Ring carrier and container comprising the same

Abstract

The invention relates to a ring carrier and a container comprising the same. The container of the present invention accommodates a ring carrier for supporting a ring provided in a substrate processing apparatus, and comprises: a housing in which an accommodation space is formed; a slot provided in the housing and having an insertion slot formed therein; and a block located in the insertion groove, where the block protrudes from the slot and extends to the ring carrier, and has a bearing surface for bearing a lower circumferential direction of the ring carrier, and a first inclined surface, where the first inclined surface is inclined to the lower circumferential direction of the ring carrier, and where the first inclined surface is inclined to the lower circumferential direction of the ring carrier. The first inclined surface is inclined upwards from the supporting surface in the normal direction of the ring carrier and has a diameter larger than the diameter of the arc of the ring carrier, and a boundary line between the supporting surface and the first inclined surface has a diameter at least equal to the diameter of the arc of the ring carrier.

Description

[0001] CROSS-REFERENCE TO RELATED APPLICATIONS

[0002] This application claims the benefit of Korean Patent Application No. 10-2023-0120083 filed on September 11, 2023, in the Korean Intellectual Property Office, the disclosure of which is incorporated herein by reference in its entirety. Technical Field

[0003] The present invention relates to a ring carrier and a container including the ring carrier. Background Art

[0004] The semiconductor device manufacturing process may include an etching process to remove a thin film formed on a substrate (eg, a wafer) using plasma. The etching process is performed by ions and / or radicals in the plasma colliding or reacting with the thin film on the substrate.

[0005] An apparatus for processing a substrate using plasma includes a process chamber, a support chuck (e.g., ESC) that supports the substrate in the process chamber and is connected to an RF power source, and a focus ring surrounding the periphery of the substrate located in the support chuck. The focus ring is installed to distribute high uniformity plasma on the surface of the substrate and is etched together with the substrate by the plasma.

[0006] When the substrate is repeatedly etched, the focus ring is also etched, so the shape of the focus ring gradually changes. As the shape of the focus ring changes, the direction in which ions and / or radicals enter the substrate changes, thereby changing the etching characteristics of the substrate. Therefore, if the etching process on the substrate is performed more than a predetermined number of times, or if the shape of the focus ring changes and falls outside the allowable range, the focus ring needs to be replaced.

[0007] The focus ring can be replaced by removing the used focus ring from the process chamber and installing an unused focus ring into the process chamber. The focus ring replacement can be performed by a transfer robot.

[0008] Meanwhile, the transfer of the focus ring may be performed by a transfer robot that transfers the substrate. Although the transfer robot transfers the focus ring to a predetermined position in the process chamber, since the position of the transfer robot may be offset from the correct position due to work error and / or repeated work, there is a risk that the focus ring may not be placed in the correct position when the focus ring is replaced. Summary of the invention

[0009] The problem to be solved by the present invention is to provide a ring carrier that facilitates alignment of a ring carrier supporting a ring (eg, a focus ring) when the ring (eg, a focus ring) is transferred to a container such as a Front Opening Unified Pod (FOUP).

[0010] Another problem to be solved by the present invention is to provide a container in which the alignment of the ring carrier can be facilitated when the rings are transferred to the container.

[0011] The technical objects of the present invention are not limited to the above-mentioned technical objects, and other technical objects not mentioned will be clearly understood by those skilled in the art from the following description.

[0012] In order to achieve the above-mentioned purpose, one aspect of the container of the present invention accommodates a ring carrier for supporting a ring set in a substrate processing device, and includes: a shell, in which a accommodating space is formed; a slot, which is set in the shell and has an insertion groove formed therein; and a block, which is located in the insertion groove, wherein the block protrudes from the slot and extends to the ring carrier, and has a supporting surface and a first inclined surface, the supporting surface is used to support the lower circumference of the ring carrier, the first inclined surface is inclined upward from the supporting surface in the normal direction of the ring carrier, and has a diameter greater than the diameter of the arc of the ring carrier, wherein a boundary line between the supporting surface and the first inclined surface has a diameter at least the same as the diameter of the arc of the ring carrier.

