Optical path centering device of high-energy ion implanter

Abstract

The invention discloses an optical path centering device of a high-energy ion implanter. The optical path centering device comprises a flat transparent module, an energy transparent module, a radio frequency module, an analyzer, an energy transparent laser mounting plate, a flat transparent laser mounting plate and a three-electrode centering tool, the flat transparent module, the energy transparent module, the radio frequency module and the analyzer are all mounted on the floor silk screen; the laser-permeable mounting plate is mounted on a magnet yoke of the laser-permeable module, and the flat-permeable laser mounting plate is mounted on a magnet yoke of the flat-permeable module and used for placing a laser instrument; when light path centering is carried out, a laser instrument is firstly placed on the flat-transparent laser mounting plate, and laser penetrates out of the flat-transparent outlet and then penetrates out of the transparent inlet and the transparent side part by adjusting the positions of ground feet of the flat-transparent module and the transparent module; and then the laser instrument is moved to the laser-permeable mounting plate, and the anchor positions of the radio frequency module and the analyzer are respectively adjusted, so that the laser sequentially penetrates out from the permeable inlet, the radio frequency outlet, the radio frequency inlet, the analyzer outlet and the analyzer inlet. The device has the characteristics of compact structure, convenience in operation, high stability and the like.

Description

Technical Field

[0001] The invention relates to the technical field of ion implantation, and in particular to an optical path centering device for a high-energy ion implanter. Background Art

[0002] Ion implantation is a technique that ionizes atoms of an element and accelerates them in an electric field to obtain high energy before injecting them into the surface of a solid material to change the physical or chemical properties of the material surface. Equipment for ion implantation is mainly divided into medium beam, large beam and high energy machines. High energy machines have always been a blank in domestic products due to their high energy, point-like transmission beam, and difficulty in adjusting beam dose and uniformity. Domestic market demand relies entirely on imports. With the development of semiconductor technology, the line width of devices continues to shrink, the gate oxide layer continues to thin, and the photoresist layer coverage on the surface of the chip is getting higher and higher. The requirements for the uniformity, repeatability, safety and production efficiency of the ion implantation process are getting higher and higher.

[0003] The existing high-energy machine equipment lacks optical path alignment tooling and relies on manual on-site measurement of dimensions and movement of modules. It cannot ensure that ions move according to the designed route, resulting in a reduction in the beam reaching the target disk and an inability to meet the implantation process requirements. Summary of the invention

[0004] The technical problem to be solved by the present invention is to provide a high-energy ion implanter optical path centering device with compact structure, convenient operation and high stability in view of the above-mentioned problems in the prior art.

[0005] In order to solve the above technical problems, the technical solution adopted by the present invention is:

[0006] A high-energy ion implanter optical path centering device, comprising: a flat-transmitter module, an energy-transmitter module, a radio frequency module, an analyzer, an energy-transmitter laser mounting plate, a flat-transmitter laser mounting plate and a three-electrode centering tool; the flat-transmitter module, the energy-transmitter module, the radio frequency module and the analyzer are sequentially mounted on a floor screen for easy position adjustment; the energy-transmitter laser mounting plate is mounted on a magnetic yoke of the energy-transmitter module for placing a laser instrument; the flat-transmitter laser mounting plate is mounted on a magnetic yoke of the flat-transmitter module for placing a laser instrument; the three-electrode centering tool is mounted on a source cavity connected to the analyzer for realizing an ion source To the optical path alignment of the three electrodes; when aligning the optical path, the laser instrument is first placed on the flat transparent laser mounting plate, and the pin position of the flat transparent module is adjusted to make the laser pass through the flat transparent outlet, and the pin position of the energy-transmitting module is adjusted to make the laser pass through the energy-transmitting entrance and the energy-transmitting side to complete the optical path alignment of the flat transparent module and the energy-transmitting module; then move the laser instrument to the energy-transmitting laser mounting plate, and adjust the pin positions of the RF module and the analyzer respectively, so that the laser passes through the energy-transmitting entrance, RF outlet, RF entrance, analyzer outlet and analyzer entrance in turn to complete the optical path alignment of the energy-transmitting module, RF module and analyzer.

[0007] As a further improvement of the present invention, a flat transparent inlet tooling is provided at the inlet of the flat transparent module, and a flat transparent exit tooling is provided at the outlet of the flat transparent module; light-transmitting holes are provided at the center positions of the flat transparent exit tooling and the flat transparent entrance tooling to enable the light beam to enter and exit the flat transparent module; a plurality of threaded holes and pin holes are distributed on the flat transparent exit tooling and the flat transparent entrance tooling to enable the detachable connection between the flat transparent exit tooling and the flat transparent entrance tooling and the flat transparent module.

