Sensor and sensor detection system

Abstract

The invention discloses a sensor and a sensing detection system, and relates to the field of optical fiber sensing devices, and the sensor comprises an optical fiber, one end face of a fiber core of the optical fiber is a flat end face; the cavity assembly comprises a sensing cavity and a reference cavity which are located at the flat end face, directly face the flat end face and abut against each other, a cavity with an opening facing the flat end face is formed in the sensing cavity, and the optical path difference between the sensing cavity and the reference cavity is located in a preset minimum range; wherein a cavity is defined by the inner side wall of the sensing cavity and the flat end face, a first reflecting face used for reflecting light entering the sensing cavity through the cavity back to the fiber core is formed on the end face, right opposite to the flat end face, in the cavity, and a second reflecting face used for reflecting light entering the reference cavity back to the fiber core is formed on the end face, away from the flat end face, of the reference cavity. The two compact FBI sensing structures are arranged on the end face of one optical fiber, and the sensitivity of the sensor can be improved on the premise that the sensing structures are compact.

Description

Technical Field

[0001] The present invention relates to the field of optical fiber sensor devices, and in particular to a sensor and a sensor detection system. Background Art

[0002] Fiber optic sensing has many advantages, such as high sensitivity, electromagnetic immunity, miniaturization and light weight, applicability to high temperature and corrosive environments, and fast response. These advantages make fiber optic sensors widely used in many fields, including industry, medicine, communications, environmental monitoring, and security applications. Current fiber optic sensors mainly include grating sensors and interferometric sensors. Interferometric sensors have better development prospects because of their high sensitivity and the advantages of diversified approaches. Among them, the fiber optic sensor of Fabry-Perot interferometer (FPI) has attracted much attention in fiber optic sensing applications because of its flexible configuration, good stability, and compact structure.

[0003] The optical vernier effect is often used to amplify the sensitivity of fiber optic sensors. It requires two FPIs with similar optical path differences to be connected in parallel. The smaller the difference between the two optical path differences, the greater the amplification of the sensor sensitivity. However, the existing sensing structure of two fiber optic FPIs in parallel is not compact enough, making the entire sensing structure too complicated and difficult to accurately control the optical path difference of the FPI, thus affecting the amplification effect of the vernier effect on sensitivity. Summary of the invention

[0004] The present application provides a sensor and a sensor detection system, which can solve the technical problem in the prior art that the sensing structure of two optical fiber FPIs in parallel is not compact enough.

[0005] In a first aspect, an embodiment of the present application provides a sensor, comprising: an optical fiber, wherein one end face of the core of the optical fiber is a flat end face; a cavity assembly, wherein the cavity assembly comprises a sensing cavity and a reference cavity located at the flat end face, facing the flat end face and close to each other, wherein a cavity with an opening facing the flat end face is provided in the sensing cavity, and an optical path difference between the sensing cavity and the reference cavity is within a preset extremely small range; wherein the inner side wall of the sensing cavity and the flat end face are arranged to form the cavity, and an end face in the cavity facing the flat end face forms a first reflection face for reflecting light incident into the sensing cavity through the cavity back to the core, and an end face of the reference cavity away from the flat end face forms a second reflection face for reflecting light incident into the reference cavity back to the core.

[0006] In combination with the first aspect, in one implementation, the orthographic projection of the cavity assembly on the fiber core covers the flat end surface.

[0007] In combination with the first aspect, in one implementation, the orthographic projection of the sensing cavity on the fiber core covers half of the area of ​​the flat end surface.

[0008] In combination with the first aspect, in one implementation, the orthographic projection of the reference cavity on the fiber core covers one half of the area of ​​the flat end face.

[0009] In combination with the first aspect, in one embodiment, the chamber is filled with air or a solution.

[0010] In combination with the first aspect, in one embodiment, the cavity assembly further includes: a reflecting portion, and both ends of the end surface of the reflecting portion facing the flat end surface extend toward the flat end surface to form an extension portion, and the first reflecting surface is the end surface of the reflecting portion facing the flat end surface.

[0011] In combination with the first aspect, in one implementation, the extension portion and the end surface of the reflection portion facing the flat end surface together form the cavity.

