Platen groove cleaning device, cleaning method, and grinding apparatus

Abstract

The present application relates to a kind of platen groove cleaning device, cleaning method and grinding equipment, platen groove cleaning device includes: support frame, the top end of the axial direction of support frame is provided with arc slide rail, the plane where arc slide rail is located is perpendicular to the axial direction of support frame;Support arm, one end of support arm is movably connected to arc slide rail by sliding block, the other end of support arm extends and is arranged in the direction away from arc slide rail, the extension direction of support arm is parallel to the plane where arc slide rail is located, linear slide rail is arranged on the outer circumferential surface of support arm, the extension direction of linear slide rail is parallel to the extension direction of support arm;Scraper, movably arranged on linear slide rail;First control structure, for controlling support arm to slide along arc slide rail, so that the position of scraper corresponds to the position of the groove to be cleaned on platen;Second control structure, for controlling scraper to move along linear slide rail, to clean the groove to be cleaned on platen.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor product manufacturing, and in particular to a fixed plate groove cleaning device, a cleaning method and a grinding device. Background Art

[0002] During the use of the grinder, a lot of silicon slag and grinding powder will remain in the grooves of the lower platen, causing the grooves to have poor drainage effect and possibly causing scratches or fragments on the silicon wafer surface. Therefore, the cleaning of the grooves of the lower platen needs to be carried out regularly. The main cleaning methods currently are manual cleaning or high-pressure water flushing. Manual cleaning requires personnel to clean each groove with a handheld scraper, which is time-consuming and affects the utilization rate of the equipment. The manual cleaning effect may not be good and may not be completely cleaned. In addition, due to the certain depth of the grooves and the relatively compacted accumulation of silicon slag and grinding powder, high-pressure water alone cannot effectively clean the grooves. The grooves need to be cleaned in combination with mechanical methods to achieve better cleaning results. Summary of the Invention

[0003] In order to solve the above technical problems, the present invention provides a fixed plate groove cleaning device, a cleaning method and a grinding device to solve the problems of poor cleaning effect and low efficiency of the fixed plate groove.

[0004] In order to achieve the above-mentioned purpose, the technical solution adopted in the embodiment of the present invention is: a fixed plate groove cleaning device, comprising:

[0005] A support frame, wherein a curved slide rail is provided at the top end of the support frame in the axial direction, and the plane where the curved slide rail is located is perpendicular to the axial direction of the support frame;

[0006] A support arm, one end of the support arm is movably connected to the arcuate slide rail via a slider, the other end of the support arm is a free end and extends in a direction away from the arcuate slide rail, and the extension direction of the support arm is parallel to the plane where the arcuate slide rail is located, and a linear slide rail is provided on the outer peripheral surface of the support arm, and the extension direction of the linear slide rail is parallel to the extension direction of the support arm;

[0007] a scraper movably disposed on the linear slide rail;

[0008] a first control structure for controlling the support arm to slide along the arc-shaped slide rail so that the position of the scraper corresponds to the position of the groove to be cleaned on the fixed plate;

[0009] The second control structure is used to control the scraper to move along the linear slide rail to clean the grooves to be cleaned on the fixed plate.

[0010] Optionally, a third control structure is further included, which is arranged between the linear slide rail and the scraper. The third control structure is used to control the scraper to rotate, and the rotation plane of the scraper is parallel to the extension direction of the support frame, and the rotation plane of the scraper is parallel to the extension direction of the support arm.

[0011] Optionally, the third control structure includes a housing, a first driving portion disposed in the housing, and the first driving portion is connected to the scraper via a first transmission portion;

[0012] The housing is movably arranged on the linear slide rail via a base;

[0013] The first transmission part includes a gearbox, which is used to control the scraper to perform reciprocating motion between a first rotation state and a second rotation state, wherein the first rotation state includes the scraper rotating in a clockwise direction, and the second rotation state includes the scraper rotating in a counterclockwise direction.

[0014] Optionally, the plate groove cleaning device further includes a fourth control structure, the fourth control structure being used to control the scraper to perform lifting movement in a first direction, the first direction being parallel to the axial direction of the support frame;

[0015] The fourth control structure includes a second driving part and a second transmission part, the second driving part is arranged on the base, the second transmission part includes a gear arranged on the base, and a sawtooth structure arranged on the side of the shell, the sawtooth structure includes a plurality of sawteeth arranged along the first direction, and the sawteeth are meshed with the gear.

[0016] Optionally, the shell includes a first side surface and a second side surface arranged opposite to each other in the extension direction of the support arm, the serrated structure is provided on the first side surface, a scale is provided on the area of ​​the base close to the second side surface, the extension direction of the scale is parallel to the extension direction of the support frame, and a pointer pointing to the scale is provided on the second side surface.

[0017] Optionally, the support arm is rotatably connected to the slider via a rotation axis so as to be able to rotate in a plane parallel to the plane where the arc-shaped slide rail is located.

