Visual compensation positioning system and double-drive gantry thereof

Abstract

The invention discloses a vision compensation positioning system and a double-drive gantry thereof. The vision compensation positioning system comprises a double-light-path vision module X moving shaft, a double-light-path vision module Y moving shaft slidably mounted on the double-light-path vision module X moving shaft and a double-light-path vision module, and the double-light-path vision module is slidably mounted on the double-light-path vision module Y moving shaft; a first driving motor is fixedly installed at one end of the double-optical-path vision module X moving shaft and can drive the double-optical-path vision module Y moving shaft to slide in the length direction of the double-optical-path vision module X moving shaft, and a second driving motor is fixedly installed at one end of the double-optical-path vision module Y moving shaft and can drive the double-optical-path vision module Y moving shaft to slide in the length direction of the double-optical-path vision module X moving shaft. The second driving motor can drive the double-optical-path vision module to slide in the length direction of the Y moving axis of the double-optical-path vision module. According to the invention, the dual-optical-path visual module containing the dual-optical-path visual module X moving shaft is installed on the dual-drive gantry base, and high-precision and high-beat fast switching can be realized under the condition that the overall structure of the dual-drive gantry is not changed.

Description

Technical Field

[0001] The invention belongs to the technical field of chip mounting equipment, and in particular relates to a vision compensation positioning system and a dual-drive gantry thereof. Background Art

[0002] Generally speaking, semiconductor chip mounting equipment will have a visual positioning compensation mechanism to improve the accuracy of chip mounting. For high-precision chip mounting, the specific implementation is that after the bonding head absorbs the required chip, it will move to the upward camera to perform the first visual positioning and recognition of the chip, and calculate the chip position offset information based on the photo results. After that, it will move to the chip mounting station and use an upward camera to take a photo to locate the chip position. Finally, the bonding head position will be adjusted in real time based on the results of the two photos to ensure the accuracy of the final chip mounting.

[0003] There are two main types of existing high-precision positioning compensation. One is the above-described method of photographing and locating the chip and the workstation that needs to be mounted using a downward-looking camera and an upward-looking camera. The other is to directly use a dual-optical path camera to simultaneously photograph, locate and identify the chip and the substrate that needs to be mounted at the mounting position. After identification and mechanism alignment, the bonding head moves the Z axis for mounting.

[0004] For the solution of combining an upward-looking camera with a downward-looking camera, due to the position error of the camera installation itself and the need to move the X-axis and Y-axis to the patch position after taking the upward-looking photo, the movement error of the mechanism will also be introduced, and high-precision positioning cannot be achieved.

[0005] The positioning accuracy of the dual-optical path camera solution is better than that of the upward-looking and downward-looking camera solution. However, due to physical limitations, the camera lens and light source are between the chip and the patch substrate when taking pictures. Only after the photo is taken and the motion mechanism of the dual-optical path camera moves the camera away from the patch area, can the bonding head start moving the Z axis for patching. The overall speed is slow and the efficiency is low. Summary of the invention

[0006] In view of the above problems existing in the prior art, the present invention provides a visual compensation positioning system and a dual-drive gantry thereof, wherein a dual-light path vision module containing an X-moving axis of the dual-light path vision module is installed on a dual-drive gantry base. The present invention can achieve high-precision, high-beat rapid switching of different scenes without changing the overall structure of the dual-drive gantry.

[0007] In order to solve the above technical problems, the present invention adopts the following technical solutions: A visual compensation positioning system comprises a dual-light path vision module X-moving axis, a dual-light path vision module Y-moving axis slidably mounted on the dual-light path vision module X-moving axis, and a dual-light path vision module, wherein the dual-light path vision module is slidably mounted on the dual-light path vision module Y-moving axis; Among them, a first driving motor is fixedly installed on one end of the dual-light path vision module X moving axis, and the first driving motor can drive the dual-light path vision module Y moving axis to slide along the length direction of the dual-light path vision module X moving axis; a second driving motor is fixedly installed on one end of the dual-light path vision module Y moving axis, and the second driving motor can drive the dual-light path vision module to slide along the length direction of the dual-light path vision module Y moving axis.

[0008] Furthermore, the dual-path vision module includes an industrial camera and a light source module. The industrial camera includes a lens barrel, a dual-path lens is installed at one end of the lens barrel, and an imaging unit is installed at the other end of the lens barrel. The dual-path lens is respectively set corresponding to two directions of the Z axis. The light source module is installed at one end of the lens barrel having the dual-path lens, and the light source module is set corresponding to the direction of the dual-path lens of the industrial camera.