[0012] In combination with the first aspect, in one embodiment, the cavity component is made of a thermally expandable material.

[0013] In combination with the first aspect, in one embodiment, the thermally expandable material is a photoresist or a photosensitive resin polymer.

[0014] In a second aspect, an embodiment of the present application provides a sensor detection system, comprising: a sensor as provided in the above embodiment, and a circulator, a broadband light source and a spectrometer; the three interfaces of the circulator are respectively connected to the sensor, the broadband light source and the spectrometer; the output light of the broadband light source is input to the sensor through the circulator for reflection, causing Fabry-Perot interference to form reflected light, and the reflected light is output to the spectrometer through the circulator for detection.

[0015] The beneficial effects brought by the technical solution provided in the embodiments of the present application include:

[0016] The embodiment of the present application provides a sensor, comprising: an optical fiber, one end face of the core of the optical fiber is a flat end face; a cavity assembly, the cavity assembly comprising a sensing cavity and a reference cavity located at the flat end face, facing the flat end face and close to each other. The embodiment of the present application arranges two compact FBI sensing structures on the end face of an optical fiber, so that the overall structure of the sensor can be more compact, and the overall volume of the sensor becomes smaller, which conforms to the development trend of sensor miniaturization. At the same time, a cavity with an opening facing the flat end face is provided in the sensing cavity, and the optical path difference between the sensing cavity and the reference cavity is within a preset very small range; wherein the inner side wall of the sensing cavity and the flat end face are surrounded to form the cavity, and the end face of the cavity facing the flat end face forms a first reflection surface for reflecting the light injected into the sensing cavity through the cavity back to the core, and the end face of the reference cavity away from the flat end face forms a second reflection surface for reflecting the light injected into the reference cavity back to the core. With this arrangement, the optical path difference of the two FBIs can be precisely controlled, thereby improving the sensitivity of the sensor while maintaining a compact sensor structure, solving the problem in related technologies that the sensitivity of the sensor is usually limited by the reduction in sensor size. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0018] Figure 1 A three-dimensional structural diagram of a sensor disclosed in an embodiment of the present application;

[0019] Figure 2 This is a bottom view of the structure of the sensor disclosed in the embodiment of the present application;

[0020] Figure 3 A side structural diagram of a sensor disclosed in an embodiment of the present application;

[0021] Figure 4 The interference principle diagram of the sensor disclosed in the embodiment of the present application;

[0022] Figure 5 This is a schematic diagram of the structure of the sensor detection system disclosed in the embodiment of the present application.

[0023] Figure numerals: 1. fiber core; 11. flat end face; 2. sensing cavity; 3. reference cavity; 4. chamber; 5. reflecting part; 6. extending part; 7. first reflecting surface; 8. second reflecting surface; 9. sensor; 10. circulator; 11. broadband light source; 12. spectrometer. DETAILED DESCRIPTION

[0024] In order to enable those skilled in the art to better understand the solution of the present application, the technical solution in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0025] Fiber optic sensing has many advantages, such as high sensitivity, electromagnetic immunity, miniaturization and light weight, applicability to high temperature and corrosive environments, and fast response. These advantages have made fiber optic sensors widely used in many fields, including industry, medicine, communications, environmental monitoring, and security applications. Current fiber optic sensors mainly include grating sensors and interferometric sensors. Interferometric sensors have the advantages of high sensitivity and the ability to achieve diversified approaches, so interferometric sensors have better development prospects.

[0026] Among them, the fiber optic sensor of Fabry-Perot interferometer (FPI) has attracted much attention in the application of fiber optic sensing due to its advantages such as flexible configuration, good stability and compact structure. The optical vernier effect is often used to amplify the sensitivity of fiber optic sensors. It requires two FPIs with similar optical path difference to be connected in parallel. The smaller the difference between the two optical path differences, the greater the amplification factor of the sensor sensitivity. However, the existing sensing structure of two fiber optic FPIs in parallel is not compact enough, making the entire sensing structure too complicated and difficult to accurately control the optical path difference of the FPI, thus affecting the amplification effect of the vernier effect on the sensitivity.

