Manufacturing method of metal lining coating of composite material rotary drum

Abstract

The invention relates to the technical field of composite materials, in particular to a manufacturing method of a metal lining coating of a composite material rotary drum, which comprises the following steps: cleaning the inner wall of the composite material rotary drum, and carrying out grease removal, oil removal and rust removal treatment; a shielding cylinder is arranged between the target material and the composite material rotating cylinder, the target material is arranged in the composite material rotating cylinder, and the composite material rotating cylinder and the target material are arranged in a radio frequency magnetron sputtering device; the target material is cleaned through radio frequency magnetron sputtering; carrying out etching activation on the inner wall of the composite material rotary drum by adopting radio frequency plasma; the shielding cylinder is moved out, and a metal lining coating resistant to halogen gas corrosion is deposited on the inner wall of the rotating cylinder at low temperature through radio frequency magnetron sputtering; through the optimized cleaning, etching and deposition processes, the problems of arc discharge, insufficient binding force and secondary pollution existing in the coating deposition process of the resin-based composite material rotary drum in the prior art are solved.

Description

Technical Field

[0001] The invention relates to the technical field of composite materials, and in particular to a method for manufacturing a metal lining coating of a composite material rotating drum. Background Art

[0002] Resin-based composite materials have been widely used in aerospace, energy, chemical and other fields due to their excellent properties such as light weight, high strength and corrosion resistance. Among them, carbon fiber reinforced epoxy resin is the preferred material for manufacturing composite drums due to its excellent impregnation bonding properties, high strength and elastic modulus. Compared with drums made of metal materials, carbon fiber reinforced epoxy resin drums are not only light in weight, but also can work at higher line speeds, and their performance advantages are significant. However, when the carbon fiber reinforced epoxy resin drum is directly exposed to a working medium with strong oxidizing and high corrosiveness, its mechanical properties are easily damaged, thus affecting the service life and safety of the equipment.

[0003] In some industrial applications, such as when halogen gas is used as the working medium, the inner wall of the carbon fiber reinforced epoxy resin drum is directly exposed to the halogen gas, which is prone to chemical reactions that lead to surface structure damage and generate corrosive compounds, thereby accelerating the degradation of the drum material. Therefore, in order to improve the corrosion resistance of the composite drum, a layer of metal lining coating is usually deposited on its inner wall to form a protective barrier. However, the existing technology has some key problems in the metal coating deposition process.

[0004] Traditional coating deposition methods mostly use DC magnetron sputtering. Although this process has been proven to improve the corrosion resistance of the inner wall of the composite drum to a certain extent, due to the poor electrical conductivity of the composite material, charge accumulation is easily generated during the sputtering process, which triggers arc discharge and causes film failure. In addition, the deposition temperature of the DC magnetron sputtering process is relatively high and is not suitable for heat-sensitive resin-based composite materials; at the same time, the bonding strength between the coating and the substrate is insufficient, which seriously limits the industrial application of this technology. Summary of the invention

[0005] The technical problem to be solved by the present invention is that in the prior art, the inner wall of a resin-based composite material drum is prone to arc discharge, high deposition temperature, insufficient film-base bonding, and poor corrosion resistance during the deposition of a metal coating. The purpose is to provide a method for manufacturing a metal lining coating of a composite material drum, which achieves efficient deposition of a metal lining coating with excellent resistance to halogen gas corrosion under low temperature conditions.

[0006] The present invention is achieved through the following technical solutions:

[0007] A method for manufacturing a metal lining coating of a composite material drum, comprising:

[0008] Clean the inner wall of the composite material drum and remove grease, oil and rust;

[0009] A shielding cylinder is arranged between the target material and the composite material rotating cylinder, and the target material is placed inside the composite material rotating cylinder, and the composite material rotating cylinder and the target material are placed in a radio frequency magnetron sputtering device;

[0010] The target material is cleaned by radio frequency magnetron sputtering;

[0011] The inner wall of the composite material drum is etched and activated by radio frequency plasma;

[0012] The shielding cylinder is removed, and a metal lining coating resistant to halogen gas corrosion is deposited on the inner wall of the rotating cylinder at low temperature by radio frequency magnetron sputtering.