[0018] Optionally, the fixed plate groove cleaning device further includes an adjustment structure, wherein the adjustment structure is used to adjust the rotation angle of the support arm in a plane parallel to the plane where the arc-shaped slide rail is located;

[0019] The regulating structure comprises:

[0020] a laser level, disposed on the bottom surface of the support arm, for generating a reference line on the fixed plate to be cleaned, wherein the extension direction of the reference line is parallel to the extension direction of the support arm and the reference line coincides with the travel path of the scraper;

[0021] The processing part is used for controlling the support arm to rotate when the reference line and the groove to be cleaned on the fixed plate are offset so that the reference line coincides with the groove to be cleaned on the fixed plate.

[0022] Optionally, a receiving groove is provided at one end of the support arm for connecting with the slider, and the receiving groove is used for inserting the rotating shaft;

[0023] The fixed plate groove cleaning device also includes a locking structure for locking the rotating shaft, the locking structure includes a through hole arranged on the side of the support arm, and a bolt installed in the through hole, the through hole is connected to the accommodating groove, the bolt can be screwed into the through hole and abut against the rotating shaft to lock the rotating shaft.

[0024] Optionally, the fixed plate groove cleaning device further includes a spray structure, which includes a nozzle arranged in front of the scraper in the direction of travel of the scraper, and is used to spray clean water toward the scraper.

[0025] An embodiment of the present invention further provides a grinding device, comprising a frame, an upper fixed plate and a lower fixed plate disposed in the frame, and the fixed plate groove cleaning device, wherein the fixed plate groove cleaning device is disposed on one side of the lower fixed plate;

[0026] The support arm can be suspended above the lower fixed plate to clean the grooves on the lower fixed plate by the scraper.

[0027] An embodiment of the present invention further provides a method for cleaning a flat plate groove, which is applied to the above-mentioned flat plate groove cleaning device, comprising:

[0028] Suspending a support arm above the fixed plate, and moving the support arm along the arc-shaped slide rail so that the travel trajectory of the scraper coincides with the groove to be cleaned;

[0029] The scraper is moved to clean the groove to be cleaned.

[0030] Optionally, a support arm is suspended above the fixed plate, and the support arm is controlled to move so that the travel trajectory of the scraper coincides with the groove to be cleaned, specifically including:

[0031] Start the laser level to form a reference line on the plate;

[0032] When the reference line deviates from the groove to be cleaned on the fixed plate, the support arm is controlled to rotate so that the reference line coincides with the groove to be cleaned on the fixed plate.

[0033] Optionally, the scraper is moved to clean the groove to be cleaned, and the method further comprises:

[0034] Obtaining the distance between the scraper and the bottom of the groove to be cleaned;

[0035] The scraper is controlled to descend so that the scraper contacts the bottom of the groove to be cleaned.

[0036] The beneficial effects of the present invention are as follows: under the control of the first control structure and the second control structure, the grooves of the fixed plate are automatically cleaned by the scraper, thereby improving the cleaning effect and the cleaning efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0037] Figure 1 A schematic diagram showing a flat plate groove cleaning device according to an embodiment of the present invention;

[0038] Figure 2 A partial schematic diagram showing a flat plate groove cleaning device according to an embodiment of the present invention;

[0039] Figure 3 A schematic diagram showing a state in which the surface plate groove device according to an embodiment of the present invention cleans the surface plate groove;

[0040] Figure 4 A schematic diagram showing a control unit in an embodiment of the present invention;

[0041] Figure 5 A schematic diagram showing a grinding apparatus according to an embodiment of the present invention. DETAILED DESCRIPTION

[0042] To make the purpose, technical solutions, and advantages of the embodiments of the present disclosure more clear, the technical solutions of the embodiments of the present disclosure will be clearly and completely described below in conjunction with the accompanying drawings of the embodiments of the present disclosure. Obviously, the described embodiments are part of the embodiments of the present disclosure, not all of the embodiments. Based on the described embodiments of the present disclosure, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present disclosure.

[0043] Unless otherwise defined, the technical or scientific terms used in this disclosure should have the usual meanings understood by people with ordinary skills in the field to which this disclosure belongs. The words "first", "second" and similar words used in this disclosure do not indicate any order, quantity or importance, but are only used to distinguish different components. Similarly, words such as "one", "an" or "the" do not indicate a quantity limitation, but rather indicate the existence of at least one. Words such as "include" or "comprise" mean that the elements or objects appearing before the word include the elements or objects listed after the word and their equivalents, without excluding other elements or objects. Words such as "connect" or "connected" are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "Up", "down", "left", "right" and the like are only used to indicate relative positional relationships. When the absolute position of the object being described changes, the relative positional relationship may also change accordingly.

