MEMS actuator and optical image stabilizer

Abstract

The invention belongs to the technical field of actuators, and particularly discloses an MEMS actuator and an optical image stabilizer, and the MEMS actuator comprises a central platform, a fixed frame, a flexible supporting assembly, a horizontal displacement assembly, and a vertical displacement assembly. The center platform is located in an installation cavity of the fixing frame and connected with the fixing frame through the flexible supporting assembly, the horizontal displacement assembly and the vertical displacement assembly are arranged on the fixing frame, and the center platform is provided with an X-axis force application part, a Y-axis force application part and a Z-axis force application part. The horizontal displacement assembly and the vertical displacement assembly drive the center platform to move through the X-axis force application part, the Y-axis force application part and the Z-axis force application part. Due to the fact that the gap is formed between the force application arm and the force application part, the central platform cannot be blocked and interfered by the force application arm of the static shaft when moving in the direction of the moving shaft, and mechanical coupling can be effectively avoided. The horizontal displacement assembly and the center platform do not need to be stacked and buckled on the vertical displacement assembly, the overall thickness of the MEMS actuator is reduced, and the structure is simpler and more compact.

Description

Technical Field

[0001] The present invention relates to the technical field of actuators, and in particular to a MEMS (Microelectro Mechanical Systems) actuator and an optical image stabilizer. Background Art

[0002] Optical image stabilization technology is also commonly known as optical image stabilization. By performing "hardware" compensation for camera shake when shooting a frame of image, a clear image can still be obtained. With the booming market of handheld photographic equipment such as digital cameras and mobile phones, more and more equipment manufacturers hope to apply this technology to their high-end handheld photographic equipment. The method of using MEMS actuators to move image sensors is not restricted by the size of the lens or image sensor used, will not cause lens tilt to reduce image quality, and can achieve multi-axis rotation and displacement, so it is considered to be the most suitable optical image stabilization solution. Currently, MEMS actuators have been used in applications such as optical image stabilization, autofocus and super-resolution imaging of miniature cameras.

[0003] Patent application (US10516348B2 / CN108602663A) discloses another actuator for multi-freedom mobile or positioning platform, which is divided into in-plane MEMS actuator and out-of-plane actuator. The in-plane MEMS actuator provides movement of the x-axis and y-axis, while the out-of-plane actuator provides movement of the z-axis. The in-plane MEMS actuator will be assembled on the out-of-plane actuator to achieve multi-degree-of-freedom movement of the system. The in-plane MEMS actuator is driven by comb electrodes. When the driving electrode applies force to a motion axis to move the load, the other two springs on the load will transmit the movement to other stationary driving electrodes. This mechanical coupling introduced between different movements will reduce efficiency and bring errors, which is not desirable in MEMS actuation. And the upper and lower parts of the entire system need to be manufactured and aligned separately, which not only means that the overall height of the device will be relatively high, which is not conducive to the compactness of the structure, but also the upper and lower assembly precision requirements of the subsequent device are high, and the manufacturing difficulty is relatively large. Summary of the invention

[0004] The object of the present invention is to provide a MEMS actuator to reduce the overall thickness of the MEMS actuator and achieve compactness and simplification of the structure.

[0005] In order to achieve the above object, a first aspect of the present invention provides a MEMS actuator, comprising:

[0006] Central platform;

[0007] A fixed frame provided with a mounting cavity for accommodating the central platform;

[0008] A flexible support assembly, which is located between the edge of the central platform and the fixed frame, and the central platform is connected to the fixed frame through the flexible support assembly;

[0009] A horizontal displacement assembly, wherein the horizontal displacement assembly comprises an X-axis force applying arm, and an X-axis force applying portion cooperating with the X-axis force applying arm is disposed on an edge of the central platform in the X-axis direction;

[0010] and / or

[0011] The horizontal displacement assembly includes a Y-axis force-applying arm, and the edge of the central platform in the Y-axis direction is provided with a Y-axis force-applying portion that cooperates with the Y-axis force-applying arm;

[0012] A vertical displacement assembly, which includes a lifting arm assembly;

[0013] The central platform is provided with Z-axis force applying parts on both side edges in the X-axis direction and / or the Y-axis direction;

[0014] The lifting arm assembly drives the central platform to move in the Z-axis direction through the Z-axis force application part;

[0015] Wherein, the horizontal displacement assembly and the vertical displacement assembly are arranged on the fixed frame.

[0016] Preferably, the X-axis force-applying part includes an X-axis force-applying groove and an X-axis blocking block; the X-axis force-applying groove is arranged at the edge of the central platform, and the X-axis blocking block is connected to the central platform; a first force-applying block is arranged at one end of the X-axis force-applying arm facing the central platform; the first force-applying block is located in the X-axis force-applying groove, and the X-axis blocking block is located on the side of the first force-applying block away from the central platform.

[0017] Preferably, the Y-axis force-applying part includes a Y-axis force-applying groove and a Y-axis blocking block; the Y-axis force-applying groove is arranged at the edge of the central platform, and the Y-axis blocking block is connected to the central platform; a second force-applying block is arranged at one end of the Y-axis force-applying arm group facing the central platform; the second force-applying block is located in the Y-axis force-applying groove, and the Y-axis blocking block is located on the side of the first force-applying block away from the central platform.

