A crucible heating device for a crystal growth furnace

Abstract

The present invention relates to the technical field of crystal growth furnaces, and specifically to a crucible heating device for a crystal growth furnace, comprising a pulling mechanism, a heating mechanism disposed within the pulling mechanism, a seed rod preheating mechanism disposed on the heating mechanism, a rod axis stabilizing mechanism disposed between the heating mechanism and the seed rod preheating mechanism, and a melt crucible disposed within the heating mechanism; the pulling mechanism includes a seed rod for providing an attachment base for crystal growth. By disposing an independent seed rod preheating mechanism on top of a conventional single crystal silicon heating and melting device, when the seed rod is initially suspended directly above the heating device, the seed rod preheating mechanism can wrap around the rod body. At this time, the heat energy released within the heating device will be actively transferred to the seed rod preheating mechanism, and ultimately the seed rod can maintain a constant temperature with the raw material melting temperature, thereby avoiding the temperature difference between the seed rod and the melt, which may cause cracks after subsequent crystal formation and pulling.

Description

Technical Field

[0001] The invention relates to the technical field of crystal growth furnaces, in particular to a crucible heating device for a crystal growth furnace. Background Art

[0002] A crystal growth furnace is a process testing instrument used in the field of electronics and communications technology. After the polysilicon raw material is placed in the crucible, the crucible storing the raw material needs to be placed in a specific heating device for heat melting treatment, so as to cooperate with the seed crystal rod to rotate and pull the molten material, and finally the crystal will be generated on the seed crystal rod.

[0003] At present, for the single crystal silicon crystal generation operation, the transmission seed crystal rod is mainly suspended directly above the heating device, and there is a large temperature difference between the seed crystal rod in the initial state and the temperature of the inner cavity of the heating device. When the suspended seed crystal rod slowly descends toward the inside of the heating device and finally extends into the melt in the crucible, the seed crystal rod with an excessively large temperature difference is lifted from the crucible and slowly loses temperature. The melt attached to the seed crystal rod will develop bark-like cracks, which will eventually reduce the efficiency of crystal generation at the end of the rod body. At the same time, the seed crystal rod is too long, and during the period when the rod body contacts the melt and rises and rotates, the falling melt overflows toward the rod body, and the rotating rod body will be in a serious centrifugal state, which will cause sputtering during crystal generation, thereby resulting in waste of melt.

[0004] In view of this, a crystal growth furnace crucible heating device is designed to solve the above problems. Summary of the Invention

[0005] The present invention aims to solve one of the technical problems existing in the prior art or related technologies.

[0006] To this end, the technical solution adopted in the present invention is:

[0007] A crystal growth furnace crucible heating device comprises a traction mechanism, a heating mechanism arranged in the traction mechanism, a seed rod preheating mechanism arranged on the heating mechanism, a rod axis stabilization mechanism arranged between the heating mechanism and the seed rod preheating mechanism, and a melt crucible arranged in the heating mechanism; the traction mechanism comprises a seed rod for providing an attachment basis for crystal generation; the heating mechanism comprises a main insulation chamber and a secondary insulation chamber for providing sealed heating for the melt crucible, and the interiors of the main insulation chamber and the secondary insulation chamber are both provided with insulation layers and constant temperature pads; the seed rod preheating mechanism comprises a sealing assembly, a second sealing cover and a third sealing cover for providing constant temperature preheating treatment for the seed rod under initial suspension; the rod axis stabilization mechanism comprises a plurality of boosting gaskets arranged on the seed rod lifting path and evenly distributed circumferentially, and the boosting gaskets are used to provide stabilizing force for the rotation of the seed rod to reduce the vibration amplitude of the seed rod.

[0008] In a preferred embodiment, the present invention can be further configured as follows: the inner wall of the constant temperature pad is provided with evenly distributed notches, and a heat dissipation gap is provided between the constant temperature pad and the insulation layer;

[0009] The top ends of the two constant temperature pads are both provided with covers;

[0010] The sealing assembly includes a first sealing cover attached to the top of the two sealing covers and a sealing gasket arranged in the bottom port of the first sealing cover. The first sealing cover, the second sealing cover and the third sealing cover are overall in a tower-shaped structure, which is used to provide an undisturbed heat treatment environment for the seed rod.