[0008] As a further improvement of the present invention, a transparent entrance tooling is provided at the entrance of the transparent module group, a transparent exit tooling is provided at the exit of the transparent module group, and a transparent side tooling is provided on the side of the transparent module group; light-transmitting holes are provided at the center positions of the transparent exit tooling and the transparent entrance tooling, and inclined light-transmitting holes are symmetrically provided in the middle of the transparent side tooling to enable light beams to enter and exit the transparent module; a plurality of threaded holes and pin holes are distributed on the transparent exit tooling, the transparent entrance tooling and the transparent side tooling to enable the transparent exit tooling, the transparent entrance tooling and the transparent side tooling to be detachably connected to the transparent module group.

[0009] As a further improvement of the present invention, an RF entrance tooling is provided at the entrance of the RF module, and an RF exit tooling is provided at the exit of the RF module. The RF exit tooling has the same structural setting as the RF entrance tooling. A light-transmitting hole is provided at the center position of the RF exit tooling to enable the light beam to enter and exit the RF module. A plurality of threaded holes and pin holes are evenly distributed on the RF exit tooling to realize a detachable connection between the RF exit tooling and the RF module.

[0010] As a further improvement of the present invention, an analyzer outlet tooling is provided at the outlet of the analyzer, an analyzer inlet tooling is provided at the inlet of the analyzer, a light-transmitting hole is provided at the center of the analyzer outlet tooling, a ramp is provided at the center of the analyzer inlet tooling, and a penetrating light-transmitting hole is provided at the center of the ramp to enable the light beam to enter and exit the analyzer; a plurality of threaded holes and pin holes are evenly distributed on the analyzer outlet tooling and the analyzer inlet tooling to enable the analyzer outlet tooling and the analyzer inlet tooling to be detachably connected to the analyzer.

[0011] As a further improvement of the present invention, the inclination angle β of the inclined platform is 20°±2°.

[0012] As a further improvement of the present invention, the diameter of the light-transmitting hole is 1 mm±0.1 mm.

[0013] As a further improvement of the present invention, the laser-transparent mounting plate is in an L-shaped structure, and a plurality of first mounting holes are provided on one side of the laser-transparent mounting plate to enable the laser-transparent mounting plate to be installed on the yoke of the transparent module, and a plurality of second mounting holes are provided on the other side of the laser-transparent mounting plate to enable the laser instrument to be installed on the laser-transparent mounting plate.

[0014] As a further improvement of the present invention, the flat laser mounting plate is in an L-shaped structure, and a clamp is provided on one side of the flat laser mounting plate to enable the flat laser mounting plate to be installed on the yoke of the flat module, and a plurality of third mounting holes are provided on the other side of the flat laser mounting plate to enable the laser instrument to be installed on the flat laser mounting plate.

[0015] As a further improvement of the present invention, the three-electrode centering tooling includes a positioning block, a pressing block and a movable rod; the positioning block and the pressing block are both installed on the source cavity, the source cavity is installed on the analyzer, and the three electrodes are provided in the analyzer; the movable rod passes through the positioning block and the pressing block in sequence, and the head of the movable rod moves and is inserted into the slit of the head of the three electrodes to assist in the positioning of the three electrodes in the analyzer.

[0016] Compared with the prior art, the advantages of the present invention are:

[0017] The optical path centering device for a high-energy ion implanter of the present invention sequentially installs a flat-transmitter module, an energy-transmitter module, a radio frequency module and an analyzer on a floor screen for easy position adjustment, and can roughly position the modules without measuring the size, thereby improving the optical path centering efficiency; by installing an energy-transmitter laser mounting plate on the magnetic yoke of the energy-transmitter module and installing a flat-transmitter laser mounting plate on the magnetic yoke of the flat-transmitter module, the laser instrument is placed, thereby avoiding the influence of human error on the laser position, and also facilitating the improvement of laser positioning accuracy, and significantly shortening the laser calibration time; when performing optical path centering, the laser instrument is first placed on the flat-transmitter laser mounting plate. On the board, by adjusting the foot position of the flat-transmitter module, the laser is made to pass through the flat-transmitter outlet, and by adjusting the foot position of the energy-transmitter module, the laser is made to pass through the energy-transmitter entrance and the energy-transmitter side, so as to complete the optical path alignment of the flat-transmitter module and the energy-transmitter module; then the laser instrument is moved to the energy-transmitter laser mounting plate, and the foot positions of the RF module and the analyzer are adjusted respectively, so that the laser passes through the energy-transmitter entrance, RF exit, RF entrance, analyzer exit and analyzer entrance in turn, so as to complete the optical path alignment of the energy-transmitter module, RF module and analyzer, which is convenient and fast, ensuring that the ions move according to the designed route, making the target disk beam stable, and meeting the requirements of the injection process well. At the same time, the three-electrode alignment tooling is installed on the source cavity, and the source cavity is installed on the analyzer. The three-electrode alignment tooling is used to realize the optical path alignment from the ion source to the three electrodes, ensuring the beam accuracy from the analyzer to the ion source. The present invention realizes the centering of the optical path from the ion source to the three electrodes, and also realizes the centering of the optical path among the analyzer, the radio frequency module, the energy-transmitting module and the parallel lens module, thereby eliminating the cumulative error affecting the beam quality. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic diagram of the structural principle of the optical path centering device of a high energy ion implanter in a specific embodiment of the present invention;

