Gas source purity detection device and gallium nitride production system

Abstract

The invention relates to the technical field of gas purity detection, in particular to a gas source purity detection device and a gallium nitride production system. The gas source purity detection device comprises a main pipe body, a supporting piece, a control ring, a moving arm and a concentration sensor. The main pipe body is used for being connected with an air source pipeline. The control ring is rotationally matched with the supporting piece and driven by the driver, and the control ring and the outer wall face are rotationally sealed. A gas collecting groove is formed in the inner ring wall of the control ring. The supporting piece is provided with a mounting blind hole, and the moving arm is slidably matched with the mounting blind hole and is slidably sealed. A first elastic piece is connected between the moving arm and the hole bottom wall of the mounting blind hole in an abutting mode. The concentration sensor is arranged on the outer side wall of the moving arm. When the control ring rotates, the gas collecting groove can periodically communicate with the main pipe body and can also periodically move to the moving arm. The gas source purity can be continuously and accurately detected for a longer time, and automatic calibration is achieved while purity detection is conducted.

Description

Technical Field

[0001] The present invention relates to the technical field of gas purity detection, and in particular to a gas source purity detection device and a gallium nitride production system. Background Art

[0002] In production activities, when using raw gas, the purity of the gas source needs to be continuously monitored to ensure that the purity of the gas source meets the use requirements. In the actual monitoring process, as the monitoring time increases, the problem of reduced monitoring accuracy often occurs, and it is necessary to regularly shut down the machine to recalibrate the purity monitoring module. This is not only not conducive to the accurate monitoring of the gas source purity in a timely and effective manner, but also affects the production schedule.

[0003] In view of this, this application is hereby filed. Summary of the invention

[0004] The first purpose of the present invention is to provide a gas source purity detection device, which can realize continuous and accurate detection of gas source purity for a longer period of time, and realize automatic calibration while performing purity detection, thereby effectively improving the accuracy of detection results during long-term detection, and facilitating long-term continuous production.

[0005] The second object of the present invention is to provide a gallium nitride production system, which can realize continuous and accurate detection of the purity of the raw gas during the gallium nitride reaction process, and realize automatic calibration while performing purity detection, thereby ensuring that the purity of the raw gas is always accurately controlled during long-term continuous production, which is conducive to the continuous production of gallium nitride.

[0006] The embodiment of the present invention is achieved as follows: A gas source purity detection device comprises: a main pipe body, a support member, a control ring, a moving arm and a concentration sensor.

[0007] The support member has an outer wall surface in the form of a cylindrical surface, and a receiving groove for receiving the main pipe body is provided on the outer wall surface. A groove is provided on the outer wall of the main pipe body, and the groove is connected to the tube cavity of the main pipe body. The groove bottom wall of the groove is arc-shaped, and the curvature of the groove bottom wall of the groove is the same as the curvature of the outer wall surface. When the main pipe body is installed in the receiving groove, the groove bottom wall of the groove and the outer wall surface together form a complete cylindrical surface.

[0008] The main pipe is used to connect to the gas source pipeline.

[0009] The control ring is sleeved on the outer wall surface of the support member, and the control ring fits the outer wall surface. Along the circumference of the outer wall surface, the control ring can be rotatably matched with the support member and driven by the driver, and the control ring and the outer wall surface are rotationally sealed.

[0010] The inner ring wall of the control ring is provided with an air collecting groove. The outer wall surface of the support is also provided with a mounting blind hole, in which the moving arm can be slidably matched, and a sliding seal is formed between the moving arm and the hole wall of the mounting blind hole. A first elastic member is abutted between the moving arm and the bottom wall of the mounting blind hole. The outer side wall of the moving arm is provided with a mounting groove adapted to the concentration sensor, and the concentration sensor is installed in the mounting groove, and the concentration sensor is flush with the outer side wall of the moving arm.

[0011] When the control ring rotates relative to the support, the gas collecting groove can be periodically connected with the main pipe through the groove, and the gas collecting groove can also periodically move to the moving arm, so that the moving arm drives the concentration sensor to periodically enter and exit the gas collecting groove.

[0012] Furthermore, along the circumference of the control ring, both side walls of the air collecting groove are inclined walls, so as to guide the moving arm to enter and exit the air collecting groove.

