Crystal growth weight monitoring structure for silicon carbide furnace

Abstract

The invention provides a crystal growth weight monitoring structure for a silicon carbide furnace, which comprises a weighing structure, a weighing sensor of the weighing structure is directly connected with a seed rod assembly, the seed rod assembly comprises a seed rod, the lower end of the seed rod is connected with a seed plate, the weighing structure and the seed rod lift and rotate together, and the weighing structure comprises a lifting power mechanism and a screw rod. The lifting power mechanism drives the screw rod to lift and further drives the seed crystal seat to lift along the guide rail; the weighing structure further comprises a rotating power mechanism, the rotating power mechanism transmits power to the seed crystal outer rod through a driving belt wheel, a belt and a driven belt wheel, a weighing unit is arranged in the weighing structure and comprises a weighing sensor and a weighing sensor accessory, and the weighing sensor accessory comprises a heater, a heating body, heat preservation cotton and a housing; the heating body is installed on the outer side of the weighing sensor, the heater is installed on the outer side of the heating body, the cover body is installed on the outer side of the heater, heat preservation cotton is placed in the cover shell, and a slide wire ring is arranged on the top of the weighing sensor.

Description

Technical Field

[0001] The invention relates to the field of silicon carbide furnaces, and in particular to a crystal growth weight monitoring structure for a silicon carbide furnace. Background Art

[0002] Silicon carbide furnace crystal growth is carried out in a closed insulation layer. In order to ensure the stability and uniformity of the thermal field, it is necessary to avoid opening holes in the insulation layer for window observation. Therefore, the means for monitoring the crystal growth situation are limited. Summary of the invention

[0003] In view of the problems existing in the prior art, the present invention provides a crystal growth weight monitoring structure for a silicon carbide furnace to solve at least one of the above technical problems.

[0004] The technical solution of the present invention is: a crystal growth weight monitoring structure for a silicon carbide furnace, comprising a weighing structure, characterized in that a weighing sensor of the weighing structure is directly connected to a seed crystal rod assembly, the seed crystal rod assembly comprises a seed crystal rod, the lower end of the seed crystal rod is connected to a seed crystal plate, the weighing structure is lifted and rotated together with the seed crystal rod, the weighing structure comprises a lifting power mechanism and a screw rod, the lifting power mechanism drives the screw rod to lift and lower, and then drives the seed crystal seat to lift and lower along the guide rail;

[0005] The weighing structure also includes a rotating power mechanism, which transmits power to the seed crystal outer rod through a driving pulley, a belt and a driven pulley. A weighing unit is arranged inside the weighing structure, and the weighing unit includes a weighing sensor and a weighing sensor accessory. The weighing sensor accessory includes a heater, a heating element, a heat-insulating cotton and a cover.

[0006] The heating element is installed on the outside of the weighing sensor, the heater is installed on the outside of the heating element, the cover is installed on the outside of the heater, the thermal insulation cotton is placed inside the cover, and a sliding wire ring is provided on the top of the weighing sensor.

[0007] The heater is used to maintain the stability of the ambient temperature of the load cell to reduce the impact of the environment on the weighing accuracy. The load cell is equipped with a sliding wire ring on the top to achieve the relative fixation of the load cell cable and cover and the separation of the load cell itself from rotation. The load cell is directly connected to the growing crystal for more accurate monitoring. The load cell is built into the sealed crystal growth chamber to avoid being affected by the external atmosphere. The rotating structure drives the driven pulley and the seed crystal outer shaft to rotate, and the load cell and the seed crystal inner rod to rotate synchronously.

[0008] Further preferably, the seed crystal rod assembly includes a seed crystal outer rod, a slip-on flange, a steel wire, a seed crystal inner rod, a magnetic fluid, a water-cooled shaft, a bellows, a bearing, a horizontal plate, a centering plate, a horizontal adjustment screw, a pressure plate, a vacuum chamber and an outer nut, a slip-on flange and a steel wire are coaxially mounted on the outer side of the seed crystal outer rod, and a sealing ring is provided between the weighing sensor housing and the seed crystal outer rod. The slip-on flange and the steel wire are used to connect the weighing sensor.

