Radio frequency power supply system DLP nonlinear correction method, device, equipment and medium

Abstract

The invention relates to a DLP nonlinear correction method, device and equipment for a radio frequency power supply system and a medium, and the method comprises the steps: determining whether the radio frequency power supply system is in an amplitude modulation mode or not according to the obtained working mode information of the radio frequency power supply system; acquiring an expected output power value currently selected by the radio frequency power supply system under the condition that the radio frequency power supply system is in the amplitude modulation mode; according to the currently selected expected output power value, the coefficient table corresponding to the power level where the expected output power value is located is inquired, the target value of the output amplitude coefficient is obtained, the coefficient tables corresponding to different power levels store the corresponding relation between the expected output power value and the value of the output amplitude coefficient through different bit widths, and the target value of the output amplitude coefficient is obtained. DAC attenuation and DDS source amplitude modulation output in a radio frequency power supply system are compatible; and determining a target expected output power value of the radio frequency power supply system according to the target value of the output amplitude coefficient, the power amplifier gain and the signal link attenuation sum.

Description

Technical Field

[0001] The present disclosure relates to the field of power supply technology, and in particular to a DLP nonlinear correction method, device, equipment and medium for a radio frequency power supply system. Background Art

[0002] The RF power system exhibits serious nonlinear characteristics. The DDS source output is a linear system with a frequency resolution of 500Mhz / 32bit, a phase resolution of 360 degrees / 14bit, and an amplitude resolution of 10mA / 10bit. It also has three output modes: single mode, modulation, and linear scanning frequency / phase / amplitude. The DAC attenuation output is approximately a linear system, but because the PA power amplifier uses an LDMOS tube, its gain is not only related to the static operating point, but also to the input power. It can be divided into a gain expansion curve in the low power output segment, a gain stabilization curve in the medium power segment, and a gain compression curve in the high power segment. See Figure 1-3 The characteristic curve shown, and Figure 4 The DAC output value, output power and coupler forward power acquisition signal (dac att power adc measure) are normalized in the open-loop operation. It can be seen that the nonlinear circuit and attenuation form a gain expansion curve, which makes it difficult to accurately control the output power of the RF power system. Summary of the invention

[0003] The purpose of the present invention is to provide a DLP nonlinear correction method, device, equipment and medium for a radio frequency power supply system, aiming to solve the problem of nonlinear circuits and attenuation forming a gain expansion curve, which makes it difficult to accurately control the output power of the radio frequency power supply system.

[0004] In order to achieve the above-mentioned purpose, a first aspect of an embodiment of the present disclosure provides a DLP nonlinear correction method for a radio frequency power supply system, the method comprising:

[0005] Determining whether the RF power system is in an amplitude modulation mode according to the acquired working mode information of the RF power system;

[0006] When the radio frequency power supply system is in an amplitude modulation mode, obtaining a currently selected expected output power value of the radio frequency power supply system;

[0007] According to the currently selected expected output power value, query the coefficient table corresponding to the power level of the expected output power value to obtain the target value of the output amplitude coefficient, wherein the coefficient table corresponding to different power levels stores the corresponding relationship between the expected output power value and the value of the output amplitude coefficient through different bit widths to be compatible with the attenuation characteristics of the DAC attenuation module in the RF power supply system and the DDS source amplitude modulation output;

[0008] The target expected output power value of the radio frequency power supply system is determined according to the target value of the output amplitude coefficient, the power amplifier gain and the total attenuation of the signal link.

[0009] In a possible implementation, the coefficient table corresponding to different power levels is constructed in the following manner:

[0010] Determine each of the power levels and corresponding power ranges supported by the radio frequency power system;

[0011] Determine a corresponding relationship between each of the power levels and the maximum power value according to the maximum power value of the RF power system, the attenuation characteristics of the DAC attenuation module, and the output range of the DDS source;

[0012] Determine, according to the correspondence between the power level and the maximum power value, a value of an output amplitude coefficient corresponding to the output power value within a power range corresponding to each of the power levels;

[0013] The values ​​of the output amplitude coefficient corresponding to the output power value in each power level are made into a coefficient table according to the bit width of the corresponding power level, wherein the higher the power level, the larger the corresponding bit width.

[0014] In one possible implementation, the coefficient table for the power level of 3 kW stores the correspondence between the expected output power value and the value of the output amplitude coefficient through a 10-bit bit width, and the coefficient table for the power level of 10 to 24 kW stores the correspondence between the expected output power value and the value of the output amplitude coefficient through a 16-bit bit width.

