Control method of slice unitization production line, medium and computer equipment

Abstract

The invention relates to the technical field of linear cutting, and particularly provides a control method of a slicing unitization production line, a computer readable storage medium and computer equipment. A production line main body of the slicing unitization production line comprises a transfer mechanism, a connection tool and a plurality of slicing machines; the transfer mechanism comprises a sky rail robot, a truss manipulator and two transfer tables. The control method comprises the steps that a current slicing task is obtained; according to the current slicing task, selecting a slicing machine executing the current slicing task from the plurality of slicing machines; the sky rail robot drives one transfer table to operate and / or the truss manipulator is matched with one transfer table to operate, so that the workpiece is conveyed to / moved out of the position matched with the slicing machine; and the connecting tool and the sky rail robot operate in a matched mode so that the workpiece can be conveyed to / moved out of the cutting area. By means of the structure, the requirement for larger-scale slicing production is expected to be met in the mode that multiple machines conduct slicing at the same time.

Description

Technical Field

[0001] The present invention relates to the field of wire cutting technology, and specifically provides a control method for a slicing unit production line, a computer-readable storage medium, and a computer device. Background Art

[0002] Taking the workpiece to be processed (hard and brittle material) as a silicon rod as an example, the equipment for processing it usually includes a cutter for cutting the rod material (round rod) according to length specifications, a squarer for cutting round rods of a certain length into square rods, a grinder for grinding the square rod (grinding surface and chamfer) (such as usually including rough grinding and fine grinding), and a slicer for slicing the square rod that meets the accuracy standard after grinding. The working principle of the slicer is as follows: after the square rod is bonded to the wafer support, the square rod is sliced ​​by the wire mesh of the cutting machine in the manner of wire saw cutting (the silicon rod is fed toward the wire mesh, and the wire mesh reciprocates between adjacent cutting rollers) to produce silicon wafers (such as silicon wafers). Each complete slicing operation of the wire mesh is called a one-knife cutting operation of the slicer.

[0003] Taking slicing as an example, the slicing operation of existing slicers is concentrated near the slicing station, and each cutting operation is a stand-alone operation for a single silicon rod. Since each cutting operation usually includes dozens of operation steps and is usually completed by one or two operators, this processing method often has the following problems: the operation of the slicer requires high professionalism and proficiency of the operator, and the large number of steps makes it easy for the operator to make mistakes. Once the operator makes a mistake, it may cause different degrees of cutting abnormalities.

[0004] Taking the photovoltaic industry, one of the application fields of silicon wafers, as an example, with the rapid development of the photovoltaic industry, there will inevitably be a demand for continuous expansion of the aforementioned silicon wafer processing chain including slicing operations. As mentioned earlier, this will lead to a continuous increase in the gap in operators, which already exists. Therefore, stand-alone products (slicers) corresponding to single-machine operations have gradually been unable to meet market demand. In view of this, after fully studying and analyzing the operation of the slicer, the inventor proposed a unitized structural framework that can realize the simultaneous operation of multiple slicers. Accordingly, a group control logic for multiple slicers is needed to ensure the operational reliability of the unitized structural framework. Summary of the invention

[0005] The present invention aims to provide a group control logic corresponding to a production line capable of realizing a slicing unitization operation completed by multiple slicing machines.

[0006] In a first aspect, the present invention provides a control method for a slicing unitized production line, wherein the slicing unitized production line includes a production line main body, the production line main body is equipped with a loading component and a unloading component and includes a transfer mechanism, a connecting tool and a plurality of slicers, the transfer mechanism includes an overhead rail robot, a truss manipulator, and two transfer tables respectively arranged in a loading area corresponding to the loading component and in a unloading area corresponding to the unloading component, one of the loading area and the unloading area is equipped with the truss manipulator and can move in the loading area or the unloading area corresponding thereto, the overhead rail robot can move between the loading area corresponding to the loading component and the unloading area corresponding to the unloading component and can move in a non-configured The truss manipulator moves in the loading area or the unloading area, and the control method includes: obtaining a current slicing task; selecting at least one slicer that executes the current slicing task from the multiple slicers according to the current slicing task; enabling the overhead rail robot to drive the turntable in the loading area or the unloading area that is not equipped with the truss manipulator to operate and / or enabling the truss manipulator to cooperate with the turntable in the loading area or the unloading area that is equipped with the truss manipulator to operate, so as to: deliver / move the workpiece placed on the corresponding turntable to / from a position compatible with the at least one slicer; enabling the connection tooling and the overhead rail robot to operate in cooperation, so as to: deliver / move the workpiece to / from the cutting area of ​​the slicer.

[0007] Through such a configuration, it is possible to select a suitable single machine to complete the current slicing task when the production line includes multiple single slicers. Based on this, it is expected that the slicing production needs of a larger scale can be met by slicing multiple machines at the same time.

[0008] It is understandable that those skilled in the art can determine the type of the current slicing task based on actual conditions, such as including but not limited to: the current slicing task may include slicing operations for one or more workpieces. When the workpiece includes multiple workpieces, there are differences such as processing priority between at least parts of different workpieces. In addition, the workpiece may include restrictions such as processing completion time.

[0009] It is understandable that those skilled in the art can determine the number of at least one slicer selected from a plurality of slicers and the specific selection logic according to actual conditions. For example, the slicer may include one or more slicers, and the selection method may be random selection, sequential selection, or comprehensive consideration and selection based on reference factors such as the priority of the device, the operating status of the device, and the fault status of the device. For example, a pair of adjacent single machines are selected to perform slicing operations on two silicon rods respectively.

[0010] It is understandable that those skilled in the art can choose to deliver the unprocessed workpiece to the position compatible with the slicer and remove the sliced ​​workpiece from the position corresponding to the slicer through the cooperation of the overhead rail robot itself or other mechanisms (such as but not limited to its cooperation with the turntable and truss manipulator mentioned in the embodiment, etc.) according to actual conditions. Obviously, those skilled in the art can flexibly determine the two positions according to actual conditions, and the two positions can be the same or different.

[0011] It can be understood that those skilled in the art can determine the structural form of the connecting tooling and its specific mode of cooperation with the overhead rail robot in realizing the task of delivering / removing the workpiece according to actual conditions. For example, the connecting tooling can be a single component or a combination of several components. In the process of realizing the task of delivering / removing the workpiece, the connecting tooling can include not only movements that can be realized by cooperation with the overhead rail robot, but also movements that can be realized independently and movements that can be realized by cooperation with other separate motion mechanisms.

[0012] It is understandable that those skilled in the art can determine the specific structure of the two transfer tables according to actual needs, the specific implementation method of the two transfer tables to achieve the movement together with or independently of the overhead rail robot or the truss manipulator, etc. For example, the structures of the two transfer tables can be the same or different. For example, if a truss manipulator is configured in the unloading area, the transfer table corresponding to the unloading area and the truss manipulator can move relatively independently, or can be fixedly connected to the truss manipulator / overhead rail robot in a detachable manner and thus can move together with the truss manipulator / overhead rail robot (linkage), and can also switch between the two forms of movement.

[0013] For the control method of the above-mentioned slicing unit production line, in a possible implementation manner, the "determining at least one slicer from the multiple slicers to execute the current slicing task based on the current slicing task" includes: selecting multiple created slicing tasks as the current slicing task; determining whether the multiple created slicing tasks can be performed simultaneously; if so, determining multiple slicers from the multiple slicers to execute the current slicing task.

[0014] Through such a structure, it is possible to realize the team-based execution of multiple slicing tasks through group control.

[0015] It is understandable that a technician in this field can choose the composition method of the current slicing task according to the actual situation. Taking the selected created slicing tasks including two as an example, the two tasks with the earliest creation time, the two tasks with the highest priority, the two tasks that must be performed simultaneously, and the two tasks that must be completed in the same time period can be selected from the created tasks.

[0016] For the control method of the above-mentioned slicing unit production line, in a possible implementation manner, the "determining whether multiple created slicing tasks can be performed simultaneously" includes: if not, reselecting the current slicing task or taking at least one of the selected multiple created slicing tasks as the current slicing task; determining a slicer from the multiple slicers to execute the current slicing task.

[0017] Through such a structure, it is possible to make reasonable changes to the current slicing task through group control to ensure the sustainability of the slicing operation. For example, the selected multiple created slicing tasks include A and B. When the storage space of the slicing unit production line cannot meet the simultaneous execution of A and B, A and B can be replaced with A and C (or D and B, E and F, etc.) to re-judge whether simultaneous execution is met, or only one of A and B is executed as the current slicing task first, and then the B task can be executed when the conditions are met.

[0018] For the control method of the above-mentioned slicing unit production line, in a possible implementation manner, the "determining the slicer that executes the current slicing task from the multiple slicers" includes: during the slicing operation of the slicer, judging whether the remaining cutting time is less than the estimated material calling time; if so, allowing the slicer to be determined as the slicer that executes the current slicing task.

[0019] This structure can ensure the continuity of the operation of a single machine in the group control logic.

[0020] It is understandable that those skilled in the art can flexibly set the length of the pre-call time according to actual needs.

[0021] For the control method of the above-mentioned slicing unit production line, in a possible implementation manner, the "determining the slicer that executes the current slicing task from the multiple slicers" includes: during the slicing operation of the slicer, judging whether the slicer sends a retract signal; if so, allowing the slicer to be determined as the slicer that executes the current slicing task.

[0022] This configuration can improve the utilization rate of a single machine in group control logic.

[0023] Taking the silicon rod as the workpiece as an example, after the slicing operation is completed, the workpiece is in the form of a silicon wafer mounted on a wafer support. At this point, the feed mechanism needs to retract the tool first, and then the workpiece is moved out of the cutting chamber of the slicer. After that, the slicer can be considered as restricted, that is, configured to complete other slicing tasks. For example, the created slicing task can be a complete slicing task (including material collection, loading, unloading, and unloading), or it can only include part of it (such as only loading and unloading, etc.).

[0024] For the control method of the above-mentioned slicing unit production line, in a possible implementation manner, the connecting tool includes a first movable part, and the first movable part is provided with at least one docking structure. The "cooperation of the connecting tool and the overhead rail robot so as to: deliver the workpiece to / move it out of the cutting area of ​​the slicer" includes: fixing the docking structure to the workpiece, and moving the first movable part in a direction approaching / moving away from the cutting chamber of the slicer, so as to deliver the workpiece to / move it out of the cutting area of ​​the slicer.

[0025] Through such a configuration, a possible implementation method is provided for enabling the workpiece to move between the target position and the cutting position within the projection plane of the horizontal plane by means of the engaging tool.