[0009] Preferably, a driven pulley and a magnetic fluid are coaxially mounted on the outer side of the seed crystal outer rod, and the magnetic fluid can realize the sealed rotation of the seed crystal outer shaft.

[0010] Further preferably, the lower end of the weighing sensor is threadedly connected to the upper end of the seed crystal inner rod.

[0011] Further preferably, a magnetic fluid is installed on the horizontal plate, a water-cooled shaft is installed on the lower side of the horizontal plate, sealing rings are provided at the connection between the horizontal plate and the magnetic fluid and at the connection between the horizontal plate and the water-cooled shaft, and four horizontal adjustment screws are evenly distributed on the horizontal plate, and the center of the horizontal adjustment screw is coaxially installed with a screw for fixing the horizontal plate on the centering plate.

[0012] The present invention prevents the seed crystal rod from being affected by the high temperature in the cavity by embedding the water-cooled shaft in the cavity, thereby ensuring that it can still work normally in a high-temperature environment. The horizontal adjustment screw is used to adjust the horizontal plate, and the centering plate is used to adjust the centering of the seed crystal shaft assembly.

[0013] Further preferably, the centering plate is seated on the seed crystal seat and fixed by a pressing plate.

[0014] Further preferably, a bellows is installed below the water-cooled shaft through a flange, a seal is provided at the connection between the water-cooled shaft and the bellows, the lower end of the bellows is connected to the vacuum cavity, and a sealing ring is provided at the connection between the bellows and the vacuum cavity.

[0015] Preferably, a bearing is installed between the lower end of the water-cooled shaft and the seed crystal outer rod, and the water-cooled shaft and the horizontal plate are fixed on the seed crystal seat. The rotating structure can ensure the stability of the rotation of the seed crystal outer rod and the seed crystal inner rod.

[0016] Further preferably, an external nut is installed between the lower end of the seed crystal outer rod and the seed crystal inner rod, the external nut is an external thread, and circular holes are evenly drilled on the external nut, and a gap is left between the external nut and the seed crystal inner rod.

[0017] The circular hole is used for ventilation, and the gap is used to guide the coaxial and stable rotation of the rod inside the seed crystal.

[0018] Further preferably, the lower end of the seed crystal inner rod is connected to a graphite rod assembly, which includes a copper head top screw, a top screw, a connecting rod, an adjustment rod, a locking block, a graphite rod and a seed crystal plate, and the upper end of the connecting rod is threadedly connected to the seed crystal inner rod and is tightened by a copper head top screw.

[0019] Preferably, the connecting rod and the adjusting rod are fixed by means of a top screw, and the adjusting rod is evenly provided with four threaded holes for installing the top screws on the upper and lower sides. The connecting rod and the adjusting rod are fixed by means of the threaded holes, and the centering of the graphite rod assembly can be further adjusted by means of the eight top screws.

[0020] Further preferably, the locking block clamps the graphite rod and then is locked and fixed with the adjustment rod by means of screws, and the lower end of the graphite rod is threadedly connected to the seed crystal plate.

[0021] Beneficial effects:

[0022] 1. Directly connect the weighing sensor to the inner rod of the seed crystal, and directly connect the seed crystal plate to the lower end of the inner rod of the seed crystal. The weighing sensor can directly monitor the weight of the growing crystal;

[0023] 2. There are water inlet and outlet nozzles on the water-cooling shaft, which can be cooled by water to ensure that the seed crystal rod assembly can work in a high-temperature sealed cavity.