[0013] Another aspect of the container of the present invention comprises: a shell in which a receiving space is formed; a slot provided in the shell and having an insertion groove formed therein; a block located in the insertion groove and protruding from the slot; and a ring carrier supported on the block and supporting a ring provided in a substrate processing device, wherein the block comprises: a first extension portion extending in a clockwise direction or a counterclockwise direction in a shape extending along an arc of the ring carrier, a second extension portion extending in a direction opposite to the first extension portion and having a shorter length than the first extension portion, a coupling protrusion protruding toward the slot, and a concave groove (concave groove) extending in a direction opposite to the first extension portion. 4. The repairing kit for automotive dents, according to claim 1, wherein the second end of the foot stand comprises a through-hole, and the two foot pieces comprise two bosses, wherein the bosses comprise a through-hole, a screw bolt, and a nut. The bosses comprise a through-hole, a screw bolt, and a nut. The bosses comprise a through-hole, a screw bolt, and a nut. The bosses comprise a through-hole, a screw bolt, and a nut. The ring carrier comprises a ring support member having a diameter equal to a diameter of an arc of the ring carrier, and a boundary line between the supporting surface and the first inclined surface has the same diameter as the diameter of the arc of the ring carrier, and a second inclined surface and a key, the second inclined surface is inclined upward from the supporting surface to the top of the first inclined surface in a counterclockwise direction, the key is provided with a vertical surface perpendicular to the bottom surface on an opposite surface of the second inclined surface, wherein the second inclined surface of each of the first block and the second block is inclined upward in a counterclockwise direction within the housing to guide the ring carrier in the same direction, wherein the ring carrier includes a base, the ring is located on the base, the base has the same diameter as the boundary line, wherein the base has a keyway, the keyway is recessed from an edge toward a center, and the key is inserted into the keyway, wherein a bottom of the key has the same width as a bottom of the keyway, and a top of the key has a smaller width than a bottom of the keyway.

[0014] To achieve another object, one aspect of the ring carrier of the present invention is accommodated in a container and includes a base on which the ring is seated, wherein the base includes a keyway into which a key of the block is inserted, the keyway being formed on a circumferential surface.

[0015] Specific details of other embodiments are included in the detailed description and accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] These aspects and / or other aspects will become apparent and more easily understood from the following description of the embodiments in conjunction with the accompanying drawings, in which:

[0017] Figure 1 is a diagram showing a substrate processing apparatus provided with a container according to some embodiments of the present invention;

[0018] Figure 2 is a diagram showing a portion of the interior of a container according to some embodiments of the present invention;

[0019] Figure 3 is a plan view showing a ring carrier disposed in a container according to a first embodiment of the present invention;

[0020] Figure 4 It is shown Figure 3 A stereogram of area A;

[0021] Figure 5 It is shown Figure 3 A stereogram of region B;

[0022] Figure 6 is a plan view showing the base of a ring carrier aligned with the key of a container according to a first embodiment of the present invention;

[0023] Figure 7 is a diagram showing a block of a container according to a first embodiment of the present invention;

[0024] Figure 8 It is shown along Figure 7 Diagram of the II area and the ring carrier installed in the adjacent blocks.

[0025] Fig. 9 is a diagram showing a ring disposed on a ring carrier according to a first embodiment of the present invention;

[0026] Fig.10 is a diagram showing a ring of a comparative example; and

[0027] Fig.11 It is a figure which shows the container of a comparative example. DETAILED DESCRIPTION

[0028] Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. By referring to the embodiments described in detail below in conjunction with the accompanying drawings, the advantages and features of the present invention and the methods for achieving them will become clear. However, the present invention is not limited to the embodiments disclosed below and can be implemented in various different forms. This embodiment is only intended to ensure that the disclosure of the present invention is complete, and these embodiments are provided to fully inform those skilled in the art about the scope of the present invention, and the present invention is limited only by the scope of the claims. Throughout the specification, the same reference numerals represent the same elements.

