Coupling aligning device for waveguide chip and photo-diode (PD) array and aligning method applying coupling aligning device
A waveguide chip and alignment device technology, which is applied in the field of communication, can solve the problems of destroying high-frequency characteristics, the speed cannot meet the requirements, etc., and achieve the effect of fast operation, simple coupling and alignment, and high alignment accuracy
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[0038] The present invention will be described below in conjunction with the drawings, such as figure 1 , figure 2 As shown, the active optical alignment device for the coupling of the waveguide chip and the high-speed PD array of the present invention includes: a set of infrared CCD monitoring system whose response spectrum covers visible light and near-infrared light bands, infrared CCD (Charge Coupled Device, Charge coupling device) monitoring system consists of infrared CCD101, three-dimensional fine-tuning frame 107, infrared CCD bracket 106 and monitor 118. The infrared CCD monitoring system is used to observe the position of the light-sensitive surface of the PD array and the output spot of the waveguide chip. At this time, infrared CCD101 needs Tilt and align the PD array 108; a six-dimensional fine-tuning frame 103 is provided with a clamping unit 102, and the clamping unit 102 is fixed with a waveguide support frame 115; besides the six-dimensional fine-tuning frame 10...
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