Cutting device and method for manufacturing cutted article

Abstract

The invention provides a cutting device capable of discharging end materials more reliably. The machining device comprises a machining platform capable of moving in a linear moving direction; a cutting mechanism for cutting an object to be cut disposed on the processing platform; a receiving member which is formed in the movement direction below the processing platform and has a groove portion capable of receiving an end material generated by cutting the object by the cutting mechanism; a moving body capable of moving in the moving direction; and a removal member which is provided on the moving body, is disposed so as to be in contact with the groove, and removes the end material from the groove.

Description

Technical Field

[0001] The present invention relates to a cutting device and a method for manufacturing a cut product. Background Art

[0002] Patent document 1 discloses a cutting device including an end material processing device for discharging end materials generated by cutting a package substrate. Specifically, the end material processing device described in Patent document 1 sprays cleaning water on the end materials dropped into a water tank for accommodating a chuck platform through a self-cleaning nozzle, thereby flushing the end materials to the downstream side.

[0003] Prior art literature

[0004] Patent Literature

[0005] Patent Document 1: Japanese Patent Application Publication No. 2020-129580 Summary of the invention

[0006] Problems to be solved by the invention

[0007] Here, in the cutting device described in Patent Document 1, the end material dropped into the water tank may be piled up. Since the piled end material is heavy, there is a possibility that the end material cannot be washed away by the washing water from the washing nozzle. In addition, when the liquid between the end material dropped into the water tank and the bottom surface of the water tank dries, the end material is in close contact with the water tank, and there is a possibility that the end material cannot be washed away by the washing water from the washing nozzle.

[0008] The present invention has been made in view of the above-mentioned situation, and an object of the present invention is to provide a cutting device and a method for manufacturing a cut product that can more reliably discharge an end material.

[0009] Technical means of solving problems

[0010] The problem to be solved by the present invention is as described above. In order to solve the above problem, the cutting device of the present invention includes: a processing platform capable of moving along a straight moving direction; a cutting mechanism for cutting an object to be cut arranged on the processing platform; a receiving member formed along the moving direction below the processing platform and having a groove portion, wherein the groove portion can receive the end material generated by cutting the object to be cut using the cutting mechanism; a movable body capable of moving along the moving direction; and a removing member arranged on the movable body and configured in a manner to contact the groove portion to remove the end material from the groove portion.

[0011] In addition, the manufacturing method of the cut product of the present invention is a manufacturing method of the cut product using the cutting device, and includes: a step of arranging the cut object on the processing platform; and a step of cutting the cut object by relatively moving the cutting mechanism and the processing platform.

[0012] Effects of the Invention

[0013] According to the present invention, the end material can be discharged more reliably. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] [ Figure 1 ] is a plan schematic diagram showing the overall structure of the cutting device of the first embodiment.

[0015] [ Figure 2 ] is a plan view showing the structure of the cutting module.

[0016] [ Figure 3 ] is the S1-S1 cross-sectional view.

[0017] [ Figure 4 ] is a plan view showing the lower part of the cutting module.

[0018] [ Figure 5 ] is the S2-S2 cross-sectional view.

[0019] [ Figure 6 ] (a) is an enlarged plan view showing a first removal member. (b) is an enlarged side sectional view showing a first removal member.

[0020] [ Figure 7 ] is a side sectional view showing the first removing member moving forward.

[0021] [ Figure 8 ] (a) is a side sectional view showing a cutting device according to a second embodiment. (b) is a side sectional view showing a cutting device according to a third embodiment. DETAILED DESCRIPTION

[0022] In the following, the directions indicated by arrows U, D, L, R, F, and B shown in the figure are defined as the upward direction, the downward direction, the left direction, the right direction, the front direction, and the rear direction, respectively. In addition, the rotation direction centered on the rotation axis in the vertical direction is defined as the θ direction for description.

[0023] <Structure of Cutting Device 100 According to First Embodiment>

[0024] First, the structure of the cutting device 100 of the first embodiment will be described. In this embodiment, for example, the structure of the cutting device 100 is described when a sealed substrate W in which a substrate with a semiconductor chip fixed thereto is resin-sealed is used as the object to be cut by the cutting device 100.