[0015] In a possible implementation, the relationship between the value of the output amplitude coefficient and the power level of the expected output power value is:

[0016]

[0017] Among them, k i is the value of the output amplitude coefficient of the amplitude modulation mode, p O is the expected output power value, α is the maximum output amplitude, G(P i ) is the power amplifier gain, and Att is the total attenuation of the signal link.

[0018] In one possible implementation, the method further includes:

[0019] When the RF power supply system is in a dual-channel synthesis mode, a target value of the output amplitude coefficient is determined according to a phase difference between the dual channels, wherein the dual-channel synthesis mode is a synthesis of a sensor channel and an ADC signal acquisition link channel;

[0020] The target expected output power value of the radio frequency power supply system is determined according to the target value of the output amplitude coefficient, the power amplifier gain and the total attenuation of the signal link.

[0021] In a possible implementation, when the RF power supply system is in a dual-channel synthesis mode, the target value of the output amplitude coefficient is determined by the following formula:

[0022]

[0023] Among them, k j is the target value of the output amplitude coefficient of the dual-channel synthesis mode, is the phase difference between the two channels, and cos is the cosine function in mathematical calculation.

[0024] According to a second aspect of the embodiments of the present disclosure, a DLP nonlinear correction device for a radio frequency power supply system is provided, comprising:

[0025] A first determination module is configured to determine whether the RF power system is in an amplitude modulation mode according to the acquired working mode information of the RF power system;

[0026] an acquisition module, configured to acquire a currently selected expected output power value of the RF power system when the RF power system is in an amplitude modulation mode;

[0027] A query module is configured to query a coefficient table corresponding to a power level of the expected output power value according to a currently selected expected output power value, and obtain a target value of the output amplitude coefficient, wherein the coefficient table corresponding to different power levels stores a corresponding relationship between the expected output power value and the value of the output amplitude coefficient through different bit widths, so as to be compatible with the attenuation characteristics of the DAC attenuation module in the RF power supply system and the DDS source amplitude modulation output;

[0028] The second determination module is configured to determine a target expected output power value of the RF power supply system according to a target value of the output amplitude coefficient, a power amplifier gain, and a total attenuation of the signal link.

[0029] According to a third aspect of the present disclosure, an electronic device is provided, including:

[0030] a memory having a computer program stored thereon;

[0031] A processor is used to execute the computer program in the memory to implement the steps of any one of the methods in the first aspect.

[0032] According to a fourth aspect of an embodiment of the present disclosure, a computer-readable storage medium is provided, on which a computer program is stored, and when the program is executed by a processor, the steps of any one of the methods described in the first aspect are implemented.

[0033] The present invention provides a method, device, equipment and medium for DLP nonlinear correction of a radio frequency power supply system. Compared with the prior art, it has the following beneficial effects:

[0034] By obtaining the working mode information of the RF power supply system, it is intelligently identified whether the system is in the amplitude modulation mode. After confirming that the system is in the amplitude modulation mode, the currently selected expected output power value is obtained to ensure the accuracy of the subsequent power adjustment, so that the system can adjust the output power according to actual needs. According to the currently selected expected output power value, the corresponding power level coefficient table is queried to obtain the target value of the output amplitude coefficient. The coefficient table corresponding to different power levels uses different bit widths to store the corresponding relationship between the expected output power value and the output amplitude coefficient. The attenuation characteristics of the DAC attenuation module in the RF power supply system and the amplitude modulation output capability of the DDS source are fully considered to ensure accurate power adjustment at different power levels. Not only is the output power adjustment accuracy of the RF power supply system in the amplitude modulation mode improved, but also the effective compatibility of the DAC attenuation module and the DDS source amplitude modulation output is achieved. The system can meet the needs of various complex application scenarios while ensuring the stability of the output power. According to the target value of the output amplitude coefficient, the power amplifier gain, and the sum of the signal link attenuation, the target expected output power value of the RF power supply system is determined. It ensures that the system can work stably according to the predetermined expected output power, and improves the overall performance and reliability of the system. In summary, accurate regulation of the output power of the RF power system in amplitude modulation mode is achieved through intelligent identification of the working mode, accurate acquisition of the expected output power value, efficient use of the power level coefficient table, and determination of the target expected output power value.

[0035] Other features and advantages of the present disclosure will be described in detail in the following detailed description. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] The accompanying drawings are used to provide a further understanding of the present disclosure and constitute a part of the specification. Together with the following specific embodiments, they are used to explain the present disclosure but do not constitute a limitation of the present disclosure. In the accompanying drawings:

[0037] Figure 1It is a schematic diagram of typical values ​​of power gain and drain efficiency as functions of output power and output power as a function of input power shown in an embodiment of the specification.