[0027] The embodiments of the present application provide a sensor and a sensor detection system, which can solve the technical problem in the prior art that the sensing structure of two optical fiber FPIs in parallel is not compact enough.

[0028] Figure 1 This is a three-dimensional structural diagram of the sensor disclosed in the embodiment of the present application. Figure 4 This is a schematic diagram of the interference principle of the sensor disclosed in the embodiment of this application. Figure 1 and Figure 4The embodiment of the present application provides a sensor, comprising: an optical fiber, wherein one end face of a core 1 of the optical fiber is a flat end face 11; a cavity assembly, wherein the cavity assembly comprises a sensing cavity 2 and a reference cavity 3 located at the flat end face 11, facing the flat end face 11 and close to each other, wherein a cavity 4 with an opening facing the flat end face 11 is provided in the sensing cavity 2, and an optical path difference between the sensing cavity 2 and the reference cavity 3 is within a preset extremely small range; wherein the inner side wall of the sensing cavity 2 and the flat end face 11 are arranged to form the cavity 4, and an end face of the cavity 4 facing the flat end face 11 forms a first reflection face 7 for reflecting light incident into the sensing cavity 2 via the cavity 4 back to the core 1, and an end face of the reference cavity 3 away from the flat end face 11 forms a second reflection face 8 for reflecting light incident into the reference cavity 3 back to the core 1.

[0029] Specifically, in the embodiment of the present application, after a flat end face is cut from a single-mode optical fiber, a cavity assembly is arranged on the flat end face 11. The cavity assembly includes a sensing cavity 2 and a reference cavity 3 that are opposite to the flat end face 11 and are close to each other, which can meet the development trend of the gradual miniaturization and compactness of optical fiber sensors.

[0030] Wherein, the first reflection surface and the second reflection surface are both smooth and flat planes, and when parallel light rays hit the smooth surfaces, the reflected light rays are also parallel, thereby ensuring the reflection effect of the light rays.

[0031] The optical vernier effect is usually used to amplify the sensitivity of fiber optic sensors. It requires two FPIs with similar optical path differences to be connected in parallel. The smaller the difference between the two optical path differences, the greater the amplification factor of the sensor sensitivity.

[0032] Figure 2 This is a bottom view of the structure of the sensor disclosed in the embodiment of this application. Figure 1 and Figure 2 In the embodiment of the present application, the preset minimum range may be 1m-5m. Specifically, since the optical path of the sensing cavity 2 and the reference cavity 3 is affected by the length and refractive index of the sensing cavity 2 and the reference cavity 3, the optical path difference between the sensing cavity 2 and the reference cavity 3 may be controlled by controlling the length or refractive index of the sensing cavity 2 and the length or refractive index of the reference cavity 3, thereby obtaining different sensor sensitivity magnifications.

[0033] Specifically, the ratio of the length of the sensing cavity 2 to the optical path of the reference cavity 3 can be 1.1-1.2. Therefore, the sensor disclosed in the embodiment of the present application can accurately control the optical path difference between the sensing cavity 2 and the reference cavity 3 while satisfying the requirement of setting the volume of the sensor to the minimum, thereby amplifying the sensitivity of the sensor through the vernier effect.

[0034] Figure 3 This is a side view of the structure of the sensor disclosed in the embodiment of the present application. Figure 3In the embodiment of the present disclosure, the orthographic projection of the cavity assembly on the fiber core 1 covers the flat end surface 11. This ensures the reflection effect of the cavity assembly on the input light.

[0035] In the embodiment of the present application, the orthographic projection of the sensing cavity 2 on the fiber core 1 covers half of the area of ​​the flat end surface 11. With this arrangement, the volume of the cavity assembly can be set smaller while improving the reflection effect of the input light in the sensing cavity 2, thereby meeting the miniaturization of the sensor.

[0036] In the embodiment of the present application, the orthographic projection of the reference cavity 3 on the fiber core 1 covers half of the area of ​​the flat end face 11. In this way, the volume of the cavity assembly can be set smaller while improving the reflection effect of the input light in the reference cavity 3, thereby meeting the miniaturization of the sensor.