[0025] As the sealed substrate W, for example, a ball grid array (BGA) package substrate, a chip size package (CSP) package substrate, a light emitting diode (LED) package substrate, etc. can be used. In addition, as the cutting object, not only the sealed substrate W is used, but also a sealed lead frame in which a lead frame with a semiconductor chip fixed thereto is sealed with resin. In addition, as the cutting object, electronic elements or electronic parts are not fixed, and a wiring substrate with single-layer or multi-layer wiring is sometimes used.

[0026] Figure 1 The cutting device 100 shown is a processing device that separates a sealed substrate W as a cutting object into a plurality of cut products (products P). The cutting device 100 includes a substrate supply module A, a cutting module B, and a storage module C as components. Each component is detachable and replaceable relative to other components.

[0027] <Substrate supply module A>

[0028] The substrate supply module A mainly includes a substrate supply mechanism 1 and a control unit CTL.

[0029] The sealed substrate W as a cutting target is carried out from the substrate supply mechanism 1 and transferred to the cutting module B by a transfer mechanism (not shown). The sealed substrate W transferred to the cutting module B is arranged on a cutting stage 15 described later.

[0030] The control unit CTL controls the operation of each part of the cutting device 100. By controlling each part of the cutting device 100 through the control unit CTL, it is possible to carry in the sealed substrate W, cut the sealed substrate W, inspect the product P, carry out the product P, etc. In addition, the control unit CTL can also be set in a module other than the substrate supply module A. In addition, the control unit CTL can also be divided into a plurality of parts. For example, the control unit CTL can also be set in each module so that the control unit CTL controls each part in conjunction with each other.

[0031] <Cut module B>

[0032] exist Figure 1The cutting module B shown mainly includes a moving mechanism 13 , a cutting table 15 , a rotating mechanism 17 and a main shaft portion 23 .

[0033] In this embodiment, a double-cutting table type cutting device 100 having two cutting tables 15 is exemplified. The cutting table 15 can be moved in the front-rear direction by the moving mechanism 13 and can be rotated in the θ direction by the rotating mechanism 17.

[0034] In addition, in this embodiment, the cutting device 100 of a double spindle structure having two spindle parts 23 is exemplified. The two spindle parts 23 can move in the left-right direction and the up-down direction independently of each other.

[0035] In the cutting module B, the sealed substrate W is held on the cutting platform 15, and the cutting platform 15 and the two main shafts 23 are relatively moved, thereby cutting the sealed substrate W into individual pieces. The main shaft 23 is provided with a blade 23a. The blade 23a rotates within a plane including the front-back direction and the up-down direction, thereby cutting the sealed substrate W held on the cutting platform 15. At this time, the cutting nozzle 23b (see Figure 3 ) cuts the sealed substrate W while spraying cutting water toward the blade 23a.

[0036] <Storage Module C>

[0037] The storage module C mainly includes an inspection platform 2 and a tray 3 .

[0038] On the inspection platform 2, a collection of a plurality of products P, which are cut into individual pieces by cutting the sealed substrate W, is placed. The plurality of products P are inspected by an inspection camera (not shown) and sorted into good products and defective products. The sorted good products are stored in the tray 3. The sorted defective products are stored in a separately prepared tray (not shown) and excluded from the products P. In addition, it is not necessary to inspect the products P in the storage module C.

[0039] <Details of cutting module B>

[0040] Second, use Figures 2 to 6 The specific structure of the cutting module B is described. Figure 4 In the figure, the components (the second receiving member 14, the cutting platform 15, the rear cover member 18, the front cover member 19, the upper cover member 20, etc. described later) provided on the upper part of the cutting module B are appropriately omitted, and the lower part of the cutting module B is illustrated. In addition, since the device structures of the left and right cutting platforms 15 are roughly the same, the device structure of the left cutting platform 15 will be mainly described in detail below.

[0041] The cutting module B mainly includes: a first receiving component 11, a storage part 12, a moving mechanism 13, a second receiving component 14, a cutting platform 15, a rotating mechanism 17, a rear cover component 18, a front cover component 19, an upper cover component 20, a first removing component 21, a cleaning nozzle 22 and a main shaft part 23.

[0042] Figures 2 to 5 The first receiving member 11 shown is a member for receiving the end material E generated when the sealed substrate W is cut. In addition, the first receiving member 11 is an embodiment of the receiving member of the present application. The first receiving member 11 is formed in a box shape that is open to the top and the rear. The first receiving member 11 can receive the end material E dropped from the cutting platform 15 described later, or the second receiving member 14, etc. The first receiving member 11 mainly includes a protruding portion 11a, an opening portion 11b, an inclined groove portion 11c, and a side portion 11d.