[0013] Furthermore, a slide groove is provided on a hole wall of the blind hole near the concentration sensor, the slide groove is extended along the length direction of the blind hole, and the slide groove is spaced apart from the outer wall of the support member. The width of the slide groove is greater than the width of the concentration sensor.

[0014] A sliding member is slidably matched in the slide groove, the width of the sliding member is matched with the slide groove, the length of the sliding member is smaller than the length of the slide groove, the thickness of the sliding member is matched with the depth of the slide groove, and a sliding seal is formed between the sliding member and the slide groove.

[0015] The inner ring wall of the control ring is also provided with a guide groove, which continuously extends in a ring shape along the circumference of the control ring. The guide groove includes a deep groove section and a shallow groove section, and the shallow groove section is located on a side of the inner ring wall of the control ring away from the gas collecting groove.

[0016] The outer wall of the support member is also provided with a matching blind hole, which is arranged parallel to the installation blind hole and spaced apart, a matching column is slidably matched in the matching blind hole, a second elastic member is abutted between the matching column and the bottom wall of the matching blind hole, and the matching column abuts against the bottom wall of the guide groove.

[0017] The installation blind hole and the matching blind hole are connected by a connecting notch, which extends along the axial direction of the installation blind hole and the matching blind hole, and a gap is left between the end of the slide groove close to the outer wall and the connecting notch. A connecting rod is arranged in the connecting notch, and the connecting rod fixes and connects the sliding part and the matching column.

[0018] An air inlet pipe and an exhaust pipe are arranged at one end of the chute close to the outer wall, and both the air inlet pipe and the exhaust pipe are connected to the external atmosphere. An air inlet valve is arranged at the end of the air inlet pipe, and an exhaust valve is arranged at the end of the exhaust pipe.

[0019] When the matching column is located in the deep groove section, the sliding part is attached to the end of the slide groove close to the outer wall surface, and the sliding part completely covers the concentration sensor. When the matching column is located in the shallow groove section, the sliding part is separated from the end of the slide groove close to the outer wall surface, and the sliding part is separated from the concentration sensor.

[0020] Furthermore, a cotton pad is provided on a side of the sliding member close to the concentration sensor, and the cotton pad completely covers the side of the sliding member close to the concentration sensor.

[0021] Furthermore, when the matching column is located in the shallow groove section, the end wall of the sliding member close to the outer wall surface is located on the side of the connecting notch close to the outer wall surface.

[0022] Furthermore, the air inlet pipe and the exhaust pipe are both arranged on an end wall of the slide groove close to the outer wall surface.

[0023] A gallium nitride production system comprises: a raw material gas supply device, a gallium nitride preparation device and the above-mentioned gas source purity detection device.

[0024] The raw gas supply device and the gallium nitride preparation device are connected by a gas supply pipeline, and the main pipe of the gas source purity detection device is connected to the gas supply pipeline.

[0025] The beneficial effects of the technical solution of the embodiment of the present invention include: (1) Only one driver is needed to realize the entire mechanical drive of the gas source purity detection device. The structure is more simple and compact, which can effectively reduce the drive failure rate, avoid the risk of asynchrony between different power sources, and improve the detection stability.

[0026] (2) The drive control ring can be driven to rotate in one direction to achieve periodic detection, which is simple and efficient. During the detection process, the sample gas collected by the gas collecting slot will not be wasted, but will be sent back to the main pipe by the gas collecting slot after the detection is completed. At this time, under the action of the airflow in the main pipe, the gas collecting slot is also re-sampled.

[0027] (3) When the gas collecting tank moves to the moving arm, the moving arm will gradually extend from the mounting blind hole and extend into the gas collecting tank. As the control ring continues to rotate, the moving arm will also move from one side of the gas collecting tank to the other side relative to the gas collecting tank. During this process, the moving arm can stir the gas sample in the gas collecting tank, and at the same time, it is convenient for the concentration sensor to fully contact with the gas, which can effectively improve the detection accuracy.

[0028] (4) Due to the design of the moving arm, after the concentration sensor completes the detection of the gas concentration in the gas collecting tank, it will be retracted into the installation blind hole along with the moving arm. The sliding seal design adopted can effectively reduce the gas sample residue near the concentration sensor, thereby ensuring the accuracy of subsequent detection.

[0029] (5) It can prevent the concentration sensor from being continuously exposed to the sample gas for a long time, effectively reduce the detection inertia of the concentration sensor, and reduce the erosion of the concentration sensor by the airflow. While achieving a longer stable working time, it also further extends the service life of the concentration sensor.

