bottom plate for discharging ultrapure water.

[0014] As a further limitation of the technical solution, a dust cover is provided on the box body, and the dust cover is provided on the cylinder body.

[0015] As a further limitation of the technical solution, a frame assembly is arranged on the rack, and the frame assembly is covered on the optical base plate, the mechanical arm and the motion system.

[0016] As a further limitation of the present technical solution, the motion system includes a mobile clamp device, a three-jaw chuck clamping device, and a slide rail, wherein the slide rail is arranged on the optical base plate, and the mobile clamp device and the three-jaw chuck clamping device are slidably arranged on the slide rail, and the mobile clamp device and the three-jaw chuck clamping device are used to clamp the substrate, and the slide rail is used to adjust the horizontal distance between the mobile clamp device and the three-jaw chuck clamping device.

[0017] Compared with the prior art, the advantages and positive effects of the present invention are: 1. The motor is used to drive the half-wave plate to rotate. The laser forms polarized laser after passing through the first polarizer. The polarized laser undergoes birefringence through the half-wave plate, which prevents the laser from passing through the second polarizer completely, resulting in energy attenuation. The laser energy can be precisely controlled. The laser energy can be adjusted according to actual needs, the accuracy of laser energy control is improved, the stability of laser pulse output is improved, and the fatigue performance of metal materials is improved. There is no need to add a sacrificial coating on the surface of the metal substrate, which makes it difficult for impurities to be introduced into the surface of the metal substrate. The laser is more practical, has higher processing efficiency, and reduces labor intensity.

[0018] 2. By absorbing the scattered polarized laser through the sacrificial well, it is helpful to reduce the damage caused by the polarized laser and the laser reflected by the cylinder to the half-wave plate, the first polarizer, the second polarizer and the cylinder, thereby increasing the service life of the equipment and improving the stability of the laser pulse output.

[0019] 3. The output isolator is helpful to block the nanosecond laser reflection at the fiber coupler, thereby reducing the probability of damage to the half-wave plate, the first polarizer, and the second polarizer, and increasing the service life of the equipment. At the same time, it is helpful to reduce the interference of the reflected laser on the first laser sensor and the second laser sensor during calibration of the calibration system, reduce the measurement error of the sensor, and further improve the accuracy of energy regulation.

[0020] 4. During use, the initial position of the half-wave plate can be regularly corrected, and the half-wave plate can be driven by a motor to rotate multiple times, so that the polarized laser refracted by the half-wave plate is irradiated on the first laser sensor and the second laser sensor through the through holes on the cylinder and the sacrificial well respectively. The first laser sensor, the second laser sensor, the light source module and the motor transmit signals to the controller, and the controller is used to analyze the rotation angle of the half-wave plate driven by the motor and the output power of the light source module, and then the initial state of the motor and the initial angle of the half-wave plate are corrected, so as to further improve the accuracy of laser energy regulation, thereby effectively improving the fatigue performance of metal materials and improving the reliability of the device. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] The drawings described herein are used to provide a further understanding of the present application and constitute a part of the present application. The illustrative embodiments of the present application and their descriptions are used to explain the present application and do not constitute an improper limitation on the present application. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work. In the drawings: Figure 1 It is a schematic diagram of the overall structure of the present invention; Figure 2 A schematic diagram of a part of the energy regulation system of the present invention Figure 1 ; Figure 3 A schematic diagram of a part of the energy regulation system of the present invention Figure 2 ; Figure 4 It is a partial structural schematic diagram of the motion system of the present invention.

[0022] In the figure: 1. box body; 11. dust cover; 2. rack; 21. optical base plate; 211. drainage hole; 22. frame assembly; 3. robotic arm; 4. laser generating system; 41. power supply; 42. light source module; 43. fiber coupler; 44. optical fiber; 45. laser output end; 5. energy regulation system; 51. cylinder; 52. first polarizer; 53. second polarizer; 54. half-wave plate; 55. motor; 56. sacrificial well; 57. correction mechanism; 571. controller; 572. first laser sensor; 573. second laser sensor; 58. output isolator; 6. motion system; 61. mobile fixture device; 62. three-jaw chuck clamping device; 63. slide rail; 7. water supply system; 71. ultrapure water machine; 72. nozzle. DETAILED DESCRIPTION

[0023] The following will be combined with the attached embodiment of the present invention Figure 1-Figure 4, the technical solutions in the embodiments of the present invention are clearly and completely described. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0024] It should be noted that the directional terms such as left, right, up, down, front and back in the embodiments of the present invention are merely relative concepts or are based on the normal use state of the product, that is, the direction of movement of the product, and should not be considered as limiting.

