Liquid medicine recovery equipment

Abstract

The invention discloses liquid medicine recovery equipment. The liquid medicine recovery equipment comprises a rotating table, the liquid medicine grooves are distributed in the peripheral direction of the rotating table, and outer liquid outlets are formed in the bottoms of the liquid medicine grooves. The mounting frame is arranged below the liquid medicine tank, and a guide linear rail is vertically arranged on the mounting frame; the inner flow dividing cover is arranged between the rotating table and the liquid medicine tank and can actively lift up and down in the guide linear rail through the inner driving part; the outer flow dividing cover is arranged between the inner flow dividing cover and the liquid medicine groove and can ascend and descend in the guide linear rail through an outer sliding part, and the outer sliding part is located above the inner driving part; the two limiting parts are arranged on the two sides of the mounting frame correspondingly. The pushing parts are arranged on the two sides of the inner flow dividing cover. The lifting motor connected with the inner air flow cover is additionally arranged, and then the pushing part is matched with the limiting part, so that the inner flow dividing cover and the outer flow dividing cover can form independent channels for liquid medicine recovery, independent recovery of two kinds of liquid medicine through single driving force is achieved, cost is low, control and adjustment are easy, the structure is compact, and the occupied area is small.

Description

Technical Field

[0001] The invention belongs to the technical field of wafer cleaning, and in particular relates to a recovery device for a chemical solution used in a wafer cleaning process. Background Art

[0002] In the wafer production process, wafer cleaning is essential for each workstation. Different workstations require different cleaning effects, and the types of chemicals used also vary depending on the process, especially single-wafer cleaning and etching equipment.

[0003] In order to save costs, various expensive chemical liquids need to be recycled and reused. During the recycling process, multiple recycling mechanisms are required to separate and then recycle in batches. In the existing structure, inner and outer double-layer diverter hoods are usually set to separate two different liquids. During the movement of the mechanism, the inner and outer diverter hoods are respectively controlled by multiple actuators to achieve up and down lifting. The actuators can be cylinders or electric modules. However, when using the cylinder, there are problems such as asynchronous lifting of a single cylinder, and the cylinder guide is not easy to adjust, which causes the diverter hood to break and deform. The electric module is more complicated to control during use, and the dual modules need to be controlled synchronously, with more controllers, complex electrical programs, and high costs. Therefore, the above two structures do not meet the existing needs, and are not conducive to the later maintenance of the equipment and the arrangement of other mechanisms. Summary of the invention

[0004] The purpose of the present invention is to overcome the deficiencies of the prior art and to provide a liquid medicine recovery device which has low overall cost, is easy to control and debug, and occupies a small area.

[0005] In order to achieve the above object, the technical solution adopted by the present invention is: a liquid medicine recovery device, comprising:

[0006] A rotating table, wherein the rotating table has a positioning PIN for clamping the wafer;

[0007] A liquid medicine tank is distributed along the outer circumference of the rotating platform, and a liquid outlet is provided at the bottom of the liquid medicine tank; a mounting frame is arranged below the liquid medicine tank, and a vertically arranged guide rail is provided on the mounting frame;

[0008] An inner flow divider cover is arranged between the rotating platform and the liquid medicine tank, and the inner flow divider cover can actively rise and fall in the guide rail through an inner driving part to guide the liquid medicine to flow out along the direction of the inner flow divider cover;

[0009] An outer flow divider cover is provided between the inner flow divider cover and the liquid medicine tank, and the outer flow divider cover can be lifted up and down in the guide rail through an outer sliding part to guide the liquid medicine to flow out along the gap between the inner flow divider cover and the outer flow divider cover, wherein the outer sliding part is located above the inner driving part;

[0010] A limiting part, wherein two limiting parts are respectively arranged on both sides of the mounting frame;

[0011] A pushing component is arranged on both sides of the inner flow dividing cover and is arranged corresponding to the limiting part;

[0012] When the inner driving part drives the inner flow divider cover to rise along the guide rail, the inner driving part synchronously drives the outer sliding part to rise along the guide rail, and the outer sliding part drives the outer flow divider cover to rise synchronously. When the upper surface of the inner flow divider cover is higher than the position of the wafer, the sprayed liquid is recovered by the inner liquid outlet along the guidance of the inner flow divider cover under the action of the centrifugal force of the wafer rotation. At this time, the pushing component follows the inner flow divider cover to rise and then pushes the limiting part to limit the lifting distance of the outer flow divider cover on the guide rail.

[0013] When the inner driving part drives the inner flow divider cover to descend along the guide rail, the inner flow divider cover is reset, and the outer flow divider cover descends to the lowest limit position of the limit part due to its own gravity. At this time, the wafer is located between the inner flow divider cover and the outer flow divider cover, and the sprayed liquid flows out along the gap between the inner flow divider cover and the outer flow divider cover under the action of the centrifugal force of the wafer rotation, and is recovered by the external liquid outlet;

[0014] When the recovery of the medicine liquid is completed, the internal driving part drives the internal diverter cover to rise again. At this time, the pushing component pushes the limiting part again to release the limiting part on the external diverter cover. Then the internal driving part drives the internal diverter cover to move downward, and the external diverter cover is reset due to its own gravity.