[0030] (6) The frequency of detecting the gas in the main pipe can be adjusted by adjusting the rotation speed of the control ring relative to the support.

[0031] In general, the gas source purity detection device provided in the embodiment of the present invention can realize continuous and accurate detection of gas source purity for a longer period of time, and realize automatic calibration while performing purity detection, which effectively improves the accuracy of the detection results during long-term detection process and is conducive to long-term continuous production.

[0032] The gallium nitride production system provided by the embodiment of the present invention can realize continuous and accurate detection of the purity of the raw gas during the gallium nitride reaction process, and realize automatic calibration while performing purity detection, thereby ensuring that the purity of the raw gas is always accurately controlled under long-term continuous production, which is conducive to the continuous production of gallium nitride. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for use in the embodiments are briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present invention and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without creative work.

[0034] Figure 1 A schematic diagram of the external side structure of a gas source purity detection device provided in an embodiment of the present invention; Figure 2 A schematic diagram of the internal front structure of a gas source purity detection device provided in an embodiment of the present invention; Figure 3 It is a structural schematic diagram of the support member; Figure 4 It is a structural schematic diagram of the main body; Figure 5 It is a schematic diagram of the structure of the gas collecting groove of the control ring; Figure 6 Schematic diagram of the coordination of the motion arm; Figure 7 It is a schematic diagram of the state when the gas collecting tank is connected with the main pipe; Figure 8 It is a schematic diagram of the state where the air collecting tank moves to the moving arm; Fig. 9 Schematic diagram of the internal structure of the control loop; Fig.10 is a schematic diagram of the cooperation between the sliding member and the cooperation column; Fig.11 Schematic diagram of the structure of the guide groove of the control ring.

[0035] Description of reference numerals: Main body 100; groove 110; groove bottom wall p1; support member 200; outer wall surface 210; accommodating groove 220; mounting blind hole 230; slide groove 240; sliding member 241; matching blind hole 250; matching column 251; second elastic member 252; connecting notch 260; connecting rod 261; air inlet pipe 270; exhaust pipe 280; control ring 300; air collecting groove 310; first inclined wall y1; second inclined wall y2; guide groove 320; deep groove section 321; shallow groove section 322; moving arm 400; first elastic member 410; concentration sensor 500. DETAILED DESCRIPTION

[0036] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Generally, the components of the embodiments of the present invention described and shown in the drawings here can be arranged and designed in various different configurations.

[0037] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the invention claimed for protection, but merely represents selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0038] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0039] The terms “first”, “second”, etc. are only used for distinguishing descriptions and should not be understood as indicating or implying relative importance.

[0040] In addition, the terms "parallel", "vertical", etc. do not mean that the components must be absolutely parallel or vertical, but can be slightly tilted. For example, "parallel" only means that its direction is more parallel than "vertical", and does not mean that the structure must be completely parallel, but can be slightly tilted.

[0041] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "setting", "installation" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be a communication between the two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0042] In order to overcome the shortcomings of the prior art, please refer to Figure 1-Figure 6 This embodiment provides a gas source purity detection device, which includes: a main body 100, a support member 200, a control ring 300, a moving arm 400 and a concentration sensor 500.

[0043] The support member 200 has a cylindrical outer wall surface 210 , and the outer wall surface 210 is provided with a receiving groove 220 for receiving the main pipe body 100 .

[0044] The outer wall of the main body 100 is provided with a groove 110 which penetrates into the lumen of the main body 100 and is connected with the lumen of the main body 100 . The bottom wall p1 of the groove 110 is arc-shaped, and the curvature of the bottom wall p1 of the groove 110 is the same as that of the outer wall 210 .

[0045] When the main body 100 is installed in the receiving groove 220 , the bottom wall of the groove 110 and the outer wall surface 210 together form a complete cylindrical surface.

[0046] The main body 100 is used to be connected to the gas source pipeline, that is, the main body 100 is used to constitute a part of the gas source pipeline, and the gas in the gas source pipeline will flow through the main body 100.

[0047] The control ring 300 is sleeved on the outer wall surface 210 of the support member 200, and the control ring 300 fits the outer wall surface 210. In this embodiment, the control ring 300 is annular. Along the circumference of the outer wall surface 210, the control ring 300 can be rotatably matched with the support member 200 and driven by a driver (not shown in the figure), and the inner ring wall of the control ring 300 and the outer wall surface 210 of the support member 200 are rotationally sealed. Along the axial direction of the control ring 300, the control ring 300 and the support member 200 are fixedly matched.