[0038] Figure 2 It is a schematic diagram of typical values ​​of power gain and drain efficiency as functions of output power and drain efficiency as a function of output power shown in an embodiment of the specification.

[0039] Figure 3 It is a schematic diagram of typical values ​​of another power gain and drain efficiency as a function of output power and drain efficiency as a function of output power shown in an embodiment of the specification.

[0040] Figure 4 It is a normalized diagram of a DAC output value, output power and coupler forward power acquisition signal shown in an embodiment of the specification.

[0041] Figure 5 It is a flow chart of a DLP nonlinear correction method for a radio frequency power system according to an embodiment of the specification.

[0042] Figure 6 It is a block diagram of a DLP nonlinear correction device for a radio frequency power supply system according to an embodiment of the specification.

[0043] Figure 7 It is a block diagram of another DLP nonlinear correction device for a radio frequency power supply system according to an embodiment of the specification. DETAILED DESCRIPTION

[0044] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0045] The specific implementation of the present disclosure is described in detail below in conjunction with the accompanying drawings. It should be understood that the specific implementation described herein is only used to illustrate and explain the present disclosure, and is not used to limit the present disclosure.

[0046] The present invention provides a DLP nonlinear correction method for a radio frequency power supply system. Figure 5 The present invention is a flow chart of a method for DLP nonlinear correction of a radio frequency power system according to an embodiment. Specifically, the method includes:

[0047] In step S11, determining whether the RF power system is in an amplitude modulation mode according to the acquired working mode information of the RF power system;

[0048] In the disclosed embodiment, except for the power amplifier, the DDS source and attenuator can still be approximated as a linear system, but the BAP70Q signal link has unstable conditions such as slow impulse response, overshoot, oscillation, etc. Therefore, in the DLP (Dual Level Pulsing) application, in order to reduce the output power fluctuation caused by power level switching, the system input and output can be defined as the following functional relationship:

[0049] P O =G(P i )·Att·k·α

[0050] Among them, G(p i ) is the amplifier gain, which is a function of input power and can be found in Figure 1-3 , Att is the total attenuation of the signal link, which is approximately a linear coefficient. k is the output amplitude coefficient of the DDS source, which is a linear coefficient and can be fixed to 1. α is the maximum amplitude of the DDS output, and the unit can be mA. For example, the value can be 10. For the convenience of calculation, it can be normalized to 1.

[0051] Among them, working mode: the RF power system can be set to different working modes according to its application requirements, such as amplitude modulation mode, frequency modulation mode, phase modulation mode, etc. Amplitude modulation mode: In this mode, the output amplitude (i.e. power) of the RF power supply changes according to the input signal or preset program.

[0052] In the disclosed embodiment, the RF power supply system has an operating mode selection function, and the current operating mode can be determined by detecting or reading the internal state of the system or the external control signal. The system first checks its operating mode information to determine whether it is in amplitude modulation mode.

[0053] For example: Assume that the RF power system selects the working mode by receiving an external control signal. When receiving the control signal indicating the amplitude modulation mode, the system confirms that it is in the amplitude modulation mode and prepares for subsequent power regulation operations.

[0054] In step S12, when the RF power system is in amplitude modulation mode, obtaining a currently selected expected output power value of the RF power system;

[0055] The expected output power value is the power value that the RF power supply should output as set by the user or the system, and is the target of the system power regulation. In the amplitude modulation mode, the RF power supply system needs to adjust its output power according to the expected output power value set by the user or the preset program.

[0056] In step S13, according to the currently selected expected output power value, the coefficient table corresponding to the power level of the expected output power value is queried to obtain the target value of the output amplitude coefficient, wherein the coefficient table corresponding to different power levels stores the corresponding relationship between the expected output power value and the value of the output amplitude coefficient through different bit widths to be compatible with the attenuation characteristics of the DAC attenuation module in the RF power supply system and the DDS source amplitude modulation output;

[0057] Among them, the coefficient table stores the corresponding relationship between the expected output power value and the output amplitude coefficient. The output amplitude coefficient is used to adjust the coefficient of the output amplitude of the RF power supply. By changing this coefficient, the output power can be changed. The DAC attenuation module is an attenuation module after the digital analog converter (DAC), which is used to further adjust the amplitude of the RF signal. The DDS source is a direct digital synthesis (DDS) source, which is used to generate the frequency, phase and amplitude of the RF signal.