[0026] With respect to the control method of the above-mentioned slicing unit production line, in one possible implementation, the workpiece is mounted on a wafer support, and in the step of "fixing the docking structure to the workpiece, and causing the first movable part to move in a direction approaching / away from a cutting chamber of the slicer, thereby delivering the workpiece to / moving it out of the cutting area of ​​the slicer", the "fixing the docking structure to the workpiece" includes: causing the docking structure to cooperate with the wafer support and thereby fixing the docking structure to the workpiece.

[0027] Through such a structure, a possible implementation method of fixing the connection tool including the first movable part to the workpiece is provided.

[0028] Regarding the control method of the above-mentioned slicing unit production line, in a possible implementation manner, the crystal support includes an operating end, and the "making the docking structure cooperate with the crystal support and thereby making the docking structure fixedly connected to the workpiece" includes: making the overhead rail robot drive the docking structure to move downward and extend into the operating end, thereby cooperating with the crystal support and thereby making the docking structure fixedly connected to the workpiece.

[0029] Through such a structure, a specific implementation method of fixing is provided.

[0030] Regarding the control method of the above-mentioned slicing unit production line, in a possible implementation manner, the first movable part is a strip structure, and a plurality of the docking structures are arranged on the strip structure along its length direction, and the "making the docking structure cooperate with the crystal support and thereby making the docking structure fixedly connected to the workpiece" includes: making the first movable part move in a direction approaching / moving away from the cutting chamber of the slicer, so that one of the plurality of docking structures cooperates with the crystal support.

[0031] Through such a structure, it is possible to achieve loading or unloading operations that are compatible with the docking structures at different positions.

[0032] For the control method of the above-mentioned slicing unit production line, in a possible implementation manner, the docking tooling includes a first driving component. In the step of "fixing the docking structure to the workpiece and causing the first movable part to move in a direction approaching / away from a cutting chamber of the slicer, thereby delivering the workpiece to / from a cutting area of ​​the slicer", the "causing the first movable part to move in a direction approaching / away from the cutting chamber of the slicer" includes: causing the first driving component to drive the first movable part to move in a manner approaching / away from the cutting chamber of the slicer.

[0033] Through such a configuration, a possible way for the first movable part to realize its movement is given. For example, those skilled in the art can select the form of the first driving component and the specific way of driving the first movable part to move according to actual conditions. For example, the first driving component can be a power cylinder, a linear module, etc. and directly drive connected to the first movable part, or it can be a combination of a motor and a transmission mechanism such as a screw nut mechanism / gear rack mechanism, etc., and thus indirectly drive connected to the first movable part through the transmission mechanism.

[0034] For the control method of the above-mentioned slicing unit production line, in a possible implementation manner, the docking tooling includes a carrying part, and in the step of "fixing the docking structure to the workpiece, and causing the first movable part to move in a direction approaching / away from a cutting chamber of the slicer, thereby delivering the workpiece to / from a cutting area of ​​the slicer", the "causing the first movable part to move in a direction approaching / away from a cutting chamber of the slicer" includes: when the workpiece is carried on the carrying part, the carrying part and the workpiece move with the movement of the first movable part.

[0035] Through such a structure, a possible implementation method for matching the workpiece with the connecting tool is provided.

[0036] For the control method of the above-mentioned slicing unit production line, in a possible implementation manner, the carrying part includes a second movable part, the second movable part includes a first part and a second part, and in the step of "when the workpiece is carried on the carrying part, the carrying part and the workpiece move with the movement of the first movable part", the "carrying the workpiece on the carrying part" includes: causing the first part and the second part to generate relative movement in a direction of approaching / moving away from each other so as to clamp / loosen the workpiece.

[0037] Regarding the control method of the above-mentioned slicing unit production line, in a possible implementation manner, the connecting tooling includes a second driving component, and the "causing the first part and the second part to generate a relative movement in a direction approaching / moving away from each other to clamp / relax the workpiece" includes: causing the second driving component to drive the first part and / or the second part to move, thereby causing the first part and the second part to generate a relative movement in a direction approaching / moving away from each other to clamp / relax the workpiece.

[0038] Through such a configuration, a possible implementation method for the second movable part to hold the workpiece tightly is provided. Similar to the aforementioned first driving part, the second driving part can be a power cylinder, a linear module, etc. and is directly connected to the first / second part by driving, or it can be a combination of a motor and a transmission mechanism such as a screw nut mechanism / gear rack mechanism, etc. and is indirectly connected to the first movable part by driving through the transmission mechanism.

[0039] For the control method of the above-mentioned slicing unit production line, in a possible implementation manner, the connecting tooling includes a screw-nut mechanism, the screw of the screw-nut mechanism has two thread segments with opposite rotation directions, and the "making the second driving component drive the first part and / or the second part to move" includes: making the second driving component drive the screw-nut mechanism and thereby make the first part and the second part matching the two thread segments with opposite rotation directions move in a manner of approaching / moving away from each other.

[0040] Through such a structure, a specific implementation method is provided for the workpiece to be held tightly by the second movable component.

[0041] For the control method of the above-mentioned slicing unit production line, in a possible implementation manner, the slicer can construct an avoidance space, and in the step of "making the overhead rail robot drive the turntable of the loading area or the unloading area that is not equipped with the truss manipulator to operate, and making the truss manipulator cooperate with the turntable of the loading area or the unloading area equipped with the truss manipulator to operate, so as to: deliver / move the workpiece placed on the corresponding turntable to / from a position compatible with the at least one slicer", the workpiece in the position compatible with the at least one slicer can realize the loading operation and / or unloading operation for the cutting area of ​​the slicer through the avoidance space.

[0042] This configuration provides a possible form of adaptation.

[0043] Regarding the control method of the above-mentioned slicing unit production line, in a possible implementation, the slicer includes a liquid circuit portion and an electrical control portion, and the configuration of the liquid circuit portion and the electrical control portion enables the slicer to construct an avoidance space.

[0044] Through such a configuration, a possible construction method of the avoidance space is provided.

[0045] For the control method of the above-mentioned slicing unitized production line, in a possible implementation manner, the electric control part includes a first electric control cabinet and a second electric control cabinet, and the first electric control cabinet and the second electric control cabinet are centrally arranged or separately arranged, and the liquid circuit part includes a liquid circuit system, and the liquid circuit system includes a first liquid circuit unit and a second liquid circuit unit, and the first liquid circuit unit and the second liquid circuit unit are centrally arranged or separately arranged, and the construction method of the avoidance space includes: the first liquid circuit unit and the second liquid circuit unit are respectively arranged on both sides of the cutting room, and the first electric control cabinet and the second electric control cabinet are respectively arranged above the first liquid circuit unit and the second liquid circuit unit, so that: the avoidance space is formed between the first electric control cabinet and the second electric control cabinet; or the first liquid circuit unit and the second liquid circuit unit are centrally arranged to form a first component, and the first electric control cabinet and the second electric control cabinet are centrally arranged to form a first component. The first component and the second component are arranged in the middle to form a second component, and the first component and the second component are respectively placed on both sides of the cutting chamber to form the avoidance space therebetween; or the first liquid circuit unit and the second liquid circuit unit are centrally arranged to form a first component, and the first electric control cabinet and the second electric control cabinet are centrally arranged to form a second component, and the first component and the second component are longitudinally stacked and arranged on one side of the cutting chamber along the loading and unloading direction of the workpiece, and thus an open avoidance space is formed between the cutting chamber and the one side; or the first liquid circuit unit and the second liquid circuit unit are centrally arranged to form a first component, and the first electric control cabinet and the second electric control cabinet are centrally arranged to form a second component, and the first component is arranged on one side of the cutting chamber along the loading and unloading direction of the workpiece, and the second component is movably configured in the cutting chamber to form an open avoidance space above the first component.

[0046] Through such a configuration, a possible implementation method of constructing an escape space through the electronic control unit and the liquid circuit unit is provided.

[0047] For the control method of the above-mentioned slicing unit production line, in a possible implementation manner, the "making the overhead rail robot drive the turntable of the loading area or the unloading area that is not equipped with the truss manipulator to operate and / or making the truss manipulator cooperate with the turntable of the loading area or the unloading area equipped with the truss manipulator to operate, so as to: deliver / move out the workpiece placed on the corresponding turntable to / from the position compatible with the at least one slicer" includes: making the overhead rail robot drive the turntable of the loading area or the unloading area that is not equipped with the truss manipulator to operate, so as to: before slicing the workpiece, deliver the workpiece from the loading area corresponding to the loading component to the position compatible with the at least one slicer; and / or after slicing the workpiece, move the workpiece from the position compatible with the at least one slicer to the unloading area corresponding to the unloading component.

[0048] Through such a structure, a movement form of the workpiece is provided by means of the transfer mechanism.

[0049] For the control method of the above-mentioned slicing unitized production line, in a possible implementation manner, before the step of "before slicing the workpiece, delivering the workpiece from the loading area corresponding to the loading assembly to the position compatible with the at least one slicer", the control method includes: when the loading area is not equipped with the truss manipulator, at least moving the overhead rail robot in the loading area; when the loading area is equipped with the truss manipulator, at least moving the truss manipulator in the loading area, so as to: transfer the workpiece from the loading assembly to the first transfer table in the loading area.

[0050] With such a configuration, it is possible to transfer the workpiece to be processed from the external environment to a position associated with the slicing unitization production line through the transfer mechanism.

[0051] For the control method of the above-mentioned slicing unitized production line, in a possible implementation manner, after the step of "after slicing the workpiece, moving the workpiece from a position adapted to the at least one slicer to a material unloading area corresponding to a material unloading assembly", the control method includes: when the material unloading area is not provided with the truss manipulator, at least moving the overhead rail robot within the material unloading area; when the material unloading area is provided with the truss manipulator, at least moving the truss manipulator within the material unloading area, so as to: transfer the workpiece from the second turntable of the material unloading area to the material unloading assembly.

[0052] With such a configuration, it is possible to transfer the processed workpiece from a position associated with the slicing unitization production line to a position that can be connected to the external environment through the transfer mechanism.

[0053] Regarding the control method of the above-mentioned slicing unit production line, in a possible implementation, the overhead rail robot can move at a certain position between the loading area and the unloading area in a manner of approaching / moving away from the slicer.

[0054] Through such a structure, a movement form of the workpiece is provided by means of the transfer mechanism.

[0055] Regarding the control method of the above-mentioned slicing unit production line, in a possible implementation, the overhead rail robot can move in a vertical direction to approach / move away from the slicer.