[0015] In one embodiment, the external liquid outlet and the internal liquid outlet are arranged adjacent to each other.

[0016] In one embodiment, the internal driving part includes a lifting motor vertically arranged on the mounting frame; the lifting motor drives the inner sliding block located on the guide rail to lift up and down; the inner sliding block is provided with an inner connecting plate distributed along the diameter direction of the medicine liquid tank, and inner columns are provided at both ends of the upper surface of the inner connecting plate; the inner columns are connected to the inner diversion cover.

[0017] In one embodiment, the outer sliding portion includes an outer sliding block slidably arranged on the guide rail; the outer sliding block is provided with an outer connecting plate located on the upper surface of the inner connecting plate, and outer columns are provided at both ends of the upper surface of the outer connecting plate, and the outer columns are connected to the outer diversion cover.

[0018] In one embodiment, the pushing component includes a first push plate and a second push plate, the first push plate extends from one side of the internal driving portion, and the extending end of the first push plate is provided with an inclined second push plate, so that when the pushing component rises, the second push plate can push the limiting portion.

[0019] In one embodiment, the limiting part includes a limiting plate and a telescopic assembly; the limiting plate is arranged on the outer sliding part, and a limiting slot is formed on the limiting plate; the telescopic assembly is arranged on the side of the mounting frame; the telescopic assembly includes a first guide tube, a second guide tube, a limiting rod, a buckle and a push rod;

[0020] The first guide tube and the second guide tube are vertically mounted on the mounting frame in sequence; the second guide tube has a first inner hole and a second inner hole coaxially arranged therein, and the diameter of the first inner hole is larger than the diameter of the second inner hole; an inner sleeve is arranged on the inner wall of the second inner hole, and an end of the inner sleeve opposite to the first guide tube has an inner tooth shape, and an end of the inner sleeve opposite to the inner tooth shape has guiding inner grooves equidistantly distributed along the circumferential direction of the inner wall of the inner sleeve, and the guiding inner grooves are arranged to penetrate toward the end of the inner tooth shape;

[0021] The limiting rod is inserted from the first guide tube and abuts against the end surface of the second inner hole, and a spring is sleeved on one side of the limiting rod facing the second inner hole;

[0022] The buckle is inserted from one end of the inner sleeve and connected with the limit rod, so that the spring on the limit rod is in a compressed state; a plurality of buckle guide strips are provided on the circumference of the end of the buckle opposite to the limit rod, and the end surface of the buckle guide strip opposite to the limit rod has an oblique tooth shape; wherein the buckle guide strip is limited in the guide inner groove;

[0023] A push rod sleeved on the buckle is provided between the buckle and the inner sleeve; the push rod sleeved on one side end face of the buckle is provided with a push rod tooth shape, and the push rod tooth shape is away from the buckle guide strip; a plurality of push rod guide strips distributed along the circumference of the push rod are provided at the rear end of the push rod tooth shape; the push rod guide strip is limited in the guide inner groove and is arranged opposite to the buckle guide strip.

[0024] In one embodiment, the number of the buckle guide strips is four.

[0025] Due to the application of the above technical solution, the present invention has the following advantages compared with the prior art:

[0026] The liquid medicine recovery equipment of the present invention drives the outer air vent and the inner air vent to rise synchronously by a lifting motor, and the first liquid medicine is sprayed after the inner air vent is higher than the position of the wafer, and the liquid medicine is recovered through the inner liquid outlet communicated with the inner air vent, and the outer air vent is limited by the limiting part at the same time; when the second liquid medicine needs to be sprayed, the lifting motor drives the inner air vent to descend, and the outer air vent moves to the lowest position of the limiting part under the action of its own gravity. At this time, the wafer is between the outer diverter hood and the inner air vent, so that the liquid medicine can flow into the outer liquid outlet through the gap between the outer air vent and the inner air vent and then be discharged, so that the liquid medicine can be recovered through different channels under the conditions of different liquid medicine spraying. The overall structure is compact, and a single driving motor can lift the inner and outer air vents up and down and limit the position of the outer air vent, so as to realize independent recovery of different liquid medicines. The overall occupied area is small, which is conducive to the later maintenance of the equipment and the arrangement of other mechanisms. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] The technical solution of the present invention is further described below in conjunction with the accompanying drawings:

[0028] Figure 1 It is a schematic diagram of the three-dimensional structure of an embodiment of the present invention;

[0029] Figure 2 for Figure 1 A schematic diagram from another perspective;