[0044] As used in the embodiments of the present disclosure, the terms "parallel," "perpendicular," and "identical" include the strict sense of "parallel," "perpendicular," and "identical," as well as "approximately parallel," "approximately perpendicular," and "approximately identical" with respect to a certain tolerance, which, taking into account the tolerances associated with the measurement of a particular quantity (e.g., limitations of the measurement system), means within an acceptable range of deviation for a particular value as determined by one of ordinary skill in the art. For example, "approximately" can mean within one or more standard deviations, or within 3% or 5% of the stated value.

[0045] In addition, in this document, unless otherwise defined, the terms "substantially," "essentially," "approximately," and "about" are used to describe and explain small variations. When used in connection with an event or circumstance, these terms can encompass situations where the event or circumstance occurs exactly, as well as situations where the event or circumstance occurs approximately. For example, when used in connection with a numerical value, these terms can include a range of variation of less than or equal to 10% of the numerical value, such as less than or equal to ±5%, less than or equal to ±4%, less than or equal to ±3%, less than or equal to ±2%, less than or equal to ±1%, less than or equal to ±0.5%, less than or equal to ±0.1%, less than or equal to ±0.05%. The term "substantially coplanar" can refer to two surfaces being aligned along the same plane within the micrometer range, for example, within 40 μm, 30 μm, 20 μm, 10 μm, or 1 μm.

[0046] refer to Figure 1-Figure 5 , an embodiment of the present invention provides a fixed plate groove cleaning device, comprising:

[0047] The support frame 5 has an axial direction (reference Figure 1An arc-shaped slide rail 14 is provided on the top of the support frame 5 (in the X direction), and the plane where the arc-shaped slide rail 14 is located is perpendicular to the axial direction of the support frame 5;

[0048] Support arm 9, one end of the support arm 9 is movably connected to the arc-shaped slide rail 14 through a slider 21, the other end of the support arm 9 is a free end, and is extended in a direction away from the arc-shaped slide rail 14, and the extension direction of the support arm 9 is parallel to the plane where the arc-shaped slide rail 14 is located, and a linear slide rail 8 is provided on the outer peripheral surface of the support arm 9, and the extension direction of the linear slide rail is parallel to the extension direction of the support arm 9 (reference Figure 1 parallel to the Y direction in the figure;

[0049] The scraper 12 is movably arranged on the linear slide rail 8;

[0050] a first control structure for controlling the support arm 9 to slide along the arc-shaped slide rail so that the position of the scraper 12 corresponds to the position of the groove to be cleaned on the fixed plate;

[0051] The second control structure is used to control the scraper 12 to move along the linear slide rail 8 to clean the grooves to be cleaned on the fixed plate.

[0052] A double-side grinding apparatus includes a frame 1 and an upper platen 7 and a lower platen 4 located within the frame 1. The upper platen 7 and the lower platen 4 are arranged relative to each other. A large amount of silicon slag and grinding powder may remain in the grooves of the lower platen 4, resulting in a poor drainage effect in the grooves. The platen groove cleaning device provided in this embodiment is primarily intended for cleaning the grooves of the lower platen 4. The lower platen 4 is generally a circular structure. During cleaning, the arc-shaped slide rail is located on one side of the lower platen 4, allowing the support arm 9 to drive the scraper 12 to be located above the lower platen 4. Setting the shape of the arc-shaped slide rail to match the shape of the lower platen 4 can save space. Thus, when the locking plate groove cleaning device is integrated with the grinding apparatus, the platen groove cleaning device can be integrated within the frame 1 of the grinding apparatus.

[0053] refer to Figure 3 For example, the arc-shaped slide rail can be semicircular in shape. When cleaning the fixed plate groove, the arc-shaped slide rail is sleeved on the outer side of the fixed plate. The arc-shaped slide rail can be concentrically arranged with the fixed plate to facilitate cleaning of the fixed plate groove.

[0054] Exemplarily, the length of the support arm 9 is greater than the radius of the fixed plate and smaller than the diameter of the fixed plate. In this way, after the support arm 9 moves from one end of the arc-shaped slide rail 14 to the other end to complete the cleaning of the groove portion on one side of the fixed plate close to the arc-shaped slide rail 14, the fixed plate can be rotated 180 degrees to clean the groove portion on the other side of the fixed plate (of course, the cleaning of all grooves on the fixed plate can also be completed by rotating the arc-shaped slide rail 14).

[0055] Exemplarily, the shape of the support frame 5 may also be an arc-shaped structure that matches the shape of the arc-shaped slide rail 14 to facilitate supporting the arc-shaped slide rail 14 , but the present invention is not limited thereto.

[0056] In some embodiments, the support frame 5 and the arc-shaped slide rail 14 are an integrated structure, the support frame 5 is an arc-shaped structure, and the top surface of the arc-shaped structure is recessed to form an arc-shaped slide groove, so that the top surface of the arc-shaped structure is constructed as the arc-shaped slide rail 14.