[0058] In the disclosed embodiment, the RF power supply system generally includes multiple power levels, and each power level corresponds to a coefficient table. These coefficient tables are designed and stored according to the attenuation characteristics of the DAC attenuation module and the amplitude modulation output capability of the DDS source. The system searches the coefficient table under the corresponding power level according to the currently selected expected output power value and obtains the corresponding output amplitude coefficient. This coefficient is used to subsequently adjust the output power of the RF power supply.

[0059] For example: Assume that the RF power system has three power levels, and each level corresponds to a coefficient table. When the expected output power value is 100W, the system determines that this value belongs to the second power level and searches the coefficient table corresponding to the second power level. In the table, the system finds that the output amplitude coefficient corresponding to 100W is 1.2 (only an example value), which is used for subsequent adjustment of the output power.

[0060] In step S14, the target expected output power value of the RF power supply system is determined according to the target value of the output amplitude coefficient, the power amplifier gain, and the total attenuation of the signal link.

[0061] Among them, power amplifier gain: the gain of the power amplifier (PA), which indicates the degree of amplification of the input signal by the PA. Total signal chain attenuation: the sum of all attenuations experienced by the RF signal from the DDS source to the PA output.

[0062] In the disclosed embodiment, the target expected output power value of the RF power system is calculated based on the obtained output amplitude coefficient, power amplifier gain, and the sum of signal link attenuation. This step takes into account the attenuation and amplification of the RF signal during transmission to ensure that the system can output the expected output power value set by the user or a preset program.

[0063] For example: Assume that the power amplifier gain is 2 (i.e., the signal is amplified 2 times) and the total signal link attenuation is 0.5 (i.e., the signal loses half of its power during transmission). The output amplitude coefficient obtained in step S13 is 1.2. The system uses these parameters to calculate and obtain the target expected output power value. For example, if the original expected output power value is 100W, after calculation, the system may determine that the actual power value to be output is 120W (only an example value) to ensure that after taking into account the power amplifier gain and signal link attenuation, the expected output power value of the user or the preset program can still be met.

[0064] The above technical solution intelligently identifies whether the system is in amplitude modulation mode by obtaining the working mode information of the RF power supply system. After confirming that the system is in amplitude modulation mode, the currently selected expected output power value is obtained to ensure the accuracy of subsequent power adjustment, so that the system can adjust the output power according to actual needs. According to the currently selected expected output power value, the corresponding power level coefficient table is queried to obtain the target value of the output amplitude coefficient. The coefficient table corresponding to different power levels uses different bit widths to store the corresponding relationship between the expected output power value and the output amplitude coefficient. The attenuation characteristics of the DAC attenuation module in the RF power supply system and the amplitude modulation output capability of the DDS source are fully considered to ensure accurate power regulation at different power levels. Not only is the output power adjustment accuracy of the RF power supply system in amplitude modulation mode improved, but also the effective compatibility of the DAC attenuation module and the DDS source amplitude modulation output is achieved. The system is able to meet the needs of various complex application scenarios while ensuring the stability of the output power. According to the target value of the output amplitude coefficient, the power amplifier gain, and the sum of the signal link attenuation, the target expected output power value of the RF power supply system is determined. It ensures that the system can work stably according to the expected output power, and improves the overall performance and reliability of the system. In summary, by intelligently identifying the working mode, accurately obtaining the expected output power value, efficiently using the power level coefficient table, and determining the target expected output power value, the output power of the RF power supply system in the amplitude modulation mode is accurately adjusted. At the same time, when realizing the digital signal processing DSP (Digital Signal Processing) / multi-level pulse MLP (Multi-Level Pulsing) function, in conjunction with the slow decrease and increase of the DDS source output, open-loop control, delayed closed-loop, multiple tuning, and coefficient register switching can be used to realize the DSP\MLP function with arbitrary power settings.

[0065] In a possible implementation, the coefficient table corresponding to different power levels is constructed in the following manner:

[0066] Determine each of the power levels and corresponding power ranges supported by the radio frequency power system;

[0067] The power range is the interval between the minimum and maximum values ​​of the output power within each power level.

[0068] In the disclosed embodiment, according to the design and application requirements of the RF power system, it is first determined how many power levels the system can support and the power range corresponding to each level. This can provide an in-depth understanding of the system hardware (such as power amplifiers, attenuators, etc.) and software (such as control algorithms).

[0069] For example: Assume that the RF power system supports three power levels: low, medium, and high. The power range corresponding to the low level is 0-3kW, the medium level is 3k-10kW, and the high level is 10-24kW.