[0018] Preferably, the number of the X-axis force-applying parts is an even number not less than four, and is evenly distributed on both side edges of the central platform in the X-axis direction, and the number of the corresponding X-axis force-applying arms is the same as the number of the X-axis force-applying parts;

[0019] The number of the Y-axis force applying parts is an even number not less than four, and is evenly distributed on both side edges of the central platform in the Y-axis direction, and the corresponding number of the Y-axis force applying arms is the same as the number of the Y-axis force applying parts.

[0020] Preferably, the X-axis force-applying arm comprises a first arm segment and a first elastic segment; the first force-applying block is connected to the first arm segment via the first elastic segment;

[0021] The Y-axis force-applying arm includes a second arm segment and a second elastic segment; the second force-applying block is connected to the second arm segment via the second elastic segment.

[0022] Preferably, the horizontal displacement assembly comprises an X-axis force-applying arm and a Y-axis force-applying arm; a Y-axis reserved gap is provided between the X-axis force-applying groove and the X-axis force-applying arm;

[0023] An X-axis reserved gap is provided between the Y-axis force applying groove and the Y-axis force applying arm.

[0024] Preferably, the Y-axis force application groove and the X-axis force application groove penetrate in the Z-axis direction.

[0025] Preferably, the Z-axis force-applying part includes a Z-axis force-applying groove and two Z-axis blocking blocks, the Z-axis force-applying groove is arranged at the edge of the central platform, the two Z-axis blocking blocks are respectively arranged on both sides of the Z-axis force-applying groove in the Z-axis direction, and the lifting force arm group includes a plurality of third force-applying arms; one end of the third force-applying arm facing the central platform is located in the Z-axis force-applying groove, and one end of the third force-applying arm facing the central platform is used to push the Z-axis blocking block to drive the central platform to move in the Z-axis direction.

[0026] Preferably, the central platform is provided with Z-axis force grooves on both sides of the X-axis direction and both sides of the Y-axis direction; the lifting force arm group has a third force arm on both sides of the central platform in the X-axis direction and both sides of the Y-axis direction.

[0027] Preferably, the horizontal displacement assembly further comprises: an X-axis actuator;

[0028] The X-axis actuator is arranged on the fixed frame, the X-axis actuator is connected to the X-axis force arm, and the X-axis actuator is used to drive the X-axis force arm to move in the X-axis direction;

[0029] and / or

[0030] The horizontal displacement assembly also includes: a Y-axis actuator; the Y-axis actuator is arranged on the fixed frame, the Y-axis actuator is connected to the Y-axis force arm, and the Y-axis actuator is used to drive the Y-axis force arm to move in the Y-axis direction.

[0031] A second aspect of the present invention provides an optical image stabilizer, comprising: the above-mentioned MEMS actuator.

[0032] The MEMS actuator and the optical image stabilizer with the MEMS actuator provided by the present invention have the following beneficial effects: the matching positions of the central platform of the MEMS actuator and the flexible support component, the horizontal displacement component, and the vertical displacement component are all arranged around the central platform, and the horizontal displacement component and the vertical displacement component are arranged on the fixed frame, and the lifting force arm group and the horizontal displacement component can also apply displacement power to the central platform, that is, the horizontal displacement component and the central platform of the MEMS actuator do not need to be stacked and fastened on the vertical displacement component, thereby reducing the overall thickness of the MEMS actuator and making the structure of the MEMS actuator simpler and more compact; and, a gap is reserved between the force arm and the force applying part, so that when the central platform moves in the direction of the moving axis, it will not be blocked or interfered by the force arms of other stationary axes, and mechanical coupling can be effectively avoided.

[0033] Additional aspects and advantages of the present invention will be given in part in the following description and in part will be obvious from the following description, or will be learned through practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] Figure 1 is a schematic structural diagram of a MEMS actuator according to an embodiment of the present invention;

[0035] Figure 2 is a schematic structural diagram of a central platform according to an embodiment of the present invention;

[0036] Figure 3 is a schematic structural diagram of a side view of a central platform of an embodiment of the present invention;

[0037] Figure 4 is a partial structural schematic diagram of a central platform in an embodiment of the present invention;

[0038] Figure 5 yes Figure 1 A schematic diagram of the enlarged structure at A in the middle;

[0039] Figure 6 is a schematic structural diagram of the second force applying arm and the central platform after being assembled in an embodiment of the present invention;

[0040] Figure 7 is a schematic structural diagram of the third force-applying arm and the central platform after being assembled in an embodiment of the present invention;

[0041] Figure 8 yes Figure 1 A schematic diagram of the enlarged structure at B in the middle;

[0042] Fig. 9 yes Figure 1 Schematic diagram of the enlarged structure at C in the middle;

[0043] Fig.10is a schematic diagram of the state of the central platform of an embodiment of the present invention when it is translated along the X-axis direction;

[0044] Fig.11 is a schematic diagram of the state of the central platform of an embodiment of the present invention when it moves along the Y-axis direction;

[0045] Fig.12 It is a schematic diagram of the state when the central platform of an embodiment of the present invention rotates around the Z-axis direction;

[0046] Fig.13 is a schematic diagram of the state of the central platform of an embodiment of the present invention when it moves along the Z-axis direction;

[0047] Fig.14 It is a schematic diagram of the state when the central platform of an embodiment of the present invention rotates around the Y-axis direction;

[0048] Fig.15 It is a schematic diagram of the state when the central platform of an embodiment of the present invention rotates around the X-axis direction.