[0025] When a component is referred to as being “located” or “disposed on” another component, it may be on the other component or there may be an intervening component. When a component is referred to as being “connected to” another component, it may be directly connected to the other component or there may be an intervening component.

[0026] Embodiment: An energy-adjustable laser pulse surface treatment device comprises a housing 1, a frame 2, an optical base plate 21, a robotic arm 3, a laser generating system 4, an energy regulating system 5, a motion system 6, and a water supply system 7, wherein the laser generating system 4 is arranged on the housing 1, the energy regulating system 5 is arranged on the laser generating system 4, the optical base plate 21 is fixedly connected to the frame 2 by bolts, the robotic arm 3 is fixedly connected to the optical base plate 21 by bolts, the robotic arm 3 is used to move the laser position output by the laser generating system 4, the motion system 6 is arranged on the optical base plate 21, the motion system 6 is used to drive the substrate to move, the water supply system 7 is used to provide ultrapure water to the surface of the substrate, and a frame assembly 22 is detachably connected to the frame 2, and the frame assembly 22 is covered on the optical base plate 21, the robotic arm 3 and the motion system 6.

[0027] The laser generating system 4 includes a power supply 41, a light source module 42, a fiber coupler 43, an optical fiber 44, and a laser output end 45. The power supply 41 is detachably connected to the housing 1 and is electrically connected to the light source module 42. The light source module 42 is fixedly connected to the housing 1 by bolts and is used to emit nanosecond laser. The fiber coupler 43 is fixedly connected to the housing 1 and is used to integrate the nanosecond laser and transmit it to the optical fiber 44. The laser output end 45 is fixedly connected to the robot arm 3 by bolts. The optical fiber 44 is used to transmit the laser to the laser output end 45 along a predetermined trajectory.

[0028] The energy regulation system 5 includes a cylinder 51, a first polarizer 52, a second polarizer 53, a half-wave plate 54, a motor 55, a sacrificial well 56, a correction mechanism 57, and an output isolator 58. The input end of the cylinder 51 is connected to the output end of the light source module 42, and the output end of the cylinder 51 is connected to the input end of the optical fiber coupler 43. The first polarizer 52, the motor 55, and the second polarizer 53 are fixedly connected in the cylinder 51 in sequence along the direction from the input end to the output end of the cylinder 51. The half-wave plate 54 and the motor 55 output end is connected, the motor 55 is used to drive the half-wave plate 54 to rotate, the cylinder 51, the first polarizing plate 52, the second polarizing plate 53, and the half-wave plate 54 are coaxially arranged, the sacrificial well 56 is fixedly connected to the inner circumference of the cylinder 51, and surrounds the outside of the first polarizing plate 52 and the second polarizing plate 53, the inner circumference of the sacrificial well 56 is coated with a light-absorbing coating, and the inner circumference of the sacrificial well 56 is serrated, and the box 1 is detachably connected with a dust cover 11, and the dust cover 11 is arranged on the cylinder 51; The correction mechanism 57 includes a controller 571, a first laser sensor 572, and a second laser sensor 573. Two through holes are provided on the cylinder 51 and the sacrificial well 56 and correspond to each other. The first laser sensor 572 and the second laser sensor 573 are respectively fixedly connected to the through holes on the outer peripheral surface of the cylinder 51. The controller 571 is placed on the box 1. The controller 571 is electrically connected to the first laser sensor 572, the second laser sensor 573, the motor 55, and the light source module 42. The output isolator 58 is sleeved on the cylinder 51 and connected to the inside of the cylinder 51. The output isolator 58 is located between the second polarizer 53 and the optical fiber coupler 43 and is used to block reflected laser.

[0029] The water supply system 7 includes an ultrapure water machine 71 and a nozzle 72. The ultrapure water machine 71 is placed on the frame 2. The nozzle 72 is fixedly connected to one end of the robotic arm 3 close to the laser output end 45 by bolts. The output end of the ultrapure water machine 71 is connected to the input end of the nozzle 72. A drainage hole 211 is provided on the optical base plate 21 for discharging ultrapure water. The motion system 6 includes a mobile clamp device 61, a three-jaw chuck clamping device 62, and a slide rail 63. The slide rail 63 is fixedly connected to the optical base plate 21 by bolts. The mobile clamp device 61 and the three-jaw chuck clamping device 62 are slidably connected to the slide rail 63. The mobile clamp device 61 and the three-jaw chuck clamping device 62 are used to clamp the substrate. The slide rail 63 is used to adjust the horizontal distance between the mobile clamp device 61 and the three-jaw chuck clamping device 62.