[0043] Figures 3 to 5 The protrusion 11a shown is a portion formed so that the bottom surface of the first receiving member 11 is raised upward. The protrusion 11a is formed as a pair of left and right protrusions 11a corresponding to the cutting table 15. The protrusion 11a is formed to extend in the front-rear direction.

[0044] Figure 4 and Figure 5 The opening 11b shown is formed to vertically penetrate the bottom surface of the first receiving member 11. The opening 11b is formed on the upper surface of the protrusion 11a. The opening 11b is formed to extend in the front-rear direction across the front and rear ends of the protrusion 11a.

[0045] Figures 3 to 5 The inclined groove portion 11c shown is a portion formed in a manner that the bottom surface of the first receiving member 11 is inclined rearward and downward. In addition, the inclined groove portion 11c is an embodiment of the groove portion of the present application. The inclined groove portion 11c is formed on the left and right sides of the protrusion 11a. Specifically, the inclined groove portion 11c is formed in three places between the left and right protrusions 11a and between the left and right protrusions 11a and the side portions 11d described later. The inclined groove portion 11c is formed to extend along the front-to-back direction. The upper surface of the inclined groove portion 11c is formed to be inclined downward as it moves toward the rear.

[0046] The side portion 11d is a portion forming the side surface of the first receiving member 11. The side portion 11d is formed to surround the protrusion 11a, the opening 11b, and the inclined groove 11c from both sides and the front. The side portion 11d is formed to have an appropriate vertical width.

[0047] The storage portion 12 is a portion for collecting the end material E discharged from the first receiving member 11. The storage portion 12 is formed in a box shape with an upper opening. The storage portion 12 is arranged at the rear end of the first receiving member 11. Figure 3 In the figure, the structure in which the receiving portion 12 and the first receiving member 11 are formed integrally is shown, but it is also possible to configure the first receiving member 11 and the receiving portion 12 to be constituted by another member, and the receiving portion 12 can be attached to and detached from the first receiving member 11.

[0048] The moving mechanism 13 is used to move the cutting table 15 forward and backward. The moving mechanism 13 mainly includes a moving member 13a, a connecting portion 13b, a nut 13c, and a threaded shaft 13d.

[0049] The moving member 13a is a member that supports the cutting table 15 and can move forward and backward. The moving member 13a is one embodiment of the moving body of the present application. The moving member 13a is formed in a rectangular parallelepiped shape, for example. The moving member 13a is arranged above the protruding portion 11a.

[0050] The connecting portion 13b is a portion that connects the movable member 13a and the nut 13c. The connecting portion 13b is formed into a long strip (e.g., a cylindrical shape) extending up and down. The connecting portion 13b is configured to span from the bottom to the top of the first receiving member 11 through the opening 11b. The upper end of the connecting portion 13b is fixed to the movable member 13a.

[0051] The nut 13c and the threaded shaft 13d constitute a ball screw mechanism. The threaded shaft 13d is arranged below the opening 11b. The threaded shaft 13d is arranged so that the length direction is oriented in the horizontal direction (front-back direction). The threaded shaft 13d can be rotated by a driving force from a driving source (not shown) such as a motor. The nut 13c is engaged with the threaded shaft 13d. A plurality of balls (not shown) are interposed between the nut 13c and the threaded shaft 13d. The lower end of the connecting portion 13b is fixed to the upper portion of the nut 13c. The nut 13c is prevented from rotating around the threaded shaft 13d.

[0052] In the moving mechanism 13, when the threaded shaft 13d rotates, the nut 13c fitted to the threaded shaft 13d moves linearly in a direction corresponding to the rotation direction of the threaded shaft 13d (either the front-rear direction). When the nut 13c moves, the moving member 13a connected to the nut 13c via the connecting portion 13b also moves linearly together with the nut 13c.

[0053] Figure 2 and Figure 3The second receiving member 14 shown is a member for receiving the end material E generated when the sealed substrate W is cut. The second receiving member 14 is formed in a box shape that is open to the top and rear. The second receiving member 14 is fixed to the upper part of the moving member 13a. The second receiving member 14 can receive the end material E dropped from the cutting platform 15.