[0030] Figure 3 for Figure 1 A schematic diagram from another perspective;

[0031] Figure 4 A side view of an embodiment of the present invention;

[0032] Figure 5 for Figure 4 An internal cross-sectional view of

[0033] Figure 6 This is a schematic diagram of the use status of an embodiment of the present invention;

[0034] Figure 7 for Figure 6 An internal cross-sectional view of

[0035] Figure 8 This is a schematic diagram of another use state of an embodiment of the present invention;

[0036] Fig. 9 for Figure 8 An internal cross-sectional view of

[0037] Fig.10 It is a schematic diagram of the three-dimensional structure of the telescopic component in one embodiment of the present invention;

[0038] Fig.11 for Fig.10 An internal cross-sectional view of

[0039] Fig.12 for Fig.10 Schematic diagram of the three-dimensional decomposition of

[0040] Fig.13 It is a schematic diagram of the three-dimensional structure of a push rod in one embodiment of the present invention;

[0041] Fig.14 is a side view of a second guide tube in one embodiment of the present invention;

[0042] Fig.15 is an internal cross-sectional view of a second guide tube in one embodiment of the present invention;

[0043] Fig.16 A diagram showing the unfolding change process when the ejector rod pushes the ejector buckle from the inner guide groove to the inner tooth shape in one embodiment of the present invention;

[0044] Fig.17 A diagram showing the unfolding change process when the ejector rod pushes the ejector buckle from the inner tooth shape to the guide inner groove in one embodiment of the present invention;

[0045] Fig.18 A diagram showing the expansion change process when the ejector pin is reset in one embodiment of the present invention;

[0046] Fig.19 1. It is a diagram showing the expansion change process of the telescopic component in the limit card slot in different use states in one embodiment of the present invention;

[0047] Among them: 1. Rotating table; 2. Internal driving part; 3. External sliding part; 4. Liquid tank; 5. Internal flow divider; 7. Mounting frame; 8. Guide rail; 9. External flow divider; 10. External liquid outlet; 11. Internal liquid outlet; 12. Pushing part; 13. Limiting part; 14. Limiting plate; 15. Telescopic assembly; 16. Wafer; 17. Positioning PIN; 18. Rotating motor; 20. Lifting motor; 21. Internal slider; 22. Internal connecting plate; 23. Internal column; 30. External slider; 31. External connecting plate; 3 2. External column; 120. First push plate; 121. Second push plate; 140. Limiting slot; 150. First guide tube; 151. Second guide tube; 152. Limiting rod; 153. Buckle; 154. Push rod; 155. Spring; 150a. First inner hole; 150b. Second inner hole; 150c. Inner sleeve; 150d. Inner tooth profile; 150e. Guide inner groove; 153a. Buckle guide strip; 153b. Oblique tooth profile; 154a. Push rod tooth profile; 154b. Push rod guide strip. DETAILED DESCRIPTION

[0048] In order to enable those skilled in the art to better understand the solution of the present application, the technical solution in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the present application.

[0049] The present invention provides a liquid medicine recovery device to solve the problem that in the process of recovering liquid medicine for wafer cleaning in the prior art, it is necessary to use multiple mechanisms to recover different liquid medicines in batches, which leads to complex structure, difficulty in adjustment, large occupied area, and is not conducive to the later maintenance of the equipment and the arrangement of other mechanisms.

[0050] For ease of understanding, the specific process in the embodiments of the present application is described below. Figures 1 to 9 A liquid medicine recovery device in an embodiment of the present application includes a rotating table 1, an inner driving part 2, an outer sliding part 3, a liquid medicine tank 4, an inner diverter cover 5, a mounting frame 7, a guide rail 8, an outer diverter cover 9, an outgoing liquid port 10, an inner liquid outlet 11, a pushing component 12 and a limiting part 13; the rotating table 1 is provided with a plurality of positioning PINs 17 for clamping a wafer 16; the liquid medicine tank 4 is distributed along the circumference of the rotating table 1 and surrounds the rotating table 1, and an outgoing liquid port 10 for recovering liquid medicine is provided at the bottom of the liquid medicine tank 4; the mounting frame 7 is installed below the liquid medicine tank 4, and a vertically arranged guide rail 8 is provided on the mounting frame 7.

[0051] The inner diverter hood 5 is arranged between the rotating table 1 and the medicine liquid tank 4, and the inner diverter hood 5 can actively rise and fall in the guide rail 8 through the inner driving part 2, so as to guide the medicine liquid to flow out along the direction of the inner diverter hood 5; the outer diverter hood 9 is arranged between the inner diverter hood 5 and the medicine liquid tank 4, and the outer diverter hood 9 can rise and fall in the guide rail 8 through the outer sliding part 3, so as to guide the medicine liquid to flow out along the gap between the inner diverter hood 5 and the outer diverter hood 9, wherein the outer sliding part 3 is located above the inner driving part 2; the two limiting parts 13 are respectively installed on both sides of the mounting frame 7; the pushing component 12 extends from both sides of the inner driving part 2, and corresponds to the two limiting parts 13 respectively.