[0019] Figure 2 It is a schematic diagram of the structural principle of the analyzer outlet tooling in a specific embodiment of the present invention;

[0020] Figure 3 Schematic diagram of the structural principle of the analyzer inlet tooling in a specific embodiment of the present invention; wherein Figure (a) is a cross-sectional view, and Figure (b) is a bottom view of Figure (a);

[0021] Figure 4 It is a schematic diagram of the structural principle of the radio frequency outlet tooling in a specific embodiment of the present invention;

[0022] Figure 5 It is a schematic diagram of the structural principle of the tooling capable of seeing through an outlet in a specific embodiment of the present invention;

[0023] Figure 6 It is a schematic diagram of the structural principle of the tooling capable of penetrating an opening in a specific embodiment of the present invention;

[0024] Figure 7 Schematic diagram of the structural principle of the transparent side tooling in a specific embodiment of the present invention; wherein (a) is a cross-sectional view and (b) is a side view;

[0025] Figure 8 It is a schematic diagram of the structural principle of the flat vent outlet tooling in a specific embodiment of the present invention;

[0026] Fig. 9 It is a schematic diagram of the structural principle of the flat inlet tooling in a specific embodiment of the present invention;

[0027] Fig.10 It is a schematic diagram of the structural principle of a laser-transmitting mounting plate in a specific embodiment of the present invention;

[0028] Fig.11 It is a schematic diagram of the structural principle of the laser-transmitting installation in a specific embodiment of the present invention;

[0029] Fig.12 It is a schematic diagram of the structural principle of a flat-transmittance laser mounting plate in a specific embodiment of the present invention;

[0030] Fig.13 It is a schematic diagram of the structural principle of the flat-transmitting laser installation in a specific embodiment of the present invention;

[0031] Fig.14 It is a schematic diagram of the layout of floor silk screen printing in a specific embodiment of the present invention;

[0032] Fig.15 It is a schematic diagram of the structural principle of the three-electrode centering tooling in a specific embodiment of the present invention;

[0033] Fig.16 It is a schematic diagram of the structural principle of the three-electrode centering tooling from another perspective in a specific embodiment of the present invention;

[0034] Fig.17 for Fig.16 Schematic diagram of the structural principle of the middle CC direction;

[0035] Fig.18 It is a schematic diagram of the structural principle of installing the three-electrode centering tooling into the source chamber in a specific embodiment of the present invention;

[0036] Fig.19 for Fig.18 Schematic diagram of the structural principle in the middle AA direction;

[0037] Fig. 20 for Fig.18 Schematic diagram of the structural principle in the middle BB direction;

[0038] Fig.21 for Fig.19 Schematic diagram of the structural principle at D in the middle;

[0039] Legend: 1. Flat transparent module; 11. Flat transparent outlet tooling; 12. Flat transparent inlet tooling; 2. Transparent module; 21. Transparent outlet tooling; 22. Transparent inlet tooling; 23. Transparent side tooling; 231. Protrusion; 3. RF module; 31. RF outlet tooling; 32. RF inlet tooling; 4. Analyzer; 41. Analyzer outlet tooling; 42. Analyzer inlet tooling; 421. Inclined platform; 5. Light-transmitting hole; 61. Threaded hole; 62. Pin hole; 7. Transparent laser Mounting plate; 71, first mounting hole; 72, second mounting hole; 8, flat laser mounting plate; 81, clamp; 82, third mounting hole; 9, three-electrode centering tooling; 91, positioning block; 911, protrusion; 92, pressure block; 93, movable rod; 931, head; 100, laser instrument; 200, source cavity; 201, fixing block; 202, spring; 203, bolt; 300, three electrodes; 301, electrode head; 302, X-axis motor; 303, Y-axis motor. DETAILED DESCRIPTION

[0040] The present invention is further described below in conjunction with the accompanying drawings and specific preferred embodiments, but the protection scope of the present invention is not limited thereby.

