Emergency heating device and semiconductor equipment

Abstract

A heating target is directly heated by a heating source or is subjected to auxiliary heating by the emergency heating device, the emergency heating device comprises a heating bag and an electromagnetic device, the heating bag is in contact with the surface of the heating source or the heating target, the heating bag contains a heating substance, and heat can be generated when the heating substance is in contact with oxygen; the electromagnetic device is installed on one side of the heating bag, when the heating source cannot normally heat the heating target, the electromagnetic device loses magnetism and punctures the heating bag, and direct or indirect heating of the heating bag to the heating target is achieved. In actual use, if sudden power failure occurs due to faults of a power supply and the like, the electromagnetic device loses magnetism automatically during power failure, so that the heating bag is punctured automatically to release heat, and emergency heat preservation is carried out on a heating target.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor production, and in particular to an emergency heating device and semiconductor equipment. Background Art

[0002] Some chemicals used in semiconductor equipment may become too viscous or even condense at room temperature, especially some special chemical solutions or liquid metal materials. In order to ensure that these fluids can be continuously and stably supplied to each process link, they must be heated externally to maintain their necessary fluidity. Therefore, heating belts or heating pipeline systems are widely used. They can accurately control the temperature and ensure that the chemicals always maintain the required physical state in the transmission pipeline, thereby ensuring the smooth progress of the semiconductor manufacturing process.

[0003] Heating tape is mainly used to maintain the temperature of chemicals, gases or other process media within a certain range. However, when the heating tape or the machine is accidentally powered off, the temperature cannot be effectively controlled, resulting in changes in the properties of these media, such as increased viscosity, solidification or condensation. Condensate may pollute the vacuum environment and affect the purity of the process. At the same time, condensation will cause the volume of gas in the pipeline to decrease, thereby changing the vacuum degree of the system, affecting the working efficiency of the vacuum pump and the pressure stability of the entire system. If too much condensate accumulates, it may block the pipeline or valve, hinder airflow, cause mechanical damage, and increase maintenance costs.

[0004] There are also emergency heating devices for pipelines on the market. For example, a Chinese patent with publication number CN102811504A discloses a new design method for heating belts. The patent scheme is to design multiple heating belts. When one of the heating belts is powered off, it is replaced by another heating belt that can be powered on normally. Although this plays an emergency insulation role to a certain extent, the setting of redundant heating belts greatly increases the cost. Moreover, if the entire equipment system is powered off, all heating belts cannot be used, which means that the emergency insulation capability is lost. Summary of the invention

[0005] The purpose of the present invention is to overcome the deficiencies of the prior art and to provide an emergency heating device and a semiconductor device, which are designed to automatically start and realize the emergency heat preservation function when a power failure occurs.

[0006] To achieve the above object, the present invention adopts the following technical solutions:

[0007] In one aspect, the present invention provides an emergency heating device, wherein a heating target is directly heated by a heating source or assisted by the emergency heating device, comprising:

[0008] A heating pack, in contact with the heating source or the heating target surface, wherein the heating pack contains a heating substance, and the heating substance generates heat when in contact with oxygen;

[0009] An electromagnetic device, the electromagnetic device being installed on one side of the heating pack;

[0010] When the heating source cannot heat the heating target normally, the electromagnetic device loses magnetism and punctures the heating pack, thereby achieving direct or indirect heating of the heating target by the heating pack.

[0011] Furthermore, when the heating target is a pipe without fins, the heating source is a heating belt, and the heating belt is arranged on the periphery of the pipe, the heating pack is arranged on the periphery of the heating belt.

[0012] Furthermore, the electromagnetic device is arranged outside the heating pack.

[0013] Furthermore, the electromagnetic device includes a shell, a movable plate, a mounting plate, a spring, a piercing piece and an electromagnet. A window for avoiding the piercing piece is provided on one side of the shell close to the heating pack. The mounting plate is fixed in the shell. One end of the movable plate is hinged to the mounting plate. The piercing piece is fixed to the movable plate. The piercing piece has one or more pointed structures, and the pointed structures face the window. One end of the spring is connected to the movable plate, and the other end of the spring is connected to the mounting plate. When the electromagnet is energized, the electromagnet adsorbs the piercing piece, and the piercing piece stores force elastically. When the electromagnet is de-energized, the piercing piece gets rid of the adsorption of the electromagnet and punctures the heating pack under the elastic force of the spring.

[0014] Furthermore, when the heating target is a pipeline with fins, the heating source is a heating belt, and the heating belt is arranged on the periphery of the fins of the pipeline, the heating pack is arranged between the gaps between two adjacent fins.