[0048] An air collecting groove 310 is formed on the inner wall of the control ring 300 .

[0049] The outer wall surface 210 of the support member 200 is further provided with a mounting blind hole 230. In this embodiment, the mounting blind hole 230 is arranged along the radial direction of the outer wall surface 210. The moving arm 400 can be slidably fitted in the mounting blind hole 230, and a sliding seal is formed between the moving arm 400 and the hole wall of the mounting blind hole 230. The outer end wall of the moving arm 400 is arc-shaped, and the curvature of the outer end wall of the moving arm 400 is the same as that of the outer wall surface 210. When the moving arm 400 just completely enters the mounting blind hole 230, the end wall of the moving arm 400 is flush with the outer wall surface 210.

[0050] A first elastic member 410 is in contact between the moving arm 400 and the bottom wall of the mounting blind hole 230 . Under the elastic force of the first elastic member 410 , the moving arm 400 is always in contact with the inner ring wall of the control ring 300 .

[0051] The outer wall of the moving arm 400 is provided with a mounting groove adapted to the concentration sensor 500 . The concentration sensor 500 is installed in the mounting groove. The concentration sensor 500 is flush with the outer wall of the moving arm 400 , that is, the concentration sensor 500 can just fill the mounting groove.

[0052] When the control ring 300 rotates unidirectionally relative to the support member 200, the gas collecting groove 310 moves synchronously with the control ring 300. The gas collecting groove 310 can periodically move to the groove 110 of the main body 100 and communicate with the main body 100 through the groove 110. Figure 7 As shown, in this state, the gas in the main body 100 can smoothly enter the gas collecting groove 310, so that the gas collecting groove 310 can achieve sampling and collection of the gas in the main body 100.

[0053] In addition, the gas collecting tank 310 can also periodically move to the moving arm 400 so that the moving arm 400 can extend into the gas collecting tank 310. In this way, the moving arm 400 can drive the concentration sensor 500 into the gas collecting tank 310, thereby detecting the purity of the gas sampled and collected from the main pipe 100 in the gas collecting tank 310, such as Figure 8 As the control ring 300 continues to rotate, the gas collecting groove 310 will leave the position of the moving arm 400. At this time, under the action of the side wall of the gas collecting groove 310, the moving arm 400 is pushed back into the installation blind hole 230, and the concentration sensor 500 is also retracted into the installation blind hole 230. Figure 2 Optionally, along the circumference of the control ring 300, both sides of the groove wall of the gas collecting groove 310 are inclined walls, such as Figure 5 As shown in the figure, the first inclined wall y1 and the second inclined wall y2 are used to guide the moving arm 400 to enter and exit the air collecting groove 310.

[0054] Through the above design, only one driver is needed to realize the entire mechanical drive of the gas source purity detection device. The structure is more simple and compact, which can effectively reduce the drive failure rate, avoid the risk of asynchrony between different power sources, and improve the detection stability.

[0055] On this basis, the driving control ring 300 can realize periodic detection by rotating in one direction, which is simple and efficient. During the detection process, the sample gas collected by the gas collecting slot 310 will not be wasted, but will be sent back to the main body 100 by the gas collecting slot 310 after the detection is completed. At this time, under the action of the airflow in the main body 100, the re-sampling of the gas collecting slot 310 is also realized at the same time.

[0056] In addition, when the gas collecting groove 310 moves to the moving arm 400, the moving arm 400 will gradually extend from the mounting blind hole 230 and extend into the gas collecting groove 310. As the control ring 300 continues to rotate, the moving arm 400 will also move from one side of the gas collecting groove 310 to the other side relative to the gas collecting groove 310. During this process, the moving arm 400 can stir the gas sample in the gas collecting groove 310, and also facilitate the concentration sensor 500 to fully contact the gas, which can effectively improve the detection accuracy.

[0057] Due to the design of the moving arm 400, after the concentration sensor 500 completes the detection of the gas concentration in the gas collecting tank 310, it will be retracted into the installation blind hole 230 along with the moving arm 400. The sliding sealing design adopted can effectively reduce the residual gas sample near the concentration sensor 500, thereby ensuring the accuracy of subsequent detection.