[0029] The terms used herein are used to describe embodiments and are not intended to limit the present invention. As used herein, singular forms also include plural forms, unless otherwise specifically stated in the context. As used herein, "comprises" and / or "comprising" means that there are one or more other components, steps, operations and / or elements, or do not exclude addition.

[0030] Figure 1 2 is a diagram showing a substrate processing apparatus provided with a container according to some embodiments of the present invention. Figure 2 is a diagram showing a portion of the interior of a container according to some embodiments of the present invention. Figure 3 is a plan view showing a ring carrier arranged in a container according to a first embodiment of the present invention, Figure 4 It is shown Figure 3 A stereogram of region A, and Figure 5 It is shown Figure 3 A stereogram of area B. In addition, Figure 6 is a plan view showing the base of a ring carrier aligned with the key of a container according to a first embodiment of the present invention, Figure 7 : is a diagram showing a block of a container according to a first embodiment of the present invention. Figure 8 It is shown along Figure 7 Diagram of the II area and the ring carrier installed in the adjacent blocks.

[0031] also, Fig. 9 is a diagram showing a ring provided on a ring carrier according to a first embodiment of the present invention.

[0032] First, refer to Figures 1 to 3 , the container 100 may be disposed in a loading pod 11 of the substrate processing apparatus 10, and the ring 50 (e.g., a focus ring) may be accommodated in an accommodation space 111 of the container 100 while the ring 50 is supported on a ring carrier 200. In order to replace the ring 50, the ring 50 may be moved between the container 100 and the process chamber 14.

[0033] For example, if the substrate processing apparatus 10 includes a loading pod 11 and an index chamber 12, a transfer chamber 13, and a process chamber 14 (e.g., an etching chamber), the ring 50 can be transferred from a container 100 placed on the loading pod 11 to the process chamber 14 by transfer robots 12R and 13R of each of the index chamber 12 and the transfer chamber 13, or can be transferred from the process chamber 14 to the container 100.

[0034] Reference Figures 2 to 8 , the container 100 may include a housing 110, a slot 120, and a block 130 accommodating the ring 50. The ring carrier 200 may be accommodated in the container 100 while supporting the ring 50, or may be performed from the container 100 by the transfer robots 12R and 13R.

[0035] The housing 110 may have a structure in which a plurality of rings 50 are accommodated in a row up and down. For example, the housing 110 may have a box shape, and the accommodation space 111 may be formed therein. In addition, the housing 110 is provided with a door (not shown) so that the accommodation space 111 can be opened and closed.

[0036] The slots 120 may have a bar-like shape and may be provided in pairs facing each other on a horizontal plane and on both sides of the ring carrier 200. The slots 120 provided in pairs may be provided to be spaced apart from each other in a vertical direction within the housing 110 to correspond to the number of rings 50 / ring carriers 200. For example, five pairs of slots 120 may be provided to accommodate five rings 50 in the housing 110.

[0037] Reference Figure 2 , the slot 120 may be formed with an insertion slot 121, a guide slot 123, and a second bolt hole 125 so as to install the block 130. For example, the insertion slot 121 may have a groove structure in a horizontal direction 1 perpendicular to the longitudinal direction 2 of the slot 120, and the block 130 may be inserted. The guide slot 123 may be formed by a coupling protrusion 138 (see Figure 7 ) and may be formed on both sides of the insertion groove 121. The second bolt hole 125 may be formed at a position opposite to the first bolt hole 137H of the block 130 so that the block 130 may be bolted.

[0038] The block 130 may be inserted into the insertion slot 121 and / or coupled with bolts. Figure 3 As shown, as an example, the blocks 130 may be provided as a first block 130A disposed on the right side and a second block 130B disposed on the left side on a horizontal plane so as to form a pair facing each other in the housing 110 .