[0054] The cutting stage 15 is a portion where the sealed substrate W as the cutting object is arranged. In addition, the cutting stage 15 is an embodiment of the processing stage of the present application. The cutting stage 15 is arranged above the first receiving member 11 and the second receiving member 14. The cutting stage 15 is supported by the moving member 13a via the rotating mechanism 17 described later.

[0055] The rotating mechanism 17 is used to rotate the cutting table 15 in the θ direction. The rotating mechanism 17 is interposed between the moving member 13a and the cutting table 15. The rotating mechanism 17 can rotate the cutting table 15 by a driving force from a driving source (not shown) such as a motor.

[0056] Figure 3 and Figure 5 The rear cover member 18 shown covers the opening 11b from above at the rear of the moving member 13a. The rear cover member 18 is arranged on the upper part of the protruding part 11a. The rear cover member 18 is formed in an accordion shape and is configured to be retractable in the front and rear directions. The front part of the rear cover member 18 is connected to the moving member 13a. Thus, the rear cover member 18 is retracted in the front and rear directions along with the movement of the moving member 13a in the front and rear directions.

[0057] Figure 2 , Figure 3 and Figure 5 The front cover member 19 shown covers the opening 11b from above in front of the moving member 13a. The front cover member 19 is arranged on the upper part of the protruding part 11a. The front cover member 19 is formed in an accordion shape and is configured to be retractable in the front and rear directions. The rear part of the front cover member 19 is connected to the moving member 13a. Thus, the front cover member 19 is retracted in the front and rear directions as the moving member 13a moves in the front and rear directions.

[0058] The upper cover member 20 covers the rear cover member 18 from above. The upper cover member 20 mainly includes a plurality of plate-shaped members 20a and a connecting portion 20b.

[0059] The plurality of plate-like members 20a are formed into rectangular plates. The plurality of plate-like members 20a are arranged above the upper cover member 20 in an array along the front-to-back direction. The plurality of plate-like members 20a are arranged in an array ...

[0060] The connecting portion 20b connects the plate-shaped member 20a and the second receiving member 14. The connecting portion 20b is fixed to the bottom surface of the rear end portion of the second receiving member 14. The connecting portion 20b is connected to the plate-shaped member 20a arranged at the frontmost side. Thus, the plurality of plate-shaped members 20a are extended and retracted in the front-rear direction as the second receiving member 14 (moving member 13a) moves in the front-rear direction.

[0061] Figure 2 and Figure 3 The first removal member 21 shown is used to discharge the end material E of the first receiving member 11 (the inclined groove portion 11c) to the storage portion 12. In addition, the first removal member 21 is an embodiment of the removal member of the present application. The first removal member 21 is respectively provided on the left and right sides of the moving member 13a. In addition, for the convenience of explanation, Figure 6 The first removal member 21 is simplified and illustrated in the figures other than FIG. Figure 6 The structure of the first removal member 21 will be described. The first removal member 21 mainly includes a support portion 21a, a mounting portion 21b, and a main body portion 21c.

[0062] The support portion 21a is a portion that supports the mounting portion 21b and the main body portion 21c described later so that they can swing. The support portion 21a is fixed to the left and right side surfaces of the movable member 13a, respectively. The support portion 21a is provided so as to protrude from the movable member 13a to the left and right sides (the position overlapping the inclined groove portion 11c in the vertical direction). A through hole 21d that passes through the support portion 21a from top to bottom is formed in the support portion 21a. Only the number of through holes 21d corresponding to the mounting portion 21b described later (in the present embodiment, two for each support portion 21a) is formed.

[0063] The mounting portion 21b is a member that is swingably mounted on the moving member 13a. The mounting portion 21b is formed in a substantially cylindrical shape. The diameters of the upper and lower ends of the mounting portion 21b are formed to be larger than the diameters of the upper and lower middle portions. The diameters of the upper and lower middle portions of the mounting portion 21b are formed to be smaller than the inner diameters of the through-hole 21d of the support portion 21a. The diameters of the upper and lower ends of the mounting portion 21b are formed to be larger than the inner diameters of the through-hole 21d of the support portion 21a.

[0064] The upper and lower middle portions of the mounting portion 21b are inserted into the through hole 21d of the support portion 21a. Since the diameters of the upper and lower ends of the mounting portion 21b are larger than the inner diameter of the through hole 21d, the mounting portion 21b does not fall off the support portion 21a. In the above state, since there is a gap between the upper and lower middle portions of the mounting portion 21b and the through hole 21d, the mounting portion 21b is supported so as to be able to swing within a predetermined movable range relative to the support portion 21a.