[0057] In some embodiments, the support frame 5 and the arc-shaped slide rail 14 are separate structures.

[0058] It should be noted that before cleaning the grooves of the fixed disk, the scraper 12 needs to be aligned with the corresponding grooves. The travel trajectory of the scraper 12 needs to coincide with the grooves to be cleaned, that is, the extension direction of the support arm 9 coincides with the grooves to be cleaned, or in other words, the orthographic projection of the support arm 9 on the fixed disk coincides with the grooves to be cleaned. Therefore, in some embodiments, an alignment structure is also provided. The alignment structure may include an image acquisition unit for acquiring images of the support arm 9 and the fixed disk. When the position of the support arm 9 and the groove to be cleaned deviates, correction can be made by rotating the fixed disk.

[0059] In an exemplary embodiment, a distance sensor is also provided on the support arm 9 for measuring the distance between the bottom of the groove to be cleaned and the support arm 9. The distance between the scraper 12 and the support arm 9 is fixed. Therefore, the distance between the scraper 12 and the bottom of the groove to be cleaned can be obtained by calculation, and then the scraper 12 can be brought into contact with the bottom of the groove to be cleaned by raising and lowering the fixed plate to clean the groove.

[0060] Exemplarily, a lifting structure can be set between the support frame 5 and the arc-shaped slide rail 14 to control the lifting and lowering movement of the arc-shaped slide rail 14 in the axial direction of the support frame 5, thereby realizing the lifting and lowering movement of the scraper 12 in the axial direction of the support frame 5, that is, the lifting and lowering movement in the direction perpendicular to the surface of the fixed plate.

[0061] In an exemplary embodiment, a third control structure is further included, which is arranged between the linear slide rail 8 and the scraper 12. The third control structure is used to control the scraper 12 to perform rotational movement. The rotation plane of the scraper 12 is parallel to the extension direction of the support frame 5, and the rotation plane of the scraper 12 is parallel to the extension direction of the support arm 9.

[0062] refer to Figure 1 and Figure 2 Exemplarily, the scraper 12 is a circular blade with a plurality of serrated blade portions protruding from the outer peripheral surface of the blade. The groove to be cleaned is cleaned by the control of the third control structure.

[0063] refer to Figure 2 In an exemplary embodiment, the third control structure includes a housing 13, a first driving portion disposed in the housing 13, and the first driving portion is connected to the scraper 12 via a first transmission portion;

[0064] The first transmission part includes a gearbox 27, which is used to control the scraper 12 to perform reciprocating motion between a first rotation state and a second rotation state, wherein the first rotation state includes the scraper 12 rotating in a clockwise direction, and the second rotation state includes the scraper 12 rotating in a counterclockwise direction.

[0065] By controlling the gearbox 27 , the scraper 12 is caused to perform reciprocating oscillating motion between the first rotation state and the second rotation state, thereby improving the cleaning effect.

[0066] Exemplarily, the scraper 12 performs reciprocating oscillating motion within a preset angle range, that is, in the first rotation state, the scraper 12 rotates clockwise by a first preset angle, and in the second rotation state, the scraper 12 rotates counterclockwise by a second preset angle. The first preset angle and the second preset angle are both less than 90 degrees, and the first preset angle and the second preset angle may be the same or different.

[0067] The above solution can reduce the contact area between the scraper 12 and the groove to be cleaned, thereby reducing damage to the groove to be cleaned by the scraper 12. It should be noted that the smaller the first preset angle and the second preset angle, the less damage to the groove. In some embodiments, the first preset angle and the second preset angle are both 1 degree, but this is not limited to this.

[0068] In an exemplary embodiment, the flat plate groove cleaning device further includes a fourth control structure, the fourth control structure being used to control the scraper 12 to perform lifting movement in a first direction, the first direction being parallel to the axial direction of the support frame 5;

[0069] The fourth control structure includes a second driving part 29 and a second transmission part, the second driving part 29 is arranged on the base 25, the second transmission part includes a gear arranged on the base 25, and a sawtooth structure 28 arranged on the side of the shell 13, the sawtooth structure 28 includes a plurality of sawteeth arranged along the first direction, and the sawteeth are meshed with the gear.

[0070] The setting of the fourth control structure can control the scraper 12 to extend into the interior of the groove to clean the groove when cleaning the groove. After the cleaning of the current groove is completed, the scraper 12 can be controlled to move in the opposite direction to disengage from the current groove, so that it can move to the next groove for cleaning as the support arm 9 moves.

[0071] In an exemplary embodiment, the housing 13 includes a first side surface and a second side surface that are relatively arranged in the extension direction of the support arm 9, the serrated structure 28 is provided on the first side surface, and a scale 19 is provided on the area of ​​the base 25 close to the second side surface, the extension direction of the scale 19 is parallel to the extension direction of the support frame 5, and the second side surface is provided with a pointer 20 pointing to the scale 19.