[0049] In the figure, 100, central platform; 110, X-axis force groove; 111, X-axis blocking block; 112, Y-axis reserved gap; 120, Y-axis force groove; 121, Y-axis blocking block; 122, X-axis reserved gap; 130, Z-axis force groove; 131, Z-axis blocking block; 200, fixed frame; 210, mounting cavity; 300, flexible support assembly; 400, horizontal displacement assembly; 410, X-axis force arm; 412, first force block; 413 , first arm section; 414, first elastic section; 420, Y-axis force arm; 422, second force block; 423, second arm section; 424, second elastic section; 430, X-axis actuator; 440, Y-axis actuator; 450, folded flexible beam; 460, movable comb-tooth electrode; 470, fixed comb-tooth electrode; 480, anchor point; 500, vertical displacement assembly; 510, lifting force arm group; 511, third force arm; 520, piezoelectric folding arm. DETAILED DESCRIPTION

[0050] Embodiments of the present invention are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0051] In the description of the present invention, it should be understood that descriptions involving orientations, such as up, down, front, back, left, right, etc., and orientations or positional relationships indicated are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0052] In the description of the present invention, "several" means one or more, "more" means more than two, "greater than", "less than", "exceed" etc. are understood as not including the number itself, and "above", "below", "within" etc. are understood as including the number itself. If there is a description of "first" or "second", it is only used for the purpose of distinguishing the technical features, and cannot be understood as indicating or implying the relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the order of the indicated technical features.

[0053] In the description of the present invention, unless otherwise clearly defined, terms such as setting, installing, connecting, etc. should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above terms in the present invention based on the specific content of the technical solution.

[0054] Reference Figure 1 The MEMS actuator of the embodiment of the present invention includes: a central platform 100, a fixed frame 200, a flexible support component 300, a horizontal displacement component 400, and a vertical displacement component 500; the fixed frame 200 is provided with a mounting cavity 210 for accommodating the central platform 100, the flexible support component 300 is located between the edge of the central platform 100 and the fixed frame 200, and the central platform 100 is connected to the fixed frame 200 through the flexible support component 300; the horizontal displacement component 400 and the vertical displacement component 500 are both arranged on the fixed frame 200, the horizontal displacement component 400 is used to drive the central platform 100 to move in a horizontal direction (the bearing surface of the central platform 100 is a horizontal plane, and the direction parallel to the horizontal plane is a horizontal direction), and the vertical displacement component 500 is used to drive the central platform 100 to move in a direction perpendicular to the bearing surface of the central platform 100.

[0055] It should be noted that the direction perpendicular to the bearing surface of the central platform 100 is the Z-axis direction. The horizontal direction can be divided into the X-axis direction and the Y-axis direction. The horizontal displacement assembly 400 can drive the central platform to move in the X-axis direction or the Y-axis direction. The X-axis direction and the Y-axis direction may be perpendicular to each other or not. In a preferred embodiment, in order to facilitate the control of the movement of the central platform, the X-axis direction and the Y-axis direction are perpendicular, such as Figure 2 Directions shown in the upper left corner.

[0056] Reference Figure 2The central platform 100 can be made into a square shape, so that connection positions can be set around the central platform 100 so as to be connected to the fixed frame 200 through the flexible support assembly 300; the central platform 100 has a bearing surface, which is used to bear objects that need to be slightly displaced, such as optical sensors, infrared sensors, etc. In addition, the central platform 100 can also be made into a circular, trapezoidal or other shaped platform.

[0057] Reference Figure 1 and Figure 2 The fixed frame 200 is provided with an installation cavity 210 for accommodating the central platform 100; during manufacturing, the fixed frame 200 can be directly penetrated to form the installation cavity 210, and then the flexible support component 300 is used to fix the central platform 100 in the installation cavity 210 in the middle of the fixed frame 200.

[0058] Reference Figure 1 and Figure 2 , the flexible support component 300 is located between the edge of the central platform 100 and the fixed frame 200, and the central platform 100 is connected to the fixed frame 200 through the flexible support component 300, that is, the flexible support component 300 is also located in the installation cavity 210, so as to reduce the occupied space in the Z-axis direction and make the overall thickness smaller; in this embodiment, the flexible support component 300 can be composed of a plurality of springs to connect the central platform 100 and the fixed frame 200, so that the central platform 100 can move in the X-axis direction, the Y-axis direction, and the Z-axis direction, and the central platform 100 can return to its original position under the rebound force of the spring after moving. It can be understood that due to the setting of the horizontal displacement component 400 and the vertical displacement component 500, the central platform 100 changes its position under the drive of the horizontal displacement component 400 and the vertical displacement component 500, and when the horizontal displacement component 400 and the vertical displacement component 500 do not apply force to the central platform 100, the central platform 100 is reset under the drive of the flexible support component 300.

[0059] In addition, the flexible support component 300 can also be a single large spring, a mechanical flexure structure or a honeycomb elastic structure, which is an elastic structure that can be displaced and reset in the horizontal direction.

[0060] The horizontal displacement component 400 can be provided with a mechanism for driving the central platform 100 to move according to actual needs. When the central platform 100 only needs to move in the X-axis direction and the Z-axis direction, the horizontal displacement component 400 is only provided with an X-axis force arm 410, and the edge of the central platform 100 in the X-axis direction is provided with an X-axis force applying part that cooperates with the X-axis force applying arm 410; when the central platform 100 only needs to move in the Y-axis direction and the Z-axis direction, the horizontal displacement component 400 is only provided with a Y-axis force applying arm 420, and the edge of the central platform 100 in the Y-axis direction is provided with a Y-axis force applying part that cooperates with the Y-axis force applying arm 420; when the central platform 100 needs to move in the X-axis direction, the Y-axis direction and the Z-axis direction, as Figure 1 , Figure 5 As shown, the horizontal displacement assembly 400 is provided with an X-axis force arm 410 and a Y-axis force arm 420, and the edge of the central platform 100 in the X-axis direction is provided with an X-axis force portion cooperating with the X-axis force arm 410, and the edge of the central platform 100 in the Y-axis direction is provided with a Y-axis force portion cooperating with the Y-axis force arm 420.