[0039] and Fig.11Unlike the comparative example block 120P of FIG. 1 , the block 130 may protrude from the slot 120 and extend to the ring carrier 200 . The block 130 may extend to the ring carrier 200 and directly support the ring carrier 200 at a position spaced apart from the slot 120 .

[0040] Reference Figure 7 The block 130 may include a support surface 131 , a first inclined surface 132 , a boundary line 133 , a key 134 , a first extending portion 135 , a second extending portion 136 , a groove 137 , and a coupling protrusion 138 .

[0041] The inner diameter of the bearing surface 131 is smaller than the diameter of the ring carrier 200 (see Figure 8 The support surface 131 may be formed into an arc, and its outer diameter may have a diameter D2 which is the same as the diameter of the arc of the ring carrier 200.

[0042] The first inclined surface 132 is a configuration that guides the position of the ring carrier 200 relative to the radial direction (which may include the horizontal direction 1 and the longitudinal direction 2) in the horizontal plane, and may be inclined upward from the support surface 131 in the normal direction (direction 3) of the ring carrier 200.

[0043] Reference Figure 8 , the first inclined surface 132 may have a diameter D3 greater than the diameter D2 of the ring carrier 200. In the first inclined surface 132 having a diameter D3 greater than the diameter D2 of the ring carrier 200, since the circle or arc connecting the first block 130A and the second block 130B actually becomes an arc greater than the ring carrier 200, the ring carrier 200 may be lowered from an area greater than the ring carrier 200 (an area having the diameter D3) to an area having the same diameter D2 as the ring carrier 200.

[0044] In other words, the ring carrier 200 can be lowered to the supporting surface 131 along the first inclined surface 132, so that since the ring carrier 200 can be installed according to the diameter D3 above the first inclined surface 132, which is larger than the diameter of the ring carrier 200, installation is easier than installing in an area matching the area of ​​the ring carrier 200.

[0045] And the boundary line 133 between the support surface 131 and the first inclined surface 132 may have at least the same diameter D2 as the arc of the ring carrier 200. As an example, the boundary line 133 has the same diameter D2 as the arc of the ring carrier 200, so when the ring carrier 200 descends along the first inclined surface 132, the ring carrier 200 around the boundary line 133 can be maintained in a stable position on the support surface 131 by being surrounded by the first inclined surface 132.

[0046] Reference Figure 6 and Figure 7 The key 134 is a configuration for aligning the ring carrier 200 with the block 130 , and may protrude upward from the support surface 131 to be inserted into a keyway 211 .

[0047] Reference Figure 5 , a top width H1 of the key 134 may be formed to be smaller than a bottom width H2 of the key groove 211 , and a bottom width H2 of the key 134 may be the same as a bottom width H2 of the key groove 211 .

[0048] Reference Figures 4 to 7 , the key 134 may include a second inclined surface 134S and a vertical surface 134L.

[0049] The second inclined surface 134S is a configuration for guiding the rotation angle of the ring carrier 200 within a horizontal plane (a plane of the horizontal direction 1 and the longitudinal direction 2), and for example, the position of the ring carrier 200 can be guided so that the ring carrier 200 remains in a correct position relative to the horizontal center axis C1 and / or the vertical center axis C2.

[0050] Reference Figure 6 , when the ring carrier 200 is installed, the second inclined surface 134S guides the key groove 211 in the counterclockwise direction and aligns it in the correct position. Here, reference numerals C1' and C2' show axes in which the ring carrier 200 is deformed from its correct position.

[0051] The second inclined surface 134S may be inclined upward in a counterclockwise direction or a clockwise direction from the support surface 131 to the top of the first inclined surface 132. Figures 4 to 6 , the second inclined surface 134S of each of the first block 130A and the second block 130B is inclined upward in the same direction within the housing 110, and may be inclined upward in a counterclockwise direction from the support surface 131 to the top of the first inclined surface 132. That is, the second inclined surface 134S may be inclined downward in a clockwise direction from the same height as the first inclined surface 132 to the support surface 131.