[0041] In the description of the present invention, it should be understood that the terms "side", "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.

[0042] In addition, the terms "first" and "second" are used for descriptive purposes only and cannot be understood as indicating or suggesting relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, "multiple" means two or more, unless otherwise clearly and specifically defined.

[0043] Example

[0044] like Figures 1 to 21As shown, the optical path centering device of the high energy ion implanter of the present invention comprises a flat transparent module 1, an energy transparent module 2, a radio frequency module 3, an analyzer 4, an energy transparent laser mounting plate 7, a flat transparent laser mounting plate 8 and a three-electrode centering tool 9. The flat transparent module 1, the energy transparent module 2, the radio frequency module 3 and the analyzer 4 are sequentially mounted on the floor screen for easy position adjustment. The energy transparent laser mounting plate 7 is mounted on the magnetic yoke of the energy transparent module 2 for placing the laser instrument 100. The flat transparent laser mounting plate 8 is mounted on the magnetic yoke of the flat transparent module 1 for placing the laser instrument 100. The three-electrode centering tool 9 is mounted on the analyzer 4 for realizing the optical path centering from the ion source to the three electrodes. When performing optical path alignment, the laser instrument 100 is first placed on the flat transparent laser mounting plate 8, and the pin position of the flat transparent module 1 is adjusted to make the laser pass through the flat transparent outlet, and the pin position of the energy-transmitting module 2 is adjusted to make the laser pass through the energy-transmitting entrance and the energy-transmitting side, so as to complete the optical path alignment of the flat transparent module 1 and the energy-transmitting module 2. Then the laser instrument 100 is moved to the energy-transmitting laser mounting plate 7, and the pin positions of the radio frequency module 3 and the analyzer 4 are adjusted respectively, so that the laser passes through the energy-transmitting entrance, the radio frequency exit, the radio frequency entrance, the analyzer exit and the analyzer entrance in sequence, so as to complete the optical path alignment of the energy-transmitting module 2, the radio frequency module 3 and the analyzer 4. It can be understood that the flat transparent module 1, the energy-transmitting module 2, the radio frequency module 3 and the analyzer 4 are conventional components in the high-energy ion implanter, and their specific structural settings are not repeated here.

[0045] The floor silk screen is used for the rough positioning of the module. In the existing solution, the module positioning needs to measure the size and positioning, which is time-consuming and cumbersome. In this embodiment, the silk screen is added to the foot to facilitate the positioning of the module and save the module adjustment time.

[0046] In this embodiment, the flat-transmitter module 1, the energy-transmitting module 2, the radio frequency module 3 and the analyzer 4 are sequentially mounted on the floor silk screen to facilitate position adjustment. The modules can be roughly positioned without measuring dimensions, thereby improving the optical path centering efficiency. The energy-transmitting laser mounting plate 7 is mounted on the yoke of the energy-transmitting module 2, and the flat-transmitter laser mounting plate 8 is mounted on the yoke of the flat-transmitter module 1 to achieve placement of the laser instrument 100, thereby avoiding the influence of human error on the laser position. This is also beneficial to improving the laser positioning accuracy and significantly shortening the laser calibration time. When performing optical path alignment, the laser instrument 100 is first placed on the flat-transparent laser mounting plate 8, and the pin position of the flat-transparent module 1 is adjusted to make the laser pass through the flat-transparent outlet, and the pin position of the energy-transmitting module 2 is adjusted to make the laser pass through the energy-transmitting entrance and the energy-transmitting side to complete the optical path alignment of the flat-transparent module and the energy-transmitting module; then the laser instrument 100 is moved to the energy-transmitting laser mounting plate 7, and the pin positions of the radio frequency module 3 and the analyzer 4 are adjusted respectively, so that the laser passes through the energy-transmitting entrance, radio frequency exit, radio frequency entrance, analyzer exit and analyzer entrance in turn to complete the optical path alignment of the energy-transmitting module, radio frequency module and analyzer, which is convenient and fast, ensuring that the ions move according to the designed route, making the target disk beam stable, and well meeting the injection process requirements. At the same time, the three-electrode centering tool 9 is also installed on the source cavity 200 connected to the analyzer 4, and the three-electrode centering tool 9 is used to realize the optical path alignment from the ion source to the three electrodes 300, ensuring the beam accuracy from the analyzer 4 to the ion source. This embodiment not only realizes the optical path alignment from the ion source to the three electrodes 300, but also realizes the optical path alignment between the analyzer 4, the radio frequency module 3, the energy-transmitting module 2 and the parallel lens module 1, thereby eliminating the cumulative error affecting the beam quality.