[0011] In a preferred embodiment, the present invention can be further configured as follows: a return pipe is installed on the back of the main insulation chamber;

[0012] A guide pipe is installed on the back of the first sealing cover, and a transfer pipe is installed at the bottom of the guide pipe. An air flow supply component is installed on the back of the guide pipe, and the transfer pipe is movably installed on the return pipe.

[0013] The airflow supply assembly includes a chassis, a motor installed on the top of the chassis, and a high-temperature resistant impeller installed on the motor drive shaft. The high-temperature resistant impeller is located in the top shell of the guide tube and is used to continuously utilize heat energy to preheat the seed rod and slowly cool the attached melt.

[0014] In a preferred embodiment of the present invention, the traction mechanism may be further configured as follows: the traction mechanism further includes a machine base placed on the workbench, a clamping seat installed inside the machine base, a rotation-assisting elevator installed in the clamping seat, a clamping head provided on the end of a core rod in the rotation-assisting elevator, and two locking bolts installed in the clamping head;

[0015] A pre-installed socket is provided at the bottom of the chuck, and the top end of the seed crystal rod is adapted to pass through the pre-installed socket, and the two locking bolts are used to fasten the top end of the seed crystal rod.

[0016] In a preferred embodiment, the present invention can be further configured as follows: the heating mechanism further includes a base and a latch mounted on the machine base, and a concave hole adapted to fit the bottom of the melt crucible is formed on the top of the base;

[0017] The base is used to heat the melt crucible and the raw materials inside it;

[0018] The side of the main insulation chamber is provided with a shaft sleeve, the side of the auxiliary insulation chamber is provided with a pad, and the latch is adapted to pass through the shaft sleeve and the pad to lock the main insulation chamber and the auxiliary insulation chamber after closing.

[0019] In a preferred embodiment, the present invention can be further configured as follows: the first enclosure, the second enclosure, and the third enclosure are all provided with symmetrically distributed end plates on their exteriors;

[0020] Two symmetrically distributed limiting rods are installed in the two end plates outside the first sealing cover, and two return springs are provided outside the limiting rods, one of which bears pressure on the end plate on the second sealing cover, and the other returns spring bears pressure on the end plate on the third sealing cover;

[0021] The top end of the limiting rod is provided with a washer and a bolt, and the threaded section at the bottom end of the limiting rod is provided with a nut.

[0022] In a preferred embodiment, the present invention can be further configured as follows: the rod shaft stabilizing mechanism further includes a pressure-bearing sleeve disposed in the two sealing covers;

[0023] The pressure-bearing sleeve is in a T-shaped structure as a whole, and a plurality of evenly distributed sliding grooves are opened on the wall of the pressure-bearing sleeve, and an L-shaped control rod is set in the sliding groove;

[0024] A plurality of the pressurizing gaskets are evenly installed in the port at the top of the pressure-bearing sleeve, and the end of the control rod that passes through the inner cavity of the pressure-bearing sleeve is pressurized by the end at the bottom of the pressurizing gasket.

[0025] In a preferred embodiment, the present invention can be further configured as follows: a top seat is provided on the top of the pressure-bearing sleeve, a hexagonal nut is provided on the threaded tube on the top of the top seat, and a slip ring is movably installed on the bottom of the hexagonal nut;

[0026] A plurality of the control rods are evenly installed on the bottom of the slip ring.

[0027] In a preferred embodiment, the present invention can be further configured as follows: the inner cavity of the pressure sleeve and the inner cavity of the top seat are symmetrical along the seed rod, and a plurality of pressure-boosting gaskets evenly distributed in the inner cavity of the pressure sleeve are used to provide anti-shake pre-pressure for the top rod body of the seed rod;

[0028] The lifting of the multiple control rods is used to control the tilting angle of the multiple booster gaskets to increase the pressing force on the top of the seed rod.

[0029] In a preferred example, the present invention can be further configured as follows: the end tube at the top of the third closure is adapted to bear pressure on the bottom of the chuck, and the port of the end tube at the top of the third closure is used to apply a calibration force to the portion of the seed rod close to the bottom end of the chuck.