[0037] In an optional embodiment, specifically, the ratio of the sum of the projection areas of the orthographic projection of the sensing cavity 2 on the fiber core 1 and the orthographic projection of the reference cavity 3 on the fiber core 1 to the area of ​​the flat end face 11 is 4 / π. Thus, the volume of the cavity assembly is set to the minimum within a feasible range, and the sensing cavity 2 and the reference cavity 3 are close to each other, so that the sensor has a smaller volume, a more compact structure, and better stability.

[0038] In one embodiment, the chamber 4 is filled with air or a solution.

[0039] Specifically, in conjunction with reference Figure 1 and Figure 4 The light entering the cavity assembly from the fiber core 1 is mainly reflected at two places, namely the flat end face 11 and the first reflection surface 7 or the second reflection surface 8. The two parts of the reflected light are transmitted in the opposite direction in the fiber core 1 and interfere with each other, which makes the sensing cavity 2 or the reference cavity 3 constitute an interferometer.

[0040] When the cavity 4 is filled with air, for the sensing cavity 2, the incident light is first reflected by the flat end face 11 (fiber-air interface), the remaining light propagates in the cavity 4, and then is reflected by the first reflection surface 7 (air-solid structure interface of the sensing cavity 2), so the optical path of the cavity 4 is air. For the reference cavity 3, the incident light is first reflected by the flat end face 11 (fiber-solid structure interface of the reference cavity 3), the remaining light propagates in the solid structure, and then is reflected by the second reflection surface 8 (solid structure of the reference cavity 3-air interface), so the optical path of the reference cavity 3 is the solid structure of the reference cavity 3.

[0041] Specifically, the sensing cavity 2 and the reference cavity 3 of the embodiment of the present disclosure have different optical path differences. The light of the mode field is injected into the sensing cavity 2 and the reference cavity 3 respectively, and the reflected light passing through different reflection surfaces is superimposed inside the optical fiber, so that two FPIs can be connected in parallel on one optical fiber end face, making the sensor structure more compact.

[0042] During sensing, the refractive index inside the sensing cavity 2 changes, causing the optical path difference to change. The reference cavity 3 is a solid structure and the optical path difference will not change. According to the vernier effect, when the reflection spectrum of the sensing cavity 2 moves, the envelope of the combined spectrum of the two cavities will move exponentially, thereby amplifying the sensing sensitivity of the sensing cavity 2.

[0043] When the chamber 4 is filled with a solution, for the sensing chamber 2, the incident light is first reflected by the flat end face 11 (optical fiber-solution interface), the remaining light propagates in the chamber 4, and then is reflected by the first reflection surface 7 (solution-solid structure interface of the sensing chamber 2), so the optical path of the chamber 4 becomes the solution. For the reference chamber 3, the incident light is first reflected by the flat end face 11 (optical fiber-solid structure interface of the reference chamber 3), the remaining light propagates in the solid structure, and then is reflected by the second reflection surface 8 (solid structure of the reference chamber 3-solution interface), so the optical path of the reference chamber 3 is the solid structure of the reference chamber 3.

[0044] When the refractive index of the solution changes, the optical path difference of the sensing cavity 2 will also change. The change in refractive index can be measured by the wavelength shifted by the reflection spectrum. In addition, by filling the cavity 4 with special materials that are sensitive to the refractive index of the sensing substance, it is also possible to detect substances such as special ions in the solution, harmful gases in the air, and the like.

[0045] In the embodiment of the present application, the cavity assembly further includes: a reflective portion 5 , and both ends of the reflective portion 5 facing the flat end surface 11 extend toward the flat end surface 11 to form an extension portion 6 , and the first reflective surface 7 is the end surface of the reflective portion 5 facing the flat end surface 11 .

[0046] In the embodiment of the present application, the end surface of the extension portion 6 and the reflective portion 5 facing the flat end surface 11 encloses the cavity 4. Figure 1 and Figure 2 , the chamber 4 runs through the sensing chamber 2, the length of the reference chamber 3 is less than the length of the sensing chamber 2, and the length of the chamber 4 is also greater than the length of the reference chamber 3, and the chamber 4 is exposed in the reference chamber 3. Therefore, external liquid or gas can enter the chamber 4, so that the optical path difference of the sensing chamber 2 is different from that of the reference chamber 3.