[0061] It should be noted that the X-axis force arm 410 can push and pull the central platform 100 to move back and forth along the X-axis direction through the X-axis force applying part, providing a basis for the X-axis movement of the central platform 100. The Y-axis force arm 420 can push and pull the central platform 100 to move back and forth along the Y-axis direction through the Y-axis force applying part, providing a basis for the Y-axis movement of the central platform 100.

[0062] Reference Figure 1 , Figure 4 , Figure 7 , the vertical displacement assembly 500 includes a lifting arm assembly 510; the central platform 100 is provided with a Z-axis force application part on both sides of the edge in the X-axis direction and / or the Y-axis direction; the lifting arm assembly 510 drives the central platform 100 to move in the Z-axis direction through the Z-axis force application part 130; the lifting arm assembly 510 can push the central platform 100 to move back and forth in the Z-axis direction, providing a basis for the vertical displacement of the central platform 100. In this embodiment, the central platform 100 has a Z-axis force application part on both sides of the X-axis direction and both sides of the Y-axis direction, and the lifting arm assembly 510 can apply an ascending and descending force to the surroundings of the central platform 100, and the force is more evenly applied to drive the central platform 100 to vertically ascend and descend, and provide a basis for the central platform 100 to rotate around the X-axis or around the Y-axis. In addition, the central platform 100 can also be provided with a Z-axis force application part on both sides of the X-axis direction, or a Z-axis force application part on both sides of the Y-axis direction, so that components can be saved and the lifting function can be achieved.

[0063] Reference Figure 1Since the matching positions of the central platform 100 and the flexible support component 300, the horizontal displacement component 400, and the vertical displacement component 500 are all arranged around the central platform 100, the horizontal displacement component 400 and the vertical displacement component 500 can be laid on the fixed frame 200, and the lifting force arm group 510, the X-axis force arm 410, and the Y-axis force arm 420 can also apply displacement power to the central platform 100, then the horizontal displacement component 400, the central platform 100, and the vertical displacement component 500 are all located at the same height. The horizontal displacement component 400 and the central platform 100 of this embodiment do not need to be stacked and buckled on the vertical displacement component 500, which not only reduces the overall thickness of the MEMS actuator, but also does not need to perform precise alignment and assembly processes when assembling the MEMS actuator, thereby reducing the manufacturing difficulty of the MEMS actuator, reducing assembly defective products, and improving the product qualification rate.

[0064] In some embodiments of the present invention, reference Figures 4 to 6 , the X-axis force-applying part includes an X-axis force-applying groove 110 and an X-axis blocking block 111; the X-axis force-applying groove 110 is arranged at the edge of the central platform 100, and the X-axis blocking block 111 is connected to the central platform 100; the end of the X-axis force-applying arm 410 facing the central platform 100 is provided with a first force-applying block 412; the first force-applying block 412 is located in the X-axis force-applying groove 110, and the X-axis blocking block 111 is located on the side of the first force-applying block 412 away from the central platform 100. That is, the first force-applying block 412 is located at the X

[0065] At the X-axis force application groove between the axis shielding block 111 and the central platform 100, the first force application block 412 is at the X-axis

[0066] The X-axis force arm 410 can directly push the central platform 100 to move along the X-axis or drive the central platform 100 to move along the X-axis direction by pushing the X-axis blocking block 111, so as to achieve the purpose of the X-axis force arm 410 pushing or pulling the central platform 100 to move along the X-axis direction through the X-axis force applying part. Figure 2 , Figure 4 , Figure 5, the X-axis force-applying groove 110 is T-shaped, and the corresponding X-axis force-applying arm 410 is also T-shaped at one end facing the central platform 100, and the corresponding first force-applying block 412 can contact the two X-axis blocking blocks 111, so that the X-axis force-applying arm 410 can better transmit power to the central platform 100, so that the central platform 100 can move in the X-axis direction. In addition, the X-axis force-applying part and the X-axis force-applying arm can also be directly fixedly connected (adhesive bonding, connector connection, welding, etc.), so that the X-axis force-applying arm can directly push or pull the central platform when moving; or, the X-axis force-applying part is set as a socket, and the X-axis force-applying arm is set as a pin inserted into the socket, and the length direction of the pin and the socket is not parallel to the X-axis direction (can be perpendicular), then the X-axis force-applying arm can also push or pull the central platform when moving.

[0067] It is understandable that, referring to Figure 2 , Figure 4 and Figure 5 In order to facilitate the movement of the central platform 100 in both directions of the X-axis, the central platform 100 has X-axis force-applying parts on both sides of the X-axis direction, and there are at least two X-axis force-applying arms 410, and correspondingly, on both sides of the central platform 100 in the X-axis direction, one X-axis force-applying arm 410 corresponds to one X-axis force-applying part. Each X-axis force-applying part includes an X-axis force-applying groove 110 and a corresponding X-axis blocking block 111, so that two X-axis force-applying arms 410 with different force-applying directions are set to drive the central platform 100 to move back and forth on the X-axis. That is, when the X-axis force-applying arm 410 on one side moves in a direction away from the central platform 100, the central platform 100 will move to its side, such as Fig.10 As shown, Fig.10 The black arrow in the middle is the force application direction of the X-axis force application arm 410 , and the dotted arrow is the moving direction of the central platform 100 .