[0015] Furthermore, the electromagnetic device is arranged at the joint between the upper and lower sections of the heating belt, and between the upper and lower heating packs corresponding to the upper and lower sections of the heating belt.

[0016] Furthermore, the electromagnetic device includes a shell, a mounting plate, an upper piercing piece, a lower piercing piece, an upper spring, a lower spring and an electromagnet, the upper and lower sides of the shell are respectively provided with an upper window and a lower window for avoiding the upper piercing piece and the lower piercing piece, the mounting plate is fixed in the shell, the upper end of the upper spring is connected to the upper piercing piece, the lower end of the upper spring is connected to the mounting plate, the upper piercing piece has one or more upper pointed structures, the upper pointed structures face the upper window, the upper end of the lower spring is connected to the mounting plate, and the lower spring The lower end is connected to the lower piercing piece, and the lower piercing piece has one or more lower pointed structures, and the lower pointed structures face the lower window; when the electromagnet is energized, the electromagnet adsorbs the upper piercing piece and the lower piercing piece, and the upper piercing piece and the lower piercing piece elastically store force, and when the electromagnet is de-energized, the upper piercing piece gets rid of the adsorption of the electromagnet and punctures the upper heating pack under the elastic force of the upper spring, and the lower piercing piece gets rid of the adsorption of the electromagnet and punctures the lower heating pack under the elastic force of the lower spring.

[0017] Furthermore, when the heating target is a can container, the heating pack is disposed on the periphery of the can container.

[0018] Furthermore, the electromagnetic device is arranged outside the heating pack.

[0019] Furthermore, the heating material in the heating pack includes iron powder.

[0020] On the other hand, the present invention further provides a semiconductor device, comprising the above-mentioned emergency heating device.

[0021] Compared with the prior art, the present invention has the following beneficial effects: an emergency heating device, in which the heating target is directly heated by a heating source or assisted by an emergency heating device, comprising a heating pack and an electromagnetic device, wherein the heating pack contacts the surface of the heating source or the heating target, the heating pack contains a heating substance, and the heating substance generates heat when in contact with oxygen, and the electromagnetic device is installed on one side of the heating pack. When the heating source cannot heat the heating target normally, the electromagnetic device loses magnetism and punctures the heating pack, thereby achieving direct or indirect heating of the heating target by the heating pack. In actual use, if there is a sudden power failure due to a power failure, the electromagnetic device automatically loses magnetism when the power is off, thereby automatically puncturing the heating pack to release heat, so as to provide emergency insulation for the heating target.

[0022] The above description is only an overview of the technical solution of the present invention. In order to more clearly understand the technical means of the present invention, it can be implemented in accordance with the contents of the specification. In order to make the above and other purposes, features and advantages of the present invention more obvious and easy to understand, the following preferred embodiments are specifically cited and described in detail as follows. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other accompanying drawings can be obtained based on these accompanying drawings without paying any creative work.

[0024] Figure 1 The use state of an emergency heating device provided in the first embodiment of the present invention Figure 1 ;

[0025] Figure 2 The use state of an emergency heating device provided in the first embodiment of the present invention Figure 2 ;

[0026] Figure 3 The use state of an emergency heating device provided in the second embodiment of the present invention Figure 1 ;

[0027] Figure 4 The use state of an emergency heating device provided in the second embodiment of the present invention Figure 2 .

[0028] Reference numerals

[0029] 1. Electromagnetic device; 11. Piercing piece; 111. Pointed structure; 12. Electromagnet; 13. Movable plate; 14. Spring; 15. Shell; 151. Air inlet; 16. Mounting plate; 2. Heating pack; 21. Protective film; 22. Heating material; 3. Electromagnetic device; 31. Shell; 32. Mounting plate; 33. Upper piercing piece; 331. Upper pointed structure; 34. Lower piercing piece; 341. Lower pointed structure; 35. Upper spring; 36. Lower spring; 37. Electromagnet; 100. Pipeline; 110. Fin; 200. Heating belt. DETAILED DESCRIPTION

[0030] The technical solution of the present invention will be clearly and completely described below in conjunction with the specific embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0031] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.

[0032] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In the description of the present invention, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0033] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0034] In the present invention, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being "above", "above" or "above" a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being "below", "below" or "below" a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0035] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be a central element. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. The terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used herein are for illustrative purposes only and are not intended to be the only implementation method.