[0030] By adopting the above technical solution, the beneficial effects achieved by the present invention are as follows:

[0031] 1. The present invention provides an independent seed rod preheating mechanism on top of a conventional single crystal silicon heating and melting device. When the seed rod is initially suspended directly above the heating device, the seed rod preheating mechanism wraps around the rod. At this time, the heat energy released in the heating device is actively transferred to the seed rod preheating mechanism. Ultimately, the seed rod maintains a constant temperature with the raw material melting temperature, thereby avoiding the temperature difference between the seed rod and the melt, which could lead to cracks in the subsequent crystal formation and pulling.

[0032] 2. The present invention provides a plurality of circumferentially evenly distributed pressure gaskets on the seed rod lifting path. When the rod body at the top of the seed rod is subjected to a balanced restraining force by the plurality of pressure gaskets, the seed rod that contacts the molten material and is pulled upwards rotates and rises, thereby avoiding the problem of large-scale shaking caused by the interference of the underflowing molten material, thereby avoiding the sputtering of the crystal material.

[0033] 3. The present invention sets a guide tube, a transfer tube and a return tube for conducting heat energy between the main insulation chamber and the first sealing cover. As the motor runs, its internal transmission shaft will drive the high-temperature resistant impeller to rotate at high speed. By changing the direction of the high-temperature resistant impeller, the seed crystal rod contaminated with the melt can be accelerated to cool down during the process of rotation and upward movement, actively improving the cooling and solidification of the attached crystals without losing temperature, thereby accelerating the efficiency of crystal crystallization. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] Figure 1 This is a schematic diagram of the present invention when in use;

[0035] Figure 2 Schematic diagram of the assembly of the melt crucible of the present invention;

[0036] Figure 3 is a schematic diagram of the traction mechanism of the present invention;

[0037] Figure 4 Schematic diagram of the seed rod preheating mechanism of the present invention;

[0038] Figure 5 is a schematic cross-sectional view of the air flow supply assembly of the present invention;

[0039] Figure 6 Schematic cross-sectional view of three enclosures of the present invention;

[0040] Figure 7 For the present invention Figure 6 A magnified schematic diagram of point A in the middle;

[0041] Figure 8 For the present invention Figure 6 A magnified schematic diagram of point B in the middle;

[0042] Figure 9 is a schematic diagram of the heating mechanism of the present invention;

[0043] Figure 10 Schematic diagram of the rod shaft stabilizing mechanism of the present invention.

[0044] Reference numerals:

[0045] 100, traction mechanism; 110, machine base; 120, clamping base; 130, auxiliary rotation elevator; 140, chuck; 150, locking bolt; 160, seed crystal rod;

[0046] 200, heating mechanism; 210, main insulation chamber; 220, secondary insulation chamber; 230, insulation layer; 240, constant temperature pad; 250, cover; 260, latch; 270, base;

[0047] 300, seed rod preheating mechanism; 310, sealing assembly; 311, first sealing cover; 312, sealing gasket; 320, second sealing cover; 330, third sealing cover; 340, limit rod; 350, return spring; 360, flow guide tube; 370, transfer tube; 380, air flow supply assembly; 381, chassis; 382, motor; 383, high-temperature resistant impeller; 390, return pipe;

[0048] 400, rod shaft stabilizing mechanism; 410, pressure-bearing sleeve; 420, pressure-boosting gasket; 430, top seat; 440, hexagonal nut; 450, slip ring; 460, control rod;

[0049] 500. Melt crucible. DETAILED DESCRIPTION

[0050] To make the purpose, technical solutions and advantages of the present invention more clear, the present invention is further described in detail below in conjunction with specific embodiments and with reference to the accompanying drawings. It should be noted that the embodiments of the present invention and the features therein can be combined with each other without conflict.

[0051] It is to be understood that these descriptions are illustrative only and are not intended to limit the scope of the invention.

[0052] A crystal growth furnace crucible heating device provided by some embodiments of the present invention will be described below with reference to the accompanying drawings.

[0053] Example 1:

[0054] Combine Figures 1-10 As shown, the present invention provides a crystal growth furnace crucible heating device, which includes a traction mechanism 100, a heating mechanism 200 arranged in the traction mechanism 100, a seed rod preheating mechanism 300 arranged on the heating mechanism 200, a rod axis stabilizing mechanism 400 arranged between the heating mechanism 200 and the seed rod preheating mechanism 300, and a melt crucible 500 arranged in the heating mechanism 200.