[0058] The above design can prevent the concentration sensor 500 from being continuously exposed to the sample gas for a long time, which can effectively reduce the detection inertia of the concentration sensor 500 and reduce the erosion of the concentration sensor 500 by the airflow. While achieving a longer stable working time, it also further extends the service life of the concentration sensor 500.

[0059] It should be supplemented that the frequency of detecting the gas in the main tube 100 can also be adjusted by regulating the rotation speed of the control ring 300 relative to the support 200 .

[0060] In general, the gas source purity detection device provided in this embodiment can realize continuous and accurate detection of gas source purity for a longer period of time, and realize automatic calibration while performing purity detection, which effectively improves the accuracy of the detection results during long-term detection process and is conducive to long-term continuous production.

[0061] In this embodiment, please combine Figure 6 , Figure 9-11A slide groove 240 is provided on the hole wall of the blind hole 230 near the concentration sensor 500. The slide groove 240 is extended along the length direction of the blind hole 230. The slide groove 240 is spaced apart from the outer wall 210 of the support member 200, that is, there is a gap between the end of the slide groove 240 near the outer wall 210 and the outer wall 210, and the slide groove 240 does not extend to the outer wall 210. The width of the slide groove 240 is greater than the width of the concentration sensor 500.

[0062] A sliding member 241 is slidably matched in the slide groove 240, the width of the sliding member 241 is matched with the slide groove 240, the length of the sliding member 241 is smaller than the length of the slide groove 240, and the thickness of the sliding member 241 is matched with the depth of the slide groove 240. The sliding member 241 is slidably sealed with the groove wall of the slide groove 240. That is, when the sliding member 241 is matched in the slide groove 240, the sliding member 241 is flush with the hole wall of the installation blind hole 230.

[0063] The inner ring wall of the control ring 300 is also provided with a guide groove 320, which continuously extends in a ring shape along the circumference of the control ring 300. The guide groove 320 includes a deep groove section 321 and a shallow groove section 322, which are connected end to end. The shallow groove section 322 is located on the inner ring wall of the control ring 300 away from the gas collecting groove 310. That is, when the gas collecting groove 310 of the control ring 300 is in Figure 5 In the state shown, the guide groove 320 of the control ring 300 is in Fig.11 Status shown.

[0064] The outer wall surface 210 of the support member 200 is further provided with a matching blind hole 250, which is arranged parallel to the mounting blind hole 230. Along the axial direction of the control ring 300, the matching blind hole 250 and the mounting blind hole 230 are arranged at intervals.

[0065] A matching column 251 is slidably fitted in the matching blind hole 250, and a second elastic member 252 abuts against the bottom wall of the matching blind hole 250. Under the elastic force of the second elastic member 252, the matching column 251 abuts against the bottom wall of the guide groove 320.

[0066] The mounting blind hole 230 and the matching blind hole 250 are connected by a connecting notch 260, and the connecting notch 260 extends along the axial direction of both the mounting blind hole 230 and the matching blind hole 250, and a distance is left between the end of the slide groove 240 close to the outer wall surface 210 and the connecting notch 260, that is, the distance between the connecting notch 260 and the outer wall surface 210 is greater than the distance between the slide groove 240 and the outer wall surface 210.

[0067] A connecting rod 261 is disposed in the communication gap 260 . The connecting rod 261 fixedly connects the sliding member 241 and the matching column 251 . The connecting rod 261 is located at one end of the sliding member 241 away from the outer wall surface 210 .

[0068] An air inlet pipe 270 and an air outlet pipe 280 are disposed at one end of the slide groove 240 close to the outer wall surface 210 , and both the air inlet pipe 270 and the air outlet pipe 280 are connected to the external atmosphere.

[0069] An air intake valve (not shown in the figure) is provided at one end of the air intake pipe 270 close to the slide groove 240 , and the air intake valve only allows the gas in the air intake pipe 270 to enter the slide groove 240 .

[0070] An exhaust valve (not shown in the figure) is provided at one end of the exhaust pipe 280 close to the slide groove 240 , and the exhaust valve only allows the gas in the slide groove 240 to enter the exhaust pipe 280 .