[0009] Furthermore, the light source module includes lamp holders installed on both sides of the dual-light path lens, and the lamp holders are equipped with LED lamps, and the LED lamps are arranged in a ring array around the dual-light path lens.

[0010] Further, the dual-light path vision module is slidably connected to the dual-light path vision module Y moving axis through a connecting frame; Among them, the connecting frame includes a barrel fixing part, an intermediate plate and a beam sliding plate, the barrel fixing part is sleeved on the outside of the industrial camera, one end of the barrel fixing part is fixedly connected to the intermediate plate, the intermediate plate is horizontally arranged, and the side of the intermediate plate away from the barrel fixing part is fixedly connected to the beam sliding plate, sliding grooves are provided on both sides of the Y moving axis of the dual-light path vision module, and guide rails are provided on both sides of the beam sliding plate, which slides with the Y moving axis of the dual-light path vision module through the sliding grooves.

[0011] Furthermore, the first drive motor and the second drive motor are either servo motors or stepper motors.

[0012] In addition, the present application also seeks protection for a dual-drive gantry, comprising a base, two slide rail devices arranged parallel to each other on the base, and a moving crossbeam located between the two slide rail devices; Among them, the two slide rail devices are installed on the base, the two ends of the movable beam are slidably matched with the slide rail devices, and the movable beam can slide under the restriction of the two slide rail devices through a driving device. Any of the above-mentioned visual compensation positioning systems is also installed on the base.

[0013] Furthermore, the visual compensation positioning system is installed on the base through a support seat, and the support seat is arranged at the lower part of the dual-light path vision module X-moving axis. The support seat includes a support block, a support plate and a cushion block. There are at least two support blocks, and the support blocks are vertically arranged. The support block is fixed to the lower part of the dual-light path vision module X-moving axis, and the side of the support block away from the dual-light path vision module X-moving axis is connected to the support plate, the cushion block is fixed on the base, and the side of the cushion block away from the base is fixed to the lower part of the support plate. There are two cushion blocks and they are respectively distributed at both ends of the support plate.

[0014] Furthermore, a patch station for patching is also provided on the base, and a patch substrate to be patched is placed on the patch station. A material taking station for placing chips is also provided on the base.

[0015] Furthermore, the movable crossbeam is equipped with a bonding head for patches.

[0016] Compared with the prior art, the beneficial effects of this solution are: The present invention provides a visual compensation positioning system and a dual-drive gantry thereof. A dual-light path visual module containing an X-moving axis of the dual-light path visual module is installed on a dual-drive gantry base. Under high-beat working conditions, the dual-light path visual module is equivalent to a downward-looking camera. When the bonding head is picking up materials at the material picking station, it will take photos and position at the patch station. After the photo is taken, the visual module moves away from the patch station, and the gantry platform drives the bonding head to move to the patch station for patching, thereby maintaining a faster processing rhythm. In the case of high precision requirements, the dual-light path lens and the light source module will be between the chip and the patch substrate when taking pictures. After the picture is taken, the dual-light path vision module is moved away from the patch area through the dual-light path vision module X moving axis and the dual-light path vision module Y moving axis, and the bonding head starts to move the Z axis to perform patching. On the other hand, the present invention can achieve very high-precision positioning. The present invention can achieve the purpose of use in different scenes, such as high-precision, high-beat rapid switching, while the overall structure of the dual-drive gantry remains unchanged. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 This is a schematic diagram of the dual-drive gantry structure; Figure 2 This is another structural schematic diagram of the dual-drive gantry; Figure 3 This is a schematic diagram of the structure of the visual compensation positioning system; Figure 4 It is another structural schematic diagram of the vision compensation positioning system; Figure 5 A top view of the visual compensation positioning system; Figure 6 Schematic diagram of the dual-optical path vision module structure.

[0018] The reference numerals in the drawings are as follows: base 1, patch station 11, material picking station 12, slide rail device 2, movable beam 3, bonding head 31, visual compensation positioning system 4, support seat 41, support block 411, support plate 412, cushion block 413, dual-light path vision module X movable axis 42, first drive motor 421, dual-light path vision module Y movable axis 43, second drive motor 431, dual-light path vision module 44, lens barrel 441, industrial camera 442, dual-light path lens 443, light source module 45, upper view light source 451, connecting frame 46, barrel fixing part 461, middle plate 462, beam sliding plate 463. DETAILED DESCRIPTION

[0019] The present invention will be further described in detail below in conjunction with the accompanying drawings.