[0052] The liquid medicine recovery device of the present invention drives the inner flow divider 5 and the outer flow divider 9 to rise synchronously through the inner driving part 2. At this time, the first liquid medicine can be recovered by the inner liquid outlet 11 under the guidance of the inner flow divider 5, and at the same time, the pushing component 12 pushes the limiting part 13 to limit the outer flow divider 9, so that the inner and outer flow dividers are separated; when the inner driving part 2 descends, the inner flow divider 5 follows the inner driving part 2 to descend, and the outer flow divider 9 descends to the lowest limit in the limiting part 13 due to its own gravity. At this time, another liquid medicine can flow out from the gap between the inner flow divider 5 and the outer flow divider 9. After it comes out, it is recovered through the external liquid outlet 10; when the outer diverter hood 9 needs to be reset, the internal driving part 2 drives the pushing part 12 to rise again, and the pushing part 12 contacts the limiting part 13 to release the limiting part 13 on the outer diverter hood 9, and then the lifting mechanism 6 drives the inner diverter hood 5 to descend, and the outer diverter hood 9 is reset under the action of its own gravity, so that the inner diverter hood 5 and the outer diverter hood 9 can be driven up and down by one power mechanism, thereby realizing the independent collection of different liquid medicines, the overall structure is compact, easy to control and debug, and the cost is relatively low.

[0053] In one embodiment, see Figure 1 , Figure 4 and Figure 6 The outer flow divider 9 and the inner flow divider 5 are in a disc shape, and the outer flow divider 9 surrounds the inner flow divider 5. In the initial state, the upper surface of the outer flow divider 9 is located above the upper surface of the inner flow divider 5, and the upper surfaces of both are smaller than the height of the wafer 16; in addition, a gap is left between the outer flow divider 9 and the inner flow divider 5, so as to ensure that the drug liquid can flow into the drug liquid tank 4 from the gap and then be discharged from the outer drain port 10.

[0054] Further, based on Figure 2 The external liquid outlet 10 and the internal liquid outlet 11 are arranged adjacent to each other. Specifically, since the medicine liquid tank 4 surrounds the outside of the external diverter cover 9, the medicine liquid will flow into the medicine liquid tank 4 from the gap between the external diverter cover 9 and the internal diverter cover 5 under the action of the centrifugal rotational force of the wafer, and then be discharged from the external liquid outlet 10 at the bottom of the medicine liquid tank 4, thereby realizing an independent channel recovery of one medicine liquid, and the independent recovery channel of the other medicine liquid is discharged from the internal liquid outlet 11 under the guidance of the internal diverter cover 5.

[0055] In one embodiment, see Figure 2 In this embodiment, there are two guide rails 8, which are vertically mounted on the mounting frame 7 in parallel. The inner driving part 2 and the outer sliding part 3 can slide on the two guide rails 8, and the inner driving part 2 actively slides on the guide rails 8, while the outer sliding part 3 slides passively. When working, the inner driving part 2 rises to push the outer sliding part 3 to move upward in the guide rail 8, and the outer sliding part 3 descends on the guide rail 8 driven by its own gravity.

[0056] In one embodiment, see Figures 2 to 9 The inner driving part 2 includes a lifting motor 20 vertically arranged on the mounting frame 8, and the lifting motor 20 drives the inner slider 21 located on the two guide rails 8 to lift up and down; the inner slider 21 is provided with an inner connecting plate 22 distributed along the diameter direction of the liquid medicine tank 4, and the two ends of the upper surface of the inner connecting plate 22 are provided with inner columns 23; the inner columns 23 are connected to the inner flow divider 5, so that the inner flow divider 5 is fixedly connected to the inner slider 21. When working, when the inner slider 21 slides on the guide rail 8, it synchronously drives the inner flow divider 5 to lift up and down between the outer flow divider 9 and the rotating table 1.

[0057] Further, the outer sliding part 3 includes an outer sliding block 30 slidably arranged on the guide rail 8, and the outer sliding block 30 is located above the inner sliding block 21; the outer sliding block 30 is provided with an outer connecting plate 31 located on the upper surface of the inner connecting plate 22, and the two ends of the upper surface of the outer connecting plate 31 are provided with outer columns 32, and the outer columns 32 are connected to the outer splitter cover 9. During operation, when the inner sliding block 21 is driven to rise by the lifting motor 20, since the outer sliding block 30 is slidably arranged above the inner sliding block 21, when the inner sliding block 21 rises in the guide rail 8, the outer sliding block 30 is synchronously pushed to move up in the guide rail 8, and when the inner sliding block 21 is driven to descend by the lifting motor 20, the outer sliding block 30 will move down along the guide rail under the action of its own gravity, so that the function of driving the inner and outer sliding blocks to rise and fall by a power mechanism is realized, a power mechanism is reduced, the cost is reduced, and control and debugging are also performed.