[0024] 3. The weighing sensor is built into the sealed cavity and is in the same growth space as the growing seed crystal, which can avoid being affected by the outside atmosphere. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0026] Figure 2 It is a schematic diagram of the lifting of the weighing structure of the present invention;

[0027] Figure 3 It is a schematic diagram of the rotation of the weighing structure of the present invention;

[0028] Figure 4 It is a schematic diagram of the structure of the weighing unit of the present invention;

[0029] Figure 5 It is a structural schematic diagram of the seed crystal rod assembly of the present invention;

[0030] Figure 6 It is a structural schematic diagram of the graphite rod assembly of the present invention.

[0031] In the figure: 1. lifting power mechanism; 2. screw rod; 3. seed crystal seat; 4. guide rail; 5. rotating power mechanism; 6. driving pulley; 7. belt; 8. driven pulley; 9. seed crystal outer rod; 10. weighing sensor; 11. heater; 12. heating element; 13. insulation cotton; 14. cover; 15. slip-on flange; 16. steel wire; 17. seed crystal inner rod; 18. magnetic fluid; 19. water-cooled shaft; 20. bellows; 21. bearing; 22. horizontal plate; 23. centering plate; 24. horizontal adjustment screw; 25. pressure plate; 26. vacuum chamber; 27. outer nut; 28. copper head top screw; 29. ​​top screw; 30. connecting rod; 31. adjustment rod; 32. locking block; 33. graphite rod; 34. seed crystal plate DETAILED DESCRIPTION

[0032] The present invention will be further described below in conjunction with the accompanying drawings.

[0033] Reference Figure 1-Figure 6 As shown, a crystal growth weight monitoring structure for a silicon carbide furnace includes a weighing structure, characterized in that a weighing sensor of the weighing structure is directly connected to a seed crystal rod assembly, the seed crystal rod assembly includes a seed crystal rod, and the lower end of the seed crystal rod is connected to a seed crystal plate, the weighing structure is lifted and rotated together with the seed crystal rod, the weighing structure includes a lifting power mechanism 1 and a screw rod 2, the lifting power mechanism drives the screw rod to lift and lower, and then drives the seed crystal seat 3 to lift and lower along a guide rail 4; the weighing structure also includes a rotating power mechanism 5, the rotating power mechanism transmits power to a seed crystal outer rod 9 through a driving pulley 6, a belt 7 and a driven pulley 8, a weighing unit is arranged inside the weighing structure, the weighing unit includes a weighing sensor 10 and a weighing sensor accessory, the weighing sensor accessory includes a heater 11, a heating element 12, thermal insulation cotton 13 and a cover shell 14; the heating element is installed on the outside of the weighing sensor, the heater is installed on the outside of the heating element, the cover shell is installed on the outside of the heater, thermal insulation cotton is placed inside the cover shell, and the weighing sensor has a sliding wire ring on the top.

[0034] The heater is used to maintain the stability of the ambient temperature of the load cell to reduce the impact of the environment on the weighing accuracy. The load cell is equipped with a sliding wire ring on the top to achieve the relative fixation of the load cell cable and cover and the separation of the load cell itself from rotation. The load cell is directly connected to the growing crystal for more accurate monitoring. The load cell is built into the sealed crystal growth chamber to avoid being affected by the external atmosphere. The rotating structure drives the driven pulley and the seed crystal outer shaft to rotate, and the load cell and the seed crystal inner rod to rotate synchronously.

[0035] Further preferably, the seed crystal rod assembly includes a seed crystal outer rod 9, a slip-on flange 15, a steel wire 16, a seed crystal inner rod 17, a magnetic fluid 18, a water-cooled shaft 19, a bellows 20, a bearing 21, a horizontal plate 22, a centering plate 23, a horizontal adjustment screw 24, a pressure plate 25, a vacuum chamber 26 and an outer nut 27. A slip-on flange and a steel wire are coaxially mounted on the outer side of the seed crystal outer rod, and a sealing ring is provided between the weighing sensor housing and the seed crystal outer rod. The slip-on flange and the steel wire are used to connect the weighing sensor.

[0036] Further preferably, a driven pulley and a magnetic fluid are coaxially mounted on the outer side of the seed crystal outer rod. The magnetic fluid can realize the sealed rotation of the seed crystal outer shaft.