[0056] Through such a structure, a movement form of the workpiece is provided by means of the transfer mechanism.

[0057] It is understandable that the transfer tasks of the transfer mechanism for the workpiece in each link can be completed entirely by one mechanism, or by the collaboration of multiple mechanisms. Still taking the transfer structure as an overhead rail robot as an example, if the transfer task can be completed entirely by the overhead rail robot, or only a part of it can be completed by the overhead rail robot. It can be completed by one overhead rail robot, or it can be completed by the collaboration of multiple overhead rail robots. Exemplarily, the transfer tasks corresponding to the workpiece include transfers corresponding to paths A, B, and C, wherein the transfer tasks corresponding to path A are completed by the overhead rail robot, while the transfer tasks corresponding to paths B and C are completed by other means. Exemplarily, after the workpiece is delivered from path A to a specified position (such as the intersection of path A and path B) by the overhead rail robot, the workpiece transfer corresponding to path B is realized by another overhead rail robot, AGV or opening and closing components.

[0058] In a second aspect, the present invention provides a computer-readable storage medium, which includes a memory, wherein the memory is suitable for storing multiple program codes, and the program codes are suitable for being loaded and run by a processor to execute the control method of the slicing unit production line described in any one of the above.

[0059] It can be understood that the computer-readable storage medium has all the technical effects of the control method of the slicing unit production line described in any of the above items, which will not be repeated here.

[0060] It is understood by those skilled in the art that the present invention implements all or part of the processes in the control method of the slicing unitized production line, which can be completed by instructing the relevant hardware through a computer program, and the computer program can be stored in a computer-readable storage medium. When the computer program is executed by the processor, the steps of the above-mentioned various method embodiments can be implemented. Among them, the computer program includes computer program code, and it can be understood that the program code includes but is not limited to the program code for executing the control method of the slicing unitized production line. For the convenience of explanation, only the part related to the present invention is shown. The computer program code can be in the form of source code, object code, executable file or some intermediate form. The computer-readable storage medium may include: any entity or device, medium, U disk, mobile hard disk, disk, optical disk, computer memory, read-only memory, random access memory, electric carrier signal, telecommunication signal and software distribution medium that can carry the computer program code. It should be noted that the content contained in the computer-readable storage medium can be appropriately increased or decreased according to the requirements of legislation and patent practice in the jurisdiction. For example, in some jurisdictions, according to legislation and patent practice, the computer-readable storage medium does not include electric carrier signals and telecommunication signals.

[0061] In a third aspect, the present invention provides a computer device comprising a memory and a processor, wherein the memory is suitable for storing a plurality of program codes, and the program codes are suitable for being loaded and run by the processor to execute the control method of the slicing unitization production line as described in any one of the above.

[0062] It is understandable that the device has all the technical effects of the control method of the slicing unit production line described in any of the above, which will not be described in detail here. The device can be a computer-controlled device formed by various electronic devices. BRIEF DESCRIPTION OF THE DRAWINGS

[0063] The following takes the workpiece as a silicon rod (hereinafter referred to as silicon rod, including the silicon rod including the wafer tray to be processed and the silicon wafer including the wafer tray that has been processed) and the transfer mechanism as a combined mechanism including a ceiling robot (taking situation 2 as an example, it mainly includes a ceiling robot and includes two transfer tables arranged in the loading area and the unloading area, and an opening and closing component on the truss walking in the unloading area, wherein the obvious advantage of the ceiling robot is that it can well free up the ground space, where objects can be placed and people can pass. However, there will be corresponding shortcomings such as the inconvenience of maintenance of the equipment at a high place) as an example, and describes the preferred embodiments of the present invention with reference to the accompanying drawings, in which:

[0064] Figure 1 A schematic diagram showing the structure of a slicing unit production line according to an embodiment of the present invention Figure 1, the figure shows the overhead robot in the transfer mechanism and the single slicer in the slicing unit production line;

[0065] Figure 2 A schematic diagram showing the structure of a connection tool in a slicing unit production line according to an embodiment of the present invention Figure 1 ;

[0066] Figure 3 A schematic diagram showing the structure of a connection tool in a slicing unit production line according to an embodiment of the present invention Figure 2 ;

[0067] Figure 4 A schematic diagram showing the structure of a connection tool in a slicing unit production line according to an embodiment of the present invention Figure 3 ;

[0068] Figure 5 A schematic diagram showing the state of the feeding operation of the connecting tooling for the single slicer in the slicing unit production line according to an embodiment of the present invention Figure 1 (Sky Track Robot is in place);

[0069] Figure 6 A schematic diagram showing the state of the feeding operation of the connecting tooling for the single slicer in the slicing unit production line according to an embodiment of the present invention Figure 2 (The extended end at the rear of the connecting tool hooks the handle at the tail end of the crystal tray);

[0070] Figure 7 A schematic diagram showing the state of the feeding operation of the connecting tooling for the single slicer in the slicing unit production line according to an embodiment of the present invention Figure 3 (The entire material exits the fixture and connects with the internal guide rail of the cutting chamber);

[0071] Figure 8 A schematic diagram showing the state of the feeding operation of the connecting tooling for the single slicer in the slicing unit production line according to an embodiment of the present invention Figure 4 (The first movable part of the connecting tooling extends out and hooks the handle at the rear end of the crystal tray);

[0072] Fig. 9 A schematic diagram showing the state of the feeding operation of the connecting tooling for the single slicer in the slicing unit production line according to an embodiment of the present invention Figure 5 (Push the entire material into the cutting chamber);

[0073] Fig.10 A schematic diagram showing the state of the unloading operation of the connecting tooling for a single slicer in a slicing unit production line according to an embodiment of the present invention Figure 1 (Sky Track Robot is in place);

[0074] Fig.11A schematic diagram showing the state of the unloading operation of the connecting tooling for a single slicer in a slicing unit production line according to an embodiment of the present invention Figure 2 (The first movable part of the connecting tooling extends out and hooks the handle at the rear end of the crystal tray);

[0075] Fig.12 A schematic diagram showing the state of the unloading operation of the connecting tooling for a single slicer in a slicing unit production line according to an embodiment of the present invention Figure 3 (Pull the entire material out of the cutting chamber);

[0076] Fig.13 A schematic diagram showing the state of the unloading operation of the connecting tooling for a single slicer in a slicing unit production line according to an embodiment of the present invention Figure 4 (The first movable part of the connecting tool is extended again, and the extended end at the rear thereof hooks the handle at the tail end of the crystal support);

[0077] Fig.14 A schematic diagram showing the state of the unloading operation of the connecting tooling for a single slicer in a slicing unit production line according to an embodiment of the present invention Figure 5 (Pull the entire material into the fixture);

[0078] Fig.15 A schematic diagram showing the structure of a single slicer in a slice unit production line according to an embodiment of the present invention Figure 1 ;

[0079] Fig.16 A schematic diagram showing the structure of a single slicer in a slice unit production line according to an embodiment of the present invention Figure 2 ;

[0080] Fig.17 A schematic diagram showing the structure of a single slicer in a slice unit production line according to an embodiment of the present invention Figure 3 ;

[0081] Fig.18 A schematic diagram showing the structure of a single slicer in a slice unit production line according to an embodiment of the present invention Figure 4 ;

[0082] Fig.19 A schematic diagram showing the structure of a slicing unit production line according to an embodiment of the present invention Figure 2 , the figure shows the opening and closing components in the transfer mechanism but does not show the single slicer in the slicing unit production line;

[0083] Fig. 20 A schematic flow chart showing a control method of a slicing unitized production line according to an embodiment of the present invention; and

[0084] Fig.21A schematic diagram showing a specific flow chart of a control method for a slicing unitized production line according to an embodiment of the present invention.

[0085] List of reference numerals:

[0086] 1. Main body of production line;

[0087] 21. Loading area; 22. Unloading area;

[0088] 31. Sky rail robot; 33. Opening and closing assembly; 34. Truss; 35. Transfer platform;

[0089] 4. Connect tooling;

[0090] 40. Install the substrate;

[0091] 41. first movable part; 411. extension end; 412. first servo motor; 413. first screw nut mechanism;

[0092] 421, first part; 422, second part; 423, second servo motor; 424, second screw nut mechanism; 425, second linear guide rail; 426, clamping plate; 427, protrusion;

[0093] 5. Slicer;

[0094] 51. Slicer body; 52. Cutting chamber; 53. Cutting mechanism;

[0095] 54. Liquid circuit system; 541. Internal circulation liquid circuit unit; 542. External circulation liquid circuit unit; 55. Liquid supply cylinder;

[0096] 57, electric control cabinet; 571, low voltage electric control cabinet; 572, high voltage electric control cabinet;

[0097] 61. Silicon rod; 62. Crystal tray. DETAILED DESCRIPTION

[0098] The preferred embodiments of the present invention are described below with reference to the accompanying drawings. It should be understood by those skilled in the art that these embodiments are only used to explain the technical principles of the present invention and are not intended to limit the scope of protection of the present invention. For example, in addition to the combined mechanism including the overhead rail robot, it may also include but is not limited to mechanisms including ground rail robots, truss manipulators, RGV, AGV, etc. or a combined mechanism including related mechanisms. Exemplarily, the transfer mechanism includes a first truss manipulator walking on the first truss between the loading area and the unloading area and a second truss manipulator walking on the second truss in the loading area and / or the unloading area (such as the walking directions of the first truss manipulator and the second truss manipulator are approximately perpendicular).

[0099] It should be noted that in the description of the present invention, the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" and the like indicating directions or positional relationships are based on the directions or positional relationships shown in the drawings, which are only for the convenience of description, and do not indicate or imply that the device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first" and "second" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0100] In addition, it should be noted that in the description of the present invention, unless otherwise clearly specified and limited, the terms "installation", "setting", and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a direct connection, an indirect connection through an intermediate medium, or the internal connection of two components. For those skilled in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0101] In addition, in order to better illustrate the present invention, many specific details are given in the following specific embodiments. Those skilled in the art should understand that the present invention can also be implemented without certain specific details. In some examples, the principles of the slicer, transfer mechanism including the overhead rail robot, etc., which are well known to those skilled in the art, are not described in detail in order to highlight the main purpose of the present invention. Figures 1 to 20 The present invention is described in whole or in part.