[0058] The lifting process of the inner splitter cover 5 and the outer splitter cover 6 is described in detail below:

[0059] When the lifting motor 20 drives the inner diverter hood 5 to rise along the guide rail 8, the inner slider 21 synchronously pushes the outer slider 30 to rise along the guide rail 8, and the outer slider 30 drives the outer diverter hood 9 to rise synchronously. The outer diverter hood 9 and the inner diverter hood 5 rise until the upper surface of the inner diverter hood 5 is higher than the position of the wafer 16, and the wafer begins to be sprayed with liquid medicine. During the spraying process, the liquid medicine is recovered by the inner liquid outlet 11 along the guidance of the inner diverter hood 5 under the action of the centrifugal force of the wafer rotation, completing an independent recovery of the liquid medicine. In this process, the pushing component 12 follows the inner diverter hood 5 to rise and then pushes the limiting part 13 to limit the lifting distance of the outer diverter hood 9 on the guide rail 8.

[0060] When the lifting motor 20 drives the inner diverter hood 5 to descend along the guide rail 8, the inner diverter hood 5 will reset along the guide rail 8, and the outer diverter hood 9 will also move downward due to its own gravity. However, the limiting part 13 limits the descending position of the outer diverter hood 9. However, in this descending position, the height of the outer connecting plate 31 is still higher than the height of the inner connecting plate 22. The outer diverter hood 9 descends to the lowest limiting position given to the outer diverter hood 9 by the limiting part 13. At this time, the wafer 16 is just located between the inner diverter hood 5 and the outer diverter hood 9, and the wafer begins to be sprayed with liquid medicine. During the spraying process, the liquid medicine flows out along the gap between the inner diverter hood 5 and the outer diverter hood 9 under the action of the centrifugal force of the wafer rotation, and is then recovered by the external liquid outlet 10, thereby completing the independent recovery of another liquid medicine.

[0061] When the two kinds of liquid medicine are recovered, the lifting motor 20 drives the inner diverter hood 5 to rise again, and the pushing component 12 also rises accordingly. After the pushing component 12 contacts the limiting portion 13 again, the limiting portion 13 retracts to release the limit on the lifting position of the outer diverter hood 9 on the guide rail 8, and then the lifting motor 20 drives the inner diverter hood 5 to move downward. Since the outer diverter hood 9 has no limit, it is reset under the action of its own gravity. When the outer diverter hood 9 is in its original position, the outer connecting plate 31 connected to the outer diverter hood 9 is attached to the position on the inner connecting plate 22 of the inner diverter hood 5.

[0062] In one embodiment, based on Figure 2 and Figure 3 The pushing component 12 includes a first push plate 120 and a second push plate 121. The first push plate 120 is in a long strip shape and extends from a side of the inner connecting plate 22 opposite to the limiting portion 13. The extending end of the first push plate 120 is provided with an inclined second push plate 121. When the first push plate 120 moves upward following the inner connecting plate 22, the second push plate 121 moves in an inclined direction. When the second push plate 121 contacts one end of the limiting portion 13, a lateral force can be applied to the limiting portion 13.

[0063] In one embodiment, based on Figures 1 to 4The limiting parts 13 include two in total, and the two limiting parts 13 are respectively arranged on both sides of the mounting frame 7. In this embodiment, the limiting parts 13 include a limiting plate 14 and a telescopic assembly 15; the limiting plate 14 is installed on the outer sliding block 30, and slides up and down following the outer sliding block 30, and a long strip-shaped limiting card slot 140 is opened on the limiting plate 14. The telescopic assembly 15 is arranged on the side of the mounting frame 7 and is arranged opposite to the limiting card slot 140; when the pushing component 12 pushes the telescopic assembly 15 forward for the first time, the telescopic assembly 15 is inserted into the limiting card slot 140, and the limiting plate 14 is connected to the outer sliding block 30, so that when the limiting plate 14 slides up and down, the sliding distance of the limiting plate 14 will be limited within the limiting card slot 140.

[0064] For further information, see Figure 1 , Figures 10 to 19 The telescopic assembly 15 comprises a first guide tube 150, a second guide tube 151, a limit rod 152, a buckle 153 and a push rod 154; the first guide tube 150 and the second guide tube 151 are sequentially installed transversely on the mounting frame 7; the second guide tube 151 is provided with a first inner hole 150a and a second inner hole 150b coaxially arranged, and the diameter of the first inner hole 150a is larger than the diameter of the second inner hole 150b; the inner wall of the second inner hole 150b is provided with an inner sleeve 150c, and the end of the inner sleeve 150c opposite to the first guide tube 150 has an inner tooth shape 150d, and the end of the inner sleeve 150c opposite to the inner tooth shape 150d has a guide inner groove 150e equidistantly distributed along the circumferential direction of the inner wall of the inner sleeve, and the guide inner groove 150e is arranged to penetrate toward one end of the inner tooth shape 150d.