[0047] like Figure 8 and Fig. 9 As shown, a flat-transmitter inlet fixture 12 is provided at the inlet of the flat-transmitter module 1, and a flat-transmitter outlet fixture 11 is provided at the outlet of the flat-transmitter module 1. Light-transmitting holes 5 are provided at the center positions of the flat-transmitter outlet fixture 11 and the flat-transmitter inlet fixture 12 to enable the light beam to enter and exit the flat-transmitter module 1. Multiple threaded holes 61 and pin holes 62 are uniformly distributed on the flat-transmitter outlet fixture 11 and the flat-transmitter inlet fixture 12 to enable the flat-transmitter outlet fixture 11 and the flat-transmitter inlet fixture 12 to be detachably connected to the flat-transmitter module 1.

[0048] like Figure 5 , Figure 6 and Figure 7As shown, a transparent entrance tooling 22 is provided at the entrance of the transparent module 2, a transparent exit tooling 21 is provided at the exit of the transparent module 2, and a transparent side tooling 23 is provided at the side of the transparent module 2. A light-transmitting hole 5 is provided at the center of the transparent exit tooling 21 and the transparent entrance tooling 22, and two inclined light-transmitting holes 5 are symmetrically provided in the middle of the transparent side tooling 23 to enable the light beam to enter and exit the transparent module 2. A plurality of threaded holes 61 and pin holes 62 are uniformly distributed on the transparent exit tooling 21, the transparent entrance tooling 22 and the transparent side tooling 23 to achieve detachable connection between the transparent exit tooling 21, the transparent entrance tooling 22 and the transparent side tooling 23 and the transparent module 2. One of the light-transmitting holes 5 in the transparent side tooling 23 is used for centering the optical paths of the transparent module 2, the radio frequency module 3 and the analyzer 4, and the other light-transmitting hole 5 is used for centering the optical paths of the flat transparent module 1 and the transparent module 2.

[0049] The transparent side tooling 23 is positioned by using the installation plane and the side, and a 2° taper is set on the side, so the positioning is accurate and the installation is convenient.

[0050] like Figure 4 As shown, an RF entrance tooling 32 is provided at the entrance of the RF module 3, and an RF exit tooling 31 is provided at the exit of the RF module 3. The RF exit tooling 31 and the RF entrance tooling 32 have the same structural setting. A light-transmitting hole 5 is provided at the center position of the RF exit tooling 31 to enable the light beam to enter and exit the RF module 3. A plurality of threaded holes 61 and pin holes 62 are evenly distributed on the RF exit tooling 31 to realize a detachable connection between the RF exit tooling 31 and the RF module 3.

[0051] like Figure 2 and Figure 3 As shown, an analyzer outlet fixture 41 is provided at the outlet of the analyzer 4, and an analyzer inlet fixture 42 is provided at the inlet of the analyzer 4. A light-transmitting hole 5 is provided at the center of the analyzer outlet fixture 41, and a ramp 421 is provided at the center of the analyzer inlet fixture 42. A through light-transmitting hole 5 is provided at the center of the ramp 421 to enable the light beam to enter and exit the analyzer 4. Multiple threaded holes 61 and pin holes 62 are evenly distributed on the analyzer outlet fixture 41 and the analyzer inlet fixture 42 to enable the analyzer outlet fixture 41 and the analyzer inlet fixture 42 to be detachably connected to the analyzer 4.

[0052] In this embodiment, the analyzer inlet tooling 42 is positioned accurately by relying on the cylindrical surface and the installation plane. The threaded hole 61 is set in the form of a conical head threaded hole. It is installed using a conical head screw and can be self-centering, thereby increasing the positioning accuracy.

[0053] Furthermore, the tilt angle β of the tilt stage 421 is 20°±2° to match the beam incident angle of the ion implanter.

[0054] In this embodiment, the diameter of the light-transmitting hole 5 is 1 mm±0.1 mm, which is used for the laser to pass through, thereby improving the centering accuracy of the optical path.

[0055] like Fig.10 and Fig.11 As shown, the laser transparent mounting plate 7 is in an L-shaped structure, and a plurality of first mounting holes 71 are provided on one side of the laser transparent mounting plate 7 to enable the laser transparent mounting plate 7 to be installed on the yoke of the transparent module 2, and a plurality of second mounting holes 72 are provided on the other side of the laser transparent mounting plate 7 to enable the laser instrument 100 to be installed on the laser transparent mounting plate 7.