[0047] In the embodiment of the present application, the material of the cavity assembly is a thermal expansion material, that is, the physical structure of the sensing cavity 2 and the physical structure of the reference cavity 3 are both made of a thermal expansion material.

[0048] Specifically, the thermally expandable material is photoresist or photosensitive resin polymer. In some other embodiments of the present application, other materials may be used to prepare the cavity assembly, as long as the sensing cavity 2 and the reference cavity 3 have different optical path differences, which is not limited here.

[0049] In an embodiment of the present application, the cavity assembly can be printed by 3D printing technology. Specifically, after a single-mode cut out flat end face is fixed on a printing table, a high-power objective lens of a 3D printer is used to find the position of the fiber core 1 on the flat end face 11, and the cavity assembly is printed on the flat end face 11. Since 3D printing technology has the advantages of high customization and high precision, the optical path difference between the sensing cavity 2 and the reference cavity 3 in the cavity assembly can be accurately controlled. Since the 3D printed structure has high repeatability, it is possible to achieve rapid and repeated printing of the cavity assembly, thereby improving the production efficiency of the sensor. At the same time, the use of 3D printing to prepare the cavity assembly can improve the structural stability of the sensor and reduce the production cost of the sensor.

[0050] The embodiment of the present application provides a sensor, comprising: an optical fiber, one end face of the core of the optical fiber is a flat end face; a cavity assembly, the cavity assembly comprising a sensing cavity and a reference cavity located at the flat end face, facing the flat end face and close to each other. The embodiment of the present application arranges two compact FBI sensing structures on the end face of an optical fiber, so that the overall structure of the sensor can be more compact, and the overall volume of the sensor becomes smaller, which conforms to the development trend of sensor miniaturization. At the same time, a cavity with an opening facing the flat end face is provided in the sensing cavity, and the optical path difference between the sensing cavity and the reference cavity is within a preset very small range; wherein the inner side wall of the sensing cavity and the flat end face are surrounded to form the cavity, and the end face of the cavity facing the flat end face forms a first reflection surface for reflecting the light injected into the sensing cavity through the cavity back to the core, and the end face of the reference cavity away from the flat end face forms a second reflection surface for reflecting the light injected into the reference cavity back to the core. With this arrangement, the optical path difference of the two FBIs can be precisely controlled, thereby improving the sensitivity of the sensor while maintaining a compact sensor structure, solving the problem in related technologies that the sensitivity of the sensor is usually limited by the reduction in sensor size.

[0051] Figure 5 This is a schematic diagram of the structure of the sensor 9 detection system disclosed in the embodiment of this application. Figure 5 The embodiment of the present application also provides a sensor detection system, comprising: a sensor 9 as provided in the above embodiment, and a circulator 10, a broadband light source 11 and a spectrometer 12; the three interfaces of the circulator 10 are respectively connected to the sensor 9, the broadband light source 11 and the spectrometer 12; the output light of the broadband light source 11 is input to the sensor 9 through the circulator 10 for reflection, causing Fabry-Perot interference to form reflected light, and the reflected light is output to the spectrometer 12 through the circulator 10 for detection.

[0052] Specifically, since the reference cavity and the sensing cavity in the sensor 9 form a parallel structure, the broadband light source 11 turns on the supercontinuum light source, which is input into the reference cavity and the sensing cavity through the circulator 10. The output spectrum of the parallel structure of the reference cavity and the sensing cavity is composed of a series of high-frequency interference fringes with periodic amplitudes, and a low-frequency envelope is superimposed on the peak of the high-frequency signal. Among them, the low-frequency envelope in the combined reflection spectrum of the sensing cavity and the reference cavity is used as a reference for measuring parameters such as temperature or pressure. The low-frequency envelope is given by the difference between the optical path difference between the two, and is clearly visible in the combined reflection spectrum. High-sensitivity sensing is achieved by observing the wavelength shift of the crests and troughs of the low-frequency envelope.