[0052] The second inclined surface 134S1 of the first block 130A and the second inclined surface 134S2 of the second block 130B may guide the ring carrier 200 in pairs. In other words, the second inclined surface 134S1 of the first block 130A may guide the right side of the ring carrier 200, and the second inclined surface 134S2 of the second block 130B may guide the left side of the ring carrier 200.

[0053] At this time, the vertical surface 134L (see FIG. 134B ) provided on the opposite side of each of the second inclined surface 134S1 of the first block 130A and the second inclined surface 134S2 of the second block 130B is Figure 5 ) can be set at relative positions in the horizontal plane. Figure 6 ( Figure 6 The bottom of the represents the forward direction, and Figure 6 The top of the block 130B indicates a rearward direction), the vertical surface 134L of the first block 130A may be located behind the second inclined surface 134S1, and the vertical surface 134L of the second block 130B may be located in front of the second inclined surface 134S2.

[0054] For example, within the housing 110 , the first block 130A and the second block 130B may be arranged at positions rotated 150° to 200° from each other on a horizontal plane, and may be arranged at positions rotated 180° from each other, for example.

[0055] Therefore, when the ring carrier 200 descends, the key groove 211 is inserted from the top of the key 134 and gradually descends in the clockwise direction along the second inclined surface 134S1 inclined downward in the clockwise direction to be guided to the correct position. In the process of guiding the key groove 211 in the clockwise direction, the key 134 is inserted into the key groove 211, and the ring carrier 200 can be aligned in the correct position. Figure 5 , a top width H1 of the key 134 is smaller than a bottom width H2 of the key slot 211 , so that the key 134 can be easily inserted into the key slot 211 .

[0056] The vertical surface 134L may have a shape perpendicular to the bottom surface on the opposite side of the second inclined surface 134S. The vertical surface 134L may contact or be opposite to the key groove 211, and may contact the key groove 211 in a state where the key 134 is inserted into the key groove 211 to prevent the ring carrier 200 mounted on the block 130 from shaking. That is, the vertical surface 134L may perform a stopper function to stop the movement of the ring carrier 200.

[0057] For example, the vertical surface 134L contacts the rear of the key groove 211 on the right side of the ring carrier 200 and contacts the front of the key groove 211 on the left side of the ring carrier 200 , so that yawing movement of the ring carrier 200 may be prevented.

[0058] Reference again Figure 3 , the first extension portion 135 may extend in a clockwise direction or a counterclockwise direction. The first extension portion 135 may extend in the same direction (eg, clockwise direction) in each of the first block 130A and the second block 130B.

[0059] For example, if the first block 130A is rotated 180 degrees, it can have the same shape as the second block 130B. Therefore, the first block 130A and the second block 130B can be provided as one injection molded product.

[0060] The second extending portion 136 may extend in an opposite direction to the first extending portion 135 , and when the first extending portion 135 extends in a clockwise direction, the second extending portion 136 may extend in a counterclockwise direction.

[0061] In other words, the first extension portion 135 and the second extension portion 136 may extend from the block 130 in opposite directions to expand the area of ​​the support ring carrier 200 .

[0062] In addition, the second extension portion 136 may be formed to be shorter in length than the first extension portion 135. Therefore, the second extension portion 136 is easily distinguished from the first extension portion 135, so that a worker can easily identify the block 130, making installation easy. When the block 130 is installed in the housing 110 in an eccentric form, it may have a structure that does not interfere with the end effector 40.

[0063] For example, the first and second extending portions 135 and 136 may have a length up to a region not exceeding the width D1 of the end effector 40 so as not to interfere with the end effector 40 in a state where the end effector 40 with the carrier ring carrier 200 is disposed.