[0065] After the limiting rod 152 is inserted from the first guide tube 150, it is pressed against the end face of the second inner hole 150b, and a spring 155 is sleeved on the side of the limiting rod 152 opposite to the second inner hole; after the buckle 153 is inserted from one end of the inner sleeve 150c, it is clamped and connected with the limiting rod 152, thereby compressing the spring 55. At this time, the limiting rod 152 is in a compressed state.

[0066] In addition, a plurality of buckle guide strips 153a are provided in the circumferential direction of the opposite end of the buckle 153 and the limiting rod 152, and the buckle guide strip 153a has an oblique tooth shape 153b at the end opposite to the limiting rod 152; in the initial state, the buckle guide strip 153a is limited in the guide inner groove 150e.

[0067] A push rod 154 sleeved on the buckle 153 is provided between the buckle 153 and the inner sleeve 150c; the push rod 154 sleeved on one side end face of the buckle 153 is provided with a push rod tooth shape 154a, and the push rod tooth shape 154a is arranged opposite to the buckle guide strip 153a; the rear end of the push rod tooth shape 154a is provided with a plurality of push rod guide strips 154b distributed along the circumference of the push rod 154, and at this time the push rod guide strip 154b is also limited in the wire inner groove 150e.

[0068] In the initial state, see Figures 13 to 15 and Fig.16 , the limit rod 152 is connected with the top buckle 153 by means of a clamp; the spring 155 on the limit rod 152 is in a compressed state, at which time the top rod guide strip 154b and the buckle guide strip 153a are both in the guide inner groove 150e, but the two are not in contact, but the oblique teeth 153b on the buckle guide strip 153a are against the top rod teeth 154a. The top rod guide strip 154b and the buckle guide strip 153a are limited to the same position through the wire inner groove 150e to prevent the top rod 154 from moving off the track when pushing the top buckle 153 forward. At this time, the state relationship between the limit part 15 and the limit groove 140 can be seen in FIG. Fig.19 The first picture on the left.

[0069] During operation, when the pushing component 12 rises and drives the push rod 154 to move forward along the direction of the guide inner groove 150e, the push rod tooth shape 154a pushes the buckle guide strip 153a to move in the direction in which the push rod applies the force. When the buckle guide strip 153a is pushed out of the guide inner groove 150e by the push rod tooth shape 154a, the buckle 153 loses the circumferential restriction of the guide inner groove 150e. In this way, under the action of the spring 155, the buckle guide strip 153a will rotate along the push rod tooth shape 154a and slide into the inner tooth shape 150d; at this time, the pushing component 12 descends, and the push rod 154 resets after losing the force of the pushing component 12, and the buckle guide strip 153a is meshed with the guide groove tooth shape 150e. Fig.16 At this time, the limiting rod 26 is in an extended state, and the limiting rod 26 is inserted into the limiting slot 140. At this time, the limiting plate 14 is limited in the limiting slot 140 and moves up and down, thereby playing the role of limiting the upper and lower positions of the outer flow divider 4 connected to the limiting plate 14. At this time, the state relationship between the limiting portion 15 and the limiting slot 140 is shown in FIG. Fig.19 As shown in the second and third schematic diagrams of the unfolded state, at this time, the limiting portion 15 can only move up and down in the limiting groove 140.

[0070] When the pushing component 12 rises again, the pushing component 12 drives the push rod 154 to move forward along the direction of the inner tooth shape 150d. At this time, the push rod tooth shape 154a pushes the buckle guide strip 153a to move in the direction of the force applied by the push rod. When the buckle guide strip 153a is pushed out of the inner tooth shape 150d by the push rod tooth shape 154a, the buckle 153 loses the restriction of the inner tooth shape 150d in the circumferential direction. Under the action of the spring 155, the buckle guide strip 153a will rotate along the push rod tooth shape 154a and slide into the guide inner groove 150e. At this time, the limit rod 152 is in a retracted state due to the action of the spring, and is disengaged from the limit slot 140, so that the outer air flow cover 9 loses the limit, and the outer air flow cover 9 is in a downward movement.

[0071] In summary, when the limit plate 14 and the telescopic component 15 in the limit part 13 are working, when the second push plate 121 pushes the telescopic component for the first time, the telescopic component is inserted into the limit groove 140 of the limit plate, and when the second push plate pushes the telescopic component for the second time, the telescopic component automatically retracts from the limit groove 140, thereby realizing the switching between the limit and the non-limited state of the limit plate 14, and its driving force is also provided by the corresponding lifting motor 20, thereby reducing the setting of the corresponding driving mechanism and reducing the cost.