[0055] The pulling mechanism 100 includes a seed rod 160 for providing an attachment base for crystal growth, a machine base 110 placed on a workbench, a clamping base 120 installed inside the machine base 110, a rotation-assisting elevator 130 installed in the clamping base 120, a chuck 140 provided on the end of the core rod in the rotation-assisting elevator 130, and two locking bolts 150 installed in the chuck 140;

[0056] A pre-installed socket is provided at the bottom of the chuck 140 , and the top of the seed rod 160 is adapted to pass through the pre-installed socket, and the two locking bolts 150 are used to fasten the top of the seed rod 160 ;

[0057] The heating mechanism 200 includes a main insulation chamber 210 and a secondary insulation chamber 220 for providing sealed heating for the crucible 500. The main insulation chamber 210 and the secondary insulation chamber 220 are both provided with an insulation layer 230 and a constant temperature pad 240.

[0058] The seed rod preheating mechanism 300 includes a sealing assembly 310 , a second sealing cover 320 , and a third sealing cover 330 for providing a constant temperature preheating treatment for the initially suspended seed rod 160 ;

[0059] The end tube at the top of the third closure 330 is adapted to bear pressure on the bottom of the chuck 140 , and the port of the end tube at the top of the third closure 330 is used to apply a calibration force to the portion of the seed rod 160 near the bottom end of the chuck 140 ;

[0060] The rod shaft stabilizing mechanism 400 includes a plurality of pressure-boosting gaskets 420 arranged on the lifting path of the seed rod 160 and uniformly distributed around the circumference. The pressure-boosting gaskets 420 are used to provide a stabilizing force for the rotation of the seed rod 160 to reduce the vibration amplitude of the seed rod 160.

[0061] After the single crystal silicon is melted into a molten state inside the crucible, the suspended seed rod is continuously delivered into the heating device until the seed rod is immersed in the crucible. At this time, the molten material will adhere to the seed rod. Since the traditional suspended seed rod is suspended externally, there is a temperature difference between the rod and the raw material at the moment of entry. After the raw material contacts the rod and is pulled up and slowly cooled, the crystallized crystal will crack, and the molten material accumulated at the end of the seed rod can finally obtain a small amount of effective crystallization. This process will reduce the efficiency of crystal formation. At the same time, the rod is too long. During the rotation process, the falling material will cause the rod to rotate off the center of the circle, resulting in large-scale shaking.

[0062] The device is provided with a first sealing cover 311 on the top of the two sealing covers 250, and a second sealing cover 320 is movably installed in the first sealing cover 311, and a third sealing cover 330 is movably installed in the second sealing cover 320. At this time, under the auxiliary support of the two limit rods 340 and the four return springs 350, the first sealing cover 311, the second sealing cover 320 and the third sealing cover 330 will form a tower shape. At this time, the seed crystal rod 160 fixed by the chuck 140 and the two locking bolts 150 and suspended vertically can be located in the center of the inner cavity of the tower structure. After closing, the heat energy released from the inner cavity of the main insulation chamber 210 and the auxiliary insulation chamber 220 can be actively released through the reflux pipe 390, the transfer pipe 370, the guide pipe 360 and the inner cavity of the tower structure. At this time, the seed rod 160 in the initial state can maintain a constant temperature with the raw material inside the melt crucible 500. As the seed rod 160 continues to be delivered to the inside of the two constant temperature pads 240, the seed rod 160 can extend into the molten raw material in the melt crucible 500 without a temperature difference until the raw material adheres to the surface of the seed rod 160.

[0063] As the seed rod 160 carries the raw material and stretches and rotates, the seed rod 160, which is assisted by multiple booster gaskets 420, can assist in rotating the falling raw material with minimum vibration amplitude to improve the rapid formation of crystals. At the same time, through the reverse exhaust of the air flow supply component 380, a cavity with a flowing air flow state is formed, and the crystals formed on the seed rod 160 can be slowly solidified.

