The invention discloses an
optical path centering device of a high-energy
ion implanter. The
optical path centering device comprises a flat transparent module, an energy transparent module, a
radio frequency module, an analyzer, an energy transparent
laser mounting plate, a flat transparent
laser mounting plate and a three-
electrode centering tool, the flat transparent module, the energy transparent module, the
radio frequency module and the analyzer are all mounted on the floor silk screen; the
laser-permeable mounting plate is mounted on a
magnet yoke of the laser-permeable module, and the flat-permeable laser mounting plate is mounted on a
magnet yoke of the flat-permeable module and used for placing a laser instrument; when light path centering is carried out, a laser instrument is firstly placed on the flat-transparent laser mounting plate, and laser penetrates out of the flat-transparent outlet and then penetrates out of the transparent inlet and the transparent side part by adjusting the positions of ground feet of the flat-transparent module and the transparent module; and then the laser instrument is moved to the laser-permeable mounting plate, and the anchor positions of the
radio frequency module and the analyzer are respectively adjusted, so that the laser sequentially penetrates out from the permeable inlet, the radio frequency outlet, the radio frequency inlet, the analyzer outlet and the analyzer inlet. The device has the characteristics of compact structure, convenience in operation, high stability and the like.