[0102] As a type of wire cutting machine, a slicer is mainly used to cut silicon rods (usually called square rods) with grinding accuracy that meets the standard using a wire mesh composed of cutting wires (such as diamond wires, etc.) to obtain silicon wafers. Under normal circumstances, the slicing operation is as follows: after the stick gluing is completed in a gluing workshop (the square rod to be sliced ​​is glued to the crystal tray), the crystal tray is fixed on the feed mechanism, and during the reciprocating motion of the wire mesh between the cutting main rollers of the cutting mechanism, the silicon rod is driven close to the wire mesh by the feed mechanism, and the wire mesh can slice the square rod by wire sawing. For example, the slicer includes a slicer body, and the slicer body is formed with a cutting chamber, and an operating door is respectively provided on the left and right sides of the cutting chamber, and the cutting mechanism is arranged in the cutting chamber. In this example, the cutting mechanism composed of multiple cutting main rollers constructs a single-station structure that can slice a silicon rod in a single operation.

[0103] In a possible embodiment, the present invention provides a control method for a slicing unitized production line, which is applied to a slicing production line capable of realizing multi-machine automated production. The production line mainly includes a production line body 1, such as the production line body may include but not limited to necessary work surfaces, terminals that allow manual intervention, parts that must be manually operated, control terminals configured at the work site, collection terminals that can collect the work on site (such as visual signals, sound signals, etc.), central control terminals that can analyze and control the slicing work on site, and reminder terminals that issue reminder information such as voice broadcasts and alarms when necessary. Among them, the production line body is equipped with multiple slicing machines 5 (single machines), based on which it is expected that multiple slicing machines can simultaneously perform slicing operations on silicon rods to be processed (grinded square rods) or select a part of them to perform slicing operations on silicon rods, such as multiple single machines are configured in a removable manner on the production line, so that the scale of the production line can be flexibly adjusted and the single machines can be replaced or repaired after removal. In addition, the structural form, slicing operation method and the method of configuring the multiple single machines in the production line body can be the same or different. Exemplarily, the main body of the production line includes multiple areas, wherein a single machine in a certain area is mainly used for processing silicon wafers with more stringent processing requirements, and therefore the single machine corresponding to this area has better processing accuracy.

[0104] In a possible embodiment, the main body of the production line is configured with a loading component and a unloading component, wherein the loading component is connected to a gluing workshop or a gluing area, such as the silicon rods (bonded to the crystal support) out of the curing warehouse of the gluing workshop can be transferred to the loading area 21 corresponding to the loading component by manual and / or automatic operation. For example, the trolley carrying the silicon rods is manually transferred to the loading area. Among them, the unloading component is connected to a degumming workshop or a degumming area, and the degumming workshop is mainly for degumming the silicon rods (in the form of multiple silicon wafers) bonded to the crystal support and completed the slicing operation. Similar to the connection between the aforementioned gluing workshop or gluing area and the loading operation, the silicon wafers corresponding to the unloading area 22 of the unloading component can also be transferred to the degumming workshop or the degumming area by manual and / or automatic operation. For example, the trolley carrying the silicon rods is manually transferred to the degumming workshop or the degumming area. For example, the loading / unloading component generally includes a loading / unloading trolley or an loading / unloading rack.

[0105] In a possible implementation, the aforementioned multiple stand-alone machines share one loading component and one unloading component and use similar loading and unloading control logic for the stand-alone machines. Obviously, the structure of the loading / unloading component can also be adjusted according to actual needs, such as but not limited to: configuring multiple loading components and unloading components for multiple slicers, such as configuring one loading component and unloading component for one or more stand-alone machines according to the orientation, priority, product model, and the properties of the workpiece to be processed (such as the particularity or importance of a batch of products, etc.), illustratively, configuring one loading component and unloading component for multiple stand-alone machines in the same row, and configuring a separate loading component and unloading component for a certain stand-alone machine; multiple stand-alone machines share one loading component and one unloading component, and configuring a separate loading and unloading control logic for one or several stand-alone machines (such as also according to the aforementioned orientation, priority, product model, and the properties of the workpiece to be processed, etc.).

[0106] Taking the example of multiple single machines sharing one group of loading components and one group of unloading components, the production line includes a transfer mechanism, which is mainly used to realize the transfer of silicon rods to be sliced ​​and the cut silicon wafers between the loading component, the slicer and the unloading component, as well as the transfer inside the loading component and the unloading component respectively, such as including the transfer of silicon rods to be sliced ​​between the loading component and the slicer (loading operation), the transfer of cut silicon wafers between the slicer and the unloading component (unloading operation), corresponding operations inside the loading / unloading components, and connection operations such as material picking and unloading in the area between the loading / unloading components and the two.

[0107] In a possible embodiment, the transfer mechanism includes a manipulator / robot that can at least walk along the direction between the loading assembly, the unloading assembly and different slicers, such as the manipulator can walk between the loading assembly and the unloading assembly (such as can be called the length direction), along the direction of moving in / out of the cutting area of ​​the single machine (such as can be called the width direction) and along the vertical direction (such as can be called the longitudinal direction) with the help of trusses, ceiling rails, floor rails and other frames. For example, the number of single machines that need to be configured and the arrangement between multiple single machines can be calculated according to the corresponding group control logic beat, so that the silicon rod can be loaded and unloaded for the single machine (moving in / out of the cutting area of ​​the single machine) and the production line (entering the loading area of ​​the production line or moving out of the unloading area of ​​the production line) through the corresponding walking of the manipulator. In this example, the manipulator of the transfer mechanism includes a ceiling rail robot 31 and an opening and closing component 33 configured in the unloading area as a unloading transfer mechanism, such as the opening and closing component 33 can walk along the width direction of the production line body 1 on the truss 34. Among them, the walking requirements corresponding to the slicing unitized production line along the length direction (the part between the loading component and the unloading component, the width direction (close to / away from the cutting room of the slicer) and the longitudinal direction (to constrain or release the constraints of the connecting tooling and the crystal support) are realized by the cooperation of the overhead rail robot and the overhead rail configured on the main body of the production line. Exemplarily, a transfer table 35 capable of placing one or more silicon rods is respectively provided in the loading area and the unloading area. The overhead rail robot can take the silicon rods from the transfer table and further deliver them to the slicer for slicing. For example, after the overhead rail robot delivers the silicon wafers that have completed the slicing operation to the transfer table corresponding to the unloading area, the opening and closing component can take the silicon wafers from the transfer table and further transfer them to the degumming workshop or degumming area. Preferably, the transfer table itself can also move, such as the cooperation of the transfer table and the overhead rail robot / truss manipulator to further save the beat while completing the transfer task. Such as may include but are not limited to:

[0108] Scenario 1:

[0109] There are no trusses or opening and closing components walking on the trusses in the loading and unloading areas, and the transfer mechanism only includes a ceiling rail and a ceiling rail robot configured on the ceiling rail. Corresponding to the transfer table in the loading area, both the loading and unloading areas are configured with transfer tables, and the transfer tables corresponding to the loading / unloading areas can move together with the ceiling rail robot. In this way, the operation corresponding to the slicing production line should include: the ceiling rail robot carries the connecting tooling to clamp the silicon rod containing the crystal tray from the loading assembly, and places the silicon rod on the transfer table corresponding to the loading area, the ceiling rail robot and the transfer table corresponding to the loading area move together to the slicer (single machine) performing the current slicing operation, and the ceiling rail robot clamps one of the silicon rods (the workpiece to be processed for this slicing operation) from the transfer table corresponding to the loading area at the single machine and loads it into the cutting chamber of the slicer. After the slicer completes the slicing operation, the overhead rail robot will place the silicon wafer (cut material) including the wafer tray after unloading from the corresponding slicer on the transfer table corresponding to the unloading area (the transfer table corresponding to the unloading area has been pre-placed in the position of the slicer that needs to be unloaded by moving together with the overhead rail robot), and transfer the cut material to the unloading area by moving the transfer table corresponding to the unloading area and the overhead rail robot together. Afterwards, the overhead rail robot carries the connecting tooling to further transfer the cut material from the transfer table corresponding to the unloading area to the unloading assembly.

[0110] The process of any slicing operation in the slicing unit production line corresponding to situation 1 generally includes the following four steps:

[0111] The material taking step specifically includes: the overhead rail robot carries the connection tooling to take the material from the loading assembly and places the material (such as the silicon rod bonded to the wafer support) on the transfer table corresponding to the loading area;

[0112] The loading step specifically includes: the overhead rail robot and the transfer table corresponding to the loading area move together to the loading position corresponding to the slicer that completes the current slicing operation, and complete the loading operation of delivering the material (such as the silicon rod bonded to the wafer support) to the cutting area of ​​the slicer;

[0113] The unloading step specifically includes: the overhead rail robot carries the connection tooling and moves to the unloading position corresponding to the slicer, and takes the sliced ​​silicon rod out of the slicer;

[0114] The material unloading step specifically includes: the overhead rail robot and the transfer table corresponding to the unloading area move together and transport the cut materials (such as sliced ​​silicon rods) and place them on the unloading assembly.

[0115] Scenario 2:

[0116] A truss and an opening and closing component that runs on the truss are only provided in the unloading area, and a transfer table is provided in both the loading area and the unloading area, wherein the transfer table corresponding to the loading area can move together with the overhead rail robot, and the transfer table corresponding to the unloading area can move autonomously (it can also be: a truss and an opening and closing component that runs on the truss are only provided in the loading area, and the transfer table corresponding to the unloading area moves together with the overhead rail robot. It can be understood that those skilled in the art can select a suitable movement path, movement mode and mechanism for realizing the movement of the transfer table corresponding to the unloading area according to actual needs, such as configuring the transfer table corresponding to the unloading table with freely moving wheels and configuring the transfer table with tracks for its movement, etc.), and therefore can cooperate with the truss and opening and closing components configured in the unloading area to complete the transfer tasks corresponding to the unloading area. In this way, the operations corresponding to the slicing production line should include: the overhead rail robot carries the connecting tooling to clamp the silicon rods including the crystal tray from the loading assembly, and places the silicon rods on the transfer table corresponding to the loading area. The overhead rail robot and the transfer table corresponding to the loading area move together to the slicer (single machine) performing the current slicing operation. The overhead rail robot clamps one of the silicon rods (the workpiece to be processed for this slicing operation) from the transfer table corresponding to the loading area and loads it to the cutting chamber of the slicer. Since the transfer table corresponding to the loading area and the overhead rail robot can move together, several more silicon rods can be placed at the loading position (multiple silicon rods can be placed on the transfer table corresponding to the loading area), without the need to include the step of going back to retrieve the material for each slicing operation, and thus it is expected to save the tact time of retrieving and loading the material. After the slicer completes the slicing operation, the overhead rail robot will place the silicon wafer (cut material) including the wafer tray after unloading from the corresponding slicer on the turntable corresponding to the unloading area (the turntable corresponding to the unloading area has been pre-moved to the position of the slicer that needs to be unloaded through autonomous movement). For example, multiple cut materials can be placed on the turntable corresponding to the unloading area, and then the turntable corresponding to the unloading area reaches the unloading position through autonomous movement, and then the cut materials are placed from the turntable corresponding to the unloading area to the unloading assembly through the opening and closing assembly walking on the truss.