[0053] A chamber is provided in the sensing cavity. When the chamber is filled with air, during sensing, the refractive index inside the sensing cavity changes, resulting in a change in the optical path difference, so that the output spectrum of the parallel structure of the reference cavity and the sensing cavity will drift significantly. The reference cavity is a solid structure and the optical path difference will not change. According to the vernier effect, when the reflection spectrum of the sensing cavity moves, the envelope of the combined spectrum of the two cavities will move exponentially, thereby amplifying the sensing sensitivity of the sensing cavity, and the sensitivity of the sensor 9 can also be significantly improved.

[0054] In the description of the present application, it should be noted that the terms "upper", "lower", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present application. Unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be an indirect connection through an intermediate medium, or it can be a connection between the two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present application can be understood according to the specific circumstances.

[0055] It should be noted that, in this application, relational terms such as "first" and "second" are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, the elements defined by the sentence "comprise a ..." do not exclude the presence of other identical elements in the process, method, article or device including the elements.

[0056] The above description is only a specific implementation of the present application, so that those skilled in the art can understand or implement the present application. Various modifications to these embodiments will be apparent to those skilled in the art, and the general principles defined herein can be implemented in other embodiments without departing from the spirit or scope of the present application. Therefore, the present application will not be limited to the embodiments shown herein, but will conform to the widest range consistent with the principles and novel features applied for herein.

Claims

1. A sensor, characterized in that: include: An optical fiber, wherein one end face of the core (1) of the optical fiber is a flat end face (11); A cavity assembly, the cavity assembly comprising a sensing cavity (2) and a reference cavity (3) located at the flat end surface (11), facing the flat end surface (11) and close to each other, a cavity (4) with an opening facing the flat end surface (11) is provided in the sensing cavity (2), and an optical path difference between the sensing cavity (2) and the reference cavity (3) is within a preset extremely small range; The inner side wall of the sensing cavity (2) and the flat end surface (11) are arranged to form the chamber (4); the end surface of the chamber (4) facing the flat end surface (11) forms a first reflection surface (7) for reflecting light incident into the sensing cavity (2) via the chamber (4) back to the fiber core (1); and the end surface of the reference cavity (3) away from the flat end surface (11) forms a second reflection surface (8) for reflecting light incident into the reference cavity (3) back to the fiber core (1).

2. The sensor according to claim 1, characterized in that The orthographic projection of the cavity component on the fiber core (1) covers the flat end surface (11).

3. The sensor according to claim 2, characterized in that The orthographic projection of the sensing cavity (2) on the fiber core (1) covers one half of the area of ​​the flat end surface (11).

4. The sensor according to claim 2, characterized in that The orthographic projection of the reference cavity (3) on the fiber core (1) covers half of the area of ​​the flat end surface (11).

5. The sensor according to claim 1, characterized in that The chamber (4) is filled with air or solution.

6. The sensor according to claim 1, characterized in that The cavity assembly further comprises: a reflecting portion (5), and both ends of the end surface of the reflecting portion (5) facing the flat end surface (11) extend toward the flat end surface (11) to form an extending portion (6), and the first reflecting surface (7) is the end surface of the reflecting portion (5) facing the flat end surface (11).

7. The sensor according to claim 6, characterized in that The extension portion (6) and the end surface of the reflection portion (5) facing the flat end surface (11) together form the chamber (4).

8. The sensor according to claim 1, characterized in that The cavity component is made of a thermally expandable material.

9. The sensor according to claim 8, characterized in that The thermally expandable material is photoresist or photosensitive resin polymer.

10. A sensor detection system, characterized in that: include: A sensor (9) as claimed in any one of claims 1 to 9, and a circulator (10), a broadband light source (11) and a spectrometer (12); The three interfaces of the circulator (10) are respectively connected to the sensor (9), the broadband light source (11) and the spectrometer (12); the output light of the broadband light source (11) is input to the sensor (9) through the circulator (10) for reflection, causing Fabry-Perot interference to form reflected light, and the reflected light is output to the spectrometer (12) for detection through the circulator (10).

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