[0064] In addition, in the first extension portion 135 and the second extension portion 136, the support surface 131 and the first inclined surface 132 may be formed in the same or similar manner so that the cross-sectional area of ​​the support ring carrier 200 is expanded. And the key 134 may be formed on any one of the first extension portion 135 or the second extension portion 136. For example, the key 134 may be formed on the first extension portion 135.

[0065] At the same time, refer to Figure 3 , the positions of the first block 130A and the second block 130B are eccentric to the horizontal center axis C1, and the lengths of the first extension portion 135 and the second extension portion 136 are different, but not limited thereto. As another example, the first extension portion 135 and the second extension portion 136 may be arranged not eccentric to the horizontal center axis C1 in the horizontal direction 1, and various modified examples, such as being formed to have the same length, are possible.

[0066] The groove 137 may extend from one side where the support surface 131 and the first inclined surface 132 are located to the other side (see Figure 3The first bolt hole 137H may be formed in the groove 137. The first bolt hole 137H penetrates from the groove 137 toward the slot 120, that is, penetrates in the direction in which the groove 137 is formed, so that the slot 120 and the block 130 are connected by bolts.

[0067] The coupling protrusion 138 may protrude toward the slot 120. As an example, the coupling protrusion 138 may be provided in pairs on both sides based on the direction in which the block 130 is inserted into the insertion groove 121. The coupling protrusion 138 may have a length in the horizontal direction 1 within the horizontal plane so that it may be slidably coupled to the guide groove 123 of the slot 120.

[0068] Hereinafter, the ring carrier accommodated in the container 100 of the present embodiment will be described with reference to the drawings.

[0069] Reference Figure 3 and Fig. 9 The ring carrier 200 supporting the ring 50 can be moved by the transfer robots 12R and 13R equipped with the end effector 40 (see Figure 1 ) moves between the container 100 and the process chamber 14. When the ring 50 is supported, the ring carrier 200 may be accommodated in the container 100.

[0070] The ring carrier 200 may include a base 210 and fingers 220 .

[0071] The base 210 may have an annular shape and may have the same diameter as the boundary line 133 of the block 130, and the ring 50 may be located on the top. In the base 210, a key groove 211 into which the key 134 is inserted may be formed on the circumferential surface of the base 210 so that the ring carrier 200 is not stuck on the key 134, and when the ring carrier 200 is lowered in the direction of the block 130, the position of the ring carrier 200 is guided. That is, the key groove 211 into which the key 134 is inserted may be formed on the circumferential surface of the base 210, and the key groove 211 may be formed as a groove structure from the edge of the base 210 toward the center.

[0072] In addition, the base 210 may be formed with an expansion region 210A whose area expands inwardly to allow vacuum suction of the end effector 40 to be performed. As an example, three expansion regions 210A are shown, but it may be modified according to the structure / shape of the end effector 40.

[0073] The finger 220 supports the ring 50 , and may be provided in plurality spaced apart from each other along the circumferential direction of the base 210 , and may be provided with guide protrusions 221 and 222 .

[0074] The guide protrusions 221 and 222 may protrude to contact or oppose the inner circumferential surface of the ring 50 , and the flat area of ​​the ring 50 may be aligned at a correct position by the guide protrusions 221 and 222 .

[0075] For example, in any one of the plurality of fingers 220, the guide protrusion 222 may form a straight portion on a horizontal plane, rather than a circumference, and may correspond to a flat area of ​​the ring 50. The remaining guide protrusions 221 may form an arc having the same diameter as the inner diameter of the ring 50, and may correspond to a circular area of ​​the ring 50.

[0076] The ring carrier 200 can be aligned with the flat area position of the ring 50 by the guide protrusion 222, and can be aligned at the correct position in the radial direction (front-to-back and / or left-to-right direction) by the first inclined surface 132, and can be aligned at the correct position by the keyway 211 without being deformed relative to the horizontal center axis C1 / vertical center axis C2.