[0072] See also Figures 1 to 19 The working process of this liquid medicine recovery equipment is as follows:

[0073] In the initial state, the upper surfaces of the inner shroud 5 and the outer shroud 9 are both lower than the upper surface of the wafer 16 , and the device is in an idle state.

[0074] When the wafer 16 needs to be cleaned with the first liquid, the lifting motor 20 starts working. The lifting motor 20 drives the inner diverter cover to rise through the inner slider, and at the same time, the outer diverter cover rises synchronously when the inner diverter cover rises. When the inner diverter cover 5 rises to a height higher than the wafer 16, it stops rising. Then the rotating table 1 rotates with the wafer 16 and sprays the liquid on the wafer 16. Under the rotation of the wafer by centrifugal force, the liquid moves according to the centrifugal force. Figure 7 The arrow direction is guided by the inner flow divider 5 into the inner liquid outlet 11, and finally the first spray liquid is independently recovered through the inner liquid outlet 11.

[0075] In addition, in this stage, the pushing component 12 rises synchronously with the inner wind cover 5, and the second push plate 121 in the pushing component 12 pushes the limiting rod 152 to be inserted into the limiting slot 140, and is now located at the uppermost end of the limiting slot 140, and the distance that the limiting plate 14 moves up and down is limited within the limiting slot 140.

[0076] When it is necessary to clean the wafer 16 with another liquid, the lifting motor 20 starts to work, and the lifting motor 20 drives the inner shroud 5 to descend. At this time, the outer shroud 9 moves from the uppermost end of the limit slot 140 to the lowermost end under the action of its own gravity and then stops moving downward. At this time, the outer shroud 9 is in the working state, and the inner shroud 5 is in the initial state. The wafer 16 rotates and the liquid is sprayed on the wafer 2. The liquid moves according to the centrifugal force. Fig. 9 In the direction of the arrow, the sprayed liquid is guided by the outer diverter cover 9 into the gap between the outer diverter cover 9 and the inner diverter cover 5 and then recovered from the outer liquid outlet 10, thereby completing the independent recovery of the second liquid.

[0077] After the two liquid medicines have been worked and recovered, the lifting motor 20 drives the inner flow shroud 5 and the pushing component 12 to rise synchronously again. After the second push plate 121 in the pushing component 12 pushes the top rod 154 forward, the limit rod 152 is retracted from the limit slot 140, and the limit on the outer wind shroud 9 is released. Then the lifting motor 20 drives the inner flow shroud 5 to move downward. At this time, the outer flow shroud 9 also moves downward under the action of its own gravity until the outer connecting plate is attached to the inner connecting plate. Finally, the robot takes away the wafer 16, and the whole cleaning process is completed.

[0078] As described above, the above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit them. Although the present application has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present application.

Claims

1. A liquid medicine recovery device, characterized in that: include: A rotating table (1), wherein the rotating table (1) has a positioning PIN (17) for clamping a wafer (16); A medicine liquid tank (4) is distributed along the outer circumference of the rotating platform (1), and an outflow liquid outlet (10) is provided at the bottom of the medicine liquid tank (4); A mounting frame (7) is arranged below the liquid medicine tank (4), and a vertically arranged guide rail (8) is provided on the mounting frame (7); An inner flow divider (5) is arranged between the rotating platform (1) and the liquid medicine tank (4), and the inner flow divider (5) can be actively raised and lowered in the guide rail (8) through an inner driving unit (2) to guide the liquid medicine to flow out along the direction of the inner flow divider (5); an outer flow divider cover (9) disposed between the inner flow divider cover (5) and the liquid medicine tank (4); the outer flow divider cover (9) can be raised and lowered in the guide rail (8) via an outer sliding portion (3) to guide the liquid medicine to flow out along the gap between the inner flow divider cover (5) and the outer flow divider cover (9); wherein the outer sliding portion (3) is located above the inner driving portion (2); A limiting portion (13), wherein two limiting portions (13) are respectively arranged on two sides of the mounting frame (7); A pushing component (12) is disposed on both sides of the inner flow dividing cover (5) and is disposed corresponding to the limiting portion (13); When the inner driving part (2) drives the inner flow divider cover (5) to rise along the guide rail (8), the inner driving part (2) synchronously drives the outer sliding part (3) to rise along the guide rail (8), and the outer sliding part (3) drives the outer flow divider cover (9) to rise synchronously. When the upper surface of the inner flow divider cover (5) is higher than the position of the wafer (16), the sprayed liquid is recovered by the inner liquid outlet (11) along the guidance of the inner flow divider cover (5) under the action of the rotating centrifugal force of the wafer (16). At this time, the pushing component (12) follows the inner flow divider cover (5) to rise and then pushes the limiting part (13) to limit the lifting distance of the outer flow divider cover (9) on the guide rail (8); When the inner driving part (2) drives the inner flow diverter cover (5) to descend along the guide rail (8), the inner flow diverter cover (5) is reset, and the outer flow diverter cover (9) descends to the lowest limit position of the limit part (13) due to its own gravity. At this time, the wafer (16) is located between the inner flow diverter cover (5) and the outer flow diverter cover (9), and the sprayed liquid flows out along the gap between the inner flow diverter cover (5) and the outer flow diverter cover (9) under the action of the rotating centrifugal force of the wafer (16) and is recovered through the external liquid outlet (10); When the recovery of the liquid medicine is completed, the inner driving part (2) drives the inner flow diversion cover (5) to rise again, and at this time the pushing component (12) pushes the limiting part (13) again to release the limiting part (13) on the outer flow diversion cover (9), and then the inner driving part (2) drives the inner flow diversion cover (5) to move downward, and the outer flow diversion cover (9) is reset due to its own gravity.