[0030] The working principle of this embodiment is: When in use, substrates of different shapes are clamped by the mobile clamping device 61 or the three-jaw chuck clamping device 62, and the position of the mobile clamping device 61 or the three-jaw chuck clamping device 62 is adjusted by the slide rail 63, thereby moving the position of the substrate, and the power supply 41 supplies power to the light source module 42, and the light source module 42 emits nanosecond laser, the first polarizer 52 serves as a polarizer, the second polarizer 53 serves as an analyzer, and the motor 55 drives the half-wave plate 54 to rotate. The laser is polarized by the first polarizer 52 to form a polarized laser, and then birefringence is generated by the half-wave plate 54. At this time, the polarization direction of the polarized laser rotates, so that the laser beam cannot pass through the second polarizer 53 completely, resulting in energy attenuation. The scattered polarized laser is absorbed by the sacrificial well 56, which is beneficial to reduce the damage caused by the polarized laser and the laser reflected by the cylinder 51 to the half-wave plate 54, the first polarizer 52, the second polarizer 53 and the cylinder 51, thereby improving the service life of the equipment; The attenuated laser reaches the output isolator 58 after passing through the second polarizer 53. The laser output from the output isolator 58 is then transmitted to the optical fiber 44 through the optical fiber coupler 43, and is introduced into the laser output end 45 on the robot 3 by the optical fiber 44, so as to perform laser pulse surface treatment on the surface of the substrate. The ultrapure water machine 71 supplies water to the nozzle 72, and the nozzle 72 provides ultrapure water to the surface of the substrate, so that a certain amount of ultrapure water serves as a constraint layer, thereby increasing the shock wave pressure and promoting the laser shock wave to propagate into the inside of the substrate. Excess water is discharged from the drainage hole 211. The output isolator 58 is conducive to blocking the nanosecond laser reflection at the optical fiber coupler 43, thereby reducing the probability of damage to the half-wave plate 54, the first polarizer 52, and the second polarizer 53, thereby increasing the service life of the equipment. With such an arrangement, the motor 55 is used to drive the half-wave plate 54 to rotate around its normal at a predetermined angle, so as to accurately control the laser energy. The laser energy can be adjusted according to actual needs, thereby improving the accuracy of laser energy control, improving the stability of laser pulse output, and thus improving the fatigue performance of metal materials. There is no need to add a sacrificial coating on the surface of the metal substrate, making it difficult for impurities to be introduced onto the surface of the metal substrate. The laser substrate has better practicality, higher processing efficiency, and reduced labor intensity.

[0031] During use, the initial position of the half-wave plate 54 can be regularly corrected, and the motor 55 can be used to drive the half-wave plate 54 to rotate multiple times, so that the polarized laser refracted by the half-wave plate 54 is irradiated on the first laser sensor 572 and the second laser sensor 573 through the through holes on the cylinder 51 and the sacrificial well 56. The first laser sensor 572, the second laser sensor 573, the light source module 42 and the motor 55 transmit signals to the controller 571, and the controller 571 is used to analyze the rotation angle of the half-wave plate 54 driven by the motor 55 and the output power of the light source module 42, and then the initial state of the motor 55 and the initial angle of the half-wave plate 54 are corrected, so as to further improve the accuracy of laser energy regulation, thereby effectively improving the fatigue performance of metal materials and improving the reliability of the device.

[0032] The dust cover 11 is used to protect the energy regulation system 5 and reduce the probability of dust or particulate matter entering the cylinder 51 and the output isolator 58. The frame assembly 22 is covered on the optical base plate 21, the robotic arm 3 and the motion system 6 to prevent dust and reduce the impact of external vibration on laser shock strengthening, thereby improving the reliability of the device.

[0033] The substrate can be clamped on the movable clamp device 61, and the height of the substrate can be adjusted as needed. If the substrate is long, one end of the substrate can be clamped on the movable clamp device 61, and the distance between the three-jaw chuck clamping device 62 and the movable clamping device 61 can be adjusted using the slide rail 63 according to the length of the substrate, and the other end can be fixed on the three-jaw chuck clamping device 62, thereby improving the stability of substrate clamping.

[0034] The above disclosure is only a specific embodiment of the present invention, but the present invention is not limited thereto, and any changes that can be conceived by those skilled in the art should fall within the protection scope of the present invention.