[0056] Specifically, the original mounting hole of the yoke is used to design and install the laser-transparent mounting plate 7, which avoids the need to drill new holes. This is convenient and quick, and the laser position is fixed. The laser-transparent mounting plate 7 is provided with a laser mounting hole to ensure that the laser is in a locked state during the optical path alignment process, thereby avoiding the influence of accidental touch on the laser. The existing optical path alignment requires the laser instrument 100 to be placed on the ground, and the adjustment range of the laser instrument 100 is too large, and the laser positioning time is relatively long. In this embodiment, the laser-transparent mounting plate 7 is used to make laser positioning more accurate and shorten the laser calibration time.

[0057] like Fig.12 and Fig.13 As shown, the flat laser mounting plate 8 is an L-shaped structure, and a clamp 81 is provided on one side of the flat laser mounting plate 8 to enable the flat laser mounting plate 8 to be installed on the yoke of the flat module 1, and the laser height can be adjusted up and down, increasing the adjustable range of the laser. A plurality of third mounting holes 82 are provided on the other side of the flat laser mounting plate 8 to enable the laser instrument 100 to be installed on the flat laser mounting plate 8, ensuring that the laser is in a locked state during the optical path alignment process, and avoiding the influence of accidental touch on the laser.

[0058] Specifically, the flat laser mounting plate 8 is installed by utilizing the original mounting hole of the magnetic yoke, which is convenient and quick. The existing optical path alignment requires the laser instrument 100 to be placed on the ground, the adjustment range of the laser instrument 100 is too large, and the laser positioning time is long. In this embodiment, the flat laser mounting plate 8 is used to make the laser positioning more accurate and shorten the laser calibration time.

[0059] In this embodiment, the tooling plate is positioned by pins and the mounting plane, the dimension chain is short, the cumulative error is small, and the centering accuracy of the optical path is improved.

[0060] like Fig.15 , Fig.16 and Fig.17As shown, the three-electrode centering tool 9 includes a positioning block 91, a pressing block 92 and a movable rod 93. The positioning block 91 and the pressing block 92 are both mounted on the source chamber 200, the source chamber 200 is mounted on the analyzer 4, and the analyzer 4 is provided with three electrodes 300, the three-electrode head 301 is respectively connected to the X-axis motor 302 and the Y-axis motor 303, and the installation position of the three-electrode head 301 is adjusted by motor drive. The movable rod 93 passes through the positioning block 91 and the pressing block 92 in sequence, the thickness of the head 931 of the movable rod 93 is equivalent to the thickness of the slit of the three-electrode head 301, and the head 931 of the movable rod 93 can be moved and inserted into the slit of the three-electrode head 301, so as to assist the positioning of the three electrodes 300 in the analyzer 4.

[0061] Furthermore, if Fig.17 As shown, a protrusion 911 is provided on the positioning block 91 to increase the positioning area of ​​the movable rod 93 so as to make the positioning of the movable rod 93 more accurate.

[0062] like Fig.18 , Fig.19 and Fig.21 As shown, the positioning block 91 is installed at the pin of the source cavity 200, and the pressing block 92 is fixed by the fixing block 201 on the source cavity 200. The fixing block 201 is fixed to the source cavity 200 by bolts 203. A spring 202 is arranged inside the fixing block 201, and the spring 202 is in a compressed state to facilitate the disassembly and assembly of the pressing block 92.

[0063] In this embodiment, the steps of aligning the optical path are as follows:

[0064] Step 1: Place the analyzer, RF module, energy-transmitting module, and flat-transmitting module at the silk-screened position on the floor. The round feet of the analyzer, RF module, energy-transmitting module, and flat-transmitting module should overlap with the silk-screened position on the floor to complete the rough positioning of the module. Fig.14 In the diagram, A, D, E, F, and G indicate the locations of the round foot prints on the floor.

[0065] Step 2: After positioning is completed, install the analyzer inlet tooling 42 to the inlet of the analyzer 4, install the analyzer outlet tooling 41 to the outlet of the analyzer, install the RF inlet and outlet tooling to the inlet and outlet of the RF module 3, install the transparent inlet tooling 22 to the inlet of the transparent module 2, install the transparent outlet tooling 21 to the outlet of the transparent module 2, install the transparent side tooling 23 to the side of the transparent module 2, install the flat transparent inlet tooling 12 to the inlet of the flat transparent module 1, and install the flat transparent outlet tooling 11 to the outlet of the flat transparent module 1.