[0068] In some embodiments of the present invention, reference Figure 4 , Figure 5 and Figure 7The Y-axis force-applying part includes a Y-axis force-applying groove 120 and a Y-axis blocking block 121; the Y-axis force-applying groove 120 is arranged at the edge of the central platform 100, and the Y-axis blocking block 121 is connected to the central platform 100; the Y-axis force-applying arm 420 is provided with a second force-applying block 422 at one end facing the central platform 100; the second force-applying block 422 is located in the Y-axis force-applying groove 120, and the Y-axis blocking block 121 is located at a side of the second force-applying block 422 away from the central platform 100. The Y-axis blocking block 121 is located at a side of the second force-applying block 422 away from the central platform. That is, the second force block 422 is located at the Y-axis force groove between the Y-axis shielding block 121 and the central platform 100. The second force block 121 can directly push the central platform 100 to move along the Y-axis or drive the central platform 100 to move along the Y-axis direction by pushing the Y-axis shielding block under the drive of the Y-axis force arm 420, so as to achieve the purpose of the Y-axis force arm pushing or pulling the central platform 100 to move along the Y-axis direction through the Y-axis force part. Specifically, refer to Figure 2 , Figure 4 , Figure 5 , the Y-axis force-applying groove 120 is T-shaped, and the corresponding Y-axis force-applying arm 420 is also T-shaped at one end facing the central platform 100, and the corresponding second force-applying block 422 can contact the two Y-axis blocking blocks 121, so that the Y-axis force-applying arm 420 can better transmit power to the central platform 100, so that the central platform 100 can move in the Y-axis direction. In addition, the Y-axis force-applying part and the Y-axis force-applying arm can also be directly fixedly connected (adhesive bonding, connector connection, welding, etc.), so that the Y-axis force-applying arm can directly push or pull the central platform when moving; or, the Y-axis force-applying part is set as a socket, and the Y-axis force-applying arm is set as a pin inserted into the socket, and the length direction of the pin and the socket is not parallel to the Y-axis direction (can be perpendicular), then the Y-axis force-applying arm can also push or pull the central platform when moving.

[0069] It is understandable that, referring to Figure 2 , Figure 4 , Figure 5 In order to facilitate the movement of the central platform 100 in both directions of the Y-axis, the central platform 100 has a Y-axis force-applying part on both sides of the Y-axis direction, and there are at least two Y-axis force-applying arms 420, and correspondingly, on both sides of the central platform 100 in the Y-axis direction, one Y-axis force-applying arm 420 corresponds to one Y-axis force-applying part. Each Y-axis force-applying part includes a Y-axis force-applying groove 120 and a corresponding Y-axis blocking block 121, so that two Y-axis force-applying arms 420 with different force-applying directions are set to drive the central platform 100 to move back and forth on the Y-axis. That is, when the Y-axis force-applying arm 420 on one side moves in a direction away from the central platform 100, the central platform 100 will move to its side, such as Fig.11 As shown, Fig.11The black arrow in the middle is the force application direction of the Y-axis force application arm 420 , and the dotted arrow is the moving direction of the central platform 100 .

[0070] Understandable, yes, refer to Figure 4 , Figure 5 In order to reduce motion interference and ensure effective use of power, the X-axis force arm 410 and the Y-axis force arm 420 are not directly connected to the central platform 100, and power is provided only through contact. In addition, there is a Y-axis reserved gap 112 between the X-axis force groove 110 and the X-axis force arm 410; there is an X-axis reserved gap 122 between the Y-axis force groove 120 and the Y-axis force arm 420. When the Y-axis force arm 420 is used to drive the central platform 100 to move in the Y-axis direction, the Y-axis reserved gap 112 is set to avoid the central platform 100 from contacting the X-axis force arm 410 during the movement, so that the central platform 100 will not be blocked or interfered by the X-axis force arm 410 when moving in the Y-axis direction, thereby achieving complete independence of the Y-axis movement and effectively avoiding mechanical coupling. Similarly, when the X-axis force arm 410 is used to drive the central platform 100 to move in the X-axis direction, by setting the X-axis reserved gap 122, the central platform 100 can be prevented from contacting the Y-axis force arm 420 during movement, so that the central platform 100 will not be blocked or interfered by the Y-axis force arm 420 when moving in the X-axis direction, thereby achieving complete independence of movement in the X-axis direction.