[0071] When the matching column 251 is located in the deep groove section 321, the sliding member 241 is attached to the end of the slide groove 240 close to the outer wall surface 210, and the sliding member 241 completely covers the concentration sensor 500. Figure 8 This situation applies when the gas collecting slot 310 is located at the moving arm 400 and when the gas collecting slot 310 is located around the moving arm 400 (including when the gas collecting slot 310 is about to move to the moving arm 400 and when the gas collecting slot 310 has just left the moving arm 400).

[0072] When the matching column 251 is located in the shallow groove section 322, the sliding member 241 is separated from the end of the sliding groove 240 close to the outer wall surface 210, and the sliding member 241 is separated from the concentration sensor 500. Figure 7 As shown. This situation applies when the gas collecting groove 310 is located at the groove 110 and when the gas collecting groove 310 is located around the groove 110 (including when it is about to move to the groove 110 and has just left the groove 110). In this situation, the sliding member 241 is driven by the matching column 251, and the sliding member 241 is separated from the end of the slide groove 240 close to the outer wall surface 210, so that a "piston" effect is formed between the sliding member 241 and the slide groove 240, and the external air is sucked into the slide groove 240 from the air inlet pipe 270, specifically, it is sucked into the area between the sliding member 241 and the end of the slide groove 240 close to the outer wall surface 210. Since the sliding member 241 is separated from the concentration sensor 500 at this time, the concentration sensor 500 is exposed to the air environment in the slide groove 240, which facilitates the cleaning of the trace sample gas that may remain near the concentration sensor 500, and at the same time completes the calibration of the concentration sensor 500, eliminating the detection inertia of the concentration sensor 500.

[0073] When the matching column 251 re-enters the deep groove section 321, the sliding member 241 re-attaches to the end of the slide groove 240 close to the outer wall surface 210, and the air previously inhaled in the slide groove 240 is re-discharged from the exhaust pipe 280, and the slide groove 240 is emptied again. In this way, it will not interfere with the subsequent concentration detection of the sample gas.

[0074] Optionally, a cotton pad (not shown) is provided on the side of the sliding member 241 close to the concentration sensor 500, and the cotton pad completely covers the side of the sliding member 241 close to the concentration sensor 500. With this design, while the sliding member 241 moves in the slide groove 240, the cotton pad can also be used to clean the sensing surface of the concentration sensor 500, which helps to ensure the accuracy of the detection result.

[0075] In this embodiment, when the matching column 251 is located in the shallow groove section 322, the end wall of the sliding member 241 close to the outer wall surface 210 is located on the side of the connecting gap 260 close to the outer wall surface 210. This prevents the air entering the sliding groove 240 from accidentally entering the connecting gap 260.

[0076] Furthermore, the air inlet pipe 270 and the air outlet pipe 280 are both arranged on an end wall of the slide groove 240 close to the outer wall surface 210, so as to facilitate the smooth intake of air and the sufficient exhaust of air.

[0077] This embodiment further provides a gallium nitride production system, which includes: a raw material gas supply device, a gallium nitride preparation device and the above-mentioned gas source purity detection device.

[0078] The raw gas supply device and the gallium nitride preparation device are connected by a gas supply pipeline, and the main body 100 of the gas source purity detection device is connected to the gas supply pipeline. The gallium nitride production system uses the gas source purity detection device to detect the supply concentration of the raw gas during the production process to ensure the smooth progress of gallium nitride production.

[0079] To sum up, the gas source purity detection device provided in the embodiment of the present invention can realize continuous and accurate detection of gas source purity for a longer period of time, and realize automatic calibration while performing purity detection, which effectively improves the accuracy of the detection results during long-term detection process and is conducive to long-term continuous production.

[0080] The gallium nitride production system provided by the embodiment of the present invention can realize continuous and accurate detection of the purity of the raw gas during the gallium nitride reaction process, and realize automatic calibration while performing purity detection, thereby ensuring that the purity of the raw gas is always accurately controlled under long-term continuous production, which is conducive to the continuous production of gallium nitride.