[0013] Specifically, the method for cleaning the inner wall of the composite material drum includes:

[0014] Pure alcohol was used to remove the release agent from the inner wall of the composite drum;

[0015] Use neutral detergent to remove grease and rust;

[0016] The inner wall of the composite material drum is cleaned with pure water and dried by hot air.

[0017] Optionally, the hot air drying temperature is 60°C to 100°C, and the vacuum degree is better than 0.1Pa.

[0018] Specifically, the method for cleaning the target material includes:

[0019] exposing the target surface to radio frequency magnetron sputtering in a vacuum environment;

[0020] A cleaning working gas is introduced, and the vacuum degree is controlled within a first set range, and sputtering cleaning is performed, and sputtering cleaning products of the target material are deposited on the inner wall of the shielding tube.

[0021] Optionally, the sputtering power density of the target is 50 to 1000 W / dm 2 The working gas for cleaning is argon; the first setting range of vacuum degree is 0.1-10Pa; the target material, shielding cylinder and composite material rotating cylinder are coaxially arranged.

[0022] Specifically, the method of etching and activating the interior includes:

[0023] Introducing an etching activation working gas into the radio frequency magnetron sputtering device, and controlling the vacuum degree within a second set range;

[0024] The radio frequency power density is adjusted to perform plasma etching and activation treatment on the inner wall of the composite material rotating cylinder, and the sputtering products generated by the etching and activation are deposited on the outer wall of the shielding cylinder.

[0025] Optionally, the etching activation working gas is a mixed gas of argon and oxygen, and the gas flow ratio is 1:5 to 5:1; the second setting range is 0.1 to 10 Pa; the RF power density is adjusted to 10 to 200 W / dm 2 .

[0026] Specifically, the method of depositing the metal lining coating comprises:

[0027] After the etching activation is completed, the shielding cylinder is moved out of the composite material rotating cylinder along the axial direction and positioned below the target material;

[0028] Passing in a deposition working gas and controlling the vacuum degree within a third setting range;

[0029] The RF sputtering power is adjusted to deposit the coating to a set thickness using RF magnetron sputtering technology.

[0030] Optionally, the deposition working gas is argon, the third setting range is 0.1-10 Pa; the RF sputtering power density is 50-1000 W / dm 2 ; The coating thickness is 10~30μm.

[0031] Optionally, the target material is monel, silver, platinum or gold.

[0032] Compared with the prior art, the present invention has the following advantages and beneficial effects:

[0033] The present invention solves the problems of arc discharge, insufficient bonding force and secondary pollution in the coating deposition process of the resin-based composite material drum in the prior art by optimizing the cleaning, etching and deposition processes; the low-temperature deposition process effectively avoids the risk of damage to the resin-based composite material due to high temperature, while ensuring the bonding strength and stability between the coating and the substrate; the coordinated design of target sputtering cleaning, drum inner wall etching activation and shielding tube significantly reduces the risk of film contamination and improves the consistency and corrosion resistance of the coating. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] The accompanying drawings illustrate exemplary embodiments of the present invention and, together with the description thereof, are used to explain the principles of the present invention. These drawings are included to provide a further understanding of the present invention, and the accompanying drawings are included in and constitute a part of this specification and do not constitute a limitation of the embodiments of the present invention.

[0035] Figure 1 The present invention is a schematic flow chart of a method for manufacturing a metal lining coating of a composite material drum.

[0036] Figure 2 It is a schematic diagram of sputtering cleaning of the target material and etching activation of the inner wall of the rotating drum according to the present invention.

[0037] Figure 3 is a schematic diagram of depositing a metal liner coating according to the present invention.

[0038] Reference numerals: 1-target material, 2-shielding cylinder, 3-rotating cylinder. DETAILED DESCRIPTION

[0039] To make the purpose, technical solution and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and implementation methods. It is understood that the specific implementation methods described herein are only used to explain the relevant content, rather than to limit the present invention.