[0070] Determine a corresponding relationship between each of the power levels and the maximum power value according to the maximum power value of the RF power system, the attenuation characteristics of the DAC attenuation module, and the output range of the DDS source;

[0071] Among them, the maximum power value is the maximum power that the RF power system can output. The corresponding relationship is the mapping relationship between the power level and the maximum power value, which is used to determine the ratio or range of each power level relative to the maximum power value.

[0072] In the disclosed embodiment, based on the maximum power value of the RF power system, the attenuation characteristics of the DAC attenuation module, and the output range of the DDS source, the corresponding relationship between each power level and the maximum power value is determined by calculation or experiment. For example, the corresponding relationship can be determined by calculating a ratio.

[0073] Determine, according to the correspondence between the power level and the maximum power value, a value of an output amplitude coefficient corresponding to the output power value within a power range corresponding to each of the power levels;

[0074] In the disclosed embodiment, for each power level, the value of the corresponding output amplitude coefficient is determined by calculation or experiment according to the output power value within the level and the determined corresponding relationship. This usually involves accurate measurement and adjustment of the system output characteristics.

[0075] The values ​​of the output amplitude coefficient corresponding to the output power value in each power level are made into a coefficient table according to the bit width of the corresponding power level, wherein the higher the power level, the larger the corresponding bit width.

[0076] Bit width: In a digital system, it refers to the number of binary bits occupied by a value, which determines the maximum and minimum values ​​that the value can represent.

[0077] In the disclosed embodiment, a coefficient table is prepared based on the value of the output amplitude coefficient corresponding to the output power value in each power level and the bit width corresponding to the level (usually related to the resolution and accuracy of the system). The larger the bit width, the wider the output power range that can be accurately adjusted at the power level.

[0078] For example: Assume that the bit width corresponding to the low level is 8 bits (i.e. 256 different output amplitude coefficient values), the middle level is 10 bits (i.e. 1024 different values), and the high level is 16 bits. Then, for each output power value in the low level, an 8-bit output amplitude coefficient value corresponding to it can be found in the coefficient table; similarly, the same is true for the middle and high levels.

[0079] In one possible implementation, the coefficient table for the power level of 3 kW stores the correspondence between the expected output power value and the value of the output amplitude coefficient through a 10-bit bit width, and the coefficient table for the power level of 10 to 24 kW stores the correspondence between the expected output power value and the value of the output amplitude coefficient through a 16-bit bit width.

[0080] Among them, the linear coefficient is defined as: G Att =Att·k, then P O =G(P i )·Att·k·α, then according to Figure 4 Make a reverse lookup table to get G Att =LUT(P o ), in DLP\MLP applications, in order to keep Att constant, the maximum output power value p is defined max and other power values ​​p0, p1, ..., then:

[0081]

[0082]

[0083]

[0084]

[0085] …

[0086] In order to support the linear change regulation of system output during PID regulation, keeping k unchanged, we have:

[0087]

[0088] Therefore, the lookup table can be made 16 bits wide, compatible with DAC attenuation (16 bits) and DDS amplitude modulation output (taking the upper 10 bits as the DDS amplitude modulation coefficient).

[0089] Among them, the nonlinearity of power amplification can be converted into linear adjustment of DDS by using a lookup table. There must be nonlinearity in the circuit and attenuation, which does not affect the feasibility, because the coefficient only minimizes the error of the set power value and plays the role of "coarse adjustment" of power. "Fine adjustment" is completed in the PID fine adjustment stage. At the same time, the "repeatability" of the lookup table must be guaranteed, that is, the power value and the DAC\DDS coefficient may not correspond completely, but the values ​​measured under the same conditions do not have too much deviation, thereby improving the accuracy of control.

[0090] In a possible implementation, the relationship between the value of the output amplitude coefficient and the power level of the expected output power value is:

[0091]

[0092] Among them, k i is the value of the output amplitude coefficient of the amplitude modulation mode, p O is the expected output power value, α is the maximum output amplitude, G(P i ) is the power amplifier gain, and Att is the total attenuation of the signal link.

[0093] In one possible implementation, the method further includes:

[0094] When the RF power supply system is in a dual-channel synthesis mode, a target value of the output amplitude coefficient is determined according to a phase difference between the dual channels, wherein the dual-channel synthesis mode is a synthesis of a sensor channel and an ADC signal acquisition link channel;

[0095] Among them, the dual-channel synthesis mode: here refers to the RF power system running two channels (sensor channel and ADC signal acquisition link channel) at the same time and synthesizing their output signals.