2. The liquid medicine recovery device according to claim 1, characterized in that: The external liquid outlet (10) and the internal liquid outlet (11) are arranged adjacent to each other.

3. The liquid medicine recovery device according to claim 1, characterized in that: The inner driving part (2) comprises a lifting motor (20) vertically arranged on the mounting frame (7); the lifting motor (20) drives an inner sliding block (21) located on the guide rail (8) to move up and down; the inner sliding block (21) is provided with inner connecting plates (22) distributed along the diameter direction of the liquid medicine tank (4), and inner columns (23) are provided at both ends of the upper surface of the inner connecting plates (22); the inner columns (23) are connected to the inner diverter cover (5).

4. The liquid medicine recovery device according to claim 3, characterized in that: The outer sliding portion (3) comprises an outer sliding block slidably arranged on the guide rail (8); the outer sliding block is provided with an outer connecting plate (31) located on the upper surface of the inner connecting plate (22); both ends of the upper surface of the outer connecting plate (31) are provided with outer columns (32); the outer columns (32) are connected to the outer splitter cover (9).

5. The liquid medicine recovery device according to claim 1, characterized in that: The pushing component (12) comprises a first push plate (120) and a second push plate (121); the first push plate (120) extends from one side of the inner driving portion (2), and the extending end of the first push plate (120) is provided with an inclined second push plate (121), so that when the pushing component (12) rises, the second push plate (121) can push the limiting portion (13).

6. The liquid medicine recovery device according to claim 1, characterized in that: The limiting portion (13) comprises a limiting plate (14) and a telescopic assembly (15); the limiting plate (14) is arranged on the outer sliding portion (3), and a limiting slot (140) is provided on the limiting plate (14); the telescopic assembly (15) is arranged on the side of the mounting frame (7); the telescopic assembly (15) comprises a first guide tube (150), a second guide tube (151), a limiting rod (152), a buckle (153) and a push rod (154); The first guide tube (150) and the second guide tube (151) are vertically mounted on the mounting frame (7) in sequence; the second guide tube (151) is provided with a first inner hole (150a) and a second inner hole (150b) coaxially arranged therein, and the diameter of the first inner hole (150a) is larger than the diameter of the second inner hole (150b); the inner wall of the second inner hole (150b) is provided with an inner sleeve (150c), and the end of the inner sleeve (150c) opposite to the first guide tube (150) has an inner tooth shape (150d), and the end of the inner sleeve (150c) opposite to the inner tooth shape (150d) has guiding inner grooves (150e) equidistantly distributed along the inner wall of the inner sleeve (150c), and the guiding inner grooves (150e) are arranged to penetrate the end of the inner tooth shape (150d); The limiting rod (152) is inserted from the first guide tube (150) and abuts against the end surface of the second inner hole (150b), and a spring (155) is sleeved on the side of the limiting rod (152) opposite to the second inner hole (150b); The buckle (153) is inserted from one end of the inner sleeve (150c) and connected to the limiting rod (152) by buckling, so that the spring (155) on the limiting rod (152) is in a compressed state; a plurality of buckle guide strips (153a) are provided in the circumferential direction of the end of the buckle (153) opposite to the limiting rod (152), and the end surface of the buckle guide strip (153a) opposite to the limiting rod (152) has an oblique tooth shape (153b); wherein the buckle guide strip (153a) is limited in the guide inner groove (150e); A push rod (154) sleeved on the buckle (153) is provided between the buckle (153) and the inner sleeve (150c); the push rod (154) sleeved on one side end surface of the buckle (153) is provided with a push rod tooth shape (154a), and the push rod tooth shape (154a) is away from the buckle guide strip (153a); a plurality of push rod guide strips (154b) distributed along the circumference of the push rod (154) are provided at the rear end of the push rod tooth shape (154a); the push rod guide strip (154b) is limited in the guide inner groove (150e), and is arranged opposite to the buckle guide strip (153a).

7. The liquid medicine recovery device according to claim 6, characterized in that: The number of the buckle guide strips (153a) is four.

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