[0040] It should also be noted that, for the convenience of description, only the parts related to the present invention are shown in the drawings.

[0041] In the absence of conflict, the embodiments and features of the embodiments of the present invention may be combined with each other. The present invention will be described in detail below with reference to the accompanying drawings and in combination with the embodiments.

[0042] Embodiment 1

[0043] like Figure 1 , Figure 2 and Figure 3 As shown, a method for manufacturing a metal lining coating of a composite material drum 3 comprises:

[0044] In the first step, the inner wall of the composite material drum 3 is cleaned and degreased. Pure alcohol, neutral detergent and pure water are used to clean the inner wall of the drum 3 in stages to remove the release agent, grease and possible rust on the surface, thereby providing a clean substrate surface for subsequent coating deposition. The cleaning process uses ultrasonic and hot air drying to improve the cleaning efficiency and ensure the cleanliness and dryness of the inner wall surface.

[0045] In the second step, a shielding cylinder 2 is arranged between the target material 1 and the composite material drum 3, and the target material 1 is placed inside the composite material drum 3, and the composite material drum 3 and the target material 1 are placed in a radio frequency magnetron sputtering device; the shielding cylinder 2 is used to isolate the structural components of the sputtering products generated during the sputtering cleaning or etching process, and can prevent the sputtering products from contaminating the inner wall of the drum 3 and the surface of the target material 1. The target material 1 is located inside the composite material drum 3 and is arranged coaxially with the drum 3. This layout ensures that the sputtering direction of the radio frequency magnetron sputtering is concentrated and evenly covers the entire inner wall surface. The radio frequency magnetron sputtering device is a device that uses a radio frequency power supply to provide a high-frequency electromagnetic field for the target material 1, stabilizes the plasma through magnetron technology, and thus achieves efficient sputtering.

[0046] In the third step, the target material 1 is cleaned by radio frequency magnetron sputtering. Before use, the target material 1 is usually attached with impurities or oxides. The radio frequency magnetron sputtering technology uses argon as the working gas to remove the contaminants on the surface of the target material 1 by sputtering in a vacuum environment. This process can ensure the activity of the surface of the target material 1 and avoid quality problems caused by the influence of contaminants in the subsequent coating deposition. The sputtering products are isolated by the shielding tube 2 and deposited on the inner wall of the shielding tube 2 to further prevent secondary contamination.

[0047] In process 4, radio frequency plasma is used to etch and activate the inner wall of the composite material drum 3; radio frequency plasma technology introduces a mixed gas of argon and oxygen, and uses a high-frequency electromagnetic field to excite and form plasma in a vacuum environment to achieve physical etching and chemical activation of the inner wall of the drum 3. Physical etching removes tiny pollutants on the surface through high-energy particle bombardment, and chemical activation forms active sites on the inner wall of the drum 3 through reaction, thereby enhancing the bonding force between the coating and the inner wall substrate. At this time, the shielding cylinder 2 is used as an isolation device for the outer wall deposition, which effectively reduces the pollution of the etching products.

[0048] In step five, the shielding cylinder 2 is removed, and a metal lining coating resistant to halogen gas corrosion is deposited on the inner wall of the rotating cylinder 3 at low temperature by radio frequency magnetron sputtering. After the activation of the inner wall is completed, the shielding cylinder 2 is moved under the target material 1 to ensure that the inner wall of the rotating cylinder 3 is completely exposed to the sputtering environment. Using radio frequency magnetron sputtering technology, high-performance corrosion-resistant metal materials such as monel alloy, silver, platinum or gold are evenly deposited on the inner wall of the rotating cylinder 3 under low temperature conditions to form a metal lining coating. The low-temperature process avoids the risk of damage to heat-sensitive resin-based composite materials due to high temperature, while radio frequency magnetron sputtering ensures the high density of the coating and excellent film-base bonding.

[0049] Embodiment 2

[0050] This embodiment provides a specific deposition method.