[0020] A visual compensation positioning system, such as Figure 1 , Figure 2 and Figure 3 As shown, it includes a dual-light path vision module X moving axis 42, a dual-light path vision module Y moving axis 43 slidably mounted on the dual-light path vision module X moving axis 42, and a dual-light path vision module 44, wherein the dual-light path vision module 44 is slidably mounted on the dual-light path vision module Y moving axis 43; Among them, a first driving motor 421 is fixedly installed at one end of the dual-light path vision module X moving axis 42, and the first driving motor 421 can drive the dual-light path vision module Y moving axis 43 to slide along the length direction of the dual-light path vision module X moving axis 42; a second driving motor 431 is fixedly installed at one end of the dual-light path vision module Y moving axis 43, and the second driving motor 431 can drive the dual-light path vision module 44 to slide along the length direction of the dual-light path vision module Y moving axis 43.

[0021] According to a specific embodiment provided by the present invention, in this embodiment, a dual-light path vision module 44 containing a dual-light path vision module X moving axis 42 is installed on a dual-drive gantry base 1, and a dual-light path vision module Y moving axis 43 can move relative to the dual-light path vision module X moving axis 42, and the dual-light path vision module Y moving axis 43 and the dual-light path vision module X moving axis 42 are driven by a second drive motor 431 and a first drive motor 421, respectively, and the principle is that a linear ball screw module drives the dual-light path vision module 44 to move. In this embodiment, when the processing rhythm requirement is high and the precision requirement is slightly lower, the dual-light path camera is used as a downward-looking camera, and during the period of time from the material taking to the patch position, the positioning recognition of the downward-looking camera is synchronized with the material taking action of the bonding head 31, so as to achieve a higher working rhythm.

[0022] On the one hand, the present invention can maintain a faster processing rhythm, and on the other hand, it can achieve very high-precision positioning. The present invention can achieve the purpose of use in different scenarios, such as high-precision, high-beat rapid switching, while keeping the overall structure of the dual-drive gantry unchanged.

[0023] The specific working process of the dual-drive gantry of the present invention is: under high-beat conditions; when the bonding head 31 moves to the material picking station 12, the dual-light path vision module 44 is equivalent to a downward-looking camera, and will take pictures at the patch station 11 at the same time, and then the dual-light path vision module 44 moves away from the patch station 11, and the moving beam 3 moves along the Y-axis direction of the two slide rail devices 2 on the base 1 of the dual-drive gantry, and the moving beam 3 drives the bonding head 31 to move along its own X-axis direction, and the bonding head 31 descends along the Z-axis for patching, and the entire patching process is completed.

[0024] In the case of high precision requirements: when taking pictures, the dual-light path lens 443 and the light source module 45 will be between the chip and the patch substrate. After the picture is taken, the dual-light path vision module 44 is moved away from the patch area through the dual-light path vision module X moving axis 42 and the dual-light path vision module Y moving axis 43, and the bonding head 31 starts to move the Z axis for patching. That is, according to the positioning method of the normal dual-light path camera, the chip and the patch substrate are simultaneously positioned at the actual patch position to ensure the patch accuracy.

[0025] Further, the dual-light path vision module 44 includes an industrial camera 442 and a light source module 45. The industrial camera 442 includes a lens barrel 441. A dual-light path lens 443 is installed at one end of the lens barrel 441. An imaging unit is installed at the other end of the lens barrel 441. The dual-light path lens 443 at the end of the lens barrel 441 adopts an existing prism structure to refract the light from above and below into the imaging unit of the industrial camera 442, and form an electronic signal through the imaging unit. The dual-light path lens 443 is respectively arranged in two directions corresponding to the Z axis, that is, the direction perpendicular to the plane of the base 1. The light source module 45 is installed at one end of the lens barrel 441 having the dual-light path lens 443. The light source module 45 is arranged in the direction corresponding to the dual-light path lens 443 of the industrial camera 442. The lens barrel 441 of the industrial camera 442 is connected and fixed to the Y moving axis 43 of the dual-light path vision module through a barrel fixing member 461.