[0036] Embodiment 1

[0037] like Figure 1 to Figure 2 As shown, an embodiment of the present invention provides an emergency heating device, in which a heating target is directly heated by a heating source or assisted by an emergency heating device, and includes a heating pack 2 and an electromagnetic device 1. The heating pack 1 is in contact with the surface of the heating source or the heating target. The heating pack 1 contains a heating substance 22, and the heating substance 22 generates heat when in contact with oxygen. The electromagnetic device 2 is installed on one side of the heating pack 1. When the heating source cannot heat the heating target normally, the electromagnetic device 2 loses magnetism and punctures the heating pack 1, thereby achieving direct or indirect heating of the heating target by the heating pack 1.

[0038] When the electromagnetic device 1 loses power and magnetism, the electromagnetic device 1 has the ability to puncture the heating bag 2. In actual use, if there is a sudden power outage due to a power failure, the electromagnetic device 1 automatically loses magnetism (loses magnetism) when the power is off, thereby automatically puncturing the heating bag 2 to release heat, so as to provide emergency insulation for the heating target. Through this automatic mechanical trigger mechanism, the complexity of the design is simplified, the reliability and adaptability are improved, and the heating function can be enabled immediately, ensuring that the heating target can still maintain an appropriate temperature in the event of an emergency power outage, buying time for power failure recovery, and reducing the losses caused by power outages.

[0039] It should be noted that the packaging material of the heating pack 2 is made of a material that is easy to puncture, or at least such a material is used in the part that needs to be punctured, but at the same time, it is necessary to ensure that the internal heating substance 22 is effectively packaged under normal use conditions to prevent moisture or other environmental factors. The heating substance 22 inside the heating pack 2 is a substance that can produce an exothermic reaction when it comes into contact with oxygen or air.

[0040] Generally, a protective film 21 is provided at the portion of the heating pack 2 that needs to be punctured. The material of the protective film 21 may be aluminum foil, polyethylene film, polyester film, or the like.

[0041] In one embodiment, the heating material 22 includes iron powder, which undergoes a chemical reaction when in contact with oxygen or oxygen in the air, thereby releasing heat. It should be noted that the release of heat by iron powder in contact with oxygen is common chemical knowledge and will not be described in detail here.

[0042] In one embodiment, the heating material 22 includes not only iron powder but also other chemical materials, such as vermiculite, activated carbon inorganic salt, etc. Vermiculite has good adsorption and heat storage capacity. In the heating bag 2, vermiculite can absorb and retain the heat released by the oxidation reaction, thereby extending the heating time and stabilizing the output temperature. Activated carbon has a high porosity and good adsorption capacity, and can adsorb oxygen in the air, thereby increasing the availability of oxygen in the reaction, which helps to accelerate the oxidation reaction of the iron powder and improve the heating efficiency.

[0043] Of course, iron powder may not be used as the heating material 22. Specifically, other materials having similar oxidation exothermic properties may be used to replace iron powder, such as aluminum powder or magnesium powder.

[0044] like Figure 2 As shown, the electromagnetic device 1 includes a housing 15, a movable plate 13, a mounting plate 16, a spring 14, a piercing member 11 and an electromagnet 12, and the piercing member 11 is elastically arranged by the spring 14. Specifically, the housing 15 serves as a protection and support structure, and contains the movable plate 13, the mounting plate 16, the spring 14, the piercing member 11 and the electromagnet 12. The housing 15 is provided with a window for avoiding the piercing member 11, so that the piercing member 11 extends out of the window and contacts the heating pack 2. The mounting plate 16 is fixed in the housing 15, one end of the movable plate 13 is hinged to the mounting plate 16, the piercing member 11 is fixed on the movable plate 13, and the piercing member 11 has one or more pointed structures 111, and the pointed structures face the window of the housing 15. One end of the spring 14 is connected to the movable plate 13, and the other end is connected to the mounting plate 16. The spring 14 provides elastic restoring force. The electromagnet 12 is fixed on the mounting plate 16. When power is turned on, a magnetic field is generated. The magnetic force of the electromagnet 12 is used to adsorb the movable plate 13, so that it overcomes the elastic force of the spring 14 to ensure that the piercing member 11 and the heating pack 2 are in a non-contact state. In this state, the movable plate 13 is in an elastic force storage state. When the electromagnet 12 is powered off and loses magnetism, the movable plate 13 moves toward the heating pack 2 under the elastic force of the spring 14, so that the pointed structure 111 of the piercing member 11 contacts the protective film 21 of the heating pack 2 and punctures it.

[0045] In one embodiment, the housing 15 is provided with an air inlet 151, through which oxygen is provided for the reaction of the heating material 22 when the heating pack 2 is punctured, so that the chemical reaction can proceed normally. Of course, if oxygen for the reaction can be provided by other means, the housing 15 does not need to have an air inlet 151.