[0051] Step 1: Use pure alcohol to remove the release agent from the inner wall of the composite material drum 3. Use pure alcohol to remove the release agent from the inner wall of the composite material drum 3. The specific operation includes immersing the composite material drum 3 in a pure alcohol ultrasonic cleaning tank, continuously ultrasonic cleaning for 30 minutes, and repeatedly wiping with a brush wrapped with a white dust-free cloth until there is no obvious discoloration.

[0052] Use a neutral detergent to remove grease and rust; after the alcohol cleaning is completed, use a neutral detergent and pure water in proportion (such as 1:9) to prepare a cleaning solution, remove grease and rust from the inner wall of the drum 3, heat to about 60°C for ultrasonic cleaning for about 30 minutes, wrap the brush with a white dust-free cloth and wipe repeatedly until there is no obvious discoloration, rinse with pure water and drain.

[0053] Use pure water to clean several times to remove any detergent residue, use pure alcohol ultrasonic cleaning for 10 minutes → use pure water ultrasonic cleaning for 10 minutes → rinse with pure water, drain → blow dry with hot air.

[0054] The inner wall of the composite material drum 3 is cleaned with pure water and dried with hot air. After being dried with hot air, the drum 3 is transferred into a clean vacuum chamber for vacuum drying and degassing. The drying temperature is 100°C and the vacuum degree is better than 0.1 Pa. The hot air drying temperature is 60°C to 100°C and the vacuum degree is better than 0.1 Pa.

[0055] Step 2: Expose the surface of the target material 1 to radio frequency magnetron sputtering in a vacuum environment; evacuate the device to a vacuum state to ensure that the system background vacuum degree reaches better than 0.001 Pa to reduce the interference of background gas.

[0056] The cleaning working gas (argon) is introduced and the vacuum degree is controlled within the first set range (0.1~10Pa) for sputtering cleaning. At this time, the argon gas is accelerated by the electric field to form a high-energy plasma, which bombards the surface of the target material 1. The sputtering cleaning products of the target material 1 are deposited on the inner wall of the shielding tube 2.

[0057] The RF magnetron sputtering device provides 50-1000W / dm through the RF power supply. 2 The sputtering power density is high, so that the impurities, oxides and other pollutants on the surface of the target material 1 are physically stripped off. The stripped sputtering cleaning products are deposited on the inner wall of the shielding cylinder 2 to avoid secondary contamination of the target material 1 or the inner wall of the rotating cylinder 3.

[0058] The sputtering power density is preferably 200 to 500 W / dm 2 , the first setting range is preferably 0.5~5Pa.

[0059] Step three, introducing etching activation working gas (a mixture of argon and oxygen) into the RF magnetron sputtering device, and controlling the vacuum degree within a second set range (0.1-10 Pa);

[0060] The RF power density is adjusted to perform plasma etching and activation treatment on the inner wall of the composite material drum 3, and the sputtering products generated by etching and activation are deposited on the outer wall of the shielding tube 2. High-energy particles bombard the inner wall of the composite material drum 3, physically etching away microscopic surface pollutants, while the reaction of oxygen and the inner wall forms active sites, enhancing the bonding performance of the inner wall with subsequent coatings. The sputtering products generated during the etching and activation process are intercepted by the outer wall of the shielding tube 2 to prevent secondary contamination of the target material 1 or the inner wall of the drum 3.

[0061] The gas flow ratio of the mixed gas of argon and oxygen is 1:5 to 5:1, preferably 1:2 to 2:1. The second setting range is 0.1 to 10Pa, preferably 0.5 to 5Pa; the RF power density is adjusted to 10 to 200W / dm2 , preferably 50 to 100 W / dm 2 .

[0062] Step 4: After the etching activation is completed, the shielding tube 2 is moved axially out of the composite material drum 3 and positioned under the target material 1; the inner wall of the composite material drum 3 is completely exposed to the sputtering deposition area, and the position of the shielding tube 2 ensures the isolation of sputtered impurities during the deposition process.

[0063] The working gas (argon) for deposition is introduced, and the vacuum degree is controlled within the third setting range; the RF sputtering power is adjusted, and the coating is deposited to a set thickness by RF magnetron sputtering technology. High-energy particles are formed by ionization, which impact the surface of the target material 1, and the target material 1 is sputtered onto the inner wall of the composite material drum 3 in the form of atoms or molecules.