[0065] In addition, Figure 6 Although the structure of the mounting portion 21 b is simplified in the figure, in reality, in order to insert the mounting portion 21 b into the through hole 21 d, the mounting portion 21 b may be constituted by a plurality of separable members (for example, bolts and nuts).

[0066] The main body 21c is a member configured to contact the inclined groove 11c. The main body 21c is formed into a rectangular plate with its length oriented to the front and rear when viewed from above. The front end of the main body 21c is fixed to the lower part of the mounting portion 21b at a position lower than the support portion 21a. The rear part of the main body 21c is configured to extend from the mounting portion 21b toward the rear and lower side. Since the mounting portion 21b can swing, the main body 21c descends downward by its own weight until the rear end contacts the upper surface of the inclined groove 11c.

[0067] It is desirable that at least the portion (front end portion 21e) of the main body 21c that contacts the inclined groove portion 11c is formed of an elastic body such as rubber. For example, the front end portion 21e of the main body 21c can be formed of an elastic body, and the other portions can be formed of a metal plate. In addition, the entire main body 21c can also be formed of an elastic body.

[0068] The main body 21c is swingably mounted to the moving member 13a via the mounting portion 21b. Since the main body 21c swings downward due to its own weight, it can follow the inclined groove 11c and always contact the inclined groove 11c even when the first removing member 21 moves forward and backward as described later.

[0069] In addition, since the inclined groove portion 11c is inclined with respect to the moving direction (horizontal direction) of the moving member 13a, the angle α formed by the main body portion 21c of the first removal member 21 and the inclined groove portion 11c changes depending on the position of the moving member 13a (the first removal member 21). In the present embodiment, regardless of the position of the moving member 13a, the angle α formed by the main body portion 21c and the inclined groove portion 11c is set to be 45 degrees or less.

[0070] In this way, the first removal members 21 are provided on both the left and right sides of the moving member 13 a , respectively, and are thus arranged to correspond to the three inclined groove portions 11 c , respectively.

[0071] Figures 2 to 4 The cleaning nozzle 22 shown sprays cleaning water to the inclined groove portion 11c. The cleaning nozzle 22 is arranged above the front portion of the inclined groove portion 11c toward the rear. The cleaning nozzle 22 can spray cleaning water from the front end (rear end). The cleaning water sprayed from the cleaning nozzle 22 can be used to wash away the end material E of the inclined groove portion 11c, or to wash away dirt such as cutting chips.

[0072] Figure 2 and Figure 3 The main shaft portion 23 shown is used to cut the sealed substrate W as the cutting object. In addition, the main shaft portion 23 is an embodiment of the cutting mechanism of the present application. A blade 23a that rotates in a plane including the front-back direction and the up-down direction is installed on the main shaft portion 23. In addition, a cutting nozzle 23b for supplying cutting water when cutting the sealed substrate W is provided near the main shaft portion 23. The cutting nozzle 23b can be moved integrally with the main shaft portion 23.

[0073] <Discharge of end material E>

[0074] Below, use Figure 3 and Figure 7 Next, in the cutting device 100 configured as described above, a situation in which the end material E dropped into the inclined groove portion 11 c is discharged will be described.

[0075] When the sealed substrate W is cut, the moving member 13a can be moved forward and backward by rotating the screw shaft 13d of the moving mechanism 13, and the cutting stage 15 can be moved in the forward and backward direction. By combining the movement of the cutting stage 15 in the forward and backward direction by the moving mechanism 13, the rotation of the cutting stage 15 in the θ direction by the rotating mechanism 17, and the movement of the main shaft part 23 in the left-right direction and the up-down direction, the sealed substrate W arranged on the cutting stage 15 can be cut into individual pieces by the blade 23a.

[0076] The end material E or cutting chips generated by cutting the sealed substrate W may sometimes fall from the cutting stage 15 to the inclined groove portion 11c of the first receiving member 11. In this regard, when the sealed substrate W is cut, cleaning water is continuously or intermittently sprayed from the cleaning nozzle 22. The end material E or cutting chips that fall into the inclined groove portion 11c can be washed toward the storage portion 12 by the cleaning water.