[0066] Step 3: Install the laser-transmitting mounting plate 7 onto the yoke of the laser-transmitting module 2 , and install the flat-transmitting laser mounting plate 8 onto the yoke of the flat-transmitting module 1 .

[0067] Step 4: Place the laser instrument 100 on the flat-transparent laser mounting plate 8 first, and adjust the foot position of the flat-transparent module 1 so that the laser can pass through the light-transmitting hole 5 of the flat-transparent outlet tooling 11. Adjust the foot position of the transparent module 2 so that the laser can pass through the light-transmitting hole 5 of the transparent entrance tooling 22 and the light-transmitting hole 5 of the transparent side tooling 23, thereby completing the alignment of the flat-transparent light path.

[0068] Step 5: Move the laser instrument 100 to the laser-transmitting mounting plate 7, adjust the foot positions of the RF module 3 and the analyzer 4, and allow the laser to pass through the light-transmitting hole 5 of the energy-transmitting inlet tooling 22, the light-transmitting hole 5 of the RF inlet and outlet tooling, the light-transmitting hole 5 of the analyzer outlet tooling 41, and the light-transmitting hole 5 of the analyzer inlet tooling 42, thereby completing the optical path alignment of the energy-transmitting module 2, the RF module 3, and the analyzer 4.

[0069] Step 6: When the three electrodes 300 are centered, first move the movable rod 93 toward the side away from the source chamber 200; then adjust the positions of the X-axis motor 302 and the Y-axis motor 303 so that the slit of the electrode head 301 is as close to the middle of the chamber as possible; then move the movable rod 93 toward the slit of the electrode head 301 to see if the head 931 of the movable rod 93 can pass through the slit of the electrode head 301; if not, the position of the electrode head 301 needs to be readjusted by the motor; if it can pass through, the slit alignment is completed, remove the three-electrode centering tool 9 from the source chamber 200, and install the ion source. Fig.19 and Fig. 20 shown.

[0070] The above is only a preferred embodiment of the present invention, and the protection scope of the present invention is not limited to the above embodiments. All technical solutions under the concept of the present invention belong to the protection scope of the present invention. It should be pointed out that for ordinary technicians in this technical field, some improvements and modifications without departing from the principle of the present invention should also be regarded as the protection scope of the present invention.

Claims

1. A high energy ion implanter optical path centering device, characterized in that: include: A flat transparent module (1), an energy-transmitting module (2), a radio frequency module (3), an analyzer (4), an energy-transmitting laser mounting plate (7), a flat transparent laser mounting plate (8) and a three-electrode centering tool (9); the flat transparent module (1), the energy-transmitting module (2), the radio frequency module (3) and the analyzer (4) are sequentially mounted on a floor screen for facilitating position adjustment; the energy-transmitting laser mounting plate (7) is mounted on the magnetic yoke of the energy-transmitting module (2) for placing a laser instrument (100); the flat transparent laser mounting plate (8) is mounted on the magnetic yoke of the flat transparent module (1) for placing a laser instrument (100); the three-electrode centering tool (9) is mounted on a source cavity (200) connected to the analyzer (4) for achieving The optical path from the ion source to the three electrodes is aligned; when the optical path is aligned, the laser instrument (100) is first placed on the flat transparent laser mounting plate (8), and the pin position of the flat transparent module (1) is adjusted so that the laser passes through the flat transparent outlet, and the pin position of the energy-transmitting module (2) is adjusted so that the laser passes through the energy-transmitting entrance and the energy-transmitting side, so as to complete the optical path alignment of the flat transparent module (1) and the energy-transmitting module (2); then the laser instrument (100) is moved to the energy-transmitting laser mounting plate (7), and the pin positions of the radio frequency module (3) and the analyzer (4) are adjusted respectively, so that the laser passes through the energy-transmitting entrance, the radio frequency exit, the radio frequency entrance, the analyzer exit and the analyzer entrance in sequence, so as to complete the optical path alignment of the energy-transmitting module (2), the radio frequency module (3) and the analyzer (4).

2. The optical path centering device for a high energy ion implanter according to claim 1, characterized in that: A flat transparent inlet tooling (12) is provided at the inlet of the flat transparent module (1), and a flat transparent outlet tooling (11) is provided at the outlet of the flat transparent module (1); light-transmitting holes (5) are provided at the center of the flat transparent outlet tooling (11) and the flat transparent inlet tooling (12) to enable light beams to enter and exit the flat transparent module (1); a plurality of threaded holes (61) and pin holes (62) are evenly distributed on the flat transparent outlet tooling (11) and the flat transparent inlet tooling (12) to enable the flat transparent outlet tooling (11) and the flat transparent inlet tooling (12) to be detachably connected to the flat transparent module (1).