[0064] The third setting range is 0.1-10Pa, preferably 0.5-5Pa; the RF sputtering power density is 50-1000W / dm 2 , preferably 200~500W / dm 2 By adjusting the deposition time, the coating thickness is controlled within the range of 10 to 30 μm, ensuring that the coating meets the requirements of anti-halogen gas corrosion performance while not causing additional mechanical stress or mass burden on the inner wall of the drum 3.

[0065] The target material 1 is a metal with excellent corrosion resistance such as monel alloy, silver, platinum or gold to meet the requirements of a specific working environment.

[0066] Embodiment 3

[0067] This embodiment provides a specific example, a method for manufacturing the MONEL 502 metal lining coating of a single-tube composite material rotating drum 3.

[0068] The carbon fiber reinforced epoxy resin rotating cylinder 3 is 600 mm long and 120 mm in diameter; the MONEL 502 target material 1 is 700 mm long and 40 mm in diameter; the lifting shielding cylinder 2 is 700 mm long and 80 mm in diameter. Figure 1 The manufacturing process shown carries out the deposition of the metal lining coating of the drum 3 .

[0069] (1) Cleaning of drum 3

[0070] Remove the release agent: Use pure alcohol to ultrasonically clean drum 3 for 30 minutes, and use a white dust-free cloth to repeatedly wipe the drum until there is no obvious discoloration;

[0071] Degreasing: Ultrasonic cleaning with a 60℃ neutral detergent / pure water 1 / 9 solution for 30 minutes, wrap the brush with a white dust-free cloth and wipe repeatedly until there is no obvious discoloration, rinse with pure water and drain.

[0072] Fine cleaning: Ultrasonic cleaning with pure alcohol for 10 minutes → Ultrasonic cleaning with pure water for 10 minutes → Rinse with pure water and drain → Blow dry with hot air.

[0073] (2) Drum 3 drying

[0074] After being dried by hot air, the rotating drum 3 is transferred into a clean vacuum chamber for vacuum drying and degassing. The drying temperature is 100° C. and the vacuum degree is drawn to be better than 0.1 Pa.

[0075] (3) Sputtering and cleaning of target 1

[0076] The cleaned rotating drum 3 is loaded into the vacuum coating machine, and the positions of the target 1, shielding drum 2 and rotating drum 3 are as follows: Figure 2 As shown, the target 1 is sputtered and cleaned. The background vacuum of the vacuum chamber is evacuated to better than 0.001Pa, Ar gas is introduced to a vacuum degree of 1Pa, the target core speed of the scanning magnetic field is 30r / min, the incident power of the RF sputtering power supply of the target 1 is 2.5kW, and the sputtering cleaning is performed for 5 minutes.

[0077] (4) Plasma etching and activation of the inner wall of drum 3

[0078] Target 1, shielding tube 2, rotating tube 3 Figure 2 The position shown remains unchanged. After the target material 1 is sputtered and cleaned, gas is supplied to a vacuum degree of 0.5 Pa at an Ar / O2 flow ratio of 1 / 1. The incident power of the RF power supply for etching and activating the drum 3 is 1.5 kW, and the inner wall of the drum 3 is etched and activated with Ar and O plasma for 30 minutes.

[0079] (5) Low temperature deposition of metal lining coating resistant to halogen gas corrosion on the inner wall of drum 3

[0080] After the plasma etching and activation of the inner wall of the rotating drum 3 are completed, the shielding cylinder 2 can be raised and lowered to a position 10 cm below the target 1. The positions of the target 1, the shielding cylinder 2, and the rotating drum 3 are as follows: Figure 3 Turn off Ar and O2 gas, pump the vacuum to better than 0.001Pa, continue to feed Ar gas to the vacuum of 1Pa, scan the magnetic field target core speed of 30r / min, the RF sputtering power of target 1 is 3.0kW, and RF magnetron sputtering is used to deposit MONEL 502 metal lining coating of 15μm.