[0072] The pointing direction of the pointer 20 is perpendicular to the extension direction of the scale 19. In some embodiments, the movement of the scraper 12 can be controlled by measuring the distance between the scraper 12 and the groove to clean the groove. However, in order to improve efficiency, the data of the lifting and lowering of the scraper 12 is only obtained when the first groove is cleaned, so that when cleaning subsequent grooves, it is only necessary to refer to the data of the first lifting and lowering of the scraper 12 (it should be noted that the distance between the support arm 9 and the fixed plate can be fixed. When cleaning all the grooves on the fixed plate, it is only necessary to control the support arm 9 to translate along the arc-shaped slide rail 14, and there is no need to move the support arm 9 in a direction perpendicular to the fixed plate). For example, after fixing the support arm 9 in a direction perpendicular to the fixed plate, the distance between the support arm 9 and the fixed plate is measured to obtain the first distance between the scraper 12 and the bottom of the current groove, and then the scraper 12 is controlled to descend the first distance. After cleaning the groove, the scraper 12 is controlled to move in the opposite direction to rise the first distance. When cleaning the remaining grooves, it is only necessary to control the scraper 12 to rise and fall the first distance after the support arm 9 is translated to the corresponding groove position along the arc slide rail.

[0073] The setting of the scale 19 facilitates the control of the lifting and lowering movement of the scraper 12 .

[0074] In an exemplary embodiment, the support arm 9 is rotatably connected to the slider 21 via a rotation axis so as to be rotatable in a plane parallel to the plane where the arc-shaped slide rail 14 is located.

[0075] By adopting the above scheme, it is possible to achieve fine adjustment of the angle of the support arm 9 in a plane parallel to the plane where the arc-shaped slide rail 14 is located, so that when cleaning the groove of the fixed plate, the extension of the support arm 9 coincides with the groove to be cleaned, thereby making the travel path (i.e., the travel trajectory) of the scraper 12 coincide with the groove to be cleaned, thereby improving the cleaning effect and avoiding damage to the groove.

[0076] It should be noted that when cleaning the grooves of the fixed plate, the support arm 9 is arranged parallel to the fixed plate, the plane where the arc-shaped slide rail 14 is located is parallel to the surface of the fixed plate, and the scraper 12 can move along the linear slide rail 8 on the support arm 9. By fine-tuning the support arm 9, the cleaning efficiency can be improved.

[0077] refer to Figure 1 In an exemplary embodiment, the fixed plate groove cleaning device further includes an adjustment structure for adjusting the rotation angle of the support arm 9 in a plane parallel to the plane where the arc-shaped slide rail 14 is located;

[0078] The regulating structure comprises:

[0079] a laser level 17, provided on the bottom surface of the support arm 9, for generating a reference line on the fixed plate to be cleaned, wherein the extension direction of the reference line is parallel to the extension direction of the support arm 9, and the reference line coincides with the travel path of the scraper 12;

[0080] The processing part is used to control the support arm 9 to rotate when the reference line and the groove to be cleaned on the fixed plate are offset so that the reference line coincides with the groove to be cleaned on the fixed plate.

[0081] The laser beam emitted by the laser level 17 can form a clear straight line on the fixed disk, that is, form a clear reference line. The reference line is set to coincide with the travel path of the scraper 12. Then, by controlling the support arm 9 to rotate so that the reference line coincides with the groove to be cleaned, the travel path of the scraper 12 can be made to coincide with the groove to be cleaned.

[0082] In an exemplary embodiment, a protective cover is provided on a side of the scraper 12 close to the support arm 9 to prevent debris removed by the scraper 12 from splashing onto the scraper 12 during the cleaning process.

[0083] Exemplarily, the protective cover completely covers the scraper 12 in the axial direction of the support frame 5 .

[0084] In an exemplary embodiment, a receiving groove is provided at one end of the support arm 9 for connecting with the slider 21, and the receiving groove is used for inserting the rotating shaft;

[0085] The fixed plate groove cleaning device also includes a locking structure 26 for locking the rotating shaft, and the locking structure 26 includes a through hole arranged on the side of the support arm 9, and a bolt installed in the through hole. The through hole is connected to the accommodating groove, and the bolt can be screwed into the through hole and abut against the rotating shaft to lock the rotating shaft.

[0086] In order to prevent the support arm 9 from deviating while the scraper 12 moves along the linear slide rail 8, the support arm 9 is locked by the locking structure 26 to prevent the support arm 9 from rotating, thereby ensuring the cleaning effect and avoiding damage to the groove.

[0087] In an exemplary embodiment, a positioning member is provided between the slider 21 and the arc-shaped slide rail 14. The positioning member can be a positioning groove provided on the arc-shaped slide rail 14, and a positioning block matching the positioning groove. The positioning block is movable and cooperates with the positioning groove to fix the slider 21 when the slider 21 needs to be positioned to prevent the slider 21 from moving.