[0071] In some embodiments of the present invention, reference Figure 4 and Figure 7 , the Z-axis force-applying part includes a Z-axis force-applying groove 130 and two Z-axis blocking blocks 131, the Z-axis force-applying groove 130 is arranged at the edge of the central platform, and the two Z-axis blocking blocks 131 are respectively arranged on both sides of the Z-axis force-applying groove 130 in the Z-axis direction, and the lifting force arm group 510 includes a plurality of third force-applying arms 511; one end of the third force-applying arm 511 facing the central platform 100 is located in the Z-axis force-applying groove 130, and one end of the third force-applying arm 511 facing the central platform 100 is used to push the Z-axis blocking block 131 to drive the central platform 100 to move in the Z-axis direction. One end of the third force-applying arm 511 facing the central platform 100 is located between the same Z-axis blocking block 131, so that the third force-applying arm 511 drives the central platform 100 to rise and fall by driving different Z-axis blocking blocks 131 when lifting and lowering. Since there are multiple third force applying arms 511, when all the third force applying arms 511 are raised, the central platform 100 will move upward, and when all the third force applying arms 511 are lowered, the central platform 100 will move downward. Fig.13 As shown, Fig.13The black arrow in the middle is the force direction of the third force arm 511, and the dotted arrow is the moving direction of the central platform 100. In addition, the Z-axis force-applying part and the Z-axis force-applying arm can also be directly fixedly connected (adhesive bonding, connector connection, welding, etc.), so that the Z-axis force-applying arm can directly push or pull the central platform to rise or fall when it is lifted or lowered; or, the Z-axis force-applying part is set as a socket, and the Z-axis force-applying arm is set as a pin inserted into the socket, and the length direction of the pin and the socket is not parallel to the Z-axis direction (can be perpendicular), then the Z-axis force-applying arm can also push or pull the central platform to rise or fall when it is lifted or lowered.

[0072] It should be noted that, refer to Figure 7 In order to reduce the interference of the third force arm 511 on the horizontal displacement of the central platform 100, one end of the third force arm 511 located in the Z-axis force groove 130 has a reserved gap with the groove wall of the Z-axis force groove 130 in the directions of the X-axis and the Y-axis, so that when the central platform 100 moves in the directions of the X-axis and the Y-axis, it will not be interfered by the third force arm 511, so that the central platform 100 moves in the directions of the X-axis and the Y-axis, effectively avoiding mechanical coupling. It can be understood that when the horizontal displacement assembly 400 only has the X-axis force arm 410, one end of the third force arm 511 located in the Z-axis force groove 130 has a reserved gap with the groove wall of the Z-axis force groove 130 in the X-axis direction; when the horizontal displacement assembly 400 only has the Y-axis force arm 420, one end of the third force arm 511 located in the Z-axis force groove 130 has a reserved gap with the groove wall of the Z-axis force groove 130 in the Y-axis direction.

[0073] It is understandable that, referring to Figure 4 , Figure 5 and Figure 6 In order to reduce the interference of the X-axis force arm 410 and the Y-axis force arm 420 on the movement of the central platform 100 on the Z-axis, the Y-axis force groove 120 and the X-axis force groove 110 are intersected in the Z-axis direction. Therefore, when the central platform 100 is raised or lowered on the Z-axis, it will not contact the X-axis force arm 410 and the Y-axis force arm 420, so that the central platform 100 can move completely independently in the Z-axis direction, effectively avoiding mechanical coupling.

[0074] In some embodiments of the present invention, reference Figure 1 and Figure 2, the number of X-axis force-applying parts is four, and they are evenly distributed on both sides of the edge of the central platform 100 in the X-axis direction, and the number of the corresponding X-axis force-applying arms 410 is four; the number of Y-axis force-applying parts is four, and they are evenly distributed on both sides of the edge of the central platform 100 in the Y-axis direction, and the number of the corresponding Y-axis force-applying arms 420 is four. That is, the number of X-axis force-applying grooves 110 is four, and they are evenly distributed on both sides of the edge of the central platform 100 in the X-axis direction; the number of Y-axis force-applying grooves 120 is four, and they are evenly distributed on both sides of the edge of the central platform 100 in the Y-axis direction. That is, the central platform 100 is driven by two X-axis force arms 410 on both sides of the X-axis direction, and the central platform 100 is driven by two Y-axis force arms 420 on both sides of the Y-axis direction. There are eight force points of the horizontal displacement assembly 400 around the central platform 100. At this time, the diagonal X-axis force arms 410 and the diagonal Y-axis force arms 420 can be used to apply force, so as to drive the central platform 100 to rotate around the Z-axis. Fig.12 As shown, Fig.12 The black arrows in the middle are the force application directions of the X-axis force application arm 410 and the Y-axis force application arm 420, and the dotted arrows are the rotation direction of the central platform 100, which increases the movement modes of the central platform 100 and meets more needs. In addition, the number of X-axis force application parts can also be six, eight, or an even number not less than four, and the corresponding number of X-axis force application arms 410 is the same as the number of X-axis force application parts; the number of Y-axis force application parts can also be six, eight, or an even number not less than four, and the corresponding number of Y-axis force application arms 420 is the same as the number of Y-axis force application parts, so that the horizontal displacement component 400 can drive the central platform 100 to have at least 8 force application points, so as to drive the central platform 100 to rotate around the Z axis.

[0075] Reference Figure 5 In order to meet the requirement that the X-axis force arm 410 and the Y-axis force arm 420 rotate around the Z-axis when the central platform 100 rotates, the X-axis force arm 410 includes a first arm segment 413 and a first elastic segment 414; the first force block 412 is connected to the first arm segment 413 through the first elastic segment 414; the Y-axis force arm 420 includes a second arm segment 423 and a second elastic segment 424; the second force block 422 is connected to the second arm segment 423 through the second elastic segment 424. By providing the first elastic segment 414 and the second elastic segment 424, the first force block 412 and the second force block 422 on the X-axis force arm 410 and the Y-axis force arm 420 can move with the central platform 100 when the central platform 100 rotates around the Z-axis, thereby reducing motion interference and allowing the central platform 100 to rotate around the Z-axis.