[0077] Therefore, in the ring carrier 200 of the present embodiment, even if the pin 131P formed in the housing 110P of the container 100P of the comparative example is omitted, the ring 50 and / or the ring carrier 200 can be aligned, thereby being compatible with the embodiment of the present invention. Fig.10 Unlike the ring 50R of the comparative example, the through hole 50H into which the pin 131P is inserted may be omitted.

[0078] Therefore, the ring carrier 200 and the container 100 of the present embodiment prevent the use period of the ring 50 from being reduced due to etching and / or damage around the through hole 50H formed in the ring 50R of the comparative example.

[0079] Hereinafter, a ring and a container of a comparative example will be described with reference to the drawings.

[0080] Fig.10 is a diagram showing a ring of a comparative example, and Fig.11 It is a figure which shows the container of a comparative example.

[0081] Reference Fig.10 and Fig.11 In the ring 50R of the comparative example, the through hole 50H may be formed to be inserted by the pin 131P of the block 130P installed in the slot 120P, so that the position is aligned when accommodated in the container 100P of the comparative example.

[0082] The through hole 50H has a structure penetrating the ring 50R, and the ring 50R surrounding the through hole 50H is formed to have a narrow width. Therefore, when the ring 50R is etched, the ring 50R surrounding the through hole 50H may be easily damaged.

[0083] On the other hand, since the ring 50 accommodated in the container 100 of the present embodiment does not need to be aligned with the pin 131P, the through hole 50H can be omitted and the usage time of the ring 50 can be extended.

[0084] Although the embodiments of the present invention have been described with reference to the above and the accompanying drawings, it will be appreciated by those skilled in the art that the present invention can be practiced in other specific forms without changing the technical spirit or essential features. Therefore, the above embodiments should be understood to be illustrative in all aspects and not restrictive.

[0085] Reference numerals

[0086] 10: Substrate processing device

[0087] 11: Loading pod

[0088] 12: Indexing chamber

[0089] 50: Ring

[0090] 100: Container

[0091] 110: Shell

[0092] 120: Slot

[0093] 130: Block

[0094] 200: Ring carrier

[0095] 210: Base

[0096] 220: Finger

Claims

1. A container for accommodating a ring carrier for supporting a ring disposed in a substrate processing device, the container comprising: a housing, wherein a receiving space is formed in the housing; a slot disposed in the housing and having an insertion groove formed therein; as well as block, located in the insertion slot, Among them, the block, protrudes from the slot and extends to the ring carrier, and having a supporting surface and a first inclined surface, the supporting surface being used to support the lower circumference of the ring carrier, the first inclined surface being inclined upward from the supporting surface in the normal direction of the ring carrier and having a diameter greater than the diameter of the arc of the ring carrier, Therein, a boundary line between the support surface and the first inclined surface has a diameter at least the same as a diameter of the arc of the ring carrier.

2. The container according to claim 1, wherein The block also includes: A key projects upwardly from the support surface.

3. The container according to claim 2, wherein: The keys include: The second inclined surface is inclined upward from the support surface in a clockwise direction or a counterclockwise direction.

4. The container according to claim 3, wherein: The key is at the same height as the top of the first inclined surface.

5. The container according to claim 3, wherein: The blocks are provided as a first block and a second block, the first block and the second block face each other in the housing and form a pair to support both sides of the ring carrier, The second inclined surface of each of the first block and the second block is inclined upward in the same direction within the housing.

6. The container according to claim 5, wherein The key further includes a vertical surface that is perpendicular to the bottom surface on a surface opposite to the second inclined surface.

7. The container according to claim 6, wherein: The first block and the second block are disposed at positions rotated 150° to 200° from each other in a horizontal plane within the housing.

8. The container according to claim 3, wherein: The block also includes a first extension portion extending in a clockwise or counterclockwise direction along the arc of the ring carrier.

9. The container according to claim 8, wherein The block also includes: The second extending portion extends in a direction opposite to the first extending portion and has a shorter length than the first extending portion.