[0081] Embodiment 4

[0082] This embodiment provides a specific example, a method for manufacturing a MONEL 502 metal lining coating of a double-tube composite drum 3

[0083] The rotating cylinder 3 is composed of a carbon fiber reinforced epoxy resin cylinder with a length of 600mm at both ends and a diameter of 120mm and a stainless steel bellows with a length of 60mm in the middle and an outer diameter of 120mm; the MONEL 502 target 1 is 1360mm long and 40mm in diameter; the lifting shielding cylinder 2 is 1360mm long and 80mm in diameter. Figure 1 The manufacturing process shown carries out the deposition of the metal lining coating of the drum 3 .

[0084] (1) Cleaning of drum 3

[0085] Remove the release agent: Use pure alcohol to ultrasonically clean drum 3 for 30 minutes, and use a white dust-free cloth to repeatedly wipe the drum until there is no obvious discoloration;

[0086] Degreasing and rust removal: Ultrasonic cleaning with a 60℃ neutral detergent / 1 / 9 pure water solution for 30 minutes, wrap the brush with a white dust-free cloth and wipe repeatedly until there is no obvious discoloration, rinse with pure water and drain.

[0087] Fine cleaning: Ultrasonic cleaning with pure alcohol for 10 minutes → Ultrasonic cleaning with pure water for 10 minutes → Rinse with pure water and drain → Blow dry with hot air.

[0088] (2) Drum 3 drying

[0089] After being dried by hot air, the rotating drum 3 is transferred into a clean vacuum chamber for vacuum drying and degassing. The drying temperature is 100° C. and the vacuum degree is drawn to be better than 0.1 Pa.

[0090] (3) Sputtering and cleaning of target 1

[0091] The cleaned rotating drum 3 is loaded into the vacuum coating machine, and the positions of the target 1, shielding drum 2 and rotating drum 3 are as follows: Figure 2 As shown, the target 1 is sputtered and cleaned. The background vacuum of the vacuum chamber is evacuated to better than 0.001Pa, Ar gas is introduced to a vacuum degree of 1Pa, the target core speed of the scanning magnetic field is 30r / min, the incident power of the RF sputtering power supply of the target 1 is 5.0kW, and the target 1 is sputtered and cleaned for 5 minutes.

[0092] (4) Plasma etching and activation of the inner wall of drum 3

[0093] Target 1, shielding tube 2, rotating tube 3 Figure 2 The position shown remains unchanged. After the target material 1 is sputtered and cleaned, gas is supplied to a vacuum degree of 0.5 Pa at an Ar / O2 flow ratio of 1 / 1. The incident power of the RF power supply for etching and activating the drum 3 is 3.0 kW, and the inner wall of the drum 3 is etched and activated with Ar and O plasma for 30 minutes.

[0094] (5) Low temperature deposition of metal lining coating resistant to halogen gas corrosion on the inner wall of drum 3

[0095] After the plasma etching and activation of the inner wall of the rotating drum 3 are completed, the shielding cylinder 2 can be raised and lowered to a position 10 cm below the target 1. The positions of the target 1, the shielding cylinder 2, and the rotating drum 3 are as follows: Figure 3 Turn off Ar and O2 gas, pump the vacuum to better than 0.001Pa, continue to feed Ar gas to the vacuum of 1Pa, scan the magnetic field target core speed of 30r / min, the RF sputtering power of target 1 is 6.0kW, and RF magnetron sputtering is used to deposit MONEL 502 metal lining coating of 15μm.

[0096] In the description of this specification, the description with reference to the terms "one embodiment / method", "some embodiments / methods", "example", "specific example", or "some examples" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment / method or example are included in at least one embodiment / method or example of the present application. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment / method or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments / methods or examples in a suitable manner. In addition, those skilled in the art may combine and combine the different embodiments / methods or examples described in this specification and the features of the different embodiments / methods or examples, unless they are contradictory.