[0088] refer to Figure 1 In an exemplary embodiment, the fixed disc groove cleaning device further includes a spray structure, which includes a nozzle 10 arranged in front of the scraper 12 in the direction of travel of the scraper 12, and the nozzle 10 is used to spray clean water toward the scraper 12.

[0089] The spray structure further includes a pipe 16 for supplying clean water to the nozzle 10 .

[0090] The nozzle 10 sprays clean water toward the scraper 12 to clean the scraper 12 to ensure a cleaning effect and to cool the scraper 12 .

[0091] Exemplarily, the nozzle 10 sprays cooling water toward the scraper 12 .

[0092] Exemplarily, the spray structure further includes a nozzle for spraying clean water toward the fixed plate, so as to clean the impurities after the scraper 12 cleans the grooves.

[0093] Exemplarily, the platen groove cleaning device further includes a blowing structure, which includes an air outlet for spraying inert clean gas toward the platen to blow away impurities generated after the scraper 12 cleans the grooves and achieve a drying effect.

[0094] It should be noted that the order of using the blowing structure and the spraying structure can be set according to actual needs. For example, after the scraper 12 cleans the grooves of the fixed plate, the blowing structure can be used to blow away impurities on the fixed plate, and then the spraying structure can be used to clean the fixed plate, and then the blowing structure can be used to dry it. Alternatively, the spraying structure can be used to clean the fixed plate first, and then the blowing structure can be used to blow and dry it.

[0095] refer to Figure 4 In an exemplary embodiment, the fixed disc groove cleaning device includes a control unit, which is used to send corresponding control instructions to the first control structure, the second control structure, the third control structure and / or the fourth control structure, and the first control structure, the second control structure, the third control structure and / or the fourth control structure perform corresponding operations according to the control instructions. The control unit includes a human-computer interaction control panel 24, which is used to receive information (for example, receiving information from the distance sensor, or receiving information from the laser level 17, etc.) and input control instructions to control the working status of the first control structure, the second control structure, the third control structure and / or the fourth control structure.

[0096] refer to Figure 4 Exemplarily, the operating platform of the control unit also includes a start button 23 and a power button 22. The start button 23 is used to control the on / off state of the cleaning operation of the fixed disc groove cleaning device, and the power button 22 is used to control the power-on state of the fixed disc groove cleaning device.

[0097] The control unit is electrically connected to the first control structure, the second control structure, the third control structure and / or the fourth control structure via a signal connection line 15. The support arm 9 is provided with a wire groove 18 for accommodating the corresponding signal connection line 15. Figure 1 .

[0098] The wire groove 18 is a flexible wire groove 18, and the first end of the flexibility close to the arc-shaped slide rail is fixed on the support arm 9, and the second end of the flexible wire groove 18 extends toward the free end of the support arm 9 and is bent in the opposite direction to be fixed on the outer shell 13 of the third control structure. In this way, when the scraper 12 moves along the support arm 9, the second end of the flexible wire groove 18 can move with the scraper 12 without affecting the cleaning working state of the scraper 12.

[0099] Exemplarily, the spray structure includes a nozzle 10 disposed in front of the scraper 12 in the direction of travel of the scraper 12, and the nozzle 10 is used to spray clean water toward the scraper 12. A pipe 16 for supplying clean water to the nozzle 10 is partially accommodated in the flexible wire trough 18 to facilitate the supply of clean water to the nozzle 10.

[0100] refer to Figure 5 The embodiment of the present invention further provides a grinding device, comprising a frame 1 and an upper fixed plate 7 and a lower fixed plate 4 arranged in the frame 1, and the above-mentioned fixed plate groove cleaning device, wherein the fixed plate groove cleaning device is arranged on one side of the lower fixed plate 4;

[0101] The support arm 9 can be suspended above the lower fixed plate 4 to clean the grooves on the lower fixed plate 4 through the scraper 12 .

[0102] It should be noted that when there is no need to clean the grooves of the lower fixed plate 4, the support arm 9 can be rotated so that the support arm 9 is away from the lower fixed plate 4, so that the positive projection of the support arm 9 on the lower fixed plate 4 is located on the outside of the lower fixed plate 4, so as not to affect the grinding work of the grinding equipment.

[0103] Exemplarily, the grinding device further includes a suspension structure 2 for fixedly connecting the upper fixed plate 7 .

[0104] Exemplarily, the grinding device further includes a carrier plate, which is disposed between the upper fixed plate 7 and the lower fixed plate 4 , and has a plurality of carrier plate holes disposed thereon, wherein the elements to be ground are disposed in the carrier plate holes.