[0096] Phase difference: The relative displacement of two or more signals in time, usually measured in degrees or time. In dual-channel synthesis, the phase difference affects the amplitude and phase of the synthesized signal.

[0097] Target value of output amplitude coefficient: In dual-channel synthesis mode, in order to obtain the desired synthesized signal amplitude, the value of the output amplitude coefficient needs to be adjusted.

[0098] In the disclosed embodiment, when the RF power system is in dual-channel synthesis mode, the output signals of the sensor channel and the ADC signal acquisition link channel are synthesized. Since there may be a phase difference between the two channels, this will affect the amplitude of the synthesized signal. In order to obtain the desired synthesized signal amplitude, the output amplitude coefficient needs to be adjusted according to the phase difference. This usually involves a deep understanding of the principle of signal synthesis and precise control of the system hardware and software characteristics.

[0099] For example: Assume that the output signals of the sensor channel and the ADC signal acquisition link channel have a 90-degree phase difference in the time domain. According to the principle of signal synthesis, when the phase difference between the two signals is 90 degrees, their synthesized signal amplitude will be twice the root of the two signal amplitudes (assuming that the amplitudes of the two signals are equal). Therefore, in order to obtain the desired synthesized signal amplitude, it may be necessary to adjust the output amplitude coefficient to one-half of the original value (i.e., multiply by 0.707) to compensate for the amplitude change caused by the phase difference.

[0100] The target expected output power value of the radio frequency power supply system is determined according to the target value of the output amplitude coefficient, the power amplifier gain and the total attenuation of the signal link.

[0101] Similarly, according to the P mentioned in the above embodiment O =G(P i )·Att·k·α can be used to derive the target expected output power value.

[0102] In a possible implementation, when the RF power supply system is in a dual-channel synthesis mode, the target value of the output amplitude coefficient is determined by the following formula:

[0103]

[0104] Among them, k j is the target value of the output amplitude coefficient of the dual-channel synthesis mode, is the phase difference between the two channels, and cos is the cosine function in mathematical calculation.

[0105] The present disclosure also provides a DLP nonlinear correction device for a radio frequency power supply system, see Figure 6 As shown, including:

[0106] A first determination module 210 is configured to determine whether the RF power system is in an amplitude modulation mode according to the acquired working mode information of the RF power system;

[0107] An acquisition module 220 is configured to acquire a currently selected expected output power value of the RF power system when the RF power system is in an amplitude modulation mode;

[0108] The query module 230 is configured to query the coefficient table corresponding to the power level of the expected output power value according to the currently selected expected output power value, and obtain the target value of the output amplitude coefficient, wherein the coefficient table corresponding to different power levels stores the corresponding relationship between the expected output power value and the value of the output amplitude coefficient through different bit widths, so as to be compatible with the attenuation characteristics of the DAC attenuation module in the RF power supply system and the DDS source amplitude modulation output;

[0109] The second determination module 240 is configured to determine a target expected output power value of the RF power supply system according to a target value of the output amplitude coefficient, a power amplifier gain, and a total attenuation of the signal link.

[0110] In a possible implementation, the query module 230 is configured to construct a coefficient table corresponding to different power levels in the following manner:

[0111] Determine each of the power levels and corresponding power ranges supported by the radio frequency power system;

[0112] Determine a corresponding relationship between each of the power levels and the maximum power value according to the maximum power value of the RF power system, the attenuation characteristics of the DAC attenuation module, and the output range of the DDS source;

[0113] Determine, according to the correspondence between the power level and the maximum power value, a value of an output amplitude coefficient corresponding to the output power value within a power range corresponding to each of the power levels;

[0114] The values ​​of the output amplitude coefficient corresponding to the output power value in each power level are made into a coefficient table according to the bit width of the corresponding power level, wherein the higher the power level, the larger the corresponding bit width.

[0115] In one possible implementation, the coefficient table for the power level of 3 kW stores the correspondence between the expected output power value and the value of the output amplitude coefficient through a 10-bit bit width, and the coefficient table for the power level of 10 to 24 kW stores the correspondence between the expected output power value and the value of the output amplitude coefficient through a 16-bit bit width.

[0116] In a possible implementation, the relationship between the value of the output amplitude coefficient and the power level of the expected output power value is:

[0117]

[0118] Among them, k i is the value of the output amplitude coefficient of the amplitude modulation mode, p Ois the expected output power value, α is the maximum output amplitude, G(P i ) is the power amplifier gain, and Att is the total attenuation of the signal link.