10. The container according to claim 9, wherein The first extension portion and the second extension portion extend in length to a region not exceeding a width of the end effector so as not to interfere with the end effector in a state where the end effector carrying the ring carrier is disposed.

11. The container according to claim 1, wherein The block has a groove formed concavely from one side where the support surface and the first inclined surface are located to the other side.

12. The container according to claim 11, wherein The block has a first bolt hole penetrating from the groove in the direction of the slot, Wherein, the narrow slot has a second bolt hole opposite to the first bolt hole.

13. The container according to claim 1, wherein: The block further includes a coupling protrusion protruding toward the slot, Wherein, the narrow slot further comprises a guide groove, and the coupling protrusion can be slidably inserted into the guide groove.

14. The container according to claim 2, wherein: The ring carrier comprises a base on which the ring is located, the base having the same diameter as the borderline, The base has a keyway on a circumferential surface, and the key is inserted into the keyway.

15. A container comprising: a housing, wherein a receiving space is formed in the housing; a slot disposed in the housing and having an insertion groove formed therein; a block located in the insertion slot and protruding from the slot; as well as a ring carrier supported on the block and supporting a ring disposed in the substrate processing device, Wherein, the block includes: The first extension portion extends in a clockwise or counterclockwise direction in a shape extending along the arc of the ring carrier, a second extending portion extending in a direction opposite to the first extending portion and having a shorter length than the first extending portion, a coupling protrusion, protruding toward the slot, A groove, which is concave in the direction from one side to the other, and a first bolt hole penetrating from the recess in the direction of the slot; wherein the first extension portion and the second extension portion extend in length to a region not exceeding a width of the end effector so as not to interfere with the end effector in a state where the end effector carrying the ring carrier is disposed therein, wherein the narrow slot has a second bolt hole opposite to the first bolt hole, and a guide groove, and the coupling protrusion can be slidably inserted into the guide groove, wherein the blocks are provided as a first block and a second block, the first block and the second block face each other in the housing and form a pair to support both sides of the ring carrier, Wherein, each of the first block and the second block: having a supporting surface and a first inclined surface, the supporting surface being used to support the lower circumference of the ring carrier, the first inclined surface being inclined upward from the supporting surface in the normal direction of the ring carrier and having a diameter greater than a diameter of an arc of the ring carrier, and a boundary line between the supporting surface and the first inclined surface having the same diameter as the diameter of the arc of the ring carrier, and having a second inclined surface and a key, the second inclined surface being inclined upward in a counterclockwise direction from the supporting surface to the top of the first inclined surface, the key being provided with a vertical surface perpendicular to the bottom surface on an opposite surface of the second inclined surface, wherein the second inclined surface of each of the first block and the second block is inclined upward in a counterclockwise direction within the housing to guide the ring carrier in the same direction, wherein the ring carrier includes a base on which the ring is located, the base having the same diameter as the boundary line, wherein the base has a keyway which is recessed from the edge toward the center and into which the key is inserted, Wherein, the bottom of the key has the same width as the bottom of the keyway, and the top of the key has a smaller width than the bottom of the keyway.

16. A ring carrier, contained in a container as claimed in any one of claims 2 to 10, comprising: a base on which the ring of the container according to any one of claims 2 to 10 is located, Wherein, the base includes a keyway into which a key of the container according to any one of claims 2 to 10 is inserted, and the keyway is formed on the circumferential surface.

17. The ring carrier of claim 16, further comprising: A plurality of fingers are spaced apart from each other along the circumference of the base and support the ring.

18. The ring carrier according to claim 17, wherein: The finger portion comprises: A guide protrusion protrudes to contact or oppose the inner circumferential surface of the ring.

19. The ring carrier according to claim 18, wherein: In one of the plurality of fingers, the guide protrusion does not form a circumference but forms a straight line portion on a horizontal plane.

Images