[0105] Exemplarily, a central gear 11 is disposed at the center of the lower fixed plate 4, and gear teeth are disposed on the outer circumference of the central gear 11. An outer ring gear 3 is disposed around the outer periphery of the lower fixed plate 4, and gear teeth are disposed on the inner circumference of the outer ring gear 3. The carrier plate is meshedly connected between the central gear 11 and the outer ring gear 3. The driving structure 6 of the grinding equipment drives the central gear 11 and the outer ring gear 3 to rotate, so that the carrier plate rotates about its own axis and revolves around the center of the lower fixed plate 4.

[0106] An embodiment of the present invention further provides a method for cleaning a flat plate groove, which is applied to the above-mentioned flat plate groove cleaning device, comprising:

[0107] Suspending a support arm above the fixed plate, and moving the support arm along the arc-shaped slide rail so that the travel trajectory of the scraper coincides with the groove to be cleaned;

[0108] The scraper is moved to clean the groove to be cleaned.

[0109] It should be noted that after the support arm is suspended above the fixed plate, the image of the relative position relationship between the support arm and the groove to be cleaned can be obtained through the image acquisition unit, and then the scraper's travel trajectory can be made to coincide with the groove to be cleaned by rotating the lower fixed plate, thereby improving the cleaning accuracy and avoiding damage to the groove.

[0110] After the scraper and the groove to be cleaned are precisely aligned, the distance between the bottom of the groove and the scraper can be obtained, and then the lower single disc can be controlled to rise according to the distance so that the scraper extends into the groove and contacts the bottom of the groove to clean the groove.

[0111] In an exemplary embodiment, the fixed plate groove cleaning device further includes an adjustment structure for adjusting a rotation angle of the support arm in a plane parallel to a plane where the arc-shaped slide rail is located;

[0112] The regulating structure comprises:

[0113] a laser level, disposed on the bottom surface of the support arm, for generating a reference line on the fixed plate to be cleaned, wherein the extension direction of the reference line is parallel to the extension direction of the support arm and the reference line coincides with the travel path of the scraper;

[0114] a processing unit, configured to control the support arm to rotate when the reference line and the groove to be cleaned on the fixed plate are offset so that the reference line coincides with the groove to be cleaned on the fixed plate;

[0115] The support arm is suspended above the fixed plate and the support arm is controlled to move so that the travel trajectory of the scraper coincides with the groove to be cleaned, specifically including:

[0116] Start the laser level to form a reference line on the plate;

[0117] When the reference line deviates from the groove to be cleaned on the fixed plate, the support arm is controlled to rotate so that the reference line coincides with the groove to be cleaned on the fixed plate.

[0118] In an exemplary embodiment, the flat plate groove cleaning device further includes a fourth control structure, the fourth control structure being used to control the scraper to perform lifting movement in a first direction, the first direction being parallel to the axial direction of the support frame; moving the scraper to clean the groove to be cleaned, and previously further including:

[0119] Obtaining the distance between the scraper and the bottom of the groove to be cleaned;

[0120] The scraper is controlled to descend so that the scraper contacts the bottom of the groove to be cleaned.

[0121] There are a few points to note:

[0122] (1) The drawings of the embodiments of the present disclosure only relate to the structures related to the embodiments of the present disclosure. Other structures may refer to conventional designs.

[0123] (2) For the sake of clarity, the thickness of layers or regions in the drawings used to describe the embodiments of the present disclosure are exaggerated or reduced, i.e., these drawings are not drawn to scale. It is understood that when an element such as a layer, film, region, or substrate is referred to as being "on" or "under" another element, the element may be "directly" "on" or "under" the other element or intervening elements may be present.

[0124] (3) In the absence of conflict, the embodiments of the present disclosure and the features therein may be combined with each other to form new embodiments.

[0125] It will be understood that the above embodiments are merely exemplary embodiments for illustrating the principles of the present invention, and the present invention is not limited thereto. Those skilled in the art will appreciate that various modifications and improvements can be made without departing from the spirit and substance of the present invention, and such modifications and improvements are also considered to be within the scope of protection of the present invention.