[0119] In a possible implementation, the first determining module 210 is configured to:

[0120] When the RF power supply system is in a dual-channel synthesis mode, a target value of the output amplitude coefficient is determined according to a phase difference between the dual channels, wherein the dual-channel synthesis mode is a synthesis of a sensor channel and an ADC signal acquisition link channel;

[0121] The target expected output power value of the radio frequency power supply system is determined according to the target value of the output amplitude coefficient, the power amplifier gain and the total attenuation of the signal link.

[0122] In a possible implementation, when the RF power supply system is in a dual-channel synthesis mode, the target value of the output amplitude coefficient is determined by the following formula:

[0123]

[0124] Among them, k j is the target value of the output amplitude coefficient of the dual-channel synthesis mode, is the phase difference between the two channels, and cos is the cosine function in mathematical calculation.

[0125] The present disclosure also provides a computer-readable storage medium on which a computer program is stored. When the program is executed by a processor, the steps of the method described in any one of the aforementioned embodiments are implemented.

[0126] The present disclosure also provides an electronic device, including:

[0127] a memory having a computer program stored thereon;

[0128] A processor is used to execute the computer program in the memory to implement the steps of the method in any one of the aforementioned embodiments.

[0129] Figure 7The DLP nonlinear correction device 100 for the RF power system shown includes: a processor 1001 and a memory 1003. The processor 1001 and the memory 1003 are connected, such as through a bus 1002. Optionally, the DLP nonlinear correction device 100 for the RF power system may also include a communication component 1004, which may be used for data interaction between the device 100 and other devices, such as data transmission and / or data reception. It should be noted that in actual scheduling, the communication component 1004 is not limited to one, and the structure of the DLP nonlinear correction device 100 for the RF power system does not constitute a limitation on the embodiments of the present application.

[0130] Processor 1001 may be a CPU (Central Processing Unit), a general purpose processor, a DSP (Digital Signal Processor), an ASIC (Application Specific Integrated Circuit), an FPGA (Field Programmable Gate Array) or other programmable logic devices, transistor logic devices, hardware components or any combination thereof. It may implement or execute various exemplary logic blocks, modules and circuits described in conjunction with the disclosure of this application. Processor 1001 may also be a combination that implements computing functions, such as a combination of one or more microprocessors, a combination of a DSP and a microprocessor, etc.

[0131] The bus 1002 may include a path to transmit information between the above components. The bus 1002 may be a PCI (Peripheral Component Interconnect) bus or an EISA (Extended Industry Standard Architecture) bus. The bus 1002 may be divided into an address bus, a data bus, a control bus, etc. For ease of representation, Figure 7 Only one thick line is used in the diagram, but this does not mean that there is only one bus or only one type of bus.

[0132] The memory 1003 can be a ROM (Read Only Memory) or other types of static storage devices that can store static information and instructions, a RAM (Random Access Memory) or other types of dynamic storage devices that can store information and instructions, or an EEPROM (Electrically Erasable Programmable Read Only Memory), a CD-ROM (Compact Disc Read Only Memory) or other optical disk storage, optical disk storage (including compressed optical disk, laser disk, optical disk, digital versatile disk, Blu-ray disk, etc.), magnetic disk storage medium, other magnetic storage devices, or any other medium that can be used to carry or store program code and can be read by a computer, without limitation herein.

[0133] The memory 1003 is used to store program codes for executing the embodiments of the present disclosure, and the execution is controlled by the processor 1001. The processor 1001 is used to execute the program codes stored in the memory 1003 to implement the steps shown in the embodiment of the DLP nonlinear correction method for the RF power system.

[0134] The embodiment of the present disclosure also provides a computer-readable storage medium having program code stored thereon. When the program code is executed by a processor, the steps and corresponding contents of the aforementioned embodiment of the DLP nonlinear correction method for the RF power system can be implemented.

[0135] The preferred embodiments of the present disclosure are described in detail above in conjunction with the accompanying drawings; however, the present disclosure is not limited to the specific details in the above embodiments; within the technical concept of the present disclosure, various changes, modifications, substitutions and variations may be made to these embodiments, and these changes, modifications, substitutions and variations all fall within the protection scope of the present disclosure.

[0136] It should also be noted that the various specific technical features described in the above specific embodiments can be combined in any appropriate manner without contradiction, and they should also be regarded as the contents disclosed in this disclosure. In order to avoid unnecessary repetition, this disclosure will not further describe various possible combinations. The technical scope of this application is not limited to the contents in the specification, and its technical scope must be determined according to the scope of the claims.