[0117] The process of any slicing operation in the slicing unit production line corresponding to situation 2 generally includes the following four steps:

[0118] The material taking step specifically includes: the overhead rail robot carries the connection tooling to take the material from the loading assembly and places the material (such as the silicon rod bonded to the wafer support) on the transfer table corresponding to the loading area;

[0119] The loading step specifically includes: the overhead rail robot and the transfer table corresponding to the loading area move together to the position of the slicer that completes the current slicing operation, and complete the loading operation of delivering the material (such as the silicon rod bonded to the wafer support) to the cutting area of ​​the slicer;

[0120] The unloading step specifically includes: the overhead rail robot carries the connection tooling and moves to the unloading position corresponding to the slicer, and takes out the sliced ​​silicon rod from the slicer (or after taking out, the transfer table corresponding to the unloading area moves autonomously to the unloading area);

[0121] The material discharge step specifically includes: transporting the cut materials (such as sliced ​​silicon rods) on the transfer table corresponding to the material discharge area and placing them on the material discharge assembly through the movement of the opening and closing assembly along the truss.

[0122] Scenario 3:

[0123] In addition to the trusses and opening and closing components that run on the trusses in the unloading area, the trusses and opening and closing components that run on the trusses are also provided in the loading area (it can be understood that the structures and arrangements of the trusses and opening and closing components corresponding to the loading / unloading areas may be the same or different). In addition, the difference between this situation and situation two is that the overhead rail robot and the transfer table corresponding to the loading area do not move synchronously. In this way, the transfer table corresponding to the loading area can cooperate with the trusses and opening and closing components provided in the loading area to complete the transfer task in the loading area. That is: in this example, the transfer tables corresponding to the loading area and the unloading area can realize the movement compatible with the group control logic in an autonomous manner. In this way, the operation corresponding to the slicing production line should include: the opening and closing components corresponding to the loading area transfer the silicon rods from the loading components to the transfer table corresponding to the loading area. At this time, multiple silicon rods can be placed on the transfer table corresponding to the loading area to save beats. The turntable corresponding to the loading area reaches the position of the slicer (single machine) corresponding to the current slicing operation by autonomous movement, and the overhead rail robot also moves independently from the turntable corresponding to the loading area to the position of the slicer for the current slicing operation, and the overhead rail robot puts one of the multiple silicon rods placed on it from the turntable corresponding to the loading area into the cutting chamber of the slicer. The subsequent movement is similar to the aforementioned situation 2, which will not be repeated here.

[0124] The process of any slicing operation in the slicing unit production line corresponding to situation 3 generally includes the following four steps:

[0125] The material taking step specifically comprises: the opening and closing assembly corresponding to the material loading area takes the material from the material loading assembly by walking along the truss, and places the material (such as the silicon rod bonded to the wafer support) on the transfer table corresponding to the material loading area;

[0126] The loading step specifically includes: the transfer table corresponding to the loading area reaches the position of the slicer that completes the current slicing operation in an autonomous manner, and the overhead rail robot carrying the connection tooling also reaches the position of the slicer that completes the current slicing operation in a relatively independent movement with the transfer table corresponding to the loading area and completes the loading operation of delivering the material (such as the silicon rod bonded to the wafer support) to the cutting area of ​​the slicer;

[0127] The unloading step specifically includes: the overhead rail robot carries the connection tooling and moves to the unloading position corresponding to the slicer, and takes out the sliced ​​silicon rod from the slicer (or after taking out, the transfer table corresponding to the unloading area moves autonomously to the unloading area);

[0128] The material discharge step specifically includes: transporting the cut materials (such as sliced ​​silicon rods) on the transfer table corresponding to the material discharge area and placing them on the material discharge assembly through the movement of the opening and closing assembly corresponding to the material discharge area along the truss.

[0129] It is understandable that the above-mentioned overhead rail robot 31 and the opening and closing component 33 are only an exemplary description of the transfer mechanism. Those skilled in the art can flexibly adjust the type, number, corresponding transfer path, etc. of the transfer mechanism included in the example according to actual conditions, such as configuring the loading area with an opening and closing component that can walk on the truss or including two overhead rail robots (one between the loading component and the unloading component, and the other in the loading area), etc. For example, the transfer operation in the unloading area can also be completed by the overhead rail robot, such as the overhead rail robot carrying the connection tooling to the position of the slicer that needs to unload, taking the sliced ​​silicon rod (including the silicon wafer of the crystal tray) from the slicer and placing it directly on the unloading component or placing it on the unloading component via the transfer table.

[0130] In addition, as the scale of unitized production is further expanded, there may be such a form: the production line body includes multiple, so that the trusses arranged along the width direction of the production line body can be extended so that multiple production line bodies share a material unloading transfer mechanism. As corresponding to the aforementioned situations two and three, the scale of the slicing unitized production line can be further expanded. Still taking the aforementioned transfer mechanism including the overhead rail robot as an example, the operation of the slicing unitized production line will include the operation of the opening and closing components corresponding to the upper / lowering area walking and sharing between different production line bodies. Correspondingly, the group control logic corresponding to the slicing unitized production line needs to match the appropriate single machine and the corresponding group control logic for the silicon rods that need to be processed, in combination with the number of silicon rods that need to be processed, the equipment status of the single machine, the status of the overhead rail robot, the position / status of the opening and closing components, etc. Based on this, for a single production line body, through the coordination between the overhead rail robot, the transfer table corresponding to the loading area, and the opening and closing components corresponding to the loading area (when the loading area is equipped with an opening and closing component), the silicon rods to be processed are transported from the loading component to a preset target position that can be connected with the single machine that completes the current slicing operation (such as the target position can be flexibly determined according to the existing logic of the single machine or in combination with the logic of the slicing unitized production line). When the silicon rods are delivered to the target position, the group control logic can reconfirm the status information of the single machine that completes the current slicing operation based on equipment management information, such as status information including but not limited to running, debugging, maintenance, troubleshooting, and standby. After the overhead rail robot fails, the loading operation for the current single machine can be achieved by manually loading on the front wall of the cutting room of the single machine instead of the overhead rail robot as described below. After the current single machine completes the slicing operation on the silicon rods, the coordination between the overhead rail robot, the transfer table corresponding to the unloading area, and the opening and closing components corresponding to the unloading area are still used to transport the silicon rods to be processed from the unloading position corresponding to the single machine to the unloading components of the slicing unit production line according to the control instructions of the group control logic. For multiple production line entities, the group control logic should consider that the opening and closing components shared with other production line entities can be applied to the transfer operations inside the loading / unloading areas corresponding to the main body of the current production line.

[0131] It can be seen that in the entire slicing unitized production line of the present invention, the functional areas mainly include a loading area corresponding to the loading assembly, a slicing area corresponding to multiple single machines, and a unloading area corresponding to the unloading assembly. Based on this, with the help of the walking of the overhead rail robot on the overhead rail and through the cooperation between the transfer table corresponding to the upper / lowering area and the opening and closing assembly corresponding to the upper / lowering area (when the upper / lowering area is equipped with an opening and closing assembly), the transportation of silicon rods between different single machines and between a single machine and the upper / lowering area can be realized. In addition, by extending the frame (such as a truss) of the opening and closing assembly, it is expected that the transfer operation of multiple production line bodies corresponding to the upper / lowering area can be realized through one opening and closing assembly.

[0132] In a possible implementation, the production line body is equipped with a connection tool 4, which can be configured on a manipulator, and silicon rods or silicon wafers including a crystal tray can be carried on the connection tool. The connection tool is mainly used to cooperate with the manipulator to move the silicon rods including the crystal tray into the cutting area of ​​a single machine to achieve slicing and loading operations for the single machine, or to move the silicon wafers including the crystal tray out of the cutting area of ​​the single machine to achieve slicing and unloading operations for the single machine.

[0133] In a possible embodiment, the connection tool 4 includes a tool base 40 as a mounting carrier and a first movable part 41 and a second movable part arranged on the tool base, such as a manipulator that can carry the connection tool on it by cooperating with the tool base. Exemplarily, the tool base is roughly a plate-like structure. Among them, the first movable part can move along the aforementioned moving in / out direction from the cutting area of ​​the single machine to drive the silicon rod containing the crystal tray to move along the direction, and the second movable part can form a clamping space that holds the silicon rod containing the crystal tray tightly. In this way, on the basis of the silicon rod containing the crystal tray being held tightly by the second movable part, the loading and unloading operations of the silicon rod containing the crystal tray for the single machine can be realized with the help of the first movable part.

[0134] In a possible embodiment, the first movable part 41 generally includes a strip structure arranged along the aforementioned direction of moving in / out from the cutting area of ​​the single machine, and a docking structure capable of cooperating with the crystal tray is arranged or formed on the strip structure along its length direction, so as to achieve the fixed connection between the first movable part and the operating end of the crystal tray by means of the docking structure. Exemplarily, the docking structure is an extension end 411 extending downward from the strip structure, and the extension end can cooperate with the handle at the tail end of the crystal tray as an operating end to achieve the fixed connection between the first movable part and the crystal tray. In this way, under the drive of the servo motor, the strip structure can slide freely in the groove on the upper surface of the crystal tray, and the robot drives the connection tooling to move downward / upward, so that the extension end can cooperate with the handle at the tail end of the crystal tray to clamp the crystal tray or release the cooperation so that the strip structure releases the crystal tray. As in the present invention, two extension ends are respectively arranged at the positions of the two ends of the strip structure.

[0135] For example, if the first movable part includes a first servo motor 412, the first servo motor drives the strip structure to move in / out of the cutting area of ​​the single machine through the first screw nut mechanism 413. For example, in order to ensure that the movement of the first movable part is more stable, a first linear guide (not shown) can be arranged on the second movable part along the direction of the first movable part. For example, in this example, a first linear guide is arranged on both sides of the strip structure. Accordingly, a slide groove or slide hole capable of cooperating with the linear guide is arranged at the end of the strip structure.