Claims

1. An energy-adjustable laser pulse surface treatment device, characterized in that: The invention comprises a housing (1), a frame (2), an optical base plate (21), a mechanical arm (3), a laser generating system (4), an energy regulating system (5), and a motion system (6), wherein the laser generating system (4) is arranged on the housing (1), the energy regulating system (5) is arranged on the laser generating system (4), the optical base plate (21) is arranged on the frame (2), the mechanical arm (3) and the motion system (6) are both arranged on the optical base plate (21), and the motion system (6) is used to drive the substrate to move; The laser generating system (4) comprises a power supply (41), a light source module (42), a fiber coupler (43), an optical fiber (44), and a laser output end (45); the power supply (41) is arranged on the housing (1) and is electrically connected to the light source module (42); the light source module (42) is arranged on the housing (1) and is used to emit nanosecond laser light; the fiber coupler (43) is arranged on the housing (1) and is used to integrate the nanosecond laser light and transmit it to the optical fiber (44); the laser output end (45) is arranged on the mechanical arm (3); the optical fiber (44) is used to transmit the laser light to the laser output end (45) along a predetermined trajectory; and the energy regulating system (5) The invention comprises a cylinder (51), a first polarizing plate (52), a second polarizing plate (53), a half-wave plate (54), and a motor (55); the input end of the cylinder (51) is connected to the output end of a light source module (42); the output end of the cylinder (51) is connected to the input end of an optical fiber coupler (43); the first polarizing plate (52), the motor (55), and the second polarizing plate (53) are sequentially arranged in the cylinder (51) along a direction from the input end to the output end of the cylinder (51); the half-wave plate (54) is connected to the output end of the motor (55); and the cylinder (51), the first polarizing plate (52), the second polarizing plate (53), and the half-wave plate (54) are coaxially arranged.

2. The energy-adjustable laser pulse surface treatment device according to claim 1, characterized in that: The energy regulation system (5) further comprises a sacrificial well (56), wherein the sacrificial well (56) is arranged on the inner circumference of the cylinder (51) and surrounds the outside of the first polarizer (52) and the second polarizer (53), and the inner circumference of the sacrificial well (56) is coated with a light absorbing coating.

3. The energy-adjustable laser pulse surface treatment device according to claim 2, characterized in that: The inner peripheral surface of the sacrificial well (56) is sawtooth-shaped.

4. The energy-adjustable laser pulse surface treatment device according to claim 2, characterized in that: The energy regulation system (5) further comprises a correction mechanism (57), the correction mechanism (57) comprising a controller (571), a first laser sensor (572), and a second laser sensor (573); the cylinder (51) and the sacrificial well (56) are each provided with two through holes; the first laser sensor (572) and the second laser sensor (573) are respectively arranged at the through holes on the outer peripheral surface of the cylinder (51); the controller (571) is arranged on the housing (1); the controller (571) is electrically signal-connected to the first laser sensor (572), the second laser sensor (573), the motor (55), and the light source module (42).

5. The energy-adjustable laser pulse surface treatment device according to claim 4, characterized in that: The energy regulation system (5) further comprises an output isolator (58), wherein the output isolator (58) is arranged on the cylinder (51) and is in communication with the interior of the cylinder (51); the output isolator (58) is located between the second polarizer (53) and the optical fiber coupler (43), and is used to block reflected laser light.

6. The energy-adjustable laser pulse surface treatment device according to claim 1, characterized in that: It also includes a water supply system (7), the water supply system (7) including an ultrapure water machine (71) and a nozzle (72), the ultrapure water machine (71) being arranged on the frame (2), the nozzle (72) being arranged at one end of the mechanical arm (3) close to the laser output end (45), and the output end of the ultrapure water machine (71) being connected to the input end of the nozzle (72).

7. The energy-adjustable laser pulse surface treatment device according to claim 6, characterized in that: The optical bottom plate (21) is provided with a drainage hole (211) for draining ultrapure water.

8. The energy-adjustable laser pulse surface treatment device according to claim 1, characterized in that: The box body (1) is provided with a dust cover (11), and the dust cover (11) is provided on the cylinder body (51).

9. The energy-adjustable laser pulse surface treatment device according to claim 1, characterized in that: A frame assembly (22) is arranged on the frame (2), and the frame assembly (22) is covered on the optical base plate (21), the mechanical arm (3) and the motion system (6).

10. The energy-adjustable laser pulse surface treatment device according to claim 1, characterized in that: The motion system (6) comprises a mobile clamping device (61), a three-jaw chuck clamping device (62), and a slide rail (63); the slide rail (63) is arranged on the optical base plate (21); the mobile clamping device (61) and the three-jaw chuck clamping device (62) are slidably arranged on the slide rail (63); the mobile clamping device (61) and the three-jaw chuck clamping device (62) are used to clamp a substrate; and the slide rail (63) is used to adjust the horizontal distance between the mobile clamping device (61) and the three-jaw chuck clamping device (62).

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