[0097] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In the description of this application, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0098] It should be understood by those skilled in the art that the above embodiments are only for the purpose of clearly illustrating the present invention, and are not intended to limit the scope of the present invention. For those skilled in the art, other changes or modifications may be made based on the above invention, and these changes or modifications are still within the scope of the present invention.

Claims

1. A method for manufacturing a metal lining coating of a composite material drum, characterized in that: include: Cleaning the inner wall of the composite material drum (3) to remove grease, oil and rust; A shielding cylinder (2) is arranged between the target material (1) and the composite material rotating cylinder (3), the target material (1) is placed inside the composite material rotating cylinder (3), and the composite material rotating cylinder (3) and the target material (1) are placed in a radio frequency magnetron sputtering device; Cleaning the target material (1) by radio frequency magnetron sputtering; Using radio frequency plasma to etch and activate the inner wall of the composite material rotating drum (3); The shielding cylinder (2) is removed, and a metal lining coating resistant to halogen gas corrosion is deposited on the inner wall of the rotating cylinder (3) at low temperature by radio frequency magnetron sputtering.

2. The method for manufacturing a metal lining coating of a composite material drum according to claim 1, characterized in that: The method for cleaning the inner wall of the composite material drum (3) comprises: Using pure alcohol to remove the release agent from the inner wall of the composite material rotating drum (3); Use neutral detergent to remove grease and rust; The inner wall of the composite material rotating drum (3) is cleaned with pure water and dried with hot air.

3. The method for manufacturing a metal lining coating of a composite material drum according to claim 2, characterized in that: The hot air drying temperature is 60℃~100℃, and the vacuum degree is better than 0.1Pa.

4. The method for manufacturing a metal lining coating of a composite material drum according to claim 1, characterized in that: The method for cleaning the target material (1) comprises: exposing the surface of a target material (1) to radio frequency magnetron sputtering in a vacuum environment; A cleaning working gas is introduced and the vacuum degree is controlled within a first set range to perform sputtering cleaning, whereby the sputtering cleaning products of the target material (1) are deposited on the inner wall of the shielding tube (2).

5. The method for manufacturing a metal lining coating of a composite material drum according to claim 4, characterized in that: The sputtering power density of the target (1) is 50 to 1000 W / dm 2 The working gas for cleaning is argon gas; the first setting range of the vacuum degree is 0.1 to 10 Pa; the target material (1), the shielding cylinder (2) and the composite material rotating cylinder (3) are coaxially arranged.

6. The method for manufacturing a metal lining coating of a composite material drum according to claim 1, characterized in that: The method for etching and activating the inner wall of the drum includes: Introducing an etching activation working gas into the radio frequency magnetron sputtering device, and controlling the vacuum degree within a second set range; The radio frequency power density is adjusted to perform plasma etching and activation treatment on the inner wall of the composite material rotating cylinder (3), and sputtering products generated by the etching and activation are deposited on the outer wall of the shielding cylinder (2).

7. The method for manufacturing a metal lining coating of a composite material drum according to claim 6, characterized in that: The working gas for etching activation is a mixture of argon and oxygen, and the gas flow ratio is 1:5 to 5:1; the second setting range is 0.1 to 10Pa; the RF power density is adjusted to 10 to 200W / dm 2 .

8. The method for manufacturing a metal lining coating of a composite material drum according to claim 1, characterized in that: Methods for depositing metal liner coatings include: After the etching and activation are completed, the shielding cylinder (2) is moved out of the composite material rotating cylinder (3) along the axial direction and positioned below the target material (1); Passing in a deposition working gas and controlling the vacuum degree within a third setting range; The RF sputtering power is adjusted to deposit the coating to a set thickness using RF magnetron sputtering technology.

9. The method for manufacturing a metal lining coating of a composite material drum according to claim 8, characterized in that: The working gas for deposition is argon, the third setting range is 0.1~10Pa; the RF sputtering power density is 50~1000W / dm 2 ; The coating thickness is 10~30μm.

10. The method for manufacturing a metal lining coating of a composite material drum according to claim 1, characterized in that: The target material (1) is monel alloy, silver, platinum or gold.

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