[0064] Example 2:

[0065] Combine Figure 3-Figure 9 As shown, based on Example 1, the inner wall of the constant temperature pad 240 is provided with evenly distributed notches, and a heat dissipation gap is provided between the constant temperature pad 240 and the insulation layer 230;

[0066] The top ends of the two constant temperature pads 240 are both provided with a cover 250;

[0067] The sealing assembly 310 includes a first sealing cover 311 attached to the top of the two sealing covers 250 and a sealing gasket 312 disposed in the bottom port of the first sealing cover 311. The first sealing cover 311, the second sealing cover 320 and the third sealing cover 330 are in a tower-shaped structure as a whole, and are used to provide an undisturbed heat treatment environment for the seed rod 160.

[0068] A return pipe 390 is installed on the back of the main insulation chamber 210;

[0069] A guide tube 360 is installed on the back of the first enclosure 311, and a transfer tube 370 is installed at the bottom of the guide tube 360. An airflow supply assembly 380 is installed on the back of the guide tube 360. The transfer tube 370 is movably installed on the return tube 390.

[0070] The air flow supply assembly 380 includes a chassis 381, a motor 382 installed on the top of the chassis 381, and a high-temperature resistant impeller 383 installed on the drive shaft of the motor 382. The high-temperature resistant impeller 383 is located in the top shell of the guide tube 360 and is used to continuously preheat the seed rod 160 with heat energy and slowly cool the attached melt.

[0071] The auxiliary rotating elevator 130 is operated without changing the temperature of the inner chambers of the main heat-insulating chamber 210 and the auxiliary heat-insulating chamber 220 after closing. As the core rod inside the elevator drives the chuck 140 and the suspended seed crystal rod 160 to be delivered into the two constant temperature pads 240, the seed crystal rod 160 preheated by the heat energy of the inner chambers of the first sealing cover 311, the second sealing cover 320 and the third sealing cover 330 can reduce the interference of external factors on the advancement of the melt in the crucible 500. At this time, the pressurized third sealing cover The cover 330, the second cover 320 and the first cover 311 will shrink successively until the seed rod 160 completely enters the inner side of the two constant temperature pads 240. Then, the components above the chuck 140 can release the heat energy of the tower-shaped inner cavity. As the seed rod 160 pulls up the attached molten material, the slowly reset first cover 311, the second cover 320 and the third cover 330 can provide the molten material on the seed rod 160 with a gradual low temperature for slow crystallization, thereby improving the efficiency of crystal formation.

[0072] Example 3:

[0073] Combine Figure 4-Figure 9 As shown, based on Example 1, the heating mechanism 200 further includes a base 270 and a latch 260 mounted on the base 110, and a concave hole adapted to fit the bottom of the melt crucible 500 is opened on the top of the base 270;

[0074] The base 270 is used to heat the melt crucible 500 and the raw materials therein;

[0075] The side of the main insulation chamber 210 is provided with a shaft sleeve, and the side of the auxiliary insulation chamber 220 is provided with a pad. The latch 260 is adapted to penetrate the shaft sleeve and the pad to lock the main insulation chamber 210 and the auxiliary insulation chamber 220 after closing.

[0076] The first enclosure 311, the second enclosure 320 and the third enclosure 330 are all provided with symmetrically distributed end plates on their exteriors;

[0077] Two symmetrically distributed limiting rods 340 are installed in the two end plates outside the first sealing cover 311. Two return springs 350 are installed outside the limiting rods 340. One return spring 350 bears pressure on the end plate on the second sealing cover 320, and the other return spring 350 bears pressure on the end plate on the third sealing cover 330.

[0078] A washer and a bolt are provided on the top of the limiting rod 340 , and a nut is provided on the threaded section at the bottom of the limiting rod 340 .

[0079] The motor 382 is operated. As the motor 382 operates, its internal transmission shaft drives the high-temperature resistant impeller 383 to rotate at high speed.

[0080] When the high-temperature resistant impeller 383 rotates clockwise, the main insulation chamber 210 and the auxiliary insulation chamber 220 can actively transfer the continuously released heat energy into the tower-shaped cavity after closing. The actively transferred heat energy will eventually be radiated toward the initially suspended seed rod 160.

[0081] When the high-temperature resistant impeller 383 rotates counterclockwise, the first, second, and third closures 311, 320, and 330 shrink at the same time. At this time, the seed rod 160 is completely located in the two constant-temperature pads 240, and the molten material is contaminated on the seed rod 160 and can be quickly crystallized during the slow pulling and rotation. With the resetting of the first, second, and third closures 311, 320, and 330, the high-temperature resistant impeller 383 running counterclockwise can perform a gradual low-temperature airflow cooling treatment on the crystals on the seed rod 160, thereby ultimately enabling efficient crystal generation.