[0136] In a possible embodiment, the second movable part includes a first part 421 and a second part 422 that are arranged relatively to each other, and the workpiece is clamped or loosened by moving the first part and / or the second part in a direction of approaching / moving away from each other. For example, if the second movable part is configured with a second servo motor 423, the second servo motor is connected to a second screw nut mechanism 424, and the screw of the second screw nut mechanism includes two sections of thread segments with opposite rotation directions, and nuts adapted to the two sections of thread segments with opposite rotation directions are respectively fixed to the first part and the second part. In this way, the two parts can be brought closer / away from each other, thereby achieving the clamping or loosening of the crystal support. For example, in order to ensure that the approaching / moving away movement between the two clamping parts is more stable, a second linear guide 425 adapted to the second screw nut mechanism can be configured between the first part and the second part.

[0137] In a possible implementation, in order to ensure that the two clamping parts can clamp the silicon rod containing the crystal support more reliably, the first / second part is formed with a clamping structure on the side close to each other, such as the first / second part has a vertically arranged clamping plate 426 on the part close to each other, and a plurality of protrusions 427 with a buffering function are arranged on the clamping plate, so that the reliability of clamping can be ensured by multi-point clamping. Of course, the protrusion 427 can also be directly fixed on the first part and the second part. As in this example, the first / second part can respectively cooperate with a pair of side parts of the crystal support so as to hold the silicon rod containing the crystal support tightly in the clamping space formed by the first part and the second part. Exemplarily, the clamping plate includes a transverse part and a vertical part, the clamping plate is arranged on the inner side of the vertical part, and reinforcing structures such as reinforcing ribs and reinforcing plates are arranged between the transverse part and the vertical part.

[0138] Main reference Figures 5 to 9 , such as based on the above structure, when the robot delivers the silicon rod (along the length direction and width direction) to the position ( Figure 5 ) After that, the slicing and loading process for the cutting room of a single machine mainly includes the following steps:

[0139] S11, the overhead rail robot drives the connecting tooling to move downward, so that the tail end of the strip structure ( Figure 5 The extended end of the strip structure (the right end in FIG) moves downward to hook the handle at the rear end of the crystal tray, thereby achieving fixed connection between the rear end of the strip structure and the silicon rod including the crystal tray.

[0140] S12, the first servo motor 412 drives the strip structure to move (extend) toward the cutting chamber, thereby pushing the entire material (including the silicon rods of the wafer tray) out of the interior of the connecting tooling, and allowing the wafer tray to enter the slicer loading guide rail.

[0141] S13, the overhead rail robot drives the connecting tooling to move upward, so that the protruding end of the tail end of the strip structure moves upward and away from the handle at the tail end of the crystal tray; the first servo motor 412 drives the strip structure to move in the direction toward the connecting tooling (retract), and the overhead rail robot drives the connecting tooling to move downward, so that the protruding end of the front end of the strip structure moves downward so that the protruding end of the front end of the strip structure hooks the handle at the tail end of the crystal tray, thereby realizing the fixed connection between the front end of the strip structure and the silicon rod including the crystal tray.

[0142] S14, the first servo motor 412 drives the strip structure to move (extend) toward the cutting chamber so that the strip structure moves again toward the cutting chamber (extends again), thereby pushing the entire material into the cutting chamber of the single machine.

[0143] S15, the overhead rail robot drives the connection tooling to move upward, so that the protruding end of the front end of the strip structure moves upward and leaves the handle at the rear end of the crystal tray; then the first servo motor 412 drives the strip structure to move toward the connection tooling (retract) to the inside of the connection tooling.

[0144] Similarly, still based on the above structure, after the robot transports the silicon rod (along the length direction and width direction) to the position ( Fig.10 ) After that, the slicing and unloading process of the cutting room of a single machine mainly refers to Figures 10 to 14 , as in Fig.14 In the state shown, the strip structure moves away from the cutting chamber (gradually entering the interior of the connection tool), thereby pulling the entire material (including the silicon rods on the wafer support) into the space below the connection tool.

[0145] It can be seen that by setting the two protruding ends at the front and rear ends of the strip structure, combined with its cooperation with the crystal support and the corresponding movement mode, the loading and unloading operations of the cutting chamber of a single machine are reliably realized.

[0146] In one possible embodiment, a rear end loading and unloading port can be set on the rear wall of the cutting chamber (close to the feeding position of the unitized production line), and a rear end automatic loading and unloading door can be configured at a position corresponding to the rear end loading and unloading port, and an automatic loading and unloading auxiliary guide rail is set between the crystal support and the rear end automatic loading and unloading door, and the orientation and structure of the automatic loading and unloading auxiliary guide rail and the crystal support can be adapted (such as the height is roughly the same).

[0147] In a possible implementation, a front manual loading and unloading door may be provided on the front wall of the cutting chamber, and a manual loading and unloading auxiliary rail may be provided between the front manual loading and unloading door and the crystal tray, and the orientation and structure of the manual loading and unloading auxiliary rail and the crystal tray may be adapted (such as being roughly flush in height). In this way, with the aid of a loading trolley or other transport equipment, the silicon rods including the crystal tray may be loaded by the forearm through the front manual loading and unloading door and the manual loading and unloading auxiliary rail, or the silicon wafers including the crystal tray may be unloaded after the slicing operation is completed. For example, when the slicer is the smallest unit sold separately, the front manual loading and unloading door may be used to load and unload the slicer that is separated from the slicing unitized production line. Also, in the event of a loading failure in the slicing unitized production line, the front loading and unloading port may be used to load and unload the corresponding single slicer.

[0148] It can be seen that, on the one hand, the aforementioned transfer mechanism, loading / unloading components, and connecting fixtures can be connected in series with multiple slicer machines in the process to realize the unitization and automation of the slicing operation. On the other hand, the traditional manual loading and unloading operation in the scene of the unitization and automation operation can also be realized by manual loading and unloading. In this way, the slicer unit as the basic slicing operation unit in the slicing unitized production line used by the present invention is expected to be sold as an element of the product constituting the production line, and can also be sold directly or through acceptable adjustments (such as under the premise of permission, the structural form and configuration orientation of the liquid circuit system, the electric control cabinet, the liquid supply cylinder, etc. are adjusted to an acceptable degree, such as based on the adjustment to a certain extent to remove the constraints set for adapting to the unitized production line scene, and more friendly to adapt to and corresponding to the single machine application scene) in the form of an independent single machine. Therefore, the slicer unit as the basic slicing operation unit in the slicing unitized production line used by the present invention can be more friendly to adapt to different application scenes according to actual needs, and has good commercial prospects.

[0149] Embodiment 1:

[0150] Main reference Fig.15 In a possible embodiment, the slicer 5 includes a liquid circuit part and an electric control part, in addition to the aforementioned slicer body 51 (including a frame, etc.), a cutting chamber 52, and a cutting mechanism 53 with a cutting line wound thereon to form a cutting line network. The liquid circuit part includes a liquid circuit system 54, a liquid supply cylinder 55, and a cutting liquid adding trolley (not shown). The electric control part mainly includes an electric control cabinet 57. The main functions of the cutting liquid continuously provided by the liquid circuit system include cooling, lubrication, and taking away silicon powder generated at the cutting seam during the slicing operation. In this embodiment, the liquid circuit system includes a separate internal circulation liquid circuit unit 541 and an external circulation liquid circuit unit 542. The electric control cabinet 57 is divided into two according to low pressure and high pressure (such as respectively recorded as a low-voltage electric control cabinet 571 and a high-voltage electric control cabinet 572). The liquid supply cylinder capable of providing and recovering the cutting liquid is arranged at the bottom space of the liquid circuit system.

[0151] In order to adapt to the necessary coordination of the slicer, connecting tooling and transfer mechanism required in the aforementioned slicing unit production line, in this embodiment, the liquid circuit system is roughly arranged on the rear side of the cutting chamber, and the inner circulation liquid circuit unit and the outer circulation liquid circuit unit are respectively placed at the rear of the cutting chamber and on both sides. The low-voltage electric control cabinet and the high-voltage electric control cabinet are respectively arranged above the inner circulation liquid circuit unit and the outer circulation liquid circuit unit. In this way, the space between the two electric control cabinets can construct the necessary avoidance space for the loading operation from the rear end (close to the rear loading and unloading port of the slicer) to the front end (close to the overhead rail), thereby forming an avoidance space that can ensure the automatic loading and unloading operation of the slicer.

[0152] The base of the inner circulation liquid circuit unit rises to reserve space for the liquid supply cylinder, so the liquid supply cylinder can be set below the inner circulation liquid circuit unit. Since the weight of the high-voltage electric control cabinet is heavier than that of the low-voltage electric control cabinet, the base of the outer circulation liquid circuit unit is directly placed on the ground. The cutting fluid filling trolley can be set on the side close to the outer circulation liquid circuit unit.

[0153] It is understandable that, under the premise of ensuring that the slicer can be adapted to the slicing unitized production line, those skilled in the art can flexibly adjust the elements of the slicer and the relative positions between the elements according to the actual situation. For example, the slicer can also be (including but not limited to) constructed in the following ways:

[0154] Embodiment 2:

[0155] Main reference Fig.16 , which is different from the first embodiment, in this embodiment, the liquid system and the electric control cabinet are placed at the rear of the cutting chamber and on both sides, and the liquid supply cylinder is placed between the liquid system and the electric control cabinet. In this way, the space between the liquid system and the electric control cabinet forms an avoidance space that can ensure the automatic loading and unloading operation of the slicer.

[0156] Embodiment three:

[0157] Main reference Fig.17 , which is different from the second embodiment, in this embodiment, the liquid circuit system and the electric control cabinet are arranged on one side behind the cutting chamber of the single slicer in a longitudinal stacking manner, wherein the liquid circuit system is located below the electric control cabinet. The liquid supply cylinder is placed beside the liquid circuit system and the electric control cabinet, and has no spatial overlap with the cutting chamber or has a certain overlap when viewed from the direction of automatic loading and unloading. In this way, since the height of the liquid supply cylinder is relatively low, the configuration of the liquid circuit system and the electric control cabinet will not interfere with the formation of the avoidance space that can ensure the automatic loading and unloading operation of the single slicer.

[0158] Embodiment 4:

[0159] Main reference Fig.18 , which is different from the third embodiment, in this embodiment, the liquid circuit system is arranged on one side behind the cutting chamber of the single slicer, and the liquid supply cylinder is placed beside the liquid circuit system, and there is a certain overlap with the cutting chamber in space when viewed from the direction of automatic loading and unloading. Among them, the electric control cabinet is arranged below a position far behind the cutting chamber (such as, but not limited to: a position far behind the liquid circuit system and the liquid supply cylinder; a position between two adjacent single slicers). In this way, the overall height of the relevant structures is relatively low, so there is sufficient avoidance space above the liquid circuit system, the electric control cabinet, and the liquid supply cylinder to ensure the automatic loading and unloading operation of the single slicer.