[0037] Further preferably, the lower end of the weighing sensor is threadedly connected to the upper end of the inner rod of the seed crystal.

[0038] Further preferably, a magnetic fluid is installed on the horizontal plate, a water-cooled shaft is installed on the lower side of the horizontal plate, sealing rings are provided at the connection between the horizontal plate and the magnetic fluid and at the connection between the horizontal plate and the water-cooled shaft, four horizontal adjustment screws are evenly distributed on the horizontal plate, and the screws for fixing the horizontal plate to the centering plate are coaxially installed at the center of the horizontal adjustment screws. The present invention prevents the seed crystal rod from being affected by the high temperature in the cavity by embedding the water-cooled shaft into the cavity, ensuring that it can still work normally in a high temperature environment. The horizontal adjustment screw is used to adjust the horizontal plate horizontally, and the centering plate is used to adjust the centering of the seed crystal shaft assembly.

[0039] Further preferably, the centering plate is seated on the seed crystal seat and fixed by a pressing plate.

[0040] Further preferably, a bellows is installed below the water-cooled shaft through a flange, a seal is provided at the connection between the water-cooled shaft and the bellows, the lower end of the bellows is connected to the vacuum chamber, and a sealing ring is provided at the connection between the bellows and the vacuum chamber.

[0041] Preferably, a bearing is installed between the lower end of the water-cooled shaft and the seed crystal outer rod, and the water-cooled shaft and the horizontal plate are fixed on the seed crystal seat. The rotating structure can ensure the stability of the rotation of the seed crystal outer rod and the seed crystal inner rod.

[0042] Further preferably, an outer nut is installed between the lower end of the seed crystal outer rod and the seed crystal inner rod, the outer nut is an external thread, and circular holes are evenly drilled on the outer nut, and a gap is left between the outer nut and the seed crystal inner rod. The circular holes are used for ventilation, and the gap is used to guide the coaxial stable rotation of the seed crystal inner rod.

[0043] Further preferably, the lower end of the inner rod of the seed crystal is connected to a graphite rod assembly, which includes a copper head top screw 28, a top screw 29, a connecting rod 30, an adjustment rod 31, a locking block 32, a graphite rod 33 and a seed crystal plate 34. The upper end of the connecting rod is threadedly connected to the inner rod of the seed crystal and is tightened by a copper head top screw.

[0044] Preferably, the connecting rod and the adjusting rod are fixed by means of a top screw, and the adjusting rod is evenly provided with four threaded holes for installing the top screws on the upper and lower sides. The connecting rod and the adjusting rod are fixed by means of the threaded holes, and the centering of the graphite rod assembly can be further adjusted by means of the eight top screws.

[0045] Further preferably, after the locking block clamps the graphite rod, it is locked and fixed with the adjustment rod by means of screws, and the lower end of the graphite rod is threadedly connected to the seed crystal plate 34 .

[0046] Beneficial effects:

[0047] 1. Directly connect the weighing sensor to the inner rod of the seed crystal, and directly connect the seed crystal plate to the lower end of the inner rod of the seed crystal. The weighing sensor can directly monitor the weight of the growing crystal;

[0048] 2. There are water inlet and outlet nozzles on the water-cooling shaft, which can be cooled by water to ensure that the seed crystal rod assembly can work in a high-temperature sealed cavity.

[0049] 3. The weighing sensor is built into the sealed cavity and is in the same growth space as the growing seed crystal, which can avoid being affected by the outside atmosphere.

[0050] The above are only preferred embodiments of the present invention. It should be pointed out that, for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principles of the present invention. These improvements and modifications should also be regarded as the scope of protection of the present invention.