[0082] Example 4:

[0083] Combine Figure 3-Figure 10 As shown, in the above embodiment, the rod shaft stabilizing mechanism 400 further includes a pressure-bearing sleeve 410 disposed in the two covers 250;

[0084] The pressure-bearing sleeve 410 is in a T-shaped structure as a whole, and a plurality of evenly distributed sliding grooves are opened on the wall of the pressure-bearing sleeve 410, and an L-shaped control rod 460 is set in the sliding groove;

[0085] The plurality of pressurizing gaskets 420 are evenly installed in the port at the top of the pressure-bearing sleeve 410 , and the end of the control rod 460 that passes through the inner cavity of the pressure-bearing sleeve 410 bears pressure on the end at the bottom of the pressurizing gasket 420 ;

[0086] A top seat 430 is provided on the top of the pressure-bearing sleeve 410 , a hexagonal nut 440 is provided on the threaded tube on the top of the top seat 430 , and a slip ring 450 is movably installed on the bottom of the hexagonal nut 440 ;

[0087] A plurality of the control rods 460 are evenly mounted on the bottom of the slip ring 450;

[0088] The inner cavity of the pressure sleeve 410 and the inner cavity of the top seat 430 are symmetrical along the seed rod 160, and a plurality of pressure-boosting gaskets 420 evenly distributed in the inner cavity of the pressure sleeve 410 are used to provide anti-shake pre-pressure for the top rod body of the seed rod 160;

[0089] The lifting of the plurality of control rods 460 is used to control the tilting angle of the plurality of pressurizing gaskets 420 to increase the pressing force on the top end of the seed rod 160 .

[0090] By controlling the clockwise rotation of the hexagonal nut 440, the slip ring 450 movably mounted on the bottom of the hexagonal nut 440 will simultaneously pull the multiple control rods 460 upward at a uniform speed. At this time, the bottom ends of the multiple control rods 460 will cause the bottom ends of the multiple pressure washers 420 to tilt at a constant angle. When the seed rod 160 passes through the multiple pressure washers 420, the multiple pressure washers 420 that are selectively pressurized can apply an anti-vibration squeezing force to the rod wall of the seed rod 160. At this time, the uniformly rotating seed rod 160 will not experience large centrifugal vibrations due to the continuous falling of the melt.

[0091] After the seed crystal rod 160 is calibrated and prevented from centrifugal shaking, the slowly lifted seed crystal rod 160 can achieve rapid solidification of the generated crystal under the action of the above-mentioned gradually changing low-temperature airflow.

[0092] The working principle and usage process of the present invention are as follows: Since crystal growth needs to be carried out in a preset constant temperature and a specific sealed environment, when the seed rod is fixed and in a suspended state, the molten material melts inside the crucible, and the seed rod that is already in a suspended state slowly descends toward the inside of the heating crucible device until the end of the seed rod enters the crucible and releases the molten material. As the seed rod continues to extend into the crucible, the molten material adheres to the surface of the rod body with a temperature difference. The temperature difference between the seed rod and the molten material will cause the attached molten material to stretch from the crucible and produce bark-like cracks after cooling, which will lead to a decrease in the efficiency of crystal formation, and only a few complete crystals will be formed at the very end of the seed rod.

[0093] The device is provided with an independent seed rod preheating mechanism 300 on the top of a conventional crucible heating device, and the first sealing cover 311, the second sealing cover 320 and the third sealing cover 330 are combined into a tower structure. At this time, the first sealing cover 311, the second sealing cover 320 and the third sealing cover 330 forming the tower structure can be connected to the hole on the top of the crucible heating device for guiding the seed rod to rise and fall.