Claims

1. A fixed plate groove cleaning device, characterized in that: include: A support frame, wherein a curved slide rail is provided at the top end of the support frame in the axial direction, and the plane where the curved slide rail is located is perpendicular to the axial direction of the support frame; A support arm, one end of the support arm is movably connected to the arcuate slide rail via a slider, the other end of the support arm is a free end and extends in a direction away from the arcuate slide rail, and the extension direction of the support arm is parallel to the plane where the arcuate slide rail is located, and a linear slide rail is provided on the outer peripheral surface of the support arm, and the extension direction of the linear slide rail is parallel to the extension direction of the support arm; a scraper movably disposed on the linear slide rail; a first control structure for controlling the support arm to slide along the arc-shaped slide rail so that the position of the scraper corresponds to the position of the groove to be cleaned on the fixed plate; a second control structure for controlling the scraper to move along the linear slide rail to clean the grooves to be cleaned on the fixed plate; The support arm is rotatably connected to the slider via a rotation axis so as to be able to rotate in a plane parallel to the plane where the arc-shaped slide rail is located; It also includes an adjustment structure, wherein the adjustment structure is used to adjust the rotation angle of the support arm in a plane parallel to the arc-shaped slide rail; The regulating structure comprises: a laser level, disposed on the bottom surface of the support arm, for generating a reference line on the fixed plate to be cleaned, wherein the extension direction of the reference line is parallel to the extension direction of the support arm and the reference line coincides with the travel path of the scraper; a processing unit, configured to control the support arm to rotate when the reference line and the groove to be cleaned on the fixed plate are offset so that the reference line coincides with the groove to be cleaned on the fixed plate; A positioning structure is also provided, which may include an image acquisition unit for acquiring images of the support arm and the fixed plate. When the support arm is offset from the position of the groove to be cleaned, correction can be performed by rotating the fixed plate.

2. The plate groove cleaning device according to claim 1, characterized in that: It also includes a third control structure, which is arranged between the linear slide rail and the scraper. The third control structure is used to control the scraper to rotate. The rotation plane of the scraper is parallel to the extension direction of the support frame, and the rotation plane of the scraper is parallel to the extension direction of the support arm.

3. The plate groove cleaning device according to claim 2, characterized in that: The third control structure includes a housing, a first driving portion disposed in the housing, and the first driving portion is connected to the scraper through a first transmission portion; The housing is movably arranged on the linear slide rail via a base; The first transmission part includes a gearbox, which is used to control the scraper to perform reciprocating motion between a first rotation state and a second rotation state, wherein the first rotation state includes the scraper rotating in a clockwise direction, and the second rotation state includes the scraper rotating in a counterclockwise direction.

4. The plate groove cleaning device according to claim 3, characterized in that: The scraper further includes a fourth control structure for controlling the scraper to move up and down in a first direction, wherein the first direction is parallel to the axial direction of the support frame; The fourth control structure includes a second driving part and a second transmission part, the second driving part is arranged on the base, the second transmission part includes a gear arranged on the base, and a sawtooth structure arranged on the side of the shell, the sawtooth structure includes a plurality of sawteeth arranged along the first direction, and the sawteeth are meshed with the gear.

5. The plate groove cleaning device according to claim 4, characterized in that: The shell includes a first side surface and a second side surface arranged opposite to each other in the extension direction of the support arm, the serrated structure is provided on the first side surface, a scale is provided on the area of ​​the base close to the second side surface, the extension direction of the scale is parallel to the extension direction of the support frame, and a pointer pointing to the scale is provided on the second side surface.

6. The plate groove cleaning device according to claim 1, characterized in that: An end of the support arm connected to the slider is provided with a receiving groove, and the receiving groove is used for inserting the rotating shaft; The fixed plate groove cleaning device also includes a locking structure for locking the rotating shaft, the locking structure includes a through hole arranged on the side of the support arm, and a bolt installed in the through hole, the through hole is connected to the accommodating groove, the bolt can be screwed into the through hole and abut against the rotating shaft to lock the rotating shaft.

7. The plate groove cleaning device according to claim 1, characterized in that: The invention also includes a spraying structure, which includes a nozzle arranged in front of the scraper in the moving direction of the scraper, and the nozzle is used to spray clean water toward the scraper.

8. A grinding device, characterized in that: It comprises a frame, an upper fixed plate and a lower fixed plate arranged in the frame, and the fixed plate groove cleaning device according to any one of claims 1 to 7, wherein the fixed plate groove cleaning device is arranged on one side of the lower fixed plate; The support arm can be suspended above the lower fixed plate to clean the grooves on the lower fixed plate by the scraper.

9. A method for cleaning a groove of a fixed plate, applied to the fixed plate groove cleaning device according to any one of claims 1 to 7, characterized in that: include: Suspending a support arm above the fixed plate, and controlling the movement of the support arm so that the travel trajectory of the scraper coincides with the groove to be cleaned; The scraper is moved to clean the groove to be cleaned.

10. The method for cleaning the groove of the fixed plate according to claim 9, characterized in that: The support arm is suspended above the fixed plate and the support arm is controlled to move so that the travel trajectory of the scraper coincides with the groove to be cleaned, specifically including: Start the laser level to form a reference line on the plate; When the reference line deviates from the groove to be cleaned on the fixed plate, the support arm is controlled to rotate so that the reference line coincides with the groove to be cleaned on the fixed plate.

11. The method for cleaning the groove of the fixed plate according to claim 9, characterized in that: The scraper is moved to clean the groove to be cleaned, and the method also includes: Obtaining the distance between the scraper and the bottom of the groove to be cleaned; The scraper is controlled to descend so that the scraper contacts the bottom of the groove to be cleaned.

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