[0160] It can be seen that in the slicing unitized production line used in the present invention, by making necessary adjustments to the single machine relative to the traditional slicing machine, it can be better adapted to the slicing unitized production line. Based on this, through the configuration of a transfer mechanism such as a ceiling rail robot, the connection between the silicon rod containing the crystal support before slicing and the silicon wafer containing the crystal support after slicing can be realized between the loading assembly and the unloading assembly. Through the configuration of the connection tooling, the silicon rod before slicing and the single crystal silicon rod containing the crystal support after slicing can be flexibly and smoothly connected between the loading assembly, any single machine, and the unloading assembly, and can be switched between different single machines. On this basis, by analyzing the loading and unloading operations of the single machine (such as including the coordination control between the connection tooling, the ceiling rail robot, and the crystal support), the transfer operations between the single machine and the transfer mechanism (such as including the coordination control between the transfer table corresponding to the upper / lowering area, the ceiling rail robot, and the opening and closing components corresponding to the upper / lowering area), and giving the corresponding group control logic, the unitized production of the slicing operation can be realized. On the basis of the unitization of slicing operations, it is expected to better meet the market development needs of slicing products such as silicon wafers, such as better catering to the development trend of the photovoltaic industry.

[0161] For example, the group control system of the slicing unit production line, including the processing, mainly includes the following functional modules:

[0162] 1) Production task management module: This module is mainly used to implement functions such as issuing, allocating, executing and completing production tasks. For example, after the administrator issues a production task (including information such as task name, task type, and task quantity), the group control system will allocate the task to the available single machine according to the task requirements of the production task and perform operations including picking, loading, slicing, unloading and placing through the transfer mechanism. That is, the single machine and the transfer mechanism will execute the assigned tasks according to the pre-set group control logic, and thus ensure that the assigned production tasks can be completed smoothly. After the production task is completed, the group control system automatically updates the status of the production task and the equipment status, and provides real-time monitoring of the task progress and equipment status. For example:

[0163] During the slicing operation of the single machine that has completed the current slicing production task, it is determined whether the remaining cutting time corresponding to the current slicing operation is less than the estimated material calling time of the next production task. If so, the single machine that has completed the current slicing production task is allowed to be determined as the single machine that executes the next production task.

[0164] When a retraction signal of a single machine that has completed the current slicing production task is detected, the state of the single machine can be adjusted to an idle state to determine whether the single machine that has completed the current slicing production task is allowed to be determined as the single machine that executes the next production task.

[0165] 2) Storage location management module: This module is mainly used to manage the storage locations of equipment. For example, the management of storage locations includes functions such as adding, deleting, modifying and querying storage locations. The main purpose is to optimize the storage and management of materials. For example, the administrator can add new storage locations and specify the storage location name / type and other attribute information. On the basis of supporting the deletion and modification of storage locations, it can facilitate the maintenance of storage location information. Optionally, the storage location management module can also provide an interface for administrators to query storage location information, so as to quickly find a specific storage location.

[0166] 3) Equipment management module: This module is mainly used to manage equipment (single machine), mainly including functions such as adding, deleting, modifying and querying equipment. For example, when the scale of the slicing unit production line is expanded, the administrator can add new equipment (such as equipment name, equipment type, equipment location, etc.). Similar to the aforementioned location management module, on the basis of supporting equipment deletion and modification operations, it can facilitate the maintenance and update of equipment information. Optionally, the equipment management module can also provide an interface for administrators to query equipment information so as to find relevant equipment according to needs.

[0167] 4) Transfer mechanism scheduling module: This module is mainly used to implement task scheduling of the overhead rail robot, truss manipulator, transfer table, etc. in the transfer mechanism to optimize the utilization efficiency of robot resources. For example, after the group control system assigns a production task to an overhead rail robot that is available in a certain time period according to the equipment conditions, the overhead rail robot, truss manipulator, and transfer table will complete the material picking, loading, unloading, and placing actions corresponding to this task according to the pre-set group control logic. This module also provides real-time progress monitoring of the task. After the current production task is completed, the system automatically updates the task status. It can also provide accurate task execution records for viewing. For example,

[0168] Main reference Fig. 20 In a possible implementation, the control method of the slicing unit production line includes the following steps:

[0169] S2001. Get the current slicing task.

[0170] For example, the current slicing task may be a slicing operation for one silicon rod or a slicing operation for multiple silicon rods.

[0171] S2003. According to the current slicing task, select at least one slicer from multiple slicers to execute the current slicing task.

[0172] For example, a single machine that is suitable for the current task can be selected from the single machines in the idle state according to the requirements of the task and the status of the equipment. For example, the current slicing task is a slicing operation for a silicon rod, and the production task specifies that a single machine performs the slicing operation on it.

[0173] S2005. Make the overhead rail robot drive the turntable arranged in the loading area / make the turntable arranged in the unloading area operate autonomously, so as to: deliver the workpieces placed on the two turntables to / move them out of the position suitable for the slicer; and make the connecting tooling and the overhead rail robot operate in coordination, so as to: deliver the workpieces to / move them out of the cutting area of ​​the slicer.

[0174] For example, in this example, the task of "delivering the silicon rod to / moving it out of the position that matches the single machine that performs the current slicing task" is accomplished by the coordinated operation of the overhead rail robot and the transfer table corresponding to the loading area that can move synchronously with it (non-autonomous movement), and the autonomous operation of the transfer table corresponding to the unloading area that can move autonomously. Obviously, the task of "moving the silicon rod out of the position that matches the single machine that performs the current slicing task" can also be accomplished by the overhead rail robot driving the transfer table corresponding to the unloading area to move synchronously.

[0175] The following takes the selection of two adjacent single machines to execute the first two created slicing tasks (task #1 and task #2) as an example to illustrate the control method of the slicing unit production line applied by the present invention.

[0176] Main reference Fig.21 In a possible implementation manner, the control method of the slicing unit production line mainly includes the following steps:

[0177] S2101. Select the two slicing tasks with the earliest creation time (respectively denoted as 1# task and 2# task) from the created slicing tasks as the current slicing tasks.

[0178] Obviously, this is just an exemplary description. Those skilled in the art can select the construction method of the current slicing task according to actual conditions, and those skilled in the art can determine the specific forms of Task #1 and Task #2 according to actual conditions. For example, the specifications of the silicon rods corresponding to Task #1 and Task #2 can be the same or different, and the processing of the silicon rods of Task #1 and Task #2 can be subject to restrictions such as time periods, designated single machines, etc.

[0179] S2103: Determine whether the slicing unit production line can satisfy the conditions for executing task #1 and task #2 simultaneously. If yes, proceed to S2005; if no, proceed to S2007.

[0180] For example, based on the storage situation of the existing slicing unit production line (such as the idle, running, faulty, etc. of a single machine, and the collaborative status of the transfer mechanism), as well as other limitations and requirements that need to be met when tasks 1# and 2# are executed, it is determined that tasks 1# and 2# can be executed simultaneously.

[0181] S2105, select two of the multiple stand-alone machines in the slicing unit production line as stand-alone machines for executing the current slicing task. Based on this, the slicing operation for task 1# and task 2# is completed based on the cooperation between the aforementioned transfer mechanism, transfer table, and connection tooling.

[0182] For example, the single machines that can execute the current slicing task include slicers that are idle and have no faults, slicers that have issued a retract signal (the last slicing job has been completed and can continue to join the current slicing job), and slicers whose remaining cutting time is less than the pre-call time (the ongoing slicing job is close to completion, and when the slicing job for the current slicing task enters the pre-call preparation stage, it can be scheduled to continue to join the slicing job for the current slicing task).

[0183] Of course, this is a theoretically feasible state. For example, when there are no other additional conditions for task 1# and task 2# and the selection logic is randomly selected, all three types of stand-alone machines can be selected as the stand-alone machines corresponding to the current slicing job. Obviously, those skilled in the art can add no other additional conditions for task 1# and task 2#, specify specific selection logic, etc. according to actual needs. For example, there is a relative position limitation between the two stand-alone machines corresponding to task 1# and task 2#.

[0184] S2107, replace the currently executed task with only executing task 1#, and adjust task 2# to the task to be executed, and complete it at an appropriate time according to the subsequent execution logic.

[0185] For example, in this example, after the current execution task is changed to only execute task 1#, task 2# is simply adjusted to be executed later. The later execution method may include but is not limited to: the single machine corresponding to task 1# executes task 2# after completing task 1#; on the premise that there are new tasks that can be executed in the slicing unit production line, first determine whether task 2# can be executed; group task 2# with other tasks and determine whether they can be executed simultaneously according to the logic in the previous text.

[0186] It should be pointed out that although the above embodiments describe the various steps in a specific order, those skilled in the art can understand that in order to achieve the effect of the present invention, different steps do not have to be performed in such an order, they can be performed simultaneously or in other orders, and some steps can be added, replaced or omitted. For example, it can be: after determining the single machine that executes the current slicing task, confirm the device status of the single machine here; etc.

[0187] It should be noted that although the control method of the slicing unit production line constructed in the above specific manner is introduced as an example, those skilled in the art can understand that the present invention should not be limited to this. In fact, the user can flexibly adjust the relevant steps and parameters in the steps according to the actual application scenarios, such as: when the 1# task and the 2# task cannot be executed at the same time, the currently executed task is replaced with the 1# task and the 3# task and continue to judge whether the 1# task and the 3# task can be executed at the same time; etc.

[0188] So far, the technical solutions of the present invention have been described in conjunction with the preferred embodiments shown in the accompanying drawings. However, it is easy for those skilled in the art to understand that the protection scope of the present invention is obviously not limited to these specific embodiments. Without departing from the principle of the present invention, those skilled in the art can make equivalent changes or substitutions to the relevant technical features, and the technical solutions after these changes or substitutions will fall within the protection scope of the present invention.

Claims

1. A control method for a slicing unit production line, characterized in that: The slicing unitized production line includes a production line body, which is equipped with a loading component and a unloading component and includes a transfer mechanism, a connection tool and a plurality of slicers. The transfer mechanism includes a ceiling rail robot, a truss manipulator, and two transfer tables respectively arranged in a loading area corresponding to the loading component and arranged in a unloading area corresponding to the unloading component. One of the loading area and the unloading area is equipped with the truss manipulator and can move in the loading area or the unloading area corresponding to it. The ceiling rail robot can move between the loading area corresponding to the loading component and the unloading area corresponding to the unloading component and can move in the loading area or the unloading area not equipped with the truss manipulator. The control method includes: Get the current slicing task; According to the current slicing task, selecting at least one slicer from the multiple slicers to execute the current slicing task; The overhead rail robot drives the transfer table of the loading area or the unloading area which is not equipped with the truss manipulator to operate and / or the truss manipulator cooperates with the transfer table of the loading area or the unloading area equipped with the truss manipulator to operate, so as to: Delivering / moving the workpiece placed on the corresponding transfer table to / from a position adapted to the at least one slicer; The connection tooling and the overhead rail robot are operated in coordination so as to: The workpiece is delivered to / removed from the cutting area of ​​the slicer.