[0094] When the latch 260 is removed and the auxiliary heat-insulating chamber 220 is turned outward, the pre-installed table on the top of the base 270 will be exposed. Then, the molten crucible 500 can be placed on the table on the top of the base 270, and the material is added into the molten crucible 500. Then, the auxiliary heat-insulating chamber 220 is reset. At this time, the molten crucible 500 filled with the material can be located at the bottom of the cylindrical cavity formed by the two constant temperature pads 240. As the first sealing cover 311, the second sealing cover 320 and the third sealing cover 330 are pressed against the chuck 140, the cylindrical cavity formed by the two constant temperature pads 240 can be connected to the inner cavity formed by the above components. When the temperature of the molten crucible 500 continues to rise until the material is in a molten state, the temperature needs to be kept constant.

[0095] At the same time, while the melt crucible 500 is being continuously heated, heat energy is continuously released outwards. Following the guidance of 290 and under the active transmission of the air flow supply assembly 380, the continuously released heat energy will eventually enter the first enclosure 311 from the guide tube 360, and the seed crystal rod 160 fixed in the chuck 140 by the two locking bolts 150 in a vertically suspended state can be continuously preheated by the heat energy released from the first enclosure 311, the second enclosure 320 and the third enclosure 330 of the tower structure. As the material melts, the temperature of the seed rod 160 body will also be constant with the temperature of the molten material. As the seed rod 160 is actively pushed toward the melt crucible 500, multiple pressure-boosting gaskets 420 arranged on the descending path and evenly distributed around the circumference can provide balanced anti-shake protection for the end of the seed rod 160 close to the chuck 140. At this time, the seed rod 160 can be released from the melt and rotated upward during the lifting process. The excessively long seed rod 160 can avoid the problem of excessive centrifugation at its end due to rotation.

[0096] Therefore, according to the above operation, by synchronizing the temperature of the seed rod 160 with that of the melt, the problem of cracks after crystal formation caused by the temperature difference between the seed rod 160 and the melt can be avoided, and at the same time, the melt can be splashed on the rod body of the seed rod 160 with excessive vibration amplitude.

[0097] Although the embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the invention, and that the scope of the invention is defined by the claims and their equivalents.

Claims

1. A crystal growth furnace crucible heating device, comprising a traction mechanism (100), characterized in that: It also includes a heating mechanism (200) disposed in the traction mechanism (100), a seed crystal rod preheating mechanism (300) disposed on the heating mechanism (200), a rod axis stabilizing mechanism (400) disposed between the heating mechanism (200) and the seed crystal rod preheating mechanism (300), and a melt crucible (500) disposed in the heating mechanism (200); The pulling mechanism (100) includes a seed rod (160) for providing an attachment base for crystal growth; The heating mechanism (200) comprises a main heat-insulating chamber (210) and a secondary heat-insulating chamber (220) for providing sealed heating for the melt crucible (500); a heat-insulating layer (230) and a constant temperature pad (240) are provided inside the main heat-insulating chamber (210) and the secondary heat-insulating chamber (220); and a sealing cover (250) is provided at the top of each of the two constant temperature pads (240); The seed rod preheating mechanism (300) includes a sealing assembly (310), a second sealing cover (320), and a third sealing cover (330) for providing a constant temperature preheating treatment for the initially suspended seed rod (160); the sealing assembly (310) includes a first sealing cover (311) attached to the tops of the two sealing covers (250) and a sealing gasket (312) arranged in the bottom port of the first sealing cover (311), and the first sealing cover (311), the second sealing cover (320), and the third sealing cover (330) are in a tower-shaped structure as a whole, and are used to provide an interference-free heat treatment environment for the seed rod (160); The rod shaft stabilizing mechanism (400) includes a plurality of pressure-boosting gaskets (420) arranged on the lifting path of the seed crystal rod (160) and uniformly distributed around the circumference. The pressure-boosting gaskets (420) are used to provide a stabilizing force for the rotation of the seed crystal rod (160) to reduce the vibration amplitude of the seed crystal rod (160). The rod shaft stabilizing mechanism (400) also includes a pressure-bearing sleeve (410) arranged in the two covers (250); The pressure-bearing sleeve (410) is in a T-shaped structure as a whole, and a plurality of evenly distributed sliding grooves are provided on the wall of the pressure-bearing sleeve (410), and an L-shaped control rod (460) is provided in the sliding groove; The plurality of boosting gaskets (420) are evenly installed in the port at the top of the pressure-bearing sleeve (410), and the end of the control rod (460) that passes through the inner cavity of the pressure-bearing sleeve (410) is pressurized by the end at the bottom of the boosting gasket (420).