[0077] Furthermore, in this embodiment, the end material E and the like dropped into the inclined groove portion 11c can be more reliably discharged to the storage portion 12 by the first removal member 21. Specifically, when the sealed substrate W is cut, if the cutting stage 15 moves forward and backward, the first removal member 21 provided on the moving member 13a also moves forward and backward.

[0078] like Figure 3 As shown, when the first removal member 21 moves backward, the end material E dropped to the rear side of the first removal member 21 is pushed out from the front toward the storage portion 12 by the first removal member 21. Thus, even the end material E that cannot flow completely in the washing water from the washing nozzle 22 can be more reliably discharged to the storage portion 12 using the first removal member 21. In addition, by providing a gap between the mounting portion 21b and the through hole 21d of the support portion 21a, and providing the front end portion 21e formed of an elastic body to the main body 21c, it is possible to suppress the first removal member 21 from being applied with excessive load or resistance when the end material E is pushed out.

[0079] In addition, if Figure 7 As shown, when the first removal member 21 moves forward, if the first removal member 21 contacts the end material E that has fallen to the front side of the first removal member 21, the first removal member 21 can swing upward and pass from the back to the front through the top of the end material E. In this way, in the present embodiment, the first removal member 21 is configured to be able to swing. In addition, the angle α formed by the main body 21c and the inclined groove portion 11c is 45 degrees or less. Therefore, the force that pushes the end material E back forward is smaller than the force that pushes the end material E backward. As a result, it is possible to prevent the end material E from being pushed back in a direction away from the storage portion 12 when the first removal member 21 moves forward.

[0080] As mentioned above, although the 1st embodiment of this invention was demonstrated, this invention is not limited to this embodiment, It can change suitably within the range of the technical idea of ​​the invention described in a claim.

[0081] For example, the configuration (shape, arrangement, number, etc.) of each part of the cutting device 100 described in the present embodiment is not particularly limited and can be arbitrarily changed.

[0082] In addition, the structure of the first removal member 21 shown in this embodiment is an example, and the present invention is not limited to this. For example, the structure for supporting the main body 21c so that it can swing is not limited to the structure using the support part 21a and the mounting part 21b as in this embodiment (see Figure 6 As another example of a structure, the main body 21c may be supported in a swingable manner using a horizontally arranged swing shaft.

[0083] In addition, in the present embodiment, the front end portion 21e of the main body 21c is formed of an elastic body, but the material of the main body 21c is not particularly limited. In addition, in the present embodiment, the first removal member 21 is arranged so that the angle α formed by the main body 21c and the inclined groove portion 11c is 45 degrees or less, but the posture of the first removal member 21 is not limited to this and can be arbitrarily changed.

[0084] In addition, in the present embodiment, the example in which the first removal member 21 is provided in the movable member 13a is shown, but the present invention is not limited to this, and the first removal member 21 may be provided in other members that move integrally with the cutting table 15. For example, the first removal member 21 may be provided in the second receiving member 14 or the connecting portion 13b.

[0085] In addition, in the present embodiment, the first removal member 21 moves integrally with the cutting platform 15 via the moving member 13a, but the present invention is not limited thereto, and a structure can be provided in which the first removal member 21 and the cutting platform 15 move independently of each other. In such a case, a moving mechanism for moving the first removal member 21 can be provided in addition to the moving mechanism 13 for moving the cutting platform 15.

[0086] <Second embodiment>

[0087] Below, use Figure 8 (a) A cutting device 100 according to a second embodiment will be described. The cutting device 100 according to the second embodiment is different from the cutting device 100 according to the first embodiment (see Figure 3 The difference between the embodiment of the present invention and the embodiment of the present invention is that the second removal member 24 is included. Therefore, the second removal member 24 will be mainly described below.

[0088] The second removal member 24 is used to discharge the end material E on the upper cover member 20 to the storage portion 12. The second removal member 24 is formed of an elastic body such as rubber. The second removal member 24 is formed in a plate shape. In a state where the second removal member 24 is clamped between the rear portion of the second receiving member 14 and the plate-shaped member 14a for fixing, the plate-shaped member 14a is fixed to the second receiving member 14 by a fixing member such as a bolt, thereby fixing the second removal member 24 to the rear portion of the second receiving member 14. The second removal member 24 is arranged in a manner extending rearward and downward from the second receiving member 14. The front end portion (rear end portion) of the second removal member 24 is arranged in a manner in contact with the upper cover member 20.