[0046] In one embodiment, when the heating target is a pipe 100 without fins, the heating source is a heating belt 200 , and the heating belt 200 is disposed on the periphery of the pipe 100 , the heating pack 2 is disposed on the periphery of the heating belt 200 .

[0047] like Figure 1As shown, a pipeline 100 without fins, that is, a pipeline 100 with a smooth outer surface, a heating belt 200 is wrapped around the periphery of the pipeline 100, the heating belt 200 can be designed to be ring-shaped or belt-shaped, and wrapped around the periphery of the heating belt 200, and the electromagnetic device 1 is fixed to the outside of the heating belt 200. When the heating belt 200 is powered off or the power fails, the electromagnetic device 1 loses its magnetism, thereby puncturing the protective film 21 of the heating bag 2, so that the heating material 22 in the heating bag 2 contacts oxygen to generate heat for emergency insulation of the pipeline 100.

[0048] An embodiment of the present invention further provides a semiconductor device, including the above-mentioned emergency heating device. Except for the above-mentioned emergency heating device, the remaining structures of the semiconductor device can be the same as those in the prior art, and the remaining structures are not described in detail here.

[0049] Embodiment 2

[0050] The difference between this embodiment and the first embodiment is that the setting position of the heating pack 2 is different. Specifically, when the heating target is a pipeline 100 with fins 110, the heating source is a heating belt 200, and the heating belt 200 is arranged at the periphery of the fins 100 of the pipeline 100, the heating pack 2 is arranged between the gaps of two adjacent fins 110 arranged in the circumferential direction, and the electromagnetic device 3 is arranged at the joint of the upper and lower sections of the heating belt 200, and between the upper and lower heating packs 2 corresponding to the upper and lower sections of the heating belt 200.

[0051] like Figure 3 to Figure 4 As shown, the periphery of the pipeline 100 is provided with a plurality of circumferentially arranged fins 110, and the fins 110 are extended away from the center of the pipeline 100, and the heating belt 200 is wrapped around the periphery of the fins 110. The heating belt 200 and the two adjacent fins 110 enclose a gap, and the heating pack 2 is located in the gap. With such a design, the fins 110 can separate the heating materials 22 of each heating pack 2, and the fins 110 themselves can increase the heat conduction area, thereby improving the heating efficiency. In addition, the heating packs 2 in each gap are separated, so it is convenient to replace the heating packs 2 in each gap after use.

[0052] It should be noted that since the pipeline 100 is relatively long, multiple sections of heating belts 200 need to be connected up and down along the length direction of the pipeline 100. Correspondingly, the positions where the upper and lower heating packs 2 are separated are aligned with the positions where the upper and lower sections of the heating belts 200 are connected. This design facilitates the installation of the electromagnetic device 3.

[0053] like Figure 4As shown, the electromagnetic device 3 includes a shell 31, a mounting plate 32, an upper piercing member 33, a lower piercing member 34, an upper spring 35, a lower spring 36 and an electromagnet 37. The upper and lower sides of the shell 31 are respectively provided with an upper window and a lower window for avoiding the upper piercing member 33 and the lower piercing member 34. The mounting plate 32 is fixed in the shell 31. The upper end of the upper spring 35 is connected to the upper piercing member 34, and the lower end of the upper spring 35 is connected to the mounting plate 32. The upper piercing member 33 has one or more upper pointed structures 331, and the upper pointed structures 331 face the upper window. The upper end of the lower spring 36 is connected to the mounting plate 32, and the lower end of the lower spring 36 is connected to the lower piercing member 34. The lower piercing member 34 has one or more lower pointed structures 341, and the lower pointed structure 341 faces the lower window. When the electromagnet 37 is energized, the electromagnet 37 adsorbs the upper piercing piece 33 and the lower piercing piece 34, and the upper piercing piece 33 and the lower piercing piece 34 perform elastic force storage. When the electromagnet 37 is de-energized, the upper piercing piece 33 gets rid of the adsorption of the electromagnet 37 and punctures the protective film 21 of the upper heating bag 2 under the elastic force of the upper spring 35, so that the heating material 22 in the upper heating bag 2 contacts oxygen to generate heat for emergency insulation of the pipeline 100. At the same time, the lower piercing piece 34 gets rid of the adsorption of the electromagnet 37 and punctures the protective film 21 of the lower heating bag 2 under the elastic force of the lower spring 36, so that the heating material 22 in the lower heating bag 2 contacts oxygen to generate heat for emergency insulation of the pipeline 100.