[0076] In order to drive the central platform 100 to rotate around the X-axis and around the Y-axis, refer to Figure 1, Figure 2 , Figure 3 , the central platform 100 is provided with Z-axis force application slots 130 on both sides of the X-axis direction and both sides of the Y-axis direction; the lifting force arm group 510 is provided with third force application arms 511 on both sides of the central platform 100 in the X-axis direction and both sides of the Y-axis direction. When the central platform 100 needs to rotate around the X-axis, one of the two third force application arms 511 located on both sides of the Y-axis direction of the central platform 100 rises and the other falls, so that the central platform 100 can rotate around the X-axis (such as Fig.15 When the central platform 100 needs to rotate around the Y axis, one of the two third force arms 511 located on both sides of the central platform 100 in the X axis direction rises and the other falls, so that the central platform 100 can rotate around the Y axis (as shown in FIG. Fig.14 As shown in the figure), the degree of freedom of the MEMS actuator can be increased, more movement modes can be provided, and more customer needs can be met.

[0077] In some embodiments of the present invention, reference Figure 1 and Figure 8 The horizontal displacement assembly 400 also includes: a plurality of X-axis actuators 430 and a plurality of Y-axis actuators 440; the plurality of X-axis actuators 430 are distributed on both sides of the central platform 100 in the X-axis direction, the X-axis actuators 430 are connected to the X-axis force arm 410, and the X-axis actuators 430 are used to drive the X-axis force arm 410 to move in the X-axis direction; the plurality of Y-axis actuators 440 are distributed on both sides of the central platform 100 in the Y-axis direction, the Y-axis actuators 440 are connected to the Y-axis force arm 420, and the Y-axis actuators 440 are used to drive the Y-axis force arm 420 to move in the Y-axis direction. That is, each X-axis force arm 410 is driven by an X-axis actuator 430 to provide displacement power for the central platform 100; each Y-axis force arm 420 is driven by a Y-axis actuator 440 to provide displacement power for the central platform 100, ensuring that the force application timing and force application time of each X-axis force arm 410 and Y-axis force arm 420 are controlled separately, so as to control the planar displacement of the central platform 100.

[0078] It can be understood that when the horizontal displacement assembly 300 only has the X-axis force arm 410, the horizontal displacement assembly 300 is only equipped with the X-axis actuator 430; when the horizontal displacement assembly 300 only has the Y-axis force arm 420, the horizontal displacement assembly 300 is only equipped with the Y-axis actuator 440.

[0079] It should be noted that, refer to Figure 1 and Figure 8, the X-axis actuator 430 and the Y-axis actuator 440 are both electrostatic actuators, which include a folded flexible beam 450, a mobile comb-tooth electrode 460 and a fixed comb-tooth electrode 470. Multiple groups of folded flexible beams 450 and mobile comb-tooth electrodes 460 are connected to both sides of the X-axis force arm 410 or the Y-axis force arm 420. The folded flexible beam 450 connects the anchor point 480 and the force arm. The folded flexible beam 450 can provide the electrostatic actuator with restoring force and flexibility in the direction of movement, and reduce the tangential force generated by the movement of the central platform 100 on the force arm to avoid tangential displacement of the comb structure. The anchor point 480 is used to support and fix the force arm. The mobile comb-tooth electrode 460 is matched with the fixed comb-tooth electrode 470 to realize the movement of the force arm through electrostatic force drive. The fixed comb-teeth electrode 470 is connected to the fixed frame 200 . A metal electrode will be plated on the fixed comb-teeth electrode 470 , and the electrode will be led outward along the fixed frame 200 .

[0080] Reference Figure 1 and Fig. 9 , the vertical displacement assembly 500 also includes a plurality of lifting actuators, and one lifting actuator drives a third force arm 511 to lift. The plurality of lifting actuators, the plurality of X-axis actuators 430, and the plurality of Y-axis actuators 440 are all laid on the fixed frame 200. The lifting actuator is an actuator made of piezoelectric material, which includes a piezoelectric folding arm 520 and a third force arm 511 located in the middle of the piezoelectric folding arm 520. A layer of piezoelectric material is plated on the third force arm 511 and the piezoelectric folding arm 520, and a bias is applied to them to cause them to deform, thereby driving the third force arm 511 in the middle to move up and down, so as to achieve the purpose of driving the central platform 100 to lift and lower along the Z axis, rotate around the X axis, and rotate around the Y axis.

[0081] This embodiment also provides an optical image stabilizer, which includes a housing and the above-mentioned MEMS actuator, wherein the MEMS actuator is disposed in the housing. Figure 1Since the matching positions of the central platform 100 of the MEMS actuator and the flexible support assembly 300, the horizontal displacement assembly 400, and the vertical displacement assembly 500 are all arranged around the central platform 100, and the horizontal displacement assembly 400 and the vertical displacement assembly 500 are arranged on the fixed frame 200, the lifting force arm group 510, the X-axis force arm and / or the Y-axis force arm can also apply displacement power to the central platform 100. When assembling the fixed frame 200, the horizontal displacement assembly 400, the central platform 100, and the vertical displacement assembly 500 can be assembled together. Therefore, the horizontal displacement assembly 400, the central platform 100, and the vertical displacement assembly 500 of this embodiment The central platform 100 does not need to be stacked and fastened on the vertical displacement assembly 500, which not only reduces the overall thickness of the MEMS actuator, but also does not need to perform precise alignment and assembly processes when assembling the MEMS actuator, thereby reducing the manufacturing difficulty of the MEMS actuator, reducing assembly defective products, and improving the product qualification rate. In addition, the central platform 100 can translate along the X-axis direction, translate along the Y-axis direction, translate along the Z-axis direction, rotate around the X-axis direction, rotate around the Y-axis direction, and rotate around the Z-axis direction with the cooperation of the horizontal displacement assembly 400 and the vertical displacement assembly 500. The central platform 100 can move in six directions to cope with different camera shake situations.