[0089] When the sealed substrate W is cut, if the cutting stage 15 moves forward and backward, the second removal member 24 provided on the second receiving member 14 also moves forward and backward. When the second removal member 24 moves backward, the end material E dropped onto the upper cover member 20 is pushed out from the front toward the storage portion 12 by the second removal member 24, and discharged from the upper cover member 20 to the storage portion 12. Thus, it is possible to prevent the end material E from dropping from the gap between the plate-like members 20a to the rear cover member 18 and damaging the rear cover member 18.

[0090] In addition, if Figure 8As shown by the imaginary line in (a), when the cutting platform 15 moves to the rearmost position, the position of the second removing member 24 is adjusted so that the second removing member 24 is located further rearward than the rear end of the upper cover member 20. Thus, the end material E can be discharged to the storage portion 12 more reliably.

[0091] <Third embodiment>

[0092] Below, use Figure 8 (b) A cutting device 100 according to a third embodiment will be described. The cutting device 100 according to the third embodiment is different from the cutting device 100 according to the second embodiment (see Figure 8 (a)) is different in that a third removal member 25 is included instead of the second removal member 24. Therefore, the third removal member 25 will be mainly described below.

[0093] The third removing member 25 is used to discharge the end material E on the upper cover member 20 to the storage portion 12. The third removing member 25 is composed of a brush having bundled hair. As the material of the hair of the third removing member 25, for example, synthetic fiber can be used. The third removing member 25 is provided on the bottom surface of the rear part of the second receiving member 14. The front end portion (lower end portion) of the third removing member 25 is arranged in a manner of contacting the upper cover member 20.

[0094] The third removing member 25 having such a configuration can push out and discharge the end material E dropped onto the upper cover member 20 toward the storage portion 12 in the same manner as the second removing member 24 of the second embodiment.

[0095] <Note>

[0096] The cutting device 100 of the first aspect of the present disclosure comprises:

[0097] The cutting platform 15 (processing platform) can move along a straight line;

[0098] The spindle unit 23 (cutting mechanism) cuts the sealed substrate W (cutting object) disposed on the cutting stage 15;

[0099] A first receiving member 11 (receiving member) is formed below the cutting stage 15 along the moving direction and has an inclined groove portion 11c (groove portion) capable of receiving an end material E generated by cutting the sealed substrate W by the spindle portion 23;

[0100] a moving member 13a (moving body) capable of moving along the moving direction; and

[0101] The first removing member 21 (removing member) is provided on the moving member 13 a and is arranged so as to come into contact with the inclined groove portion 11 c , and removes the end material E from the inclined groove portion 11 c .

[0102] According to the cutting device 100 of the first aspect of the present disclosure, the end material E can be discharged more reliably. That is, the end material E dropped into the inclined groove portion 11c can be directly pushed out and discharged by the first removal member 21 that moves together with the moving member 13a. Thus, the end material E that is not completely discharged by the washing water (the end material E accumulated or attached to the inclined groove portion 11c) can be discharged from the inclined groove portion 11c more reliably.

[0103] In the cutting device 100 of the second aspect according to the first aspect,

[0104] The moving member 13 a is movable along the moving direction integrally with the cutting table 15 .

[0105] According to the cutting device 100 of the second aspect of the present disclosure, the mechanism for moving the cutting table 15 (moving mechanism 13 ) and the mechanism for moving the first removing member 21 can be used together.

[0106] The cutting device 100 according to the third aspect of the first aspect or the second aspect further includes a receiving portion 12,

[0107] The receiving portion 12 is disposed on one side of the first receiving member 11 in the moving direction and is capable of receiving the end material E.

[0108] The first removal member 21 comprises:

[0109] The mounting portion 21b is swingably mounted on the moving member 13a; and

[0110] The main body portion 21c is arranged to be inclined downward from the mounting portion 21b toward the housing portion 12, and is in contact with the inclined groove portion 11c.

[0111] According to the cutting device 100 of the third aspect of the present disclosure, it is possible to suppress an excessive load from being applied to the first removing member 21 when pushing out the end material E. In addition, when the first removing member 21 moves in a direction away from the receiving portion 12, the main body 21c can be swung so as to pass over the end material E, thereby preventing the end material E from being pushed back in a direction away from the receiving portion 12.

[0112] In the cutting device 100 of the fourth aspect according to the third aspect,

[0113] The main body portion 21c is disposed so that an angle α formed between the main body portion 21c and the inclined groove portion 11c is 45 degrees or less.