[0026] Furthermore, the light source module 45 includes lamp holders installed on both sides of the dual-light path lens 443, a circular hole is provided in the middle of the lamp holder to allow light to enter the dual-light path lens 443, and LED lamps are installed on the lamp holders, and the LED lamps are arranged in a circular array around the dual-light path lens 443. Specifically, the lamp holders are respectively installed on the upper side and the lower side of the dual-light path lens 443, and are respectively an upper-view light source 451 and a lower-view light source. The upper-view light source 451 and the lower-view light source are arranged in opposite directions and are located on the Z-axis distribution of the visual compensation positioning system 4. The upper-view light source 451 and the lower-view light source are used to provide light supplement to the dual-light path lens 443.

[0027] According to a specific embodiment provided by the present invention, a dual-light path lens 443 is used to collect images. The main function of the dual-light path lens 443 is to image the target on the photosensitive surface of the image sensor to achieve light beam transformation (modulation), thereby affecting the overall performance of the machine vision system. Compared with traditional civilian cameras, the industrial camera 442 has high image stability, high transmission capability and high anti-interference capability. The industrial camera 442 is used for imaging. The industrial camera 442 is electrically connected to the control system, and then the image is positioned and analyzed by the algorithm of the control system, and then the position of the chip and the chip substrate is adjusted for positioning.

[0028] Furthermore, if Figure 3 , Figure 4 and Figure 5 As shown, the dual-light path vision module 44 is slidably connected to the dual-light path vision module Y moving axis 43 via a connecting frame 46; Among them, the connecting frame 46 includes a barrel fixing part 461, an intermediate plate 462 and a beam sliding plate 463. The barrel fixing part 461 is sleeved on the outside of the lens barrel 441. One end of the barrel fixing part 461 is fixedly connected to the intermediate plate 462. The intermediate plate 462 is horizontally arranged. The side of the intermediate plate 462 away from the barrel fixing part 461 is fixedly connected to the beam sliding plate 463. Sliding grooves are provided on both sides of the dual-light path vision module Y moving axis 43. There are guide rails on both sides of the beam sliding plate 463, which are slidably matched with the dual-light path vision module Y moving axis 43 through the sliding grooves.

[0029] According to a specific embodiment provided by the present invention, the barrel fixing part 461 is covered on the outside of the lens barrel 441 of the dual-optical path vision module 44 and is fixed to the lens barrel 441. The specific structure of the barrel fixing part 461 is not limited. The middle plate 462 fixes the barrel fixing part 461 at one end and fixes the connecting beam sliding plate 463 at the other end. The two sides of the beam sliding plate 463 are respectively slidably matched with the sliding grooves opened on both sides of the Y moving axis of the optical path vision module.

[0030] Furthermore, the first driving motor 421 and the second driving motor 431 are servo motors or stepping motors.

[0031] In addition, the present invention also claims protection for a dual-drive gantry, comprising a base 1, two slide rail devices 2 arranged parallel to each other on the base 1, and a moving crossbeam 3 located between the two slide rail devices 2, wherein the moving crossbeam 3 is equipped with a patch bonding head 31; Among them, the two slide rail devices 2 are installed on the base 1, and the two ends of the movable beam 3 are slidably matched with the slide rail devices 2. The movable beam 3 can slide under the restriction of the two slide rail devices 2 through a driving device. The base 1 is also installed with any one of the above-mentioned visual compensation positioning systems 4.

[0032] According to a specific embodiment provided by the present invention, in this embodiment, the main motion axis is the Y axis of the system corresponding to the two slide rail devices 2 on the dual-drive gantry base 1, and the moving beam 3 of the dual-drive gantry corresponds to the X axis of the system. The moving beam 3 is driven by the driving device to move along the slide rail device 2 in the Y axis direction, and the bonding head 31 corresponds to the Z axis. In this embodiment, the driving device can adopt the existing servo motor to drive the linear module structure, which will not be repeated here.

[0033] Further, the visual compensation positioning system 4 is installed on the base 1 through a support seat 41, and the support seat 41 is arranged at the lower part of the dual-light path visual module X-moving axis 42. The support seat 41 includes a support block 411, a support plate 412 and a cushion block 413. There are at least two support blocks 411, and the support block 411 is arranged vertically. The support block 411 is fixed to the lower part of the dual-light path visual module X-moving axis 42, and the side of the support block 411 away from the dual-light path visual module X-moving axis 42 is connected to the support plate 412, and the cushion block 413 is fixed on the base 1, and the side of the cushion block 413 away from the base 1 is fixed to the lower part of the support plate 412. There are two cushion blocks 413 and they are respectively distributed at both ends of the support plate 412. The support block 411 and the cushion block 413 adopt a hollow structure in the middle, which saves materials and can increase the strength of the support. The length direction of the support plate 412 is arranged along the X-axis direction of the base 1.