Claims

1. A crystal growth weight monitoring structure for a silicon carbide furnace, comprising a weighing structure, characterized in that: The weighing sensor of the weighing structure is directly connected to the seed crystal rod assembly, the seed crystal rod assembly includes a seed crystal rod, the lower end of the seed crystal rod is connected to the seed crystal plate, the weighing structure and the seed crystal rod are lifted and rotated together, the weighing structure includes a lifting power mechanism and a screw rod, the lifting power mechanism drives the screw rod to lift and lower, and then drives the seed crystal seat to lift and lower along the guide rail; The weighing structure also includes a rotating power mechanism, which transmits power to the seed crystal outer rod through a driving pulley, a belt and a driven pulley. A weighing unit is arranged inside the weighing structure, and the weighing unit includes a weighing sensor and a weighing sensor accessory. The weighing sensor accessory includes a heater, a heating element, a heat-insulating cotton and a cover. The heating element is installed on the outside of the weighing sensor, the heater is installed on the outside of the heating element, the cover is installed on the outside of the heater, the thermal insulation cotton is placed inside the cover, and a sliding wire ring is provided on the top of the weighing sensor.

2. The crystal growth weight monitoring structure for a silicon carbide furnace according to claim 1, characterized in that: The seed crystal rod assembly includes a seed crystal outer rod, a slip-on flange, a steel wire, a seed crystal inner rod, a magnetic fluid, a water-cooled shaft, a bellows, a bearing, a horizontal plate, a centering plate, a horizontal adjustment screw, a pressure plate, a vacuum chamber and an outer nut. A slip-on flange and a steel wire are coaxially installed on the outer side of the seed crystal outer rod, and a sealing ring is provided between the weighing sensor housing and the seed crystal outer rod.

3. The crystal growth weight monitoring structure for a silicon carbide furnace according to claim 2, characterized in that: A driven pulley and a magnetic fluid are coaxially mounted on the outer side of the seed crystal outer rod.

4. The crystal growth weight monitoring structure for a silicon carbide furnace according to claim 2, characterized in that: The lower end of the weighing sensor is threadedly connected to the upper end of the seed crystal inner rod.

5. The crystal growth weight monitoring structure for a silicon carbide furnace according to claim 2, characterized in that: A magnetic fluid is installed on the horizontal plate, and a water-cooled shaft is installed on the lower side of the horizontal plate. Sealing rings are provided at the connection between the horizontal plate and the magnetic fluid and at the connection between the horizontal plate and the water-cooled shaft. Four horizontal adjustment screws are evenly distributed on the horizontal plate, and the center of the horizontal adjustment screw is coaxially installed with a screw for fixing the horizontal plate on the centering plate.

6. The crystal growth weight monitoring structure for a silicon carbide furnace according to claim 2, characterized in that: The centering plate is seated on the seed crystal seat and is fixed by a pressing plate.

7. The crystal growth weight monitoring structure for a silicon carbide furnace according to claim 2, characterized in that: A bellows is installed below the water-cooled shaft through a flange, a seal is provided at the connection between the water-cooled shaft and the bellows, the lower end of the bellows is connected to the vacuum cavity, and a sealing ring is provided at the connection between the bellows and the vacuum cavity.

8. The crystal growth weight monitoring structure for a silicon carbide furnace according to claim 2, characterized in that: A bearing is installed between the lower end of the water-cooling shaft and the seed crystal outer rod, and the water-cooling shaft and the horizontal plate are fixed on the seed crystal seat.

9. The crystal growth weight monitoring structure for a silicon carbide furnace according to claim 2, characterized in that: An outer nut is installed between the lower end of the seed crystal outer rod and the seed crystal inner rod. The outer nut is an external thread and is evenly provided with drilled round holes. A gap is left between the outer nut and the seed crystal inner rod.

10. The crystal growth weight monitoring structure for a silicon carbide furnace according to claim 2, characterized in that: The lower end of the seed crystal inner rod is connected to a graphite rod assembly, which includes a copper head top screw, a top screw, a connecting rod, an adjustment rod, a locking block, a graphite rod and a seed crystal plate. The upper end of the connecting rod is threadedly connected to the seed crystal inner rod and is tightened by a copper head top screw.

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