2. A crystal growth furnace crucible heating device according to claim 1, characterized in that: The inner wall of the constant temperature pad (240) is provided with evenly distributed slots, and a heat dissipation gap is provided between the constant temperature pad (240) and the insulation layer (230). A return pipe (390) is installed on the back of the main insulation chamber (210).

3. The crystal growth furnace crucible heating device according to claim 2, characterized in that: A guide tube (360) is installed on the back of the first sealing cover (311), and a transfer tube (370) is installed at the bottom of the guide tube (360). An airflow supply assembly (380) is installed on the back of the guide tube (360), and the transfer tube (370) is movably installed on the return tube (390); The airflow supply assembly (380) includes a chassis (381), a motor (382) installed on the top of the chassis (381), and a high-temperature resistant impeller (383) installed on the drive shaft of the motor (382), and the high-temperature resistant impeller (383) is located in the top shell of the guide tube (360) and is used to continuously utilize heat energy to preheat the seed rod (160) and slowly cool the attached molten material.

4. The crystal growth furnace crucible heating device according to claim 1, characterized in that: The traction mechanism (100) further includes a machine base (110) placed on a workbench, a clamping seat (120) installed inside the machine base (110), a rotation-assisting elevator (130) installed inside the clamping seat (120), a clamping head (140) provided on the end of a core rod inside the rotation-assisting elevator (130), and two locking bolts (150) installed inside the clamping head (140); A pre-installed socket is provided at the bottom of the chuck (140), and the top end of the seed crystal rod (160) is adapted to pass through the pre-installed socket, and the two locking bolts (150) are used to fasten the top end of the seed crystal rod (160).

5. The crystal growth furnace crucible heating device according to claim 1, characterized in that: The heating mechanism (200) further comprises a base (270) and a latch (260) mounted on the machine base (110), and a concave hole adapted to fit the bottom of the melt crucible (500) is provided on the top of the base (270); The base (270) is used to heat the melt crucible (500) and the raw materials therein; A shaft sleeve is provided on the side of the main heat-insulating chamber (210), a pad is provided on the side of the auxiliary heat-insulating chamber (220), and a latch (260) is adapted to penetrate the shaft sleeve and the pad for locking the main heat-insulating chamber (210) and the auxiliary heat-insulating chamber (220) after closing.

6. The crystal growth furnace crucible heating device according to claim 2, characterized in that: The first sealing cover (311), the second sealing cover (320), and the third sealing cover (330) are all provided with symmetrically distributed end plates on their exteriors; Two symmetrically distributed limiting rods (340) are installed in the two end plates outside the first sealing cover (311), and two return springs (350) are provided outside the limiting rods (340), one return spring (350) bears pressure on the end plate on the second sealing cover (320), and the other return spring (350) bears pressure on the end plate on the third sealing cover (330); A washer and a bolt are provided on the top end of the limiting rod (340), and a nut is provided on the threaded section at the bottom end of the limiting rod (340).

7. The crystal growth furnace crucible heating device according to claim 1, characterized in that: A top seat (430) is provided on the top of the pressure-bearing sleeve (410), a hexagonal nut (440) is provided on the threaded tube on the top of the top seat (430), and a slip ring (450) is movably installed on the bottom of the hexagonal nut (440); A plurality of the position control rods (460) are evenly mounted on the bottom of the slip ring (450).

8. The crystal growth furnace crucible heating device according to claim 1, characterized in that: The inner cavity of the pressure-bearing sleeve (410) and the inner cavity of the top seat (430) are symmetrical along the seed crystal rod (160), and a plurality of pressure-boosting gaskets (420) evenly distributed in the inner cavity of the pressure-bearing sleeve (410) are used to provide anti-shake pre-pressure for the top rod body of the seed crystal rod (160); The lifting of the plurality of control rods (460) is used to control the tilting angle of the plurality of booster gaskets (420) to increase the pressing force on the top end of the seed rod (160).

9. The crystal growth furnace crucible heating device according to claim 1, characterized in that: The end tube at the top of the third closure (330) is adapted to bear pressure on the bottom of the chuck (140), and the port of the end tube at the top of the third closure (330) is used to apply a calibration force to the portion of the seed rod (160) close to the bottom end of the chuck (140).

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