[0034] Furthermore, a patch station 11 for patching is also provided on the base 1, and a patch substrate to be patched is placed on the patch station 11. A material taking station 12 for placing a chip is also provided on the base 1.

[0035] Finally, it should be noted that in the description of the present invention, it should be noted that the terms "vertical", "up", "down", "horizontal", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, they cannot be understood as limitations on the present invention.

[0036] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0037] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention is described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or replace some of the technical features therein by equivalents. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A visual compensation positioning system, characterized in that: It includes a dual-light path vision module X moving axis, a dual-light path vision module Y moving axis slidably mounted on the dual-light path vision module X moving axis, and a dual-light path vision module, wherein the dual-light path vision module is slidably mounted on the dual-light path vision module Y moving axis; Among them, a first driving motor is fixedly installed on one end of the dual-light path vision module X moving axis, and the first driving motor can drive the dual-light path vision module Y moving axis to slide along the length direction of the dual-light path vision module X moving axis; a second driving motor is fixedly installed on one end of the dual-light path vision module Y moving axis, and the second driving motor can drive the dual-light path vision module to slide along the length direction of the dual-light path vision module Y moving axis.

2. A visual compensation positioning system according to claim 1, characterized in that: The dual-path vision module includes an industrial camera and a light source module. The industrial camera includes a lens barrel. A dual-path lens is installed at one end of the lens barrel, and an imaging unit is installed at the other end of the lens barrel. The dual-path lens is respectively set corresponding to two directions of the Z axis. The light source module is installed at one end of the lens barrel having the dual-path lens, and the light source module is set in a direction corresponding to the dual-path lens of the industrial camera.

3. A visual compensation positioning system according to claim 2, characterized in that: The light source module comprises lamp holders installed on both sides of the dual-light path lens, the lamp holders are equipped with LED lamps, and the LED lamps are arranged in a ring array around the dual-light path lens.

4. A visual compensation positioning system according to claim 3, characterized in that: The dual-light path vision module is slidably connected to the Y moving axis of the dual-light path vision module through a connecting frame; Among them, the connecting frame includes a barrel fixing part, an intermediate plate and a beam sliding plate, the barrel fixing part is sleeved on the outside of the industrial camera, one end of the barrel fixing part is fixedly connected to the intermediate plate, the intermediate plate is horizontally arranged, and the side of the intermediate plate away from the barrel fixing part is fixedly connected to the beam sliding plate, sliding grooves are provided on both sides of the Y moving axis of the dual-light path vision module, and guide rails are provided on both sides of the beam sliding plate, which slides with the Y moving axis of the dual-light path vision module through the sliding grooves.

5. A visual compensation positioning system according to any one of claims 1 to 4, characterized in that: The first driving motor and the second driving motor are one of a servo motor and a stepping motor.

6. A dual-drive gantry, characterized in that: It comprises a base, two slide rail devices arranged parallel to each other on the base, and a moving crossbeam located between the two slide rail devices; Among them, the two slide rail devices are installed on the base, and the two ends of the movable beam are slidably matched with the slide rail devices. The movable beam can slide under the restriction of the two slide rail devices through a driving device, and the base is also installed with the visual compensation positioning system described in any one of claims 1-5.

7. A dual-drive gantry according to claim 6, characterized in that: The visual compensation positioning system is installed on the base through a support seat, and the support seat is arranged at the lower part of the X-moving axis of the dual-light path vision module. The support seat includes a support block, a support plate and a cushion block. There are at least two support blocks, and the support block is vertically arranged. The support block is fixed to the lower part of the X-moving axis of the dual-light path vision module. The side of the support block away from the X-moving axis of the dual-light path vision module is connected to the support plate, and the cushion block is fixed on the base, and the side of the cushion block away from the base is fixed to the lower part of the support plate. There are two cushion blocks and they are respectively distributed at both ends of the support plate.

8. A dual-drive gantry according to claim 7, characterized in that: The base is also provided with a patch station for patching, and the patch substrate to be patched is placed on the patch station. The base is also provided with a material taking station for placing chips.

9. A dual-drive gantry according to claim 8, characterized in that: The movable crossbeam is provided with a bonding head for patches.

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