[0114] According to the cutting device 100 of the fourth aspect of the present disclosure, the end material E can be easily pushed out toward the accommodating portion 12 .

[0115] In the cutting device 100 of the fifth aspect according to the third aspect or the fourth aspect,

[0116] A portion (front end portion 21 e ) of the main body portion 21 c that contacts the inclined groove portion 11 c is formed of an elastic body.

[0117] According to the cutting device 100 of the fifth aspect of the present disclosure, it is possible to suppress an excessive load from being applied to the first removing member 21 when pushing out the end material E. In addition, it is possible to suppress damage (wear, etc.) to the inclined groove portion 11 c in contact with the main body portion 21 c.

[0118] In the cutting device 100 of the sixth aspect according to the third to fifth aspects,

[0119] The inclined groove portion 11 c is formed to be inclined downward toward the housing portion 12 side.

[0120] According to the cutting device 100 of the sixth aspect of the present disclosure, the end material E can be easily discharged toward the storage portion 12. In addition, since washing water and the like are less likely to stay in the inclined groove portion 11c, the end material E can be prevented from being attached to the inclined groove portion 11c.

[0121] The cutting device 100 according to the seventh aspect of the first to sixth aspects includes:

[0122] A threaded shaft 13d, disposed below the moving member 13a, extending along the moving direction;

[0123] a nut 13c capable of moving along the threaded shaft 13d according to the rotation of the threaded shaft 13d; and

[0124] The connecting portion 13b connects the nut 13c and the moving member 13a.

[0125] According to the cutting device 100 according to the seventh aspect of the present disclosure, the moving member 13 a can be moved with a simple structure.

[0126] Method for producing a cut product according to an eighth aspect of the present disclosure

[0127] A method for manufacturing a cut product using the cutting device 100 of any one of the first to seventh aspects, comprising:

[0128] a step of placing the sealed substrate W on the cutting stage 15; and

[0129] The sealed substrate W is cut by relatively moving the spindle portion 23 and the cutting stage 15 .

[0130] According to the method for producing a cut product according to the eighth aspect of the present disclosure, the end material E can be discharged more reliably.

[0131] Explanation of symbols

[0132] 11: First receiving member

[0133] 11c: Inclined groove

[0134] 12: Containment

[0135] 13a: Moving components

[0136] 13b: Connection part

[0137] 13c: Nut

[0138] 13d: Threaded shaft

[0139] 15: Cutting platform

[0140] 21: First removal component

[0141] 21b: Installation

[0142] 21c: Main body

[0143] 21e: Front end

[0144] 23: Spindle

[0145] 100: Cutting device

Claims

1. A cutting device, comprising: The processing platform can move along a straight line; A cutting mechanism for cutting an object to be cut arranged on the processing platform; a receiving member formed below the processing platform along the moving direction and having a groove portion capable of receiving an end material generated by cutting the cutting object by the cutting mechanism; a moving body capable of moving along the moving direction; as well as The removing member is provided on the movable body, is arranged so as to be in contact with the groove portion, and removes the end material from the groove portion.

2. The cutting device according to claim 1, wherein The moving body can move integrally with the processing platform along the moving direction.

3. The cutting device according to claim 1 or 2, further comprising a receiving portion, The receiving portion is arranged on one side of the receiving member in the moving direction and is capable of receiving the end material. The removal means comprises: A mounting portion, mounted on the moving body in a swingable manner; as well as The main body is arranged to be inclined downward from the mounting portion toward the storage portion and is in contact with the groove.

4. The cutting device according to claim 3, wherein The main body portion is disposed so that an angle formed between the main body portion and the groove portion is 45 degrees or less.

5. The cutting device according to claim 3 or 4, wherein A portion of the main body that contacts the groove is formed of an elastic body.

6. The cutting device according to any one of claims 3 to 5, wherein The groove portion is formed to be inclined downward toward the storage portion side.

7. The cutting device according to any one of claims 1 to 6, comprising: A threaded shaft, disposed below the moving body and extending along the moving direction; a nut capable of moving along the threaded shaft in response to rotation of the threaded shaft; as well as The connecting portion connects the nut and the moving body.

8. A method for manufacturing a cut product, using the cutting device according to any one of claims 1 to 7, comprising: A step of arranging the cutting object on the processing platform; as well as The step of cutting the object to be cut by relatively moving the cutting mechanism and the processing table.

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