[0054] Embodiment 3

[0055] The difference between this embodiment and the first embodiment is that the heating target object of the heating pack 2 is different. Specifically, when the heating target is a can container, the heating pack 2 is arranged at the periphery of the can container, and the electromagnetic device 1 is arranged outside the heating pack 2.

[0056] For a tank container with a larger area, the heating pack 2 can be designed as a large-area covering structure, similar to the shape of a blanket or a cover. This ensures that the heating pack 2 can evenly cover the outer surface of the tank, and its size should be tailored according to the size of the tank.

[0057] The above is only a specific embodiment of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can easily think of various equivalent modifications or replacements within the technical scope disclosed by the present invention, and these modifications or replacements should be included in the protection scope of the present invention. Therefore, the protection scope of the present invention shall be based on the protection scope of the claims.

Claims

1. An emergency heating device, wherein the heating target is directly heated by a heating source or assisted by the emergency heating device, characterized in that: include: A heating pack, in contact with the heating source or the heating target surface, wherein the heating pack contains a heating substance, and the heating substance generates heat when in contact with oxygen; An electromagnetic device, the electromagnetic device being installed on one side of the heating pack; When the heating source cannot heat the heating target normally, the electromagnetic device loses magnetism and punctures the heating pack, thereby achieving direct or indirect heating of the heating target by the heating pack.

2. An emergency heating device according to claim 1, characterized in that: When the heating target is a pipe without fins, the heating source is a heating belt, and the heating belt is arranged on the periphery of the pipe, the heating pack is arranged on the periphery of the heating belt.

3. An emergency heating device according to claim 2, characterized in that: The electromagnetic device is arranged outside the heating pack.

4. An emergency heating device according to claim 3, characterized in that: The electromagnetic device includes a shell, a movable plate, a mounting plate, a spring, a piercing piece and an electromagnet. A window for avoiding the piercing piece is provided on one side of the shell close to the heating pack. The mounting plate is fixed in the shell. One end of the movable plate is hinged to the mounting plate. The piercing piece is fixed to the movable plate. The piercing piece has one or more pointed structures, and the pointed structures face the window. One end of the spring is connected to the movable plate, and the other end of the spring is connected to the mounting plate. When the electromagnet is energized, the electromagnet adsorbs the piercing piece, and the piercing piece stores force elastically. When the electromagnet is de-energized, the piercing piece gets rid of the adsorption of the electromagnet and punctures the heating pack under the elastic force of the spring.

5. The emergency heating device according to claim 1, characterized in that: When the heating target is a pipeline with fins, the heating source is a heating belt, and the heating belt is arranged on the periphery of the fins of the pipeline, the heating pack is arranged between the gaps between two adjacent fins.

6. An emergency heating device according to claim 5, characterized in that: The electromagnetic device is arranged at the joint of the upper and lower sections of the heating belts, and between the upper and lower heating packs corresponding to the upper and lower sections of the heating belts.

7. An emergency heating device according to claim 6, characterized in that: The electromagnetic device comprises a shell, a mounting plate, an upper piercing member, a lower piercing member, an upper spring, a lower spring and an electromagnet, wherein the upper and lower sides of the shell are respectively provided with an upper window and a lower window for avoiding the upper piercing member and the lower piercing member, the mounting plate is fixed in the shell, the upper end of the upper spring is connected to the upper piercing member, the lower end of the upper spring is connected to the mounting plate, the upper piercing member has one or more upper pointed structures, the upper pointed structures face the upper window, the upper end of the lower spring is connected to the mounting plate, and the lower end of the lower spring The lower piercing piece is connected to the lower piercing piece, and the lower piercing piece has one or more lower pointed structures, and the lower pointed structures face the lower window; when the electromagnet is energized, the electromagnet adsorbs the upper piercing piece and the lower piercing piece, and the upper piercing piece and the lower piercing piece elastically store force, and when the electromagnet is de-energized, the upper piercing piece gets rid of the adsorption of the electromagnet and punctures the upper heating pack under the elastic force of the upper spring, and the lower piercing piece gets rid of the adsorption of the electromagnet and punctures the lower heating pack under the elastic force of the lower spring.

8. An emergency heating device according to claim 1, characterized in that: When the heating target is a can container, the heating pack is arranged on the periphery of the can container.

9. An emergency heating device according to claim 8, characterized in that: The electromagnetic device is arranged outside the heating pack.

10. An emergency heating device according to claim 1, characterized in that: The heating material in the heating pack includes iron powder.

11. A semiconductor device, characterized in that: The invention comprises the emergency heating device as described in any one of claims 1 to 10.

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