3. The optical path centering device for a high energy ion implanter according to claim 2, characterized in that: A transparent entrance tooling (22) is provided at the entrance of the transparent module (2), a transparent exit tooling (21) is provided at the exit of the transparent module (2), and a transparent side tooling (23) is provided at the side of the transparent module (2); light transmission holes (5) are provided at the center of the transparent exit tooling (21) and the transparent entrance tooling (22), and inclined light transmission holes (5) are symmetrically provided in the middle of the transparent side tooling (23) to enable light beams to enter and exit the transparent module (2); a plurality of threaded holes (61) and pin holes (62) are uniformly distributed on the transparent exit tooling (21), the transparent entrance tooling (22) and the transparent side tooling (23) to enable the transparent exit tooling (21), the transparent entrance tooling (22) and the transparent side tooling (23) to be detachably connected to the transparent module (2).

4. The optical path centering device for a high energy ion implanter according to claim 3, characterized in that: A radio frequency entrance tooling (32) is provided at the entrance of the radio frequency module (3), and a radio frequency exit tooling (31) is provided at the exit of the radio frequency module (3); the radio frequency exit tooling (31) and the radio frequency entrance tooling (32) have the same structural arrangement; a light-transmitting hole (5) is provided at the center of the radio frequency exit tooling (31) to enable a light beam to enter and exit the radio frequency module (3); and a plurality of threaded holes (61) and pin holes (62) are evenly distributed on the radio frequency exit tooling (31) to enable a detachable connection between the radio frequency exit tooling (31) and the radio frequency module (3).

5. The optical path centering device for a high energy ion implanter according to claim 4, characterized in that: An analyzer outlet fixture (41) is provided at the outlet of the analyzer (4), and an analyzer inlet fixture (42) is provided at the inlet of the analyzer (4). A light-transmitting hole (5) is provided at the center of the analyzer outlet fixture (41), and a ramp (421) is provided at the center of the analyzer inlet fixture (42). A through light-transmitting hole (5) is provided at the center of the ramp (421) to enable a light beam to enter and exit the analyzer (4); a plurality of threaded holes (61) and pin holes (62) are evenly distributed on the analyzer outlet fixture (41) and the analyzer inlet fixture (42) to enable the analyzer outlet fixture (41) and the analyzer inlet fixture (42) to be detachably connected to the analyzer (4).

6. The optical path centering device for a high energy ion implanter according to claim 5, characterized in that: The inclination angle β of the inclined platform (421) is 20°±2°.

7. The optical path centering device for a high energy ion implanter according to any one of claims 2 to 6, characterized in that: The diameter of the light-transmitting hole (5) is 1 mm±0.1 mm.

8. The optical path centering device for a high energy ion implanter according to any one of claims 1 to 6, characterized in that: The laser-transmitting mounting plate (7) is in an L-shaped structure, and a plurality of first mounting holes (71) are provided on one side of the laser-transmitting mounting plate (7) so as to enable the laser-transmitting mounting plate (7) to be mounted on a yoke of a transparent module (2), and a plurality of second mounting holes (72) are provided on the other side of the laser-transmitting mounting plate (7) so as to enable the laser instrument (100) to be mounted on the laser-transmitting mounting plate (7).

9. The optical path centering device for a high energy ion implanter according to any one of claims 1 to 6, characterized in that: The flat-transmitted laser mounting plate (8) is in an L-shaped structure, a clamp (81) is provided on one side of the flat-transmitted laser mounting plate (8) to enable the flat-transmitted laser mounting plate (8) to be mounted on a yoke of a flat-transmitted module (1), and a plurality of third mounting holes (82) are provided on the other side of the flat-transmitted laser mounting plate (8) to enable the laser instrument (100) to be mounted on the flat-transmitted laser mounting plate (8).

10. The optical path centering device for a high energy ion implanter according to any one of claims 1 to 6, characterized in that: The three-electrode centering tool (9) comprises a positioning block (91), a pressing block (92) and a movable rod (93); the positioning block (91) and the pressing block (92) are both mounted on a source cavity (200), the source cavity (200) is mounted on an analyzer (4), and the analyzer (4) is provided with three electrodes (300); the movable rod (93) passes through the positioning block (91) and the pressing block (92) in sequence, and the head (931) of the movable rod (93) moves and is inserted into the slit of the head (301) of the three electrodes, so as to assist in the positioning of the three electrodes (300) in the analyzer (4).

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