2. The control method according to claim 1, characterized in that: The “determining at least one slicer from the plurality of slicers to execute the current slicer task according to the current slicer task” includes: Select multiple created slicing tasks as the current slicing tasks; Determine whether multiple created slicing tasks can be performed simultaneously; If so, multiple slicers that execute the current slicing task are determined from the multiple slicers.

3. The control method according to claim 2, characterized in that: The "determining whether multiple created slicing tasks can be performed simultaneously" includes: If not, reselect the current slicing task or select at least one of the multiple created slicing tasks as the current slicing task; A slicer that executes the current slicing task is determined from the plurality of slicers.

4. The control method according to claim 3, characterized in that: The “determining a slicer to execute the current slicing task from the multiple slicers” includes: During the slicing operation of the slicer, determining whether the remaining cutting time is less than the pre-calling time; If so, it is allowed to determine the slicer as the slicer that executes the current slicing task.

5. The control method according to claim 2, characterized in that: The “determining a slicer to execute the current slicing task from the multiple slicers” includes: During the slicing operation of the slicer, determining whether the slicer issues a knife retraction signal; If so, it is allowed to determine the slicer as the slicer that executes the current slicing task.

6. The control method according to claim 1, characterized in that: The docking tool comprises a first movable part, on which at least one docking structure is provided. The “cooperation of the connection tooling and the overhead rail robot so as to deliver the workpiece to / move the workpiece out of the cutting area of ​​the slicer” includes: The docking structure is fixedly connected to the workpiece, and the first movable part is moved in a direction approaching / moving away from the cutting chamber of the slicer, so as to deliver the workpiece to / move out of the cutting area of ​​the slicer.

7. The control method according to claim 6, characterized in that: The workpiece is mounted on a wafer holder. In the step of "fixing the docking structure to the workpiece and moving the first movable part in a direction close to / away from a cutting chamber of the slicer, thereby delivering the workpiece to / moving it out of a cutting area of ​​the slicer", the step of "fixing the docking structure to the workpiece" includes: The butt joint structure is matched with the wafer support, thereby fixing the butt joint structure with the workpiece.

8. The control method according to claim 7, characterized in that: The crystal holder includes an operating end, and the “making the docking structure match the crystal holder and thereby making the docking structure fixedly connected to the workpiece” includes: The overhead rail robot drives the docking structure to move downward and extend into the operating end, thereby cooperating with the crystal support and thus fixing the docking structure to the workpiece.

9. The control method according to claim 7, characterized in that: The first movable part is a strip structure, and a plurality of the docking structures are arranged on the strip structure along its length direction. The “making the butt joint structure match the crystal support so that the butt joint structure is fixedly connected to the workpiece” includes: The first movable part is moved in a direction approaching or moving away from a cutting chamber of the slicer, so that one of the plurality of docking structures is matched with the wafer holder.

10. The control method according to claim 6, characterized in that: The engagement tooling comprises a first driving component, In the step of "fixing the docking structure to the workpiece and moving the first movable part in a direction approaching / moving away from the cutting chamber of the slicer, thereby delivering the workpiece to / moving it out of the cutting area of ​​the slicer", the step of "moving the first movable part in a direction approaching / moving away from the cutting chamber of the slicer" includes: The first driving component drives the first movable part to move in a manner of approaching or moving away from the cutting chamber of the slicer.

11. The control method according to claim 6, characterized in that: The docking fixture includes a carrying part. In the step of "fixing the docking structure to the workpiece and moving the first movable part in a direction close to / away from the cutting chamber of the slicer, thereby delivering the workpiece to / from the cutting area of ​​the slicer", the step of "moving the first movable part in a direction close to / away from the cutting chamber of the slicer" includes: When a workpiece is mounted on the mounting portion, the mounting portion and the workpiece move along with the movement of the first movable portion.

12. The control method according to claim 11, characterized in that: The carrying portion includes a second movable portion, and the second movable portion includes a first portion and a second portion, In the step of "when the workpiece is mounted on the mounting portion, the mounting portion and the workpiece move with the movement of the first movable portion", the step of "mounting the workpiece on the mounting portion" includes: The first part and the second part are caused to move relative to each other in a direction of approaching or moving away from each other so as to clamp or release the workpiece.

13. The control method according to claim 12, characterized in that: The engagement tooling comprises a second driving component, The “causing the first part and the second part to generate relative movement in a direction of approaching or moving away from each other so as to tighten or loosen the workpiece” includes: The second driving component drives the first part and / or the second part to move, so that the first part and the second part generate a relative movement in a direction of approaching / moving away from each other, thereby clamping / relaxing the workpiece.

14. The control method according to claim 13, characterized in that: The connection tooling comprises a screw-nut mechanism, wherein the screw of the screw-nut mechanism has two threaded sections with opposite rotation directions. The “causing the second driving component to drive the first part and / or the second part to move” includes: The second driving component drives the screw-nut mechanism, thereby causing the first portion and the second portion matching the two thread segments with opposite rotation directions to move in a manner of approaching or moving away from each other.

15. The control method according to any one of claims 1 to 14, characterized in that: The slicer can construct an avoidance space. In the step of "making the overhead rail robot drive the turntable of the loading area or the unloading area that is not equipped with the truss manipulator to operate, and making the truss manipulator cooperate with the turntable of the loading area or the unloading area equipped with the truss manipulator to operate, so as to: deliver / move the workpiece placed on the corresponding turntable to / from the position compatible with the at least one slicer", the workpiece in the position compatible with the at least one slicer can realize the loading operation and / or unloading operation for the cutting area of ​​the slicer through the avoidance space.

16. The control method according to claim 15, characterized in that: The slicer comprises a liquid circuit part and an electric control part, and the configuration of the liquid circuit part and the electric control part enables the slicer to construct an avoidance space.

17. The control method according to claim 16, characterized in that: The electric control part includes a first electric control cabinet and a second electric control cabinet, the first electric control cabinet and the second electric control cabinet are centrally arranged or separately arranged, the liquid circuit part includes a liquid circuit system, the liquid circuit system includes a first liquid circuit unit and a second liquid circuit unit, the first liquid circuit unit and the second liquid circuit unit are centrally arranged or separately arranged, The construction method of the avoidance space includes: The first liquid circuit unit and the second liquid circuit unit are disposed on both sides of the cutting chamber, and the first electric control cabinet and the second electric control cabinet are disposed above the first liquid circuit unit and the second liquid circuit unit, respectively, so that: the avoidance space is formed between the first electric control cabinet and the second electric control cabinet; or The first liquid circuit unit and the second liquid circuit unit are collectively arranged to form a first assembly, the first electric control cabinet and the second electric control cabinet are collectively arranged to form a second assembly, and the first assembly and the second assembly are respectively placed on both sides of the cutting chamber to form the avoidance space therebetween; or The first liquid circuit unit and the second liquid circuit unit are collectively arranged to form a first assembly, the first electric control cabinet and the second electric control cabinet are collectively arranged to form a second assembly, and the first assembly and the second assembly are arranged on one side of the cutting chamber along the loading and unloading direction of the workpiece in a longitudinally stacked manner, thereby forming an open avoidance space between the cutting chamber and the one side; or The first liquid circuit unit and the second liquid circuit unit are collectively arranged to form a first component, the first electric control cabinet and the second electric control cabinet are collectively arranged to form a second component, the first component is arranged on one side of the cutting chamber along the loading and unloading direction of the workpiece, and the second component is movably configured in the cutting chamber, thereby forming an open avoidance space above the first component.

18. The control method according to claim 1, characterized in that: The "causing the overhead rail robot to drive the transfer table of the loading area or the unloading area not equipped with the truss manipulator to operate and / or causing the truss manipulator to cooperate with the transfer table of the loading area or the unloading area equipped with the truss manipulator to operate, so as to: deliver / move the workpiece placed on the corresponding transfer table to / from a position compatible with the at least one slicer" includes: The overhead rail robot drives the transfer table of the loading area or the unloading area which is not equipped with the truss manipulator to operate, so as to: Before slicing the workpiece, the workpiece is delivered from the loading area corresponding to the loading assembly to the position adapted to the at least one slicer; and / or After the workpiece is sliced, the workpiece is moved from a position matched with the at least one slicer to a material unloading area corresponding to the material unloading component.

19. The control method according to claim 18, characterized in that: Before the step of "before slicing the workpiece, delivering the workpiece from the loading area corresponding to the loading assembly to the position adapted to the at least one slicer", the control method includes: In the case where the loading area is not equipped with the truss manipulator, at least the overhead rail robot is moved in the loading area; in the case where the loading area is equipped with the truss manipulator, at least the truss manipulator is moved in the loading area, so as to: The workpiece is transferred from the loading assembly to the first transfer table of the loading area.

20. The control method according to claim 18, characterized in that: After the step of "after slicing the workpiece, moving the workpiece from a position adapted to the at least one slicer to a material unloading area corresponding to the material unloading component", the control method includes: In the case where the unloading area is not equipped with the truss manipulator, at least the overhead rail robot is moved in the unloading area; in the case where the unloading area is equipped with the truss manipulator, at least the truss manipulator is moved in the unloading area, so as to: The workpiece is transferred from the second transfer table in the unloading area to the unloading assembly.

21. The control method according to claim 1, characterized in that: The overhead robot can move at a certain position between the loading area and the unloading area in a manner of approaching or moving away from the slicer.

22. The control method according to claim 1, characterized in that: The overhead robot can move in a vertical direction to approach or move away from the slicer.

23. A computer-readable storage medium, the storage medium comprising a memory, the memory being adapted to store a plurality of program codes, characterized in that: The program code is suitable for being loaded and run by a processor to execute the control method of the slicing unitization production line according to any one of claims 1 to 22.

24. A computer device, comprising a memory and a processor, wherein the memory is suitable for storing a plurality of program codes, wherein: The program code is suitable for being loaded and run by the processor to execute the control method of the slicing unitization production line according to any one of claims 1 to 22.

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