Claims

1. A DLP nonlinear correction method for a radio frequency power supply system, characterized in that: The method comprises: Determining whether the RF power system is in an amplitude modulation mode according to the acquired working mode information of the RF power system; When the radio frequency power supply system is in an amplitude modulation mode, obtaining a currently selected expected output power value of the radio frequency power supply system; According to the currently selected expected output power value, query the coefficient table corresponding to the power level of the expected output power value to obtain the target value of the output amplitude coefficient, wherein the coefficient table corresponding to different power levels stores the corresponding relationship between the expected output power value and the value of the output amplitude coefficient through different bit widths to be compatible with the attenuation characteristics of the DAC attenuation module in the RF power supply system and the DDS source amplitude modulation output; The target expected output power value of the radio frequency power supply system is determined according to the target value of the output amplitude coefficient, the power amplifier gain and the total attenuation of the signal link.

2. The DLP nonlinear correction method for a radio frequency power supply system according to claim 1, characterized in that: The coefficient table corresponding to the different power levels is constructed in the following way: Determine each of the power levels and corresponding power ranges supported by the radio frequency power system; Determine a corresponding relationship between each of the power levels and the maximum power value according to the maximum power value of the RF power system, the attenuation characteristics of the DAC attenuation module, and the output range of the DDS source; Determine, according to the correspondence between the power level and the maximum power value, a value of an output amplitude coefficient corresponding to the output power value within a power range corresponding to each of the power levels; The values ​​of the output amplitude coefficient corresponding to the output power value in each power level are made into a coefficient table according to the bit width of the corresponding power level, wherein the higher the power level, the larger the corresponding bit width.

3. The DLP nonlinear correction method for a radio frequency power supply system according to claim 2, characterized in that: The coefficient table for the power level of 3kw stores the correspondence between the expected output power value and the output amplitude coefficient value through a 10-bit bit width, and the coefficient table for the power level of 10 to 24kw stores the correspondence between the expected output power value and the output amplitude coefficient value through a 16-bit bit width.

4. The DLP nonlinear correction method for a radio frequency power supply system according to claim 2, characterized in that: The relationship between the value of the output amplitude coefficient and the power level of the expected output power value is: Among them, k i is the value of the output amplitude coefficient of the amplitude modulation mode, p O is the expected output power value, α is the maximum output amplitude, G(P i ) is the power amplifier gain, and Att is the total attenuation of the signal link.

5. The DLP nonlinear correction method for a radio frequency power supply system according to any one of claims 1 to 4, characterized in that: The method further comprises: When the RF power supply system is in a dual-channel synthesis mode, a target value of the output amplitude coefficient is determined according to a phase difference between the dual channels, wherein the dual-channel synthesis mode is a synthesis of a sensor channel and an ADC signal acquisition link channel; The target expected output power value of the radio frequency power supply system is determined according to the target value of the output amplitude coefficient, the power amplifier gain and the total attenuation of the signal link.

6. The DLP nonlinear correction method for a radio frequency power supply system according to claim 5, characterized in that: When the RF power supply system is in dual-channel synthesis mode, the target value of the output amplitude coefficient is determined by the following formula: Among them, k j is the target value of the output amplitude coefficient of the dual-channel synthesis mode, is the phase difference between the two channels, and cos is the cosine function in mathematical calculation.

7. A DLP nonlinear correction device for a radio frequency power supply system, characterized in that: include: A first determination module is configured to determine whether the RF power system is in an amplitude modulation mode according to the acquired working mode information of the RF power system; an acquisition module, configured to acquire a currently selected expected output power value of the RF power system when the RF power system is in an amplitude modulation mode; A query module is configured to query a coefficient table corresponding to a power level of the expected output power value according to a currently selected expected output power value, and obtain a target value of the output amplitude coefficient, wherein the coefficient table corresponding to different power levels stores a corresponding relationship between the expected output power value and the value of the output amplitude coefficient through different bit widths, so as to be compatible with the attenuation characteristics of the DAC attenuation module in the RF power supply system and the DDS source amplitude modulation output; The second determination module is configured to determine a target expected output power value of the RF power supply system according to a target value of the output amplitude coefficient, a power amplifier gain, and a total attenuation of the signal link.

8. An electronic device, characterized in that: include: a memory having a computer program stored thereon; A processor, configured to execute the computer program in the memory to implement the steps of the method according to any one of claims 1 to 6.

9. A computer-readable storage medium having a computer program stored thereon, characterized in that: When the program is executed by a processor, the steps of the method described in any one of claims 1 to 6 are implemented.

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