[0081] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A gas source purity detection device, characterized in that: include: Main body, support, control ring, moving arm and concentration sensor; The support member has an outer wall surface in the form of a cylindrical surface, and a receiving groove for receiving the main pipe body is formed on the outer wall surface; a groove is formed on the outer side wall of the main pipe body, and the groove is connected to the tube cavity of the main pipe body, and the groove bottom wall of the groove is arc-shaped, and the curvature of the groove bottom wall of the groove is the same as the curvature of the outer wall surface; when the main pipe body is installed in the receiving groove, the groove bottom wall of the groove and the outer wall surface together form a complete cylindrical surface; The main pipe is used to connect to the gas source pipeline; The control ring is sleeved on the outer wall surface of the support member, and the control ring fits the outer wall surface; along the circumference of the outer wall surface, the control ring can be rotatably matched with the support member and driven by a driver, and the control ring and the outer wall surface are rotationally sealed; The inner ring wall of the control ring is provided with an air collecting groove; the outer wall surface of the support member is also provided with a mounting blind hole, the moving arm can be slidably matched in the mounting blind hole, and the moving arm and the hole wall of the mounting blind hole are slidingly sealed; a first elastic member is abutted between the moving arm and the bottom wall of the mounting blind hole; the outer side wall of the moving arm is provided with a mounting groove adapted to the concentration sensor, the concentration sensor is installed in the mounting groove, and the concentration sensor is flush with the outer side wall of the moving arm; When the control ring rotates relative to the support, the gas collecting groove can be periodically connected to the main pipe through the groove, and the gas collecting groove can also periodically move to the moving arm so that the moving arm drives the concentration sensor to periodically enter and exit the gas collecting groove.

2. The gas source purity detection device according to claim 1, characterized in that: Along the circumference of the control ring, both side walls of the gas collecting groove are inclined walls, so as to guide the moving arm to enter and exit the gas collecting groove.

3. The gas source purity detection device according to claim 1, characterized in that: A slide groove is provided on a hole wall of the installation blind hole near the concentration sensor, the slide groove is extended along the length direction of the installation blind hole, and the slide groove is spaced apart from the outer wall surface of the support member; the width of the slide groove is greater than the width of the concentration sensor; A sliding member is slidably matched in the slide groove, the width of the sliding member is adapted to the slide groove, the length of the sliding member is smaller than the length of the slide groove, and the thickness of the sliding member is adapted to the depth of the slide groove; a sliding seal is formed between the sliding member and the slide groove; The inner ring wall of the control ring is also provided with a guide groove, which continuously extends in a ring shape along the circumference of the control ring; the guide groove includes a deep groove section and a shallow groove section, and the shallow groove section is located on a side of the inner ring wall of the control ring away from the gas collecting groove; The outer wall surface of the support member is also provided with a matching blind hole, the matching blind hole is arranged parallel to the mounting blind hole and spaced apart, a matching column is slidably matched in the matching blind hole, a second elastic member is abutted between the matching column and the bottom wall of the matching blind hole; the matching column abuts against the bottom wall of the guide groove; The mounting blind hole and the matching blind hole are connected by a connecting notch, the connecting notch extends along the axial direction of the mounting blind hole and the matching blind hole, and a gap is left between the end of the slide groove close to the outer wall surface and the connecting notch; a connecting rod is arranged in the connecting notch, and the connecting rod fixedly connects the sliding member and the matching column; An air inlet pipe and an air exhaust pipe are arranged at one end of the slideway close to the outer wall, and both the air inlet pipe and the air exhaust pipe are connected to the external atmosphere; an air inlet valve is arranged at the end of the air inlet pipe, and an air exhaust valve is arranged at the end of the air exhaust pipe; When the matching column is located in the deep groove section, the sliding part is attached to the end of the slide groove close to the outer wall surface, and the sliding part completely covers the concentration sensor; when the matching column is located in the shallow groove section, the sliding part is separated from the end of the slide groove close to the outer wall surface, and the sliding part is separated from the concentration sensor.

4. The gas source purity detection device according to claim 3, characterized in that: A cotton pad is arranged on one side of the sliding member close to the concentration sensor, and the cotton pad completely covers the side of the sliding member close to the concentration sensor.

5. The gas source purity detection device according to claim 3, characterized in that: When the matching column is located in the shallow groove section, an end wall of the sliding member close to the outer wall surface is located on a side of the connecting notch close to the outer wall surface.

6. The gas source purity detection device according to claim 3, characterized in that: The air inlet pipe and the air outlet pipe are both arranged on an end wall of the slide groove close to the outer wall surface.

7. A gallium nitride production system, characterized in that: include: A raw gas supply device, a gallium nitride preparation device and a gas source purity detection device as claimed in any one of claims 1 to 6; The raw material gas supply device and the gallium nitride preparation device are connected by a gas supply pipeline, and the main pipe of the gas source purity detection device is connected to the gas supply pipeline.

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