[0082] The above are only preferred embodiments of the present invention. It should be pointed out that, for ordinary technicians in this technical field, several improvements and substitutions can be made without departing from the technical principles of the present invention. These improvements and substitutions should also be regarded as the scope of protection of the present invention.

Claims

1. A MEMS actuator, characterized in that: include: Central platform; A fixed frame provided with a mounting cavity for accommodating the central platform; A flexible support assembly, which is located between the edge of the central platform and the fixed frame, and the central platform is connected to the fixed frame through the flexible support assembly; A horizontal displacement assembly, wherein the horizontal displacement assembly comprises an X-axis force applying arm, and an X-axis force applying portion cooperating with the X-axis force applying arm is disposed on an edge of the central platform in the X-axis direction; and / or The horizontal displacement assembly includes a Y-axis force-applying arm, and the edge of the central platform in the Y-axis direction is provided with a Y-axis force-applying portion that cooperates with the Y-axis force-applying arm; A vertical displacement assembly, which includes a lifting arm assembly; The central platform is provided with Z-axis force applying parts on both side edges in the X-axis direction and / or the Y-axis direction; The lifting arm assembly drives the central platform to move in the Z-axis direction through the Z-axis force application part; Wherein, the horizontal displacement assembly and the vertical displacement assembly are arranged on the fixed frame.

2. The MEMS actuator according to claim 1, characterized in that: The X-axis force-applying part includes an X-axis force-applying groove and an X-axis blocking block; the X-axis force-applying groove is arranged at the edge of the central platform, and the X-axis blocking block is connected to the central platform; a first force-applying block is arranged at one end of the X-axis force-applying arm facing the central platform; the first force-applying block is located in the X-axis force-applying groove, and the X-axis blocking block is located on the side of the first force-applying block away from the central platform.

3. The MEMS actuator according to claim 2, characterized in that: The Y-axis force-applying part includes a Y-axis force-applying groove and a Y-axis blocking block; the Y-axis force-applying groove is arranged at the edge of the central platform, and the Y-axis blocking block is connected to the central platform; a second force-applying block is arranged at one end of the Y-axis force-applying arm facing the central platform; the second force-applying block is located in the Y-axis force-applying groove, and the Y-axis blocking block is located on the side of the first force-applying block away from the central platform.

4. The MEMS actuator according to claim 3, characterized in that: The number of the X-axis force applying parts is an even number not less than four, and is evenly distributed on both sides of the central platform in the X-axis direction, and the number of the corresponding X-axis force applying arms is the same as the number of the X-axis force applying parts; The number of the Y-axis force applying parts is an even number not less than four, and is evenly distributed on both side edges of the central platform in the Y-axis direction, and the corresponding number of the Y-axis force applying arms is the same as the number of the Y-axis force applying parts.

5. The MEMS actuator according to claim 4, characterized in that: The X-axis force-applying arm comprises a first arm segment and a first elastic segment; the first force-applying block is connected to the first arm segment via the first elastic segment; The Y-axis force-applying arm includes a second arm segment and a second elastic segment; the second force-applying block is connected to the second arm segment via the second elastic segment.

6. The MEMS actuator according to claim 3, characterized in that: The horizontal displacement assembly includes an X-axis force application arm and a Y-axis force application arm; a Y-axis reserved gap is provided between the X-axis force application slot and the X-axis force application arm; An X-axis reserved gap is provided between the Y-axis force applying groove and the Y-axis force applying arm.

7. The MEMS actuator according to claim 3, characterized in that: The Y-axis force application groove and the X-axis force application groove penetrate in the Z-axis direction.

8. The MEMS actuator according to claim 1, wherein: The Z-axis force-applying part includes a Z-axis force-applying groove and two Z-axis blocking blocks. The Z-axis force-applying groove is arranged at the edge of the central platform, and the two Z-axis blocking blocks are respectively arranged on both sides of the Z-axis force-applying groove in the Z-axis direction. The lifting force arm group includes a plurality of third force-applying arms; one end of the third force-applying arm facing the central platform is located in the Z-axis force-applying groove, and one end of the third force-applying arm facing the central platform is used to push the Z-axis blocking block to drive the central platform to move in the Z-axis direction.

9. The MEMS actuator according to claim 8, characterized in that: The central platform is provided with Z-axis force grooves on both sides of the X-axis direction and the Y-axis direction; the lifting force arm group is provided with third force arms on both sides of the central platform in the X-axis direction and the Y-axis direction.

10. The MEMS actuator according to claim 1, wherein: The horizontal displacement assembly further includes: an X-axis actuator; the X-axis actuator is disposed on the fixed frame, the X-axis actuator is connected to the X-axis force arm, and the X-axis actuator is used to drive the X-axis force arm to move in the X-axis direction; and / or The horizontal displacement assembly also includes: a Y-axis actuator; the Y-axis actuator is arranged on the fixed frame, the Y-axis actuator is connected to the Y-axis force arm, and the Y-axis actuator is used to drive the Y-axis force arm to move in the Y-axis direction.

11. An optical image stabilizer, characterized in that: include: A MEMS actuator as claimed in any one of claims 1 to 10.

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