Alignment method and alignment system

Abstract

The invention provides an alignment method and an alignment system. The alignment method includes: 1) a collection step, collecting the images in all alignment zones; 2) a determination step: determining whether the matching degrees of alignment markers in all images reach a preset standard, and if true, performing an alignment step according to the all alignment zones, or otherwise, performing a screening step; 3) the screening step: screening at least one alignment zone, of which the matching degree is highest, from all alignment zones, and performing the alignment step according to the screened at least one alignment zone; 4) the alignment step: aligning the alignment markers on a substrate with the alignment markers on a mask plate to match the substrate with the mask plate in position. The alignment method can increase success rate of automatic alignment, so that not only is interlayer alignment deviation due to excessive high alignment error avoided, but also alignment efficiency is increased, thereby increasing productivity.

Description

technical field [0001] The present invention relates to the field of display technology, in particular to an alignment method and an alignment system. Background technique [0002] In the yellow light process, when the exposure machine performs the second layer process on the substrate, it usually uses the alignment camera to capture the alignment mark on the substrate to achieve the position matching of the substrate and the mask. [0003] Specifically, as figure 1 As shown, a substrate 103 is placed on a workbench 104, and a mask 102 is disposed above the substrate 103 for exposing the substrate. Such as figure 2 As shown, a diamond-shaped alignment mark 106 is provided on the alignment area of ​​the mask 102 , and correspondingly, a #-shaped alignment mark 107 is provided on the alignment area of ​​the substrate 103 . The alignment camera 101 of the exposure machine captures the image 105 of the above-mentioned alignment area, and a diamond-shaped alignment mark 106 a...

AI Technical Summary

Problems solved by technology

For irregular defects, only manual alignment can be used. The error of manual alignment is relatively large, and the alignment efficiency is low, resulting in insufficient weaving.

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